JP2021121792A - Visual inspection device and visual inspection method - Google Patents

Abstract

To provide a visual inspection device and a visual inspection method which can inspect a surface state of a component with higher accuracy.SOLUTION: A visual inspection device 1 includes laser displacement sensors 20 and 40, imaging units 30 and 50 which capture images of an inspection surface of a workpiece W, a robot 60 which has an articulated arm and has a hand 61 mounted at a front end of the articulated arm to hold the workpiece W, and a controller 90. The controller 90 is configured to perform: controlling the robot 60 so that a prescribed inspection surface is irradiated with laser beams from the laser displacement sensors 20 and 40 and images of the prescribed inspection surface are captured by the imaging units 30 and 50; acquiring measurement results of the laser displacement sensors 20 and 40 and results of capturing by the imaging units 30 and 50; and determining whether a surface state of the workpiece W is good or not on the basis of the acquired results of measurement and capturing.SELECTED DRAWING: Figure 1

Description

The present invention relates to a visual inspection device and a visual inspection method for parts.

As a method for inspecting defects in the surface state of parts, for example, the defect inspection method described in Patent Document 1 is known. In the method described in Patent Document 1, the inspection surface of the component is irradiated with laser light, the reflected light from the inspection surface is received, and the distance to the inspection surface is measured based on the measurement result of the laser displacement meter. Detects defects in the surface condition of parts.

Japanese Unexamined Patent Publication No. 2008-241612

By using a laser displacement meter, for example, defects (unevenness, etc.) in the depth direction on the inspection surface can be detected with high accuracy. Here, although the laser displacement meter can detect defects in the depth direction on the inspection surface, for example, it is difficult to detect defects other than the depth direction with high accuracy only by the laser displacement meter. In addition, in order to properly detect defects in the surface condition of parts, it is necessary to finely change the inspection surface and irradiate the surface of the part with laser light without leakage. In this way, the inspection surface is finely changed. It's difficult to do. Therefore, it may not be possible to detect defects in the surface state of the component with high accuracy simply by using the laser displacement meter.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a visual inspection apparatus and a visual inspection method capable of inspecting the surface condition of a part with higher accuracy.

The visual inspection device according to one aspect of the present invention is a visual inspection device that inspects the surface condition of a part, and irradiates the inspection surface of the part with a laser beam and receives the reflected light from the inspection surface. It has one or more laser displacement meters that measure the distance to the inspection surface, one or more imaging units that image the inspection surface of the component, and an articulated arm, and the component is attached to the tip of the articulated arm. A robot equipped with a holding hand and a control device are provided, and the control device so that a predetermined inspection surface is irradiated with laser light from a laser displacement meter and the predetermined inspection surface is imaged by an imaging unit. Control the robot, acquire the measurement result of the laser displacement meter and the imaging result of the imaging unit, and determine the quality of the surface condition of the component based on the acquired measurement result and imaging result. It is configured as follows.

In the visual inspection apparatus according to one aspect of the present invention, the measurement result of the inspection surface of the component by the laser displacement meter and the imaging result of the inspection surface of the component by the imaging unit are taken into consideration when determining the quality of the surface condition of the component. NS. As a result, on the inspection surface of the component, the laser displacement meter detects abnormalities (unevenness) in the depth direction, and the imaging unit detects abnormalities such as dimensions, area, and shade of color. In this way, by using the measurement result of the laser displacement meter and the image pickup result of the imaging unit, the surface state related to various defects is compared with the case where the defect of the surface state is detected only by using the laser displacement meter, for example. Defects can be detected. This makes it possible to inspect the surface condition of the parts with high accuracy. Further, in the visual inspection device according to one aspect of the present invention, a robot that holds a part with a hand attached to the tip of an articulated arm is controlled by a control device. Specifically, the robot is controlled so that the predetermined inspection surface is irradiated with the laser beam and the predetermined inspection surface is imaged. That is, the inspection surface is set by the robot controlled by the control device. By setting the inspection surface by the robot having the articulated arm in this way, it is possible to finely change the inspection surface so as to obtain a desired inspection surface. This makes it possible to inspect the surface of the component without omission, and it is possible to inspect the surface condition of the component with higher accuracy.

The above-mentioned visual inspection apparatus includes first and second laser displacement meters as a plurality of laser displacement meters, and also includes first and second imaging units as a plurality of imaging units, and includes a first laser displacement meter and a first laser displacement meter. The imaging unit 1 is a holding inspection unit for inspection in a state where the parts are held by the hand, and the second laser displacement meter and the second imaging unit are in a state where the parts are not held by the hand. It may be a non-holding inspection unit related to an inspection in which the surface held by the hand is the inspection surface in the inspection by the holding inspection unit. In this way, a plurality of laser displacement meters and imaging units are provided, respectively, and the configuration related to the inspection when the part is held by the hand and the holding when the part is held when not held by the hand. By dividing into the configuration related to the inspection with the surface as the inspection surface, the surface of the parts can be inspected without omission using the robot as described above, and the holding surface when the robot is used can also be appropriately inspected. Can be done. As a result, the surface condition of the component can be inspected with higher accuracy.

The above-mentioned visual inspection device includes a mounting portion configured so that parts can be mounted, an actuator for moving the mounting portion between an inspection area by the holding inspection unit, and an inspection area by the non-holding inspection unit. The control device further controls the robot so that the parts are placed on the mounting portion with the surface held by the hand exposed, and the parts held by the hand with the surface exposed. It may be configured to further control the actuator so that the mounting portion on which the By moving the mounting unit between the inspection area by the holding inspection unit and the inspection area by the non-holding inspection unit by the actuator, the parts can be smoothly moved between the two areas, and the surface condition of the parts in both areas is inspected. Can be easily performed. Then, by moving the inspection area by the non-holding inspection unit for the part with the exposed surface held by the hand, the surface held by the hand is moved with respect to the part moving in the inspection area by the non-holding inspection unit. As the inspection surface, the inspection by the second laser displacement meter and the second imaging unit constituting the non-holding inspection unit can be appropriately performed.

The hand may have one or more suction nozzles configured to suck the component. By adopting a configuration in which the parts are held by the suction nozzle, the holding surface can be one surface, and the surface that can be inspected by the holding inspection unit can be compared with the case where two or more surfaces are sandwiched, for example. You can do a lot. This makes it possible to improve the efficiency of inspection.

The hand may have first and second suction nozzles configured to suck different parts. By providing the first and second suction nozzles for sucking different parts, for example, when switching the parts to be mounted on the mounting portion, the nozzles that do not hold the parts are mounted on the mounting portion. In addition to sucking the placed parts and moving them from the mounting part, it is possible to place the parts sucked by the nozzle that originally held the parts on the mounting part, and the parts can be switched efficiently. be able to. That is, for example, when there is only one nozzle, the parts mounted on the mounting portion are attracted by the nozzles and the parts are placed at the moving destination, and then new parts are attracted to the mounting portion. Whereas it is necessary to move, in the configuration where two nozzles are provided, two parts can be sucked at the same time, so for example, switching of parts to be mounted on the mounting part is efficient as described above. Can be done As described above, according to the above-described configuration, the inspection can be performed more efficiently.

