JP2021145690A - Fluid sterilizer, and fluid sterilization system - Google Patents

Abstract

To provide a fluid sterilizer capable of suppressing temperature rise of a light source with a simple structure, and a fluid sterilization system.SOLUTION: A fluid sterilizer of embodiments comprises: a cylindrical part; a supply head provided at one end of the cylindrical part; a discharge head provided at the other end of the cylindrical part; a holder provided on the discharge head; a window which is provided on the discharge head and whose one surface is exposed to a channel provided in the discharge head; a substrate which is provided on the surface on the window side of the holder; a light emitting element provided on the substrate, and capable of radiating ultraviolet to the window; and a heat insulating part which is provided between the discharge head and the holder, and has a heat conductivity lower than that of the holder.SELECTED DRAWING: Figure 1

Description

Embodiments of the present invention relate to a fluid sterilizer and a fluid sterilizer system.

There is a fluid sterilizer that sterilizes a fluid such as water by irradiating it with ultraviolet rays. As a light source provided in a fluid sterilizer, an ultraviolet light emitting diode (Ultraviolet LED) has come to be used.

Here, the light emitting diode has a temperature characteristic. For example, if the temperature of the light emitting diode exceeds the maximum junction temperature (maximum junction temperature), the luminous flux may decrease, the light may not be lit, or the life of the light emitting diode may be shortened. Therefore, a technique for water-cooling a block to which a substrate on which a light emitting diode is mounted has been proposed.

However, when the fluid sterilizer sterilizes a fluid having a high temperature, the heat of the fluid is transferred to the block on which the substrate on which the light emitting diode is mounted is transferred, and the temperature of the light emitting diode may become high. In this case, if the capacity of the cooling device is increased, the size and cost of the fluid sterilizer will be increased.
Therefore, it has been desired to develop a technique capable of suppressing the temperature rise of the light source with a simple configuration.

JP-A-2018-69166

An object to be solved by the present invention is to provide a fluid sterilizer and a fluid sterilization system capable of suppressing a temperature rise of a light source with a simple configuration.

The fluid sterilizer according to the embodiment is provided on the cylinder portion; a supply head provided on one end of the cylinder portion; a discharge head provided on the other end portion of the cylinder portion; and on the discharge head. Holder; a window provided on the discharge head, one surface of which is exposed to a flow path provided on the discharge head; a substrate provided on the window side surface of the holder; It is provided with a light emitting element provided and capable of irradiating ultraviolet rays toward the window; and a heat insulating portion provided between the discharge head and the holder and having a thermal conductivity lower than that of the holder. doing.

According to the embodiment of the present invention, it is possible to provide a fluid sterilizer and a fluid sterilization system capable of suppressing an increase in temperature of a light source with a simple configuration.

It is a schematic cross-sectional view for exemplifying the fluid sterilizer which concerns on this embodiment. (A) to (c) are schematic views for exemplifying the heat insulating portion according to another embodiment. It is a table for exemplifying the effect of a heat insulating part. It is a schematic diagram for exemplifying the fluid sterilization system which concerns on this embodiment.

Hereinafter, embodiments will be illustrated with reference to the drawings. In each drawing, similar components are designated by the same reference numerals and detailed description thereof will be omitted as appropriate.

(Fluid sterilizer 1)
The fluid sterilizer 1 according to the present embodiment can be used, for example, when sterilizing a fluid having a temperature higher than room temperature (for example, water or air having a temperature of 40 ° C. or higher). However, the fluid sterilizer 1 can also be used to sterilize a fluid at room temperature or lower (for example, water or air at 25 ° C. or lower). In the following, as an example, a case where the fluid sterilizer 1 is used for sterilizing a liquid having a temperature of 40 ° C. or higher will be described.

FIG. 1 is a schematic cross-sectional view for exemplifying the fluid sterilizer 1 according to the present embodiment.
As shown in FIG. 1, the fluid sterilizer 1 is provided with a cylinder portion 2, a reflection portion 3, a supply head 4, a discharge head 5, a light source 6, a window 7, a cooling portion 8, a cover 9, and a heat insulating portion 10. be able to.

