JP2021177510A - Sample holding tool - Google Patents

Abstract

To improve the soaking property of a sample holding surface.SOLUTION: A sample holding tool 10 comprises: a ceramic substrate 1; a heat generating element 2 that is located in the ceramic substrate 1; a metal plate 3 that is opposite to the ceramic substrate 1 and located below the ceramic substrate 1 and has a through hole 31; a first fixing member 51 that fixes the ceramic substrate 1 and the metal plate 3; and a cylindrical member 4 that is located on an under surface of the metal plate 3 and connected with the through hole 31. The cylindrical member 4 has a first area 41 that extends downward from the through hole 31, a second area 42 that overlaps the through hole 31 when seen from the vertical direction of the sample holding surface 11, and a third area 43 that extends downward from the second area 42.SELECTED DRAWING: Figure 1

Description

The present disclosure is used for forming a resist film by forming a semiconductor thin film on a wafer such as a semiconductor wafer, a liquid crystal substrate, or a circuit board, or by drying and baking a resist liquid applied on the wafer. It relates to a sample holder such as a wafer heating device.

As a sample holder, for example, the semiconductor wafer heating device described in Patent Document 1 is known. The semiconductor wafer heating device disclosed in Patent Document 1 includes a heat generating resistor, a ceramic member, and a reflector. The ceramic member has a wafer heating surface.

In such a semiconductor wafer heating device, the heat generating resistor generates heat. This heat is transferred to the ceramic member, and the wafer heating surface can be heated. Further, a part of the heat generated by the heat generating resistor is not transferred to the wafer heating surface and is released to the outside as radiant heat from the ceramic member. The reflector can reflect a part of this radiant heat. As a result, a part of the heat transmitted to the outside by the reflector can be returned to the ceramic member. As a result, the wafer heating surface can be efficiently heated.

JP-A-6-53145

In such a semiconductor wafer heating device, it is necessary to repeat the step of heating the semiconductor wafer. When the semiconductor wafer heating device is repeatedly used, the wafer heating surface needs to be returned to room temperature before heating in order to keep the temperature of the wafer heating surface after heating constant. As a method for returning the wafer heating surface to room temperature, it has been known that a ceramic member is cooled to room temperature by providing a through hole in a reflector and allowing a cooling gas to flow through the through hole.

However, the radiant heat from the heat generation resistor could not be reflected at the portion of the reflector where the through hole was provided. As a result, it is difficult to raise the temperature of the wafer heating surface in the region of the wafer heating surface located above the through hole as compared with the region of the wafer heating surface not located above the through hole. As a result, it was difficult to improve the heat soaking property of the wafer heating surface.

The sample holder of the present disclosure includes a ceramic substrate, a heat generating element located on the ceramic substrate, a metal plate located below the ceramic substrate facing the ceramic substrate and having a through hole, and the ceramic substrate. A first fixing member for fixing the metal plate and a tubular member located on the lower surface of the metal plate and connected to the through hole are provided, and the tubular member extends downward from the through hole. It is characterized by having one region, a second region that overlaps the through hole when viewed from the vertical direction of the sample holding surface, and a third region that extends downward from the second region.

According to one embodiment of the sample holder of the present disclosure, the tubular member has a first region extending downward from the through hole, a second region overlapping the through hole when viewed from the vertical direction of the sample holding surface, and a lower portion from the second region. It has a third region that extends to. Since the tubular member has a second region that overlaps with the through hole, the radiant heat generated by the heat generating element that is not reflected by the metal plate and is incident on the through hole is transferred to the second region of the tubular member. Can be reflected. As a result, the temperature can be raised even in the region of the sample holding surface located above the through hole. As a result, the heat equalizing property of the sample holding surface can be improved.

It is sectional drawing which shows an example of the sample holder. It is an enlarged cross-sectional view which shows the vicinity of the cylindrical member of another example of a sample holder. It is an enlarged cross-sectional view which shows the vicinity of the cylindrical member of another example of a sample holder. It is a top view which shows the vicinity of the cylindrical member of another example of a sample holder. It is an enlarged cross-sectional view which shows the vicinity of the cylindrical member of another example of a sample holder. It is an enlarged cross-sectional view which shows the vicinity of the cylindrical member of another example of a sample holder. It is a top view which shows the vicinity of the cylindrical member of another example of a sample holder.

