JP2021132523A - Actuator and manufacturing method thereof - Google Patents

Abstract

To achieve weight saving.SOLUTION: An actuator 10 includes a base electrode 11, a counter electrode 12 facing the base electrode 11, a first terminal 31 connected to the base electrode 11, and a second terminal 32 connected to the counter electrode 12. The base electrode 11 includes a non-metal base material 11a, a conductive thin film 11b arranged on the side surface of the non-metal base material 11a facing the counter electrode 12, and an insulating layer 11c arranged on the conductive thin film 11b. The first terminal 31 is connected to the conductive thin film 11b. The counter electrode 12 is made of a flexible conductor that can be deformed by the Coulomb force acting between the base electrode 11 and the counter electrode 12 when a voltage is applied to the first terminal 31 and the second terminal 32.SELECTED DRAWING: Figure 1

Description

The present invention relates to actuators and methods of manufacturing actuators.

Japanese Patent No. 5714200 discloses a generator and a transducer in which a polymer is sandwiched between two electrodes. In the generators and transducers disclosed in the same publication, it is said that the Coulomb force of the accumulated charge between the electrodes generated by applying a voltage to the two electrodes attracts the electrodes, deforms the polymer, and causes displacement between the electrodes. ing.

Japanese Unexamined Patent Publication No. 2012-161957 discloses a method of transferring a high-temperature-treated ceramic film onto a low heat-resistant substrate. In the same publication, for example, a polyimide film is formed on a support. After applying a solution of a metal salt such as a metal alkoxide or a metal chloride salt on the polyimide film, it is heated to 500 ° C. or higher and fired. As a result, a ceramic film such as titanium oxide or indium tin oxide is formed on the polyimide film. Then, the ceramic film is transferred onto a low heat resistant base material such as plastic.

Patent No. 5714200 Japanese Unexamined Patent Publication No. 2012-161957

In the configuration disclosed in Japanese Patent No. 5714200, the displacement obtained by the actuator is accompanied by compressive deformation of the polymer. With such deformation, it is difficult to obtain a larger displacement as an actuator. Further, depending on the application, the actuator is required to be lightweight.

By the way, as for the amount of work taken out as an actuator, the generated force and the magnitude of the amount of displacement can be important performances. According to the findings of the present inventor, in an actuator in which a dielectric elastic body is sandwiched between a pair of electrodes, there is a contradictory relationship between the generated force and the magnitude of the displacement amount. The generated force F is represented by F = QE = (CV) × (V / d). Here, Q: accumulated charge, E: electric field strength, C: capacitance of the dielectric elastic body, d: distance between electrodes, V: applied voltage. That is, the distance d between the electrodes is determined by the thickness of the dielectric elastic body. In order to take out a large amount of displacement, it is necessary to increase the thickness of the dielectric elastic body (≈ distance between electrodes d). However, when the thickness of the dielectric elastic body (≈ distance between electrodes d) is increased, the generated force F becomes smaller. Therefore, it is difficult to take out a large amount of displacement with an actuator in which a dielectric elastic body is simply sandwiched between a pair of electrodes. Further, the dielectric elastomer that can be used as a dielectric elastic body lacks a material exhibiting a high relative permittivity, and it is difficult to obtain sufficient performance. From this point of view, the present inventor proposes a new structure of the actuator.

The actuator disclosed here includes a base electrode, a counter electrode facing the base electrode, a first terminal connected to the base electrode, and a second terminal connected to the counter electrode. The base electrode includes a non-metal base material, a conductive thin film arranged on a side surface of the non-metal base material facing the counter electrode, and an insulating layer arranged on the conductive thin film. The first terminal is connected to the conductive thin film. The counter electrode is made of a flexible conductor that can be deformed by the Coulomb force acting between the base electrode and the counter electrode when a voltage is applied to the first terminal and the second terminal. According to such an actuator, since the base electrode is made of a non-metal base material, weight reduction can be achieved. Further, since the driving of the actuator is not accompanied by a large compressive deformation of the insulating layer, a large displacement amount can be obtained with respect to the generated Coulomb force.

A plurality of base electrodes may be arranged so as to face each other in order. The counter electrode may be arranged between the base electrodes.

Further, the base electrode may include a non-metal base material having a concavo-convex shape on the side surface facing the counter electrode, a conductive thin film covering the concavo-convex shape, and an insulating layer covering the conductive thin film.

The insulating layer may be a thin film of ceramics. The insulating layer may have a perovskite structure. The insulating layer may be a non-woven fabric. A conductive paste or a conductive gel may be arranged between the conductive thin film and the insulating layer. A cured conductive material may be arranged between the conductive thin film and the insulating layer. The conductive thin film may be a metal thin film. The counter electrode may be made of an elastomer containing a conductive material.

The actuator may further include a power source that applies a voltage to the conductive thin film and the counter electrode, and a first switch that switches between connecting and disconnecting the conductive thin film and the counter electrode and the power source. Further, the actuator may further include a control device for operating the first switch. Further, the actuator is provided in the connection wiring for electrically connecting the conductive thin film and the counter electrode without interposing a power source, and the connection wiring, and the conductive thin film and the counter electrode are electrically connected by the connection wiring. A second switch for switching between the state and the state in which the connecting wiring is disconnected may be provided. Further, the actuator further includes a control device configured so that the second switch is disconnected when the first switch is connected and the second switch is connected when the first switch is disconnected. You may.

As another form, the actuator is provided on the first grounding wire for grounding the conductive thin film, the second grounding wire for grounding the counter electrode, and the first grounding wire, and the third grounding wire is switched between connection and disconnection. A switch and a fourth switch provided on the second ground wire for switching the connection and disconnection of the second ground wire may be further provided. In such an actuator, the third switch and the fourth switch are disconnected when the first switch is connected, and the third switch and the fourth switch are connected when the first switch is disconnected, respectively. A control device configured as described above may be further provided.

The actuator manufacturing method includes a step of preparing a non-metal base material molded into a predetermined shape, a step of arranging a conductive thin film on the surface of a predetermined region of the non-metal base material, and a step on the conductive thin film. It may include a step of arranging an insulating layer in the air. According to such an actuator manufacturing method, the weight of the actuator can be reduced.

Here, the insulating layer may be prepared with a thin film of ceramics. In this case, in the step of arranging the insulating layer on the conductive thin film, the ceramic thin film may be arranged on the conductive thin film. Moreover, the thin film of ceramics may be a non-woven fabric. A conductive paste or a conductive gel may be applied to at least one of the conductive thin film and the ceramic thin film. Then, the thin film of the ceramics may be arranged on the conductive thin film. Further, it may have a step of curing the conductive paste or the conductive gel.

