JP2022029098A - Device - Google Patents

Abstract

To provide a device capable of accurately sensing the state of vibration.SOLUTION: A device provided herein comprises a pump rotor 18 and a housing 3 for accommodating the pump rotor 18. The housing 3 has a mounting region 26 for mounting a monitoring device 17 for sensing vibration of the housing 3 and a peripheral region 27 surrounding the mounting region 26, where at least an outer peripheral portion of the mounting region 26 is less flat than the peripheral region 27.SELECTED DRAWING: Figure 4

Description

The present invention relates to an apparatus.

A technique is known in which a sensor is installed in a device having a moving part such as a motor to detect the vibration state of the device. For example, Patent Document 1 shows an example in which an acceleration sensor is installed in an automobile. A mounting base with screw holes was welded to the car body, which is the installation site, and the acceleration sensor was screwed and fixed to the mounting base. Although no detailed description of the welding method of the mounting base is found in the document, it seems that the welding is performed on the outer peripheral portion of the mounting base from FIG. 1 (b) of the document.

Japanese Unexamined Patent Publication No. 5-72228

However, when the outer peripheral portion is welded, there is a possibility that a gap is left between the installation site and the mounting base, and the mounting base resonates to generate noise, depending on the state of the installation site. When the noise is generated, there is a problem that the vibration state of the device cannot be detected accurately.

The device includes a movable body and a housing for accommodating the movable body, and the housing includes a mounting area for mounting a monitoring device for detecting vibration of the housing, and a peripheral area surrounding the mounting area. The flatness of at least the outer peripheral portion of the mounting region is smaller than that of the peripheral region.

The schematic perspective view which shows the structure of the vacuum pump which concerns on 1st Embodiment. Schematic side sectional view showing the internal structure of a vacuum pump. Schematic plan cross-sectional view showing the internal structure of a vacuum pump. Schematic perspective view showing an example of installation of a monitoring device on a mounting base. The schematic perspective view which shows the structure of the vacuum pump which concerns on 2nd Embodiment. The schematic perspective view which shows the installation example of the monitoring device to a connection part. The schematic perspective view which shows the structure of the vacuum pump which concerns on 3rd Embodiment. Schematic perspective view showing the configuration of a vacuum pump installed in a case. The schematic side sectional view which shows the internal structure of the vacuum pump which concerns on 6th Embodiment. The schematic perspective view which shows the installation example of the monitoring device to the connection part which concerns on 7th Embodiment. The schematic perspective view which shows the structure of the vacuum pump which concerns on 8th Embodiment.

First Embodiment In this embodiment, a characteristic example of a monitoring device and a vacuum pump to which the monitoring device is attached will be described. As shown in FIG. 1, the vacuum pump 1 as a device is installed on the base 2. The vacuum pump 1 has a columnar shape having a substantially elongated cross section. The longitudinal direction of the vacuum pump 1 is the X direction. The major axis direction of the ellipse is the Y direction, and the minor axis direction of the ellipse is the Z direction.

The vacuum pump 1 includes a housing 3. The housing 3 includes a motor case 4, a connection portion 5, a pump case 6, and a gear case 7 arranged from the −X direction side to the + X direction side. The housing 3 includes a first side wall 8 as a bearing casing between the connection portion 5 and the pump case 6. The housing 3 includes a second side wall 9 between the pump case 6 and the gear case 7.

An intake pipe 11 is connected to the surface of the pump case 6 on the + Z direction side. An exhaust pipe 12 is connected to the pump case 6 on the surface on the −Z direction side.

The connecting portion 5 includes a first leg portion 13 and a second leg portion on the base 2 side. The first leg portion 13 is arranged on the −Y direction side, and the second leg portion 13 is arranged on the + Y direction side. The gear case 7 includes a third leg portion 14 and a fourth leg portion on the base 2 side. The third leg portion 14 is arranged on the −Y direction side, and the fourth leg portion 14 is arranged on the + Y direction side. The first leg portion 13 to the fourth leg portion are fastened to the base 2 by the first bolt 15.

The first side wall 8 includes a mounting base 16. A monitoring device 17 is attached to the mounting base 16. The monitoring device 17 detects the vibration of the housing 3.

