JP2021197260A - UV irradiation device - Google Patents

Abstract

To provide a UV irradiation device that can suppress the position of a barrier discharge lamp around a tube axis from shifting.SOLUTION: A UV irradiation device includes an arc tube that has a cylindrical shape and is filled with rare gas in an internal space, an internal electrode with a coil provided in the interior space, an external electrode provided on the outside of the arc tube, a cooling unit provided on the outside of the external electrode through a gap, a terminal cover 24 provided at the end of the arc tube and having a first flat surface 24a on the side, and a positioning unit 3 having a hole 3a provided with the terminal cover 24. The inner wall surface of the hole 3 is provided with a second flat surface 3a1 that can come into contact with the first flat surface 24a of the terminal cover 24.SELECTED DRAWING: Figure 4

Description

Embodiments of the present invention relate to an ultraviolet irradiation device.

There is a barrier discharge lamp that irradiates ultraviolet rays with a peak wavelength of 200 nm or less. Barrier discharge lamps are used, for example, for surface treatments such as removal of organic substances adhering to the surface of an object (light cleaning treatment), surface modification, and formation of an oxide film. The barrier discharge lamp has, for example, an arc tube formed of a dielectric, an internal electrode provided inside the arc tube, and an external electrode provided outside the arc tube. When an AC voltage is applied to the internal electrode and the external electrode, a dielectric barrier discharge occurs, and ultraviolet rays having a specific wavelength are irradiated according to the type of gas enclosed in the internal space of the arc tube.

Here, when the arc tube is tubular, the arc tube may rotate in the radial direction little by little due to repeated expansion and contraction such as when blinking and lit, and the position of the barrier discharge lamp around the tube axis may shift. If the position of the barrier discharge lamp around the tube axis shifts, the ultraviolet irradiation position may shift or the illuminance may change.
Therefore, it has been desired to develop an ultraviolet irradiation device capable of suppressing the position of the barrier discharge lamp around the tube axis from shifting.

Japanese Unexamined Patent Publication No. 2013-21164

An object to be solved by the present invention is to provide an ultraviolet irradiation device capable of suppressing the position of a barrier discharge lamp around a tube axis from shifting.

The ultraviolet irradiation device according to the embodiment has a tubular shape and has an arc tube in which a rare gas is sealed in an internal space; an internal electrode having a coil provided in the internal space; and an internal electrode provided on the outside of the arc tube. An external electrode; a cooling unit provided on the outside of the external electrode via a gap; a terminal cover provided at the end of the arc tube and having a first flat surface on a side surface; the terminal cover is provided. It is provided with a positioning portion having a hole and; The inner wall surface of the hole is provided with a second flat surface that can come into contact with the first flat surface of the terminal cover.

According to the embodiment of the present invention, it is possible to provide an ultraviolet irradiation device capable of suppressing the position of the barrier discharge lamp around the tube axis from shifting.

It is a schematic side view for exemplifying the ultraviolet irradiation apparatus which concerns on this embodiment. It is a schematic side view of the ultraviolet irradiation apparatus in FIG. 1 in the AA line direction. It is a schematic diagram for exemplifying a barrier discharge lamp. It is a schematic side view for exemplifying a positioning part. It is a schematic cross-sectional view for exemplifying a cooling part. (A) and (b) are schematic perspective views for exemplifying a pair of holding portions. It is a schematic side view for exemplifying the ultraviolet irradiation apparatus which concerns on other embodiment. It is a schematic side view for exemplifying the ultraviolet irradiation apparatus which concerns on other embodiment. It is a schematic side view for exemplifying the ultraviolet irradiation apparatus which concerns on other embodiment.

Hereinafter, embodiments will be illustrated with reference to the drawings. In each drawing, similar components are designated by the same reference numerals and detailed description thereof will be omitted as appropriate.
FIG. 1 is a schematic side view for exemplifying the ultraviolet irradiation device 1 according to the present embodiment.
FIG. 2 is a schematic side view of the ultraviolet irradiation device 1 in FIG. 1 in the AA line direction.

As shown in FIGS. 1 and 2, the ultraviolet irradiation device 1 includes a barrier discharge lamp 2, a positioning unit 3, a positioning unit 4, a frame 5, a lighting circuit 6, a gas supply unit 7, a controller 8, a cooling unit 9, and a cooling unit 9. The support portion 12 can be provided.
As an example, the case where three barrier discharge lamps 2 are provided is illustrated, but the number of barrier discharge lamps 2 can be appropriately changed according to the size and number of objects to be irradiated with ultraviolet rays. That is, at least one barrier discharge lamp 2 may be provided.

FIG. 3 is a schematic diagram for illustrating the barrier discharge lamp 2.
As shown in FIG. 3, the barrier discharge lamp 2 may be provided with a light emitting tube 21, an internal electrode 22, a reflective film 23, a terminal cover 24, a lead wire 25, and an external electrode 26.

The arc tube 21 has a tubular shape and has a shape in which the total length (length along the tube shaft 21d) is longer than the tube diameter. The arc tube 21 can be, for example, a cylindrical tube. Sealing portions 21a are provided at each of the ends of the arc tube 21 on both sides in the direction along the tube axis 21d. By providing the sealing portion 21a, the internal space of the arc tube 21 can be hermetically sealed. The sealing portion 21a can be formed by, for example, a pinch sealing method or a shrink sealing method.

Further, for example, a conductive portion 21b and an outer lead 21c can be provided inside each sealing portion 21a. For example, one conductive portion 21b can be provided for one sealing portion 21a. The planar shape of the conductive portion 21b can be a quadrangle. For example, the conductive portion 21b has a thin film shape. For example, the conductive portion 21b can be formed from a molybdenum foil.

The outer lead 21c has a linear shape and can be provided at least inside the sealing portion 21a on the side where the lead wire 25 is provided. One end of the outer lead 21c is electrically connected to the conductive portion 21b. The vicinity of the end portion of the outer lead 21c can be, for example, laser welded or resistance welded to the conductive portion 21b. The other end of the outer lead 21c can be exposed from the sealing portion 21a. The outer lead 21c may contain, for example, molybdenum.

