JP2022090265A - Input lot organization device, input lot organization method and program for input lot organization - Google Patents

Abstract

To provide an input lot organization device, an input lot organization method and a computer program for input lot organization which are capable of properly organizing input lots that are processed together by a processing device even if there are multiple matching degree evaluation conditions.SOLUTION: To organize an input lot, it is determined whether each combination of a lot and a processing device matches conditions for determining whether or not to input; for each combination of the lot and the processing device determined to be ready for input, an individual matching degree for each of multiple matching degree evaluation conditions is calculated for each matching degree evaluation condition; a matching degree evaluation value in the case of processing the lot by the processing device is calculated based on multiple individual matching degrees; a combination being most suitable to input is identified based on multiple matching degree evaluation values of multiple combinations; the lot in the combination is allocated to the processing device; then, the input lot are organized for unallocated lots by repeating the determination of whether or not to input and the calculation of the matching degree evaluation value.SELECTED DRAWING: Figure 1

Description

The present invention relates to an input lot knitting device, an input lot knitting method, and an input lot knitting program that organizes a group of a plurality of lots to be processed at once in the processing device as an input lot.

Conventionally, in a heat treatment process in which a plurality of furnaces having different performances are provided and heat treatment is performed, a lot knitting method for knitting a lot, which is a combination of a plurality of types of products for which heat treatment is performed at once, is executed by a calculation unit of a computer. The process is a product information storage step that registers multiple types of products to be heat-treated and the quantity of each product per unit product as product information, and a furnace information storage step that registers multiple furnaces to be heat-treated as furnace information. It is defined from the lot formation constraint information storage step that registers the lot formation constraint condition, which is the maximum quantity that can be loaded in one lot, as lot formation constraint information for each furnace, and the relationship between the fuel amount and the processed quantity for each furnace. In addition, the fuel formula information storage step for registering the fuel relation formula between the fuel intensity, which is the fuel quantity per processed quantity, and the processed quantity as fuel relation formula information, and the product information calculated based on the product information for each furnace. It is characterized by having a lot knitting step of knitting as a lot a combination of products that minimizes the fuel intensity calculated based on the fuel relational expression while satisfying the lot knitting constraint condition calculated based on. A lot knitting method is known (Patent Document 1).

Japanese Unexamined Patent Publication No. 2016-018498

According to Patent Document 1, the fuel intensity is the smallest among the combinations of products and furnaces that satisfy the constraint condition that each product is not divided into a plurality of lots and is within the maximum quantity for each furnace. In the conforming condition, the combination of the product group with the highest degree of conformity and the furnace is obtained by using the integer programming method, but when there are a plurality of conforming conditions (the fuel intensity is the minimum in Patent Document 1). , The method of optimal organization was not disclosed.

INDUSTRIAL APPLICABILITY The present invention can appropriately organize the input lots to be processed at once by the processing device even when there are a plurality of goodness-of-fit evaluation conditions, the input lot knitting device, the input lot knitting method, and the input lot organization. The purpose is to provide a computer program for.

The input lot knitting device according to the present invention processes a plurality of lots having different required processing conditions at the same time by the processing device when the plurality of lots are processed by using a plurality of processing devices that execute processing under different processing conditions. An input lot knitting device capable of knitting a group of a plurality of lots as an input lot for each processing device, and an acquisition means for acquiring lot information regarding the lot and device information regarding the processing device, and the above-mentioned. Based on the input availability determination means for determining whether or not each combination of the lot and the processing apparatus meets the input availability determination condition based on the lot information and the device information, and based on the lot information and the device information. Then, for each combination of the lot and the processing device determined to be loadable by the loading availability determination means, the conformity to each of a plurality of goodness-of-fit evaluation conditions is calculated as the individual goodness of fit for each goodness-of-fit evaluation condition. Then, the goodness-of-fit evaluation means for calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus based on the plurality of individual goodness-of-fits, and the plurality of combinations determined by the goodness-of-fit evaluation means. Based on the plurality of goodness-of-fit evaluation values, the most suitable combination for input is specified from the plurality of combinations, the lot in the combination is assigned to the processing device, and then the unallocated lot is again used. It has a knitting means for knitting the input lot for each processing apparatus by repeating the input possibility determination by the input possibility determination means and the calculation of the goodness-of-fit evaluation value by the goodness-of-fit evaluation means.
In the input lot knitting device, whether the processing device is operating or the processing device designated by the lot matches the processing conditions of the processing device with the processing conditions of the lot. Whether the size of the work constituting the lot is a size that can be processed by the processing device, the lot can be processed within the life of the processing device, or the processing device can meet the delivery date of the lot. Further, it is determined whether or not the lot can be processed by the processing apparatus based on any one or more of the input possibility determination conditions among whether or not the processing apparatus is instructed to suspend the input of the lot. It can be configured.
In the input lot knitting apparatus, the goodness-of-fit evaluation means determines the speed of the processing end time when the lot is processed by the processing apparatus and the filling rate of the processing apparatus when the lot is processed by the processing apparatus. Height, whether setup is required when processing the lot with the processing device, whether the processing device is the processing device specified by the lot, or the life of the processing device is a life zone suitable for the lot. Either there is a lot close to the delivery date or the length of staying days, the number allocated to the processing device is small, or the number of remaining batches of the processing device after processing the lot is large. The individual goodness of fit can be evaluated for two or more of the goodness of fit evaluation conditions.
In the charging lot knitting device, the charging possibility determination condition and the goodness-of-fit evaluation condition may be configured to have common conditions regarding the same items.
In the input lot knitting device, the goodness-of-fit evaluation means weights the individual goodness of fit with respect to the goodness-of-fit evaluation condition as determined for each goodness-of-fit evaluation condition, and is based on the plurality of weighted individual goodness of fit. Therefore, the goodness-of-fit evaluation value when the lot is processed by the processing apparatus can be calculated.
In the input lot knitting device, the goodness-of-fit evaluation means may be configured to set weighting for each goodness-of-fit evaluation condition based on the analytic hierarchy process.
The input lot knitting apparatus further includes a lot dividing means for dividing the lot into sub-lots when all the workpieces of the lot cannot be processed by one batch processing of the processing apparatus, and the input availability determination means When all of the sub-lots can be processed by the processing apparatus, it is determined that the lot can be put into the processing apparatus, and the goodness-of-fit evaluation means processes all of the sub-lots by the processing apparatus. It can be configured to calculate the goodness-of-fit evaluation value of the case.

In the input lot knitting method according to the present invention, when a plurality of lots having different required processing conditions are processed by using a plurality of processing devices that process under different processing conditions, the plurality of lots that are simultaneously processed by the processing device. It is an input lot knitting method that can organize a group of lots as an input lot for each processing apparatus, and is based on lot information about the lot and device information about the processing apparatus, and the lot and the processing apparatus. The lot determined to be able to be loaded in the loading possibility determination step based on the loading possibility determination step of determining whether or not each combination of and is satisfied with the loading possibility determination condition and the lot information and the device information. For each combination of the product and the processing apparatus, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions is calculated as the individual goodness of fit for each of the goodness-of-fit evaluation conditions, and the lot is obtained based on the plurality of individual goodness of fit. Based on the goodness-of-fit evaluation process for calculating the goodness-of-fit evaluation value in the case of processing by the processing apparatus, and the plurality of goodness-of-fit evaluation values of the plurality of the combinations determined in the goodness-of-fit evaluation step, the plurality of combinations Of these, the most suitable combination for charging is specified, the lot in the combination is assigned to the processing device, and then the unallocated lot is again determined by the charging possibility determination step and the conformity evaluation step. By repeating the evaluation of the goodness-of-fit evaluation value according to the above, each processing apparatus has a knitting step of knitting the input lot.

The input lot knitting program according to the present invention uses a computer to process a plurality of lots having different required processing conditions using a plurality of processing devices that process under different processing conditions. It is an input lot knitting program capable of organizing a group of a plurality of lots to be processed at the same time as an input lot for each processing apparatus, and is based on lot information about the lot and device information about the processing apparatus. , The loading possibility determination step for determining whether or not each combination of the lot and the processing device meets the loading possibility determination condition, and the charging possibility determination step based on the lot information and the device information. For each combination of the lot determined to be possible and the processing apparatus, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions is calculated as the individual goodness of fit for each goodness-of-fit evaluation condition, and the goodness of fit is calculated for each of the plurality of individual goodness of fit. Based on the goodness-of-fit evaluation step for calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus, and the plurality of goodness-of-fit evaluation values of the plurality of combinations determined in the goodness-of-fit evaluation step. Then, the most suitable combination for loading is specified from the plurality of combinations, the lot in the combination is assigned to the processing device, and then the unallocated lot is again determined by the loading permission determination step. And the knitting step of knitting the input lot for each of the processing devices by repeating the evaluation of the goodness-of-fit evaluation value by the goodness-of-fit evaluation step.

According to the present invention, even when there are a plurality of goodness-of-fit evaluation conditions, the input lot knitting device, the input lot knitting method, and the input lot can appropriately organize the input lots to be processed at once by the processing device. A computer program for lot formation can be provided.

It is a block diagram of the input lot knitting apparatus which concerns on this embodiment. It is a flowchart which shows the input lot organization process which concerns on this embodiment. It is a flowchart which shows the input possibility determination process of a step S4. It is a flowchart which shows the goodness-of-fit evaluation process of step S5. It is a graph which shows the filling rate of the processing apparatus in the input lot knitting process and the conventional input lot knitting process which concerns on this embodiment. It is a graph which shows the knitting time in the input lot knitting process and the conventional input lot knitting process which concerns on this embodiment.

The input lot knitting device 1 according to the present embodiment is a processing device 2 when a plurality of lots L having different required processing conditions are processed by using a plurality of processing devices 2 that execute processing under different processing conditions. It is an apparatus that can organize a group of a plurality of lots L to be processed at the same time for each processing apparatus 2 as an input lot IL. In the present embodiment, the object to be processed will be described as a work W, and the management unit composed of a plurality of work Ws will be described as a lot L. Further, in the present embodiment, a plurality of lots L may be input to one processing device 2 and processed at the same time, and a group of a plurality of lots L to be processed simultaneously by one processing device 2 is referred to as an input lot IL. Call it. Further, in the present embodiment, when all the workpieces W constituting the lot L cannot be put into the processing device 2, the lot L is divided into a plurality of sub-lot SLs, and the divided sub-lot SLs are divided into the same processing device 2. In some cases, batch processing may be performed continuously.

