JP2021112907A - Method for manufacturing liquid discharge head and method for manufacturing liquid discharge device - Google Patents

Abstract

To suppress variation in discharge properties in a liquid discharge head for discharging liquid by vibrating a nozzle plate.SOLUTION: A method for manufacturing a liquid discharge head for discharging liquid by vibrating a nozzle plate 1 including a substrate 81 and a piezoelectric body 82 includes: a piezoelectric body formation step of forming the piezoelectric body 82 on the substrate 81 at 450°C to 600°C; and a nozzle hole formation step of forming a nozzle hole 4 penetrating the substrate 81 and the piezoelectric body 82.SELECTED DRAWING: Figure 1

Description

The present invention relates to a method for manufacturing a liquid discharge head and a method for manufacturing a liquid discharge device.

In a liquid ejection head using a piezoelectric body, a liquid ejection head that vibrates a nozzle surface to eject ink is known. It is known that such a liquid ejection head requires a large vibration to eject ink.

Patent Document 1 discloses a head structure provided with a nozzle substrate plate and a nozzle hole penetrating a piezoelectric thin film. According to this, the ink droplet ejection energy can be increased, and stable ink ejection can be performed.

Further, in Patent Document 2, the nozzle portion of the vibrating substrate is vibrated so that a standing wave is generated near the surface of the liquid ink held by the nozzle toward the center of the nozzle, and the ink surface at the center of the nozzle is generated. It is disclosed to fly droplets from. According to this, it is highly energy efficient and can eject small droplets. Further, in the embodiment of Patent Document 1, it is disclosed that two substrates are bonded together to form a nozzle penetrating both substrates, and a droplet is ejected by vibrating the substrate around the nozzle.

However, sufficient vibration has not yet been secured by the conventional technique. On the other hand, in order to secure sufficient vibration, for example, an attempt to increase the piezoelectric multiplier of the piezoelectric body by forming a piezoelectric body at a high temperature to obtain a large displacement can be considered.

However, when the conventional method for producing a thin film piezoelectric material is applied to a liquid ejection head that vibrates the nozzle surface to eject ink, the substrate warps due to reasons such as the temperature becoming too high. When the nozzle holes are formed in the warped substrate, there is a problem that the shape of the nozzles varies in the substrate and the ejection characteristics vary.

Therefore, an object of the present invention is to suppress variations in discharge characteristics in a liquid discharge head that discharges liquid by vibrating the nozzle plate.

In order to solve the above problems, the method for manufacturing a liquid discharge head of the present invention is a method for manufacturing a liquid discharge head that discharges a liquid by vibrating a nozzle plate having a substrate and a piezoelectric body, and is on the substrate. It is characterized by including a piezoelectric body forming step of forming the piezoelectric body at 450 ° C. to 600 ° C., and a nozzle hole forming step of forming a nozzle hole penetrating the substrate and the piezoelectric body.

According to the present invention, in a liquid discharge head that discharges a liquid due to vibration of the nozzle plate, it is possible to suppress variations in discharge characteristics.

It is sectional drawing in the example of the liquid discharge head which concerns on this invention. It is sectional drawing of the main part in an example of the liquid discharge head which concerns on this invention. It is a schematic disassembled perspective view of a main part in an example of a liquid discharge head which concerns on this invention. It is a disassembled perspective schematic view in an example of the liquid discharge head which concerns on this invention. It is sectional drawing of the liquid discharge head which concerns on a comparative example. It is sectional drawing of the main part of the liquid discharge head which concerns on a comparative example. It is sectional drawing in the example of the liquid discharge head. It is another cross-sectional schematic diagram in an example of a liquid discharge head. It is sectional drawing in another example of a liquid discharge head. It is a perspective view of another example of a liquid discharge head. It is a schematic diagram in an example of a liquid discharge device. It is a schematic diagram in an example of a head unit. It is a block explanatory drawing in an example of a liquid circulation device. It is the schematic of another example of a liquid discharge device. It is the schematic of another example of a liquid discharge device. It is a schematic diagram in an example of a liquid discharge unit. It is the schematic of another example of a liquid discharge unit.