A rare gas is sealed in the internal space of the arc tube 21. In the barrier discharge lamp 2, barrier discharge is performed between the internal electrode 22 and the external electrode 26 to give high energy electrons to the enclosed rare gas to generate excimer-excited molecules. When the excimer-excited molecule returns to its original state, light having a specific peak wavelength is generated depending on the type of rare gas. Therefore, the noble gas sealed in the internal space of the arc tube 21 can be appropriately changed according to the use of the barrier discharge lamp 2. The noble gas sealed in the internal space of the arc tube 21 can be, for example, krypton, xenon, argon, neon, or the like. Alternatively, a mixed gas in which a plurality of types of rare gases are mixed can be sealed in the internal space of the arc tube 21. Further, if necessary, a halogen gas or the like can be further enclosed.

The pressure (filling pressure) of the rare gas at 25 ° C. in the internal space of the arc tube 21 can be, for example, about 80 kPa to 200 kPa. The pressure (filling pressure) of the rare gas at 25 ° C. in the internal space of the arc tube 21 can be obtained from the standard state of the gas (SATP (Standard Ambient Temperature and Pressure): temperature 25 ° C., 1 bar).

For example, when the surface of a glass plate for a flat panel display is light-cleaned, it is preferable that the noble gas to be enclosed is xenon. The encapsulation pressure of xenon can be, for example, about 93 kPa. If the noble gas to be enclosed is xenon, ultraviolet rays having a peak wavelength of 172 nm can be generated, so that the cleaning effect can be enhanced.

Here, when a barrier discharge is generated (when the barrier discharge lamp 2 is turned on), ultraviolet rays are generated in the internal space of the arc tube 21. The generated ultraviolet rays are irradiated to the outside through the arc tube 21. Therefore, the arc tube 21 is formed of, for example, a material having a high transmittance of ultraviolet rays having a peak wavelength of 200 nm or less. The arc tube 21 can be formed from _{, for example, a material containing SiO 2.} The arc tube 21 can be formed from, for example, synthetic quartz glass.

The internal electrode 22 can have a coil 22a and a leg 22b. The coil 22a and the leg 22b can be integrally formed. The coil 22a and the leg 22b can be formed by plastic working the wire. The wire diameter (diameter) of the wire can be, for example, about 0.2 mm to 1.0 mm.

The coil 22a and the leg 22b can contain, for example, tungsten as a main component. The tungsten content can be, for example, 50 wt% or more. In this case, if doped tungsten obtained by adding potassium or the like to tungsten is used, the dimensional stability of the coil 22a can be improved.

The coil 22a has a spiral shape and is provided in the internal space of the arc tube 21. The coil 22a extends a central region of the internal space of the arc tube 21 along the tube axis 21d of the arc tube 21. The pitch dimension P1 of the coil 22a can be, for example, about 10 mm to 120 mm.

A gap can be provided between the coil 22a and the inner wall of the arc tube 21. The gap can be, for example, 10 mm or less. It should be noted that the coil 22a and the reflective film 23 may be in contact with each other without providing a gap. Further, when the reflective film 23 is not provided, the coil 22a and the inner wall of the arc tube 21 may be brought into contact with each other. If the gap is not more than a predetermined dimension, stable barrier discharge can be generated at a low voltage. Therefore, for example, the outer diameter of the coil 22a can be set so that a predetermined gap is provided according to the inner diameter of the arc tube 21.

Legs 22b are provided at each of the ends on both sides of the coil 22a. The leg 22b has a linear shape and extends from the end of the coil 22a along the tube axis 21d of the arc tube 21.

The end of the leg 22b is electrically connected to the conductive portion 21b inside the sealing portion 21a. The vicinity of the end of the leg 22b can be, for example, laser welded or resistance welded to the conductive portion 21b.

The reflective film 23 has a film shape and can be provided on the inner wall of the arc tube 21. The reflective film 23 can be provided between the external electrode 26 and the internal electrode 22 (coil 22a). The reflective film 23 is generated in the internal space of the arc tube 21 and reflects ultraviolet rays that do not go in the irradiation direction toward the irradiation direction. If the reflective film 23 is provided, the efficiency of extracting ultraviolet rays can be improved. Further, if the reflective film 23 is provided, the region of the arc tube 21 where the ultraviolet rays are directly incident can be reduced, so that the chemical structural change of the arc tube 21 due to the ultraviolet rays can be suppressed.

The thickness of the reflective film 23 can be, for example, about 100 μm to 300 μm. In this way, it becomes easy to maintain good reflectance to ultraviolet rays.
The reflective film 23 can contain, for example, SiO ₂ (silicon dioxide). Further, the reflective film 23 can also include particles that scatter ultraviolet rays (for example, particles of aluminum oxide).

The reflective film 23 is not always necessary and can be omitted. However, as described above, if the reflective film 23 is provided, the efficiency of extracting ultraviolet rays can be improved, and the chemical structural change of the arc tube 21 can be suppressed.

The terminal cover 24 is provided at each end of the arc tube 21 on both sides in the direction along the tube shaft 21d. The terminal cover 24 covers, for example, the sealing portion 21a. The terminal cover 24 can be formed of, for example, an insulating material such as resin or ceramics. The terminal cover 24 can be formed of, for example, steatite, aluminum oxide, or the like. The terminal cover 24 may be in contact with the external electrode 26 or may be separated from the external electrode 26.

The lead wire 25 can be electrically connected to the end portion of the outer lead 21c exposed from the sealing portion 21a. The lead wire 25 is electrically connected to the internal electrode 22 via the outer lead 21c and the conductive portion 21b. As shown in FIG. 2, the lead wire 25 can be electrically connected to the lighting circuit 6. As shown in FIG. 3, the lead wire 25 may be provided only on one end side of the arc tube 21, or may be provided on each of the end portions on both sides of the arc tube 21.

The external electrode 26 can be provided on the outside of the arc tube 21. The external electrode 26 extends along the tube axis 21d of the arc tube 21. When the reflective film 23 is provided, the external electrode 26 can be provided at a position facing the reflective film 23.

Further, when the length of the arc tube 21 in the direction along the tube axis 21d is long, as shown in FIG. 2, a plurality of external electrodes 26 can be provided for one arc tube 21. When a barrier discharge is generated, heat is generated along with ultraviolet rays. When the temperature of the arc tube 21 rises due to the generated heat, the arc tube 21 may be deformed. In this case, the longer the length of the arc tube 21 in the direction along the tube axis 21d, the more easily the deformation is likely to occur, and the larger the amount of deformation is likely to be. If a plurality of external electrodes 26 are provided for one arc tube 21, each of the plurality of external electrodes 26 can individually follow the deformation state of the arc tube 21. Therefore, it is possible to suppress changes in the positional relationship between the arc tube 21 and the external electrode 26, and by extension, the positional relationship between the coil 22a of the internal electrode 22 and the external electrode 26. As a result, the barrier discharge can be stabilized, and the uniformity of illuminance can be improved.

