JP2021131284A - Temperature sensor and manufacturing method thereof - Google Patents

Temperature sensor and manufacturing method thereof Download PDF

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JP2021131284A
JP2021131284A JP2020025954A JP2020025954A JP2021131284A JP 2021131284 A JP2021131284 A JP 2021131284A JP 2020025954 A JP2020025954 A JP 2020025954A JP 2020025954 A JP2020025954 A JP 2020025954A JP 2021131284 A JP2021131284 A JP 2021131284A
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insulating substrate
temperature sensor
metal film
pair
insulating
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文夫 松本
Fumio Matsumoto
文夫 松本
博樹 佐藤
Hiroki Sato
博樹 佐藤
昂平 高橋
Kohei Takahashi
昂平 高橋
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Mitsubishi Materials Corp
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Abstract

To provide a temperature sensor which enables the size of a joint area to be increased to thereby enable sufficiently high joint strength to be obtained, and a manufacturing method of the temperature sensor.SOLUTION: The temperature sensor comprises: an insulating substrate 2; a heat-sensitive element 3 provided on the surface of the insulating substrate; a pair of pieces of pattern wiring 4 which is patterned on the surface of the insulating substrate, and is connected at one end, to the heat-sensitive element ; a pair of recessed portions for jointing 5 which is formed in a recessed shape on both sides of the insulating substrate, and inside which a recessed-portion metal film is deposited; a pair of surface lands 6 which is formed with a metal film along the recessed portions for jointing on the surface of the insulating substrate and which is connected to the recessed-portion metal film, and to which the other end of the pair of pattern wirings is connected; and a pair of reverse-side land portions formed with metal films along the recessed portions for jointing on the reverse side of the insulating substrate and connected to the recessed-portion metal film.SELECTED DRAWING: Figure 1

Description

本発明は、表面実装が容易な温度センサ及びその製造方法に関する。 The present invention relates to a temperature sensor that can be easily surface-mounted and a method for manufacturing the same.

一般に、種々の部品や装置等の表面の温度を測定するため、表面に直接搭載されてその温度を測定する温度センサが用いられている。
例えば、従来、図5の(a)に示すように、PCB基板102と、PCB基板102上に設置されたチップサーミスタ103と、PCB基板102上にパターン形成されてチップサーミスタ103に一端が接続された一対のパターン配線104と、PCB基板102上にパターン形成され一対のパターン配線104の他端に接続された一対の表面ランド部105とを備えた温度センサ101などがある。
Generally, in order to measure the temperature of the surface of various parts and devices, a temperature sensor mounted directly on the surface and measuring the temperature is used.
For example, conventionally, as shown in FIG. 5A, a PCB substrate 102, a chip thermistor 103 installed on the PCB substrate 102, and one end connected to the chip thermistor 103 by forming a pattern on the PCB substrate 102. There is a temperature sensor 101 having a pair of pattern wirings 104 and a pair of surface land portions 105 having a pattern formed on the PCB substrate 102 and connected to the other end of the pair of pattern wirings 104.

この温度センサでは、通常、一対の表面ランド部105にリード線が半田,導電性接着剤又は溶接等で接合されるが、リード線の接続が困難な場合、被測定物106に直接PCB基板102を表面実装する場合がある。この場合、図5の(b)(c)に示すように、一対の表面ランド部105から被測定物106の実装用ランド106aまで半田等の導電性接着剤Hを盛って電気的接続と表面実装とを行う必要があった。 In this temperature sensor, lead wires are usually joined to a pair of surface land portions 105 by soldering, conductive adhesive, welding, or the like, but when it is difficult to connect the lead wires, the PCB substrate 102 is directly connected to the object to be measured 106. May be surface mounted. In this case, as shown in (b) and (c) of FIG. 5, a conductive adhesive H such as solder is piled up from the pair of surface land portions 105 to the mounting land 106a of the object to be measured 106 to electrically connect and surface. I had to do with the implementation.