The tubular portion 2 has a cylindrical shape, and both end portions are open. The tubular portion 2 can be, for example, a cylindrical tube. The material of the tubular portion 2 is not particularly limited as long as it is resistant to ultraviolet rays and the fluid 301a for sterilization. The material of the cylinder portion 2 can be, for example, quartz or a fluororesin such as polytetrafluoroethylene (PTFE).

The reflecting portion 3 can be provided on the outer surface of the tubular portion 2. The tubular portion 2 may be formed of a material that transmits ultraviolet rays, such as quartz. When a part of the ultraviolet rays emitted from the light source 6 passes through the tubular portion 2 and leaks to the outside, the processing capacity of the fluid sterilizer 1 is lowered. If the reflecting portion 3 is provided on the outer surface of the tubular portion 2, the ultraviolet rays directed to the outside of the tubular portion 2 can be reflected toward the inside of the tubular portion 2. Therefore, the utilization efficiency of the ultraviolet rays emitted from the light source 6 can be improved, and the number of light emitting elements 61 can be reduced. If the number of light emitting elements 61 is reduced, the size and cost of the light source 6 can be reduced.

The reflective portion 3 can be formed of a material having a high reflectance of ultraviolet rays. The material of the reflective portion 3 can be, for example, aluminum, an aluminum alloy, silicon dioxide, or the like. The reflective portion 3 has a plate shape and can be attached to the outer surface of the tubular portion 2. Further, a film-like reflecting portion 3 can be formed on the outer surface of the tubular portion 2 by using a film forming method such as a sputtering method or a vapor deposition method.

Further, although the case where the reflective portion 3 is provided on the outer surface of the tubular portion 2 is illustrated, the reflective portion 3 may be provided on the inner side surface of the tubular portion 2. However, if corrosion or the like occurs due to contact between the reflective portion 3 and the fluid 301a (for example, water) before sterilization, or if the material of the reflective portion 3 melts out, the reflective portion is formed on the outer surface of the tubular portion 2. It is preferable to provide 3.

Further, the reflective portion 3 can be omitted. For example, when the tubular portion 2 is formed of a material that reflects ultraviolet rays (for example, a white inorganic material or a white resin), the reflective portion 3 can be omitted.

The supply head 4 is provided at one end of the tubular portion 2. The supply head 4 has, for example, a columnar shape and has a hole 4a penetrating between one end face and the other end face. One opening of the hole 4a is connected to the internal space of the tubular portion 2. The other opening of the hole 4a becomes the supply port 4a1. A fluid supply unit (for example, a tank 101, a heater 102, a pump 103, and a flow rate control valve 104) capable of supplying a fluid 301a having a temperature higher than room temperature (25 ° C.) to the supply port 4a1 via a pipe 4b, for example. ) Can be connected (see FIG. 4).

Further, a sealing member 4c such as an O-ring can be provided on the inner wall of the hole 4a. The seal member 4c is sealed so that the space between the supply head 4 and the cylinder portion 2 is liquid-tight. Further, a filter, a straightening vane, or the like can be provided inside the hole 4a.

The material of the supply head 4 is not particularly limited as long as it is resistant to the fluid 301a and ultraviolet rays. The material of the supply head 4 can be, for example, a metal such as stainless steel.

The discharge head 5 is provided at the other end of the tubular portion 2. The discharge head 5 has, for example, a columnar shape and has holes 5a and 5d. One opening of the hole 5a is connected to the internal space of the tubular portion 2. The other opening of the hole 5a is a discharge port 5a1 provided on the side surface of the discharge head 5. A tank 105, a cleaning device, or the like can be connected to the discharge port 5a1 via the pipe 5b (see FIG. 4).

Further, a sealing member 5c such as an O-ring can be provided on the inner wall of the hole 5a. The seal member 5c is sealed so that the space between the discharge head 5 and the cylinder portion 2 is liquid-tight.
The material of the discharge head 5 is not particularly limited as long as it is resistant to the sterilized fluid 301b and ultraviolet rays. The material of the discharge head 5 can be, for example, a metal such as stainless steel.

