JP2022092140A - Storage case - Google Patents

Abstract

To provide a storage case that is able to prevent formation of a flaw in a holding surface and adhesion of foreign matter thereto during storage of a chuck table.SOLUTION: A storage case for storing a chuck table holding a workpiece on a holding surface is provided with a disk-shaped protective plate having a protective surface covering the holding surface. In this storage case, the chuck table is stored while the holding surface of the chuck table is kept covered with the protective surface of the disk-shaped protective plate. By virtue of this, formation of a flaw in the holding surface of the chuck table and adhesion of foreign matter thereto during storage of the chuck table are prevented.SELECTED DRAWING: Figure 1

Description

The present invention relates to a storage case that houses a chuck table that holds a work piece on a holding surface.

Chips of semiconductor devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are indispensable configurations in various electronic devices such as mobile phones and personal computers. This chip is manufactured, for example, by grinding and thinning the back surface side of a wafer having a large number of semiconductor devices formed on the front surface, and then cutting and dividing the wafer along the boundary of a region containing the semiconductor device. To.

Machining of such a wafer (grinding, cutting, etc.) is generally performed with the wafer held on the chuck table. However, the size and processing conditions of the wafer to be processed are various, and the suitable chuck table for processing the wafer changes accordingly.

Therefore, a processing device (grinding device, cutting device, etc.) that performs such processing often does not have a unique chuck table, but a chuck table that can be replaced according to the wafer size, processing conditions, and the like. (See, for example, Patent Document 1). Then, the chuck table removed from the processing apparatus is stored outside the processing apparatus.

Japanese Unexamined Patent Publication No. 2008-62476

When processing workpieces such as wafers, processing accuracy at the micrometer level is generally required. In order to achieve such machining accuracy, it is important that there are no scratches or foreign matter on the holding surface of the chuck table that holds the workpiece.

In view of this point, an object of the present invention is to provide a storage case capable of suppressing the formation of scratches on the holding surface and the adhesion of foreign matter during storage of the chuck table.

According to one aspect of the present invention, a storage case for accommodating a chuck table for holding a work piece on a holding surface, a disk-shaped protective plate having a protective surface covering the holding surface, and a diameter of the protective plate. It has a hooking claw that protrudes inward in the direction and comes into contact with a side portion of the chuck table or a surface located on the side opposite to the holding surface, and the hooking claw is provided along the radial direction of the protective plate. Provided is a containment case comprising a support member connected to the protective plate so that it can be moved, a connecting member connecting the support member and the protective plate, and a handle fixed to the upper part of the protective plate. To.

Preferably, the hooking claw is in contact with a side portion of the chuck table, and the support member has a tip surface that is a contact surface that comes into contact with another object while the chuck table is stored, and the hooking claw is provided. The distance between the claw and the tip surface is designed to be longer than the distance between the hook claw and the surface of the chuck table located on the opposite side of the holding surface.

In the storage case of the present invention, the chuck table is stored in a state where the holding surface of the chuck table is covered by the protective surface of the disk-shaped protective plate. As a result, it is possible to prevent scratches from being formed on the holding surface and foreign matter from adhering to the holding surface during storage of the chuck table.

FIG. 1A is a plan view schematically showing an example of a storage case, and FIG. 1B is a front view schematically showing an example of a storage case. FIG. 2A is a plan view schematically showing an example of a storage case in which the chuck table can be carried in, and FIG. 2B schematically shows an example of a storage case in this state. It is a front view. FIG. 3A is a plan view schematically showing an example of a storage case in which a chuck table is housed, and FIG. 3B is a front view schematically showing an example of a storage case in this state. Is. FIG. 4A is a plan view schematically showing another example of the storage case, and FIG. 4B is a front view schematically showing another example of the storage case. FIG. 5A is a plan view schematically showing another example of the storage case in which the chuck table can be carried in, and FIG. 5B is another example of the storage case in this state. It is a front view schematically showing. FIG. 6A is a plan view schematically showing another example of the storage case in which the chuck table is housed, and FIG. 6B is a schematic view of another example of the storage case in this state. It is a front view shown in.

An embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1A is a plan view schematically showing an example of a storage case that houses a chuck table that holds a work piece on a holding surface, and FIG. 1B is a schematic view of an example of this storage case. It is a front view shown in.