また、特許文献1には、基板上に白金グレーズ電極が両端に形成され、この電極間に抵抗体が形成され、さらに基板の両端部に銀系電極とニッケル及び半田メッキ層が形成された白金温度センサが記載されている。この白金温度センサでは、表面実装を行うため、ニッケル及び半田メッキ層が基板表面の白金グレーズ電極上から側面を介して裏面まで形成されている。 Further, in Patent Document 1, platinum glaze electrodes are formed on both ends of the substrate, resistors are formed between the electrodes, and silver electrodes, nickel and solder plating layers are formed on both ends of the substrate. A temperature sensor is described. In this platinum temperature sensor, a nickel and solder-plated layer is formed from the platinum glaze electrode on the surface of the substrate to the back surface via the side surface for surface mounting.

特開平6−300643号公報Japanese Unexamined Patent Publication No. 6-300643

上記従来の技術には、以下の課題が残されている。
すなわち、図5に示すように、PCB基板102の表面ランド部105から被測定物106の実装用ランド106aまで導電性接着剤Hを盛って表面実装を行う場合、基板側面,基板裏面及び実装用ランド106aに対して導電性接着剤Hの十分な接合面積を確保することが困難であった。
また、特許文献1に記載の技術では、基板の裏面の一部だけが回路基板や被測定物に接合されるため、接合面積が少なく、十分な接合強度を得ることが困難であった。
The following problems remain in the above-mentioned conventional technique.
That is, as shown in FIG. 5, when the conductive adhesive H is piled up from the surface land portion 105 of the PCB substrate 102 to the mounting land 106a of the object to be measured 106 and surface mounted, the side surface of the substrate, the back surface of the substrate, and the mounting are used. It was difficult to secure a sufficient bonding area of the conductive adhesive H with respect to the land 106a.
Further, in the technique described in Patent Document 1, since only a part of the back surface of the substrate is bonded to the circuit board or the object to be measured, the bonding area is small and it is difficult to obtain sufficient bonding strength.

本発明は、前述の課題に鑑みてなされたもので、接合面積を大きくでき、十分に高い接合強度を得ることができる温度センサ及びその製造方法を提供することを目的とする。 The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a temperature sensor capable of increasing the bonding area and obtaining a sufficiently high bonding strength, and a method for manufacturing the same.

本発明は、前記課題を解決するために以下の構成を採用した。すなわち、第1の発明に係る温度センサは、絶縁性基板と、前記絶縁性基板の表面に設けられた感熱素子と、前記絶縁性基板の表面にパターン形成され一端が前記感熱素子に接続された一対のパターン配線と、前記絶縁性基板の両側面に凹部状に形成され内面に凹部金属膜が成膜された一対の接合用凹部と、前記絶縁性基板の表面において前記接合用凹部に沿って金属膜で形成され前記凹部金属膜に接続されていると共に一対のパターン配線の他端が接続された一対の表面ランド部と、前記絶縁性基板の裏面において前記接合用凹部に沿って金属膜で形成され前記凹部金属膜に接続されている一対の裏面ランド部とを備えていることを特徴とする。 The present invention has adopted the following configuration in order to solve the above problems. That is, the temperature sensor according to the first invention has an insulating substrate, a heat-sensitive element provided on the surface of the insulating substrate, and a pattern formed on the surface of the insulating substrate, and one end thereof is connected to the heat-sensitive element. A pair of pattern wirings, a pair of bonding recesses formed in recesses on both side surfaces of the insulating substrate and a concave metal film formed on the inner surface, and along the bonding recesses on the surface of the insulating substrate. A pair of surface land portions formed of a metal film and connected to the recess metal film and the other ends of the pair of pattern wirings, and a metal film along the bonding recess on the back surface of the insulating substrate. It is characterized by having a pair of back surface lands formed and connected to the recessed metal film.

