JP2022124731A - Substrate housing container - Google Patents

Abstract

To provide a substrate housing container capable of expanding a function of a fixing member for appropriately fixing a diffusion unit, and of further improving quality of the fixing member.SOLUTION: A substrate housing container that incorporates a pair of diffusion units for diffusing and injecting a purge gas in a direction of semiconductor wafers, at a rear part inside a container main body 1 in which the semiconductor wafers are aligned and housed, comprises: a C-ring 10 to be engaged with a unit clip 3 penetrating from an upper end of each diffusion unit through an upper part of a back wall of the container main body 1 and exposed to the exterior; and a cover 20 surrounding and protecting the C-ring 10. The C-ring 10 is formed with a positioning recess 11 and a positioning convex 12. An inner peripheral surface of the cover 20 is formed with a positioning convex 25 fitting the recess 11 of the C-ring 10, and a positioning recess 26 fitting the convex 12 of the C-ring 10. Thereby, the C-ring 10 and the cover 20 are prevented from being dropped off, and the unit clip 3 can be prevented from being damaged, which can achieve an enlarged function and further improvement in quality.SELECTED DRAWING: Figure 2

Description

The present invention relates to a substrate storage container such as a FOUP used for transporting and storing semiconductor wafers in a semiconductor factory.

A conventional substrate storage container includes a container body for storing a plurality of semiconductor wafers in an arrayed manner and a lid for opening and closing an open front surface of the container body, and is used as a FOUP (Front Opening Unify Pod) in a semiconductor factory. (See Patent Documents 1 and 2).
The container body is formed into a front open box, and a plurality of pairs of support pieces for horizontally supporting the semiconductor wafers are provided on the inner surfaces of both side walls in the vertical direction. A chamber-type diffusion unit that injects a purge gas in a direction is provided. By injecting the purge gas from a plurality of diffusion units, surface oxidation and contamination of the semiconductor wafer and corrosion of the wiring are prevented.

Each diffusion unit is formed in a hollow, vertically long, substantially columnar shape, and has a plurality of injection holes arranged in a vertical direction on the peripheral wall for diffusing and injecting a purge gas such as nitrogen gas through a filter. connected to the air supply valve. As shown in FIGS. 11 and 12, a unit clip 3 that penetrates the back wall 2 of the container body 1 is attached to the upper portion of the diffusion unit, and the exposed portion 7 of the unit clip 3 exposed to the outside of the container body 1 is attached. The upper portion of the diffusion unit is fixed and positioned by inserting the C-ring 10A.

When the purge gas is injected from the injection port of such a diffusion unit, the purge gas collides between two adjacent semiconductor wafers, the surface of the semiconductor wafer, and the back of the peripheral edge of the semiconductor wafer, and is split vertically. The air in the container body 1 is purged to the outside from the exhaust valve in front of the bottom plate of the container body 1 and replaced.

In the above structure, when manufacturing the container body 1 of the substrate storage container, the lower portions of the diffusion units are respectively fitted to the pair of air supply valves of the container body 1, and the unit clip 3 is attached to the upper portion of each diffusion unit. By inserting the tip end of the lever into the upper part of the rear wall of the container body 1 and inserting the C ring 10A into the exposed portion 7 of the tip end of the unit clip 3 exposed outside the container body 1, the diffusion unit can be positioned and fixed. A container body 1 with a built-in diffusion unit can be manufactured. A plurality of manufactured container bodies 1 are successively mounted on a shelf board or the like, combined with a lid body, housed in a cardboard box for packaging, and shipped.

WO2018/047541 JP 2018-198332 A

The conventional substrate storage container is constructed as described above, and the C-ring 10A is fitted into the exposed portion 7 of the unit clip 3 exposed outside the container body 1, thereby preventing the upper portion of the diffusion unit from rattling. The diffusion unit can be properly positioned and fixed. The unit clip 3 and the C ring 10A play an important role of positioning and fixing the diffusion unit, so they are formed with high quality and safety. If it is formed so that it will not fall off or be damaged even if an undesirable situation occurs, it can be expected to expand its functions and further improve its quality.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate storage container capable of expanding the function of a fixing member for appropriately fixing a diffusion unit and further improving the quality thereof.