At least a part of the surface of the external electrode 26 on the arc tube 21 side can be brought into contact with the outer surface of the arc tube 21. The external electrode 26 may be, for example, a thin metal plate plastically processed according to the outer shape of the arc tube 21. The external electrode 26 can be formed of a conductive material such as metal. The external electrode 26 can be formed by using, for example, stainless steel, aluminum, or the like. Here, when a barrier discharge is generated, heat is generated together with ultraviolet rays. Therefore, if the external electrode 26 is made of a material having high thermal conductivity such as metal, the external electrode 26 can be used as a heat radiating member.

Further, when the central angle of the external electrode 26 is smaller than 180 ° when viewed from the direction along the tube axis 21d of the arc tube 21, the region where the external electrode 26 and the internal electrode 22 face each other becomes too small. , There is a risk that the amount of ultraviolet rays generated will be reduced. On the other hand, when the central angle is larger than 300 °, the ultraviolet rays generated in the internal space of the arc tube 21 are easily absorbed by the external electrode 26, so that the efficiency of extracting the ultraviolet rays may decrease. Therefore, it is preferable that the central angle of the external electrode 26 is 180 ° or more and 300 ° or less. By doing so, it is possible to secure the required amount of ultraviolet rays generated, and it is possible to suppress a decrease in the efficiency of extracting ultraviolet rays.

Here, the arc tube 21, the internal electrode 22, the reflective film 23, and the like are more likely to be consumed than the external electrode 26. Therefore, if the external electrode 26 can be removed from the arc tube 21, maintainability can be improved and running costs can be reduced. For example, the external electrode 26 can have at least one mounting portion 26a that projects outward. The external electrode 26 illustrated in FIG. 2 has four mounting portions 26a. The mounting portion 26a may be provided with a hole into which a fastening member such as a screw is inserted. The external electrode 26 (mounting portion 26a) can be mounted together with the holding portion 9d on the end surface of the cooling portion 9 on the side opposite to the frame 5 side by using a fastening member such as a screw (see FIG. 5).

FIG. 4 is a schematic side view for illustrating the positioning unit 3 and the positioning unit 4.
FIG. 4 is a schematic side view of the ultraviolet irradiation device 1 in FIG. 2 in the BB line direction.
In addition, in order to avoid complication, in FIG. 4, the support portion 12 is omitted.
The positioning unit 3 suppresses the position of the barrier discharge lamp 2 around the tube shaft 21d from shifting.
As shown in FIGS. 2 and 4, at least one positioning unit 3 can be provided for one barrier discharge lamp 2. However, if one positioning unit 3 is provided for one terminal cover 24, the rotation of the barrier discharge lamp 2 can be suppressed more effectively. The positioning portion 3 can be attached to the frame 5 by using, for example, a fastening member such as a screw. Further, the positioning portion 4 can be integrally formed with the frame 5.

The positioning portion 3 has a plate shape and has a hole 3a in which the terminal cover 24 is provided. The hole 3a penetrates the positioning portion 3 in the thickness direction and opens at the end surface of the positioning portion 3 opposite to the frame 5 side.

A pair of flat surfaces 3a1 (corresponding to an example of a second flat surface) parallel to each other are provided on the inner wall surface of the hole 3a. The flat surface 3a1 can be, for example, a surface of the frame 5 that is substantially perpendicular to the surface 5a to which the positioning portion 3 is attached. Further, a pair of flat surfaces 24a (corresponding to an example of the first flat surface) parallel to each other are provided on the side surface of the terminal cover 24. The distance between the flat surface 3a1 and the flat surface 3a1 can be the same as or slightly larger than the distance between the flat surface 24a and the flat surface 24a. That is, at least one of the pair of flat surfaces 3a1 comes into contact with the flat surfaces 24a. By doing so, it is possible to prevent the barrier discharge lamp 2 from being displaced around the tube axis 21d.

Although the flat surface 3a1 substantially perpendicular to the surface 5a of the frame 5 is illustrated, it may be a flat surface inclined with respect to the surface 5a of the frame 5 or a flat surface parallel to the surface 5a of the frame 5. In this case, a flat surface may be provided on the side surface of the terminal cover 24 so as to match the flat surface of the positioning portion 3. However, if the flat surface 3a1 substantially perpendicular to the surface 5a of the frame 5 is used, the barrier discharge lamp 2 can be easily attached to and detached from the positioning portion 3 even when the distance between the barrier discharge lamps 2 is small. Become.

If the positioning unit 3 is provided, the position of the barrier discharge lamp 2 around the tube shaft 21d can be determined simply by inserting the terminal cover 24 of the barrier discharge lamp 2 into the hole 3a of the positioning unit 3. In addition, it is possible to suppress the position of the barrier discharge lamp 2 around the tube shaft 21d from shifting.
That is, the barrier discharge lamp 2 can be easily attached and detached, and the position of the barrier discharge lamp 2 around the tube axis 21d can be suppressed from being displaced.

The positioning unit 4 suppresses the barrier discharge lamp 2 from moving in the direction along the tube shaft 21d. As shown in FIGS. 2 and 4, a pair of positioning units 4 can be provided for one barrier discharge lamp 2 or for a plurality of barrier discharge lamps 2 provided side by side. A barrier discharge lamp 2 can be provided in the space between the positioning unit 4 and the positioning unit 4. The shortest distance between the positioning unit 4 and the positioning unit 4 may be the same as or slightly larger than the distance between the end surface of the terminal cover 24 and the end surface of the terminal cover 24 (the length of the barrier discharge lamp 2). can. That is, at least one of the pair of positioning portions 4 comes into contact with the end face of the terminal cover 24. By doing so, it is possible to suppress the barrier discharge lamp 2 from moving in the direction along the tube axis 21d.

The shape of the positioning portion 4 can be columnar. The shape of the positioning portion 4 can be, for example, a columnar shape, a prismatic shape, or the like. Further, the shape of the positioning portion 4 may be a tapered shape such as a cone, a truncated cone, a pyramid, and a pyramid, or a shape in which the side surface on the terminal cover 24 side is inclined. If the shape of the positioning portion 4 is a tapered shape or a shape in which the side surface is inclined, it becomes easy to mount the barrier discharge lamp 2 between the positioning portion 4 and the positioning portion 4.