この温度センサでは、絶縁性基板の両側面に凹部状に形成され内面に凹部金属膜が成膜された一対の接合用凹部を備えているので、半田等の導電性接着剤が接合用凹部まで入り込んで接合面積が増大すると共にアンカー効果によって平坦な側面に比べて高い接合強度を得ることができる。特に、表面ランド部から側面の接合用凹部を介して裏面ランド部まで導電性接着剤を回り込ませて盛ることで、より高い接合強度を得ることができる。また、絶縁性基板の側面に接合用凹部を設けるため、絶縁性基板にスルーホールを設けてスルーホール内に導電性接着剤を入れて接合する場合に比べて、小型化を図ることが可能になる。すなわち、接合用凹部では、スルーホールの半分程度の面積で済むため、省スペース化が可能になる。 Since this temperature sensor is provided with a pair of bonding recesses formed in a concave shape on both side surfaces of the insulating substrate and having a concave metal film formed on the inner surface, a conductive adhesive such as solder can reach the bonding recesses. It is possible to obtain a higher bonding strength as compared with a flat side surface due to the anchor effect as well as the penetration to increase the bonding area. In particular, higher bonding strength can be obtained by wrapping the conductive adhesive from the front surface land portion to the back surface land portion via the side bonding recess. In addition, since a recess for joining is provided on the side surface of the insulating substrate, it is possible to reduce the size as compared with the case where a through hole is provided in the insulating substrate and a conductive adhesive is put in the through hole for joining. Become. That is, since the area of the joint recess is about half that of the through hole, space can be saved.

第2の発明に係る温度センサは、第1の発明において、前記絶縁性基板の裏面に貼り付けられた両面テープを備えていることを特徴とする。
すなわち、この温度センサでは、絶縁性基板の裏面に貼り付けられた両面テープを備えているので、両面テープにより被測定物上の所定位置に温度センサを仮固定し、仮固定した状態で導電性接着剤で接合用凹部等と被測定物との接合を図ることで、位置ずれを防止することができる。また、両面テープにより絶縁性基板と被測定物との高い密着性が得られ、高い精度で温度が測定可能になる。
The temperature sensor according to the second invention is characterized in that, in the first invention, it includes a double-sided tape attached to the back surface of the insulating substrate.
That is, since this temperature sensor is provided with a double-sided tape attached to the back surface of the insulating substrate, the temperature sensor is temporarily fixed at a predetermined position on the object to be measured by the double-sided tape, and the temperature sensor is temporarily fixed and conductive. Positional deviation can be prevented by joining the bonding recess or the like with the object to be measured with an adhesive. In addition, the double-sided tape provides high adhesion between the insulating substrate and the object to be measured, and the temperature can be measured with high accuracy.

第3の発明に係る温度センサは、第2の発明において、前記絶縁性基板が、長方形状とされ、前記感熱素子が前記絶縁性基板の一端側に配されていると共に、前記表面ランド部,前記接合用凹部及び前記裏面ランド部が前記絶縁性基板の他端側に配され、前記両面テープが、前記絶縁性基板の一端側に配されていることを特徴とする。
すなわち、この温度センサでは、表面ランド部,接合用凹部及び裏面ランド部が絶縁性基板の他端側に配され、両面テープが、絶縁性基板の一端側に配されているので、絶縁性基板の他端側で導電性接着剤により接合が行われた際に、絶縁性基板の一端側が両面テープで固定されているので、絶縁性基板の感熱素子側である一端側が浮いて全体が傾くことを抑制可能である。
In the temperature sensor according to the third invention, in the second invention, the insulating substrate has a rectangular shape, the heat sensitive element is arranged on one end side of the insulating substrate, and the surface land portion, The bonding recess and the back surface land portion are arranged on the other end side of the insulating substrate, and the double-sided tape is arranged on one end side of the insulating substrate.
That is, in this temperature sensor, the front surface land portion, the bonding recess, and the back surface land portion are arranged on the other end side of the insulating substrate, and the double-sided tape is arranged on one end side of the insulating substrate. When the other end side of the insulating substrate is joined with a conductive adhesive, one end side of the insulating substrate is fixed with double-sided tape, so that one end side of the insulating substrate, which is the heat-sensitive element side, floats and the whole is tilted. Can be suppressed.