The control device controls the robot so that the holding inspection unit inspects the first part in a state where the first part is sucked by the first suction nozzle before the inspection is completed, and the holding inspection. By the time the inspection of the first part by the unit is completed, the actuator is controlled and held so that the mounting part on which the second part is placed after the inspection is completed moves to the inspection area by the inspection unit at the time of holding. After the inspection of the first part by the time inspection unit is completed, the second part is sucked by the second suction nozzle and the first part is placed on the mounting portion in place of the second part. Controlling the robot, controlling the actuator so that the mounting part on which the first component is placed moves to the inspection area by the non-holding inspection unit, and the second suction nozzle sucked by the second suction nozzle. It may be configured to control the robot so that the parts of the robot are ejected, and to further execute. According to such control, by using the two suction nozzles described above, it is possible to smoothly discharge the parts after the inspection is completed and to move the parts during the inspection smoothly.

The parts are formed in an arch shape on the surface held by the hand and the back surface thereof, and when the control device images the back surface by the first imaging unit of the holding inspection unit, the radius of the back surface is taken into consideration. The robot may be controlled so that the angle of the component with respect to the first imaging unit is changed a plurality of times. In this way, when imaging an arched surface, the components are imaged at different angles in consideration of the arched radius, so that, for example, variations in the focal length during imaging in each region can be suppressed. Becomes possible. As a result, the arch-shaped surface can be appropriately inspected. In addition, by performing imaging while changing the angle in consideration of radius, for example, it becomes possible to appropriately face a plurality of detection surfaces in a component and a first imaging unit to perform imaging, and detection accuracy. Can be improved.

The control device has a pass / fail judgment based on the measurement result of the first laser displacement meter, a pass / fail judgment based on the image pickup result of the first imaging unit, a pass / fail judgment based on the measurement result of the second laser displacement meter, and a second. Even if the robot is controlled so that the quality judgment based on the imaging result of the imaging unit is performed in a predetermined order, and when one of the quality judgments becomes defective, the parts are ejected without performing the subsequent quality judgment. good. As a result, it is not necessary to further determine the quality of the parts that have been confirmed to be defective, and the inspection time can be shortened.

The control device may determine whether the surface condition is good or bad by comparing the imaging result of the imaging unit with the master image which is an image of a non-defective product of the component. As a result, it is possible to appropriately and easily determine the quality of the part to be inspected.

The above-mentioned visual inspection device further includes a conveyor for transporting the loaded parts and a camera for capturing the posture of the parts flowing on the conveyor, and the control device takes an image in consideration of the posture of the parts acquired from the camera. The robot may be controlled so that the part is held by the hand so that the orientation of the part in the result and the orientation of the part in the master image for alignment showing the contour of the part are similar. As a result, the orientation of the parts held by the hand can be set to a predetermined orientation, and the quality of the parts can be determined more accurately.

The above-mentioned visual inspection device inspects a plurality of defective items, and the control device uses both the measurement result of the laser displacement meter and the imaging result of the imaging unit for at least one defective item among the plurality of defective items. You may judge the quality. For example, with regard to polishing defects, etc., it is not possible to make a good or bad judgment with high accuracy without information in both the depth direction and the width direction (area), but the measurement results (information in the depth direction) and imaging of the laser displacement meter By making a good / bad judgment on a defective item such as a polishing defect based on both information of the imaging result (area) of the portion, it is possible to make a good / bad judgment on a specific defective item with high accuracy.

The above-mentioned visual inspection device may inspect a plurality of defective items, and the control device may control the robot so that the parts determined to be defective are discharged to the discharge positions for each defective item. As a result, the parts determined to be defective are arranged according to the defective item, and it is possible to easily understand what kind of defect has occurred and how much.

In addition, since the robot having the articulated arm can stably perform the image pickup by the imaging unit under the conditions of the optimum focal length and the detection position, it is possible to suppress the variation in the detection force. Further, since it is possible to make an independent judgment using the profile data of the laser displacement meter which is not easily affected by the equipment vibration, it is possible to suppress the deterioration of the inspection accuracy due to the influence of the equipment vibration. Further, even at the time of imaging by the imaging unit, since the parts can be stopped and imaged by a robot or the like, it is possible to reduce the external influence of vibration. That is, the use of a robot makes it less susceptible to vibration during inspection. Further, since the same surface can be inspected by both the laser displacement meter and the imaging unit, the detection accuracy can be improved. Further, since the inspection can be performed at the optimum position by the robot having the articulated arm while the positions of the laser displacement meter and the imaging unit are fixed, the setup can be changed in a short period of time. Further, according to the present invention, it is possible to easily cope with the change of the type of the component by changing the program of the control device.

The visual inspection method according to one aspect of the present invention is a visual inspection method for inspecting the surface state of a part, and is a first laser in a state where the part is held by a hand attached to the tip of an articulated arm of a robot. In the first step of inspecting a predetermined inspection surface by the displacement meter and the first imaging unit, and by the hand by the second laser displacement meter and the second imaging unit in a state where the parts are not held by the hand. It includes a second step of inspecting the surface to be held, and a third step of determining the quality of the surface condition of the part based on the inspection results of the first step and the second step.

According to the present invention, it is possible to provide an appearance inspection apparatus and an appearance inspection method capable of inspecting the surface state of a part with higher accuracy.

It is a schematic diagram which shows the whole structure of a visual inspection apparatus. It is a perspective view which shows typically the inspection unit included in the appearance inspection apparatus. It is a perspective view which shows typically the work to be inspected. It is a figure explaining the inspection part of the workpiece in each inspection process. It is a perspective view which shows typically the robot and the hand. It is a figure explaining the 1st laser process. It is a figure explaining the 1st imaging process. It is a figure explaining the work adsorption process after the inspection completion. It is a figure explaining the work replacement process. It is a figure explaining the operation of two suction nozzles in detail. It is a figure explaining the 2nd laser process. It is a figure explaining the 2nd imaging process. It is a hardware block diagram of a controller. It is a flowchart which shows the appearance inspection process.

Hereinafter, embodiments will be described in detail with reference to the drawings. In the description, the same elements or elements having the same function are designated by the same reference numerals, and duplicate description will be omitted.

