JP2022113600A - measuring device - Google Patents

Abstract

To provide a measuring device that automatically extracts a sample area, which is an area frame including all portions of a sample.SOLUTION: A measuring device identifies a vertical line passing through a left projecting portion 101i of a sample as a left vertical line lyr, identifies a vertical line passing through a right projecting portion 102i of the sample as a right vertical line ryr, identifies a horizontal line passing through a lower projecting portion 103i of the sample as a lower horizontal line nxr, identifies a horizontal line passing through an upper projecting portion 104i of the sample as an upper horizontal line pxr, and extracts an area frame formed by the left vertical line lyr, the right vertical line ryr, the lower horizontal line nxr, and the upper horizontal line pxr as a sample measurement area frame.SELECTED DRAWING: Figure 4

Description

In the present invention, a sample such as an electronic component placed on the upper surface of a transparent table is measured by an optical sensor positioned below the transparent table, and the surface of the sample (sample surface viewed from the optical sensor side) is measured. The present invention relates to a measuring device for measuring surface shape, flatness, or the like.

An optical sensor such as a line sensor, a CCD sensor, or a CMOS sensor is arranged below the transparent table, a sample is placed on the upper surface of the transparent table, and the surface of the sample is measured by the optical sensor to determine the surface of the sample. Measuring devices for measuring shape (3D shape) and flatness are known. (For example, the invention of Patent Document 1)
In addition, in a measuring apparatus similar to the measuring apparatus of Patent Document 1, a frame-shaped positioning portion is provided on the top surface of the table, and the horizontal inner wall surface of the positioning portion and the vertical inner wall surface perpendicular to the horizontal inner wall surface are arranged to correspond to the sample. Measuring devices are known which are positioned by applying two sides to each other. (For example, the invention of Patent Document 2)

Japanese Patent Application Laid-Open No. 2018-179963 (Figs. 1 and 2) Japanese Patent Application Laid-Open No. 2018-028440 (Figs. 4 and 5)

Although there is no description of the sample measurement area frame, extraction of the sample measurement area frame in a measuring apparatus such as that of Patent Document 1 is generally based on scanning-wide light reception information, which is light reception information for the entire scanning range of the irradiation unit and the light reception unit. A grayscale image showing the brightness level of the entire scanning area is displayed on the display, and the operator draws and sets a closed area frame (sample measurement area frame) that includes all parts of the sample by operating a mouse or the like. , perform an instruction operation to generate height information (distance information) on the surface of the sample from the reference position on the light receiving part side, and perform an instruction operation to generate height information (distance information) on the surface of the sample from the top surface of the table. Alternatively, there is a problem that the operator needs complicated operation work such as performing an instruction operation to generate height information (distance information) of the surface of the sample from the surface of the reflecting member provided on the top surface of the table. Met.
The sample measurement area frame is an area frame that is narrower than the scanning area indicated by the scanning area light reception information, which is the light reception information of the entire scanning area of the irradiation unit and the light reception unit, and is an area frame that includes all parts of the sample.

In addition, although there is no description of the sample measurement area frame, extraction of the sample measurement area frame in a measuring apparatus having a positioning unit as in Patent Document 2 is generally performed with a grayscale image of the entire scanning area displayed on the display. The operator designates and specifies the sample measurement area.
Although the image of the edge portion of the positioning portion is unclear in the grayscale image of the entire scanning area, it is detected and displayed on the display. As a result, there is a part of the image in which the image of the contact portion of the sample that is in contact with the positioning portion and the image portion contact portion of the inner edge portion of the positioning portion are combined.
The operator enlarges the image and uses the eraser function to erase the image of the inner edge portion by operating the mouse or the like. The erased portion means that it is excluded from the measurement object.
Erasing operations using this eraser function take time and require concentration. Did I erase too much? Such a feeling of suspicion remains, so it has a problem that it is not good for mental health.

The present invention has been made in view of the problems of the prior art as described above. It is to provide a measuring device that extracts target and accurately.

In order to achieve the above objects, the present invention is configured as follows.
<First invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
The sample (W) is an area frame narrower than the scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), and A sample measurement area frame extraction unit for extracting a sample measurement area frame (wmr), which is an area frame containing all of the parts of
The sample measurement area frame extraction unit
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
Identifying the sample left protruding portion (101), which is the most outwardly protruding portion on the left side of the sample (W),
Identifying a sample right projecting portion (102) that is the most outward projecting portion on the right side of the sample (W);
Identifying a sample lower protruding portion (103), which is the outermost protruding portion on the lower side of the sample (W),
Identifying a sample upper protruding portion (104) that is the outermost protruding portion on the upper side of the sample (W);
Identifying a vertical line passing through the left projecting portion (101) of the sample as a left vertical line (lyr),
Identifying a vertical line passing through the right projecting portion (102) of the sample as a right vertical line (ryr),
Identifying a horizontal line passing through the sample lower projecting portion (103) as a lower horizontal line (nxr),
Identifying a horizontal line passing through the sample upper projecting portion (104) as an upper horizontal line (pxr),
Automatically extracting the area frame formed by the left vertical line (lyr), the right vertical line (ryr), the lower horizontal line (nxr) and the upper horizontal line (pxr) as the sample measurement area frame (wmr) is a sample measurement area frame extraction unit that is performed systematically,
The measuring apparatus is characterized by being configured as described above.

<Second invention>
An extended sample measurement area frame setting unit is provided,
The extended sample measurement area frame setting unit
setting an extended left vertical line (Lyr) set at a position extended outward by a predetermined distance from the left vertical line (lyr);
setting an extended right vertical line (Ryr) set at a position extended outward by a predetermined distance from the right vertical line (ryr);
setting an extended lower horizontal line (Nxr) set at a position extended outward by a predetermined distance from the lower horizontal line (nxr);
setting an extended upper horizontal line (Pxr) set at a position extended outward by a predetermined distance from the upper horizontal line (pxr);
An extended sample measurement area frame (Wmr), which is an area frame formed by the extended left vertical line (Lyr), the extended right vertical line (Ryr), the extended lower horizontal line (Nxr) and the extended upper horizontal line (Pxr) An expanded sample measurement area frame setting unit to be set,
The measuring apparatus according to the first aspect of the invention is configured as described above.

<Third Invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
The transparent table (2) has an X-axis inner wall, which is an inner wall in the X-axis direction, or a Y-axis inner wall, which is an inner wall in the Y-axis direction. a positioning part that can be placed on the upper surface of the transparent table (2) in a positioning state in contact with the Y-axis inner wall;
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, or the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line or the Y-axis edge position line is defined as a pre-stored edge line storage unit;
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) a sample measurement area frame extraction unit that extracts a sample measurement area frame (wmr) that is an area frame containing all parts of
The sample measurement area frame extraction unit
Identifying a sample protruding portion, which is the outermost protruding portion on the side of the sample (W) that does not contact the X-axis inner wall or the Y-axis inner wall;
Identifying a horizontal line or a vertical line passing through the sample projecting portion,
a sample measurement area frame extraction unit that extracts an area frame formed by the horizontal line or the vertical line and the X-axis edge position line or the Y-axis edge position line as the sample measurement area frame (wmr);
The measuring apparatus is characterized by being configured as described above.

<Fourth Invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
It has an X-axis inner wall, which is an inner wall in the X-axis direction, provided on the upper part of the transparent table (2), and a Y-axis inner wall, which is an inner wall in the Y-axis direction provided in a form perpendicular to the X-axis inner wall. a positioning portion that enables the sample (W) to be placed on the upper surface of the transparent table (2) in a positioned state in which the sample (W) is in contact with the inner wall of the X axis and the inner wall of the Y axis;
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) a sample measurement area frame extraction unit for extracting a sample measurement area frame (wmr), which is an area frame containing all parts of
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line and the Y-axis edge position line are defined as and a pre-stored edge line storage unit,
The sample measurement area frame extraction unit
Identifying an X-axis side sample protruding portion and a Y-axis side sample protruding portion, which are the outermost protruding portions on the side of the sample (W) that do not contact the X-axis inner wall and the Y-axis inner wall,
Identifying a vertical line passing through the sample projecting portion on the X-axis side,
Identifying a horizontal line passing through the sample projecting portion on the Y-axis side,
a sample measurement area frame extracting unit that extracts an area frame formed by the horizontal line, the vertical line, the X-axis edge position line, and the Y-axis edge position line as the sample measurement area frame (wmr);
The measuring apparatus is characterized by being configured as described above.

<Fifth Invention>
An expanded sample measurement area frame setting unit is provided for setting an expanded sample measurement area frame (Wmr) formed by setting the horizontal line and the vertical line at a position expanded outward by a predetermined distance. The measuring device according to the 3rd invention or the 4th invention.

<Sixth Invention>
3rd and 4th, characterized in that the X-axis edge position line and the Y-axis edge position line can be displayed or are displayed in the display mode in which the grayscale image of the sample (W) is displayed on the display. or the measuring device according to the fifth invention.

<Seventh invention>
In the display mode in which the sample measurement area frame (wmr) and the grayscale image of the sample (W) are displayed on the display,
The image of the positioning portion located outside the X-axis edge position line, the Y-axis edge position line, or one of the edge lines is hidden or can be hidden. The measuring device according to the third to fifth or sixth inventions.

<Eighth Invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
It has an X-axis inner wall, which is an inner wall in the X-axis direction, provided on the upper part of the transparent table (2), and a Y-axis inner wall, which is an inner wall in the Y-axis direction provided in a form perpendicular to the X-axis inner wall. a positioning portion that enables the sample (W) to be placed on the upper surface of the transparent table (2) in a positioned state in which the sample (W) is in contact with the inner wall of the X axis and the inner wall of the Y axis;
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line and the Y-axis edge position line are stored in advance. and an edge line storage unit.

<Ninth Invention>
The sample measurement area frame extraction unit
specifying an area line representing the sample measurement area frame (wmr) or the extended sample measurement area frame (Wmr) as an outer area frame (Ouf);
Specify or designate an inner region frame (Inf) for making a part inside the sample (W) a non-measurement region, and a portion inside the inner region frame (Inf) as a non-measurement region (Nor) ,
a sample measurement area frame extracting unit for extracting a sample measurement area frame (wmh) having a measurement area (Mer) defined as an area frame portion formed between the outer area frame (Ouf) and the inner area frame (Inf);
The measuring apparatus according to any one of the first to seventh inventions or the eighth invention is configured as described above.

<Tenth Invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) A sample measurement area frame extracting unit for extracting a sample measurement area frame (wmeg), which is an area frame containing all parts of
The sample measurement area frame extracting unit automatically extracts an edge in the image information of the sample (W) and extracts an area frame represented by the edge as the sample measurement area frame (wmeg). a region frame extraction unit;
The measuring apparatus is characterized by being configured as described above.