第4の発明に係る温度センサの製造方法は、第1から3の発明の温度センサの製造方法であって、絶縁性原板に複数の貫通孔を形成する貫通孔形成工程と、前記貫通孔の内周面に前記凹部金属膜となる金属膜を形成する金属膜形成工程と、前記絶縁性原板を切断して複数の前記絶縁性基板とする基板切断工程とを有し、前記基板切断工程で、前記貫通孔を切断して前記接合用凹部を形成することを特徴とする。
すなわち、この温度センサの製造方法では、絶縁性原板を切断して複数の絶縁性基板とする基板切断工程とを有し、基板切断工程で、貫通孔を切断して接合用凹部を形成するので、基板切断工程時に貫通孔を切断するだけで容易に接合用凹部を形成することができる。
The method for manufacturing a temperature sensor according to a fourth aspect of the present invention is the method for manufacturing a temperature sensor according to the first to third inventions, which comprises a through-hole forming step of forming a plurality of through-holes in an insulating original plate and the through-hole forming method. The substrate cutting step comprises a metal film forming step of forming a metal film to be the recessed metal film on the inner peripheral surface and a substrate cutting step of cutting the insulating original plate into a plurality of the insulating substrates. , The through hole is cut to form the joining recess.
That is, this method of manufacturing a temperature sensor includes a substrate cutting step of cutting an insulating original plate to form a plurality of insulating substrates, and in the substrate cutting step, a through hole is cut to form a bonding recess. , The bonding recess can be easily formed only by cutting the through hole in the substrate cutting step.

本発明によれば、以下の効果を奏する。
すなわち、本発明の温度センサによれば、絶縁性基板の両側面に凹部状に形成され内面に凹部金属膜が成膜された一対の接合用凹部を備えているので、半田等の導電性接着剤が接合用凹部まで入り込んで接合面積が増大すると共にアンカー効果によって平坦な側面に比べて高い接合強度を得ることができる。特に、表面ランド部から側面の接合用凹部を介して裏面ランド部まで導電性接着剤を回り込ませて盛ることで、より高い接合強度を得ることができる。
また、本発明の温度センサの製造方法によれば、絶縁性原板を切断して複数の絶縁性基板とする基板切断工程とを有し、基板切断工程で、貫通孔を切断して接合用凹部を形成するので、基板切断工程時に貫通孔を切断するだけで容易に接合用凹部を形成することができる。
According to the present invention, the following effects are obtained.
That is, according to the temperature sensor of the present invention, since the insulating substrate is provided with a pair of bonding recesses formed in a concave shape on both side surfaces and a concave metal film formed on the inner surface, conductive adhesion such as solder is provided. The agent penetrates into the bonding recess to increase the bonding area, and the anchor effect makes it possible to obtain higher bonding strength as compared with the flat side surface. In particular, higher bonding strength can be obtained by wrapping the conductive adhesive from the front surface land portion to the back surface land portion via the side bonding recess.
Further, according to the method for manufacturing a temperature sensor of the present invention, there is a substrate cutting step of cutting an insulating original plate into a plurality of insulating substrates, and in the substrate cutting step, a through hole is cut to form a concave portion for joining. Therefore, the bonding recess can be easily formed only by cutting the through hole in the substrate cutting step.

本発明に係る温度センサ及びその製造方法の一実施形態において、温度センサを示す平面図である。It is a top view which shows the temperature sensor in one Embodiment of the temperature sensor and its manufacturing method which concerns on this invention. 本実施形態において、温度センサを示す裏面図である。It is a back view which shows the temperature sensor in this embodiment. 本実施形態において、温度センサを示す側面図である。In this embodiment, it is a side view which shows the temperature sensor. 本発明に係る温度センサ及びその製造方法の一実施形態において、基板切断工程を説明するための概念的な斜視図である。It is a conceptual perspective view for demonstrating the substrate cutting process in one Embodiment of the temperature sensor and its manufacturing method which concerns on this invention. 本発明に係る温度センサ及びその製造方法の従来例において、温度センサの斜視図(a),導電性接着剤を盛った状態の斜視図(b)及び導電性接着剤の部分で切断した断面図(c)である。In a conventional example of a temperature sensor and a method for manufacturing the same according to the present invention, a perspective view (a) of the temperature sensor, a perspective view (b) in a state where a conductive adhesive is piled up, and a cross-sectional view cut at a portion of the conductive adhesive. (C).

以下、本発明に係る温度センサ及びその製造方法における一実施形態を、図1から図4を参照しながら説明する。なお、以下の説明に用いる図面では、各部材を認識可能又は認識容易な大きさとするために必要に応じて縮尺を適宜変更している部分がある。 Hereinafter, an embodiment of the temperature sensor and the manufacturing method thereof according to the present invention will be described with reference to FIGS. 1 to 4. In the drawings used in the following description, there is a part where the scale is appropriately changed as necessary in order to make each member recognizable or easily recognizable.

