JP2022090116A5 - - Google Patents
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- JP2022090116A5 JP2022090116A5 JP2022071893A JP2022071893A JP2022090116A5 JP 2022090116 A5 JP2022090116 A5 JP 2022090116A5 JP 2022071893 A JP2022071893 A JP 2022071893A JP 2022071893 A JP2022071893 A JP 2022071893A JP 2022090116 A5 JP2022090116 A5 JP 2022090116A5
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- shaped spring
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- 239000000758 substrate Substances 0.000 claims description 58
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 2
Description
本発明は、下記の構成を有する。
［１］圧電素子、上部ディスク基板及び板形状のバネを有する上部ユニットと、下部ディスク基板を有する下部ユニットと、を備え、前記上部ディスク基板の下面と前記下部ディスク基板の上面との間が試料挿入部を形成し、前記上部ディスク基板の下面と前記下部ディスク基板の上面との間の表面間距離を調整でき、前記圧電素子及び前記上部ディスク基板は、前記上部ディスク基板の下面及び前記下部ディスク基板の上面に対して略垂直に設置された前記板形状のバネを介して固定機材から吊り下げられて、水平方向に振動することができ、ひずみゲージが前記板形状のバネに貼着され、前記圧電素子による、前記上部ユニットの振動に伴う前記ひずみゲージからの共振時の応答電圧を測定し、前記ひずみゲージで測定された前記板形状のバネの変位を、前記上部ディスク基板の水平方向の変位とする、共振ずり測定装置。
［２］圧電素子、上部ディスク基板及び板形状のバネを有する上部ユニットと、下部ディスク基板を有する下部ユニットと、前記上部ユニットおよび前記下部ユニットを密閉した空間内に保持する密閉ユニットと、前記密閉容器内の圧力を制御する圧力制御手段と、を備え、前記上部ディスク基板の下面と前記下部ディスク基板の上面との間が試料挿入部を形成し、前記上部ディスク基板の下面と前記下部ディスク基板の上面との間の表面間距離を調整 でき、前記圧電素子及び前記上部ディスク基板は、前記上部ディスク基板の下面及び前記下部 ディスク基板の上面に対して略垂直に設置された前記板形状のバネを介して固定機材から吊り下げられて、水平方向に振動することができ、ひずみゲージが前記板形状のバネに貼着され、前記圧電素子による、前記上部ユニットの振動に伴う前記ひずみゲージからの共振時の応答電圧を測定する、共振ずり測定装置。
The present invention has the following configurations.
[1] An upper unit having a piezoelectric element, an upper disk substrate, and a plate-shaped spring, and a lower unit having a lower disk substrate, and a sample is provided between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate. An insert is formed to adjust the surface-to-surface distance between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate, and the piezoelectric element and the upper disk substrate are connected to the lower surface of the upper disk substrate and the lower disk. Suspended from a fixing device via the plate-shaped spring installed substantially perpendicular to the upper surface of the substrate, it can vibrate in the horizontal direction, and a strain gauge is attached to the plate-shaped spring, A response voltage from the strain gauge caused by the vibration of the upper unit due to the piezoelectric element is measured at the time of resonance , and the displacement of the plate-shaped spring measured by the strain gauge is measured in the horizontal direction of the upper disk substrate. Resonant shear measurement device, with displacement .
[2] an upper unit having a piezoelectric element, an upper disk substrate, and a plate-shaped spring; a lower unit having a lower disk substrate; a closed unit that holds the upper unit and the lower unit in a closed space; pressure control means for controlling the pressure in the container, wherein a sample insertion portion is formed between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate, and the lower surface of the upper disk substrate and the lower disk substrate. and the piezoelectric element and the upper disk substrate are arranged substantially perpendicular to the lower surface of the upper disk substrate and the upper surface of the lower disk substrate. and can vibrate in the horizontal direction. A strain gauge is attached to the plate-shaped spring. A resonance shear measurement device that measures the response voltage at resonance.
