JP2022092544A - Niobium powder, niobium-powder producing member, method of making them, and method of manufacturing niobium member - Google Patents

Abstract

To provide a high-purity niobium powder usable in fabricating a member by a 3D printer etc., a niobium-powder producing member, a method of making them, and a method of manufacturing a niobium member.SOLUTION: A niobium powder has respective contents of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements by 30 ppm or less, and Zr by 100 ppm or less, Ta by 1000 ppm or less, W by 70 ppm or less, Ni by 30 ppm or less, respective ones of Fe, Si, Ti and Al by 50 ppm or less, a total quantity of Cr+Co by 50 ppm or less, and respective contents of oxygen, nitrogen, carbon and hydrogen as impurity gas component elements by 300 ppm or less.SELECTED DRAWING: None

Description

The present invention relates to high-purity niobium powder that can be used for manufacturing members by a 3D printer, members for producing niobium powder for producing the niobium powder, methods for producing these, and methods for producing the niobium members.

Conventionally, many members made of niobium (Nb) having a complicated shape have been used for the superconducting acceleration cavity. These members are manufactured by plastic working, cutting, etc. of niobium material, which is costly and time consuming. Therefore, in order to reduce the cost and the manufacturing time, it has been proposed to manufacture a member having a complicated shape made of niobium by a 3D printer (see, for example, Patent Document 1).

However, the performance of the parts manufactured by the 3D printer does not reach the performance of the parts manufactured by the current plastic working or cutting, and it is currently impossible to replace the parts manufactured by the 3D printer.

Specifically, the performance of the superconducting accelerating cavity made of niobium is evaluated by the residual resistivity ratio (RRR) instead of the thermal conductivity at an extremely low temperature, which is complicated to measure. And, in order to use it as a part for an acceleration cavity, RRR (about 300K / 9.3K) is often required to be 300 or more. However, it was impossible for the RRR to exceed 300 with the parts manufactured by the 3D printer. For example, it is reported that the maximum value of RRR of a part obtained by laser laminated molding (SLM) using niobium powder is 135 (Non-Patent Document 1).

The method for producing metal powder used in 3D printers is generally the atomization method, but it is very difficult to melt niobium, which is a refractory metal, and since a crucible is used, contamination is included. It is difficult to produce high-purity niobium powder because it is easy to get rid of and there are many satellite powders and pores (defects) in the grains.
There is also a report on the production of niobium powder by the plasma atomization method, but the current situation is that high-purity niobium powder has not been obtained (Non-Patent Documents 2 and 3).

JP-A-2002-141196A

Romain Gerard, Fritz MOTSCHMANN, “Metal Additive Manufacturing at CERN and development of niobium for SRF”, Presentation Material of TESLA TECHNOLOGY COLLABORAION 2020, Esplanade des Particules 1, 1217 Meyrin, Switzerland P. Frigola, R. Agustsson, L. Faillace, A. Murokh, G. Ciovati, W. Clemens, P. Dhakal, F. Marhauser, R. Rimmer, J. Spradlin, S. Williams, J. Mireles, P. A., Morton, R.B., Wicker, “ADVANCE ADDITIVE MANUFACTURING METHOD FOR SRF CAVITIES OF VARIOUS GEOMETRIES”, Proceedings of SRF2015, Whistler, BC, Canada Cesar A. Terrazas, Jorge Mireles, Sara M. Gaytan, Philip A. Morton, Alejandro Hinojos, Pedro Frigola, Ryan B. Wicker, “Fabrication and characterization of high-purity niobium using electron beam melting additive manufacturing technology”, Int J Adv Manuf Technol (2016) 84: 1115 --1126

In view of the above circumstances, it is an object of the present invention to provide high-purity niobium powder, a member for producing niobium powder, a method for producing these, and a method for producing the niobium member, which can be used for manufacturing a member by a 3D printer.

In the first aspect of the present invention to achieve the above object, the content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as an impurity metal element is 30 ppm or less, Zr is 100 ppm or less, and Ta. Is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, and the total amount of Cr + Co is 50 ppm or less. The niobium powder is characterized in that the content of each is 300 ppm or less.