In order to solve the above-mentioned problems, the present invention incorporates a diffusion unit for injecting a purge gas in the direction of the substrate in the container body for housing the substrate,
A locking member attached to a fixing member exposed to the outside through the container body from the diffusion unit; and a cover member surrounding the locking member. The cover member is formed with a positioning projection that fits into the recess of the locking member, and a positioning recess that fits into the projection of the locking member.

The container body can be configured as a front open box with an open front, a diffusion unit can be erected in the rear of the interior, and a fixing member penetrating the peripheral wall of the container body can be attached to the top of the diffusion unit.
Alternatively, the locking member may be formed in a substantially C-shape to be fitted into the mounting and fixing member of the diffusion unit, the gap between the two ends thereof being a recess, and the outer peripheral surface of the locking member may be formed with a projection.
Alternatively, the cover member may be made of a resin-containing material so as to be endlessly fitted to the locking member, and the positioning protrusions and positioning recesses may be formed on the inner peripheral surface of the cover member at intervals.

Further, it is possible to form a plurality of interference claws on the inner peripheral surface of the cover member, the slanted surfaces of which contact the outer peripheral edge of the locking member.
Further, it is possible to form a plurality of gap dividing protrusions that contact the outer peripheral surface of the locking member on the inner peripheral surface of the cover member.
Further, it is also possible to make the outer peripheral surface of the cover member slanted so as to widen from the surface direction of the cover member toward the back surface facing the peripheral wall of the container body.

Moreover, it is preferable that the front and back surfaces of the cover member are different, and the erroneous fitting prevention protrusion is formed on the surface of the cover member.
Furthermore, it is preferable to form a plurality of gap partition pieces contacting the peripheral wall of the container body at predetermined intervals on the back surface of the cover member.

Here, the substrate in the claims includes at least the necessary number of semiconductor wafers, dummy wafers, and the like. Further, the container body includes at least a FOUP (Front Opening Unify Pod) for in-process use, a FOSB (Front Opening Shipping Box) for transportation, and the like. The peripheral walls of the container body include the ceiling, back wall, side walls, or borders thereof. The diffusion unit may be singular or plural.

The mounting fixing member may be leaf spring type, paper strip type, rod type, or a combination thereof. Also, the generally C-shaped locking member includes C-shaped and generally similar shapes. It is preferable that the recessed portion of the locking member be positioned upward and the convex portion be positioned downward. Also, the cover member can be formed in a chromatic color or an achromatic color different from that of the locking member. It is preferable that the outer peripheral surface of the cover member and the peripheral surface of the erroneous fitting prevention projection are substantially flush with each other, but they do not have to be aligned.

According to the present invention, the cover member surrounds the locking member to protect it from the external environment. Therefore, even if the cover member is subjected to an external impact, the cover member deforms to absorb the impact, and the fixing member is secured. It is possible to prevent deformation or damage of the mounting and fixing member and the locking member, and the dropping of the locking member from the mounting and fixing member. Further, when the positioning projections of the cover member are fitted into the recesses of the locking member, and the positioning recesses of the cover member are fitted into the projections of the locking member, the cover member should be fitted to the locking member while being properly positioned. can be done.

According to the present invention, the locking member includes the locking member attached to the fixing member exposed to the outside through the container body from the diffusion unit, and the cover member surrounding the locking member. The cover member is formed with a positioning protrusion that fits into the recess of the locking member, and a positioning recess that fits into the protrusion of the locking member. There is an effect that it is possible to expand the function and further improve the quality of the fixing member to be fixed to.

According to the second aspect of the invention, the mounting fixing member is attached to the upper part of the diffusion unit and is inserted through the peripheral wall of the container body, and the locking member is fitted into the exposed portion of the mounting fixing member exposed outside the container body, By fitting the locking member and the cover member together, fitting the positioning projections of the cover member into the recesses of the locking member, and fitting the positioning recesses of the cover member into the projections of the locking member, the inner rear of the container body can be opened. The upper part of the diffusion unit can be fixed to prevent rattling, vibration, and the like.

