JP2021146243A - Inkjet coating apparatus and inkjet coating method - Google Patents

Abstract

To provide an inkjet coating apparatus capable of uniformly forming a high-definition coating pattern over a large area by utilizing the characteristics of droplets that do not mix with each other.SOLUTION: An inkjet coating apparatus 1 for forming a coating pattern on a base material W comprises a first head part 11 for ejecting a first droplet, a second head part 21 for ejecting a second droplet that has the property of not mixing with the first droplet, a scanning part 30 for relatively scanning the first head part 11 and the second head part 21 with respect to the base material W, and a control apparatus 50 for performing control of ejecting the first droplet from a plurality of nozzles of the first head part 11 and control of ejecting the second droplet from a plurality of nozzles of the second head part 21 in the relative scanning. The control apparatus 50 is configured so that the first droplet and the second droplet can be ejected and controlled at adjacent positions or at least partially overlapping positions with an ejection time lag according to the relative scanning speed and the arrangement interval of the first head part 11 and the second head part 21.SELECTED DRAWING: Figure 1

Description

The present invention relates to an inkjet coating device and an inkjet coating method. More specifically, an inkjet coating device capable of forming a coating pattern by ejecting two or more types of droplets that are immiscible with each other onto a substrate, and inkjet coating. Regarding the method.

In recent years, a technique has been proposed in which two types of inks having opposite polarities are ejected from an inkjet head to a base material, and an electrode or a thin film is formed on the base material by utilizing the polar repulsion of these inks.

For example, in Non-Patent Document 1 below, hydrophilic silver nanoparticle ink and hydrophobic silver nanoparticle ink are ejected onto a substrate so as to be adjacent to each other using a small inkjet device for research and development. A technique for forming an organic transistor having a source domain electrode (SD electrode) having a channel length of 1 μm or less by utilizing the polar repulsion and pinning phenomenon of these inks is disclosed.

Further, in Non-Patent Document 2 below, a semiconductor crystal thin film is formed by a double-shot inkjet printing method in which two types of inks, a crystallized ink (poor solvent) and a semiconductor ink containing an organic semiconductor, are ejected from two inkjet heads, respectively. The technique of forming is disclosed.

In the method described in Non-Patent Document 2, the crystallization ink is ejected from the first inkjet head onto the substrate, and then the semiconductor ink is overlaid on the crystallization ink from the second inkjet head and applied to the base material. Form micromixed droplets on top. Inside the mixed droplets, the organic semiconductor immediately becomes supersaturated, and the ink flows due to the polar repulsion between the inks, and the growth of semiconductor crystals is promoted on the surface of the droplets. Finally, the semiconductor crystal covers the entire surface of the droplet, and after the solvent evaporates, a single crystal thin film of an organic semiconductor is formed.

[Problems to be solved by the invention]
Non-Patent Documents 1 and 2 describe a technique for forming a coating pattern on a substrate by utilizing the polar repulsion of two types of inks having opposite polarities that do not mix with each other. However, all of these are the results of small-scale studies at the laboratory level, and in order to enable industrial implementation, many coating patterns are uniformly applied in-plane to a large-area substrate. There was a problem that a technique for forming and a technique for increasing productivity were required.

Peter Mack Grubb, 4 others, "Inkjet Printing of High Performance Transistors with Micron Order Chemically Set Gaps", 2017 April 26, Scientific Reports, 7,1202 (2017), Internet <URL: https://doi.org/10.1038/s41598-017-01391-2> Hiromi Minemawari, 7 outsiders, "Inkjet printing of single-crystal films", July 13, 2011, Nature 475, p.364-367, 2011 , Internet <URL: http://doi.org/10.1038/nature10313>

Means for solving problems and their effects

The present invention has been made in view of the above problems, and is an inkjet coating apparatus capable of uniformly forming a high-definition coating pattern utilizing the characteristics of two or more types of droplets that do not mix with each other even in a large area. It is an object of the present invention to provide an inkjet coating method.

The inkjet coating apparatus (1) according to the present invention in order to achieve the above object
An inkjet coating device that forms a coating pattern on a substrate.
A first head portion having a plurality of nozzles for ejecting the first droplet for forming the coating pattern, and a first head portion.
A second head portion having a property of being immiscible with the first droplet and having a plurality of nozzles for ejecting the second droplet for forming the coating pattern.
A scanning unit that scans the first head portion and the second head portion relative to the substrate, and
In the relative scanning, the control of ejecting the first droplet from the plurality of nozzles of the first head portion and the control of ejecting the second droplet from the plurality of nozzles of the second head portion. It is equipped with a control unit that performs
The control unit
With a discharge time lag according to the relative scanning speed and the arrangement interval of the first head portion and the second head portion, the first droplet and the second droplet are adjacent to each other or at least partially overlapped with each other. It is characterized in that it is configured so that discharge can be controlled.

According to the inkjet coating apparatus (1), in the relative scanning, the first droplet and the second droplet, which are immiscible with each other, are formed from the first head portion and the second head portion. It is discharged with the discharge time lag at a position where the adjacent or at least a part of the overlapping overlaps.
Therefore, in the plane of the base material through which the first head portion and the second head portion pass, the first droplet and the second droplet are in a liquid state while keeping the discharge time lag constant. It becomes possible to make sure contact with each other, and it is possible to form a high-definition pattern utilizing the characteristics of the first droplet and the second droplet, that is, incompatibility. As a result, even when the area of the base material is increased, the coating pattern formed by utilizing the incompatibility can be uniformly formed in the plane.

Further, the inkjet coating apparatus (2) according to the present invention is the inkjet coating apparatus (1) described above.
A combination of a nozzle that ejects the first droplet from the plurality of nozzles of the first head portion and a nozzle that ejects the second droplet from the plurality of nozzles of the second head portion is selected. It is characterized by having a selection unit.

According to the inkjet coating apparatus (2), the first droplet and the second droplet are placed adjacent to each other or at least partially overlapped with each other from any nozzle of the first head portion or the second head portion. Even in the case of discharging, the combination of the nozzle of the first head portion and the nozzle of the second head portion can be selected so that the ejection time interval does not vary as much as possible from the ejection time lag. Therefore, it is possible to flexibly correspond to the difference in the nozzle configuration between the first head portion and the second head portion, and high definition utilizing the property that the first droplet and the second droplet do not mix with each other. Pattern can be formed uniformly and stably in the plane.

Further, the inkjet coating apparatus (3) according to the present invention is the inkjet coating apparatus (2).
An inspection unit for inspecting the landing state of the first droplet discharged from the first head portion and the second droplet discharged from the second head portion is provided.
The selection section
In consideration of the inspection data of the landing state obtained by the inspection in the inspection unit, a nozzle for ejecting the first droplet from the plurality of nozzles in the first head unit and a plurality of nozzles in the second head unit. It is characterized in that the combination with the nozzle for ejecting the second droplet is selected from the nozzles of the above.

According to the inkjet coating device (3), the landing state of the first droplet ejected from the first head portion and the second droplet ejected from the second head portion is inspected, and the landing state is inspected. In consideration of the inspection data of the state, a combination of the nozzle of the first head portion and the nozzle of the second head portion that ejects a pair of droplets that are adjacent to each other or at least partially overlap each other is selected. The landing state includes, for example, a landing position, a landing area, and a state such as the presence or absence of non-ejection.
As a result, even when a nozzle unsuitable for ejecting droplets is detected from the nozzle of the first head portion or the nozzle of the second head portion, it is suitable for ejecting droplets (the ejection). A combination of nozzles (with a small deviation from the time lag) is selected, and the first droplet and the second droplet can be ejected at positions adjacent to each other or at least partially overlapping.

Further, the inkjet coating apparatus (4) according to the present invention is the inkjet coating apparatus (2) or (3).
A rotation mechanism that rotates at least one of the first head portion and the second head portion in the vertical axis direction, and / or at least one of the first head portion and the second head portion is relative to the first head portion. A shift movement mechanism that moves in a direction orthogonal to the scanning direction,
A position adjusting unit for operating at least one of the rotation mechanism and the shift moving mechanism to adjust the nozzle position of at least one of the first head portion and the second head portion is further provided.
The position adjustment unit
When there is a place where the nozzle combination cannot be selected by the selection unit, the nozzle combination capable of ejecting the first droplet and the second droplet at a position where they are adjacent to each other or at least a part of them overlap can be selected. It is characterized in that the nozzle position is adjusted.

According to the inkjet coating apparatus (4), even if there is a place where the nozzle combination cannot be selected by the selection unit, the position adjustment unit is at least one of the rotation mechanism and the shift movement mechanism. Can be operated to adjust the nozzle position of at least one of the first head portion and the second head portion. This makes it possible to select a combination of nozzles capable of ejecting the first droplet and the second droplet at positions adjacent to each other or at least partially overlapping, and the first droplet and the second liquid can be selected. It is possible to accurately discharge the droplet to the position where the adjacent or at least a part of the droplet overlaps. In this way, the rotation mechanism and / or the shift movement mechanism and the position adjusting unit can enhance the adaptability when there is a place where the nozzle combination cannot be selected by the selection unit.