<Eleventh invention>
An extended sample measurement area frame setting unit is provided,
The extended sample measurement area frame setting unit
an extended sample measurement area frame setting unit for setting an extended sample measurement area frame (Wmeg) extending the sample measurement area frame (wmeg) outward by a predetermined distance;
The measuring apparatus according to the tenth aspect of the invention is configured as described above.

<Twelfth Invention>
The sample measurement area frame extraction unit
An area line represented by the sample measurement area frame (wmr) or the extended sample measurement area frame (Wmeg) is defined as an outer area frame (Ouf),
Identifying an inner area frame (Inf) for making a part inside the sample (W) a non-measurement area,
The inner part of the inner area frame (Inf) is a non-measurement area (Nor),
a sample measurement area frame extracting unit for extracting a sample measurement area frame (wmh) having a measurement area (Mer) defined as an area frame portion formed between the outer area frame (Ouf) and the inner area frame (Inf);
The measuring apparatus according to the ninth, tenth, or eleventh invention is configured as described above.

<Thirteenth invention>
A notification unit (29) is provided,
In the form having either the X-axis inner wall or the Y-axis inner wall, the notification unit (29) notifies that the sample (W) is not in contact with the X-axis inner wall or the Y-axis inner wall,
In the form having the X-axis inner wall and the Y-axis inner wall, the notification unit (29) notifies that the sample (W) is not in contact with the X-axis inner wall and the Y-axis inner wall,
The measuring apparatus according to any one of the third to tenth inventions or the eleventh invention is characterized by being configured as described above.

<14th Invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
The transparent table (2) has an X-axis inner wall, which is an inner wall in the X-axis direction, or a Y-axis inner wall, which is an inner wall in the Y-axis direction. a positioning part that can be placed on the upper surface of the transparent table (2) in a positioning state in contact with the Y-axis inner wall;
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, or the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line or the Y-axis edge position line is defined as a pre-stored edge line storage unit;
a sample partial area frame specifying unit that specifies a sample partial area frame (wtr) that is a measurement area frame of a part of the sample (W) of the sample (W);
a notification unit (29) for notifying that the sample (W) is not in contact with the X-axis inner wall or the Y-axis inner wall before specifying operation or automatically specifying the sample partial area frame (wtr); The measuring device is characterized by:

<Fifteenth invention>
A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
It has an X-axis inner wall, which is an inner wall in the X-axis direction, and a Y-axis inner wall, which is an inner wall in the Y-axis direction, provided on the upper part of the transparent table (2). a positioning part that can be placed on the upper surface of the transparent table (2) in a positioning state in contact with the inner wall and the Y-axis inner wall;
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) a sample measurement area frame extraction unit for extracting a sample measurement area frame (wmr), which is an area frame containing all parts of
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line and the Y-axis edge position line are stored in advance. and an edge line storage unit,
The sample measurement area frame extraction unit
The position of the X-axis edge position line is the position of the sample lower projecting portion (103) that is the most outward projecting portion on the lower side of the sample (W), or the outermost projecting portion on the upper side of the sample (W). The position of the sample upper projecting portion (104), which is the portion where
The Y-axis edge position line is the position of the right side projecting portion (102) of the sample (102), which is the most outwardly projecting portion on the right side of the sample (W), or the most outwardly projecting portion on the left side of the sample (W). is the position of the sample left protruding portion (101),
The X-axis line set on the side not in contact with the X-axis inner wall is defined as the X-axis non-edge line,
The Y-axis line set on the side not in contact with the Y-axis inner wall is the Y-axis non-edge line,
a sample measurement area frame extraction unit for extracting the sample measurement area frame from the X-axis edge position line, the Y-axis edge position line, the X-axis non-edge line, and the Y-axis non-edge line;
With the X-axis edge position line and the Y-axis edge position line as fixed lines, the X-axis non-edge line and the Y-axis non-edge line are automatically set or can be set manually by an operator,
The measuring apparatus is characterized by being configured as described above.

As is clear from the above description, the present invention has the following effects.
<Effect of the first invention>
Automatically identify the outermost protruding part of each side of the sample (W), and the left vertical line (lyr), right vertical line (ryr), lower horizontal line (nxr), upper horizontal line (pxr) which is the axis line ) is automatically specified, and the sample measurement of the minimum area in which all parts of the sample (W) are within the measurement area by the left vertical line (lyr), right vertical line (ryr), lower horizontal line (nxr), and upper horizontal line (pxr) Since it has the effect of efficiently and accurately automatically extracting the region frame (wmr), the operator does not need a complicated manual operation to specify the region including all parts of the sample (W). A measurement device having an efficient and accurate sample measurement region extraction function is realized.
In addition, noise such as dust, dirt, stains, and scratches outside the sample (W) can be excluded from the measurement.

<Effect of the second invention>
While exhibiting the same effect as the first invention, it is possible to make the area frame slightly larger than the minimum area frame containing all the parts of the sample (W), so that the entire area of the sample (W) It is possible to give the operator a sense of security that the part is included.
In particular, when used as a sample measurement area frame for the same sample to be measured later, it is not uncommon for the position and protrusion length of the portion protruding to the outside to differ between the previous sample and the subsequent sample. By setting the previously stored sample measurement area frame to the extended sample measurement area frame (Wmr), it is possible to ensure the measurement of the entire area of the sample even if there are variations in the projecting portions of the same sample.
Also, it is possible to determine that a sample in which a portion protruding outside the extended sample measurement area frame (Wmr) is found to be defective.

<Effect of the third invention>
The position of the edge portion of the X-axis inner wall is set as the X-axis edge position line, or the position of the edge portion of the Y-axis inner wall is set as the Y-axis edge position line, and the X-axis edge position line or the Y-axis edge position line is stored in advance. A sample measurement area frame (wmr) formed by a horizontal line or a vertical line, an X-axis edge position line, or a Y-axis edge position line passing through the projecting portion of the sample that does not hit the positioning portion is extracted. Since the X-axis edge position line and the Y-axis edge position line representing the inner edge of the positioning part are a kind of fixed reference line, it is possible to perform processing without specifying the protruding part of the sample (W) that hits the inner wall of the positioning part. Therefore, the amount of information processing can be reduced accordingly, and efficient and accurate sample measurement region frame (wmr) extraction is realized.
Also, it is possible to know whether the sample (W) is in contact with the inner wall of the positioning portion.

<Effect of the fourth invention>
In addition to having the same effect as the third invention, since the X-axis edge position line and the Y-axis edge position line are stored in advance, the sample (W) can be projected at two points in contact with the inner wall of the positioning portion. This realizes a process that does not perform the part specifying process, and can reduce the amount of information processing accordingly.

<Effect of the fifth invention>
The expanded sample measurement area frame (Wmr) is set to be larger by a predetermined distance than the minimum area frame containing all the parts of the sample (W) while exhibiting the same effects as those of the third third invention or the fourth invention. As a result, even if the sample (W) to be set and measured later has variations in the protruding portions, the sample (W) can be measured over the entire range within the extended sample measurement range frame (Wmr) if the variation is within a predetermined range.
Also, it is possible to disqualify a sample (W) having a protruding portion protruding from the expanded sample measurement area frame (Wmr).

<Effect of the sixth invention>
The same effects as those of the third and fourth inventions or the fifth invention can be obtained, and it is possible to visually confirm whether or not the sample W is in contact with the inner wall of the X axis and the inner wall of the Y axis. There is an effect that it can be done.
If not, the sample (W) can be repositioned and re-measured.

<Effect of the seventh invention>
Erasing operation of the grayscale image of the positioning portion by manual operation, in which the same effects as those of the third to fifth or sixth inventions are obtained, and the boundary between the grayscale image of the sample (W) and the grayscale image of the positioning portion is difficult to distinguish. It has the effect of solving problems such as erroneous erasing due to Since there is no erroneous deletion or the like of a grayscale image, the anxiety of an operator is eliminated.

<Effect of the eighth invention>
By using the X-axis edge position line and the Y-axis edge position line as fixed reference lines, the two outermost protruding portions of the sample (W) contacting the X-axis inner wall and the Y-axis inner wall are defined as the X-axis edge position line, Since it is possible to use the Y-axis edge position line, the same effects as those of the fourth invention can be obtained.

<Effect of the ninth invention>
The same effects as those of the first to seventh inventions or the eighth invention are obtained, and the area of the inner frame (Inf) in the range where measurement is unnecessary is set as the non-measurement area, so the image processing area Also, the calculation processing area can be reduced, so that the amount of image processing and the amount of calculation processing can be reduced.

<Effect of the tenth invention>
Information processing is performed by using only the specimen measurement area frame (wmeg) represented by the edge of the specimen (W) extracted from the image information of the specimen (W) as the height/distance specific area at each coordinate position (x, y). can be reduced.

<Effect of the Eleventh Invention>
In addition to achieving the same effect as the tenth invention, the extended specimen measurement area frame (Wmeg) is set to be larger than the minimum area frame containing all the parts of the sample (W) by a predetermined distance, so that the unevenness of the projecting parts can be reduced. Even if there is a variation within a predetermined range, the entire range can be measured within the extended sample measurement range frame (Wmeg).
Also, it is possible to disqualify a sample having a protruding portion protruding from the expanded sample measurement area frame (Wmeg).

<Effect of the twelfth invention>
The same effects as those of the ninth, tenth, or eleventh inventions are obtained, and the area of the inner frame (Inf) of the range that does not require measurement is set as the non-measurement area, so that the image processing area and the The arithmetic processing area can be made smaller, so that the amount of image processing and the amount of arithmetic processing can be reduced.

<Effect of the thirteenth invention>
The same effects as those of the third to tenth inventions or the eleventh invention can be obtained, and the fact that the sample (W) is not in contact with the inner wall of the positioning part can be notified by the notification part (29). becomes.

<Effect of the Fourteenth Invention>
The same effect as the thirteenth invention is obtained, and the sample partial area frame (wtr), which is the measurement area frame of a part of the sample (W), is notified before the specified operation or before the automatic specification. It is possible to determine whether or not to execute the identification operation or automatic identification of (wtr).

<Effect of the fifteenth invention>
In addition to achieving the same effect as the third invention, setting the X-axis non-edge line and the Y-axis non-edge line in a form in which the X-axis edge position line and the Y-axis edge position line are fixed lines, for example, the measurement To enable an operator to set a desired position according to a purpose or the like.