Further, in the following, a scene in which the semiconductor wafer as the work W is heat-treated by using the processing device 2 as the heat treatment device will be described as an example, but the work W is not limited to the semiconductor wafer W, and the work W is not limited to the semiconductor wafer W. The processing device 2 is also not limited to the heat processing device.

First, the lot L charged into the processing device 2 will be described. In the present embodiment, a plurality of work W processed by the processing device 2 are managed in lot L units, and when the work W is put into the processing device 2, the knitting process is performed in lot L units. In the present embodiment, the work W is a semiconductor wafer to be heat-treated, and the semiconductor wafer manufactured from one ingot is managed as one lot L. Further, the number of works W (lot size) in lot L is not uniform and is determined for each lot. For example, lot LA is managed in lot units consisting of 170 semiconductor wafers (work W), lot LB is managed in lot units consisting of 140 semiconductor wafers, and lot LC is managed in lot units consisting of 180 semiconductor wafers. It is managed in lot units. The work W is charged into the processing device 2 in units of lot L, and is processed in units of lot (however, as will be described later, if all the work W of lot L cannot be charged into the processing device 2, the lot L is transferred to the sub lot SL. It may be divided and charged into the processing apparatus 2 in units of sub-lot SL).

Further, in the present embodiment, for each lot L, the size of the work W constituting the lot L, the number of works W (lot size), the processing conditions of the work W such as the heating temperature and the heating time, and the processing of the work W A suitable life zone of the processing device 2 and a delivery date of the lot L are determined, and these information are stored in the storage device 20 of the input lot knitting device 1 as lot information. In addition to the heating temperature and heating time, the treatment conditions can include the size and shape of the work W, the type of dopant, the doping amount (resistance width), the gas composition, the flow rate, and the like. Further, the life information of the processing device 2 means, for example, the degree of deterioration of the jig in the processing device 2 or the state of deterioration of the processing device 2 itself, and in the lot LA which is easily scratched, the degree of deterioration of the jig is low. In such a case, the life zone of the processing device 2 suitable for the work W of the lot LA is set to "initial" or the like. Further, in the present embodiment, information on the residence time of the lot L from the time when the order is received, the time when the processing is instructed, or the time when the previous process is completed to the present time is also stored in the storage device 20 as lot information. The residence time of lot L is also set in stages such as "long", "normal", and "short", and is updated as appropriate. In the present embodiment, the plurality of lots L have lots L of two or more varieties having different required processing conditions, but may include a plurality of lots L of the same varieties having the same processing conditions.

Next, the processing device 2 will be described. In the present embodiment, the processing device 2 includes two or more processing devices that perform processing under at least different processing conditions, and a plurality of lots put into the processing device 2 under the processing conditions set for each processing device 2. The processing of the input lot IL, which is a group of L, is executed. For example, in the present embodiment, the processing apparatus 2 is a heat processing apparatus that heat-treats a semiconductor wafer, and executes the heat treatment under different processing conditions (for example, different heating temperatures and heating times). In this case, the processing apparatus 2A is configured to execute the process of heating the input lot IL at 1200 ° C. for 10 hours, and the processing device 2B is configured to execute the process of heating the input lot IL at 1300 ° C. for 10 hours. be able to. In addition, a part of the plurality of processing devices 2 may be configured to perform processing under the same processing conditions as the other processing devices 2. For example, in the above example, the same as the processing device 2A, the processing device 2A'that heats the input lot IL at 1200 ° C. for 10 hours may be further provided. Further, the processing device 2 may be configured to selectively execute two or more processing conditions. For example, the processing apparatus 2A can be configured to selectively execute a heat treatment for heating the input lot IL at 1200 ° C. for 10 hours and a heat treatment for heating the input lot IL at 1300 ° C. for 10 hours. .. Further, in the present embodiment, the size of the work W that can be processed for each processing device 2, the number of sheets that can be input per one processing (per batch), the processing time per batch, and the life information of the processing device 2. , Executable processing conditions (for example, heating temperature, heating time, etc.) are determined, and these information are stored in the storage device 20 of the input lot knitting device 1 as device information. The life information of the processing device 2 is the degree of deterioration of the jig in the processing device 2 and the state of deterioration of the processing device 2 itself, and when batch processing for the maximum life of the processing device 2 is executed, the jig Replacement and maintenance work are performed. Further, the life information of the processing device 2 has a plurality of stages such as "initial stage", "middle stage", and "end stage" according to the number of batches in which the processing device 2 has performed heat treatment and the total time in which the batch processing has been executed. It is set separately for. In the following, a configuration for determining the life of the processing device 2 based on the number of batches in which the processing device 2 has performed heat treatment will be illustrated.

Next, the input lot knitting device 1 according to the present embodiment will be described. FIG. 1 is a configuration diagram of an input lot knitting device 1 according to the present embodiment. As shown in FIG. 1, the input lot knitting device 1 includes an arithmetic unit 10, a storage device 20, an external output device 30, and an input device 40.

The arithmetic unit 10 has a lot information acquisition function for acquiring lot information regarding lot L by executing a program for organizing input lot IL stored in the storage device 20, and device information regarding processing device 2. The device information acquisition function to be acquired, the input lot organization function for organizing the input lot IL, and the output function for outputting the organization result by the input lot organization function to the user are executed.

The lot information acquisition function of the arithmetic unit 10 acquires lot information regarding lot L. As described above, the lot information includes the size of the work W constituting the lot L, the lot size (the number of works per lot), the processing conditions of the work W such as the heating temperature and the heating time, and the processing of the work W. Information on the life zone of the processing device 2 suitable for the above, the delivery date of the lot L, and the residence time of the lot L is included and stored in the storage device 20. Therefore, the lot information acquisition function can acquire these lot information by referring to the storage device 20. Further, the lot information may be stored in the external device or the external medium, and the lot information acquisition function may acquire the lot information from the external device or the external medium by accessing the external device or the external medium.

The device information acquisition function of the arithmetic unit 10 acquires device information related to the processing device 2. As described above, the device information includes the size of the work W that can be processed by the processing device 2, the number of sheets that can be input per processing (per batch), the processing time per batch, and the life of the processing device 2. Information regarding the specifications of the processing device 2, such as information and processing conditions (for example, heating temperature and heating time) that can be executed by the processing device 2, is included as device information and stored in the storage device 20.

Further, in the present embodiment, the device information includes information regarding the condition of the processing device 2. Examples of the information regarding the condition of the processing device 2 include an operating status indicating whether or not the processing device 2 is operating, and information on the total number of work Ws already assigned to the processing device 2. Further, in the input lot knitting process according to the present embodiment, if all the work W of the lot L cannot be processed by one batch process, the work W of the same lot L is divided into a plurality of times by the same processing device 2. In such a case, the input lot IL is organized so as to perform batch processing for a plurality of times for the same processing device 2. Therefore, when batch processing is performed a plurality of times in the same processing device 2, the total number of work W assigned in all batch processing is recorded as the total number of work W assigned to the processing device 2. Further, when the final batch processing when the batch processing is performed multiple times is called "final batch processing", the number of work W allocated in the final batch processing, the processing conditions in the final batch processing, and the start of the final batch processing. Information on the time, the end time of the final batch processing, and the life zone of the processing device 2 at the end of the final batch processing is stored in the storage device 20 as device information (information regarding the condition of the processing device 2).

The device information acquisition function can acquire these device information by referring to the storage device 20. Further, as with the lot information, the device information is stored in the external device or the external medium, and the device information acquisition function acquires the device information from the external device or the external medium by accessing the external device or the external medium. It may be configured.

The input lot organization function of the arithmetic unit 10 organizes the input lot IL to be input to the processing device 2 based on the lot information acquired by the lot information acquisition function and the device information acquired by the device information acquisition function. Specifically, the input lot knitting function first performs an input propriety determination process for determining whether or not the lot L can be input to the processing device 2 for each lot L and each processing device 2. More specifically, in the input lot knitting function, whether the processing device 2 is operating (input availability determination condition 1) or whether the processing end time of the processing device 2 is before the processing end deadline of the lot L (input availability determination). Condition 2), when the lot L is designated as the processing device 2, whether the processing device 2 is the processing device specified by the lot L (input availability determination condition 3), or whether the lot L is specified in the life of the processing device 2. It is determined whether the processing is possible (input availability determination condition 4) and whether the processing condition of the processing device 2 and the processing condition of the lot L match (input availability determination condition 5), respectively, and one is determined. If the condition for determining whether or not the lot can be input is not satisfied, it is determined that the lot L is not input to the processing device 2. The details of the input availability determination process will be described later.

Further, the input lot knitting function is a goodness-of-fit evaluation process for evaluating the goodness of fit when the lot L is input to the processing device 2 for the combination of the lot L determined to be capable of input in the input availability determination process and the processing device 2. I do. Specifically, in the input lot knitting function, for the combination of the lot L determined to be input and the processing device 2, the processing end time when the lot L is processed by the processing device 2 (goodness of fit evaluation condition 1). The filling rate (goodness-of-fit evaluation condition 2) in the final batch processing of the processing device 2 when the lot L is input to the processing device 2, and the lot L to be determined is the processing device 2 designated from any of the lot L. , Whether the lot L designates the processing device 2 (goodness of fit evaluation condition 3), whether the life zone of the processing device 2 is a life zone suitable for the lot L (goodness of fit evaluation condition 4), and the lot L is processed by the processing device. Judgment is made on any two or more goodness-of-fit evaluation conditions of whether setup is necessary when inputting to 2 (goodness-of-fit evaluation condition 5), and the individual goodness-of-fit degree is calculated for each goodness-of-fit evaluation condition. Further, the input lot knitting function calculates the total value of the calculated individual goodness of fit and the value obtained by relativizing the total value as the goodness of fit evaluation value. The details of the goodness-of-fit evaluation process will be described later.

Then, the input lot knitting function selects the combination having the highest goodness-of-fit evaluation value from the plurality of combinations of the lot L determined to be inputtable in the input availability determination process and the processing device 2, and the lot L in the combination. Is assigned to the processing device 2 in the combination. Then, the input lot knitting function repeats the above-mentioned input possibility determination process and the goodness-of-fit evaluation process for the lot L that has not been assigned to the processing device 2, so that the lot required in the production plan or the like is repeated. Allocate L to the processing device 2.

