JP2021148497A - Inner surface shape measuring machine and alignment method therefor - Google Patents

Abstract

To provide an inner surface shape measuring machine capable of properly aligning a position of a probe, and an alignment method therefor.SOLUTION: An inner surface shape measuring machine for measuring an inner surface shape of a fine hole H formed on a workpiece W, comprises: a high accuracy rotation mechanism 14 for rotating the workpiece W around a rotary axis; a linear motion inclination stage 18 on which the workpiece W is mounted; a slender probe 30 inserted into the fine hole H of the workpiece; a probe linear motion inclination mechanism 28 for adjusting a posture of the probe; a probe observing camera 32 which is coupled to the linear motion inclination stage 18 through a bracket 36 for camera, and images the probe 30 from at least three peripheral positions on a rotary locus whose center is a rotary axis C; and a controller 50 for adjusting a posture of the probe, by the probe linear motion inclination mechanism 28, on the basis of images imaged by the probe observing camera 32 at the peripheral positions.SELECTED DRAWING: Figure 1

Description

The present invention relates to a technique for measuring the inner surface shape of a small hole formed in a work.

Conventionally, a shape measuring machine that measures the inner surface shape (roundness, etc.) of a cylindrical work by rotating the probe of the detector and the work relative to the rotation axis has been known (for example). , Patent Document 1). In order to measure the inner surface shape of the work using such a shape measuring machine, it is necessary to make the rotation axis and the central axis of the work coincide with each other.

Patent Document 1 discloses a technique for measuring the inner surface shape of the inner peripheral surface of a work by bringing a probe (contactor) of a detector into contact with the inner peripheral surface of a cylindrical work placed on a rotary table. Has been done. In the technique described in Patent Document 1, in order to align the rotation axis with the central axis of the work, the probe of the detector is brought into contact with the outer peripheral surface of the work in advance, and the work is rotated at a low magnification while rotating the rotary table. By observing the runout, the placement position of the work is adjusted so that the runout becomes smaller.

Japanese Unexamined Patent Publication No. 2006-145344

When measuring the inner surface shape of a small hole in a work using a shape measuring machine as described above, relative alignment (probe alignment) between the probe and the rotation axis is important. That is, even if the rotation axis and the central axis of the work are aligned as in Patent Document 1 described above, if there is a relative positional deviation between the probe and the rotation axis, the probe can be moved to the work. There is a problem that the probe collides with a part other than the small hole of the work when it is inserted into the small hole.

Such a problem can be solved by inserting the probe into the small hole of the work while checking with an observation microscope, but the skill of the worker is required. In this case, automation is difficult, and there is a possibility that the probe may collide with a portion other than the small hole of the workpiece due to an operation error.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an inner surface shape measuring machine capable of accurately and easily aligning a probe, and an alignment method for the inner surface shape measuring machine.

The following inventions are provided in order to achieve the above object.

The inner surface shape measuring machine according to the first aspect of the present invention is an inner surface shape measuring machine that measures the inner surface shape of a small hole formed in a work, and has a rotation mechanism for rotating the work around a rotation axis and a work. A linear tilting stage on which the , A probe that has an elongated shape that can be inserted into a small hole and detects the inner surface shape of the small hole, an adjusting means that can adjust the posture of the probe, and a rotating shaft that is connected to a linear motion tilting stage via a connecting member. An acquisition means for acquiring probe attitude information from at least three circumferential positions on a rotation orbit centered on the above, and a control means for adjusting the probe attitude by an adjustment means based on the probe attitude information acquired by the acquisition means. Be prepared.

In the first aspect of the inner surface shape measuring machine according to the second aspect of the present invention, the adjusting means is a probe linear motion tilting mechanism capable of linearly moving and tilting the probe in the first and second directions.

In the inner surface shape measuring machine according to the third aspect of the present invention, in the first or second aspect, the control means adjusts the posture of the probe by the adjusting means so that the relative deviation between the probe and the rotation axis is eliminated.

In the inner surface shape measuring machine according to the fourth aspect of the present invention, in any one of the first to third aspects, the acquisition means is a probe from four circumferential positions displaced by 90 degrees from each other on the rotation orbit. Acquire posture information.

In the inner surface shape measuring machine according to the fifth aspect of the present invention, in any one of the first to fourth aspects, the acquisition means includes a camera for photographing the probe.

In the fifth aspect, the inner surface shape measuring machine according to the sixth aspect of the present invention is configured to be rotatable integrally with the linear motion tilting stage, and surface emission capable of surface emission from a position facing the camera toward the probe. Further equipped with lighting means.

The alignment method of the inner surface shape measuring machine according to the seventh aspect of the present invention is an alignment method of the inner surface shape measuring machine for measuring the inner surface shape of the small hole formed in the work, and the inner surface shape measuring machine rotates the work. A rotation mechanism for rotating around an axis and a linear motion tilting stage on which a work is placed, which can be rotated around the rotation axis by the rotation mechanism and in the first and second directions orthogonal to the rotation axis. A linear motion tilt stage capable of linear motion and tilt, a probe having an elongated shape that can be inserted into a small hole and detecting the inner surface shape of the narrow hole, and acquisition connected to the linear motion tilt stage via a connecting member. The acquisition means is provided with means, and the acquisition means is probed from at least three circumferential positions on the rotation orbit centering on the rotation axis while rotating the acquisition means around the rotation axis integrally with the linear motion tilt stage. It includes an acquisition step for acquiring attitude information and an adjustment step for adjusting the attitude of the probe so that there is no relative deviation between the probe and the rotation axis based on the probe attitude information acquired in the acquisition step.

In the alignment method of the inner surface shape measuring machine according to the eighth aspect of the present invention, in the seventh aspect, in the pre-acquisition step, the acquisition means acquires the probe posture information from four circumferential positions displaced by 90 degrees from each other on the rotation orbit. get.

In the seventh aspect of the alignment method of the inner surface shape measuring machine according to the eighth aspect of the present invention, the acquisition means is a camera for photographing a probe, and the focus of the camera is set by linearly moving or tilting the linear motion tilting stage. Further includes a focusing step for aligning the camera with the axis of rotation.

According to the present invention, the alignment of the probe can be performed accurately and easily.

It is the schematic which showed the whole structure of the inner surface shape measuring machine of 1st Embodiment. It is a block diagram which showed the structure of a control device. It is a flowchart which showed an example of the flow of probe alignment. It is a figure for demonstrating the focusing of a camera. It is a figure which showed an example of the photographing position of a probe by a camera. It is explanatory drawing which showed an example of the image taken by the camera at each shooting position. It is a figure which showed the composite image of the 1st photographed image and the 3rd photographed image. It is a figure which showed the composite image of the 2nd photographed image and the 4th photographed image. It is a figure for demonstrating work alignment. It is a figure for demonstrating work alignment. It is a figure for calibrating the linear motion movement amount of a probe linear motion tilt mechanism. It is a figure for calibrating the calibration method of the tilting movement amount of a probe linear motion tilting mechanism. It is a figure which showed other example of the imaging position of a probe by a camera. It is a figure which showed still another example of the imaging position of a probe by a camera. It is the schematic which showed the whole structure of the inner surface shape measuring machine of 2nd Embodiment. It is the schematic which showed the whole structure of the inner surface shape measuring machine of 3rd Embodiment. It is the schematic which showed the main part structure of the inner surface shape measuring machine of 4th Embodiment. It is the schematic which showed the main part structure of the inner surface shape measuring machine of 5th Embodiment. It is a figure for demonstrating the application example of this invention. It is a figure for demonstrating the application example of this invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[First Embodiment]
<Configuration of inner surface shape measuring machine>
FIG. 1 is a schematic view showing the overall configuration of the inner surface shape measuring machine 10 of the first embodiment. The inner surface shape measuring machine 10 is a device for measuring the inner surface shape (roundness, etc.) of the small hole H formed in the work W. In this example, the narrow hole H is a through hole formed along the central axis of the work W. The inner diameter of the small hole H is a very small diameter (for example, the inner diameter is 500 μm or less). In FIG. 1, the X direction, the Y direction, and the Z direction are orthogonal to each other, the X direction is the horizontal direction, the Y direction is the horizontal direction orthogonal to the X direction, and the Z direction is the vertical direction.