As shown in FIG. 1, the hole 5a is a bent flow path. The hole 5a has a flow path 5a2 substantially parallel to the end surface of the discharge head 5 on the tubular portion 2 side, and a flow path 5a3 extending in the axial direction of the discharge head 5.

The flow path 5a2 is open to the end surface of the discharge head 5 on the tubular portion 2 side. Further, the window 7 is exposed on the inner wall of the flow path 5a2. The flow path 5a2 can be, for example, a disk-shaped space.
One end of the flow path 5a3 is connected to the vicinity of the peripheral edge of the flow path 5a2. A discharge port 5a1 is connected to the other end of the flow path 5a3. The flow path 5a3 can be, for example, a cylindrical space.

As shown in FIG. 1, the fluid 301a supplied to the inside of the tubular portion 2 via the supply head 4 is supplied to the inside of the flow path 5a2. The fluid 301a supplied to the inside of the flow path 5a2 hits the window 7 and flows along the surface of the window 7 toward the peripheral edge side of the window 7. At this time, the fluid 301a is sterilized by the ultraviolet rays emitted through the window 7. The sterilized fluid 301b is discharged from the discharge port 5a1 via the flow path 5a3.

If the hole 5a is a flow path bent in this way, the flow velocity of the fluid 301a flowing inside the flow path 5a2 can be slowed down. Therefore, the residence time of the fluid 301a in the region where the window 7 is exposed can be lengthened, so that the bactericidal effect can be improved.

A part of the ultraviolet rays irradiated to the flow path 5a2 is irradiated to the internal space of the tubular portion 2. Further, a part of the ultraviolet rays irradiated to the internal space of the tubular portion 2 is reflected by the reflecting portion 3. Therefore, the fluid 301a is also sterilized in the internal space of the tubular portion 2.

The holes 5d are open to the end surface of the discharge head 5 on the side opposite to the tubular portion 2 side and the flow path 5a2.

The light source 6 is detachably provided on the discharge head 5.
The light source 6 has, for example, a light emitting element 61, a substrate 62, and a holder 63.
The light emitting element 61 is provided on the substrate 62 and can irradiate the window 7 with ultraviolet rays. At least one light emitting element 61 can be provided. When a plurality of light emitting elements 61 are provided, the plurality of light emitting elements 61 can be connected in series. The light emitting element 61 is not particularly limited as long as it is an element that generates ultraviolet rays. The light emitting element 61 can be, for example, a light emitting diode or a laser diode.

The peak wavelength of the ultraviolet rays emitted from the light emitting element 61 is not particularly limited as long as it has a bactericidal effect. However, when the peak wavelength is 260 nm to 280 nm, the bactericidal effect can be improved. Therefore, it is preferable to use a light emitting element 61 capable of irradiating ultraviolet rays having a peak wavelength of 260 nm to 280 nm.

The substrate 62 has a plate shape and is provided on the surface of the holder 63 on the window 7 side. A wiring pattern can be provided on one surface of the substrate 62. The material of the substrate 62 is preferably resistant to ultraviolet rays. The material of the substrate 62 can be, for example, ceramics such as aluminum oxide. The substrate 62 may be a metal plate whose surface is covered with an inorganic material (metal core substrate). If the material of the substrate 62 is ceramics or the like, or if the substrate 62 is a metal core substrate, resistance to ultraviolet rays and high heat dissipation can be obtained.

The holder 63 can be detachably provided on the discharge head 5. The light emitting element 61 has a longer life than that of a discharge lamp or the like, but the luminous efficiency decreases as the lighting time becomes longer. It is also conceivable that the light emitting element 61 may break down and be turned off. If the holder 63 is detachably provided on the discharge head 5, the light emitting element 61 can be easily replaced.

The holder 63 can have, for example, a flange 63a and a convex portion 63b. The flange 63a and the convex portion 63b can be integrally formed.
The flange 63a has a plate shape and can be attached to the end surface of the discharge head 5 on the side opposite to the tubular portion 2 side. The flange 63a can be attached to the discharge head 5 using, for example, a fastening member such as a screw.