1 is a block diagram of Embodiment 1 of the present invention; FIG. 4 is a flow chart showing the processing operation of the sample measurement area frame extracting unit according to the first embodiment of the present invention; FIG. 2 is a front view of a state in which a sample is placed on the upper surface of the transparent table of Example 1 of the present invention; FIG. 4 is a front view showing an example of displaying a scanning area grayscale image and extraction of a sample measurement area frame on a display according to the first embodiment of the present invention; Continuation of FIG. FIG. 4 is a front view showing an example of displaying an extraction of an expanded sample measurement area frame in Example 1 of the present invention on a display. FIG. 4 is a front view showing an example of displaying sample partial area frame extraction on a display in Example 1 of the present invention. The block diagram of Example 2 of this invention. FIG. 10 is a flow chart showing the processing operation of the sample measurement area frame extracting unit according to the second embodiment of the present invention; FIG. The front view of the state where the sample was mounted on the upper surface of the transparent table of Example 2 of this invention. FIG. 11 is a front view showing an example of displaying a scanning area grayscale image on a display according to the second embodiment of the present invention; FIG. 10 is a front view showing an example of displaying a scanning area grayscale image, extraction of a sample measurement area frame, and extraction of a sample partial area frame in Example 2 of the present invention. The front view of the state where four samples of Example 2 of this invention were set. FIG. 14 is a front view showing an example of extracting an extended sample measurement area frame in the placement of FIG. 13 and displaying it on the display; FIG. 14 is a front view showing an example of extracting a part of the extended sample measurement area frame in FIG. 13 and displaying it on the display; FIG. 11 is a front view showing an example of a method for identifying edge lines of positioning portions according to the second embodiment of the present invention; FIG. 11 is a front view showing an example of displaying sample measurement area frame extraction on a display in Example 3 of the present invention. FIG. 11 is a flow chart showing the processing operation of a sample measurement area frame extraction unit according to Embodiment 3 of the present invention; FIG. FIG. 11 is a front view showing an example of displaying on a display an extraction of an expanded sample measurement area frame according to the fourth embodiment of the present invention; The block diagram of Example 4 of this invention. FIG. 11 is a flow chart showing the processing operation of a sample measurement area frame extraction unit according to Embodiment 4 of the present invention; FIG. FIG. 11 is a front view showing an example of displaying an enlarged sample measurement area frame extraction on a display according to the fifth embodiment of the present invention; FIG. 11 is a flow chart showing the processing operation of a sample measurement area frame extraction unit according to Embodiment 5 of the present invention; FIG. The front view of the state where the sample of Example 6 of this invention was mounted. FIG. 11 is a front view showing an example of displaying sample measurement area frame extraction on a display in Example 6 of the present invention. FIG. 11 is a front view showing an example of displaying sample partial area frame extraction on a display in Example 7 of the present invention. The front view which shows the example which displayed on the display the Example 8 of this invention.

EXAMPLES Examples that are the best mode for carrying out the present invention will be described below. However, it is not intended to limit the present invention only to these examples. In addition, in the description of the embodiments to be described later, the same reference numerals are given to the same constituent parts as in the above-described embodiments, and redundant descriptions will be omitted.

<Definition of description by working examples and drawings>
With the optical sensor unit 17 side as the front, a view of the sample W side (surface side) from the optical sensor unit 17 side (front) will be described as a front view.
In the front view, the left side of the X-axis is defined as "left", the right side of the X-axis is defined as "right", the bottom side of the Y-axis is defined as "bottom", and the upper side of the Y-axis is defined as "upper". do.
Also, the XY plane is a plane on which the X axis and the Y axis are placed.

In the first embodiment of the present invention shown in FIGS. 1 to 7, the measurement apparatus 1 emits light from an irradiation unit 3 arranged below a transparent table 2 to a sample W placed on the upper surface of the transparent table 2. A light-receiving unit 4 provided below the transparent table 2 receives the sample reflected light, which is the reflected light from the measurement surface (surface) of the sample W of the irradiated light. Then, the sample light reception information Wri, which is the light reception information, is processed to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface (surface) of the sample W. A measuring device,
A sample measurement area which is an area frame narrower than the scanning area sz indicated by the scanning area light receiving information szd, which is the light receiving information of the entire scanning area of the irradiation unit 3 and the light receiving unit 4, and which is an area frame containing all parts of the sample W. It is provided with a sample measurement area frame extraction unit 5 that automatically forms and extracts the frame wmr.
The scanning area sz may not be light reception information for the entire scanning area. For example, light reception information of a specified area narrower than the predetermined scanning area from the entire scanning area may be used.

The transmittance of the transparent table 2 is such that the irradiated light (for example, a laser beam) from the irradiating unit 3 is transmitted, and the reflected light of the level received by the light receiving unit 4 is not generated. is no data (does not exist).

The transparent table 2 is fixed, and an optical sensor unit 17 having a light receiving section 4 and an irradiation section 3 is provided below the transparent table 2 so as to move and scan in the X-axis direction and the Y-axis direction. A scanning mode in which the optical sensor unit 17 is fixed and the transparent table 2 moves in the X-axis direction and the Y-axis direction may also be employed.
The scanning area light reception information szd is stored in the scanning area light reception information storage unit 18. The scanning area light reception information szd is processed to obtain grayscale image information representing the luminance level at each coordinate position (x, y) of the sample, or the height level. Scanning area grayscale image information szi, which is grayscale image information (hereinafter referred to as "grayscale image" or "grayscale image information") representing the The sample grayscale image information Wid (the image represented by the sample grayscale image information Wid is the sample grayscale image Wi), which is the grayscale image information of the sample W in the grayscale image information szi, is processed to obtain a measurement area frame of the sample. A certain sample measurement area frame wmr is automatically formed and extracted. Sample measurement area frame data wmd representing the sample measurement area frame wmr is stored in the sample measurement area frame data storage unit 20 .
The grayscale image information representing the height level is color grayscale image information or black and white grayscale image information (for example, 256 or more grayscales).
Since the extraction of the sample measurement area frame wmr is intended to reduce processing information as much as possible, the extraction range area (extraction area) is as narrow as the conditions allow.

<Configuration and processing operation of sample measurement area frame extraction unit 5>
The configuration and processing operation of the sample measurement area frame extraction unit 5 for extracting the sample measurement area frame wmr will be described.
[step 1] (see Figures 2, 3, 4 and 5)
A sample left-side projecting portion 101, which is the most outwardly projecting portion on the left side of the sample W, is specified by the sample left-side projecting portion image information 101i of the sample grayscale image Wi,
[step2]
A sample right-side projecting portion 102, which is the portion that projects most outward on the right side of the sample W, is specified by the sample right-side projecting portion image information 102i of the sample grayscale image Wi,
[step3]
A sample lower projecting portion 103, which is the most outwardly projecting portion on the lower side of the sample W, is specified by a sample lower projecting portion image 103i of the sample grayscale image Wi,
[step4]
A sample upper protrusion portion 104, which is a portion protruding to the outermost side on the upper side of the sample W, is specified by a sample upper protrusion portion image 104i of the sample grayscale image Wi,
[step 5]
A vertical line represented by a Y-axis passing through the position of the sample left-side projecting portion image information 101i (sample left-side projecting portion 101) is specified as a left vertical line lyr,
[step6]
A vertical line represented by the Y-axis passing through the position of the right-side sample projecting portion image information 102i (the right-side sample projecting portion 102) is specified as a right vertical line ryr,
[step7]
A horizontal line represented by the X-axis passing through the position of the sample lower projecting portion image 103i (sample lower projecting portion 103) is specified as a lower horizontal line nxr,
[step8]
A horizontal line represented by the X-axis passing through the position of the sample upper projecting portion 104 (specimen upper projecting portion 104) is specified as an upper horizontal line pxr,
[step 9] (see Fig. 2, Fig. 5, etc.)
An area frame formed by the left vertical line lyr, the right vertical line ryr, the lower horizontal line nxr, and the upper horizontal line pxr (here, the "closed area frame") is extracted as the sample measurement area frame wmr,
[step 10] (See FIGS. 1, 2, 6, etc.)
when the extended sample measurement area frame is set in the extended sample measurement area frame setting unit 13, forming and extracting an extended sample measurement area frame Wmr extended outward by a predetermined distance;
The above [step 1] to [step 10] are automatically processed.
The sample measurement area frame wmr or the extended sample measurement area frame Wmr is displayed on the display 19, and the sample grayscale image Wi is also displayed thereon, or can be displayed thereon. (See FIGS. 1, 4, 5, 6, etc.).
5 to 7 are images showing extraction of measurement area frames displayed on the display. This also applies to other embodiments described later.

<Generation of 3D data of sample surface> (see FIG. 1, etc.)
The sample measurement area frame data wmd is automatically sent to the sample measurement area frame height information generation unit 23, and the sample measurement area frame height information generation unit 23 calculates the surface of the sample W only in the sample measurement area frame data wmd. sample height data whd, which is height data at each coordinate position (x, y) of .
The flatness determination unit 26 can determine whether the flatness is good or bad based on the sample height data whd.
Since the sample height data whd is the distance from the reference position, it is the surface shape data W3Dd that can express the surface shape of the surface of the sample W in three dimensions. 3D image can be displayed.
Such a 3D image is displayed in a color-coded or density-coded form for each height.
The reference position is the reference position on the side of the optical sensor unit 17, the position of the upper surface of the transparent table, the position of the surface of the reflecting member provided on the upper surface of the table, or the position of the portion of the sample W that is in contact with the upper surface of the transparent table. Although not shown in the drawings, it is preferable to use the position of the surface of a reflecting member provided on the top surface of the table as the reference position.

<Specification of sample partial area frame wtr→Determination of flatness> (see FIGS. 1, 7, etc.)
The scanning area light reception information szd is automatically or manually sent to the sample partial area frame specifying unit 24 .
The sample partial area frame identification unit 24 forms and extracts a sample partial area frame wtr, which is a measurement area frame of a part of the sample W, and stores sample partial area frame data wtd, which is data representing the sample partial area frame wtr. .
The sample partial area frame data wtd is sent to the sample partial area frame representative value determining section 25 .
A sample partial area frame representative value determination unit 25 determines a representative value Rv (height data) of each sample partial area frame wtr, and the degree of flatness of each representative value Rv from the reference plane is specified. is determined whether the flatness is within the range of .
Each height information of the sample partial area frame wtr is data indicating the height at each coordinate position (x, y) of the measurement plane (surface) of the sample W on the XY plane of the sample partial area frame wtr portion.
The representative value Rv is a maximum value, a minimum value, an average value, or the like.

Since only the sample grayscale image Wi is sufficient for extracting the sample partial area frame wttr, the sample measurement area frame data wmd does not necessarily have to be sent to the sample partial area frame specifying unit 24 .
The sample partial area frame wtr may be specified automatically by using acquired data such as pre-stored CAD data or pre-acquired data. Here, the sample grayscale image Wi is displayed on the display 19, and the operator manually operates a mouse or the like to enclose the sample protrusion portion image wti, which is the image of the sample protrusion portion wt, one by one with an enclosing frame. A region frame wtr is specified, and a sample partial region frame group wtrg is formed by a plurality of the sample partial region frames wtr (see FIGS. 1, 7, etc.).
If it is difficult to distinguish between the sample projection portion wt and other portions in a grayscale image or a color image, the sample, which is the area frame of each sample projection portion wt, is displayed based on the height information expressed by color-coding the height. Identify the subregion frame wtr.