As shown in FIG. 1, the inner surface shape measuring machine 10 includes a main body base 12, a high-precision rotation mechanism 14, a linear motion tilting stage 18, a column 20, a carriage 22, an arm 24, a displacement detector 26, and a probe linear motion tilting mechanism 28. , A probe observation camera 32, a work observation camera 34, and a control device 50.

The high-precision rotation mechanism 14 is a rotation mechanism for rotating the work W around the rotation axis C, and rotates the linear motion tilting stage 18, which will be described later, with high accuracy around the rotation axis C parallel to the Z direction. be. The high-precision rotation mechanism 14 includes a rotating body 16 rotatably provided on the main body base 12, and a linear motion tilting stage 18 is supported on the upper surface of the rotating body 16. The high-precision rotation mechanism 14 includes a motor (not shown) that rotates the rotating body 16 with high precision about the rotation axis C, and an encoder (not shown) that detects the rotation angle of the rotating body 16. The high-precision rotation mechanism 14 corresponds to a "rotation mechanism".

The linear motion tilting stage 18 is for mounting the work W. The linear motion tilting stage 18 may directly support and fix the work W, or may support and fix the work W via a work installation jig (not shown).

The linear motion tilting stage 18 is supported on the support surface (upper surface) of the rotating body 16, and is integrally formed with the rotating body 16 so as to be rotatable around the rotating shaft C. As a result, the work W supported and fixed to the linear motion tilt stage 18 can rotate around the rotation axis C integrally with the linear motion tilt stage 18.

The linear motion tilting stage 18 includes a linear motion mechanism (centering mechanism) and a tilting mechanism (tilching mechanism) (both not shown). The linear motion mechanism moves the linear motion tilt stage 18 in the X and Y directions by driving a motor (not shown) to adjust the position of the linear motion tilt stage 18 in the XY plane (horizontal plane) orthogonal to the rotation axis C. .. The tilt mechanism rotates the linear tilt stage 18 around the X and Y directions by driving a motor (not shown) to adjust the tilt of the linear tilt stage 18 with respect to the XY plane. Therefore, by adjusting the position and inclination of the linear motion tilt stage 18 in the horizontal direction (X direction and Y direction) by the linear motion mechanism and the tilt mechanism, the eccentricity correction (centering adjustment) of the central axis of the work W with respect to the rotation axis C is performed. And tilt correction (horizontal adjustment) can be performed.

A column (post) 20 extending parallel to the Z direction is erected on the main body base 12. The lower end of the column 20 is fixed to the upper surface of the main body base 12.

The carriage 22 is supported by the column 20 so as to be movable in the Z direction. The carriage 22 is configured to be movable in the Z direction by driving a motor (not shown).

The arm 24 is supported by the carriage 22 so as to be movable in the X direction. The arm 24 is configured to be movable in the X direction by driving a motor (not shown).

The displacement detector 26 is supported by the arm 24 via the probe linear motion tilting mechanism 28. The displacement detector 26 has an elongated probe 30 that can be inserted into the narrow hole H of the work W. The probe 30 detects the shape of the inner surface (measured surface) of the small hole H of the work W in a state of being inserted into the small hole H of the work W. As the probe 30, a non-contact type probe that detects the inner surface shape without contacting the inner surface of the fine hole H of the work W is preferably adopted.

The non-contact probe is not particularly limited as long as it can detect the inner surface shape without contacting the inner surface of the fine hole H of the work W, and is, for example, a laser interferometer, a white interferometer, or SD-OCT. A probe to which various methods such as (Spectral Domain-Optical Coherence Tomography) and SS-OCT (Swept Source-Optical Coherence Tomography) are applied can be used.

The probe 30 is not limited to the non-contact probe, and may be a contact probe. The contact probe has a contactor capable of contacting the inner surface of the fine hole H of the work W, and detects the inner surface shape by detecting the displacement of the contactor when it is brought into contact with the inner surface of the fine hole H of the work W. To do. As the contact probe, for example, a probe to which various methods such as LVDT (Linear Variable Differential Transformer), an interferometer, an optical triangulation method, and a thin film strain measurement can be used can be used. Further, a method may be applied in which the contactor of the contact probe is vibrated at the resonance frequency and the resonance point is changed by the contact.

In general, the non-contact probe is more suitable for reducing the diameter than the contact probe, and the non-contact probe is suitable for measuring the inner surface shape of the extremely small diameter small hole H as in the present embodiment.

The probe linear motion tilting mechanism 28 is provided between the arm 24 and the displacement detector 26. The probe linear motion tilting mechanism 28 includes a linear motion mechanism and a tilting mechanism (both not shown). The linear motion mechanism moves the displacement detector 26 in the X and Y directions by driving a motor (not shown) to adjust the position of the probe 30 in the XY plane (horizontal plane) orthogonal to the rotation axis C. The tilt mechanism rotates the displacement detector 26 around the X and Y directions by driving a motor (not shown) to adjust the tilt of the probe 30 with respect to the XY plane. Therefore, by adjusting the position and inclination of the probe 30 in the horizontal direction (X direction and Y direction) by the probe linear motion tilting mechanism 28 (linear motion mechanism and tilting mechanism), the probe 30 and the rotation axis C are relative to each other. It is possible to perform alignment (probe alignment). The probe linear motion tilting mechanism 28 is an example of “adjustment means”. The probe alignment, which is a feature of the present invention, will be described later.

The probe observation camera 32 is, for example, an area sensor camera (two-dimensional sensor camera) such as a CCD (Charge Coupled Device) camera. The probe observation camera 32 is connected (supported) to the linear motion tilting stage 18 via the camera bracket 36. The probe observation camera 32 is arranged so that its photographing direction is orthogonal to the rotation axis C and faces the rotation axis C side (rotation center side). Further, the focus of the probe observation camera 32 is adjusted to be aligned with the rotation axis C by focusing, which will be described later. As a result, the probe observation camera 32 can rotate around the rotation axis C integrally with the linear motion tilt stage 18, and can be rotated at an arbitrary imaging position (circumference) on the rotation trajectory K about the rotation axis C. The probe 30 can be photographed by the probe observation camera 32 (see FIG. 5). As the power supply to the probe observation camera 32, a known method such as a slip ring or wireless power supply can be applied. The probe observation camera 32 is an example of "acquisition means", and the captured image taken by the probe observation camera 32 is an example of "probe posture information". The camera bracket 36 is an example of a “connecting member”.

The work observation camera 34 is an area sensor camera (two-dimensional sensor camera) such as a CCD camera, similar to the probe observation camera 32 described above. The upper end of the work observation camera 34 is supported by the arm 24, and is arranged so that the photographing direction faces the lower side in the vertical direction (lower side in the Z direction) parallel to the rotation axis C. As a result, the work observation camera 34 can take a picture of the work W supported and fixed to the linear motion tilting stage 18 from a fixed position (fixed position).

<Control device>
The control device 50 controls the operation of each part of the inner surface shape measuring machine 10 (including the measuring operation of the inner surface shape of the work W and the probe alignment operation described later). The control device 50 is realized by a general-purpose computer such as a personal computer or a microcomputer. The control device 50 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an input / output interface, and the like. In the control device 50, various programs such as control programs stored in the ROM are expanded in the RAM, and the programs expanded in the RAM are executed by the CPU to realize the functions of each part in the inner surface shape measuring machine 10. Then, various arithmetic processes or control processes are executed via the input / output interface. The control device 50 is an example of "control means".