The output function of the arithmetic unit 10 outputs the organization information of the input lot IL generated by the input lot organization function to the external output device 30. The external output device 30 is not particularly limited, and is a device that allows the user to grasp the organization information, such as a display device such as a monitor or a touch panel display, an audio output device that outputs sound, and a printing device that prints organization information such as a printer. Is given as an example. Further, the external output device 30 may be a device that stores the knitting information in an external medium or a device that transmits the knitting information to an external system such as a transfer system. In the present embodiment, the external output device 30 is a display, and by displaying the organization information of the input lot IL, the user can quickly grasp which lot L should be input to which processing device 2. can.

Next, the input lot knitting process according to the present embodiment will be described. FIG. 2 is a flowchart showing an input lot knitting process according to the present embodiment. The input lot knitting process shown below is executed by the arithmetic unit 10 of the input lot knitting device 1. Further, in the example shown below, a scene in which the lots LA to LC are processed by the processing devices 2A to 2C will be illustrated and described.

As shown in FIG. 2, in step S1, lot information is acquired by the lot information acquisition function of the arithmetic unit 10. In the present embodiment, the lot information includes the size of the work W constituting the lot L, the lot size (the number of works per lot), the processing conditions of the work W such as the heating temperature and the heating time, and the processing of the work W. Information on the life zone of the processing apparatus 2, the delivery date of the lot L, and the residence time of the lot L is included.

Here, Table 1 below is a table showing an example of lot information of lots LA to LC. For example, as shown in Table 1, regarding the lot information of the lot LA, the size (diameter) of the work W constituting the lot LA is 150 mm, the number of the work W per lot is 170, and the heating temperature. It is desirable that the processing condition such as the heating time is "processing condition 1" and the life of the jig or the like is "initial", and the processing device 2 is not specified. Be done. In addition, lot information can be obtained that the residence time up to now is "long" and the delivery date is "12:00 on August 3" for the lot LA.

In step S2, the device information related to the processing device 2 is acquired from the storage device 20 by the device information acquisition function of the arithmetic unit 10. In the present embodiment, the device information includes the size of the work W that can be processed by the processing device 2, the number of sheets that can be input per one processing (per batch), the processing time per batch, and the life of the processing device 2. Information and information indicating the specifications of the processing apparatus 2 such as processing conditions (for example, heating temperature and heating time) that can be executed by the processing apparatus 2 are included.

Here, Table 2 below is a table showing an example of device information of the processing devices 2A to 2C. For example, as shown in Table 2, among the device information of the processing device 2A, the size (diameter) of the work W that can be processed by the processing device 2A is "150 mm" as the information indicating the specifications of the processing device 2A. The number of work Ws that can be input per batch is "120", the processing time per batch is "3 hours", and the relationship between the maximum life "NA" and the life zone (for example, the number of batches is If it is less than 0.3 x NA, the life is "initial", and if the number of batches is 0.3 x NA or more and less than 0.6 x NA, the life is "medium term" and the number of batches is 0.6 NA. If it is the above, the life is "end stage"), and the device information that the processing conditions that can be executed by the processing device 2A are "condition 1" and "condition 2" can be obtained. The processing time per batch can be the time including the time for putting the work W in and out of the processing device 2.

Further, the device information acquisition function also acquires information indicating the condition of the processing device 2 from the storage device 20 as device information. The information indicating the condition of the processing device 2 includes the operating state of the processing device 2, the total number of work W assigned to the processing device 2, the number of work W allocated in the final batch processing, the processing conditions in the final batch processing, and the final batch. Information on the start time of processing, the end time of final batch processing, and the life zone of the processing device 2 at the end of final batch processing is included.

For example, in the example shown in Table 2, in the device information acquisition function, the operating state of the processing device 2 is "operating" and the total number of assigned work Ws is "300" for the processing device 2A. The number of work W allocated in the final batch processing is "60", the processing condition in the final batch processing is "condition 1", and the start time of the final batch processing is "2 o'clock on August 1". It is possible to acquire device information that the end time of the final batch processing is "5 o'clock on August 1st" and the life zone of the processing device 2A at the end of the final batch processing is "initial".

In step S3, the input lot knitting function performs a lot division simulation based on the lot information acquired in step S1 and the device information acquired in step S2. The lot division simulation is to divide the lot L into a plurality of sub-lot SLs in order to organize the input lot IL when the lot size of the lot L is larger than the number of sheets that can be input in the final batch of the processing device 2. Is. The lot division simulation is performed for each combination of the lot L and the processing device 2.

For example, a scene in which a lot division simulation is performed for the combination of the lot LA shown in Table 1 and the processing apparatus 2A shown in Table 2 will be described. As shown in Table 1 above, the lot LA has a lot size of 170 sheets. Further, as shown in Table 2 above, the processing apparatus 2A has 120 sheets that can be input per batch and 60 sheets that have been allocated for the final batch processing. Therefore, it can be seen that the processing apparatus 2A has a space in which the lot LA can be charged.

In this case, the input lot knitting function determines whether or not the lot LA can be mixed with the processing device 2A. Specifically, the input lot knitting function first determines whether another lot L has already been input to the processing device 2A. Then, the input lot knitting function determines that if another lot L has already been input to the processing device 2A, for example, if the conditions shown below are satisfied, the lot LA can be mixed with the processing device 2A. can. That is, in the input lot knitting function, for example, (1) the processing device 2A can execute processing under the processing conditions required by the lot LA, and (2) the size of the work W of the lot LA and the final batch of the processing device 2A. The sizes of the workpieces W that can be processed in the processing match, (3) there is a vacancy in the final batch processing of the processing device 2A (the filling rate of the final batch processing is less than 100%), and (4) the processing of the lot LA. When the conditions and the processing conditions in the final batch of the processing apparatus 2A match, it can be determined that another lot L already charged and the lot LA can be mixed. Further, in addition to the above conditions, if the heating temperature is the same, the heating time is the same, the dopant types are the same, or the resistance is within a predetermined range, it may be determined that the mixture is possible.

Then, when the input lot knitting function determines that the lot LA can be mixed in the processing device 2A, the number of sheets that can be input from the processing device 2A is 120, and the number of the lot L of the final batch processing that has already been allocated is 60. Allocate lot LA to the space for 60 sheets after deducting. Further, since the lot LA has a lot size of 170 sheets, the remaining 110 sheets are allocated to the processing device 2A as the next batch processing. As a result, as shown in Table 3 below, when the lot LA is charged into the processing device 2A, the input lot knitting function performs 2 lot LAs, 60 sheets in the first batch and 110 sheets in the second batch. It is calculated as being divided into one sub-lot, and the simulation result is stored in the storage device 20.

Further, a simulation in which the lot LA is charged into the processing device 2B will be described. As shown in Table 2 above, the processing apparatus 2B has 100 sheets that can be input per batch and 50 sheets that have been allocated in the final batch processing, so that there is a margin in the final batch processing. Since the processing condition in the final batch of the processing apparatus 2B is "Condition 2" and the processing condition of the lot LA is "Condition 1", the lot L allocated in the final batch processing and the lot LA of the input candidate are mixed. Cannot be processed. Therefore, the input lot knitting function inputs the lot LA to the processing apparatus 2B from the batch processing next to the final batch processing. In this case, since the number of sheets that can be input per batch of the processing device 2B is 100, the input lot knitting function sets the sub-lot of the first batch to 100 sheets and the sub-lot of the second batch to 70 sheets. .. In this way, when the lot LA is charged into the processing device 2B, the input lot knitting function performs a simulation of dividing the lot LA into two sublots, 100 sheets in the first batch and 70 sheets in the second batch. It becomes. Similarly, the combination of the lot LA and the processing device 2C, and each combination of the lot LB, LC and the processing devices 2A to 2C are also simulated, and if necessary, they are divided into sub-lot SLs.

Further, in the lot division simulation in step S3, the input lot knitting function performs the processing start time of the first batch, the processing start time of the final batch, and the processing end time of the final batch when the lot L is divided into a plurality of sublot SLs. , The filling rate of the processing device 2 when the sub-lot SL of the final batch is input, and the life zone of the processing device 2 at the end of the final batch are also simulated.

For example, when the lot LA is charged into the processing device 2A, as described above, the lot LA is divided into two sub-lots SLA1 and SLA2, and the first batch of sub-lot SLA1 is the final batch processing of the processing device 2A shown in Table 2. Is processed in. Therefore, the input lot knitting function can calculate the processing start time of the first batch of the lot LA as "2 o'clock on August 1", which is the start time of the final batch processing of the processing apparatus 2A shown in Table 2. .. Further, the sub-lot SLA2 of the second batch of the lot LA becomes the sub-lot of the final batch of the lot LA. As shown in Table 2, since the processing time per batch of the processing device 2A is 3 hours, the input lot knitting function sets the processing start time of the sub-lot SLA2 of the final batch (second batch) of the lot LA. It is calculated as "5 o'clock on August 1st" 3 hours after the processing start time of the first batch, and the processing end time of the sublot SLA2 of the final batch (second batch) is further 3 hours later "August". It is calculated as "8 o'clock a day". Further, the input lot knitting function calculates the filling rate of the processing device 2A after charging the sub-lot SLA2 of the final batch (second batch) of the lot LA as 110/120 = 91.7%.

Further, in the lot division simulation, the input lot knitting function also calculates the life zone at the end of the final batch of the lot LA, as shown in Table 3 above. Here, in the life zone of the processing device 2, as shown in FIG. 2, the maximum value of the life is determined by the predetermined number of batches NA, and the life is determined in three stages according to the number of executed batches. For example, in the processing device 2A shown in Table 2, the batch number is "initial (<0.3NA)" up to 0.3 × NA times and up to 0.6 × NA times for the batch number NA of the maximum life. Is defined as "mid-term (<0.6NA)", and 0.6 x LA times or more is defined as "terminal stage (≧ 0.6 NA)". Therefore, for example, when the maximum life of the processing device 2A is 100 times of batch processing, the total number of batch processing of the processing device 2A after processing the lot LA by the processing device 2A is up to 30 times. It is set as "initial", if it is up to 60 times, it is set as "mid-term", and if it is 60 times or more, it is set as "end-stage". The life is recovered by replacing the jig and maintenance, and after the recovery, the life is evaluated again with the total number of batch processes being 0. Further, in the above example, a configuration in which the life is evaluated in three stages is illustrated, but the configuration is not limited to this configuration, and a configuration in which the life is evaluated in two stages or four or more stages may be used.