FIG. 1 is a schematic view of the actuator 10. FIG. 2 is a schematic view of the actuator 10. FIG. 3 is a perspective view schematically showing the actuator 10. FIG. 4 is a perspective view schematically showing the actuator 10. FIG. 5 is a schematic view showing the actuator 10A according to another embodiment. FIG. 6 is a schematic view showing the actuator 10A according to another embodiment. FIG. 7 is a schematic view showing the actuator 10B according to another embodiment. FIG. 8 is a schematic view showing the actuator 10C according to another embodiment. FIG. 9 is a schematic view of the actuator 10. FIG. 10 is a schematic view of the actuator 10. FIG. 11 is a cross-sectional view schematically showing the actuator 10D according to another embodiment. FIG. 12 is a cross-sectional view schematically showing the actuator 10D according to another embodiment. FIG. 13 is a cross-sectional view schematically showing the actuator 10E according to another embodiment. FIG. 14 is a cross-sectional view schematically showing the actuator 10E according to another embodiment.

Hereinafter, an embodiment of the actuator disclosed here will be described. The embodiments described herein are, of course, not intended to specifically limit the present invention. The present invention is not limited to the embodiments described herein, unless otherwise specified.

<Actuator 10>
1 and 2 are schematic views of the actuator 10. 3 and 4 are perspective views schematically showing the actuator 10. Note that in FIGS. 3 and 4, the power supply 50, the switch 52, the control device 60, and the like are not shown, respectively. 1 and 3 show a state in which the switch 52 is OFF, respectively. 2 and 4, respectively, show a state in which the switch 52 is ON. As shown in FIG. 1, the actuator 10 includes a base electrode 11 and a counter electrode 12. As shown in FIGS. 1 and 2, the first terminal 31 connected to the base electrode 11 and the second terminal 32 connected to the counter electrode 12 are provided. In the form shown in FIGS. 1 and 2, at least the surface of the base electrode 11 facing the counter electrode 12 has a concave-convex shape. Further, at least the surface of the base electrode 11 facing the counter electrode 12 is covered with the insulating layer 11c. The counter electrode 12 is arranged so as to face the base electrode 11. The counter electrode 12 is made of a flexible conductor that can be deformed by the Coulomb force generated when a voltage is applied between the base electrode 11 and the counter electrode 12. In the form shown in FIGS. 1 and 2, the counter electrode 12 is made of a flexible plate-shaped conductor.

<Base electrode 11>
As shown in FIGS. 1 and 2, the base electrode 11 includes a non-metal base material 11a, a conductive thin film 11b, and an insulating layer 11c.

<Non-metal base material 11a>
The non-metal base material 11a may be prepared of, for example, ceramics or plastic. When prepared with ceramics, it may be prepared with fired ceramics. Further, when it is prepared of plastic, it is preferable that it has the required rigidity. Here, as the material used for ceramics or plastic as the non-metal base material 11a, a material that secures the required mechanical strength as the base electrode 11 may be selected. Examples of such ceramic materials include silicon (Si), silicon carbide (SiC), aluminum nitride (AlN), and alumina (Al ₂ O ₃ ). Further, as the plastic material used as the non-metal base material 11a, a thermosetting resin such as a phenol resin or an epoxy resin, or a thermoplastic resin such as a polyamide resin, a polycarbonate resin or a polyethylene resin can be used. Further, the plastic material used as the non-metal base material 11a may be a fiber reinforced plastic containing glass fibers, carbon fibers and the like.

<Conductive thin film 11b>
The conductive thin film 11b is arranged on the side surface of the non-metal base material 11a facing the counter electrode 12. The conductive thin film 11b may be, for example, a metal thin film made of a metal material having good conductivity. Examples of the material used for the metal thin film include copper and aluminum. Further, platinum or gold may be used for the metal thin film as a material that is not easily oxidized. As the conductive thin film 11b, the metal thin film may be formed on the side surface of the non-metal base material 11a facing the counter electrode 12 by a film forming method such as sputtering or a CVD method (chemical vapor deposition method). The first terminal 31 may be connected to the conductive thin film 11b so as to be electrically conductive. Although a metal thin film is exemplified here as the conductive thin film 11b, the conductive thin film 11b is not limited to the metal thin film. The conductive thin film 11b may be a sheet-like material having conductivity. The conductive thin film 11b made of a conductive sheet-like material may be made of a conductive gel described later.

<Insulation layer 11c>
The insulating layer 11c is arranged on the conductive thin film. The insulating layer 11c may be formed of, for example, a high-dielectric ceramic thin film. The insulation between the base electrode 11 and the counter electrode 12 should be ensured by the insulating layer 11c. Further, it is preferable that the electric charge accumulated in the base electrode 11 is surely maintained by the insulating layer 11c. From this point of view, a ferroelectric substance made of ceramics can be used for the insulating layer 11c. The ferroelectric substance made of ceramics may have, for example, a perovskite structure.

The ferroelectric material having a perovskite structure, for example, barium titanate (BaTiO _3), lead titanate (PbTiO _3), lead zirconate titanate _{(Pb (Zr, Ti) O} 3), lead lanthanum zirconate titanate ( (Pb, La) (Zr, Ti) O ₃ ), strontium titanate (SrTiO ₃ ), barium titanate strontium ((Ba, Sr) TiO ₃ ) sodium potassium niobate ((NK) NbO ₃ ) and the like can be mentioned. .. The material used for the insulating layer 11c is not limited to those exemplified here. An appropriate material can be adopted from the viewpoint of obtaining a large Coulomb force between the conductive thin film 11b of the base electrode 11 and the counter electrode 12 as described above. It may also be a composite material containing suitable additives. For example, barium titanate may have a substance such as _{CaZrO 3} or BaSnO _{3 dissolved in it.}

Barium titanate is a typical material for ferroelectrics having a high relative permittivity of about 1000 to 10000. Lead zirconate titanate has a relative permittivity of 500 to 5000, and strontium titanate has a relative permittivity of 200 to 500. As the insulating layer 11c, a material having such a high relative permittivity can be adopted. Although the relative permittivity is illustrated, the relative permittivity may vary depending on the thickness, the crystal structure, the fineness of the crystal structure, the measurement conditions (for example, temperature), the measuring device, and the like, even if the same material is used. The insulating layer 11c may have the required performance according to the predetermined usage environment of the actuator 10. Here, a ferroelectric substance having a perovskite structure is exemplified as a preferable example of the material used for the insulating layer 11c. Unless otherwise specified, the material used for the insulating layer 11c is not limited to a ferroelectric substance having a perovskite structure. In this embodiment, the insulating layer 11c is made of barium titanate. Here, the insulating layer 11c is described as an example. For other forms of insulating layer, the materials exemplified here are appropriately used.

