JP2022054206A - Grinding device - Google Patents

Abstract

To provide a technology that improves flow of grinding dust and a grinding liquid in a pan of a housing when an interior of the housing is partitioned into four rooms.SOLUTION: A grinding device includes: chucks; a table; a housing; a fixed partition wall; a tool drive part; and a nozzle. The fixed partition wall partitions an interior of the housing into four rooms around a rotation center line of the table. The tool drive part drives a grinding tool pressed to a substrate in the room. The nozzle supplies a grinding liquid to the substrate in the room. The housing includes a pan which is located below the chucks and receives the grinding liquid and the grinding dust which drop thereon. The pan has two inclined surfaces, which incline downward as a distance from a border line between the two adjacent rooms and the other two rooms increases, on its upper surface.SELECTED DRAWING: Figure 10

Description

The present disclosure relates to a grinding device.

The processing apparatus described in Patent Document 1 includes a turntable, a pair of holding tables, processing means, and a water case. The water case has an opening that exposes the turntable, receives the processing waste liquid containing the processed waste of the workpiece flowing down from the turntable, and drains it from the drain port.

The grinding apparatus described in Patent Document 2 is a turntable in which a holding table, a grinding means for supplying grinding water for grinding, and two or more holding tables are arranged at an equal angle around a rotation axis. And a table cover that covers the upper surface of the turntable. The upper surface of the table cover is inclined downward from the rotation axis toward the outer peripheral direction. Grinding water is discharged from the outlet of the water case. For the grinding debris, a net for collecting the grinding debris mixed in the grinding water is set at the discharge port of the water case. Grinding debris is removed from the net as appropriate.

The flat surface processing apparatus described in Patent Document 3 has a partition plate. The partition plate is fixed to the index table and is formed in a cross shape so as to partition the four chucks installed on the index table. The flattening apparatus has a casing that houses a chuck and an index table, and grinds the substrate with a grindstone while supplying the grinding fluid to the substrate inside the casing. Brushes are attached to the top and sides of the casing. The brush contacts the top and sides of the divider when the chuck is in the machining position.

Japanese Unexamined Patent Publication No. 2017-22215 Japanese Unexamined Patent Publication No. 2013-188813 JP-A-2010-124006

One aspect of the present disclosure provides a technique for improving the flow of grinding debris and grinding fluid in the pan of a housing when the interior of the housing is partitioned into four chambers.

The grinding apparatus according to one aspect of the present disclosure includes a plurality of chucks, a table, a housing, a fixed partition wall, a tool drive unit, and a nozzle. The chuck holds the substrate. The table holds a plurality of the chucks around the rotation center line and rotates around the rotation center line. The housing accommodates a plurality of the chucks. The fixed partition wall partitions the inside of the housing into four rooms around the rotation center line of the table. The tool drive unit drives a grinding tool pressed against the substrate inside the room. The nozzle supplies the grinding fluid to the substrate inside the room. The housing is located below the plurality of chucks and includes a pan that receives the falling grinding fluid and grinding debris. The pan has two inclined surfaces on its upper surface, which are inclined downward so as to be separated from the boundary line between the two adjacent rooms and the remaining two rooms.

According to one aspect of the present disclosure, when the inside of the housing is divided into four rooms, the flow of grinding debris and grinding fluid in the pan of the housing can be improved.

FIG. 1 is a plan view showing the grinding apparatus according to the embodiment through the upper surface panel of the housing. FIG. 2 is a cross-sectional view showing an example of a tool drive unit. FIG. 3 is a perspective view showing an example of the loading / unloading chamber of the housing. 4 (A) is a view showing an example of a fixed partition wall, FIG. 4 (B) is a view seen from the direction of arrow B of FIG. 4 (A), and FIG. 4 (C) is a view of FIG. 4 (A). It is a view seen through the side wall from the arrow C direction of FIG. 4, and FIG. 4D is a cross-sectional view taken along the line DD of FIG. 4C. FIG. 5 is a cross-sectional view showing an example of a chuck cover, a table cover, and a base cover. 6 (A) is a top view showing an example of the inner cylinder portion shown in FIG. 5, and FIG. 6 (B) is a top view showing an example of a state in which a part of the inner cylinder portion of FIG. 6 (A) is removed. Is. FIG. 7 is a cross-sectional view showing an example of a state in which a part of the inner cylinder portion shown in FIG. 5 is removed. FIG. 8 is a plan view showing an example of the flow of the cleaning liquid. 9 (A) is a cross-sectional view showing an example of an exhaust box, which is a cross-sectional view taken along the line AA of FIG. 9 (B), and FIG. 9 (B) is in the direction of arrow B of FIG. 9 (A). It is a figure which shows an example of a side panel and a fixed partition wall seen from the side. 10 (A) is a cross-sectional view showing an example of bread seen from the X-axis direction, and FIG. 10 (B) is a cross-sectional view showing an example of bread seen from the negative direction of the Y-axis, FIG. 10 (C). Is a cross-sectional view showing an example of a pan seen from the positive direction of the Y axis. FIG. 11 is a plan view showing an example of the housing and the tool drive unit shown in FIG. FIG. 12 is a plan view showing an example of the arrangement of the liquid level sensor. FIG. 13 is a cross-sectional view taken along the line XIII-XIII of FIG. 14 (A) is a perspective view showing an example of the exterior of the grinding device, and FIG. 14 (B) is a perspective view showing an example of the recovery unit. FIG. 15 (A) is a cross-sectional view showing an example of a storage destination of grinding chips, and FIG. 15 (B) is a cross-sectional view showing an example of a storage destination after switching.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In each drawing, the same or corresponding configurations may be designated by the same reference numerals and description thereof may be omitted. In the present specification, the X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other. The X-axis direction and the Y-axis direction are the horizontal direction, and the Z-axis direction is the vertical direction.

First, the grinding apparatus 1 will be described with reference to FIG. The grinding device 1 grinds the substrate W. The substrate W includes a semiconductor substrate such as a silicon wafer or a compound semiconductor wafer, or a glass substrate. The substrate W may further include a device layer formed on the surface of the semiconductor substrate or the glass substrate. The device layer includes electronic circuits. Further, the substrate W may be a polymerized substrate in which a plurality of substrates are joined. Grinding involves polishing. The grinding device 1 includes, for example, a table 10, four chucks 20, three tool driving units 30, a housing 40, and a control unit 16.

The control unit 16 is, for example, a computer, and includes a CPU (Central Processing Unit) 17 and a storage medium 18 such as a memory. The storage medium 18 stores programs that control various processes executed in the grinding apparatus 1. The control unit 16 controls the operation of the grinding apparatus 1 by causing the CPU 17 to execute the program stored in the storage medium 18.

The table 10 holds four chucks 20 around the rotation center line R1 and rotates around the rotation center line R1. When viewed from above, the rotation direction of the table 10 can be switched between a clockwise direction and a counterclockwise direction.

The four chucks 20 are arranged at equal intervals around the rotation center line R1 of the table 10. Each chuck 20 rotates together with the table 10 and moves to the loading / unloading position A0, the primary grinding position A1, the secondary grinding position A2, the tertiary grinding position A3, and the loading / unloading position A0 in this order.

The carry-in / out position A0 is a position where the board W is carried in / out with respect to the chuck 20, and serves as a position where the board W is carried in and out and a position where the board W is carried out. The primary grinding position A1 is a position where the primary grinding of the substrate W is performed. The secondary grinding position A2 is a position where the secondary grinding of the substrate W is performed. The tertiary grinding position A3 is a position where the tertiary grinding of the substrate W is performed. In this embodiment, the carry-in position and the carry-out position are the same, but the carry-in position and the carry-out position may be different.

The four chucks 20 are rotatably attached to the table 10 about their respective rotation center lines R2 (see FIG. 2). A chuck drive unit 19 for driving the chuck 20 is provided for each chuck 20.

The chuck drive unit 19 includes, for example, a motor 19a for rotating the chuck 20. The rotational driving force of the motor 19a is transmitted to the chuck 20 via a timing belt or the like. A gear may be used instead of the timing belt.

One tool driving unit 30 drives the grinding tool D for primary grinding. The tool drive unit 30 rotates and raises and lowers the grinding tool D. Another tool drive unit 30 drives the grinding tool D for secondary grinding. The remaining tool drive unit 30 drives the grinding tool D for tertiary grinding.

Next, the tool drive unit 30 will be described with reference to FIG. The tool drive unit 30 includes a movable unit 31 on which the grinding tool D is mounted. The grinding tool D is pressed against the substrate W and grinds the substrate W. The grinding tool D includes, for example, a disk-shaped grinding wheel D1 and a plurality of grindstones D2 arranged in a ring shape on the lower surface of the grinding wheel D1.

The movable portion 31 has a flange 32 on which the grinding tool D is mounted, a spindle shaft 33 having the flange 32 at the lower end, and a spindle motor 34 for rotating the spindle shaft 33. The flange 32 is arranged horizontally, and the grinding tool D is mounted on the lower surface thereof. The spindle shaft 33 is arranged vertically. The spindle motor 34 rotates the spindle shaft 33 and rotates the grinding tool D mounted on the flange 32. The rotation center line R3 of the grinding tool D is the rotation center line of the spindle shaft 33.

