JP2022080897A - Lens storage component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lens storage component which further suppresses adhesion of fume to an optical component and reduces temperature rise of the optical component, and can prevent distortion, deformation and/or breakage of the optical component.

SOLUTION: A lens storage component 3 comprises a body part 31 which can accommodate a lens F used for radiation of laser L, and enables passage of laser L from a top face 31T toward a bottom face 31B via the body part 31. The lens storage component 3 further comprises a gas introduction part 32 which can introduce a first gas G1 toward a space C defined by the body part 31, the bottom face 31B, a left side face 31L and a right side face 31R. The bottom face 31B is provided with a bottom face side opening O1, and the first gas G1 can pass from the space C toward the exterior of the lens storage component 3 through the bottom face side opening O1.

SELECTED DRAWING: Figure 2

COPYRIGHT: (C)2022,JPO&INPIT

Description

The present invention relates to a lens accommodating member.

It is known that an object is laser-processed by irradiating a laser through a lens or other optical component. At that time, the residue evaporated from the object becomes fume (dust) and may adhere to the lens or other optical components. When a fume adheres to an optical component, the adhered fume absorbs the laser and may adversely affect the irradiation of the laser. Therefore, there is a demand for preventing fume from adhering to optical components.

Patent Document 1 proposes a method for preventing fume from adhering to optical components. In this method, a base substrate, a lid, an energy beam source, and an energy beam transmitting portion, in which a piezoelectric element is mounted and a joint portion is arranged so as to surround the piezoelectric element in a plan view of the piezoelectric element, are prepared. The step of arranging the lid body on the joint portion so as to accommodate the piezoelectric element between the base substrate and the lid body, and the step of arranging the lid body on the joint portion overlap with the joint portion of the lid body. The portion includes a step of irradiating the portion with an energy beam transmitted through the energy beam transmitting portion to weld the base substrate and the lid. The step of preparing the device is characterized in that the energy beam transmitting portion is a condenser lens, and the step of welding is characterized in that the lid is arranged in an atmosphere having a pressure higher than the atmospheric pressure. And. According to the method described in Patent Document 1, the mean free path, which is the scattering distance of gas molecules forming a fume or the like in an atmosphere higher than the atmospheric pressure, is shortened, and the fume is formed in an energy beam transmitting portion which is an optical component. The amount of adhesion can be reduced.

JP-A-2015-220624

However, the mean free path that can be shortened by the technique described in Patent Document 1 is the mean value of the free path, which is the distance that particles such as gas molecules can travel without being disturbed by scattering by a scattering source. Therefore, some of the particles can travel a distance beyond the mean free path. In the technique described in Patent Document 1, the mean free path of gas molecules forming fume or the like can be shortened and the amount of fume adhering to optical components can be reduced, but among the gas molecules forming fume or the like, the mean free path is achieved. Gas molecules that travel a distance beyond the stroke can reach the optics, form a fume, and attach to the optics. Therefore, in the technique described in Patent Document 1, there is room for further improvement in reducing the arrival of gas molecules forming a fume or the like on the optical component and suppressing the adhesion of the fume to the optical component.

Further, when the output of the laser is high and / or when the irradiation time of the laser is long, the temperature of the optical component may rise. As the temperature of the optics rises, the heat can cause strain, deformation, and / or breakage of the optics. Therefore, in the technique described in Patent Document 1, there is room for improvement in reducing the temperature rise of the optical component and preventing distortion, deformation, and / or breakage of the optical component.

The present invention has been made in view of such circumstances, and an object thereof is to further suppress the adhesion of fume to the optical component, reduce the temperature rise of the optical component, and distort, deform and deform the optical component. / Or to provide a lens accommodating member capable of preventing damage.

As a result of diligent studies to solve the above problems, the present inventors have a lens accommodating portion capable of accommodating a lens used for laser irradiation, and a lens accommodating portion capable of passing the laser from the top surface portion to the bottom surface portion, and a gas. The present invention has been completed by finding that the above object can be achieved by providing a gas introduction portion capable of introducing the gas and providing an opening on the bottom surface portion through which the gas can pass toward the outside. Specifically, the present invention provides the following.

The invention according to the first feature is provided with a lens accommodating portion capable of accommodating a lens used for laser irradiation, and a lens accommodating member capable of passing the laser from the top surface portion to the bottom surface portion via the lens accommodating portion. Further, a gas introduction portion capable of introducing gas toward the space defined by the lens accommodating portion, the bottom surface portion, and the side surface portion is further provided, and the bottom surface portion is provided with an opening, and the space is provided. Provided is a lens accommodating member that can pass the gas toward the outside of the lens accommodating member through the opening.

In the process of irradiating an object with a laser, the residue evaporated from the object becomes fume (dust) and may adhere to a lens or other optical component. When a fume adheres to an optical component, the adhered fume absorbs the laser and may adversely affect the irradiation of the laser.

According to the invention according to the first feature, by accommodating the lens in the lens accommodating portion, it is possible to suppress the adhesion of fume to the lens.

By the way, since the laser can pass through the lens accommodating portion from the top surface portion to the bottom surface portion and the bottom surface portion is provided with an opening, when the lens is accommodated in the lens accommodating portion, the laser is passed through the opening portion. Can irradiate the object. Then, this opening may cause the fume to invade from the outside of the lens accommodating member toward the space defined inside the lens accommodating member and cause the fume to adhere to the lens.

According to the invention according to the first feature, the gas introduced into the space defined inside becomes a flow of gas passing through the opening from the space toward the outside of the lens accommodating member. This gas flow pushes the fume, which is near the aperture outside the lens accommodating member, away from the aperture. This can prevent the presence of the aperture from causing the fume to adhere to the lens.

In addition, according to the invention according to the first feature, by suppressing the adhesion of the fume to the contained lens, the fume attached to the contained lens can absorb the laser and reduce the temperature rise of the accommodated lens. .. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

Therefore, according to the invention according to the first feature, it is possible to further suppress the adhesion of fume to the optical component, reduce the temperature rise of the optical component, and prevent the optical component from being distorted, deformed, and / or damaged. A possible lens accommodating member can be provided.

The invention according to the second feature is the invention according to the first feature, wherein the temperature of the gas introduced into the space is lower than the temperature of the space when the laser is irradiated. Provide members.

According to the invention according to the second feature, the temperature of the space when the laser is irradiated can be lowered, and as a result, the temperature rise of the housed lens adjacent to the space can be reduced. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

The invention according to the third feature is the invention according to the first or second feature, and provides a lens accommodating member in which the gas is an inert gas.

When the laser is irradiated in an atmosphere containing oxygen such as an air atmosphere, combustibles in the vicinity of the lens may be ignited due to the high temperature associated with the laser irradiation. If a combustible material near the lens ignites, the temperature of the lens can rise.

According to the invention according to the third feature, the oxygen concentration in the space is lowered by the inert gas introduced into the space, and it is possible to prevent the combustibles in the space from being ignited by the high temperature accompanying the irradiation of the laser. Therefore, it is possible to reduce the temperature rise of the contained lens due to the ignition of the combustible material. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

The invention according to the fourth feature is an invention according to any one of the first feature to the third feature, which is provided in the vicinity of the bottom surface portion and causes the gas to flow in a direction substantially orthogonal to the flow direction of the gas. Provided is a lens accommodating member further including a gas delivery unit capable of delivery.

According to the invention according to the fourth feature, in addition to the gas flow, the direction substantially orthogonal to the gas flow direction (the direction including the angle formed between the gas flow direction and the angle of 70 degrees or more and 110 degrees or less). ) Pushes the fume, which can prevent the fume from passing through the opening and entering the space and adhering to the lens.

A fume located outside the lens accommodating member at a position capable of absorbing the laser emitted through the aperture may absorb the laser and adversely affect the irradiation of the laser. When irradiating an object with a laser through an opening provided on the bottom surface, the laser and gas pass through the opening from the space side to the outside side, so that the direction of the laser passing through the opening and the gas flow. The directions can be substantially the same in the vicinity of the opening. Therefore, when the fume located near the aperture among the positions that can absorb the laser outside the lens accommodating member is pushed and moved only by the force due to the gas flow, the position after the fume moves absorbs the laser. It can be in a possible position. Therefore, there is room for further improvement in moving the fume at a position where it can absorb the laser to a position where it does not absorb the laser outside the lens accommodating member to reduce the adverse effect of the fume on the irradiation of the laser. There is.

According to the invention according to the fourth feature, the gas sent out in the direction substantially orthogonal to the flow direction of the gas passes through the fume at a position where it can absorb the laser irradiated through the opening. It can be pushed in a direction substantially orthogonal to the direction of the laser and moved to a position where it does not absorb the laser. Therefore, the adverse effect of fume on laser irradiation can be further reduced.

Therefore, according to the invention according to the fourth feature, it is possible to further suppress the adhesion of fume to the optical component, reduce the temperature rise of the optical component, and prevent the optical component from being distorted, deformed, and / or damaged. A possible lens accommodating member can be provided.

The invention according to the fifth feature is an invention according to any one of the first feature to the fourth feature, and provides a lens accommodating member to which a laser irradiation device can be attached at the top surface portion.

When the focal length of the lens and the distance from the lens to the object match, the effect of heating by laser irradiation is maximized. Further, when the focal length of the lens and the distance from the lens to the irradiation target do not match, the effect of heating by laser irradiation becomes small. Therefore, if the distance to the object and / or the shape of the object is different, the focal length of the lens suitable for laser irradiation may also be different. Therefore, there is a demand to replace the lens according to the distance to the object and / or the shape of the object. When the lens and the means for suppressing the adhesion of the fume to the optical component and reducing the temperature rise of the optical component are integrally configured, the labor for replacing the lens and the like can be increased. Therefore, in order to reduce the labor for replacing the lens, there is a demand for retrofitting the lens with a means for suppressing the adhesion of fume to the optical component and reducing the temperature rise of the optical component. The technique described in Patent Document 1 includes a condenser lens which is an optical component and an energy beam transmitting portion, and is an existing optical means for suppressing adhesion of fume to the optical component and reducing the temperature rise of the optical component. There is still room for improvement in retrofitting parts.

According to the invention according to the fifth feature, the laser irradiation device can be attached to the lens accommodating member. The laser irradiation device attached to the top surface portion is attached to the side of the top surface portion facing the bottom surface portion provided with the opening. Thereby, the laser irradiation device can be attached so as not to obstruct the laser passing through the opening from the top surface portion to the bottom surface portion and / or the gas passing through the opening toward the outside of the lens accommodating member from the space. Therefore, the lens accommodating member can be retrofitted to the laser irradiator without interfering with the laser and / or gas passing through the aperture.

The invention according to the sixth feature is the invention according to any one of the first to fifth features, wherein the bottom surface portion has a structure capable of dispersing the reflected laser reflected by the irradiation target of the laser. A lens accommodating member is provided.

When the reflected reflected laser reflected in the irradiation target of the laser heads toward the lens accommodating member, the temperature of the lens accommodating member may rise due to the reflected laser. The lens accommodating member whose temperature has risen can heat the accommodating lens by radiant heat and / or heat conduction from the lens accommodating member, and can raise the temperature of the accommodating lens.

According to the invention according to the sixth feature, the reflected laser is dispersed by the bottom surface portion, and the temperature rise of the lens accommodating member due to the reflected laser can be reduced. Thereby, the temperature rise of the housed lens can be reduced. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

According to the present invention, there is provided a lens accommodating member capable of further suppressing the adhesion of fume to an optical component, reducing the temperature rise of the optical component, and preventing distortion, deformation, and / or breakage of the optical component. can.

FIG. 1 is a schematic front view of the laser irradiation device 1 according to the embodiment of the present invention. FIG. 2 is an enlarged schematic view of the lens accommodating member 3 in the laser irradiation device 1, and is a schematic front view of the lens accommodating member 3. FIG. 3 is a schematic plan view of the lens accommodating member 3. FIG. 4 is a schematic cross-sectional view taken along the line AA of the lens accommodating member 3 in FIG. FIG. 5 is a schematic bottom view of the lens accommodating member 3. FIG. 6 is a schematic bottom view of the lens accommodating member 3 according to another example different from FIG. FIG. 7 is a schematic left side view of the lens accommodating member 3. FIG. 8 is an enlarged schematic view of the nozzle 4 in the laser irradiation device 1. FIG. 9 is a schematic partial cross-sectional view taken along the line BB of the nozzle 4 in FIG. FIG. 10 is a diagram showing an example of the structure 42. FIG. 11 is a diagram showing an example of the positional relationship between the lens accommodating member 3 and the nozzle 4 when irradiating a laser. FIG. 12 is a schematic front view showing an example of the mobile laser irradiation system S according to the present embodiment. FIG. 13 is a schematic front view showing an example of the portable laser irradiation system P according to the present embodiment. FIG. 14 is a schematic view showing an example of how to use the laser irradiation device 1. FIG. 15 is an enlarged view of the periphery of the laser L in FIG.

Hereinafter, an example of a suitable embodiment for carrying out the present invention will be described with reference to the drawings. It should be noted that this is only an example, and the technical scope of the present invention is not limited to this.

<< Laser Irradiation Device 1 >>
FIG. 1 is a schematic front view of the laser irradiation device 1 according to the embodiment of the present invention. The laser irradiation device 1 includes a laser irradiation member 2 capable of irradiating a laser toward an irradiation target, and a lens accommodating member capable of accommodating a lens and allowing a laser irradiated from the laser irradiation member 2 to pass through the lens. 3 and a nozzle 4 capable of sucking fume (dust) which is a residue evaporated from a laser irradiation target are included.

The weight of the laser irradiation device 1 is not particularly limited. The lower limit of the weight of the laser irradiation device 1 is preferably 1 kg or more, more preferably 1.5 kg or more, and further preferably 2 kg or more. By setting the lower limit of the weight of the laser irradiation device 1 as described above, the stability of the laser irradiation device 1 when irradiating the laser can be enhanced.

The upper limit of the weight of the laser irradiation device 1 is preferably 10 kg or less, more preferably 8 kg or less, and further preferably 6 kg or less. By setting the upper limit of the weight of the laser irradiation device 1 as described above, it becomes easy to hold the laser irradiation device 1 by hand.

<Laser irradiation member 2>
The laser irradiation member 2 is not particularly limited as long as it is a device capable of irradiating the irradiation target with a laser via a lens. In the present embodiment, the laser irradiation member 2 is used to operate the holding unit 21 in which the user can hold the laser irradiation member 2, the operation unit 22 in which the user can perform operations related to laser irradiation, and the operation unit 22. Accordingly, a transmission unit 23 capable of transmitting a laser from an external laser supply unit and an irradiation unit 24 capable of irradiating the laser transmitted from the transmission unit 23 toward an irradiation target are provided. Although not an essential aspect, it is preferable that the laser irradiation member 2 includes a lens exchange operation unit 25 capable of providing an operation means for exchanging a lens used for laser irradiation. Since the laser irradiation member 2 includes the lens exchange operation unit 25, the user of the laser irradiation member 2 can exchange the lens used for laser irradiation via the operation means provided by the lens exchange operation unit 25.

[Holding unit 21]
Although not an essential aspect, it is preferable that the laser irradiation member 2 includes a holding portion 21 that provides the user with a means for holding the laser irradiation member 2. By providing the holding portion 21 in which the laser irradiation member 2 provides a means for holding the laser irradiation member 2 to the user, the user holds and moves the laser irradiation member 2 through the holding portion 21 to be irradiated. Can be irradiated with a laser. Thereby, for example, the user holding the laser irradiation member 2 can move the laser irradiation member 2 so that the irradiation point of the laser is on the irradiation target, and can irradiate the irradiation target with the laser.

