JP2021173616A - Surface inspection device and control method for the same - Google Patents

Abstract

To eliminate the luminance unevenness of imaged images used for inspecting the surface to be inspected and improve the accuracy of surface inspection.SOLUTION: A computer for controlling a liquid crystal illumination device 10 (surface emission light source) and an imaging unit 2 has a function as luminance adjustment means for weighting luminance relative to the illumination irradiated from the liquid crystal illumination device 10. The computer as the luminance adjustment means controls the liquid crystal illumination device 10 and irradiates a reflection member 20 arranged on the surface of an inspection object 4 with reference illumination the pattern of which is hidden, as well as controls the imaging unit 2 so as to image an image reflected from the reflection member 20 and weights luminance relative to the illumination irradiated from the liquid crystal illumination device 10 so that the luminance of the image is equalized.SELECTED DRAWING: Figure 3

Description

The present invention relates to a surface inspection device for inspecting the surface of an inspection target for the presence or absence of defects, and in particular, irradiates the surface of the inspection target with pattern illumination in which bright regions and dark regions having different brightness are alternately arranged. , Related to a surface inspection device for inspecting whether or not there are defects such as irregularities and scratches on the surface of the inspection target by imaging the surface of the inspection target and using the surface image of the inspection target obtained thereby. ..

Conventionally, this type of surface inspection device is widely known (see, for example, Patent Document 1).
This type of surface inspection device irradiates the surface of the inspection target while shifting the light and dark illumination patterns, and uses a plurality of images obtained by imaging the surface of the inspection target to determine the difference in the amount of reflected light and the brightness. Based on the change, the surface to be inspected is inspected for defects (see, for example, Non-Patent Documents 1 and 2 for the inspection principle).

Here, as a lighting fixture for irradiating the inspection target with pattern illumination, a surface emitting light source capable of displaying an image of an illumination pattern such as a liquid crystal display is suitable. Since this type of surface emitting light source can display an arbitrary light and dark illumination pattern on the surface emitting portion and continuously shift the illumination pattern at an arbitrary speed in an arbitrary direction, various inspection conditions can be obtained. Can be flexibly dealt with.

By the way, according to the experiments of the present inventors, this kind of surface emitting light source is set to uniform brightness (a state in which a light-dark pattern is not displayed) to illuminate the surface of the inspection target, and the inspection target is illuminated by an imaging device such as a camera. When the surface was imaged, it was confirmed that the obtained image frequently had uneven brightness. In particular, it was found that there was a remarkable difference in brightness between the center and the periphery of the surface image.
Since the surface inspection device using the light / dark illumination pattern detects defects on the surface of the inspection target based on the change in brightness, the brightness unevenness occurs from the beginning of the surface image in the state where the light / dark pattern is not displayed. In this case, there is a possibility that the inspection accuracy may differ depending on the position of the image.

Utility Model Registration No. 31977666

Osamu Hirose, 3 outsiders, "Detection of film surface unevenness defects using pattern illumination", Journal of Precision Engineering, VOL.66, No.7, 2000, P1098-1102 Nobu Narusawa, 1 outside, "Development of defect detection technology using moving pattern light source", Journal of Precision Engineering, VOL.67, No.11, 2001, P1839-1843

The present invention has been made in view of the above circumstances, and is used in a surface inspection apparatus for inspecting whether or not a surface of an inspection target has a defect based on an image obtained by imaging the surface of the inspection target. The purpose is to eliminate the uneven brightness of the captured surface image so that the inspection accuracy does not differ depending on the position of the image.

In order to achieve the above object, the surface inspection apparatus according to the present invention includes a lighting unit that illuminates the surface of the inspection target, an imaging unit that images the surface of the inspection target to obtain a surface image of the inspection target, and illumination thereof. A surface inspection device that includes a unit and a control unit that controls an imaging unit, and inspects whether or not there is a defect on the surface of the inspection target based on the surface image of the inspection target obtained by the imaging unit. The unit is composed of a surface emitting light source, and the control unit is characterized by including a luminance adjusting means for weighting the brightness of the illumination emitted from the surface emitting light source.
By weighting the brightness of the illumination emitted from the surface emitting light source, it is possible to make the reference brightness uniform in the captured surface image.