Here, the average particle size corresponding to a circle is 20 to 200 μm.
Further, a niobium powder manufacturing member having a residual ratio resistivity RRR of 300 or more is powdered by a plasma atomization method or an arc atomization method under a high vacuum of 3 × 10 ⁻² Pa or less.

The second aspect of the present invention is a member for producing niobium powder for producing niobium powder, and the content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements is 30 ppm. Below, Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of impurity gas component elements is contained. The niobium powder production member is characterized in that the amount of oxygen is 40 ppm or less, nitrogen is 30 ppm or less, carbon is 30 ppm or less, and hydrogen is 5 ppm or less.
Here, the residual ratio resistivity ratio RRR is 300 or more.

A third aspect of the present invention is a method for manufacturing a niobium powder manufacturing member for manufacturing niobium powder, which contains Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements. Cold niobium ingots with an amount of 30 ppm or less, Zr of 100 ppm or less, Ta of 1000 ppm or less, W of 70 ppm or less, Ni of 30 ppm or less, and Fe, Si, Ti, Al, Cr and Co of 50 ppm or less. By plastic processing, the content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements is 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, and W is 70 ppm or less. , Ni is 30 ppm or less, Fe, Si, Ti and Al are 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of impurity gas component elements is 40 ppm or less for oxygen, 30 ppm or less for nitrogen, and 30 ppm or less for carbon. , And a method for producing a niobium powder producing member, which comprises obtaining a niobium powder producing member having a hydrogen content of 5 ppm or less.

In the fourth aspect of the present invention, the niobium powder manufacturing member of the second aspect is used as a raw material, and as an impurity metal element by a plasma atomization method or an arc atomization method under a high vacuum of 3 × 10 ⁻² Pa or less. The content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf is 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si, Ti. Niobium is characterized in that niobium powder is obtained in which each of Al and Al is 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of each of oxygen, nitrogen, carbon, and hydrogen as an impurity gas component element is 300 ppm or less. It is in the method of producing powder.
Here, a niobium powder having an average particle size equivalent to a circle of 20 to 200 μm is obtained.

A fifth aspect of the present invention is a method for manufacturing a niobium member by laminating molding or spraying using niobium powder, wherein the niobium powder of the first aspect is used as a raw material and degassed. The content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements is 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, and W is 70 ppm or less. Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of impurity gas component elements is 40 ppm or less for oxygen, 30 ppm or less for nitrogen, 30 ppm or less for carbon, A method for producing a niobium member, which comprises producing a niobium member having a residual ratio resistance ratio of RRR of 300 or more and a hydrogen content of 5 ppm or less.

The niobium powder of the present invention has an impurity metal element content specified in the ATM B393 (Type 5) standard of the standard value or less, that is, Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, and Ni is 30 ppm or less. Fe, Si, Ti and Al are each 50 ppm or less, and the total amount of Cr + Co is 50 ppm or less, and at the same time, the contents of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements are respectively. It is 30 ppm or less, and the content of each of oxygen, nitrogen, carbon, and hydrogen as an impurity gas component element is 300 ppm or less, which is a completely new high-purity substance.

Further, the member for producing niobium powder of the present invention has an impurity metal element content specified in the ATM B393 (Type 5) standard of the standard value or less, that is, Zr of 100 ppm or less, Ta of 1000 ppm or less, W of 70 ppm or less. Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, and the total amount of Cr + Co is 50 ppm or less. At the same time, Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements are used. The respective contents are 30 ppm or less, and the respective contents of oxygen, nitrogen, carbon, and hydrogen as impurity gas component elements are less than the ASTM B393 (Type5) standard value, that is, oxygen is 40 ppm or less and nitrogen is 30 ppm. Hereinafter, carbon is 30 ppm or less and hydrogen is 5 ppm or less, which are completely new and highly pure.

Here, in the niobium powder manufacturing member of the present invention, the content of the impurity metal element specified in the ATM B393 (Type 5) standard is equal to or less than the standard value, that is, Zr is 100 ppm or less, Ta is 1000 ppm or less, and W is 70 ppm or less. , Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, and the total amount of Cr + Co is 50 ppm or less. At the same time, Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements A niobium ingot having a content of 30 ppm or less can be produced by cold plastic processing to form a linear or other niobium powder production member.