In step S4, the input availability determination process is performed by the input lot knitting function. Here, FIG. 3 is a flowchart showing the input possibility determination process of step S4. In the charging possibility determination process shown in FIG. 3, it is determined for each lot L and each processing device 2 whether or not each lot L can be charged into each processing device 2. Therefore, in step S41, first, the input lot knitting function specifies the combination of the lot L to be processed for the input availability determination process and the processing device 2. In this embodiment, the lot L that is the target of the input availability determination process is referred to as the determination target lot _{LT1, and the processing device 2 that is the target of the input availability determination process is referred to as the determination target device 2 T1 .}

In step S42, the input lot knitting function determines whether or not the determination target device 2 _T1 is operating (input availability determination condition 1) based on the device information of the determination target device 2 _T1 acquired in step S2. Will be done. For example, when the determination target device 2 _T1 is the processing device 2A shown in Table 2 above, the input lot organization function determines that the determination target device 2 _T1 is operating because the operating state is “operating”. .. Further, when the determination target device 2 _T1 is the processing device 2C shown in Table 2 above, the operation state is "stopped", so that the input lot knitting function determines that the determination target device 2 _T1 is not operating. .. Then, when the input lot knitting function determines that the determination target device 2 _T1 is operating, the status of the input availability determination condition 1 is set to "YES", and the determination target device 2 _T1 is not operating. When the determination is made, the status of the input availability determination condition 1 is set to "NO", and the determination result is stored in the storage device 20.

In step S43, when the determination target lot _{LT1 is processed by the determination target device 2 T1 by} the input lot knitting function, it is determined whether or not the determination target lot _LT1 is in time for the delivery date (input availability determination condition 2). Will be. Specifically, the input lot knitting function includes the processing end time of the sub-lot SL of the final batch among the plurality of sub-lot _SLs of the determination target lot LT1 calculated by the lot division simulation in step S3, and the lot acquired in step S1. Compare with the processing end deadline according to the delivery date of the judgment target lot _LT1 in the information. Then, when the processing end time of the sub-lot SL of the final batch of the judgment target lot _LT1 is earlier than the processing end deadline of the judgment target lot _LT1 , the input lot knitting function is in time for the delivery date of the judgment target lot _LT1 . judge. Then, when the input lot knitting function determines that the determination target lot _{LT1 is processed by the determination target device 2 T1 and} the determination target lot _LT1 is in time for the delivery date, the status of the input availability determination condition 2 is set to "YES". On the other hand, if it is determined that the delivery date of the determination target lot _LT1 cannot be met, the status of the input availability determination condition 2 is set to "NO", and the status of the set input disapproval determination condition 2 is stored in the storage device. Store in 20.

For example, in the example shown in Table 3 above, when the determination target lot _{LT1 is the lot LA and the determination target device 2 T1 is} the processing device 2A, as shown in Table 3, the sublot SLA2 of the final batch of the lot LA The processing end time of is "8 o'clock on August 1st", which is earlier than the delivery date of lot LA "12:00 on August 3rd" shown in Table 2. Therefore, the input lot knitting function determines that the lot LA is in time for the delivery date when the lot LA is processed by the processing device 2A, and sets the status of the input availability determination condition 2 to "YES".

Further, in step S44, whether or not the processing device 2 is designated for the determination target lot _LT1 by the input lot knitting function, and the determination target device 2 _T1 is the processing device 2 designated by the determination target lot _LT1 . Whether or not (determination of input availability determination condition 3) is determined. Specifically, the input lot knitting function determines whether or not the determination target lot _LT1 has the designation of the processing device 2 based on the lot information acquired in step S1. Further, when the determination target lot _LT1 is designated as the processing device 2, the input lot knitting function determines whether or not the determination target device 2 _T1 is the processing device 2 designated by the determination target lot _LT1 . do. Then, the input lot knitting function is a condition for determining whether or not the input is possible when the determination target lot _{LT1 does not have the processing device 2 specified, or when the determination target device 2 T1 is} the processing device 2 designated by the determination target lot _LT1 . When the status of 3 is set to "YES", while the determination target lot _LT1 has the processing device 2 specified, and the determination target device 2 _T1 is not the processing device 2 specified by the determination target lot _LT1 . Sets the status of the input availability determination condition 3 to "NO", and stores the set status of the input disapproval determination condition 3 in the storage device 20.

For example, when the determination target lot _{LT1 is a lot LA, as shown in Table 1 above, since the lot LA is not designated by the processing device 2, the input lot organization function is such that the determination target device 2 T1 is} the processing device 2A to For any of the 2Cs, the status of the input availability determination condition 3 is set to "YES". Similarly, even when the determination target lot _LT1 is the lot LB, since the processing device 2 is not specified, the status of the input availability determination condition 3 is set to “YES” for any of the processing devices 2A to 2C. .. On the other hand, when the determination target lot _LT1 is a lot LC, as shown in Table 1, the lot LC is designated as the processing device 2, and the processing device 2A is designated as the processing device 2 for processing the lot LC. There is. Therefore, in the input lot knitting function, when the determination target lot _{LT1 is the lot LC and the determination target device 2 T1 is} the processing device 2A, the status of the input availability determination condition 3 is set to "YES" and the determination is made. When the target device 2 _T1 is the processing devices 2B and 2C, the status of the input availability determination condition 3 is set to "NO".

In step S45, the input lot knitting function determines whether or not the determination target lot _LT1 can be processed within the life of the determination target device 2 _T1 (determination of the input availability determination condition 4). Specifically, the input lot knitting function first confirms the life of the determination target device 2 _T1 based on the device information acquired in step S2, and processes the determination target lot _LT1 by the determination target device 2 _T1 . If the number of processes of the determination target device 2 _T1 does not exceed the maximum life of the determination target device 2 _T1 , it is determined that the determination target lot _LT1 can be processed within the life of the determination target device 2 _T1 , while the determination target. When the number of processes of the device 2 _T1 exceeds the maximum life of the determination target device 2 _T1 , it is determined that the determination target lot _LT1 cannot be processed within the life of the determination target device 2 _T1 . In particular, in the present embodiment, when the input lot knitting function divides the determination target lot LT1 into _sublot SLs, it determines whether all of the plurality of sublots can be processed within the life of the determination target device 2 _T1 . .. Then, when the input lot knitting function determines that the determination target lot _LT1 can be processed within the life of the determination target device 2 _T1 , the status of the input availability determination condition 4 is set to "YES", while the determination is made. If it is determined that the determination target lot _LT1 cannot be processed within the life of the target device 2 _T1 , the status of the input availability determination condition 4 is set to "NO", and the status of the set input availability determination condition 4 is stored in the storage device. Store in 20.

For example, in the example shown in Table 3 above, when the determination target lot _{LT1 is the lot LA and the determination target device 2 T1 is} the processing device 2A, as a result of the lot division simulation in step S3, a plurality of lot LAs are divided. The life of the processing apparatus 2A in the final batch processing of the sublots SLA1 and SLA2 is predicted to be "medium term (<0.6 × NA)" which has not reached the maximum life NA. In this case, the input lot knitting function processes the lot LA within the life of the processing device 2A because the number of processing of the processing device 2A does not exceed the maximum life NA even if all the sub-lots SLA1 and SLA2 of the lot LA are processed. It is determined that it is possible, and the input possibility determination condition 4 is set to "YES".

In step S46, the input lot knitting function determines whether or not the processing conditions of the determination target device 2 _T1 and the processing conditions of the determination target lot LT ₁ match. For example, in the present embodiment, the input lot knitting function can determine whether the processing conditions such as the heating temperature, the heating time, the type of dopant, the doping amount (resistance width), the gas composition, and the flow rate match. Further, in the present embodiment, as a processing condition, the input lot knitting function may match the size and shape of the work W of the determination target lot _{LT1 with the size and shape of the work W that can be processed by the determination target device 2 T1 .} It can be determined. When the input lot knitting function determines that the processing conditions of the determination target device 2 _T1 and the processing conditions of the determination target lot _LT1 match, the status of the input availability determination condition 5 is set to "YES", while the input lot formation function sets the status to "YES". If the processing conditions of the determination target device 2 _T1 and the processing conditions of the determination target lot _LT1 do not match, the status of the input availability determination condition 5 is set to "NO", and the status of the set input availability determination condition 5 is set. Store in the storage device 20.

For example, when the determination target lot _{LT1 is the lot LA and the determination target device 2 T1 is} the processing device 2A, the processing condition of the lot LA is “condition 1” as shown in Table 1, and is shown in Table 2. As described above, since the processing conditions that can be implemented by the processing device 2A are "conditions 1 and 2", the processing conditions are the same, and the size of the work W of the lot LA is 150 mm, so that the processing device 2A can process. Since the size of the work W also matches at 150 mm, the input lot knitting function determines that the processing conditions of the lot LA and the processing conditions of the processing device 2A match, and sets the status of the input availability determination condition 5 to "YES". do.

In this way, by determining the input availability determination conditions 1 to 5 in steps S42 to S46, as shown in Table 4 below, the input availability determination conditions 1 to 1 for each processing device 2 in the determination target lot _LT1 . The status of 5 will be stored in the storage device 20. In addition, Table 4 below shows the status of the input possibility determination conditions 1 to 5 of the processing devices 2A to 2C in the lot LA.

Then, in step S47, whether or not the processing of steps S41 to S46 has been performed for the determination target lot _{LT1 specified in step S41 by using the input lot knitting function with all the processing devices 2 as the determination target devices 2 T1 .} Is determined. When the processing of steps S41 to S46 is performed with all the processing devices 2 as the judgment target devices 2 _T1 for the determination target lot L _T1 specified in step S41, the process proceeds to step S48, while all the processing devices 2 If the processing of steps S41 to S46 has not been performed as the determination target device 2 _T1 , the process returns to step S41, the processing device 2 for which processing has not been performed is newly specified as the determination target device 2 _T1 , and steps S42 to S42 to The processing of S46 is performed.

In step S48, the input lot knitting function determines whether or not the processes of steps S41 to S47 have been performed, with all lots L as the determination target lots _LT1 . When the processes of steps S41 to _S47 are performed with all the lots L as the determination target lots LT1, the input possibility determination process shown in FIG. 3 is terminated, and the process proceeds to step S5 shown in FIG. On the other hand, if all the lots L are set as the determination target lot L _T1 and the processing of steps S41 to S47 is not performed, the process returns to step S41, and the unprocessed lot L is newly specified as the determination target lot _LT1 . Then, the processes of steps S41 to S47 are performed.