The insulating layer 11c may have a required relative permittivity. When a voltage is applied between the base electrode 11 and the counter electrode 12 by the insulating layer 11c, a required Coulomb force is generated between the base electrode 11 and the counter electrode 12. As for the relative permittivity of the insulating layer 11c, for example, by adopting ceramics, for example, fine ceramics, the relative permittivity of the insulating layer 11c can be set to 1000 or more. For the measurement of the relative permittivity exemplified here, for example, Precision LCII, which is a ferroelectric measuring device manufactured by Radiant Technologies (USA), can be used. Further, the relative permittivity of the insulating layer 11c tends to depend on the temperature, the frequency of the current for measurement, the crystal structure of the material forming the insulating layer, and the like. The relative permittivity of the insulating layer 11c may be measured, for example, at a room temperature of about 23 ° C. and a predetermined frequency of 100 Hz to 1000 Hz. As the insulating layer 11c, a layer that exhibits a required relative permittivity may be used according to a predetermined usage environment of the actuator 10.

Here, the base electrode 11 uses a non-metal base material 11a as a base material. A ceramic thin film is used for the insulating layer 11c. The ceramic thin film needs to be fired, at which time it is treated at a high temperature. When a material having the heat resistance required for firing the ceramic thin film as the insulating layer 11c is used for the non-metal base material 11a, the conductive thin film 11b is formed on the non-metal base material 11a. , The material particles of the ceramic thin film to be the insulating layer 11c may be placed on the material particles and fired. However, if the non-metal base material 11a does not have the required heat resistance, such a method cannot be adopted.

When the non-metal base material 11a does not have the required heat resistance, a conductive thin film 11b is formed on the non-metal base material 11a. The insulating layer 11c may be prepared separately from the non-metal base material 11a and may be arranged on the conductive thin film 11b. As a method of separately preparing the ceramic thin film to be the insulating layer 11c, as disclosed in Japanese Patent Application Laid-Open No. 2012-161957, a method of transferring a high-temperature-treated ceramic film onto a low heat-resistant substrate is used. Can be adopted. For example, a polyimide film is formed on the support. _{A gel solution of a metal salt of barium titanate (BaTIO 3} ), which is a typical ferroelectric substance, is prepared on the polyimide film and applied to the polyimide film formed on the support. Then, it is heated to 500 ° C. or higher and fired. As a result, a ceramic film of _{barium titanate (BaTIO 3) is formed on the polyimide film.} Then, it is preferable that the ceramic film of barium titanate is transferred onto the conductive thin film 11b formed on the non-metal base material 11a. Here, the firing temperature of barium titanate is approximately 550 ° C. The polyimide used when producing the ceramic film of barium titanate is preferably having the required heat resistance with respect to the firing temperature of barium titanate. The polyimide used when producing the ceramic film of barium titanate is, for example, preferably having a heat resistance of about 600 ° C.

The insulating layer 11c may have the required density, and the thinner the insulating layer 11c, the closer the distance between the conductive thin film 11b of the base electrode 11 and the counter electrode 12 becomes. The thinner the insulating layer 11c, the higher the Coulomb force is generated when a voltage is applied to the base electrode 11 and the counter electrode 12. Further, the insulating layer 11c is preferably less leaked from the electric charge accumulated in the base electrode 11 when a voltage is applied to the base electrode 11 and the counter electrode 12. From the viewpoint of obtaining a large Coulomb force between the base electrode 11 and the counter electrode 12, the insulating layer 11c has a small leakage current (in other words, charge leakage), a high dielectric breakdown strength, and a base electrode. It is preferable that the conductive thin film 11b of 11 is thinly covered. From this point of view, the insulating layer 11c may be formed as a thin film of ceramics on a heat-resistant film such as a polyimide film, fired, and then transferred onto the conductive thin film 11b. The method of forming the insulating layer 11c is not limited to the above-mentioned method. As a method for forming the insulating layer 11c, an appropriate thin film forming method is appropriately used so that the leakage current (in other words, charge leakage) is small and the dielectric breakdown strength is high, depending on the material used for the insulating layer 11c. Can be adopted in.

<Counter electrode 12>
The counter electrode 12 is made of a flexible (flexible) conductor that faces the base electrode 11. Specifically, in this embodiment, the counter electrode 12 faces the base electrode 11 with the insulating layer 11c interposed therebetween, as shown in FIG. As shown in FIG. 2, in a state where a voltage is applied between the base electrode 11 and the counter electrode 12, the counter electrode 12 is a base electrode due to the Coulomb force acting between the base electrode 11 and the counter electrode 12. It transforms so that it sticks to 11. As shown in FIG. 1, the Coulomb force does not act when no voltage is applied between the base electrode 11 and the counter electrode 12. Therefore, the shape of the counter electrode 12 returns. The counter electrode 12 may have a required elastic force so that the shape returns in a state where the Coulomb force does not act.

From this point of view, the counter electrode 12 can be formed of, for example, a conductive rubber or a conductive gel. In this embodiment, conductive rubber is used for the counter electrode 12. The conductive rubber used for the counter electrode 12 is preferably an elastomer formed by mixing conductive materials. Here, the conductive material includes fine powder of carbon black, acetylene black, and carbon nanotube, fine powder of metal of silver and copper, and fine powder of conductor having a core-shell structure in which an insulator such as silica and alumina is coated with metal by spattering. Can be mentioned. As the conductive gel, for example, a functional gel material in which a solvent such as water or a moisturizer, an electrolyte, an additive, or the like is retained in a three-dimensional polymer matrix can be adopted. As such a gel material, for example, Technogel (registered trademark) of Sekisui Plastics Co., Ltd. can be adopted.

Further, the counter electrode 12 may be composed of a leaf spring that can be elastically deformed along the base electrode 11. For example, a sheet-shaped thin leaf spring may be used. In this case, the counter electrode 12 may be made of metal. As described above, as the counter electrode 12, a member having appropriate flexibility may be adopted. Further, the counter electrode 12 may be a viscoelastic body or an elasto-plastic body. In this case, the counter electrode 12 may be used in a range that can be regarded as an elastic region, for example. Here, the counter electrode 12 is described as an example. For other forms of counter electrode, the materials exemplified here are appropriately used.

As described above, the base electrode 11 of the actuator 10 has the non-metal base material 11a, the conductive thin film 11b arranged on the side surface of the non-metal base material 11a facing the counter electrode 12, and the insulation arranged on the conductive thin film 11b. It includes a layer 11c. In the actuator 10, the base material of the base electrode 11 is made of a non-metal material. Therefore, the base electrode 11 is made lighter than the case where the entire base material is made of metal. The first terminal 31 connected to the power supply 50 is connected to the conductive thin film 11b of the base electrode 11. The second terminal 32 is connected to the counter electrode 12. The first terminal 31 and the second terminal 32 are connected to the power supply 50 through the wiring 51. The wiring 51 is provided with a switch 52. For the switch 52, for example, a switching element is used.

In the state where the switch 52 is OFF, as shown in FIGS. 1 and 3, the counter electrode 12 is not generally attached to the facing surface of the base electrode 11. As shown in FIGS. 2 and 4, when the switch 52 is ON, the counter electrode 12 is attracted to the base electrode 11 by the Coulomb force acting between the base electrode 11 and the counter electrode 12. It deforms according to the facing surface of the base electrode 11 and sticks to the base electrode 11. When the switch 52 is OFF, the Coulomb force disappears, the shape of the counter electrode 12 returns, and the counter electrode 12 separates from the base electrode 11. As described above, in the actuator 10 shown in FIGS. 1 and 2, the counter electrode 12 is deformed when the switch 52 is ON and when the switch 52 is OFF, and is driven accordingly. The switch 52 may be turned on and off by the control device 60.