The tool drive unit 30 further has an elevating unit 35 that elevates and elevates the movable unit 31. The elevating portion 35 has, for example, a vertical Z-axis guide 36, a Z-axis slider 37 that moves along the Z-axis guide 36, and a Z-axis motor 38 that moves the Z-axis slider 37. A movable portion 31 is fixed to the Z-axis slider 37, and the movable portion 31 and the grinding tool D move up and down together with the Z-axis slider 37. The elevating unit 35 further includes a position detector 39 for detecting the position of the grinding tool D. The position detector 39 detects, for example, the rotation of the Z-axis motor 38 and detects the position of the grinding tool D.

The elevating part 35 lowers the grinding tool D from the standby position. The grinding tool D rotates while descending, comes into contact with the upper surface of the rotating substrate W, and grinds the entire upper surface of the substrate W. When the thickness of the substrate W reaches the set value, the elevating portion 35 stops the lowering of the grinding tool D. After that, the elevating part 35 raises the grinding tool D to the standby position.

The grinding device 1 includes a housing 40 that accommodates a plurality of chucks 20. The housing 40 suppresses the scattering of grinding debris and grinding fluid to the outside. The grinding debris is powder or debris generated by grinding the substrate W. The powder includes powder that is cut out from the substrate W and abrasive grains that are separated from the grinding tool D. The debris is, for example, an arcuate thin section generated at the peripheral edge of the substrate W. The housing 40 may also accommodate the table 10.

The housing 40 has a top panel 41 located above the chuck 20 and a side panel 42 located on the side of the chuck 20. The top panel 41 is horizontal and the side panel 42 is vertical. The top panel 41 is located above the side panel 42. The upper panel 41 is formed with an insertion port 41a for the movable portion 31.

As shown by the broken line in FIG. 1, the upper surface panel 41 covers, for example, above the primary grinding position A1, the secondary grinding position A2, and the tertiary grinding position A3. Further, the upper surface panel 41 opens above the carry-in / out position A0. For example, the upper surface panel 41 has a shape in which one corner of a rectangle is cut out in an L shape when viewed from above.

As shown in FIG. 2, the grinding device 1 includes a nozzle 50 that supplies a grinding liquid to the substrate W held by the chuck 20. The grinding fluid is, for example, pure water such as DIW (Deionized Water). The grinding fluid enters between the substrate W and the grinding tool D, reduces the grinding resistance, and suppresses the generation of heat.

As shown in FIG. 1, the grinding apparatus 1 includes a fixed partition wall 45 that partitions the inside of the housing 40 into a plurality of rooms around the rotation center line R1 of the table 10. The fixed partition wall 45 is fixed to the lower surface of the upper surface panel 41. Seen from above, the fixed partition wall 45 extends in the radial direction of the table 10 (direction orthogonal to the rotation center line R1).

The fixed partition wall 45 is provided, for example, in a cross shape, and partitions the inside of the housing 40 into four rooms B0 to B3 around the rotation center line R1 of the table 10. The three chambers B1 to B3 are grinding chambers in which the substrate W is ground. B1 is a primary grinding chamber, B2 is a secondary grinding chamber, and B3 is a tertiary grinding chamber. The remaining one room B0 is a loading / unloading room in which the substrate W is loaded / unloaded. The loading / unloading of the substrate W includes the transfer of the substrate W between the external transfer device and the chuck 20.

When viewed from above, the inside of the housing 40 is partitioned counterclockwise into the loading / unloading chamber B0, the primary grinding chamber B1, the secondary grinding chamber B2, and the tertiary grinding chamber B3 in this order. ing. The order of the four chambers B0 to B3 may be reversed, and when viewed from above, the inside of the housing 40 is, in the clockwise direction, the loading / unloading chamber B0, the primary grinding chamber B1, and the secondary grinding chamber B2. And the tertiary grinding chamber B3 may be partitioned in this order.

As shown in FIG. 3, the grinding apparatus 1 includes a plurality of rotary partition walls 15 that rotate together with the table 10. Each of the plurality of rotary partition walls 15 is located between a plurality of chucks 20 adjacent to each other in the circumferential direction of the table 10, rotates with the table 10, stops directly under the fixed partition wall 45, and is the lower end of the fixed partition wall 45. Contact the part. The fixed partition wall 45 and the rotary partition wall 15 suppress the movement of grinding debris and grinding fluid between adjacent rooms. The upper end of the rotary partition wall 45 and the lower end of the fixed partition wall 45 do not have to be in contact with each other.

For example, the fixed partition wall 45 and the rotary partition wall 15 suppress the intrusion of grinding debris and the like from the primary grinding chamber B1 and the tertiary grinding chamber B3 into the loading / unloading chamber B0, and keep the loading / unloading chamber B0 clean. Further, the fixed partition wall 45 and the rotary partition wall 15 suppress the invasion of the primary grinding debris having a large particle size from the primary grinding chamber B1 into the secondary grinding chamber B2, and the roughness of the grinding surface after the secondary grinding is roughened. Suppress. Further, the fixed partition wall 45 and the rotary partition wall 15 suppress the invasion of the secondary grinding debris having a large particle size from the secondary grinding chamber B2 into the tertiary grinding chamber B3, and the roughness of the grinding surface after the tertiary grinding is roughened. Suppress.

As shown in FIG. 4, the fixed partition wall 45 includes an upper wall 100 extending in the radial direction of the table 10 (Y-axis direction in FIG. 4) and a first upper sheet suspended from the upper wall 100 along the upper wall 100. Includes 111 and a second upper sheet 112 that faces the first upper sheet 111 at intervals. The first upper sheet 111 and the second upper sheet 112 are, for example, a resin sheet or a rubber sheet.

Unlike the brush described in Patent Document 3, the first upper sheet 111 and the second upper sheet 112 inhibit the movement of grinding debris and grinding fluid by a surface instead of a line. Further, the first upper sheet 111 and the second upper sheet 112 doubly hinder the movement of the grinding debris and the grinding fluid. Therefore, it is possible to hinder the movement of grinding debris and grinding fluid between adjacent rooms as compared with the conventional case.

As shown in FIG. 4B, the upper wall 100 has a horizontal portion 101 extending in the radial direction of the table 10 and a vertical portion 102 protruding downward from one end in the width direction of the horizontal portion 101 at the lower end thereof. .. The horizontal portion 101 and the vertical portion 102 form an L-shaped angle 103. The fixing partition wall 45 has a fixing tool for fixing the first upper sheet 111 and the second upper sheet 112 to the vertical portion 102. The fixture is not particularly limited, but is, for example, a bolt 120.

A plurality of bolts 120 are provided at intervals in the radial direction of the table 10. The shaft portion 121 of the bolt 120 passes through the through hole of the first upper sheet 111 and the through hole of the second upper sheet 112, and is screwed into the bolt hole of the vertical portion 102. The head 122 of the bolt 120 presses the first upper sheet 111 and the second upper sheet 112 via the pressing plate 123 and the like.

The first upper sheet 111 or the second upper sheet 112 can be replaced by loosening or tightening the bolt 120. It is also possible to change the dimensions or shape of the first upper sheet 111 before and after the replacement of the first upper sheet 111. The same applies to the second upper sheet 112.

When viewed from above, the first upper sheet 111, the second upper sheet 112, and the head 122 of the bolt 120 do not protrude from the horizontal portion 101. Interference between the head 122 of the bolt 120 and other members can be suppressed.

The first upper sheet 111 and the second upper sheet 112 are arranged with the spacers 114 and 115 interposed therebetween, and project downward from the spacers 114 and 115. The spacers 114 and 115 are formed with through holes through which the shaft portion 121 of the bolt 120 passes.

The fixed partition wall 45 may further include a third upper sheet 113 arranged between the first upper sheet 111 and the second upper sheet 112. The third upper sheet 113 is, for example, a resin sheet or a rubber sheet. The first upper sheet 111, the second upper sheet 112, and the third upper sheet 113 triplely inhibit the movement of the grinding debris and the grinding fluid.

The third upper sheet 113 and the first upper sheet 111 are arranged with the spacer 114 interposed therebetween, and project downward from the spacer 114. Further, the third upper sheet 113 and the second upper sheet 112 are arranged with the spacer 115 interposed therebetween, and project downward from the spacer 115.

As shown by the alternate long and short dash line in FIG. 4B, the upper end portion of the rotary partition wall 15 may have a curved surface that is convex upward when viewed from the radial direction of the table 10. The third upper sheet 113 contacts the upper end portion of the rotary partition wall 15. On the other hand, the first upper sheet 111 and the second upper sheet 112 do not come into contact with the upper end portion of the rotary partition wall 15.