[Operation unit 22]
Although not an essential aspect, it is preferable that the laser irradiation member 2 includes an operation unit 22 capable of providing an operation means related to laser irradiation. Since the laser irradiation member 2 includes an operation unit 22 capable of providing an operation means related to laser irradiation, the user of the laser irradiation member 2 performs an operation related to laser irradiation via the operation means provided by the operation unit 22. obtain.

The operating means related to laser irradiation is not particularly limited, and examples thereof include conventional switches exemplified by changeover switches, toggle switches, slide switches, rotary switches, lever switches, keyed switches, foot switches, electronic switches and the like. The operating means to be used and / or the operating means using a touch panel may be used. When the operating means has an operating means using switches, the number of switches is not particularly limited and may include any number of switches of 1 or more.

The operation provided by the operation unit 22 is not particularly limited as long as it is an operation related to laser irradiation, for example, an operation for switching between an irradiation state in which the laser is irradiated and a non-irradiation state in which the laser is not irradiated, and laser irradiation. Examples include an operation of changing the amount, an operation of exchanging a lens used for laser irradiation, an operation of stopping laser irradiation, and / or an operation related to a laser irradiation position. The operation related to the irradiation position of the laser is not particularly limited. When the laser irradiation point is configured to be able to move linearly on the focal plane, the operation regarding the laser irradiation position is a path (also referred to as an irradiation pattern) in which the laser irradiation point moves on the focal plane. May include an operation to change.

When the operating means has an operating means using a touch panel, information on whether or not the laser is irradiated, the amount of laser irradiation, the laser irradiation pattern, the elapsed time from the start of laser irradiation, and the laser irradiation. The voltage supplied to the device 1, the power consumed by the laser irradiation device 1, the temperature related to the laser irradiation device 1, information on the abnormality / failure of the laser irradiation device 1, the amount / intensity of the reflected laser, and the lens used for laser irradiation. It is preferable that the information regarding the laser irradiation exemplified by the above can be displayed on the touch panel. Since the information on the laser irradiation can be displayed on the touch panel, the user of the laser irradiation member 2 can grasp the information on the laser irradiation.

The irradiation unit 24 includes an irradiation position indicating unit (described later) that indicates the irradiation position of the laser, and the operation provided by the operation unit 22 switches between an irradiation state in which the laser is irradiated and a non-irradiation state in which the laser is not irradiated. In the case of including, the operation means for the operation of switching between the irradiation state of irradiating the laser and the non-irradiation state of not irradiating the laser provided by the operation unit 22 is changed from the irradiated state to the irradiation position indicating state indicating the irradiation position. It is preferable to include a first switching operation for switching and a second switching operation for switching from the irradiation position indicating state to the irradiation state. By including the first and second switching operations, the user of the laser irradiation device 1 performs the second switching operation with the laser irradiation position pointed to by the first switching operation to irradiate the laser. Can be started. Therefore, the user can more reliably irradiate the irradiation target with the laser by using the irradiation position of the laser indicated by the irradiation position indicating unit.

[Transmission unit 23]
The transmission unit 23 is not particularly limited as long as it is configured to be capable of transmitting a laser from a laser supply unit configured separately from the laser irradiation member 2, and is, for example, a transmission unit 23 including an optical fiber capable of transmitting a laser. good.

Although not an essential aspect, it is preferable that the transmission unit 23 is configured to be able to supply a coolant capable of cooling the irradiation unit 24. Since the transmission unit 23 is configured to be able to supply a coolant capable of cooling the irradiation unit 24, the temperature rise of the irradiation unit 24 can be reduced. As a result, it is possible to reduce the temperature rise of the lens arranged in the vicinity of the irradiation unit 24 and prevent distortion, deformation and / or breakage of the lens due to heat. Further, when the irradiation unit 24 includes a mirror, the transmission unit 23 is configured to be able to supply a coolant capable of cooling the irradiation unit 24, thereby reducing the temperature rise of the mirror and deteriorating the performance of the mirror due to heat. Deformation and / or damage can be prevented. The cooling material is not particularly limited, and is, for example, a gas having a temperature lower than the temperature of the irradiation unit 24 when irradiating the laser (for example, air having a temperature lower than normal temperature or normal temperature, or dry air having a temperature lower than normal temperature or normal temperature). And / or a liquid (for example, water having a temperature lower than normal temperature or normal temperature, or purified water having a temperature lower than normal temperature or normal temperature) may be used. The means for enabling the supply of the coolant is not particularly limited, and may be means for enabling the supply of the conventional coolant exemplified by the pipes, hoses and pipes.

Although not an essential aspect, it is preferable that the transmission unit 23 is configured to be able to supply electric power to the irradiation unit 24. Since the transmission unit 23 is configured to be able to supply electric power to the irradiation unit 24, for example, when the irradiation unit 24 includes a mirror configured to be rotatable, electric power can be supplied to a motor or the like that rotates the mirror. .. The means by which the transmission unit 23 supplies electric power to the irradiation unit 24 is not particularly limited, and may be, for example, means for supplying electric power by an electric wire that transmits electric power supplied from the power source.

Although not an essential aspect, it is preferable that the transmission unit 23 is configured to be able to supply the first gas G1 to the gas introduction unit 32 (see FIG. 2) described later. The fact that the transmission unit 23 is configured to be able to supply the first gas G1 to the gas introduction unit 32 will be described in more detail later in the description of the gas introduction unit 32.

Although not an essential aspect, it is preferable that the transmission unit 23 is configured to be able to supply the second gas G2 to the gas delivery unit 33 (see FIG. 2) described later. The fact that the transmission unit 23 is configured to be able to supply the second gas G2 to the gas delivery unit 33 will be described in more detail later in the description of the gas transmission unit 33.

The total length of the transmission unit 23 is not particularly limited, but is preferably 100 meters or less, more preferably 80 meters or less, and further preferably 60 meters or less. By setting the upper limit of the total length of the transmission unit 23 as described above, it is possible to prevent the attenuation of the laser transmitted via the transmission unit 23.

[Irradiation unit 24]
The irradiation unit 24 is not particularly limited as long as it can irradiate the laser through the lens, and may be a member that irradiates various lasers of the prior art.

The irradiation unit 24 preferably includes a member configured to be capable of irradiating a laser transmitted from a laser supply unit configured separately from the laser irradiation member 2. Since the irradiation unit 24 is a member configured to be able to irradiate the laser transmitted from the laser supply unit configured separately from the laser irradiation member 2, the laser irradiation member does not include a laser oscillator or the like that supplies the laser. 2 can be configured. As a result, even if the size and / or weight of the laser irradiation member 2 is limited, for example, when the laser irradiation member 2 is configured to be held and used by the user, the size of the laser irradiation member 2 is relatively large. The laser irradiation member 2 can be configured so that it can irradiate a high-power laser that requires a laser oscillator or the like.

[mirror]
When the lens accommodated in the lens accommodating member 3 is an fθ lens, the irradiation unit 24 includes a mirror (not shown) configured to be rotatable by a galvano mirror, a polygon mirror, or the like, and the mirror and the mirror. It is preferable that the irradiation point of the laser is configured to be able to move linearly on the focal plane by cooperating with the lens which is an fθ lens. This makes it possible to irradiate the irradiation target arranged on the focal plane with a laser that moves linearly. Therefore, it is possible to irradiate the irradiation target with a laser that moves linearly without moving the laser irradiation member 2, the lens, and / or the irradiation target.

When the irradiation unit 24 includes a mirror, the irradiation unit 24 can select a path (also referred to as an irradiation pattern) in which the irradiation point of the laser moves on the focal plane from an irradiation pattern group including two or more irradiation patterns. Is preferable. Since the irradiation unit 24 can select the irradiation pattern of the laser from the irradiation pattern group, it is possible to select an irradiation pattern according to the laser irradiation process applied to the irradiation target and / or the irradiation target and irradiate the irradiation target with the laser.

The irradiation pattern included in the irradiation pattern group is not particularly limited. The irradiation pattern group includes, for example, a substantially straight line irradiation pattern, an irradiation pattern including a combination of two or more straight lines (for example, a substantially square irradiation pattern), a substantially circular irradiation pattern, a substantially elliptical irradiation pattern, and an irradiation including a curved line. It may include two or more of the irradiation patterns exemplified by the pattern (for example, the irradiation pattern of the waveform) and the irradiation pattern in which the irradiation point of the laser does not move. The irradiation pattern group may include an irradiation pattern that fills the inside of the above-mentioned irradiation pattern in addition to the above-mentioned irradiation pattern. The irradiation pattern group may include two or more irradiation patterns different in the size of the irradiation pattern, the aspect ratio of the irradiation pattern, the thickness of the irradiation pattern, the speed at which the irradiation point of the laser moves on the focal plane, and the like. When the irradiation pattern group includes the above-mentioned irradiation pattern, the irradiation target can be irradiated with the laser by using the irradiation pattern corresponding to the laser irradiation processing applied to the irradiation target and / or the irradiation target.

[Irradiation position indicator]
Although not an essential aspect, it is preferable that the irradiation unit 24 includes an irradiation position indicating unit (not shown) indicating the irradiation position of the laser. By including the irradiation position indicating unit indicating the irradiation position of the laser, the irradiation unit 24 can easily irradiate the irradiation target with the laser. The irradiation position indicating unit is not particularly limited as long as it is an indicating unit that indicates the irradiation position of the laser, and may be, for example, a laser pointer that indicates the irradiation position of the laser with another laser.

[Irradiation target]
The irradiation target to which the laser is irradiated is not particularly limited. The irradiation target is not particularly limited, and examples thereof include an object exemplified by a mold, an apparatus, a vehicle, a building, a rail, and the like, a weld line on the surface of the object, and deposits adhering to the surface of the object. The material to be irradiated is not particularly limited, and may be a metal exemplified by, for example, iron, iron alloy, copper, copper alloy, aluminum, aluminum alloy, nickel, nickel alloy, etc., and may be concrete, gypsum, and wood. It may be a non-metal exemplified by the above, an oxide such as a metal, an organic substance, or may contain a plurality of materials. The deposits are not particularly limited, and include, for example, impurities, painted surfaces, organisms exemplified by lichens / bacteria, contaminants exemplified by lipids / toxic substances / radioactive substances, coating layers, oxide layers and the like. Can be mentioned. The deposit is preferably a deposit having a relatively high laser absorption rate. Since the deposit is a deposit having a relatively high absorption rate of the laser, the deposit can be efficiently heated by irradiation with the laser and evaporated and / or peeled from the surface of the material.

[Lens exchange operation unit 25]
Although not an essential aspect, it is preferable that the laser irradiation member 2 includes a lens exchange operation unit 25 that provides an operation means for the operation of exchanging the lens used for laser irradiation. Since the laser irradiation member 2 includes the lens exchange operation unit 25, the user who uses the laser irradiation device 1 does not have to perform the troublesome procedure of removing the lens and attaching another lens, and the lens is used for laser irradiation. Can be exchanged. Further, since the user can avoid touching the periphery of the lens while exchanging the lens, it is possible to prevent the irradiated laser from damaging the user's hand. It is preferable that the lens exchange operation unit 25 has a display means capable of displaying information about the lens used for laser irradiation. Since the lens exchange operation unit 25 has a display means capable of displaying information about the lens used for irradiating the laser, the user can confirm the information about the lens used for irradiating the laser and irradiate the laser.

<Lens accommodating member 3>
FIG. 2 is an enlarged schematic view of the lens accommodating member 3 in the laser irradiation device 1, and is a schematic front view of the lens accommodating member 3. 3 is a schematic plan view of the lens accommodating member 3, FIG. 4 is a schematic cross-sectional view taken along the line AA of the lens accommodating member 3 in FIG. 3, and FIG. 5 is a schematic bottom view of the lens accommodating member 3. , FIG. 7 is a schematic left side view of the lens accommodating member 3. Further, FIG. 6 is a schematic bottom view of the lens accommodating member 3 according to another example different from FIG. Hereinafter, the lens accommodating member 3 in the present embodiment will be described with reference to FIGS. 2 to 7.

First, refer to FIG. In the present embodiment, the lens accommodating member 3 includes a main body portion 31 capable of accommodating a lens, a gas introduction portion 32 capable of introducing a first gas G1 into the main body portion 31, and a flow direction FD1 of the first gas G1. It is configured to include a gas delivery unit 33 capable of delivering a second gas G2 in a direction FD2 substantially orthogonal to each other. The lens accommodating member 3 is configured to allow the laser to pass from the top surface 31T of the main body 31 toward the bottom surface 31B.

[Main body 31]
Subsequently, reference is made to FIGS. 2 and 3. As shown in FIGS. 2 and 3, the main body portion 31 is provided on the side close to the top surface 31T, and is provided on the side close to the top surface side main body portion 311 having a hollow substantially truncated cone shape and the bottom surface 31B. It has a substantially cup-shaped bottom surface side main body portion 312 having a left side surface 31L, a right side surface 31R, and a bottom surface 31B.

The main body 31 is configured to accommodate a lens used for irradiating a laser and to pass a laser irradiated from the top surface 31T of the lens accommodating member 3 toward the bottom surface 31B, and the bottom surface 31B has a bottom surface side opening O1. (See FIG. 3) is not particularly limited as long as it is provided.

By accommodating the lens in the main body 31, the fume that evaporates from the irradiation target and moves to the vicinity of the lens accommodating member 3 can pass near the bottom surface 31B and adhere to the bottom surface 31B before reaching the vicinity of the lens. As a result, it is possible to prevent the fume from adhering to the lens. Preventing the fume from entering the inside of the lens accommodating member 3 from the bottom surface side opening O1 will be described in more detail later with reference to FIG.

The material of the main body 31 is not particularly limited, and the metal exemplified by iron, iron alloy, copper, copper alloy, aluminum, aluminum alloy, nickel, nickel alloy and the like, the resin exemplified by polyimide resin and the like, and / Alternatively, various materials including ceramics and the like may be used. The material of the main body 31 is preferably metal. Since the material of the main body 31 contains metal, it is possible to prevent the main body 31 from being damaged and / or ignited when the main body 31 is heated to a high temperature by irradiating the laser. Among the metals, the material of the main body 31 is particularly preferably containing a metal having corrosion resistance exemplified by stainless steel, copper and the like. Since the material of the main body 31 contains a metal having corrosion resistance, it is possible to prevent oxidation of the main body 31 and corrosion due to oxidation when the main body 31 is heated to a high temperature by irradiating the laser.

[lens]
Here, the lens housed in the main body 31 will be described. The lens is attached to a hollow top surface side main body portion 311 having a substantially truncated cone shape. The lens is not particularly limited as long as it is a lens that is used for laser irradiation and can be accommodated in the top surface side main body portion 311 and may be various conventional lenses exemplified by a condenser lens, an fθ lens, or the like. Above all, the lens is preferably an fθ lens capable of converting the constant velocity rotational motion of a mirror such as a galvano mirror into a constant velocity linear motion of an irradiation point moving on a focal plane by using the distortion effect of the lens. Since the lens is an fθ lens, it is possible to irradiate an irradiation target arranged on the focal plane with a laser that moves linearly. Thereby, the laser that moves linearly can be irradiated to the irradiation target without moving the laser irradiation member 2, the lens, and / or the irradiation target.

Although it is not an essential aspect, when there are a plurality of lenses that can be accommodated in the apex side main body 311 depending on the focal length of the lens, the lens is a lens mount that attaches and detaches the lens to the apex side main body 311. It is preferable to provide.