According to the actuator 10, when a voltage is applied to the first terminal 31 and the second terminal 32, the counter electrode 12 is deformed by the Coulomb force acting between the base electrode 11 and the counter electrode 12. The actuator 10 is driven as the counter electrode 12 is deformed. Since the driving of the actuator 10 is not accompanied by a large compressive deformation of the insulating layer 11c, a large displacement amount can be obtained with respect to the generated Coulomb force.

A ceramic thin film is used for the insulating layer 11c of the actuator 10. When a ceramic thin film is formed on a metal base material, cracks may occur in the ceramic thin film due to the difference in the coefficient of thermal expansion during firing. In this embodiment, the insulating layer 11c of the actuator 10 is made separately from the base material 11a and the conductive thin film 11b. Therefore, cracks are unlikely to occur in the insulating layer 11c. Further, the base material 11a and the conductive thin film 11b are not affected by the heat treatment when the insulating layer 11c is fired. Therefore, a degree of freedom can be obtained in selecting the material used for the base material 11a and the conductive thin film 11b. For example, as the base material 11a, a material that melts at a temperature lower than the firing temperature of the insulating layer 11c, for example, plastic can be used.

5 and 6 are schematic views showing the actuator 10A according to another embodiment. FIG. 5 shows a state in which the switch 52 of the actuator 10A is OFF. FIG. 6 shows a state in which the switch 52 of the actuator 10A is ON. In the actuator 10A, as shown in FIGS. 5 and 6, a plurality of base electrodes 11 are arranged so as to face each other in order. Opposite electrodes 12 are arranged between adjacent base electrodes 11 among the plurality of base electrodes 11. In this case, it is preferable that the surface of the base electrode 11a of the base electrode 11 facing the counter electrode 12 is covered with the conductive thin film 11b and further covered with the insulating layer 11c. Then, it may have a first wiring 31a for connecting a plurality of base electrodes 11 in parallel. Further, it may have a second wiring 32a for connecting a plurality of counter electrodes 12 in parallel.

As shown in FIG. 6, when a voltage is applied between the base electrode 11 and the counter electrode 12 when the switch 52 is ON, the Coulomb force acting between the base electrode 11 and the counter electrode 12 causes the Coulomb force. The counter electrode 12 is deformed so as to be attached to the base electrode 11. As shown in FIG. 5, when the switch 52 is OFF and no voltage is applied between the base electrode 11 and the counter electrode 12, the Coulomb force does not act. Therefore, the shape of the counter electrode 12 returns, and the distance between the base electrodes 11 increases.

In this embodiment, the non-metal base material 11a of the base electrode 11 has an uneven shape on the side surface facing the counter electrode 12. The conductive thin film 11b covers the uneven shape of the non-metal base material 11a. The insulating layer 11c further covers the conductive thin film 11b. The counter electrode 12 is deformed along the uneven shape of the base electrode 11 with the switch 52 turned on, and sticks to the base electrode 11. Here, the uneven shapes of the base electrodes 11 facing each other have a shape that fits each other. Therefore, when the counter electrode 12 is deformed along the concave-convex shape of the base electrode 11 with the switch 52 turned on and sticks to the base electrode 11, the concave-convex shape of the base electrodes 11 facing each other fits into each other, and the distance between the base electrodes 11 is increased. Becomes narrower. Further, when the switch 52 is OFF and no voltage is applied between the base electrode 11 and the counter electrode 12, the Coulomb force does not act. Therefore, the shape of the counter electrode 12 returns, and the distance between the base electrodes 11 facing each other increases. Here, the displacement of the base electrodes 11 facing each other is obtained as the displacement amount of the actuator 10.

FIG. 7 is a schematic view showing the actuator 10B according to another embodiment. FIG. 8 is a schematic view showing the actuator 10C according to another embodiment. As shown in FIG. 7, the counter electrode 12 may have a corrugated plate shape. Further, as shown in FIG. 8, the counter electrode 12 of the actuator 10C may be a leaf spring. In these cases, as shown in FIGS. 7 and 8, the base electrode 11 may have a flat surface facing the counter electrode 12. In this way, the shapes of the base electrode 11 and the counter electrode 12 can be changed in various ways.

For example, when the counter electrode 12 has a corrugated plate shape, as shown in FIG. 7, when the switch 52 is turned off, the Coulomb force disappears and the counter electrode 12 has a corrugated plate shape. Restore to. By restoring the shape of the counter electrode 12, the distance between the pair of base electrodes 11 is widened. When the switch 52 is turned on, a Coulomb force acts between the base electrode 11 and the counter electrode 12, although not shown. At this time, the counter electrode 12 is deformed, and the counter electrode 12 sticks to the base electrode 11. Therefore, the distance between the base electrodes 11 is narrowed.

Further, as shown in FIG. 8, the counter electrode 12 may be a leaf spring. In this case, the counter electrode 12 may have a pop-up portion 12a as shown in FIG. The part 12a that jumps up is separated at the counter electrode 12 by the slit 12b, and can fit in the hole 12c formed by the slit 12b. In this case, when the switch 52 is turned off, the Coulomb force is lost, the shape of the counter electrode 12 is restored, and the distance between the base electrodes 11 sandwiching the counter electrode 12 is widened by the jumping portion 12a. On the other hand, when the switch 52 is turned on, a Coulomb force acts between the base electrode 11 and the counter electrode 12, although not shown. At this time, the counter electrode 12 is deformed, and the counter electrode 12 sticks to the base electrode 11. Therefore, the distance between the base electrodes 11 is narrowed. At this time, the part 12a that jumps up fits in the hole 12c formed by the slit 12b. Due to the deformation of the counter electrode 12, the distance between the base electrodes 11 sandwiching the counter electrode 12 is narrowed. Further, when the switch 52 is turned off, the Coulomb force is lost and the counter electrode 12 is restored. When the counter electrode 12 is restored, as shown in FIG. 8, the jumping portion 12a jumps up, and the distance between the base electrodes 11 sandwiching the counter electrode 12 becomes wider.

As described above, the shapes of the counter electrode 12 and the base electrode 11 can be variously changed. In either case, the actuator 10 can output a change in the distance between the base electrodes 11 as a displacement amount. The actuator 10 is not easily restricted by the compressive deformation of the insulating layer 11c, and a large displacement amount can be obtained. In this case as well, the base electrode 11 is the non-metal base material 11a, the conductive thin film 11b arranged on the side surface of the non-metal base material 11a facing the counter electrode 12, and the insulating layer 11c arranged on the conductive thin film 11b. It is good to have.

Next, other forms of the structure of the base electrode 11 will be further described.