The storage case 2 shown in FIGS. 1 (A) and 1 (B) has a disk-shaped protective plate 4. The protective plate 4 has a disk-shaped main body 4a having a circular upper surface and a lower surface substantially parallel to each other, and a circular upper surface and a circular upper surface fixed to the lower portion of the main body 4a and substantially parallel to the upper surface and the lower surface of the main body 4a. It has a disk-shaped protective portion 4b having a lower surface.

The main body portion 4a and the protective portion 4b are provided so that their centers overlap each other in a plan view. Further, the length (thickness) of the protective portion 4b along the vertical direction is shorter than the length (thickness) of the main body portion 4a along the vertical direction. Further, the width (diameter) of the protective portion 4b along the horizontal direction is slightly shorter than the width (diameter) of the main body portion 4a along the horizontal direction. However, the relative sizes of the main body portion 4a and the protection portion 4b are not limited to this, and can be arbitrarily designed.

The protective portion 4b is made of a flexible elastic material such as sponge or rubber, and its lower surface functions as a protective surface that covers the holding surface of the chuck table housed in the storage case 2. Therefore, the diameter of the protective portion 4b is designed to be substantially equal to or slightly longer than the diameter of the holding surface of the disk-shaped chuck table accommodated in the accommodation case 2.

A handle 6 is fixed to the upper part of the main body portion 4a. The handle 6 is provided so as to overlap the center of the main body portion 4a and the center of the protective portion 4b in a plan view, and has a handle portion 6a extending in the horizontal direction, and one end portion and the other end portion of the handle portion 6a. Includes connecting portions 6b, 6c extending diagonally outward from each of the portions toward the radial outer side of the protective plate 4 and fixed to the upper portion of the main body portion 4a.

Further, three cylindrical recesses (not shown) are formed on the upper surface side of the outer peripheral end portion of the main body portion 4a. These recesses are provided at substantially equal intervals along the circumferential direction of the main body portion 4a, and threads are provided on the inner wall surface of each recess. A bolt (connecting member) 8 extending along the vertical direction is inserted into each recess.

The bolt 8 has a cylindrical head 8a having a hexagonal groove formed on the upper surface side, and a thread corresponding to a screw thread fixed to the lower part of the head 8a and provided on the inner wall surface of the recess. It has a columnar shaft portion 8b provided on the outer peripheral surface. Then, at least a part of the shaft portion 8b is inserted into each recess.

The head portion 8a and the shaft portion 8b are provided so that their centers overlap each other in a plan view. Further, the length of the shaft portion 8b along the vertical direction is longer than, for example, the length of the head portion 8a along the vertical direction. Further, the width (diameter) of the shaft portion 8b along the horizontal direction is shorter than the width (diameter) of the head portion 8a along the horizontal direction.

Each of the three bolts 8 connects the protective plate 4 and the support member 10. The support member 10 has a plate-shaped connecting portion 10a having an upper surface and a lower surface substantially parallel to each other. The connection portion 10a is formed with an opening 10b that penetrates from the upper surface to the lower surface thereof. Then, by passing the shaft portion 8b of the bolt 8 through the opening 10b, the connecting portion 10a is arranged between the head portion 8a of the bolt 8 and the main body portion 4a of the protective plate 4.

The width of the opening 10b in the direction parallel to the tangential line (tangential direction) tangent to the point on the outer edge of the main body portion 4a closest to the bolt 8 is longer than the diameter of the shaft portion 8b and the diameter of the head portion 8a. Shorter than. Therefore, when the shaft portion 8b is inserted into the recess formed in the main body portion 4a through the opening 10b, the support member 10 does not separate from the main body portion 4a.

Further, a plate-shaped hanging portion 10c extending downward is provided at an end portion of the connecting portion 10a located on the radial outer side of the protective plate 4. Further, at the lower end portion of the vertical portion 10c, a hooking claw 10d projecting inward in the radial direction of the protective plate 4 is provided.

The widths of the connecting portion 10a, the hanging portion 10c, and the hooking claw 10d along the tangential direction are substantially the same. Further, the length of the hook claw 10d along the radial direction of the protective plate 4 is shorter than the length of the connecting portion 10a along the radial direction of the protective plate 4.