Further, the inkjet coating device (5) according to the present invention is the above-mentioned inkjet coating device (3) to (5).
The first head portion is configured to include a plurality of rows of nozzle rows.
The second head portion is configured to include a plurality of rows of nozzle rows.
The selection section
A nozzle that ejects the first droplet from the plurality of rows of nozzles in the first head portion and a nozzle that ejects the second droplet from the plurality of rows of nozzle rows in the second head portion. When selecting the combination with, the feature is that the nozzles in the rows corresponding to each other are selected.

According to the inkjet coating apparatus (5), the first head portion and the second head portion are configured to include the plurality of rows of nozzle rows, respectively, and even when the size is increased, the first head portion is described. Select the nozzles of the rows corresponding to each other from the nozzle rows of the plurality of rows of the 1-head portion and the second head portion, respectively, and appropriately discharge the first droplet and the second droplet. Can be controlled.
Therefore, the ejection interval between the first droplet and the second droplet can be prevented from fluctuating as much as possible from the ejection time lag, and the first head portion and the second head portion each have a plurality of the above. Even when the size is increased by including a row of nozzle rows, a high-definition pattern utilizing the incompatibility between the first droplet and the second droplet is uniformly formed in the plane. , And can be formed stably.

Further, the inkjet coating device (6) according to the present invention is the above-mentioned inkjet coating device (1) to (5).
The first head portion and the second head portion
It is characterized in that it is provided with a number of nozzles capable of forming the coating pattern in the entire coating region of the substrate by one scanning in the relative scanning direction.

According to the inkjet coating apparatus (6), the coating pattern can be formed over the entire coating region of the substrate by one scanning in the relative scanning direction, and the productivity of the coating process can be enhanced. can. Further, as compared with the case where the coating pattern is formed on the entire coating region of the base material by performing the scanning a plurality of times in the direction of the relative scanning, the band-shaped coating unevenness caused by the plurality of scans and the liquid It is possible to form a more uniform coating pattern with less uneven drying due to the in-plane variation of the dried state of the droplets.

Further, the inkjet coating device (7) according to the present invention is the above-mentioned inkjet coating device (1) to (6).
Of the first droplet and the second droplet, the one having a relatively high liquid repellency to the base material is discharged first, and the one having a relatively low liquid repellency to the base material is discharged later. As described above, the first head portion and the second head portion are arranged.

According to the inkjet coating apparatus (7), the liquid repellency to the substrate is relatively high among the first droplet and the second droplet ejected at positions where they are adjacent to each other or at least a part of them overlap. The one having a relatively low liquid repellency to the substrate is discharged first, and the one having a relatively low liquid repellency to the substrate is discharged later. Thereby, the position where the first droplet and the second droplet should be ejected and the boundary between the first droplet and the second droplet ejected on the base material are more accurately defined. It is possible to form a high-definition coating pattern.

Further, the inkjet coating method (1) according to the present invention is an inkjet coating method for forming a coating pattern on a substrate.
The first head portion for ejecting the first droplet for forming the coating pattern and the first droplet have a property of not mixing with each other, and the second droplet for forming the coating pattern is formed. The first droplet is ejected from a plurality of nozzles of the first head portion while the second head portion to be ejected is scanned relative to the base material, and the first droplet is ejected. The second droplet from the plurality of nozzles of the second head portion is placed adjacent to or at a position where at least a part of the landing position on the base material overlaps with the relative scanning speed and the first head portion. It is characterized by discharging with a discharge time lag according to the arrangement interval of the second head portion.

According to the inkjet coating method (1), in the relative scanning, the first droplet and the second droplet which are immiscible with each other are separated from the first head portion and the second head portion. The discharge can be performed with the discharge time lag at a position where the adjacent or at least a part of the overlaps. Therefore, in the plane of the base material through which the first head portion and the second head portion pass, the first droplet and the second droplet are in a liquid state while keeping the discharge time lag constant. It becomes possible to make sure contact with each other, and it is possible to form a high-definition pattern utilizing the characteristics of the first droplet and the second droplet, that is, incompatibility. As a result, even when the area of the base material is increased, the coating pattern formed by utilizing the incompatibility can be uniformly formed in the plane.

Further, the inkjet coating method (2) according to the present invention is the above-mentioned inkjet coating method (1).
A nozzle that ejects the first droplet from a plurality of nozzles of the first head portion so that the first droplet and the second droplet are ejected at positions adjacent to each other or at least partially overlapping. The feature is that the combination of the nozzle and the nozzle for ejecting the second droplet is selected from the plurality of nozzles of the second head portion.

According to the inkjet coating method (2), the first droplet and the second droplet are placed adjacent to each other or at least partially overlapped with each other from any nozzle of the first head portion or the second head portion. Even in the case of discharging, the combination of the nozzle of the first head portion and the nozzle of the second head portion can be selected so that the discharging interval does not vary as much as possible from the discharging time lag. Therefore, it is possible to flexibly correspond to the difference in the nozzle configuration between the first head portion and the second head portion, and high definition utilizing the property that the first droplet and the second droplet do not mix with each other. Pattern can be formed uniformly and stably in the plane.

Further, the inkjet coating method (3) according to the present invention is the above-mentioned inkjet coating method (1) or (2).
The first head portion and the second head portion are provided with a number of nozzles capable of coating the entire coating region of the base material in one scan in the relative scanning direction.
After applying dummy coating around the coating area of the base material,
The first head portion and the second head portion are characterized in that the entire coating region of the base material is coated by one scanning in the relative scanning direction.

According to the inkjet coating method (3), the coating pattern can be formed over the entire coating region of the substrate by one scanning in the relative scanning direction, and the productivity of the coating process can be enhanced. can. Further, since dummy coating is applied around the coating area of the base material, even if the base material has a large area, the solvent vapor concentration of the droplets differs between the central portion and the peripheral portion of the base material. It is possible to suppress drying unevenness due to it, and it is possible to form a coating pattern having higher uniformity.

Further, the inkjet coating method (4) according to the present invention is the above-mentioned inkjet coating method (1) to (3).
Of the first droplet and the second droplet, the one having a relatively high liquid repellency to the base material is discharged first, and the one having a relatively low liquid repellency to the base material is discharged later. It is characterized by that.

According to the inkjet coating method (4), the liquid repellency to the substrate is relatively high among the first droplet and the second droplet ejected at positions adjacent to each other or at least partially overlapping. Since the side is discharged first and the side having a relatively low liquid repellency to the base material is discharged later, the position where the first droplet and the second droplet should be discharged and on the base material. The boundary between the first droplet to be discharged and the second droplet can be defined more accurately, and a high-definition coating pattern can be formed.

It is a side view which shows typically the inkjet coating apparatus which concerns on embodiment (1) of this invention. It is a top view which shows typically the inkjet coating apparatus which concerns on embodiment (1). It is a partially enlarged view for demonstrating the progress of applying a 1st droplet on a substrate in a scanning direction. It is a partially enlarged view for demonstrating the progress of applying a 2nd droplet in a scanning direction at a position adjacent to a 1st droplet on a base material. It is a partially enlarged view for demonstrating the progress of applying the 1st droplet and the 2nd droplet on the substrate in the direction orthogonal to the scanning direction. It is a flowchart which shows an example of the coating operation performed by the inkjet coating apparatus which concerns on embodiment (1). It is a side view which shows typically the inkjet coating apparatus which concerns on embodiment (2). It is a partially enlarged view for demonstrating the operation mechanism of the 1st head part and the 2nd head part which constitute the inkjet coating apparatus which concerns on embodiment (2). It is a flowchart which shows an example of the coating operation performed by the inkjet coating apparatus which concerns on embodiment (2).

Hereinafter, embodiments of the inkjet coating apparatus and the inkjet coating method according to the present invention will be described with reference to the drawings.
FIG. 1 is a side view schematically showing the inkjet coating apparatus according to the embodiment (1). FIG. 2 is a plan view schematically showing the inkjet coating apparatus according to the embodiment (1).

As shown in FIGS. 1 and 2, the inkjet coating device 1 includes a first coating unit 10, a second coating unit 20, a scanning unit 30, a coating stage 40, and a control device 50.
In the inkjet coating device 1, the scanning unit 30 is driven, and the first coating unit 10 and the second coating unit 20 move above the base material W placed on the coating stage 40, while the first coating unit 10 And the second coating unit 20 are configured so that droplets having opposite polarities are ejected on the base material W at adjacent positions or at least partially overlapping positions. Then, a coating pattern utilizing the polar repulsion of the droplets is formed at a plurality of locations on the base material W. This is an example of droplets having the property that the droplets having opposite polarities do not mix with each other.

In the following description, the direction in which the first coating unit 10 and the second coating unit 20 move (scan) is the X-axis direction, and the directions orthogonal to the X-axis direction on the horizontal plane are the Y-axis direction, the X-axis direction, and A direction orthogonal to both Y-axis directions will be described as a Z-axis direction.

The coating pattern formed on the base material W is, for example, various circuit patterns such as an electrode thin film (SD electrode or the like), a semiconductor thin film, or an insulating film constituting an organic transistor circuit. Further, the coating pattern has a gap of a minute width (for example, micron (μm) order, submicron order) in addition to the pixel pattern of a color filter such as a liquid crystal panel or an organic EL panel and a light emitting device application such as a polymer LED. Various patterns may be used. However, the coating pattern that is the subject of the present invention is not limited to these.