FIG. 1 is a schematic view showing the overall configuration of the visual inspection device 1. The visual inspection device 1 shown in FIG. 1 is a device that inspects the surface condition of a workpiece that is a component. The visual inspection device 1 determines the quality of the work by inspecting the surface condition of the work. Inspecting the surface condition of the work means inspecting whether or not a defect corresponding to a predetermined defect item has occurred on the surface of the work. The predetermined defective items include, for example, chips, cracks, stains, suana, black kawa, polishing defects, backlash, and cut defects. The chipping is a defect in which a part of the work W is chipped off and a concave portion is generated. A crack is a defect in which a streak-shaped recess is formed. The stain (stain) is, for example, a defect of stain residue due to insufficient cleaning. Suana is a defect in which a round concave portion is formed. Kurokawa is a poor deformation / shrinkage ratio in the remaining polished portion (the portion that has not been sufficiently polished). A polishing defect is a defect in a portion that has been partially over-polished. The backlash is a defect caused by the height variation of the reed portion. A poor cut is a defect in which the chamfering balance is deteriorated. The specific inspection method will be described later. As shown in FIG. 1, the visual inspection device 1 includes an inspection unit 10 and a controller 90 (control device).

FIG. 2 is a perspective view schematically showing an inspection unit 10 included in the visual inspection apparatus 1. As shown in FIGS. 1 and 2, the inspection unit 10 includes a loading conveyor 11 (conveyor), a work positioning camera 12 (camera), an actuator 13, a work moving pocket 14 (mounting portion), and non-defective products. Conveyor 15, defective product discharge box 16, laser displacement meter 20 (first laser displacement meter), imaging unit 30 (first imaging unit), laser displacement meter 40 (second laser displacement meter) , The imaging unit 50 (second imaging unit), the robot 60, and the hand 61 are included. The laser displacement meter 20 and the imaging unit 30 are holding inspection units for inspection in a state where the work W (see FIG. 2) is held by the hand 61. The laser displacement meter 40 and the imaging unit 50 are non-holding related to the inspection in which the work W is not held by the hand 61 and the surface held by the hand 61 is the inspection surface in the inspection by the holding inspection unit. Time inspection unit. Each configuration included in the visual inspection device 1 is controlled by the controller 90. The visual inspection device 1 inspects the surface condition of the work W, which is a component, under the control of the controller 90. The work W is, for example, a magnetic component.

FIG. 3 is a perspective view schematically showing the work W to be inspected. As shown in FIG. 3, the work W is formed in an arch shape. As shown in FIG. 3, the work W includes an outer R surface Wo formed in an arch shape, an inner R surface Wi (back surface) which is the back surface of the outer R surface Wo and is formed in an arch shape, and the work W. A end face Wa, which is both end faces in the length direction of the work W, B end face Wb, which is both end faces in the width direction of the work W, It has an arch portion Wx and. The outer R surface Wo is a surface held by the hand 61, which will be described later.

FIG. 4 is a diagram for explaining the inspection points of the work W in each inspection process. The step of inspecting the work W is a first step (FIG. 4) in which a predetermined inspection surface is inspected by the laser displacement meter 20 and the imaging unit 30 while the work W is held by the hand 61 attached to the robot 60. (A) and FIG. 4 (b), and the second step (FIG. 4 (c)) in which a predetermined inspection surface is inspected by the laser displacement meter 40 and the imaging unit 50 in a state where the work W is not held by the hand 61. And FIG. 4D), and a third step of determining the quality of the surface condition of the work W based on the inspection results of the first step and the second step. In the first step, the outer R surface Wo of the work W is a surface held by the hand 61. Therefore, in the first step, the inspection points (inspection surfaces) other than the outer R surface Wo of the work W are set. For example, in the inspection by the laser displacement meter 20 shown in FIG. 4 (a), the inner R surface Wi and the reed portion Wx are set as inspection points, and black edges, polishing defects, backlash, etc. are detected on the inner R surface Wi and the reed portion Wx. Will be done. Further, in the inspection by the imaging unit 30 shown in FIG. 4B, the inner R surface Wi, the A end surface Wa, the B end surface Wb, and the honey-age surface Wy are set as inspection points (inspection surfaces), and chips at these inspection points are used. , Cracks, stains, suana, black kawa, poor polishing, etc. are detected. In the second step, the outer R surface Wo, which is the hand holding surface and has not been inspected in the first step, is designated as the inspection point (inspection surface). For example, in the inspection by the laser displacement meter 40 shown in FIG. 4 (c), the outer R surface Ro is set as the inspection point, and black edges, polishing defects, backlash, etc. on the outer R surface Wo are detected. Further, in the inspection by the imaging unit 50 shown in FIG. 4 (d), the outer R surface Wo is regarded as the inspection point (inspection surface), and chips, cracks, stains (stains), suana, black kawa, and polishing on the outer R surface Wo are used. Defects, cut defects, etc. are detected.

Returning to FIG. 2, the loading conveyor 11 is a conveyor that conveys the work W that the operator has loaded into the inspection unit 10. The loading conveyor 11 conveys the work W loaded by the operator to, for example, a pickup position near the actuator 13. When the work W is conveyed to the pickup position, the loading conveyor 11 stops until the work W is grasped by the hand 61 and moved by the robot 60 (until it is picked up). When the work W is picked up at the pickup position, the loading conveyor 11 starts the operation so that the next work W is conveyed to the pickup position. The loading conveyor 11 has a height and a length that makes it easy for an operator to load the work W, for example. The input conveyor 11 may be always in operation while the inspection unit 10 is in operation, or may be in operation for a predetermined time only when a control signal from the controller 90 is received.

The work positioning camera 12 is a camera that captures the posture (direction, inclination, contour) of the work W flowing on the loading conveyor 11. The work positioning camera 12 is provided at a position where, for example, the work W conveyed to the pickup position can be imaged from above. The work positioning camera 12 transmits the captured image (an image showing the posture of the work W) to the controller 90.

The actuator 13 works between the inspection area formed by the laser displacement meter 20 and the imaging unit 30 constituting the holding inspection unit and the inspection area formed by the laser displacement meter 40 and the imaging unit 50 forming the non-holding inspection unit. It is an actuator that moves a work moving pocket 14 on which W is placed. The actuator 13 is, for example, a uniaxial actuator. By using a uniaxial actuator, it is possible to move parts linearly with a simple configuration. As a result, the inspection area can be connected in a short distance, and the arrangement of each component of the visual inspection device (optimization of the device layout) and the inspection time can be shortened in order to shorten the flow line of the parts. be able to. The actuator 13 is arranged at a position that does not interfere with the operation of the robot 60. The actuator 13 operates under the control of the controller 90.

The non-defective product alignment conveyor 15 is a conveyor that conveys the work W conveyed by the robot 60 so as to be discharged to the outside. The work W conveyed to the non-defective product alignment conveyor 15 by the robot 60 is a work that is determined to be a non-defective product by the controller 90 (details will be described later). The non-defective product alignment conveyor 15 has a height and length that makes it easy for an operator to take out the work W, for example. The non-defective product alignment conveyor 15 may be always in operation while the inspection unit 10 is in operation, or may be in operation for a predetermined time only when a control signal from the controller 90 is received.