Then, the accommodating case 2 accommodates the chuck table in the space existing inside the protective plate 4 of the hanging portion 10c in the radial direction. Therefore, the length of the vertical portion 10c along the vertical direction is designed to be substantially equal to or slightly longer than the total thickness of the protective plate 4 and the thickness of the chuck table housed in the storage case 2. ..

Further, the hanging portion 10c has an inner side surface 10e located radially inside the protective plate 4 and a thin plate-shaped contact portion 10f provided on the inner side surface 10e. The contact portion 10f is made of a flexible elastic material such as sponge or rubber so that its surface (a surface located radially inside the protective plate 4) comes into contact with the side surface of the chuck table housed in the storage case 2. Designed for.

Further, the hooking claw 10d has an upper surface 10g substantially parallel to the upper surface and the lower surface of the connecting portion 10a, a thin plate-shaped contact portion 10h provided on the upper surface 10g, and a lower surface 10i substantially parallel to the upper surface 10g. The contact portion 10h is made of a flexible elastic material such as sponge or rubber so that its surface (upper surface) is in contact with a surface located on the opposite side of the holding surface of the chuck table housed in the storage case 2. It is designed. Further, the lower surface 10i is a contact surface that comes into contact with other objects existing below the storage case 2 while the chuck table is stored.

In the housing case 2, the connecting portion 10a of the support member 10 is connected to the protective plate 4 so that the support member 10 can move along the radial direction of the protective plate 4. Specifically, by rotating the bolt 8 in the direction in which the bolt 8 is loosened using a hexagon wrench or the like, the lower surface of the head 8a and the upper surface of the connecting portion 10a can be separated from each other, thus protecting the support member 10. It can be moved along the radial direction of the plate 4.

In other words, in the accommodation case 2, the connecting portion 10a of the support member 10 is connected to the protective plate 4 so that the support member 10 can be fixed to the protective plate 4. Specifically, by rotating the bolt 8 in the direction in which the bolt 8 is tightened using a hexagon wrench or the like, the lower surface of the head 8a and the upper surface of the connecting portion 10a can be brought into close contact with each other, so that the connecting portion 10a is bolted. The support member 10 can be fixed to the protective plate 4 by sandwiching it between the 8 and the protective plate 4.

Then, the accommodating case 2 accommodates the chuck table in the space directly under the protective plate 4. 2 (A), 2 (B), 3 (A), and 3 (B) are views for explaining the state of the storage case 2 when the chuck table is stored.

Specifically, FIG. 2A is a plan view schematically showing a storage case 2 in a state where the chuck table can be carried into the space directly under the protective plate 4, and FIG. 2B is a plan view. It is a front view which shows typically the accommodation case 2 in this state. Further, FIG. 3A is a plan view schematically showing a storage case 2 in a state where the chuck table is housed in the space directly under the protective plate 4, and FIG. 3B is a storage case in this state. 2 is a front view schematically showing 2.

Further, in the chuck table 12 shown in FIGS. 2 (B) and 3 (B), a circular recess is formed on the holding surface 12a side, and a surface (mounting surface) located on the opposite side of the holding surface 12a. 12b has a disk-shaped frame body 12c having a substantially flat surface, and a disk-shaped porous plate 12d having an outer diameter substantially the same as the inner diameter of the recess. Further, in FIGS. 2B and 3B, for convenience, the support member 10 located in front of the space A for accommodating the chuck table 12 among the three support members 10 is omitted.

When accommodating the chuck table 12 in the accommodating case 2, first, the bolt 8 is loosened to separate the lower surface of the head 8a from the upper surface of the connecting portion 10a. Next, the support member 10 is moved radially outward of the protective plate 4 so as to position the shaft portion 8b at the radially inner end of the protective plate 4 of the opening 10b. This makes it possible to carry the chuck table 12 into the space A directly below the protective plate 4 (see FIGS. 2 (A) and 2 (B)).

When the chuck table 12 is carried into the space A, the support member 10 is moved inward in the radial direction of the protective plate 4 so as to position the shaft portion 8b at the radial outer end of the protective plate 4 of the opening 10b. As a result, the contact portion 10f comes into contact with the side surface of the chuck table 12, and the contact portion 10h comes into contact with the mounting surface 12b of the chuck table 12. Next, the bolt 8 is tightened to sandwich the connecting portion 10a between the head portion 8a of the bolt 8 and the main body portion 4a of the protective plate 4 to fix the support member 10 (see FIGS. 3A and 3B).