The positioning portion 4 can be attached to the surface 5a of the frame 5 to which the positioning portion 3 is attached by using, for example, a fastening member such as a screw. Further, the positioning portion 4 can be integrally formed with the frame 5.

If the positioning unit 4 is provided, the position of the barrier discharge lamp 2 in the direction along the tube axis 21d can be determined only by mounting the barrier discharge lamp 2 between the positioning unit 4 and the positioning unit 4. can. In addition, it is possible to prevent the barrier discharge lamp 2 from being displaced in the direction along the tube axis 21d.
That is, the barrier discharge lamp 2 can be easily attached and detached, and the position of the barrier discharge lamp 2 in the direction along the tube axis 21d can be suppressed.

The materials of the positioning unit 3 and the positioning unit 4 are not particularly limited as long as they have a certain degree of rigidity, heat resistance, and resistance to ultraviolet rays. However, it is preferable to use a material that can prevent the terminal cover 24 from being scratched or the like when the positioning unit 3 and the positioning unit 4 come into contact with the terminal cover 24. The material of the positioning unit 3 and the positioning unit 4 is preferably a resin such as a fluororesin.

The frame 5 can be provided so as to face an object to be irradiated with ultraviolet rays. Further, the frame 5 may be provided at a position facing the object when irradiating the object with ultraviolet rays, and may be moved from the position facing the object during maintenance or the like. For example, the frame 5 can be provided inside an opening / closing cover provided above an object or the like.

The structure of the frame 5 is not particularly limited, and it may be a skeleton structure as illustrated in FIG. 2, or a plate-like body or the like.

As shown in FIG. 2, the lighting circuit 6 can be electrically connected to the internal electrode 22 via the wiring 6b, the terminal 6a, and the lead wire 25. Further, the lighting circuit 6 can be electrically connected to the external electrode 26 via the wiring 6c. As shown in FIG. 5, which will be described later, the attachment portion 26a of the external electrode 26 is provided in the cooling portion 9. The cooling unit 9 is formed of, for example, a metal such as aluminum or stainless steel. Therefore, the lighting circuit 6 can also be electrically connected to the external electrode 26 via the wiring 6c and the cooling unit 9. The barrier discharge lamp 2 (external electrode 26) may be removed during maintenance, but the cooling unit 9 is rarely removed. Therefore, if the wiring 6c is connected to the cooling unit 9 instead of the external electrode 26, the removal and attachment of the wiring 6c can be omitted at the time of maintenance or the like. In FIG. 1, one lighting circuit 6 is configured to light three barrier discharge lamps, but it is also possible to provide individual lighting circuits for a plurality of lamps.

The terminal 6a can have an insulating portion 6a1 and a conductive portion 6a2. The insulating portion 6a1 can be formed of, for example, an insulating material such as fluororesin or ceramics. The insulating portion 6a1 can be attached to the frame 5 by using, for example, a fastening member such as a screw. The conductive portion 6a2 can be formed from a conductive material such as stainless steel or nickel. One end of the conductive portion 6a2 is exposed from one end of the insulating portion 6a1, and the lead wire 25 is electrically connected. The other end of the conductive portion 6a2 is exposed from the other end of the insulating portion 6a1 and the wiring 6b is electrically connected. When the lead wire 25 is connected to the lighting circuit 6, the terminal 6a and the wiring 6b can be omitted. However, if the terminals 6a and the wiring 6b are provided, it is possible to prevent ultraviolet rays and ozone from entering the inside of the frame 5. Further, since the length of the lead wire 25 can be shortened, the workability when attaching and detaching the barrier discharge lamp 2 can be improved. Further, since the length of the lead wire 25 can be made constant, the versatility of the barrier discharge lamp 2 can be improved.

The lighting circuit 6 may have an inverter that converts the power from the AC power source into high voltage and high frequency (for example, a sine wave having a frequency of 37 kHz). For example, the lighting circuit 6 can light the barrier discharge lamp 2 with a lamp power of about 2.4 kW.

The gas supply unit 7 supplies gas to the holes 9c provided in the cooling unit 9. The gas supply unit 7 may be provided with a gas supply source 71 and a gas control unit 72. The gas supply source 71 and the gas control unit 72 can be connected by a pipe 73. The gas control unit 72 and the cooling unit 9 can be connected by a pipe 74.

The gas supply source 71 may be, for example, a cylinder in which high-pressure gas is stored, a factory pipe for supplying high-pressure gas, or the like. The gas can be, for example, dry air, nitrogen gas, noble gas (eg, argon, neon, helium, etc.). In this case, when barrier discharge is performed, air discharge may occur in the gap 9a between the cooling unit 9 and the external electrode 26. When oxygen and nitrogen are contained in the gas in the gap 9a, oxygen may be ionized by aerial discharge, and the ionized oxygen and nitrogen may react with each other to generate nitrogen oxides (NOx). ..

Further, when ultraviolet rays of 172 nm are irradiated by lighting the barrier discharge lamp, ozone is generated by the reaction with oxygen in the atmosphere. When ozone and nitrogen oxides are generated, they react, sometimes dinitrogen pentoxide (N 2 _{O 5)} is generated. In this case, if the gas in the gap 9a contains water such as water vapor, the water may react with dinitrogen pentoxide to generate _{nitric acid (HNO 3).} If the generated nitric acid adheres to the outer surface of the arc tube 21, the optical characteristics of the arc tube 21 may deteriorate and the transmission of ultraviolet rays may be suppressed.

If such a chemical reaction occurs repeatedly every time the barrier discharge lamp 2 is turned on, the efficiency of extracting ultraviolet rays may decrease with time. In addition, if nitric acid drops and adheres to the object, the object may be damaged.

Therefore, it is desirable that the gap 9a between the cooling unit 9 and the external electrode 26 is provided with a sufficient distance so that an air discharge does not occur. If the gap 9a is narrow and an air discharge occurs, for example, the supply gas for cooling should be a gas that does not contain oxygen or a gas that has a lower oxygen concentration than air, and the oxygen concentration in the gap 9a should be reduced. Is preferable. For example, the gas is preferably nitrogen gas or a noble gas. In this case, if nitrogen gas is used, the running cost can be reduced.