The internal structure of the vacuum pump 1 will be described with reference to FIGS. 2 and 3. FIG. 2 is a view seen from the −Y direction. FIG. 3 is a view seen from the + Z direction. In the figure, the first leg portion 13 to the fourth leg portion are omitted. The vacuum pump 1 includes a pump rotor 18 as two movable bodies for transferring gas, and two motors 19 for rotating the two pump rotors 18. The housing 3 houses the pump rotor 18.

The two pump rotors 18 have two rotating shafts 21. The two rotating shafts 21 are rotatably supported by the first bearing 22 and the second bearing 23 as bearings, respectively. The two motors 19 are connected to one end of each rotating shaft 21. The motor 19 is configured to rotate the two pump rotors 18 in synchronization with each other in opposite directions. Two timing gears 24 are fixed to the other end of the rotating shaft 21. The timing gear 24 is provided to secure the synchronous rotation of the two pump rotors 18 when the synchronous rotation of the two motors 19 is lost.

The pump case 6 is sandwiched between the first side wall 8 and the second side wall 9. The pump rotor 18 is arranged in a pump chamber 25 composed of a pump case 6, a first side wall 8 and a second side wall 9.

The first side wall 8 supports the first bearing 22 on the intake pipe 11 side. The first bearing 22 is arranged in the connecting portion 5. The motor 19 is arranged in the motor case 4 fixed to the connection portion 5. The second bearing 23 on the exhaust pipe 12 side is fixed to the second side wall 9. The timing gear 24 and the second bearing 23 are arranged in the gear case 7. The rotation of the pump rotor 18 causes the first bearing 22 and the second bearing 23 to vibrate. The vibrations of the first bearing 22 and the second bearing 23 are transmitted to the housing 3 such as the mounting base 16 via the first side wall 8 and the second side wall 9.

As shown in FIG. 4, the mounting base 16 which is a part of the housing 3 and the first side wall 8 has a mounting area 26 and a peripheral area 27 on the surface where the monitoring device 17 is provided. A monitoring device 17 is attached to the attachment area 26. The peripheral area 27 surrounds the mounting area 26. At least the outer peripheral portion of the mounting region 26 has a smaller flatness than the peripheral region 27.

The entire surface of the mounting area 26 may have a smaller flatness than the peripheral area 27. When the central portion of the mounting region 26 is recessed, the recessed portion may have the same flatness as the peripheral region 27. It suffices if the flatness of the outer peripheral portion of the mounting area 26 is small. The area where the monitoring device 17 is in contact with the mounting area 26 is preferably 70% or more and 100% or less of the area of the portion where the monitoring device 17 faces the mounting area 26. Resonance may occur if the recessed area is too wide.

Since the housing 3 is a casting, the surface is uneven. The mounting area 26 can be formed by end milling with a milling machine or the like. Further, the mounting area 26 may be ground to reduce the flatness.

The monitoring device 17 includes a sensor unit 28 that detects vibration of the housing 3. The sensor unit 28 includes an inertial sensor. Further, the monitoring device 17 includes a plate 29 for mounting the sensor unit 28. Further, the monitoring device 17 includes a second bolt 31 as a fixing screw for fixing the plate 29 to the mounting base 16. When the sensor unit 28 detects vibrations in the orthogonal triaxial directions, the posture of the sensor unit 28 is not limited. The monitoring device 17 may output a vibration waveform, or may output a warning signal from the vibration amplitude.

The plate 29 includes a through hole 29a that penetrates the second bolt 31. The mounting area 26 includes a screw hole 26a for fixing the monitoring device 17 with the second bolt 31. A female screw is formed in the screw hole 26a. According to this configuration, the monitoring device 17 can be attached to the attachment area 26 with the second bolt 31. Since the second bolt 31 firmly fixes the monitoring device 17, the monitoring device 17 can accurately detect the vibration of the housing 3.

The vacuum pump 1 includes a monitoring device 17 fixed to the screw hole 26a. According to this configuration, the monitoring device 17 is fixed to the screw hole 26a of the vacuum pump 1. Since the monitoring device 17 is screwed to the vacuum pump 1, it is firmly fixed. Therefore, the vacuum pump 1 can be provided with a monitoring device 17 that can accurately detect vibration.

According to this configuration, the monitoring device 17 is mounted in a place where the flatness of the mounting region 26 is small. Since the housing 3 includes the mounting area 26, it is possible to suppress the vibration of the mounting area 26 with respect to the housing 3 as in Patent Document 1.