According to the third aspect of the invention, the locking member can be easily fitted into the mounting and fixing member of the diffusion unit by using the gap between both ends of the locking member. In addition, since the gap between both end portions of the locking member is used as it is as the recessed portion, it is possible to save the trouble of forming the recessed portion in the outer peripheral surface of the locking member.

According to the fourth aspect of the invention, since the cover member is an endless single piece, there is no need to assemble the cover member with a plurality of parts. Further, by using the positioning protrusions and the positioning recesses, it is possible to fit the cover member on the outer side of the locking member and prevent the locking member from being damaged due to direct contact with the external environment.

According to the fifth aspect of the invention, since the outer peripheral edge of the locking member comes into contact with the slopes of the plurality of interference claws and is supported without rattling, even if the cover member comes into contact with the external environment, external shocks are applied. Even if it acts, it is possible to mitigate the impact applied to the mounting fixing member and the locking member, and it is possible to prevent damage to the mounting fixing member and the locking member and maintain the quality.

According to the sixth aspect of the present invention, instead of the entire inner peripheral surface of the cover member and the entire outer peripheral surface of the locking member contacting each other, the plurality of gap dividing protrusions and the outer peripheral surface of the locking member partially contact each other. However, since the contact area between the plurality of gap dividing protrusions and the locking member is reduced, even if an impact is applied from the outside, it is possible to suppress the impact from acting on the mounting and fixing member and the locking member. This makes it possible to prevent damage to the fixing member and the locking member. In addition, since a gap for fluid flow can be defined between the cover member and the locking member, for example, when the container body is washed, little liquid or the like remains between the cover member and the locking member. .

According to the seventh aspect of the invention, since the outer peripheral surface of the cover member is not flat but inclined, even if an impact is applied to the cover member from the outside, the impact energy can be dispersed and deflected. Reduction of the impact acting on the locking member from the cover member can be expected.
According to the eighth aspect of the invention, for example, when the surface of the cover member is erroneously directed toward the peripheral wall of the container body, the erroneous fitting prevention protrusion comes into contact with the peripheral wall of the container body, and the posture of the cover member becomes unstable. As a result, it becomes difficult to fit and position the locking member. Therefore, the proper orientation of the cover member can be grasped by the erroneous fitting prevention projection, and assembly failure can be eliminated by properly fitting the cover member to the locking member.

According to the ninth aspect of the invention, not the entire back surface of the cover member contacts the peripheral wall of the container body, but the plurality of gap partitioning pieces of the cover member partially contact. It is possible to form a gap for fluid flow between Therefore, even when the container body is washed, little cleaning liquid remains between the peripheral wall of the container body and the cover member.

FIG. 4 is a perspective explanatory view schematically showing a C-ring and a cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is an explanatory diagram schematically showing a C-ring and a cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is an explanatory side view schematically showing a gap between the back wall of the container body and the cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is an explanatory plan view schematically showing the surface of the cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is a back explanatory view schematically showing the back surface of the cover in the embodiment of the substrate storage container according to the present invention; FIG. 2 is a perspective explanatory view schematically showing the surface side of the cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is a perspective explanatory view schematically showing the back surface side of the cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is an explanatory view of a main part schematically showing the relationship between the outer peripheral surface of the cover and the erroneous fitting prevention protrusion in the embodiment of the substrate storage container according to the present invention; FIG. 4 is a cross-sectional explanatory view schematically showing a unit clip, a C-ring, and a cover in the embodiment of the substrate storage container according to the present invention; FIG. 4 is an explanatory view schematically showing the relationship between the rear wall of the container body and the erroneous fitting prevention protrusion of the cover in the embodiment of the substrate storage container according to the present invention. FIG. 10 is an explanatory diagram schematically showing a state in which a C-ring is fitted into an exposed portion of a unit clip of a conventional substrate storage container; It is cross-sectional explanatory drawing which shows typically the state which the impact acted on the C ring of the substrate storage container in the past.

