JP2022041644A - Magnetic sensor and diagnostic device - Google Patents

Abstract

To provide a magnetic sensor and diagnostic device capable of improving sensitivity.SOLUTION: A magnetic sensor includes a first element portion, a first conductive member, a second conductive member, a first circuit, and a second circuit. The first element portion includes a first magnetic element, a second magnetic element, a third magnetic element, and a fourth magnetic element. The first circuit is electrically connected to a third portion of the first conductive member and a sixth portion of the second conductive member and can supply a first current containing an AC component between the third portion and the sixth portion. The second circuit is electrically connected to a first connection point of a first other end of the first magnetic element and a third other end of the third magnetic element, and a second connection point of a second end of the second magnetic element and a fourth end of the fourth magnetic element, and can supply a second current between the first connection point and the second connection point.SELECTED DRAWING: Figure 1

Description

Embodiments of the present invention relate to magnetic sensors and diagnostic devices.

There is a magnetic sensor using a magnetic layer. There is a diagnostic device that uses a magnetic sensor. It is desired to improve the sensitivity of the magnetic sensor.

Japanese Unexamined Patent Publication No. 2018-155719

An embodiment of the present invention provides a magnetic sensor and a diagnostic device capable of improving sensitivity.

According to the embodiment of the present invention, the magnetic sensor includes a first element unit, a first conductive member, a second conductive member, a first circuit, a second circuit, a first magnetic member, and a second magnetic member. The first element unit includes a first magnetic element, a second magnetic element, a third magnetic element, and a fourth magnetic element. The first magnetic element includes a first end portion and a first end portion. The second magnetic element includes a second end portion and a second end portion. The third magnetic element includes a third end portion and a third end portion. The fourth magnetic element includes a fourth end portion and the fourth end portion. The fourth end is located between the fourth end and the first end in the first direction. The third end is located between the fourth end and the first end in the first direction. The third end is located between the third end and the first end in the first direction. The second end is located between the third end and the first end in the first direction. The second end is located between the second end and the first end in the first direction. The first end is located between the second end and the first end in the first direction. The first end is electrically connected to the second other end. The third end is electrically connected to the fourth other end. The first other end is electrically connected to the third other end. The second end is electrically connected to the fourth end, and the first conductive member includes a first portion, a second portion and a third portion. The direction from the first portion to the second portion is along the first direction. The third portion is between the first portion and the second portion. The second conductive member includes a fourth portion, a fifth portion, and a sixth portion. The direction from the fourth portion to the fifth portion is along the first direction. The sixth portion is between the fourth portion and the fifth portion. The first portion is electrically connected to the fourth portion. The second portion is electrically connected to the fifth portion. The first circuit is electrically connected to the third portion and the sixth portion, and can supply a first current including an alternating current component between the third portion and the sixth portion. The second circuit is electrically connected to the first connection point of the first end and the third end, and the second connection point of the second end and the fourth end. A second current can be supplied between the first connection point and the second connection point. The first magnetic member includes a first magnetic end portion and a second magnetic end portion. The second magnetic member includes a third magnetic end portion and a fourth magnetic end portion. The direction from the first magnetic end to the fourth magnetic end is along a third direction that intersects the plane including the first and second directions. The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction. The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction. The third magnetic end is separated from the second magnetic end in the third direction. The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlap.

1 (a) to 1 (e) are schematic views illustrating the magnetic sensor according to the first embodiment. 2 (a) and 2 (b) are schematic plan views illustrating the magnetic sensor according to the first embodiment. 3A and 3B are schematic plan views illustrating the magnetic sensor according to the first embodiment. FIG. 4 is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment. 5 (a) to 5 (c) are graphs illustrating the characteristics of the magnetic sensor according to the first embodiment. 6 (a) to 6 (c) are schematic views illustrating the magnetic sensor according to the second embodiment. 7 (a) and 7 (b) are schematic plan views illustrating the magnetic sensor according to the second embodiment. 8 (a) and 8 (b) are schematic plan views illustrating the magnetic sensor according to the second embodiment. 9 (a) to 9 (c) are schematic views illustrating the magnetic sensor according to the third embodiment. 10 (a) and 10 (b) are schematic plan views illustrating the magnetic sensor according to the third embodiment. 11 (a) and 11 (b) are schematic plan views illustrating the magnetic sensor according to the third embodiment. FIG. 12 is a schematic diagram illustrating the magnetic sensor according to the fourth embodiment. FIG. 13 is a schematic perspective view showing an application example of the magnetic sensor according to the embodiment. FIG. 14 is a schematic plan view showing an application example of the magnetic sensor according to the embodiment. FIG. 15 is a schematic diagram showing a magnetic sensor and a diagnostic device according to an embodiment. FIG. 16 is a schematic diagram showing a magnetic sensor according to an embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between the parts, etc. are not always the same as the actual ones. Even if the same part is represented, the dimensions and ratios may be different from each other depending on the drawing.
In the present specification and each figure, the same elements as those described above with respect to the above-mentioned figures are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate.

(First Embodiment)
1 (a) to 1 (e) are schematic views illustrating the magnetic sensor according to the first embodiment. FIG. 1A is a plan view illustrating a part of a magnetic sensor. FIG. 1B is a sectional view taken along line A1-A1 of FIG. 1A. FIG. 1 (c) is a sectional view taken along line A2-A2 of FIG. 1 (a). 1 (d) is a cross-sectional view taken along the line A3-A3 of FIG. 1 (a). FIG. 1 (e) is a sectional view taken along line A4-A4 of FIG. 1 (a).
2 (a), 2 (b), 3 (a), and 3 (b) are schematic plan views illustrating the magnetic sensor according to the first embodiment.
In these figures, some elements are appropriately omitted to make the figures easier to read.

As shown in FIGS. 1 (a) to 1 (e), FIGS. 2 (a) and 2 (b), the magnetic sensor 110 according to the embodiment includes a first element unit 10P, a first conductive member 21, and a first element. 2 Includes a conductive member 22, a first circuit 71, and a second circuit 72. The first circuit 71 and the second circuit 72 may be included in the circuit unit 70, for example.

The first element unit 10P includes a first magnetic element 11E, a second magnetic element 12E, a third magnetic element 13E, and a fourth magnetic element 14E.

As shown in FIG. 2B, the first magnetic element 11E includes a first end portion 11e and a first end portion 11f. The second magnetic element 12E includes a second end portion 12e and a second end portion 12f. The third magnetic element 13E includes a third end portion 13e and a third end portion 13f. The fourth magnetic element 14E includes a fourth end portion 14e and a fourth end portion 14f.

In the first direction, there is a fourth other end 14f between the fourth end 14e and the first other end 11f.

The first direction is the Y-axis direction. One direction perpendicular to the Y-axis direction is defined as the Z-axis direction. The direction perpendicular to the Y-axis direction and the Z-axis direction is defined as the X-axis direction.

In the first direction, there is a third end 13e between the fourth end 14f and the first end 11f. In the first direction, there is a third other end 13f between the third end 13e and the first other end 11f. In the first direction, there is a second end portion 12e between the third other end portion 13f and the first other end portion 11f. In the first direction, there is a second other end 12f between the second end 12e and the first other end 11f. In the first direction, there is a first end 11e between the second end 12f and the first end 11f.

The first end portion 11e is electrically connected to the second other end portion 12f. The third end portion 13e is electrically connected to the fourth other end portion 14f. The first other end portion 11f is electrically connected to the third other end portion 13f. The second end 12e is electrically connected to the fourth end 14e. These electrical connections are made by connecting members 18a to 18d and the like.

As shown in FIG. 2A, the first conductive member 21 includes a first portion 21a, a second portion 21b, and a third portion 21c. The direction from the first portion 21a to the second portion 21b is along the first direction (for example, the Y-axis direction). The third portion 21c is between the first portion 21a and the second portion 21b.

The second conductive member 22 includes a fourth portion 22d, a fifth portion 22e, and a sixth portion 22f. The direction from the fourth portion 22d to the fifth portion 22e is along the first direction (for example, the Y-axis direction). The sixth portion 22f is between the fourth portion 22d and the fifth portion 22e. The first portion 21a is electrically connected to the fourth portion 22d. The second portion 21b is electrically connected to the fifth portion 22e. These electrical connections are made by connecting members 28c and 28d and the like.

As shown in FIGS. 1 (b) to 1 (e), the first magnetic element 11E and the second magnetic element 12E overlap with the first conductive member 21 in the second direction intersecting the first direction. The second direction is, for example, the Z-axis direction. The third magnetic element 13E and the fourth magnetic element 14E overlap with the second conductive member 22 in the second direction (for example, the Z-axis direction).

As shown in FIG. 2B, the first magnetic element 11E overlaps the portion between the third portion 21c and the second portion 21b of the first conductive member 21. The second magnetic element 12E overlaps the portion between the first portion 21a and the third portion 21c of the first conductive member 21. The third magnetic element 13E overlaps the portion between the sixth portion 22f and the fifth portion 22e of the second conductive member 22. The fourth magnetic element 14E overlaps the portion between the fourth portion 22d and the sixth portion 22f of the second conductive member 22.

As shown in FIG. 2A, the first circuit 71 is electrically connected to the third portion 21c and the sixth portion 22f. The first circuit 71 can supply a first current I1 including an AC component between the third portion 21c and the sixth portion 22f. For example, the first circuit 71 is electrically connected to the third portion 21c by the connecting member 28a. For example, the first circuit 71 is electrically connected to the sixth portion 22f by the connecting member 28b.

As shown in FIG. 2A, for example, when the first current I1 including the AC component is positive, a part of the first current I1 flows from the third portion 21c to the first portion 21a. A part of the first current I1 flows in the direction from the third portion 21c to the second portion 21b. A part of the first current I1 flows in the direction from the fourth portion 22d to the sixth portion 22f. A part of the first current I1 flows in the direction from the fifth portion 22e to the sixth portion 22f. The direction of the first current I1 when the first current I1 including the AC component is negative is opposite to the direction of the first current I1 when the first current I1 is positive.

As shown in FIG. 2A, the second circuit 72 is electrically connected to the first connection point CP1 and the second connection point CP2. The first connection point CP1 is a connection point between the first other end portion 11f and the third other end portion 13f. The second connection point CP2 is a connection point between the second end portion 12e and the fourth end portion 14e. For example, the second circuit 72 is electrically connected to the first connection point CP1 by the connecting member LCP1. For example, the second circuit 72 is electrically connected to the second connection point CP2 by the connecting member LCP2. The second circuit 72 can supply the second current I2 between the first connection point CP1 and the second connection point CP2.