Further, the niobium powder of the present invention can be produced by the plasma atomizing method or the arc atomizing method under a high vacuum for the niobium powder producing member of the present invention.

Further, by using the niobium powder of the present invention to produce a niobium member by a laminated molding or a spraying method and then performing a degassing treatment, Mg, V, Mn, Cu, Mo, B, Be and The content of each Hf is 30 ppm or less, the content of the impurity metal element specified in the ATM B393 (Type 5) standard is less than the standard value, and the content of the impurity gas component element is 40 ppm or less for oxygen and 30 ppm for nitrogen. Hereinafter, a niobium member having carbon of 30 ppm or less and hydrogen of 5 ppm or less and a residual ratio resistance ratio of RRR of 300 or more can be produced.

It is an enlarged photograph of the surface and the cross section of the niobium powder of Example 2.

Hereinafter, embodiments of the present invention will be described.
The niobium powder of the present invention contains Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements of 30 ppm or less, Zr of 100 ppm or less, Ta of 1000 ppm or less, and W of 70 ppm. Hereinafter, Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of oxygen, nitrogen, carbon and hydrogen as impurity gas component elements is 300 ppm or less. Is.

Here, Zr, Ta, W, Ni, Fe, Si, Ti, Al, Cr and Co as impurity metal elements are specified in the ASTM B393 (Type5) standard, and the standard values are shown in Table 1 below. Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si, Ti, Al are 50 ppm or less, and the total amount of Cr + Co is 50 ppm or less, which are standard values. It is as follows.

The niobium member of the present invention can be used, for example, for manufacturing a member by a 3D printer, and the performance of the manufactured part is equal to or higher than that of a part manufactured by the current plastic working or cutting, and in particular. , It is possible to manufacture a part having a residual ratio resistance ratio RRR of 300 or more.

The niobium powder of the present invention having such an effect has the impurity metal element content specified in the ATM B393 (Type 5) standard being less than or equal to the standard value, as well as Mg, V, Mn, as impurity metal elements. The content of each of Cu, Mo, B, Be and Hf is 30 ppm or less, and the content of oxygen, nitrogen, carbon and hydrogen as impurity gas component elements is 300 ppm or less. .. The extremely low content of impurity metal elements and gas component elements means that the performance of the manufactured parts is the same as the performance of the parts manufactured by the current plastic working and cutting, even if the parts are manufactured by a 3D printer. Is equal to or higher than.

As the impurity metal element, it goes without saying that the content of the impurity metal element specified in the ASTM B393 (Type 5) standard is not more than the specified value, but Mg, V, Mn, Cu, Mo, B, Be and It is characterized in that the content of each of Hf is 30 ppm or less. Mg, V, Mn, Cu, Mo, B, Be and Hf are elements that affect the performance of manufactured parts when used for manufacturing parts by, for example, a 3D printer, and their respective contents are 30 ppm or less. , Preferably, the content of each is 10 ppm or less. Further, among the impurity metal elements specified in the ASTM B393 (Type 5) standard, the Al content is particularly preferably 30 ppm or less.

Further, in the present invention, based on the new finding that the content of the gas component has a great influence on the performance of the parts, particularly the residual ratio resistivity RRR, oxygen, nitrogen, carbon as the impurity gas component elements, The content of each of the gas and hydrogen was set to 300 ppm or less, which made it possible to manufacture a part having a residual resistivity ratio of RRR of 300 or more.

Further, the niobium powder of the present invention preferably has an average particle size equivalent to a circle of 20 to 200 μm. Here, the average particle size corresponding to a circle is measured according to JIS8827-1: 2018.

When the niobium powder of the present invention is used in a 3D printer, it is preferable to use the niobium powder having an average particle size of 20 to 200 μm corresponding to a circle. Further, since the parts manufactured by such a 3D printer use the niobium powder of the present invention, the performance is improved, and in particular, the parts having a residual ratio resistivity RRR of 300 or more are manufactured. Can be done.

In order to obtain such niobium powder of the present invention, it is necessary to use a member for producing niobium powder having the same high purity. In particular, a niobium powder manufacturing member having a residual ratio resistivity RRR of 300 or more is used, and the details will be described later, but the powder is pulverized by a plasma atomization method or an arc atomization method under a high vacuum of 3 × 10 ⁻² Pa or less. Is preferable.