When the focal length of the lens and the distance from the lens to the irradiation target match, the effect of heating by laser irradiation is maximized. Further, when the focal length of the lens and the distance from the lens to the irradiation target do not match, the effect of heating by laser irradiation becomes small. Therefore, if the distance to the irradiation target and / or the shape of the irradiation target is different, the focal length of the lens suitable for laser irradiation may also be different. Therefore, there is a demand to replace the lens according to the distance to the irradiation target and / or the shape of the irradiation target. By providing the lens with a lens mount, it is possible to reduce the labor and the like for exchanging a plurality of types of lenses having different focal lengths.

The focal length of the lens is not particularly limited. The lower limit of the focal length of the lens is preferably 0.1 m or more, more preferably 0.15 m or more, and further preferably 0.2 m or more. By setting the lower limit of the focal length of the lens as described above, when the user of the laser irradiation device 1 touches the vicinity of the lens, the focal length of the lens and the distance from the lens to the user's hand match. Can be avoided. This can prevent the laser emitted through the lens from causing great damage to the user's hand. In addition, it is possible to prevent the laser from giving excessive energy to the irradiation target. This makes it possible to prevent, for example, the surface to be irradiated from melting due to excessive energy.

The upper limit of the focal length of the lens is preferably 3 meters or less, more preferably 2 meters or less, and even more preferably 1 meter or less. By setting the upper limit of the focal length of the lens as described above, it is possible to prevent the laser from being attenuated by the gas between the lens and the irradiation target. In addition, the energy given to the irradiation target by the laser can be increased.

When the laser irradiation member 2 includes the lens interchangeable operation unit 25, it is preferable that the lens is configured so that the lens can be exchanged according to the operation provided by the lens interchangeable operation unit 25. Since the lens is configured to be interchangeable according to the operation provided by the lens interchangeable operation unit 25, the user using the laser irradiation device 1 can use the lens by the operation provided by the lens interchangeable operation unit 25. The focal length of the lens can be changed by exchanging. The means for exchanging the lens according to the operation provided by the lens exchange operation unit 25 is not particularly limited, and for example, a lens exchange member (not shown) capable of exchanging the lens used for laser irradiation by the laser irradiation device 1. ), And the lens exchange member may be a means for exchanging the lens used for laser irradiation when the switch corresponding to the lens exchange operation of the operation unit 22 is operated.

When the operation provided by the operation unit 22 includes an operation of changing the irradiation direction of the laser, it is preferable that the lens is configured so that the irradiation direction of the laser can be changed according to the operation provided by the operation unit 22. Since the lens is configured so that the irradiation direction of the laser can be changed according to the operation provided by the operation unit 22, the user using the laser irradiation device 1 can perform the operation provided by the operation unit 22 to obtain the laser. The irradiation direction can be changed. The means for changing the irradiation direction of the laser is not particularly limited, and for example, a means for rotating the lens by a rotating member that can rotate the direction of the lens may be used.

[Bottom side opening O1]
FIG. 4 is a schematic cross-sectional view taken along the line AA of the lens accommodating member 3 in FIG. 3, and FIG. 5 is a schematic bottom view of the lens accommodating member 3. The bottom surface 31B is provided with a bottom surface side opening O1 configured to allow passage of a laser radiated from the top surface 31T toward the bottom surface 31B and a first gas G1.

FIG. 6 is a schematic bottom view of the lens accommodating member 3 according to another example different from FIG. The bottom side opening O1 may be an opening in which two or more elongated openings are combined. For example, it may be a cross-shaped opening in which two elongated openings are combined so as to be substantially orthogonal to each other. Since the bottom side opening O1 is an opening that combines two or more elongated shapes, the laser has a bottom side opening when the laser irradiated through the lens has an irradiation range that combines two or more elongated shapes. It can pass through O1.

A preferred embodiment of the bottom surface side opening O1 will be described after the gas introduction unit 32 has been described.

[Reflected laser dispersion structure D]
Although not an essential aspect, as shown in FIG. 6, it is preferable that the bottom surface 31B is formed with a reflected laser dispersion structure D capable of dispersing the reflected laser reflected by the laser irradiation target.

When the reflected reflected laser reflected by the laser irradiation target heads toward the lens accommodating member 3, the temperature of the lens accommodating member 3 may rise due to the reflected laser. The lens accommodating member 3 whose temperature has risen can heat the accommodating lens by radiant heat and / or heat conduction from the lens accommodating member 3 to raise the temperature of the accommodating lens.

Since the reflected laser dispersion structure D is formed on the bottom surface 31B, the reflection laser is dispersed by the reflection laser dispersion structure D, and the temperature rise of the lens accommodating member 3 due to the reflection laser can be reduced. Thereby, the temperature rise of the housed lens can be reduced. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

The reflected laser dispersion structure D is not particularly limited as long as it is a structure capable of dispersing the reflected laser reflected in the irradiation target of the laser, and may be, for example, a structure including one or more grooves capable of dispersing the reflected laser. When the reflected laser dispersion structure D is a structure including one or more grooves capable of dispersing the reflected laser, it is preferable to include grooves in a direction substantially orthogonal to the irradiation direction of the laser.

The reflected laser reflected in a direction substantially opposite to the laser reaches the bottom surface 31B and can raise the temperature of the lens accommodating member 3. The groove in the direction substantially orthogonal to the irradiation direction of the laser is the groove in the direction substantially orthogonal to the reflected laser reflected in the direction substantially opposite to the laser. Therefore, the reflected laser dispersion structure D includes a groove in a direction substantially orthogonal to the irradiation direction of the laser, so that the reflected laser dispersion structure D more efficiently disperses the reflected laser reflected in the direction substantially opposite to the laser. obtain.

[Gas introduction unit 32]
Return to FIG. The gas introduction portion 32 introduces the first gas G1 from one side surface of the bottom surface side main body portion 312 (in FIG. 4, the left side surface 31L, but may be the right side surface 31R) to the inside of the bottom surface side main body portion 312. It is a member that can be configured. The gas introduction unit 32 is not particularly limited as long as it is configured so that the first gas G1 can be introduced inside, and includes a member capable of introducing the first gas G1 of the prior art exemplified by a pipe, a tube or the like. It is composed.

It is preferable that the gas introduction unit 32 is configured so that the first gas G1 supplied from the transmission unit 23 can be introduced into the lens accommodating member 3. As a result, the lens accommodating member 3 can be configured without attaching a member for storing and supplying the first gas G1. Therefore, the structure of the lens accommodating member 3 can be simplified.

The pressure of the first gas G1 supplied to the gas introduction unit 32 is not particularly limited. The lower limit of the pressure of the first gas G1 supplied to the gas introduction unit 32 is preferably atmospheric pressure or higher, more preferably 0.3 MPa or higher, and even more preferably 0.4 MPa or higher. By defining the lower limit of the pressure of the first gas G1 supplied to the gas introduction unit 32 as described above, the flow of the first gas G1 passing through the bottom surface side opening O1 from the space C toward the outside of the lens accommodating member 3 flows. It is possible to strengthen the force for pushing the gas near the bottom surface side opening O1 outside the lens accommodating member 3 and further prevent the gas from adhering to the lens.

The upper limit of the pressure of the first gas G1 supplied to the gas introduction unit 32 is preferably 2 MPa or less, more preferably 1 MPa or less, still more preferably 0.8 MPa or less. By setting the upper limit of the pressure of the first gas G1 supplied to the gas introduction unit 32 as described above, it is possible to prevent the lens accommodating member 3 and the like from being deformed by the pressure of the first gas G1.

[First gas G1]
The first gas G1 is not particularly limited and may be various gases exemplified by air and an inert gas, but among them, an inert gas having a low content of a highly reactive gas (for example, oxygen). Is preferable. The inert gas used as the first gas G1 is not particularly limited, and may be, for example, an inert gas containing one or more of nitrogen, carbon dioxide, argon, neon, and / or helium.

When the laser is irradiated in an atmosphere containing oxygen such as an air atmosphere, combustibles in the vicinity of the lens may be ignited due to the high temperature associated with the laser irradiation. If a combustible material near the lens ignites, the temperature of the lens can rise.

Since the first gas G1 is an inert gas, the oxygen concentration inside is lowered by the inert gas introduced inside, and it is possible to prevent the combustibles inside from being ignited by the high temperature accompanying the irradiation of the laser. Therefore, it is possible to reduce the temperature rise of the contained lens due to the ignition of the combustible material. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

Although not an essential aspect, it is preferable that the temperature of the first gas G1 is lower than the internal temperature when the laser is irradiated. As a result, the internal temperature when the laser is irradiated can be lowered, and as a result, the temperature rise of the lens can be reduced. By reducing the temperature rise of the lens housed in the lens housing member 3, distortion, deformation and / or breakage of the lens due to heat can be prevented.

[Preferable embodiment of bottom side opening O1]
Here, a preferred embodiment of the bottom surface side opening O1 in the main body 31 will be described in detail with reference to FIGS. 3 to 5.

In the process of irradiating the irradiation target with a laser, the residue evaporated from the irradiation target becomes fume (dust) and may adhere to the lens or other optical components. When a fume adheres to an optical component, the adhered fume absorbs the laser and may adversely affect the irradiation of the laser.

As shown in FIG. 4, inside the bottom surface side main body portion 312, a space C is provided by the lens housed in the top surface side main body portion 311 and the bottom surface 31B, the left side surface portion 31L, and the right side surface portion 31R of the lens accommodating member 3. Delimited.

Since the laser can pass from the top surface 31T toward the bottom surface 31B and the bottom surface 31B is provided with the bottom surface side opening O1, when the lens is housed in the top surface side main body 311, the bottom surface side opening O1 is used. The laser can be applied to the object. Then, the bottom side opening O1 may cause the fume to invade from the outside of the lens accommodating member 3 toward the space C and cause the fume to adhere to the lens.

The first gas G1 introduced into the space C by the gas introduction unit 32 becomes a flow of the first gas G1 passing through the bottom surface side opening O1 from the space C toward the outside of the lens accommodating member 3. Due to the flow of the first gas G1, the fume in the vicinity of the bottom surface side opening O1 outside the lens accommodating member 3 is pushed away from the bottom surface side opening O1. This makes it possible to prevent the presence of the bottom surface side opening O1 from causing the fume to adhere to the lens.

In addition, by suppressing the adhesion of the fume to the contained lens due to the flow of the first gas G1 passing through the main body 31 and the bottom opening O1, the fume attached to the contained lens absorbs the laser and accommodates the lens. It is possible to reduce the temperature rise of the lens. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

As shown in FIG. 5, the bottom surface side opening O1 is not particularly limited as long as it can pass through the laser and the first gas G1 irradiated from the top surface 31T of the lens accommodating member 3 toward the bottom surface 31B, and is, for example, the bottom surface. An elongated opening may be used when viewed from the direction of the laser passing through the side opening O1. Since the bottom surface side opening O1 is an elongated opening when viewed from the direction of the laser passing through the bottom surface side opening O1, the first gas G1 passes through the bottom surface side opening O1 from the space C. The cross-sectional area of the flow path through which the gas flows becomes smaller. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the first gas G1 can be increased. Further, since the bottom surface side opening O1 is an elongated opening, the laser can pass through the bottom surface side opening O1 when the laser irradiated through the lens has an elongated shape irradiation range.

When the shape of the bottom surface side opening O1 when viewed from the direction of the laser passing through the bottom surface side opening O1 is an elongated opening, the longitudinal direction of the bottom surface side opening O1 when viewed from the direction of the laser passing through the bottom surface side opening O1. The length of the laser is preferably 4 times or more, more preferably 6 times or more, and further preferably 9 times or more with respect to the length in the lateral direction. By defining the length in the longitudinal direction of the bottom opening O1 when viewed from the direction of the laser passing through the bottom opening O1 as described above with respect to the length in the lateral direction, the first gas G1 becomes the bottom opening O1. When passing through, the cross-sectional area of the flow path through which the first gas G1 flows becomes small. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the first gas G1 can be increased. Therefore, the first gas G1 can push the fume more efficiently.

When the shape of the bottom surface side opening O1 when viewed from the direction of the laser passing through the bottom surface side opening O1 is an elongated opening, the longitudinal direction of the bottom surface side opening O1 when viewed from the direction of the laser passing through the bottom surface side opening O1. The length of the laser is preferably 50 times or less, more preferably 30 times or less, and further preferably 20 times or less with respect to the length in the lateral direction. By defining the length in the longitudinal direction of the bottom opening O1 when viewed from the direction of the laser passing through the bottom opening O1 as described above with respect to the length in the lateral direction, the first gas G1 becomes the bottom opening O1. It is possible to reduce the friction between the first gas G1 and the main body 31 when passing through, and to increase the speed of the flow of the first gas G1.

[The main body 31 can be attached to the laser irradiation member 2]
Further, it will be described that the main body portion 31 can be attached to the laser irradiation member 2.

When the focal length of the lens and the distance from the lens to the irradiation target match, the effect of heating by laser irradiation is maximized. Further, when the focal length of the lens and the distance from the lens to the irradiation target do not match, the effect of heating by laser irradiation becomes small. Therefore, if the distance to the irradiation target and / or the shape of the irradiation target is different, the focal length of the lens suitable for laser irradiation may also be different. Therefore, there is a demand to replace the lens according to the distance to the irradiation target and / or the shape of the irradiation target. When the lens and the means for suppressing the adhesion of the fume to the optical component and reducing the temperature rise of the optical component are integrally configured, the labor for replacing the lens and the like can be increased. Therefore, in order to reduce the labor for replacing the lens, there is a demand for retrofitting the lens with a means for suppressing the adhesion of fume to the optical component and reducing the temperature rise of the optical component. The technique described in Patent Document 1 includes a condenser lens which is an optical component and an energy beam transmitting portion, and is an existing optical means for suppressing adhesion of fume to the optical component and reducing the temperature rise of the optical component. There is still room for improvement in retrofitting parts.

In the present embodiment, the top surface 31T of the top surface side main body portion 311 can be attached to the laser irradiation member 2. As a result, the lens accommodating member 3 can be attached to the laser irradiation member 2 so as not to interfere with the laser passing through the bottom surface side opening O1 and the first gas G1. Therefore, the lens accommodating member 3 can be retrofitted to the laser irradiation member 2 without interfering with the laser and / or the first gas G1 passing through the bottom surface side opening O1.

Return to FIG. FIG. 3 is a schematic plan view of the lens accommodating member 3. The top surface side main body portion 311 is not particularly limited as long as it can be attached to the laser irradiation member 2, and for example, the top surface side opening O2 is provided, and the attachment is configured so that the laser irradiation member 2 can be attached via a lens. A mounting portion configured so that the laser irradiating member 2 can be mounted by arranging with the laser irradiating member 2, and a mounting portion configured so that the laser irradiating member 2 can be mounted by screwing with the laser irradiating member 2. And / or an attachment portion or the like configured so that the laser irradiation member 2 can be attached using a screw. When the main body portion 31 has the top surface side opening O2 and the laser irradiation member 2 can be attached via the lens, the diameter of the top surface side opening O2 is preferably smaller than the inner diameter of the main body portion 31. Since the diameter of the top surface side opening O2 is smaller than the inner diameter of the main body portion 31, it is possible to prevent the lens from passing through the top surface side opening O2 and the main body portion 31 and the laser irradiation member 2 from being out of the mounted state.