The coating stage 40 is a stage device on which the base material W is placed, and is configured to be placed in a state where the base material W maintains a horizontal posture. The coating stage 40 may be configured to include a suction mechanism so that the base material W can be sucked and held on the stage surface in a horizontal posture. The base material W is, for example, a glass substrate, a resin substrate, a flexible substrate such as a resin film, a silicon wafer, or the like. However, the base material W which is the subject of the present invention is not limited to these.

The first coating unit 10 includes a first head portion 11 and a first gantry portion 14 that supports the first head portion 11.
The first head portion 11 has a substantially rectangular parallelepiped shape with the Y-axis direction as the longitudinal direction, and incorporates the first head modules 12 and 13 that drive the piezo element to eject the first droplet. In the present embodiment, the first head modules 12 and 13 are incorporated in a plurality of rows in the Y-axis direction and adjacent to each other in the X-axis direction. That is, the first head portion 11 is configured to include a plurality of rows of nozzle rows.

The first head modules 12 and 13 include a plurality of nozzles 12a and 13a for ejecting the first droplet, and the plurality of nozzles 12a and 13a are provided on the lower surface of the first head portion 11 at a predetermined nozzle pitch P in the Y-axis direction. It is arranged.

In the first head portion 11, the plurality of nozzles 12a of the first head module 12 and the plurality of nozzles 13a of the first head module 13 are arranged so as to be shifted in parallel by the pitch of P / 2. With this arrangement, the inkjet head has a nozzle density in which the arrangement of the nozzles 12a and 13a in the direction (Y-axis direction) orthogonal to the moving direction (X-axis direction) of the first head portion 11 corresponds to a nozzle having a pitch of P / 2. Is formed.

Further, the first head portion 11 can perform the entire coating region of the base material W by one scanning in the relative scanning direction (X-axis direction) between the first coating unit 10 and the second coating unit 20 and the coating stage 40. Is provided with a number of nozzles 12a and 13a capable of forming a coating pattern. In other words, the first head portion 11 is configured so that the nozzle row width of the first head portion 11 in the Y-axis direction is larger than the coating region width on the base material W.

In the first head portion 11 shown in FIGS. 1 and 2, two rows of first head modules 12 and 13 are incorporated adjacent to each other in the X-axis direction, but in another configuration example, the first head module 12 Only, that is, a configuration in which only one line is incorporated in the X-axis direction may be used, or a configuration in which three or more lines are incorporated at equal intervals in the X-axis direction may be used. By arranging three or more rows of n rows of nozzles so as to be shifted in parallel by the pitch of P / n, an inkjet head having a nozzle density corresponding to a nozzle having a pitch of P / n can be formed.

The first gantry portion 14 is formed in a substantially gantry shape, and has leg portions 14a arranged on both outer sides in the Y-axis direction of the coating stage 40, and a beam member 14b connecting these leg portions 14a and extending in the Y-axis direction. The first head portion 11 is attached to the beam member 14b.

The first gantry unit 14 is attached to the scanning unit 30 with the coating stage 40 straddling the Y-axis direction, and is configured so that the scanning unit 30 can scan in the X-axis direction. Therefore, when the first gantry portion 14 moves or stops in the X-axis direction, the first head portion 11 also moves or stops in the X-axis direction accordingly. Further, by adjusting the scanning amount of the first gantry unit 14, the position of the first head unit 11 in the X-axis direction is adjusted. With these configurations, the first head portion 11 can move on the base material W, and the first droplet can be ejected from the first head portion 11 at a predetermined landing position on the base material W.

The second coating unit 20 includes a second head portion 21 and a second gantry portion 24 that supports the second head portion 21.
The second head portion 21 has a substantially rectangular parallelepiped shape with the Y-axis direction as the longitudinal direction, and drives the piezo element to eject a second droplet having a polarity opposite to that of the first droplet. Head modules 22 and 23 are incorporated. In the present embodiment, the second head modules 22 and 23 are incorporated in a plurality of rows in the Y-axis direction and adjacent to each other in the X-axis direction. That is, the second head portion 21 is configured to include a plurality of rows of nozzle rows.

The second head modules 22 and 23 include a plurality of nozzles 22a and 23a for ejecting the second droplet, and the plurality of nozzles 22a and 23a are provided on the lower surface of the second head portion 21 at a predetermined nozzle pitch P in the Y-axis direction. It is arranged.

In the second head portion 21, the plurality of nozzles 22a of the second head module 22 and the plurality of nozzles 23a of the second head module 23 are arranged so as to be shifted in parallel by the pitch of P / 2. With this arrangement, the inkjet head has a nozzle density in which the arrangement of the nozzles 22a and 23a in the direction (Y-axis direction) orthogonal to the moving direction (X-axis direction) of the second head portion 21 corresponds to a nozzle having a pitch of P / 2. Is formed.

Further, the second head portion 21 includes a number of nozzles 22a and 23a capable of forming a coating pattern over the entire coating region of the base material W by one scanning in the relative scanning direction. In other words, the second head portion 21 is configured so that the nozzle row width of the second head portion 21 in the Y-axis direction is larger than the coating region width on the base material W.

The second head module 21 shown in FIGS. 1 and 2 has two rows of second head modules 22 and 23 adjacent to each other in the X-axis direction. In another configuration example, the second head module 22 is incorporated. Only, that is, a configuration in which only one line is incorporated in the X-axis direction may be used, or three or more lines may be incorporated in the X-axis direction at equal intervals.

The second gantry portion 24 is formed in a substantially gantry shape, and has leg portions 24a arranged on both outer sides in the Y-axis direction of the coating stage 40, and a beam member 24b connecting these leg portions 24a and extending in the Y-axis direction. A second head portion 21 is attached to the beam member 24b.

The second gantry portion 24 is attached to the scanning portion 30 with the coating stage 40 straddling the Y-axis direction, and is configured so that the scanning portion 30 can scan in the X-axis direction. Therefore, when the second gantry portion 24 moves or stops in the X-axis direction, the second head portion 21 also moves or stops in the X-axis direction accordingly. Further, by adjusting the scanning amount of the second gantry portion 24, the position of the second head portion 21 in the X-axis direction is adjusted. With these configurations, while the second head portion 21 moves on the base material W, the second head portion 21 is adjacent to or partly adjacent to the landing position (also referred to as the discharge position) of the first droplet previously ejected on the base material W. The second droplet can be ejected from the second head portion 21 so as to overlap each other.

The scanning unit 30 is a device for scanning the first coating unit 10 and the second coating unit 20 with respect to the coating stage 40 in the X-axis direction (scanning direction). The scanning unit 30 is configured to include, for example, a linear motion mechanism such as a linear stage, and is driven and controlled by the control device 50. The scanning unit 30 is configured to integrally scan the first coating unit 10 and the second coating unit 20 arranged at predetermined intervals in the scanning direction in the same direction and at the same speed. Further, the scanning unit 30 may be configured to individually scan the first coating unit 10 and the second coating unit 20 in the same direction and at the same speed. In another configuration example, the first coating unit 10 and the second coating unit 20 are fixed to the base at a predetermined interval in the scanning direction, and the coating stage 40 arranged on the base is fixed in the X-axis direction. It may be configured to include a scanning unit that moves in the (scanning direction).

In the configuration examples shown in FIGS. 1 and 2, the first head portion 11 is arranged on the front side in the scanning direction with respect to the second head portion 21. Therefore, when the first head portion 11 and the second head portion 21 are moved in the scanning direction (X-axis direction) at the same speed and the droplets are ejected onto the base material W, the first head portion 11 comes first. The second head portion 21 reaches a predetermined discharge position on the base material W, and the second head portion 21 reaches a predetermined discharge position on the base material W after a lapse of a predetermined discharge time lag.

The discharge time lag depends on the scanning speed (V mm / sec) of the first head portion 11 and the second head portion 21 by the scanning unit 30 and the arrangement interval (X mm) of the first head portion 11 and the second head portion 21. The delay time (X / V (sec)). The scanning speed can be set, for example, 30 to 50 mm / sec, but is not limited to this range. Further, the arrangement interval can be set to, for example, 300 mm to 1000 mm, but is not limited to this range. In order to shorten the discharge time lag, it is preferable that the first head portion 11 and the second head portion 21 are arranged as close as possible to the scanning direction.

Further, the discharge time lag may be set in consideration of the arrangement interval of the nozzle rows included in the first head portion 11 and the second head portion 21. In this configuration example, the nozzle row of the first head module 12 of the first head portion 11 (nozzle row of the first row) and the nozzle row of the second head module 22 of the second head portion 21 (nozzle row of the first row). And the nozzle row of the first head module 13 of the first head portion 11 (nozzle row of the second row) and the nozzle row of the second head module 23 of the second head portion 21 (nozzle row of the second row). The intervals between and are even.
As described above, when the first head portion 11 and the second head portion 21 both have a plurality of rows of nozzle rows and the row spacings are the same, the spacing between the corresponding nozzle rows (nozzle rows of the same rows) The discharge time lag may be obtained by setting the arrangement interval (X mm).

The first droplet ejected from the first head portion 11 and the second droplet ejected from the second head portion 21 are each composed of a solvent having opposite polarities or an ink containing the solvent. For example, when the first droplet is composed of ink of a polar solvent, the ink of a non-polar solvent is applied to the second droplet. When the first droplet is composed of an ink of a non-polar solvent, the ink of the polar solvent is applied to the second droplet.

The polar solvent may be, for example, an aprotic polar solvent such as dimethyl sulfoxide (abbreviated as DMSO) or N-methylpyrrolidone (abbreviated as NMP), or a protic polar solvent such as water or alcohols. good.