The third upper sheet 113 comes into contact with the upper end portion of the rotary partition wall 15. Therefore, the thickness T3 of the third upper sheet 113 may be thicker than the thickness T1 of the first upper sheet 111 and the thickness T2 of the second upper sheet 112. The durability of the third upper sheet 113 and the flexibility of the first upper sheet 111 and the second upper sheet 112 can be compatible with each other. The first upper sheet 111 and the second upper sheet 112 may come into contact with the upper end portion of the rotary partition wall 15 and may be deformed so as to imitate the upper end portion thereof.

A member other than the third upper sheet 113, for example, a brush may be arranged between the first upper sheet 111 and the second upper sheet 112. Further, neither the third upper sheet 113 nor the brush may be arranged between the first upper sheet 111 and the second upper sheet 112, and nothing may be arranged. Various sealing members can be replaced by bolts 120, and the number of sealing members can be changed. In the absence of the third upper sheet 113, either or both of the first upper sheet 111 and the second upper sheet 112 come into contact with the upper end portion of the rotary partition wall 15. When there is no third upper sheet 113, both the first upper sheet 111 and the second upper sheet 112 do not have to come into contact with the upper end portion of the rotary partition wall 15.

The fixed partition wall 45 has a side wall 130 that is located between the upper wall 100 and the side panel 42 and projects downward from the upper wall 100, a first horizontal sheet 141 that protrudes from the side wall 130 toward the table 10, and a first. A second horizontal sheet 142 facing the horizontal sheet 141 at a distance is included. The first horizontal sheet 141 and the second horizontal sheet 142 are, for example, a resin sheet or a rubber sheet.

As shown in FIG. 4C, the first horizontal sheet 141 is arranged on the same plane as, for example, the first upper sheet 111. The thickness of the first horizontal sheet 141 may be the same as the thickness T1 of the first upper sheet 111. Further, the second horizontal sheet 142 is arranged on the same plane as the second upper sheet 112, for example. The thickness of the second horizontal sheet 142 may be the same as the thickness T2 of the second upper sheet 112.

Unlike the brush described in Patent Document 3, the first horizontal sheet 141 and the second horizontal sheet 142 inhibit the movement of grinding debris and grinding fluid by a surface instead of a line. Further, the first horizontal sheet 141 and the second horizontal sheet 142 doubly hinder the movement of the grinding debris and the grinding fluid. Therefore, it is possible to hinder the movement of grinding debris and grinding fluid between adjacent rooms as compared with the conventional case.

The fixed partition wall 45 may further include a third horizontal sheet 143 arranged between the first horizontal sheet 141 and the second horizontal sheet 142. The third horizontal sheet 143 is, for example, a resin sheet or a rubber sheet.

The third horizontal sheet 143 is arranged, for example, on the same plane as the third upper sheet 113. The thickness of the third horizontal sheet 143 may be the same as the thickness T3 of the third upper sheet 113. The thickness of the third horizontal sheet 143 is thicker than the thickness of the first horizontal sheet 141 and the thickness of the second horizontal sheet 142.

As shown in FIG. 4C, the third horizontal sheet 143 projects upward from the first horizontal sheet 141 and the second horizontal sheet 142, and enters between the first upper sheet 111 and the second upper sheet 112. There is. As a result, even if there is a cut between the first upper sheet 111 and the first horizontal sheet 141, the cut can be closed by the third horizontal sheet 143, and the grinding debris and the grinding fluid through the cut can be closed. Can inhibit the movement of. Similarly, even if there is a cut between the second upper sheet 112 and the second horizontal sheet 142, the cut can be closed by the third horizontal sheet 143, and the grinding debris and the grinding fluid through the cut can be closed. Can inhibit the movement of.

As shown in FIG. 4D, the first upper sheet 111 and the second upper sheet 112 project from the third upper sheet 113 toward the side wall 130. As a result, even if there is a cut between the third upper sheet 113 and the third horizontal sheet 143, the cut can be hidden by being sandwiched between the first upper sheet 111 and the second upper sheet 112, and the cut can be hidden. It is possible to hinder the movement of grinding debris and grinding fluid through it.

Next, the chuck cover 70 and the like will be described with reference to FIG. As shown in FIG. 5, the grinding device 1 includes a chuck cover 70 that rotates with the chuck 20. The chuck 20 includes a holding table 21 for holding the substrate W and a flange 23 provided on the lower edge of the holding table 21. The holding table 21 has a porous body 21a and a base 21b. A recess is formed on the upper surface of the holding table 21, and a disk-shaped porous body 21a is embedded in the recess.

When the gas inside the porous body 21a is sucked and the pressure of the porous body 21a becomes a negative pressure lower than the atmospheric pressure, the substrate W is adsorbed on the porous body 21a. On the other hand, when the suction of the gas is stopped and the pressure of the porous body 21a is returned to the atmospheric pressure, the adsorption of the substrate W is released.

The chuck 20 is placed on the rotary table 25 and fixed to the rotary table 25 with a fixing tool. The fixture is not particularly limited, but is, for example, a bolt 24. A plurality of bolts 24 are provided at intervals in the circumferential direction of the flange 23 of the chuck 20. The shaft portion of the bolt 24 passes through the through hole of the flange 23 and is screwed into the bolt hole of the rotary table 25. The head of the bolt 24 presses the flange 23 from above. The chuck 20 can be replaced by loosening or tightening the bolt 24.

The chuck cover 70 includes an annular eaves portion 71. The annular eaves 71 forms an opening 71a in the center of which the holding base 21 of the chuck 20 is inserted. The upper surface of the eaves 71 is arranged at the same height as the upper surface of the holding table 21 of the chuck 20 or below the upper surface of the holding table 21. Further, the upper surface of the eaves portion 71 is arranged above the inclined portion 61 of the table cover 60, which will be described later.

The upper surface of the eaves 71 is inclined downward as the distance from the rotation center line R2 of the chuck 20 increases. The upper surface of the eaves 71 may be horizontal. However, if the upper surface of the eaves 71 is inclined, the grinding fluid can be discharged diagonally downward due to gravity, and the accumulation of grinding debris mixed with the grinding fluid can be suppressed. The upper surface of the eaves 71 has, for example, a conical shape.

The eaves 71 is arranged above the flange 23 of the chuck 20 and covers the bolt 24 which is a fixing tool from above. The diameter of the opening 71a formed in the center of the eaves 71 is larger than the diameter of the holding table 21 and smaller than the diameter of the flange 23. The bolt 24 can be hidden directly under the eaves 71, the grinding fluid can be suppressed from hitting the bolt 24, and the scattering of the grinding fluid can be suppressed.

According to this embodiment, the chuck cover 70 rotates together with the chuck 20. When the chuck 20 is rotated during grinding of the substrate W, the eaves 71 rotates, and the grinding liquid adhering to the eaves 71 due to centrifugal force can be blown outward in the radial direction. Therefore, it is possible to suppress the accumulation of grinding debris mixed with the grinding fluid, and it is possible to suppress the accumulation of grinding debris around the chuck 20. As a result, it is possible to prevent the operator or the working robot from becoming dirty during maintenance such as replacement of the chuck 20 or the grinding tool D. Further, it is possible to prevent the accumulated grinding debris from peeling off and adhering to the chuck 20 or the substrate W.

A spacer 28 is provided between the eaves 71 of the chuck cover 70 and the flange 23 of the chuck 20. A plurality of spacers 28 are provided at intervals in the circumferential direction of the flange 23. The eaves 71 is placed on the plurality of spacers 28. The spacer 28 may be integrated with the eaves 71. In that case, the spacer 28 is placed on the flange 23, and the shaft portion of the bolt 29, which will be described later, is screwed into the bolt hole of the flange 23.

The spacer 28 forms a gap between the eaves 71 and the flange 23. The thickness of the eaves 71 can be reduced and the weight of the eaves 71 can be reduced as compared with the case where there is no gap. Further, a space for arranging the head of the bolt 24 can be secured between the eaves portion 71 and the flange 23.

The spacer 28 has a bolt hole on its upper surface. The shaft portion of the bolt 29 that fixes the eaves portion 71 to the spacer 28 is screwed into the bolt hole. The head of the bolt 29 presses the eaves 71 from above. A groove 71b extending in the radial direction of the chuck 20 is formed on the upper surface of the eaves portion 71. The groove 71b accommodates the head of the bolt 29, and the head of the bolt 29 presses the bottom surface of the groove 71b from above.

The upper surface of the eaves 71 is inclined, while the lower surface of the eaves 71 is horizontal. If the lower surface of the eaves 71 is horizontal, the eaves 71 can be stably placed on the plurality of spacers 28. The number of spacers 28 is preferably 3 or more.

The chuck cover 70 includes an outer cylinder portion 77 extending downward from the peripheral edge of the eaves portion 71. The outer cylinder portion 77 extends straight down in FIG. 5, but may extend diagonally downward. The outer cylinder portion 77 extends downward from the upper end of the inner cylinder portion 67 of the table cover 60, which will be described later, and surrounds the inner cylinder portion 67. The inner cylinder portion 67 and the outer cylinder portion 77 can form a labyrinth that suppresses the infiltration of the grinding fluid.