［３］圧電素子、上部ディスク基板及び板形状のバネを有する上部ユニットと、下部ディスク基板を有する下部ユニットと、前記上部ユニットおよび前記下部ユニットを密閉した空間内に保持する密閉ユニットと、前記密閉容器内の圧力を制御する圧力制御手段と、を備え、前記上部ディスク基板の下面と前記下部ディスク基板の上面との間が試料挿入部を形成し、前記上部ディスク基板の下面と前記下部ディスク基板の上面との間の表面間距離を調整でき、前記圧電素子及び前記上部ディスク基板は、前記上部ディスク基板の下面及び前記下部ディスク基板の上面に対して略垂直に設置された前記板形状のバネを介して固定機材から吊り下げられて、水平方向に振動することができ、ひずみゲージが前記板形状のバネに貼着され、前記圧電素子による、前記上部ユニットの振動に伴う前記ひずみゲージからの共振時の応答電圧を測定し、前記ひずみゲージで測定された前記板形状のバネの変位を、前記上部ディスク基板の水平方向の変位とする、共振ずり測定装置。 [3] An upper unit having a piezoelectric element, an upper disk substrate, and a plate-shaped spring, a lower unit having a lower disk substrate, a closed unit holding the upper unit and the lower unit in a closed space, and the closed space. pressure control means for controlling the pressure in the container, wherein a sample insertion portion is formed between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate, and the lower surface of the upper disk substrate and the lower disk substrate. and the piezoelectric element and the upper disk substrate are arranged substantially perpendicular to the lower surface of the upper disk substrate and the upper surface of the lower disk substrate. and can vibrate in the horizontal direction. A strain gauge is attached to the plate-shaped spring. A resonance shear measuring device for measuring a response voltage at resonance, and using the displacement of the plate-shaped spring measured by the strain gauge as the horizontal displacement of the upper disk substrate.
Claims (3)
前記上部ディスク基板の下面と前記下部ディスク基板の上面との間が試料挿入部を形成し、
前記上部ディスク基板の下面と前記下部ディスク基板の上面との間の表面間距離を調整でき、
前記圧電素子及び前記上部ディスク基板は、前記上部ディスク基板の下面及び前記下部ディスク基板の上面に対して略垂直に設置された前記板形状のバネを介して固定機材から吊り下げられて、水平方向に振動することができ、
ひずみゲージが前記板形状のバネに貼着され、
前記圧電素子による、前記上部ユニットの振動に伴う前記ひずみゲージからの共振時の応答電圧を測定し、
前記ひずみゲージで測定された前記板形状のバネの変位を、前記上部ディスク基板の水平方向の変位とする、共振ずり測定装置。 An upper unit having a piezoelectric element, an upper disk substrate and a plate-shaped spring, and a lower unit having a lower disk substrate,
forming a sample insertion portion between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate;
adjustable a surface-to-surface distance between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate;
The piezoelectric element and the upper disk substrate are suspended from a fixing member via the plate-shaped spring installed substantially perpendicularly to the lower surface of the upper disk substrate and the upper surface of the lower disk substrate, and are horizontally oriented. can vibrate to
A strain gauge is attached to the plate-shaped spring,
measuring a response voltage at the time of resonance from the strain gauge accompanying the vibration of the upper unit by the piezoelectric element ;
A resonance shear measuring device , wherein the displacement of the plate-shaped spring measured by the strain gauge is regarded as the horizontal displacement of the upper disk substrate .