Here, the brightness adjusting means controls the surface light source to irradiate the surface of the inspection target with a preset reference illumination (for example, an LCD in which the entire screen is displayed in white) and controls the imaging unit. Then, the surface image of the inspection target can be imaged, and the brightness of the illumination emitted from the surface emitting light source can be weighted so that the brightness of the surface image becomes uniform.

Further, the brightness adjusting means controls the surface light emitting light source to irradiate the reflection member arranged on the surface of the inspection target with the reference illumination of the preset brightness, and also controls the imaging unit to reflect from the reflection member. The resulting image may be imaged, and the brightness of the illumination emitted from the surface emitting light source may be weighted so that the brightness of the image becomes uniform.
By using the reflective member, it is possible to obtain more general characteristic information of luminance unevenness, which is not affected by the difference in the characteristics of the material of the surface to be inspected.

Next, the control method of the surface inspection device according to the present invention includes an illumination unit that illuminates the surface of the inspection target and an imaging unit that irradiates the surface of the inspection target and obtains a surface image of the inspection target by imaging the surface of the inspection target. It is a control method of a surface inspection device that inspects whether or not there is a defect on the surface of the inspection target based on the surface image of the inspection target obtained by the imaging unit, and is irradiated from a surface emitting light source. It is characterized by including a brightness adjustment routine that weights the brightness of the lighting.
By weighting the brightness of the illumination emitted from the surface emitting light source, it is possible to make the reference brightness uniform in the captured surface image.

Here, the brightness adjustment routine is a step of controlling a surface emitting light source to irradiate the surface of the inspection target with a reference illumination having a preset brightness, and controlling the imaging unit to capture a surface image of the inspection target. A method including a step of weighting the brightness of the illumination emitted from the surface emitting light source so that the brightness of the surface image becomes uniform based on the surface image of the inspection target obtained by imaging. can do.

Further, the brightness adjustment routine controls the surface emission light source to irradiate the reflection member arranged on the surface of the inspection target with the reference illumination of the preset brightness, and controls the imaging unit to reflect from the reflection member. Includes a step of capturing the image, and a step of weighting the brightness of the illumination emitted from the surface emitting light source so that the brightness of the image becomes uniform based on the captured image. It may be a method.
By using the reflective member, it is possible to obtain more general characteristic information of luminance unevenness, which is not affected by the difference in the characteristics of the material of the surface to be inspected.

As described above, according to the present invention, it is possible to eliminate the uneven brightness of the captured surface image used for the surface inspection of the inspection target, so that the brightness of the surface reflected light differs depending on, for example, the location of the inspection target. There is no difference in inspection accuracy even with various materials.

