JP2021169091A - Organic solvent gas removal device - Google Patents

Abstract

To provide an organic solvent gas removal device for removing a volatile organic compound in an exhaust gas of a production facility with an extremely high removal rate, and concentrating the removed VOC with high concentration.SOLUTION: An organic solvent gas removal device is provided with a first adsorption rotor and a second adsorption rotor that are divided into at least a treatment zone, a purge zone and a reproduction zone, passes a gas having passed through a first adsorption zone through a second purge zone or while being mixed with outside air, mixes the gas having passed through a second reproduction zone with a part of outside air and/or a treated gas and passes the mixed gas through a first purge zone, then heats the mixed gas by first heating means and passes the heated mixed gas through a first reproduction zone, and supplies the gas having passed through the first reproduction gas to a VOC purification device.SELECTED DRAWING: Figure 1

Description

The present invention relates to an organic solvent gas removing device, which can remove volatile organic compounds (hereinafter referred to as VOC) in exhaust gas of production equipment and the like with extremely high removal efficiency and can concentrate the removed VOC at a high concentration. It is about.

Conventionally, an organic solvent gas removing device removes or concentrates VOCs such as toluene and xylene emitted from each production facility such as a semiconductor, a chemical factory, a painting factory or a printing factory, and performs combustion treatment to detoxify the VOCs. To do.

As such a means for removing and concentrating VOCs, those using a honeycomb rotor on which a VOC adsorbent such as hydrophobic zeolite is supported are rapidly becoming widespread because they have a high energy saving effect.

On the other hand, in recent years, from the viewpoints of SDGs (Sustainable Development Goals) and CSR (Corporate Social Responsibility), there is a demand to reduce the concentration released into the atmosphere to the utmost limit. Therefore, it is required to develop an organic solvent gas removing device having a low concentration of purified gas discharged even if the concentration of the gas to be treated is high. For this reason, it is conceivable to increase the suction rate by increasing the number of suction rotors in multiple stages and to achieve extremely high removal efficiency that cannot be achieved by single-stage removal. As such a technique, for example, there is one disclosed in Patent Document 1.

The organic gas treatment apparatus disclosed in Patent Document 1 has two suction rotors, each suction rotor is divided into a treatment zone, a purge zone, and a regeneration zone, and outside air is passed through the purge zone of the second suction rotor. Since the gas that has passed through the regeneration zone of the second suction rotor is passed through the purge zone of the first suction rotor and then heated and passed through the regeneration zone of the first suction rotor, the VOC is adsorbed. Is performed in two steps, the VOC removal efficiency becomes extremely high, and the concentration of the released gas can be extremely diluted.

Japanese Unexamined Patent Publication No. 2005-161128

INDUSTRIAL APPLICABILITY The present invention provides an organic solvent gas removing device capable of removing with higher removal efficiency than the organic gas processing device disclosed in Patent Document 1, concentrating the removed VOC at a high concentration, and / or saving energy. To do.

In order to solve the above problems, in the present invention, the suction rotors having the ability to adsorb organic solvent gas are arranged in multiple stages (at least two or more are provided), and when two suction rotors are provided, the first suction rotor is provided. And the second suction rotor are at least the processing zone, the purge zone, and the regeneration zone (hereinafter, the processing zone of the first suction rotor is the "first processing zone", the purge zone is the "first purge zone", and the regeneration zone. Is called the "first regeneration zone", the processing zone of the second suction rotor is referred to as the "second processing zone", the purge zone is referred to as the "second purge zone", and the regeneration zone is referred to as the "second regeneration zone"). The gas to be treated, which was divided and discharged from the production process or the like, was passed through the first treatment zone, a part of the gas that had passed through the first treatment zone was passed through the second treatment zone, and the gas was passed through the second treatment zone. After sending the gas to the supply destination or releasing it to the atmosphere, mixing it with the remaining part of the gas that has passed through the first treatment zone and / or the outside air and passing it through the second purge zone, the second adsorption rotor The gas that has passed through the second regeneration zone is mixed with the outside air and / or a part of the gas to be treated. After passing through the first purge zone, it is heated by the heating means of the first adsorption rotor (hereinafter referred to as "first heating means") and passed through the first regeneration zone to pass through the first regeneration zone. The gas that passed through the zone was sent to the VOC purifier.