In the magnetic sensor 110, the electric resistances of the first to fourth magnetic elements 11E to 14E change according to the external magnetic field to be detected. The first to fourth magnetic elements 11E to 14E are bridge-connected. The influence of noise is suppressed. In the magnetic sensor 110, the first to fourth magnetic elements 11E to 14E are arranged along the Y-axis direction. The width of the first element unit 10P in the X-axis direction is small. For example, the resolution along the X-axis direction can be increased. According to the embodiment, it is possible to provide a magnetic sensor capable of improving the sensitivity, which can detect a change of an external magnetic field to be detected along the X-axis direction with high sensitivity. For example, the electric resistance of each of the first to fourth magnetic elements 11E to 14E changes according to an external magnetic field having a component in the X-axis direction.

As will be described later, the electric resistances of the first to fourth magnetic elements 11E to 14E change substantially even with respect to the external magnetic field. A magnetic field (current magnetic field) generated by a first current I1 (alternating current component) flowing through the first conductive member 21 and the second conductive member 22 is applied to these magnetic elements. The directions (phases) of the current magnetic fields applied to the first to fourth magnetic elements 11E to 14E are different from each other. By bridging four magnetic elements to which current magnetic fields having different polarities are applied, for example, the influence of noise can be further suppressed and an external magnetic field can be detected with high sensitivity.

For example, a current magnetic field generated by the first current I1 flowing through the first conductive member 21 is applied to the first magnetic element 11E and the second magnetic element 12E. At the same time, the direction (phase) of the current magnetic field applied to the first magnetic element 11E is opposite to the direction (phase) of the current magnetic field applied to the second magnetic element 12E. The current magnetic field generated by the first current I1 flowing through the second conductive member 22 is applied to the third magnetic element 13E and the fourth magnetic element 14E. At the same time, the direction (phase) of the current magnetic field applied to the third magnetic element 13E is opposite to the direction (phase) of the current magnetic field applied to the fourth magnetic element 14E.

At the same time, the direction (phase) of the current magnetic field applied to the first magnetic element 11E is opposite to the direction (phase) of the current magnetic field applied to the third magnetic element 13E. At the same time, the direction (phase) of the current magnetic field applied to the second magnetic element 12E is opposite to the direction (phase) of the current magnetic field applied to the fourth magnetic element 14E.

By bridging these four magnetic elements, it is possible to suppress an unnecessary noise component due to the first current I1 including an AC component.

Hereinafter, an example of the configuration of the magnetic element will be described.
As shown in FIG. 1 (b), the first magnetic element 11E is provided between the first magnetic layer 11, the first opposed magnetic layer 11o, and the first magnetic layer 11 and the first opposed magnetic layer 11o. Also includes a first non-magnetic layer 11n. The direction from the first magnetic layer 11 to the first opposed magnetic layer 11o is along the second direction (for example, the Z-axis direction). As shown in FIG. 1 (c), the second magnetic element 12E is provided between the second magnetic layer 12, the second opposed magnetic layer 12o, and the second magnetic layer 12 and the second opposed magnetic layer 12o. Also includes a second non-magnetic layer 12n. The direction from the second magnetic layer 12 to the second opposed magnetic layer 12o is along the second direction (for example, the Z-axis direction).

As shown in FIG. 1 (d), the third magnetic element 13E is provided between the third magnetic layer 13, the third opposed magnetic layer 13o, and the third magnetic layer 13 and the third opposed magnetic layer 13o. Also includes a third non-magnetic layer 13n. The direction from the third magnetic layer 13 to the third opposed magnetic layer 13o is along the second direction (for example, the Z-axis direction). As shown in FIG. 1 (e), the fourth magnetic element 14E is provided between the fourth magnetic layer 14, the fourth opposed magnetic layer 14o, and the fourth magnetic layer 14 and the fourth opposed magnetic layer 14o. Also includes a fourth non-magnetic layer 14n. The direction from the fourth magnetic layer 14 to the fourth opposed magnetic layer 14o is along the second direction (for example, the Z-axis direction).

In one example, the first to fourth magnetic layers 11 to 14 are one of the magnetization free layer and the reference layer. At this time, the first to fourth opposed magnetic layers 11o to 14o are the other of the magnetization free layer and the reference layer. For example, in the absence of an external magnetic field, the magnetizations of the free-to-magnetize layer and the reference layer are along the Y-axis direction. When an external magnetic field is applied to the magnetic element, the direction of magnetization of the magnetization free layer changes according to the external magnetic field. The angle between the magnetization direction of the magnetization free layer and the magnetization direction of the reference changes depending on the external magnetic field. The change in angle causes a change in electrical resistance.

Since the first to fourth magnetic elements 11E to 14E have the above-mentioned configuration, for example, the change in the electric resistance of the magnetic element tends to be substantially even function with respect to the external magnetic field.

Hereinafter, an example of a change in electrical resistance in a magnetic element will be described. Hereinafter, one magnetic element (first magnetic element 11E) will be described.

FIG. 4 is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment.
The horizontal axis of FIG. 4 is the intensity of the external magnetic field Hex applied to the first magnetic element 11E. The vertical axis is the electric resistance Rx between the first magnetic elements 11E. FIG. 4 corresponds to the RH characteristic.

As shown in FIG. 4, the electric resistance Rx has an even function characteristic with respect to a magnetic field (external magnetic field Hex, for example, a magnetic field in the X-axis direction) applied to the first magnetic element 11E. For example, the electric resistance Rx has a first value R1 when the first magnetic field Hex1 is applied to the first magnetic element 11E. The electric resistance Rx has a second value R2 when the second magnetic field Hex2 is applied to the first magnetic element 11E. The electric resistance Rx has a third value R3 when a third magnetic field Hex3 is applied to the first magnetic element 11E. The absolute value of the first magnetic field Hex1 is smaller than the absolute value of the second magnetic field Hex2 and smaller than the absolute value of the third magnetic field Hex3. For example, the first magnetic field Hex1 is substantially zero. The direction of the second magnetic field Hex2 is opposite to the direction of the third magnetic field Hex3. The first value R1 is smaller than the second value R2 and smaller than the third value R3.

Hereinafter, an example will be described in which the first current I1 is an alternating current and does not substantially contain a direct current component. A first current I1 (alternating current) is supplied to the first conductive member 21, and an alternating magnetic field generated by the alternating current is applied to the first magnetic element 11E. An example of the change in the electric resistance Rx at this time will be described.

5 (a) to 5 (c) are graphs illustrating the characteristics of the magnetic sensor according to the first embodiment.
FIG. 5A shows the characteristics when the signal magnetic field Hsig (external magnetic field) applied to the first magnetic element 11E is 0. FIG. 5B shows the characteristics when the signal magnetic field Hsig is positive. FIG. 5C shows the characteristics when the signal magnetic field Hsig is negative. These figures show the relationship between the magnetic field H and the resistance R (corresponding to the electric resistance Rx).

As shown in FIG. 5A, when the signal magnetic field Hsig is 0, the resistance R exhibits a characteristic symmetric with respect to the positive and negative magnetic fields H. When the AC magnetic field Hac is zero, the resistance R is low resistance Ro. For example, the magnetization of the magnetization free layer rotates in substantially the same manner with respect to the positive and negative magnetic fields H. Therefore, a symmetrical resistance increasing characteristic can be obtained. The fluctuation of the resistance R with respect to the AC magnetic field Hac has the same value with positive and negative polarities. The cycle of change of resistance R is twice the cycle of AC magnetic field Hac. The change in resistance R has substantially no frequency component of the AC magnetic field Hac.

As shown in FIG. 5B, when a positive signal magnetic field Hsig is applied, the characteristics of the resistance R shift to the side of the positive magnetic field H. In the AC magnetic field Hac on the positive side, the resistance R becomes large. In the negative AC magnetic field Hac, the resistance R becomes small.

As shown in FIG. 5C, when a negative signal magnetic field Hsig is applied, the characteristics of the resistance R shift to the side of the negative magnetic field H. In the AC magnetic field Hac on the positive side, the resistance R becomes smaller. In the negative AC magnetic field Hac, the resistance R becomes large.

When a signal magnetic field Hsig of a predetermined magnitude is applied, the resistance R fluctuates differently with respect to the positive and negative of the AC magnetic field Hac. The period of fluctuation of the resistance R with respect to the positive and negative of the AC magnetic field Hac is the same as the period of the AC magnetic field Hac. The output voltage of the AC frequency component corresponding to the signal magnetic field Hsig is generated.

The above characteristics are obtained when the signal magnetic field Hsig does not change with time. When the signal magnetic field Hsig changes with time, it becomes as follows. The frequency of the signal magnetic field Hsig is defined as the signal frequency fsig. The frequency of the AC magnetic field Hac is defined as the AC frequency fac. At this time, an output corresponding to the signal magnetic field Hsig is generated at a frequency of fac ± fsig.

When the signal magnetic field Hsig changes with time, the signal frequency fsig is, for example, 1 kHz or less. On the other hand, the AC frequency fac is sufficiently higher than the signal frequency fsig. For example, the AC frequency fac is 10 times or more the signal frequency fsig.

For example, there is an application of detecting a magnetic field generated from a living body by using a magnetic sensor 110. When such a biomagnetic field (for example, magnetoencephalography, magnetocardiography, or nerve cells) is detected, the signal frequency fsig is 1 kHz or less. In this case, the AC frequency fac is, for example, 100 kHz or more.

For example, the second to fourth magnetic elements 12E to 14E also have the same operating characteristics as the first magnetic element 11E described above. In the magnetic sensor 110 according to the embodiment, the external magnetic field Hex (signal magnetic field Hsig) to be detected can be detected with high sensitivity by using such characteristics. Higher sensitivity can be obtained by bridging the first to fourth magnetic elements 11E to 14E.

In the example of FIG. 4, the electric resistance Rx is the lowest when the external magnetic field Hex is 0. In the embodiment, when the external magnetic field Hex is 0, the electric resistance Rx is the highest, and when the absolute value of the external magnetic field Hex becomes large, the electric resistance Rx may decrease. For example, such RH characteristics are obtained when antiparallel magnetic coupling acts between the first magnetic layer 11 and the first opposed magnetic layer 11o. For example, such characteristics can be obtained by combining the material of the first non-magnetic layer 11n and the thickness of the first non-magnetic layer 11n. For example, when the first non-magnetic layer 11n contains Cu, such characteristics are obtained when the thickness of the first non-magnetic layer 11n is about 2 nm (for example, 1.7 nm or more and 2.3 nm or less).