Preferred embodiments of the present invention will now be described with reference to the drawings. As shown in FIGS. A C-ring 10 for fixing which is inserted into a unit clip 3 exposed to the outside through the container body 1 from each diffusion unit, and a C-ring 10 for fixing. , and an endless cover 20 that surrounds and protects the C-ring 10. The C-ring 10 is formed with a concave portion 11 and a convex portion 12 for positioning, and the cover 20 is fitted into the concave portion 11 of the C-ring 10. By forming the positioning projections 25 that match and forming the positioning recesses 26 that fit into the projections 12 of the C-ring 10, the SDGs adopted at the United Nations Summit (United Nations International Contribute to the achievement of Goal 9 of the Sustainable Development Goals, which consist of 17 global goals and 169 targets (achievement criteria).

The semiconductor wafers are not shown, but are made of, for example, thin and fragile high-quality silicon wafers of φ300 mm, and circuit patterns are formed on the surfaces thereof. supported horizontally.

The container body 1 is molded from a molding material containing a predetermined resin into a front open box with an open front surface. A pair of left and right support pieces are arranged vertically at a predetermined interval, and each support piece extends in the front-rear direction to support the side of the peripheral edge of the semiconductor wafer. function like this. Examples of the resin in the molding material of the container body 1 include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, and liquid crystal polymer. and the like.

In addition to the resins described above, the molding material for the container body 1 includes conductive materials such as carbon black, acetylene black, carbon fibers, carbon powder, carbon nanotubes, and conductive polymers, and various antistatic materials such as anions, cations, and nonionics. Agents are added as needed. In addition, benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based UV absorbers are added, and glass fibers for improving rigidity are selectively added.

A lid is detachably fitted to the open front of the container body 1 via a frame-shaped seal gasket. A vertically elongated observation window is selectively insert-molded into a generally rectangular front view. In addition, on both sides of the rear portion of the bottom plate of the container body 1, air supply valves are installed to guide the purge gas from the outside of the container body 1 to the diffusion unit, respectively. An exhaust valve for exhausting is attached to each. A bottom plate facing most of the lower surface of the bottom plate is detachably screwed to the bottom plate of the container body 1 .

A plurality of diffusion units are erected on both sides of the interior rear of the container body 1, and the diffusion units diffuse and inject the purge gas in the direction of the semiconductor wafers stored in order, thereby oxidizing the surface of the semiconductor wafer, contamination, To effectively prevent corrosion of wiring. Each diffusion unit includes a vertically elongated, substantially tray-shaped rear plate located on the rear side of the container body 1, and a vertically elongated, substantially tray-shaped front plate fitted to the open front of the rear plate. It is detachably connected to the air supply valve 1 in an offset state and stands up.

A filter for filtering is built in between the rear plate and the front plate of the diffusion unit, and the front plate is bent to have a substantially V-shaped cross section. A plurality of injection holes are arranged side by side, and each injection hole is formed in a laterally long groove. As shown in FIGS. 1 to 3 and 9, a unit clip 3 is attached to the upper end of the diffusion unit and penetrates the upper portion of the rear wall of the container body 1. The unit clip 3 is exposed outside the container body 1. A C-ring 10 is detachably fitted to the exposed portion 7 from the outside to exert a retaining function, so that the upper portion of the diffusion unit is fixed and positioned without rattling.

The unit clip 3 is molded from a polycarbonate resin or the like having excellent impact resistance and strength. This unit clip 3, as partially shown in FIG. A columnar shaft portion 5 penetrates through an O-ring 4 in the upper portion, and a tip end 6 of the shaft portion 5 exposed to the outside of the container body 1 is formed to bulge into a substantially mushroom shape to prevent the C-ring 10 from falling off. , and the tip 6 of the shaft portion 5 is exposed from the surface of the cover 20 .