As a result, the holding surface 12a of the chuck table 12 is covered with the protective surface (lower surface of the protective portion 4b) of the protective plate 4, and the chuck table 12 is supported by the hooking claw 10d in contact with the mounting surface 12b. The chuck table 12 is housed in the storage case 2.

In the storage case 2, the chuck table 12 can be stored in a state where the holding surface 12a of the chuck table 12 is covered by the protective surface (lower surface of the protective portion 4b) of the disk-shaped protective plate 4. As a result, it is possible to prevent the holding surface 12a from being scratched and foreign matter from adhering to the holding surface 12a during storage of the chuck table 12.

Further, in the accommodation case 2, the chuck table 12 is accommodated in a state where only the contact portion 10h made of the elastic material of the hook claw 10d is in contact with the mounting surface 12b of the chuck table 12. That is, in the storage case 2, the chuck table 12 can be stored without contacting the mounting surface 12b with other objects existing below the storage case 2.

As a result, it is possible to prevent the mounting surface 12b from being scratched when the chuck table 12 is housed in the storage case 2. Further, in the storage case 2, a handle 6 is provided. This facilitates the transfer of the chuck table 12 during storage.

The storage case 2 is an aspect of the present invention, and a storage case having characteristics different from the storage case 2 is also included in the technical scope of the present invention. For example, in the present invention, the connecting member for connecting the protective plate 4 and the support member 10 is not limited to the bolt 8.

Specifically, the connecting member may be any member as long as it can connect the support member 10 and the protective plate 4 so that the hooking claw 10d can move along the radial direction of the protective plate 4. Examples of such a connecting member include a hinge.

Further, in the present invention, the number of support members 10 is not limited to three. For example, in the present invention, two or four or more support members 10 may be fixed at equal intervals along the circumferential direction of the main body portion 4a of the protective plate 4.

Further, in the present invention, all three support members 10 may not be connected to the protective plate 4 so as to be able to move along the radial direction of the protective plate 4. That is, one or two support members 10 may be permanently fixed to the protective plate 4.

For example, the lower surface of the connecting portion 10a may be directly fixed to the upper surface of the main body portion 4a of the protective plate 4 without providing the opening 10b in one or two support members 10. In this case, one or two bolts 8 are also unnecessary.

Further, in the present invention, the hanging portion 10c may not include the contact portion 10f, and / or the hooking claw 10d may not include the contact portion 10h. That is, the inner side surface 10e of the hanging portion 10c and / or the upper surface 10g of the hooking claw 10d may be in direct contact with the chuck table 12.

Further, in the present invention, the support member connected to the outer peripheral end portion of the protective plate 4 is not limited to the support member 10 having the hook claw 10d in contact with the mounting surface 12b of the chuck table 12. Specifically, this support member may be a support member having a hooking claw that comes into contact with the side portion of the chuck table.

FIG. 4A is a plan view schematically showing an example of a storage case including a support member having a hooking claw that contacts the side portion of the chuck table, and FIG. 4B is an example of the storage case. It is a front view schematically showing. The storage case 14 shown in FIGS. 4A and 4B has components common to the storage case 2 except that the support member 10 is replaced with the support member 16. Therefore, in the following, the description of the overlapping components will be omitted.

The support member 16 has a plate-shaped connecting portion 16a having an upper surface and a lower surface substantially parallel to each other. The connection portion 16a is formed with an opening 16b that penetrates from the upper surface to the lower surface thereof. Then, by passing the shaft portion 8b of the bolt 8 through the opening 16b, the connecting portion 10a is arranged between the head portion 8a of the bolt 8 and the main body portion 4a of the protective plate 4.

The width of the opening 16b in the direction parallel to the tangential line (tangential direction) tangent to the point on the outer edge of the main body portion 4a closest to the bolt 8 is longer than the diameter of the shaft portion 8b and the diameter of the head portion 8a. Shorter than. Therefore, the support member 16 does not separate from the main body 4a when the shaft 8b is inserted into the recess formed in the main body 4a through the opening 16b.

Further, a plate-shaped hanging portion 16c extending downward is provided at an end portion of the connecting portion 16a located on the radial outer side of the protective plate 4. Further, in the central portion of the vertical portion 16c, a hooking claw 16d projecting inward in the radial direction of the protective plate 4 is provided.