Returning to FIG. 2, in step S5, the goodness-of-fit calculation process for evaluating the goodness of fit when the lot L is charged into each processing device 2 is performed by the input lot knitting function. Here, FIG. 4 is a flowchart showing the goodness-of-fit evaluation process of step S5. In the goodness-of-fit evaluation process shown in FIG. 4, for each of the plurality of goodness-of-fit evaluation conditions, the individual goodness of fit when the lot L is put into the processing device 2 is obtained, and each of the obtained individual goodness of fit is weighted. The total value of multiple weighted individual goodness of fit and the value obtained by relativizing the total value (for example, the value derived by using the sigmoid function so as to be in the range of 0 to 1) are calculated as the goodness-of-fit evaluation value. do.

As shown in FIG. 4, in step S51, first, the input lot knitting function acquires weights for weighting each goodness-of-fit evaluation condition. In the present embodiment, the weight of the goodness-of-fit evaluation condition is determined in advance for each goodness-of-fit evaluation condition by the analytic hierarchy process and stored in the storage device 20. Here, in the present embodiment, as the goodness-of-fit evaluation conditions, (1) the processing end time when the lot L is processed by the processing device 2, and (2) the processing device 2 when the lot L is charged into the processing device 2. Regarding the filling rate in the final batch processing, (3) the lot L designated from any lot L, whether the lot L to be determined is the lot L designated by the processing device 2 or (4) the processing device 2 Five goodness-of-fit evaluation conditions are evaluated: whether the life zone of is suitable for the lot L, and (5) whether setup is necessary when the lot L is put into the processing apparatus 2. Therefore, in the present embodiment, the goodness-of-fit evaluation conditions 1 to 5 of (1) to (5) are compared 1: 1 by the analytic hierarchy process, and which of the goodness-of-fit evaluation conditions to be compared is prioritized 5 The weight of each goodness-of-fit evaluation condition is determined by evaluating in stages.

For example, as shown in the first row of Table 5 below, when comparing the goodness-of-fit evaluation condition 1 regarding the processing end time of (1) and the goodness-of-fit evaluation condition 2 regarding the filling rate of the final batch of (2), ( When the goodness-of-fit evaluation condition 2 regarding the filling rate of the final batch of (2) is given higher priority than the goodness-of-fit evaluation condition 1 regarding the processing end time of 1), one point is given for the goodness-of-fit evaluation condition 1 of (1). Is given, and 5 points are given for the goodness-of-fit evaluation condition 2 of (2). Further, as shown in the second row from the beginning of Table 5 below, when comparing the goodness-of-fit evaluation condition 1 regarding the processing end time of (1) and the goodness-of-fit evaluation condition 3 regarding the designation of the processing device 2 of (3). In addition, when the goodness-of-fit evaluation condition 3 regarding the designation of the processing device 2 of (3) is given a smaller priority than the goodness-of-fit evaluation condition 1 regarding the processing end time of (1), the goodness-of-fit evaluation condition 1 of (1) is given. 2 points are given for, and 3 points are given for the goodness-of-fit evaluation condition 2 in (2).

Then, the weights of the goodness-of-fit evaluation conditions 1 to 5 of (1) to (5) are determined according to the total points of the points given for each goodness-of-fit evaluation condition. In the present embodiment, the weights of the goodness-of-fit evaluation conditions 1 to 5 are adjusted so that the weight of the goodness-of-fit evaluation condition having the highest total score is 1. As a result, as shown in Table 6 below, the weights W1 to W5 of the goodness-of-fit evaluation conditions 1 to 5 of (1) to (5) are determined and stored in the storage device 20.

Subsequently, in step S52, the evaluation target lot _{LT2 and the evaluation target device 2 T2 are} selected by the input lot knitting function. That is, in the goodness-of-fit evaluation process shown in FIG. 4, the goodness of fit when the lot L is charged into each processing device 2 is different for each lot L and each processing device 2, as in the input possibility determination process shown in FIG. It is judged. Therefore, in step S52, the lot L to be processed in the goodness-of-fit evaluation process is specified as the evaluation target lot _{LT2, and the processing device 2 to be processed in the goodness-of-fit evaluation process is specified as the evaluation target device 2 T2 .}

In step S53, the input lot knitting function determines whether or not the evaluation target lot _{LT2 can be input to the evaluation target device 2 T2 based} on the determination result of the input availability determination process in step S4. As shown in Table 4 above, the input lot knitting function refers to the status of input availability determination conditions 1 to 5 of each evaluation target device 2 _T2 for each evaluation target lot _LT2 stored in the storage device 20, and whether or not the input is possible. If any one of the judgment conditions 1 to 5 has a status of "NO", it is judged as "cannot be input", and if all the statuses of the judgment conditions 1 to 5 are "YES", "input is not possible". It is judged as "OK". Then, when the input lot knitting function determines that the evaluation target lot _{LT2 cannot be input to the evaluation target device 2 T2 ,} the conformity evaluation value is not evaluated or the conformity evaluation value is evaluated as 0. If it is determined that the evaluation target lot _{LT2 can be put into the evaluation target device 2 T2 ,} the process proceeds to step S510.

Here, in Table 4 above, the statuses of the input availability determination conditions 1 to 5 of the processing devices 2A to 2C in the lot LA are shown. When the evaluation target lot L _T2 is the lot LA and the evaluation target device 2 _T2 is the processing device 2A or the processing device 2B, the input lot knitting function converts the lot LA into the processing device 2A and the processing device 2A based on the above Table 4. It is determined that it can be put into 2B, and the process proceeds to step S54. On the other hand, when the evaluation target lot _{LT2 is the lot LA and the evaluation target device 2 T2 is} the processing device 2C, the input lot knitting function cannot input the lot LA to the processing device 2C based on Table 4 above. The determination is made, and the process proceeds to step S510.

In step S54, the individual evaluation target lot _LT2 is input to the evaluation target device 2 _T2 based on the processing end time (conformity evaluation condition 1) of the final batch of the evaluation target lot _LT2 by the input lot organization function. The degree of conformity F1 is evaluated. Specifically, for the input lot knitting function, first, refer to the end time of the final batch processing of the evaluation target lot _LT2 when the evaluation target lot _LT2 simulated in step S3 is input to the evaluation target device 2 _T2 . Then, the earlier the end time of the final batch processing is, the higher the evaluation value E1 is evaluated. For example, the input lot knitting function evaluates the evaluation value E1 of the processing device 2 having the earliest end time of the final batch processing as 1.0 when there are three processing devices as the processing device 2, and the end time of the final batch processing. The evaluation value E1 of the processing device 2 having the next earliest can be evaluated as 0.5, and the evaluation value E1 of the processing device 2 having the latest end time of the final batch processing can be evaluated as 0.0. Then, the input lot knitting function calculates the individual goodness of fit F1 of the goodness of fit evaluation condition 1 by multiplying the evaluated evaluation value E1 by the weight W1 of the goodness of fit evaluation condition 1 acquired in step S51.

For example, in the example shown in Table 3 above, when the evaluation target lot _LT2 is the lot LA, the end time of the final batch processing is “8 o'clock on August 1” for the processing device 2A and “8 o'clock on August 1” for the processing device 2B. It is "8:30 on August 1st", and the processing device 2C is "9:00 on August 1st". Therefore, as shown in Table 7 below, the input lot knitting function evaluates the evaluation value E1 of the goodness-of-fit evaluation condition 1 when charging to the processing device 2A having the earliest end time of the final batch processing as "1". The evaluation value E1 of the goodness-of-fit evaluation condition 1 when the final batch processing is input to the processing device 2B having the earliest end time is evaluated as "0.5", and the processing device 2C having the latest final batch processing end time is evaluated. The evaluation value E1 of the goodness-of-fit evaluation condition 1 at the time of input is evaluated as "0". Further, as shown in Table 6 above, the input lot knitting function acquires 0.72, which is the weight W1 of the goodness-of-fit evaluation condition 1, from the storage device 20, and obtains the acquired goodness-of-fit evaluation condition in the calculated evaluation value E1. Multiply the weight W1 of 1 to calculate the individual goodness of fit F1. For example, as shown in Table 7 below, when the evaluation target lot _{LT2 is a lot LA, the individual conformity F1 of the conformity evaluation condition 1 when the evaluation target device 2 T2 is} the processing device 2A is 1 × 0. It is calculated as .72 = 0.72, and when the evaluation target device 2 _T2 is the processing device 2B, the individual conformity F1 of the conformity evaluation condition 1 is calculated as 0.5 × 0.72 = 0.36. .. On the other hand, when the evaluation target device 2 _T2 is the processing device 2C, as shown in Table 4 above, the lot LA cannot be charged into the processing device 2C (step S53 = No), so that the individual goodness of fit F1 is not calculated (step S53 = No). The same applies to other individual goodness of fit F2 to F5). Table 7 shows an example of the evaluation values E1 to E5, the individual goodness of fit F1 to F5, and the goodness of fit evaluation value σ when the lot LA is charged into the processing devices 2A to 2C.

As described above, the evaluation value E1 of the conformity evaluation condition 1 is not limited to the above configuration as long as the evaluation value E1 that is higher as the end time of the final batch processing is earlier is given, and is not limited to the above configuration. When there are N units of 2, the evaluation value E1 of the processing device 2 having the i-th earliest end time of the final batch processing may be calculated as (Ni) / (N-1), or the current time. The evaluation value E1 of the processing device 2 that finishes after a predetermined time t1 (for example, 24 hours later) is evaluated as 1.0, and the processing device 2 that finishes after t2 (for example, 48 hours later) later than t1. By evaluating the evaluation value E1 as 0.5 and evaluating the evaluation value E1 of the processing device 2 slower than that as 0.0, the evaluated conformity is multiplied by the weight W1 of the conformity evaluation condition 1 to be individually matched. It can also be configured to calculate the degree F1.