The sample holder 10 will be described in detail.

FIG. 1 is a cross-sectional view showing an example of the sample holder 10. As shown in FIG. 1, the sample holder 10 includes a ceramic substrate 1 having a heat generating element 2, a metal plate 3 located on the lower surface of the ceramic substrate 1 facing the ceramic substrate 1 and having a through hole 31, and a ceramic. It includes a first fixing member 51 for fixing the substrate 1 and the metal plate 3, and a tubular member 4 located on the lower surface of the metal plate 3 and connected to the through hole 31.

The ceramic substrate 1 is a member for holding a sample. The shape of the ceramic substrate 1 is, for example, a disk having a circular main surface. One of the main surfaces of the ceramic substrate 1 is the sample holding surface 11. The sample holder 10 is made of, for example, a ceramic material such as aluminum nitride or alumina.

The ceramic substrate 1 can be obtained, for example, by laminating a plurality of green sheets and firing them in a nitrogen atmosphere. If necessary, an electrostatic adsorption electrode may be provided inside the ceramic substrate 1. For example, when the shape of the ceramic substrate 1 is a disk shape, the diameter of the main surface can be about 200 to 400 mm and the thickness can be about 1 to 7 mm.

The heat generating element 2 is a member that generates heat when an electric current flows. The heat generating element 2 is provided to heat the sample held on the sample holding surface 11. The heat generating element 2 is provided inside or on the lower surface of the ceramic substrate 1. The heat generating element 2 has a linear pattern having a plurality of folded portions. As a result, the heat generating element 2 can uniformly heat the sample holding surface 11.

The heat generating element 2 has, for example, a metal material. Examples of the metal material used as the heat generating element 2 include gold, silver, palladium, platinum and the like. The heat generating element 2 may contain a glass component such as an oxide such as silicon dioxide. The dimensions of the heat generating element 2 can be, for example, a width of 1 to 10 mm, a thickness of 0.01 to 0.1 mm, and a length of 300 to 5000 mm.

The metal plate 3 is a member for reflecting the radiant heat of the heat generating element 2. The metal plate 3 is, for example, a disk-shaped or square plate-shaped member. The metal plate 3 has an upper surface and a lower surface. The metal plate 3 is
It is located below the ceramic substrate 1 and away from the ceramic substrate 1. Further, the metal plate 3 is provided so that the upper surface faces the lower surface of the ceramic substrate 1. The metal plate 3 may be provided, for example, in parallel with the ceramic substrate 1. The metal plate 3 has a member such as stainless steel, aluminum, or iron. The dimensions of the metal plate 3 can be, for example, when the metal plate 3 has a disk shape, the diameter can be 200 to 400 mm and the thickness can be 1 to 3 mm. The distance between the lower surface of the metal plate 3 and the lower surface of the ceramic substrate 1 can be, for example, 1 to 10 mm. By having the metal plate 3, it is possible to reflect the radiant heat to the outside of the ceramic substrate 1. Therefore, the possibility that heat escapes to the outside of the ceramic substrate 1 can be reduced, and the sample holding surface 11 can be efficiently heated.

The metal plate 3 has a through hole 31 penetrating from the upper surface to the lower surface. When viewed from the vertical direction of the sample holding surface 11, the shape of the through hole 31 may be, for example, a circular shape, a triangular shape, or a square shape. Further, the number of through holes 31 may be plural. When the shape of the through hole 31 is circular, the dimensions can be, for example, 10 to 100 mm in diameter. Further, when there are a plurality of through holes 31, the dimensions can be, for example, 10 to 100 mm in diameter. By providing the through hole 31, the gas for cooling can pass through the through hole 31. As a result, the cooling gas can cool the ceramic substrate 1.