The widths of the connecting portion 16a, the hanging portion 16c, and the hooking claw 16d along the tangential direction are substantially the same. Further, the length of the hooking claw 16d along the radial direction of the protective plate 4 is shorter than the length of the connecting portion 16a along the radial direction of the protective plate 4.

Then, in the storage case 14, the protective plate 4 of the hanging portion 16c does not bring the surface (mounting surface) located on the side opposite to the holding surface of the chuck table into contact with other objects existing below the storage case 14. The chuck table is housed in the space existing inside in the radial direction of. Therefore, the length of the vertical portion 16c along the vertical direction is designed to be longer than the sum of the thickness of the protective plate 4 and the thickness of the chuck table housed in the storage case 14.

Further, the vertical portion 16c has a tip surface 16e located on the opposite side of the end portion connected to the connection portion 16a, and the tip surface 16e exists below the storage case 14 while the chuck table is stored. It becomes a contact surface that comes into contact with other objects.

Further, the hooking claw 16d has an upper surface 16f substantially parallel to the upper surface and the lower surface of the connecting portion 16a, and a thin plate-shaped contact portion 16g provided on the upper surface 16f. The contact portion 16g is made of a flexible elastic material such as sponge or rubber, and its surface (upper surface) is designed to come into contact with the side portion of the chuck table housed in the storage case 2. The hooking claw 16d may not include the contact portion 16g. That is, the upper surface 16f of the hooking claw 16d may directly contact the side portion of the chuck table.

In the storage case 14, the connecting portion 16a of the support member 16 is connected to the protective plate 4 so that the support member 16 can move along the radial direction of the protective plate 4. Specifically, by rotating the bolt 8 in the direction in which the bolt 8 is loosened using a hexagon wrench or the like, the lower surface of the head 8a and the upper surface of the connecting portion 16a can be separated from each other, thus protecting the support member 16. It can be moved along the radial direction of the plate 4.

In other words, in the accommodation case 14, the connecting portion 16a of the support member 16 is connected to the protective plate 4 so that the support member 16 can be fixed to the protective plate 4. Specifically, by rotating the bolt 8 in the direction in which the bolt 8 is tightened using a hexagon wrench or the like, the lower surface of the head 8a and the upper surface of the connecting portion 16a can be brought into close contact with each other, so that the connecting portion 16a is bolted. The support member 16 can be fixed to the protective plate 4 by sandwiching it between the 8 and the protective plate 4.

Then, the accommodating case 14 accommodates the chuck table in the space directly under the protective plate 4. 5 (A), 5 (B), 6 (A), and 6 (B) are diagrams for explaining the state of the storage case 14 when the chuck table is stored.

Specifically, FIG. 5A is a plan view schematically showing a storage case 14 in a state where the chuck table can be carried into the space directly under the protective plate 4, and FIG. 5B is a plan view. It is a front view which shows typically the accommodation case 14 in this state. Further, FIG. 6A is a plan view schematically showing a storage case 14 in a state where the chuck table is housed in the space directly under the protective plate 4, and FIG. 6B is a storage case in this state. 14 is a front view schematically showing 14.

Further, in the chuck table 18 shown in FIGS. 5 (B) and 6 (B), a circular recess is formed on the holding surface 18a side, and a surface (mounting surface) located on the opposite side of the holding surface 18a. The 18b has a disk-shaped frame body 18c having a substantially flat surface, and a disk-shaped porous plate 18d having an outer diameter substantially the same as the inner diameter of the recess.

Further, on the side portion of the frame body 18c, three rectangular recesses 18e having a size capable of inserting the hooking claw 16d of the storage case 14 are provided. These recesses 18e are provided at equal intervals along the circumferential direction of the frame body 18c.

In the chuck table 18, instead of the three recesses 18e, one recess provided over the entire circumference of the side portion may be provided. Further, in FIGS. 5B and 6B, for convenience, the support member 16 located in front of the space B for accommodating the chuck table 18 among the three support members 16 is omitted.

Further, the chuck table 18 is designed so that the distance between the recess 18e and the mounting surface 18b is shorter than the distance between the hook 16d of the support member 16 and the tip surface 16e. In other words, the support member 16 is designed so that the distance between the hook claw 16d and the tip surface 16e is longer than the distance between the hook claw 16d and the mounting surface 18b of the chuck table 18.