本実施形態の温度センサ1は、図1から図3に示すように、絶縁性基板2と、絶縁性基板2の表面に設けられた感熱素子3と、絶縁性基板2の表面にパターン形成され一端が感熱素子3に接続された一対のパターン配線4と、絶縁性基板2の両側面に凹部状に形成され内面に凹部金属膜が成膜された一対の接合用凹部5と、絶縁性基板2の表面において接合用凹部5に沿って金属膜で形成され凹部金属膜に接続されていると共に一対のパターン配線4の他端が接続された一対の表面ランド部6と、絶縁性基板2の裏面において接合用凹部5に沿って金属膜で形成され凹部金属膜に接続されている一対の裏面ランド部7とを備えている。 As shown in FIGS. 1 to 3, the temperature sensor 1 of the present embodiment has a pattern formed on the surface of the insulating substrate 2, the heat sensitive element 3 provided on the surface of the insulating substrate 2, and the surface of the insulating substrate 2. A pair of pattern wirings 4 having one end connected to the heat-sensitive element 3, a pair of bonding recesses 5 formed in a concave shape on both side surfaces of the insulating substrate 2 and a concave metal film formed on the inner surface, and an insulating substrate. On the surface of 2, a pair of surface land portions 6 formed of a metal film along the bonding recess 5 and connected to the recess metal film and the other ends of the pair of pattern wirings 4 and the insulating substrate 2 On the back surface, a pair of back surface land portions 7 formed of a metal film along the bonding recess 5 and connected to the recess metal film are provided.

また、本実施形態の温度センサ1は、絶縁性基板2の裏面に貼り付けられた両面テープ8を備えている。
上記絶縁性基板2は、長方形状のPCB基板であり、感熱素子3が絶縁性基板2の一端側に配されていると共に、表面ランド部6,接合用凹部5及び裏面ランド部7が絶縁性基板2の他端側に配され、両面テープ8が、絶縁性基板2の一端側に配されている。
すなわち、両面テープ8は、感熱素子3の直下に配されており、感熱素子3よりも広い面積の矩形状とされている。
Further, the temperature sensor 1 of the present embodiment includes a double-sided tape 8 attached to the back surface of the insulating substrate 2.
The insulating substrate 2 is a rectangular PCB substrate, and the heat-sensitive element 3 is arranged on one end side of the insulating substrate 2, and the front surface land portion 6, the bonding recess 5 and the back surface land portion 7 are insulating. It is arranged on the other end side of the substrate 2, and the double-sided tape 8 is arranged on one end side of the insulating substrate 2.
That is, the double-sided tape 8 is arranged directly under the heat-sensitive element 3, and has a rectangular shape having a larger area than the heat-sensitive element 3.

上記感熱素子3は、絶縁性基板2の表面に実装されたチップサーミスタである。このチップサーミスタは、両端部に電極が形成されている。
一対の上記パターン配線4は、例えば銅箔で形成され、その一端が感熱素子3の一対の電極に接続されている。
上記接合用凹部5は、円弧状凹部であり、内面に成膜された凹部金属膜は、例えばCuとAuとの積層膜である。
The thermal element 3 is a chip thermistor mounted on the surface of the insulating substrate 2. Electrodes are formed at both ends of this chip thermistor.
The pair of pattern wirings 4 are formed of, for example, copper foil, and one end thereof is connected to a pair of electrodes of the thermal element 3.
The bonding recess 5 is an arcuate recess, and the recess metal film formed on the inner surface is, for example, a laminated film of Cu and Au.

上記表面ランド部6及び裏面ランド部7の金属膜も、例えばCuとAuとの積層膜である。
上記両面テープ8は、例えば銅箔の両面に接着剤が塗られたテープ等が採用可能である。なお、両面テープ8としては、絶縁性基板2よりも熱伝導性が高い金属箔テープ等を主とする両面テープが集熱効果が得られるため好ましい。
The metal film of the front surface land portion 6 and the back surface land portion 7 is also, for example, a laminated film of Cu and Au.
As the double-sided tape 8, for example, a tape in which adhesives are applied to both sides of a copper foil can be adopted. As the double-sided tape 8, a double-sided tape mainly composed of a metal foil tape or the like having a higher thermal conductivity than the insulating substrate 2 is preferable because a heat collecting effect can be obtained.

