JP2022158667A - Laser oscillator and laser processing device including the same - Google Patents

Abstract

To provide a laser oscillator which can determine whether or not a laser beam travels to the outside of a predetermined optical path with a simple structure.SOLUTION: A laser oscillator 100 includes at least: a laser light source 10 which emits a laser beam LB; a housing 70 which houses the laser light source 10 therein; and an abnormality determination device 40 which determines whether or not the laser beam LB travels to the outside of a predetermined optical path. The abnormality determination device 40 has at least a wiring member 50 and a disconnection detection part 60. The wiring member 50 is formed by covering a first wiring 51 having a folded structure with an insulation member 53 and is provided within the housing 70. The disconnection detection part 60 is connected to both ends of the first wiring 51 and detects whether or not the first wiring 51 is disconnected.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to a laser oscillator and a laser processing apparatus having the same.

2. Description of the Related Art Conventionally, a laser processing apparatus used for welding, cutting, etc. of workpieces emits a kW-class laser beam, so it is necessary to implement strict safety measures.

For example, Patent Document 1 discloses a safety device that reduces the output of a laser beam emitted from a laser oscillator to zero or a predetermined safe level when the door is opened in conjunction with opening and closing the door of a processing chamber. is disclosed. By configuring the laser processing device in this way, even if the door of the processing chamber is accidentally opened by the worker, the laser beam at a level that would damage the worker does not leak out, thus ensuring the safety of the worker. can be protected.

JP 2017-164773 A

However, there are cases where laser light leaks out of the laser oscillator unintentionally other than that disclosed in Patent Document 1. For example, in a laser oscillator in which a laser light source is arranged inside a housing, the laser light may travel outside the predetermined optical path inside the housing.

In this case, the housing may be melted and a hole may be formed, through which the laser light may leak out of the housing. Alternatively, laser light may leak through a gap in the housing. If such a thing occurs, there is a possibility that the safety of the operator who handles the laser processing device cannot be ensured.

The present disclosure has been made in view of this point, and an object of the present disclosure is to provide a laser oscillator and a laser processing apparatus having the same that can determine whether or not a laser beam is traveling outside a predetermined optical path with a simple configuration. to provide.

In order to achieve the above object, the laser oscillator according to the present disclosure includes a laser light source that emits laser light, a housing that accommodates the laser light source, and whether or not the laser light travels outside a predetermined optical path. and an abnormality determiner that determines whether or not the and a disconnection detector for detecting the presence or absence of disconnection.

A laser processing apparatus according to the present disclosure includes at least the laser oscillator, and a laser head that receives the laser light emitted from the laser oscillator and irradiates the laser light toward a work.

Advantageous Effects of Invention According to the present disclosure, it is possible to determine whether or not laser light is traveling outside a predetermined optical path with a simple configuration. Also, the safety of workers working around the laser oscillator can be ensured.

1 is a schematic configuration diagram of a laser processing apparatus according to Embodiment 1. FIG. It is a top view of a wiring member. FIG. 2B is a cross-sectional view taken along line IIB-IIB of FIG. 2A; It is explanatory drawing of the process in which a wiring member is attached to the outer periphery of an optical fiber. FIG. 11 is a schematic diagram showing a state in which a wiring member according to a modification is attached to the outer periphery of an optical fiber; 2 is a schematic configuration diagram of a laser processing apparatus according to Embodiment 2. FIG. FIG. 10 is a plan view of a wiring member according to Embodiment 2; FIG. 8 is a schematic diagram showing a state in which the wiring member according to Embodiment 2 is attached to the outer circumference of the optical fiber; FIG. 11 is a schematic configuration diagram of a laser oscillator according to Embodiment 3; FIG. 11 is a schematic configuration diagram of another laser oscillator according to Embodiment 3; FIG. 11 is a plan view of a wiring member according to Embodiment 4; FIG. 14 is a plan view of another wiring member according to Embodiment 4; FIG. 11 is a schematic configuration diagram of a laser oscillator according to Embodiment 4; FIG. 11 is a schematic configuration diagram of a laser processing apparatus according to Embodiment 5;

Hereinafter, embodiments of the present disclosure will be described based on the drawings. It should be noted that the following description of preferred embodiments is merely illustrative in nature and is not intended to limit the present disclosure, its applications or uses.

(Embodiment 1)
[Configuration of laser processing device and wiring member]
FIG. 1 shows a schematic configuration diagram of a laser processing apparatus according to this embodiment, FIG. 2A shows a plan view of a wiring member, and FIG. 2B shows a cross-sectional view taken along line IIB-IIB in FIG. 2A. FIG. 3 shows an explanatory diagram of a process of attaching a wiring member to the outer periphery of an optical fiber.

In the following description, the direction in which the laser beam LB is emitted from the laser head 200 in FIG. 1 may be called the Z direction. Also, the direction in which the laser modules LM1 to LM4 are arranged is sometimes referred to as the X direction. A direction intersecting with each of the X direction and the Z direction is sometimes called the Y direction.

As shown in FIG. 1, the laser processing apparatus 300 has a laser oscillator 100, a controller 80, a power supply 90, and a laser head 200. As shown in FIG. Also, the laser oscillator 100 has a laser light source 10 , an optical coupler 20 , an optical fiber 30 , an abnormality determiner 40 and a housing 70 .

The laser light source 10 has four laser modules LM1 to LM4. Laser modules LM1 to LM4 each have a plurality of semiconductor laser elements (not shown). Inside each of the laser modules LM1 to LM4, the laser beams emitted from each of the plurality of semiconductor laser elements are combined so that their optical axes are aligned or approach each other. Laser beams LB1 to LB4 (see FIGS. 8 and 9) emitted from laser modules LM1 to LM4, respectively, are coupled into one laser beam LB by optical coupler 20 and enter optical fiber 30. FIG. In this embodiment, the output power of the laser light emitted from each of the laser modules LM1 to LM4 is approximately several hundred W to several kW. However, this value can be changed as appropriate according to the specifications of laser processing.