The member for producing niobium powder of the present invention is a member for producing niobium powder, and contains Mg, V, Mn, Cu, Mo, B, Be, and Hf as impurity metal elements. The content of the impurity metal element specified in the ATM B393 (Type 5) standard is 30 ppm or less and the content of the impurity metal element is less than the standard value, and the content of oxygen, nitrogen, carbon, and hydrogen as the impurity gas component elements is ASTM B393 (Type 5). ) It is characterized by being less than or equal to the standard value.

Here, the standard values of the impurity metal element content specified in the ASTM B393 (Type 5) standard for the niobium powder manufacturing member and the oxygen, nitrogen, carbon, and hydrogen content as the impurity gas component element are as follows. It is as shown in Table 2.

Such a member for producing niobium powder is necessary for producing the above-mentioned niobium powder of the present invention, and needs to have at least the same high purity as the niobium powder.

Further, it is particularly preferable that the residual ratio resistivity RRR is 300 or more. This is because the above-mentioned high-performance niobium powder of the present invention can be obtained.

The member for producing niobium powder of the present invention may be a linear member such as a wire, a rod-shaped member, or the like, but in order to obtain the niobium powder of the present invention, the linear member is preferable.

In order to manufacture such a niobium powder manufacturing member of the present invention, the content of the impurity metal element specified in the ATM B393 (Type 5) standard is not more than the standard value, and Mg, V, Mn, Cu. It is necessary to prepare a niobium ingot having a content of each of Mo, B, Be and Hf of 30 ppm or less and plastically process the niobium ingot to form a member for producing niobium powder.

At this time, cold plastic processing is performed in order to obtain a niobium powder manufacturing member whose respective contents of oxygen, nitrogen, carbon, and hydrogen as impurity gas component elements are equal to or less than the ASTM B393 (Type 5) standard value. There is a need. This is because when plastic deformation is performed during heat, the contents of oxygen, nitrogen, carbon, and hydrogen as impurity gas component elements increase.

Cold plastic working is performed by gradually processing the ingot into a rod-shaped body, and further from the rod-shaped body to a linear body.
Here, "cold" means that plastic working is performed without heating, and plastic working may be performed at room temperature. However, when the working temperature exceeds 100 ° C, 100 is used with an inert gas or the like. It is necessary to cool down to ℃ or less.

In order to produce the niobium powder of the present invention, the above-mentioned member for producing niobium powder of the present invention is used as a raw material and pulverized by a plasma atomization method or an arc atomization method under a high vacuum of 3 × 10 ⁻² Pa or less. There is a need.

First, the powder is pulverized under high vacuum in order to obtain niobium powder in which the contents of oxygen, nitrogen, carbon, and hydrogen as impurity gas component elements are 300 ppm or less.

Here, under high vacuum, it is 3 × 10 − ² Pa or less, preferably 1 × 10 − ² Pa or less.

In order to pulverize under such a high vacuum, in particular, to obtain niobium powder having an average particle size of 20 to 200 μm equivalent to a circle, it is necessary to adopt a plasma atomization method or an arc atomization method, and in particular, arc atomization. It is preferable to adopt the method.

Here, in the plasma atomization method, a linear niobium powder manufacturing member is used as a raw material, which is melted by the heat generated by plasma and divided by a plasma jet to be pulverized.

Further, in the arc atomizing method, two linear niobium powder manufacturing members are used as raw materials, the raw materials are melted by an arc discharge generated between the two raw materials, and the raw materials are collided with the inert gas to form a powder. It is something to do.

Since these gas atomizing methods dissolve and powder even refractory metals without using a crucible, there is no possibility of contamination and high-purity niobium powder can be obtained. In particular, by performing the gas atomization under a high vacuum as described above instead of the environment of several Pa to 10 Pa, the powder becomes a spherical powder having few satellites and high fluidity, and becomes a powder having few pores.

In particular, the arc atomizing method is suitable for producing powder under high vacuum, and is most suitable as a method for obtaining niobium powder of the present invention.