As shown in FIG. 2B, the magnetic sensor 110 may further include a third circuit 73. The third circuit 73 is electrically connected to the third connection point CP3 and the fourth connection point CP4. The third connection point CP3 is a connection point between the second end portion 12e and the fourth end portion 14e. The fourth connection point CP4 is a connection point between the first other end portion 11f and the third other end portion 13f. The third circuit 73 can detect the change ΔV of the potential between the third connection point CP3 and the fourth connection point CP4. By detecting the change ΔV of the potential between the two midpoints of the bridge circuit by the third circuit 73, the external magnetic field can be detected with higher sensitivity. The third circuit 73 may be included in the circuit unit 70, for example.

As shown in FIGS. 1 (b) to 1 (e) and FIG. 3 (a), the magnetic sensor 110 includes a first magnetic member 51 and a second magnetic member 52. The first magnetic member 51 includes a first magnetic end portion 51a and a second magnetic end portion 51b. The second magnetic member 52 includes a third magnetic end portion 52c and a fourth magnetic end portion 52d.

The direction from the first magnetic end portion 51a to the fourth magnetic end portion 52d is along the third direction. The third direction intersects the plane containing the first and second directions. The third direction is, for example, the X-axis direction. The second magnetic end portion 51b is located between the first magnetic end portion 51a and the fourth magnetic end portion 52d in the third direction. The third magnetic end 52c is located between the second magnetic end 51b and the fourth magnetic end 52d in the third direction. The third magnetic end 52c separates from the second magnetic end 51b in the third direction.

The first magnetic element 11E, the second magnetic element 12E, the third magnetic element 13E, and the fourth magnetic element 14E have the second magnetic end portion 51b and the third magnetic end portion 52c in the second direction (for example, the Z-axis direction). It overlaps with the area 66 between.

In this example, the insulating member 65 is provided. The insulating member 65 electrically insulates the first element portion 10P, the first conductive member 21, the second conductive member 22, the first magnetic member 51, and the second magnetic member 52 from each other. In this example, the region 66 between the first magnetic member 51 and the second magnetic member 52 is a part of the insulating member 65.

The first magnetic member 51 and the second magnetic member 52 function as, for example, an MFC (Magnetic Field Concentrator). The MFC collects, for example, an external magnetic field to be detected. The collected external magnetic field is efficiently applied to the magnetic element. Higher sensitivity is obtained.

In the magnetic sensor 110, the first to fourth magnetic elements 11E to 14E are provided in one pair of MFCs. As a result, detection with higher accuracy becomes possible as compared with the case where different pairs of MFCs are provided for each of the first to fourth magnetic elements 11E to 14E. For example, the influence of variations in magnetic members is suppressed. For example, the influence of variation in the distance between the magnetic member and the magnetic element is suppressed. For example, the frequency component due to the first current I1 including the AC component flowing through the conductive member is less likely to remain in the detection signal. This makes it easy to separate the peak of the signal to be detected and the frequency component of the alternating current.

For example, the distance (gap) between the two MFCs along the X-axis direction is narrowed, and the convergence efficiency of the detected magnetic field along the X-axis direction is improved. For example, the uniformity of the magnetic field applied to the first to fourth magnetic elements 11E to 14E by the two MFCs is high. For example, as compared with the case where different MFC pairs are provided for each of the first to fourth magnetic elements 11E to 14E, it is possible to suppress an increase in noise due to a convergent disturbance magnetic field fluctuation. According to the embodiment, it is possible to provide a magnetic sensor capable of improving sensitivity and reducing noise.

As shown in FIGS. 1 (b) to 1 (e), for example, the first conductive member 21 and the second conductive member 22 have a region 66 between the above in the second direction (for example, the Z-axis direction). Overlap.

As shown in FIGS. 1 (b) to 1 (e) and FIG. 3 (b), the magnetic sensor 110 may further include a first conductive layer 61. In this example, the magnetic sensor 110 further includes a fourth circuit 74. The fourth circuit 74 may be included in the circuit unit 70, for example.

As shown in FIG. 3B, the first conductive layer 61 extends along the first direction (Y-axis direction). As shown in FIGS. 1 (b) to 1 (e), the first conductive layer 61 has, for example, the first magnetic element 11E, the second magnetic element 12E, and the third in the second direction (for example, the Z-axis direction). It overlaps with the magnetic element 13E and the fourth magnetic element 14E. The fourth circuit 74 can supply the third current I3 to the first conductive layer 61.

For example, the first conductive layer 61 includes a first conductive end portion 61a and a second conductive end portion 61b. The direction from the first conductive end portion 61a to the second conductive end portion 61b is along the Y-axis direction. For example, for the connecting member 61aL, the first conductive end portion 61a and the fourth circuit 74 are electrically connected. For example, for the connecting member 61bL, the first conductive end portion 61b and the fourth circuit 74 are electrically connected.

For example, the third current I3 by the fourth circuit 74 can suppress, for example, the influence of noise existing outside (for example, the influence of geomagnetism). It becomes easier to obtain higher sensitivity.

In the magnetic sensor 110, for example, the electric resistance of the first magnetic element 11E, the electric resistance of the second magnetic element 12E, the electric resistance of the third magnetic element 13E, and the electric resistance of the fourth magnetic element 14E are the third current I3. It changes according to the change of.

For example, the same current magnetic field generated from the first conductive layer 61 is applied to the first to fourth magnetic layers 11 to 14. For example, the MFC collects a disturbance magnetic field in addition to the detected magnetic field. The collected disturbance magnetic field is applied to the first to fourth magnetic layers 11 to 14. For example, by adjusting the third current I3 supplied from the fourth circuit 74, the influence of the disturbance magnetic field can be suppressed. For example, the frequency component caused by the first current I1 including the AC component flowing through the first conductive member 21 and the second conductive member 22 is less likely to remain in the detection signal. For example, the peak of the signal to be detected and the frequency component of alternating current can be easily separated.

As shown in FIG. 3B, the position of the first magnetic end portion 51a in the X-axis direction and the position of the fourth magnetic end portion 52d in the X-axis direction are one of the positions of the first conductive layer 51 in the X-axis direction. It is between the position of the end portion 61p of the first conductive layer 51 in the X-axis direction and the position of the other end portion 61q in the X-axis direction of the first conductive layer 51 in the X-axis direction. The magnetic field due to the third current I3 flowing through the first conductive layer 61 is more uniformly applied to the first to fourth magnetic elements 11E to 14E. The influence of external noise can be suppressed more stably. For example, the length of the first conductive layer 61 along the X-axis direction is longer than the length of the first to fourth magnetic elements 11E to 11E along the X-axis direction. For example, the length of the first conductive layer 61 along the X-axis direction is longer than the length of the MFC pair along the X-axis direction.

As shown in FIG. 1A, the first magnetic element 11E has a first length L1 along the first direction (Y-axis direction) and a first crossing length along the third direction (for example, the X-axis direction). It has W1 and. The first crossing length W1 is, for example, a width. The first length L1 is longer than the first crossing length W1. The second magnetic element 12E has a second length L2 along the first direction and a second cross length W2 along the third direction. The second crossing length W2 is, for example, a width. The second length L2 is longer than the second crossing length W2. The third magnetic element 13E has a third length L3 along the first direction and a third crossing length W3 along the third direction. The third crossing length W3 is, for example, a width. The third length L3 is longer than the third crossing length W3. The fourth magnetic element 14E has a fourth length L4 along the first direction and a fourth cross length W4 along the third direction. The fourth crossing length W4 is, for example, a width. The fourth length L4 is longer than the four cross lengths W4.

Due to such a shape, the magnetization of the first to fourth magnetic layers 11 to 14 tends to be along the Y-axis direction. The magnetization of the first to fourth opposed magnetic layers 11o to 14o tends to be along the Y-axis direction. For example, it becomes easy to obtain the characteristics of even functions.

As shown in FIG. 3A, at least one of the first to fourth lengths L1 to L4 is larger than the distance (gap length) between the second magnetic end portion 51b and the third magnetic end portion 52c. long. For example, stable magnetization in the magnetic layer can be obtained. The narrow gap length allows a high density external magnetic field to be applied to the magnetic element. Higher sensitivity is obtained.

(Second Embodiment)
6 (a) to 6 (c) are schematic views illustrating the magnetic sensor according to the second embodiment. FIG. 6A is a plan view illustrating a part of the magnetic sensor. FIG. 6B is a sectional view taken along line B1-B1 of FIG. 6A. FIG. 6 (c) is a sectional view taken along line B2-B2 of FIG. 6 (a).

7 (a), 7 (b), 8 (a) and 8 (b) are schematic plan views illustrating the magnetic sensor according to the second embodiment.
In these figures, some elements are appropriately omitted to make the figures easier to read.

As shown in FIGS. 6 (a) to 6 (c), FIGS. 7 (a) and 7 (b), the magnetic sensor 120 according to the embodiment has a first element unit 10P, a second element unit 10Q, and a first element unit 10Q. 1 Includes a conductive member 21, a second conductive member 22, a first circuit 71, and a second circuit 72.

As shown in FIG. 7B, the first element unit 10P includes the first magnetic element 11E and the second magnetic element 12E. The first magnetic element 11E includes a first end portion 11e and a first end portion 11f. The second magnetic element 12E includes a second end portion 12e and a second end portion 12f. In the first direction (for example, in the Y-axis direction), there is a second end portion 12f between the second end portion 12e and the first end end portion 11f. In the first direction, there is a first end 11e between the second end 12f and the first end 11f. The first end portion 11e is electrically connected to the second other end portion 12f.

The second element unit 10Q includes a third magnetic element 13E and a fourth magnetic element 14E. The third magnetic element 13E includes a third end portion 13e and a third end portion 13f. The fourth magnetic element 14E includes a fourth end portion 14e and a fourth end portion 14f. In the first direction (for example, in the Y-axis direction), there is a fourth end portion 14f between the fourth end portion 14e and the third other end portion 13f. In the first direction, there is a third end 13e between the fourth end 14f and the third other end 13f. The third end portion 13e is electrically connected to the fourth other end portion 14f. The first other end portion 11f is electrically connected to the third other end portion 13f. The second end 12e is electrically connected to the fourth end 14e.