The convex portion 63b is provided on the surface of the flange 63a on the tubular portion 2 side. A substrate 62 on which the light emitting element 61 is mounted can be provided on the end surface of the convex portion 63b on the tubular portion 2 side. The convex portion 63b has a function of determining the position of the light emitting element 61 with respect to the discharge head 5. For example, the side surface of the convex portion 63b can be brought into contact with the inner wall of the hole 5d of the discharge head 5 via the heat insulating portion 10. In this way, the position of the light emitting element 61 with respect to the discharge head 5 can be determined.

Further, since the hole 5d of the discharge head 5 and the flow path 5a2 are separated by the window 7, the light source 6 can be attached and detached even when the fluid 301a is present in the flow path 5a2. Therefore, maintainability can be improved.

Further, the holder 63 can have a function of releasing the heat generated in the light emitting element 61 to the outside. Therefore, the holder 63 is preferably formed from a material having high thermal conductivity. The holder 63 can be formed of, for example, a metal such as aluminum, copper, or stainless steel. Further, heat radiation fins may be provided on the end surface of the holder 63 on the side opposite to the light emitting element 61 side, the side surface, and the like.

The window 7 has a plate shape and is provided on the inner wall of the hole 5d of the discharge head 5 so as to be liquid-tight. That is, the window 7 is provided with the discharge head 5, and one surface of the window 7 is exposed to the flow path 5a2 provided in the discharge head 5. A space 5d1 can be provided between the window 7 and the light emitting element 61. The window 7 can be formed of a material that is capable of transmitting ultraviolet rays and has resistance to ultraviolet rays and the fluid 301a. The window 7 can be formed of, for example, quartz, a fluororesin that transmits ultraviolet rays, or the like.

Further, an antireflection film may be provided on the surface of the window 7 on the light emitting element 61 side. If the antireflection film is provided, it is possible to prevent the ultraviolet rays emitted from the light emitting element 61 from being reflected by the window 7 and becoming difficult to irradiate the fluid 301a. That is, it is possible to improve the utilization efficiency of the ultraviolet rays emitted from the light emitting element 61.

Further, an antifouling film may be provided on the surface of the window 7 on the cylinder portion 2 side. The fluid 301a may contain impurities. When impurities adhere to the window 7, it becomes difficult for the ultraviolet rays emitted from the light emitting element 61 to pass through the window 7. If the antifouling film is provided, it is possible to prevent impurities from adhering to the window 7. Therefore, it is possible to suppress the difficulty in irradiating the fluid 301a with ultraviolet rays over time.

The cooling unit 8 can be provided, for example, on the side of the holder 63 opposite to the light emitting element 61 side. The cooling unit 8 can be, for example, a fan that supplies air to the holder 63. When the holder 63 is provided with heat radiation fins, the cooling unit 8 can be a fan that supplies air to the heat radiation fins. Further, the cooling unit 8 may supply the liquid to the flow path provided in the holder 63, for example. That is, the cooling unit 8 may be an air-cooled type or a liquid-cooled type.

The cooling unit 8 may be omitted depending on the number of light emitting elements 61, the amount of heat generated, the temperature and flow rate of the fluid 301a, and the like. However, if the cooling unit 8 is provided, it is difficult for the temperature of the light emitting element 61 to exceed the maximum junction temperature (maximum junction temperature) even if the number of light emitting elements 61 and the applied power are increased.

Further, if the cooling unit 8 is provided, the temperature of the light emitting element 61 is unlikely to exceed the maximum junction temperature even if the temperature of the fluid 301a rises or the flow rate of the hot fluid 301a increases. Therefore, the range of the fluid 301a that can be handled can be expanded.

The cover 9 has a tubular shape, and the tubular portion 2 and the reflective portion 3 can be housed in the internal space. The material of the cover 9 is not particularly limited as long as it has a certain degree of rigidity. The material of the cover 9 can be, for example, a metal such as stainless steel. The cover 9 can be fixed to, for example, the supply head 4 and the discharge head 5. The method of fixing the cover 9 is not particularly limited. For example, one end of the cover 9 can be provided inside the groove provided in the supply head 4, and the other end of the cover 9 can be provided inside the groove provided in the discharge head 5. Further, for example, flanges may be provided at the ends on both sides of the cover 9, one flange may be fixed to the supply head 4 with a screw or the like, and the other flange may be fixed to the discharge head 5 with a screw or the like.

