JP2021534424A5 - - Google Patents

Info

Publication number
JP2021534424A5
JP2021534424A5 JP2021510980A JP2021510980A JP2021534424A5 JP 2021534424 A5 JP2021534424 A5 JP 2021534424A5 JP 2021510980 A JP2021510980 A JP 2021510980A JP 2021510980 A JP2021510980 A JP 2021510980A JP 2021534424 A5 JP2021534424 A5 JP 2021534424A5
Authority
JP
Japan
Prior art keywords
spacer material
sample well
metal stack
layer
integrated device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021510980A
Other languages
English (en)
Japanese (ja)
Other versions
JP7428701B2 (ja
JP2021534424A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2019/048836 external-priority patent/WO2020047272A1/en
Publication of JP2021534424A publication Critical patent/JP2021534424A/ja
Publication of JP2021534424A5 publication Critical patent/JP2021534424A5/ja
Application granted granted Critical
Publication of JP7428701B2 publication Critical patent/JP7428701B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021510980A 2018-08-29 2019-08-29 サンプルウェル作製技法および集積センサデバイス用の構造 Active JP7428701B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862724206P 2018-08-29 2018-08-29
US62/724,206 2018-08-29
PCT/US2019/048836 WO2020047272A1 (en) 2018-08-29 2019-08-29 Sample well fabrication techniques and structures for integrated sensor devices

Publications (3)

Publication Number Publication Date
JP2021534424A JP2021534424A (ja) 2021-12-09
JP2021534424A5 true JP2021534424A5 (enExample) 2022-09-07
JP7428701B2 JP7428701B2 (ja) 2024-02-06

Family

ID=68084935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021510980A Active JP7428701B2 (ja) 2018-08-29 2019-08-29 サンプルウェル作製技法および集積センサデバイス用の構造

Country Status (11)

Country Link
US (3) US11322413B2 (enExample)
EP (1) EP3844098B1 (enExample)
JP (1) JP7428701B2 (enExample)
KR (2) KR20210049145A (enExample)
CN (1) CN112955401B (enExample)
AU (2) AU2019330998B2 (enExample)
BR (1) BR112021003074A2 (enExample)
CA (1) CA3109866A1 (enExample)
MX (1) MX2021002413A (enExample)
TW (1) TWI848970B (enExample)
WO (1) WO2020047272A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12179204B2 (en) 2018-12-03 2024-12-31 Quantum-Si Incorporated Sample well fabrication techniques and structures for integrated sensor
CN112992855A (zh) 2019-12-18 2021-06-18 台湾积体电路制造股份有限公司 互连结构
US11476191B2 (en) * 2019-12-18 2022-10-18 Taiwan Semiconductor Manufacturing Co., Ltd. Low resistance interconnect structure for semiconductor device
US12478971B2 (en) 2020-12-31 2025-11-25 Quiver Holdings Inc. Optical plate controller and reader
EP4363832A4 (en) * 2021-06-30 2025-05-07 Q-State Biosciences, Inc. MULTIPLEX OPTICAL STIMULUS AND READOUT PROCESS