The defective product discharge box 16 is a box for storing the defective product work W conveyed by the robot 60. The work W conveyed by the robot 60 is a work determined by the controller 90 to be defective (details will be described later). The defective product discharge box 16 is installed at a position where, for example, an operator can easily put in and take out the work W. In the defective product discharge box 16, the work W may be arranged according to the defective item (for example, Kurokawa).

The laser displacement meter 20 measures the distance to the inspection surface by irradiating the inspection surface of the work W with a laser beam and receiving the reflected light from the inspection surface. The laser displacement meter 20 can suitably detect abnormalities in the depth direction on the inspection surface (polishing defects that cause irregularities, black shavings, etc.). It is preferable that the laser displacement meter 20 is in the vicinity of the input conveyor 11 and is on the flow line from the pickup position of the work W on the input conveyor 11 to the imaging unit 30 as much as possible. As shown in FIG. 6, the laser displacement meter 20 irradiates the work W with laser light from below the work W with a portion other than the outer R surface Wo of the work W held by the hand 61 as an inspection surface. .. The laser displacement meter 20 transmits the measurement result to the controller 90.

The imaging unit 30 images the inspection surface of the work W. The imaging unit 30 includes a camera and lighting. The image pickup unit 30 takes an image of the inspection surface while changing the shining portion and the wavelength of the illumination. The imaging unit 30 can suitably detect abnormalities in dimensions, area, and color on the inspection surface. The imaging unit 30 is arranged as close to the laser displacement meter 20 as possible. As shown in FIG. 7, the imaging unit 30 images the work W facing in the horizontal direction with a portion other than the outer R surface Wo of the work W held by the hand 61 as an inspection surface. The imaging unit 30 transmits the imaging result to the controller 90.

The laser displacement meter 40 measures the distance to the inspection surface by irradiating the inspection surface of the work W with a laser beam and receiving the reflected light from the inspection surface. The laser displacement meter 40 can suitably detect abnormalities in the depth direction on the inspection surface (polishing defects that cause irregularities, black shavings, etc.). The laser displacement meter 40 inspects the work W placed in the work moving pocket 14 moved by the actuator 13. As shown in FIG. 11, the outer R surface Wo of the work W placed in the work moving pocket 14 is exposed. As shown in FIG. 11, the laser displacement meter 40 irradiates the work W with a laser beam (specifically, the exposed outer R surface Wo) from above the work W. The laser displacement meter 40 transmits the measurement result to the controller 90.

The imaging unit 50 images the inspection surface of the work W. The image pickup unit 50 includes a camera and lighting. The image pickup unit 50 takes an image of the inspection surface while changing the shining portion and the wavelength of the illumination. The imaging unit 50 can suitably detect abnormalities in dimensions, area, and color on the inspection surface. The imaging unit 50 inspects the work W placed in the work moving pocket 14 moved by the actuator 13. As described above, the outer R surface Wo of the work W placed in the work moving pocket 14 is exposed. As shown in FIG. 12, the imaging unit 30 images the work W (specifically, the exposed outer R surface Wo) from above the work W. The imaging unit 50 transmits the imaging result to the controller 90.

FIG. 5 is a perspective view schematically showing the robot 60 and the hand 61. The robot 60 is, for example, a serial link type robot having an articulated arm. As shown in FIG. 5, the articulated arm has a base 62, a swivel portion 63, arms 64, 65, a list 66, an end portion 67, and a plurality of motors (not shown). There is. The robot 60 has a hand 61 attached to an end portion 67 provided at the tip of an articulated arm. The robot 60 sucks the work W by the hand 61 and moves the work W to a predetermined inspection area by moving the hand 61 according to the control of the controller 90.

The base 62 is fixed to the floor surface and supports the entire robot 60. The swivel portion 63 is provided on the base 62 and can swivel around the vertical axis Ax1 passing through the base 62. The base end portion of the arm 64 is connected to the swivel portion 63. The arm 64 can swing around the axis Ax2 passing through the connecting portion between the swivel portion 63 and the arm 64. The axis Ax2 is orthogonal to the axis Ax1. The base end portion of the arm 65 is connected to the tip end portion of the arm 64. The arm 65 can swing around the axis Ax3 passing through the connection portion between the arm 64 and the arm 65. The axis Ax3 is parallel to the axis Ax2. The base end of the wrist 66 is attached to the tip of the arm 65. The tip of the arm 65 and the wrist 66 are rotatable around the axis Ax4 along the central axis of the arm 65. The wrist 66 can swing around the axis Ax5 passing through the connection portion between the arm 65 and the wrist 66. The axis Ax5 is orthogonal to the axis Ax4. An end portion 67 is provided at the tip portion of the list 66. The end portion 67 is rotatable around the axis Ax6 along the central axis of the end portion 67. A hand 61, which is an end effector, can be attached to the end portion 67 from the opposite side of the wrist 66. The hand 61 may be integrated with the end portion 67. A motor (not shown) is provided so that the configuration corresponding to the axes Ax1 to Ax6 described above can be swiveled.

The hand 61 is attached to the end portion 67 of the robot 60 to hold the work W. The hand 61 has two suction nozzles 61a and 61b configured to suck the work W. The suction nozzle 61a (first suction nozzle) and the suction nozzle 61b (second suction nozzle) are configured to be capable of simultaneously sucking different work Ws. The suction nozzle 61a is a suction nozzle for sucking the work W before the inspection is completed. The suction nozzle 61a is provided so as to be concentric with the θ-axis of the robot 60. The suction nozzle 61b is a suction nozzle for sucking the work W after the inspection is completed. The suction nozzle 61b is configured to be expandable and contractible. The suction nozzles 61a and 61b are configured so that the positions of the suction nozzles 61a and 61b can be exchanged with each other by turning the end portion 67 around the axis Ax6 (details will be described later).

The controller 90 controls each configuration included in the visual inspection device 1 in order to inspect a predetermined inspection surface of the work W (control processing), and determines the surface state of the work W based on the inspection result (determination). Processing) and is configured to be executable. Hereinafter, the control process and the determination process will be described in detail.