Height measurement (including flatness measurement) at each coordinate position (x, y) of the entire sample W is processed using the automatically extracted sample measurement area frame wmr, and light reception information only within the sample measurement area frame wmr is processed. to be realized.
Height measurement (including flatness measurement) at each coordinate position (x, y) of a part of the sample W or a subgroup consisting of a plurality of the parts by the sample partial area frame wtr or the sample partial area frame group wttrg, It is realized by processing the received light information of only the sample partial area frame wtr or the sample partial area frame group wtrg.

Height measurement (including flatness measurement) at each coordinate position (x, y) of the entire sample W is performed using the automatically extracted extended sample measurement area frame Wmr, and light reception information only within the extended sample measurement area frame Wmr is obtained. process and implement.

A ready-made irradiation/reception unit provided by a manufacturer can be used as the irradiation/reception unit 6 .
<Example of irradiation/receiving unit for phase shift method>
For example, Keyence Corporation's "XG-8000 Series XR- HT40MD" irradiation light receiving unit. In this system, multiple stripe patterns (striped patterns) projected at high speed from two projectors on the left and right sides of the sample are photographed (received) by a central camera (photodetector/light receiver), and the irradiation and light receiving unit The height of each coordinate position (x, y) from the reference position on the side to the surface of the sample is measured and obtained, and the three-dimensional shape data represented by the height of each coordinate position (x, y) and each coordinate position The luminance level at (x,y) can be obtained.
<Example of irradiation light receiving unit for light section method>
For example, there is an irradiation/receiving unit of “LJ-V7000 Series” manufactured by KEYENCE CORPORATION, which uses a light section method as a measurement method. Since the light-section method is a method for obtaining the shape (profile) of a line-shaped cross section, the cutting position where the light-section is performed on the sample is continuously changed in one direction to obtain a continuous profile (line shape). 3D shape data is obtained by synthesizing the obtained profiles. The irradiation light is a blue-violet laser beam of 405 nm.
<Example of confocal irradiation/receiving unit>
For example, there is a “Double scan high-precision laser measuring instrument LT-9000 series” manufactured by Keyence Corporation, which uses a confocal method as a measurement method. This adopts a coaxial optical system with a confocal method. The height of the object is measured on the principle of measuring the focused position on the object. Three-dimensional shape data and the luminance level at each coordinate position (x, y) can be obtained by scanning the irradiation/reception unit in the XY directions.
The example of the irradiation/reception unit described above is merely an example, and multiple companies provide various irradiation/reception units and controllers.
The present invention can be practiced by those skilled in the art using the illumination receiving units and controllers provided by these companies.

In addition, as the measurement method of the present invention, the confocal method, moire topography method, interference fringe method, spot light projection method, line light projection method, pattern projection method, optical time difference method, optical frequency difference method, optical phase difference method, optical A coherence method and the like can be mentioned.

Embodiment 2 of the present invention shown in FIGS. 8 to 16 is mainly different from Embodiment 1 in that a rectangular frame-shaped positioning portion 6 is provided in a fixed form on the upper portion of the transparent table 2, and the positioning portion 6 is A reflecting member 38 provided in a coating form on the upper surface of the transparent table 2 is positioned in a concave portion provided in the bottom, a sample measurement area frame raw extraction unit is used as a sample measurement area frame extraction unit 12, an edge line storage unit 11 is provided, and a sample is provided. The measuring device 15 is provided with the measurement area frame data storage unit 20 and the reporting unit 29 that reports (set error reporting ala) that the sample W does not hit the inner wall of the positioning unit 6 (there is a gap). It is in.

In FIG. 10, which is a front view, the positioning portion 6 includes an upper X-axis inner wall 7N positioned above, a lower X-axis inner wall 7P positioned below, a left Y-axis inner wall 8L positioned on the left, and a right Y-axis inner wall 8L positioned on the right. It has an inner wall 8R so that the sample W can be placed on the upper surface of the transparent table 2 in a positioning state (set position) in which the sample W is in contact with the lower X-axis inner wall 7P and the left Y-axis inner wall 8L.
The inner wall 16 of the positioning portion 6 is a wall surface perpendicular to the upper surface of the transparent table 2 .
The positioning part 6 and the transparent table 2 are made of a member made of quartz glass, both of which are permeable. Therefore, even if there is a slight amount of reflected light, it is a low-level reflected light that cannot be detected by the light receiving section 4, so the transparent table 2 and the transparent positioning section 6 are not detected. However, since the inner wall of the positioning part 6 is also mirror-finished (transmissive finish), irregular reflection (diffuse reflection) may occur in a part of the edge portion. Dotted image or noise-like image).

The sample measurement area frame extracting unit 12 extracts a sample measurement area frame wmr which is an area frame narrower than the scanning area sz of the scanning area light reception information szd and which is an area frame containing all parts of the sample W. Since the extraction of the sample measurement area frame wmr is intended to reduce processing information as much as possible, the extraction range area (extraction area) is as narrow as the conditions allow. (See FIGS. 8, 12, 14, etc.)

<Memory of Edge Line> (See FIGS. 11, 12, etc.)
The edge line storage unit 11
An upper X-axis edge 7Ni that is an edge portion of the upper X-axis inner wall 7N, a lower X-axis edge 7Pi that is an edge portion of the lower X-axis inner wall 7P, a left Y-axis edge 8Li that is an edge portion of the left Y-axis inner wall 8L, and a right Y An edge line 107 having X-axis edge position lines 105a, 105b and Y-axis edge position lines 106a, 106b, which is specified based on the right Y-axis edge 8Ri, which is the edge portion of the shaft inner wall 8R, is stored in advance. there is

Since the image of the edge portion of the positioning portion 6, which is a transparent body, is detected as an unclear and unclear image (slightly dotted image or noise-like image), it is difficult to specify the edge line. .
Since the edge line (edge portion) of the positioning portion 6 is clarified by the theoretical value and the actual measurement value in design, the green portion obtained by the theoretical value and the actual measurement value is stored (registered) in advance, and is used during the measurement scanning. It is preferable to automatically remove the area of the positioning unit 6 including the edge area of , as an information removal area, and exclude it (no data) from the measurement object, or make it possible to exclude it.
In addition, since the edge portion is clearly defined by the theoretical value and the actual measurement value in designing, it can be stored in advance, and the light receiving information of the positioning portion 6 in the outer area can be automatically excluded from the stored edge portion. can.

An example of the method of actually measuring the edge line will be described with reference to FIG.
The inner edge portion of the positioning portion 6 made of a transmissive body (here, quartz glass) through which the irradiation light from the irradiation portion 3 is transmitted is difficult to cause irregular reflection, resulting in a blurred or unclear image, making it difficult to detect. is.
In this case, rectangular auxiliary tools 50a, 50b, 50c, and 50d using members that reflect or diffusely reflect the irradiated light shown in FIG. .
The outer edge lines of the auxiliary tools 50a, 50b, 50c, and 50d are detected, and edge lines 107 are generated and stored by using the outer edge lines as X-axis edge position lines 105a, 105b and Y-axis edge position lines 106a, 106b.
Protrusions 49a and 49b are provided at intervals on the other wall of the auxiliary tool body 48 of the auxiliary tools 50a, 50b, 50c and 50d. The protruding portions 49a and 49b can be brought into contact with the inner walls of the positioning portion 6 at four locations, respectively, so that measurement scanning can be performed. In this case, lines passing through the tips of the protruding portions 49a and 49b of the auxiliary tools 50a, 50b, 50c, and 50d are generated, and lines passing through the tips are X-axis edge position lines 105a, 105b and Y-axis edge position lines. Edge lines 107, 106a and 106b, are generated and stored. The protruding portions 49a and 49b are preferably the portions where the ground contact surface (bottom portion) of the table upper surface protrudes the most, and the protruding portions 49a and 49b are sloped surfaces that move away from the wall surface toward the upper portion.

The positioning part 6 may be a diffusely reflecting member (for example, non-transparent ceramics, frosted glass, etc.) that diffusely reflects the light emitted from the irradiation part 3 . A reflective member may be selected according to the characteristics of the irradiation/reception unit.
By doing so, it becomes possible to detect the edge of the positioning portion 6 as a sharp and clear image.
When the positioning section 6 is a reflecting member or diffusely reflecting member, the reflecting member 38 is provided outside the positioning section 6 so that the image can be distinguished from the reflecting member 38 . When provided in the positioning portion 6, a reflecting member having a luminance different from that of the positioning portion 6 is used, or a gap is provided between the positioning portion 6 and the reflecting member through which the irradiation light of the irradiation portion 3 is transmitted. Better to

<Configuration/processing operation of sample measurement area frame extraction unit 12>
The configuration and processing operation of the sample measurement area frame extracting section 12 for extracting the sample measurement area frame wmr is such that the left side of the sample W is applied to the left inner wall of the positioning section 6 and the lower side of the sample W is placed on the positioning section 6 in the front view. It will be explained in a set form applied to the lower inner wall of the.
[step 1] (See FIGS. 9, 11, 12, 14, etc.)
A sample right-side protrusion portion 102, which is the portion that protrudes most outward on the right side of the sample W, is specified by a sample right-side protrusion portion image 102i that is image information (for example, grayscale image information) of the sample W,
[step2]
A sample upper protrusion portion 104, which is a portion protruding to the outermost side on the upper side of the sample W, is specified by a sample upper protrusion portion image 104i, which is image information (for example, grayscale image information) of the sample W, and
[step3]
A vertical line represented by the Y-axis passing through the position of the right projecting portion 102 of the sample is specified as a right vertical line ryr,
[step4]
A horizontal line represented by the X-axis passing through the position of the sample upper projecting portion 104 is specified as an upper horizontal line pxr,
[step 5]
The X-axis edge position line 105 stored in advance is set as the lower protruding portion 103 of the sample, and the X-axis edge position line 105 is set as the lower horizontal line nxr,
[step6]
The Y-axis edge position line 106 stored in advance is set as the sample left side projecting portion 101, and the Y-axis edge position line 106 is set as the left vertical line lyr,
[step 7] (See FIGS. 8, 9, 12, etc.)
Extracting the area frame formed by the left vertical line lyr, the right vertical line ryr, the lower horizontal line nxr and the upper horizontal line pxr as the sample measurement area frame wmr,
[step 8] (see FIGS. 8, 9, 12, etc.)
When the extended sample measurement area frame is set or has been set in the extended sample measurement area frame setting unit 13, an extended sample measurement area in which all or part of the sample measurement area frame wmr is extended outward by a predetermined distance. Extract the frame Wmr,
[step 9] (see FIGS. 8, 9, etc.)
The sample measurement area frame wmr and the extended sample measurement area frame Wmr are stored in the sample measurement area frame data storage unit 20 .
The above [step 1] to [step 9] are automatically processed.
The extended sample measurement area frame Wmr and the sample grayscale image Wi are displayed or can be displayed on the display 19 (see FIGS. 8, 12, 14, etc.).