Further, it is preferable that the top surface side main body portion 311 and the bottom surface side main body portion 312 are configured to be detachable from each other. As a result, the main body portion 31 can be configured so that the inner diameter of the portion to which the top surface side main body portion 311 and the bottom surface side main body portion 312 are attached and detached is larger than the diameter of the top surface side opening O2. Therefore, the bottom surface side main body portion 312 can be removed from the top surface side main body portion 311 and a lens having an outer diameter larger than the diameter of the top surface side opening O2 can be accommodated in the main body portion 31.

[Gas delivery unit 33]
Return to FIG. Although not an essential aspect, the lens accommodating member 3 is provided in the vicinity of the bottom surface 31B, and further includes a gas delivery unit 33 capable of delivering the second gas G2 in a direction FD2 substantially orthogonal to the flow direction FD1 of the first gas G1. It is preferable to prepare. The direction FD2 substantially orthogonal to the flow direction FD1 of the first gas G1 referred to here is the realization of the function of the flow of the first gas G1 to prevent the fume from entering through the bottom side opening O1. Refers to a direction in which the flow of the first gas G1 is not obstructed, and specifically, a direction in which an angle formed between the first gas G1 and the flow direction FD1 includes an angle of 70 degrees or more and 110 degrees or less. The direction in which the second gas G2 is sent FD2 is substantially orthogonal to the flow direction FD1 of the first gas G1, that is, the angle formed between the second gas G1 and the flow direction FD1 is 70 degrees or more and 110 degrees or less. Due to the inclusion direction, the force due to the flow of the second gas G2 does not prevent the fume from entering through the bottom opening O1 without hindering the realization of the function of the flow of the first gas G1. The fume can be pushed in a direction different from the moving direction of the fume when the fume is pushed only by the force due to the flow of G1.

By further providing the gas delivery unit 33, in addition to the flow of the first gas G1, the second gas G2 sent out in the direction FD2 substantially orthogonal to the flow direction FD1 of the first gas G1 pushes the fume, so that the fume is generated. It is possible to prevent the gas from adhering to the lens by passing through the bottom side opening O1 and entering the space C.

A fume located outside the lens accommodating member 3 at a position capable of absorbing the laser irradiated through the bottom surface side opening O1 may absorb the laser and adversely affect the irradiation of the laser. When the laser is irradiated to the irradiation target through the bottom surface side opening O1 provided on the bottom surface 31B, the laser and the first gas G1 pass through the bottom surface side opening O1 from the side of the space C toward the outside side, so that the bottom surface The direction of the laser passing through the side opening O1 and the flow direction FD1 of the first gas G1 can be substantially the same direction in the vicinity of the bottom side opening O1. Therefore, when the fume located near the bottom opening O1 among the positions where the laser can be absorbed outside the lens accommodating member 3 is pushed and moved only by the force due to the flow of the first gas G1, after the fume moves. The position of can be a position where the laser can be absorbed. Therefore, there is room for further improvement in moving the fume at a position where it can absorb the laser to a position where it does not absorb the laser outside the lens accommodating member 3 to reduce the adverse effect of the fume on the irradiation of the laser. There is.

By further including the gas delivery unit 33, the second gas G2 delivered in the direction FD2 substantially orthogonal to the flow direction FD1 of the first gas G1 can absorb the laser irradiated through the bottom surface side opening O1. The gas at the position can be pushed in a direction substantially orthogonal to the direction of the laser passing through the bottom opening O1 and moved to a position where the laser is not absorbed. Therefore, the adverse effect of fume on laser irradiation can be further reduced. The fact that the second gas G2 sent out in the direction FD2 substantially orthogonal to the flow direction FD1 of the first gas G1 pushes the fume will be described in more detail later with reference to FIG.

When the transmission unit 23 is configured to be able to supply the second gas G2 to the gas delivery unit 33, the gas transmission unit 33 is configured to be able to transmit the second gas G2 supplied from the transmission unit 23. preferable. The transmission unit 23 is configured to be able to supply the second gas G2 to the gas delivery unit 33, and the gas delivery unit 33 is configured to be able to send out the second gas G2 supplied from the transmission unit 23. The lens accommodating member 3 can be configured without attaching a member that stores and supplies G2. Thereby, the structure of the lens accommodating member 3 can be simplified.

The pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 is not particularly limited. The lower limit of the pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 is preferably atmospheric pressure or higher, more preferably 0.3 MPa or higher, and more preferably 0.4 MPa or higher. More preferred. By defining the lower limit of the pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 as described above, the second gas G2 transmitted to the second gas G2 in a direction substantially orthogonal to the flow direction FD1 of the first gas G1. Increases the force that pushes the gas, which can further prevent the gas from adhering to the lens.

The upper limit of the pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 is preferably 2 MPa or less, more preferably 1 MPa or less, still more preferably 0.8 MPa or less. By setting the upper limit of the pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 as described above, it is possible to prevent the gas delivery unit 33 and the like from being deformed by the pressure of the second gas G2.

[Pore N]
FIG. 7 is a schematic left side view of the lens accommodating member 3. The gas delivery unit 33 preferably has one or more pores N capable of delivering the second gas G2. Since the gas delivery unit 33 has one or more pores N capable of delivering the second gas G2, the cross-sectional area of the flow path through which the second gas G2 flows when the second gas G2 passes through the pores N is small. Can be. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the second gas G2 can be increased. By increasing the velocity of the flow of the second gas G2, the second gas G2 can push the fume more efficiently.

The size of the pore N is not particularly limited. Regarding the pore N, the upper limit of the cross-sectional area when viewed from the direction in which the second gas G2 flows is preferably 3 square millimeters or less, more preferably 2 square millimeters or less, and 1 square millimeter or less. Is even more preferable. By defining the upper limit of the cross-sectional area of the pore N when viewed from the direction in which the second gas G2 flows as described above, the flow path through which the second gas G2 flows when the second gas G2 passes through the pore N. The cross-sectional area of can be even smaller. This can increase the velocity of the flow of the second gas G2.

Regarding the pore N, the lower limit of the cross-sectional area when viewed from the direction in which the second gas G2 flows is preferably 0.1 square millimeter or more, more preferably 0.3 square millimeter or more, and 0.4. It is more preferably square millimeters or less. By defining the lower limit of the cross-sectional area of the pore N when viewed from the direction in which the second gas G2 flows as described above, the pore N and the second gas G2 when the second gas G2 passes through the pore N Friction with and from can be reduced and the velocity of the flow of the second gas G2 can be increased.

[Second gas G2]
The second gas G2 is not particularly limited and may be various gases exemplified by air, an inert gas and the like. The inert gas used as the second gas G2 is not particularly limited, and may be, for example, an inert gas containing one or more of nitrogen, carbon dioxide, argon, neon, and / or helium. Since the second gas G2 is an inert gas, the oxygen concentration is lowered by the delivered inert gas, and it is possible to prevent the combustibles from being ignited by the high temperature associated with the irradiation of the laser. Therefore, it is possible to reduce the temperature rise of the contained lens due to the ignition of the combustible material. By reducing the temperature rise of the contained lens, distortion, deformation and / or breakage of the lens due to heat can be prevented.

The second gas G2 may be the same gas as the first gas G1 or may be a gas different from the first gas G1. Since the second gas G2 is the same gas as the first gas G1, the same gas as the first gas G1 can be used in the gas delivery unit 33. Thereby, the gas introduction unit 32 and the gas delivery unit 33 may share a member for storing the gas and / or a member for supplying the gas.

<Nozzle 4>
FIG. 8 is an enlarged schematic view of the nozzle 4 in the laser irradiation device 1, and FIG. 9 is a schematic cross-sectional view taken along the line BB of the nozzle 4 in FIG. In the present embodiment, the nozzle 4 has a nozzle body 41 capable of sucking an object to be sucked exemplified by a fume or the like, a structure 42 capable of closing at least a part of a suction port O3 in the nozzle body 41, and suction. An upper suction unit 43 provided substantially above the mouth O3 and configured to be able to suck the suction target, and a transfer unit capable of transferring the suction target and / or the suction gas including the suction target sucked by the nozzle 4. 44 (see FIG. 1) and a detachable portion 45 (see FIG. 1) for detachably attaching the nozzle body 41 to the nozzle 4 are included.

[Nozzle body 41]
As shown in FIG. 8, the nozzle body 41 is not particularly limited as long as it is a hollow nozzle provided with a suction port O3 capable of sucking an object to be sucked, which is exemplified by a fume generated during laser processing. Since the nozzle body 41 is a hollow nozzle provided with a suction port O3 capable of sucking an object to be sucked exemplified by the fume generated during laser processing, the suction exemplified by the fume generated during laser processing is exemplified. The object can be sucked and collected at the suction port O3.

The material of the nozzle body 41 is not particularly limited, and the metal exemplified by iron, iron alloy, copper, copper alloy, aluminum, aluminum alloy, nickel, nickel alloy and the like, the resin exemplified by polyimide resin and the like, and / Alternatively, various materials including ceramic and the like may be used. The material of the nozzle body 41 is preferably metal. Since the material of the nozzle body 41 contains metal, it is possible to prevent the nozzle body 41 from being damaged and / or ignited when the nozzle body 41 becomes hot due to irradiation with a laser.

[Suction port O3]
The suction port O3 is a suction port capable of sucking an object to be sucked, which is exemplified by a fume or the like generated during laser processing. When the object to be sucked is viewed from a direction in which suction is possible, the length L1 of the suction port O3 in the longitudinal direction Is not particularly limited as long as it is longer than the length L2 in the lateral direction.

The length L1 in the longitudinal direction of the suction port O3 when the suction target is viewed from the direction in which suction is possible is preferably 4 times or more, preferably 6 times or more, the length L2 in the lateral direction. Is more preferable, and 9 times or more is further preferable. By defining the length L1 in the longitudinal direction of the suction port O3 with respect to the length L2 in the lateral direction as described above when the suction target is viewed from the suctionable direction, the suction gas containing the suction target is nozzleed. 4 When passing through the suction port O3 from the outside, the cross-sectional area of the flow path through which the suctioned gas flows becomes small. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the gas to be sucked can be increased. Therefore, it is possible to improve the suction force for sucking the suction target contained in the gas to be sucked.

The length L1 in the longitudinal direction of the suction port O3 when the suction target is viewed from the direction in which suction is possible is preferably 50 times or less, preferably 30 times or less, with respect to the length L2 in the lateral direction. Is more preferable, and 20 times or less is further preferable. By defining the length L1 in the longitudinal direction of the suction port O3 with respect to the length L2 in the lateral direction as described above when the suction target is viewed from the suctionable direction, the suction gas containing the suction target is nozzleed. 4 It is possible to reduce the friction between the suctioned gas and the nozzle body 41 when passing through the suction port O3 from the outside, and improve the suction force.

The shape of the suction port O3 when the suction target is viewed from a direction in which suction is possible is not particularly limited, and the length in the longitudinal direction is the length in the lateral direction, which is exemplified by a substantially rectangular shape, a substantially trapezoidal shape, a substantially elliptical shape, or the like. Various shapes longer than this may be used. The shape of the suction port O3 when the suction target is viewed from a direction in which suction is possible is preferably substantially rectangular. Since the shape of the suction port O3 when the suction target is viewed from the direction in which suction is possible is substantially rectangular, the Venturi effect can be generated more effectively and the speed of the flow of the suctioned gas can be increased.

Regarding the suction port O3 provided in the nozzle 4 included in the laser irradiation device 1, the longitudinal direction of the suction port O3 when the suction target (fume or the like) is viewed from the direction in which suction is possible is substantially perpendicular to the laser irradiation direction. It is preferable to configure the suction port O3.

When the laser has an elongated irradiation range, fume can be generated from various locations included in the irradiation range. If there is no suction port O3 around the irradiation range, the suction force for the generated fume may decrease.

The case where the laser has an elongated irradiation range by forming the suction port O3 in which the longitudinal direction of the suction port O3 when viewed from the direction in which the fume can be sucked is substantially perpendicular to the irradiation direction of the laser. However, the suction port O3 can be arranged around the irradiation range to improve the suction force for the fume evaporating from the irradiation target. Further, the suction port O3 is configured such that the longitudinal direction of the suction port O3 when viewed from the direction in which the fume can be sucked is substantially perpendicular to the irradiation direction of the laser, and further, suction when the fume is viewed from the direction in which suction is possible. By defining the length of the port O3 in the longitudinal direction with respect to the length in the lateral direction as described above, even if the laser has an irradiation range having a more elongated shape, the suction port O3 is located around the irradiation range. Can be placed. This can improve the suction force for the fume that evaporates from the irradiation target.

The distance from the lens to the suction port O3 is not particularly limited, but is preferably a distance that substantially coincides with the focal length of the lens. Since the distance from the lens to the suction port O3 is a distance that substantially matches the focal length of the lens, the user using the laser irradiation device 1 moves the suction port O3 to the vicinity of the irradiation target from the lens. The distance to the irradiation target can be substantially matched with the focal length of the lens. As a result, the user who uses the laser irradiation device 1 can efficiently heat the irradiation target.

[Wide portion 41A, narrow portion 41B]
Then, refer to FIG. FIG. 9 is a schematic partial cross-sectional view taken along the line BB of the nozzle 4 in FIG. Although not an essential aspect, it is preferable that the nozzle body 41 includes a wide portion 41A having a relatively large inner diameter and a narrow portion 41B having a relatively small inner diameter.

By configuring the nozzle body 41 so as to include the wide portion 41A having a relatively large inner diameter and the narrow portion 41B having a relatively small inner diameter, the suctioned gas containing the suction target can be transferred from the wide portion 41A to the narrow portion 41B. When entering, the cross-sectional area of the flow path through which the suctioned gas flows becomes smaller. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the gas to be sucked can be further increased. Therefore, it is possible to improve the suction force for sucking the suction target contained in the gas to be sucked.

In the flow of a compressible fluid such as a gas, when the cross-sectional area of the flow path through which the fluid flows is reduced, adiabatic compression may occur in which the fluid is compressed without exchanging heat with the outside. Further, in the flow of a compressible fluid such as a gas, it is known that the flow accelerates when the temperature of the fluid rises when the flow is a subsonic flow.

By configuring the nozzle body 41 so as to include the wide portion 41A having a relatively large inner diameter and the narrow portion 41B having a relatively small inner diameter, the suctioned gas containing the suction target can be transferred from the wide portion 41A to the narrow portion 41B. When entering, the suctioned gas is adiabatically compressed, and the temperature of the sucked gas may rise. As a result, when the flow of the gas to be sucked is a subsonic flow, the flow of the gas to be sucked is accelerated, and the effect of further increasing the speed can be produced. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

For the wide portion 41A and the narrow portion 41B, if the inner diameter of the wide portion 41A is relatively large with respect to the inner diameter of the narrow portion 41B (that is, the inner diameter of the narrow portion 41B is relative to the inner diameter of the wide portion 41A). If it is small), it is not particularly limited.

The inner diameter of the wide portion 41A is preferably 1.1 times or more, more preferably 1.2 times or more, still more preferably 1.3 times or more the inner diameter of the narrow portion 41B. .. By defining the inner diameter of the wide portion 41A with respect to the inner diameter of the narrow portion 41B as described above, the flow of the sucked gas when the suctioned gas containing the suction target enters the narrow portion 41B from the wide portion 41A. The cross-sectional area of the road becomes even smaller. This effectively produces a Venturi effect that increases the velocity of the fluid flow when the cross-sectional area of the flow path through which the fluid flows is reduced, and the velocity of the flow of the gas to be sucked can be further increased. Therefore, the suction force for sucking the suction target contained in the gas to be sucked can be further improved.