In step S55, the evaluation target lot _LT2 is evaluated based on the filling rate (conformity evaluation condition 2) of the final batch processing of the evaluation target device 2 _T2 when the evaluation target lot LT2 is charged into the evaluation target device 2 _T2 by the input lot knitting function. The individual conformity degree F2 when the target lot L _T2 is put into the evaluation target device 2 _T2 is evaluated. For example, in the present embodiment, the input lot knitting function sets the filling rate of the final batch processing when the evaluation target lot _{LT2 simulated in step S3 is input to the evaluation target device 2 T2 as} the evaluation value of the goodness of fit evaluation condition 2. Calculated as E2. Then, the input lot knitting function calculates the individual goodness of fit F2 of the goodness of fit evaluation condition 2 by multiplying the evaluated evaluation value E2 by the weight W2 of the goodness of fit evaluation condition 2 acquired in step S51.

For example, in the example shown in Table 3 above, when the evaluation target lot _{LT2 is the lot LA and the evaluation target device 2 T2 is} the processing device 2A, the filling rate of the final batch processing is 91.7%, so that the input is input. As shown in Table 7 above, the lot knitting function calculates 0.917 as the evaluation value E2 of the goodness-of-fit evaluation condition 2, and multiplies this by 1.0, which is the weight W2 of the goodness-of-fit evaluation condition 2, to match. The individual goodness of fit F2 of the degree evaluation condition 2 can be calculated as 0.917.

In step S56, the individual evaluation target lot _{LT2 is input to the evaluation target device 2 T2 based} on the presence / absence of the lot L that designates the evaluation target device 2 _T2 by the input lot knitting function (conformity evaluation condition 3). The degree of conformity F3 is evaluated. Specifically, the input lot knitting function specifies the evaluation target device 2 _T2 so that when there is a lot L that specifies the evaluation target device 2 _T2 , the lot L can be input in preference to the evaluation target device 2 _T2 . It is determined whether there is a lot L to be evaluated, and if there is a lot L to specify the evaluation target device 2 _T2 , whether the evaluation target device 2 _T2 is the processing device 2 designated by the evaluation target lot L _T2 . The input lot knitting function has a conformity evaluation condition when there is a lot L that designates the evaluation target device 2 _T2 and the evaluation target device 2 _T2 is the processing device 2 designated by the evaluation target lot _LT2 . The evaluation value E3 of 3 is evaluated as "1". Further, the input lot knitting function evaluates the evaluation value E3 of the goodness-of-fit evaluation condition 3 as "0" when the processing device 2 is not specified in the evaluation target lot _LT2 . Then, the input lot knitting function multiplies the evaluation value E3 of the evaluated goodness of fit evaluation condition 3 by the weight W3 of the goodness of fit evaluation condition 3 acquired in step S51 to obtain the individual goodness of fit F3 of the goodness of fit evaluation condition 3. calculate.

For example, as shown in Table 1 above, the lot LA does not specify the processing device 2, but the lot LB designates the processing device 2A as the processing device 2 for performing the processing. Therefore, when the evaluation target lot _{LT2 is the lot LA and the evaluation target device 2 T2 is} the processing device 2A, the input lot knitting function determines that the lot LA does not have the processing device 2 specified, and is shown in Table 7 above. As shown, the evaluation value E3 of the conformity evaluation condition 3 is calculated as "0", and this is multiplied by 0.60, which is the weight W3 of the conformity evaluation condition 3, to obtain the individual conformity F3 of the conformity evaluation condition 3. Is calculated as "0". On the other hand, when the evaluation target lot _{LT2 is the lot LB and the evaluation target device 2 T2 is} the processing device 2A, the input lot knitting function has a lot L that specifies the processing device 2A, and the processing device 2A is a lot. It is determined that the processing device 2 is designated by the LB, "1" is calculated as the evaluation value E3 of the goodness-of-fit evaluation condition 3, and this is multiplied by 0.60, which is the weight W3 of the goodness-of-fit evaluation condition 3, to match. Calculated with the individual goodness of fit F3 of the degree evaluation condition 3 as 0.6.

If the evaluation target lot _LT2 is designated as the processing device 2 and the evaluation target lot _LT2 is not the processing device 2 designated by the evaluation target lot _LT2 , the status of the input availability determination condition 3 is "" in step S44. Since it is set to "NO", the degree of conformity is not evaluated for the combination of the evaluation target lot _{LT2 and the evaluation target device 2 T2 (} step S53 = No). Therefore, for example, when the evaluation target lot _{LT2 is the lot LB and the evaluation target device 2 T2 is} the processing device 2B, the goodness of fit is not evaluated.

In step S57, the input lot knitting function evaluates whether the life of the evaluation target device 2 _T2 is a life zone suitable for the evaluation target lot _LT 2 (goodness of fit evaluation condition 4). For example, when the life of the evaluation target device 2 _T2 is a life zone suitable for the evaluation target lot _LT2 , the input lot knitting function evaluates the evaluation value E4 of the conformity evaluation condition 4 as “1” and evaluates it. When the life of the device 2 _T2 is not a life zone suitable for the lot _LT2 to be evaluated, the evaluation value E4 of the conformity evaluation condition 4 is evaluated as “0”. Then, the input lot knitting function calculates the individual goodness of fit F4 of the goodness of fit evaluation condition 4 by multiplying the evaluation value E4 of the evaluated goodness of fit evaluation condition 4 by the weight W4 of the goodness of fit evaluation condition 4 acquired in step S51. do.

For example, in the example shown in Table 3 above, when the evaluation target lot _{LT2 is the lot LA and the evaluation target device 2 T2 is} the processing device 2A, the life of the processing device 2A shown in the above table 2 is “initial”. Since the life zone suitable for lot LA shown in Table 1 above is "initial", the input lot knitting function determines that the processing device 2A is a life zone suitable for lot LA, and as shown in Table 7 above. The evaluation value E4 of the conformity evaluation condition 4 is evaluated as "1", and this is multiplied by 0.56, which is the weight W4 of the conformity evaluation condition 4, to obtain the individual conformity F4 of the conformity evaluation condition 4. Calculated as 56. On the other hand, when the evaluation target lot _{LT2 is the lot LA and the evaluation target device 2 T2 is} the processing device 2B, the life of the processing device 2B shown in Table 2 above is “medium term”, and the life zone suitable for the lot LA is Is "initial", so the input lot knitting function determines that the processing device 2B is not a life zone suitable for lot LA, and as shown in Table 7 above, sets the evaluation value E4 of the conformity evaluation condition 4 to ". It is evaluated as "0", and this is multiplied by 0.56, which is the weight W4 of the conformity evaluation condition 4, to calculate the individual conformity F4 of the conformity evaluation condition 4 as "0".

In this embodiment, referring to Table 2 above, it is determined whether or not the life of the evaluation target device 2 _T2 is a life zone suitable for the evaluation target lot _LT 2, but the configuration is limited to this. Instead, the life zone at the end of the final batch processing of the _sublot SL of the evaluation target lot _LT2 is suitable for the evaluation target lot LT2 based on the information of the life zone at the end of the final batch processing simulated in step S3. When it is within the life, the evaluation value E4 of the conformity evaluation condition 4 may be evaluated as “1”.

In step S58, when the evaluation target lot LT2 is _{charged to the evaluation target device 2 T2 by} the input lot knitting function, it is evaluated whether the processing can be continuously executed (goodness of fit evaluation condition 5). For example, in the input lot organization function, when the evaluation target lot _LT2 is input to the evaluation target device 2 _T2 , it is necessary to change the processing conditions with respect to the processing conditions of the final batch processing of the evaluation target device 2 _T2 . When it is necessary, it is determined that continuous processing is not possible, and the evaluation value E5 of the conformity evaluation condition 5 is evaluated as “0”. On the other hand, in the input lot knitting function, the heating temperature is the same, the heating time is the same, the dopant type is the same, and the resistance is within the predetermined range with respect to the processing conditions of the final batch processing of the evaluation target device 2 _T2 . When the treatment can be performed continuously, such as when the gas composition and the flow rate match, the evaluation value E5 of the conformity evaluation condition 5 is evaluated as “1”. Then, the input lot knitting function calculates the individual goodness of fit F5 of the goodness of fit evaluation condition 5 by multiplying the evaluation value E5 of the evaluated goodness of fit evaluation condition 5 by the weight W5 of the goodness of fit evaluation condition 5 acquired in step S51. do.

For example, in the example shown in Table 3 above, when the lot _{LT2 to be evaluated is the lot LA and the device 2 T2 to} be evaluated is the processing device 2A, the processing conditions for the final batch processing of the processing device 2A shown in Table 2 above are Since it is "condition 1" and the processing condition of lot LA is "condition 1", the input lot knitting function determines that the lot LA can be continuously processed as it is, and as shown in Table 7 above, the goodness of fit. The evaluation value E5 of the evaluation condition 5 is evaluated as "1", and this is multiplied by 0.69, which is the weight W5 of the goodness of fit evaluation condition 5, to set the individual conformity F5 of the goodness of fit evaluation condition 5 to "0.69". calculate. On the other hand, when the evaluation target lot _{LT2 is the lot LA and the evaluation target device 2 T2 is} the processing device 2B, the processing condition of the final batch processing of the processing device 2B shown in Table 2 above is “Condition 2”, and the lot. Since the LA processing condition is "Condition 1", the input lot knitting function determines that the lot LA cannot be continuously processed as it is, and as shown in Table 7 above, the evaluation value E5 of the conformity evaluation condition 5 is set. It is evaluated as "0", and this is multiplied by 0.69, which is the weight W5 of the conformity evaluation condition 5, to calculate the individual conformity F5 of the conformity evaluation condition 5 as "0".

In step S59, the individual goodness of fit F1 to F5 of the conformity evaluation conditions 1 to 5 when the evaluation target lot _{LT2 calculated in steps S54 to S58 is input to the evaluation target device 2 T2 by} the input lot knitting function is set. Based on this, the goodness-of-fit evaluation value σ for the combination of the evaluation target lot _{LT2 and the evaluation target device 2 T2 is} calculated. In the present embodiment, the input lot knitting function inputs the total value Σ (Fi) of the individual goodness of fits F1 to F5 of the goodness of fit evaluation conditions 1 to 5 into the sigmoid function f, as shown in Table 7 above. The goodness-of-fit evaluation value σ is calculated as a numerical value of 0 to 1 so that the higher the total value of the individual goodness of fits F1 to F5, the higher the numerical value. Then, the input lot knitting function associates the combination of the evaluation target lot _{LT2 and the evaluation target device 2 T2 with the goodness-of-fit evaluation value T2 calculated for} the combination, and stores it in the storage device 20. The input lot knitting function can also be configured to calculate the total value Σ (Fi) of the individual goodness of fit F1 to F5 of the goodness of fit evaluation conditions 1 to 5 as the goodness of fit evaluation value σ as it is.