As shown in FIGS. 1, 2 and 9, the C ring 10 is made of a material containing a predetermined resin, for example, and is curved into a substantially C shape that sandwiches the exposed portion 7 of the unit clip 3 so that it can be expanded. is visibly exposed to the outside, and the rear surface faces the upper portion of the rear wall of the container body 1 . The resin in the material of the C ring 10 is not particularly limited, but may be polycarbonate resin or highly functional polyetheretherketone (PEEK) resin excellent in heat resistance, mechanical strength, and the like.

The C-ring 10 is formed, for example, to have a thickness of about 4 mm, and the gap between both ends is oriented upward toward the ceiling of the container body 1 , and this gap is partitioned into a concave portion 11 for positioning the cover 20 . On the outer peripheral surface of the C-ring 10, a projection 12 for positioning the cover 20 directed toward the bottom plate of the container body 1 is formed so as to protrude radially outward. ° away. When the C-ring 10 is molded, for example, the protrusion 12 is rotated as necessary when it is fitted into the exposed portion 7 of the unit clip 3 using a side gate that connects the C-ring 10, which is a product portion, and the runner. used for operations.

As shown in FIGS. 1 to 10, the cover 20 is made of a material containing a predetermined resin, for example, and is formed into a hollow, substantially egg-shaped or substantially cam-shaped plate that is detachably fitted to the C-ring 10 from the outside. The front surface is visible and the back surface faces the upper portion of the back wall of the container body 1, and the tapered narrow portion 21 faces downward. The resin in the material of the cover 20 is not particularly limited, but similar to the C-ring 10, polycarbonate resin and polyetheretherketone resin, which are excellent in impact resistance, and polyacetal (POM), which contributes to slipperiness, are used. This applies to resins, etc. The cover 20 is formed, for example, to have a thickness of about 4.6 mm, and from the viewpoint of clearly identifying the position with respect to the C ring 10, for example, when the C ring 10 is black, a color different from that of the C ring 10, specifically, It is selectively molded in colors such as blue, red, and yellow.

A plurality of interference claws 22 are arranged at predetermined intervals in the circumferential direction of the inner peripheral surface of the cover 20 and support the inclined surface 23 in contact with the outer peripheral edge of the C-ring 10 . The interfering claws 22 function to prevent the C-ring 10 from rattling or the like. The interference claw 22 is formed to have a tapered, substantially triangular or substantially trapezoidal cross-section, and has high strength. However, from the viewpoint of simple and easy contact with the C-ring 10, elasticity is imparted as necessary. .

In the circumferential direction of the inner peripheral surface of the cover 20, a plurality of gap dividing protrusions 24 that contact the outer peripheral surface of the C-ring 10 are arranged and formed at predetermined intervals. It is integrally formed in a substantially cylindrical shape extending to. Such a plurality of gap dividing protrusions 24 function to secure a gap C of about 0.5 mm between the C-ring 10 and the cover 20, which contributes to the removal of the cleaning liquid and the buffer action.

A positioning protrusion 25 is formed on the upper portion of the inner peripheral surface of the cover 20 so as to protrude radially inward to fit into the recessed portion 11 of the C-ring 10 to prevent misalignment. A positioning recess 26 is formed to fit into the projection 12 of the ring 10 to prevent misalignment.

The outer peripheral surface 27 of the cover 20 is tapered so as to gradually widen from the front surface of the cover 20 toward the rear surface facing the rear wall 2 of the container body 1 . The inclination angle θ of the outer peripheral surface 27 of the cover 20 is 35° or more and 60° or less, preferably 38° or more and 56° or less, more preferably 38° or more and 40° or less, still more preferably, from the viewpoint of deflecting the impact applied from the outside. should be around 38° (see Fig. 3).

The front and back surfaces of the cover 20 are formed in patterns and shapes different from each other. An erroneous fitting preventing protrusion 28 of approximately truncated pyramidal shape is formed to protrude by about 1.8 mm, and the outer peripheral surface of the erroneous fitting preventing protrusion 28 is inclined so as to be substantially aligned with the outer peripheral surface 27 of the cover 20 . aligned to one. As shown in FIGS. 4 to 7, the number of erroneous fitting prevention projections 28 may be increased or decreased to one, two, three, or the like, as required.