The sample measurement area frame extracting unit 12 automatically extracts and specifies the sample projecting portion, which is the portion projecting to the outermost side of the sample (W) that does not contact the inner wall of the X axis and the inner wall of the Y axis, The horizontal line pxr and the right vertical line ryr are automatically specified, and the area frame formed by the upper horizontal line pxr, the right vertical line ryr, the X-axis edge position line 105a and the Y-axis edge position line 106a is extracted as the sample measurement area frame wmr. The sample measurement area frame extraction unit can automatically perform
Also, the operator can extract and specify the sample measurement area frame wmr by manually specifying the upper horizontal line pxr and the right vertical line ryr while viewing the image on the display.
This also applies to Example 6 and the like, which will be described later.

<Configuration and operation processing (1) of extended sample measurement area frame setting unit 13> (see FIG. 12, etc.)
setting the extended left vertical line Lyr at a position extended outward by a predetermined distance from the left vertical line lyr;
setting an extended right vertical line Ryr at a position extended outward by a predetermined distance from the right vertical line ryr;
setting an extended lower horizontal line Nxr at a position extended outward by a predetermined distance from the lower horizontal line nxr;
setting an extended upper horizontal line Pxr at a position extended outward by a predetermined distance from the upper horizontal line pxr;
An extended sample measurement area frame Wmr, which is a closed area frame formed by the extended left vertical line Lyr, the extended right vertical line Ryr, the extended lower horizontal line Nxr, and the extended upper horizontal line Pxr, is formed and extracted.

<Configuration/operation processing (2) of extended sample measurement area frame setting unit 13> (see FIGS. 13, 14, and 15)
setting an extended right vertical line Ryr at a position extended outward by a predetermined distance from the right vertical line ryr;
setting an extended upper horizontal line Pxr at a position extended outward by a predetermined distance from the upper horizontal line pxr;
An extended sample measurement area frame Wmr (here, an extended sample measurement area frame Wmr-1) is formed, which is a closed area frame formed by the left vertical line lyr, the lower horizontal line nxr, the extended right vertical line Ryr, and the extended upper horizontal line Pxr. to extract.
Since the left vertical line lyr and the lower horizontal line nxr indicate the inner edge position of the positioning unit 6, they are fixed positions. A region frame Wmr-1) is formed.

The upper horizontal line pxr (X-axis line) and the extended upper horizontal line Pxr (X-axis line) set on the side that does not contact the inner wall of the positioning portion 6 are the X-axis non-edge lines, and the right vertical line ryr (Y-axis line) and the extended right vertical line Ryr (Y-axis) is the Y-axis non-edge line.

When the sample (W) does not hit the left Y-axis inner wall 8L and the lower X-axis inner wall 7P of the positioning unit 6 (when there is a gap), the notification unit 29 notifies (notifies) of the set error notification ala. .
Specifically, there is a gap between the left vertical line lyr or the lower horizontal line nxr and the grayscale image (the sample grayscale image Wi) (a state in which there is no part of the inner wall of the positioning unit 6 that is in contact with the sample W), or When the gap distance is larger than a predetermined gap distance, a set error is reported ala. The setting error notification ala is a combination of these with a notification sound such as blinking display of the corresponding part, notification by blinking arrow, message notification such as "specimen does not hit the wall", "specimen setting error", change of screen background color, etc. There are various forms such as

13, 14, and 15, which are front views, four samples W (sample W-1, sample W-2, sample W-3, and sample W-4) are set at the four corners of the positioning unit 6, respectively. It shows the state and the measurement area of each sample. Four samples W are simultaneously measured in one measurement scan.
In the explanation so far, the setting of either the sample measurement area frame or the expanded sample measurement area frame in the sample W-1 (the image is the sample grayscale image Wi-1) has been explained, but the sample W-2 (the image is the Sample grayscale image Wi-2), sample W-3 (the image is the sample grayscale image Wi-3), and sample W-4 (the image is the sample grayscale image Wi-4). Either or both are set.
The expanded sample measurement area frame Wmr-2 of the sample grayscale image Wi-2 (specimen W-2) is defined by the upper horizontal line pxr, which is the X-axis line of the position where the sample lower projecting portion 103 hits, and the sample right projecting portion 102 hits. It is formed by the lower horizontal line nxr, the extended left vertical line Lyr, and the extended upper horizontal line Pxr, which are the Y-axis lines of the position where the
The extended sample measurement area frame Wmr-3 of the sample grayscale image Wi-3 (specimen W-3) is aligned with the left vertical line lyr, which is the Y-axis line of the position where the sample left side projecting portion 101 hits, and the sample upper side projecting portion 104 hits. It is formed by the upper horizontal line pxr, the extended right vertical line Ryr, and the extended lower horizontal line Nxr, which are the X-axis lines of the position where the
The expanded sample measurement area frame Wmr-4 of the sample grayscale image Wi-4 (specimen W-4) is defined by the upper horizontal line pxr, which is the X-axis line of the position where the sample lower projecting portion 103 hits, and the sample right projecting portion 102 hits. It is formed by the right vertical line ryr, the extended left vertical line Lyr, and the extended lower horizontal line Nxr, which are the Y-axis lines of the position where the

<Measurement area frame of sample W-1 (sample grayscale image Wi-1)> (see FIGS. 13, 14, and 15)
The extended upper horizontal line Pxr (X-axis) set on the side that does not contact the inner wall of the positioning portion 6 is the X-axis non-edge line, and the extended right vertical line Ryr (Y-axis) is the Y-axis non-edge line.
<Measurement area frame of sample W-2 (sample grayscale image Wi-2)>
The extended upper horizontal line Pxr (X-axis) set on the side that does not contact the inner wall of the positioning portion 6 is the X-axis non-edge line, and the extended left vertical line Lyr (Y-axis) is the Y-axis non-edge line.
<Measurement area frame of sample W-3 (sample grayscale image Wi-3)>
The extended lower horizontal line Nxr (X-axis) set on the side that does not contact the inner wall of the positioning portion 6 is the X-axis non-edge line, and the extended right vertical line Ryr (Y-axis) is the Y-axis non-edge line.
<Measurement area frame of sample W-4 (sample grayscale image Wi-4)>
The extended lower horizontal line Nxr (X-axis) set on the side that does not contact the inner wall of the positioning portion 6 is the X-axis non-edge line, and the extended left vertical line Lyr (Y-axis) is the Y-axis non-edge line.

<Measurement of the same sample> (see FIG. 8, etc.)
In the measurement after extraction of the sample measurement area frame wmr or the extended sample measurement area frame Wmr, the same sample W stored in the sample measurement area frame data storage unit 20 is designated by the same sample measurement instruction unit 21, and a new In a state in which the same sample W is set, for example, the entire scanning area is scanned to obtain the scanning area light reception information, and the sample measurement area frame is not extracted here. The received light information only for the part or only the stored expanded sample measuring area frame Wmr (hereinafter referred to as "sample measuring area received light information wssi") is processed to generate new sample height data whd of the same sample W. FIG.

Further, the scanning unit control section 22 scans and controls the optical sensor unit 17 so that the optical sensor unit 17 moves and scans only the stored sample measurement area frame wmr or extended sample measurement area frame Wmr. It is also good to acquire light reception information. In this case, sample height data whd in the scanning area is generated without extracting the sample measurement area frame there (not necessary). In this case, it is preferable to use the previously stored reference position as the reference position.

<Specification of sample partial area frame wtr→Determination of flatness> (see FIGS. 8, 12, etc.)
The sample grayscale image Wi and the sample measurement area frame data wmd are automatically sent to the sample partial area frame specifying unit 24, where the sample partial area frame wtr is specified (see FIG. 12, etc.). The frame representative value determination unit 25 determines the representative value Rv (height data) of each sample partial area frame wtr, and the degree of flatness of each representative value Rv from the reference position is specified. is within the range of . Here, the reference position is a reflecting member reference plane with the surface of the reflecting member 38 as a reference.
The height information of the sample partial area frame wtr is data indicating the height at each coordinate position (x, y) of the measurement surface (surface) of the sample W in the sample partial area frame wtr portion.
The representative value Rv is the highest value, lowest value, average value, or the like of height values at each coordinate position (x, y) in the sample partial area frame wtr.

Since only the sample grayscale image Wi may be used to specify the sample partial area frame wtr, the sample measurement area frame data wmd does not necessarily have to be sent to the sample partial area frame specifying unit 24 .
For specifying the sample partial area frame wtr, it is also possible to use one specified by CAD data and stored in advance. Here, the sample grayscale image Wi and the sample measurement area frame wmr are displayed on the display 19, and the sample projection partial image wti is surrounded one by one by the operator's manual operation using a mouse or the like, thereby forming the sample partial area frame wtr. A sample partial area frame group wtrg consisting of a plurality of the sample partial area frames wtr is formed (see FIGS. 8, 12, etc.).
If it is difficult to distinguish between the sample projection portion wt and other portions in a grayscale image or a color image, the sample, which is the area frame of each sample projection portion wt, is displayed based on the height information expressed by color-coding the height. Identify the subregion frame wtr.

<Measurement of the same sample> (see FIG. 8, etc.)
In the measurement after extraction of the sample partial area frame group wtrg, the same sample W is set, for example, the entire scanning area is scanned to obtain the scanning area light information. Only the light reception information (sample measurement area light reception information wssi) is processed (light reception information outside the stored sample partial area frame wtr is automatically removed and regarded as no data), and a new sample partial area of the same sample W is processed. Sample partial area frame data wtd representing the height (distance) at each coordinate position (x, y) of each frame wtr is generated.

Further, the scanning unit control section 22 scan-controls the optical sensor unit 17 so that the optical sensor unit 17 moves and scans only the area of the stored sample area frame group wtrg, and acquires the sample measurement area light reception information wssi. It's good. In this case, the sample measurement area light reception information wssi is processed without extracting the sample partial area frame wtr, and the height ( It is also preferable to generate sample area frame data wtd representing distance).

<Display of Edge Position Line of Positioning Portion on Display 19> (See FIGS. 12, 14, etc.)
In the display form in which the grayscale image of the sample W is displayed on the display, the X-axis edge position line 105 and the Y-axis edge position line 106 can be displayed, and are automatically displayed.
This makes it possible to visually confirm whether or not the sample W is in contact with the left Y-axis inner wall 8L and the lower X-axis inner wall 7P.
If there is a gap between the left Y-axis inner wall 8L and the lower X-axis inner wall 7P and the sample W (the sample W does not contact the inner wall), or if the gap distance is larger than a predetermined gap distance, the notification unit 29 sets the An error notification ala is automatically notified. The set error notification ala may take various forms, such as a blinking display of the relevant location, notification by a blinking arrow, message notification such as "the sample does not hit the wall", and a combination of these and notification sounds.