As shown in FIG. 6B, the third magnetic element 13E overlaps with the first magnetic element 11E in the second direction intersecting the first direction. The second direction is, for example, the Z-axis direction. As shown in FIG. 6C, the fourth magnetic element 14E overlaps with the second magnetic element 12E in the second direction. In FIG. 7B, the third magnetic element 13E and the fourth magnetic element 14E are drawn shifted from the positions of the first magnetic element 11E and the second magnetic element 12E in order to make the figure easier to see.

As shown in FIG. 7A, the first conductive member 21 includes a first portion 21a, a second portion 21b, and a third portion 21c. The direction from the first portion 21a to the second portion 21b is along the first direction (Y-axis direction). The third portion 21c is between the first portion 21a and the second portion 21b.

As shown in FIGS. 6 (b) and 6 (c), the first magnetic element 11E and the second magnetic element 12E overlap with the first conductive member 21 in the second direction (for example, the Z-axis direction).

As shown in FIG. 7A, the second conductive member 22 includes a fourth portion 22d, a fifth portion 22e, and a sixth portion 22f. The direction from the fourth portion 22d to the fifth portion 22e is along the first direction (Y-axis direction). The sixth portion 22f is between the fourth portion 22d and the fifth portion 22e. The first portion 21a is electrically connected to the fourth portion 22d. The second portion 21b is electrically connected to the fifth portion 22e. These electrical connections are made, for example, by connecting members 28c and 28d.

As shown in FIGS. 6 (b) and 6 (c), the third magnetic element 13E and the fourth magnetic element 14E overlap with the second conductive member 22 in the second direction (for example, the Z-axis direction). In FIG. 7A, the second conductive member 22 is drawn shifted from the position of the first conductive member 21 in order to make the figure easier to see.

As shown in FIG. 7A, the first circuit 71 is electrically connected to the third portion 21c and the sixth portion 22f. These electrical connections are made, for example, by connecting members 28a and 28b. The first circuit 71 can supply a first current I1 including an AC component between the third portion 21c and the sixth portion 22f.

As shown in FIG. 7B, the second circuit 72 is electrically connected to the first connection point CP1 and the second connection point CP2. The first connection point CP1 is a connection point between the first other end portion 11f and the third other end portion 13f. The second connection point CP2 is a connection point between the second end portion 12e and the fourth end portion 14e. For example, the second circuit 72 is electrically connected to the first connection point CP1 by the connecting member LCP1. For example, the second circuit 72 is electrically connected to the second connection point CP2 by the connecting member LCP2. The second circuit 72 can supply the second current I2 between the first connection point CP1 and the second connection point CP2.

Also in the magnetic sensor 120, the first magnetic element 11E and the second magnetic element 12E are arranged along the Y-axis direction. The third magnetic element 13E and the fourth magnetic element 14E are arranged along the Y-axis direction. The second element portion 10Q including the third magnetic element 13E and the fourth magnetic element 14E is laminated with the first element portion 10P including the first magnetic element 11E and the second magnetic element 12E in the Z-axis direction. The width of these element portions in the X-axis direction is small. For example, the resolution along the X-axis direction can be increased. According to the embodiment, it is possible to provide a magnetic sensor capable of improving the sensitivity, which can detect a change of an external magnetic field to be detected along the X-axis direction with high sensitivity.

As shown in FIG. 7B, the magnetic sensor 120 may further include a third circuit 73. The third circuit 73 is electrically connected to the third connection point CP3 of the second other end portion 12f and the first end portion 11e, and the fourth connection point CP4 of the fourth other end portion 14f and the third end portion 13e. Will be done. The third circuit 73 can detect the change ΔV of the potential between the third connection point CP3 and the fourth connection point CP4. By detecting the change ΔV of the potential between the two midpoints of the bridge circuit by the third circuit 73, the external magnetic field can be detected with higher sensitivity.

As shown in FIGS. 6 (b), 6 (c), and 8 (a), the magnetic sensor 120 includes a first magnetic member 51 and a second magnetic member 52. The first magnetic member 51 includes a first magnetic end portion 51a and a second magnetic end portion 51b. The second magnetic member 52 includes a third magnetic end portion 52c and a fourth magnetic end portion 52d. The direction from the first magnetic end portion 51a to the fourth magnetic end portion 52d is along the third direction (for example, the X-axis direction). The third direction intersects the plane containing the first and second directions. The second magnetic end portion 51b is located between the first magnetic end portion 51a and the fourth magnetic end portion 52d in the third direction. The third magnetic end 52c is located between the second magnetic end 51b and the fourth magnetic end 52d in the third direction. The third magnetic end 52c separates from the second magnetic end 51b in the third direction. The first magnetic member 51 and the second magnetic member 52 function as MFCs.

As shown in FIGS. 6 (b) and 6 (c), the first magnetic element 11E, the second magnetic element 12E, the third magnetic element 13E, and the fourth magnetic element 14E are in the second direction (for example, the Z-axis direction). In, it overlaps with the region 66 between the second magnetic end portion 51b and the third magnetic end portion 52c.

Also in the magnetic sensor 120, the first to fourth magnetic elements 11E to 14E are provided in one pair of MFCs. As a result, detection with higher accuracy becomes possible as compared with the case where different pairs of MFCs are provided for each of the first to fourth magnetic elements 11E to 14E. For example, the influence of variations in magnetic members is suppressed. For example, the influence of variation in the distance between the magnetic member and the magnetic element is suppressed. For example, the frequency component due to the first current I1 including the AC component flowing through the conductive member is less likely to remain in the detection signal. This makes it easy to separate the peak of the signal to be detected and the frequency component of the alternating current.

As shown in FIG. 7A, for example, the first magnetic element 11E is located between the first conductive member 21 and the second conductive member 22 in the second direction (Z-axis direction). The third magnetic element 13E is located between the first magnetic element 11E and the second conductive member 22 in the second direction.

As shown in FIG. 7B, for example, the second magnetic element 12E is located between the first conductive member 21 and the second conductive member 22 in the second direction (Z-axis direction). The fourth magnetic element 14E is located between the second magnetic element 12E and the second conductive member 22 in the second direction.

For example, the positions of the first magnetic member 51 and the second magnetic member 52 in the second direction (Z-axis direction) are the position of the first conductive member 21 in the second direction and the second direction of the second conductive member 22. It is between the position in and. The position of the first magnetic element 11E in the second direction is between the position of the first conductive member 21 in the second direction and the position of the magnetic member. The position of the third magnetic element 13E in the second direction is between the above-mentioned magnetic member position and the position of the second conductive member 22 in the second direction. The position of the second magnetic element 12E in the second direction is between the position of the first conductive member 21 in the second direction and the position of the magnetic member. The position of the fourth magnetic element 14E in the second direction is between the above-mentioned magnetic member position and the position of the second conductive member 22 in the second direction. With such a configuration, the external magnetic field collected by the magnetic member can be efficiently applied to the magnetic element.

As shown in FIG. 7B, the first magnetic element 11E has a first length L1 along the first direction (Y-axis direction) and a first crossing length W1 along the third direction (X-axis direction). And have. The first length L1 is longer than the first crossing length W1. The second magnetic element 12E has a second length L1 along the first direction and a second cross length W2 along the third direction. The second length L2 is longer than the second crossing length W2. The third magnetic element 13E has a third length L3 along the first direction and a third crossing length W3 along the third direction. The third length L3 is longer than the third crossing length W3. The fourth magnetic element 14E has a fourth length L4 along the first direction and a fourth cross length W4 along the third direction. The fourth length L4 is longer than the fourth cross length W4.

For example, as shown in FIG. 6A, the first length L1 (and the third length L3) is longer than the distance between the second magnetic end 51b and the third magnetic end 52c. As shown in FIG. 6 (a), the second length L2 (and the fourth length L4) is shown in FIG. 6 (b) between the second magnetic end portion 51b and the third magnetic end portion 52c. As described above, the first magnetic element 11E is the first non-magnetic layer 11n provided between the first magnetic layer 11, the first opposed magnetic layer 11o, and the first magnetic layer 11 and the first opposed magnetic layer 11o. And, including. The direction from the first magnetic layer 11 to the first opposed magnetic layer 11o is along the second direction (for example, the Z-axis direction). As shown in FIG. 6B, the third magnetic element 13E is provided between the third magnetic layer 13, the third opposed magnetic layer 13o, and the third magnetic layer 13 and the third opposed magnetic layer 13o. Also includes a third non-magnetic layer 13n. The direction from the third magnetic layer 13 to the third opposed magnetic layer 13o is along the second direction (for example, the Z-axis direction).

As shown in FIG. 6C, the second magnetic element 12E is provided between the second magnetic layer 12, the second opposed magnetic layer 12o, and the second magnetic layer 12 and the second opposed magnetic layer 12o. Also includes a second non-magnetic layer 12n. The direction from the second magnetic layer 12 to the second opposed magnetic layer 12o is along the second direction (for example, the Z-axis direction). As shown in FIG. 6C, the fourth magnetic element 14E is provided between the fourth magnetic layer 14, the fourth opposed magnetic layer 14o, and the fourth magnetic layer 14 and the fourth opposed magnetic layer 14o. Also includes a fourth non-magnetic layer 14n. The direction from the fourth magnetic layer 14 to the fourth opposed magnetic layer 14o is along the second direction (for example, the Z-axis direction).

As shown in FIGS. 6 (b), 6 (c) and 8 (b), the magnetic sensor 120 may include a first conductive layer 61 and a fourth circuit 74. The first conductive layer 61 extends along the first direction (Y-axis direction). The first conductive layer 61 overlaps with the first magnetic element 11E, the second magnetic element 12E, the third magnetic element 13E, and the fourth magnetic element 14E in the second direction (Z-axis direction). The fourth circuit 73 can supply the third current I3 to the first conductive layer 61. For example, the influence of external noise (for example, the influence of geomagnetism) can be suppressed. It becomes easier to obtain higher sensitivity.

In the magnetic sensor 120, for example, the electric resistance of the first magnetic element 11E, the electric resistance of the second magnetic element 12E, the electric resistance of the third magnetic element 13E, and the electric resistance of the fourth magnetic element 14E are the third current I3. It changes according to the change of.

