JP2022015177A - Heated body contact measurement instrument - Google Patents

Abstract

To provide a measurement instrument that can acquire a highly accurate relative change of a measuring point by a contact type that is cheaper than a non-contact measurement instrument and not affected by the roughness of a measurement target surface or air fluctuation.SOLUTION: A heated body contact measurement instrument measures an amount of displacement in a height direction relative to an arbitrary reference point on a surface of an object to be measured by bringing a contacting piece into contact with a heated object to be measured, and includes: a heating part including at least the contacting piece and a temperature control mechanism that controls the contacting piece to the same temperature as the surface of the object to be measured; a heat sink part with a cooling mechanism and a heat insulating material that blocks heat transmitted from the heating part and dissipates heat; and a measuring part that measures the amount of displacement in the height direction by bringing the contacting piece into contact with the object to be measured.SELECTED DRAWING: Figure 1

Description

INDUSTRIAL APPLICABILITY According to the present invention, in an instrument for measuring the flatness of the surface of a hot plate during heating, when a contact-type measuring instrument is used for an object to be measured, which becomes hot, the measuring instrument fails due to heat and the heat of a component component. It relates to a heated body contact measuring instrument that reduces the influence of expansion on the measured value.

Conventionally, the shape of a heated object to be measured may be measured by using a contact-type measuring device (Patent Document 1). However, in this case, heat may be transferred from the contact portion, causing a measurement error due to a temperature change, or the temperature may exceed the guaranteed operating temperature of the measuring instrument body.
Therefore, when measuring the surface of a heated object, it is common to use a non-contact measuring instrument such as a laser detection sensor. (Patent Document 2)

However, since the non-contact type measuring instrument capable of high-precision measurement is expensive, the cost is high, and it is necessary to take measures against the temperature rise of the measuring instrument body due to the radiant heat from the object to be measured. Further, in a method using light such as a laser, the influence of air fluctuation in the vicinity of the surface cannot be ignored in addition to the influence of the roughness of the surface of the object to be measured, and countermeasures against it are required.

Japanese Unexamined Patent Publication No. 2018-159480 Japanese Unexamined Patent Publication No. 2017-172998

In view of the above circumstances, the problem to be solved by the present invention is a contact type measuring point which is cheaper than the non-contact type measuring instrument and is not affected by the roughness of the surface of the object to be measured and the air fluctuation, and has a high accuracy measurement point. It is to provide a measuring instrument capable of acquiring the relative change of.

In order to solve the above problems, the heated body contact measuring instrument according to the present invention has the following means.

The heated body contact measuring instrument according to the present invention is
A measuring tool that brings a contact to a heated object to be measured and measures the amount of displacement in the relative height direction from an arbitrary reference point on the surface of the object to be measured, at least.
A heating unit having a contact and a temperature control mechanism that controls the contact to the same temperature as the surface of the object to be measured.
A heat radiating part with a heat insulating material and a cooling mechanism that blocks and dissipates heat transmitted from the heating part,
It is characterized by including a measuring unit for measuring the amount of displacement in the height direction due to the contact of the contact with the object to be measured.

Further, in the heated body contact measuring instrument according to the present invention,
The heating unit may be provided with a reflector and a heat insulating material that cover the periphery of the contactor to block and reflect heat, and may be connected to the heat radiating unit via the heat insulating material.

Further, in the heated body contact measuring instrument according to the present invention,
The heat radiating unit may include a cooling mechanism with a heat radiating plate that dissipates heat transmitted from the heating unit, and a reflector.

Further, in the heated body contact measuring instrument according to the present invention,
The measuring unit includes a displacement transmission mechanism that transmits the displacement amount in the height direction transmitted from the contact to the displacement detection mechanism, a weight support unit that supports the weights of the heating unit and the heat radiation unit, and a weight support unit.
It may be provided with a displacement detection mechanism having a mechanism for measuring the amount of displacement in the height direction transmitted by the displacement transmission mechanism.

Further, in the heated body contact measuring instrument according to the present invention,
The heating unit includes a temperature sensor that measures the temperature of the contactor, a heater for heating, a temperature control mechanism that feeds back the temperature of the heated contactor by the temperature sensor, and stably controls the temperature at a set temperature. It may be provided with.

The heated body contact measuring instrument according to the present invention is inexpensive because it is a contact type, and is arbitrary without affecting the measuring instrument used for measuring the shape of the heated object to be measured. It is possible to accurately measure the difference in relative height on the surface of the object to be measured with respect to the measurement point.

It is a figure which showed schematically the structure of the heating body contact measuring instrument which concerns on embodiment of this invention. It is a figure which showed typically the operation at the time of measurement in the heating body contact measuring instrument of this invention.

Hereinafter, the details of the heated body contact measuring instrument according to the embodiment of the present invention will be described with reference to the drawings. However, the drawings are schematic ones shown as an example for explaining the present invention, and their configurations and the dimensions and dimensional ratios of the respective members are not limited thereto.