<Height measurement with the reference position (reference plane) as the reflecting member 38> (see FIG. 11, etc.)
The reflecting member 38 is a heat-resistant coating agent such as a ceramic-based coating agent or a metallic coating agent.
The operator creates a small enclosing frame at appropriate three points of the reflecting member grayscale image 38i, which is a grayscale image of the surface of the reflecting member 38, by operating a mouse or the like, and the representative value (average value, maximum height value, minimum height value, etc.), a plane connecting three representative values is set as a reflecting member reference plane, and the reflecting member reference at each coordinate position (x, y) on the XY plane Reflecting member reference surface shape data represented by the height of the surface of the sample W from the surface is generated. Such reflecting member reference surface shape data is three-dimensional shape data, and can be displayed on the display 19 as a 3D image.
The shape of the reflecting member 38 may be, for example, a shape in which a plurality of rectangular or circular shapes are arranged or arranged irregularly.

Embodiment 3 of the present invention shown in FIGS. 17 and 18 is mainly different from Embodiment 2 in that the sample measurement area frame extraction section is replaced with a sample measurement area frame extraction section 40 for extracting the sample measurement area frame wmh. It's in the point.
The sample measurement area frame extraction unit 40
[step 1] to [step 10]
Since it is the same as the first embodiment, the explanation is omitted.
[step 11]
The area line of the sample measurement area frame wmr or the extended sample measurement area frame Wmr is defined as the outer area frame Ouf,
[step 12]
specifying or designating an inner area frame Inf for setting a part inside the sample W as a non-measuring area, and setting a portion inside the inner area frame Inf as a non-measuring area Nor,
[step 13]
In this configuration, a sample measurement area frame wmh is formed and extracted with the area frame portion formed between the outer area frame Ouf and the inner area frame Inf as the measurement area Mer.
Since the area of the inner area frame Inf is set as the non-measurement area, the area for image processing and the area for arithmetic processing can be made small, so that the amount of image processing and the amount of arithmetic processing can be reduced.

As a method of specifying the inner area frame Inf, it is preferable to use data (for example, specified by CAD data) in which the non-measurement area inside the sample W is stored in advance.
It is also possible to display a grayscale image of the sample W on the display and specify or specify the inner region frame Inf by operating a mouse or the like.

In the fourth embodiment of the present invention shown in FIGS. 19 to 21, the main difference from the first embodiment is that the sample measurement area frame extracting section forms and extracts the sample measurement area frame wmeg. The point is that the measuring device 44 is formed as a part 45 .
The sample measurement area frame extraction unit 45
This configuration automatically extracts an edge in the grayscale image information of the sample W and automatically extracts an area frame represented by the edge as a sample measurement area frame wmeg.
The steps for extracting the sample measurement area frame wmeg are as follows.
[step 1] (Fig. 21)
The edge of the sample W in the grayscale image information (here, the scanning area grayscale image information szi) is automatically extracted, and the area frame represented by the edge is extracted as the sample measurement area frame wmeg (the irradiation light is transmitted and the reflected light is A transparent table 2 that does not occur is not detected).
[step2]
In the extended sample measurement area frame setting unit 13, when the extended sample measurement area frame is set or instructed, all parts of the sample measurement area frame wmeg are extended by a predetermined distance or a designated distance. Extract the expanded sample measurement area frame Wmeg.

The sample measurement area frame extracting unit 45 can form and extract an extended sample partial area frame group Wtrg in which the inner area frame Inf, which is the measurement-unnecessary portion of the inner portion of the sample W, is excluded from the measurement area as a non-measurement area. .
Forms for forming and extracting extended sample partial area frame group Wtrg include the following forms (see FIG. 19).
<First form>
[step 1]
The edge of the sample W (here, in the sample grayscale image Wi) in the grayscale image information (here, the scanning area grayscale image information szi) is automatically extracted, and the area frame represented by the edge is formed as the sample measurement area frame wmeg. Extract (transparent table 2 is not detected).
[step 2a]
An extended sample measurement area frame Wmeg, which is an area frame obtained by extending the sample measurement area frame wmeg, is formed and extracted.
[step 3a]
In the expanded sample measurement area frame Wmeg, an inner area frame Inf is specified or specified for making a part of the inside of the sample W a non-measurement area.
[step4]
An expanded sample partial area frame group Wtrg with the inner area frame Inf as the non-measurement area is formed and extracted.

<Second form>
[step 1]
The edge of the sample W (here, based on the sample grayscale image Wi) in the grayscale image information (here, the scanning area grayscale image information szi) is automatically extracted, and the area frame represented by the edge is automatically formed to obtain the sample measurement area frame wmeg. (transparent table 2 is not detected).
[step2b]
In the sample measurement area frame wmeg, an inner area frame Inf for making part of the inside of the sample W a non-measurement area is specified or specified.
[step3b]
A sample partial area frame group wtrg with the inner area frame Inf part as a non-measurement area is extracted.
[step4]
An extended sample partial area frame group Wtrg obtained by extending the sample partial area frame group wtrg is extracted.

The received light information within the sample measurement area frame wmeg, the extended sample measurement area frame Wmeg, the sample partial area frame group wtrg, or the extended sample partial area frame group Wtrg is processed to obtain the coordinates of the entire sample W or each partial area. Generate a height measurement (including a flatness measurement) at location (x,y).

In the fifth embodiment of the present invention shown in FIGS. 22 and 23, the main difference from the fourth embodiment is that the sample measurement area frame extracting section extracts the expanded sample partial area frame group Wtrg. It is at the point of 47.
[step 1]
The edge of the sample W (here, based on the sample grayscale image Wi) in the grayscale image information (here, the scanning area grayscale image information szi) is automatically extracted, and the area frame represented by the edge is automatically formed to obtain the sample measurement area frame. Extract as wmeg (transparent table 2 not detected).
[step2]
In the sample measurement area frame wmeg, an inner area frame Inf that specifies a non-measurement area inside the sample W that does not require measurement is specified.
[step3]
A partial area group wtrg composed of a plurality of sample partial area frames wtr formed by excluding the inner area frame Inf as a non-measurement area from the measurement area is extracted.
[step4]
An expanded sample partial area frame group Wtrg consisting of a plurality of expanded sample partial area frames Wtr obtained by expanding each sample partial area frame wtr is formed and extracted.

Embodiment 6 of the present invention shown in FIGS. 24 and 25 is mainly different from Embodiment 2 in that the positioning portion 6 is arranged only in the X-axis direction (FIG. (a)) or only in the Y-axis direction. It has a form (Fig. (b)).
<Forms of FIG. 24(a) and FIG. 25(a)>
The edge line storage unit 11 stores in advance the X-axis edge position line 105 of the lower X-axis inner wall 7P as the lower horizontal line nxr.
The sample W is set in such a manner that the lower X-axis inner wall 7P of the positioning portion 6 is brought into contact with the sample lower projecting portion 103 .
The sample measurement area frame extraction part 12 is a left vertical line lyr which is a Y-axis line passing through the sample left projecting portion 101 which does not contact the lower X-axis inner wall 7P, and an X-axis line which passes through the sample upper projecting portion 104 which does not contact the lower X-axis inner wall 7P. Identify the upper horizontal line pxr and the right vertical line ryr, which is the Y-axis line passing through the sample right-side projecting portion 102 that does not contact the lower X-axis inner wall 7P,
A sample measurement area frame wmr, which is a closed area frame formed by the lower horizontal line nxr, the left vertical line lyr, the right vertical line ryr, and the upper horizontal line pxr, is automatically formed and extracted.
When the extended sample measurement area frame is set in the extended sample measurement area frame setting unit 13, the extended sample measurement area frame is obtained by extending the lower horizontal line nxr, the left vertical line lyr, and the right vertical line ryr outward by a predetermined distance. Wmr is formed and extracted, or a lower horizontal line nxr, an extended left vertical line Lyr, which are obtained by extending lines other than the lower horizontal line nxr (left vertical line lyr, right vertical line ryr, and upper horizontal line pxr) outward by a predetermined distance, An extended sample measurement area frame Wmr is formed and extracted by the extended right vertical line Ryr and the extended upper horizontal line Pxr.

<Forms of FIG. 24(b) and FIG. 25(b)>
The edge line storage unit 11 stores in advance the Y-axis edge position line 106 of the left Y-axis inner wall 8L as the left vertical line lyr.
A sample W is set in such a manner that the sample left projecting portion 101 is brought into contact with the left Y-axis inner wall 8L of the positioning portion 6 .
The sample measurement area frame extraction part 12 is a lower horizontal line nxr that is an X-axis line that passes through the sample lower projecting portion 103 that does not contact the left Y-axis inner wall 8L, and an X-axis line that passes through the sample upper projecting portion 104 that does not contact the left Y-axis inner wall 8L. Identify the upper horizontal line pxr and the right vertical line ryr that is the Y-axis line passing through the sample right-side projecting portion 102 that does not hit the left Y-axis inner wall 8L,
A sample measurement area frame wmr, which is a closed area frame formed by the lower horizontal line nxr, the left vertical line lyr, the right vertical line ryr, and the upper horizontal line pxr, is automatically formed and extracted.
When the extended sample measurement area frame is set in the extended sample measurement area frame setting unit 13, the extended sample measurement area frame Wmr is obtained by extending the lower horizontal line nxr, the upper horizontal line pxr, and the right vertical line ryr outward by a predetermined distance. or extract lines other than the left vertical line lyr (right vertical line ryr, upper horizontal line pxr, lower horizontal line nxr) by extending outward by a predetermined distance, the left vertical line lyr, the extended right vertical line Ryr, An expanded sample measurement area frame Wmr is formed and extracted by the expanded upper horizontal line Pxr and the expanded lower horizontal line Nxr.

In Example 7 of the present invention shown in FIG. 26, the main difference from Example 2 is that the sample W is configured to have a large number of sample protrusions wt on the front, and a large number of reflective members 38 are arranged. It is a form.
(b) of FIG. 26 is the scanning grayscale image information, and if the sample projection portion wt and other portions can be identified by a black and white grayscale image or a color image, the sample projection portion can be identified based on the black and white grayscale image or color image. Identify the sample sub-box wtr, which is the box for each of wt.
If it is difficult to distinguish between the sample projection portion wt and other portions in a grayscale image or a color image, the sample, which is the area frame of each sample projection portion wt, is displayed based on the height information expressed by color-coding the height. Identify the subregion frame wtr.

In Embodiment 7 of the present invention shown in FIG. 27, the main differences from Embodiment 2 are the lower horizontal line nxr indicating the position of the X-axis edge position line 105 and the left vertical line indicating the position of the Y-axis edge position line 106. The point is that lyr is a fixed position line, and the operator manually operates (mouse, screen touch, keyboard operation, etc.) to extract the sample measurement area frame on the display screen of the display.