As shown in FIG. 8A, the position of the first magnetic end portion 51a in the X-axis direction and the position of the fourth magnetic end portion 52d in the X-axis direction are one of the positions of the first conductive layer 51 in the X-axis direction. It is between the position of the end portion 61p of the first conductive layer 51 in the X-axis direction and the position of the other end portion 61q in the X-axis direction of the first conductive layer 51 in the X-axis direction. The magnetic field due to the third current I3 flowing through the first conductive layer 61 is more uniformly applied to the first to fourth magnetic elements 11E to 14E. The influence of external noise can be suppressed more stably.

In the magnetic sensor 120, at least a part of the configuration described with respect to the magnetic sensor 110 is applicable.

(Third Embodiment)
9 (a) to 9 (c) are schematic views illustrating the magnetic sensor according to the third embodiment. FIG. 9A is a plan view illustrating a part of the magnetic sensor. 9 (b) is a cross-sectional view taken along the line C1-C1 of FIG. 9 (a). 9 (c) is a cross-sectional view taken along the line C2-C2 of FIG. 9 (a).

10 (a), 10 (b), 11 (a), and 11 (b) are schematic plan views illustrating the magnetic sensor according to the third embodiment.
In these figures, some elements are appropriately omitted to make the figures easier to read.

As shown in FIGS. 9 (a) to 9 (c), FIGS. 10 (a) and 10 (b), the magnetic sensor 130 according to the embodiment has a first element unit 10P, a second element unit 10Q, and a first element unit 10Q. 1 Includes a conductive member 21, a second conductive member 22, a first circuit 71, a second circuit 72, a first magnetic member 51, and a second magnetic member 52.

As shown in FIGS. 9 (a) and 10 (b), the first element unit 10P includes a first magnetic element 11E and a second magnetic element 12E. The first magnetic element 11E includes a first end portion 11e and a first end portion 11f. The second magnetic element 12E includes a second end portion 12e and a second end portion 12f. In the first direction (for example, in the Y-axis direction), there is a second end portion 12f between the second end portion 12e and the first end end portion 11f. In the first direction, there is a first end 11e between the second end 12f and the first end 11f. The first end portion 11e is electrically connected to the second other end portion 12f.

The second element unit 10Q includes a third magnetic element 13E and a fourth magnetic element 14E. The third magnetic element 13E includes a third end portion 13e and a third end portion 13f. The fourth magnetic element 14E includes a fourth end portion 14e and a fourth end portion 14f. In the first direction, there is a fourth other end 14f between the fourth end 14e and the third other end 13f. In the first direction, there is a third end 13e between the fourth end 14f and the third other end 13f. The third end portion 13e is electrically connected to the fourth other end portion 14f. The first other end portion 11f is electrically connected to the third other end portion 13f. The second end 12e is electrically connected to the fourth end 14e.

As shown in FIG. 10A, the first conductive member 21 includes a first portion 21a, a second portion 21b, and a third portion 21c. The direction from the first portion 21a to the second portion 21b is along the first direction (Y-axis direction). The third portion 21c is between the first portion 21a and the second portion 21b.

As shown in FIGS. 9 (b) and 9 (c), the first magnetic element 11E and the second magnetic element 12E are the first conductive members in the second direction (for example, the Z-axis direction) intersecting the first direction. It overlaps with 21.

As shown in FIG. 10A, the second conductive member 22 includes a fourth portion 22d, a fifth portion 22e, and a sixth portion 22f. The direction from the fourth portion 22d to the fifth portion 22e is along the first direction (Y-axis direction). The sixth portion 22f is between the fourth portion 22d and the fifth portion 22e. The first portion 21a is electrically connected to the fourth portion 22d. The second portion 21b is electrically connected to the fifth portion 22e.

As shown in FIGS. 9B and 9C, the third magnetic element 13E and the fourth magnetic element 14E overlap with the second conductive member 22 in the second direction (for example, the Z-axis direction).

As shown in FIG. 10A, the first circuit 71 is electrically connected to the third portion 21c and the sixth portion 22f. The first circuit 71 can supply a first current I1 including an AC component between the third portion 21c and the sixth portion 22f.

As shown in FIG. 10B, the second circuit 72 includes the first connection point CP1 of the first other end portion 11f and the third other end portion 13f, and the second end portion 12e and the fourth end portion 14e. It is electrically connected to the second connection point CP2. The second circuit 72 can supply the second current I2 between the first connection point CP1 and the second connection point CP2.

In the magnetic sensor 130, the direction from the first magnetic element 11E to the third magnetic element 13E is along a third direction (for example, the X-axis direction) that intersects the plane including the first direction and the second direction. The direction from the second magnetic element 12E to the fourth magnetic element 14E is along the third direction.

The first magnetic member 51 includes a first magnetic end portion 51a and a second magnetic end portion 51b. The second magnetic member 52 includes a third magnetic end portion 52c and a fourth magnetic end portion 52d. The direction from the first magnetic end portion 51a to the fourth magnetic end portion 52d is along the third direction (for example, the X-axis direction). The second magnetic end portion 51b is located between the first magnetic end portion 51a and the fourth magnetic end portion 52d in the third direction. The third magnetic end 52c is located between the second magnetic end 51b and the fourth magnetic end 52d in the third direction. The third magnetic end 52c separates from the second magnetic end 51b in the third direction.

As shown in FIGS. 9B and 9C, the first magnetic element 11E, the second magnetic element 12E, the third magnetic element 13E, and the fourth magnetic element 14E are in the second direction (for example, the Z-axis direction). In, it overlaps with the region 66 between the second magnetic end portion 51b and the third magnetic end portion 52c.

In the magnetic sensor 130, the first to fourth magnetic elements 11E to 14E are provided in one pair of MFCs. As a result, it is possible to detect with higher accuracy than when different MFC pairs are provided for each of the first to fourth magnetic elements 11E to 14E. For example, the first containing an AC component flowing through the conductive member. The frequency component due to the current I1 is less likely to remain in the detection signal. This makes it easy to separate the peak of the signal to be detected and the frequency component of the alternating current.

As shown in FIG. 10B, the magnetic sensor 130 may further include a third circuit 73. The third circuit 73 is electrically connected to the third connection point CP3 of the second other end portion 12f and the first end portion 11e, and the fourth connection point CP4 of the fourth other end portion 14f and the third end portion 13e. Will be done. The third circuit 73 can detect the change ΔV of the potential between the third connection point CP3 and the fourth connection point CP4.

As shown in FIGS. 9 (a), 9 (b), and 11 (b), the magnetic sensor 130 includes a first conductive layer 61 extending along a first direction (Y-axis direction) and a fourth circuit 74. And may be included. The first conductive layer 61 overlaps with the first magnetic element 11E, the second magnetic element 12E, the third magnetic element 13E, and the fourth magnetic element 14E in the second direction (Z-axis direction). The fourth circuit 74 can supply the third current I3 to the first conductive layer 61. For example, the third current I3 by the fourth circuit 74 can suppress, for example, the influence of noise existing outside (for example, the influence of geomagnetism). It becomes easier to obtain higher sensitivity.

(Fourth Embodiment)
FIG. 12 is a schematic diagram illustrating the magnetic sensor according to the fourth embodiment.
As shown in FIG. 12, the magnetic sensor 140 according to the embodiment includes the first to fourth element portions 11E to 14E (first element portion 10P), the first magnetic member 51, the second magnetic member 52, and the coil 68. .. The magnetic sensor 140 may include a fourth circuit 74. The magnetic sensor 140 may include, for example, the first conductive member 21, the second conductive member 22, and the first to third circuits 71 to 73 described with respect to the magnetic sensor 110. The configurations of the first to fourth element units 11E to 14E, the first magnetic member 51, and the second magnetic member 52 in the magnetic sensor 140 may be the same as those configurations in the magnetic sensor 110.

The coil 68 is, for example, a solenoid coil. For example, the first to fourth element portions 11E to 14E, the first magnetic member 51, and the second magnetic member 52 are provided in the coil 68. The wiring included in the coil 68 is located around the first to fourth element portions 11E to 14E, the first magnetic member 51, and the second magnetic member 52 in the ZZ plane. For example, the electric resistance of the first magnetic element 11E, the electric resistance of the second magnetic element 12E, the electric resistance of the third magnetic element 13E, and the electric resistance of the fourth magnetic element 14E according to the change of the current flowing through the coil 68. But it changes.

For example, the third current I3 is supplied to the coil 68 from the fourth circuit 74. The current magnetic field due to the third current I3 flowing through the coil 68 includes a component in the X-axis direction. A current magnetic field containing a component in the X-axis direction is applied to the first to fourth element portions 11E to 14E, the first magnetic member 51, and the second magnetic member 52. For example, the influence of external noise (for example, the influence of geomagnetism) can be suppressed. It becomes easier to obtain higher sensitivity. The coil 68 may be a Helmholtz coil.

The coil 68 may be provided in at least one of the magnetic sensor 120 and the magnetic sensor 130. The fourth circuit 74 may be provided in at least one of the magnetic sensor 120 and the magnetic sensor 130. When the coil 68 is provided, the first conductive layer 61 may be omitted.

Hereinafter, an example of application of the magnetic sensor according to the embodiment will be described.
FIG. 13 is a schematic perspective view showing an application example of the magnetic sensor according to the embodiment.
FIG. 14 is a schematic plan view showing an application example of the magnetic sensor according to the embodiment.

As shown in FIGS. 13 and 14, the magnetic sensor 150a according to the embodiment may be used together with the battery 610. For example, the battery system 600 includes a battery 610 and a magnetic sensor 150a. The magnetic sensor 150a can detect the magnetic field generated by the current flowing through the battery 610.

For example, as shown in FIG. 14, the magnetic sensor 150a includes, for example, a plurality of magnetic sensors according to an embodiment. In this example, the magnetic sensor 150a includes a plurality of magnetic sensors 110 (or magnetic sensors 120, 130, or 140, etc.). The plurality of magnetic sensors are arranged along, for example, two directions (for example, the X-axis direction and the Y-axis direction). The plurality of magnetic sensors 110 are provided, for example, on a substrate.

The magnetic sensor 150a can detect the magnetic field generated by the current flowing through the battery 610. For example, when the battery 610 approaches an abnormal state, an abnormal current may flow through the battery 610. By detecting an abnormal current with the magnetic sensor 150a, it is possible to know the change in the state of the battery 610. For example, with the magnetic sensor 150a placed close to the battery 610, the entire battery 610 can be inspected in a short time by using the sensor group driving means in two directions. The magnetic sensor 150a may be used for inspection of the battery 610 in the manufacture of the battery 610.

