JP2022118511A - Surface temperature measuring system and surface temperature measuring method - Google Patents

Abstract

To provide a technology capable of accurately measuring a surface temperature of an object using a thermopile type thermal sensor.SOLUTION: A surface temperature measuring system comprises a thermopile type thermal sensor that measures a surface temperature of an object to be measured, and a processing unit that corrects the measured value of the thermal sensor based on a distance between the thermal sensor and the object to be measured in an optical axis direction of the thermal sensor, and a displacement amount of the object to be measured with respect to the optical axis of the thermal sensor.SELECTED DRAWING: Figure 1

Description

The present invention relates to techniques for non-contact surface temperature measurement.

Due to the impact of COVID-19, the demand for contactless body temperature measurement is increasing. Conventionally, bolometer-type thermography has been used in airports and the like, but this system is very expensive and difficult to introduce in commercial facilities, offices, and the like. Therefore, in applications such as commercial facilities and offices, a surface temperature measurement system using a thermopile type thermal sensor is widely used (see Patent Document 1).

JP 2013-200137 A

A thermopile-type thermal sensor has a problem that the output temperature changes depending on the relative position between the sensor and the measurement object (face, etc.) due to the influence of the size of the pixels and the influence of the lens. As a measure to solve such a problem, Patent Document 1 proposes an idea of measuring the distance to an object to be measured by a TOF sensor and correcting the output temperature of the thermal sensor based on the distance. However, the measures of Patent Document 1 also have the following problems.

According to experiments conducted by the present inventors, the output temperature of the thermal sensor depends not only on the distance between the sensor and the object to be measured in the direction of the optical axis, but also on the amount of displacement of the object to be measured with respect to the optical axis. It has been found to change. That is, an accurate measurement value can be obtained when the measurement object exists on the optical axis, but the measurement value fluctuates when the measurement object separates from the optical axis. Since the method of Patent Document 1 does not consider the positional deviation of the object to be measured with respect to the optical axis, there is a limit to the correction accuracy, and there are cases where an accurate surface temperature cannot be obtained.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a technique capable of more accurately measuring the surface temperature of an object using a thermopile type thermal sensor.

The present disclosure includes a thermopile-type thermal sensor that measures the surface temperature of an object to be measured, a distance between the thermal sensor and the object to be measured in the optical axis direction of the thermal sensor, and and a processing unit that corrects the measurement value of the thermal sensor based on the amount of positional deviation of the object to be measured. By adopting such a configuration, it is possible to realize a system capable of accurately measuring the surface temperature of an object to be measured while using a thermopile type sensor.

A camera having a common field of view with the thermal sensor may be further provided, and the processing unit may determine the displacement amount of the measurement object with respect to the optical axis by analyzing an image captured by the camera. The processing unit may detect the measurement object from the image by object detection processing, and obtain a positional deviation amount of the measurement object with respect to the optical axis based on the detected position on the image. The processing unit may determine the distance of the measurement object by analyzing images captured by the camera. The processing unit may detect the measurement object from the image by object detection processing, and obtain the distance of the measurement object based on the detected size on the image.

A camera having a common field of view with the thermal sensor is further provided, and the processing unit receives as input the image captured by the camera and the measured value output from the thermal sensor, and measures the distance and displacement of the measurement object. The thermal sensor readings may be corrected using AI that has been machine-learned to make corrections based on quantity.

The processing unit may obtain the positional deviation amount of the measurement object with respect to the optical axis by analyzing the temperature distribution image output from the thermal sensor. The processing unit may detect the measurement object from the temperature distribution image by object detection processing, and obtain a positional deviation amount of the measurement object with respect to the optical axis based on the detected position on the temperature distribution image. . The processing unit may obtain the distance of the measurement object by analyzing the temperature distribution image. The processing unit may detect the measurement object from the temperature distribution image by object detection processing, and obtain the distance of the measurement object based on the detected size on the temperature distribution image.

The processing unit uses machine-learned AI to perform correction according to the distance and the positional deviation amount of the measurement object when given as an input the temperature distribution image output from the thermal sensor. may be corrected.