It is a schematic diagram which shows the outline of the surface inspection apparatus which concerns on embodiment of this invention. It is a figure which shows an example of the illumination pattern drawn by the illumination unit. It is a schematic diagram which shows the outline of the equipment which performs the brightness adjustment of an illumination. It is a figure for demonstrating the procedure of the brightness adjustment which weights the brightness with respect to the illumination emitted from the liquid crystal lighting apparatus, (a) is the front view of white illumination, (b) is the front view of the imaged surface image. Is. Following FIG. 4, it is a figure for demonstrating the procedure of brightness adjustment for weighting the brightness with respect to the illumination radiated from a liquid crystal lighting apparatus. FIG. 4A is a front view of white illumination, and FIG. 4B is an image. It is a front view of the surface image. Following FIG. 5, it is a figure for demonstrating the procedure of the brightness adjustment which weights the brightness with respect to the illumination radiated from the liquid crystal lighting apparatus, (a) is the front view of white illumination, (b) was imaged. It is a front view of the surface image. Following FIG. 6, it is a figure for demonstrating the procedure of the brightness adjustment which weights the brightness with respect to the illumination radiated from the liquid crystal lighting apparatus, (a) is the front view of white illumination, (b) was imaged. It is a front view of the surface image. Following FIG. 7, it is a figure for demonstrating the procedure of the brightness adjustment for weighting the brightness with respect to the illumination radiated from the liquid crystal lighting apparatus. FIG. 7A is a front view of white illumination, and FIG. 7B is an image. It is a front view of the surface image. Following FIG. 8, it is a figure for demonstrating the procedure of the brightness adjustment for weighting the brightness with respect to the illumination radiated from the liquid crystal lighting apparatus, (a) is the front view of white illumination, (b) is image | photographed. It is a front view of the surface image. It is a flowchart which shows the control method of the surface inspection apparatus which concerns on embodiment of this invention. It is a flowchart which shows the brightness adjustment routine of the white illumination in the flowchart of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic view showing an outline of the surface inspection apparatus according to the present embodiment.
The surface inspection device includes a lighting unit 1, an imaging unit 2, and a computer 3.

The illumination unit 1 is a component that serves as a light source for irradiating the surface of the inspection target 4 with pattern illumination for surface inspection. A surface emitting light source capable of displaying an image of an illumination pattern is used for the illumination unit 1. In the present embodiment, a liquid crystal display is adopted as the surface emitting light source constituting the lighting unit 1, but the liquid crystal lighting device 10 including the liquid crystal drawing unit 11 and the backlight 12 is described. The liquid crystal illumination device 10 can draw various illumination patterns on the liquid crystal drawing unit 11 according to the drawing data, and the light beam from the backlight 12 is passed through the liquid crystal drawing unit 11 to irradiate the surface of the inspection target 4. It has become.

The imaging unit 2 is a component for capturing an image of the surface of the inspection target 4 and obtaining a surface image thereof. For example, a digital video camera or the like can be adopted for the image pickup unit 2.

The computer 3 has a function as a control unit for controlling the illumination unit 1 and the image pickup unit 2. Further, the computer 3 also has a function as an inspection processing unit that detects defects attached to the surface to be inspected based on the surface image acquired by the imaging unit 2.

The liquid crystal illumination device 10 applied to the illumination unit 1 in the present embodiment has a built-in control device for drawing an illumination pattern in the liquid crystal drawing unit 11. Specifically, FPGA (Field Programmable Gate Array) 13 is adopted as the control device.
The FPGA 13 is a semiconductor integrated circuit in which an arithmetic program can be constructed by hardware, and is characterized in that the arithmetic program circuit can be freely set by the user and can be freely changed thereafter. Further, the FPGA 13 has a feature that it can realize extremely high-speed arithmetic processing as compared with a microcomputer that reads an arithmetic program by software and executes arithmetic processing in order to execute arithmetic processing with an arithmetic program built by hardware. Have.
The lighting unit 1 according to the present embodiment realizes high-speed drawing processing of the lighting pattern by executing the drawing processing of the lighting pattern on the liquid crystal drawing unit 11 by the FPGA 13.
The configuration of the illumination unit 1 for drawing the illumination pattern may be such that the FPGA is not used. The illumination pattern is a pattern in which bright areas and dark areas having different brightness are alternately arranged, and the shape may be band-shaped, serrated, wavy, polka-dotted, or checkered.

The illumination unit 1 has, for example, a striped illumination pattern 14 in which bright band-shaped portions A and dark band-shaped portions B (sometimes referred to as light-dark band-shaped portions AB) having different brightness as shown in FIG. 2 are alternately arranged. It is configured to draw on the liquid crystal drawing unit 11 and irradiate the surface of the inspection target 4.

The computer 3 that functions as a control unit also has a function as a brightness adjusting means that weights the brightness of the illumination emitted from the liquid crystal lighting device 10 (surface emitting light source).