FIG. 2 is a block diagram showing the configuration of the control device 50. Note that FIG. 2 shows only the configuration related to the operation of the probe alignment executed by the inner surface shape measuring machine 10. Although the control device 50 also includes a configuration related to the measurement operation of the inner surface shape of the work W, the description thereof will be omitted because it is not a main part of the present invention.

As shown in FIG. 2, the control device 50 includes a probe alignment control unit 52. The probe alignment control unit 52 is a functional unit that controls an operation for performing relative positional alignment (probe alignment) between the probe 30 and the rotation axis C.

Here, the configuration of the probe alignment control unit 52 will be described in detail. The probe alignment control unit 52 includes an imaging control unit 54, a relative deviation detection unit 56, and a probe attitude control unit 58.

The imaging control unit 54 controls the high-precision rotation mechanism 14 to rotate the probe observation camera 32 around the rotation axis C together with the rotating body 16 and the linear motion tilt stage 18, so that the probe with respect to the probe 30 is probed. The photographing position (circumferential position) of the observation camera 32 is changed in the circumferential direction centered on the rotation axis C. As a result, the probe 30 can be photographed by the probe observation camera 32 from at least three imaging positions on the rotation trajectory K of the probe observation camera 32 centered on the rotation axis C. As will be described later, in the present embodiment, the probe 30 is preferably photographed from four imaging positions shifted by 90 degrees from each other on the rotation trajectory K of the probe observation camera 32 (see FIG. 5). Further, the imaging control unit 54 controls the linear motion tilting stage 18 to adjust the position and tilt of the linear motion tilting stage 18 in the horizontal direction (X direction and Y direction) before the shooting operation is performed. As a result, focusing is performed so that the focus of the probe observation camera 32 is aligned with the rotation axis C.

Further, the imaging control unit 54 controls the probe observation camera 32 that has moved to each imaging position to photograph the probe 30. The photographing control unit 54 causes the relative deviation detecting unit 56 to transmit the captured image captured by the probe observation camera 32.

The relative deviation detection unit 56 detects the relative deviation between the rotation axis C and the probe 30 based on the captured image acquired by the probe observation camera 32 at each imaging position. A specific detection method will be described in the probe alignment described later.

The probe attitude control unit 58 controls the probe linear motion tilt mechanism 28 based on the relative deviation detected by the relative deviation detection unit 56. Specifically, the probe attitude control unit 58 controls the probe linear motion tilting mechanism 28 to adjust the position and inclination of the probe 30 so that the relative deviation detected by the relative deviation detecting unit 56 disappears, and the probe 30 And the rotation axis C are relative to each other.

<Probe alignment>
Next, the probe alignment, which is a feature of the present invention, will be described.

When measuring the inner surface shape (roundness, etc.) of the small hole H of the work W using the inner surface shape measuring machine 10, the probe 30 is first moved by the carriage 22 together with the displacement detector 26 in the Z direction, and the work. The probe 30 is inserted into the narrow hole H of W. Then, with the probe 30 inserted into the small hole H of the work W, the probe 30 detects the inner surface shape of the small hole H while rotating the work W around the rotation axis C. In this way, the inner surface shape of the small hole H of the work W is measured.

Here, in order to insert the probe 30 into the small hole H before the measurement is started, the posture (position and inclination) of the probe 30 is set so that the probe 30 is positioned coaxially with the rotation axis C. It needs to be adjusted. If there is a relative deviation between the probe 30 and the rotation axis C, when the probe 30 is inserted into the small hole H, the probe 30 collides with a portion other than the small hole H of the work W, and the small hole H It becomes difficult to measure the inner surface shape of.

Therefore, in the present embodiment, the probe 30 and the rotating shaft C are relative to each other so that the relative deviation between the probe 30 and the rotating shaft C is eliminated before the measurement of the inner surface shape of the small hole H of the work W is started. Alignment (probe alignment) is performed.

FIG. 3 is a flowchart showing an example of the flow of probe alignment.

As shown in FIG. 3, when the probe alignment is started, the imaging control unit 54 first focuses the probe observation camera 32 so that the focus is on the rotation axis C (step S10, “focusing step”. An example). Here, in the present embodiment, since the probe observation camera 32 is supported by the linear motion tilting stage 18 via the camera bracket 36, as shown in FIG. 4, the imaging control unit 54 controls the linear motion tilting stage. By controlling the 18 and adjusting the position and inclination of the linear motion tilt stage 18 in the horizontal direction (X direction and Y direction), it is possible to focus the probe observation camera 32 as described above. .. The probe observation camera 32 may have an automatic focusing function (autofocus function) for measuring the distance to the subject (probe 30) and performing focusing.

Next, the imaging control unit 54 controls the high-precision rotation mechanism 14 to rotate and move the probe observation camera 32 around the rotation axis C together with the linear motion tilt stage 18 (step S12). Then, when the probe observation camera 32 moves to a predetermined imaging position on the rotation trajectory K of the probe observation camera 32 centered on the rotation axis C, the probe 30 is photographed at that imaging position. (Step S14, an example of "acquisition step").

Next, it is determined whether or not the shooting at all the shooting positions is completed (step S16). When it is determined that the shooting at all the shooting positions has not been completed (No in step S16), the probe observation camera 32 is rotated and moved (step) until it is determined that the shooting at all the shooting positions has been completed. S12) and photographing of the probe 30 by the probe observation camera 32 (step S14) are repeatedly performed. Whether or not the probe observation camera 32 has moved to each shooting position can be determined based on the output of the encoder provided in the high-precision rotation mechanism 14. As long as it is possible to determine whether or not the probe observation camera 32 has moved to each shooting position, not only the encoder but also any other configuration can be applied.

FIG. 5 is a diagram showing an example of an imaging position of the probe 30 by the probe observation camera 32. As shown in FIG. 5, in the probe alignment in the present embodiment, the probe observation camera 32 is rotationally moved around the rotation axis C by the rotational movement of the linear motion tilt stage 18, and the probe observation is centered on the rotation axis C. The probe 30 is photographed by the probe observation camera 32 at a predetermined imaging position (circumferential position) on the rotation trajectory K of the camera 32. Specifically, the probe 30 is photographed by the probe observation camera 32 at four imaging positions P1 to P4 that are 90 degrees apart from each other on the rotation trajectory K of the probe observation camera 32 centered on the rotation axis C. It is said.

As for the planar (XY plane) positional relationship of the four shooting positions P1 to P4, the first shooting position P1 and the third shooting position P3 are mutual in the first direction (Y direction) among the two directions orthogonal to each other. They are opposite positions. Further, the second shooting position P2 and the fourth shooting position P4 are positions facing each other in the second direction (X direction).

In the present embodiment, the direction in which the probe 30 is photographed by the probe observation camera 32 from the four imaging positions P1 to P4 is the X direction or the Y direction, and the probe linear motion tilting mechanism 28 controls the probe 30 to linearly or tilt. It is in the same direction as the direction (movement axis direction).

In the present embodiment, as one of the preferred embodiments, the first direction (Y direction) in which the first shooting position P1 and the third shooting position P3 face each other, and the second shooting position P2 and the fourth shooting position P4 are Although the opposite second direction (X direction) coincides with the control direction of the probe linear motion tilting mechanism 28, the present invention is not necessarily limited to this aspect. For example, the direction may be different from the control direction of the probe linear motion tilting mechanism 28, or the first direction and the second direction may not be orthogonal to each other. However, according to this embodiment, the relative deviation between the probe 30 and the rotation axis C can be easily and easily detected independently in each direction, which is preferable.

Returning to FIG. 3, when it is determined that the imaging of the probe 30 by the probe observation camera 32 is completed at all the imaging positions (Yes in step S16), the relative deviation detecting unit 56 is for probe observation at each imaging position. Based on the captured image captured by the camera 32, the relative deviation between the probe 30 and the rotation axis C is detected (step S18).

Here, the detection of the relative deviation between the probe 30 and the rotation axis C will be described in detail.