The use of the niobium powder of the present invention is not particularly limited, but it can be used for producing a high-performance niobium member by a laminated molding or a spraying method.

At this time, in particular, by degassing the molded product, the content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements is 30 ppm or less, and ASTM B393 (Type 5). The content of the impurity metal element specified in the standard is less than the standard value, the content of each of oxygen, nitrogen, carbon, and hydrogen as the impurity gas component element is less than the ASTM B393 (Type5) standard value, and the residual ratio. A niobium member having a resistance ratio RRR of 300 or more can be manufactured.

Here, the degassing treatment is a purification treatment utilizing the diffusion phenomenon of the gas component contained in niobium, and is, for example, a titanium gettering treatment. The titanium gettering process involves depositing a titanium film on the surface of the niobium member and heat-treating it in a vacuum environment of about 1 × 10 ^-4 Pa to 1 × 10 ^-5 Pa in an environment of 1200 ° C., and the gas component inside the niobium member. It is a process to reduce.

(Example 1)
(Manufacturing of parts for manufacturing niobium powder)
Using the niobium ingot having the impurity content in Table 3, plastic working was repeated coldly in an environment of room temperature to produce a linear body (wire) having a diameter of 2 mm, which was used as a member for producing niobium powder of Example 1.

Table 3 shows the impurity content of the linear body.
Regarding the evaluation of the analytical values, the metal components were evaluated using ICPS-8100 manufactured by Shimadzu Corporation or ICP emission spectroscopic analysis method using SPS3520UV manufactured by Hitachi High-Tech Science. The O and N elements were evaluated using the Inactive Gas Melting-Infrared Absorption Method with TC600 manufactured by LECO. Element C was evaluated using a non-dispersive infrared absorption method using CS844 manufactured by LECO. Element H was evaluated using the Inert Gas Melting-Thermal Conductivity Method with RH404 manufactured by LECO.

The residual resistance ratio RRR was 306.
The residual resistance ratio RRR is measured by measuring the temperature and the resistance value by the 4-terminal method while cooling the sample with a refrigerator, and the resistance value at 9.3K and 293K is based on the resistance value of 293K. The ratio was taken as the RRR value.

(Comparative Example 1)
Using the niobium ingot having the impurity content in Table 3, plastic working was repeated in an environment where the ingot temperature was 300 to 500 ° C. to produce a linear body (wire) having a diameter of 2 mm, and the member for producing niobium powder of Comparative Example 1 was produced. And said.
Table 4 shows the impurity content of the linear body.
The RRR was 54.

(Example 2)
(Manufacturing of niobium powder)
Using the niobium powder manufacturing member of Example 1, niobium powder was obtained by an arc atomizing method. The arc atomization method was performed in an environment of 2.7 × 10 ⁻² Pa, and the conditions for arc atomization were a voltage of 20 V, an Ar gas purity of 4 N, an Ar gas pressure of 0.6 MPa, and a wire feed rate of 4.4 m / min.
Table 4 shows the impurity content of the obtained niobium powder.
The average particle size corresponding to the circle was 62 μm.
An enlarged photograph of the powder surface and the cross section of the niobium powder of Example 2 is shown in FIG.

(Comparative Example 2)
Using the niobium powder manufacturing member of Example 1, niobium powder was obtained by an arc atomizing method. The arc atomization method was performed in an environment of 9.3 Pa, and the conditions for arc atomization were a voltage of 20 V, an Ar gas purity of 4 N, an Ar gas pressure of 0.6 MPa, and a wire feed rate of 4.4 m / min.
Table 4 shows the impurity content of the obtained niobium powder.
The average particle size corresponding to the circle was 73 μm.

(Example 3)
(Manufacturing of niobium members)
Using the niobium powder of Example 2, a member was manufactured by a 3D printer. The shape of the member was a square bar of 2 × 2 × 50 mm, and after molding, it was degassed by titanium gettering.
The degassing treatment by titanium gettering was carried out in a vacuum environment of 1 × 10 ^-4 Pa, an environment of 1200 ° C., and a treatment time of 50 hours. Table 5 shows the impurity content of the members after titanium gettering.
The RRR of the manufactured niobium member was 351. The RRR before titanium gettering was 6.3.