Then, in step S510, whether or not the processing of steps S52 to S59 is performed for the evaluation target lot _{LT2 specified in step S52 by using the input lot knitting function with all the processing devices 2 as the evaluation target devices 2 T2 .} Is determined. If the processing of steps S52 to S59 is performed in the combination of the evaluation target lot _LT2 specified in step S52 and all the processing devices 2, the process proceeds to step S511. On the other hand, if the processing of steps S52 to S59 is not performed for the combination of the evaluation target lot _LT2 specified in step S52 and all the processing devices 2, the process returns to step S52 and the processing is not performed. The processing device 2 is newly specified as the evaluation target device 2 _T2 , and the processing of steps S52 to S59 is performed.

In step S511, the input lot knitting function determines whether or not the processes of steps S52 to S59 have been performed for all lots L. When the processes of steps S52 to S59 are performed for all lots L, the goodness-of-fit evaluation process shown in FIG. 4 is terminated, and the process proceeds to step S6 shown in FIG. On the other hand, if the processing of steps S52 to S59 has not been performed for all lots L, the process returns to step S52, the unprocessed lot L is newly specified as the evaluation target lot _LT2 , and steps S52 to S59 are performed. Is processed.

Returning to FIG. 2, in step S6, the result of the goodness-of-fit evaluation process of step S5 stored in the storage device 20 is referred to by the input lot knitting function, and the lot L having the highest goodness-of-fit evaluation value and the processing device 2 are combined. The combination is specified. Then, in step S7, the input lot knitting function performs a process of allocating the lot L in the combination specified in step S6 to the processing device 2.

In step S8, the input lot knitting function determines whether or not the lot L required in the production plan or the like has been allocated to the processing device 2. When the required lot L is allocated to the processing device 2, the process proceeds to step S9. On the other hand, when the required lot L is not allocated to the processing device 2, the process returns to step S3, and the remaining lot L is subjected to the above-mentioned lot division simulation process (step S3) and input availability determination process (step S4). , And the processes of steps S3 to S7 including the goodness-of-fit evaluation process (step S5) are repeatedly executed.

In step S9, the input lot knitting function determines whether or not there is a lot L that is not in time for delivery. If there is no lot L that is not in time for the delivery date (step S9 = No), the process proceeds to step S10, and the output function of the arithmetic unit 10 displays the formation information of the input lot IL generated by this input lot organization process to the external output device. It is output to 30. In the present embodiment, since the external output device 30 is a display device such as a monitor, the user can grasp the formation result of the input lot IL by displaying the formation result of the input lot IL by the external output device 30. can. On the other hand, if there is a lot L that is not in time for the delivery date (step S9 = Yes), the process proceeds to step S11, and the organization information of the input lot IL generated by this input lot organization process is adjusted so that all the lot L are in time for the delivery date. do. In this case, the operator can manually adjust the formation of the input lot IL.

As described above, the input lot knitting device 1 according to the present embodiment processes a plurality of lots L having different required processing conditions by using a plurality of processing devices 2 that execute processing under different processing conditions. , A group of a plurality of lots L to be processed simultaneously by the processing device 2 is organized as an input lot IL for each processing device, and each combination of the lot L and the processing device 2 is input based on the lot information and the device information. It is determined whether or not the goodness of fit is met, and for each combination of the lot L determined to be ready for input and the processing device 2, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions is defined as the goodness of fit. Calculated for each evaluation condition, the goodness-of-fit evaluation value when the lot L is processed by the processing device 2 is calculated based on a plurality of individual goodness-of-fits, and the lot L in the combination having the highest goodness-of-fit evaluation value is processed by the processing device 2. After allocating to, the input lot IL for each processing device 2 is organized by repeating the determination of whether to input or not and the calculation of the goodness-of-fit evaluation value for the unallocated lot L again. As a result, the charging lot knitting device 1 according to the present embodiment can achieve the effect that the charging lot IL suitable for a plurality of goodness-of-fit evaluation conditions can be quickly knitted at a high filling rate. Here, FIG. 5 is a graph showing the filling rate of the processing apparatus 2 in the input lot knitting process and the conventional input lot knitting process according to the present embodiment, and FIG. 6 is a graph showing the input lot knitting process according to the present embodiment. It is a graph which shows the knitting time in the conventional input lot knitting process. In the past, since the operator manually knitted the input lot IL, the average filling rate of the processing device 2 was as high as 89%, but the knitting time for knitting the input lot IL was 1 hour. It took more than that. On the other hand, in the input lot knitting process according to the present embodiment, the filling rate of the processing apparatus 2 could be improved to 96%, which is higher than the conventional one, and the knitting time for knitting the input lot IL was increased. It was possible to significantly reduce it within 10 minutes.

Further, in the present embodiment, as the input availability judgment condition, "whether the judgment target lot _LT1 is the judgment target device 2 _T1 " or "whether the judgment target lot _{LT1 can be processed within the life of the judgment target device 2 T1 "} . The condition related to the designation of the processing device 2 by the lot L and the life of the processing device 2 is determined, and as the conformity-of-fit evaluation condition, "whether there is a lot L that specifies the evaluation target device 2 _T2 , and the evaluation target device 2". "Is _T2 the processing device 2 designated by the evaluation target lot L _T2 ?" Or "Is the life of the evaluation target device 2 _T2 a life zone suitable for the evaluation target lot L _T2 ?" Determine the conditions related to the designation and the life of the processing device 2. As described above, in the present embodiment, the input availability determination condition and the goodness-of-fit evaluation condition are common conditions regarding the same items (for example, items such as the designation of the processing device 2 by the lot L and the life of the processing device 2). By determining these common conditions in the input availability judgment condition and the goodness-of-fit evaluation condition, respectively, it is possible to preferentially allocate the lot L satisfying the common condition to the processing device 2 satisfying the common condition. Become.

Although the preferred embodiment of the present invention has been described above, the technical scope of the present invention is not limited to the description of the above embodiment. Various changes and improvements can be added to the above-described embodiments, and those in which such changes or improvements have been made are also included in the technical scope of the present invention.

For example, in addition to the condition for determining whether or not the work W can be input in the above-described embodiment, if there is an instruction to suspend the input of the work W for the processing device 2, the processing device 2 can be configured to determine that the processing device 2 cannot be input.

Further, instead of the conformity evaluation conditions in the above-described embodiment, or in addition to the conformity evaluation conditions according to the above-described embodiment, the closeness of delivery date, the length of residence days, and the evaluation target device of the evaluation target lot _LT2 . 2 The individual conformity is calculated based on the small number allocated to _T2 or the large number of remaining batches that can be executed by the evaluation target device 2 _T2 after processing the evaluation target lot _LT2 . , These individual conformance degrees can be further added to calculate the conformity evaluation value. Specifically, since it is preferable to process the evaluation target lot _LT2 having a close delivery date or a long residence period as soon as possible, the input lot knitting function determines the individual suitability of such an evaluation target lot _LT2 . Can be highly evaluated. Further, the input lot knitting function can achieve leveling between the processing devices 2 by calculating the individual goodness of fit higher for the evaluation target device 2 _T2 having a smaller number of allocated work W. Further, the input lot knitting function can calculate the individual goodness of fit higher as the number of batches that can be executed by the evaluation target device 2 _T2 after the evaluation target lot _LT2 is input is larger. As a result, the filling rate after charging the evaluation target lot _LT2 is low, but the number of batches is insufficient to process the next evaluation target lot _LT2 , and the processing must be performed with the filling rate low. It is possible to effectively prevent the situation where the situation occurs. Further, the input lot knitting function searches for the lot L that is the same type as the input evaluation target lot _LT2 and has not been allocated after the evaluation target lot _LT2 is input, and is combined with the input evaluation target lot _LT2 . If there is a lot L of the same type and unallocated, the filling rate of the evaluation target device 2 _T2 when this lot L is put into the evaluation target device 2 _T2 is calculated, and if the filling rate is low, it is individually adapted. It is also possible to set the degree low. As a result, the lot L of the same type and unallocated is not always put into the evaluation target device 2 _T2 , and it is possible to effectively prevent waiting for the next allocation in a state where the filling rate is low.

1 ... Input lot knitting device 10 ... Arithmetic unit 20 ... Storage device 30 ... External output device 40 ... Input device

The input lot knitting device according to the present invention processes a plurality of lots having different required processing conditions at the same time by the processing device when the plurality of lots are processed by using a plurality of processing devices that execute processing under different processing conditions. An input lot knitting device capable of knitting a group of a plurality of lots as an input lot for each processing device, and an acquisition means for acquiring lot information regarding the lot and device information regarding the processing device, and the above-mentioned. Based on the input availability determination means for determining whether or not each combination of the lot and the processing apparatus meets the input availability determination condition based on the lot information and the device information, and based on the lot information and the device information. Then, for each combination of the lot and the processing device determined to be loadable by the loading availability determination means, the conformity to each of a plurality of goodness-of-fit evaluation conditions is calculated as the individual goodness of fit for each goodness-of-fit evaluation condition. Then, the goodness-of-fit evaluation means for calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus based on the plurality of individual goodness-of-fits, and the plurality of combinations determined by the goodness-of-fit evaluation means. Based on the plurality of goodness-of-fit evaluation values, a single combination most suitable for input is identified among the plurality of combinations, the lot in the combination is allocated to the processing device, and then the unallocated one is again unallocated. With respect to the combination of the lot and the processing apparatus in the state after the lot is assigned, the goodness of fit determination by the goodness-of-fit determination means and the calculation of the goodness-of-fit evaluation value by the goodness-of-fit evaluation means are repeated. Each processing apparatus has a knitting means for knitting the input lot.
In the input lot knitting device, whether the processing device is operating or the processing device designated by the lot matches the processing conditions of the processing device with the processing conditions of the lot. Whether the size of the work constituting the lot is a size that can be processed by the processing device, the lot can be processed within the life of the processing device, or the processing device can meet the delivery date of the lot. Further, it is determined whether or not the lot can be processed by the processing apparatus based on any one or more of the input possibility determination conditions among whether or not the processing apparatus is instructed to suspend the input of the lot. It can be configured.
In the input lot knitting apparatus, the goodness-of-fit evaluation means determines the speed of the processing end time when the lot is processed by the processing apparatus and the filling rate of the processing apparatus when the lot is processed by the processing apparatus. Height, whether setup is required when processing the lot with the processing device, whether the processing device is the processing device specified by the lot, or the life of the processing device is a life zone suitable for the lot. Either there is a lot close to the delivery date or the length of staying days, the number allocated to the processing device is small, or the number of remaining batches of the processing device after processing the lot is large. The individual goodness of fit can be evaluated for two or more of the goodness of fit evaluation conditions.
In the charging lot knitting device, the charging possibility determination condition and the goodness-of-fit evaluation condition may be configured to have common conditions regarding the same items.
In the input lot knitting device, the goodness-of-fit evaluation means weights the individual goodness of fit with respect to the goodness-of-fit evaluation condition as determined for each goodness-of-fit evaluation condition, and is based on the plurality of weighted individual goodness of fit. Therefore, the goodness-of-fit evaluation value when the lot is processed by the processing apparatus can be calculated.
In the input lot knitting device, the goodness-of -fit evaluation means is based on the processing conditions required for the lot included in the lot information and the processing conditions included in the device information that can be executed by the processing device. Can be configured to calculate the plurality of individual goodness of fit for each goodness of fit evaluation condition so that the product is processed by a processing device suitable for the lot .
The input lot knitting apparatus further includes a lot dividing means for dividing the lot into sub-lots when all the workpieces of the lot cannot be processed by one batch processing of the processing apparatus, and the input availability determination means When all of the sub-lots can be processed by the processing apparatus, it is determined that the lot can be put into the processing apparatus, and the goodness-of-fit evaluation means processes all of the sub-lots by the processing apparatus. It can be configured to calculate the goodness-of-fit evaluation value of the case.