As shown in FIG. 1, when the cross section including the metal plate 3 is viewed perpendicular to the sample holding surface 11, the line passing through the inner wall surface of the through hole 31 extends in a straight line, but the present invention is not limited to this. Specifically, when the cross section including the metal plate 3 is viewed perpendicular to the sample holding surface 11, the line passing through the inner wall surface of the through hole 31 may have a curved line. As shown in FIG. 1, when the cross section including the metal plate 3 is viewed perpendicular to the sample holding surface 11, the line passing through the outer wall surface of the through hole 31 extends in a straight line, but is not limited to this. Specifically, when the cross section including the metal plate 3 is viewed perpendicular to the sample holding surface 11, the line passing through the outer wall surface of the through hole 31 may have a curved line. Here, the inner wall surface means the wall surface on the center side of the metal plate 3 among the wall surfaces of the through hole 31 when the cross section including the metal plate 3 is viewed perpendicular to the sample holding surface 11. The wall surface means the outer wall surface of the metal plate 3 among the wall surfaces of the through hole 31 when the cross section including the metal plate 3 is viewed perpendicular to the sample holding surface 11.

The first fixing member 51 is a member for fixing the ceramic substrate 1 and the metal plate 3. The first fixing member 51 is, for example, a rod-shaped member. A plurality of first fixing members 51 are provided, for example, between the ceramic substrate 1 and the metal plate 3. The first fixing member 51 is provided, for example, perpendicular to the upper surface of the metal plate 3. One end of the first fixing member 51 is fixed to the ceramic substrate 1. The other end of the first fixing member 51 is fixed to the metal plate 3.

For fixing the first fixing member 51 and the ceramic substrate 1, for example, a joining material can be used. Examples of the material used as the bonding material include silver wax and silver copper wax. The first fixing member 51 may be fixed to the ceramic substrate 1 with screws. For fixing the first fixing member 51 and the metal plate 3, for example, a joining material can be used. Examples of the material used as the bonding material include silver wax and silver copper wax.

The first fixing member 51 has, for example, a metal material. Examples of the metal material used as the first fixing member 51 include stainless steel, aluminum, iron and the like. The dimensions of the first fixing member 51 can be, for example, a diameter of 1 to 10 mm and a length of 1 to 50 mm. By providing the first fixing member 51, the ceramic substrate 1 and the metal plate 3 can be fixed.

The tubular member 4 is a member for passing a cooling gas inside. The tubular member 4 is a cylindrical member, and the inside has a flow path for passing a gas for cooling. The tubular member 4 is provided on the lower surface of the metal plate 3. Examples of the gas for cooling include outside air.

The tubular member 4 has a first region 41 extending downward from the through hole 31, a second region 42 overlapping the through hole 31 when viewed from the vertical direction of the sample holding surface 11, and a third region extending downward from the second region 42. It has 43. Specifically, both the first region 41 and the third region 43 are cylindrical. The first region 41 has a larger inner diameter than the third region 43. The second region 42 is annular and connects the lower end of the first region 41 and the upper end of the third region 43. The outer circumference of the second region 42 and the lower end of the first region 41 are continuous, and the inner circumference of the second region 42 and the upper end of the third region 43 are continuous.

Further, as shown in FIG. 1, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the first tubular member 4 is viewed. The line passing through the inner peripheral surface of the region 41 extends linearly, but is not limited to this. Specifically, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the first region 41 of the cylindrical member 4 The line passing through the inner peripheral surface may have a curved line.

Further, as shown in FIG. 1, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the second portion of the cylindrical member 4 is viewed. The line passing through the upper surface of the region 42 extends linearly, but is not limited to this. Specifically, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the upper surface of the second region 42 of the cylindrical member 4 is viewed. The line passing through may have a curved line.

Further, as shown in FIG. 1, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the third tubular member 4 is viewed. The line passing through the inner peripheral surface of the region 43 extends linearly, but is not limited to this. Specifically, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the inside of the third region 43 of the cylindrical member 4 The line passing through the peripheral surface may have a curved line.

The tubular member 4 is connected to the through hole 31. The term "connected to the through hole 31" as used herein means that the gas for cooling is spatially continuous to the extent that the gas flows. Specifically, the end surface of the tubular member 4 may be in contact with the periphery of the through hole 31 on the lower surface of the metal plate 3. Further, the tubular member 4 may be fitted inside the through hole 31 of the metal plate 3. Further, the tubular member 4 may be located with a gap below the through hole 31 of the metal plate 3 so that the cooling gas does not escape to other than the tubular member 4. Further, for fixing the tubular member 4 and the metal plate 3, for example, a joining material can be used. Examples of the material used as the bonding material include silver wax and silver copper wax. The material of the tubular member 4 can be, for example, stainless steel, aluminum, iron, or the like. The materials of the first region 41, the second region 42, or the third region 43 of the tubular member 4 may all be the same. Further, the first region 41, the second region 42, or the third region 43 of the cylindrical member 4 may all have different materials.