FIG. 1 is a schematic view showing a configuration example of the heated body contact measuring instrument of the present invention.
The heating body contact measuring instrument shown in FIG. 1 includes a heating unit 100, a heat radiating unit 200, and a measuring unit 300. In this heated body contact measuring instrument, the contact 101 provided in the heating unit 100 is brought into contact with the heated object 1 to be measured, and a change in the relative height direction from an arbitrary reference point on the surface of the object to be measured is obtained. It is a measuring instrument to measure.

The contact 101 is a portion that comes into direct contact with the object 1 to be measured, and when the object 1 to be measured is a heated body, a material or shape having heat resistance and strength that does not interfere with the measurement with respect to the heating temperature is selected. Will be done.
The heating unit 100 has a temperature sensor 102 and a heater 103 connected to the contact 101, and a temperature control mechanism that stabilizes the contact 101 at the same temperature as the object 1 to be measured by temperature control using these. It is equipped with.

Further, the heating unit 100 is provided with a reflector 104 that blocks and reflects heat in order to reduce the influence of the outside air, and the reflector 104 is provided so as to cover the periphery of the heater 103. The heating unit 100 is connected to the heat radiating unit 200 via the heat insulating material 105 in order to suppress heat transfer to the measuring unit 300.

The heat radiating unit 200 includes a cooling mechanism 201, a heat insulating material 202, and a reflector 203, which discharge heat transferred from the heating unit 100 and have a heat insulating / heat radiating function for suppressing heat transfer to the measuring unit 300. It is equipped with.

As the cooling mechanism 201, for example, a heat sink such as a heat sink or a known means such as an air-cooled type or water-cooled type cooling mechanism can be used, but the heating unit 100 is maintained at a constant temperature by the temperature control mechanism described above and is a measuring unit. This is not the case as long as the method can suppress heat transfer to the 300.

The measuring unit 300 includes a displacement transmission mechanism 301, a weight support unit 302, and a displacement detection mechanism 303, and has a function of measuring the amount of displacement in the height direction of the contactor 101 in contact with the object to be measured 001. There is.

The displacement transmission mechanism 301 is, for example, a guide bush with a built-in ball, a guide bush by blowing air, a linear motion guide mechanism using a linear guide, conversion to rotary motion using a rack gear and a pinion gear, and a link mechanism. Although a known means such as a displacement amount amplification / damping mechanism using the above can be used, the displacement amount is measured by the displacement detection mechanism 303 provided in the measuring unit 300 from the heating unit 100 and the heat radiating unit 200 through the displacement transmission mechanism 301. This does not apply if the measurement operation is possible.

The weight support portion 302 is a mechanism for controlling the force applied to the object to be measured by the contact 101, and for example, a known means such as a compression spring or a constant tension spring / counterweight can be used, but the measurement is to be performed. This does not apply as long as the structure can reduce the pressure at the time of contact with the object 001.

The displacement detection mechanism 303 is, for example, provided with a measuring surface on the displacement transmission mechanism 301, and is a lever-type dial gauge, a spindle-type dial gauge, a non-contact optical measuring instrument, an ultrasonic measuring instrument, or a vortex current. A known means such as an object using a measuring instrument using the above, or a device for measuring the displacement of the displacement converted into the rotational motion by the displacement transmission mechanism 301 with a rotary encoder or a potentiometer can be used. This does not apply as long as it is a displacement detection mechanism capable of measuring the displacement amount in the height direction transmitted from 101.

FIG. 2 is a schematic view showing an operation when measuring the displacement amount in the height direction in the surface of the heated object 1 to be measured by using the heated body contact measuring instrument of the present invention.

FIG. 2 schematically shows a state in which the surface of the object to be measured has irregularities and the heated body contact measuring instrument according to the present invention moves in the horizontal direction on the irregularities.
The heated body contact measuring instrument can be moved along the guide rail 405 by attaching the heated body contact measuring instrument to the portal type guide mechanism 400.

Focusing on the contactor 101 when the heated body contact measuring instrument moves, the point in contact with the object 1 to be measured on the left side of FIG. 2 is set as the measurement reference point 402, and the instrument moving direction 401 indicates from this point. It has moved to the measurement point 403 in the center and further to the measurement point 404 on the right side.

At this time, the measurement point 403 is at a position higher than the measurement reference point 402, and the measurement point 404 is at a position lower than the measurement reference point 402. The amount of high and low displacement at this position is measured by the measuring unit 300. The position of the measurement reference point 402 of the object to be measured 1 may be arbitrarily determined.

As described above, the heated body contact measuring instrument of the present invention is supported by the portal guide mechanism 400 that can be moved to an arbitrary measurement position on the surface of the heated object 1 and includes the contactor 101 included in the heating unit 100. It has a function to adjust the temperature to the same temperature as the heated object 1 to be measured, move it to a different measurement point based on an arbitrary measurement point, and make contact in the same way to measure the relative difference. ..