Here, FIGS. 9 and 10 are schematic views of the actuator 10. In FIGS. 9 and 10, the actuator 10 is shown in a more simplified manner. FIG. 9 shows a state in which the switch 52 of the actuator 10A is OFF. FIG. 10 shows a state in which the switch 52 of the actuator 10A is ON. Note that FIGS. 9 and 10 are schematic views of the actuator 10, and do not necessarily show an actual actuator. Hereinafter, other forms of the base electrode 11 of the actuator 10 will be described with reference to FIGS. 9 and 10.

For example, a metal conductive material may be used for the base material 11a of the base electrode 11 of the actuator 10. In this case, the conductive thin film 11b may not be provided, and the insulating layer 11c may be arranged on the base material 11a. However, when a thin film of ceramics to be the insulating layer 11c is fired on such a metal base material 11a, cracks may occur in the insulating layer 11c. There is a large difference in the coefficient of thermal expansion between the metal used for the base material 11a and the ceramics used for the insulating layer 11c. For example, the coefficient of thermal expansion of barium titanate is approximately 5 × ^10-6 / K. The coefficient of thermal expansion of copper is approximately 16.8 × ^10-6 / K. The coefficient of thermal expansion of aluminum is approximately 23 × 10 ^-6 / K. The coefficient of thermal expansion of stainless steel (SUS410) is approximately 10.4 × ^10-6 / K. The coefficient of thermal expansion mentioned here is the coefficient of linear thermal expansion. The coefficient of thermal expansion differs greatly between the base material 11a made of metal and the insulating layer 11c made of ceramics. Due to such a difference in the coefficient of thermal expansion, the insulating layer 11c made of a thin film of ceramics having a small coefficient of thermal expansion and formed of a thin film cannot follow the expansion of the metal base material 11a at the time of firing. Therefore, cracks may occur in the insulating layer 11c made of a thin film of ceramics.

In order to suppress such cracks, for example, a material having a thermal expansion coefficient similar to that of the ceramics used for the insulating layer 11c may be used for the base material 11a of the base electrode 11. For example, the base material 11a of the base electrode 11 may be prepared as a molded product obtained by molding a raw material powder of ceramics before firing. A metal thin film as the conductive thin film 11b is formed on the film. Next, the powder of the high-dielectric ceramics to be the insulating layer 11c is spread on the metal thin film as the conductive thin film 11b to a predetermined thickness. The high-dielectric ceramics to be the insulating layer 11c may be coated on the metal thin film as the conductive thin film 11b with a predetermined thickness in the gel form. Here, a material having the same coefficient of thermal expansion may be used for the base material 11a and the insulating layer 11c. When the base material 11a and the insulating layer 11c are made of materials having the same coefficient of thermal expansion, when the insulating layer 11c is fired, the insulating layer 11c becomes the insulating layer 11c due to the heat treatment at the time of firing. Cracks are less likely to occur.

For example, when barium titanate is used for the insulating layer 11c, silicon (Si), silicon carbide (SiC), aluminum nitride (AlN) or the like may be used for the base material 11a. Here, the coefficient of thermal expansion of barium titanate is approximately 5 × 10 ^-6 / K. The coefficient of thermal expansion of silicon (Si) is approximately 3.9 × ^10-6 / K. The coefficient of thermal expansion of silicon carbide (SiC) is approximately 4.4 × ^10-6 / K. The coefficient of thermal expansion of aluminum nitride (AlN) is approximately 4.6 × ^10-6 / K. In these cases, the difference in the coefficient of thermal expansion from barium titanate is suppressed to be smaller than in the case where a metal is used for the base material 11a. As described above, when barium titanate is used for the insulating layer 11c, silicon (Si), silicon carbide (SiC), aluminum nitride (AlN) or the like may be selected for the base material 11a. As described above, when the insulating layer 11c is used for barium titanate, the base material 11a is preferably 3 × 10 ^-6 / K or more, more preferably 3.5 × 10 ^-6 / K or more, and also. A material having a linear thermal expansion coefficient of 7 × 10 ^-6 / K or less, more preferably 6.5 × 10 ^{-6 / K or less is preferably selected.}

As described above, a ceramic material may be used for the base material 11a. In this case, the smaller the difference between the ceramic material used for the insulating layer 11c and the coefficient of thermal expansion, the better. Further, it is preferable that a metal thin film is adopted as the conductive thin film 11b arranged on the base material 11a. In particular, it is preferable to select a material that is not easily oxidized during the heat treatment during firing. From this point of view, platinum or gold may be used for the conductive thin film 11b. Since platinum and gold are not easily oxidized, it is difficult to deprive barium titanate, which is used as the insulating layer 11c, of oxygen atoms during firing. Therefore, it is difficult to deteriorate the crystal structure of barium titanate during firing.

According to the findings of the present inventor, for example, a platinum thin film as a conductive thin film is formed on a silicon (Si) substrate with a thickness of 150 nm to 200 nm. Next, when an insulating layer of barium titanate was formed into a film having a thickness of 150 nm to 200 nm and fired, no cracks or peeling were confirmed in the insulating layer made of barium titanate. Such a structure may be applied to the base electrode 11 of the actuator 10.

Further, the insulating layer 11c may be prepared of a ceramic non-woven fabric and fired. For example, the ceramic thin film to be the insulating layer 11c may be formed on the metal base material 11a. That is, instead of arranging the conductive thin film 11b, a ceramic non-woven fabric prepared in the form of a non-woven fabric may be arranged as an insulating layer 11c on the metal base material 11a and fired. In this case, since it is prepared in the form of a non-woven fabric, it is in the form of fibers and can move to some extent. Therefore, cracks are unlikely to occur in the insulating layer 11c due to the heat treatment during firing. The non-woven fabric of ceramics may have the required density as the insulating layer 11c, and the thinner the non-woven fabric, the better. As a method for obtaining such a ceramic non-woven fabric, an electrolytic spinning method can be mentioned. According to the electrolytic spinning method, a thin and dense non-woven fabric sheet composed of fibers of a fine ceramic material can be obtained.

Further, as another form of the base electrode 11, the ceramic thin film to be the insulating layer 11c is made separately from the base material 11a and the conductive thin film 11b, and is fired on the base material 11a and the conductive thin film 11b. It may be arranged. In this case, since the insulating layer 11c is manufactured separately from the base material 11a and the conductive thin film 11b, cracks are unlikely to occur in the insulating layer 11c during the heat treatment when firing the insulating layer 11c. For example, the ceramic thin film to be the insulating layer 11c may be placed on the metal base material 11a after being fired. That is, the conductive thin film 11b may not be arranged, and the fired ceramic thin film may be arranged as the insulating layer 11c on the metal base material 11a.

Further, the ceramic thin film to be the insulating layer 11c is made separately from the base material 11a and the conductive thin film 11b, so that a non-metal base material 11a such as plastic can be used as the base material 11a. In this case, if the shape is the same, the weight can be reduced as compared with the case where a metal material is used for the base material 11a. In this case, the insulating layer 11c of the base electrode 11 may be made of a fired ceramic non-woven fabric.