The monitoring device 17 can be installed in close contact with a surface smaller than a surface having a large flatness. By bringing the monitoring device 17 into close contact with the mounting area 26, it is possible to suppress the vibration of the housing 3 from being attenuated between the mounting area 26 and the monitoring device 17. Further, by bringing the monitoring device 17 into close contact with the mounting area 26, it is possible to suppress the occurrence of vibration that causes noise between the mounting area 26 and the monitoring device 17. As a result, the monitoring device 17 can accurately detect the vibration of the housing 3.

The mounting base 16 is a part of the first side wall 8, and the mounting area 26 is provided on the first side wall 8. According to this configuration, the rotating shaft 21 is supported by the first bearing 22. When the rotating shaft 21 and the first bearing 22 are worn, the first bearing 22 vibrates. The vibration of the first bearing 22 is transmitted to the mounting region 26 via the first side wall 8. In the mounting area 26, the monitoring device 17 detects vibration. Since the monitoring device 17 is arranged near the first bearing 22 which is the vibration source, it is possible to suppress the vibration of the first bearing 22 from being attenuated before the monitoring device 17 detects the vibration of the first bearing 22.

The flatness of the surface of the mounting area 26 that comes into contact with the monitoring device 17 is 0.005 mm or more and 0.01 mm or less. According to this configuration, since the flatness of the surface of the mounting area 26 in contact with the monitoring device 17 is as small as 0.01 mm or less, the monitoring device 17 can be brought into close contact with the flat surface of the mounting area 26. Since the flatness of the surface of the mounting area 26 in contact with the monitoring device 17 is 0.005 mm or more, the surface of the mounting area 26 can be easily formed.

Second Embodiment The difference between this embodiment and the first embodiment is that the installation position of the monitoring device 17 shown in FIG. 1 is different. As shown in FIG. 5, the vacuum pump 34 as a device includes a housing 35. The housing 35 includes a first side wall 36 as a bearing casing between the connection portion 5 and the pump case 6. The first side wall 36 does not have a mounting base 16. The first side wall 36 supports the first bearing 22. The housing 35 includes a connecting portion 5 connected to the first side wall 36.

As shown in FIG. 6, a mounting area 37 is provided in the connecting portion 5. The peripheral area 38 surrounds the mounting area 37. At least the outer peripheral portion of the mounting area 37 has a smaller flatness than the peripheral area 38. The outer peripheral portion is included in the mounting area 37, and the peripheral region 38 is not included in the mounting area 37. The mounting area 37 includes a screw hole 37a for fixing the monitoring device 17 with the second bolt 31. A female screw is formed in the screw hole 37a.

According to this configuration, the rotating shaft 21 is supported by the first bearing 22. When the rotating shaft 21 and the first bearing 22 are worn, the first bearing 22 vibrates. The vibration of the first bearing 22 is transmitted to the mounting region 37 via the first side wall 36 and the connecting portion 5. In the mounting area 37, the monitoring device 17 detects vibration. Since the monitoring device 17 is arranged near the first bearing 22 which is the vibration source, it is possible to suppress the vibration of the first bearing 22 from being attenuated before the monitoring device 17 detects the vibration of the first bearing 22.

Third Embodiment This embodiment differs from the first embodiment in that a portable monitoring device detects vibration instead of the monitoring device 17 shown in FIG. As shown in FIG. 7, the vacuum pump 40 as a device includes a housing 41. The housing 41 includes a first side wall 42 as a bearing casing between the connection portion 5 and the pump case 6. The first side wall 42 does not have a mounting base 16. The first side wall 42 is provided with a detection table 43 on the −Y direction side.

The mounting area 44 is provided on the detection table 43. The peripheral area 45 surrounds the mounting area 44. The mounting area 44 has a smaller flatness than the peripheral area 45. The monitoring device 46 is pressed against a place where the flatness is smaller than the peripheral area 45 of the mounting area 44, and the vibration of the housing 41 is detected. The monitoring device 46 is portable. A vibration pickup is housed in the monitoring device 46. When the operator presses the monitoring device 46 against the mounting area 44, the vibration of the detection table 43 propagates to the monitoring device 46. According to this configuration, since the surface of the mounting area 44 is flat, it is possible to prevent wobbling when the monitoring device 46 is pressed against the surface. By pressing the portable monitoring device 46 against the mounting area 44, the monitoring device 46 can accurately detect the vibration of the housing 41.