Furthermore, on the back surface of the cover 20, a plurality of gap partitioning pieces 29 integral with the plurality of interference claws 22 and the positioning protrusions 25 are arranged at predetermined intervals, and each gap partitioning piece 29 has a trapezoidal shape or the like in plan view. is formed into a polygon of Such a plurality of gap partitioning pieces 29 are in contact with the upper outer surface of the back wall of the container body 1 , so that the gap C for cleaning liquid removal between the upper back wall of the container body 1 and the back surface of the cover 20 is 0.00. It functions to secure about 5 mm.

In the above structure, when manufacturing the container body 1 of the substrate storage container, first, the lower portions of the diffusion units are offset and connected to the pair of air supply valves of the container body 1, respectively, and the unit is attached to the upper end portion of each diffusion unit. The bent portion of the clip 3 is attached, the shaft portion 5 side is inserted into the upper portion of the rear wall of the container body 1, the cover 20 is fitted over the shaft portion 5, and the positioning convex portion 25 is positioned upward to prevent erroneous fitting. The projecting portion 28 is exposed in the direction opposite to the rear wall so as to be visible, and the C ring 10 as a retaining ring is fitted in the exposed portion 7 of the shaft portion 5 exposed to the outside of the container body 1 from the outside lateral direction. At this time, the concave portion 11 of the C ring 10 is preferably positioned upward from the viewpoint of preventing the C ring 10 and the cover 20 from being deformed or damaged due to the contact of the cover 20 with the external environment.

After fitting the C ring 10 into the exposed portion 7 of the unit clip 3 in this manner, the C ring 10 and the cover 20 are press-fitted together, and the positioning projections 25 of the cover 20 are fitted into the recesses 11 of the C ring 10. The positioning recesses 26 of the cover 20 are fitted into the protrusions 12 of the C-ring 10 and aligned, and the plurality of gap partitioning pieces 29 of the cover 20 are brought into contact with the upper part of the rear wall of the container body 1, whereby the container with the built-in diffusion unit is formed. The body 1 can be manufactured.

At this time, since the outer peripheral edge of the C-ring 10 is in line contact with the inclined surface 23 having a guide function of the plurality of interference claws 22 and is supported in a stable posture, the C-ring 10 is effectively prevented from rattling. , the impact on the C-ring 10 from the outside can be mitigated. Also, unless the positioning projections 25 of the cover 20 are fitted into the recesses 11 of the C-ring 10 and the positioning recesses 26 of the cover 20 are not fitted into the projections 12 of the C-ring 10, the cover 20 is properly press-fitted into the C-ring 10. Therefore, it is highly expected that the cover 20 can be properly fitted.

Further, when the erroneous fitting prevention projection 28 is single and the surface of the cover 20 is erroneously directed toward the upper portion of the rear wall of the container body 1 , the erroneous fitting prevention projection 28 comes into contact with the upper portion of the rear wall of the container body 1 . , the cover 20 is tilted and its posture deteriorates, the C ring 10 cannot be brought into line contact with the plurality of interference claws 22 of the cover 20, and proper fitting between the C ring 10 and the cover 20 becomes impossible ( See Figure 10). Therefore, depending on the position and orientation of the erroneous fitting prevention protrusion 28, it is possible to effectively prevent erroneous fitting of the front and back surfaces of the cover 20, and it is highly expected that the assembly work will be smoother, faster, and easier. can.

A plurality of manufactured container bodies 1 are sequentially mounted upward on shelves, pallets, or the like, combined with lids, housed in cardboard boxes for packaging, and shipped. It is used when transferring a semiconductor wafer from a mini-environment in a predetermined process of semiconductor manufacturing to a mini-environment in another process, or when transferring a semiconductor wafer into and out of a semiconductor manufacturing apparatus, and periodically stores cleaning liquid. Washed in a washing tank.