The non-woven fabric of ceramics may be formed on, for example, a polyimide having a required heat resistance to the firing temperature of barium titanate. Then, a ceramic non-woven fabric may be produced on the polyimide and fired on the polyimide as it is. Further, it is preferable that the shape of the polyimide on which the non-woven fabric of ceramics is produced is matched in advance with the shape of the base material 11a on which the insulating layer 11c is arranged and the conductive thin film 11b. As a result, a ceramic non-woven fabric that matches the shape of the base material 11a on which the insulating layer 11c is arranged and the conductive thin film 11b can be obtained in a fired state.

The insulating layer 11c of the ceramic thin film thus fired may be provided separately from the base material 11a and the conductive thin film 11b. The fired ceramic thin film is arranged on the base material 11a and the conductive thin film 11b as the insulating layer 11c. At this time, a fine gap is generated between the base material 11a and the conductive thin film 11b and the thin film of the fired ceramics as the insulating layer 11c. Gap can occur regardless of whether the ceramic thin film is in the form of a non-woven fabric. Since air enters such a gap, the relative permittivity between the base material 11a or the conductive thin film 11b and the counter electrode 12 is lowered.

Therefore, a conductive paste or gel may be arranged between the base material 11a or the conductive thin film 11b on which the insulating layer 11c is arranged and the insulating layer 11c. In this case, the gap between the base material 11a or the conductive thin film 11b on which the insulating layer 11c is arranged and the insulating layer 11c is filled with a conductive paste or gel. Therefore, air does not enter the gap. Therefore, it is possible to prevent the relative permittivity between the base electrode 11 and the counter electrode 12 from being significantly lowered, and stable performance can be obtained for the actuator 10.

The conductive paste or gel is preferably in a form capable of filling the gap between the base material 11a or the conductive thin film 11b on which the insulating layer 11c is arranged and the insulating layer 11c. Examples of the conductive material include fine powders of carbon black, acetylene black and carbon nanotubes, fine powders of silver and copper metals, and fine powders of conductors having a core-shell structure in which an insulator such as silica and alumina is coated with a metal by sputtering or the like. .. The conductive paste may be prepared by dispersing particles of the conductive material in a solution of a binder resin such as a polymer. As the paste solvent, a suitable solvent having a required viscosity can be adopted. As the conductive gel, for example, a functional gel material in which a solvent such as water or a moisturizer, an electrolyte, an additive, or the like is retained in a three-dimensional polymer matrix can be adopted. As such a gel material, for example, Technogel (registered trademark) of Sekisui Plastics Co., Ltd. can be adopted.

The conductive paste or gel may be applied with a predetermined thickness on the base material 11a or the conductive thin film 11b on which the insulating layer 11c is arranged. Then, it is preferable that the insulating layer 11c made of a thin film of fired ceramics is transferred onto a paste or gel having such conductivity. It may be cured in a state where the gap between the base material 11a or the conductive thin film 11b on which the insulating layer 11c is arranged and the insulating layer 11c is filled. That is, the cured conductive material may be arranged between the base material 11a or the conductive thin film 11b and the insulating layer 11c. Here, the fired ceramic thin film used as the insulating layer 11c may be molded on the polyimide film as described above. As a result, it becomes difficult for air to enter between the base material 11a or the conductive thin film 11b on which the insulating layer 11c is arranged and the insulating layer 11c, and the relative permittivity between the base electrode 11 and the counter electrode 12 is significantly reduced. This can be prevented and stable performance can be obtained for the actuator 10.

Further, in the method of manufacturing the actuator 10 proposed here, for example, a step of preparing the non-metal base material 11a molded into a predetermined shape as described above and a predetermined process of the non-metal base material 11a are defined. A step of arranging the conductive thin film 11b on the surface of the region and a step of arranging the insulating layer 11c on the conductive thin film 11b are included (see FIG. 9).

The insulating layer 11c may be prepared as a thin film of ceramics. In this case, in the step of arranging the insulating layer 11c on the conductive thin film 11b, the ceramic thin film may be arranged on the conductive thin film 11b. Further, the ceramic thin film constituting the insulating layer 11c may be a non-woven fabric. Further, the ceramic thin film may be arranged on the conductive thin film 11b in a state where the conductive paste or the conductive gel is applied to at least one of the ceramic thin films constituting the conductive thin film 11b or the insulating layer 11c. Then, it may have a step of curing the conductive paste or the conductive gel. When the thin film of ceramics is in the form of a non-woven fabric, the conductive paste or conductive gel may be thinly applied so as not to conduct with the counter electrode 12. Further, the conductive paste or the conductive gel is preferably provided with a required viscosity so as not to excessively impregnate the thin film of ceramics in the form of a non-woven fabric.

By the way, in the actuator disclosed here, as described above, when the switch 52 is ON, a Coulomb force acts between the conductive thin film 11b of the base electrode 11 and the counter electrode 12 via the insulating layer 11c. .. Due to this Coulomb force, the counter electrode 12 is attracted to the conductive thin film 11b of the base electrode 11, deforms according to the base electrode 11, and adheres to the base electrode 11 (see FIG. 2). When the Coulomb force is lost while the switch 52 is OFF, the shape of the counter electrode 12 returns and the counter electrode 12 separates from the base electrode 11 (see FIG. 1). When the switch 52 changes from the ON state to the OFF state and the Coulomb force is quickly lost, the shape of the counter electrode 12 quickly returns, and the counter electrode 12 quickly separates from the base electrode 11 and responds. Speed is improved.

<Actuator 10D>
From the viewpoint of improving the response speed, it is desirable that the Coulomb force disappears promptly when the switch 52 changes from the ON state to the OFF state. In addition, here, a further modification will be described by taking the form shown in FIGS. 1 and 2 as an example. The form of the actuator shown in such a modification is not limited to the form shown in FIGS. 1 and 2, and can be applied to various forms. 11 and 12 are cross-sectional views schematically showing the actuator 10D according to another embodiment. In the actuator 10D shown in FIGS. 11 and 12, the members and parts that perform the same operation as the actuator 10 shown in FIG. 1 are designated by the same reference numerals, and redundant description will be omitted as appropriate. FIG. 11 shows a state in which the first switch 52 of the actuator 10D is ON, in other words, a state in which the base electrode 11 and the counter electrode 12 are attached to each other. FIG. 12 shows a state in which the first switch 52 of the actuator 10D is OFF, in other words, a state in which the base electrode 11 and the counter electrode 12 are separated from each other.

The actuator 10D shown in FIGS. 11 and 12 includes a base electrode 11, a counter electrode 12, a power supply 50, a first switch 52, a connection wiring 55, a second switch 56, and a first control device 60. , A second control device 62 is provided.