In the control process, the controller 90 controls the robot 60 so that the predetermined inspection surface is irradiated with the laser light from the laser displacement meters 20 and 40 and the predetermined inspection surface is imaged by the imaging units 30 and 50. Specifically, the controller 90 first sets the robot 60 so that the outer R surface Wo of the work W stopped at the pickup position of the loading conveyor 11 is sucked by the hand 61 (specifically, the suction nozzle 61a). Control. At this time, the controller 90 may determine the suction position and the suction angle of the work W by the suction nozzle 61a based on the image showing the posture of the work W acquired from the work positioning camera 12. That is, in the determination process described later, the quality of the work W is determined by comparing the imaging results of the imaging units 30 and 50 with the master image which is a good image of the work W stored in advance. In consideration of the image showing the posture of the work W acquired from the work positioning camera 12, the work W 90 uses the suction nozzle 61a so that the orientation of the work W in the imaging result and the orientation of the work W in the master image are the same. The robot 60 may be controlled so that the robot 60 is attracted to the robot 60. The master image used for such alignment is a master image for alignment showing the outline of the work W. The master image for alignment may be different from or the same as the master image which is the above-mentioned non-defective image.

Then, the controller 90 controls the robot 60 so that the laser displacement meter 20 and the imaging unit 30 constituting the holding inspection unit inspect the work W while the work W is attracted by the suction nozzle 61a. Specifically, as shown in FIG. 6, the controller 90 sets the work W at a position where the laser displacement meter 20 inspects the work W held by the hand 61 with a portion such as the inner R surface Wi as the inspection surface. Controls the robot 60 so that the robot 60 moves. In this case, the inspection by the laser displacement meter 20 may be performed according to the control of the controller 90, or may be performed at a predetermined timing. Further, as shown in FIG. 7, the controller 90 moves the work W to a position where the inspection by the imaging unit 30 is performed with the portion such as the inner R surface Wi of the work W held by the hand 61 as the inspection surface. Controls the robot 60. In this case, the inspection by the imaging unit 30 may be performed under the control of the controller 90, or may be performed at a predetermined timing. Here, when the controller 90 images the inner R surface Wi by the imaging unit 30, the angle of the work W with respect to the imaging unit 30 is changed a plurality of times in consideration of the R of the work W formed in an arch shape. As described above, the robot 60 may be controlled. For example, the controller 90 may control the robot 60 so that the inner R surface Wi is imaged from three different angles when the inner R surface Wi is imaged.

When the inspection of the work W by the holding inspection unit is completed, the controller 90 is in a state where the outer R surface Wo, which is the holding surface of the hand 61, is exposed (upper surface side), which cannot be inspected by the holding inspection unit. The robot 60 is controlled so that the work W is placed in the work moving pocket 14 (in this state). Then, the controller 90 controls the actuator 13 so that the work moving pocket 14 on which the work W is placed moves to the inspection area by the non-holding inspection unit. That is, the controller 90 controls the actuator 13 so that the work moving pocket 14 moves in the inspection area of the laser displacement meter 40 and the imaging unit 50 constituting the non-holding inspection unit. In this way, the work W with the outer R surface W exposed moves in the inspection area by the non-holding inspection unit, so that the outer R surface Wo is inspected by the laser displacement meter 40 (see FIG. 11) and the outside by the imaging unit 50. The R surface Wo is inspected (see FIG. 12). In this case, the inspection by the laser displacement meter 40 and the imaging unit 50 may be performed under the control of the controller 90, or may be performed at a predetermined timing.

Here, in the inspection unit 10, the work W to be placed in the work moving pocket 14 can be efficiently switched by using the plurality of suction nozzles 61a and 61b of the hand 61. Hereinafter, the control of the controller 90 regarding the switching of the work W to be mounted will be described. The controller 90 controls the robot 60 so that the laser displacement meter 20 and the imaging unit 30 constituting the holding inspection unit inspect the work W1 in a state where the work W1 before the completion of the inspection is attracted by the suction nozzle 61a. .. Then, the controller 90 mounts the work W2 after the inspection is completed (both the holding inspection unit and the non-holding inspection unit have been inspected) by the time the inspection of the work W1 by the holding inspection unit is completed. The actuator 13 is controlled so that the work moving pocket 14 to be placed moves to the inspection area by the holding inspection unit (see FIG. 7). Then, in the controller 90, after the inspection of the work W1 by the holding inspection unit is completed, the work W2 after the inspection is completed is sucked by the suction nozzle 61b (see FIG. 8), and the work W1 is replaced with the work W2 in the work moving pocket. The robot 60 is controlled so as to be mounted on the 14 (see FIG. 9). Further, the controller 90 controls the actuator 13 so that the work moving pocket 14 on which the work W1 is placed moves to the inspection area by the non-holding inspection unit, and the work W2 sucked by the suction nozzle 61b after the inspection is completed. Controls the robot 60 so that the robot 60 is discharged to the non-defective product alignment conveyor 15 or the defective product discharge box 16.

FIG. 10 is a diagram illustrating the operation of the suction nozzles 61a and 61b when the work is replaced. As shown in FIG. 10A, when the inspection of the work W1 adsorbed by the suction nozzle 61a by the holding inspection unit is completed, as shown in FIG. 10B, after the inspection is completed by the suction nozzle 61b. Work W2 is adsorbed. Then, as shown in FIG. 10 (c), the positions of the suction nozzles 61a and 61b are changed by turning the end portion 67 around the axis Ax6, and the work W1 is placed in the work moving pocket 14 instead of the work W2. Placed. Finally, as shown in FIG. 10D, the work W2 is discharged toward the non-defective product alignment conveyor 15 or the defective product discharge box 16 in a state where the work W2 after the inspection is completed is sucked by the suction nozzle 61b. ..

In the determination process, the controller 90 acquires the measurement results of the laser displacement meters 20 and 40 and the imaging results of the imaging units 30 and 50, and determines whether the surface condition of the work W is good or bad based on the acquired measurement results and the imaging results. The controller 90 determines whether or not the information (thickness / depth) in the depth direction indicated by the measurement results of the laser displacement meters 20 and 40 is within a predetermined normal range. Further, the controller 90 determines whether or not the information such as the dimensions, the area, and the shade of color indicated by the imaging results of the imaging units 30 and 50 is within a predetermined normal range. By comparing the imaging results of the imaging units 30 and 50 with the master image which is a good image of the work W, the controller 90 confirms whether the information such as dimensions, area, and color shading is normal (with the master image). Is it the same?) May be determined. Of the defective items, for example, chips, cracks, sana, and burrs can be determined according to the dimensions indicated by the imaging results of the imaging units 30 and 50. Further, for example, stains can be determined according to the shade and area indicated by the imaging results of the imaging units 30 and 50. Further, for example, a backlash defect can be determined according to the dimensions indicated by the measurement results of the laser displacement meters 20 and 40. Further, for example, black shavings, polishing defects, and cutting defects can be determined by using both the measurement results of the laser displacement meters 20 and 40 and the imaging results of the imaging units 30 and 50. Specifically, Kurokawa can be judged from the area indicated by the imaging result and the depth indicated by the measurement result, and polishing defects can be determined from the width indicated by the imaging result and the depth indicated by the measurement result. The cut defect can be determined from the dimensions indicated by the imaging result and the depth indicated by the measurement result.