In this example, the inner diameter of the first region 41 can be 30 to 65 mm, the outer diameter can be 30 to 70 mm, and the length can be 1 to 10 mm. The inner diameter of the second region 42 can be 20 to 60 mm, the outer diameter can be 30 to 65 mm, and the length can be 0.5 to 3 mm. The inner diameter of the third region 43 can be 20 to 60, the outer diameter can be 20 to 60 mm, and the length can be 10 to 50 mm.

Since the tubular member 4 has a second region 42 that overlaps with the through hole 31, the radiant heat generated by the heat generating element 2 that is not reflected by the metal plate 3 and is incident on the through hole 31 is cylindrical. It can be reflected in the second region 42 of the member 4. As a result, the temperature can be raised even in the region of the sample holding surface 11 located above the through hole 31. As a result, the heat equalizing property of the sample holding surface 11 can be improved.

Further, as shown in FIG. 1, the outer diameter of the second region 42 of the tubular member 4 may be larger than the diameter of the through hole 31. Further, when viewed from the vertical direction of the sample holding surface 11, the through hole 31 may be entirely located inside the first region 41. Specifically, when looking at the cross section including the metal plate 3, the first region 41, the second region 42, and the third region 43 of the tubular member 4 perpendicular to the sample holding surface 11, the outer wall surface of the through hole 31 is seen. It indicates that the passing line is located inside the first region 41 of the tubular member 4. As a result, it is possible to reduce the possibility that the radiant heat that is not reflected by the metal plate 3 and is incident on the through hole 31 is not reflected by the tubular member 4 and is released to the outside of the member. As a result, the heat equalizing property of the sample holding surface 11 can be improved.

Further, as shown in FIG. 1, the inner peripheral surface of the first region 41 of the cylindrical member 4 may be outside the outer wall surface of the through hole 31. When the heat generated by the heat generating element 2 is transferred to the metal plate 3, the metal plate 3 may thermally expand. At this time, the positional relationship between the through hole 31 and the periphery of the through hole 31 and the tubular member 4 may be displaced. Since the inner peripheral surface of the first region 41 is outside the outer wall surface of the through hole 31, even if a slight positional relationship shift occurs in the metal plate 3 and the tubular member 4, the through hole 31 is downward. The second region 42 can continue to be positioned. As a result, the reflection of radiant heat by the second region 42 can be satisfactorily performed.

Further, when viewed from the vertical direction of the sample holding surface 11, the through hole 31 may entirely overlap the second region 42. As a result, the radiant heat that has passed through the through hole 31 can be reflected in the second region 42 as compared with the case where the through hole 31 and the second region 42 partially overlap each other. As a result, the heat equalizing property of the sample holding surface 11 can be further improved.

Further, as shown in FIG. 2, a gap may be provided between the first region 41 and the second region 42 of the cylindrical member 4. As a result, when radiant heat is incident on the first region 41 and the second region 42 of the cylindrical member 4, the first region 41 and the second region 42 of the cylindrical member 4 are distorted due to the influence of thermal expansion. The risk of occurrence can be reduced.

Further, as shown in FIG. 3, the tubular member 4 may include a flange portion 44 that comes into contact with the metal plate 3. The flange portion 44 is a member for increasing the joint area between the metal plate 3 and the tubular member 4. The flange portion 44 is located between the metal plate 3 and the upper end of the first region 41 of the tubular member 4.

The collar portion 44 may be annular when viewed from the vertical direction of the sample holding surface 11, but is not limited to this. Specifically, when viewed from the vertical direction of the sample holding surface 11, the outer peripheral surface of the flange portion 44 may have a polygonal shape such as an elliptical shape, a triangular shape, or a quadrangular shape. If the collar portion 44 is annular when viewed from the vertical direction of the sample holding surface 11, the collar portion 44 can have a constant width. Further, the width of the annular flange portion 44 may be smaller than the width of the second region 42 of the tubular member 4.