FIG. 6 is a diagram showing an example of captured images captured by the probe observation camera 32 at the respective imaging positions P1 to P4. In FIG. 6, the first captured image 100A is a captured image captured at the first capture position P1, the second capture image 100B is the second capture position P2, and the third capture image 100C is the third image. The shooting position P3 and the fourth shot image 100D are shot images taken at the fourth shooting position P4, respectively.

When there is a relative deviation between the probe 30 and the rotation axis C, for example, as shown in FIG. 6, in the captured images 100A to 100D captured by the probe observation cameras 32 at the respective imaging positions P1 to P4, the imaging position (that is, that is). The posture (position and inclination) of the probe 30 differs depending on the difference in the imaging direction of the probe 30 by the probe observation camera 32.

For example, the first shooting taken from one of the two shooting positions (first shooting position P1 and third shooting position P3) facing each other in the first direction (Y direction) (first shooting position P1). In the image 100A, the probe 30A is tilted to one side in the second direction (X direction), whereas in the third captured image 100C captured from the other imaging position (third imaging position P3), the probe 30C is It is tilted to the other side of the second direction (X direction). Further, the positions in the second direction (X direction) are also displaced toward the opposite sides.

The same applies to the second captured image 100B and the fourth captured image 100D at the two imaging positions (second imaging position P2 and fourth imaging position P4) facing each other in the second direction (X direction), respectively, and the probe 30B, The positions and tilts of 30D are offset from each other.

FIG. 7 is a composite of the first captured image 100A and the third captured image 100C captured from two imaging positions (first imaging position P1 and third imaging position P3) facing each other in the first direction (Y direction). It is a figure which showed the 1st composite image 102A.

As shown in FIG. 7, in the first composite image 102A in which the first captured image 100A and the third captured image 100C are combined, the central axis (first probe central axis) L1 of the probe 30A in the first captured image 100A and The first midline ML1 between the central axis (third probe central axis) L3 of the probe 30C in the third captured image 100C is from the position of the rotation axis C in the XZ plane (that is, from the first direction (Y direction)). The position of the rotation axis C when the probe 30 is viewed) is shown. The first center line ML1 is a straight line passing through the center of the first probe central axis L1 and the third probe central axis L3 in the horizontal direction (X direction) in the vertical direction (Z direction) in the first composite image 102A. say. In other words, in the first composite image 102A, the straight line that divides the space between the first probe central axis L1 and the third probe central axis L3 into two equal parts in the left-right (X direction) is called the first median line ML1.

The first center line ML1 in the first composite image 102A indicates the position of the rotation axis C. That is, the first center line ML1 indicates a line that is a movement target of the probe 30 in the first composite image 102A (in the XZ plane), and the posture of the probe 30 so that the probe 30 coincides with the first center line ML1. By adjusting (position and inclination), it is possible to eliminate the relative deviation between the rotation axis C and the probe 30 in the XZ plane.

FIG. 8 is a composite of the second captured image 100B and the fourth captured image 100D captured from two imaging positions (second imaging position P2 and fourth imaging position P4) facing each other in the second direction (X direction). It is a figure which showed the composite image 102B.

As shown in FIG. 7, in the second composite image 102B in which the second captured image 100B and the fourth captured image 100D are combined, the central axis (second probe central axis) L2 of the probe 30B in the second captured image 100B The second midline ML2 between the probe 30D and the central axis (fourth probe central axis) L4 in the fourth captured image 100D is from the position of the rotation axis C in the YZ plane (that is, from the second direction (X direction)). The position of the rotation axis C when the probe 30 is viewed) is shown. The second center line ML2 is a straight line passing through the center of the second probe central axis L2 and the fourth probe central axis L4 in the horizontal direction (X direction) in the vertical direction (Z direction) in the second composite image 102B. say. In other words, in the second composite image 102B, the straight line that divides the space between the second probe central axis L2 and the fourth probe central axis L4 into two equal parts in the left-right (X direction) is called the second center line ML2.

The second center line ML2 in the second composite image 102B indicates the position of the rotation axis C. That is, the second center line ML2 shows a line that is a movement target of the probe 30 in the second composite image 102B (in the YZ plane), and the posture of the probe 30 so that the probe 30 coincides with the second center line ML2. By adjusting (position and inclination), it is possible to eliminate the relative deviation between the rotation axis C and the probe 30 in the YZ plane.

Therefore, based on the captured images taken by the probe observing camera 32 at the four imaging positions P1 to P4 that are 90 degrees apart from each other on the rotation trajectory K of the probe observing camera 32 centered on the rotation axis C, the above-mentioned 2 By calculating the two midlines ML1 and ML2, the rotation axis C (rotation center) that is the movement target of the probe 30 can be detected, and the relative deviation between the rotation axis C and the probe 30 can be determined in each direction (X direction and the probe 30). (Y direction) It is possible to adjust independently.

Therefore, in the probe alignment of the present embodiment, the relative deviation detecting unit 56 uses one of the two probes 30 as a reference probe (first imaging in this example) in the first composite image 102A shown in FIG. In the case of the probe 30A) in the image 100A, the tilt angle (rotation angle centered on the Y direction) for making the probe center axis of the reference probe parallel to the first center line ML1 is detected as the tilt movement amount θ. At the same time, when the probe center axis of the reference probe is tilted by the amount of tilt movement θ and parallel to the first center line ML1, the X direction required to align the probe center axis of the reference probe with the first center line ML1. The movement distance of is detected as the linear movement amount Dx. The linear motion movement amount Dx corresponds to the distance in the direction along the movement axis in the X direction of the probe linear motion tilting mechanism 28 (see FIG. 7).

Further, in the second composite image 102B shown in FIG. 8, the relative deviation detecting unit 56 uses one of the two probes 30 as a reference probe (in this example, the probe 30B in the second captured image 100B). In this case, the tilt angle (rotation angle centered on the X direction) for making the probe center axis of the reference probe parallel to the second median line ML2 is detected as the tilt movement amount φ, and the probe center axis of the reference probe is detected. Is tilted by the amount of tilted movement φ to be parallel to the second center line ML2, and the movement distance in the Y direction required to match the probe central axis of the reference probe with the second center line ML2 is the amount of linear motion. Detect as Dy. The linear motion movement amount Dy corresponds to the distance in the direction along the movement axis in the Y direction of the probe linear motion tilting mechanism 28 (see FIG. 8).

The relative deviation detection unit 56 performs known image processing such as edge extraction to perform probe central axes C1 to C4, center lines ML1, ML2, linear motion movement amounts Dx, Dy, and tilt movement from the composite images 102A and 102B. It is possible to calculate the quantities θ and φ.

In this way, when the relative deviation detection unit 56 detects the relative deviation between the probe 30 and the rotation axis C independently in each direction based on the captured image captured by the probe observation camera 32 at each imaging position (step S18). , The probe attitude control unit 58 controls the probe linear motion tilt mechanism 28 based on the result detected by the relative deviation detection unit 56. Specifically, the probe attitude control unit 58 controls the probe linear motion tilting mechanism 28 to move the probe 30 by the linear motion movement amount Dx in the X direction and the linear motion movement amount Dy in the Y direction. In addition, the tilt movement amount φ is tilted around the X direction and the tilt movement amount θ is tilted around the Y direction (step S20, an example of the “adjustment step”). The direction (direction) for moving or tilting the probe linear motion tilting mechanism 28 is determined according to which probe is used as the reference probe in the composite images 102A and 102B shown in FIG. 7 or FIG.

As described above, when the probe attitude control unit 58 controls the probe linear motion tilt mechanism 28 to change the attitude of the probe 30 based on the result detected by the relative deviation detection unit 56, the probe is probed in three-dimensional space. There is no relative deviation between 30 and the rotation axis C. This is the end of this flowchart.