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118382A (en) * 1990-08-10 1992-06-02 Ibm Corporation Elimination of etch stop undercut
JPH04340721A (ja) * 1991-05-17 1992-11-27 Nec Corp 半導体装置の製造方法
US5814565A (en) 1995-02-23 1998-09-29 University Of Utah Research Foundation Integrated optic waveguide immunosensor
US6787308B2 (en) 1998-07-30 2004-09-07 Solexa Ltd. Arrayed biomolecules and their use in sequencing
WO2001084197A1 (en) 2000-04-28 2001-11-08 Edgelight Biosciences, Inc. Micro-array evanescent wave fluorescence detection device
US6917726B2 (en) 2001-09-27 2005-07-12 Cornell Research Foundation, Inc. Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes
FR2813121A1 (fr) 2000-08-21 2002-02-22 Claude Weisbuch Dispositif perfectionne de support d'elements chromophores
JP2005345353A (ja) 2004-06-04 2005-12-15 Sony Corp 蛍光励起光の遮光層を備えるバイオアッセイ用基板
US7738086B2 (en) 2005-05-09 2010-06-15 The Trustees Of Columbia University In The City Of New York Active CMOS biosensor chip for fluorescent-based detection
US7426322B2 (en) 2005-07-20 2008-09-16 Searete Llc. Plasmon photocatalysis
US8975216B2 (en) 2006-03-30 2015-03-10 Pacific Biosciences Of California Articles having localized molecules disposed thereon and methods of producing same
US8471230B2 (en) 2006-09-01 2013-06-25 Pacific Biosciences Of California, Inc. Waveguide substrates and optical systems and methods of use thereof
AU2007289057C1 (en) 2006-09-01 2014-01-16 Pacific Biosciences Of California, Inc. Substrates, systems and methods for analyzing materials
US8207509B2 (en) 2006-09-01 2012-06-26 Pacific Biosciences Of California, Inc. Substrates, systems and methods for analyzing materials
FR2908888B1 (fr) 2006-11-21 2012-08-03 Centre Nat Rech Scient Dispositif pour la detection exaltee de l'emission d'une particule cible
WO2009082706A1 (en) 2007-12-21 2009-07-02 The Trustees Of Columbia University In The City Of New York Active cmos sensor array for electrochemical biomolecular detection
US9637380B2 (en) 2008-03-31 2017-05-02 Pacific Biosciences Of California, Inc. Nanoscale apertures having islands of functionality
US8278728B2 (en) 2009-10-17 2012-10-02 Florida Institute Of Technology Array of concentric CMOS photodiodes for detection and de-multiplexing of spatially modulated optical channels
EP2933629B1 (en) 2010-02-19 2019-04-10 Pacific Biosciences Of California, Inc. System for measuring analytical reactions comprising a socket for an optode array chip
US8865078B2 (en) 2010-06-11 2014-10-21 Industrial Technology Research Institute Apparatus for single-molecule detection
CA2856163C (en) 2011-10-28 2019-05-07 Illumina, Inc. Microarray fabrication system and method
US9606060B2 (en) 2012-01-13 2017-03-28 California Institute Of Technology Filterless time-domain detection of one or more fluorophores
US9372308B1 (en) 2012-06-17 2016-06-21 Pacific Biosciences Of California, Inc. Arrays of integrated analytical devices and methods for production
EP2936222B1 (en) 2012-12-18 2019-07-03 Pacific Biosciences Of California, Inc. An optical analytical device
US9228974B2 (en) * 2013-04-10 2016-01-05 Taiwan Semiconductor Manufacturing Company, Ltd. Biosensing well array by self-alignment and selective etching
EP3709003A1 (en) 2013-11-17 2020-09-16 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
US9765395B2 (en) 2014-04-28 2017-09-19 Nanomedical Diagnostics, Inc. System and method for DNA sequencing and blood chemistry analysis
US9885657B2 (en) * 2014-08-08 2018-02-06 Quantum-Si Incorporated Integrated device with external light source for probing detecting and analyzing molecules
US9666748B2 (en) 2015-01-14 2017-05-30 International Business Machines Corporation Integrated on chip detector and zero waveguide module structure for use in DNA sequencing
CN113064236B (zh) 2015-03-16 2022-11-01 加利福尼亚太平洋生物科学股份有限公司 用于自由空间光耦合的集成装置及系统
US9806252B2 (en) * 2015-04-20 2017-10-31 Lam Research Corporation Dry plasma etch method to pattern MRAM stack
TWI704229B (zh) 2015-05-20 2020-09-11 美商寬騰矽公司 核酸定序方法
KR102627237B1 (ko) * 2016-06-01 2024-01-23 퀀텀-에스아이 인코포레이티드 분자들을 검출 및 분석하기 위한 통합 디바이스
US12179204B2 (en) 2018-12-03 2024-12-31 Quantum-Si Incorporated Sample well fabrication techniques and structures for integrated sensor

Similar Documents

Publication Publication Date Title
JP7428701B2 (ja) サンプルウェル作製技法および集積センサデバイス用の構造
US12259324B2 (en) Photonic structures and integrated device for detecting and analyzing molecules
EP4123293B1 (en) Biosensor and method of manufacturing the same
KR102240166B1 (ko) 분자들을 프로빙 검출 및 분석하기 위한 외부 광원을 구비한 통합 디바이스
JP2024120918A (ja) サンプルウェル作製技法および集積センサデバイス用の構造