The inner diameter of the wide portion 41A is preferably 4 times or less, more preferably 3 times or less, and further preferably 2 times or less the inner diameter of the narrow portion 41B. By defining the inner diameter of the wide portion 41A with respect to the inner diameter of the narrow portion 41B as described above, it is possible to prevent the narrow portion 41B from becoming narrow. Therefore, the friction between the suctioned gas and the nozzle body 41 in the narrow portion 41B can be reduced, and the suction force can be improved.

[Structure 42]
Although not an essential aspect, it is preferable that the nozzle 4 includes a structure 42 capable of closing at least a part of the suction port O3.

By providing the structure 42 in which the nozzle 4 can block at least a part of the suction port O3, the cross-sectional area of the flow path through which the suctioned gas flows can be reduced by the structure 42. As a result, when the gas to be sucked including the object to be sucked passes around the structure 42, the cross-sectional area of the flow path through which the fluid flows becomes small. Then, when the cross-sectional area of the flow path through which the fluid flows is reduced, a Venturi effect is generated in which the speed of the fluid flow increases, and the speed of the flow of the gas to be sucked can be further increased. Therefore, it is possible to improve the suction force for sucking the suction target contained in the gas to be sucked.

By providing the structure 42 in which the nozzle 4 can block at least a part of the suction port O3, the structure 42 can give resistance to the flow of the sucked gas and adiabatically compress the sucked gas. Then, the temperature of the gas to be sucked may rise due to the adiabatic compression. As a result, when the flow of the gas to be sucked is a subsonic flow, the flow of the gas to be sucked is accelerated, and the effect of further increasing the speed can be produced. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

Return to FIG. It is preferable that the structure 42 can be attached to a place different from both ends of the suction port O3 when the suction target is viewed from a suctionable direction.

Since the structure 42 can be attached to a place different from both ends of the suction port O3 when the suction target is viewed from a suctionable direction, the structure 42 attached to a place different from both ends of the suction port O3 can be attached. The flow of the suctioned gas can be divided into a plurality of flows, and the cross-sectional area of the flow path can be reduced for each of the divided flows. Then, when the cross-sectional area of the flow path through which the fluid flows is reduced, a Venturi effect is generated in which the speed of the fluid flow increases, and the speed of the flow of the gas to be sucked can be further increased. Therefore, it is possible to improve the suction force for sucking the suction target contained in the gas to be sucked.

Since the structure 42 can be attached to a place different from both ends of the suction port O3 when the suction target is viewed from a suctionable direction, the structure 42 attached to a place different from both ends of the suction port O3 can be attached. The flow of the suctioned gas can be divided into a plurality of flows, and the suctioned gas can be adiabatically compressed for each of the divided flows. As a result, the suctioned gas can be adiabatically compressed more efficiently and its temperature can be raised. As a result, when the flow of the gas to be sucked is a subsonic flow, the flow of the gas to be sucked is accelerated, and the effect of further increasing the speed may be further produced. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

The shape of the structure 42 is not particularly limited as long as it can close at least a part of the suction port O3, but it is preferable that the structure 42 has a wide shape with respect to the direction in which the suction target can be sucked. Since the structure 42 has a wide shape with respect to the direction in which the suction target can be sucked, the flow of the suctioned gas entering the inside of the nozzle body 41 from the suction port O3 is on the side where the suction gas first comes into contact with the structure 42. The width becomes narrower. This can reduce the resistance between the flow of the gas to be sucked and the structure 42 and increase the speed of the flow of the gas to be sucked. Therefore, it is possible to improve the suction force for sucking the suction target contained in the gas to be sucked.

FIG. 10 is a diagram showing an example of the structure 42. Hereinafter, the structure 42 having a wide shape with respect to the direction in which the suction target can be sucked will be described in more detail with reference to FIG.

FIG. 10 (A1) is a schematic plan view showing an example of a structure 42 having a shape including a substantially triangular prism. 10 (A2) is a schematic view of the structure 42 of FIG. 10 (A1) viewed from above on the right front side. The structure 42 preferably has a shape including a substantially triangular prism having a wide shape (reverse convex shape) with respect to a direction in which the suction target can be sucked (direction of gas flow). Since the structure 42 has a shape including a substantially triangular prism, the flow of the suctioned gas can be divided into two by the substantially triangular prism. Thereby, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved. Further, when the speed of the flow of the sucked gas exceeds the speed of sound, the structure 42 has a shape including a substantially triangular column, so that the shock wave generated by the flow of the sucked gas exceeding the speed of sound coming into contact with the structure 42. It can reduce resistance.

FIG. 10B1 is a schematic plan view showing an example of a structure 42 having a shape including a substantially triangular prism and a substantially square prism. 10 (B2) is a schematic view of the structure 42 of FIG. 10 (B1) viewed from above on the right front side. When the structure 42 has a shape including a substantially triangular prism having a wide shape (reverse convex shape) with respect to a direction in which the suction target can be sucked (direction of gas flow), the structure 42 is formed from the substantially triangular prism. It is preferable that the shape further includes a substantially square prism in the direction of the flow of the gas to be sucked. Since the structure 42 has a shape that further includes a substantially quadrangular prism in the direction of the flow of the suctioned gas when viewed from the substantially triangular prism, the substantially quadrangular prism has a flow of the suctioned gas divided into two by the substantially triangular prism. It can prevent it from becoming one flow. Thereby, the flow of the suctioned gas can be more effectively divided into two flows. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

FIG. 10 (C1) is a schematic plan view showing another example of the structure 42 having a shape including a substantially triangular prism and a substantially square prism. FIG. 10 (C2) is a schematic view of the structure 42 of FIG. 10 (C1) viewed from above on the right front side. The size of the substantially quadrangular prism is not particularly limited, but it is preferable that the size of the substantially quadrangular prism is smaller than that of the substantially triangular prism when viewed from the direction of the flow of the suctioned gas. Since the size of the substantially square prism when viewed from the direction of the flow of the sucked gas is smaller than the substantially triangular prism, the flow of the sucked gas divided into two by the substantially triangular prism is received from the substantially triangular prism. It can reduce resistance. As a result, the speed of the flow of the gas to be sucked can be increased, and the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

[Upper suction unit 43]
FIG. 11 is a diagram showing an example of the positional relationship between the lens accommodating member 3 and the nozzle 4 when irradiating the laser, and is a schematic view of the lens accommodating member 3 and the nozzle 4 as viewed from the horizontal direction. Although it is not an essential aspect, when the suction target is a high temperature suction target whose temperature is higher than the surroundings exemplified by the fume generated during laser processing, the nozzle 4 is provided substantially above the suction port O3 and suction is performed. It is preferable to have an upper suction unit 43 configured to be able to suck a target high temperature object or the like. A high temperature object to be sucked, such as a fume formed from the residue evaporated from the irradiation target, has a temperature higher than the ambient temperature. As a result, the gas around the high temperature object to be sucked is heated, which may result in an updraft. Therefore, a part of the high temperature object to be sucked rises due to the updraft and may move in the direction of the lens accommodating member 3 and the accommodating lens, for example. By having the upper suction unit 43, the high temperature object to be sucked raised by the updraft can be sucked by the upper suction unit 43 provided substantially above the suction port O3. Thereby, when the suction target is a suction target high temperature object, the adhesion of the suction target high temperature object to the lens can be reduced.

The shape of the upper suction portion 43 is not particularly limited, but is a substantially frustum shape having a hollow portion through which the suction target can pass, and the suction target is drawn along the direction of the suction target sucked by the upper suction portion 43. It is preferable that the shape is configured so that the cross-sectional area of the portion through which the passage passes is large. The shape of the upper suction portion 43 has, for example, an upper suction port O4 for sucking the suction object shown in FIG. 11 and a confluence port O5 that merges with the nozzle body 41, and the upper suction port diameter R1 of the upper suction port O4 merges. It may have a hollow substantially conical trapezoidal shape smaller than the confluence diameter R2 of the mouth O5. Since the upper suction port R1 is smaller than the confluence diameter R2, the flow of sucking the suction target in the vicinity of the confluence port O5 can increase the speed of the flow in the vicinity of the upper suction port O4 due to the Venturi effect. Therefore, it is possible to increase the suction input for sucking the suction target in the vicinity of the upper suction port O4. The merging diameter R2 is preferably smaller than the nozzle body diameter R3 of the nozzle body 41. As a result, the suction target can be sucked by the upper suction unit 43 without significantly impairing the flow speed of the suction target flowing through the nozzle body 41. It is also preferable that the upper suction portion 43 has an upper opening O6 provided at a position different from that of the upper suction port O4. Since the upper suction portion 43 has the upper opening O6, the high temperature object to be sucked raised by the updraft can be sucked even in the upper opening O6.

[Transfer unit 44]
Return to FIG. When the laser irradiation device 1 includes the nozzle 4, it is preferable that the nozzle 4 includes a transfer unit 44 capable of transferring the suction target and / or the suctioned gas containing the suction target sucked by the nozzle 4. By including the transfer unit 44, the nozzle 4 can transfer the sucked object or the like and keep it away from the lens and / or the irradiation target.

The transfer unit 44 is not particularly limited as long as it can transfer the suction target or the like sucked by the nozzle 4, and is a means capable of transferring the suction target or the like of the prior art exemplified by the pipe, hose, pipe or the like of the prior art. It's fine.

The transfer unit 44 is preferably connected to a suction unit capable of sucking an object to be sucked and / or a gas. Since the transfer unit 44 is connected to the suction target and / or the suction unit capable of sucking the gas, the transfer unit 44 is connected to the suction target and / or the suction gas including the suction target through the suction port O3. Can be sucked.

[Detachable part 45]
Although not an essential aspect, it is preferable that the nozzle 4 is provided with a detachable portion 45 for detachably attaching the nozzle body 41 to the nozzle 4. By providing the nozzle 4 with the attachment / detachment portion 45, when the lens is replaced with another lens having a different focal length, the nozzle body so that the distance from the lens to the suction port O3 substantially matches the focal length of the replaced lens. 41 can be exchanged. Thereby, when the laser is irradiated to the irradiation target at a position where the distance from the lens to the irradiation target substantially coincides with the focal length of the lens, the suction port O3 can be arranged in the vicinity of the irradiation target. Therefore, it is possible to efficiently suck an object to be sucked such as a fume that evaporates from the object to be irradiated.

The lower limit of the distance from the attachment / detachment portion 45 to the suction port O3 is preferably 0.1 m or more, more preferably 0.15 m or more, and further preferably 0.2 m or more. By defining the lower limit of the distance from the attachment / detachment portion 45 to the suction port O3 as described above, when the distance from the lens to the suction port O3 substantially matches the focal length of the lens, the distance from the lens to the attachment / detachment portion 45 is the lens. The distance is different from the focal length of. This makes it possible to prevent the laser from causing great damage to the user's hand when the user who replaces the nozzle body 41 touches the vicinity of the attachment / detachment portion 45.

The upper limit of the distance from the attachment / detachment portion 45 to the suction port O3 is preferably 3 meters or less, more preferably 2 meters or less, and further preferably 1 meter or less. By setting the upper limit of the distance from the attachment / detachment portion 45 to the suction port O3 as described above, it is possible to prevent the attachment / detachment portion 45 from applying a large force by this principle when a force is applied in the vicinity of the suction port O3.

[Suction target]
Up to this point, the nozzle 4 that sucks the suction target such as fume generated during laser processing in the laser irradiation device 1 has been described, but the suction target that the nozzle 4 sucks is not particularly limited and passes through the suction port O3. It may be any possible suction object. When the suction target is viewed from the direction in which the nozzle 4 can suck the object, the length L1 in the longitudinal direction of the suction port O3 is four times or more the length L2 in the lateral direction, and the wide portion having a relatively large inner diameter. The nozzle body 41 is composed of the 41A and the narrow portion 41B having a relatively small inner diameter, and at least a part of the suction port O3 is placed inside the nozzle body 41 in the vicinity of the suction port O3. A structure 42 that can be closed is provided, the structure 42 is provided at a position different from both ends of the suction port O3 when the suction target is viewed from a suctionable direction, and / or the structure. Since the 42 has a wide shape with respect to the direction in which the suction target can be sucked, the suction force for sucking these suction targets can be improved.

The object to be sucked may include, for example, a high temperature object to be sucked having a temperature higher than the surroundings, which is exemplified by a fume generated during laser processing, and is exemplified by dust, dust, material powder, debris generated during cutting, and the like. It may contain a non-high temperature substance to be sucked at substantially the same temperature as the surroundings, but it is more preferable to include a high temperature object to be sucked having a temperature higher than the surroundings.

The reason why it is more preferable that the suction target includes a suction target high temperature object having a higher temperature than the surroundings will be described. Regarding the adiabatic compression of gas, Poisson's law (pV ^γ is constant) and the ideal gas law (p = RT / V) lead to that TV ^γ-1 is constant (p: pressure). , R: gas constant, T: temperature, V: volume, γ: specific heat ratio). Therefore, the temperature change ΔT when a gas having a volume Vi of a specific heat ratio γ at a temperature T is adiabatically compressed to a volume V _f can satisfy ΔT ₌ T _{ (Vi / V _f ) ^γ-1 -1}. As a result, under the same conditions of the specific heat ratio γ and the compressibility ( _Vi / V _f ), the higher the temperature T of the gas, the larger the temperature change due to adiabatic compression can be. That is, the higher the temperature T of the gas, the larger the amount of increase in temperature. When the object to be sucked is a high temperature object to be sucked, the temperature of the gas to be sucked including the object to be sucked may be high. When the sucked gas containing the object to be sucked enters from the wide portion 41A to the narrow portion 41B, the sucked gas is adiabatically compressed and the temperature of the sucked gas may rise, but the temperature change in the above-mentioned adiabatic compression From the equation, when the temperature of the sucked gas is high, the amount of increase in the temperature of the sucked gas due to adiabatic compression can be even larger. Thereby, when the flow of the sucked gas is a subsonic flow, the flow of the sucked gas is accelerated, and the effect of further increasing the speed can be produced even more effectively. Therefore, when the object to be sucked is a high temperature object to be sucked, the speed of the flow of the gas to be sucked can be further increased, and the suction force can be further increased.

Similar to when the sucked gas enters the narrow portion 41B from the wide portion 41A, the temperature of the sucked gas is also obtained by giving resistance to the flow of the sucked gas by the structure 42 and adiabatic compression of the sucked gas. When is high, the amount of increase in temperature of the gas to be sucked due to adiabatic compression can be even larger. Thereby, when the flow of the sucked gas is a subsonic flow, the flow of the sucked gas is accelerated, and the effect of further increasing the speed can be produced even more effectively. Therefore, when the object to be sucked is a high temperature object to be sucked, the speed of the flow of the gas to be sucked can be further increased, and the suction force can be further increased.

Further, when the suction target is a suction target high temperature object and the gas around the suction target high temperature object is heated and becomes an updraft, the suction target is sucked by the upper suction unit 43 provided substantially above the suction port O3. Can suck hot objects. Since the suction target is sucked not only by the suction port O3 but also by the upper suction portion 43, the suction force can be further increased.

The object to be inhaled may contain harmful substances that are harmful to the human body. When there is a harmful substance around the nozzle 4, the harmful substance contained in the suction target may enter the body of the worker or the like using the nozzle 4 and may impair the health of the worker or the like. By increasing the suction input for sucking the suction target containing harmful substances, it is possible to prevent workers and the like from impairing their health.