Here, an experiment on brightness unevenness of a photographed image conducted by the inventors will be described.
As shown in FIG. 3, a reflective member 20 such as a mirror is arranged on the surface of the inspection target 4, white illumination 30 is irradiated from the liquid crystal illumination device 10 to the reflective member 20 from the liquid crystal illumination device 10, and the image pickup unit 2 is used. An image of the white illumination 30 reflected from the reflecting member was taken.
As shown in FIG. 4A, since the white illumination 30 irradiated from the liquid crystal illumination device 10 originally has uniform brightness, the surface image 40 (which is reflected from the reflection member 20 and captured by the imaging unit 2) Although the brightness of (hereinafter simply referred to as “captured image 40”) should be uniform in all regions, there are actually a high-brightness portion 41 and a low-brightness portion 42, so-called brightness unevenness, as shown in FIG. Was occurring.

There are several possible factors that cause such uneven brightness. For example, the white illumination 30 of the liquid crystal illumination device 10 itself has uneven brightness, the optical path difference of the white illumination 30 that is irradiated from the liquid crystal illumination device 10 and reflected by the reflection member 20 to reach the image pickup unit 2, and the image pickup unit 2 It is considered that the lens aberration of the camera constituting the above causes uneven brightness.

In the experiments conducted by the present inventors, specifically, the high-luminance portion 41 had a brightness value of about 240 (about 94%), whereas the low-luminance portion 42 had a brightness value of about 140 (about 94%). About 55%). This difference in brightness value of 100 results in a difference in dynamic range, which affects subsequent image processing such as a decrease in S / N ratio.
In the surface inspection, it is determined whether or not there are defects such as irregularities and scratches on the surface of the inspection target 4 based on the surface image obtained by imaging the surface of the inspection target 4, but the defects reflected in the surface image are determined. If the average luminance value around the image varies, the threshold value for determination also varies, and the inspection accuracy may differ depending on the position of the image.
Therefore, it is important to eliminate the uneven brightness of the captured image 40 and make the reference brightness of the captured image 40 uniform in order to improve the inspection accuracy.

Therefore, in the present embodiment, as shown in FIG. 5A, the computer 3 functioning as the control unit illuminates the reference illumination (white illumination 30 in the present embodiment) emitted from the liquid crystal illumination device 10 (surface emitting light source). ), As shown in FIG. 6B, the brightness unevenness of the captured image 40 is eliminated and the brightness value is made uniform. For example, the white illumination 30 shown in FIG. 5A has a lower brightness value than the other areas with respect to the area 31 corresponding to the high-brightness portion 41 in the captured image 40 of FIG. 4B. In the captured image 40, the high-luminance portion 41 is adjusted to match the brightness of the low-luminance portion 42.

The reference illumination is illumination in which the entire illumination area is set to the same brightness by the computer 3 that functions as a control unit. The light / dark illumination pattern 14 is not displayed as the reference illumination. In addition, due to the influence of brightness unevenness and the like, the brightness of the reference illumination may not be uniformed to the same brightness in the entire illumination region. In the present embodiment, the white illumination 30 is used as the reference illumination, but the present invention is not limited to this.

6 to 9 are diagrams showing a procedure for adjusting the brightness of the reference illumination executed by the computer in the present embodiment.
Next, with reference to these figures, a procedure of brightness adjustment for weighting the brightness of the reference illumination emitted from the liquid crystal lighting device 10 will be described.

In the present embodiment, as the reference illumination (illumination in which the light / dark pattern is not displayed) to be the target of the brightness adjustment, the white illumination 30 is irradiated from the liquid crystal illumination device 10 toward the reflection member 20 and reflected from the reflection member 20. The image of the white illumination 20 is captured by the imaging unit 2.