According to the above configuration, the protective cover 20 is fitted to the C-ring 10, and these are fitted together to prevent deformation of the C-ring 10 and rotation of the cover 20. Therefore, the C-ring 10 and the cover 20 are prevented from falling off. It is possible to prevent damage to the unit clip 3 and the like, thereby expanding the functions and further improving the quality. Specifically, since the cover 20 surrounds and protects the C-ring 10 in a non-deformable manner, even if an impact is applied downward from the direction in which the C-ring 10 comes off (upward), the cover 20 will be deformed and the impact will be reduced. is relieved, and the C ring 10 is not expanded and detached from the exposed portion 7 of the unit clip 3.例文帳に追加Since the C ring 10 can be prevented from coming off, the diffusion unit will not come off and fall off from the inside of the container body 1 when the container body 1 is washed.

In addition, since the positioning projections 25 of the cover 20 are fitted into the recesses 11 of the C ring 10 to restrict positional deviation, the cover 20 can be reliably prevented from coming off the C ring 10 . In addition, since the outer peripheral edge of the C-ring 10 is supported in line contact with the plurality of interference claws 22 of the cover 20, rather than in surface contact, even if the cover 20 comes into contact with the manufacturing equipment of a semiconductor factory, etc. Even if an impact is applied from the unit clip 3 and the C ring 10, the impact applied to the unit clip 3 and the C ring 10 can be mitigated, and damage to the unit clip 3 and the C ring 10 can be effectively prevented to maintain high quality. Further, since the interference claw 22 has a substantially polygonal cross section, an increase in the strength of the interference claw 22 can be expected.

In addition, the outer peripheral surface of the C-ring 10 does not contact the entire inner peripheral surface of the cover 20, but rather the outer peripheral surface of the C-ring 10 partially contacts the plurality of gap dividing protrusions 24. Between the covers 20, a gap C for liquid distribution and buffering can be defined. Therefore, no water droplets of the cleaning liquid remain between the C-ring 10 and the cover 20 after the container body 1 is cleaned. In addition, since the contact area is reduced due to the partial contact between the plurality of gap dividing protrusions 24 and the C ring 10, even if an impact is applied from the outside, a large impact acts on the unit clip 3 and the C ring 10 as it is. can be suppressed. Therefore, damage to the unit clip 3 and the C ring 10 can be effectively prevented.

In addition, since the outer peripheral surface 27 of the cover 20 and the outer peripheral surface of the erroneous fitting prevention protrusion 28 are inclined, even if the cover 20 directly contacts the manufacturing equipment of a semiconductor factory and a shock is applied vertically from the outside. , the slanted surface can disperse and divert the impact energy, and a great reduction in the impact applied to the C-ring 10 can be expected (see the arrow in FIG. 8). Furthermore, the gap partitioning piece 29 of the cover 20 partially contacts the upper portion of the rear wall of the container body 1 instead of the entire rear surface of the cover 20 making surface contact with the upper portion of the rear wall of the container body 1 . Between the rear wall 2 and the cover 20, a gap C for liquid distribution can be defined. Therefore, it is possible to prevent the cleaning liquid from flowing out from between the back wall 2 of the container body 1 and the cover 20 and leaving water droplets or the like.

In addition, an opaque observation window may be selectively insert-molded in the central portion of the rear wall 2 of the container body 1 of the above-described embodiment, if necessary. In the above-described embodiment, a pair of chamber-type diffusion units are built in both rear sides of the container body 1. However, the present invention is not limited to this. A unit may be built in. Moreover, the unit clip 3, the C ring 10, and the cover 20 may be formed in different colors from the viewpoint of preventing assembly defects. Also, a unit clip 3 that penetrates the ceiling or upper side wall of the container body 1 may be attached to the upper end of the diffusion unit.