なお、絶縁性基板2の表面において、表面ランド部6や感熱素子3との接続部を除くパターン配線4をソルダーレジスト等の保護膜で覆っても構わない。 On the surface of the insulating substrate 2, the pattern wiring 4 excluding the surface land portion 6 and the connection portion with the heat sensitive element 3 may be covered with a protective film such as a solder resist.

次に、本実施形態の温度センサ1を作製する方法について図4を参照して説明する。
本実施形態の温度センサ1の製造方法は、図4に示すように、絶縁性原板22に複数の貫通孔25を形成する貫通孔形成工程と、貫通孔25の内周面に凹部金属膜となる金属膜を形成する金属膜形成工程と、絶縁性原板22を切断して複数の絶縁性基板2とする基板切断工程とを有している。
上記基板切断工程では、貫通孔25を切断して接合用凹部5を形成する。
Next, a method of manufacturing the temperature sensor 1 of the present embodiment will be described with reference to FIG.
As shown in FIG. 4, the method for manufacturing the temperature sensor 1 of the present embodiment includes a through hole forming step of forming a plurality of through holes 25 in the insulating original plate 22 and a recessed metal film on the inner peripheral surface of the through holes 25. It has a metal film forming step of forming the metal film, and a substrate cutting step of cutting the insulating original plate 22 into a plurality of insulating substrates 2.
In the substrate cutting step, the through hole 25 is cut to form the bonding recess 5.

上記絶縁性原板22は、大判のPCB基板であって、複数の絶縁性基板2となる基板である。
上記貫通孔形成工程の前に、絶縁性原板22の表面にパターン配線4を予めパターン形成しておく。
上記貫通孔形成工程では、ドリル等で接合用凹部5となる複数の所定位置に所定径の貫通孔25を形成する。
The insulating original plate 22 is a large-sized PCB substrate, which is a plurality of insulating substrates 2.
Prior to the through hole forming step, the pattern wiring 4 is formed in advance on the surface of the insulating original plate 22.
In the through hole forming step, through holes 25 having a predetermined diameter are formed at a plurality of predetermined positions to be joint recesses 5 by a drill or the like.

上記金属膜形成工程では、絶縁性原板22の表面に表面ランド部6をCuとAuとの積層膜でパターン形成すると共に、絶縁性原板22の裏面に裏面ランド部7をCuとAuとの積層膜でパターン形成する。このとき、貫通孔25の内周面にも凹部金属膜を同様にCuとAuとの積層膜で形成する。 In the metal film forming step, the front surface land portion 6 is patterned with a laminated film of Cu and Au on the front surface of the insulating original plate 22, and the back surface land portion 7 is laminated on the back surface of the insulating original plate 22 with Cu and Au. A pattern is formed with a film. At this time, a concave metal film is also formed on the inner peripheral surface of the through hole 25 with a laminated film of Cu and Au.

上記基板切断工程では、ダイシングブレードDによるダイシング等で絶縁性原板22を格子状に切断し、複数の絶縁性基板2に分離切断する。
なお、チップサーミスタの感熱素子3は、基板切断工程の前後のいずれで絶縁性原板22又は絶縁性基板2の所定位置に実装しても構わない。
In the substrate cutting step, the insulating original plate 22 is cut in a grid pattern by dicing with the dicing blade D or the like, and the insulating substrate 2 is separated and cut into a plurality of insulating substrates 2.
The heat-sensitive element 3 of the chip thermistor may be mounted at a predetermined position on the insulating original plate 22 or the insulating substrate 2 before or after the substrate cutting step.

このように本実施形態の温度センサ1では、絶縁性基板2の両側面に凹部状に形成され内面に凹部金属膜が成膜された一対の接合用凹部5を備えているので、半田等の導電性接着剤が接合用凹部5まで入り込んで接合面積が増大すると共にアンカー効果によって平坦な側面に比べて高い接合強度を得ることができる。特に、表面ランド部6から側面の接合用凹部5を介して裏面ランド部7まで導電性接着剤を回り込ませて盛ることで、より高い接合強度を得ることができる。 As described above, the temperature sensor 1 of the present embodiment is provided with a pair of bonding recesses 5 formed in a concave shape on both side surfaces of the insulating substrate 2 and having a concave metal film formed on the inner surface, so that solder or the like can be used. The conductive adhesive penetrates into the bonding recess 5 to increase the bonding area, and the anchor effect makes it possible to obtain higher bonding strength as compared with the flat side surface. In particular, higher bonding strength can be obtained by wrapping the conductive adhesive from the front land portion 6 to the back surface land portion 7 via the side bonding recess 5 and piling it.