Then, first, the position in the illumination region of the white illumination 30 and the position in the image region of the captured image 40 are associated with each other. In the present embodiment, as shown in FIG. 6A, the irradiation region of the white illumination 30 is divided into a grid pattern, the brightness of the white illumination 30 is changed for each of the division regions 33, and the region where the brightness is changed is imaged. By recognizing in the image 40, the position in the illumination area in the white illumination 30 and the position in the image area in the captured image 40 are associated with each other.
Depending on the size of the illumination area of the white illumination 30, the area of the reflective member 20, the imaging range of the imaging unit 2, etc., a part of the illumination area of the white illumination 30 protrudes from the imaging range of the imaging unit 2 to perform imaging. It may not be reflected in the image 40. As described above, the portion that is not reflected in the captured image 40 is excluded from the brightness adjustment.

Specifically, as shown in FIG. 6A, any one 33a of the division areas 33 of the white illumination 30 is selected, the brightness of the division area 33a is changed, and the imaging unit 2 The image of the white illumination 30 is taken. In the captured image 40, as shown in FIG. 7B, a change in brightness is observed in the image (corresponding image area) 43a of the portion corresponding to the division region 33a of the white illumination 30, so that the white illumination 30 is thereby observed. The position in the illumination area (division area 33a) in the above image and the position in the image area (corresponding image area 43a) in the image 40 of the white illumination imaged by the image pickup unit 2 are associated with each other.

Subsequently, the brightness value of the division region 33a in the white illumination 30 is adjusted so that the brightness of the corresponding image region 43a in the captured image 40 becomes a preset value. For example, the average brightness of the captured image 40 shown in FIG. 6B is calculated, and the brightness value of the division region 33a is matched with this average brightness. Further, the brightness value of the division region 33a may be matched with the lowest brightness value of the captured image 40 shown in FIG. 6B, or other brightness values may be set.

Next, the other 33b of the division region 33 of the white illumination 30 is arbitrarily selected, the brightness of the division region 33b is changed, and the image pickup unit 2 captures the image of the white illumination 30. Then, the brightness value of the division region 33b in the white illumination 30 is adjusted so that the brightness of the corresponding image region 43b corresponding to the division region 33b in the captured image 40 becomes a preset value. As a result, the brightness of the corresponding image area 43b is adjusted to the same brightness value as the previously adjusted corresponding image area 43a.

In this way, all the division regions 33 of the white illumination 30 are associated with the positions in the captured image 40, and as shown in FIG. 7B, the corresponding image regions 43a, 43b, ... The brightness values of the division regions 33a, 33b, ... Of the white illumination 30 are adjusted so that the same brightness values are obtained (see FIG. 7A).

As shown in FIG. 7A, the brightness adjusted for each division region 33 of the white illumination 30 changes in grid-like area units, so that the entire region of the white illumination 30 has a mosaic-like luminance value. Will change. Therefore, this is corrected to a smooth change in the luminance value by using a known image processing technique. For example, using image processing techniques such as nearest neighbor interpolation and bilinear interpolation, the brightness between the pixels constituting the liquid crystal screen of the liquid crystal lighting device 10 is adjusted to change smoothly.
FIG. 8A shows the white illumination 30 after adjusting the brightness value so as to change smoothly in this way.
As a result, the weighting of the brightness of the white illumination 30 of the liquid crystal illumination device 10 is completed.

Next, as shown in FIG. 9B, the brightness value of the entire illumination region in the white illumination 30 is set so that the brightness value of the entire image region in the captured image 40 is uniform and becomes the value at the time of surface inspection. Adjust (see FIG. 9A). At the time of this adjustment, the reference brightness of the white illumination 30 is a value weighted as described above.
In the surface inspection, the reference illumination of the weighted luminance value is irradiated with the pattern illumination formed by drawing the light / dark pattern by the liquid crystal drawing unit 11 toward the surface to be inspected.

Next, a control method of the surface inspection apparatus according to the present embodiment will be described with reference to FIGS. 10 and 11.
FIG. 10 is a flowchart showing a control method of the surface inspection device according to the present embodiment.
The computer 3 that functions as a control unit controls the liquid crystal lighting device 10 and the imaging unit 2 to perform a surface inspection. Prior to the execution of the surface inspection, the lighting emitted from the liquid crystal lighting device 10 is subjected to the surface inspection. A preparatory step including a brightness adjustment routine for weighting the brightness is executed (steps S1 to S5).