<Work alignment>
In the probe alignment described above, the focus of the probe observation camera 32 is performed by adjusting the position and inclination of the linear motion tilting stage 18 in the horizontal direction (X direction and Y direction). Therefore, if the central axis of the work W is aligned with the rotation axis C (work alignment) before the probe alignment is performed, the linear motion tilting stage 18 moves with the focusing of the probe observation camera 32. As a result, a relative deviation may occur between the rotation axis C and the center of the work W. Therefore, in the present embodiment, it is preferable that the work alignment described later is performed after the probe alignment is performed.

In the work alignment in the present embodiment, the work W supported and fixed to the linear tilting stage 18 by the rotational movement of the rotating body 16 is rotationally moved around the rotation axis C, and the work W is photographed by the work observation camera 34. conduct. At this time, the work observation camera 34 is placed at two positions displaced by 180 degrees in the circumferential direction (rotational direction of the work W) about the rotation axis C (that is, two positions facing each other about the rotation axis C). ), Take a picture of the work W when moving to each.

9 and 10 are diagrams for explaining work alignment. Note that FIG. 9 is a diagram showing an example of captured images taken by the work observation camera 34 at two positions facing each other about the rotation axis C. In FIG. 9, the first captured image 104A is a captured image captured at the first rotation position (for example, 0 degree position), and the second captured image 104B is a photograph captured at the second rotation position (for example, 180 degree position). It is an image. Further, FIG. 10 is a diagram showing a composite image 106 obtained by synthesizing the first captured image 104A and the second captured image 104B captured at two rotational positions facing each other about the rotation axis C.

When the center of the work W and the rotation axis C do not match (when there is an eccentric deviation), the position of the work W with respect to the rotation axis C is in the circumferential direction (the rotation direction of the work W about the rotation axis C). Change. At this time, for example, as shown in FIG. 9, in the first captured image 104A captured at the first rotation position, the work W1 is arranged at a position eccentric to one side of the rotation axis C in the X direction and the Y direction, respectively. On the other hand, in the second shot image 104B taken at the second rotation position, which is a position 180 degrees away from the first rotation position, the work W2 is in the X direction with respect to the work W1 in the first shot image 104A. It is arranged at a position eccentric to the other side in the Y direction (the side opposite to the above one side). That is, the work W1 of the first captured image 104A and the work W2 of the second captured image 104B are in a point-symmetrical positional relationship about the rotation axis C.

As shown in FIG. 10, in the composite image 106 obtained by combining the first captured image 104A and the second captured image 104B, the center O1 of the work W1 in the first captured image 104A and the center of the work W2 in the second captured image 104B. The midpoint of the line segment connecting O2 indicates the position of the rotation axis C in the XY plane. That is, the midpoint (rotation axis C) indicates a position that is a movement target of the center of the work W in the composite image 106 (in the XY plane), and the center of the work W (O1 or O2) is at the midpoint. By moving the linear motion tilting stage 18 in the horizontal direction (X direction and Y direction) so as to match, it is possible to eliminate the eccentric deviation between the rotation axis C and the center of the work W in the XY plane. As shown in FIG. 10, the movement distances (linear movement amount) Ex and Ey in the X and Y directions required to align the center of the work W with the rotation axis C are the center of the work W and the rotation axis. It can be obtained as the distance from C in each direction.

As described above, in the work alignment of the present embodiment, the position of the rotation axis C (rotation center) which is the movement target of the work W from the captured image (work image) obtained by the work observation camera 34 at each rotation position. Can be detected. In other words, the eccentricity shift of the center of the work W with respect to the rotation axis C can be detected based on the two captured images taken by the work observation camera 34.

Then, by moving the linear motion tilting stage 18 in the horizontal direction (X direction and Y direction) based on the eccentricity deviation detected in this way, the center of the work W can be aligned with the rotation axis C. The work alignment control unit (not shown) of the control device 50 controls each unit related to the work alignment. Further, the work observation camera 34 may capture a plurality of still images at each rotation position, or may capture a moving image of the work W while it is rotating and moving.

In the work alignment of the present embodiment, captured images taken at two rotation positions facing each other in the circumferential direction centered on the rotation axis C are used, but the rotation axis C (the rotation axis C) which is the movement target of the work W ( As long as the position of the rotation center) can be detected, the present invention is not limited to this, and captured images taken at at least three rotation positions in the circumferential direction about the rotation axis C may be used. .. In this case, since the range in which the work observation camera 34 rotates and moves can be limited to a partial range, the work alignment can be efficiently executed in a shorter time.

By performing the probe alignment and the work alignment as described above, it is possible to eliminate the relative deviation between the rotation axis C, the probe 30, and the center of the work W. As a result, when measuring the inner surface shape of the fine hole H of the work W, the probe 30 does not collide with a portion other than the fine hole H of the work W, and the inner surface shape of the fine hole H is measured stably and reliably. Is possible.

<Calibration of probe linear motion tilt mechanism>
Next, the calibration of the linear motion movement amount and the tilt movement amount in the probe linear motion tilt mechanism 28 will be described.

In the inner surface shape measuring machine 10 of the present embodiment, if the relative position between the center of the work W and the rotation axis C or the rotation position of the work W changes for each measurement operation, the measurement accuracy is affected. Therefore, the linear motion tilting stage 18 and the high-precision rotation mechanism 14 are required to have high precision.

Further, in order to perform the above-mentioned probe alignment with high accuracy, it is desirable that the probe linear motion tilting mechanism 28 also has a high accuracy. However, when the probe linear motion tilt mechanism 28 is equipped with a high-precision scale or a high-resolution encoder, the cost increase due to the addition of wiring to the moving part in the probe linear motion tilt mechanism 28 and the accuracy of the drive unit due to the wiring are adversely affected. May give. Further, since a heating element is added in the vicinity of the measuring portion (scale) in the probe linear motion tilting mechanism 28, it becomes a factor that causes deterioration of accuracy due to a temperature change.

Therefore, in the present embodiment, the probe linear motion tilting mechanism 28 is calibrated as follows in order to enable accurate probe alignment without being affected by the accuracy of the probe linear motion tilting mechanism 28. It is preferable to be

FIG. 11 is a diagram for explaining a method of calibrating the linear motion movement amount of the probe linear motion tilt mechanism 28. Note that FIG. 11 is a side view showing a configuration of a main part when the inner surface shape measuring machine 10 is viewed from the X direction. In FIG. 11, 204A is a diagram showing a state when the linear motion tilt stage 18 is in the initial position, and 204B is a shift position in which the linear motion tilt stage 18 is moved by a specified amount in the Y direction from the initial position. It is a figure which showed the state at a certain time. Reference numeral S indicates the field of view of the probe observation camera 32 (the same applies to FIG. 12).

In calibrating the linear motion amount of the probe linear motion tilt mechanism 28, first, by operating the high-precision rotation mechanism 14, the linear motion tilt stage 18 is rotated around the rotation axis C, and the linear motion tilt stage 18 is rotated. The moving axis direction of the probe is aligned with the moving axis direction (X direction and Y direction) of the probe linear motion tilting mechanism 28.

Next, as shown in 204A of FIG. 11, the probe 30 is photographed by the probe observation camera 32 in a state where the linear motion tilt stage 18 is in the initial position.

After that, as shown in 204B of FIG. 11, the linear motion tilting stage 18 is moved to a shift position separated by a predetermined amount in the Y direction from the initial position. At this time, since the probe observation camera 32 is supported by the linear motion tilt stage 18 via the camera bracket 36, the probe observation camera 32 also moves by a specified amount in the Y direction together with the linear motion tilt stage 18. do. As a result, the field of view S of the probe observation camera 32 moves from the position indicated by the alternate long and short dash line to the position indicated by the solid line.

Next, the probe 30 is photographed by the probe observation camera 32 in a state where the linear motion tilt stage 18 is in the shift position. At this time, the captured image (shift image) of the probe 30 taken by the probe observation camera 32 is the captured image (reference image) taken by the probe observation camera 32 and the probe when the linear motion tilt stage 18 is in the initial position. The probe 30 is moved in the Y direction by the probe linear motion tilting mechanism 28 so that the positions of 30 are the same.