The collar portion 44 has a cross section perpendicular to the sample holding surface 11 and includes the first region 41, the second region 42, and the third region 43 of the cylindrical member 4, with respect to the first region 41 of the cylindrical member 4. Can extend vertically, but is not limited to this. Specifically, when the cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 is viewed perpendicular to the sample holding surface 11, the flange portion 44 is in the direction away from the metal plate 3. It may be stretched. Specifically, when the cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 is viewed perpendicular to the sample holding surface 11, the collar portion 44 approaches the metal plate 3. It may extend in the direction. Specifically, when the cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 is viewed perpendicular to the sample holding surface 11, the collar portion 44 has a curved line. It may be stretched.

The first region 41, the second region 42, and the third region 43 of the cylindrical member 4 perpendicular to the sample holding surface 11
The upper surface of the flange portion 44 extending in the direction perpendicular to the first region 41 of the tubular member 4 may be in contact with the lower surface of the metal plate 3 when the cross section including the above is viewed. Further, in the example shown in FIG. 3, the upper surface of the collar portion 44 is a flat surface, but may have an uneven shape. As a result, a gap may be provided between the upper surface of the flange portion 44 and the contact portion between the metal plate 3 and the metal plate 3.

Further, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the tubular member 4 extends in the direction perpendicular to the first region 41. The lower surface of the flange portion 44 may be in contact with the upper end of the first region 41 of the tubular member 4. In the example shown in FIG. 3, the lower surface of the collar portion 44 is a flat surface, but may have an uneven shape. As a result, a gap may be provided between the lower surface of the flange portion 44 and the contact point between the upper end of the first region 41 of the tubular member 4.

In the example shown in FIG. 3, the thickness of the collar portion 44 is the same as the thickness of the second region 42 of the tubular member 4, but may be different. Specifically, the thickness of the flange portion 44 may be thicker than that of the second region 42 of the tubular member 4. Further, the thickness of the flange portion 44 may be thinner than that of the second region 42 of the tubular member 4.

Further, the flange portion 44 may block the flow path through which the cooling gas passes. “Closing the flow path” means that the flange portion 44 narrows the flow path through which the gas passes in the vertical direction of the sample holding surface 11 in order to allow the gas flowing from the vertical direction of the flow path of the tubular member 4 to pass through. Means to do. Specifically, the flange portion 44 may have a flat plate 441 that passes through the center of the flow path through which the gas passes when viewed from the vertical direction of the sample holding surface 11. In the example shown in FIG. 4, the width of the flat plate 441 is larger than the width of the annular flange portion 44 when viewed from the vertical direction of the sample holding surface 11, but the width is not limited to this. Specifically, the width of the flange portion 44 of the flat plate 441 may be smaller than the width of the annular flange portion 44 when viewed from the vertical direction of the sample holding surface 11.

Examples of the material of the collar portion 44 include stainless steel, aluminum, and iron. The dimensions of the collar 44 are, for example, a width of 1 to 10 mm, a thickness of 0.5 to 3 mm, and an inner diameter length when the flange portion 44 is annular when viewed from a direction perpendicular to the sample holding surface 11. Can be 30 to 70 mm, and the length of the outer diameter can be 30 to 75 mm. Since the tubular member 4 includes the flange portion 44, the contact area between the metal plate 3 and the tubular member 4 can be increased. As a result, the joint strength between the metal plate 3 and the tubular member 4 can be increased, and the tubular member 4 can be fixed so as not to move.

Further, the surface roughness of the surface of the flange portion 44 of the tubular member 4 in contact with the metal plate 3 may be rougher than the surface roughness of the upper surface of the second region 42 of the tubular member 4. The metal plate 3 generates heat when it reflects radiant heat. Since the surface of the flange portion 44 of the tubular member 4 in contact with the metal plate 3 is rough, a gap can be provided between the flange portion 44 of the tubular member 4 and the metal plate 3. As a result, the heat transferred from the metal plate 3 to the flange portion 44 of the tubular member 4 can be reduced. As a result, the heat equalizing property of the sample holding surface 11 can be improved.

Further, since the upper surface of the second region 42 of the tubular member 4 is flat and faces the metal plate 3, the heat reflected by the upper surface of the second region 42 of the tubular member 4 is directed toward the metal plate 3. Can be irradiated. As a result, the heat equalizing property of the sample holding surface 11 can be improved.