As the gate type guide mechanism 400, for example, a guide mechanism using mechanical element parts of a shaft or a linear guide, a guide mechanism using air levitation, or the like is used, but the height of each position within a movable range is used. This is not the case if the amount of directional variation is clarified by prior accuracy measurement on the guide mechanism side.

Examples of the present invention will be specifically described.

(Example 1)
In Example 1, a hot plate heated as the object to be measured 1 was installed under the heated body contact measuring instrument, and the surface was measured by the heated body contact measuring instrument.

The displacement detection mechanism 303 is provided with a flat surface portion as a measurement surface to be connected to the displacement transmission mechanism 301, and a teco-type dial gauge that contacts the flat surface portion is used, and the displacement transmission mechanism portion 301 is provided with an air floating type guide bush. , And a heat sink using a heat sink was used for the cooling mechanism 201.

As an evaluation method, the hot plate is heated to 100 ° C., the temperature of the contactor 101 provided in the heated body contact measuring instrument is also adjusted to 100 ° C., and the heated body contact jig is placed on the surface of the hot plate in this state. After contacting them, it was confirmed that there was no change in the measured value due to temperature change or thermal deformation over time.

As a result, the heated body contact measuring instrument according to the present embodiment reduces the temperature difference between the heated object to be measured and the contact portion, and heats the object to be measured and the measuring instrument due to the passage of time and temperature change. It was confirmed that the influence could be suppressed and that the same dimensional measurement as a general contact type measuring instrument was possible.

(Example 2)
Depending on the material of the object to be measured 1, when the contact 101 comes into contact with the surface, a temperature difference between the object 1 to be measured and the heating object contact measuring instrument side or a temperature change thereof occurs, and the temperature of the object 1 to be measured is changed accordingly. Accurate measurement may not be possible due to thermal expansion.

Therefore, in the second embodiment, the temperature of the contact 101 is fed back by the temperature sensor 102 and stabilized at the set temperature so that the temperature changed by the temperature sensor 102 included in the contact 101 is detected and stabilized at the set temperature. A temperature control mechanism for controlling is added to the heating unit 100, and further, a function of notifying that the temperature is stable is provided.
This made it possible to make measurements that are not affected by temperature changes.

According to the heated body contact measuring instrument according to the present invention, when measuring the flatness of the surface of a heated object to be measured, the in-plane flatness at a high temperature can be measured and the dimensions of the surface uneven shape before and after heating can be measured. By capturing changes with high accuracy, it can be used to improve the processing accuracy of processing machines that require a heating process and to grasp the state.

1 ... Measured object 100 ... Heating unit 101 ... Contact 102 ... Temperature sensor 103 ... Heater 104 ... Reflector 105 ... Insulation material 200 ... Heat dissipation unit 201 ... Cooling mechanism 202 ... Insulation material 203 ... Reflector 300 ... Measurement unit 301 ... Displacement transmission Mechanism 302 ... Weight support 303 ... Displacement detection mechanism 400 ... Gate type guide mechanism 401 ... Instrument movement direction 402 ... Measurement reference point 403 ... Measurement point (when the position is higher than the reference point)
404… Measurement point (when the position is lower than the reference point)

Claims (5)

A measuring tool that brings a contact to a heated object to be measured and measures the amount of displacement in the relative height direction from an arbitrary reference point on the surface of the object to be measured, at least.
A heating unit having a contact and a temperature control mechanism that controls the contact to the same temperature as the surface of the object to be measured.
A heat radiating part with a heat insulating material and a cooling mechanism that blocks and dissipates heat transmitted from the heating part,
A heated body contact measuring instrument comprising: a measuring unit for measuring a displacement amount in the height direction due to contact of the contact with the object to be measured. The heated body contact measuring instrument according to claim 1.
The heating unit includes a reflector and a heat insulating material that wraps around the contact and blocks and reflects heat.
A heating body contact measuring instrument characterized in that it is connected to a heat radiating part via a heat insulating material. The heated body contact measuring instrument according to claim 1 or 2.
The heat radiating unit is a heating body contact measuring instrument, comprising a cooling mechanism with a heat radiating plate that dissipates heat transmitted from the heating unit, and a reflector. The heated body contact measuring instrument according to any one of claims 1 to 3.
The measuring unit includes a displacement transmission mechanism that transmits the displacement amount in the height direction transmitted from the contact to the displacement detection mechanism.
A weight supporting portion that supports the weight of the heating portion and the heat radiating portion,
A displacement detection mechanism having a mechanism for measuring the amount of displacement in the height direction transmitted by the displacement transmission mechanism, and
A heated body contact measuring instrument characterized by being provided with. The heated body contact measuring instrument according to any one of claims 1 to 4.
The heating unit includes a temperature sensor that measures the temperature of the contactor, a heater for heating, a temperature control mechanism that feeds back the temperature of the heated contactor by the temperature sensor, and stably controls the temperature at a set temperature. A heated body contact measuring instrument characterized by being provided with.

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