The optical coupler 20 has a plurality of optical components (not shown) inside. Inside the optical coupler 20, the laser beams LB1 to LB4 emitted from the laser modules LM1 to LM4 are combined so that their optical axes match or approach each other.

The optical fiber 30 is partially housed inside the housing 70 and optically coupled to the optical coupler 20 . The optical fiber 30 is a circular optical member when viewed in cross section, and has a core 31 as an optical waveguide at its center (see FIG. 3). A clad 32 is provided coaxially with the core 31 in contact with the outer peripheral surface of the core 31 (see FIG. 3). The core 31 and the clad 32 are each made of synthetic quartz. The refractive index of the core 31 is set higher than that of the clad 32 . The outer peripheral surface of the clad 32 is covered with a protective film 33 for mechanically protecting the core 31 and clad 32 (see FIG. 3). The optical fiber 30 transmits the laser beam LB incident from the optical coupler 20 to the laser head 200 . Outside the housing 70, the amount of deformation of the optical fiber 30 increases as the laser head 200 moves. Therefore, outside the housing 70, the optical fiber 30 is often further covered with a flexible protective member (not shown).

The abnormality determiner 40 has a wiring member 50 , a first disconnection detector 61 and a determination section 81 . Note that, in the present embodiment, the determination unit 81 is incorporated in the controller 80 as a functional block.

As shown in FIG. 2A, the wiring member 50 has first wirings 51 and an insulating member 53 . The first wirings 51 include a plurality of first sub-wirings 51c arranged in parallel with each other with a space therebetween and extending linearly, and first connecting portions 51d connecting ends of the first sub-wirings 51c adjacent to each other. have. Also, each of the plurality of first sub-wirings 51c extends along the direction in which the optical fiber 30 extends. In the example shown in FIG. 2A, on the far side from the optical coupler 20, one end of one first sub-wiring 51c2 and one end of another adjacent first sub-wiring 51c1 are electrically connected at the first connection portion 51d. connected In addition, another second sub-wiring 51c1 is arranged on the side closer to the optical coupler 20, opposite to another first sub-wiring 51c1 with one first sub-wiring 51c2 interposed therebetween, and is adjacent to one first sub-wiring 51c2. The other end of the one sub-wiring 51c3 and the other end of the one first sub-wiring 51c2 are electrically connected at the first connecting portion 51d. By repeating this connection relationship, the first wiring 51 is provided so as to extend along the direction in which the optical fiber 30 extends between the first connecting portions 51d that are folded portions.

Also, the first wiring 51 is folded back an odd number of times. As a result, the first end 51a and the second end 51b, which are both ends of the first wiring 51, are arranged closer to the optical coupler 20. As shown in FIG. The first end 51a and the second end 51b are exposed from the insulating member 53 and electrically connected to the first disconnection detector 61 (see FIG. 1).

The insulating member 53 is a flexible member made of synthetic resin, for example, and covers each of the plurality of first sub-wirings 51c as shown in FIG. 2B.

Of the wiring member 50, the first sub-wiring 51c and the insulating member 53 are configured using a known flat cable. In this case, as shown in FIG. 2B, the diameter D2 (=0.98 mm) of the first sub-wiring 51c is sufficiently smaller than the diameter D1 (=0.32 mm) of the insulating member 53 covering the first sub-wiring 51c. is set to be Also, the pitch P (=1.27 mm) between the first sub-wirings 51c is set to be larger than the diameter D1. However, these values are not particularly limited to the values described above, and can be changed as appropriate.

Also, the first connection portion 51d is made of a conductor wire such as a copper wire. The conductor wire may be covered with an insulating film (not shown). When the wiring member 50 is configured using a flat cable, electrode pads (not shown) provided at both ends of the first sub-wiring 51c are electrically connected to each other by conductor wires as the first connecting portions 51d. can be In that case, the first connection portion 51d and the electrode pad are connected by a method such as soldering or crimping.

Moreover, as shown in FIG. 3, the wiring member 50 is wound around the optical fiber 30 so as to cover the outer circumference of the optical fiber 30 . Moreover, the wiring member 50 is attached and fixed to the optical fiber 30 by winding a fixing member (not shown), such as a spiral tube, around the wiring member 50 from the outside.

The first disconnection detector 61 detects disconnection of the first wiring 51 . As the first disconnection detector 61, for example, a voltage detection circuit that detects the voltage between terminals of the first wiring 51 is used. Alternatively, a current detection circuit that detects the current flowing through the first wiring 51 may be used.

Based on the output of the first disconnection detector 61, the determination unit 81 determines whether or not the first wiring 51 is disconnected. Further, when determining that the first wiring 51 is broken, the determination unit 81 determines that part of the laser beam LB is leaking from the optical fiber 30 . The determination result of the determination unit 81 is transmitted to the controller 80 . Note that the determination unit 81 may be configured by a known microcomputer, CPU (Central Processing Unit), or the like. Alternatively, a voltage comparator connected to a reference voltage source may be used to determine whether or not the first wiring 51 is broken. In this case, the output signal of the first disconnection detector 61 is input to one side of the voltage comparator, and if the difference between the output signal and a predetermined reference voltage is equal to or greater than a predetermined value, it is determined that the first wiring 51 is disconnected. be done.

In addition, in this embodiment, the first disconnection detector 61 may be called a disconnection detector 60 . Moreover, as will be described later, the wire breakage detection unit 60 can include a second wire breakage detector 62 (see FIGS. 5 and 9) and a determination unit 81 (see FIG. 12).