A TOF sensor having a common field of view with the thermal sensor is further provided, and the processing unit analyzes a distance image obtained by the TOF sensor to determine the distance of the measurement object and the measurement object relative to the optical axis. A positional deviation amount of an object may be obtained.

The present disclosure includes a step of measuring the surface temperature of an object to be measured using a thermopile type thermal sensor, a distance between the thermal sensor and the object to be measured in the optical axis direction of the thermal sensor, and and correcting the measured value of the thermal sensor based on the amount of positional deviation of the object to be measured with respect to the optical axis.

The present invention may be regarded as a surface temperature measurement system having at least part of the above means, a surface temperature measurement method including at least part of the above processing, or a program for realizing such a method or its program. It can also be regarded as a recorded recording medium. It should be noted that each of the means and processes described above can be combined with each other as much as possible to constitute the present invention.

ADVANTAGE OF THE INVENTION According to this invention, the technique which can measure the surface temperature of an object more correctly using a thermopile type thermal sensor can be provided.

FIG. 1 is a diagram showing an application example of the surface temperature measurement system. FIG. 2 is a perspective view showing the appearance of the surface temperature measurement system of the first embodiment. FIG. 3 is a block diagram showing the hardware configuration of the surface temperature measurement system of the first embodiment. FIG. 4 is a cross-sectional view schematically showing the configuration of the thermal sensor. FIG. 5 is a block diagram showing the functional configuration of the surface temperature measurement system of the first embodiment. FIG. 6 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system of the first embodiment. FIG. 7 is a diagram showing an example of face detection. FIG. 8 is a diagram illustrating the positional relationship between the optical axis and field of view of the sensor and the object to be measured. 9A and 9B are diagrams showing output examples of measurement results of the surface temperature measurement system. FIG. 10 is a block diagram showing the functional configuration of the surface temperature measurement system of the second embodiment. FIG. 11 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system of the second embodiment. FIG. 12 is a block diagram showing the hardware configuration of the surface temperature measurement system of the third embodiment. FIG. 13 is a block diagram showing the functional configuration of the surface temperature measurement system of the third embodiment. FIG. 14 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system of the third embodiment. FIG. 15 is a block diagram showing the hardware configuration of the surface temperature measurement system of the fourth embodiment. FIG. 16 is a block diagram showing the functional configuration of the surface temperature measurement system of the fourth embodiment. FIG. 17 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system of the fourth embodiment.

<Application example>
One application example of the present invention will be described with reference to FIG. Fig. 1 shows a configuration example of the present invention applied to a system installed at the entrance of a commercial facility or office to measure the body temperature of visitors without contact, as a main example of use for the prevention of infectious diseases. show.

The surface temperature measurement system 1 is a system that measures the surface temperature of an object to be measured using a thermopile type thermal sensor and displays the measurement result. The thermopile-type thermal sensor has a characteristic that the measured value fluctuates depending on the relative position of the sensor and the object to be measured. Therefore, in this system 1, "the distance between the thermal sensor and the object to be measured in the direction of the optical axis of the thermal sensor" and "the displacement amount of the object to be measured with respect to the optical axis of the thermal sensor" are acquired, and the "distance" is obtained. The measured value of the thermal sensor is corrected based on both of the "positional deviation amount". By adopting such a configuration, it is possible to realize a system capable of accurately measuring the surface temperature of an object to be measured while using a thermopile type sensor. Therefore, it is possible to provide a low-cost system, and it is possible to promote introduction to various places such as commercial facilities and offices, and spread to developing countries.

Note that FIG. 1 exemplifies the measurement of human body temperature, but the scope of application of the present invention is not limited to this. For example, the system according to the present invention can be applied to the measurement of the surface temperature of living organisms other than humans (animals and plants), the measurement of the surface temperature of general objects such as machines, buildings, and products.

<First Embodiment>
2 and 3 show a configuration example of the surface temperature measurement system 1 of the first embodiment. FIG. 2 is a perspective view showing the appearance of the surface temperature measurement system 1 of the first embodiment, and FIG. 3 is a block diagram showing the hardware configuration of the surface temperature measurement system 1 of the first embodiment.