Further, as the non-polar solvent (non-polar solvent), for example, cyclohexane, xylene, cyclohexylbenzene, hexane, toluene and the like can be adopted, but the present invention is limited thereto. Not done.

Examples of combinations of polar and non-polar solvents include (1) dimethylsulfoxide (DMSO) and cyclohexane, (2) dimethylsulfoxide (DMSO) and xylene, and (3) N-methylpyrrolidone (NMP). ) And Cyclohexylbenzene, (4) N-methylpyrrolidone (NMP) and metoxytoluene (Methoxytoluene), (5) water and toluene (toluene) and the like.

Further, the ink constituting the first droplet or the second droplet may contain various materials depending on the coating application in addition to the above solvent. For example, functional materials that perform electronic or electrical functions such as conductivity, semiconductority, resistance, or dielectric, as well as surfactants, dispersants, moisturizers, colorants, or adhesion enhancers. Additives and the like may be included.

Further, it is preferable that the first droplet is composed of a solvent having a relatively higher liquid repellency to the base material W than the second droplet. In the present embodiment, the first head portion 11 for ejecting the first droplet is arranged on the front side in the traveling direction with respect to the second head portion 21. Therefore, the first droplet having a relatively high liquid repellency with respect to the base material W is ejected first from the first head portion 11 with respect to the predetermined landing position on the base material W, and after the ejection time lag, the base is ejected. A second droplet having a relatively low liquid repellency with respect to the material W is ejected from the second head portion 21. With such a configuration, the wet spread of the first droplet to be ejected on the base material W is suppressed, and the boundary of the coating pattern formed by the polar repulsion between the first droplet and the second droplet is further increased. It will be defined accurately.

The control device 50 includes a computer device, a storage device (neither of which is shown), and the like. The control device 50 is configured to, for example, control to drive the scanning unit 30, control to eject droplets from the first head unit 11 and the second head unit 21, and perform various calculations necessary for the coating operation. Has been done. The control device 50 has a function of operating as a control unit and a selection unit constituting the inkjet coating device according to the present invention.

In the storage device, in addition to design data for forming a coating pattern on the base material W, a program for executing a coating operation and the like are stored. The design data includes, for example, coordinate data on the base material W that ejects the first droplet and the second droplet, and nozzle 12a of the first head portion 11 that ejects the first droplet for each coordinate. The combination data of 13a and the nozzles 22a and 23a of the second head portion 21 for ejecting the second droplet is included.

The control device 50 ejects the first droplet from the plurality of nozzles 12a and 13a of the first head portion 11 in the relative scanning between the first coating unit 10 and the second coating unit 20 and the coating stage 40. Control to eject the second droplet from the plurality of nozzles 22a and 23a of the second head portion 21.
When performing the discharge control, the control device 50 has a discharge time lag (that is, a constant time interval) according to the relative scanning speed and the arrangement interval of the first head portion 11 and the second head portion 21. Control is performed to eject the first droplet and the second droplet at adjacent positions or at least partially overlapping positions. In other words, the control device 50 is located at the first droplet ejected from the plurality of nozzles 12a and 13a of the first head portion 11 and the landing position on the base material W on which the first droplet is ejected. On the other hand, the first head portion 11 and the first head portion 11 and the first head portion 11 so as to align the ejection time lag with the second droplet ejected from the plurality of nozzles 22a, 23a of the second head portion 21 at positions adjacent to each other or at least partially overlapping. Discharge control is performed by combining the nozzles with the two head portions 21.

When the control device 50 performs this ejection control, the nozzle for ejecting the first droplet from the plurality of nozzles 12a and 13a of the first head portion 11 and the second head portion so that the ejection time lags are aligned. A process of selecting a combination with a nozzle for ejecting a second droplet from a plurality of nozzles 22a and 23a of 21 is performed.
Further, the control device 50 includes a nozzle for ejecting a first droplet from a plurality of rows of nozzle rows composed of the first head modules 12 and 13, and a plurality of nozzles composed of the second head modules 22 and 23. When selecting a combination with a nozzle for ejecting a second droplet from the nozzle rows of the row, a process of selecting nozzles in the rows corresponding to each other is performed.

3 and 4 show a progress in which the first droplet and the second droplet are coated on the base material W in the scanning direction by using the inkjet coating apparatus 1 according to the embodiment (1). It is a partially enlarged view for this.
FIG. 3 is a partially enlarged view for explaining the progress of applying the first droplet on the base material W in the scanning direction. FIG. 4 is a partially enlarged view for explaining the progress of applying the second droplet in the scanning direction at a position adjacent to the first droplet on the base material W.
In FIGS. 3 and 4, for convenience, a part of the first head modules 12 and 13 and a part of the second head modules 22 and 23 are described in a simplified manner. The progress of coating the first droplet 15 and the second droplet 25 on the base material W in the scanning direction while the two head modules 22 and 23 move in the scanning direction (X-axis direction) is shown. There is.

In FIGS. 3 and 4, the first droplet 15 is continuously ejected from the nozzle 12a1 of the first head module 12 and the nozzle 13a1 of the first head module 13, and the nozzle 22a1 of the second head module 22 and the second. It shows a situation in which the second droplet 25 is continuously ejected from the nozzles 23a1 of the head module 23.

FIG. 3A shows a situation before the start of coating, in which the combination of the nozzles of the first head portion 11 and the second head portion 21 and the first droplet 15 and the second droplet 25 on the base material W are shown. Indicates the set position for discharging and.

In the examples shown in FIGS. 3 and 4, as shown in FIG. 3A, the nozzle 12a1 of the first head module 12 that ejects the first droplet 15 and the second head module 22 that ejects the second droplet 25. The combination with the nozzle 22a1 of the above is selected. Further, a combination of the nozzle 13a1 of the first head module 13 for ejecting the first droplet 15 and the nozzle 23a1 of the second head module 23 for ejecting the second droplet 25 is selected. Further, in order to make the discharge time lag uniform, the distance between the nozzle 12a in the first row of the first head portion 11 and the nozzle 22a in the first row of the second head portion 21 and 2 of the first head portion 11 The distance between the nozzle 13a in the first row and the nozzle 23a in the second row of the second head portion 21 is even.

In this way, the first head modules 12 and 13 are configured so that the ejection time interval between the adjacent first droplet 15 and the second droplet 25 does not vary as much as possible from the ejection time lag. A nozzle that ejects the first droplet 15 from a plurality of rows of nozzle rows and a nozzle that ejects a second droplet 25 from a plurality of rows of nozzle rows composed of the second head modules 22 and 23. When selecting a combination, nozzles in rows corresponding to each other are selected.

In other words, the combination of nozzles is selected so that the nozzles of the first head portion 11 and the nozzles of the second head portion 21 that eject a pair of droplets that are adjacent to each other or at least partially overlap each other are evenly spaced. There is. Further, as in the present embodiment, when the first head portion 11 and the second head portion 21 both have a plurality of rows of nozzle rows and the row spacing of these nozzle rows is the same, both have the same rows (n). The nozzle of the line) will be selected.

As shown in FIG. 3B, the first head portion 11 and the second head portion 21 are scanned at the same speed in the X-axis direction, and the first droplet 15 is ejected from the nozzles 12a1 of the first head module 12. Will be done.
Next, as shown in FIG. 3C, the next first droplet 15 is ejected from the nozzle 12a1 of the first head module 12, and the first droplet 15 is ejected from the nozzle 13a1 of the first head module 13. It is discharged.

After that, as shown in FIGS. 3 (d) to 3 (f), the first head portion 11 and the second head portion 21 are scanned at the same speed in the X-axis direction from the nozzles 12a1 of the first head module 12. The 1 droplet 15 is continuously ejected, and the first droplet 15 is continuously ejected from the nozzles 13a1 of the first head module 13. Then, as shown in FIG. 3 (g), a discharge pattern by the first droplet 15 is formed on the base material W.

Subsequently, the first head portion 11 and the second head portion 21 are scanned at the same speed in the X-axis direction, and as shown in FIG. 4A, the second head module 22 has a discharge pattern by the first droplet 15. At the timing when the top is reached (in other words, the timing when the discharge time lag elapses from the discharge timing in FIG. 3B), the second droplet 25 from the nozzle 22a1 of the second head module 22 becomes the first droplet 15. It is discharged at a position where it is adjacent or at least partially overlaps.

Next, as shown in FIG. 4B, the next second droplet 25 is ejected from the nozzle 22a1 of the second head module 22, and the second droplet 25 is ejected from the nozzle 23a1 of the second head module 23. , Adjacent to the first droplet 15 or at a position where at least a part of the first droplet 15 overlaps.

After that, as shown in FIGS. 4C to 4E, the first head portion 11 and the second head portion 21 are scanned at the same speed in the X-axis direction from the nozzles 22a1 of the second head module 22. The two droplets 25 are continuously ejected, and the second droplet 25 is continuously ejected from the nozzles 23a1 of the second head module 23.
By the discharge control described above, the discharge time lags of the pair of droplets (first droplet and second droplet) discharged at adjacent positions on the base material W or at positions where at least a part of the droplets overlap are aligned. As a result, the degree of drying of the first drop (first droplet discharged earlier) when the second drop (second droplet) is discharged can be made uniform. As a result, it is possible to accurately obtain the effect of ejecting two droplets of the first droplet and the second droplet having different polarities so that they are adjacent to each other or at least a part of them overlap each other, and the polarity repulsion is utilized. It is possible to form a high-definition pattern.