When accommodating the chuck table 18 in the accommodating case 14, first, the bolt 8 is loosened to separate the lower surface of the head 8a from the upper surface of the connecting portion 16a. Next, the support member 16 is moved radially outward of the protective plate 4 so as to position the shaft portion 8b at the radially inner end of the protective plate 4 of the opening 16b. This makes it possible to carry the chuck table 18 into the space B directly below the protective plate 4 (see FIGS. 5 (A) and 5 (B)).

When the chuck table 18 is carried into the space B, the hooking claw 16d of the support member 16 and the recess 18e of the chuck table 18 face each other. Next, the support member 16 is moved inward in the radial direction so as to position the shaft portion 8b at the radially outer end of the protective plate 4 in the opening 16b. As a result, the hooking claw 16d is inserted into the recess 18e provided on the side surface of the chuck table 18, and the contact portion 16g comes into contact with the side portion of the chuck table 18. Next, the bolt 8 is tightened to sandwich the connecting portion 16a between the head portion 8a of the bolt 8 and the main body portion 4a of the protective plate 4 to fix the support member 16 (see FIGS. 6A and 6B).

As a result, the holding surface 18a of the chuck table 18 is covered with the protective surface (lower surface of the protective portion 4b) of the protective plate 4, and the chuck table 18 is supported by the hooking claw 16d that contacts the side portion of the chuck table 18. In this state, the chuck table 18 is housed in the storage case 14. As a result, it is possible to prevent the holding surface 18a from being scratched and foreign matter from adhering to the holding surface 18a during storage of the chuck table 18.

Further, in the accommodation case 14, the chuck table 18 is accommodated in a state where all the mounting surfaces 18b of the chuck table 18 are exposed. As a result, it is possible to prevent the mounting surface 18b from being scratched when the chuck table 12 is housed in the storage case 2. Further, in the storage case 2, a handle 6 is provided. This facilitates the transfer of the chuck table 12 during storage.

A screw thread may be provided on the inner wall surface of the recess 18e of the chuck table 18. In this case, the hooking claw 16d of the support member 16 is inserted into an opening penetrating from the outer surface to the inner side surface of the hanging portion 16c of the support member 16, and is inserted into a screw thread provided on the inner wall surface of the recess 18e. The corresponding thread may be replaced with a bolt (connecting member) provided on the outer peripheral surface.

In addition, the structures and methods according to the above-described embodiments and modifications can be appropriately modified and carried out as long as they do not deviate from the scope of the object of the present invention.

2: Storage case 4: Protective plate (4a: main body, 4b: protective part)
6: Handle (6a: handle, 6b, 6c: connection)
8: Bolt (connecting member) (8a: head, 8b: shaft)
10: Support member (10a: connection part, 10b: opening, 10c: hanging part, 10d: hooking claw)
(10e: inner side surface, 10f: contact portion, 10 g: top surface, 10h: contact portion)
(10i: bottom surface)
12: Chuck table (12a: holding surface, 12b: surface (mounting surface))
(12c: frame body, 12d: porous plate)
14: Storage case 16: Support member (16a: connection part, 16b: opening, 16c: hanging part, 16d: hook claw)
(16e: tip surface, 16f: top surface, 16g: contact portion)
18: Chuck table (18a: holding surface, 18b: surface (mounting surface))
(18c: frame body, 18d: porous plate, 18e: dent)

Claims (2)

A storage case for accommodating a chuck table that holds a work piece on a holding surface.
A disk-shaped protective plate having a protective surface covering the holding surface,
It has a hooking claw that protrudes inward in the radial direction of the protective plate and is in contact with a surface located on the side of the chuck table or on the side opposite to the holding surface, and the hooking claw is attached to the protective plate. A support member connected to the protective plate so that it can move along the radial direction of the
A connecting member that connects the support member and the protective plate,
A handle fixed to the top of the protective plate,
A storage case characterized by being equipped with. The hooking claw contacts the side portion of the chuck table and
The support member has a tip surface that serves as a contact surface that comes into contact with another object while the chuck table is stored, and the distance between the hook claw and the tip surface is the distance between the hook claw and the chuck table. The storage case according to claim 1, wherein the storage case is designed to be longer than the distance from the surface located on the side opposite to the holding surface.

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