The laser head 200 is configured to receive the laser beam LB transmitted through the optical fiber 30 and irradiate the workpiece W with the laser beam LB. Also, the laser head 200 is held by a manipulator (not shown) and is configured to be movable in any of the XYZ directions. A plurality of optical components (not shown) such as a collimation lens and a condenser lens are arranged inside the laser head 200 . The laser beam LB entering the inside of the laser head 200 is converted into parallel light by a collimation lens, and then condensed at a predetermined condensing position by a condensing lens. Also, the position of the laser head 200 is adjusted by the manipulator so that the condensing position is positioned on the surface of the work W or in the vicinity thereof.

The controller 80 is configured as a known computer, and has the aforementioned microcomputer, CPU, memory, and the like. The controller 80 controls the operation of the laser oscillator 100 , specifically the operation of the power supply 90 connected to the laser light source 10 . Further, when a movable component (not shown) is arranged inside the housing 70, the controller 80 may be configured to control the operation of the movable component.

The power supply 90 supplies power to the laser light source 10 based on the output signal of the controller 80 or stops the power supply. Also, the power supply 90 adjusts the power supplied to the laser light source 10 based on the output signal of the controller 80 .

A laser processing apparatus 300 configured as shown in FIG. 1 is used to irradiate a workpiece W with a laser beam LB with a predetermined output and a predetermined trajectory, thereby performing desired laser processing. For example, laser welding, laser drilling, or laser cutting of the workpiece W can be performed.

[Regarding laser light leakage detection method and laser light output control]
In the work space where an operator operates the laser processing apparatus 300, safety standards regarding laser beam intensity are established (eg, IEC6860825-1, JIS C 6802). For example, in the work space, Class 1, which is a level without human influence, is required.

On the other hand, the space for arranging the optical fiber 30 is limited inside the housing 70, and the optical fiber 30 is bent and arranged as shown in FIG. Sometimes. In such a case, a predetermined stress or more may be applied to the optical fiber 30 at the bent portion. If the laser processing apparatus 300 continues to be used in this state, the optical fiber 30 may crack or break at the bent portion, and the laser beam LB may leak out of the protective coating 33 . Further, even if the optical fiber 30 is not bent, the optical fiber 30 may be cracked or damaged inside the housing 70 when mechanical shock is applied due to vibration from the surrounding environment.

If such an event occurs, part of the laser beam LB leaks out of the optical fiber 30 through the core 31 of the optical fiber 30 as an optical waveguide and irradiates the inner wall of the housing 70 . In an extreme case, the housing 70 may be melted to form a hole through which the laser beam LB may leak out of the housing 70 . Alternatively, part of the laser beam LB may leak from the optical fiber 30 and further leak to the outside through the gap in the housing 70 . Since the output of the laser beam LB reaches several kW to several tens of kW, even if a part of the laser beam LB leaks into the work space, it will no longer satisfy the safety standards described above.

Therefore, in the present embodiment, the abnormality determiner 40 is provided to detect whether or not the laser beam LB is leaking from the optical fiber 30 .

When the laser beam LB leaks out from the optical fiber 30, the wiring member 50 covering the outer circumference is partially irradiated with the laser beam LB. The first wiring 51 absorbs the laser beam LB and its temperature rises rapidly. When the first wiring 51 is fused, the disconnection of the first wiring 51 is detected by the first disconnection detector 61 . Furthermore, the determination unit 81 determines that the laser beam LB is leaking from the optical fiber 30 .

When it is determined that the laser beam LB is leaking from the optical fiber 30 , the controller 80 controls the output of the laser beam LB via the power supply 90 . Specifically, the controller 80 stops the power supply 90 to stop laser oscillation in the laser oscillator 100 . Alternatively, the controller 80 adjusts the power supplied from the power supply 90 to the laser light source 10 to reduce the power of the laser beam LB to a predetermined safe level, in this case Class 1 level. .

It should be noted that whether or not the first wiring 51 is disconnected is detected continuously during the operation of the laser oscillator 100, or detected at predetermined intervals.

[Effects, etc.]
As described above, the laser oscillator 100 according to the present embodiment includes the laser light source 10 that emits the laser light LB, the housing 70 that houses the laser light source 10, and the laser light LB leaking out from the optical fiber 30. and an abnormality determiner 40 that determines whether or not the laser beam LB has traveled outside the predetermined optical path.

The laser oscillator 100 further includes an optical fiber 30 that is optically coupled to the laser light source 10 and transmits the laser light LB to the outside of the housing 70 .

The abnormality determiner 40 has at least a wiring member 50 and a first disconnection detector 61 (disconnection detector 60). The wiring member 50 is formed by covering a first wiring 51 having a folded structure with an insulating member 53 . Also, the wiring member 50 is provided inside the housing 70 . The first disconnection detector 61 is connected to both ends of the first wiring 51 . In this embodiment, the wiring member 50 is provided so as to cover the outer circumference of the optical fiber 30 arranged inside the housing 70 .

Further, when the first disconnection detector 61 detects disconnection of the first wiring 51 during operation of the laser oscillator 100, the abnormality determiner 40 determines that the laser beam LB is traveling outside the predetermined optical path. is determined to have leaked out of the optical fiber 30 that transmits the laser beam LB.

According to this embodiment, it is possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path with a simple configuration. As a result, the surrounding environment of the laser oscillator 100 can satisfy the aforementioned safety standards. Also, the safety of workers working around the laser oscillator 100 can be ensured.

The first wiring 51 extends along the direction in which the optical fiber 30 extends. Furthermore, the first wiring 51 is folded back by an odd number. By doing so, the first wires 51 can be arranged at predetermined intervals around the outer periphery of the optical fiber 30 . As a result, it is possible to detect with high sensitivity whether or not part of the laser beam LB is leaking from the optical fiber 30 . Moreover, the first end 51a and the second end 51b, which are both ends of the first wiring 51, can be arranged close to each other, and the first wiring 51 can be easily connected to the first disconnection detector 61. FIG.