Then, as shown in FIG. 4 (f), a pattern is formed on the base material W in which the first droplet 15 and the second droplet 25 are ejected at positions adjacent to each other or at least partially overlapping each other. In this state, both the first droplet 15 and the second droplet 25 are in a liquid state (a state before they are completely dried), and polar repulsive forces due to differences in polarity act on each other, resulting in a minute width at the boundary portion. Gap begins to form.

After that, when the first droplet 15 and the second droplet 25 are dried, as shown in FIG. 4 (g), a narrow gap (gap) is formed at the boundary between the first droplet 15 and the second droplet 25. The coating pattern PT on which is formed is formed.

FIG. 5 shows a process in which the first droplet and the second droplet are coated on the base material W in a direction orthogonal to the scanning direction by using the inkjet coating apparatus 1 according to the embodiment (1). It is a partially enlarged view for explaining the situation.
In FIG. 5, for convenience, a part of the first head modules 12 and 13 and a part of the second head modules 22 and 23 are shown in a simplified manner. In FIG. 5, the first head modules 12 and 13 and the second head modules 22 and 23 move at the same speed in the scanning direction (X-axis direction), and the first droplets 15 and the second droplets 15 and 2 are placed on the base material W. The progress of applying the droplet 25 in the direction orthogonal to the scanning direction (Y-axis direction) is shown.

In the example shown in FIG. 5, the first droplet 15 is ejected once from the plurality of nozzles 12a2 of the first head module 12 and the plurality of nozzles 13a2 of the first head module 13, and a plurality of the second head modules 22 are ejected. The situation is shown in which the second droplet 25 is ejected once from each of the nozzles 22a2 and the plurality of nozzles 23a2 of the second head module 23.

FIG. 5A shows a situation before the start of coating, and the nozzles 12a2 and 13a2 of the first head portion 11 from which the first droplet 15 is ejected and the first droplet 15 ejected to the base material W. Indicates the setting position of.

In the example shown in FIG. 5, as shown in FIGS. 5A and 5E, the nozzles 12a2 and 13a2 of the first head modules 12 and 13 for ejecting the first droplet 15 and the second droplet 25 are ejected. The combination with the nozzles 22a2 and 23a2 of the second head module 22 is selected. The distance between the nozzle 12a2 in the first row of the first head portion 11 and the nozzle 22a2 in the first row of the second head portion 21, and the nozzle 13a2 and the second head portion 21 in the second row of the first head portion 11 The intervals between the nozzles 23a2 in the second row of the above are even.

In this way, in order to prevent the ejection time interval between the first droplet 15 and the second droplet 25 from fluctuating as much as possible from the ejection time lag, a plurality of rows composed of the first head modules 12 and 13 are formed. A combination of a nozzle that ejects the first droplet 15 from the nozzle row of Nozzle 15 and a nozzle that ejects the second droplet 25 from the nozzle row of a plurality of rows composed of the second head modules 22 and 23. When selecting, the nozzles in the rows corresponding to each other are selected.
In other words, the combination of nozzles is selected so that the nozzles of the first head portion 11 and the nozzles of the second head portion 21 that eject a pair of droplets that are adjacent to each other or at least partially overlap each other are evenly spaced. There is. Further, as in the present embodiment, when the first head portion 11 and the second head portion 21 both have a plurality of rows of nozzle rows and the row spacing of these nozzle rows is the same, both have the same rows (n). The nozzle of the line) will be selected.

As shown in FIG. 5B, the first head portion 11 and the second head portion 21 are scanned at the same speed in the X-axis direction, and the first droplet 15 is formed from the plurality of nozzles 12a2 of the first head module 12. Is discharged. Next, as shown in FIG. 5 (c), the first droplet 15 is ejected from the plurality of nozzles 13a2 of the first head module 13, and as shown in FIG. 5 (d), the first droplet 15 is used. A discharge pattern in the Y-axis direction is formed on the base material W.

Subsequently, as shown in FIG. 5 (f), the second head module 22 ejects the first droplet 15 while scanning the first head portion 11 and the second head portion 21 at the same speed in the X-axis direction. At the timing when the pattern reaches the front, the second droplet 25 is ejected from the plurality of nozzles 22a2 of the second head module 22 at a position adjacent to the first droplet 15 or at least partially overlapping the first droplet 15. In the present embodiment, the nozzle 12a in the first row of the first head module 12 and the nozzle 22a in the first row of the second head module 22 deviate from each other by the pitch of P / 2 when viewed from the scanning direction. Is arranged. Therefore, the first droplet ejected from the nozzle 12a of the first head module 12 and the second droplet ejected from the nozzle 22a of the second head module 22 have only a P / 2 pitch when viewed from the scanning direction. It will land at a misaligned position.

Next, as shown in FIG. 5 (g), the second droplet 25 is ejected from the plurality of nozzles 23a2 of the second head module 23 at a position adjacent to the first droplet 15 or at least partially overlapping the first droplet 15. In the present embodiment, the nozzle 13a in the second row of the first head module 13 and the nozzle 23a in the second row of the second head module 23 deviate from each other by the pitch of P / 2 when viewed from the scanning direction. Is arranged. Therefore, the first droplet ejected from the nozzle 13a of the first head module 13 and the second droplet ejected from the nozzle 23a of the second head module 23 have only a P / 2 pitch when viewed from the scanning direction. It will land at a misaligned position.
Then, as shown in FIG. 5 (h), a pattern is formed on the base material W in which the first droplet 15 and the second droplet 25 are ejected at positions adjacent to each other or at least partially overlapping each other. In this state, both the first droplet 15 and the second droplet are in a liquid state (a state before they are completely dried), and polar repulsive forces due to differences in polarity act on each other, resulting in a small gap at the boundary portion. (Gap) begins to form.

After that, when the first droplet 15 and the second droplet 25 are dried, as shown in FIG. 5 (i), a narrow gap (gap) is formed at the boundary between the first droplet 15 and the second droplet 25. The coating pattern PT on which is formed is formed.

FIG. 6 is a flowchart showing a coating operation performed by the inkjet coating apparatus 1 according to the embodiment (1).
In step S1, the base material W is carried into the coating stage 40 of the inkjet coating apparatus 1. For example, the base material W is placed on the coating stage 40 by a robot hand (not shown) or the like. At this time, for example, the positioning alignment mark provided on the base material W is read, and the position where the coating pattern is formed with reference to the alignment mark, that is, the first droplet and the second droplet. It may be configured so that the position where the landing is landed is set.

In step S2, the control device 50 reads design data for forming a predetermined coating pattern on the base material W. The design data includes, for example, coordinate data on the base material W that ejects the first droplet and the second droplet, and each nozzle 12a of the first head portion 11 that ejects the first droplet for each coordinate. , 13a and the combination data of the nozzles 22a and 23a of the second head portion 21 for ejecting the second droplet are included.

In step S3, the control device 50 ejects the nozzles 12a and 13a of the first head portion 11 for ejecting the first droplet and the second head for ejecting the second droplet for each coating pattern formed on the base material W. The combination with the nozzles 22a and 23a of the unit 21 is selected, and these are stored as the combination data of the discharge nozzles.

As in the present embodiment, when the first head portion 11 includes first head modules 12 and 13 having two or more rows and the second head portion 21 includes second head modules 22 and 23 having two or more rows. , The combination data of the nozzles 12a and 13a of the first head portion 11 for ejecting the first droplet and the nozzles 22a and 23a of the second head portion 21 for ejecting the second droplet is the row number and column number of each nozzle. Shown in combination with. For example, the combination data of the nozzles in the nth row and mth column of the first head portion 11 and the nozzles in the nth row and mth column of the second head portion 21 is selected for each coordinate of the coating pattern.

As another configuration example, when the first head portion 11 is composed of the first head module 12 in one row and the second head portion 21 is composed of the second head module 22 in one row, the first The combination data of the nozzle 12a of the first head portion 11 for ejecting the droplet and the nozzle 22a of the second head portion 21 for ejecting the second droplet is indicated by the combination of the row numbers of the respective nozzles. For example, the combination data of the nozzle in the m-th row of the first head portion 11 and the nozzle in the m-th row of the second head portion 21 is selected for each coordinate of the coating pattern.

In step S4, the control device 50 drives the scanning unit 30 to start control for scanning the first coating unit 10 and the second coating unit 20 at a predetermined speed in the X-axis direction. The predetermined speed indicating the speed of relative scanning between the first coating unit 10 and the second coating unit 20 and the coating stage 40 can be set to, for example, 30 to 50 mm / sec, but is not limited to this speed range. The relative scanning speed can be appropriately set according to the specifications of the coating device 1, the type of the base material W, the type of the coating pattern, and the like.

In step S5, the control device 50 is based on the coordinate data on the base material W that ejects the first droplet and the second droplet and the combination data of the nozzle that ejects each droplet for each coordinate. , The control of ejecting the first droplet from the plurality of nozzles 12a and 13a of the first head portion 11 is started. That is, the control device 50 moves the first head portion 11 and the second head portion 21 at the same speed in the X-axis direction, and at the coordinate position forming the coating pattern on the base material W, the nozzle with respect to the coordinate position. Control is performed to eject the first droplet from the nozzle of the first head portion 11 selected as the combination data of. On the upper surface of the base material W through which the first head portion 11 has passed, a droplet pattern is formed by the first droplets ejected at predetermined coordinate positions based on the design data of the coating pattern.