That is, the computer 3 first determines whether or not it is necessary to weight the brightness of the illumination emitted from the liquid crystal lighting device 10 (step S1), and if it determines that it is necessary, the brightness adjustment routine (step S1). Step S2) is executed.

In the brightness adjustment routine, first, the reflective member 20 is arranged on the surface of the inspection target 4, and the white illumination 30 is irradiated from the liquid crystal illumination device 10 toward the reflective member 20. Then, the image pickup unit 2 takes an image of the white illumination 30 reflected from the reflection member 20.
Then, in the procedure shown in FIGS. 6 and 7, the position in the illumination region of the white illumination 30 irradiated from the liquid crystal illumination device 10 and the position in the image region of the captured image 40 of the white illumination captured by the imaging unit 2 Correspondence with the position is performed (step S10).

Further, in the present embodiment, in addition to step S10, the brightness value of the white illumination 30 is adjusted by the procedure shown in FIGS. 6 and 7 so that the brightness value of the entire image region of the captured image 41 becomes uniform (in addition, the brightness value of the white illumination 30 is adjusted. Step S11).

Subsequently, an interpolation process is executed so that the brightness between the pixels constituting the liquid crystal screen of the liquid crystal illumination device 10 changes smoothly (step S12). As a result, the weighting of the brightness of the white illumination 30 of the liquid crystal illumination device 10 is completed (see FIG. 8A).
After that, the luminance value of the entire illumination region in the white illumination 30 is corrected so that the luminance value of the entire image region in the captured image 40 is uniform and becomes the value at the time of surface inspection (step S13). The brightness value corrected in this way becomes the brightness value of the reference illumination for performing the appearance inspection.

When the brightness adjustment routine described above is completed or it is determined that it is not necessary to execute the routine, the process proceeds to the next step S3.
In step S3, a striped illumination pattern 14 in which bright and dark band-shaped portions AB are alternately arranged is drawn on the liquid crystal drawing unit 11 of the liquid crystal illumination device 10, and the pattern illumination is applied to the surface of the inspection target 4. At this time, the reflective member 20 is removed from the surface of the inspection target 4. Further, the pattern illumination emitted from the liquid crystal illumination device 10 is formed by drawing a light / dark pattern on the reference illumination of the luminance value weighted by the luminance adjustment routine by the liquid crystal drawing unit 11. As a matter of course, the "bright" part corresponds to the reference illumination of the weighted brightness value, so that practically only the "dark" pattern is drawn.

The computer 3 then performs a surface inspection (step S5) to determine the presence or absence of defects on the surface to be inspected. In the surface inspection, the surface of the inspection target 4 is irradiated while shifting the light and dark illumination pattern 14 as described above, and a plurality of images obtained by imaging the surface of the inspection target 4 are used to determine the amount of reflected light. The surface of the inspection target 4 is inspected for defects based on the difference and the change in brightness.
The surface inspection is executed every time the inspection target is replaced (step S6), and when there are no more targets to be inspected, a series of control operations is completed.

It should be noted that the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications and applications can be carried out as needed.
For example, as the surface emitting light source constituting the lighting unit, for example, an organic EL display, a plasma display, an LED display in which LEDs are arranged in a grid pattern, or the like may be applied in addition to the liquid crystal display device.

Further, in the above-described embodiment, when the brightness is weighted to the illumination emitted from the liquid crystal display device 10 (surface emitting light source), the reflective member 20 is arranged on the surface of the inspection target 4, but the inspection is performed. If the surface of the object 4 is a material that reflects the white illumination 30 with a substantially uniform brightness value (for example, a metal plate having a smooth surface), the surface of the inspection object 4 can be directly irradiated with the white illumination 30. ..