Further, in the case where the organic solvent gas removing device of the present invention is provided with two adsorption rotors having an organic solvent gas adsorption capacity, at least a first adsorption rotor divided into a treatment zone, a purge zone and a regeneration zone, and at least a treatment zone. It has a second adsorption rotor divided into a zone and a regeneration zone, passes the gas to be treated discharged from the production process or the like through the first treatment zone, and passes the gas that has passed through the first treatment zone to the second treatment. Pass through the zone, send the gas that has passed through the second treatment zone to the supply destination, or release it to the atmosphere, pass the outside air and / or a part of the gas to be treated through the first purge zone, and pass through the first purge zone. The gas was heated by the second heating means, passed through the second regeneration zone, then passed through the first regeneration zone, and the gas passed through the first regeneration zone was sent to the VOC purification device.

Further, when the organic solvent gas removing device of the present invention is provided with two adsorption rotors having an organic solvent gas adsorption capacity, at least a first adsorption rotor divided into a treatment zone and a regeneration zone, and at least a treatment zone and a purge zone. It has a second adsorption rotor divided into a regeneration zone, passes the gas to be treated discharged from the production process or the like through the first treatment zone, and a part of the gas that has passed through the first treatment zone is second. The gas that has passed through the second treatment zone is sent to the supply destination or released to the atmosphere, and the remaining part of the gas that has passed through the first treatment zone and / or the outside air is sent to the second purge zone. After passing through the second regeneration zone, the gas was heated by the second heating means and passed through the second regeneration zone, and the gas that passed through the second regeneration zone was passed through the first regeneration zone and passed through the first regeneration zone. The gas was sent to the VOC purifier.

Since the organic solvent gas removing device of the present invention is configured as described above, it provides an organic solvent gas removing device that can remove the organic solvent gas with higher removal efficiency than the organic gas processing device disclosed in Patent Document 1 and / or saves energy. can do.

In addition, the adsorption of the organic gas is performed in at least two steps, and the removal efficiency of the organic gas, which cannot be achieved by the single-step removal, can be achieved with extremely high removal efficiency, and the concentration of the released gas can be extremely diluted.

Further, when two adsorption rotors are provided, the first adsorption rotor is attached and detached with the gas after the second adsorption rotor is attached and detached, so that the gas concentration after the attachment and detachment becomes high and the concentration rate (regeneration outlet gas) is increased. Since the VOC concentration in the VOC concentration ÷ VOC concentration in the treatment inlet gas) becomes high, the gas treatment after concentration becomes easy.

As described above, a high concentration rate can be achieved while maintaining a high removal efficiency, and the VOC concentration after concentration can be made higher. Therefore, a VOC purification device such as a subsequent combustion device can be made smaller. The initial cost of the device can be reduced. Further, when a combustion device is used, the VOC concentration can be increased, so that the amount of auxiliary fuel gas used for combustion can be reduced.

FIG. 1 is a flow chart of the first embodiment of the organic solvent gas removing device of the present invention. FIG. 2 is a flow chart of the second embodiment of the organic solvent gas removing device of the present invention. FIG. 3 is a flow chart of Example 3 of the organic solvent gas removing device of the present invention.

In the organic solvent gas removing device of the present invention, suction rotors having an ability to adsorb organic solvent gas are arranged in multiple stages (at least two or more are provided), and when two suction rotors are provided, a first suction rotor and a second suction rotor are provided. The adsorption rotor is divided into at least a treatment zone, a purge zone, and a regeneration zone, and the gas to be treated discharged from the production process or the like is passed through the first treatment zone, and a part of the gas that has passed through the first treatment zone is passed through the first treatment zone. The gas is passed through the second treatment zone, the gas that has passed through the second treatment zone is sent to the supply destination, or is released to the atmosphere, and is mixed with the remaining part of the gas that has passed through the first treatment zone and / or the outside air. After passing through the purge zone 2, it is heated by the second heating means and passed through the second regeneration zone, and the gas that has passed through the second regeneration zone is mixed with the outside air and / or a part of the gas to be treated. After passing through the first purge zone, the gas was heated by the first heating means and passed through the first regeneration zone, and the gas that passed through the first regeneration zone was sent to the VOC purification device.