The boundary between the eaves portion 71 and the outer cylinder portion 77 has, for example, a chamfered shape and a curved shape. In the case of a polygonal line-shaped boundary, the surface tension of the droplet hinders the droplet from crossing the boundary. As a result, a ring-shaped liquid pool is likely to be formed. If the boundary between the eaves portion 71 and the outer cylinder portion 77 has a curved shape, the droplets can easily get over the boundary and the grinding fluid can be easily discharged. Therefore, it is possible to prevent the grinding debris mixed with the grinding fluid from accumulating in a ring shape.

As shown in FIG. 5, the grinding device 1 has a table cover 60 that rotates with the table 10. The table cover 60 has an inclined portion 61 that inclines downward as the distance from the rotation center line R1 of the table 10 increases.

The inclined portion 61 is arranged below the upper surface of the holding table 21 of the chuck 20 and above the table 10. Unlike the horizontal flat plate portion, the inclined portion 61 can discharge the grinding fluid diagonally downward due to gravity. Therefore, it is possible to suppress the accumulation of grinding debris mixed with the grinding fluid.

The inclined portion 61 has, for example, a conical shape having a constant height in the circumferential direction of the table 10. When the inclined portion 61 has a conical shape, the grinding fluid can be discharged radially as shown by an arrow in FIG. 3, and the accumulation of grinding debris around the chuck 20 can be suppressed.

The inclined portion 61 may have a pyramid shape. However, when the inclined portion 61 has a pyramid shape, the groove G shown by the two-dot chain line in FIG. 3 is formed. The chuck 20 is located at the bottom of the groove G, and the grinding fluid tends to collect in the vicinity of the chuck 20, and the grinding debris mixed with the grinding fluid tends to accumulate.

As shown in FIG. 5, the inclined portion 61 forms an opening 61a in which the rotary table 25 is inserted between the top portion and the hem portion. A plurality of openings 61a are formed for each rotary table 25, and a plurality of openings 61a are formed around the rotation center line R1 of the table 10 at intervals. The plurality of openings 61a are formed at equal intervals, for example.

The table cover 60 includes an inner cylinder portion 67 that rises upward from the opening edge of the opening portion 61a of the inclined portion 61. The inner cylinder portion 67 stands up directly above in FIG. 5, but may stand up diagonally upward. The upper edge of the inner cylinder portion 67 is horizontal over the entire circumferential direction. The inner cylinder portion 67 prevents the grinding fluid from entering the opening 61a.

As shown in FIG. 6A, the inner cylinder portion 67 includes a first arc cylinder portion 67a, a second arc cylinder portion 67b, and a connecting portion 67c. The first arc cylinder portion 67a is fixed to the inclined portion 61. The second arc cylinder portion 67b is detachably connected to the first arc cylinder portion 67a. The connecting portion 67c connects the first arc cylinder portion 67a and the second arc cylinder portion 67b in an annular shape.

The connecting portion 67c includes, for example, a connecting plate 67c1 and a bolt 67c2. The connecting plate 67c1 is fixed to, for example, the inner peripheral surface of the second arcuate cylinder portion 67b and extends to the inner peripheral surface of the first arcuate cylinder portion 67a. The shaft portion of the bolt 67c2 passes through the through hole of the first arc cylinder portion 67a and is screwed into the bolt hole of the connecting plate 67c1. The head of the bolt 67c2 presses the first arc cylinder portion 67a from the outside in the radial direction.

The structure of the connecting portion 67c is not particularly limited. For example, the connecting plate 67c1 may be fixed to the inner peripheral surface of the first arcuate cylinder portion 67a and extend to the inner peripheral surface of the second arcuate cylinder portion 67b. In this case, the shaft portion of the bolt 67c2 passes through the through hole of the second arcuate cylinder portion 67b and is screwed into the bolt hole of the connecting plate 67c1. The head of the bolt 67c2 presses the second arcuate cylinder portion 67b from the outside in the radial direction.

In any case, the second arc cylinder portion 67b can be removed or attached by loosening or tightening the bolt 67c2. As is clear from FIG. 6B, by removing the second arcuate cylinder portion 67b, the chuck 20 can be easily replaced.

As shown in FIG. 5, the second arcuate cylinder portion 67b is arranged outside the radial direction of the table 10 with respect to the first arcuate cylinder portion 67a. Then, at least a part of the lower edge of the second arc cylinder portion 67b is arranged below the upper surface of the rotary table 25.

As a result, if the second arcuate cylinder portion 67b is removed, the chuck 20 mounted on the upper surface of the rotary table 25 can be pulled out sideways as shown in FIG. 7. This is effective when the adhesion between the chuck 20 and the rotary table 25 is strong and the chuck 20 cannot be peeled up.

As shown in FIG. 5, the inner cylinder portion 67 may further include a third arc cylinder portion 67d on which the second arc cylinder portion 67b is placed. The third arc cylinder portion 67d may be fixed to the inclined portion 61 and integrated with the first arc cylinder portion 67a.

The inner cylinder portion 67 may further include an alignment portion 67e for aligning the second arc cylinder portion 67b and the third arc cylinder portion 67d. The alignment portion 67e is, for example, fixed to the inner peripheral surface of the second arc cylinder portion 67b, inserted into the inside of the third arc cylinder portion 67d, and comes into contact with the inner peripheral surface thereof, whereby the second arc cylinder portion 67b is formed. And the third arc cylinder portion 67d are aligned with each other.

The table cover 60 has a tubular portion 63 extending downward from the lower edge of the inclined portion 61. The tubular portion 63 extends straight down in FIG. 5, but may extend diagonally downward. The tubular portion 63 drops the grinding fluid out of the table 10. The outer diameter of the tubular portion 63 is larger than the diameter of the table 10.

The boundary between the inclined portion 61 and the tubular portion 63 has, for example, a chamfered shape and a curved shape. Compared to the case of a polygonal line-shaped boundary, the droplets are more likely to get over the boundary and the grinding fluid is more likely to be discharged. Therefore, it is possible to prevent the grinding debris mixed with the grinding fluid from accumulating in a ring shape.

The inclined portion 61 forms an opening 61b through which the fixed shaft 11 passes at the top thereof. The table cover 60 has a central tubular portion 69 that rises upward from the opening edge of the opening 61b of the inclined portion 61. The central cylinder portion 69 stands up directly above in FIG. 5, but may stand up diagonally upward. The central tubular portion 69 prevents the grinding fluid from entering the opening 61b.

The table cover 60 is divided into a plurality of divided covers in the circumferential direction of the table 10. The number of divided covers and the number of chucks 20 are the same. A rotating partition wall 15 is arranged between the divided covers adjacent to each other in the circumferential direction.

The plurality of split covers are individually and detachably attached to the table 10. It is sufficient to remove the split covers individually at the time of maintenance, and it is not necessary to remove the entire table cover 60 at once, so that workability can be improved.

The grinding device 1 includes a base cover 90. The base cover 90 has a horizontal disk portion 91. The disk portion 91 is arranged below the table cover 60 and above the table 10, and is arranged concentrically with the table 10. The diameter of the disk portion 91 is larger than the diameter of the table 10.

The disk portion 91 forms an opening 91a through which the rotation shaft 26 of the chuck 20 passes around the rotation center line R1 of the table 10. A plurality of openings 91a are formed around the rotation center line R1 of the table 10 at equal intervals.

The base cover 90 includes an inner cylinder portion 93 that rises upward from the opening edge of the opening 91a. The inner cylinder portion 93 stands up directly above in FIG. 5, but may stand up diagonally upward. A rotating shaft 26 is inserted through the inner cylinder portion 93.

The rotary shaft 26 extends vertically downward from the center of rotation of the rotary table 25. An outer cylinder portion 27 extending downward is provided on the peripheral edge of the rotary table 25. The outer cylinder portion 27 extends straight down in FIG. 5, but may extend diagonally downward.

The outer cylinder portion 27 extends downward from the upper end of the inner cylinder portion 93 of the base cover 90 and surrounds the inner cylinder portion 93. The inner cylinder portion 93 and the outer cylinder portion 27 can form a labyrinth that suppresses the infiltration of the grinding fluid.

As described above, a plurality of openings 91a are arranged around the rotation center line R1 of the table 10 at equal intervals. A rotary partition wall 15 is arranged between the openings 91a adjacent to each other in the circumferential direction of the table 10. The rotary partition wall 15 is provided on the disk portion 91.

The base cover 90 has a tubular portion 94 extending downward from the peripheral edge of the disk portion 91. The tubular portion 94 extends straight down in FIG. 5, but may extend diagonally downward.

The boundary between the disk portion 91 and the tubular portion 94 has, for example, a chamfered shape and a curved shape. Compared with the case of the polygonal line shape, the droplets easily get over the boundary and the grinding fluid is easily discharged. Therefore, it is possible to prevent the grinding debris mixed with the grinding fluid from accumulating in a ring shape.

