JP2021532263A5 - - Google Patents
Info
- Publication number
- JP2021532263A5 JP2021532263A5 JP2021503861A JP2021503861A JP2021532263A5 JP 2021532263 A5 JP2021532263 A5 JP 2021532263A5 JP 2021503861 A JP2021503861 A JP 2021503861A JP 2021503861 A JP2021503861 A JP 2021503861A JP 2021532263 A5 JP2021532263 A5 JP 2021532263A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- metalloid
- reaction chamber
- semiconductor
- polymer substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18382552 | 2018-07-24 | ||
| EP18382552.0 | 2018-07-24 | ||
| PCT/EP2019/069970 WO2020020972A1 (en) | 2018-07-24 | 2019-07-24 | Method for producing organic-inorganic hybrid materials |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021532263A JP2021532263A (ja) | 2021-11-25 |
| JP2021532263A5 true JP2021532263A5 (enExample) | 2024-01-19 |
| JP7587100B2 JP7587100B2 (ja) | 2024-11-20 |
Family
ID=63103890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021503861A Active JP7587100B2 (ja) | 2018-07-24 | 2019-07-24 | 有機－無機ハイブリッド材料の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12392034B2 (enExample) |
| EP (1) | EP3827111A1 (enExample) |
| JP (1) | JP7587100B2 (enExample) |
| KR (1) | KR20210080348A (enExample) |
| WO (1) | WO2020020972A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113789534B (zh) * | 2020-05-26 | 2022-09-23 | 中国科学院理化技术研究所 | 一种多级孔道结构的电催化析氢电极及其制备方法和应用 |
| CN112526663A (zh) * | 2020-11-04 | 2021-03-19 | 浙江大学 | 一种基于原子层沉积的吸收膜及其制作方法 |
| CN116640350B (zh) * | 2023-05-31 | 2026-01-30 | 陕西科技大学 | 一种氧化铝/氧化锌共掺杂的聚噻吩衍生物导电薄膜及其制备方法和应用 |
| US20260114243A1 (en) * | 2024-10-17 | 2026-04-23 | Tokyo Electron Limited | Molecular layer infiltration of photoresists |
| CN119751956B (zh) * | 2024-12-31 | 2026-03-03 | 陕西科技大学 | 一种氧化钛/氧化锌共掺杂聚醚酰亚胺抗静电薄膜及其制备方法和应用 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI493058B (zh) * | 2007-05-15 | 2015-07-21 | 應用材料股份有限公司 | 鎢材料的原子層沈積法 |
| WO2009070574A2 (en) * | 2007-11-27 | 2009-06-04 | North Carolina State University | Methods for modification of polymers, fibers and textile media |
| WO2013071065A1 (en) * | 2011-11-10 | 2013-05-16 | Research Triangle Institute | Nanostructured polymer-inorganic fiber media |
| WO2014092085A1 (ja) * | 2012-12-14 | 2014-06-19 | コニカミノルタ株式会社 | ガスバリア性フィルム、その製造方法、およびこれを用いた電子デバイス |
| US9443998B2 (en) * | 2013-03-14 | 2016-09-13 | Nanoco Technologies Ltd. | Multi-layer-coated quantum dot beads |
| US8900467B1 (en) | 2013-05-25 | 2014-12-02 | HGST Netherlands B.V. | Method for making a chemical contrast pattern using block copolymers and sequential infiltration synthesis |
| US10763103B2 (en) * | 2015-03-31 | 2020-09-01 | Versum Materials Us, Llc | Boron-containing compounds, compositions, and methods for the deposition of a boron containing films |
| JP6697706B2 (ja) | 2015-12-07 | 2020-05-27 | 凸版印刷株式会社 | 原子層堆積装置 |
| US10550010B2 (en) * | 2015-12-11 | 2020-02-04 | Uchicago Argonne, Llc | Oleophilic foams for oil spill mitigation |
| KR102577001B1 (ko) * | 2016-08-11 | 2023-09-12 | 삼성디스플레이 주식회사 | 플렉서블 기판, 플렉서블 기판의 제조방법, 및 플렉서블 기판을 포함하는 디스플레이 장치 |
| US10364491B2 (en) | 2016-11-02 | 2019-07-30 | Georgia Tech Research Corporation | Process to chemically modify polymeric materials by static, low-pressure infiltration of reactive gaseous molecules |
| LU93390B1 (en) * | 2016-12-21 | 2018-07-24 | Luxembourg Inst Science & Tech List | Method for depositing alumina by atomic layer deposition |
-
2019
- 2019-07-24 WO PCT/EP2019/069970 patent/WO2020020972A1/en not_active Ceased
- 2019-07-24 US US17/262,329 patent/US12392034B2/en active Active
- 2019-07-24 EP EP19742227.2A patent/EP3827111A1/en active Pending
- 2019-07-24 JP JP2021503861A patent/JP7587100B2/ja active Active
- 2019-07-24 KR KR1020217004547A patent/KR20210080348A/ko active Pending
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