Further, as shown in FIG. 5, the second region 42 of the tubular member 4 and the metal plate 3 may be fixed by the second fixing member 52. The second fixing member 52 is provided, for example, for fixing the metal plate 3 and the second region 42 of the tubular member 4.

The second fixing member 52 is perpendicular to the sample holding surface 11, the metal plate 3, the first region 41 of the tubular member 4, and the like.
When the cross section including the second region 42 and the third region 43 is viewed, it is located between the metal plate 3 and the second region 42 of the tubular member 4.

The second fixing member 52 may be, for example, a rod-shaped member. Further, the other shape may be a polygonal shape such as an elliptical shape, a triangular shape or a quadrangular shape.

The rod-shaped second fixing member 52 is the second of the cylindrical member 4 when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11. It extends in a direction perpendicular to the upper surface of the region 42, but is not limited to this. Specifically, the rod-shaped second fixing member 52 has a cylindrical shape when viewed in a cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 perpendicular to the sample holding surface 11. It may extend in a direction approaching the first region 41 of the member 4. Specifically, when the rod-shaped second fixing member 52 is perpendicular to the sample holding surface 11 and the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed, It may extend in a direction away from the first region 41 of the tubular member 4. Specifically, when the rod-shaped second fixing member 52 is perpendicular to the sample holding surface 11 and the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed, It may have a curved line and extend.

As a method of fixing the second fixing member 52 and the metal plate 3, for example, a screw may be used. Further, a nut may be used when fixing the second fixing member 52 and the metal plate 3 with screws. Moreover, as another fixing method, a bonding material may be used. Examples of the material used as the bonding material include silver wax and silver copper wax.

As a method of fixing the second fixing member 52 and the second region 42 of the tubular member 4, for example, a screw may be used. Further, a nut may be used when fixing the second fixing member 52 and the metal plate 3 with screws. Moreover, as another fixing method, a bonding material may be used. Examples of the material used as the bonding material include silver wax and silver copper wax.

Further, the second fixing member 52 penetrates the metal plate 3 when the cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 is viewed perpendicular to the sample holding surface 11. You may. Specifically, the second fixing member 52 may pass through the metal plate 3 and the upper end of the second fixing member 52 may be higher than the lower surface of the metal plate 3.

Further, when the cross section of the tubular member 4 including the first region 41, the second region 42, and the third region 43 is viewed perpendicular to the sample holding surface 11, the second fixing member 52 is the second of the cylindrical member 4. It may penetrate the region 42. Specifically, the second fixing member 52 may pass through the second region 42 of the tubular member 4, and the lower end of the second fixing member 52 may be lower than the lower surface of the second region 42 of the cylindrical member 4. ..

Further, the second fixing member 52 may be fixed to the second region 42 of the cylindrical member 4 at a plurality of locations, for example.

Examples of the metal material used as the second fixing member 52 include stainless steel, aluminum, iron and the like. When the second fixing member 52 has a round bar shape, for example, the diameter can be 1 to 4 mm and the length can be 1 to 10 mm. Since the second region 42 of the tubular member 4 and the metal plate 3 are fixed by the second fixing member 52, the contact area between the tubular member 4 and the metal plate 3 can be increased. As a result, when radiant heat is incident on the tubular member 4, the possibility that the tubular member 4 and the metal plate 3 are distorted and come off due to the influence of thermal expansion can be reduced.

Further, as shown in FIG. 6, when the cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 is viewed perpendicular to the sample holding surface 11, the first tubular member 4 is viewed. The angle formed by the line passing through the inner peripheral surface of the region 41 and the line passing through the upper surface of the second region 42 may be larger than a right angle.

Further, in the present embodiment, the tubular member 4 is viewed from a cross section including the first region 41, the second region 42, and the third region 43 of the cylindrical member 4 through the sample holding surface 11 in the vertical direction. The angle formed by the line passing through the inner peripheral surface of the first region 41 and the line passing through the upper surface of the second region 42 is constant along the first region 41 and the second region 42 of the cylindrical member 4. , Not limited to this. Specifically, when viewed from a cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 in one tubular member 4, the first region 41 of the tubular member 4 The angle formed by the line passing through the inner peripheral surface and the line passing through the upper surface of the second region 42 is a right angle, and the first region 41, the second region 42, and the third region 43 of the cylindrical member 4. When viewed from the cross section including, there is a place where the angle formed by the line passing through the inner peripheral surface of the first region 41 of the tubular member 4 and the line passing through the upper surface of the second region 42 is larger than the right angle. You may.