The magnetic sensor according to the embodiment can be applied to, for example, a diagnostic device. Hereinafter, an example of a diagnostic device using a magnetic sensor according to the embodiment will be described.
FIG. 15 is a schematic diagram showing a magnetic sensor and a diagnostic device according to an embodiment.
As shown in FIG. 15, the diagnostic device 500 includes a magnetic sensor 150. The magnetic sensor 150 includes the magnetic sensors described with respect to the first to third embodiments, and modifications thereof.

In the diagnostic apparatus 500, the magnetic sensor 150 is, for example, a magnetoencephalograph. The magnetoencephalograph detects the magnetic field generated by the cranial nerves. When the magnetic sensor 150 is used in a magnetoencephalograph, the size of the magnetic element included in the magnetic sensor 150 is, for example, 1 mm or more and less than 10 mm. This size is, for example, the length including the MFC.

As shown in FIG. 15, the magnetic sensor 150 (magnetoencephalogram) is attached to, for example, the head of a human body. The magnetic sensor 150 (magnetoencephalogram) includes a sensor unit 301. The magnetic sensor 150 (magnetoencephalogram) may include a plurality of sensor units 301. The number of the plurality of sensor units 301 is, for example, about 100 (for example, 50 or more and 150 or less). The plurality of sensor units 301 are provided on the flexible substrate 302.

The magnetic sensor 150 may include, for example, a circuit such as differential detection. The magnetic sensor 150 may include a sensor other than the magnetic sensor (for example, a potential terminal or an acceleration sensor).

The size of the magnetic sensor 150 (the magnetic sensor described with respect to the first to fourth embodiments) is smaller than the size of the conventional SQUID magnetic sensor. Therefore, it is easy to install the plurality of sensor units 301. It is easy to install the plurality of sensor units 301 and other circuits. Coexistence of a plurality of sensor units 301 with other sensors is easy.

The substrate 302 may include an elastic body such as a silicone resin. For example, a plurality of sensor units 301 are connected to the substrate 302. The substrate 302 can be in close contact with the head, for example.

The input / output code 303 of the sensor unit 301 is connected to the sensor drive unit 506 and the signal input / output unit 504 of the diagnostic device 500. The magnetic field measurement is performed in the sensor unit 301 based on the electric power from the sensor drive unit 506 and the control signal from the signal input / output unit 504. The result is input to the signal input / output unit 504. The signal obtained by the signal input / output unit 504 is supplied to the signal processing unit 508. The signal processing unit 508 performs processing such as noise removal, filtering, amplification, and signal calculation. The signal processed by the signal processing unit 508 is supplied to the signal analysis unit 510. The signal analysis unit 510 extracts, for example, a specific signal for magnetoencephalography measurement. In the signal analysis unit 510, for example, signal analysis for matching the signal phases is performed.

The output of the signal analysis unit 510 (data for which signal analysis has been completed) is supplied to the data processing unit 512. The data processing unit 512 performs data analysis. In this data analysis, for example, image data such as MRI (Magnetic Resonance Imaging) can be incorporated. In this data analysis, for example, scalp potential information such as EEG (Electroencephalogram) can be incorporated. By data analysis, for example, nerve ignition point analysis or inverse problem analysis is performed.

The result of the data analysis is supplied to, for example, the imaging diagnosis unit 516. Imaging is performed in the imaging diagnosis unit 516. Imaging assists in diagnosis.

The above series of operations is controlled by, for example, the control mechanism 502. For example, necessary data such as primary signal data or metadata in the middle of data processing is stored in the data server. The data server and the control mechanism may be integrated.

The diagnostic device 500 according to the present embodiment includes a magnetic sensor 150 and a processing unit that processes an output signal obtained from the magnetic sensor 150. This processing unit includes, for example, at least one of a signal processing unit 508 and a data processing unit 512. The processing unit includes, for example, a computer.

In the magnetic sensor 150 shown in FIG. 15, the sensor unit 301 is installed on the head of the human body. The sensor unit 301 may be installed on the chest of the human body. This enables magnetocardiographic measurement. For example, the sensor unit 301 may be installed on the abdomen of a pregnant woman. This makes it possible to perform a fetal heartbeat test.

The magnetic sensor device including the subject is preferably installed in the shield room. Thereby, for example, the influence of geomagnetism or magnetic noise can be suppressed.

For example, a mechanism for locally shielding the measurement site of the human body or the sensor unit 301 may be provided. For example, the sensor unit 301 may be provided with a shield mechanism. For example, effective shielding may be performed in signal analysis or data processing.

In embodiments, the substrate 302 may be flexible and may be substantially non-flexible. In the example shown in FIG. 15, the substrate 302 is a continuous film processed into a hat shape. The substrate 302 may be in the form of a net. Thereby, for example, good wearability can be obtained. For example, the adhesion of the substrate 302 to the human body is improved. The substrate 302 may be helmet-shaped and may be rigid.

FIG. 16 is a schematic diagram showing a magnetic sensor according to an embodiment.
FIG. 16 is an example of a magnetic meter. In the example shown in FIG. 16, the sensor unit 301 is provided on the flat plate-shaped rigid substrate 305.

In the example shown in FIG. 16, the input / output of the signal obtained from the sensor unit 301 is the same as the input / output described with respect to FIG. In the example shown in FIG. 16, the processing of the signal obtained from the sensor unit 301 is the same as the processing described with respect to FIG.

As a device for measuring a weak magnetic field such as a magnetic field generated from a living body, there is a reference example using a SQUID (Superconducting Quantum Interference Device) magnetic sensor. In this reference example, since superconductivity is used, the device is large and the power consumption is large. The burden on the measurement target (patient) is heavy.

According to the embodiment, the device can be miniaturized. Power consumption can be suppressed. The burden on the measurement target (patient) can be reduced. According to the embodiment, the SN ratio of magnetic field detection can be improved. Sensitivity can be improved.

According to the embodiment, a magnetic sensor and a diagnostic device capable of improving sensitivity can be provided.

The embodiment may include the following configuration (for example, a technical proposal).
(Structure 1)
A first element portion including a first magnetic element, a second magnetic element, a third magnetic element, and a fourth magnetic element, wherein the first magnetic element includes a first end portion and a first end portion, and is described above. The second magnetic element includes a second end portion and a second other end portion, the third magnetic element includes a third end portion and a third end portion, and the fourth magnetic element includes a fourth end portion. And the fourth other end, the fourth end is between the fourth end and the first end in the first direction, and the fourth end in the first direction. The third end is located between the first end and the third end, and the third end is located between the third end and the first end in the first direction. The second end is located between the third end and the first end in the first direction, and between the second end and the first end in the first direction. There is the second end, the first end is between the second end and the first end in the first direction, and the first end is the second and others. Electrically connected to the ends, the third end is electrically connected to the fourth end, and the first end is electrically connected to the third end. The second end portion includes the first element portion electrically connected to the fourth end portion.
A first conductive member, the first conductive member includes a first portion, a second portion, and a third portion, and the direction from the first portion to the second portion is along the first direction. The third portion includes the first conductive member located between the first portion and the second portion.
A second conductive member, the second conductive member includes a fourth portion, a fifth portion, and a sixth portion, and the direction from the fourth portion to the fifth portion is along the first direction. The sixth part is between the fourth part and the fifth part, the first part is electrically connected to the fourth part, and the second part is electrically connected to the fifth part. Connected to the second conductive member,
A first circuit that is electrically connected to the third portion and the sixth portion and can supply a first current including an alternating current component between the third portion and the sixth portion.
It is electrically connected to the first connection point of the first end portion and the third end portion, and the second connection point of the second end portion and the fourth end portion, and is connected to the first connection point. A second circuit capable of supplying a second current between the second connection point and the second circuit.
A first magnetic member including a first magnetic end and a second magnetic end,
A second magnetic member including a third magnetic end and a fourth magnetic end,
Equipped with
The direction from the first magnetic end to the fourth magnetic end is along a third direction that intersects the plane including the first and second directions.
The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is separated from the second magnetic end in the third direction.
The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlapping magnetic sensors.

(Structure 2)
With a third circuit
The third circuit is electrically connected to a third connection point of the second end and the fourth end, and a fourth connection point of the first end and the third end. The magnetic sensor according to configuration 1, capable of detecting a change in potential between the third connection point and the fourth connection point.

(Structure 3)
The first magnetic element and the second magnetic element overlap with the first conductive member in the second direction intersecting the first direction.
The magnetic sensor according to the configuration 1 or 2, wherein the third magnetic element and the fourth magnetic element overlap with the second conductive member in the second direction.

(Structure 4)
A first conductive layer extending along the first direction is further provided.
The first conductive layer overlaps with the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element in the second direction.
The electric resistance of the first magnetic element, the electric resistance of the second magnetic element, the electric resistance of the third magnetic element, and the electric resistance of the fourth magnetic element are the electric resistances of the third current flowing through the first conductive layer. The magnetic sensor according to any one of configurations 1 to 3, which changes according to a change.

(Structure 5)
Equipped with a fourth circuit
The magnetic sensor according to the configuration 4, wherein the fourth circuit can supply the third current to the first conductive layer.

(Structure 6)
The first magnetic element has a first length along the first direction and a first crossing length along the third direction, and the first length is longer than the first crossing length.
The second magnetic element has a second length along the first direction and a second crossing length along the third direction, and the second length is longer than the second crossing length.
The third magnetic element has a third length along the first direction and a third crossing length along the third direction, and the third length is longer than the third crossing length.
The fourth magnetic element has a fourth length along the first direction and a fourth crossing length along the third direction, and the fourth length is longer than the fourth crossing length. The magnetic sensor according to any one of configurations 1 to 5.

(Structure 7)
The magnetic sensor according to the configuration 6, wherein the first length is longer than the distance between the second magnetic end portion and the third magnetic end portion.