<Transportation materials>
Although not an essential aspect, when transporting the laser irradiation device 1, it is preferable that the laser irradiation device 1 can be accommodated in a transport member (not shown). When the laser irradiation device 1 is transported, the laser irradiation device 1 can be accommodated in the transport member, so that the laser irradiation device 1 can be prevented from being damaged during transportation. The transport member is not particularly limited as long as it can accommodate the laser irradiation device 1, and may be a transport case or other conventional transport member. The transport member preferably includes a transport member holding portion that can be held by the transporter who transports the laser irradiation device 1. By providing the transport member holding portion, the transporter can hold the laser irradiation device 1 housed in the transport member via the transport member holding portion, and can easily transport the laser irradiation device 1.

<< Mobile Laser Irradiation System S >>
FIG. 12 is a schematic front view showing an example of the mobile laser irradiation system S according to the present embodiment. The mobile laser irradiation system S includes the above-mentioned laser irradiation device 1 and a laser irradiation support vehicle 5 capable of supplying a laser to the irradiation unit 24 of the laser irradiation device 1.

<Laser irradiation support vehicle 5>
When the laser irradiation device 1 is installed and used in a facility exemplified by a factory or a workplace, the width, depth, or height of one or more is large, the weight is large, and the laser irradiation device 1 is fixed in a specific place. / Or It is difficult to irradiate an irradiation target that is difficult to move to a facility due to circumstances such as the quality of the laser being impaired by vibrations associated with the movement. Therefore, there is room for improvement in configuring the laser irradiation device 1 to be movable so that the laser can be irradiated to an irradiation target that is difficult to move to the facility.

By configuring the mobile laser irradiation system S to include the laser irradiation support vehicle 5 that can move the laser irradiation device 1, the laser irradiation device 1 is configured to be movable and moved to the facility where the laser irradiation member 2 is installed. The laser can be applied to an irradiation target that is difficult to make.

In the present embodiment, the laser irradiation support vehicle 5 is mounted on a movable vehicle body 51, a power transmission unit 53 mounted on the vehicle body 51 and capable of transmitting power supplied from a power source, and a power transmission unit 53 mounted on the vehicle body 51 to transmit power. A laser supply unit 54 capable of supplying a laser using the power transmitted by the unit 53, and a suction unit mounted on the vehicle body 51 and capable of sucking a suction target such as a fume sucked by the nozzle 4 of the laser irradiation device 1. The 55 is configured to include a cooling unit 56 mounted on the vehicle body 51 and capable of cooling the laser irradiation support vehicle 5, and a cooling material supply unit (not shown) capable of supplying the cooling material to the irradiation unit 24. .. Although not an essential aspect, the laser irradiation support vehicle 5 may further include a power supply unit 52 mounted on the vehicle body 51 and capable of supplying electric power. By further including the power supply unit 52, electric power can be supplied to the power transmission unit 53 and the like without using a power source outside the laser irradiation support vehicle 5.

[Vehicle body 51]
The vehicle body 51 is not particularly limited as long as it can be moved while mounting each component constituting the laser irradiation support vehicle 5, and may be a vehicle of the prior art. Since the laser irradiation support vehicle 5 includes the vehicle body 51, the laser irradiation device 1 can be configured to be movable.

The vehicle body 51 is preferably an ordinary vehicle exemplified by a wagon or the like, or a medium-sized vehicle and / or a large-sized vehicle exemplified by a truck or the like. Since the vehicle body 51 is an ordinary vehicle, the laser irradiation support vehicle 5 can be operated more easily than when the vehicle body 51 is a large vehicle or the like. Since the vehicle body 51 is a medium-sized vehicle and / or a large vehicle, the laser irradiation device 1 and / or the laser irradiation support vehicle 5 is relatively heavy in weight and the like. Each component constituting 1 and / or the laser irradiation support vehicle 5 may be movably configured.

[Power supply unit 52]
The power supply unit 52 is not particularly limited as long as it is a power source configured to be able to supply electric power to the laser irradiation member 2 and / or the laser supply unit 54 and the like, and may be a power source of the prior art. Even in a place where it is difficult to supply electric power to the laser irradiation member 2 and / or the laser supply unit 54 or the like because the laser irradiation support vehicle 5 includes the power supply unit 52, the laser irradiation member 2 and / or the laser supply unit It can supply power to 54 and the like. The power supply unit 52 is preferably a power supply unit that uses electric power supplied from an AC power source exemplified by a commercial power source or the like. Since the power supply unit 52 is a power supply unit that uses electric power supplied from an AC power source, the power supply unit 52 easily converts the voltage of the electric power into a voltage suitable for the laser irradiation member 2 and / or the laser supply unit 54 and the like. Can be. The AC power supply that supplies power to the power supply unit 52 is not particularly limited, and for example, a commercial power supply having a voltage of 100 V or more and 240 V or less and a frequency of 50 Hz or more and 60 Hz or less, or an in-vehicle power supply having substantially the same voltage and frequency as the commercial power supply. Examples include AC power supplies that can supply power.

The electric power that can be supplied by the power supply unit 52 is not particularly limited. The lower limit of the power that can be supplied by the power supply unit 52 is preferably 100 VA or more, more preferably 1 kVA or more, and further preferably 10 kVA or more. By defining the lower limit of the electric power that can be supplied by the power supply unit 52 as described above, the electric power required by the laser irradiation member 2 and / or the laser supply unit 54 and the like can be supplied.

The upper limit of the power that can be supplied by the power supply unit 52 is preferably 10 MVA or less, more preferably 1 MVA or less, and further preferably 100 kVA or less. By setting the upper limit of the electric power that can be supplied by the power supply unit 52 as described above, it is possible to prevent the temperature from rising due to a large amount of electric power.

[Power transmission unit 53]
When the laser irradiation support vehicle 5 includes the power supply unit 52, the laser irradiation support vehicle 5 further includes a power transmission unit 53 capable of transmitting electric power from the power supply unit 52 to the laser irradiation member 2 and / or the laser supply unit 54. Is preferable. The laser irradiation support vehicle 5 is provided with a power transmission unit 53 capable of transmitting power from the power supply unit 52 to the laser irradiation member 2 and / or the laser supply unit 54, so that the power supply unit 52 is supplied to the laser irradiation member 2 and / or the laser supply unit 54. Can send power.

[Laser supply unit 54]
The laser supply unit 54 is a member configured to be able to supply a laser to the irradiation unit 24 of the laser irradiation member 2, and includes a laser oscillator. By providing the laser supply unit 54, the laser can be supplied to the irradiation unit 24. As a result, even when the size and / or weight of the laser irradiation member 2 is limited, the irradiation unit 24 can irradiate a high-power laser that requires a relatively large laser supply unit 54.

The laser supply unit 54 is not particularly limited as long as it can supply the laser to the irradiation unit 24 of the laser irradiation member 2. When the laser irradiation device 1 includes the transmission unit 23, it is preferable that the laser supply unit 54 can supply the laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23. Since the laser supply unit 54 can supply the laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23, the laser irradiation member 2 can irradiate the laser at a place away from the laser irradiation unit 54.

It is preferable that the laser supply unit 54 is configured to be coolable by the coolant supplied from the cooling unit 56. Since the laser supply unit 54 is configured to be coolable by the coolant supplied from the cooling unit 56, it is possible to prevent performance deterioration, failure, and / or damage of the laser supply unit 54 due to high temperature.

[Laser oscillator]
The laser supply unit 54 includes a laser oscillator. Since the laser supply unit 54 includes the laser oscillator, the laser supply unit 54 can supply the laser oscillated by the laser oscillator to the irradiation unit 24.

The laser oscillator is not particularly limited, and may be a gas laser exemplified by a CO ₂ laser, a nitrogen laser, a helium neon laser, an argon ion laser, an excima laser, or the like, and may be a YAG laser, an Nd: YAG laser, a YVO ₄ laser, a YLF laser, or the like. And a solid-state laser exemplified by a ruby laser or the like, a semiconductor laser, a chemical laser, or a fiber laser using an optical fiber as a laser medium may be used. Above all, the laser oscillator preferably includes a fiber laser. Since the fiber laser has a higher output with respect to the power consumption than the solid-state laser or the like, it is possible to oscillate a laser having a large output even if the laser oscillator is small. Further, since the fiber laser is superior to the solid-state laser or the like in terms of reliability and life, it is possible to reduce the replacement frequency of the laser oscillator and reduce the labor related to the maintenance work of the laser supply unit 54.

The laser oscillator preferably includes a semiconductor laser as an excitation source for the laser. By including the semiconductor laser as the excitation source of the laser, the laser oscillator can increase the oscillation efficiency of the laser and reduce the thermal distortion of the laser medium as compared with the case where the lamp is used as the excitation source. Further, since the semiconductor laser has a longer life as an excitation source than a lamp or the like, the frequency of exchanging the excitation source can be reduced, and the labor related to the maintenance work of the laser irradiation member 2 can be reduced.

The wavelength of the laser oscillated by the laser oscillator is not particularly limited. The upper limit of the wavelength of the laser is preferably 500 micrometers or less, more preferably 50 micrometers or less, and even more preferably 5 micrometers or less. By setting the upper limit of the wavelength of the laser as described above, it is possible to irradiate the laser having high energy. The lower limit of the wavelength of the laser is preferably 1 nanometer or more, more preferably 10 nanometers or more, and further preferably 100 nanometers or more. By setting the lower limit of the wavelength of the laser as described above, the energy of the laser can be suppressed and the temperature rise of the lens and / or the irradiation target can be reduced.

The output of the laser oscillator is not particularly limited. The lower limit of the output of the laser oscillator is preferably 1 W or more, more preferably 10 W or more, and further preferably 50 W or more. By setting the lower limit of the output of the laser oscillator as described above, it is possible to irradiate a laser having high energy. The upper limit of the output of the laser oscillator is preferably 10 kW or less, more preferably 5 kW or less, and further preferably 3 kW or less. By setting the upper limit of the output of the laser oscillator as described above, the energy of the laser can be suppressed and the temperature rise of the lens and / or the irradiation target can be reduced.

The laser oscillator is preferably a laser oscillator capable of oscillating a laser by a pulse method. Since the laser oscillator is a laser oscillator capable of oscillating a laser by a pulse method, it is possible to suppress an increase in the temperature of the lens and / or the irradiation target as compared with the case where the laser is continuously oscillated (also referred to as CW). This can prevent distortion, deformation and / or breakage of the lens due to heat. Further, in order to reduce the temperature rise of the irradiation target, it is possible to suppress the influence of the temperature rise when the irradiation target is subjected to fine processing.

The pulse width when the laser is oscillated by the pulse method is not particularly limited. The lower limit of the pulse width is preferably 10 femtoseconds or more, more preferably 1 picosecond or more, and further preferably 100 picoseconds or more. By setting the lower limit of the pulse width as described above, the energy of the laser irradiated to the irradiation target can be increased. The pulse width referred to here is the length of time that the output of the laser is 50% or more of the peak output that is the output when the output of the laser is the highest.

The upper limit of the pulse width is preferably 1 second or less, more preferably 10 milliseconds or less, and further preferably 200 nanoseconds or less. By setting the upper limit of the pulse width as described above, the temperature rise of the lens and / or the irradiation target can be suppressed. This can prevent distortion, deformation and / or breakage of the lens due to heat. Further, in order to reduce the temperature rise of the irradiation target, it is possible to suppress the influence of the temperature rise when the irradiation target is subjected to fine processing.

The pulse frequency when the laser is oscillated by the pulse method is not particularly limited. The lower limit of the pulse frequency is preferably 1 Hz or higher, more preferably 50 Hz or higher, and even more preferably 1 kHz or higher. By setting the lower limit of the pulse frequency as described above, it is possible to reduce the heating unevenness between the pulses when the irradiation point of the laser moves.

The upper limit of the pulse frequency is preferably 10 MHz or less, more preferably 1 MHz or less, and further preferably 500 kHz or less. By setting the upper limit of the pulse frequency as described above, a pulse can be generated even when the wavelength of the laser is long.

The peak output when the laser is oscillated by the pulse method is not particularly limited. The lower limit of the peak output is preferably 1 W or more, more preferably 100 W or more, and further preferably 10 kW or more. By setting the lower limit of the peak output as described above, the energy of the laser irradiated to the irradiation target can be increased.

The upper limit of the peak output is preferably 2 PW or less, more preferably 50 GW or less, and further preferably 2 MW or less. By setting the upper limit of the peak output as described above, the temperature rise of the lens and / or the irradiation target can be suppressed. This can prevent distortion, deformation and / or breakage of the lens due to heat. Further, in order to reduce the temperature rise of the irradiation target, it is possible to suppress the influence of the temperature rise when the irradiation target is subjected to fine processing.

[Control unit]
The laser supply unit 54 preferably includes a control unit (not shown) whose operation of the laser supply unit 54 can be controlled by software. By including the control unit, the laser supply unit 54 includes the irradiation state of the laser supplied by the laser supply unit 54, the output of the laser supplied by the laser supply unit 54, the pulse width of the laser supplied by the laser supply unit 54, and the laser supply. The operation of the laser supply unit 54 exemplified by the pulse frequency of the laser supplied by the unit 54 can be controlled by software. When the laser supply unit 54 includes a control unit, it is preferable that the control unit has an operation means (interface) for an operation for controlling the operation of the laser supply unit 54. Since the control unit has an operation means for controlling the operation of the laser supply unit 54, the user can perform an operation for controlling the operation of the laser supply unit 54 via the operation means. The operating means is not particularly limited, and may be, for example, conventional operating means exemplified by a touch screen, a touch panel, various switches, and the like. When the laser supply unit 54 includes a control unit, it is preferable that the control unit has a display means capable of displaying information regarding the operation of the laser supply unit 54. Since the control unit has the display means, the user can confirm the information regarding the operation of the laser supply unit 54 via the display means. The display means is not particularly limited, and may be a conventional display means exemplified by a touch screen, a touch panel, a liquid crystal display, an organic EL display, a light emitting diode, a lamp, or the like.

[Suction unit 55]
The suction unit 55 is a member configured to be able to suck an object to be sucked and / or a gas to be sucked including the object to be sucked through the nozzle 4. The suction unit 55 is not particularly limited as long as it is a member configured to be able to suck the suction target or the like via the nozzle 4, and is configured to be able to suck the suction target or the like of the prior art exemplified by the dust collector. It is composed of the members.

The suction unit 55 preferably includes a filter capable of collecting the suction target. By providing the suction unit 55 with a filter capable of collecting the suction target, it is possible to suppress the scattering of the harmful substance contained in the suction target when the suction target contains the harmful substance. The filter capable of collecting the suction target is not particularly limited, and may be, for example, a filter conforming to the HEPA filter specifications and / or a filter containing activated carbon.

It is preferable that the suction unit 55 can suck an object to be sucked through the transfer unit 44. Since the suction unit 55 can suck the suction object or the like via the transfer unit 44, the nozzle 4 can suck the suction target at a place away from the suction unit 55.

The output of the suction unit 55 is not particularly limited. The lower limit of the output of the suction unit 55 is preferably 1 kW or more, more preferably 2 kW or more, and further preferably 3 kW or more. By setting the lower limit of the output of the suction unit 55 as described above, the suction target or the like can be sucked more reliably. The upper limit of the output of the suction unit 55 is preferably 50 kW or less, more preferably 20 kW or less, and further preferably 10 kW or less. By setting the upper limit of the output of the suction unit 55 as described above, it is possible to prevent accidentally sucking the irradiation target or the like.