The gas control unit 72 can control, for example, the flow rate of the gas supplied to the cooling unit 9. The gas control unit 72 may indirectly control the flow rate of the gas by controlling the pressure of the gas supplied to the cooling unit 9. That is, the gas control unit 72 can control at least one of the gas flow rate and the gas pressure. Further, the gas control unit 72 may further have a function of switching between starting the gas supply and stopping the gas supply.

The controller 8 can have an arithmetic element such as a CPU (Central Processing Unit) and a storage element such as a semiconductor memory. The controller 8 can be, for example, a computer. A control program for controlling the lighting circuit 6 and the gas supply unit 7 can be stored in the storage element. Based on the control program stored in the storage element, the arithmetic element switches between applying and stopping the application of electric power to the barrier discharge lamp 2, switching between supplying and stopping the supply of gas to the cooling unit 9, and supplying. It is possible to control the flow rate of gas and the like. Further, the controller 8 may be provided with an input unit for inputting data by the operator, a monitor for displaying the operating status and abnormality display of the ultraviolet irradiation device 1, a power switch, and the like.

As shown in FIG. 2, the cooling unit 9 can be attached to the surface 5a of the frame 5 by using a fastening member such as a screw. The cooling unit 9 can be provided between the positioning unit 3 and the positioning unit 3.

FIG. 5 is a schematic cross-sectional view for illustrating the cooling unit 9.
FIG. 5 is a schematic cross-sectional view of the cooling unit 9 in FIG. 2 in the direction of the CC line.
As shown in FIG. 5, a gap 9a can be provided between the surface 9b on the external electrode 26 side of the cooling unit 9 and the outer surface of the external electrode 26. That is, the cooling unit 9 is provided on the outside of the external electrode 26 via the gap 9a. The cooling unit 9 can face the external electrode 26 via the gap 9a. If the dimension S of the gap 9a in the direction orthogonal to the tube axis 21d of the arc tube 21 is made too small, as described above, an aerial discharge is generated between the cooling unit 9 and the external electrode 26, and the barrier discharge is generated. When the arc tube 21 is deformed by the heat generated, a part of the arc tube 21 may come into contact with the cooling unit 9. When a part of the arc tube 21 comes into contact with the cooling portion 9, the flow of the gas supplied to the gap 9a is hindered, so that the cooling of the arc tube 21 may be suppressed. On the other hand, if the dimension S of the gap 9a is made too large, the flow velocity of the gas supplied to the gap 9a becomes slow, heat dissipation from the arc tube 21 may be suppressed, or regions having different temperatures may be generated in the arc tube 21. There is. According to the knowledge obtained by the present inventor, the dimension S of the gap 9a is preferably 0.5 mm or more and 8 mm or less. If the dimension S of the gap 9a is within this range, the arc tube 21 can be effectively cooled. In this case, the distance L between the surface 9b on the external electrode 26 side of the cooling unit 9 and the outer surface of the arc tube 21 may be, for example, 1 mm or more when the thickness of the external electrode 26 is 0.5 mm. can.

The surface 9b on the external electrode 26 side of the cooling unit 9 can be a curved surface. The surface 9b can be, for example, a part of the side surface of the cylinder centered on the tube shaft 21d of the arc tube 21. By doing so, it becomes easy to make the dimension S of the gap 9a substantially constant. Therefore, the arc tube 21 can be effectively cooled.

The cooling unit 9 has a block shape and has a shape extending in a direction along the tube axis 21d of the arc tube 21. The cooling unit 9 is preferably formed of a material having high thermal conductivity. The cooling unit 9 can be formed of, for example, a metal such as aluminum or stainless steel. A hole 9c for allowing gas to flow can be provided inside the cooling unit 9. The hole 9c extends along the tube axis 21d of the arc tube 21. As shown in FIG. 2, both ends of the hole 9c are closed by the plug 9c1. The number of holes 9c and the cross-sectional shape are not particularly limited, but if a plurality of holes 9c are provided, the arc tube 21 can be effectively cooled and the temperature distribution can be suppressed from occurring in the arc tube 21. Can be done.

As shown in FIG. 2, the hole 9c can be provided with a supply hole 9c2. One end of the supply hole 9c2 opens into the hole 9c, and the other end opens to, for example, the surface of the cooling unit 9 opposite to the external electrode 26 side. A pipe 74 can be connected to the supply hole 9c2 via a pipe joint. The number of supply holes 9c2 is not limited, but it is preferable to provide a plurality of supply holes 9c2. For example, supply holes 9c2 can be provided in the vicinity of the ends on both sides of the holes 9c. By doing so, since the gas can be supplied from both ends of the hole 9c, it is possible to suppress the flow rate of the gas supplied to the surface of the arc tube 21 from fluctuating.

As shown in FIG. 2, a plurality of discharge holes 9c3 can be provided in the holes 9c. The plurality of discharge holes 9c3 can be provided side by side in the direction along the tube axis 21d of the arc tube 21. One end of the discharge hole 9c3 is open in the hole 9c, and the other end is open in the gap 9a. The opening dimensions of the plurality of discharge holes 9c3 may be the same or different. For example, the temperature of the central region of the arc tube 21 tends to be higher than that of the vicinity of the end portion of the arc tube 21. Therefore, the opening size of the discharge hole 9c3 facing the central region of the arc tube 21 can be made larger than the opening size of the discharge hole 9c3 facing the vicinity of the end portion of the arc tube 21. By doing so, it is possible to increase the flow rate of the gas supplied to the central region of the arc tube 21 where the temperature tends to be high. Therefore, it is possible to effectively cool the arc tube 21 and suppress the occurrence of a temperature distribution in the arc tube 21.

The pitch dimension P2 of the plurality of discharge holes 9c3 can be, for example, the pitch dimension P1 or less of the coil 22a. The pitch dimension P2 can be, for example, 10 mm or more and 30 mm or less. The spacing between the plurality of discharge holes 9c3 may be substantially constant or may be different. As described above, the temperature of the central region of the arc tube 21 tends to be higher than that of the vicinity of the end portion of the arc tube 21. Therefore, the pitch dimension of the discharge hole 9c3 facing the central region of the arc tube 21 can be made smaller than the pitch dimension of the discharge hole 9c3 facing the vicinity of the end portion of the arc tube 21. By doing so, it is possible to increase the flow rate of the gas supplied to the central region of the arc tube 21 where the temperature tends to be high. Therefore, it is possible to effectively cool the arc tube 21 and suppress the occurrence of a temperature distribution in the arc tube 21.