Further, in the case where the organic solvent gas removing device of the present invention is provided with two adsorption rotors having an organic solvent gas adsorption capacity, at least a first adsorption rotor divided into a treatment zone, a purge zone and a regeneration zone, and at least a treatment zone. It has a second adsorption rotor divided into a zone and a regeneration zone, passes the gas to be treated discharged from the production process or the like through the first treatment zone, and passes the gas that has passed through the first treatment zone to the second treatment. Pass through the zone, send the gas that has passed through the second treatment zone to the supply destination, or release it to the atmosphere, pass the outside air and / or a part of the gas to be treated through the first purge zone, and pass through the first purge zone. The gas was heated by the second heating means, passed through the second regeneration zone, then passed through the first regeneration zone, and the gas passed through the first regeneration zone was sent to the VOC purification device.

Further, when the organic solvent gas removing device of the present invention is provided with two adsorption rotors having an organic solvent gas adsorption capacity, at least a first adsorption rotor divided into a treatment zone and a regeneration zone, and at least a treatment zone and a purge zone. It has a second adsorption rotor divided into a regeneration zone, passes the gas to be treated discharged from the production process or the like through the first treatment zone, and a part of the gas that has passed through the first treatment zone is second. The gas that has passed through the second treatment zone is sent to the supply destination or released to the atmosphere, and the remaining part of the gas that has passed through the first treatment zone and / or the outside air is sent to the second purge zone. After passing through the second regeneration zone, the gas was heated by the second heating means and passed through the second regeneration zone, and the gas that passed through the second regeneration zone was passed through the first regeneration zone and passed through the first regeneration zone. The gas was sent to the VOC purifier.

Hereinafter, Example 1 of the organic solvent gas removing device will be described with reference to the flow chart of FIG. As the first adsorption rotor 1 and the second adsorption rotor 2, those in which a VOC adsorbent such as zeolite or activated carbon is supported on a honeycomb rotor such as a ceramic substrate or a glass substrate are used.

The first suction rotor 1 and the second suction rotor 2 are arranged in series and are divided into processing zones 3 and 6, purge zones 4 and 7, and regeneration zones 5 and 8, respectively. The first suction rotor 1 and the second suction rotor 2 are rotationally driven by a geared motor (not shown) or the like, respectively.

As shown in FIG. 1, the exhaust gas (gas to be processed) containing VOCs from a production facility or the like is sent to the processing zone 3 of the first adsorption rotor 1 and adsorbs the VOCs in the first processing zone 3. The gas that has passed through the first treatment zone 3 is sent to the treatment zone 6 of the second adsorption rotor 2, and after the VOC is further adsorbed in the second treatment-zone 6, it is released into the atmosphere as a purification gas. .. This purified gas is not limited to being released to the atmosphere, and may be returned to the production facility as a supply destination.

After mixing with the remaining part of the gas that has passed through the first treatment zone 3 and / or the outside air and passing it through the second purge zone 7, it is heated by the second heating means 10 to be a second regeneration zone. Pass through 8. The gas that has passed through the second regeneration zone 8 is mixed with the outside air and / or a part of the gas to be treated and passed through the first purge zone 4, and then heated by the first heating means 9 to be the first. Pass through the reproduction zone 5 of. The gas that has passed through the first regeneration zone 5 is sent to a VOC purification device (not shown) such as a VOC combustion device, a VOC oxidative decomposition device, and a VOC recovery device.

Example 1 of the present invention has the above configuration, and details will be described below. The gas containing VOCs (gas to be treated) discharged from production equipment such as semiconductors and coating factories is sent to the treatment zone 3 of the first adsorption rotor 1, and the VOCs in the gas to be treated are generated by the VOC adsorbent. It is adsorbed and removed. When the VOC concentration in the gas to be treated is 500 mg / Nm ³ , the VOC concentration at the treatment outlet of the first treatment zone 3 is 19.8 mg / Nm ³ .

The gas that has passed through the first processing zone 3 passes through the processing zone 6 of the second adsorption rotor 2, and the VOC is further adsorbed in the second processing zone 6. Its concentration is 0.9 mg / Nm ³ , and it becomes an extremely dilute purified gas and is released to the atmosphere outside the equipment or sent to a supply destination such as a production facility.