When the position of the probe 30 is the same in the reference image and the shift image, the probe linear tilt mechanism 28 has moved by the amount of linear motion in which the linear tilt stage 18 has moved from the initial position to the shift position. .. The same applies to the amount of linear motion in the X direction.

Therefore, by obtaining the correspondence relationship between the linear movement amount of the linear movement inclination stage 18 and the linear movement amount of the probe linear movement inclination mechanism 28 in each direction (X direction and Y direction), the correspondence relationship can be obtained. Based on this, it is possible to calibrate the linear motion amount of the probe linear motion tilting mechanism 28. As a result, the probe linear motion tilting mechanism 28 can also secure the same accuracy as the linear motion tilting stage 18.

FIG. 12 is a diagram for explaining a method of calibrating the tilting movement amount of the probe linear motion tilting mechanism 28. Note that FIG. 12 is a side view showing a configuration of a main part when the inner surface shape measuring machine 10 is viewed from the X direction. In FIG. 12, 206A is a diagram showing a state when the linear motion tilt stage 18 is in the initial position, and 206B is a diagram when the linear motion tilt stage 18 is tilted by a specified amount in the X direction from the initial position. FIG. 206C is a diagram showing a state when the probe 30 is further tilted in the X direction by the probe linear motion tilting mechanism 28.

In calibrating the tilting movement amount of the probe linear motion tilting mechanism 28, as shown in 206A of FIG. 12, the rotation center of the linear motion tilting stage 18 and the rotation center of the probe linear motion tilting mechanism 28 are made to coincide with each other. In FIG. 12, the position indicated by the reference numeral M is the rotation center of the linear motion tilt stage 18 and the probe linear motion tilt mechanism 28.

Next, as shown in 206A of FIG. 12, the probe 30 is photographed by the probe observation camera 32 in a state where the linear motion tilt stage 18 is in the initial position.

After that, as shown in 206B of FIG. 12, the linear motion tilt stage 18 is moved to a shift position tilted by a specified amount in the X direction. At this time, since the probe observation camera 32 is supported by the linear motion tilt stage 18 via the camera bracket 36, the probe observation camera 32 is also integrated with the linear motion tilt stage 18 by a specified amount in the X direction. Tilt. As a result, the field of view S of the probe observation camera 32 moves from the position indicated by the alternate long and short dash line to the position indicated by the solid line.

Next, the probe 30 is photographed by the probe observation camera 32 in a state where the linear motion tilt stage 18 is in the shift position. At this time, the captured image (shift image) of the probe 30 taken by the probe observation camera 32 is the captured image (reference image) taken by the probe observation camera 32 and the probe when the linear motion tilt stage 18 is in the initial position. The probe 30 is tilted in the X direction by the probe linear motion tilting mechanism 28 so that the positions of the 30s are the same.

When the position of the probe 30 is the same in the reference image and the shift image, the probe linear motion tilt mechanism 28 is tilted by the amount of tilt movement in which the linear motion tilt stage 18 is tilted from the initial position to the shift position. The same applies to the amount of tilted movement around the Y direction.

Therefore, by obtaining the correspondence between the tilt movement amount of the linear motion tilt stage 18 and the tilt movement amount of the probe linear motion tilt mechanism 28 in each direction (X direction and Y direction), based on the correspondence relationship, It is possible to calibrate the amount of tilt movement of the probe linear motion tilt mechanism 28. As a result, the probe linear motion tilting mechanism 28 can also secure the same accuracy as the linear motion tilting stage 18.

As described above, according to the present embodiment, the accuracy equivalent to that of the linear motion tilting stage 18 can be ensured without being affected by the accuracy of the probe linear motion tilting mechanism 28, so that a high-precision position such as a scale or an encoder can be secured. The detector becomes unnecessary, and the cost and space of the probe linear motion tilting mechanism 28 can be reduced. In addition, it is possible to prevent a decrease in alignment accuracy due to heat generated from the probe linear motion tilting mechanism 28.

<Effect>
According to the probe alignment in the present embodiment, the probe observation camera 32 has the probe 30 at four imaging positions P1 to P4 that are 90 degrees apart from each other on the rotation trajectory K of the probe observation camera 32 centered on the rotation axis C. The relative deviation between the probe 30 and the rotation axis C can be detected independently in each direction (X direction and Y direction) based on the four captured images 100A to 100D. As a result, the posture (position and tilt) of the probe 30 can be controlled independently in each direction by the probe linear motion tilt mechanism 28, and the relative deviation between the probe 30 and the rotation axis C can be eliminated with higher accuracy. It becomes possible. Therefore, for example, even when the small hole H of the work W is an extremely small diameter hole having an inner diameter of about 140 μm and the probe 30 is an extremely small diameter probe having an outer diameter of about 80 μm, probe alignment can be performed accurately and easily. Therefore, the probe 30 does not collide with a portion of the work W other than the fine hole H, and the inner surface shape of the fine hole H can be measured stably and reliably.

In particular, in the present embodiment, since the probe observation camera 32 is connected to the linear motion tilt stage 18 via the camera bracket 36, the linear motion tilt stage 18 is used in the focusing of the probe observation camera 32 described above. It can be used to align the focus of the probe observation camera 32 with the rotation axis C. Therefore, since it is not necessary to separately provide a focus adjustment mechanism for focusing the probe observation camera 32, it is possible to achieve both cost reduction and space saving, and to improve the rotation accuracy by reducing the load.

Further, according to the probe alignment of the present embodiment, the captured images taken from a plurality of different directions are relatively compared by using the probe observation camera 32 that rotates and moves integrally with the linear motion tilt stage 18. By doing so, the position of the rotation axis C (rotation center) which is the movement target of the probe 30 is detected. Therefore, for example, the probe observation camera 32 is attached in a state of being displaced in a predetermined direction with respect to the camera bracket 36, and the relative positional relationship between the probe observation camera 32 and the rotation axis C is displaced. Even in such a case, the relative alignment between the probe 30 and the rotation axis C can be performed with high accuracy, and the mounting accuracy of the probe observation camera 32 becomes unnecessary.

Further, in the probe alignment of the present embodiment, since the relative position of the probe observation camera 32 and the probe 30 is changed in the circumferential direction centered on the rotation axis C, the position of the rotation axis C is not correct. Even if it is clear or the rotation axis C is tilted, the relative alignment between the probe 30 and the rotation axis C is accurately performed from the images taken by the probe observation camera 32 at each shooting position P1 to P4. It is possible.

Further, according to the calibration method of the probe linear motion tilting mechanism 28 in the present embodiment, the probe linear motion tilting mechanism 28 (linear motion) is based on the movement amount (linear motion movement amount and tilting movement amount) of the linear motion tilting stage 18. Since the movement amount and the tilt movement amount) can be calibrated, the accuracy equivalent to that of the linear motion tilt stage 18 can be ensured without being affected by the accuracy of the probe linear motion tilt mechanism 28. Therefore, the probe linear motion tilting mechanism 28 does not require a high-precision position detector such as a scale or an encoder, and the cost and space of the probe linear motion tilting mechanism 28 can be reduced. In addition, it is possible to prevent a decrease in alignment accuracy due to heat generated from the probe linear motion tilting mechanism 28.

<Modification example>
In the probe alignment of the present embodiment, the probe observation camera 32 photographs the probe 30 at four imaging positions P1 to P4 that are 90 degrees apart from each other on the rotation trajectory K of the probe observation camera 32 centered on the rotation axis C. The relative deviation between the probe 30 and the rotation axis C is detected independently in each direction based on the four captured images 100A to 100D, but the rotation axis C is not limited to this, for example, as shown in FIG. The probe 30 may be photographed by the probe observation camera 32 from at least three imaging positions on the rotation trajectory K of the probe observation camera 32 at the center.