The differential pressure from the atmospheric pressure when the suction unit 55 sucks the object to be sucked is not particularly limited. The upper limit of the differential pressure is preferably 80 kPa or less, more preferably 60 kPa or less, and further preferably 50 kPa or less. By setting the upper limit of the differential pressure as described above, it is possible to prevent accidentally sucking the irradiation target or the like. The lower limit of the differential pressure is preferably 10 kPa or more, more preferably 15 kPa or more, and further preferably 20 kPa or more. By setting the lower limit of the differential pressure as described above, the suction target or the like can be sucked more reliably.

[Cooling unit 56]
Although not an essential aspect, it is preferable that the laser irradiation support vehicle 5 includes a cooling unit 56 capable of cooling the laser irradiation support vehicle 5. By providing the laser irradiation support vehicle 5 with a cooling unit 56 capable of cooling the laser irradiation support vehicle 5, the temperature of the laser irradiation support vehicle 5 can be kept close to normal temperature. As a result, with respect to the laser oscillator included in the laser supply unit 54, it is possible to prevent performance deterioration, failure, and / or damage of the laser oscillator due to high temperature. Since the laser irradiation support vehicle 5 includes the cooling unit 56, the user of the laser irradiation device 1 can use the laser irradiation device 1 in a more comfortable environment. The cooling unit 56 is not particularly limited as long as it can cool the laser irradiation support vehicle 5, but it is preferable that the cooling unit 56 is a cooling unit capable of cooling the temperature of the laser irradiation support vehicle 5 to 40 ° C. or lower. Since the cooling unit 56 is a cooling unit capable of cooling the temperature of the laser irradiation support vehicle 5 to 40 ° C. or lower, it is possible to further prevent performance deterioration, failure, and / or damage of the laser oscillator due to high temperature. Further, the user of the laser irradiation device 1 can use the laser irradiation device 1 in a more comfortable environment.

It is preferable that the cooling unit 56 can dehumidify the laser irradiation support vehicle 5. Since the cooling unit 56 can dehumidify the laser irradiation support vehicle 5, the humidity of the laser irradiation support vehicle 5 can be lowered, and the laser supply unit 54 and the like can be prevented from being corroded and / or oxidized due to high humidity. Further, the user of the laser irradiation device 1 can use the laser irradiation device 1 in a more comfortable environment. When the cooling unit 56 can dehumidify the laser irradiation support vehicle 5, the cooling unit 56 is preferably a cooling unit capable of reducing the humidity of the laser irradiation support vehicle 5 to 60% or less, and is preferably a laser irradiation support vehicle. A cooling unit capable of reducing the humidity of 5 to 50% or less is more preferable, and a cooling unit capable of reducing the humidity of the laser irradiation support vehicle 5 to 40% or less is further preferable. Since the cooling unit 56 is a cooling unit capable of lowering the humidity of the laser irradiation support vehicle 5 to the above-mentioned humidity or less, it is possible to further prevent the laser supply unit 54 and the like from being corroded and / or oxidized due to high humidity. ..

The cooling unit 56 preferably includes a conventional cooling member capable of supplying a liquid having a temperature lower than normal temperature to the laser supply unit 54, which is exemplified by a chiller or the like. Since the cooling material supply unit includes a cooling member capable of supplying a liquid having a temperature lower than normal temperature, the laser oscillator included in the laser supply unit 54 can be effectively cooled by using the liquid having a specific heat higher than that of the gas.

[Coolant supply unit]
The coolant supply unit is a member capable of supplying the coolant to the irradiation unit 24. By including the coolant supply unit, the coolant can be supplied to the irradiation unit 24 and the irradiation unit 24 can be cooled. The coolant supply unit is not particularly limited as long as it is a member capable of supplying the coolant to the irradiation unit 24. It is preferable that the coolant supply unit can supply the coolant to the irradiation unit 24 via the transmission unit 23. Since the coolant supply unit can supply the coolant to the irradiation unit 24 via the transmission unit 23, the irradiation unit 24 located at a location away from the coolant supply unit can be cooled.

The cooling material is not particularly limited, and is, for example, a gas having a temperature lower than the temperature of the irradiation unit 24 when irradiating the laser (for example, air having a temperature lower than normal temperature or normal temperature, or dry air having a temperature lower than normal temperature or normal temperature). And / or a conventional cooling material containing a liquid (for example, water having a temperature lower than normal temperature or normal temperature or purified water having a temperature lower than normal temperature or normal temperature) may be used. By including the gas having a temperature lower than the temperature of the irradiation unit 24 when the coolant irradiates the laser, it is possible to cool the portion where the pipe or the like for circulating the coolant cannot be installed. By including the dry air having a temperature lower than the temperature of the irradiation unit 24 when the coolant irradiates the laser, the irradiation unit 24 can be cooled without the irradiation unit 24 being damaged by the moisture contained in the gas. By including the liquid having a temperature lower than the temperature of the irradiation unit 24 when the cooling material irradiates the laser, the irradiation unit 24 can be cooled more effectively.

When the cooling material contains air and / or dry air (hereinafter, also referred to as air or the like), it is preferable that the cooling material supply unit includes a cooling member capable of supplying air or the like of the prior art exemplified by a compressor or the like. .. Since the coolant supply unit includes a cooling member capable of supplying air or the like, the irradiation unit 24 can be cooled by using air or the like. When the cooling material supply unit includes a compressor, the lower limit of the output of the compressor is preferably 0.5 kW or more, more preferably 1 kW or more, and further preferably 1.5 kW or more. By setting the lower limit of the output of the compressor as described above, the irradiation unit 24 can be cooled more effectively. When the cooling material supply unit includes a compressor, the lower limit of the amount of air or the like that can be discharged by the compressor is preferably 0.05 cubic meters or more per minute, more preferably 0.1 cubic meters or more per minute. It is more preferably 0.15 cubic meters or more per minute. By setting the lower limit of the amount of air or the like that can be discharged by the compressor as described above, the irradiation unit 24 can be cooled more effectively. When the coolant is dry air, the coolant supply unit preferably includes a dryer capable of removing the moisture contained in the dry air. The coolant supply unit includes a dryer capable of removing the moisture contained in the dry air, so that the dry air can be kept even drier. When the coolant is dry air, it is preferable that the coolant supply unit is provided with a filter capable of collecting foreign substances exemplified by dust, dust, dust and the like from the air and the like. By providing the coolant supply unit with a filter capable of collecting foreign matter, it is possible to prevent the irradiation unit 24 from being damaged and / or malfunctioning due to foreign matter being mixed into the air or the like used as the coolant.

When the cooling material contains a liquid having a temperature lower than normal temperature, it is preferable that the cooling material supply unit includes a conventional cooling member capable of supplying a liquid having a temperature lower than normal temperature, which is exemplified by a chiller or the like. Since the cooling material supply unit includes a cooling member capable of supplying a liquid having a temperature lower than normal temperature, the irradiation unit 24 can be cooled more effectively than when only a gas having a specific heat smaller than that of the liquid is used as the cooling material.

<< Portable Laser Irradiation System P >>
FIG. 13 is a schematic front view showing an example of the portable laser irradiation system P according to the present embodiment. The portable laser irradiation system P includes the above-mentioned laser irradiation device 1, a laser irradiation support device 6 which is configured to be portable and can supply a laser to the irradiation unit 24 of the laser irradiation device 1, and a nozzle 4 of the laser irradiation device 1. It is configured to include a suction device 7 capable of sucking a suction object sucked by the laser.

<Laser irradiation support device 6>
When the laser irradiation device 1 is installed and used in a facility exemplified by a factory or a workplace, the width, depth, or height of one or more is large, the weight is large, and the laser irradiation device 1 is fixed in a specific place. / Or It is difficult to irradiate an irradiation target that is difficult to move to a facility due to circumstances such as the quality of the laser being impaired by vibrations associated with the movement. Therefore, there is room for improvement in configuring the device that supplies the laser to the laser irradiation device 1 so that the laser can be irradiated to the irradiation target that is difficult to move to the facility.

The portable laser irradiation system P is configured to be portable, and the portable laser irradiation system P can be moved by including a laser irradiation support device 6 capable of supplying a laser to the irradiation unit 24 of the laser irradiation device 1. The laser can be applied to an irradiation target that is difficult to move to the facility where the laser irradiation device 1 is installed.

In the present embodiment, the laser irradiation support device 6 is housed in a movable device main body 61, a power supply unit 62 housed in the device body 61 and capable of supplying electric power, and housed in the device body 61 and supplied by the power supply unit 62. It is configured to include a laser supply unit 63 capable of supplying a laser using the generated electric power.

The weight of the laser irradiation support device 6 is not particularly limited. The lower limit of the weight of the laser irradiation support device 6 is preferably 5 kg or more, more preferably 10 kg or more, and further preferably 15 kg or more. By defining the lower limit of the weight of the laser irradiation support device 6 as described above, the configuration may include a relatively large laser supply unit 63 capable of supplying a high-power laser.

The upper limit of the weight of the laser irradiation support device 6 is preferably 30 kg or less, more preferably 25 kg or less, and further preferably 20 kg or less. By setting the upper limit of the weight of the laser irradiation support device 6 as described above, the transporter carrying the laser irradiation support device 6 may be able to carry the laser irradiation support device 6.

[Device main body 61]
The apparatus main body 61 is not particularly limited as long as it can accommodate and move each component constituting the laser irradiation support portable body 6, and may be a main body using a conventional accommodation member exemplified by an accommodation case or the like. .. Since the laser irradiation support device 6 includes the device main body 61, the portable laser irradiation system P can be configured to be movable.

[Control unit]
The apparatus main body 61 preferably includes a control unit (not shown) whose operation of the laser supply unit 63 can be controlled by software. When the apparatus main body 61 includes the control unit, the irradiation state of the laser supplied by the laser supply unit 63, the output of the laser supplied by the laser supply unit 63, the pulse width of the laser supplied by the laser supply unit 63, and the laser supply unit. The operation of the laser supply unit 63 exemplified by the pulse frequency of the laser supplied by the 63 can be controlled by software. When the device main body 61 includes a control unit, it is preferable that the control unit has an operation means (interface) for an operation for controlling the operation of the laser supply unit 63. Since the control unit has an operation means for controlling the operation of the laser supply unit 63, the user can perform an operation for controlling the operation of the laser supply unit 63 via the operation means. The operating means is not particularly limited, and may be, for example, conventional operating means exemplified by a touch screen, a touch panel, various switches, and the like. When the apparatus main body 61 includes a control unit, it is preferable that the control unit has a display means capable of displaying information regarding the operation of the laser supply unit 63. Since the control unit has the display means, the user can confirm the information regarding the operation of the laser supply unit 63 via the display means. The display means is not particularly limited, and may be a conventional display means exemplified by a touch screen, a touch panel, a liquid crystal display, an organic EL display, a light emitting diode, a lamp, or the like.

[Power supply unit 62]
The power supply unit 62 is not particularly limited as long as it is a power supply configured to be able to supply electric power to the laser irradiation member 2 and / or the laser supply unit 63 and the like, and may be a conventional power source. When the laser irradiation support device 6 includes the power supply unit 62, electric power can be supplied to the laser irradiation member 2 and / or the laser supply unit 63 and the like. The power supply unit 62 is preferably a power supply unit that uses electric power supplied from an AC power source exemplified by a commercial power source or the like. Since the power supply unit 62 is a power supply unit that uses electric power supplied from an AC power source, the power supply unit 62 easily converts the voltage of the electric power into a voltage suitable for the laser irradiation member 2 and / or the laser supply unit 63 and the like. Can be. The AC power supply that supplies power to the power supply unit 62 is not particularly limited, and for example, a commercial power supply having a voltage of 100 V or more and 240 V or less and a frequency of 50 Hz or more and 60 Hz or less, or an in-vehicle power supply having substantially the same voltage and frequency as the commercial power supply. Examples include AC power supplies that can supply power.

[Laser supply unit 63]
The laser supply unit 63 is a member configured to be able to supply a laser to the irradiation unit 24 of the laser irradiation member 2. When the irradiation unit 24 is a member configured to be capable of irradiating a laser transmitted from a laser supply unit configured separately from the laser irradiation member 2 by providing the laser supply unit 63, the irradiation unit 24 has a laser. Can be supplied. As a result, even if the size and / or weight of the laser irradiation member 2 is limited, the irradiation unit 24 can irradiate a high-power laser that requires a relatively large laser supply unit 63.

The laser supply unit 63 is not particularly limited as long as it can supply the laser to the irradiation unit 24 of the laser irradiation member 2. The laser supply unit 63 includes a laser oscillator similar to the laser oscillator that the laser supply unit 54 may include. When the laser irradiation device 1 includes the transmission unit 23, it is preferable that the laser supply unit 63 can supply the laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23. Since the laser supply unit 63 can supply the laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23, the laser irradiation member 2 can irradiate the laser at a place away from the laser irradiation unit 63.

<Suction device 7>
The suction device 7 is a device configured to be able to suck an object to be sucked and / or a gas to be sucked including the object to be sucked through the nozzle 4, and may have the same configuration as the suction unit 55. The suction device 7 may be, for example, a dust collector configured to be able to suck the suction target and / or the suctioned gas including the suction target.

<< Usage example of laser irradiation device 1 >>
FIG. 14 is a schematic view showing an example of how to use the laser irradiation device 1. FIG. 15 is an enlarged view of the periphery of the laser L in FIG. Hereinafter, an example of using the laser irradiation device 1 of the present embodiment will be described with reference to FIGS. 14 and 15.

[Removal from transport members]
The user of the laser irradiation device 1 (hereinafter, also simply referred to as a user) takes out the laser irradiation device 1 from the transport member. The user places the laser irradiation device 1 in a stable place. By placing the laser irradiation device 1 in a stable place by the user, it is possible to prevent the laser irradiation device 1 from tipping over.

[Connection to power supply]
The user directs the irradiation direction of the laser L to a direction in which combustibles and other workers do not exist, and then connects the laser irradiation device 1 to the power supply. By directing the irradiation direction of the laser to a direction in which flammable materials and other workers do not exist, and then connecting the laser irradiation device 1 to the power supply, even if the laser L is irradiated when connected to the power supply, the laser L Can prevent flammable materials from igniting and / or causing great damage to other workers and the like.

[Accommodation of lens F]
The user of the laser irradiation device 1 attaches, for example, (a) the top surface side main body portion 311 to the laser irradiation member 2, and (b) the lens via the top surface side opening O2 provided in the top surface side main body portion 311. F is attached to the laser irradiation member 2, (c) the bottom side main body 312 is attached to the top side main body 311 so as to accommodate the lens F in the main body 31, and (d) the nozzle main body according to the focal length of the lens F. The lens F is accommodated in the lens accommodating member 3 by a series of procedures for attaching the 41 to the nozzle 4. As a result, the lens F shown in FIG. 15 is accommodated in the lens accommodating member 3. In a state where the lens F is housed in the lens housing member 3, the lens F housed in the main body 31 and the bottom surface 31B, the left side surface 31L, and the right side surface 31R of the lens housing member 3 form the inside of the lens housing member 3. A space C is defined. The method of attaching the top surface side main body portion 311 to the laser irradiation member 2 in the procedure (a) is not particularly limited, and the method of arranging the laser irradiation member 2 and the top surface side main body portion 311 together with the laser irradiation member 2 A method of attaching the top surface side main body 311 to the laser irradiation member 2 such as a method of screwing the top surface side main body 311 and a method of screwing the laser irradiation member 2 and the top surface side main body 311 may be used.