(Structure 8)
A first element portion including a first magnetic element and a second magnetic element, wherein the first magnetic element includes a first end portion and a first other end portion, and the second magnetic element is a second end portion. And the second other end, the second end is between the second end and the first end in the first direction, and the second end in the first direction. The first end portion is located between the first end portion and the first end portion, and the first end portion is connected to the first element portion electrically connected to the second other end portion.
A second element portion including a third magnetic element and a fourth magnetic element, wherein the third magnetic element includes a third end portion and a third end portion, and the fourth magnetic element is a fourth end portion. And the fourth other end, the fourth end is between the fourth end and the third end in the first direction, and the fourth end in the first direction. There is the third end portion between the third end portion and the third end portion, the third end portion is electrically connected to the fourth other end portion, and the first other end portion is the third end portion. The third magnetic element is the first in a second direction that is electrically connected to the other end, the second end is electrically connected to the fourth end, and intersects the first direction. The second element portion, which overlaps with the magnetic element and overlaps with the second magnetic element in the second direction,
A first conductive member, the first conductive member includes a first portion, a second portion, and a third portion, and the direction from the first portion to the second portion is along the first direction. The third portion is between the first portion and the second portion, and the first magnetic element and the second magnetic element overlap with the first conductive member in the second direction. Members and
A second conductive member, the second conductive member includes a fourth portion, a fifth portion, and a sixth portion, and the direction from the fourth portion to the fifth portion is along the first direction. The sixth part is between the fourth part and the fifth part, the first part is electrically connected to the fourth part, and the second part is electrically connected to the fifth part. The third magnetic element and the fourth magnetic element are connected to the second conductive member and overlap with the second conductive member in the second direction.
A first circuit that is electrically connected to the third portion and the sixth portion and can supply a first current including an alternating current component between the third portion and the sixth portion.
It is electrically connected to the first connection point of the first end portion and the third end portion, and the second connection point of the second end portion and the fourth end portion, and is connected to the first connection point. A second circuit capable of supplying a second current between the second connection point and the second circuit.
A first magnetic member including a first magnetic end and a second magnetic end,
A second magnetic member including a third magnetic end and a fourth magnetic end,
Equipped with
The direction from the first magnetic end to the fourth magnetic end is along a third direction that intersects the plane including the first and second directions.
The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is separated from the second magnetic end in the third direction.
The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlapping magnetic sensors.

(Structure 9)
The first magnetic element is located between the first conductive member and the second conductive member in the second direction.
The third magnetic element is located between the first magnetic element and the second conductive member in the second direction.
The second magnetic element is located between the first conductive member and the second conductive member in the second direction.
The magnetic sensor according to the configuration 8, wherein the fourth magnetic element is located between the second magnetic element and the second conductive member in the second direction.

(Structure 10)
With a third circuit
The third circuit is electrically connected to the third connection point of the second end and the first end, and the fourth connection point of the fourth end and the third end. 8. The magnetic sensor according to configuration 8 or 9, capable of detecting a change in potential between the third connection point and the fourth connection point.

(Structure 11)
A first conductive layer extending along the first direction is further provided.
The first conductive layer overlaps with the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element in the second direction.
The electric resistance of the first magnetic element, the electric resistance of the second magnetic element, the electric resistance of the third magnetic element, and the electric resistance of the fourth magnetic element are the electric resistances of the third current flowing through the first conductive layer. The magnetic sensor according to any one of configurations 8 to 10, which changes according to a change.

(Structure 12)
With a fourth circuit
11. The magnetic sensor according to configuration 11, wherein the fourth circuit can supply the third current to the first conductive layer.

(Structure 13)
The positions of the first magnetic member and the second magnetic member in the second direction are the position of the first conductive member in the second direction and the position of the second conductive member in the second direction. In between
The position of the first magnetic element in the second direction is between the position of the first conductive member in the second direction and the position of the magnetic member.
The position of the third magnetic element in the second direction is between the position of the magnetic member and the position of the second conductive member in the second direction.
The position of the second magnetic element in the second direction is between the position of the first conductive member in the second direction and the position of the magnetic member.
The magnetic sensor according to the configuration 12, wherein the position of the fourth magnetic element in the second direction is between the position of the magnetic member and the position of the second conductive member in the second direction.

(Structure 14)
The first magnetic element has a first length along the first direction and a first crossing length along the third direction, and the first length is longer than the first crossing length.
The second magnetic element has a second length along the first direction and a second crossing length along the third direction, and the second length is longer than the second crossing length.
The third magnetic element has a third length along the first direction and a third crossing length along the third direction, and the third length is longer than the third crossing length.
The fourth magnetic element has a fourth length along the first direction and a fourth crossing length along the third direction, and the fourth length is longer than the fourth crossing length. The magnetic sensor according to any one of configurations 8 to 13.

(Structure 15)
The magnetic sensor according to the configuration 14, wherein the first length is longer than the distance between the second magnetic end portion and the third magnetic end portion.

(Structure 16)
The first magnetic element includes a first magnetic layer, a first opposed magnetic layer, and a first non-magnetic layer provided between the first magnetic layer and the first opposed magnetic layer. The direction from the first magnetic layer to the first opposed magnetic layer is along the second direction.
The second magnetic element includes a second magnetic layer, a second opposed magnetic layer, and a second non-magnetic layer provided between the second magnetic layer and the second opposed magnetic layer. The direction from the second magnetic layer to the second opposed magnetic layer is along the second direction.
The third magnetic element includes a third magnetic layer, a third opposed magnetic layer, and a third non-magnetic layer provided between the third magnetic layer and the third opposed magnetic layer. The direction from the third magnetic layer to the third opposed magnetic layer is along the second direction.
The fourth magnetic element includes a fourth magnetic layer, a fourth opposed magnetic layer, and a fourth non-magnetic layer provided between the fourth magnetic layer and the fourth opposed magnetic layer. The magnetic sensor according to any one of configurations 1 to 15, wherein the direction from the fourth magnetic layer to the fourth opposed magnetic layer is along the second direction.

(Structure 17)
A first element portion including a first magnetic element and a second magnetic element, wherein the first magnetic element includes a first end portion and a first other end portion, and the second magnetic element is a second end portion. And the second other end, the second end is between the second end and the first end in the first direction, and the second end in the first direction. The first end portion is located between the first end portion and the first end portion, and the first end portion is connected to the first element portion electrically connected to the second other end portion.
A second element portion including a third magnetic element and a fourth magnetic element, wherein the third magnetic element includes a third end portion and a third end portion, and the fourth magnetic element is a fourth end portion. And the fourth other end, the fourth end is between the fourth end and the third end in the first direction, and the fourth end in the first direction. There is the third end portion between the third end portion and the third end portion, the third end portion is electrically connected to the fourth other end portion, and the first other end portion is the third end portion. The second end, which is electrically connected to the other end, is the second element, which is electrically connected to the fourth end.
A first conductive member, the first conductive member includes a first portion, a second portion, and a third portion, and the direction from the first portion to the second portion is along the first direction. The third portion is between the first portion and the second portion, and the first magnetic element and the second magnetic element are with the first conductive member in a second direction intersecting the first direction. The overlapping first conductive member and
A second conductive member, the second conductive member includes a fourth portion, a fifth portion, and a sixth portion, and the direction from the fourth portion to the fifth portion is along the first direction. The sixth part is between the fourth part and the fifth part, the first part is electrically connected to the fourth part, and the second part is electrically connected to the fifth part. The third magnetic element and the fourth magnetic element are connected to the second conductive member and overlap with the second conductive member in the second direction.
A first circuit that is electrically connected to the third portion and the sixth portion and can supply a first current including an alternating current component between the third portion and the sixth portion.
It is electrically connected to the first connection point of the first end portion and the third end portion, and the second connection point of the second end portion and the fourth end portion, and is connected to the first connection point. A second circuit capable of supplying a second current between the second connection point and the second circuit.
A first magnetic member including a first magnetic end and a second magnetic end,
A second magnetic member including a third magnetic end and a fourth magnetic end,
Equipped with
The direction from the first magnetic element to the third magnetic element is along a third direction that intersects the plane including the first direction and the second direction.
The direction from the second magnetic element to the fourth magnetic element is along the third direction.
The direction from the first magnetic end portion to the fourth magnetic end portion is along the third direction.
The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is separated from the second magnetic end in the third direction.
The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlapping magnetic sensors.

(Structure 18)
The first conductive layer extending along the first direction and
4th circuit and
Further prepare
The first conductive layer overlaps with the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element in the second direction.
The magnetic sensor according to the configuration 17, wherein the fourth circuit can supply a third current to the first conductive layer.

(Structure 19)
With more coils
The electric resistance of the first magnetic element, the electric resistance of the second magnetic element, the electric resistance of the third magnetic element, and the electric resistance of the fourth magnetic element correspond to the change of the third current flowing through the coil. The magnetic sensor according to the configuration 1, 8 or 17, which is variable.

(Structure 20)
The magnetic sensor according to any one of configurations 1 to 19 and the magnetic sensor.
A processing unit that processes the output signal obtained from the magnetic sensor, and
Diagnostic device equipped with.

In the present specification, "vertical" and "parallel" include not only strict vertical and strict parallel, but also variations in the manufacturing process, for example, and may be substantially vertical and substantially parallel. ..

Hereinafter, embodiments of the present invention have been described with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific configuration of each element included in the magnetic sensor, such as a magnetic element, a magnetic layer, a non-magnetic part, a magnetic member, a conductive member, a conductive layer, a connecting member, and a circuit, a person skilled in the art can appropriately determine the specific configuration from a range known to those skilled in the art. The present invention is included in the scope of the present invention as long as the present invention can be carried out in the same manner and the same effect can be obtained by selecting.

Further, a combination of any two or more elements of each specific example to the extent technically possible is also included in the scope of the present invention as long as the gist of the present invention is included.

In addition, all magnetic sensors and diagnostic devices that can be appropriately designed and implemented by those skilled in the art based on the magnetic sensors and diagnostic devices described above as embodiments of the present invention are also included in the gist of the present invention. It belongs to the scope of the present invention.

In addition, in the scope of the idea of the present invention, those skilled in the art can come up with various modified examples and modified examples, and it is understood that these modified examples and modified examples also belong to the scope of the present invention. ..

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof.