また、絶縁性基板2の側面に接合用凹部5を設けるため、絶縁性基板2にスルーホールを設けてスルーホール内に導電性接着剤を入れて接合する場合に比べて、小型化を図ることが可能になる。すなわち、接合用凹部5では、スルーホールの半分程度の面積で済むため、省スペース化が可能になる。 Further, since the bonding recess 5 is provided on the side surface of the insulating substrate 2, the size can be reduced as compared with the case where the insulating substrate 2 is provided with a through hole and a conductive adhesive is put in the through hole for joining. Becomes possible. That is, since the area of the joining recess 5 is about half that of the through hole, space can be saved.

また、絶縁性基板2の裏面に貼り付けられた両面テープ8を備えているので、両面テープ8により被測定物上の所定位置に温度センサ1を仮固定し、仮固定した状態で導電性接着剤で接合用凹部5等と被測定物との接合を図ることで、位置ずれを防止することができる。また、両面テープ8により絶縁性基板2と被測定物との高い密着性が得られ、高い精度で温度が測定可能になる。 Further, since the double-sided tape 8 attached to the back surface of the insulating substrate 2 is provided, the temperature sensor 1 is temporarily fixed at a predetermined position on the object to be measured by the double-sided tape 8 and conductively adhered in the temporarily fixed state. Positional deviation can be prevented by joining the bonding recess 5 and the like with the object to be measured with an agent. Further, the double-sided tape 8 provides high adhesion between the insulating substrate 2 and the object to be measured, so that the temperature can be measured with high accuracy.

さらに、表面ランド部6,接合用凹部5及び裏面ランド部7が絶縁性基板2の他端側に配され、両面テープ8が、絶縁性基板2の一端側に配されているので、絶縁性基板2の他端側で導電性接着剤により接合が行われた際に、絶縁性基板2の一端側が両面テープ8で固定されているので、絶縁性基板2の感熱素子3側である一端側が浮いて全体が傾くことを抑制可能である。 Further, since the front surface land portion 6, the bonding recess 5 and the back surface land portion 7 are arranged on the other end side of the insulating substrate 2, and the double-sided tape 8 is arranged on one end side of the insulating substrate 2, the insulating property is improved. When the other end side of the substrate 2 is joined by the conductive adhesive, one end side of the insulating substrate 2 is fixed with the double-sided tape 8, so that one end side of the insulating substrate 2 which is the heat sensitive element 3 side is It is possible to prevent the whole from floating and tilting.

また、本実施形態の温度センサ1の製造方法では、絶縁性原板22を切断して複数の絶縁性基板2とする基板切断工程とを有し、基板切断工程で、貫通孔25を切断して接合用凹部5を形成するので、基板切断工程時に貫通孔25を切断するだけで容易に接合用凹部5を形成することができる。 Further, the method for manufacturing the temperature sensor 1 of the present embodiment includes a substrate cutting step of cutting the insulating original plate 22 to form a plurality of insulating substrates 2, and the through hole 25 is cut in the substrate cutting step. Since the bonding recess 5 is formed, the bonding recess 5 can be easily formed by simply cutting the through hole 25 during the substrate cutting step.

なお、本発明の技術範囲は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
例えば、上記実施形態では、感熱素子としてチップサーミスタを絶縁性基板上に実装しているが、感熱素子として薄膜サーミスタや焦電素子,白金等の抵抗体等を採用しても構わない。
The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the above embodiment, the chip thermistor is mounted on the insulating substrate as the heat sensitive element, but a thin film thermistor, a pyroelectric element, a resistor such as platinum, or the like may be adopted as the heat sensitive element.