下部ディスク基板を有する下部ユニットと、a lower unit having a lower disk substrate;
前記上部ユニットおよび前記下部ユニットを密閉した空間内に保持する密閉ユニットと、a closed unit that holds the upper unit and the lower unit in a closed space;
前記密閉容器内の圧力を制御する圧力制御手段と、を備え、and pressure control means for controlling the pressure in the closed container,
前記上部ディスク基板の下面と前記下部ディスク基板の上面との間が試料挿入部を形成し、forming a sample insertion portion between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate;
前記上部ディスク基板の下面と前記下部ディスク基板の上面との間の表面間距離を調整でき、adjustable a surface-to-surface distance between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate;
前記圧電素子及び前記上部ディスク基板は、前記上部ディスク基板の下面及び前記下部ディスク基板の上面に対して略垂直に設置された前記板形状のバネを介して固定機材から吊り下げられて、水平方向に振動することができ、The piezoelectric element and the upper disk substrate are suspended from a fixing member via the plate-shaped spring installed substantially perpendicularly to the lower surface of the upper disk substrate and the upper surface of the lower disk substrate, and are horizontally oriented. can vibrate to
ひずみゲージが前記板形状のバネに貼着され、A strain gauge is attached to the plate-shaped spring,
前記圧電素子による、前記上部ユニットの振動に伴う前記ひずみゲージからの共振時の応答電圧を測定する、共振ずり測定装置。A resonance shear measuring device for measuring a response voltage at resonance from the strain gauge caused by the vibration of the upper unit by the piezoelectric element.
下部ディスク基板を有する下部ユニットと、a lower unit having a lower disk substrate;
前記上部ユニットおよび前記下部ユニットを密閉した空間内に保持する密閉ユニットと、a closed unit that holds the upper unit and the lower unit in a closed space;
前記密閉容器内の圧力を制御する圧力制御手段と、を備え、and pressure control means for controlling the pressure in the closed container,
前記上部ディスク基板の下面と前記下部ディスク基板の上面との間が試料挿入部を形成し、forming a sample insertion portion between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate;
前記上部ディスク基板の下面と前記下部ディスク基板の上面との間の表面間距離を調整でき、adjustable a surface-to-surface distance between the lower surface of the upper disk substrate and the upper surface of the lower disk substrate;
前記圧電素子及び前記上部ディスク基板は、前記上部ディスク基板の下面及び前記下部ディスク基板の上面に対して略垂直に設置された前記板形状のバネを介して固定機材から吊り下げられて、水平方向に振動することができ、The piezoelectric element and the upper disk substrate are suspended from a fixing member via the plate-shaped spring installed substantially perpendicularly to the lower surface of the upper disk substrate and the upper surface of the lower disk substrate, and are horizontally oriented. can vibrate to
ひずみゲージが前記板形状のバネに貼着され、A strain gauge is attached to the plate-shaped spring,
前記圧電素子による、前記上部ユニットの振動に伴う前記ひずみゲージからの共振時の応答電圧を測定し、measuring a response voltage at the time of resonance from the strain gauge accompanying the vibration of the upper unit by the piezoelectric element;
前記ひずみゲージで測定された前記板形状のバネの変位を、前記上部ディスク基板の水平方向の変位とする、共振ずり測定装置。A resonance shear measuring device, wherein the displacement of the plate-shaped spring measured by the strain gauge is the horizontal displacement of the upper disk substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022071893A JP7318996B2 (en) | 2019-03-28 | 2022-04-25 | Resonance shear measurement device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021508656A JP7244958B2 (en) | 2019-03-28 | 2019-03-28 | Resonance shear measurement device |
| JP2022071893A JP7318996B2 (en) | 2019-03-28 | 2022-04-25 | Resonance shear measurement device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021508656A Division JP7244958B2 (en) | 2019-03-28 | 2019-03-28 | Resonance shear measurement device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022090116A JP2022090116A (en) | 2022-06-16 |
| JP2022090116A5 true JP2022090116A5 (en) | 2022-12-28 |
| JP7318996B2 JP7318996B2 (en) | 2023-08-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2022071893A Active JP7318996B2 (en) | 2019-03-28 | 2022-04-25 | Resonance shear measurement device |
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| JP (1) | JP7318996B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101278184B (en) | 2005-09-28 | 2012-07-04 | 独立行政法人科学技术振兴机构 | Shear measuring method and its device |
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