The wiring member 50 includes a plurality of first sub-wirings 51c that are arranged in parallel with each other with a space therebetween and each extend linearly. The insulating member 53 is a flexible member that covers the plurality of first sub-wirings 51c. In the first wiring 51, one end of one of the two adjacent first sub-wirings 51c and one end of the other first sub-wiring 51c adjacent to the first sub-wiring 51c are electrically connected to each other. at least a structure connected to

By doing so, the first wiring 51 having the folded structure can be easily configured. In particular, when using a known flat cable, the wiring member 50 can be obtained easily.

Moreover, the laser oscillator 100 further includes a controller 80 that controls the operation of the laser oscillator 100 . When the abnormality determiner 40 determines that the laser beam LB has leaked out of the optical fiber 30 , the controller 80 causes the laser oscillator 100 to stop laser oscillation. Alternatively, the controller 80 reduces the power of the laser beam LB to a predetermined safe level.

By configuring the laser oscillator 100 in this manner, the surrounding environment of the laser oscillator 100 satisfies the aforementioned safety standards, and the safety of workers working in the surrounding environment can be ensured.

A laser processing apparatus 300 according to this embodiment includes at least a laser oscillator 100 and a laser head 200 that receives a laser beam LB emitted from the laser oscillator 100 and irradiates the workpiece W with the laser beam LB.

According to this embodiment, the workpiece W can be subjected to desired laser processing. Also, the safety of workers working in the surrounding environment of the laser oscillator 100 can be ensured.

<Modification>
FIG. 4 schematically shows a state in which the wiring member according to this modification is attached to the outer circumference of the optical fiber. For convenience of explanation, in FIG. 4 and subsequent drawings, the same parts as in Embodiment 1 are given the same reference numerals, and detailed explanations thereof are omitted. 4, illustration of the insulating member 53 is omitted.

The wiring member 50 of this modification shown in FIG. 4 differs from the wiring member 50 shown in FIGS. 2A and 2B in the following points. In the wiring member 50 shown in FIG. 4, the first wiring 51 is spirally wound around the outer circumference of the optical fiber 30 and then folded back. A first end portion 51a and a second end portion 51b of the first wiring 51 are arranged adjacent to each other with a predetermined gap therebetween.

The wiring member 50, particularly the first wiring 51, is not particularly limited to the shape shown in the first embodiment, and may have another shape. For example, it may have a shape as shown in this modified example, and when the wiring member 50 shown in FIG. 4 is applied to the laser oscillator 100 and the laser processing apparatus 300 shown in FIG. It is possible to achieve the effect of That is, it is possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path with a simple configuration. Also, the safety of workers working around the laser oscillator 100 can be ensured. Desired laser processing can be performed on the workpiece W.

(Embodiment 2)
FIG. 5 shows a schematic configuration diagram of a laser processing apparatus according to this embodiment. FIG. 6 shows a plan view of the wiring member according to this embodiment, and FIG. 7 schematically shows a state in which the wiring member is attached to the outer circumference of the optical fiber. 7, illustration of the insulating member 53 is omitted.

The wiring member 50 and the laser oscillator 100 shown in this embodiment differ from the wiring member 50 and the laser oscillator 100 shown in the first embodiment in the following points. As shown in FIG. 5 , the abnormality determiner 40 further includes a second disconnection detector 62 that detects disconnection of the second wiring 52 . Also, the optical fiber 30 does not have a bent portion. However, the shape of the optical fiber 30 shown in FIG. 5 is merely an example, and it may be bent inside the housing 70 as shown in FIG. In the present embodiment, the first wire breakage detector 61 and the second wire breakage detector 62 constitute the wire breakage detector 60 .

Further, as shown in FIG. 6, the wiring member 50 has first wirings 51 and second wirings 52 . The second wiring 52 is covered with an insulating member 53 and electrically separated from the first wiring 51 .

The second wiring 52 has the same structure as the first wiring 51 . That is, the second wirings 52 are arranged in parallel with each other with a space therebetween, and each of the plurality of second sub-wirings 52c extending in a straight line is connected to the second connection portion connecting the ends of the second sub-wirings 52c adjacent to each other. 52d. Further, each of the plurality of second sub-wirings 52c extends along the direction in which the optical fiber 30 extends. On the far side from the optical coupler 20, one end of one second sub-wiring 52c and one end of another second sub-wiring 52c adjacent thereto are electrically connected at a second connecting portion 52d. Further, another second sub-wiring 52c is arranged on the side closer to the optical coupler 20, opposite to another second sub-wiring 52c with one second sub-wiring 52c interposed therebetween, and is adjacent to one second sub-wiring 52c. The other end of the two sub-wirings 52c and the other end of the one second sub-wiring 52c are electrically connected by the second connecting portion 52d. By repeating this connection relationship, the second wiring 52 is provided so as to extend along the direction in which the optical fiber 30 extends between the second connection portions 52d that are the folded portions.

Also, the second wiring 52 is folded back an odd number of times. As a result, the third end portion 52a and the fourth end portion 52b, which are both ends of the second wiring 52, are arranged closer to the optical coupler 20. As shown in FIG. The third end portion 52a and the fourth end portion 52b are exposed from the insulating member 53 and electrically connected to the second disconnection detector 62 (see FIG. 5).

When the laser beam LB leaks out from the optical fiber 30, the first wiring 51 absorbs the laser beam LB. detected. Further, when the second wiring 52 also absorbs the laser beam LB and the second wiring 52 melts, the disconnection of the second wiring 52 is detected by the second disconnection detector 62 . When the first wire breakage detector 61 and the second wire breakage detector 62 detect that the first wire 51 and the second wire 52 are broken, respectively, the determination unit 81 detects that the laser light LB is emitted from the optical fiber 30. Determine that it is leaking.

When it is determined that the laser beam LB is leaking from the optical fiber 30, the operation of the controller 80 is the same as that shown in the first embodiment.