A second adsorption in which the temperature has risen in the second regeneration zone 8 by mixing with the remaining part of the gas that has passed through the first treatment zone 3 and / or the outside air and passing it through the second purge zone 7. The VOC adsorbent of the rotor 2 is cooled to restore the adsorption performance of the VOC adsorbent. Assuming that the temperature of the gas that has passed through the second purge zone 7 is 35 ° C. (hereinafter, all temperatures are referred to as "Celsius"), the temperature is 141 due to heat exchange in the second purge zone 7. It rises to ℃. The gas whose temperature has risen is further heated by the second regeneration heater 10 to a temperature sufficient for desorbing the VOC from the VOC adsorbent of the second adsorption rotor 2, for example, 220 ° C., and the second regeneration is performed. Send to zone 8.

The VOC adsorbed on the second adsorption rotor 2 is desorbed by this high-temperature gas, and the VOC concentration of the gas that has passed through the second regeneration zone 8 becomes ^{566 mg / Nm 3.} That is, the concentration of the gas passing through the second processing zone 6 is concentrated about 29 times in the second regeneration zone 8.

The gas that has passed through the second regeneration zone 8 is mixed with the outside air and / or a part of the gas to be processed and sent to the purge zone 4 of the first adsorption rotor, and by heat exchange in the first purge zone 4. The temperature rises to 151 ° C. The gas whose temperature has risen is further heated by the first regeneration heater 9 to a temperature sufficient for desorbing the VOC from the VOC adsorbent of the first adsorption rotor 1, for example, 220 ° C., and the first regeneration zone. Send to 5.

The VOC adsorbed on the first adsorption rotor 1 is desorbed by this high-temperature gas, and the VOC concentration at the regeneration outlet of the first regeneration zone 5 becomes ^{7487 mg / Nm 3.} That is, the concentration of the gas passing through the first processing zone 3 is concentrated about 15 times in the first regeneration zone 5. Then, the concentrated VOC is sent to a VOC purification device such as a VOC combustion device, a VOC oxidative decomposition device, and a VOC recovery device, and a combustion facility such as a boiler for use as fuel.

As described above, the concentration rate of the second suction rotor 2 can be set to a high magnification because the processing inlet concentration is low. If the regeneration outlet gas of the second adsorption rotor 2 is used as the purge gas of the first adsorption rotor 1 and the regeneration air volume of the first adsorption rotor 1 is insufficient, a part of the gas to be processed may be used. Alternatively, the outside air may be used.

In the organic gas treatment apparatus disclosed in Patent Document 1, it is exemplified that the gas concentration after purification is purified to 1/100 of the original gas concentration, that is, the removal efficiency is 99%. Although there are differences in gas conditions, the flow according to Example 1 exhibits an extremely high removal efficiency of 99.8%.

Hereinafter, Example 2 of the organic solvent gas removing device will be described with reference to the flow chart of FIG. The description of the portion overlapping with the first embodiment will be omitted. In the second embodiment, the first suction rotor 1 is divided into a processing zone 3, a purge zone 4, and a regeneration zone 5, and the second suction rotor 2 is divided into a processing zone 6 and a regeneration zone 8.

As shown in FIG. 2, the exhaust gas (gas to be processed) containing VOC from the production equipment or the like is sent to the processing zone 3 of the first adsorption rotor 1 and adsorbs the VOC in the first processing zone 3. The gas that has passed through the first treatment zone 3 is sent to the treatment zone 6 of the second adsorption rotor 2, and after the VOC is further adsorbed in the second treatment-zone 6, it is released into the atmosphere as a purification gas. .. This purified gas is not limited to being released to the atmosphere, and may be returned to the production facility as a supply destination.

A part of the outside air and / or the gas to be treated is passed through the purge zone 4 of the first adsorption rotor 1, heated by the second heating means 10, and passed through the second regeneration zone 8. The gas that has passed through the second regeneration zone 8 is passed through the first regeneration zone 5. The gas that has passed through the first regeneration zone 5 is sent to a VOC purification device (not shown) such as a VOC combustion device, a VOC oxidative decomposition device, and a VOC recovery device.

Example 2 of the present invention has the above configuration, and details will be described below. The gas containing VOCs (gas to be treated) discharged from production equipment such as semiconductors and coating factories is sent to the treatment zone 3 of the first adsorption rotor 1, and the VOCs in the gas to be treated are generated by the VOC adsorbent. It is adsorbed and removed. When the VOC concentration in the gas to be treated is 500 mg / Nm ³ , the VOC concentration at the treatment outlet of the first treatment zone 3 is 26.1 mg / Nm ³ .