(Comparative Example 3)
It was carried out in the same manner as in Example 3 except that titanium gettering was not performed.
The RRR of the manufactured niobium member was 6.3.

(Comparative Example 4)
Using the niobium powder of Comparative Example 2, a member was manufactured by a 3D printer. The shape of the member was a square bar of 2 × 2 × 50 mm, and after molding, it was degassed by titanium gettering.
The degassing treatment by titanium gettering was carried out in a vacuum environment of 1 × 10 ^-4 Pa, an environment of 1200 ° C., and a treatment time of 50 hours. Table 5 shows the impurity content of the members after titanium gettering.
The RRR of the manufactured niobium member was 79. The RRR before titanium gettering was 3.6.

Claims (9)

The contents of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements are 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, and Ni is 30 ppm or less. Fe, Si, Ti and Al are each 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the contents of oxygen, nitrogen, carbon and hydrogen as impurity gas component elements are 300 ppm or less. Niobium powder. The niobium powder according to claim 1, wherein the average particle size according to the equivalent circle diameter is 20 to 200 μm. The claim is characterized in that a member for producing niobium powder having a residual ratio resistivity RRR of 300 or more is powdered by a plasma atomization method or an arc atomization method under a vacuum of 3 × 10 ⁻² Pa or less. The niobium powder according to 1 or 2. A member for producing niobium powder, which is a member for producing niobium powder, and has a content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as an impurity metal element of 30 ppm or less, Zr of 100 ppm or less, and Ta. Is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si, Ti and Al are each 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of impurity gas component elements is 40 ppm or less for oxygen and nitrogen. A member for producing niobium powder, which comprises 30 ppm or less of carbon, 30 ppm or less of carbon, and 5 ppm or less of hydrogen. The niobium powder manufacturing member according to claim 4, wherein the residual ratio resistance ratio RRR is 300 or more. A method for manufacturing a niobium powder manufacturing member for manufacturing niobium powder, wherein the content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as an impurity metal element is 30 ppm or less, and Zr is 100 ppm. Hereinafter, niobium ingots having Ta of 1000 ppm or less, W of 70 ppm or less, Ni of 30 ppm or less, and Fe, Si, Ti, Al, Cr and Co of 50 ppm or less are coldly plastically processed to be an impurity metal element. The content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf is 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si. , Ti and Al are 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of impurity gas component elements is 40 ppm or less for oxygen, 30 ppm or less for nitrogen, 30 ppm or less for carbon, and 5 ppm or less for hydrogen. A method for manufacturing a niobium powder manufacturing member, which comprises obtaining a powder manufacturing member. Using the niobium powder manufacturing member according to claim 4 or 5 as a raw material, Mg, V, Mn, Cu, Mo as impurity metal elements can be obtained by the plasma atomization method or the arc atomization method under a vacuum of 3 × 10 ⁻² Pa or less. , B, Be and Hf contents are 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, W is 70 ppm or less, Ni is 30 ppm or less, Fe, Si, Ti and Al are 50 ppm or less, Cr + Co. A method for producing niobium powder, which comprises obtaining niobium powder having a total amount of 50 ppm or less and a content of oxygen, nitrogen, carbon, and hydrogen as impurity gas component elements of 300 ppm or less. The method for producing niobium powder according to claim 7, wherein a niobium powder having an average particle size of 20 to 200 μm corresponding to a circle is obtained. A method for manufacturing a niobium member by a laminated molding method or a spraying method using niobium powder, wherein the niobium powder according to any one of claims 1 to 3 is used as a raw material and degassed. The content of each of Mg, V, Mn, Cu, Mo, B, Be and Hf as impurity metal elements is 30 ppm or less, Zr is 100 ppm or less, Ta is 1000 ppm or less, and W is 70 ppm or less. Ni is 30 ppm or less, Fe, Si, Ti and Al are 50 ppm or less, the total amount of Cr + Co is 50 ppm or less, and the content of impurity gas component elements is 40 ppm or less for oxygen, 30 ppm or less for nitrogen, and 30 ppm or less for carbon. A method for producing a niobium member, which comprises producing a niobium member having a hydrogen content of 5 ppm or less and a residual ratio resistance ratio of RRR of 300 or more.

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