The surface temperature measurement system 1 has a thermopile thermal sensor 10, a camera (image sensor) 11, a processing unit 12, and a display device 13 as main hardware components. The surface temperature measurement system 1 may be designed as a dedicated device, or may be configured by connecting the thermal sensor 10 to a general-purpose computer device (smartphone, tablet, laptop, etc.) equipped with a camera.

The thermal sensor 10 and the camera 11 are installed such that their optical axes are parallel (including a state in which they are substantially parallel), and have a common field of view. Note that the fields of view of the thermal sensor 10 and the camera 11 do not have to match perfectly, and it is sufficient that at least a part of them (the area including the range in which the object to be measured can exist) overlaps. In the following description, the optical axis direction of the thermal sensor 10 and the camera 11 is called the z direction (depth direction), and the horizontal direction and vertical direction on a plane perpendicular to the optical axis are called the x direction and the y direction, respectively.

(thermal sensor)
FIG. 4 is a cross-sectional view schematically showing the configuration of the thermal sensor 10. As shown in FIG.

The thermal sensor 10 is an infrared sensor, and includes an optical system 40 for condensing radiant heat energy (infrared rays) from an object to be measured, a thermopile chip 41 for converting the infrared rays into electrical energy, and an output from the thermopile chip 41. and a processing circuit 42 that amplifies and AD-converts the voltage signal and outputs temperature data. The thermopile chip 41 is a MEMS element and has a structure in which a plurality of thermocouples are arranged in a two-dimensional array.

In this embodiment, for example, the thermal sensor 10 is used, which has viewing angles of 90° and 90° in the x and y directions, respectively, and a resolution of 32 pixels×32 pixels in the x and y directions. That is, the temperature data output from the thermal sensor 10 is a 32×32 two-dimensional image (image representing temperature distribution). Note that the viewing angle and resolution may be appropriately designed according to the application of the system 1 .

(camera)
Camera 11 is a camera for taking an optical image. For example, a high-resolution camera using an imaging device such as CCD or CMOS is used.

(processing unit)
The processing unit 12 is a device that performs control of the entire surface temperature measurement system 1, various signal processing and image processing, output processing of measurement results, and the like. The processing unit 12 may be composed of, for example, a general-purpose processor (CPU, etc.) and memory, or may be composed of a dedicated processor (ASIC, etc.).

(Display device)
The display device 13 is a device for outputting information such as measurement results (that is, the surface temperature of the object to be measured). For example, liquid crystal displays and organic EL displays are used.

(Functional configuration)
FIG. 5 is a block diagram showing the functional configuration of the surface temperature measurement system 1 of the first embodiment.

The surface temperature measurement system 1 includes a temperature data acquisition unit 50, an image data acquisition unit 51, an object detection unit 52, a distance calculation unit 53, a positional deviation calculation unit 54, a temperature correction unit 55, and an information output unit 56 as functional configurations. have. These functions are provided by processing unit 12 . For example, when the processing unit 12 is composed of a general-purpose processor, these functions are realized by the processor reading and executing a program stored in the memory. Note that part of the functions shown in FIG. 5 may be implemented by a cloud server.

(Surface temperature measurement method)
FIG. 6 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system 1 of the first embodiment.

In step S<b>60 , the temperature data acquisition unit 50 acquires temperature data from the thermal sensor 10 . The temperature data acquired here is, for example, a 32×32 two-dimensional image, and the value of each pixel represents the measured value (surface temperature) of the thermal sensor 10 .

In step S<b>61 , the image data acquisition unit 51 acquires image data from the camera 11 . The image data acquired here is an optical image, for example, a 32×32 two-dimensional RGB image. In this embodiment, to simplify the explanation, the field of view and resolution of the thermal sensor 10 and the camera 11 are the same (that is, the pixel (x, y) of the temperature data and the pixel (x, y) of the image data are represent the same point on the object to be measured.). If the fields of view and/or resolutions of the two are different, the image data acquisition unit 51 may perform resolution conversion and trimming (cropping) of the image data in accordance with the temperature data of the thermal sensor 10 .