That is, if the relative deviation between the probe 30 and the rotation axis C can be detected independently in each direction, the probe 30 may be imaged by the probe observation camera 32 from at least three directions around the rotation axis C. .. In this case, the probe 30 and the rotation axis are relatively compared with the captured images captured by the probe observation camera 32 at each imaging position in relation to the position information (rotation angle, rotation radius, etc.) related to each imaging position. It is possible to detect the relative deviation from C independently in each direction. Then, based on the detected relative deviation, the posture of the probe 30 can be independently controlled in each direction by the probe linear motion tilting mechanism 28. As a result, the relative deviation between the probe 30 and the rotation axis C can be eliminated.

Further, as shown in FIG. 14, the probe observation camera 32 may continuously photograph the probe 30 at regular imaging intervals while rotating the probe observation camera 32 by the rotational movement of the linear motion tilt stage 18. .. In this case, since a large number of captured images can be used, probe alignment can be performed with high accuracy. Further, by continuously photographing the probe 30 while the probe observation camera 32 rotates and moves, the range in which the probe observation camera 32 rotates and moves can be limited to a part of the range, so that the time is shorter. It is also possible to perform probe alignment efficiently.

[Second Embodiment]
FIG. 15 is a schematic view showing the configuration of the inner surface shape measuring machine 10B of the second embodiment. As shown in FIG. 13, the inner surface shape measuring machine 10B of the second embodiment faces the probe observation camera 32 with the rotation axis C interposed therebetween, in addition to the configuration of the inner surface shape measuring machine 10 of the first embodiment. The lighting device 38 is provided at the position.

The lighting device 38 is attached to the linear motion tilting stage 18 via the bracket 40 for the lighting device, and can rotate around the rotation axis C integrally with the linear motion tilting stage 18. The lighting device 38 is a surface emitting lighting device capable of emitting light. The lighting device 38 is an example of a "surface emitting lighting means".

According to the second embodiment, when the probe observation camera 32 takes a picture of the probe 30 while rotating the probe observation camera 32 around the rotation axis C together with the linear motion tilt stage 18, the illumination device 38 uses the probe. It rotates around the rotation axis C together with the linear motion tilting stage 18 at a position facing the observation camera 32. Therefore, since the probe 30 is photographed by the probe observation camera 32 while the relative positional relationship between the probe observation camera 32 and the lighting device 38 is maintained, it is the same regardless of the imaging position of the probe observation camera 32. It becomes possible to photograph the probe 30 under the illumination conditions. As a result, it is possible to prevent a decrease in detection accuracy due to a difference in lighting conditions, and it is possible to perform probe alignment with higher accuracy. The lighting device 38 is preferably surface-emitting illumination, but is not necessarily limited to surface-emitting illumination.

[Third Embodiment]
FIG. 16 is a schematic view showing a configuration of a main part of the inner surface shape measuring machine of the third embodiment. In FIG. 16, 200A, 200B, and 200C are a front view of the probe 30 and the two line sensor cameras 70 and 72 seen from the Y direction, a side view seen from the X direction, and a bottom view seen from the Z direction, respectively. Is.

In each of the above-described embodiments, the area sensor camera is used as the probe observation camera 32, but the third embodiment is different in that two line sensor cameras (one-dimensional sensor cameras) 70 and 72 are used. There is.

As shown in FIG. 16, the two line sensor cameras 70 and 72 are cameras that capture a linear (line-shaped) region extending in the horizontal direction (Y direction in FIG. 16) perpendicular to the Z direction, respectively. .. The two line sensor cameras 70 and 72 are parallel to each other and are arranged at predetermined intervals in the Z direction. Further, the two line sensor cameras 70 and 72 are attached to the linear motion tilting stage 18 (see FIG. 1) via the line sensor camera bracket (not shown), similarly to the probe observation camera 32 of the first embodiment. Has been done.

Further, a lighting device 74 is provided at a position facing the two line sensor cameras 70 and 72. The probe 30 is arranged between the two line sensor cameras 70 and 72 and the illuminating device 74. Similar to the second embodiment, the lighting device 74 is attached to the linear motion tilting stage 18 (see FIG. 1) via a bracket (not shown) for the lighting device. Further, as the illuminating device 74, a illuminating device capable of surface emission is preferably used, but the illuminating device 74 is not necessarily limited to surface emission.

In the third embodiment, the probe observation camera 32 is rotated around the rotation axis C together with the linear motion tilt stage 18, and at least three imaging positions (preferably four, which are offset by 90 degrees in the rotation direction). The probe 30 is photographed by the two line sensor cameras 70 and 72 at the imaging position). Then, by analyzing the captured images captured by the two line sensor cameras 70 and 72 at each imaging position, it is possible to calculate the position of the probe 30 in the imaging region of each of the line sensor cameras 70 and 72. Therefore, by combining the captured images captured by the two line sensor cameras 70 and 72 at each imaging position, information equivalent to the images captured by the probe observation camera 32 of the first embodiment (probe posture information) can be obtained. , It is possible to detect the relative deviation between the probe 30 and the rotation axis C. Therefore, as in the first embodiment, it is possible to perform probe alignment with high accuracy.

Further, in the third embodiment, as in the second embodiment, the lighting device 74 is provided at a position facing the two line sensor cameras 70 and 72, and the two line sensor cameras 70 and 72 and the lighting are provided. With the probe 30 arranged between the device 74 and the linear motion tilting stage 18, the two line sensor cameras 70 and 72 and the lighting device 74 are configured to be rotatable around the rotation axis C. .. Therefore, since the probe 30 is photographed by the two line sensor cameras 70 and 72 while the relative positional relationship between the two line sensor cameras 70 and 72 and the lighting device 74 is maintained, the two line sensor cameras 70, The probe 30 can be photographed under the same illumination conditions regardless of the photographing position of 72. As a result, it is possible to prevent a decrease in detection accuracy due to a difference in lighting conditions, and it is possible to easily perform probe alignment with high accuracy.

[Fourth Embodiment]
FIG. 17 is a schematic view showing a configuration of a main part of the inner surface shape measuring machine of the fourth embodiment. In FIG. 17, 300A, 300B, and 300C are a front view of the probe 30 and the two line sensor cameras 70 and 72 seen from the Y direction, a side view seen from the X direction, and a bottom view seen from the Z direction, respectively. Is.

In the third embodiment, the lighting device 74 (see FIG. 16) is provided at a position facing the two line sensor cameras 70 and 72, whereas in the fourth embodiment, the line laser light sources 76 and 78 are provided. The difference is that they are provided above the line sensor cameras 70 and 72, respectively.

The line laser light sources 76 and 78 irradiate the line-shaped imaging regions of the corresponding line sensor cameras 70 and 72 with the line lasers (line-shaped laser beams) R1 and R2, respectively. The line laser light sources 76 and 78 are attached to the linear motion tilt stage 18 (see FIG. 1) together with the line sensor cameras 70 and 72 via a bracket for the line sensor camera (not shown), and are integrated with the linear motion tilt stage 18. And can rotate around the rotation axis C.

In the fourth embodiment, as in the third embodiment, the images captured by the probe observation camera 32 of the first embodiment are captured by combining the captured images captured by the two line sensor cameras 70 and 72 at each imaging position. The same information (probe attitude information) as above can be obtained, and it is possible to detect the relative deviation between the probe 30 and the rotation axis C. Therefore, as in the first embodiment, the probe alignment can be performed accurately and easily.

Further, in the fourth embodiment, the probe 30 is photographed by the two line sensor cameras 70 and 72 while the relative positional relationship between the two line sensor cameras 70 and 72 and the two line laser light sources 76 and 78 is maintained. Therefore, it is possible to shoot the probe 30 under the same lighting conditions regardless of the shooting positions of the two line sensor cameras 70 and 72.

In FIG. 17, the configuration in which the two line laser light sources 76 and 78 are arranged above the line sensor cameras 70 and 72, respectively, is shown as an example, but the line lasers are located in the imaging regions of the line sensor cameras 70 and 72, respectively. The positions where the two line laser light sources 76 and 78 are arranged are not particularly limited as long as they can irradiate the laser.