The gas that has passed through the first processing zone 3 passes through the processing zone 6 of the second adsorption rotor 2, and the VOC is further adsorbed in the second processing zone 6. Its concentration is 2.1 mg / Nm ³ , and it becomes an extremely dilute purified gas and is released to the atmosphere outside the equipment or sent to a supply destination such as a production facility.

By passing a part of the outside air and / or the gas to be treated through the purge zone 4 of the first adsorption rotor 1, the VOC adsorbent of the first adsorption rotor 1 whose temperature has risen in the first regeneration zone 5 is cooled. , Restores the adsorption performance of VOC adsorbent. Assuming that the temperature of the gas that has passed through the first purge zone 4 is 30 ° C., the temperature rises to 107 ° C. due to heat exchange in the first purge zone 4. The gas whose temperature has risen is further heated by the second regeneration heater 10 to a temperature sufficient for desorbing the VOC from the VOC adsorbent of the second adsorption rotor 2, for example, 220 ° C., and the second regeneration is performed. Send to zone 8.

The VOC adsorbed on the second adsorption rotor 2 is desorbed by this high-temperature gas, and the VOC concentration of the gas that has passed through the second regeneration zone 8 becomes ^{336 mg / Nm 3.} That is, the concentration of the gas passing through the second processing zone 6 is concentrated about 13 times in the second regeneration zone 8.

Here, the rotation speed of the second adsorption rotor 2 is slowed down so that a high-temperature regeneration outlet gas (150 to 200 ° C.) can be obtained. The gas that has passed through the second regeneration zone 8 reaches, for example, 180 ° C., and is sent to the first regeneration zone 5 as it is. The VOC adsorbed on the first adsorption rotor 1 is desorbed by this high-temperature gas, and the VOC concentration at the regeneration outlet of the first regeneration zone 5 becomes ^{7476 mg / Nm 3.} That is, the concentration of the gas passing through the first processing zone 3 is concentrated about 15 times in the first regeneration zone 8. Then, the concentrated VOC is sent to a VOC purification device such as a VOC combustion device, a VOC oxidative decomposition device, and a VOC recovery device, and a combustion facility such as a boiler for use as fuel.

As described above, in the second embodiment, the rotation speed of the second adsorption rotor 2 is slowed down to obtain a high-temperature regeneration outlet gas. Normally, when the rotation speed is reduced, the performance also deteriorates, but since the second adsorption rotor 2 processes the gas having an extremely low VOC concentration after being treated by the first adsorption rotor 1, it is operated at a low rotation speed. However, the performance of the second suction rotor 2 can be exhibited.

By using the high-temperature regeneration outlet gas that has passed through the second regeneration zone 8 as the regeneration gas of the first regeneration zone 5, the thermal energy required for the regeneration of the first adsorption rotor 1 can be obtained, which saves energy. be. That is, it is not necessary to provide the first heating means as in the first embodiment, the first suction rotor 1 can be regenerated, and in the flow according to the second embodiment, the removal efficiency is as high as 99.6%, which is extremely high. Demonstrate. If necessary, the performance of the first suction rotor 1 can be improved by providing a first heating means and additionally raising the temperature to, for example, 220 ° C.

Further, when the regenerated air volume of the first adsorption rotor 1 is insufficient, outside air may be mixed and used as the gas to be introduced into the first purge zone 4.

Hereinafter, Example 3 of the organic solvent gas removing device will be described with reference to the flow chart of FIG. The description of the portion overlapping with the first and second embodiments will be omitted. In the third embodiment, the first suction rotor 1 is divided into a processing zone 3 and a regeneration zone 5, and the second suction rotor 2 is divided into a processing zone 6, a purge zone 7, and a regeneration zone 8.

As shown in FIG. 3, the exhaust gas (gas to be processed) containing VOC from the production equipment or the like is sent to the processing zone 3 of the first adsorption rotor 1 and adsorbs the VOC in the first processing zone 3. A part of the gas that has passed through the first treatment zone 3 is sent to the treatment zone 6 of the second adsorption rotor 2, and after the VOC is further adsorbed in the second treatment zone 6, it is released into the atmosphere as a purification gas. Will be done. This purified gas is not limited to being released to the atmosphere, and may be returned to the production facility as a supply destination.