As shown in FIG. 5, the grinding device 1 includes a nozzle 51 that supplies a cleaning liquid to the inclined portion 61 between the top of the inclined portion 61 of the table cover 60 and the chuck 20. The nozzle 51 supplies the cleaning liquid to the inclined portion 61 from above. The nozzle 51 may be provided in the central cylinder portion 69. The cleaning liquid is, for example, pure water. After being supplied to the inclined portion 61, the cleaning liquid flows down diagonally due to gravity. The cleaning liquid can clean a wide range of the inclined portion 61 and suppress the accumulation of grinding debris around the chuck 20. The nozzle 51 may supply the cleaning liquid to the inclined portion 61 at a position where the cleaning liquid reaches the top of the inclined portion 61. The entire area from the top to the hem of the inclined portion 61 can be washed.

For example, when grinding the substrate W, the nozzle 51 discharges a cleaning liquid to wash away the grinding liquid and grinding debris adhering to the inclined portion 61. The nozzle 51 is provided not only in the primary grinding chamber B1 but also in the secondary grinding chamber B2 and the tertiary grinding chamber B3. The nozzle 51 may also be provided in the carry-in / out chamber B0. The nozzle 51 may discharge the cleaning liquid at a time other than when the substrate W is ground.

The inclined portion 61 of the table cover 60 forms an opening 61b through which the fixed shaft 11 passes at the top thereof. The central cylinder portion 69 rises from the opening edge of the opening portion 61b, and the nozzle 51 is arranged radially outward of the central cylinder portion 69. It is possible to prevent the cleaning liquid from entering the inside of the central cylinder portion 69.

The grinding device 1 includes a measuring instrument 95 for measuring the thickness of the substrate W. The measuring instrument 95 includes a nozzle 51. The flow paths L1 and L2 of the cleaning liquid are formed inside the measuring instrument 95. The flow path L2 passes through at least one of the proximal ends of the first arm 95c and the second arm 95d, which will be described later. The cleaning liquid passes through the flow path L2, absorbs the heat of the first height sensor 95a via the first arm 95c, and is discharged from the nozzle 51. Alternatively, the cleaning liquid passes through the flow path L2, absorbs the heat of the second height sensor 95b via the second arm 95d, and is discharged from the nozzle 51. At least one of the first height sensor 95a and the second height sensor 95b can be cooled by the cleaning liquid. The cooling flow path L2 may be formed separately from the nozzle flow path L1.

The measuring instrument 95 includes, for example, a first height sensor 95a for measuring the height of the substrate W and a second height sensor 95b for measuring the height of the chuck 20. The thickness of the substrate W can be measured from the difference between the height of the substrate W and the height of the chuck 20. Although the measuring instrument 95 is a contact type in FIG. 5, it may be a non-contact type.

The measuring instrument 95 includes a first arm 95c for holding the first height sensor 95a, a second arm 95d for holding the second height sensor 95b, and a bracket 95e for holding the first arm 95c and the second arm 95d. .. A nozzle 51 is provided on the lower surface of the bracket 95e.

The bracket 95e of the measuring instrument 95 is attached to the upper surface of the fixed shaft 11 and protrudes outward in the radial direction of the fixed shaft 11. The nozzle 51 is provided on the lower surface of the bracket 95e, which protrudes outward in the radial direction of the fixed shaft 11, and supplies the cleaning liquid to the inclined portion 61.

As shown in FIG. 8, a plurality of supply ports 51a of the nozzle 51 are provided at intervals in the circumferential direction of the table cover 60 (rotational direction of the table cover 60). A plurality of supply ports 51a may be provided in one chamber (for example, the primary grinding chamber B1). The plurality of supply ports 51a can simultaneously clean a wide range of the inclined portion 61 of the table cover 60 in the circumferential direction. Further, the supply port 51a of the nozzle 51 is an arcuate slit along the circumferential direction of the table cover 60. The cleaning liquid can be supplied at a position close to the top of the inclined portion 61 of the table cover 60. The supply port 51a of the nozzle 51 may be a linear slit or a circular hole.

By the way, at the hem of the inclined portion 61, the surface tension of the droplet hinders the droplet from getting over the hem. As a result, a ring-shaped liquid pool is likely to be formed, and a ring-shaped stain is likely to adhere.

Therefore, the grinding device 1 includes nozzles 52-1 and 52-2 that supply the cleaning liquid from above to the hem of the inclined portion 61 of the table cover 60. The cleaning liquid is, for example, pure water. The cleaning liquid washes away the grinding liquid contaminated with the grinding debris and suppresses the ring-shaped dirt from sticking.

The nozzle 52-1 is located, for example, near the boundary between the primary grinding chamber B1 and the loading / unloading chamber B0. The vicinity of the boundary means a range within 50 mm from the fixed partition wall 45 which is the boundary. It is sufficient that at least a part of the ejection port of the nozzle 52-1 is within the range.

On the other hand, the nozzle 52-2 is located near the boundary between the tertiary grinding chamber B3 and the loading / unloading chamber B0. The vicinity of the boundary means a range within 50 mm from the fixed partition wall 45 which is the boundary. It is sufficient that at least a part of the ejection port of the nozzle 52-2 is within the range.

The control unit 16 supplies the cleaning liquid from the nozzle 52-1 arranged in the primary grinding chamber B1 to the hem of the inclined portion 61 of the table cover 60 while rotating the table 10 in the clockwise direction when viewed from above. .. Immediately before the hem of the inclined portion 61 moves from the primary grinding chamber B1 to the loading / unloading chamber B0, the hem of the inclined portion 61 can be washed, and dirt can be prevented from being brought into the loading / unloading chamber B0.

On the other hand, the control unit 16 cleans the table 10 from the nozzle 52-2 arranged in the tertiary grinding chamber B3 to the hem of the inclined portion 61 of the table cover 60 while rotating the table 10 in the counterclockwise direction when viewed from above. Supply. Immediately before the hem of the inclined portion 61 moves from the tertiary grinding chamber B3 to the loading / unloading chamber B0, the hem of the inclined portion 61 can be washed, and dirt can be prevented from being brought into the loading / unloading chamber B0.

As shown in FIG. 8, the grinding device 1 is located outside the housing 40 and includes an exhaust box 43 for discharging gas from the housing 40. The exhaust box 43 is connected to a suction source (not shown) via a pipe 44. The suction source is, for example, a vacuum pump or an ejector. The suction source may be part of factory equipment. The pipe 44 is installed, for example, on the ceiling 43a of the exhaust box 43. The exhaust box 43 discharges gas from the inside of the housing 40 by the suction force of the suction source, makes the inside of the housing 40 a negative pressure than the outside of the housing 40, and suppresses the leakage of grinding debris and grinding fluid. ..

The three exhaust boxes 43 individually discharge gas from the three grinding chambers B1 to B3, and make the three grinding chambers B1 to B3 have a negative pressure compared to the outside of the housing 40. The air pressure in the carry-in / out chamber B0 is higher than the air pressure in the grinding chambers B1 to B3. The pressure difference limits the scattering of grinding debris and grinding fluid from the grinding chambers B1 to B3 to the loading / unloading chamber B0.

The number of exhaust boxes 43 and the number of grinding chambers are not limited to three. Further, the number of exhaust boxes 43 and the number of pipes 44 do not have to be the same. For example, one pipe 44 may be connected across two exhaust boxes 43 adjacent to each other.

By the way, when the gas is discharged from the inside of the housing 40, the exhaust box 43 also discharges the droplets of the grinding fluid from the inside of the housing 40. The droplets of the grinding fluid are mixed with grinding debris generated during grinding.

Therefore, as shown in FIG. 9, the side panel 42 of the housing 40 has a liquid receiving portion 42a and an exhaust gas in order to prevent the grinding liquid contaminated with the grinding dust from being discharged to the outside of the grinding device 1 together with the gas. The opening 42b and the return opening 42c are included.

The liquid receiving portion 42a is located at the same height as the substrate W held by the chuck 20, and receives the grinding liquid horizontally scattered from the upper surface of the substrate W. The liquid receiving portion 42a limits a large amount of grinding liquid from entering the exhaust box 43.

The exhaust port 42b is located above the liquid receiving portion 42a, for example, directly above the liquid receiving portion 42a. After hitting the liquid receiving portion 42a, the grinding fluid falls downward due to gravity, so that the grinding fluid hardly enters the exhaust port 42b.

The exhaust port 42b communicates with the inside of the exhaust box 43. The exhaust box 43 discharges gas from the inside of the housing 40 via the exhaust port 42b. The gas contains droplets of grinding fluid.

Inside the exhaust box 43, droplets of grinding fluid are separated from the gas. The droplets of the grinding fluid have a higher density than the gas and are separated from the gas by gravity or the like. The separated grinding fluid drops.

The return port 42c is located below the liquid receiving portion 42a, for example, directly below the liquid receiving portion 42a. The return port 42c returns the grinding fluid separated from the gas inside the exhaust box 43 to the inside of the housing 40. As a result, it is possible to prevent the grinding liquid contaminated with the grinding debris from being discharged to the outside of the grinding apparatus 1 together with the gas.