Also, the convex portion 12 and the concave portion 11 of the C-ring 10 may be separated from each other by 30°, 45°, 60°, and 90°. In this case, it is preferable to position the positioning convex portion 25 and the positioning concave portion 26 of the cover 20 apart from each other by 30°, 45°, 60°, and 90°. In addition, the gap dividing piece 29 of the cover 20 in the above embodiment is omitted, and a plurality of gap dividing pieces that contact the upper outer surface of the back wall of the container body 1 are formed at intervals in the circumferential direction of the back surface of the C ring 10, The plurality of gap partitioning pieces can secure a gap for cleaning liquid removal between the upper portion of the rear wall of the container body 1 and the back surface of the C-ring 10 . Also, the cover 20 can be formed by various molding methods such as injection molding, a cutting method, and the like. The cover 20 can be formed in a hollow, substantially track-shaped, polygonal, or the like.

Moreover, it is possible to paint the cover 20 with a color different from that of the C-ring 10, such as blue, red, or yellow. It is also possible to apply different colors to the front and back surfaces of the cover 20 . Also, the number and positions of the interference claws 22 and the gap dividing protrusions 24 of the cover 20 can be increased or decreased as required. In addition, the erroneous fitting prevention projections 28 can be selectively formed in the necessary number near the positioning projections 25, near the positioning recesses 26, or near the positioning projections 25 and the positioning recesses 26 on the surface of the cover 20. be. Further, the back surface of the cover 20 may be cut with a plurality of grooves arranged side by side to help identify the front and back surfaces of the cover 20 .

The substrate storage container according to the present invention is used in fields such as semiconductor manufacturing equipment.

1 container body 2 rear wall (peripheral wall)
3 Unit clip (mounting fixing member)
5 shaft portion 7 exposed portion 10 C-ring (locking member)
11 concave portion 12 convex portion 20 cover (cover member)
22 Interference pawl 23 Slope 24 Gap division projection 25 Positioning projection 26 Positioning recess 27 Outer peripheral surface 28 Misfit prevention projection 29 Gap division piece C Gap

Claims (9)

A substrate storage container in which a diffusion unit for injecting a purge gas toward the substrate is incorporated in a container body for storing the substrate,
A locking member attached to a fixing member exposed to the outside through the container body from the diffusion unit; and a cover member surrounding the locking member. 1. A substrate storage container, wherein the cover member is formed with a positioning projection that fits into the recess of the locking member, and a positioning recess that fits into the projection of the locking member. 2. The container body according to claim 1, wherein the container body is configured as a front open box with a front opening, a diffusion unit is provided upright in the rear of the interior, and a fixing member that penetrates the peripheral wall of the container body is attached to the upper part of the diffusion unit. substrate container. 3. The locking member according to claim 1 or 2, wherein the locking member is formed in a substantially C-shape to be fitted in the mounting and fixing member of the diffusion unit, the gap between the two ends thereof is a recess, and the outer peripheral surface of the locking member is formed with a projection. substrate container. Claim 1 or Claim 2, wherein the cover member is made of a resin-containing material and is formed endlessly so as to be fitted to the locking member, and the positioning protrusions and the positioning recesses are formed at intervals on the inner peripheral surface of the cover member. 4. The substrate storage container according to 3. 5. A substrate storage container according to claim 4, wherein a plurality of interference claws are formed on the inner peripheral surface of the cover member so as to contact the outer peripheral edge portion of the locking member with the slope. 6. A substrate storage container according to claim 4, wherein a plurality of gap dividing protrusions are formed on the inner peripheral surface of the cover member to contact the outer peripheral surface of the locking member. 7. A substrate storage container according to claim 4, 5 or 6, wherein the outer peripheral surface of the cover member is inclined so as to widen from the surface direction of the cover member toward the back surface facing the peripheral wall of the container body. 8. The substrate storage container according to claim 4, wherein the front and back surfaces of the cover member are different, and an erroneous fitting prevention projection is formed on the surface of the cover member. 9. The substrate storage container according to claim 8, wherein a plurality of gap partition pieces are formed at predetermined intervals on the back surface of the cover member so as to contact the peripheral wall of the container body.

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