Further, the reference illumination to be irradiated when weighting the brightness is not limited to the white illumination, and various illuminations in which the entire illumination region should be originally uniform can be arbitrarily selected. At that time, since the result of the brightness adjustment may be different from that of the white illumination, even if the weighting information of a plurality of luminances corresponding to the various illuminations is stored in the control unit 3 and called as a preset to be switched. good. Further, the luminance weighting information may be rewritten from an external personal computer (not shown). Since the brightness weighting information may differ depending on the part of the inspection target 4 or the imaging posture, presets corresponding to these may be recalled.

Further, in the above-described embodiment, the position in the illumination region of the white illumination 30 emitted from the liquid crystal illumination device 10 and the position in the image region of the captured image 40 of the white illumination captured by the imaging unit 2 are associated with each other. However, the brightness adjustment is performed for each of the regions 33 divided in a grid pattern, but the present invention is not limited to this, and for example, the brightness can be adjusted for each pixel of the surface emitting light source. In particular, when an LED display in which LEDs are arranged in a grid pattern is used as a surface emitting light source, position association and brightness adjustment are executed in units of pixels (LEDs).

1: Lighting unit 2: Imaging unit 3: Computer (control unit) 4: Inspection target,
10: Liquid crystal lighting device (surface emitting light source), 11: Liquid crystal drawing unit, 12: Backlight, 13: FPGA, 14: Lighting pattern,
20: Reflective member, 30: White lighting, 40: Captured image

Claims (6)

The imaging unit includes a lighting unit that irradiates the surface of the inspection target, an imaging unit that images the surface of the inspection target to obtain a surface image of the inspection target, and a control unit that controls the lighting unit and the imaging unit. A surface inspection device that inspects whether or not the surface of the inspection target has a defect based on the surface image of the inspection target obtained in
The illumination unit is a surface emitting light source and
The control unit is a surface inspection device including a brightness adjusting means for weighting the brightness of the illumination emitted from the surface emitting light source. The brightness adjusting means controls the surface emitting light source to irradiate the surface of the inspection target with a reference illumination having a preset brightness, and controls the imaging unit to capture a surface image of the inspection target. The surface inspection apparatus according to claim 1, wherein the brightness is weighted with respect to the illumination emitted from the surface emitting light source so that the brightness of the surface image becomes uniform. The brightness adjusting means controls the surface light emitting light source to irradiate a reflection member arranged on the surface of the inspection target with a reference illumination having a preset brightness, and controls the imaging unit to control the reflection member. The surface inspection apparatus according to claim 1, wherein the image reflected from the surface is imaged, and the brightness is weighted with respect to the illumination emitted from the surface emitting light source so that the brightness of the image becomes uniform. .. The inspection obtained by the imaging unit is provided with an illumination unit that is composed of a surface emitting light source and irradiates the surface of the inspection target, and an imaging unit that images the surface of the inspection target to obtain a surface image of the inspection target. It is a control method of a surface inspection device that inspects whether or not the surface of the inspection target is defective based on the surface image of the target.
A control method including a brightness adjustment routine that weights the brightness of the illumination emitted from the surface emitting light source. The brightness adjustment routine
A step of controlling the surface emitting light source to irradiate the surface of the inspection target with a reference illumination having a preset brightness and controlling the imaging unit to capture a surface image of the inspection target.
Based on the surface image of the inspection target obtained by imaging, the step of weighting the brightness of the illumination emitted from the surface emitting light source so as to make the brightness of the surface image uniform is included. The control method according to claim 4, wherein the control method is characterized. The brightness adjustment routine
The surface emitting light source is controlled to irradiate a reflective member arranged on the surface of the inspection target with a reference illumination having a preset brightness, and the imaging unit is controlled to display an image reflected from the reflective member. Steps to image and
The claim is characterized by including a step of weighting the brightness of the illumination emitted from the surface emitting light source so that the brightness of the image becomes uniform based on the image obtained by the imaging. The control method according to 4.

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