As will be described later, a fluid 301a having a high temperature (for example, a fluid 301a having a temperature of about 40 ° C. to 90 ° C.) may be supplied to the fluid sterilizer 1. The heat of the fluid 301a is transferred to the light emitting element 61 through the window 7. As described above, since there is a space between the window 7 and the light emitting element 61, heat transfer through the window 7 can be suppressed.

However, the heat of the fluid 301a is transferred to the light emitting element 61 via the discharge head 5, the holder 63, and the substrate 62. Since the discharge head 5 and the holder 63 are made of metal or the like, heat can be easily transferred. Further, since the substrate 62 is formed of ceramics or the like, or is a metal core substrate or the like, heat can be easily transferred. Therefore, the heat of the fluid 301a is easily transferred to the light emitting element 61 via the discharge head 5, the holder 63, and the substrate 62, and the temperature of the light emitting element 61 may exceed the maximum junction temperature. If the temperature of the light emitting element 61 exceeds the maximum junction temperature, the luminous flux may be lowered, the light may not be turned on, or the life of the light emitting diode may be shortened.

In this case, if the capacity of the cooling unit 8 is increased, the size and cost of the fluid sterilizer 1 will be increased.
Therefore, the fluid sterilizer 1 according to the present embodiment is provided with a heat insulating portion 10.

The heat insulating portion 10 can be provided between the discharge head 5 and the holder 63. The heat insulating portion 10 has a thermal conductivity lower than that of the holder 63. The heat insulating portion 10 can be formed of, for example, a resin such as a phenol resin or a fluororesin. The thickness of the heat insulating portion 10 (distance between the discharge head 5 and the holder 63) can be about 1 mm to 3 mm. Further, holes, grooves and the like can be provided in the heat insulating portion 10. If the heat insulating portion 10 is provided with holes, grooves, or the like, it is possible to form a region filled with air having a thermal conductivity lower than that of the resin. That is, the heat insulating portion 10 can contain air. Therefore, the overall thermal conductivity of the heat insulating portion 10 can be lowered.
If the heat insulating portion 10 is provided, the heat of the fluid 301a can be suppressed from being transferred from the discharge head 5 to the holder 63, so that the temperature rise of the light emitting element 61 can be suppressed.

2 (a) to 2 (c) are schematic views for exemplifying the heat insulating portion 10a according to another embodiment.
As shown in FIGS. 2A to 2C, the heat insulating portion 10a can be a space provided between the discharge head 5 and the holder 63. The space is filled with a gas (for example, air) in the environment in which the fluid sterilizer 1 is provided. That is, the heat insulating portion 10a can contain air. In general, the thermal conductivity of a gas is lower than the thermal conductivity of a solid such as a resin or metal, so that the heat of the fluid 301a can be further suppressed from being transferred from the discharge head 5 to the holder 63.

For example, as shown in FIG. 2A, the holder 63 is provided with the protrusion 63c, and the tip of the protrusion 63c can be brought into contact with the discharge head 5. In this way, a space (heat insulating portion 10a) can be provided between the discharge head 5 and the holder 63.

The protrusion 63c maintains a space between the discharge head 5 and the holder 63, and can determine the position of the holder 63 (light source 6) with respect to the discharge head 5. Therefore, a plurality of protrusions 63c can be provided. In this case, since heat is easily transferred to the protrusions 63c, if the number of protrusions 63c is increased too much, the heat insulating effect may be reduced. Therefore, the number and spacing of the protrusions 63c can be appropriately changed according to the size of the discharge head 5 and the holder 63 and the temperature of the fluid 301a.

Further, it is preferable that the area of the portion of the protrusion 63c that comes into contact with the discharge head 5 is reduced. If the area of the portion of the protrusion 63c that comes into contact with the discharge head 5 is small, heat propagation through the protrusion 63c can be suppressed. For example, as shown in FIG. 2A, if the hemispherical protrusion 63c is used, the protrusion 63c and the discharge head 5 can be brought into point contact with each other, so that heat propagation can be suppressed.