Further, as shown in FIG. 5, the discharge hole 9c3 can have a shape extending toward the tube shaft 21d of the arc tube 21. By doing so, the gas can be sprayed on the surface of the arc tube 21, and it becomes easy to flow the gas substantially evenly on the surface of the arc tube 21.
Further, the discharge hole 9c3 may be a slit or the like extending in the direction along the tube axis 21d of the arc tube 21. If the discharge hole 9c3 is a slit or the like, gas can be directly supplied to a wider area on the surface of the arc tube 21.

As shown in FIGS. 2 and 5, the cooling unit 9 may be provided with a plurality of holding units 9d for holding the barrier discharge lamp 2. The plurality of holding portions 9d can be provided on the end surface of the cooling portion 9 on the side opposite to the frame 5 side. In the direction perpendicular to the surface 5a of the frame 5, the surface 9d1 of the plurality of holding portions 9d opposite to the frame 5 side is opposite to the tube shaft 21d of the arc tube 21 and the frame 5 side of the arc tube 21. It is preferably located in the region between the end 21e. By doing so, the arc tube 21 can be easily held, and the posture of the barrier discharge lamp 2 can be stabilized.

The holding portion 9d may have a plate shape, for example. A pair of holding portions 9d are provided with the arc tube 21 interposed therebetween in a direction orthogonal to the tube axis 21d of the arc tube 21. The ends of the pair of holding portions 9d on the arc tube 21 side can be brought into contact with the arc tube 21 via the external electrode 26.
The pair of holding portions 9d and the attaching portion 26a of the external electrode 26 are attached to the cooling portion 9 by using a fastening member such as a screw.

6 (a) and 6 (b) are schematic perspective views for exemplifying a pair of holding portions.
For example, as shown in FIG. 6A, a pair of holding portions 9d having the same shape can be provided. The holding portion 9d has a plate shape and can have at least one mounting hole 9d2 penetrating in the thickness direction. The side surface 9d3 of the holding portion 9d on the arc tube 21 side can be curved. The radius of curvature of the side surface 9d3 can be the same as or slightly larger than the value of half the diameter of the arc tube 21. Alternatively, the side surface 9d3 may be an inclined surface obtained by approximating the radius of curvature instead of a curved surface. The material of the holding portion 9d can be, for example, a metal such as stainless steel or a resin such as a fluororesin.

For example, as shown in FIG. 6B, the holding portion 19 and the holding portion 29 can be provided. The holding portion 19 can be provided so as to face the holding portion 29.
The holding portion 19 has a plate shape and has a surface 19d1 attached to the cooling portion 9. The side surface 19d3 of the holding portion 19 on the arc tube 21 side can be curved. The radius of curvature of the side surface 19d3 can be the same as or slightly larger than the value of half the diameter of the arc tube 21. Alternatively, the side surface 19d3 may be an inclined surface obtained by approximating the radius of curvature instead of a curved surface. The holding portion 19 can have at least one mounting hole 19d2 penetrating in the thickness direction. The mounting hole 19d2 has a shape extending in the direction in which the holding portion 19 and the holding portion 29 face each other, so that the distance between the side surface 19d3 of the holding portion 19 and the side surface 29d3 of the holding portion 29 can be adjusted.

The holding portion 29 has a plate shape and has a surface 29d1 attached to the cooling portion 9. The side surface 29d3 of the holding portion 29 on the arc tube 21 side can be curved. The radius of curvature of the side surface 29d3 can be the same as or slightly larger than the value of half the diameter of the arc tube 21. Alternatively, the side surface 29d3 may be an inclined surface obtained by approximating the radius of curvature instead of a curved surface. The holding portion 29 can have at least one mounting hole 29d2 penetrating in the thickness direction. A convex portion 29d4 can be provided on the peripheral edge of the surface 29d1 opposite to the side surface 29d3. When the surface 29d1 is attached to the cooling portion 9, the convex portion 29d4 can be brought into contact with the side surface of the cooling portion 9. By doing so, the position of the holding portion 29 with respect to the cooling portion 9 can be determined. Then, by moving the holding portion 19 to the side of the holding portion 29, the barrier discharge lamp 2 can be sandwiched between the holding portion 19 and the holding portion 29. Therefore, the holding position of the barrier discharge lamp 2 can be set within a predetermined range, and the barrier discharge lamp 2 can be held more reliably.

The material of the holding portion 19 and the holding portion 29 can be, for example, a metal such as stainless steel or a resin such as a fluororesin.

At least one support portion 12 can be provided. In the ultraviolet irradiation device 1 illustrated in FIG. 2, two support portions 12 are provided side by side in the direction along the tube axis 21d. The support portion 12 can be provided at a position where the terminal cover 24 is provided in the direction along the pipe shaft 21d.

As shown in FIGS. 1 and 2, the support portion 12 may be provided with, for example, an arm 12a, a bracket 12b, a shaft 12c, and a holding portion 12d.
The arm 12a can have a shape extending in a direction intersecting the tube axis 21d of the arc tube 21. A shaft 12c can be provided on one end side of the arm 12a. The arm 12a can be rotatably provided around the shaft 12c. At the other end of the arm 12a, a member 12a1 for connecting to the holding portion 12d can be provided. The arm 12a is preferably made of a material having heat resistance and a low specific density. The arm 12a can be formed of, for example, a fluororesin.

The bracket 12b supports the shaft 12c. The bracket 12b can be provided, for example, on the side surface of the positioning portion 3. The bracket 12b may be provided on, for example, the frame 5.

The shaft 12c may be columnar, for example. One end side of the shaft 12c can be provided on the arm 12a and the other end side of the shaft 12c can be provided on the bracket 12b. In this case, one end side of the shaft 12c can be fixed to the arm 12a, and the other end side of the shaft 12c can be rotatably provided on the bracket 12b. Further, one end side of the shaft 12c can be rotatably provided on the arm 12a, and the other end side of the shaft 12c can be fixed to the bracket 12b.

The holding portion 12d detachably holds the end portion of the arm 12a on the side opposite to the side on which the shaft 12c is provided. The holding portion 12d can be, for example, a ball catch, a snap lock, a snap lock, or the like. The holding portion 12d can be provided, for example, on the side surface of the positioning portion 3 opposite to the side on which the bracket 12b is provided. The holding portion 12d may be provided on, for example, the frame 5.