When the lens F is not attached, the laser L is not focused by the lens F and travels substantially in parallel, so that the effect of heating by the irradiation of the laser L is reduced. When the focal length of the lens F and the distance from the lens F to the irradiation target T match, the effect of heating by the irradiation of the laser L is maximized. Further, when the focal length of the lens F and the distance from the lens F to the irradiation target T do not match, the effect of heating by the irradiation of the laser L becomes small.

In the procedure (a) relating to the accommodation of the lens F, the user attaches the top surface side main body portion 311 to the laser irradiation member 2 to which the lens F is not attached. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

In the procedure (b) relating to the accommodation of the lens F, the user may touch the vicinity of the lens F and / or the top surface side main body portion 311. Since the distance from the lens F to these positions and the focal length of the lens F do not match, the effect of heating by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

In the procedure (c) relating to the accommodation of the lens F, the user may touch the vicinity of the lens F, the top surface side main body portion 311 and / or the bottom surface side main body portion 312. Since the distance from the lens F to these positions and the focal length of the lens F do not match, the effect of heating by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

In the procedure (d) relating to the accommodation of the lens F, the user can touch the vicinity of the attachment / detachment portion 45. Since the distance from the lens F to the vicinity of the attachment / detachment portion 45 and the focal length of the lens F do not match, the effect of heating by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

[Wearing protective goggles]
The user wears protective goggles. By wearing protective goggles, the user can prevent blindness and / or eye damage due to the laser L and / or the reflected laser R when the laser L and / or the reflected laser R is irradiated in the vicinity of the eyes. ..

[Irradiation of laser L]
Return to FIG. The user holds the laser irradiation member 2 by using the holding portion 21, so that the suction port O3 is in the vicinity of the irradiation target T, and the irradiation point of the laser L irradiated by the laser irradiation member 2 substantially coincides with the irradiation target T. The laser irradiation member 2 is moved to. The user operates the operation unit 22 to irradiate the irradiation target T with the laser L. As a result, the laser L is irradiated to the irradiation target T, and the residue evaporated from the irradiation target T can become the fume H. Further, a part of the laser L becomes a reflected laser R and can be scattered in various directions including the direction of the lens accommodating member 3.

By irradiating the irradiation target T with the laser L, when the irradiation target T is a deposit attached to the surface of the material, the deposit can be heated and evaporated and / or peeled off from the surface of the material. Further, when the irradiation target T is a metal, a part of the evaporated irradiation target T can become plasma. By combining this plasma with oxygen contained in the atmosphere, oxidizing it, and adhering it to the surface of the irradiation target T, a stable oxide film can be formed on the surface of the irradiation target T. As a result, the irradiation target T can be provided with a rust-preventive effect and / or a corrosion-resistant effect.

While irradiating the irradiation target T with the laser L, the user may switch the irradiation pattern of the laser L by using the operation unit 22. While irradiating the irradiation target T with the laser L, the user may change the output of the laser L by using the operation unit 22. While irradiating the irradiation target T with the laser L, the user may change the irradiation direction of the laser L by using the operation unit 22.

[Suction of Hume H]
As shown in FIG. 15, a part of the fume H can be the fume H1 around the irradiation target in the vicinity of the irradiation target T. If the fume H1 around the irradiation target adheres to the irradiation target T, the quality of the irradiation target T may be impaired.

Since the hollow nozzle body 41 provided with the suction port O3 capable of sucking the fume H (object to be sucked) generated during laser processing, the fume H1 around the irradiation target can be sucked and collected at the suction port O3. .. When the fume H1 around the irradiation target is viewed from the direction in which suction is possible, the length of the suction port O3 in the longitudinal direction is four times or more the length in the lateral direction. When the gas passes through the suction port O3 from the outside of the nozzle 4, the cross-sectional area of the flow path through which the suctioned gas flows becomes small. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the gas to be sucked can be increased. Therefore, it is possible to improve the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked.

Further, the structure 42 may reduce the cross-sectional area of the flow path through which the suctioned gas flows. As a result, when the suctioned gas containing the fume H1 around the irradiation target passes around the structure 42, the cross-sectional area of the flow path through which the fluid flows becomes small. Then, when the cross-sectional area of the flow path through which the fluid flows is reduced, a Venturi effect is generated in which the speed of the fluid flow increases, and the speed of the flow of the gas to be sucked can be further increased. Therefore, it is possible to improve the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked.

The structure 42 can resist the flow of the gas to be sucked and adiabatically compress the gas to be sucked. Then, the temperature of the gas to be sucked may rise due to the adiabatic compression. As a result, when the flow of the gas to be sucked is a subsonic flow, the flow of the gas to be sucked is accelerated, and the effect of further increasing the speed can be produced. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked can be improved.

When the structure 42 is attached to a place different from both ends of the suction port O3, the structure 42 divides the flow of the suctioned gas into a plurality of flows, and for each of the divided flows, the cross-sectional area of the flow path. Can be made smaller. Then, when the cross-sectional area of the flow path through which the fluid flows is reduced, a Venturi effect is generated in which the speed of the fluid flow increases, and the speed of the flow of the gas to be sucked can be further increased. Therefore, it is possible to improve the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked.

When the structure 42 is attached to a place different from both ends of the suction port O3, the structure 42 divides the flow of the sucked gas into a plurality of flows, and insulates the sucked gas for each of the divided flows. Can be compressed. As a result, the suctioned gas can be adiabatically compressed more efficiently and its temperature can be raised. As a result, when the flow of the gas to be sucked is a subsonic flow, the flow of the gas to be sucked is accelerated, and the effect of further increasing the speed may be further produced. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked can be improved.

When the suctioned gas containing the irradiation target peripheral fume H1 sucked from the suction port O3 enters the narrow portion 41B from the wide portion 41A, the cross-sectional area of the flow path through which the suctioned gas flows becomes small. This causes a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of the flow path through which the fluid flows is reduced, and the speed of the flow of the gas to be sucked can be further increased. Therefore, it is possible to improve the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked.

In the flow of a compressible fluid such as a gas, when the cross-sectional area of the flow path through which the fluid flows is reduced, adiabatic compression may occur in which the fluid is compressed without exchanging heat with the outside. Further, in the flow of a compressible fluid such as a gas, it is known that the flow accelerates when the temperature of the fluid rises when the flow is a subsonic flow.

When the sucked gas containing the fume H1 around the irradiation target enters the narrow portion 41B from the wide portion 41A, the sucked gas is adiabatically compressed, and the temperature of the sucked gas may rise. As a result, when the flow of the gas to be sucked is a subsonic flow, the flow of the gas to be sucked is accelerated, and the effect of further increasing the speed can be produced. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the fume H1 around the irradiation target contained in the gas to be sucked can be improved.

[Movement of Hume H]
Since the fume H is formed from the residue evaporated from the irradiation target T, it has a temperature higher than the temperature around the irradiation target T. As a result, the gas around Hume H is heated and can become an updraft. Therefore, a part of the fume H may rise due to the updraft and move to the periphery of the lens accommodating member 3 to become the fume H2 around the lens accommodating member 3.

By accommodating the lens F in the main body 31, it is possible to prevent the fume H2 around the lens accommodating member from adhering to the lens F.

By the way, since the laser L can pass from the top surface 31T toward the bottom surface 31B via the main body portion 31 and the bottom surface side opening O1 is provided on the bottom surface 31B, when the lens F is housed in the main body portion 31. The laser L can be applied to the object through the bottom opening O1. Then, the lens accommodating member peripheral fume H2 invades the bottom surface side opening O1 from the outside of the lens accommodating member 3 toward the space C inside the lens accommodating member 3, and the lens accommodating member peripheral fume H2 adheres to the lens F. Can cause you to do.

As shown in FIG. 15, since the gas introduction unit 32 introduces the first gas G1 into the space C, the first gas G1 introduced into the space C is located on the bottom surface side from the space C toward the outside of the lens accommodating member 3. It becomes the flow of the first gas G1 passing through the opening O1. Flow direction of the first gas G1 Due to the flow of the first gas G1 flowing in the FD1, the lens accommodating member peripheral fume H2 located in the vicinity of the bottom surface side opening O1 outside the lens accommodating member 3 is moved away from the bottom surface side opening O1. Be pushed. Thereby, it is possible to prevent the presence of the bottom surface side opening O1 from causing the fume H to adhere to the lens F.

In addition, by suppressing the adhesion of the fume H to the housed lens F, the fume H adhering to the housed lens F can absorb the laser L and reduce the temperature rise of the housed lens F. By reducing the temperature rise of the housed lens F, it is possible to prevent distortion, deformation, and / or breakage of the lens F due to heat.

By further including the gas delivery unit 33, the second gas G2 delivered in the direction FD2 substantially orthogonal to the flow direction FD1 of the first gas G1 absorbs the laser L irradiated through the bottom surface side opening O1. The fumes H2 around the lens accommodating member at the obtained position can be pushed in a direction substantially orthogonal to the direction of the laser L passing through the bottom surface side opening O1 and moved to a position where the laser L is not absorbed. Therefore, the adverse effect of the fume H2 around the lens accommodating member on the irradiation of the laser L can be further reduced.

[Dispersion of reflected laser R]
Return to FIG. A part of the laser L irradiated to the irradiation target T becomes a reflected laser R and can be scattered in various directions including the direction of the lens accommodating member 3. When the reflected laser R reflected by the irradiation target T of the laser L heads toward the lens accommodating member 3, the temperature of the lens accommodating member 3 may rise due to the reflected laser R. The lens accommodating member 3 whose temperature has risen can heat the accommodating lens F by radiant heat and / or heat conduction from the lens accommodating member 3 and raise the temperature of the accommodating lens F.

Since the main body 31 has a reflected laser dispersion structure D on the bottom surface 31B capable of dispersing the reflected laser R reflected by the irradiation target T of the laser L, the reflected laser R is dispersed by the reflected laser dispersion structure D, and the reflected laser R is dispersed. It is possible to reduce the temperature rise of the lens accommodating member 3 due to the above. Thereby, the temperature rise of the housed lens F can be reduced. By reducing the temperature rise of the housed lens F, it is possible to prevent distortion, deformation, and / or breakage of the lens F due to heat.

[Cooling of irradiation target T]
Although it is not an essential embodiment, when the irradiation target T is irradiated with the laser L, a cooling gas exemplified by carbon dioxide gas, LP gas, nitrogen gas, helium gas or the like is injected onto the irradiation target T, and the irradiation target T is irradiated. The temperature of the gas may be lowered. As a result, the temperature rise of the irradiation target T can be reduced, and the quality deterioration of the irradiation target T due to the high temperature can be prevented.

[Replacement of lens F]
The user can replace the lens F according to the shape of the irradiation target T and the like. For example, the user removes (A) the nozzle main body 41 from the nozzle 4, (B) removes the bottom surface side main body portion 312 from the top surface side main body portion 311 and (C) removes the lens F before replacement from the laser irradiation member 2. The removed lens F is attached to the laser irradiation member 2 via (D) the top surface side opening O2 provided in the top surface side main body portion 311, and the replaced lens F is housed in (E) the main body portion 31. A series of procedures and / or a lens replacement operation unit 25 for attaching the bottom surface side main body portion 312 to the top surface side main body portion 311 and (F) attaching the nozzle main body 41 to the nozzle 4 according to the focal length of the lens F after replacement. The lens F is replaced by a procedure for replacing the lens F used for laser irradiation using the lens F.

In the procedure (A) relating to the replacement of the lens F, the user can touch the vicinity of the attachment / detachment portion 45. Since the distance from the lens F to the vicinity of the attachment / detachment portion 45 and the focal length of the lens F do not match, the effect of heating by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

In the procedure (B) relating to the replacement of the lens F, the user may touch the vicinity of the lens F, the top surface side main body portion 311 and / or the bottom surface side main body portion 312. Since the distance from the lens F to these positions and the focal length of the lens F do not match, the effect of heating by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

In the procedure (C) relating to the replacement of the lens F, the user may touch the vicinity of the lens F and / or the top surface side main body portion 311. Since the distance from the lens F to these positions and the focal length of the lens F do not match, the effect of heating by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the effect of heating by the laser L irradiation is small, and it is possible to prevent the user's hand from being seriously damaged.

The procedures (D) to (F) relating to the replacement of the lens F are the same as the procedures (b) to (d) relating to the accommodation of the lens F.

In the procedure of exchanging the lens F used for laser irradiation by using the lens exchange operation unit 25, the user does not touch the position where the laser L is irradiated. Therefore, it is possible to prevent the laser L from causing great damage to the user's hand.

[End of laser irradiation]
The user ends the irradiation of the laser L via the operation unit 22. The user removes the laser irradiation device 1 from the power supply. The user accommodates the laser irradiation device 1 in the transport member.

According to the present embodiment, the lens accommodating member capable of further suppressing the adhesion of fume H to the optical component, reducing the temperature rise of the optical component, and preventing distortion, deformation, and / or breakage of the optical component. 3 can be provided.

Further, according to the present embodiment, it is possible to provide a nozzle 4 capable of improving the suction force.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments. Further, the effects described in the embodiments of the present invention are merely a list of the most suitable effects arising from the present invention, and the effects according to the present invention are limited to those described in the embodiments of the present invention. It's not a thing.

Further, the above-described embodiments have been described in detail in order to explain the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the described configurations.

1 Laser irradiation device 2 Laser irradiation member 21 Holding unit 22 Operation unit 23 Transmission unit 24 Irradiation unit 25 Lens replacement operation unit 3 Lens accommodation member 31 Main unit 311 Top surface side Main unit 312 Bottom surface side Main unit 31T Top surface 31B Bottom surface 31L Left side Surface 31R Right side 32 Gas introduction section 33 Gas delivery section 4 Nozzle 41 Nozzle body 41A Wide section 41B Narrow section 42 Structure 43 Upper suction section 44 Transfer section 45 Detachment section 5 Laser irradiation support vehicle 51 Vehicle body 52 Power supply section 53 Transmission Part 54 Laser supply part 55 Suction part 56 Cooling part 6 Laser irradiation support device 61 Device main body 62 Power supply part 63 Laser supply part 7 Suction device C Space D Reflection laser dispersion structure F Lens G1 First gas G2 Second gas H Fume H1 Irradiation Target peripheral fume H2 Peripheral fume of lens accommodating member L Laser irradiation direction N Pore O1 Bottom side opening O2 Top surface side opening O3 Suction port O4 Upper suction port O5 Confluence port O6 Upper opening P Portable laser irradiation system R Reflective laser S Mobile Laser irradiation system T Irradiation target

Claims (6)

A lens accommodating member having a lens accommodating portion capable of accommodating a lens used for irradiating a laser and allowing the laser to pass through the lens accommodating portion from the top surface portion to the bottom surface portion.
Further provided with a gas introduction section capable of introducing gas toward the space defined by the lens accommodating portion, the bottom surface portion, and the side surface portion.
A lens accommodating member having an opening provided in the bottom surface portion and capable of passing the gas from the space toward the outside of the lens accommodating member through the opening. The lens accommodating member according to claim 1, wherein the temperature of the gas introduced into the space is lower than the temperature of the space when the laser is irradiated. The lens accommodating member according to claim 1 or 2, wherein the gas is an inert gas. The lens accommodating member according to any one of claims 1 to 3, further comprising a gas delivery unit provided in the vicinity of the bottom surface portion and capable of delivering gas in a direction substantially orthogonal to the flow direction of the gas. The lens accommodating member according to any one of claims 1 to 4, wherein a laser irradiation device can be attached to the top surface portion. The lens accommodating member according to any one of claims 1 to 5, wherein the bottom surface portion has a structure capable of dispersing the reflected laser reflected by the irradiation target of the laser.

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