The power supply 50 is a device that applies a voltage to the conductive thin film 11b of the base electrode 11 and the counter electrode 12. The first switch 52 is a switch that switches between connecting and disconnecting the conductive thin film 11b and the counter electrode 12 and the power supply 50. In this embodiment, the power supply 50 and the first switch 52 are provided in the wiring 51, respectively. The wiring 51 is a wiring for connecting the first terminal 31 connected to the conductive thin film 11b of the base electrode 11 and the second terminal 32 connected to the counter electrode 12 to the power supply 50. The first control device 60 is a control device that operates the connection and disconnection of the first switch 52.

The connection wiring 55 is a wiring that electrically connects the base electrode 11 and the counter electrode 12 without interposing the power supply 50. In this embodiment, as shown in FIGS. 11 and 12, the connection wiring 55 powers the first terminal 31 connected to the conductive thin film 11b and the second terminal 32 connected to the counter electrode 12. The power supply 50 is provided so as to bypass the wiring 51 connected to the 50. The connection wiring 55 may be provided so as to connect the first terminal 31 connected to the conductive thin film 11b and the second terminal 32 connected to the counter electrode 12 separately from the wiring 51. Further, even if the connection wiring 55 is provided so as to connect the conductive thin film 11b and the counter electrode 12 without passing through any one or both of the first terminal 31 and the second terminal 32. good.

The second switch 56 is provided in the connection wiring 55. The second switch 56 is a switch that switches between a state in which the conductive thin film 11b and the counter electrode 12 are electrically connected by the connection wiring 55 and a state in which the connection wiring 55 is disconnected. The second control device 62 is a control device that operates the connection and disconnection of the second switch 56.

As shown in FIG. 11, the first control device 60 and the second control device 62 may be configured so that the second switch 56 is disconnected when the first switch 52 is connected. .. Further, the first control device 60 and the second control device 62 are configured so that the second switch 56 is connected when the first switch 52 is disconnected, as shown in FIG. It is good.

When the first switch 52 is connected to the actuator 10D, a voltage is applied to the conductive thin film 11b and the counter electrode 12, and the base electrode 11 and the counter electrode 12 stick to each other. When the first switch 52 is cut off, the voltage applied to the conductive thin film 11b and the counter electrode 12 disappears, and when the Coulomb force is further eliminated, the base electrode 11 and the counter electrode 12 are separated from each other.

In the state where the first switch 52 is ON in the actuator 10D, as shown in FIG. 11, the conductive thin film 11b and the counter electrode 12 are respectively charged, and the conductive thin film 11b and the counter electrode 12 have a Coulomb force. Is occurring. Then, when the first switch 52 changes from the connected state (ON state) to the disconnected state (OFF state), the second switch 56 is connected as shown in FIG. It is preferable that the conductive thin film 11b and the counter electrode 12 are electrically connected. When the conductive thin film 11b and the counter electrode 12 are electrically connected, the charging of the conductive thin film 11b and the charging of the counter electrode 12 are quickly eliminated. Therefore, the Coulomb force acting between the conductive thin film 11b and the counter electrode 12 is quickly eliminated, the shape of the counter electrode 12 is quickly returned, and the counter electrode 12 is quickly separated from the base electrode 11. By providing the second switch 56 in this way, when the first switch 52 changes from the connected state (ON state) to the disconnected state (OFF state), the base electrode 11 and the base electrode 11 are provided. The response speed when the counter electrode 12 is separated from the counter electrode 12 is increased.

The actuator 10D is a control device 60 configured so that the second switch 56 is disconnected when the first switch 52 is connected and the second switch 56 is connected when the first switch 52 is disconnected. , 62 is provided. In the embodiment shown in FIGS. 11 and 12, the actuator 10D is configured such that the first switch 52 is electrically operated by the first control device 60. Further, the second switch 56 is configured to be electrically operated by the second control device 62. Therefore, the first switch 52 and the second switch 56 are electrically and quickly operated, and the timing is further adjusted. Here, the first control device 60 and the second control device 62 may be realized by separate control devices, or may be realized by one control device. The first control device 60 and the second control device 62 can be realized by, for example, one microcomputer.

Here, the control device can be a device that performs various electrical processes of the device including this actuator. The control device can be embodied by a computer driven according to a predetermined program. Specifically, each function of the control device includes an arithmetic unit (also called a processor, a CPU (Central Processing Unit), or an MPU (Micro-processing unit)) or a storage device (memory or memory) of each computer constituting the control device. Processed by (hard disk, etc.). For example, each configuration of the control device may be a database that stores data embodied by a computer in a predetermined format, a data structure, a processing module that performs predetermined arithmetic processing according to a predetermined program, or the like. Can be embodied as part of. Further, although not shown, the control device may be one in which a plurality of control devices cooperate with each other. For example, the control device may be connected to another computer so as to be capable of data communication via a LAN cable, a wireless line, the Internet, or the like. The processing of the control device may be performed in collaboration with such other computers. For example, the information stored in the control device or a part of the information may be stored in the external computer, or the process or a part of the process executed by the control device may be executed by the external computer.

<Actuator 10E>
13 and 14 are cross-sectional views schematically showing the actuator 10E according to another embodiment. In the actuator 10E shown in FIGS. 13 and 14, the members and parts that perform the same operation as the actuator 10 shown in FIG. 1 are designated by the same reference numerals, and redundant description will be omitted as appropriate. FIG. 13 shows a state in which the switch of the actuator 10E is ON. FIG. 14 shows a state in which the switch of the actuator 10E is OFF.

The actuator 10E shown in FIGS. 13 and 14 includes a third control device 63, a fourth control device 64, a first ground wire 71, a second ground wire 72, a third switch 73, and a fourth switch. It is equipped with 74. Further, the actuator 10E includes the above-mentioned first switch 52 and the first control device 60.

The first grounding wire 71 is an electric wiring for grounding the conductive thin film 11b. The third switch 73 is provided on the first ground wire 71, and is a switch for switching between connection and disconnection of the first ground wire 71. The third control device 63 is a device that operates the third switch 73 to control the grounding of the conductive thin film 11b.

The second ground wire 72 is an electrical wiring that grounds the counter electrode 12. The fourth switch 74 is provided on the second ground wire 72, and is a switch for switching between connection and disconnection of the second ground wire 72. The fourth control device 64 is a device that operates the fourth switch 74 to control the grounding of the counter electrode 12.

The first control device 60, the third control device 63, and the fourth control device 64 are configured so that the third switch 73 and the fourth switch 74 are disconnected when the first switch 52 is connected. There is. Further, the first control device 60, the third control device 63, and the fourth control device 64 are configured so that the third switch 73 and the fourth switch 74 are connected to each other when the first switch 52 is disconnected. Has been done.