In step S6, the control device 50 is based on the coordinate data on the base material W that ejects the first droplet and the second droplet and the combination data of the nozzle that ejects each droplet for each coordinate. , The control of ejecting the second droplet from the plurality of nozzles 22a and 23a of the second head portion 21 is started. That is, the control device 50 moves the first head portion 11 and the second head portion 21 at the same speed in the X-axis direction, and the second head portion 21 reaches the region through which the first head portion 11 has passed first. At the timing (that is, after the discharge time lag has elapsed), the control is performed to discharge the second droplet at a position adjacent to the first droplet discharged on the base material W, or at a position where at least a part of the first droplet overlaps. On the upper surface of the base material W through which the second head portion 21 has passed, the first droplet and the second droplet ejected at a predetermined coordinate position based on the design data of the coating pattern are adjacent to each other or at least a part thereof overlaps with each other. A droplet pattern in the state of being formed is formed.

In step S7, the control device 50 determines whether or not the scanning of the base material W has been completed, and if it is determined that the scanning has not been completed, the control device 50 returns to step S5 to continue the coating process, while completing the scanning. If it is determined, the process proceeds to step S8.

In step S8, the base material W on which the coating pattern is formed is carried out from the coating stage 40, the coating process of the base material W is completed, and the control device 50 drives and controls the scanning unit 30 to form the first coating unit 10. Control is performed to move the second coating unit 20 and the second coating unit 20 to the initial position. The carry-out is performed by, for example, a robot hand. The base material W is then transported to a post-process such as a drying step.

According to the inkjet coating apparatus 1 according to the embodiment (1), the first head portion 11 and the second head portion 21 are scanned relative to the base material W of the first coating unit 10 and the second coating unit 20. Therefore, the first droplet and the second droplet having opposite polarities are ejected at positions adjacent to each other or at least partially overlapping with each other with the ejection time lag. Therefore, in the plane of the base material W through which the first head portion 11 and the second head portion 21 pass, the degree of drying of the first droplet when the second droplet is ejected while keeping the ejection time lag constant. Can be made uniform, and the first droplet and the second droplet can be reliably brought into contact with each other in a liquid state. This makes it possible to form a characteristic of the first droplet and the second droplet, that is, a high-definition pattern utilizing polar repulsion, for example, a pattern having a gap of a small width, and the base material W can be made large. Even when the area is increased, a fine coating pattern formed by utilizing polar repulsion can be uniformly formed in the plane.

Further, according to the inkjet coating device 1, the control device 50 ejects the first droplet from the plurality of nozzles 12a, 13a of the first head portion 11 so that the ejection time lags are aligned, and the second nozzle. It functions as a selection unit that selects a combination with a nozzle that ejects a second droplet from a plurality of nozzles 22a and 23a of the head unit 21. Therefore, even when the first droplet and the second droplet are ejected from any of the nozzles of the first head portion 11 and the second head portion 21 at adjacent positions or at least partially overlapping positions, the ejection interval is set. The combination of the nozzle of the first head portion 11 and the nozzle of the second head portion 21 can be selected so as not to vary as much as possible from the discharge time lag.

Further, according to the inkjet coating device 1, even when the first head portion 11 and the second head portion 21 each include a plurality of rows of nozzle rows, the nozzles of the first head portion 11 and the nozzles of the first head portion 11 It is possible to appropriately control the ejection of the first droplet and the second droplet by selecting the nozzles in the rows corresponding to each other from the nozzle rows of a plurality of rows in combination with the nozzles of the second head portion 21. .. Therefore, the ejection interval between the first droplet and the second droplet can be prevented from fluctuating as much as possible from the ejection time lag, and the difference in nozzle configuration between the first head portion 11 and the second head portion 21 is flexible. In addition, a high-definition pattern utilizing the polar repulsion between the first droplet and the second droplet can be uniformly and stably formed in the plane.

Further, according to the inkjet coating apparatus 1, the first droplet having a relatively high liquid repellency to the base material W is ejected first, and the second droplet having a relatively low liquid repellency to the base material W is discharged later. It is discharged. Therefore, the position where the first droplet and the second droplet should be ejected, and the boundary (fine width) formed by the polar repulsion between the first droplet and the second droplet ejected on the base material W. The gap) can be defined more accurately, and a high-definition coating pattern can be formed.

Further, according to the inkjet coating device 1, the first head portion 11 and the second head portion 21 have a coating pattern on the entire coating region of the base material W by one scanning in the relative scanning direction (X-axis direction). Since the number of nozzles capable of forming the coating pattern is provided, the coating pattern can be formed over the entire coating region of the base material W in one scanning, and the productivity of the coating process can be improved.

In another configuration example, a coating pattern may be formed over the entire coating region of the base material W by performing scanning a plurality of times in the relative scanning direction, but in the present embodiment (1), the coating pattern may be formed. A more uniform coating pattern with less band-shaped coating unevenness due to multiple scans and less drying unevenness due to in-plane variation in the dry state of droplets, as compared to the case of performing multiple scans. Can be formed.

Further, in another embodiment, after applying a frame-shaped dummy coating around the coating area of the base material W, the first head portion 11 and the second head portion 21 perform one time in the relative scanning direction. A method of applying the entire coating area of the base material W by scanning may be adopted.

According to such a coating method, a coating pattern can be formed over the entire coating region of the base material W by one scanning in the relative scanning direction, and the productivity of the coating process can be enhanced. Further, since dummy coating is performed around the coating area of the base material W, even if the base material W has a large area, the solvent vapor concentration of the droplets differs between the central portion and the peripheral portion of the base material W. It is possible to suppress drying unevenness due to it, and it is possible to form a coating pattern having higher uniformity.

The dummy coating may be performed by the first head portion 11 or the second head portion 21, or the dummy coating is performed in a previous step using a device different from the inkjet coating device 1, and the dummy coating is performed. The base material W may be carried into the coating stage 40.

FIG. 7 is a side view schematically showing the inkjet coating apparatus according to the embodiment (2). However, the components having the same functions as the inkjet coating apparatus 1 according to the embodiment (1) shown in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted here.

The inkjet coating device 1A includes a first coating unit 10A, a second coating unit 20A, a scanning unit 30, a coating stage 40, a control device 50A, and an inspection unit 60.
The first coating unit 10A includes a first head portion 11, a first gantry portion 14, a rotation mechanism 16, and a shift movement mechanism 17.

The rotation mechanism 16 is a device for rotating the first head portion 11 in the vertical axis direction (Z-axis direction). The rotation mechanism 16 is provided, for example, between the first head portion 11 and the beam member 14b of the first gantry portion 14, and rotates in the Z-axis direction so that the first head portion 11 can rotate around the Z-axis. It is configured to include a rotating portion and a drive motor for rotationally driving the rotating portion. The rotation mechanism 16 is configured so that the nozzles 12a and 13a of the first head portion 11 can be fixed in a state of being inclined at an arbitrary angle with respect to the X-axis direction from the initial state in which the arrangement directions of the nozzles 12a and 13a coincide with the Y-axis direction. There is.

The shift movement mechanism 17 is a linear motion mechanism that moves the first head portion 11 in a direction (Y-axis direction) orthogonal to the relative scanning direction (X-axis direction). The shift movement mechanism 17 includes, for example, a rail member provided on the beam member 14b of the first gantry portion 14 and extending in the Y-axis direction. The first head portion 11 equipped with the rotation mechanism 16 is slidably attached to the rail member, and the linear motor attached to the first head portion 11 is driven and controlled so that the first head portion 11 is Y-axis. It can be moved and stopped at any position in the direction. The shift movement mechanism 17 allows the first head portion 11 to move minutely in the Y-axis direction.

The rotation mechanism 16 and the shift movement mechanism 17 are driven and controlled by the control device 50A. The first coating unit 10A is equipped with a rotation mechanism 16 and a shift movement mechanism 17, but in another configuration example, only one of the rotation mechanism 16 and the shift movement mechanism 17 is equipped. It may be configured.

The second coating unit 20A includes a second head portion 21, a second gantry portion 24, a rotation mechanism 26, and a shift movement mechanism 27.
The rotation mechanism 26 is a rotation mechanism that rotates the second head portion 21 in the vertical axis direction (Z-axis direction), and is configured in substantially the same manner as the above-mentioned rotation mechanism 16.
The shift movement mechanism 27 is a linear motion mechanism that moves the second head portion 21 in a direction (Y-axis direction) orthogonal to the relative scanning direction (X-axis direction), and is the same as the shift movement mechanism 17 described above. It is configured in.

The rotation mechanism 26 and the shift movement mechanism 27 are driven and controlled by the control device 50A. The second coating unit 20A is equipped with a rotation mechanism 26 and a shift movement mechanism 27, but in another configuration example, only one of the rotation mechanism 26 and the shift movement mechanism 27 is equipped. It may be configured.