In FIG. 6, the image data is captured after the temperature data is captured, but the order of capturing may be reversed or the data may be captured in parallel. It is desirable that the temperature data and the image data are data measured at the same time or at timings as close as possible.

In step S62, the object detection unit 52 analyzes the image data and detects the object to be measured from the image. For example, when the purpose is to measure a person's body temperature, a method of estimating the body temperature from the surface temperature of the face is often implemented. Therefore, an object detection process represented by a face detection algorithm, a human body detection algorithm, or the like may be used to detect a "face" as a measurement object. FIG. 7 shows an example of face 70 detection. As the detection result of the object detection unit 52, the coordinates (xc, yc) of the center point of the detection frame 71 surrounding the face 70 and the size (w, h) are output. The coordinates (xc, yc) represent the detection position on the image, and the size (w, h) represents the detection size on the image. FIG. 8 is a diagram illustrating the positional relationship between the optical axis and field of view of the sensor and the object to be measured.

In step S63, the distance calculator 53 calculates the distance in the optical axis direction from the thermal sensor 10 to the object to be measured based on the detected size (w, h) on the image. The size of the subject on the image depends on the distance between the camera 11 and the subject. The closer the distance is, the larger the size of the image is. Therefore, if the actual size of the subject and the specifications of the optical system and imaging device of the camera 11 are known, it is possible to convert the detected size on the image into the distance between the camera 11 and the subject. Since the camera 11 and the thermal sensor 10 are arranged close to each other, the distance between the camera 11 and the subject may be regarded as the distance between the thermal sensor 10 and the subject. If the installation position is far away, the distance between the thermal sensor 10 and the subject can be calculated from the distance between the camera 11 and the subject based on the relative positional relationship between the thermal sensor 10 and the camera 11.) .

For example, assuming the average face size of an adult, if a LUT or function for converting the size on the image into a distance is prepared in advance, the distance calculation unit 53 calculates the distance obtained in step S62. The distance can be easily obtained simply by substituting the detected size (w, h) into the LUT or function. Since the average face size differs depending on gender (male/female) and age (child/adult), a plurality of types of LUTs or functions are prepared, and the object detection unit 52 performs gender estimation and age estimation. and the LUT or function used for distance calculation may be changed based on the estimation result. This makes it possible to improve the distance estimation accuracy.

In step S64, the positional deviation calculator 54 calculates the amount of positional deviation of the object to be measured with respect to the optical axis of the thermal sensor 10 based on the detected position (xc, yc) on the image. If the subject is on the optical axis, the subject is at the center of the image, and the farther the subject is from the optical axis, the farther away from the center of the image. Therefore, if the specs of the optical system and imaging device of the camera 11 are known, it is possible to convert the detected position on the image into the amount of positional deviation with respect to the optical axis. Since the camera 11 and the thermal sensor 10 are arranged close to each other with their optical axes parallel, the amount of positional deviation of the camera 11 with respect to the optical axis can be regarded as the amount of positional deviation of the thermal sensor 10 with respect to the optical axis. (If the installation positions of the thermal sensor 10 and the camera 11 are separated or the optical axes are not parallel, the amount of positional deviation of the camera 11 with respect to the optical axis is calculated based on the relative positional relationship between the thermal sensor 10 and the camera 11. , the amount of positional deviation of the thermal sensor 10 with respect to the optical axis can be calculated.). If the distance between the thermal sensor 10 and the object to be measured is required for calculating the amount of positional deviation, the calculation result of the distance calculator 53 may be used.

In step S65, the temperature correction unit 55 corrects the temperature data obtained in step S60 based on the "distance" calculated in step S63 and the "positional deviation amount" calculated in step S64. As a characteristic of the thermopile type thermal sensor, the measured value tends to decrease as the distance from the thermal sensor to the object to be measured increases. Also, there is a tendency that the larger the amount of positional deviation from the optical axis of the thermal sensor, the smaller the measured value. Therefore, the temperature correction unit 55 should correct the temperature data (measured value) of the thermal sensor 10 so that the longer the distance, the higher the temperature, and the larger the positional deviation amount, the higher the temperature.