The remaining part of the gas that has passed through the first processing zone 3 and / or the outside air is passed through the purge zone 7 of the second adsorption rotor, heated by the second heating means 10, and passed through the second regeneration zone 8. .. The gas that has passed through the second regeneration zone 8 is passed through the first regeneration zone 5. The gas that has passed through the first regeneration zone 5 is sent to a VOC purification device (not shown) such as a VOC combustion device, a VOC oxidative decomposition device, and a VOC recovery device.

Example 3 of the present invention has the above configuration, and details will be described below. The gas containing VOCs (gas to be treated) discharged from production equipment such as semiconductors and coating factories is sent to the treatment zone 3 of the first adsorption rotor 1, and the VOCs in the gas to be treated are generated by the VOC adsorbent. It is adsorbed and removed. When the VOC concentration in the gas to be treated is 500 mg / Nm ³ , the VOC concentration at the treatment outlet of the first treatment zone 3 is 35.0 mg / Nm ³ .

The gas that has passed through the first processing zone 3 passes through the processing zone 6 of the second adsorption rotor 2, and the VOC is further adsorbed in the second processing zone 6. Its concentration is 2.8 mg / Nm ³ , and it becomes an extremely dilute purified gas and is released to the atmosphere outside the equipment or sent to a supply destination such as a production facility.

A second adsorption in which the temperature has risen in the second regeneration zone 8 by passing the remaining part of the gas that has passed through the first processing zone 3 and / or the outside air through the purge zone 7 of the second adsorption rotor 2. The VOC adsorbent of the rotor 2 is cooled to restore the adsorption performance of the VOC adsorbent. Assuming that the temperature of the gas that has passed through the second purge zone 7 is 40 ° C., the temperature of the gas that has passed through the second purge zone 7 rises to 146 ° C. due to heat exchange in the second purge zone 7. The gas whose temperature has risen is further heated by the second regeneration heater 10 to a temperature sufficient for desorbing the VOC from the VOC adsorbent of the second adsorption rotor 2, for example, 220 ° C., and the second regeneration is performed. Send to zone 8.

The VOC adsorbed on the second adsorption rotor 2 is desorbed by this high-temperature gas, and the VOC concentration of the gas that has passed through the second regeneration zone 8 becomes ^{485 mg / Nm 3.} That is, the concentration of the gas passing through the second processing zone 6 is concentrated about 14 times in the second regeneration zone 8.

Here, the rotation speed of the second adsorption rotor 2 is slowed down so that a high-temperature regeneration outlet gas (150 to 200 ° C.) can be obtained. The gas that has passed through the second regeneration zone 8 reaches, for example, 200 ° C., and is sent to the first regeneration zone 5 as it is. The VOC adsorbed on the first adsorption rotor 1 is desorbed by this high-temperature gas, and the VOC concentration at the regeneration outlet of the first regeneration zone 5 becomes ^{7461 mg / Nm 3.} That is, the concentration of the gas passing through the first processing zone 3 is concentrated about 15 times in the first regeneration zone 8. Then, the concentrated VOC is sent to a VOC purification device such as a VOC combustion device, a VOC oxidative decomposition device, and a VOC recovery device, and a combustion facility such as a boiler for use as fuel.

In this way, in the third embodiment as in the second embodiment, the rotation speed of the second adsorption rotor 2 is slowed down to obtain a high-temperature regeneration outlet gas. Normally, when the rotation speed is reduced, the performance also deteriorates, but since the second adsorption rotor 2 processes the gas having an extremely low VOC concentration after being treated by the first adsorption rotor 1, it is operated at a low rotation speed. However, the performance of the second suction rotor 2 can be exhibited.

By using the high-temperature regeneration outlet gas that has passed through the second regeneration zone 8 as the regeneration gas of the first regeneration zone 5, the thermal energy required for the regeneration of the first adsorption rotor 1 can be obtained, which saves energy. be. That is, it is not necessary to provide the first heating means as in the first embodiment, the first suction rotor 1 can be regenerated, and in the flow according to the second embodiment, the removal efficiency is as high as 99.4%, which is extremely high. Demonstrate. In Example 3, the removal efficiency is slightly inferior to that in Example 2, but by providing the purge zone 7 in the second adsorption rotor 2, the temperature of the gas exiting the second purge zone 7 is high. The load of the second heating means 10 can be reduced as compared with the second embodiment, and the temperature of the gas exiting the second regeneration zone 8 is higher than that of the second embodiment.