The exhaust box 43 has an inclined surface 43b that guides the grinding fluid separated from the gas inside the exhaust box 43 diagonally downward toward the return port 42c of the side panel 42. The inclined surface 43b approaches the side panel 42 as it goes downward. The grinding fluid flows down along the inclined surface 43b. The flow can prevent dirt from adhering to the inclined surface 43b.

The inclined surface 43b of the exhaust box 43 approaches the side panel 42 as it goes downward, for example, from a position higher than the exhaust port 42b of the side panel 42 to a position at the same height as the return port 42c of the side panel 42. After passing through the exhaust port 42b of the side panel 42 together with the gas, the droplets of the grinding fluid adhere to the inclined surface 43b of the exhaust box 43 and flow down along the inclined surface 43b.

The grinding device 1 may include a nozzle 53 that supplies a cleaning liquid to the inside of the housing 40 via the inside of the exhaust box 43. The cleaning liquid is, for example, pure water such as DIW. After being supplied to the inside of the exhaust box 43, the cleaning liquid is supplied to the inside of the housing 40 through the return port 42c of the side panel 42. Unlike the grinding fluid, the cleaning fluid does not contain dirt such as grinding debris, so that the inside of the exhaust box 43 and the inside of the housing 40 can be cleaned.

The nozzle 53 is provided, for example, on the inclined surface 43b of the exhaust box 43. The cleaning liquid flows down along the inclined surface 43b. The flow can prevent dirt from adhering to the inclined surface 43b. The nozzle 53 may or may not protrude upward from the inclined surface 43b.

By the way, as shown in FIG. 8, at the boundary between adjacent rooms (for example, B1 and B2, or B0 and B3) when viewed from above, the gap between the circular table cover 60 and the like and the side panel 42 becomes the narrowest. There is. Grinding debris is likely to clog the narrow gap.

Even when the table cover 60 is not provided, the gap between the table 10 and the side panel 42 is the narrowest at the boundary between adjacent rooms when viewed from above. Grinding debris is likely to clog the narrow gap.

Therefore, in the present embodiment, the return port 42c of the side panel 42 is arranged near the boundary between adjacent rooms (for example, B1 and B2, or B0 and B3), and is arranged near the fixed partition wall 45. The vicinity of the fixed partition wall 45 means, for example, a range within 50 mm from the fixed partition wall 45. It suffices if there is at least a part of the return port 42c within the range.

The return port 42c of the side panel 42 is arranged near the boundary between adjacent rooms (for example, B1 and B2, or B0 and B3) to supply the cleaning liquid to the gap between the table cover 60 and the like and the side panel 42, and the liquid is supplied. Form the flow of. The flow suppresses clogging of grinding debris.

As shown in FIG. 9B, when viewed from the front of the side panel 42, the nozzle 53 discharge port 53a may be located as close to the boundaries of adjacent rooms as possible, i.e., as close as possible to the fixed partition wall 45. It may be placed nearby.

For example, when viewed from the front of the side panel 42, the distance between the fixed partition wall 45 and the discharge port 53a of the nozzle 53 and the distance between the fixed partition wall 45 and the return port 42c may be about the same. The cleaning liquid can be supplied to the inside of the housing 40 from the end of the return port 42c closest to the fixed partition wall 45.

Although not shown, the liquid receiving portion 42a of the side panel 42 may be provided with a nozzle for supplying the cleaning liquid inside the housing 40. This nozzle is provided, for example, on the upper part of the liquid receiving portion 42a. After being discharged from the nozzle, the cleaning liquid flows down along the liquid receiving portion 42a to wash off the grinding debris adhering to the liquid receiving portion 42a.

As shown in FIGS. 8 and 10, the housing 40 is located below the plurality of chucks 20 and includes a pan 46 that receives the falling grinding fluid and grinding debris. The pan 46 also receives a cleaning solution. Hereinafter, the grinding liquid and the cleaning liquid are collectively referred to as liquids. Further, a liquid contaminated with grinding debris is also referred to as a sewage. The pan 46 has two inclined surfaces 210 and 220 on its upper surface.

As shown in FIG. 10A, the two inclined surfaces 210 and 220 are combined in a chevron shape and are separated from the boundary line BL between the two adjacent rooms B0 and B1 and the remaining two rooms B2 and B3. It tilts downward. The two inclined surfaces 210 and 220 allow the sewage to flow down on both sides of the boundary line BL.

According to this embodiment, the two inclined surfaces 210 and 220 are combined in a chevron shape. Therefore, as compared with the case where only one inclined surface is provided, if the height difference of the inclined surface is the same, the horizontal distance of the inclined surface is short and the inclination of the inclined surface is steep. Therefore, the sewage tends to flow down. Therefore, the flow of grinding debris and grinding fluid in the pan 46 can be improved.

As shown in FIG. 10 (A), the pan 46 has two gutters 230, 240 along the lower edges 211, 221 of the two inclined surfaces 210, 220. The sewage flows down along the two inclined surfaces 210 and 220 and then enters the two gutters 230 and 240.

As shown in FIGS. 10B and 10C, the gutters 230 and 240 have guide surfaces 231 and 241 that incline downward from one end to the other end of the lower edges 211 and 221 at the bottom of the groove. Has. The guide surfaces 231 and 241 allow the sewage to be collected.

As shown in FIG. 10B, the gutter 230 has a guide surface 231 at the bottom of the groove, which is inclined downward from the loading / unloading chamber B0 toward the primary grinding chamber B1. Due to the inclination of the guide surface 231, it is possible to prevent the primary grinding debris contained in the sewage from entering the loading / unloading chamber B0 from the primary grinding chamber B1, and the loading / unloading chamber B0 can be kept clean.

As shown in FIG. 10B, the gutter 230 may have a guide surface 232 at the bottom of the groove, which is inclined in the direction opposite to the guide surface 231. The guide surface 232 is shorter than the guide surface 231 and is arranged at the end of the primary grinding chamber B1 opposite to the loading / unloading chamber B0.

As shown in FIG. 10C, the gutter 240 has a guide surface 241 at the bottom of the groove, which is inclined downward from the tertiary grinding chamber B3 toward the secondary grinding chamber B2. Due to the inclination of the guide surface 241, it is possible to suppress the invasion of the secondary grinding debris having a large particle size from the secondary grinding chamber B2 into the tertiary grinding chamber B3, and it is possible to suppress the roughness of the grinding surface after the tertiary grinding.

As shown in FIG. 10C, the gutter 240 may have a guide surface 242 inclined in the direction opposite to the guide surface 241 at the bottom of the groove. The guide surface 242 is shorter than the guide surface 241 and is arranged at the end of the secondary grinding chamber B2 opposite to the tertiary grinding chamber B3.

Each gutter 230, 240 includes a discharge port 233, 243 for discharging sewage at the lowest portion of the groove bottom. Pipes 250 and 260 extending downward from the discharge ports 233 and 243 are connected to the discharge ports 233 and 243.

The sewage flows down along the guide surfaces 231 and 241 and is discharged from the discharge ports 233 and 243 to the pipes 250 and 260. Since the discharge ports 233 and 243 are located at the lowest height, the collected sewage can be efficiently discharged.

As shown in FIG. 11, the tool drive unit 30 includes a movable portion 31 to which the grinding tool D is attached, and an elevating portion 35 for raising and lowering the movable portion 31. The elevating portion 35 faces the chevron inclined edges 212 and 222 of the inclined surfaces 210 and 220 instead of the lower edges 211 and 221 of the inclined surfaces 210 and 220. Since the elevating portion 35 does not face the gutters 230 and 240, maintenance of the gutters 230 and 240 is easy.

As described above, the grinding liquid and the cleaning liquid are supplied to the inside of the housing 40. Along with these liquids, grinding debris flows into the outlets 233 and 243. As a result, the outlets 233 and 243 may be clogged.

Therefore, as shown in FIG. 12, the grinding device 1 includes first liquid level sensors 80-1 and 80-2 located inside the housing 40. The first liquid level sensors 80-1 and 80-2 detect the liquid level of the liquid accumulated inside the housing 40. When the detected liquid level exceeds a preset height, the control unit 16 determines that the discharge ports 233 and 243 are clogged.

Further, the grinding device 1 includes sensor covers 81-1 and 81-2 located between the chuck 20 and the first liquid level sensors 80-1 and 80-2. The sensor covers 81-1 and 81-2 block the sewage from the substrate W held by the chuck 20 toward the first liquid level sensors 80-1 and 80-2 on the way. Therefore, it is possible to suppress the dirt from adhering to the first liquid level level sensors 80-1 and 80-2, and it is possible to suppress the malfunction of the first liquid level level sensors 80-1 and 80-2. Further, the impact applied to the first liquid level level sensors 80-1 and 80-2 can be reduced, and the failure of the first liquid level level sensors 80-1 and 80-2 can be suppressed.