In the input lot knitting method according to the present invention, when a plurality of lots having different required processing conditions are processed by using a plurality of processing devices that process under different processing conditions, the plurality of lots that are simultaneously processed by the processing device. It is an input lot knitting method that can organize a group of lots as an input lot for each processing apparatus, and is based on lot information about the lot and device information about the processing apparatus, and the lot and the processing apparatus. The lot determined to be able to be loaded in the loading possibility determination step based on the loading possibility determination step of determining whether or not each combination of and is satisfied with the loading possibility determination condition and the lot information and the device information. For each combination of the product and the processing apparatus, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions is calculated as the individual goodness of fit for each of the goodness-of-fit evaluation conditions, and the lot is obtained based on the plurality of individual goodness of fit. Based on the goodness-of-fit evaluation process for calculating the goodness-of-fit evaluation value in the case of processing by the processing apparatus, and the plurality of goodness-of-fit evaluation values of the plurality of the combinations determined in the goodness-of-fit evaluation step, the plurality of combinations Of these, a single combination most suitable for input is identified, the lot in the combination is assigned to the processing apparatus, and then the unallocated lot and the processing apparatus in the state after the lot is allocated are used again. Regarding the combination , the charging step of knitting the charging lot for each processing device by repeating the charging possibility determination by the charging possibility determination step and the evaluation of the conformity evaluation value by the conformity evaluation step. Have.

The input lot knitting program according to the present invention uses a computer to process a plurality of lots having different required processing conditions using a plurality of processing devices that process under different processing conditions. It is an input lot knitting program capable of organizing a group of a plurality of lots to be processed at the same time as an input lot for each processing apparatus, and is based on lot information about the lot and device information about the processing apparatus. , The loading possibility determination step for determining whether or not each combination of the lot and the processing device meets the loading possibility determination condition, and the charging possibility determination step based on the lot information and the device information. For each combination of the lot determined to be possible and the processing apparatus, the goodness of fit for each of a plurality of goodness-of-fit evaluation conditions is calculated as the individual goodness of fit for each goodness-of-fit evaluation condition, and the goodness of fit is calculated for each of the plurality of individual goodness-of-fit conditions. Based on the goodness-of-fit evaluation step for calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus, and the plurality of goodness-of-fit evaluation values of the plurality of combinations determined in the goodness-of-fit evaluation step. After identifying a single combination most suitable for input from the plurality of combinations, allocating the lot in the combination to the processing apparatus, and then allocating the unallocated lot and the lot again. With respect to the combination with the processing device in the state, the loading lot is determined for each processing device by repeating the charging possibility determination by the loading availability determination step and the evaluation of the goodness-of-fit evaluation value by the conformity-of-fit evaluation step. It has a knitting step to knit.

Claims (9)

When a plurality of lots having different required processing conditions are processed by using a plurality of processing devices that execute processing under different processing conditions, the group of the plurality of lots simultaneously processed by the processing device is used as an input lot. It is an input lot knitting device that can be knitted for each processing device.
An acquisition means for acquiring lot information regarding the lot and device information regarding the processing device, and
Based on the lot information and the apparatus information, the input propriety determination means for determining whether or not each combination of the lot and the processing apparatus meets the input propriety determination condition, and the input propriety determination means.
Based on the lot information and the device information, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions for each combination of the lot and the processing device determined to be loadable by the loading availability determination means is individually conformed. A goodness-of-fit evaluation means for calculating the goodness-of-fit evaluation value for each of the goodness-of-fit evaluation conditions and calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus based on the plurality of individual goodness-of-fits.
Based on the plurality of goodness-of-fit evaluation values of the plurality of the combinations determined by the goodness-of-fit evaluation means, the most suitable combination among the plurality of combinations is specified, and the lot in the combination is used as the processing apparatus. After being assigned to the lot, the unallocated lot is repeatedly determined by the goodness-of-fit determination means and the goodness-of-fit evaluation value is calculated by the goodness-of-fit evaluation means. An input lot knitting device having a knitting means for knitting the input lot. The input possibility determination means constitutes the lot, whether the processing device is operating, the processing device specified by the lot, the processing conditions of the processing device match the processing conditions of the lot, or the lot. Whether the size of the work to be processed is a size that can be processed by the processing apparatus, whether the lot can be processed within the life of the processing apparatus, whether the processing apparatus can meet the delivery date of the lot, and the processing apparatus. The input according to claim 1, wherein it is determined whether or not the lot can be processed by the processing apparatus based on one or more of the input hold instructions for the lot. Lot knitting equipment. The goodness-of-fit evaluation means includes the speed of the processing end time when the lot is processed by the processing apparatus, the high filling rate of the processing apparatus when the lot is processed by the processing apparatus, and the lot. Whether setup is required when processing with the processing device, whether the processing device is the processing device specified by the lot, whether the life of the processing device is a life zone suitable for the lot, and the delivery date of the lot. Two or more of the goodness-of-fit: the closeness or length of staying days, the small number allocated to the processing device, and the large number of remaining batches of the processing device after processing the lot. The input lot knitting apparatus according to claim 1 or 2, which evaluates the individual goodness of fit with respect to the degree evaluation conditions. The charging lot knitting apparatus according to any one of claims 1 to 3, wherein the charging possibility determination condition and the conformity evaluation condition have common conditions regarding the same matters. The goodness-of-fit evaluation means weights the individual goodness of fit with respect to the goodness-of-fit evaluation condition as determined for each goodness-of-fit evaluation condition, and processes the lot based on the plurality of weighted individual goodness of fit. The input lot knitting apparatus according to any one of claims 1 to 4, which calculates the goodness-of-fit evaluation value when processed by the apparatus. The input lot knitting device according to claim 5, wherein the goodness-of-fit evaluation means sets weighting for each goodness-of-fit evaluation condition based on the analytic hierarchy process. Further, it has a lot dividing means for dividing the lot into sub-lots when all the workpieces of the lot cannot be processed by one batch processing of the processing apparatus.
When all of the sub-lots can be processed by the processing device, the charging possibility determination means determines that the lot can be charged to the processing device.
The input lot knitting apparatus according to any one of claims 1 to 6, wherein the fitness evaluation means calculates the fitness evaluation value when all of the sublots are processed by the processing apparatus. When a plurality of lots having different required processing conditions are processed by using a plurality of processing devices that process under different processing conditions, the processing device uses a group of the plurality of lots to be processed simultaneously by the processing device as an input lot. It is an input lot knitting method that can be knitted for each.
Based on the lot information related to the lot and the device information related to the processing device, an input availability determination step for determining whether or not each combination of the lot and the processing apparatus meets the input enable / disable determination condition, and an input availability determination step.
Based on the lot information and the device information, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions is individually determined for each combination of the lot and the processing device determined to be ready for loading in the loading availability determination step. A goodness-of-fit evaluation step of calculating the goodness-of-fit evaluation value for each of the goodness-of-fit evaluation conditions and calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus based on the plurality of individual goodness-of-fits.
Based on the plurality of goodness-of-fit evaluation values of the plurality of the combinations determined in the goodness-of-fit evaluation step, the most suitable combination among the plurality of combinations is specified, and the lot in the combination is used as the processing apparatus. After being assigned to, the unallocated lot is repeatedly determined by the input availability determination step and the evaluation of the goodness-of-fit evaluation value by the conformity-of-fit evaluation step. A method for knitting an input lot, comprising a knitting step for knitting the input lot. Using a computer,
When a plurality of lots having different required processing conditions are processed by using a plurality of processing devices that process under different processing conditions, the processing device uses a group of the plurality of lots to be simultaneously processed by the processing device as an input lot. It is a program for input lot organization that can be organized for each.
Based on the lot information related to the lot and the device information related to the processing device, an input availability determination step for determining whether or not each combination of the lot and the processing apparatus meets the input availability determination condition, and an input availability determination step.
Based on the lot information and the device information, the goodness of fit for each of the plurality of goodness-of-fit evaluation conditions is individually determined for each combination of the lot and the processing device determined to be ready for loading in the loading availability determination step. A goodness-of-fit evaluation step for calculating the goodness-of-fit evaluation value for each of the goodness-of-fit evaluation conditions and calculating the goodness-of-fit evaluation value when the lot is processed by the processing apparatus based on the plurality of individual goodness-of-fits.
Based on the plurality of goodness-of-fit evaluation values of the plurality of the combinations determined in the goodness-of-fit evaluation step, the most suitable combination among the plurality of combinations to be input is specified, and the lot in the combination is used as the processing apparatus. After allocating to, again, for the unallocated lot, the input availability determination by the input availability determination step and the evaluation of the goodness-of-fit evaluation value by the conformity evaluation step are repeated for each processing device. A program for knitting an input lot, comprising a knitting step for knitting the input lot.

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