As shown in FIG. 1, when the end portion of the arm 12a is held by the holding portion 12d, the arm 12a and the terminal cover 24 of the barrier discharge lamp 2 can be brought into contact with each other. Further, a slight gap may be provided between the arm 12a and the terminal cover 24 of the barrier discharge lamp 2. That is, when one end of the arm 12a is held by the holding portion 12d, the arm 12a is provided below the terminal cover 24.
By doing so, even if the barrier discharge lamp 2 falls off from the holding portion 9d, it is possible to prevent the barrier discharge lamp 2 from falling toward the object.

When removing the barrier discharge lamp 2, the holding portion 9d is removed while the end portion of the arm 12a is held by the holding portion 12d. After that, as shown in FIG. 1, the holding of the end portion of the arm 12a is released, and the arm 12a is rotated. By rotating the arm 12a, the arm 12a can be retracted from below the barrier discharge lamp 2, so that the barrier discharge lamp 2 can be easily removed.

When attaching the barrier discharge lamp 2, the barrier discharge lamp 2 is attached to the positioning unit 3 with the arm 12a retracted from below the barrier discharge lamp 2. After that, as shown in FIG. 1, the arm 12a is rotated to hold the end portion of the arm 12a by the holding portion 12d. Next, by attaching the holding portion 9d to the cooling portion 9 using a fastening member such as a screw, the holding portion 9d holds the barrier discharge lamp 2.
Holding the arm 12a by the holding portion 12d is easier than holding the barrier discharge lamp 2 by the holding portion 9d. Therefore, it is possible to suppress the fall of the barrier discharge lamp 2 and facilitate the installation work of the barrier discharge lamp 2.

The support portion 12 can be omitted. However, if the support portion 12 is provided, it is possible to prevent the barrier discharge lamp 2 from falling when the barrier discharge lamp 2 is attached or detached.

FIG. 7 is a schematic side view for exemplifying the ultraviolet irradiation device 1a according to another embodiment. As shown in FIG. 7, the ultraviolet irradiation device 1a includes a barrier discharge lamp 2, a positioning unit 3, a positioning unit 4, a frame 5, a lighting circuit 6, a gas supply unit 7, a controller 8, a cooling unit 9, and a support unit 12. And the temperature control unit 10 can be provided.

As described above, nitric acid may be generated in the gap 9a between the cooling unit 9 and the external electrode 26 depending on the conditions of the gap 9a. When nitric acid is generated, the optical characteristics of the arc tube 21 may be deteriorated, the external electrode 26 may be damaged, or the object to be irradiated with ultraviolet rays may be damaged. As described above, the gas supplied to the gap 9a may be a gas containing no oxygen or a gas having an oxygen concentration lower than that of air. However, in general, the barrier discharge lamp 2 is installed in the atmosphere. Therefore, it is conceivable that the air around the barrier discharge lamp 2 may enter the inside of the gap 9a. If air enters the inside of the gap 9a, the above-mentioned chemical reaction may occur and nitric acid may be generated.
Therefore, the ultraviolet irradiation device 1a is provided with a temperature control unit 10.

The temperature control unit 10 controls at least one of the temperature of the cooling unit 9 and the temperature of the gas supplied to the gap 9a. For example, the temperature control unit 10 can be a heater provided in at least one of the cooling unit 9 and the gas supply unit 7.

For example, the temperature control unit 10 may be a heater provided between the cooling unit 9 and the frame 5, a heater provided inside the cooling unit 9, or the like. In this case, the temperature sensor is provided in the cooling unit 9, and the controller 8 can control the temperature control unit 10 based on the signal from the temperature sensor.

Further, for example, the temperature control unit 10 can be a heater provided in the pipe 74 or the like. In this case, the temperature sensor is provided in the pipe 74 or the cooling unit 9, and the controller 8 can control the temperature control unit 10 based on the signal from the temperature sensor.

Here, the sublimation temperature of dinitrogen pentoxide is 32.4 ° C. Therefore, if the temperature of the gas in the gap 9a is set to 32.4 ° C. or higher, it is possible to suppress the dinitrogen pentoxide from becoming a solid. If the dinitrogen pentoxide is a gas, it becomes easy to discharge the dinitrogen pentoxide together with the gas supplied to the gap 9a by the gas supply unit 7.
Further, dinitrogen pentoxide is decomposed into nitrogen dioxide and oxygen when heated to about 45 ° C to 50 ° C. Therefore, if the temperature of the gas in the gap 9a is set to 45 ° C. or higher, the production of nitric acid can be suppressed.

In this case, if the temperature of the cooling unit 9 or the temperature of the cooling unit 9 and the frame 5 is 32.4 ° C. or higher, dinitrogen pentoxide is sublimated and easily discharged to the outside of the gap 9a. The generation can be suppressed.
If the temperature of the cooling unit 9 or the temperature of the cooling unit 9 and the frame 5 is increased, the sublimation of dinitrogen pentoxide can be promoted, so that the production of nitric acid can be further suppressed. According to the knowledge obtained by the present inventor, if the temperature of the cooling unit 9 or the temperature of the cooling unit 9 and the frame 5 is 35 ° C. or higher, the production of nitric acid can be further suppressed.

Further, as described above, dinitrogen pentoxide is decomposed into nitrogen dioxide and oxygen when heated to about 45 ° C to 50 ° C. Therefore, if the temperature of the cooling unit 9 or the temperature of the cooling unit 9 and the frame 5 is set to 45 ° C. or higher, the production of nitric acid can be effectively suppressed.
However, if the temperature of the cooling unit 9 or the temperature of the cooling unit 9 and the frame 5 is 45 ° C. or higher, the cooling of the arc tube 21 and the external electrode 26 may be suppressed.

According to the findings obtained by the present inventor, if the temperature of the cooling unit 9 or the temperature of the cooling unit 9 and the frame 5 is 35 ° C. or higher and 40 ° C. or lower, the cooling effect of the arc tube 21 and the external electrode 26 can be obtained. It can be maintained and the production of nitric acid can be suppressed.
That is, the temperature control unit 10 preferably sets the temperature of the cooling unit 9, or the temperature of the cooling unit 9 and the frame 5 to 32.4 ° C. or higher and 40 ° C. or lower, and 35 ° C. or higher and 40 ° C. or lower. Is even more preferable.