The housing 40 includes four side panels 42-1, 42-2, 42-3, 42-4 located laterally to the chuck 20. These side panels 42 are combined in a rectangular shape to form four angles CR0-CR4. CR0 is the corner of the loading / unloading chamber B0, CR1 is the corner of the primary grinding chamber B1, CR2 is the corner of the secondary grinding chamber B2, and CR3 is the corner of the tertiary grinding chamber C3.

The first liquid level sensor 80-1 is located at the corner CR1 and another first liquid level sensor 80-2 is located at another corner CR2. By arranging the first liquid level sensors 80-1 and 80-2 at the corners CR1 and CR2, it is possible to prevent interference with other members.

Seen from above, the sensor cover 81-1 has an inclined plate 81a-1 inclined with respect to each of the two side panels 42-1 and 42-2 forming the angle CR1. The first liquid level sensor 80-1 is located in a space surrounded by two side panels 42-1 and 42-2 and an inclined plate 81a-1. By hiding the corner CR1 with the inclined plate 81a-1, it is possible to prevent dirt from accumulating on the corner CR1.

Further, when viewed from above, the sensor cover 81-2 has an inclined plate 81a-2 inclined with respect to each of the two side panels 42-2 and 42-3 forming the angle CR2. The first liquid level sensor 80-2 is located in a space surrounded by the two side panels 42-2 and 42-3 and the inclined plate 81a-2. By hiding the corner CR2 with the inclined plate 81a-2, it is possible to prevent dirt from accumulating on the corner CR2.

Seen from above, the first liquid level sensor 80-1 overlaps the gutter 230, and another first liquid level sensor 80-2 overlaps the other gutter 240. The first liquid level sensors 80-1 and 80-2 may enter the inside of the gutters 230 and 240, or may be located above the gutters 230 and 240. In any case, the liquid level can be detected at the positions of the gutters 230 and 240 where the liquid collects.

When viewed from above, the first liquid level sensors 80-1 and 80-2 are located in the vicinity of the discharge ports 233 and 243. By arranging the first liquid level sensors 80-1 and 80-2 in the vicinity of the discharge ports 233 and 243, clogging of the discharge ports 233 and 243 can be reliably detected.

The grinding device 1 is separate from the first liquid level sensors 80-1 and 80-2, and the second liquid level level sensors 82-1 and 82-2 that detect the liquid level of the liquid accumulated inside the housing 40. To prepare for. The first liquid level sensor 80-1 and the second liquid level sensor 82-1 are arranged at the same angle CR1 and detect the same liquid level. Further, the first liquid level level sensor 80-2 and the second liquid level level sensor 82-2 are arranged at the same angle CR2 and detect the same liquid level. The same liquid level can be double-checked with two sensors. Even if one sensor malfunctions or fails, the remaining sensors can detect the liquid level. The second liquid level sensors 82-1 and 82-2 may detect the liquid level at a position higher than the detection range of the first liquid level sensors 80-1 and 80-2.

Next, with reference to FIG. 13, a set of the first liquid level level sensor 80-1 and the second liquid level level sensor 82-1 will be described. Since another set of the first liquid level sensor 80-2 and the second liquid level level sensor 82-2 are configured in the same manner, the description thereof will be omitted.

The grinding device 1 includes a vertical pipe 83 communicating with the inside of the housing 40 on the outside of the housing 40. A horizontal pipe 86 extending from the lower end of the vertical pipe 83 is inserted into, for example, the inside of the gutter 230. The horizontal pipe 87 extending from the upper end of the vertical pipe 83 is arranged above, for example, the upper surface panel 41 of the housing 40.

Outside air enters the inside of the vertical pipe 83. Therefore, the liquid level of the liquid in the vertical pipe 83 is the same as the liquid level of the liquid in the housing 40. The second liquid level sensor 82-1 is attached to the vertical pipe 83 and detects the liquid level of the liquid in the vertical pipe 83.

Unlike the first liquid level sensor 80-1, the second liquid level sensor 82-1 is arranged outside the housing 40. Therefore, it is possible to prevent the sewage from scattering to the second liquid level sensor 82-1 and prevent the second liquid level sensor 82-1 from malfunctioning and malfunctioning.

The first liquid level sensor 80-1 includes a displacement meter that measures the displacement of the liquid level. For example, the first liquid level sensor 80-1 has a float 80a that moves up and down according to fluctuations in the liquid level, a guide 80b of the float 80a, and a displacement meter 80c that measures the displacement of the float 80a. The displacement meter is not limited to the float type. The displacement meter continuously measures the height of the liquid level within a predetermined range.

On the other hand, the second liquid level level sensor 82-1 includes a switch for detecting the arrival of the liquid level level set value. The switch is, for example, a proximity switch. The method of the proximity switch is not particularly limited, but is, for example, an optical method. The optical proximity switch detects the transmitted light of the transparent vertical tube 83, and detects the arrival of the liquid level level at the set value from the change in the amount of light. The proximity switch may be a capacitance type or the like. In this case, the vertical pipe 83 may be opaque. By using a method different from that of the first liquid level sensor 80-1 as the second liquid level level sensor 82-1, it is possible to avoid malfunction or failure of the two sensors at the same time.

The switch of the second liquid level sensor 82-1 includes a switch for detecting the arrival of the liquid level level set value. The set value of the liquid level may be lower than the height H of the peak 201 (see FIG. 10A) of the two inclined surfaces 210 and 220 combined in the chevron shape. It is possible to detect the clogging of the discharge ports 233 and 243 before the flow along the inclined surfaces 210 and 220 disappears and the grinding debris begins to deposit.

As shown in FIG. 12, the grinding apparatus 1 may have a corner cover 84 that covers the corner CR3, in addition to the sensor covers 81-1 and 81-2. The corner cover 84 has an inclined plate 84a that is inclined with respect to each of the two side panels 42-3 and 42-4 forming the angle CR3. By hiding the corner CR3 with the inclined plate 84a, it is possible to prevent dirt from accumulating on the corner CR3. The corner cover 84 does not have to be installed in the carry-in / out room B0.

Further, the grinding device 1 may have a second corner cover 85 that covers the corner between the side panel 42 and the fixed partition wall 45. The second corner cover 85 has a second inclined plate 85a that is inclined with respect to each of the side panel 42 and the fixed partition wall 45. By hiding the corners with the second inclined plate 85a, it is possible to prevent dirt from accumulating on the corners. The second corner cover 85 is installed in the primary grinding chamber B1, the secondary grinding chamber B2, and the tertiary grinding chamber B3. The second corner cover 85 does not have to be installed in the carry-in / out room B0.

As shown in FIG. 14A, the grinding device 1 includes an exterior 300 forming an outer surface of the grinding device 1. The exterior 300 houses a table 10, a chuck 20, a chuck drive unit 19, a tool drive unit 30, a housing 40, and a recovery unit 320 inside the exterior 300. The collection unit 320 collects the grinding debris. The grinding debris flows into the recovery unit 320 together with a liquid such as a grinding fluid. The collection unit 320 separates the liquid from the grinding debris, discharges the liquid, and leaves the grinding debris. Details of the collection unit 320 will be described later.

The exterior 300 is formed with a first opening 301 and a second opening 302 separately. The first opening 301 allows the operator or the working robot to access the chuck 20 or the tool drive unit 30 from the outside of the grinding device 1. On the other hand, the second opening 302 allows the worker or the working robot to access the recovery unit 320 from the outside of the grinding device 1.

The grinding device 1 includes a first door 311 that opens and closes the first opening 301, and a second door 312 that opens and closes the second opening 302 separately from the first door 311. A worker or a working robot operates the first door 311 to open and close the first opening 301. Similarly, a worker or a working robot operates the second door 312 to open and close the second opening 302.

According to the present embodiment, the first opening 301 and the second opening 302 are separately formed on the outer surface of the grinding device 1. The second opening 302 is formed closer to the recovery unit 320 than the first opening 301. As a result, the worker or the working robot does not need to operate the first door 311 and open the first opening 301 when touching the collection unit 320. Therefore, the worker or the working robot does not have to touch the chuck 20 or the tool driving unit 30. Therefore, the grinding debris can be taken out to the outside of the grinding apparatus 1 without interrupting the grinding of the substrate W while driving the chuck 20 and the grinding tool D. That is, during the grinding of the substrate W, the grinding debris can be taken out to the outside of the grinding device 1.

The first opening 301 and the second opening 302 are formed, for example, on the side surfaces of the grinding device 1 in the same direction. The first opening 301 and the second opening 302 may be formed on the opposite side surfaces of the grinding device 1, and the number of the first opening 301 and the second opening 302 may be plural. Further, the number of collection units 320 may be plural. The collection unit 320 is located below the housing 40 shown in FIG. 13 and the like, and collects the grinding debris that falls from the discharge ports 233 and 243 of the housing 40.

As shown in FIG. 14A, the grinding device 1 includes a door sensor 321 that detects the opening of the first opening 301 by the first door 311. The door sensor 321 is not particularly limited, but is, for example, a proximity switch. When the door sensor 321 detects the opening of the first opening 301, the door sensor 321 transmits a signal indicating the opening to the control unit 16 (see FIG. 1).