<Extraction of sample measurement area frame wmr (Fig. 27(a))>
An upper horizontal line pxr, which is an X-axis non-edge line, is set on the side not in contact with the lower X-axis inner wall 7P,
A right vertical line ryr, which is a Y-axis non-edge line, is set on the side that does not contact the left Y-axis inner wall 8L,
A lower horizontal line nxr, a left vertical line lyr, an upper horizontal line pxr, and a right vertical line ryr form a sample measurement area frame wmr, which is a rectangular closed area frame.

<Extraction of enlarged sample measurement area frame Wmr (Fig. 27(b))>
An extended upper horizontal line Pxr, which is an X-axis non-edge line, is set on the side not in contact with the lower X-axis inner wall 7P,
An extended right vertical line Ryr, which is a Y-axis non-edge line, is set on the side that does not contact the left Y-axis inner wall 8L,
A lower horizontal line nxr, a left vertical line lyr, an extended upper horizontal line Pxr, and a right vertical line Ryr form a sample measurement area frame Wmr, which is a rectangular closed area frame.

<Extraction of partial sample measurement area frame emr (Fig. 27(c))>
An upper horizontal line exr, which is an X-axis non-edge line, is set in the sample W on the side not in contact with the lower X-axis inner wall 7P,
An extended right vertical line Ryr, which is a Y-axis non-edge line, is set on the side that does not contact the left Y-axis inner wall 8L,
The lower horizontal line nxr, the left vertical line lyr, the upper horizontal line exr, and the extended right vertical line Ryr form a partial sample measurement area frame emr, which is a rectangular closed area frame.

The sample measurement area frame wmr, the sample measurement area frame Wmr, and the partial sample measurement area frame emr may be automatically extracted by a preset procedure.

INDUSTRIAL APPLICABILITY The present invention is mainly used in industries that use measuring devices for measuring the surface profile of electronic components or measuring devices for measuring the flatness of the surfaces.

W: sample,
wt: sample projecting portion,
Wi: sample gray scale image,
Wi-1: sample gray scale image,
Wi-2: sample gray scale image,
Wi-3: sample grayscale image,
Wi-4: Sample gray scale image,
Wid: sample grayscale image information;
wssi: sample measurement area light reception information;
wti: projection part image,
Wri: sample light reception information;
Wmr-1: extended sample measurement area frame,
Wmr-2: extended sample measurement area frame,
Wmr-3: extended sample measurement area frame,
Wmr-4: extended sample measurement area frame,
wmd: sample measurement area frame data,
Wmr: extended sample measurement range frame,
Wmd: extended sample measurement area frame data,
wtr: sample area frame,
wtd: sample area frame data,
wtrg: sample partial area frame group,
Wtrg: extended sample area frame group,
whd: sample height data,
W3Dd: surface shape data;
szd: scanning area light reception information;
sz: scanning area,
szi: scanning area grayscale image information;
lyr: left vertical line,
Lyr: extended left vertical line,
ryr: right vertical line,
Ryr: extended right vertical line,
nxr: lower horizontal line,
Nxr: extended lower horizontal line,
pxr: upper horizontal line,
Pxr: extended upper horizontal line,
Rv: representative value,
wmr: sample measurement area frame,
wmh: sample measurement area frame,
Ouf: outer area frame,
Inf: Inner frame,
Nor: non-measurement area,
Mer: measurement area,
wmeg: sample measurement area frame,
Wmeg: extended sample measurement area frame,
ala: set error notification,
exr: upper horizontal line,
emr: partial sample measurement area frame,


1: measuring device,
2: transparent table,
3: irradiation unit,
4: light receiving part,
5: sample measurement area frame extraction unit,
6: positioning part,
7N: Upper X-axis inner wall,
7Ni: upper X-axis edge image,
7P: Lower X-axis inner wall,
7Pi: lower X-axis edge image;
8L: Left Y-axis inner wall,
8Li: Left Y-axis edge image,
8R: Right Y-axis inner wall,
8Ri: right Y-axis edge image;
11: Edge line storage unit,
12: Sample measurement area frame extraction unit,
13: Extended sample measurement area frame setting unit,
15: measuring device,
16: inner wall,
17: optical sensor unit,
18: scanning area light reception information storage unit;
19: display,
20: Sample measurement area frame data storage unit,
21: Same sample measurement instruction unit,
22: scanning unit controller;
23: Sample measurement area frame height information generation unit,
24: Sample partial area frame specifying unit,
25: Sample area frame representative value determination unit,
26: determination unit,
28: Same sample area frame measurement instruction unit,
29: reporting unit,
38: reflecting member,
38i: reflective member grayscale image,
40: Sample measurement area frame extraction unit,
44: measuring device,
45: Sample measurement area frame extraction unit,
47: Sample measurement area frame extraction unit,
48: Auxiliary tool body,
49a, 49b: protrusions,
50a, 50b, 50c, 50d: auxiliary tools,
101: sample left protruding site,
101i: Image of the projecting site on the left side of the sample,
102: Sample right side projecting site,
102i: image of the projecting site on the right side of the sample,
103: Sample lower protruding portion,
103i: image of the projecting site on the lower side of the sample,
104: Sample upper projecting portion,
104i: Sample upper protrusion site image,
105a, 105b: X-axis edge position lines,
106a, 106b: Y-axis edge position lines,
107: Edge line.

<Generation of 3D data of sample surface> (see FIG. 1, etc.)
The sample measurement area frame data wmd is automatically sent to the sample measurement area frame height information generation unit 23, and the sample measurement area frame height information generation unit 23 calculates the surface of the sample W only in the sample measurement area frame data wmd. sample measurement surface height data whd, which is height data at each coordinate position (x, y) of .
The flatness determination unit 26 can determine whether the flatness is good or bad based on the sample measurement surface height data whd.
Since the sample measurement surface height data whd is the distance from the reference position, it is the surface shape data W3Dd that can express the surface shape of the surface of the sample W in three dimensions. A 3D image of the surface of the can be displayed.
Such a 3D image is displayed in a color-coded or density-coded form for each height.
The reference position is the reference position on the side of the optical sensor unit 17, the position of the upper surface of the transparent table, the position of the surface of the reflecting member provided on the upper surface of the table, or the position of the portion of the sample W that is in contact with the upper surface of the transparent table. Although not shown in the drawings, it is preferable to use the position of the surface of a reflecting member provided on the top surface of the table as the reference position.

<Measurement of the same sample> (see FIG. 8, etc.)
In the measurement after extraction of the sample measurement area frame wmr or the extended sample measurement area frame Wmr, the same sample W stored in the sample measurement area frame data storage unit 20 is designated by the same sample measurement instruction unit 21, and a new In a state in which the same sample W is set, for example, the entire scanning area is scanned to obtain the scanning area light reception information, and the sample measurement area frame is not extracted here. Received light information of only the part or only the stored extended sample measurement area frame Wmr (hereinafter referred to as "sample measured area received light information wssi") is processed to generate new sample measurement surface height data whd of the same sample W .

Further, the scanning unit control section 22 scans and controls the optical sensor unit 17 so that the optical sensor unit 17 moves and scans only the stored sample measurement area frame wmr or extended sample measurement area frame Wmr. It is also good to acquire light reception information. In this case, sample measurement surface height data whd in the scanning area is generated without extracting the sample measurement area frame there (not necessary). In this case, it is preferable to use the previously stored reference position as the reference position.

W: sample,
wt: sample projecting portion,
Wi: sample gray scale image,
Wi-1: sample gray scale image,
Wi-2: sample gray scale image,
Wi-3: sample gray scale image,
Wi-4: Sample gray scale image,
Wid: sample grayscale image information;
wssi: sample measurement area light reception information;
wti: projection part image,
Wri: sample light reception information;
Wmr-1: extended sample measurement area frame,
Wmr-2: extended sample measurement area frame,
Wmr-3: extended sample measurement area frame,
Wmr-4: extended sample measurement area frame,
wmd: sample measurement area frame data,
Wmr: extended sample measurement range frame,
Wmd: extended sample measurement area frame data,
wtr: sample area frame,
wtd: sample area frame data,
wtrg: sample partial area frame group,
Wtrg: extended sample area frame group,
whd: sample measurement surface height data ,
W3Dd: surface shape data;
szd: scanning area light reception information;
sz: scanning area,
szi: scanning area grayscale image information;
lyr: left vertical line,
Lyr: extended left vertical line,
ryr: right vertical line,
Ryr: extended right vertical line,
nxr: lower horizontal line,
Nxr: extended lower horizontal line,
pxr: upper horizontal line,
Pxr: extended upper horizontal line,
Rv: representative value,
wmr: sample measurement area frame,
wmh: sample measurement area frame,
Ouf: outer area frame,
Inf: Inner frame,
Nor: non-measurement area,
Mer: measurement area,
wmeg: sample measurement area frame,
Wmeg: extended sample measurement area frame,
ala: set error notification,
exr: upper horizontal line,
emr: partial sample measurement area frame,

1: measuring device,
2: transparent table,
3: irradiation unit,
4: light receiving part,
5: sample measurement area frame extraction unit,
6: positioning part,
7N: Upper X-axis inner wall,
7Ni: upper X-axis edge image,
7P: Lower X-axis inner wall,
7Pi: lower X-axis edge image;
8L: Left Y-axis inner wall,
8Li: Left Y-axis edge image,
8R: Right Y-axis inner wall,
8Ri: right Y-axis edge image;
11: Edge line storage unit,
12: Sample measurement area frame extraction unit,
13: Extended sample measurement area frame setting unit,
15: measuring device,
16: inner wall,
17: optical sensor unit,
18: scanning area light reception information storage unit,
19: display,
20: Sample measurement area frame data storage unit,
21: Same sample measurement instruction unit,
22: scanning unit controller;
23: Sample measurement area frame height information generation unit,
24: Sample partial area frame specifying unit,
25: Sample area frame representative value determination unit,
26: determination unit,
28: Same sample area frame measurement instruction unit,
29: reporting unit,
38: reflecting member,
38i: reflective member grayscale image,
40: Sample measurement area frame extraction unit,
44: measuring device,
45: Sample measurement area frame extraction unit,
47: Sample measurement area frame extraction unit,
48: Auxiliary tool body,
49a, 49b: protrusions,
50a, 50b, 50c, 50d: auxiliary tools,
101: sample left protruding site,
101i: Image of the projecting site on the left side of the sample,
102: Sample right side projecting site,
102i: image of the projecting site on the right side of the sample,
103: Sample lower protruding portion,
103i: image of the projecting site on the lower side of the sample,
104: Sample upper projecting portion,
104i: Sample upper protrusion site image,
105a, 105b: X-axis edge position lines,
106a, 106b: Y-axis edge position lines,
107: Edge line.