[Fifth Embodiment]
FIG. 18 is a schematic view showing a configuration of a main part of the inner surface shape measuring machine of the fifth embodiment. Note that FIG. 18 is a front view of the probe 30 and the two optical ranging sensors 80 and 82 as viewed from the Y direction.

In each of the above embodiments, as an acquisition means for acquiring probe attitude information for detecting the relative deviation between the probe 30 and the rotation axis C, an imaging device (area sensor camera or line) that photographs the probe 30 from each imaging position. (Sensor camera) is used, whereas in the fifth embodiment, two optical ranging sensors 80 and 82 that measure the distance using light are used.

As shown in FIG. 18, the two optical ranging sensors 80 and 82 are arranged at predetermined intervals in the Z direction, and are attached to the linear motion tilting stage 18 via a bracket (not shown). The two optical distance measuring sensors 80 and 82 measure the distance by emitting light and detecting the reflected light. The two optical distance measurement sensors 80 and 82 are sensors based on triangular distance measurement, and are, for example, a PSD (Position Sensitive Detector) method, a CMOS (Complementary Metal-Oxide Semiconductor) method, or a CCD (Charge Coupled Device) method. Things are applicable. Since the detection principle of the triangular ranging method is known, the description thereof will be omitted here.

According to the fifth embodiment, at least three measurement positions (preferably 90 degrees in the rotation direction) while rotating the two optical distance measurement sensors 80 and 82 around the rotation axis C together with the linear motion tilt stage 18. The distance to the probe 30 is measured by the two optical ranging sensors 80 and 82 at the four measurement positions shifted from each other. Then, by analyzing the relationship between the distances measured by the two optical ranging sensors 80 and 82 and each measurement position at each measurement position, information equivalent to the image taken by the probe observation camera 32 of the first embodiment is obtained. (Probe attitude information) is obtained, and it is possible to detect the relative deviation between the probe 30 and the rotation axis C. Therefore, as in the first embodiment, the probe alignment can be performed accurately and easily.

In the fifth embodiment, the acquisition means for acquiring the probe attitude information for detecting the relative deviation between the probe 30 and the rotation axis C is an example other than the photographing device (area sensor camera or line sensor camera). The case where two optical ranging sensors 80 and 82 are used is shown as an example, but any one that can acquire probe attitude information for detecting the relative deviation between the probe 30 and the rotation axis C is sufficient. For example, a laser type, an LED (Light Emitting Diode) type, an ultrasonic type, a vortex current type length measuring sensor, or the like may be applied.

[Application example]
According to each of the above embodiments, the posture (position and inclination) of the probe 30 with respect to the rotation axis C can be detected. Therefore, not only the probe 30 can be aligned with the rotation axis C, but also the probe 30 can be adjusted to a position tilted by a required angle. For example, as shown in FIG. 19, when measuring a tapered surface in which the inner surface of the small hole H is inclined with respect to the rotation axis C, the probe angle (inclination angle of the probe 30) follows the inclination angle (taper angle) of the tapered surface. ) Can be set. As a result, for example, when a non-contact probe is used, the measurement light emitted from the probe 30 is irradiated from the normal direction orthogonal to the tapered surface (measured surface), so that the measurement is more sensitive and accurate. Is possible. Further, as shown in FIG. 20, it is possible to accurately calculate the difference in the measurement target position depending on the posture of the probe 30.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples, and it goes without saying that various improvements and modifications may be made without departing from the gist of the present invention. ..

10 ... Inner surface shape measuring machine, 12 ... Main body base, 14 ... High precision rotating mechanism, 16 ... Rotating body, 18 ... Linear tilt stage, 20 ... Column, 22 ... Carriage, 24 ... Arm, 26 ... Displacement detector, 28 ... Probe linear tilt mechanism, 30 ... Probe, 32 ... Probe observation camera, 34 ... Work observation camera, 36 ... Camera bracket, 38 ... Lighting device, 40 ... Lighting device bracket, 50 ... Control device, 52 ... Probe alignment control unit, 54 ... Imaging control unit, 56 ... Relative deviation detection unit, 58 ... Probe attitude control unit, 70, 72 ... Line sensor camera, 74 ... Lighting device, 76, 78 ... Line laser light source, 80, 82 ... Optical ranging sensor, 100A ... 1st captured image, 100B ... 2nd captured image, 100C ... 3rd captured image, 100D ... 4th captured image, 102A ... 1st composite image, 102B ... 2nd composite image, W ... Work , P1 ... 1st shooting position, P2 ... 2nd shooting position, P3 ... 3rd shooting position, P4 ... 4th shooting position, C ... rotation axis, K ... rotation trajectory

Claims (9)

An inner surface shape measuring machine that measures the inner surface shape of small holes formed in a work.
A rotation mechanism for rotating the work around a rotation axis,
A linear motion tilting stage on which the work is placed, which can rotate around the rotation axis by the rotation mechanism, and can linearly move and tilt in the first direction and the second direction orthogonal to the rotation axis. With a linear tilt stage,
A probe having an elongated shape that can be inserted into the small hole and detecting the inner surface shape of the small hole,
An adjusting means capable of adjusting the posture of the probe and
An acquisition means that is connected to the linear motion tilting stage via a connecting member and acquires probe posture information from at least three circumferential positions on a rotation trajectory centered on the rotation axis.
A control means for adjusting the posture of the probe by the adjusting means based on the probe posture information acquired by the acquiring means, and a control means for adjusting the posture of the probe.
Inner surface shape measuring machine equipped with. The adjusting means is a probe linear motion tilting mechanism capable of linearly moving and tilting the probe in the first direction and the second direction.
The inner surface shape measuring machine according to claim 1. The control means adjusts the posture of the probe by the adjusting means so that the relative deviation between the probe and the rotation axis is eliminated.
The inner surface shape measuring machine according to claim 1 or 2. The acquisition means acquires the probe attitude information from four circumferential positions displaced by 90 degrees from each other on the rotation orbit.
The inner surface shape measuring machine according to any one of claims 1 to 3. The acquisition means includes a camera that captures the probe.
The inner surface shape measuring machine according to any one of claims 1 to 4. Further provided is a surface emitting illumination means which is configured to be rotatable integrally with the linear motion tilting stage and can emit surface light toward the probe from a position facing the camera.
The inner surface shape measuring machine according to claim 5. It is an alignment method of an inner surface shape measuring machine that measures the inner surface shape of a small hole formed in a work.
The inner surface shape measuring machine is a rotation mechanism for rotating the work around a rotation axis and a linear motion tilting stage on which the work is placed, and can be rotated around the rotation axis by the rotation mechanism. Moreover, it has a linear motion tilting stage capable of linear motion and tilting in the first and second directions orthogonal to the rotation axis, and an elongated shape that can be inserted into the narrow hole, and detects the inner surface shape of the narrow hole. It includes a probe and an acquisition means connected to the linear motion tilting stage via a connecting member.
While rotating the acquisition means around the rotation axis integrally with the linear motion tilt stage, the acquisition means acquires probe posture information from at least three circumferential positions on a rotation trajectory centered on the rotation axis. To get the steps and
An adjustment step for adjusting the posture of the probe so that the relative deviation between the probe and the rotation axis is eliminated based on the probe posture information acquired in the acquisition step.
Alignment method of the inner surface shape measuring machine provided with. In the acquisition step, the acquisition means acquires the probe attitude information from four circumferential positions displaced by 90 degrees from each other on the rotation orbit.
The alignment method for the inner surface shape measuring machine according to claim 7. The acquisition means is a camera that photographs the probe.
Further comprising a focusing step of aligning the camera with the axis of rotation by linearly or tilting the linear tilt stage.
The alignment method for the inner surface shape measuring machine according to claim 7 or 8.

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