FIG. 8 is a schematic side view for exemplifying the ultraviolet irradiation device 1b according to another embodiment. As shown in FIG. 8, the ultraviolet irradiation device 1b includes a barrier discharge lamp 2, a positioning unit 3, a positioning unit 4, a frame 5, a lighting circuit 6, a gas supply unit 7, a controller 8, a cooling unit 9, and a cover 11. Can be provided. Further, the support portion 12 can be further provided as in the above-mentioned ultraviolet irradiation device 1. That is, the ultraviolet irradiation device 1b may be provided with a support portion 12 further provided on the ultraviolet irradiation device 1.
In addition, in order to avoid complication, the support portion 12 is omitted in FIG.

The cover 11 can have a window 11a and a mounting member 11b.
The window 11a has a plate shape and can be provided on the side of the barrier discharge lamp 2 opposite to the frame 5 side. That is, the window 11a can be provided between the barrier discharge lamp 2 and the object to be irradiated with ultraviolet rays. The window 11a can be formed from a material that transmits ultraviolet rays. The window 11a can be formed of, for example, quartz glass, a fluororesin that transmits ultraviolet rays, or the like. In particular, in the case of the barrier discharge lamp 2 in which xenon that emits ultraviolet rays of 172 nm is enclosed, the window 11a can use synthetic quartz glass that transmits ultraviolet rays of 172 nm.

One end of the mounting member 11b can be mounted on the side surface of the frame 5 by using, for example, a fastening member such as a screw. A window 11a can be attached to the other end of the attachment member 11b by using, for example, a fastening member such as a screw.

Here, when the object is irradiated with ultraviolet rays, the components of the object may evaporate. If the vaporized component of the object adheres to the arc tube 21, the illuminance of the ultraviolet rays emitted from the barrier discharge lamp 2 may decrease.

Since the cover 11 (window 11a) is provided in the ultraviolet irradiation device 1b, it is possible to suppress the components of the evaporated object from adhering to the arc tube 21. Further, the gas supplied to the gap 9a between the cooling unit 9 and the external electrode 26 will flow into the space between the barrier discharge lamp 2 and the window 11a. Therefore, it is possible to prevent the components of the evaporated object around the ultraviolet irradiation device 1b from invading the space between the barrier discharge lamp 2 and the window 11a. That is, the gas flowing out from the gap 9a can be reused as purge gas. For example, in the case of the barrier discharge lamp 2 in which xenon that emits ultraviolet rays of 172 nm is enclosed, the cooling gas is an inert gas, for example, in order to prevent the ultraviolet rays from being attenuated in the space from the arc tube 21 to the window 11a. , Nitrogen, Argon are suitable.
The components of the evaporated object adhere to the window 11a, but since the window 11a is a mere plate-like body, it can be easily removed, replaced, or washed.
Further, even if the above-mentioned nitric acid is generated and dropped from the barrier discharge lamp 2, the dropped nitric acid can be received by the cover 11 (window 11a). Therefore, it is possible to more reliably suppress nitric acid from adhering to the object. Further, by completely purging with the inert gas supplied to the space between the barrier discharge lamp 2 and the window 11a, it is possible to prevent the generation of nitric acid in principle.

With the ultraviolet irradiation device 1b according to the present embodiment, it is possible to suppress a decrease in the illuminance of the ultraviolet rays emitted from the barrier discharge lamp 2, and maintenance and the like can be facilitated.
Further, even if the distance between the barrier discharge lamp 2 and the object is reduced, it is possible to suppress the components of the evaporated object from adhering to the arc tube 21. Therefore, the illuminance of the ultraviolet rays irradiating the object can be increased.

FIG. 9 is a schematic side view for exemplifying the ultraviolet irradiation device 1c according to another embodiment.
As shown in FIG. 9, the ultraviolet irradiation device 1c may be provided with a barrier discharge lamp 2, a positioning unit 3, a positioning unit 4, a frame 5, and a support unit 112. Further, similarly to the ultraviolet irradiation device 1 illustrated in FIG. 1, a lighting circuit 6, a gas supply unit 7, a controller 8, and a cooling unit 9 can be provided.
The ultraviolet irradiation device 1c may be provided with a support portion 112 in place of the support portion 12 provided in the ultraviolet irradiation device 1.

The support portion 12 described above is provided with an arm 12a that supports the three barrier discharge lamps 2 together. On the other hand, the support portion 112 is provided with an arm 112a that supports one barrier discharge lamp 2. The holding portion 12d detachably holds the end portion of the arm 112a on the side opposite to the side on which the shaft 12c is provided.
By doing so, for example, when one barrier discharge lamp 2 is attached or detached, the other barrier discharge lamp 2 can be held. Therefore, maintenance work and assembly work become easy. Further, since the length of the arm 112a can be shortened, the space required for releasing the arm 112a can be reduced. Further, the distance between the ultraviolet irradiation device 1c and the object to be irradiated with ultraviolet rays can be shortened.

Although some embodiments of the present invention have been exemplified above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, changes, and the like can be made without departing from the gist of the invention. These embodiments and variations thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof. In addition, each of the above-described embodiments can be implemented in combination with each other.

1 UV irradiation device, 1a UV irradiation device, 1b UV irradiation device, 1c UV irradiation device, 2 barrier discharge lamp, 3 positioning unit, 3a flat surface, 4 positioning unit, 5 frame, 6 lighting circuit, 7 gas supply unit, 8 Controller, 9 cooling part, 9a gap, 9b surface, 9c hole, 9c3 discharge hole, 9d holding part, 10 temperature control part, 11 cover, 11a window, 12 support part, 12a arm, 12d holding part, 19 holding part, 21 Arc tube, 21d tube shaft, 22 internal electrode, 24 terminal cover, 24a flat surface, 26 external electrode, 26a mounting part, 29 holding part

Claims (3)

With an arc tube that has a cylindrical shape and is filled with a rare gas in the internal space;
With an internal electrode having a coil provided in the internal space;
With an external electrode provided on the outside of the arc tube;
With a cooling unit provided on the outside of the external electrode via a gap;
With a terminal cover provided at the end of the arc tube and having a first flat surface on the side surface;
With a positioning part having a hole in which the terminal cover is provided;
Equipped with
An ultraviolet irradiation device provided with a second flat surface that can come into contact with the first flat surface of the terminal cover on the inner wall surface of the hole. The first flat surfaces are provided in pairs so as to be parallel to each other.
The ultraviolet irradiation device according to claim 1, wherein the second flat surface is provided in pairs so as to be parallel to each other. A support portion having a rotatable arm and a holding portion for detachably holding one end of the arm is further provided.
The ultraviolet irradiation device according to claim 1 or 2, wherein when one end of the arm is held by the holding portion, the arm is provided below the terminal cover.

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