The controller 90 determines the quality based on the measurement result of the laser displacement meter 20, the quality determination based on the imaging result of the imaging unit 30, the quality determination based on the measurement result of the laser displacement meter 40, and the quality determination based on the imaging result of the imaging unit 50. Even if the robot 60 is controlled so that 16 work Ws are discharged to the defective product discharge box without performing subsequent quality judgments when the judgments are made in a predetermined order and one of the quality judgments becomes defective. good. The controller 90 identifies a defective item for the work W determined to be defective (for example, Kurokawa), and the robot 60 so that the work W determined to be defective is discharged to the discharge position for each defective item in the defective product discharge box 16. May be controlled.

The hardware of the controller 90 is composed of, for example, one or more control computers. The controller 90 has, for example, the circuit 900 shown in FIG. 13 as a hardware configuration. The circuit 900 includes a processor 901, a memory 902, a storage 903, an input / output port 904, and a driver 905. The driver 905 is a circuit for driving the robot 60 of the inspection unit 10 and various actuators. The input / output port 904 not only inputs / outputs external signals, but also inputs / outputs signals to the driver 905. The processor 901 constitutes the above-mentioned functional module by executing a program in consultation with at least one of the memory 902 and the storage 903 and executing input / output of a signal via the input / output port 904.

The hardware configuration of the controller 90 is not necessarily limited to the configuration of the functional module by executing the program. For example, the controller 90 may configure these functional modules by a dedicated logic circuit or by an ASIC (Application Specific Integrated Circuit) that integrates the logic circuits.

Next, the appearance inspection process (appearance inspection method) of the work W by the appearance inspection apparatus 1 will be described with reference to FIG.

As shown in FIG. 14, in the visual inspection process, the work W is first loaded onto the loading conveyor 11 (step S1). The work W flows through the loading conveyor 11 and reaches the pickup position. In this state, the controller 90 controls the robot 60 so that the outer R surface Wo of the work W1 is attracted (picked up) by the hand 61 (step S2). Subsequently, the controller 90 controls the robot 60 so that the work W1 is inspected by the laser displacement meter 20 (laser inspection of the inner R surface Wi and the like) in a state where the work W1 is attracted by the suction nozzle 61a (laser inspection of the inner R surface Wi and the like). Step S3, the first laser step (first step) shown in FIG.

Subsequently, the controller 90 determines whether or not the pass / fail determination is passed as a result of the inspection in step S3 (step S4). If the product is defective and the inspection fails in step S4, the controller 90 controls the robot 60 so that the work W is discharged to the defective product discharge box 16 (step S13).

On the other hand, if it is determined in step S4 that the product is non-defective, the image pickup unit 30 inspects the work W1 (camera inspection of the inner R surface Wi, etc.) in a state where the work W1 is sucked by the suction nozzle 61a by the controller 90. ) Is controlled (step S5, first imaging step (first step) shown in FIG. 7).

Subsequently, the controller 90 determines whether or not the pass / fail determination is passed as a result of the inspection in step S5 (step S6). If the product is defective in step S6 and the inspection fails, the controller 90 controls the robot 60 so that the work W is discharged to the defective product discharge box 16 (step S13).

On the other hand, when it is determined in step S6 that the product is non-defective, the work W is moved by the controller 90 in a state where the outer R surface Wo, which is the holding surface of the hand 61, is exposed (the state where the work W is on the upper surface side). The robot 60 is controlled so as to be placed in the pocket 14 (step S7). Then, the controller 90 controls the actuator 13 so that the work moving pocket 14 on which the work W is placed moves to the inspection area by the non-holding inspection unit.

As a result, the inspection of the outer R surface Wo (laser inspection of the outer R surface Wo) by the laser displacement meter 40 is executed for the work W that is moved by the actuator 13 in the inspection area by the non-holding inspection unit (step S8, FIG. The second laser step (second step) shown in 11.

Subsequently, the controller 90 determines whether or not the pass / fail determination is passed as a result of the inspection in step S8 (step S9). If the product is defective in step S9 and the inspection fails, the controller 90 controls the robot 60 so that the work W is discharged to the defective product discharge box 16 (step S13).

On the other hand, if it is determined in step S9 that the product is non-defective, the work W moved in the inspection area by the non-holding inspection unit by the actuator 13 is inspected by the imaging unit 50 (camera of outer R surface Wo). The inspection) is executed (step S10, the second imaging step (second step) shown in FIG. 12).

Subsequently, the controller 90 determines whether or not the pass / fail determination is passed as a result of the inspection in step S10 (step S11). If the product is defective in step S11 and the inspection fails, the controller 90 controls the robot 60 so that the work W is discharged to the defective product discharge box 16 (step S13). On the other hand, if the product is non-defective and the inspection is passed in step S11, the controller 90 controls the robot 60 so that the work W is discharged to the non-defective product alignment conveyor 15.

Next, the operation and effect of the visual inspection device 1 according to the present embodiment will be described.

The visual inspection apparatus 1 according to the present embodiment is an apparatus for inspecting the surface condition of the work W by irradiating the inspection surface of the work W with a laser beam and receiving the reflected light from the inspection surface. It has laser displacement meters 20 and 40 that measure the distance to the inspection surface, imaging units 30 and 50 that image the inspection surface of the work W, and an articulated arm, and holds the work W at the tip of the articulated arm. A robot 60 equipped with a hand 61 and a controller 90 are provided. The controller 90 irradiates a predetermined inspection surface with laser light from laser displacement meters 20 and 40, and the predetermined inspection surface is an imaging unit 30. , 50, control the robot 60, acquire the measurement results of the laser displacement meters 20, 40 and the imaging results of the imaging units 30, 50, and work based on the acquired measurement results and imaging results. It is configured to determine whether the surface condition of W is good or bad and to execute.

In the visual inspection apparatus 1 according to the present embodiment, when determining the quality of the surface condition of the work W, the measurement result of the inspection surface of the work W by the laser displacement meters 20 and 40 and the measurement result of the work W by the imaging units 30 and 50 The imaging result of the inspection surface is taken into consideration. As a result, on the inspection surface of the work W, the laser displacement meters 20 and 40 detect abnormalities (unevenness) in the depth direction, and the imaging units 30 and 50 detect abnormalities such as dimensions, area, and shade of color. NS. In this way, by using the measurement results of the laser displacement meters 20 and 40 and the imaging results of the imaging units 30 and 50, as compared with the case where, for example, only the laser displacement meters 20 and 40 are used to detect defects in the surface state. , It is possible to detect defects in the surface state related to various defects. This makes it possible to inspect the surface condition of the work W with high accuracy. Further, in the visual inspection device 1 according to the present embodiment, the robot 60 that holds the work W by the hand 61 attached to the tip of the articulated arm is controlled by the controller 90. Specifically, the robot 60 is controlled so that the predetermined inspection surface is irradiated with the laser beam and the predetermined inspection surface is imaged. That is, the inspection surface is set by the robot 60 controlled by the controller 90. By setting the inspection surface by the robot 60 having the articulated arm in this way, it is possible to finely change the inspection surface so as to obtain a desired inspection surface. This makes it possible to inspect the surface of the work W without omission, and it is possible to inspect the surface condition of the work W with higher accuracy.