It should be noted that whether or not the first wiring 51 and the second wiring 52 are disconnected is detected continuously during the operation of the laser oscillator 100, or detected at predetermined intervals.

In recent years, regarding the safety of various machines such as machine tools, the international standard ISO 13849-1 (hereinafter simply referred to as safety standard) has been established, and compliance with this standard is required. In particular, there is a strong demand to ensure that the overall safety function is not impaired even if a part of the safety function fails, that is, to satisfy Category 3 specified in the safety standards.

According to this embodiment, the same effects as those of the configuration shown in the first embodiment can be obtained. That is, it is possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path with a simple configuration. Also, the safety of workers working around the laser oscillator 100 can be ensured. Desired laser processing can be performed on the workpiece W.

Also in this embodiment, by using a known flat cable, the first wiring 51 and the second wiring 52 having the folded structure can be easily configured.

Further, according to the present embodiment, even if disconnection occurs for reasons other than irradiation of the laser beam LB to one of the first wiring 51 and the second wiring 52, the presence or absence of disconnection in the other wiring can be detected. more detected. This makes it possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path. That is, according to this embodiment, Category 3 indicated in the safety standard can be satisfied.

(Embodiment 3)
FIG. 8 shows a schematic configuration diagram of a laser oscillator according to this embodiment, and FIG. 9 shows a schematic configuration diagram of another laser oscillator.

The laser oscillator 100 shown in FIG. 8 differs from the laser oscillator 100 shown in FIG. 1 in the following points. First, the optical fiber 30 is not arranged inside the housing 70 . Inside the housing 70, reflection mirrors ML1 to ML4 are provided corresponding to the four laser modules LM1 to LM4, respectively. The laser beams LB1 to LB4 emitted from the laser modules LM1 to LM4 respectively are reflected by the reflecting mirrors ML1 to ML4 to change their optical paths and enter the optical coupler 20 . That is, the reflecting mirrors ML1 to ML4 are optical path changing components that change the optical paths of the laser beams LB1 to LB4.

The four laser beams LB1 to LB4 are combined by the optical coupler 20 and combined into one laser beam LB, as in the first embodiment. Also, the laser light LB combined by the optical coupler 20 is emitted to the outside of the housing 70 through a light exit window 71 provided in the housing 70 .

Further, the wiring member 50 is attached to the inner wall of the housing 70 on the extension line of the optical paths of the laser beams LB1 to LB4 incident on the reflecting mirrors ML1 to ML4.

Any one of the reflecting mirrors ML1 to ML4. For example, if the reflecting mirror ML1 drops from a predetermined position, the housing 70 is irradiated with the laser beam LB1 that is not reflected by the dropped reflecting mirror ML1. If such a thing occurs, the laser beam LB1 leaks out of the housing 70, as described above.

On the other hand, by configuring the laser oscillator 100 as shown in FIG. 8, the wiring member 50 is irradiated with the laser beam LB1 before the housing 70 is irradiated, and the first wiring 51 is disconnected. The first disconnection detector 61 serving as the disconnection detector 60 detects the disconnection of the first wiring 51, and the determination unit 81 determines that the laser beam LB1 is traveling outside the predetermined optical path. stops laser oscillation in the laser oscillator 100 . Alternatively, the output of the laser beam LB1 is lowered until it reaches a predetermined safe level.

In other words, the configuration shown in FIG. 8 can also achieve the same effects as the configuration shown in the first embodiment. With a simple configuration, it can be determined whether or not at least one of the laser beams LB1 to LB4 and the laser beam LB is proceeding outside the predetermined optical path. Also, the safety of workers working around the laser oscillator 100 can be ensured.

In addition, as shown in FIG. 8, the laser oscillator 100 may not be provided with the optical fiber 30 . The wiring member 50 is arranged outside the optical path of the laser beams LB1 to LB4 and/or the laser beam LB, and the abnormality determiner 40 determines whether at least one of the laser beams LB1 to LB4 and the laser beam LB is outside the predetermined optical path. It suffices if it is possible to determine whether or not the process is progressing.

Alternatively, the laser oscillator 100 may be configured as shown in FIG. The configuration shown in FIG. 9 differs from the configuration shown in FIG. 8 in that the optical fiber 30 is attached to the housing 70 and the laser light LB is transmitted to the outside of the housing 70 via the optical fiber 30 . Also, the laser beam LB emitted from the optical coupler 20 is optically coupled to the optical fiber 30 via the condenser lens FL. In this case, the outer circumference of the optical fiber 30 arranged inside the housing 70 is covered with the wiring member 50 , and the first disconnection detector 61 is connected to the wiring member 50 .

On the other hand, the wiring member 50 is also attached to the inner wall of the housing 70 on the extension line of the optical paths of the laser beams LB1 to LB4 incident on the reflecting mirrors ML1 to ML4. A second disconnection detector 62 is connected to the wiring member 50 attached to the inner wall of the housing 70 .

Output signals of the first disconnection detector 61 and the second disconnection detector 62 constituting the disconnection detection unit 60 are input to the determination unit 81 respectively. Based on these output signals, the determination unit 81 determines whether or not at least one of the laser beams LB1 to LB4 and the laser beam LB travels outside the predetermined optical path. In particular, according to the configuration shown in FIG. 9, it is also possible to determine whether an abnormality has occurred in the optical fiber 30 or in any one of the reflecting mirrors ML1 to ML4.

The determination unit 81 determines that at least one of the laser beams LB1 to LB4 and the laser beam LB is traveling outside the predetermined optical path, and the controller 80 stops laser oscillation in the laser oscillator 100. FIG. Alternatively, the output of the laser beam LB1 is lowered until it reaches a predetermined safe level.

In other words, the configuration shown in FIG. 9 can also achieve the same effects as the configuration shown in the first embodiment. With a simple configuration, it can be determined whether or not at least one of the laser beams LB1 to LB4 and the laser beam LB is proceeding outside the predetermined optical path. Also, the safety of workers working around the laser oscillator 100 can be ensured.