When viewed from a cross section including the first region 41, the second region 42, and the third region 43 of the tubular member 4 through the sample holding surface 11 in the vertical direction, the inner peripheral surface of the first region 41 of the cylindrical member 4 Since the angle formed by the line passing through the line passing through and the upper surface of the second region 42 is larger than the right angle, the heat generated from the heat generating element 2 is transferred to the inner peripheral surface of the first region 41 of the tubular member 4 and the inner peripheral surface of the first region 41. The second region 42 can be reflected in the three directions of the metal plate. Further, the heat generated from the heat generating element 2 can be reflected in the direction of the metal plate 3 by one reflection. Thereby, the heat equalizing property of the sample holding surface 11 can be improved.

Further, the third region 43 of the tubular member 4 may have a region for reflecting radiant heat. Specifically, this region may narrow the flow path through which the gas passes in the direction perpendicular to the sample holding surface 11. As a result, the radiant heat that has passed through the third region 43 of the tubular member 4 can be reflected, and the heat equalizing property can be improved.

Further, the flange portion 44 may extend inward from the first region 41 of the tubular member 4 when viewed from a direction perpendicular to the sample holding surface 11 of the first region 41 of the tubular member. As a result, the joint strength between the metal plate 3 and the tubular member 4 can be increased, and the tubular member 4 can be fixed so as not to move.

Further, as shown in FIG. 7, the plurality of through holes 31 may be located so as to expand in the circumferential direction. For example, 4 to 8 fan-shaped through holes 31 may be located point-symmetrically. Further, the through hole 31 may not be provided in the central portion of the metal plate 3 surrounded by the plurality of through holes 31. As a result, the radiant heat that has passed through the through hole 31 can be reflected in the portion of the second region 42 that overlaps the through hole 31, and the radiant heat can be reflected even in the central portion surrounded by the plurality of through holes 31. .. As a result, the heat soaking property can be further improved. At this time, the central portion of the metal plate 3 may be a portion that overlaps with the third region 43 when viewed from the vertical direction of the sample holding surface 11.

Although FIG. 7 is a plan view, prioritizing ease of understanding, it is shown by a alternate long and short dash line through the cylindrical member 4.

1: Ceramic substrate 2: Heat generating element 3: Metal plate 31: Through hole 4: Cylindrical member 41: First region 42: Second region 43: Third region 44: Brim portion 441: Flat plate 51: First fixing member 52 : Second fixing member 10: Sample holder 11: Sample holding surface

Claims (8)

The ceramic substrate, the heat generating element located on the ceramic substrate, the metal plate located below the ceramic substrate facing the ceramic substrate and having a through hole, and the ceramic substrate and the metal plate are fixed to each other. 1 It is provided with a fixing member and a tubular member located on the lower surface of the metal plate and connected to the through hole.
The tubular member has a first region extending downward from the through hole, a second region overlapping the through hole when viewed from the vertical direction of the sample holding surface, and a third region extending downward from the second region. A sample holder characterized by. The sample holder according to claim 1, wherein the through hole is entirely located inside the first region when viewed from the vertical direction of the sample holding surface. The sample holder according to claim 1 or 2, wherein the through hole is entirely overlapped with the second region when viewed from the vertical direction of the sample holding surface. The sample holder according to any one of claims 1 to 3, wherein a gap is provided between the first region and the second region of the tubular member. The sample holder according to any one of claims 1 to 4, wherein the tubular member includes a collar portion that comes into contact with the metal plate. The fifth aspect of the present invention is characterized in that the surface roughness of the surface of the flange portion of the tubular member that is in contact with the metal plate is coarser than the surface roughness of the upper surface of the second region of the tubular member. The sample holder described. The sample holder according to any one of claims 1 to 6, further comprising a second fixing member for fixing the second region of the tubular member and the metal plate. When viewed from a cross section including the first region, the second region, and the third region of the tubular member through the sample holding surface in the vertical direction, the inner peripheral surface of the first region of the tubular member is viewed. The sample holder according to any one of claims 1 to 7, wherein the angle formed by the line passing through and the line passing through the upper surface of the second region is larger than a right angle.

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