Further, the shape of the protrusion may be, for example, a tapered shape, a stepped shape, a shape in which one side surface is inclined, or the like. The tapered shape can be, for example, a cone, a truncated cone, a pyramid, a pyramid, or the like.
That is, in the direction orthogonal to the direction from the holder 63 toward the discharge head 5 (axial direction of the protrusion), the cross-sectional area on the tip side of the protrusion may be smaller than the cross-sectional area on the root side of the protrusion.

As shown in FIG. 2B, the discharge head 5 is provided with the protrusion 5e, and the tip of the protrusion 5e can be brought into contact with the holder 63. In this way, a space (heat insulating portion 10a) can be provided between the discharge head 5 and the holder 63. Since the action, effect, number, spacing, shape, etc. of the protrusions 5e can be the same as those of the protrusions 63c described above, detailed description thereof will be omitted.

Further, as shown in FIG. 2C, the holder 63 may be provided with the protrusion 63c, and the discharge head 5 may be provided with the protrusion 5e. Even in this way, a space (heat insulating portion 10a) can be provided between the discharge head 5 and the holder 63. It may be difficult to form the protrusion 63c depending on the arrangement position of the protrusion 63c. It may be difficult to form the protrusion 5e depending on the arrangement position of the protrusion 5e. In this case, the protrusions 5e and 63c may be selected and provided according to the ease of formation and the like.

FIG. 3 is a table for exemplifying the effect of the heat insulating portion 10a.
The temperature of the fluid 301a is 60 ° C., and the flow rate of the fluid 301a is 2 L / min. The electric power applied to one light emitting element 61 is 2.1 W. The measurement temperature is the temperature Ts of the soldered portion between the light emitting element 61 and the wiring pattern. Further, air is supplied to the holder 63 by the cooling unit 8.

A comparative example is a case where the heat insulating portion 10a is not provided, that is, a case where the holder 63 is in contact with the discharge head 5.
An embodiment is a case where a space (heat insulating portion 10a) is provided between the discharge head 5 and the holder 63. The distance between the discharge head 5 and the holder 63 is 2 mm.

As can be seen from FIG. 3, if a space (heat insulating portion 10a) is provided between the discharge head 5 and the holder 63, the temperature Ts of the soldered portion can be lowered by about 30%. This means that it is possible to prevent the temperature of the light emitting element 61 from exceeding the maximum junction temperature.
As described above, the fluid sterilizer 1 according to the present embodiment can suppress the temperature rise of the light source 6 (light emitting element 61) with a simple configuration.

Therefore, if the fluid sterilizer 1 according to the present embodiment is used, it is possible to suppress a decrease in the luminous flux, a non-lighting, and a shortening of the life of the light emitting element 61. Further, since the heat insulating portions 10 and 10a can have a simple structure, the fluid sterilizer 1 does not become large and costly.

(Fluid sterilization system 100)
FIG. 4 is a schematic diagram for exemplifying the fluid sterilization system 100 according to the present embodiment. As shown in FIG. 4, the fluid sterilization system 100 can include a fluid sterilizer 1, a tank 101, a heater 102, a pump 103, a flow control valve 104, a tank 105, a power supply 106, and a controller 107.

The tank 101 can store the fluid 301a before sterilization. The discharge port of the tank 101 and the supply port 4a1 of the fluid sterilizer 1 can be connected via, for example, a pipe.
The heater 102 can be provided in the tank 101. The heater 102 can also be provided in the pipe between the tank 101 and the fluid sterilizer 1. The heater 102 is not particularly limited as long as it can heat the fluid 301a. The heater 102 can utilize, for example, Joule heat or heat from combustion. The heater 102 is electrically connected to the temperature controller 102b. The temperature controller 102b can control the heater 102, for example, based on a signal from the temperature sensor 102a that measures the temperature of the fluid 301a. The temperature controller 102b can control the heater 102 so that the temperature of the fluid 301a is, for example, about 40 ° C. to 90 ° C.