Also, in this embodiment. Although the wiring member 50 is attached to the inner wall of the housing 70, it may be arranged apart from the inner wall. The wiring member 50 may be provided inside the housing 70 on extension lines of the optical paths of the laser beams LB1 to LB4 incident on the reflecting mirrors ML1 to ML4, respectively.

In addition, in the configuration shown in FIG. 9 , the condensing lens FL may be incorporated in the optical coupler 20 . Also, the arrangement and types of optical path changing components are not limited to the configurations shown in FIGS. For example, some of the reflecting mirrors ML1 to ML4 may be replaced with polarizing beam splitters, or polarizing beam splitters may be added to the optical paths of any one of the laser beams LB to LB4. A polarizing beam splitter transmits light with a specific polarization and reflects light with other polarizations. For example, the reflecting mirror ML1 is placed in the optical path of the laser beam LB2 reflected by the reflecting mirror ML2. Similarly, a reflecting mirror ML3 is arranged in the optical path of the laser beam LB4 reflected by the reflecting mirror ML4. A polarizing plate is arranged in the optical path of the laser beam LB2 toward the reflecting mirror ML2. Similarly, a polarizing plate is arranged in the optical path of the laser beam LB4 directed to the reflecting mirror ML4. A polarizer transmits only light with a specific polarization. Replace the reflective mirrors ML2 and ML4 with polarizing beam splitters.

By doing so, it is possible to match the optical axes of the laser beams LB1 and LB2 directed to the optical coupler 20 . Similarly, the optical axes of the laser beams LB3 and LB4 directed toward the optical coupler 20 can be aligned. As a result, the spread of the laser beam LB can be suppressed, and the beam quality of the laser beam LB can be improved. Also, the internal configuration of the optical coupler 20 can be simplified.

(Embodiment 4)
FIG. 10 shows a plan view of a wiring member according to this embodiment, and FIG. 11 shows a plan view of another wiring member. FIG. 12 shows a schematic configuration diagram of a laser oscillator according to this embodiment.

10 and 11, the wiring pattern provided on the wiring member 50 includes one first wiring 54 extending linearly and one first wiring 54 extending substantially parallel thereto and extending linearly. , only the second wiring 55 is shown. However, it is not particularly limited to this, and a plurality of sets of the first wiring 54 and the second wiring 55 may be provided.

A wiring member 50 of the present embodiment shown in FIGS. 10 and 11 is different from the wiring member 50 of Embodiment 2 shown in FIG. The first through opening 53 a is formed through the insulating member 53 .

Specifically, a first through opening 53 a is provided between the first wiring 54 and the second wiring 55 . The first through opening 53 a is provided extending substantially parallel to the first wiring 54 and the second wiring 55 . Also, the first through opening 53 a has a predetermined length in a direction substantially parallel to the first wiring 54 and the second wiring 55 . The predetermined length is shorter than the length of the first wiring 54 and the length of the second wiring 55 in the same direction.

Both ends of the first wiring 54 and the second wiring 55 are connected to connectors 56a and 56b, respectively. Specifically, the first end 54a of the first wiring 54 and the first end 55a of the second wiring 55 are connected to the connector 56a. A second end 54b of the first wiring 54 and a second end 55b of the second wiring 55 are connected to the connector 56b. Although not shown, it goes without saying that the first wiring 54 and the second wiring 55 are covered with the insulating member 53 except for the connection portions with the connectors 56a and 56b.

A first end 54a and a second end 54b of the first wiring 54 are connected to a first disconnection detector 61 (not shown) through connectors 56a and 56b, respectively. A first end 55a and a second end 55b of the second wiring 55 are connected to a second disconnection detector 62 (not shown) through connectors 56a and 56b, respectively.

According to this embodiment, the same effects as those of the configuration shown in the second embodiment can be obtained. That is, it is possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path with a simple configuration. Also, the safety of workers working around the laser oscillator 100 can be ensured. Desired laser processing can be performed on the workpiece W.

Further, according to the present embodiment, even if disconnection occurs for reasons other than irradiation of the laser beam LB to either one of the first wiring 54 and the second wiring 55, the presence or absence of disconnection in the other wiring can be detected. more detected. This makes it possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path. That is, according to this embodiment, Category 3 indicated in the safety standard can be satisfied.

Further, according to the present embodiment, by providing the first through opening 53a between the first wiring 54 and the second wiring 55, short-circuiting between the wirings when the wiring member 50 is irradiated with the laser beam LB is suppressed. can. As shown in FIGS. 10 and 11, when the laser light LB is irradiated across the first wiring 54 and the second wiring 55, the first wiring 54 and the second wiring 55 melt at the irradiated portions, The first wiring 54 and the second wiring 55 may be short-circuited due to scattering. In addition, the wiring member 53 between the first wiring 54 and the second wiring 55 is carbonized by heat and altered so as to conduct current. As a result, the first wiring 54 and the second wiring 55 may be short-circuited. If such an inter-wiring short circuit occurs, it may not be possible to correctly detect disconnection of the first wiring 54 or the second wiring 55 .

On the other hand, according to the present embodiment, since the first through-opening 53a is provided at the position described above, the insulating member 53 holding the scattered portion of the first wiring 54 and the second wiring 55 is separated from the first wiring 54. It does not exist between the second wiring 55 . As a result, inter-wiring shorts can be suppressed between the first wiring 54 and the second wiring 55, and disconnection of the first wiring 54 and the second wiring 55 can be detected correctly.