The inspection unit 60 is in a state of landing on the base material of the first droplets ejected from the nozzles 12a and 13a of the first head portion 11 and the second droplets ejected from the nozzles 22a and 23a of the second head portion 21. It consists of a device for inspecting. The inspection unit 60 is arranged in each of the first head unit 11 and the second head unit 21. The inspection unit 60 includes, for example, one or more imaging cameras, an image processing unit, and an inspection processing unit.
The imaging camera captures the landing state of the first droplet and the second droplet ejected from the nozzles of the first head portion 11 and the second head portion 21 onto the test substrate.
The image processing unit takes in image data captured by the imaging camera and performs image processing for performing subsequent inspection processing.
The inspection processing unit inspects the landing position and landing area of the first droplet and the second droplet ejected from each nozzle based on the image data processed by the image processing unit, and also inspects the landing area and non-ejection. The presence or absence is inspected, and these inspection data are sent to the control device 50A.

The control device 50A has a function of operating as a control unit, a selection unit, and a position adjustment unit constituting the inkjet coating device according to the present invention.
The control device 50A functions as a selection unit. That is, the control device 50A has a plurality of nozzles for ejecting the first droplet from the plurality of nozzles 12a and 13a of the first head unit 11 and a plurality of the second head unit 21 in consideration of the inspection result by the inspection unit 60. Control is performed to select a combination with the nozzle for ejecting the second droplet from the nozzles 22a and 23a of the above.

The control device 50A functions as a position adjusting unit. That is, when there is a place where an appropriate nozzle combination cannot be selected, the control device 50A operates at least one of the rotation mechanism 16 and the shift movement mechanism 17 of the first coating unit 10A to be adjacent or at least one. Control is performed to adjust the position of the first head portion 11 so that a combination of nozzles capable of ejecting the first droplet and the second droplet can be selected at a position where the portions overlap.

Further, when there is a place where an appropriate nozzle combination cannot be selected, the control device 50A operates at least one of the rotation mechanism 26 and the shift movement mechanism 27 of the second coating unit 20A to be adjacent or at least one. Control is performed to adjust the position of the second head portion 21 so that a combination of nozzles capable of ejecting the first droplet and the second droplet can be selected at a position where the portions overlap.

FIG. 8 is a partially enlarged view for explaining the operation mechanism of the first head portion 11 and the second head portion 21 constituting the inkjet coating device 1A according to the embodiment (2).
In FIG. 8, for convenience, the configurations of the peripheral portions of the first coating unit 10A and the second coating unit 20A are simplified, and the rotation mechanism 16 and the shift moving mechanism 17 of the first coating unit 10A and the second coating are described. The description of the rotation mechanism 26 and the shift movement mechanism 27 of the unit 20A is omitted.

In the operation example shown in FIG. 8, the shift movement mechanism 17 of the first coating unit 10A is driven, the first head portion 11 moves slightly in the Y-axis direction, and the positions of the nozzles 12a and 13a are slightly moved in the Y-axis direction. It has been adjusted.
Further, the rotation mechanism 26 of the second coating unit 20A is driven to slightly rotate the second head portion 21 around the Z-axis, and the positions of the nozzles 22a and 23a are finely adjusted to the center of the Z-axis.

With the above configuration, the positions of the nozzles 12a and 13a and the nozzles 22a and 23a can be adjusted. Therefore, even if there is a place where the nozzle combination cannot be properly selected in the initial nozzle arrangement state, at least one of the rotation mechanisms 16 and 26 and the shift movement mechanisms 17 and 27 is driven to drive the first droplet. It is possible to select a combination of nozzles capable of ejecting the second droplet and the second droplet at a position where they are adjacent to each other or at least a part of them overlap.

FIG. 9 is a flowchart showing the operation of the inkjet coating device 1A according to the embodiment (2).
In step S11, a test base material (not shown) is carried into the coating stage 40.
In step S12, the control device 50A reads the inspection pattern to be applied to the test base material and the combination data of the discharge nozzle for the inspection pattern.

In step S13, the control device 50A drives the scanning unit 30 to start control for scanning the first coating unit 10A and the second coating unit 20A in the X-axis direction, and the first coating unit 10A and the second coating unit 10A and the second coating unit 20A are scanned. The unit 20A and the unit 20A are moved onto the test substrate.

In step S14, the control device 50A ejects the first droplet from the nozzles 12a and 13a of the first head portion 11 based on the combination data of the inspection pattern and the ejection nozzle for the inspection pattern. Start control. That is, the control device 50A moves the first head portion 11 and the second head portion 21 in the X-axis direction, and at the coordinate positions forming the inspection pattern, the nozzles 12a and 13a of the first head portion 11 respectively. Controls the ejection of the first droplet from.

In step S15, the control device 50A ejects the second droplet from the nozzles 22a and 23a of the second head portion 21 based on the combination data of the inspection pattern and the ejection nozzle for the inspection pattern. Start control. That is, in the control device 50A, while moving the first head portion 11 and the second head portion 21 in the X-axis direction, the second head portion 21 discharges a predetermined amount to the region where the first head portion 11 has passed first. Control is performed to eject the second droplet at the timing when it arrives with a time lag.

In step S16, after the inspection unit 60 finishes printing the inspection pattern by the first head unit 11 and the second head unit 21, the inspection unit 60 is ejected from the nozzles 12a and 13a of the first head unit 11 to the test substrate. A process of inspecting the landing state of the first droplet and the second droplet ejected from the second head portion 21 is performed at a position where the first droplet is adjacent to or at least a part of the first droplet overlaps.
For example, based on the captured image of the landed state, the first droplet and the second droplet are formed for each combination of the nozzles 12a and 13a of the first head portion 11 and the nozzles 22a and 23a of the second head portion 21. The state of the landing position, the state of the landing area, and the presence or absence of non-ejection are inspected.
Then, the inspection unit 60 includes the nozzles 12a and 13a (nth row, mth column nozzles) of the first head unit 11 and the corresponding nozzles 22a and 23a (nth row) of the second head unit 21. , M-th row nozzle) is determined.

In step S17, the inspection unit 60 stores the landing inspection data including the determination data of whether or not the discharge nozzles can be combined, which is determined in step S16.

In step S18, the test base material is carried out from the coating stage 40, the inspection process by the inspection unit 60 is completed, and the process proceeds to step S19.
In step S19, the control device 50A drives the scanning unit 30 to control the first coating unit 10A and the second coating unit 20A to move to the initial positions.

In step S20, the base material W is carried into the coating stage 40. At this time, for example, the positioning alignment mark provided on the base material W is read, and the position where the coating pattern is formed with reference to the alignment mark, that is, the first droplet and the second droplet. It may be configured so that the position where the landing is landed is set.

In step S21, the control device 50A reads the design data for forming a predetermined coating pattern on the base material W. The design data includes, for example, coordinate data on the base material W that ejects the first droplet and the second droplet, and each nozzle 12a of the first head portion 11 that ejects the first droplet for each coordinate. , 13a and the combination data of the nozzles 22a and 23a of the second head portion 21 for ejecting the second droplet are included.

In step S22, the control device 50A considers the inspection data of the landing state for each coating pattern formed on the base material W, and the nozzles 12a and 13a of the first head portion 11 and the nozzles of the second head portion 21. A combination with 22a and 23a is selected, and these are stored as combination data of the discharge nozzle. For example, the combination data of the row number and the column number of each nozzle is stored.

In step S23, the control device 50A cannot select a combination of ejection nozzles for each coordinate on the base material W that ejects the first droplet and the second droplet based on the inspection data of the landing state. Determine if there was any.
In step S23, if it is determined that there is a place where the combination of discharge nozzles cannot be selected, the process proceeds to step S24, while if it is determined that there is no place where the combination of discharge nozzles cannot be selected, the process proceeds to step S25.

In step S24, the first head portion 11 and the second head portion 21 are selected so that the control device 50A can select a combination of discharge nozzles that minimizes deviation from the discharge time lag at a location where the combination of discharge nozzles cannot be selected. Calculate the position adjustment amount of at least one of them.

The control device 50A calculates, for example, at least one of the shift adjustment amount in the Y-axis direction of at least one of the first head portion 11 and the second head portion 21, and at least one of the rotation amounts of the Z-axis center. .. Then, the control device 50A stores the combination data of the discharge nozzles, the shift adjustment amount, and the position adjustment amount including at least one of the rotation amounts in association with each other for the portion where the combination of the discharge nozzles cannot be selected.

In step S25, the control device 50A drives the scanning unit 30 to start the control of moving the first coating unit 10A and the second coating unit 20A at a predetermined speed in the X-axis direction.

In step S26, the control device 50A comprises coordinate data on the base material W that ejects the first droplet and the second droplet, combination data of the nozzle that ejects each droplet for each coordinate, and the position. Based on the adjustment amount, the control of ejecting the first droplet from the plurality of nozzles 12a and 13a of the first head portion 11 is started.
That is, the control device 50A moves the first head portion 11 and the second head portion 21 at the same speed in the X-axis direction, and at the coordinate position forming the coating pattern on the base material W, the nozzle with respect to the coordinate position. Control is performed to eject the first droplet from the nozzle of the first head portion 11 selected as the combination data of. When the position adjustment amount is set, at least one of the first head portion 11 and the second head portion 21 is shifted and adjusted in the Y-axis direction based on the shift adjustment amount or the rotation amount. A combination of nozzles is selected in which the deviation from the discharge time lag is minimized by rotating in the Z-axis direction. On the upper surface of the base material W through which the first head portion 11 has passed, a droplet pattern is formed by the first droplets ejected at predetermined coordinate positions based on the design data of the coating pattern.