As shown in FIG. 8, the case 47 is arranged so as to cover the vacuum pump 40. The case 47 is provided with an opening 47a at a position facing the detection table 43 when viewed from the −Y direction. The mounting area 44 is exposed at the opening 47a. According to this configuration, the operator can easily detect the vibration of the housing 41 by pressing the portable monitoring device 46 against the mounting area 44.

Fourth Embodiment In the first embodiment, the monitoring device 17 is arranged on the first side wall 8. In addition, the monitoring device 17 may be arranged on the second side wall 9. The monitoring device 17 can accurately detect the vibration of the second bearing 23. In the second embodiment, the monitoring device 17 is arranged in the connection portion 5. In addition, the monitoring device 17 may be arranged in the motor case 4, the pump case 6, and the gear case 7. The place where the monitoring device 17 is installed is preferably a place where the vibration of the first bearing 22 and the second bearing 23 is captured and the temperature does not rise. The monitoring device 17 can accurately detect the vibration of the first bearing 22 and the second bearing 23.

Fifth Embodiment In the first embodiment, the monitoring device 17 is installed in the vacuum pump 1. The monitoring device 17 may be installed in a device having a movable part such as a three-dimensional printer or a robot. The monitoring device 17 can accurately detect the vibration of the device. The vacuum pump 1 has been exemplified as a vibration source and an apparatus, but the type thereof is not particularly limited, and various apparatus having a rotation mechanism such as a hydraulic pump and a water pump may be used.

Sixth Embodiment In the first embodiment, the mounting base 16 protrudes toward the connecting portion 5 of the first side wall 8. As in the vacuum pump 48 as the device shown in FIG. 9, the mounting base 49 may be located at the center of the first side wall 8 in the X direction. The vibration of the mounting base 49 can be suppressed.

Seventh Embodiment In the vacuum pump 34 of the second embodiment, the sensor unit 28 is fixed to the plate 29. The plate 29 was screwed to the housing 35 by the second bolt 31. As shown in the vacuum pump 51 as the device of FIG. 10, the monitoring device 52 may be configured by the sensor unit 53.

A through hole 53a may be arranged in the sensor unit 53, and the sensor unit 53 may be screwed to the housing 35 by the second bolt 31. Since the monitoring device 52 is arranged near the first bearing 22 which is the vibration source, it is possible to suppress the vibration of the first bearing 22 from being attenuated before the monitoring device 52 detects the vibration of the first bearing 22.

Eighth Embodiment In the vacuum pump 40 of the third embodiment, the detection table 43 protrudes toward the connection portion 5. As shown in the vacuum pump 55 as the device of FIG. 11, the detection table 56 may be located at the center of the first side wall 42 in the X direction. The vibration of the detection table 56 can be suppressed.

1,34,40,48,51,55 ... Vacuum pump as a device, 3 ... Housing, 5 ... Connection part, 8,36,42 ... First side wall as a bearing casing, 17,46 ... Monitoring device, 18 ... Pump rotor as a movable body, 21 ... Rotating shaft, 22 ... First bearing as a bearing, 26,37,44 ... Mounting area, 27,38,45 ... Peripheral area, 31 ... Second bolt as a screw, 37a … Screw holes.

Claims (7)

Movable body and
A housing for accommodating the movable body, and
The housing is
A mounting area for mounting a monitoring device that detects vibration of the housing, and
It has a peripheral area surrounding the mounting area and
A device characterized in that at least the outer peripheral portion of the mounting region has a smaller flatness than the peripheral region. The device according to claim 1.
The movable body has a rotation axis and has a rotation axis.
A bearing that supports the axis of rotation and
A bearing casing that supports the bearing is provided.
A device characterized in that the mounting area is provided in the bearing casing. The device according to claim 1.
The movable body has a rotation axis and has a rotation axis.
A bearing that supports the axis of rotation and
A bearing casing that supports the bearing is provided.
The housing comprises a connection that connects to the bearing casing.
A device characterized in that the mounting area is provided in the connection portion. The device according to any one of claims 1 to 3.
A device characterized in that the flatness of a surface in contact with the monitoring device in the mounting area is 0.005 mm or more and 0.01 mm or less. The device according to any one of claims 1 to 4.
The mounting area is a device including a screw hole for fixing the monitoring device with a screw. The device according to claim 5.
A device comprising the monitoring device fixed to the screw hole. The device according to any one of claims 1 to 4.
A device characterized in that the monitoring device is pressed against a place where the flatness is smaller than the peripheral area of the mounting area, and vibration is detected.

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