In addition, as shown in FIG. 11, a second through opening 53b may be provided on the opposite side of the first through opening 53a with the first wiring 54 interposed therebetween. Further, a third through opening 53c may be provided on the side opposite to the first through opening 53a with the second wiring 55 interposed therebetween. In this case, the second through opening 53b and the third through opening 53c are arranged substantially parallel to the first through opening 53a and extend linearly in a direction parallel to the first wiring 54 or the second wiring 55, respectively. . Also, the lengths of the first to third through openings 53a, 53b, 53c in the extending direction are substantially the same.

As shown in FIG. 11, by further providing the second through-opening 53b and the third through-opening 53c, the effect of suppressing the short circuit between wirings can be further enhanced. It is particularly effective when there are a plurality of sets of the first wiring 54 and the second wiring 55 .

Note that the first wiring 54 does not have to be provided substantially parallel to the second wiring 55 . It is sufficient that the first wiring 54 and the second wiring 55 are arranged with a predetermined gap therebetween. Therefore, the first through opening 53 a does not necessarily have to extend in a direction substantially parallel to the first wiring 54 or the second wiring 55 . The first penetrating opening 53 a may be provided between the first wiring 54 and the second wiring 55 . Also, the first through opening 53a may have a predetermined length in the direction in which the first wiring 54 or the second wiring 55 extends.

Also, the second through opening 53b and the third through opening 53c do not necessarily have to extend in a direction substantially parallel to the first wiring 54 or the second wiring 55, either. Also, the second through opening 53b and the third through opening 53c may each have a predetermined length in the direction in which the first wiring 54 or the second wiring 55 extends.

Note that the predetermined length is preferably equal to or greater than the diameter (spot diameter) of the laser beam on the wiring member 50 . By doing so, an inter-wiring short circuit between the first wiring 54 and the second wiring 55 can be reliably suppressed.

Further, in the laser oscillator 100 shown in FIG. 12, the wiring member 50 shown in FIG. 10 or FIG. It is attached to the inner wall of 70. A first end 54a and a second end 54b of the first wiring 54 are connected to the first disconnection detector 61 via connectors 56a and 56b, respectively. A first end 55a and a second end 55b of the second wiring 55 are connected to the second disconnection detector 62 via connectors 56a and 56b, respectively.

According to the configuration shown in FIG. 12, the same effect as that of the configuration shown in FIG. 8 can be achieved. In other words, it can be determined with a simple configuration whether or not at least one of the laser beams LB1 to LB4 and the laser beam LB travels outside the predetermined optical path. Also, the safety of workers working around the laser oscillator 100 can be ensured. In addition, it can satisfy category 3 indicated in safety standards.

(Embodiment 5)
FIG. 13 shows a schematic configuration diagram of a laser processing apparatus according to the embodiment.

The laser oscillator 100 shown in FIG. 13 differs from the laser oscillator 100 of Embodiment 1 shown in FIG. 1 in that the first disconnection detector 61 is not provided inside the housing 70 .

As shown in this embodiment, the abnormality determiner 40 may be composed of the wiring member 50 and the determination section 81 . In this case, both ends of the first wiring 51 of the wiring member 50 are connected to the determination section 81 . That is, the determination unit 81 is configured as the disconnection detection unit 60 . In other words, the determination unit 81 directly detects whether or not the first wiring 51 is disconnected.

In this embodiment, when the determination unit 81 detects disconnection of the first wiring 51 during operation of the laser oscillator 100, the determination unit 81 determines that the laser beam LB is traveling outside the predetermined optical path. , it is determined that the laser light LB has leaked out of the optical fiber 30 that transmits the laser light LB.

According to this embodiment, the same effects as those of the configuration shown in the first embodiment can be obtained. That is, it is possible to determine whether or not the laser beam LB leaks from the optical fiber 30 and travels outside the predetermined optical path with a simple configuration. As a result, the surrounding environment of the laser oscillator 100 can satisfy the aforementioned safety standards. Also, the safety of workers working around the laser oscillator 100 can be ensured.

(Other embodiments)
A new embodiment can be obtained by appropriately combining each component shown in Embodiments 1 to 5 and modified examples. For example, the wiring member 50 shown in Embodiment 2 may be applied to the laser oscillator 100 shown in FIG. Also, the wiring member 50 shown in the second embodiment may be applied to the laser oscillator 100 shown in FIG. By doing so, the laser oscillator 100 shown in FIG. 8 can satisfy Category 3 indicated in the safety standard.

Also, the wiring member 50 shown in the second embodiment may be applied to the laser oscillator 100 shown in FIG. Alternatively, the wiring member 50 shown in the modified example may be arranged around the optical fiber 30 shown in FIG. 9, and the wiring member 50 shown in the second or fourth embodiment may be attached to the inner wall of the housing 70. In this case, two disconnection detectors are connected to the wiring member 50 arranged on the outer periphery of the optical fiber 30 . Two disconnection detectors are also connected to the wiring member 50 attached to the inner wall of the housing 70 . Therefore, based on the outputs of the four disconnection detectors, it is determined that at least one of the laser beams LB1 to LB4 and the laser beam LB is traveling outside the predetermined optical path. Further, when it is determined that the laser light is traveling outside the predetermined optical path, the controller 80 stops laser oscillation in the laser oscillator 100 . Alternatively, the output of laser light is lowered until it reaches a predetermined safe level.

Further, in Embodiments 2 to 4, as shown in Embodiment 5, the determination unit 81 may detect whether or not the first wirings 51, 54 and the second wirings 52, 55 of the wiring member 50 are disconnected. good. In this case, both ends of the first wirings 51 and 54 and the second wirings 52 and 55 are connected to the determination section 81 which is the disconnection detection section 60 . That is, in the laser oscillator 100 of the present disclosure, the abnormality determiner 40 has at least the first wiring 51 covered with the insulating member 53, the wiring member 50 provided inside the housing 70, and at least the first wiring and a disconnection detection unit 60 for detecting the presence or absence of disconnection of 51 . The disconnection detection unit 60 is configured by a first disconnection detector 61, a determination unit 81, or both. Further, it goes without saying that the disconnection detector 60 can include the second disconnection detector 62 depending on the configuration of the laser oscillator 100 .