1…温度センサ、2…絶縁性基板、3…感熱素子、4…パターン配線、5…接合用凹部、6…表面ランド部、7…裏面ランド部、8…両面テープ、22…絶縁性原板、25…貫通孔 1 ... Temperature sensor, 2 ... Insulating substrate, 3 ... Heat sensitive element, 4 ... Pattern wiring, 5 ... Concave for joining, 6 ... Front land part, 7 ... Back land part, 8 ... Double-sided tape, 22 ... Insulating original plate, 25 ... Through hole

Claims (4)

絶縁性基板と、
前記絶縁性基板の表面に設けられた感熱素子と、
前記絶縁性基板の表面にパターン形成され一端が前記感熱素子に接続された一対のパターン配線と、
前記絶縁性基板の両側面に凹部状に形成され内面に凹部金属膜が成膜された一対の接合用凹部と、
前記絶縁性基板の表面において前記接合用凹部に沿って金属膜で形成され前記凹部金属膜に接続されていると共に一対のパターン配線の他端が接続された一対の表面ランド部と、
前記絶縁性基板の裏面において前記接合用凹部に沿って金属膜で形成され前記凹部金属膜に接続されている一対の裏面ランド部とを備えていることを特徴とする温度センサ。
Insulating board and
The heat-sensitive element provided on the surface of the insulating substrate and
A pair of pattern wirings that are patterned on the surface of the insulating substrate and one end of which is connected to the thermal element.
A pair of recesses for joining, which are formed in a concave shape on both side surfaces of the insulating substrate and have a concave metal film formed on the inner surface.
A pair of surface land portions formed of a metal film along the bonding recess on the surface of the insulating substrate and connected to the recess metal film and the other ends of the pair of pattern wirings.
A temperature sensor characterized by having a pair of back surface lands formed of a metal film along the bonding recess on the back surface of the insulating substrate and connected to the recess metal film.
請求項1に記載の温度センサにおいて、
前記絶縁性基板の裏面に貼り付けられた両面テープを備えていることを特徴とする温度センサ。
In the temperature sensor according to claim 1,
A temperature sensor including a double-sided tape attached to the back surface of the insulating substrate.
請求項2に記載の温度センサにおいて、
前記絶縁性基板が、長方形状とされ、
前記感熱素子が前記絶縁性基板の一端側に配されていると共に、前記表面ランド部,前記接合用凹部及び前記裏面ランド部が前記絶縁性基板の他端側に配され、
前記両面テープが、前記絶縁性基板の一端側に配されていることを特徴とする温度センサ。
In the temperature sensor according to claim 2,
The insulating substrate has a rectangular shape.
The heat-sensitive element is arranged on one end side of the insulating substrate, and the front surface land portion, the bonding recess, and the back surface land portion are arranged on the other end side of the insulating substrate.
A temperature sensor characterized in that the double-sided tape is arranged on one end side of the insulating substrate.
請求項1から3のいずれか一項に記載の温度センサの製造方法であって、
絶縁性原板に複数の貫通孔を形成する貫通孔形成工程と、
前記貫通孔の内周面に前記凹部金属膜となる金属膜を形成する金属膜形成工程と、
前記絶縁性原板を切断して複数の前記絶縁性基板とする基板切断工程とを有し、
前記基板切断工程で、前記貫通孔を切断して前記接合用凹部を形成することを特徴とする温度センサの製造方法。
The method for manufacturing a temperature sensor according to any one of claims 1 to 3.
A through-hole forming process for forming a plurality of through-holes in an insulating original plate,
A metal film forming step of forming a metal film to be the recessed metal film on the inner peripheral surface of the through hole,
It has a substrate cutting step of cutting the insulating original plate into a plurality of the insulating substrates.
A method for manufacturing a temperature sensor, which comprises cutting the through hole to form the bonding recess in the substrate cutting step.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067204U (en) * 1992-06-23 1994-01-28 株式会社芝浦電子製作所 Chip thermistor
JP2001127188A (en) * 1999-10-25 2001-05-11 Murata Mfg Co Ltd Module board and method of manufacturing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067204U (en) * 1992-06-23 1994-01-28 株式会社芝浦電子製作所 Chip thermistor
JP2001127188A (en) * 1999-10-25 2001-05-11 Murata Mfg Co Ltd Module board and method of manufacturing the same

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