The pump 103 can be provided in the pipe between the tank 102 and the fluid sterilizer 1. The pump 103 supplies the fluid 301a stored in the tank 101 to the fluid sterilizer 1. Although the case where the tank 101, the heater 102, and the pump 103 are provided is illustrated, for example, the fluid sterilizer 1 may be connected to a factory pipe or the like for supplying the fluid 301a having a high temperature. That is, a fluid supply unit that supplies the fluid 301a having a temperature higher than room temperature (25 ° C.) (for example, the fluid 301a having a temperature of 40 ° C. or higher) to the fluid sterilizer 1 may be provided.

The flow control valve 104 can be provided in the pipe between the pump 103 and the fluid sterilizer 1. The flow rate control valve 104 controls the flow rate of the fluid 301a supplied to the fluid sterilizer 1. Further, the flow control valve 104 can also start and stop the supply of the fluid 301a.
Further, a filter or the like can be appropriately provided in the supply head 4 of the fluid sterilizer 1 and the pipe connected to the supply port 4a1.

The tank 105 can be connected to the discharge port 5a1 of the fluid sterilizer 1 via a pipe. The tank 105 can store the sterilized fluid 301b (for example, water). Although the case where the sterilized fluid 301b is stored in the tank 105 has been illustrated, the discharge port 5a1 of the fluid sterilizer 1 may be connected to a device such as a cleaning device that uses the fluid 301b. Further, the fluid 301b discharged from the discharge port 5a1 of the fluid sterilizer 1 may be flushed to an object such as a substrate.

The power source 106 is electrically connected to the light source 6 (light emitting element 61) of the fluid sterilizer 1. The power source 106 supplies a predetermined electric power to the light source 6 (light emitting element 61). The power supply 106 can be, for example, a DC power supply. The DC power supply may be provided with a rectifier circuit, a converter, a switch, and the like. The rectifier circuit is electrically connected to the AC power supply. The rectifier circuit can, for example, full-wave rectify the AC voltage applied by the AC power supply. The rectifier circuit can have, for example, a diode bridge or the like. The converter converts the voltage full-wave rectified by the rectifier circuit into a predetermined DC voltage. The converter can have, for example, a switching circuit. The switch switches between applying electric power to the light source 6 (light emitting element 61) and stopping the application of electric power.

The controller 107 can have, for example, an arithmetic element such as a CPU (Central Processing Unit) and a storage element such as a semiconductor memory. The controller 107 can be, for example, a computer. The storage element can store a control program for controlling the operation of each element provided in the fluid sterilization system 100. The arithmetic element controls the operation of each element provided in the fluid sterilization system 100 by using a control program stored in the storage element, data input by the operator, and the like.

Although some embodiments of the present invention have been illustrated above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, changes, etc. can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof. Moreover, each of the above-described embodiments can be implemented in combination with each other.

1 Fluid sterilizer, 2 cylinder, 4 supply head, 5 discharge head, 5a2 flow path, 5d1 space, 5e protrusion, 6 light source, 7 windows, 8 cooling part, 10 heat insulation part, 10a heat insulation part, 61 light emitting element, 62 Substrate, 63 holder, 63c protrusion, 100 fluid sterilization system, 301a fluid, 301b fluid

Claims (4)

With the cylinder;
With a supply head provided at one end of the tubular portion;
With a discharge head provided at the other end of the cylinder;
With the holder provided on the discharge head;
With a window provided on the discharge head and one surface exposed to a flow path provided on the discharge head;
With the substrate provided on the window side surface of the holder;
With a light emitting element provided on the substrate and capable of irradiating ultraviolet rays toward the window;
A heat insulating portion provided between the discharge head and the holder and having a thermal conductivity lower than that of the holder;
A fluid sterilizer equipped with. The fluid sterilizer according to claim 1, wherein the holder is detachably provided on the discharge head. A space is provided between the window and the light emitting element.
The fluid sterilizer according to claim 1 or 2, wherein the heat insulating portion contains air. With the fluid sterilizer according to any one of claims 1 to 3;
A fluid supply unit capable of supplying a fluid having a temperature higher than room temperature to the supply head of the fluid sterilizer;
Fluid sterilization system equipped with.

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