In the visual inspection device 1, the laser displacement meter 20 and the imaging unit 30 are holding inspection units for inspection in a state where the work W is held by the hand 61, and the laser displacement meter 40 and the imaging unit 50 are the work W. Is an inspection in a state where is not held by the hand 61, and may be a non-holding inspection unit related to an inspection in which the outer R surface Wo held by the hand 61 is used as an inspection surface in the inspection by the holding inspection unit. As described above, the configuration related to the inspection when the work W is held by the hand 61 and the surface held when the work W is not held by the hand 61 (outer R surface Wo). As described above, the robot 60 is used to inspect the surface of the work W without omission, and the holding surface when the robot 60 is used is also appropriately inspected. be able to. As a result, the surface condition of the work W can be inspected with higher accuracy.

The visual inspection device 1 is an actuator that moves the work moving pocket 14 between the work moving pocket 14 configured to allow the work W to be placed, the inspection area by the holding inspection unit, and the inspection area by the non-holding inspection unit. The controller 90 further comprises 13 and 13 and controls the robot 60 so that the work W is placed in the work moving pocket 14 in a state where the surface (outer R surface Wo) held by the hand 61 is exposed. , The work moving pocket 14 on which the work W with the outer R surface W exposed is placed controls the actuator 13 so as to move the inspection area by the non-holding inspection unit, and is configured to further execute. You may be. By moving the work moving pocket 14 between the inspection area by the holding inspection unit and the inspection area by the non-holding inspection unit by the actuator 13, the work W can be smoothly moved between the two areas, and the work W in both areas can be smoothly moved. The surface condition can be easily inspected. Then, the work W in a state where the surface held by the hand 61 is exposed moves the inspection area by the non-holding inspection unit, so that the work W moving in the inspection area by the non-holding inspection unit is held by the hand 61. The surface to be inspected can be appropriately inspected by the laser displacement meter 40 and the imaging unit 50 constituting the non-holding inspection unit.

The hand 61 may have a plurality of suction nozzles 61a and 61b configured to suck the work W. By adopting a configuration in which the work W is held by the suction nozzles 61a and 61b, the holding surface can be one surface, and the holding inspection unit can be used as compared with the case where two or more surfaces are sandwiched, for example. You can increase the number of surfaces that can be inspected. This makes it possible to improve the efficiency of inspection.

The hand 61 may have suction nozzles 61a and 61b configured to suck work W different from each other. Since the suction nozzles 61a and 61b for sucking the work W different from each other are provided, for example, when the work W to be placed on the work movement pocket 14 is switched, the work movement pocket is used by the suction nozzle that does not hold the work W. The work W placed on the work 14 can be sucked and moved from the work moving pocket 14, and the work W sucked by the suction nozzle that originally held the work W can be placed on the work moving pocket 14. , Work W can be switched efficiently. That is, for example, when there is only one suction nozzle, the work W placed in the work moving pocket 14 is sucked by the suction nozzle, the work W is placed at the moving destination, and then a new work W is sucked. In contrast to the case where it is necessary to move the work to the work moving pocket 14, two work W can be sucked at the same time in the configuration provided with two suction nozzles. Therefore, for example, as described above, the work moving pocket The work W placed on the 14 can be efficiently switched. As described above, according to the above-described configuration, the inspection can be performed more efficiently.

The controller 90 controls the robot 60 so that the work W1 is inspected by the holding inspection unit in a state where the work W1 before the completion of the inspection is sucked by the suction nozzle 61a, and the work W1 by the holding inspection unit is inspected. By the time the inspection is completed, the actuator 13 is controlled so that the work moving pocket 14 on which the work W2 after the inspection is placed moves to the inspection area by the holding inspection unit, and the work W1 by the holding inspection unit is controlled. After the inspection is completed, the robot 60 is controlled so that the work W2 is sucked by the suction nozzle 61b and the work W1 is placed in the work movement pocket 14 instead of the work W2, and the work W1 is placed. Further executing the control of the actuator 13 so that the pocket 14 moves to the inspection area by the non-holding inspection unit, and the control of the robot 60 so that the work W2 sucked by the suction nozzle 61b is discharged. It may be configured to do so. According to such control, the two suction nozzles 61a and 61b described above can be used to smoothly discharge the work W2 after the inspection is completed and to move the work W1 during the inspection smoothly.

The work W is formed in an arch shape, and when the controller 90 images the inner R surface Wi by the image pickup unit 30 of the holding inspection unit, the work W with respect to the image pickup unit 30 is taken into consideration in consideration of the radius of the inner R surface Wi. The robot 60 may be controlled so that the angle of W is changed a plurality of times. In this way, when imaging the arch-shaped surface, the work W is imaged at different angles in consideration of the arch-shaped radius, so that, for example, variation in the focal length at the time of imaging in each region is suppressed. Will be possible. As a result, the arch-shaped surface can be appropriately inspected. Further, by performing imaging while changing the angle in consideration of the radius, for example, it becomes possible to appropriately face the plurality of detection surfaces in the work W and the imaging unit 30 to perform imaging, and the detection accuracy can be improved. Can be improved.

The controller 90 determines the quality based on the measurement result of the laser displacement meter 20, the quality judgment based on the imaging result of the imaging unit 30, the quality determination based on the measurement result of the laser displacement meter 40, and the quality determination based on the imaging result of the imaging unit 50. The robot 60 may be controlled so that the work W is discharged without performing the subsequent pass / fail judgment when the determination is performed in a predetermined order and when any of the pass / fail judgments becomes defective. As a result, it is not necessary to further determine the quality of the work W that has been determined to be defective, and the inspection time can be shortened.

The controller 90 may determine the quality of the surface state by comparing the imaging results of the imaging units 30 and 50 with the master image which is an image of a non-defective product of the work W. As a result, it is possible to appropriately and easily determine the quality of the work W to be inspected.

The visual inspection device 1 further includes a loading conveyor 11 that conveys the loaded work W and a work positioning camera 12 that captures the posture of the work W flowing through the loading conveyor 11, and the controller 90 is from the work positioning camera 12. The work W is held by the hand 61 so that the orientation of the work W in the imaging result and the orientation of the work W in the master image for alignment showing the outline of the work W are the same in consideration of the posture of the work W to be acquired. The robot 60 may be controlled as such. As a result, the orientation of the work W held by the hand 61 can be set to a predetermined orientation, and the quality of the work W can be determined more accurately.