For example, the temperature correction unit 55 may include an LUT that defines a "correction amount" for a combination of a "distance" and a "positional deviation amount", or a function that calculates the "correction amount" from the "distance" and the "positional deviation amount". can be used to correct the temperature data. The LUT and functions may be created from the results of measurement experiments using the thermal sensor 10, or may be created theoretically based on the characteristics of the thermal sensor 10. FIG.

In step S<b>66 , the information output unit 56 outputs the corrected temperature data to the display device 13 . In the output example shown in FIG. 9A, the detection result (detection frame) of step S62 and the temperature corrected in step S65 are superimposed on the image data captured in step S61. When a plurality of measurement objects (faces in this example) are detected from the image as shown in FIG. 9B, the detection frame and correction temperature may be displayed for each measurement object.

According to the configuration described above, the measurement value of the thermal sensor 10 is corrected based on both the "distance" and the "positional deviation amount" of the object to be measured, so that it is possible to obtain measurement results with higher accuracy than in the conventional art. .

<Second embodiment>
In the second embodiment, AI (artificial intelligence) is used to correct the measured value of the thermal sensor 10 . Below, the configuration different from the first embodiment will be mainly described, and the description of the configuration common to the first embodiment will be omitted.

FIG. 10 shows an example of the functional configuration of the surface temperature measurement system 1 of the second embodiment. The surface temperature measurement system 1 of this embodiment has a temperature data acquisition section 50, an image data acquisition section 51, a temperature correction section 100, and an information output section 56 as functional configurations. Only the configuration of the temperature correction unit 100 is different from the first embodiment.

The temperature correction unit 100 is machine-learned to output corrected temperature data corrected according to the "distance" and "positional deviation amount" of the measurement object when image data and temperature data are input. It has model 101 . Any machine learning method or model structure may be used, for example, a deep neural network may be used. In the learning phase, machine learning is performed using learning data consisting of "image data taken by the camera", "temperature data consisting of measured values output from the thermal sensor", and "true temperature data". good.

FIG. 11 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system 1 of the second embodiment. The processing of steps S60 to S61 is the same as in the first embodiment (FIG. 6). In step S110, the temperature correction unit 100 inputs the temperature data acquired in step S60 and the image data acquired in step S61 into the learned model to obtain corrected temperature data. The processing of step S66 is the same as that of the first embodiment (FIG. 6).

<Third embodiment>
In the first embodiment, the "distance" and "positional deviation amount" of the object to be measured are obtained by analyzing the optical image obtained from the camera 11, whereas in the third embodiment, the thermal sensor 10 outputs The "distance" and "positional deviation amount" of the object to be measured are obtained by analyzing the temperature distribution image. Below, the configuration different from the first embodiment will be mainly described, and the description of the configuration common to the first embodiment will be omitted.

12 and 13 show a configuration example of the surface temperature measurement system 1 of the third embodiment. FIG. 12 is a block diagram showing the hardware configuration of the surface temperature measuring system 1 of the third embodiment, and FIG. 13 is a block diagram showing the functional configuration of the surface temperature measuring system 1 of the third embodiment.

The surface temperature measurement system 1 of this embodiment has a thermopile type thermal sensor 10, a processing unit 12, and a display device 13 as main hardware configurations. The surface temperature measurement system 1 also has a temperature data acquisition unit 50, an object detection unit 130, a distance calculation unit 131, a positional deviation calculation unit 132, a temperature correction unit 55, and an information output unit 56 as functional configurations. The difference from the first embodiment is that the camera is not an essential component, and temperature data (temperature distribution image) is used to calculate the distance and positional deviation.

FIG. 14 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system 1 of the third embodiment. The processing of step S60 is the same as that of the first embodiment (FIG. 6). In step S140, the object detection unit 130 analyzes the temperature distribution image acquired in step S60 and detects the measurement object from the image. In general, the temperature of the face and the human body is higher than that of the background, so the face and the human body can be detected from the temperature distribution image by using an algorithm such as silhouette detection. In step S141, the distance calculator 131 calculates the distance in the optical axis direction from the thermal sensor 10 to the object to be measured based on the detected size on the temperature distribution image. In step S142, the positional deviation calculator 132 calculates the amount of positional deviation based on the detected position on the temperature distribution image. A specific method for calculating the distance and the amount of positional deviation may be the same as the method described in the first embodiment. The processing of steps S65 and S66 is the same as in the first embodiment.