As shown in FIG. 13, when the first switch 52 is connected to the actuator 10E, a voltage is applied to the conductive thin film 11b and the counter electrode 12, and the base electrode 11 and the counter electrode 12 stick to each other. In the state where the first switch 52 is ON in the actuator 10E, the conductive thin film 11b and the counter electrode 12 are respectively charged, and a Coulomb force is generated in the conductive thin film 11b and the counter electrode 12 via the insulating layer 11c. .. When the first switch 52 is cut off, the voltage applied to the conductive thin film 11b and the counter electrode 12 disappears, and when the Coulomb force is further eliminated, the base electrode 11 and the counter electrode 12 are separated from each other.

In the actuator 10E, when the first switch 52 changes from the connected state (ON state) to the disconnected state (OFF state), as shown in FIG. 14, the third switch 73 and the third switch The four switches 74 are connected so that the conductive thin film 11b and the counter electrode 12 are grounded respectively. When the conductive thin film 11b and the counter electrode 12 are grounded, the charge on the conductive thin film 11b and the charge on the counter electrode 12 are quickly eliminated. Therefore, the Coulomb force acting between the conductive thin film 11b and the counter electrode 12 is quickly eliminated, the shape of the counter electrode 12 is quickly returned, and the counter electrode 12 is quickly separated from the base electrode 11. By providing the third switch 73 and the fourth switch 74 in this way, when the first switch 52 changes from the connected state (ON state) to the disconnected state (OFF state). , The response speed when the base electrode 11 and the counter electrode 12 are separated from each other becomes faster.

In this way, in the actuator 10E, when the first switch 52 is connected, the third switch 73 and the fourth switch 74 are disconnected, respectively, and when the first switch 52 is disconnected, the third switch 73 and the third switch 73 are disconnected. The control devices 60, 63, and 64 are configured so as to be connected to the four switches 74, respectively. In the embodiment shown in FIGS. 13 and 14, the actuator 10E is configured such that the first switch 52 is electrically operated by the first control device 60. Further, the third switch 73 is configured to be electrically operated by the third control device 63. Further, the fourth control device 64 is configured to electrically operate the fourth switch 74. Therefore, the first switch 52, the third switch 73, and the fourth switch 74 are electrically and quickly operated, and the operation timing of each switch is appropriately adjusted. Here, the first control device 60, the third control device 63, and the fourth control device 64 may be realized by separate control devices, or may be realized by one or two control devices. The first control device 60, the third control device 63, and the fourth control device 64 can be realized by, for example, one or two microcomputers. Actuators can have more complex structures, as illustrated herein. The actuator can perform more complicated operations by being operated by the control device based on a predetermined program.

The actuators disclosed herein and various methods for manufacturing the actuators have been described above. Unless otherwise specified, the actuators and the embodiments of the actuator manufacturing method mentioned here are not limited to the present invention.

10, 10A, 10B, 10C Actuator 11 Base electrode 11a Base material (metal base material, non-metal base material)
11b Conductive thin film 11c Insulation layer 12 Opposing electrode 12a Splashing part 12b Slit 12c Hole 31 First terminal 31a First wiring 32 Second terminal 32a Second wiring 50 Power supply 51 Wiring 52 Switch (first switch)
55 Connection wiring 56 Second switch 60 Control device (first control device)
62 2nd control device 63 3rd control device 64 4th control device 71 1st ground wire 72 2nd ground wire 73 3rd switch 74 4th switch

Claims (21)

With the base electrode
The counter electrode facing the base electrode and the counter electrode
The first terminal connected to the base electrode and
A second terminal connected to the counter electrode is provided.
The base electrode is
With a non-metal substrate,
A conductive thin film arranged on the side surface of the non-metal base material facing the counter electrode,
With an insulating layer arranged on the conductive thin film,
The first terminal is connected to the conductive thin film and is connected to the conductive thin film.
The counter electrode is
It is made of a flexible conductor that can be deformed by the Coulomb force acting between the base electrode and the counter electrode when a voltage is applied to the first terminal and the second terminal.
Actuator. A plurality of the base electrodes are arranged so as to face each other in order.
The actuator according to claim 1, wherein the counter electrode is arranged between the base electrodes. The base electrode is
A non-metal base material having an uneven shape on the side surface facing the counter electrode,
The conductive thin film that covers the uneven shape and
The actuator according to claim 2, further comprising an insulating layer covering the conductive thin film. The actuator according to any one of claims 1 to 3, wherein the insulating layer is a thin film of ceramics. The actuator according to claim 4, wherein the insulating layer has a perovskite structure. The actuator according to any one of claims 1 to 5, wherein the insulating layer is a non-woven fabric. The actuator according to any one of claims 1 to 6, wherein a conductive paste or a conductive gel is arranged between the conductive thin film and the insulating layer. The actuator according to any one of claims 1 to 6, wherein a cured conductive material is arranged between the conductive thin film and the insulating layer. The actuator according to any one of claims 1 to 8, wherein the conductive thin film is a metal thin film. The actuator according to any one of claims 1 to 9, wherein the counter electrode is made of an elastomer containing a conductive material. A power supply that applies a voltage to the conductive thin film and the counter electrode,
A first switch for switching between connection and disconnection between the conductive thin film and the counter electrode and the power supply,
The actuator according to any one of claims 1 to 10, further comprising. The actuator according to claim 11, further comprising a control device for operating the first switch. A connection wiring that electrically connects the conductive thin film and the counter electrode without the intervention of the power source.
The claim is provided with a second switch provided in the connection wiring and switching between a state in which the conductive thin film and the counter electrode are electrically connected by the connection wiring and a state in which the connection wiring is disconnected. 11. The actuator according to 11. A control device configured to disconnect the second switch when the first switch is connected and to connect the second switch when the first switch is disconnected is further provided. The actuator according to claim 13. The first grounding wire for grounding the conductive thin film and
A second grounding wire for grounding the counter electrode and
A third switch provided on the first grounding wire and switching the connection and disconnection of the first grounding wire,
The actuator according to claim 11, further comprising a fourth switch provided on the second ground wire and switching between connection and disconnection of the second ground wire. When the first switch is connected, the third switch and the fourth switch are disconnected, and when the first switch is disconnected, the third switch and the fourth switch are connected, respectively. The actuator of claim 15, further comprising a control device configured to do so. The process of preparing a non-metal substrate molded into a predetermined shape, and
A step of arranging a conductive thin film on the surface of a predetermined region of the non-metal base material, and
A method for manufacturing an actuator, which comprises a step of arranging an insulating layer on the conductive thin film. The insulating layer is prepared with a thin film of ceramics,
The method for manufacturing an actuator according to claim 17, wherein the ceramic thin film is arranged on the conductive thin film in the step of arranging the insulating layer on the conductive thin film. The method for manufacturing an actuator according to claim 18, wherein the ceramic thin film is a non-woven fabric. The method for manufacturing an actuator according to claim 19, wherein a conductive paste or a conductive gel is applied to at least one of the conductive thin film or the ceramic thin film, and the ceramic thin film is arranged on the conductive thin film. .. The method for manufacturing an actuator according to claim 20, further comprising a step of curing the conductive paste or the conductive gel.

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