Although the laser light source 10 is composed of four laser modules LM1 to LM4, it is not particularly limited to this. The number of laser modules can be appropriately changed according to the output of the laser beam LB required for laser processing. Also, instead of using multiple laser modules, a single laser light source, such as a solid-state laser or a _CO2 laser, may be used. Moreover, when using a single laser light source, the optical coupler 20 is omitted. However, an optical component for optically coupling the laser beam LB to the optical fiber 30, such as a condensing lens FL shown in FIG. 9, is required.

Further, in the specification of the present application, an example in which the determination unit 81 is incorporated as a functional block in the controller 80 is shown, but the present invention is not particularly limited to this. The determination unit 81 may be configured by a computer, microcomputer, or CPU separate from the controller 80, or may be incorporated in a separate computer, microcomputer, or CPU.

Also, the structure of the optical fiber 30 is not limited to the example shown in FIG. 3, and may be, for example, a multi-core structure. In this case, another core (not shown) may be provided in contact with the outer peripheral surface of the clad, and another clad (not shown) may be provided in contact with the outer peripheral surface of the separate core.

Also, the first disconnection detector 61 and the second disconnection detector 62 may be provided outside the housing 70, respectively.

According to the laser oscillator of the present disclosure, it is possible to determine whether or not the laser beam is traveling outside the predetermined optical path with a simple configuration. be.

10 laser light source 20 optical coupler 30 optical fiber 31 core 32 clad 33 protective film 40 abnormality determiner 50 wiring members 51, 54 first wiring 51c first sub-wiring 52, 55 second wiring 52c second sub-wiring 53 insulating member 60 Disconnection detector 61 First disconnection detector 62 Second disconnection detector 70 Housing 71 Light emission window 80 Controller 81 Judgment unit 90 Power supply 100 Laser oscillator 200 Laser head 300 Laser processing device LB Laser beams LB1 to LB4 Laser beams LM1 to LM4 Laser modules ML1 to ML4 Reflector (optical path changing part)
W work

Claims (12)

a laser light source that emits laser light;
a housing that accommodates the laser light source therein;
an abnormality determiner that determines whether or not the laser beam is proceeding outside a predetermined optical path;
with at least
The abnormality determiner is
a wiring member provided inside the housing, wherein the first wiring is covered with an insulating member;
and a disconnection detector that detects whether or not there is disconnection of at least the first wiring. The laser oscillator according to claim 1,
When the disconnection detector detects disconnection of the first wiring during operation of the laser oscillator, the abnormality determiner determines that the laser beam is traveling outside the predetermined optical path. laser oscillator. 3. The laser oscillator according to claim 1, wherein
further comprising an optical fiber that is optically coupled to the laser light source and transmits the laser light to the outside of the housing;
The laser oscillator, wherein the wiring member covers the outer periphery of the optical fiber arranged inside the housing. The laser oscillator according to claim 3,
The first wiring has a folded structure and is spirally wound around the outer circumference of the optical fiber,
A laser oscillator, wherein both ends of the first wiring are arranged adjacent to each other with a predetermined interval therebetween. The laser oscillator according to any one of claims 1 to 4,
An optical path changing component for changing the optical path of the laser beam is provided inside the housing,
The laser oscillator according to claim 1, wherein the wiring member is arranged inside the housing on an extension line of the optical path of the laser beam incident on the optical path changing component. The laser oscillator according to any one of claims 1 to 5,
the wiring member includes a plurality of first sub-wirings arranged in parallel with each other at intervals and extending linearly;
the insulating member is a flexible member that covers the plurality of first sub-wirings;
Of the two adjacent first sub-wirings, the first wiring electrically connects one end of one of the first sub-wirings to one end of the other first sub-wiring adjacent to the one end. 1. A laser oscillator, characterized in that it has at least a folded structure. The laser oscillator according to any one of claims 1 to 6,
The disconnection detection unit includes at least a first disconnection detector connected to both ends of the first wiring,
When the first disconnection detector detects disconnection of the first wiring during operation of the laser oscillator, the abnormality determiner determines that the laser beam is traveling outside the predetermined optical path. A laser oscillator characterized by: The laser oscillator according to claim 7,
The wiring member further includes a second wiring covered with the insulating member and electrically separated from the first wiring,
The disconnection detection unit further includes a second disconnection detector that detects disconnection of the second wiring,
When the first disconnection detector detects disconnection of the first wiring and the second disconnection detector detects disconnection of the second wiring during operation of the laser oscillator, the abnormality determiner detects the disconnection of the second wiring. A laser oscillator, wherein it is determined that the laser light is traveling outside the predetermined optical path. The laser oscillator according to claim 8,
The wiring member has at least one set of the first wiring and the second wiring arranged at a predetermined interval from the first wiring,
The insulating member positioned between the first wiring and the second wiring included in the same group has a first through opening having a predetermined length in the extending direction of the first wiring or the second wiring. is provided. The laser oscillator according to claim 9,
A second through opening is provided on the side opposite to the first through opening with the first wiring interposed therebetween,
A third through-opening is provided on the opposite side of the first through-opening across the second wiring,
The laser oscillator, wherein the second through-opening and the third through-opening each have a predetermined length in the extending direction of the first wiring or the second wiring. The laser oscillator according to any one of claims 1 to 10,
further comprising a controller for controlling the operation of the laser oscillator,
When the abnormality determiner determines that the laser beam is traveling outside the predetermined optical path,
The laser oscillator, wherein the controller stops laser oscillation in the laser oscillator or lowers the output of the laser light to a predetermined safe level. a laser oscillator according to any one of claims 1 to 11;
A laser processing apparatus comprising at least a laser head that receives the laser beam emitted from the laser oscillator and irradiates the laser beam toward a work.

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