10P ... 1st element part, 10Q ... 2nd element part, 11-14 ... 1st to 4th magnetic layers, 11E to 14E ... 1st to 4th magnetic elements, 11e to 14e ... 1st to 4th end parts, 11f to 14f ... 1st to 4th other ends, 11n to 14n ... 1st to 4th non-magnetic layers, 11o to 14o ... 1st to 4th opposed magnetic layers, 18a to 18d ... connecting members, 21, 22 ... 1st and 2nd conductive members, 21a to 21c ... 1st to 3rd parts, 22d to 22f ... 4th to 6th parts, 28a to 28d ... Connection members, 51, 52 ... 1st and 2nd magnetic members, 51a , 51b ... 1st, 2nd magnetic end, 52c, 52d ... 3rd, 4th magnetic end, 61 ... 1st conductive layer, 61a, 61b ... 1st, 2nd conductive end, 61aL, 61bL ... Connection Member, 61p, 61q ... end, 65 ... insulating member, 66 ... region, 68 ... coil, 70 ... circuit section, 71-74 ... 1st to 4th circuits, ΔV ... change, 110, 120, 130, 150, 150a ... Magnetic sensor, 301 ... Sensor unit, 302 ... Base, 303 ... Input / output code, 305 ... Base, 500 ... Diagnostic device, 502 ... Control mechanism, 504 ... Signal input / output unit, 506 ... Sensor drive unit, 508 ... Signal Processing unit, 510 ... Signal analysis unit, 512 ... Data processing unit, 516 ... Imaging diagnosis unit, 600 ... Battery system, 610 ... Battery, CP1 to CP4 ... 1st to 4th connection points, H ... Magnetic field, Hac ... AC Magnetic field, Hex ... External magnetic field, Hex1 to Hex3 ... 1st to 3rd magnetic fields, Hsig ... Signal magnetic field, I1 to I3 ... 1st to 3rd currents, L1 to L4 ... 1st to 4th lengths, LCP1, LCP2 ... Connecting member, R ... Resistance, R1 to R3 ... 1st to 3rd values, Ro ... Low resistance, Rx ... Electrical resistance, W1 to W4 ... 1st to 4th crossing lengths

Claims (10)

A first element portion including a first magnetic element, a second magnetic element, a third magnetic element, and a fourth magnetic element, wherein the first magnetic element includes a first end portion and a first end portion, and is described above. The second magnetic element includes a second end portion and a second other end portion, the third magnetic element includes a third end portion and a third end portion, and the fourth magnetic element includes a fourth end portion. And the fourth other end, the fourth end is between the fourth end and the first end in the first direction, and the fourth end in the first direction. The third end is located between the first end and the third end, and the third end is located between the third end and the first end in the first direction. The second end is located between the third end and the first end in the first direction, and between the second end and the first end in the first direction. There is the second end, the first end is between the second end and the first end in the first direction, and the first end is the second and others. Electrically connected to the ends, the third end is electrically connected to the fourth end, and the first end is electrically connected to the third end. The second end portion includes the first element portion electrically connected to the fourth end portion.
A first conductive member, the first conductive member includes a first portion, a second portion, and a third portion, and the direction from the first portion to the second portion is along the first direction. The third portion includes the first conductive member located between the first portion and the second portion.
A second conductive member, the second conductive member includes a fourth portion, a fifth portion, and a sixth portion, and the direction from the fourth portion to the fifth portion is along the first direction. The sixth part is between the fourth part and the fifth part, the first part is electrically connected to the fourth part, and the second part is electrically connected to the fifth part. Connected to the second conductive member,
A first circuit that is electrically connected to the third portion and the sixth portion and can supply a first current including an alternating current component between the third portion and the sixth portion.
It is electrically connected to the first connection point of the first end portion and the third end portion, and the second connection point of the second end portion and the fourth end portion, and is connected to the first connection point. A second circuit capable of supplying a second current between the second connection point and the second circuit.
A first magnetic member including a first magnetic end and a second magnetic end,
A second magnetic member including a third magnetic end and a fourth magnetic end,
Equipped with
The direction from the first magnetic end to the fourth magnetic end is along a third direction that intersects the plane including the first and second directions.
The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is separated from the second magnetic end in the third direction.
The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlapping magnetic sensors. With a third circuit
The third circuit is electrically connected to the third connection point of the second end and the fourth end, and the fourth connection point of the first end and the third end. The magnetic sensor according to claim 1, wherein the change in electric potential between the third connection point and the fourth connection point can be detected. The first magnetic element and the second magnetic element overlap with the first conductive member in the second direction intersecting the first direction.
The magnetic sensor according to claim 1 or 2, wherein the third magnetic element and the fourth magnetic element overlap with the second conductive member in the second direction. A first conductive layer extending along the first direction is further provided.
The first conductive layer overlaps with the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element in the second direction.
The electric resistance of the first magnetic element, the electric resistance of the second magnetic element, the electric resistance of the third magnetic element, and the electric resistance of the fourth magnetic element are the electric resistances of the third current flowing through the first conductive layer. The magnetic sensor according to any one of claims 1 to 3, which changes according to a change. A first element portion including a first magnetic element and a second magnetic element, wherein the first magnetic element includes a first end portion and a first other end portion, and the second magnetic element is a second end portion. And the second other end, the second end is between the second end and the first end in the first direction, and the second end in the first direction. The first end portion is located between the first end portion and the first end portion, and the first end portion is connected to the first element portion electrically connected to the second other end portion.
A second element portion including a third magnetic element and a fourth magnetic element, wherein the third magnetic element includes a third end portion and a third end portion, and the fourth magnetic element is a fourth end portion. And the fourth other end, the fourth end is between the fourth end and the third end in the first direction, and the fourth end in the first direction. There is the third end portion between the third end portion and the third end portion, the third end portion is electrically connected to the fourth other end portion, and the first other end portion is the third end portion. The third magnetic element is the first in a second direction that is electrically connected to the other end, the second end is electrically connected to the fourth end, and intersects the first direction. The second element portion, which overlaps with the magnetic element and overlaps with the second magnetic element in the second direction,
A first conductive member, the first conductive member includes a first portion, a second portion, and a third portion, and the direction from the first portion to the second portion is along the first direction. The third portion is between the first portion and the second portion, and the first magnetic element and the second magnetic element overlap with the first conductive member in the second direction. Members and
A second conductive member, the second conductive member includes a fourth portion, a fifth portion, and a sixth portion, and the direction from the fourth portion to the fifth portion is along the first direction. The sixth part is between the fourth part and the fifth part, the first part is electrically connected to the fourth part, and the second part is electrically connected to the fifth part. The third magnetic element and the fourth magnetic element are connected to the second conductive member and overlap with the second conductive member in the second direction.
A first circuit that is electrically connected to the third portion and the sixth portion and can supply a first current including an alternating current component between the third portion and the sixth portion.
It is electrically connected to the first connection point of the first end portion and the third end portion, and the second connection point of the second end portion and the fourth end portion, and is connected to the first connection point. A second circuit capable of supplying a second current between the second connection point and the second circuit.
A first magnetic member including a first magnetic end and a second magnetic end,
A second magnetic member including a third magnetic end and a fourth magnetic end,
Equipped with
The direction from the first magnetic end to the fourth magnetic end is along a third direction that intersects the plane including the first and second directions.
The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is separated from the second magnetic end in the third direction.
The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlapping magnetic sensors. A first conductive layer extending along the first direction is further provided.
The first conductive layer overlaps with the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element in the second direction.
The electric resistance of the first magnetic element, the electric resistance of the second magnetic element, the electric resistance of the third magnetic element, and the electric resistance of the fourth magnetic element are the electric resistances of the third current flowing through the first conductive layer. The magnetic sensor according to claim 5, which changes according to a change. A first element portion including a first magnetic element and a second magnetic element, wherein the first magnetic element includes a first end portion and a first other end portion, and the second magnetic element is a second end portion. And the second other end, the second end is between the second end and the first end in the first direction, and the second end in the first direction. The first end portion is located between the first end portion and the first end portion, and the first end portion is connected to the first element portion electrically connected to the second other end portion.
A second element portion including a third magnetic element and a fourth magnetic element, wherein the third magnetic element includes a third end portion and a third end portion, and the fourth magnetic element is a fourth end portion. And the fourth other end, the fourth end is between the fourth end and the third end in the first direction, and the fourth end in the first direction. There is the third end portion between the third end portion and the third end portion, the third end portion is electrically connected to the fourth other end portion, and the first other end portion is the third end portion. The second end, which is electrically connected to the other end, is the second element, which is electrically connected to the fourth end.
A first conductive member, the first conductive member includes a first portion, a second portion, and a third portion, and the direction from the first portion to the second portion is along the first direction. The third portion is between the first portion and the second portion, and the first magnetic element and the second magnetic element are with the first conductive member in a second direction intersecting the first direction. The overlapping first conductive member and
A second conductive member, the second conductive member includes a fourth portion, a fifth portion, and a sixth portion, and the direction from the fourth portion to the fifth portion is along the first direction. The sixth part is between the fourth part and the fifth part, the first part is electrically connected to the fourth part, and the second part is electrically connected to the fifth part. The third magnetic element and the fourth magnetic element are connected to the second conductive member and overlap with the second conductive member in the second direction.
A first circuit that is electrically connected to the third portion and the sixth portion and can supply a first current including an alternating current component between the third portion and the sixth portion.
It is electrically connected to the first connection point of the first end portion and the third end portion, and the second connection point of the second end portion and the fourth end portion, and is connected to the first connection point. A second circuit capable of supplying a second current between the second connection point and the second circuit.
A first magnetic member including a first magnetic end and a second magnetic end,
A second magnetic member including a third magnetic end and a fourth magnetic end,
Equipped with
The direction from the first magnetic element to the third magnetic element is along a third direction that intersects the plane including the first direction and the second direction.
The direction from the second magnetic element to the fourth magnetic element is along the third direction.
The direction from the first magnetic end portion to the fourth magnetic end portion is along the third direction.
The second magnetic end is located between the first magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is located between the second magnetic end and the fourth magnetic end in the third direction.
The third magnetic end is separated from the second magnetic end in the third direction.
The first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element have a region between the second magnetic end portion and the third magnetic end portion in the second direction. Overlapping magnetic sensors. The first conductive layer extending along the first direction and
4th circuit and
Further prepare
The first conductive layer overlaps with the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element in the second direction.
The magnetic sensor according to claim 7, wherein the fourth circuit can supply a third current to the first conductive layer. With more coils
The electric resistance of the first magnetic element, the electric resistance of the second magnetic element, the electric resistance of the third magnetic element, and the electric resistance of the fourth magnetic element correspond to the change of the third current flowing through the coil. The magnetic sensor according to claim 1, 5, or 7. The magnetic sensor according to any one of claims 1 to 9,
A processing unit that processes the output signal obtained from the magnetic sensor, and
Diagnostic device equipped with.

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