The configuration of this embodiment also enables temperature measurement with higher accuracy than the conventional one. Moreover, since the camera is not an essential component in the configuration of this embodiment, the device configuration is simpler than in the first embodiment, and the cost can be reduced.

<Fourth Embodiment>
In the first embodiment, the "distance" and "positional deviation amount" of the object to be measured are obtained by analyzing the optical image obtained from the camera 11. In the fourth embodiment, however, the TOF sensor obtains By analyzing the distance image, the "distance" and "positional deviation amount" of the object to be measured are obtained. Below, the configuration different from the first embodiment will be mainly described, and the description of the configuration common to the first embodiment will be omitted.

15 and 16 show a configuration example of the surface temperature measurement system 1 of the fourth embodiment. FIG. 15 is a block diagram showing the hardware configuration of the surface temperature measuring system 1 of the fourth embodiment, and FIG. 16 is a block diagram showing the functional configuration of the surface temperature measuring system 1 of the fourth embodiment.

The surface temperature measurement system 1 of this embodiment has a thermopile type thermal sensor 10, a TOF sensor 150, a processing unit 12, and a display device 13 as main hardware configurations. In addition, the surface temperature measurement system 1 includes a temperature data acquisition unit 50, a distance image acquisition unit 160, an object detection unit 161, a distance calculation unit 162, a positional deviation calculation unit 163, a temperature correction unit 55, and an information output unit as functional configurations. 56. The differences from the first embodiment are that a camera is not an essential component, that a TOF sensor is provided, and that distance images are used to calculate the distance and positional deviation.

FIG. 17 is a flow chart showing the flow of surface temperature measurement processing by the surface temperature measurement system 1 of the fourth embodiment. The processing of step S60 is the same as that of the first embodiment (FIG. 6). In step S<b>170 , the distance image acquisition unit 160 acquires distance image data from the TOF sensor 150 . The distance image data acquired here is, for example, a 1024×1024 two-dimensional image, and the value of each pixel represents the distance from the TOF sensor 150 to the subject. As the TOF sensor 150, a direct TOF method sensor or an indirect TOF method sensor may be used. In step S171, the object detection unit 161 analyzes the distance image acquired in step S170 and detects the measurement object from the image. For example, by using algorithms such as silhouette detection and point cloud clustering, faces and human bodies can be detected from range images. In step S172, the distance calculator 162 extracts the distance in the optical axis direction from the thermal sensor 10 to the object to be measured from the distance image. In step S173, the positional deviation calculator 163 calculates the amount of positional deviation based on the detected position on the range image. A specific method for calculating the amount of positional deviation may be the same as the method described in the first embodiment. The processing of steps S65 and S66 is the same as in the first embodiment.

The configuration of this embodiment also enables temperature measurement with higher accuracy than the conventional one. Moreover, since the TOF sensor is used in the configuration of this embodiment, the distance between the sensor and the object to be measured can be accurately known, and the accuracy of temperature correction based on the distance can be improved.

<Others>
The above-described embodiment is merely an exemplary description of a configuration example of the present invention. The present invention is not limited to the specific forms described above, and various modifications are possible within the technical scope of the present invention. The configurations and processes of the above-described embodiments may be combined as appropriate. For example, the trained model of the second embodiment may be applied to the configuration of the third embodiment. In this case, when the temperature distribution image output from the thermal sensor is input to the learned model, a corrected temperature distribution image that has been corrected according to the distance and the amount of positional deviation of the object to be measured may be output. Furthermore, the trained model of the second embodiment may be applied to the configuration of the fourth embodiment. In this case, when the temperature data output from the thermal sensor and the distance image data output from the TOF sensor are input to the learned model, the corrected temperature data corrected according to the distance and positional deviation amount of the object to be measured is output. should be.