If the regenerated air volume of the second adsorption rotor 2 is insufficient, outside air may be mixed and used as the gas to be introduced into the second purge zone 7.

Although not shown, in the flows of the second and third embodiments, as in the first embodiment, a first heating means is provided in front of the first regeneration zone 5 as necessary, and a second regeneration is performed. The performance of the first adsorption rotor 1 is improved by heating the gas that has passed through the zone 8 to the first regeneration zone 5 by heating it by the first heating means, for example, by additionally raising the temperature to 220 ° C. You may let it.

Further, in the first, second, and third embodiments, the heating means may be a heat exchanger or a mixing chamber that mixes high-temperature combustion exhaust gas with the gas being processed, in addition to the electric heater and the gas heater. Further, although the configuration of the two suction rotors has been described, the structure may be composed of a plurality of suction rotors of two or more.

INDUSTRIAL APPLICABILITY According to the present invention, exhaust gas from a painting factory such as an automobile, an aircraft, or a ship containing a large amount of VOC in exhaust gas, exhaust gas from a semiconductor cleaning process, exhaust gas from an electrode plate manufacturing process used for a lithium ion secondary battery, and magnetism It is possible to provide an organic solvent gas removing device that can also be used for exhaust gas from a recording medium manufacturing process.

1 First suction rotor 2 Second suction rotor 3 First processing zone 4 First purge zone 5 First regeneration zone 6 Second processing zone 7 Second purge zone 8 Second regeneration zone 9 Second 1 heating means 10 2nd heating means

Claims (5)

It has a first suction rotor and a second suction rotor, and each suction rotor is divided into at least a treatment zone, a purge zone, and a regeneration zone, and the gas to be treated is passed through the first treatment zone to pass the first treatment zone. A part of the gas that has passed through the first treatment zone is passed through the second treatment zone, the gas that has passed through the second treatment zone is sent to the supply destination, or the gas is released to the atmosphere, and the rest of the gas that has passed through the first treatment zone is released. After mixing with a part and / or the outside air and passing it through the second purge zone, the gas is heated by the second heating means and passed through the second regeneration zone, and the gas that has passed through the second regeneration zone is passed through the second regeneration zone. After mixing with the outside air and / or a part of the gas to be treated and passing it through the first purge zone, it is heated by the first heating means and passed through the first regeneration zone, and the first regeneration zone is passed through. An organic solvent gas removing device characterized in that the passing gas is sent to a VOC purification device. It has at least a first suction rotor divided into a treatment zone, a purge zone, and a regeneration zone, and at least a second suction rotor divided into a treatment zone and a regeneration zone, and puts the gas to be treated into the first treatment zone. Through, the gas that has passed through the first treatment zone is passed through the second treatment zone, and the gas that has passed through the second treatment zone is sent to the supply destination or released to the atmosphere, and the outside air and / or the treatment gas is released. Is passed through the first purge zone, the gas that has passed through the first purge zone is heated by the second heating means, passed through the second regeneration zone, and then passed through the first regeneration zone. The organic solvent gas removing device is characterized in that the gas that has passed through the first regeneration zone is sent to the VOC purification device. It has at least a first suction rotor divided into a treatment zone and a regeneration zone, and at least a second suction rotor divided into a treatment zone, a purge zone, and a regeneration zone, and puts the gas to be treated into the first treatment zone. A part of the gas that has passed through the first treatment zone is passed through the second treatment zone, and the gas that has passed through the second treatment zone is sent to the supply destination or released to the atmosphere, and the first treatment zone is released. The remaining part of the gas that has passed through the treatment zone and / or the outside air is passed through the second purge zone, then heated by the second heating means and passed through the second regeneration zone, and the second regeneration zone is described. An organic solvent gas removing device, characterized in that the gas that has passed through the above-mentioned is passed through a first regeneration zone, and the gas that has passed through the first regeneration zone is sent to a VOC purification device. A first heating means is provided in front of the first regeneration zone, and the gas that has passed through the second regeneration zone is heated by the first heating means before being passed through the first regeneration zone. The organic solvent gas removing device according to claim 2 or 3, wherein the organic solvent gas removing device is characterized in that. The organic solvent gas removing device according to any one of claims 1 to 3, wherein the VOC purification device is a VOC oxidative decomposition device, a VOC combustion device, or a VOC recovery device.

Images