When the control unit 16 detects the opening of the first opening 301 by the door sensor 321 while driving the chuck 20 and the grinding tool D, the control unit 16 stops driving the chuck 20 and the grinding tool D. Similarly, when the control unit 16 detects the opening of the first opening 301 by the door sensor 321 while driving the table 10, the control unit 16 stops driving the table 10. It is possible to prevent contact between the driven object and the operator or the working robot.

On the other hand, the control unit 16 continues to drive the chuck 20 and the grinding tool D even if the second door 312 opens the second opening 302 while the chuck 20 and the grinding tool D are being driven. Similarly, the control unit 16 continues to drive the table 10 even if the second door 312 opens the second opening 302 while the table 10 is being driven. In order to take out the grinding debris to the outside of the grinding device 1, it is not necessary to interrupt the grinding of the substrate W.

As described above, even if the second door 312 opens the second opening 302, the control unit 16 continues to drive the object. Therefore, the door sensor that detects the opening of the second opening 302 may be omitted.

As shown in FIG. 14 (B), the recovery unit 330 includes walls 341, 342, 343, 344, 345 that limit access to the chuck 20 or the tool drive unit 30 from the second opening 302. The walls 341, 342, 343, 344, 345 form the box 340. The box 340 is opened toward the second opening 302.

As shown in FIG. 15, an inlet 346 for grinding debris is formed on the wall 341 which is the ceiling of the box 340. The inlet 346 communicates with the discharge port 233 or 243 of the housing 40 via the pipe 250 or 260. The inlet 346 may communicate with both outlets 233 and 243 via both pipes 250 and 260. Grinding debris passes through the inlet 346 of the box 340 and falls inside the box 340.

The collection unit 330 may include a pair of guide walls 351 and 352 that guide the grinding debris falling from the inlet 346 of the box 340 inside the box 340.

As shown in FIG. 15, the recovery unit 330 includes a plurality of containers 331 and 332 for accommodating grinding debris. The plurality of containers 331 and 332 can be separately removed from the inside of the box 340. For example, while collecting grinding debris in one container 331, another container 332 can be removed and the container 332 can be emptied. However, the number of containers may be one.

As shown in FIG. 14B, the box 340 has doors 347 and 348 that open and close the outlets of the containers 331 and 332. The doors 347 and 348 are separate doors from the second door 312, but may also serve as the second door 312. The worker or the working robot opens the doors 347 and 348 and takes out the containers 331 and 332 to the outside of the box 340. After that, the worker or the working robot returns the empty containers 331 and 332 to the inside of the box 340 and closes the doors 347 and 348.

As shown in FIG. 15, the collection unit 330 includes a switching mechanism 360 for switching the storage destination of the grinding debris. The switching mechanism 360 has, for example, a rotating plate 361 and an operating lever 362. The rotary plate 361 is located in the passage where the grinding chips fall and is inclined. The operation lever 362 rotates the rotary plate 361 and switches the tilting direction of the rotary plate 361. By switching the inclination direction of the rotary plate 361, the storage destination of the grinding debris can be switched.

The rotation diameter of the rotating plate 361 is smaller than the distance between the pair of guide walls 351 and 352. The pair of guide walls 351 and 352 also serve as a stopper for stopping the rotation of the rotating plate 361. The rotation shaft 363 of the rotation plate 361 is arranged horizontally, and is arranged directly below the center of the pair of guide walls 351 and 352 in the horizontal direction.

As shown in FIG. 15 (A), the rotating plate 361 is inclined to the lower left in a state of being in contact with the right guide wall 352, and the grinding debris is dropped into the container 331 on the left. In this case, the storage destination of the grinding waste is the container 331 on the left.

On the other hand, as shown in FIG. 15B, the rotating plate 361 is inclined to the lower right in a state of being in contact with the left guide wall 351 and drops grinding chips into the right container 332. In this case, the storage destination of the grinding waste is the container 332 on the right.

The recovery unit 330 includes a lock mechanism 370. The lock mechanism 370 restricts the removal of the container 331, which is the storage destination of the grinding debris, and allows the removal of the other containers 332. Alternatively, the lock mechanism 370 restricts the removal of the container 332, which is the storage destination of the grinding debris, and allows the removal of the other container 331. It is possible to prevent the container, which is the storage destination, from being accidentally removed during the storage of the grinding debris, and it is possible to prevent the grinding debris from being scattered inside the box 340.

As the lock mechanism 370, for example, the operation lever 362 of the switching mechanism 360 is used. The operating lever 362 extends linearly from, for example, the rotating shaft 363 of the rotating plate 361 to the path through which the container passes, and restricts the removal of the container. The operating lever 362 limits the removal of the container 331 by, for example, pressing the door 347 as shown in FIG. 14 (B). Further, the operation lever 362 restricts the removal of another container 332 by pressing another door 348. The operation lever 362 switches between a state in which only the door 347 is pressed and a state in which only another door 348 is pressed. If the operation lever 362 is the lock mechanism 370, the lock destination can be switched at the same time as the accommodation destination is switched, and it is possible to prevent forgetting to switch the lock destination.

Containers 331 and 332 contain a net to leave grinding debris and separate the liquid from the grinding debris. The containers 331 and 332 are entirely net cages, but only the lower wall may be net. The recovery unit 330 includes a net-like mounting unit 333 that supports the containers 331 and 332 from below and drops the liquid downward. On the mounting portion 333, there may be a partition plate 334 that partitions between adjacent containers 331 and 332. After dripping from the containers 331 and 332, the liquid passes through the mounting section 333 and is discharged to the outside of the collecting section 330. Only the grinding debris can be left inside the collection unit 330, and the frequency of taking out the containers 331 and 332 from the box 340 can be reduced.

Although the grinding device and the grinding method according to the present disclosure have been described above, the present disclosure is not limited to the above-described embodiment and the like. Various changes, modifications, replacements, additions, deletions, and combinations are possible within the scope of the claims. Of course, they also belong to the technical scope of the present disclosure.

For example, the number of tool drive units 30 may be one or more. Further, the number of chucks 20 may be larger than the number of tool drive units 30. Further, the inside of the housing 40 is divided into four rooms B0 to B3 by the fixed partition wall 45, but the number of the rooms is not limited to four and may be two or more.

1 Grinding device 10 Table 20 Chuck 30 Tool drive unit 40 Housing 45 Fixed partition wall 46 Pan 50 Nozzle 201, 202 Inclined surface W Substrate

Claims (7)

With multiple chucks holding the board,
A table that holds a plurality of the chucks around the rotation center line and rotates around the rotation center line,
A housing that accommodates the plurality of chucks,
A fixed partition wall that divides the inside of the housing into four rooms around the rotation center line of the table.
A tool drive unit that drives the grinding tool pressed against the substrate inside the room,
A nozzle for supplying a grinding fluid to the substrate inside the room is provided.
The housing is located below the plurality of chucks and contains a pan that receives the falling grinding fluid and grinding debris.
The pan is a grinding device having two inclined surfaces on the upper surface thereof, which are inclined downward so as to be separated from the boundary line between the two adjacent chambers and the remaining two chambers. The pan has two gutters along the lower edges of the two slopes.
The grinding apparatus according to claim 1, wherein each gutter has a guide surface at the bottom of the groove, which is inclined downward from one end of the lower edge toward the other end. The grinding apparatus according to claim 2, wherein each of the gutters includes a discharge port for discharging the grinding fluid and the grinding debris at the lowest height portion of the groove bottom. The tool driving unit includes a movable portion on which the grinding tool is mounted and an elevating portion for raising and lowering the movable portion.
The grinding apparatus according to claim 2 or 3, wherein the elevating portion faces the inclined edge of the inclined surface and does not face the lower edge of the inclined surface. The three chambers are grinding chambers in which the substrate is ground.
The grinding apparatus according to any one of claims 1 to 4, wherein the remaining one room is a loading / unloading chamber in which the substrate is loaded / unloaded. The three chambers are grinding chambers in which the substrate is ground.
The remaining one room is a loading / unloading room where the board is loaded / unloaded.
The pan has two gutters along the lower edges of the two slopes.
The grinding apparatus according to claim 1, wherein the one gutter has a guide surface at the bottom of the groove, which is inclined downward from the loading / unloading chamber toward the grinding chamber. The three chambers are a primary grinding chamber in which the primary grinding of the substrate is performed, a secondary grinding chamber in which the secondary grinding of the substrate is performed after the primary grinding, and the substrate after the secondary grinding. It is a tertiary grinding room where the tertiary grinding is performed.
The remaining one room is a loading / unloading room where the board is loaded / unloaded.
The pan has two gutters along the lower edges of the two slopes.
One gutter has, at its bottom, a guide surface that inclines downward from the carry-in / out chamber toward the primary grinding chamber.
The grinding apparatus according to claim 1, wherein another one of the gutters has a guide surface at the bottom of the groove, which is inclined downward from the tertiary grinding chamber toward the secondary grinding chamber.

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