Claims (15)

A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
The sample (W) is an area frame narrower than the scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), and A sample measurement area frame extraction unit for extracting a sample measurement area frame (wmr), which is an area frame containing all of the parts of
The sample measurement area frame extraction unit
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
Identifying the sample left protruding portion (101), which is the most outwardly protruding portion on the left side of the sample (W),
Identifying a sample right projecting portion (102) that is the most outward projecting portion on the right side of the sample (W);
Identifying a sample lower protruding portion (103), which is the outermost protruding portion on the lower side of the sample (W),
Identifying a sample upper protruding portion (104) that is the outermost protruding portion on the upper side of the sample (W);
Identifying a vertical line passing through the left projecting portion (101) of the sample as a left vertical line (lyr),
Identifying a vertical line passing through the right projecting portion (102) of the sample as a right vertical line (ryr),
Identifying a horizontal line passing through the sample lower projecting portion (103) as a lower horizontal line (nxr),
Identifying a horizontal line passing through the sample upper projecting portion (104) as an upper horizontal line (pxr),
Automatically extracting the area frame formed by the left vertical line (lyr), the right vertical line (ryr), the lower horizontal line (nxr) and the upper horizontal line (pxr) as the sample measurement area frame (wmr) is a sample measurement area frame extraction unit that is performed systematically,
A measuring device configured as described above. An extended sample measurement area frame setting unit is provided,
The extended sample measurement area frame setting unit
setting an extended left vertical line (Lyr) set at a position extended outward by a predetermined distance from the left vertical line (lyr);
setting an extended right vertical line (Ryr) set at a position extended outward by a predetermined distance from the right vertical line (ryr);
setting an extended lower horizontal line (Nxr) set at a position extended outward by a predetermined distance from the lower horizontal line (nxr);
setting an extended upper horizontal line (Pxr) set at a position extended outward by a predetermined distance from the upper horizontal line (pxr);
An extended sample measurement area frame (Wmr), which is an area frame formed by the extended left vertical line (Lyr), the extended right vertical line (Ryr), the extended lower horizontal line (Nxr) and the extended upper horizontal line (Pxr) An expanded sample measurement area frame setting unit to be set,
2. The measuring device according to claim 1, characterized in that it is constructed as described above. A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
The transparent table (2) has an X-axis inner wall, which is an inner wall in the X-axis direction, or a Y-axis inner wall, which is an inner wall in the Y-axis direction. a positioning part that can be placed on the upper surface of the transparent table (2) in a positioning state in contact with the Y-axis inner wall;
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, or the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line or the Y-axis edge position line is defined as a pre-stored edge line storage unit;
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) a sample measurement area frame extraction unit that extracts a sample measurement area frame (wmr) that is an area frame containing all parts of
The sample measurement area frame extraction unit
Identifying a sample protruding portion, which is the outermost protruding portion on the side of the sample (W) that does not contact the X-axis inner wall or the Y-axis inner wall;
Identifying a horizontal line or a vertical line passing through the sample projecting portion,
a sample measurement area frame extraction unit that extracts an area frame formed by the horizontal line or the vertical line and the X-axis edge position line or the Y-axis edge position line as the sample measurement area frame (wmr);
A measuring device configured as described above. A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
It has an X-axis inner wall, which is an inner wall in the X-axis direction, provided on the upper part of the transparent table (2), and a Y-axis inner wall, which is an inner wall in the Y-axis direction provided in a form perpendicular to the X-axis inner wall. a positioning portion that enables the sample (W) to be placed on the upper surface of the transparent table (2) in a positioned state in which the sample (W) is in contact with the inner wall of the X axis and the inner wall of the Y axis;
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) a sample measurement area frame extraction unit for extracting a sample measurement area frame (wmr), which is an area frame containing all parts of
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line and the Y-axis edge position line are defined as and a pre-stored edge line storage unit,
The sample measurement area frame extraction unit
Identifying an X-axis side sample protruding portion and a Y-axis side sample protruding portion, which are the outermost protruding portions on the side of the sample (W) that do not contact the X-axis inner wall and the Y-axis inner wall,
Identifying a vertical line passing through the sample projecting portion on the X-axis side,
Identifying a horizontal line passing through the sample projecting portion on the Y-axis side,
a sample measurement area frame extracting unit that extracts an area frame formed by the horizontal line, the vertical line, the X-axis edge position line, and the Y-axis edge position line as the sample measurement area frame (wmr);
A measuring device configured as described above. 2. An extended sample measurement area frame setting unit is provided for setting an extended sample measurement area frame (Wmr) in which the horizontal line and the vertical line are extended outward by a predetermined distance. 5. The measuring device according to 3 or 4. 4. In the display mode in which the gray-scale image of the sample (W) is displayed on the display, the X-axis edge position line and the Y-axis edge position line can be displayed or are displayed. 5. The measuring device according to 5. In the display mode in which the sample measurement area frame (wmr) and the grayscale image of the sample (W) are displayed on the display,
The image of the positioning portion located outside the X-axis edge position line, the Y-axis edge position line, or one of the edge lines is hidden or can be hidden. The measuring device according to any one of claims 3 to 5 or 6. A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In the front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
An X-axis inner wall, which is an inner wall in the X-axis direction, is provided on the upper part of the transparent table (2), and a Y-axis inner wall, which is an inner wall in the Y-axis direction, is provided in a form perpendicular to the X-axis inner wall. a positioning portion that enables the sample (W) to be placed on the upper surface of the transparent table (2) in a positioned state in which the sample (W) is in contact with the inner wall of the X axis and the inner wall of the Y axis;
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line and the Y-axis edge position line are stored in advance. and an edge line storage unit. The sample measurement area frame extraction unit
specifying an area line representing the sample measurement area frame (wmr) or the extended sample measurement area frame (Wmr) as an outer area frame (Ouf);
Specify or designate an inner region frame (Inf) for making a part inside the sample (W) a non-measurement region, and a portion inside the inner region frame (Inf) as a non-measurement region (Nor) ,
a sample measurement area frame extracting unit for extracting a sample measurement area frame (wmh) having a measurement area (Mer) defined as an area frame portion formed between the outer area frame (Ouf) and the inner area frame (Inf);
The measuring device according to any one of claims 1 to 7 or 8, which is configured as described above. A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) A sample measurement area frame extracting unit for extracting a sample measurement area frame (wmeg), which is an area frame containing all parts of
The sample measurement area frame extracting unit automatically extracts an edge in the image information of the sample (W) and extracts an area frame represented by the edge as the sample measurement area frame (wmeg). a region frame extraction unit;
A measuring device configured as described above. An extended sample measurement area frame setting unit is provided,
The extended sample measurement area frame setting unit
an extended sample measurement area frame setting unit for setting an extended sample measurement area frame (Wmeg) obtained by extending the sample measurement area frame (wmeg) outward by a predetermined distance;
11. The measuring device according to claim 10, which is constructed as described above. The sample measurement area frame extraction unit
An area line represented by the sample measurement area frame (wmr) or the extended sample measurement area frame (Wmeg) is defined as an outer area frame (Ouf),
Identifying an inner area frame (Inf) for making a part inside the sample (W) a non-measurement area,
The inner part of the inner region frame (Inf) is a non-measurement region (Nor),
a sample measurement area frame extracting unit for extracting a sample measurement area frame (wmh) having a measurement area (Mer) defined as an area frame portion formed between the outer area frame (Ouf) and the inner area frame (Inf);
12. The measuring device according to claim 9, 10 or 11, which is configured as described above. A notification unit (29) is provided,
In the form having either the X-axis inner wall or the Y-axis inner wall, the notification unit (29) notifies that the sample (W) is not in contact with the X-axis inner wall or the Y-axis inner wall,
In the form having the X-axis inner wall and the Y-axis inner wall, the notification unit (29) notifies that the sample (W) is not in contact with the X-axis inner wall and the Y-axis inner wall,
The measuring device according to any one of claims 3 to 10 or 11, which is configured as described above. A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In the front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
The transparent table (2) has an X-axis inner wall, which is an inner wall in the X-axis direction, or a Y-axis inner wall, which is an inner wall in the Y-axis direction. a positioning part that can be placed on the upper surface of the transparent table (2) in a positioning state in contact with the Y-axis inner wall;
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, or the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line or the Y-axis edge position line is defined as a pre-stored edge line storage unit;
a sample partial area frame specifying unit that specifies a sample partial area frame (wtr) that is a measurement area frame for a portion of the sample (W);
a notification unit (29) for notifying that the sample (W) is not in contact with the X-axis inner wall or the Y-axis inner wall before specifying operation or automatically specifying the sample partial area frame (wtr); A measuring device characterized by: A sample (W) placed on the upper surface of the transparent table (2) is irradiated with irradiation light passing through the transparent table (2) from an irradiation unit (3) provided below the transparent table (2). Then, the sample reflected light, which is the reflected light from the measurement surface of the sample (W) of the irradiation light, is received by the light receiving unit (4) provided below the transparent table (2), and the received light information is A measuring device for processing sample light reception information (Wri) to generate sample measurement surface height data, which is data indicating the height at each coordinate position (x, y) of the measurement surface of the sample (W), ,
In a front view showing the surface of the sample (W) side viewed from the front with the light receiving part (4) side as the front,
It has an X-axis inner wall, which is an inner wall in the X-axis direction, and a Y-axis inner wall, which is an inner wall in the Y-axis direction, provided on the upper part of the transparent table (2). a positioning part that can be placed on the upper surface of the transparent table (2) in a positioning state in contact with the inner wall and the Y-axis inner wall;
The scanning area (sz) indicated by the scanning area light receiving information (szd), which is the light receiving information of the scanning areas of the irradiation unit (3) and the light receiving unit (4), is narrower than the scanning area (sz), and the sample (W) a sample measurement area frame extracting unit for extracting a sample measurement area frame (wmr), which is an area frame containing all parts of
The position of the edge portion of the X-axis inner wall is defined as the X-axis edge position line, the position of the edge portion of the Y-axis inner wall is defined as the Y-axis edge position line, and the X-axis edge position line and the Y-axis edge position line are stored in advance. and an edge line storage unit,
The sample measurement area frame extraction unit
The position of the X-axis edge position line is the position of the sample lower projecting portion (103) that is the most outward projecting portion on the lower side of the sample (W), or the outermost projecting portion on the upper side of the sample (W). The position of the sample upper projecting portion (104), which is the portion where
The Y-axis edge position line is the position of the right side projecting portion (102) of the sample (102), which is the most outwardly projecting portion on the right side of the sample (W), or the most outwardly projecting portion on the left side of the sample (W). is the position of the sample left protruding portion (101),
The X-axis line set on the side not in contact with the X-axis inner wall is defined as the X-axis non-edge line,
The Y-axis line set on the side not in contact with the Y-axis inner wall is the Y-axis non-edge line,
a sample measurement area frame extraction unit for extracting the sample measurement area frame from the X-axis edge position line, the Y-axis edge position line, the X-axis non-edge line, and the Y-axis non-edge line;
With the X-axis edge position line and the Y-axis edge position line as fixed lines, the X-axis non-edge line and the Y-axis non-edge line are set automatically or can be set manually by an operator,
A measuring device configured as described above.

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