<Appendix 1>
(1) a thermopile-type thermal sensor (10) for measuring the surface temperature of an object to be measured;
Based on the distance between the thermal sensor (10) and the object to be measured in the optical axis direction of the thermal sensor (10) and the amount of displacement of the object to be measured with respect to the optical axis of the thermal sensor (10) , a processing unit (12) for correcting the measurements of said thermal sensor (10);
A surface temperature measurement system (1), characterized in that it comprises:

(2) a step of measuring the surface temperature of the object to be measured with a thermopile-type thermal sensor (10) (S60);
Based on the distance between the thermal sensor (10) and the object to be measured in the optical axis direction of the thermal sensor (10) and the amount of displacement of the object to be measured with respect to the optical axis of the thermal sensor (10) , a step (S65) of correcting the measured value of the thermal sensor (10);
A surface temperature measuring method comprising:

1: Surface temperature measurement system 10: Thermal sensor 11: Camera 12: Processing unit 13: Display device 40: Optical system 41: Thermopile chip 42: Processing circuit 70: Face 71: Detection frame 150: TOF sensor

Claims (13)

a thermopile-type thermal sensor that measures the surface temperature of an object to be measured;
The measured value of the thermal sensor is corrected based on the distance between the thermal sensor and the object to be measured in the direction of the optical axis of the thermal sensor and the displacement amount of the object to be measured with respect to the optical axis of the thermal sensor. a processing unit to
A surface temperature measurement system comprising: further comprising a camera having a common field of view with the thermal sensor;
2. The surface temperature measurement system according to claim 1, wherein the processing unit obtains the amount of positional deviation of the object to be measured with respect to the optical axis by analyzing the image captured by the camera. 3. The processing unit detects the object to be measured from the image by object detection processing, and obtains the amount of displacement of the object to be measured with respect to the optical axis based on the detected position on the image. 2. The surface temperature measurement system according to 2. 4. The surface temperature measurement system according to claim 2, wherein the processing unit obtains the distance of the measurement object by analyzing the image taken by the camera. 5. The surface temperature according to claim 4, wherein the processing unit detects the measurement object from the image by object detection processing, and obtains the distance of the measurement object based on the detected size on the image. measurement system. further comprising a camera having a common field of view with the thermal sensor;
The processing unit is an AI machine-learned so as to perform correction according to the distance and the positional deviation amount of the measurement object when given as input the image captured by the camera and the measurement value output from the thermal sensor. 2. The surface temperature measurement system according to claim 1, wherein the measured value of said thermal sensor is corrected using . 2. The surface temperature measurement system according to claim 1, wherein the processing unit obtains the amount of positional deviation of the object to be measured with respect to the optical axis by analyzing the temperature distribution image output from the thermal sensor. The processing unit detects the object to be measured from the temperature distribution image by object detection processing, and obtains a displacement amount of the object to be measured with respect to the optical axis based on the detected position on the temperature distribution image. 8. The surface temperature measurement system according to claim 7. 9. The surface temperature measurement system according to claim 7, wherein the processing unit obtains the distance of the measurement object by analyzing the temperature distribution image. 10. The method according to claim 9, wherein the processing unit detects the measurement object from the temperature distribution image by object detection processing, and obtains the distance of the measurement object based on the detected size on the temperature distribution image. A surface temperature measurement system as described. The processing unit is machine-learned to perform correction according to the distance and positional deviation amount of the measurement object when given as an input the temperature distribution image output from the thermal sensor.
2. The surface temperature measurement system of claim 1, wherein I is used to correct the thermal sensor measurements. further comprising a TOF sensor having a common field of view with the thermal sensor;
2. The processing unit obtains the distance of the object to be measured and the amount of displacement of the object to be measured with respect to the optical axis by analyzing the distance image obtained by the TOF sensor. The surface temperature measurement system according to . a step of measuring the surface temperature of the object to be measured with a thermopile type thermal sensor;
The measured value of the thermal sensor is corrected based on the distance between the thermal sensor and the object to be measured in the direction of the optical axis of the thermal sensor and the displacement amount of the object to be measured with respect to the optical axis of the thermal sensor. and
A surface temperature measuring method comprising:

Images