The visual inspection device 1 inspects a plurality of defective items, and the controller 90 performs measurement results of the laser displacement meters 20 and 40 and imaging of the imaging units 30 and 50 for at least one defective item among the plurality of defective items. Good or bad may be judged using both of the results. For example, with regard to polishing defects, etc., it is not possible to make a good or bad judgment with high accuracy without information in both the depth direction and the width direction (area), but the measurement results (information in the depth direction) and imaging of the laser displacement meter By making a good / bad judgment on a defective item such as a polishing defect based on both information of the imaging result (area) of the portion, it is possible to make a good / bad judgment on a specific defective item with high accuracy.

The visual inspection device may inspect a plurality of defective items, and the controller 90 may control the robot 60 so that the work W determined to be defective is discharged to a discharge position for each defective item. As a result, the work W determined to be defective is arranged according to the defective item, and it is possible to easily understand what kind of defect has occurred and how much.

In the visual inspection device 1, as shown in FIG. 1, a laser displacement meter 20 is provided on the flow line from the pickup position of the work W on the input conveyor 11 to the inspection point by the imaging unit 30. The work moving pocket 14 is set directly under the inspection point by the imaging unit 30, and then the work W placed in the work moving pocket 14 moved by the actuator 13 is inspected by the laser displacement meter 40 and the imaging unit 50. By performing the above, the movement distance and the movement time of the work W can be shortened while reducing the number of times the posture of the work W is changed, and the inspection can be efficiently and smoothly performed.

1 ... Visual inspection device, 12 ... Work positioning camera (camera), 13 ... Actuator, 14 ... Work moving pocket (mounting part), 20, 40 ... Laser displacement meter, 30, 50 ... Imaging unit, 60 ... Robot, 61 ... Hand, 61a, 61b ... Suction nozzle, 90 ... Controller (control device), W ... Work.

Claims (13)

A visual inspection device that inspects the surface condition of parts.
One or more laser displacement meters that measure the distance to the inspection surface by irradiating the inspection surface of the component with laser light and receiving the reflected light from the inspection surface.
One or more imaging units that image the inspection surface of the component,
A robot that has an articulated arm and is equipped with a hand that holds the parts at the tip of the articulated arm.
Equipped with a control device,
The control device is
The robot is controlled so that the predetermined inspection surface is irradiated with the laser beam from the laser displacement meter and the predetermined inspection surface is imaged by the imaging unit, and the measurement result of the laser displacement meter and the imaging are performed. An visual inspection apparatus configured to acquire an imaging result of a unit and to determine whether or not the surface condition of the component is good or bad based on the acquired measurement result and the imaging result. The plurality of laser displacement meters include first and second laser displacement meters, and the plurality of imaging units include first and second imaging units.
The first laser displacement meter and the first imaging unit are holding inspection units for inspection in a state where the parts are held by the hand.
The second laser displacement meter and the second imaging unit inspect the surface held by the hand in the inspection by the holding inspection unit, which is an inspection in a state where the component is not held by the hand. The visual inspection apparatus according to claim 1, which is a non-holding inspection unit according to the inspection. A mounting unit configured to mount the parts and
Further provided with an inspection area by the holding inspection unit and an actuator for moving the above-described mounting portion between the inspection areas by the non-holding inspection unit.
The control device is
Controlling the robot so that the component is placed on the above-described resting portion with the surface held by the hand exposed, and mounting the component with the surface held by the hand exposed. The visual inspection apparatus according to claim 2, wherein the pre-installed portion controls the actuator so as to move the inspection area by the non-holding inspection unit, and further executes the operation. The visual inspection apparatus according to claim 3, wherein the hand has one or a plurality of suction nozzles configured to suck the parts. The visual inspection apparatus according to claim 4, wherein the hand has first and second suction nozzles configured to suck the parts different from each other. The control device is
Controlling the robot so that the holding inspection unit inspects the first part in a state where the first part before the completion of the inspection is sucked by the first suction nozzle, and holding the robot By the time the inspection of the first part by the inspection unit is completed, the actuator is controlled so that the previously described portion on which the second part after the completion of the inspection is placed moves to the inspection area by the holding inspection unit. After the inspection of the first part by the holding inspection unit is completed, the second part is sucked by the second suction nozzle and replaced with the second part. Controls the robot so that 5. The robot is configured to further execute the control of the robot and the control of the robot so that the second component sucked by the second suction nozzle is discharged. Visual inspection equipment. The part is formed in an arch shape on the surface held by the hand and the back surface thereof.
The control device is
When the back surface is imaged by the first imaging unit of the holding inspection unit, the angle of the component with respect to the first imaging unit is changed a plurality of times in consideration of the radius of the back surface. The visual inspection apparatus according to any one of claims 2 to 5, which controls a robot. The control device is
The quality determination based on the measurement result of the first laser displacement meter, the quality determination based on the imaging result of the first imaging unit, the quality determination based on the measurement result of the second laser displacement meter, and the above. The quality determination based on the imaging result of the second imaging unit is performed in a predetermined order.
The visual inspection apparatus according to any one of claims 2 to 7, which controls the robot so that the parts are discharged without performing a subsequent pass / fail judgment when any of the pass / fail judgments becomes defective. .. The control device according to any one of claims 1 to 8, wherein the control device determines whether the surface condition is good or bad by comparing the imaging result of the imaging unit with the master image which is an image of a non-defective product of the component. Visual inspection equipment. A conveyor that conveys the loaded parts and
A camera that captures the posture of the component flowing on the conveyor is further provided.
The control device takes into consideration the posture of the component acquired from the camera, so that the orientation of the component in the imaging result and the orientation of the component in the master image for alignment showing the outline of the component are the same. The visual inspection device according to any one of claims 1 to 9, which controls the robot so that the parts are held by a hand. Inspect multiple defective items and perform
Any of claims 1 to 10, wherein the control device determines whether or not at least one defective item among the plurality of defective items is good or bad by using both the measurement result of the laser displacement meter and the imaging result of the imaging unit. The visual inspection device according to the first paragraph. Inspect multiple defective items and perform
The visual inspection device according to any one of claims 1 to 11, wherein the control device controls the robot so that a component determined to be defective is discharged to a discharge position for each defective item. It is an appearance inspection method that inspects the surface condition of parts.
The first step of inspecting a predetermined inspection surface by the first laser displacement meter and the first imaging unit while the parts are held by the hand attached to the tip of the articulated arm of the robot.
A second step of inspecting the surface held by the hand by the second laser displacement meter and the second imaging unit in a state where the part is not held by the hand.
A visual inspection method including a third step of determining the quality of the surface condition of the component based on the inspection results of the first step and the second step.

Images