In step S27, the control device 50A comprises coordinate data on the base material W that ejects the first droplet and the second droplet, combination data of the nozzle that ejects each droplet for each coordinate, and the position. Based on the adjustment amount, the control of ejecting the second droplet from the plurality of nozzles 22a and 23a of the second head portion 21 is started.
That is, in the control device 50A, the second head portion 21 moves in the region where the first head portion 11 has passed first while moving the first head portion 11 and the second head portion 21 at the same speed in the X-axis direction. Control to eject the second droplet at a position adjacent to the first droplet ejected on the base material W or at a position where at least a part of the first droplet overlaps at the timing of reaching with a predetermined ejection time lag. conduct.
On the upper surface of the base material W through which the second head portion 21 has passed, the first droplet and the second droplet ejected at a predetermined coordinate position based on the design data of the coating pattern are adjacent to each other or at least a part thereof overlaps with each other. A droplet pattern in the state of being formed is formed.

In step S28, the control device 50A determines whether or not the scanning of the base material W has been completed, and if it is determined that the scanning has not been completed, the control device 50A returns to step S25 to perform the coating process, while completing the scanning. If it is determined, the process proceeds to step S29.

In step S29, the base material W on which the coating pattern is formed is carried out from the coating stage 40, the coating process of the base material W is completed, and the control device 50A drives the scanning unit 30 to drive the first coating unit 10A and the first coating unit 10A. 2 Control is performed to move the coating unit 20A and the coating unit 20A to the initial position.

In the inkjet coating device 1A according to the embodiment (2), the landing state of the first droplet ejected from the first head portion 11 and the second droplet ejected from the second head portion 21 by the inspection unit 60. Is inspected, and in consideration of the inspection data of the landing state, the nozzles 12a and 13a of the first head portion 11 and the nozzles 22a and 23a of the second head portion 21 that eject a pair of droplets that are adjacent to each other or at least partially overlap each other. The combination with is selected.

Further, in the inkjet coating device 1A, when there is a place where the nozzle combination cannot be selected, the nozzle combination capable of ejecting the first droplet and the second droplet at a position where they are adjacent to each other or at least a part of them overlap can be selected. , The control device 50A operates at least one of the rotation mechanisms 16 and 26 and the shift movement mechanisms 17 and 27 to adjust the nozzle position.

Therefore, according to the inkjet coating device 1A, even if there is a place where the combination of the nozzles 12a and 13a and the nozzles 22a and 23a cannot be properly selected, the nozzle suitable for ejecting the droplets, that is, the ejection time lag. It is possible to select a combination of nozzles that can be ejected at a position where the deviation from the nozzle is small and the nozzles are adjacent to each other or at least a part of the nozzles overlap each other, and the adaptability can be further enhanced.

Although the embodiments of the present invention have been described in detail above, the above description is merely an example of the present invention in all respects. It goes without saying that various improvements, changes, or combinations of configurations are possible without departing from the scope of the present invention.

In the above embodiments (1) and (2), the first head portion 11 is attached to the first gantry portion 14 and the second head portion 21 is attached to the second gantry portion 24, but another configuration example is provided. Then, the first head portion 11 and the second head portion 21 may be attached side by side in the scanning direction to one gantry unit. Further, a plurality of first head modules 12 and 13 and a plurality of second head modules 22 and 23 may be arranged side by side in the scanning direction in one head portion. With such a configuration, the physical distance (interval) between the first head modules 12 and 13 and the plurality of second head modules 22 and 23 is shortened, and thus the discharge time lag can be further shortened. The droplet and the second droplet can be reliably brought into contact with each other in a liquid state, and a more uniform fine pattern can be formed.

INDUSTRIAL APPLICABILITY The present invention uses inkjet printing technology to manufacture various electronic devices such as flexible wiring substrates, organic EL displays, electronic paper, and coil antennas. It can be widely used when it is required to uniformly form a pattern formed by utilizing compatibility in a large area and improve mass productivity.

1, 1A Inkjet coating device 10, 10A 1st coating unit 11 1st head portion 12, 13 1st head module 12a, 12a1, 12a2, 13a, 13a1, 13a2 Nozzle 14 1st gantry portion 14a Leg portion 14b Beam member 15 First 1 Droplet 16 Rotation mechanism 17 Shift movement mechanism 20, 20A Second coating unit 21 Second head portion 22, 23 Second head module 22a, 22a1, 22a2, 23a, 23a1, 23a2 Nozzle 24 Second gantry portion 24a Leg portion 24b Beam member 25 Second droplet 26 Rotating mechanism 27 Shift moving mechanism 30 Scanning unit 40 Coating stage 50, 50A Control device 60 Inspection unit W Base material P Nozzle pitch PT Coating pattern

Claims (11)

An inkjet coating device that forms a coating pattern on a substrate.
A first head portion having a plurality of nozzles for ejecting the first droplet for forming the coating pattern, and a first head portion.
A second head portion having a property of being immiscible with the first droplet and having a plurality of nozzles for ejecting the second droplet for forming the coating pattern.
A scanning unit that scans the first head portion and the second head portion relative to the substrate, and
In the relative scanning, the control of ejecting the first droplet from the plurality of nozzles of the first head portion and the control of ejecting the second droplet from the plurality of nozzles of the second head portion. It is equipped with a control unit that performs
The control unit
With a discharge time lag according to the relative scanning speed and the arrangement interval of the first head portion and the second head portion, the first droplet and the second droplet are adjacent to each other or at least partially overlapped with each other. An inkjet coating device characterized in that it is configured so that ejection can be controlled. A combination of a nozzle that ejects the first droplet from the plurality of nozzles of the first head portion and a nozzle that ejects the second droplet from the plurality of nozzles of the second head portion is selected. The inkjet coating apparatus according to claim 1, further comprising a selection unit. An inspection unit for inspecting the landing state of the first droplet discharged from the first head portion and the second droplet discharged from the second head portion is provided.
The selection section
In consideration of the inspection data of the landing state obtained by the inspection in the inspection unit, a nozzle for ejecting the first droplet from the plurality of nozzles in the first head unit and a plurality of nozzles in the second head unit. The inkjet coating apparatus according to claim 2, wherein the combination with the nozzle for ejecting the second droplet is selected from the nozzles of the above. A rotation mechanism that rotates at least one of the first head portion and the second head portion in the vertical axis direction, and / or at least one of the first head portion and the second head portion is relative to the first head portion. A shift movement mechanism that moves in a direction orthogonal to the scanning direction,
A position adjusting unit for operating at least one of the rotation mechanism and the shift moving mechanism to adjust the nozzle position of at least one of the first head portion and the second head portion is further provided.
The position adjustment unit
When there is a place where the nozzle combination cannot be selected by the selection unit, the nozzle combination capable of ejecting the first droplet and the second droplet at a position where they are adjacent to each other or at least a part of them overlap can be selected. The inkjet coating apparatus according to claim 2 or 3, wherein the nozzle position adjustment is performed. The first head portion is configured to include a plurality of rows of nozzle rows.
The second head portion is configured to include a plurality of rows of nozzle rows.
The selection section
A nozzle that ejects the first droplet from the plurality of rows of nozzles in the first head portion and a nozzle that ejects the second droplet from the plurality of rows of nozzle rows in the second head portion. The inkjet coating apparatus according to any one of claims 2 to 4, wherein when selecting a combination with, nozzles in rows corresponding to each other are selected. The first head portion and the second head portion
The item according to any one of claims 1 to 5, wherein the number of nozzles capable of forming the coating pattern in the entire coating region of the substrate in one scanning in the relative scanning direction is provided. Inkjet coating equipment. Of the first droplet and the second droplet, the one having a relatively high liquid repellency to the base material is discharged first, and the one having a relatively low liquid repellency to the base material is discharged later. The inkjet coating apparatus according to any one of claims 1 to 6, wherein the first head portion and the second head portion are arranged as described above. An inkjet coating method that forms a coating pattern on a substrate.
The first head portion for ejecting the first droplet for forming the coating pattern and the first droplet have a property of not mixing with each other, and the second droplet for forming the coating pattern is formed. The first droplet is ejected from a plurality of nozzles of the first head portion while the second head portion to be ejected is scanned relative to the base material, and the first droplet is ejected. The second droplet from the plurality of nozzles of the second head portion is placed adjacent to or at a position where at least a part of the landing position on the base material overlaps with the relative scanning speed and the first head portion. An inkjet coating method characterized by discharging with a discharge time lag according to the arrangement interval of the second head portion. A nozzle that ejects the first droplet from a plurality of nozzles of the first head portion so that the first droplet and the second droplet are ejected at positions adjacent to each other or at least partially overlapping. The inkjet coating method according to claim 8, wherein the combination of the nozzle and the nozzle for ejecting the second droplet is selected from the plurality of nozzles of the second head portion. The first head portion and the second head portion are provided with a number of nozzles capable of coating the entire coating region of the base material in one scan in the relative scanning direction.
After applying dummy coating around the coating area of the base material,
Either claim 8 or 9, wherein the first head portion and the second head portion coat the entire coating region of the base material in one scan in the relative scanning direction. The inkjet coating method according to the section. Of the first droplet and the second droplet, the one having a relatively high liquid repellency to the base material is discharged first, and the one having a relatively low liquid repellency to the base material is discharged later. The inkjet coating method according to any one of claims 8 to 10.

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