Hereinafter, a method for manufacturing a liquid discharge head and a method for manufacturing a liquid discharge device according to the present invention will be described with reference to the drawings. The present invention is not limited to the embodiments shown below, and can be modified within the range conceivable by those skilled in the art, such as other embodiments, additions, modifications, and deletions. However, as long as the action and effect of the present invention are exhibited, it is included in the scope of the present invention.

The method for manufacturing a liquid discharge head of the present embodiment is a method for manufacturing a liquid discharge head that discharges a liquid by vibrating a nozzle plate having a substrate and a piezoelectric body, and the piezoelectric body is placed on the substrate at 450 ° C. It is characterized by including a piezoelectric body forming step of forming at about 600 ° C. and a nozzle hole forming step of forming a nozzle hole penetrating the substrate and the piezoelectric body.

FIG. 1 is a schematic cross-sectional view for explaining an example of the liquid discharge head obtained by the present embodiment. FIG. 1 shows a nozzle plate 1, a nozzle hole 4, a substrate 81, a piezoelectric body 82, a common liquid chamber plate 83, a common liquid chamber 84, a partition wall 85, a ceiling plate 86, and a supply path 87. In the figure, only the main part is shown for explaining the liquid discharge head of the present embodiment, and other members may be provided if necessary.

The liquid (for example, ink) is supplied to the common liquid chamber 84 provided in the common liquid chamber plate 83 (common liquid chamber substrate) through the supply path 87 provided in the ceiling plate 86. As the ceiling plate 86, for example, a metal member can be used, and as the common liquid chamber plate 83, for example, Si can be used.

The nozzle plate 1 has a substrate 81 and a piezoelectric body 82 provided on the discharge target side. When the nozzle plate 1 vibrates, the liquid in the common liquid chamber 84 is discharged from the nozzle hole 4. The number, arrangement, and shape of the nozzle holes 4 can be changed as appropriate, but the nozzle holes 4 are formed so as to penetrate the substrate 81 and the piezoelectric body 82.

An electrode may be provided on the nozzle plate 1 so that the nozzle plate 1 vibrates and discharges a liquid. As the material of the electrode, a known material can be used.

Next, a method of manufacturing the liquid discharge head of the present embodiment will be described.
FIG. 2 is a diagram schematically explaining a process of forming the nozzle plate 1, and is a schematic cross-sectional view of the nozzle plate 1. In FIG. 2, a piezoelectric body forming step and a nozzle hole forming step are performed.

FIG. 2A shows the substrate 81. The substrate 81 can be changed as appropriate, and for example, a Si substrate can be used. Further, when the substrate 81 is a Si substrate, an oxide film such as _{SiO 2 may be formed.} The thickness of the substrate 81 is preferably, for example, 200 μm to 900 μm.

FIG. 2B is a diagram for explaining the piezoelectric body forming step, and in the piezoelectric body forming step, the piezoelectric body 82 is formed on the substrate 81. The piezoelectric body 82 is preferably made of PZT (lead zirconate titanate). The thickness of the piezoelectric body 82 is preferably, for example, 1 μm to 6 μm.

In the piezoelectric body forming step, the temperature at which the piezoelectric body is formed (also referred to as the film forming temperature) is 450 ° C. to 600 ° C. By setting this range, it is possible to prevent the substrate 81 from warping when the piezoelectric body is formed. If the film formation temperature is higher than 600 ° C., the temperature becomes too high and the substrate 81 warps, causing problems such as the shape of the nozzle holes formed in a later step varying in the liquid discharge head. If the film formation temperature is lower than 450 ° C., the formation of the piezoelectric body becomes insufficient, and sufficient discharge characteristics cannot be obtained.

The film formation temperature is preferably 450 ° C. to 550 ° C. In this case, the warp of the substrate 81 can be further suppressed. As a result, it is possible to further suppress the variation in the discharge characteristics in the liquid discharge head.

The piezoelectric body 82 can be formed by, for example, a sputtering method, a CVD (Chemical Vapor Deposition) method, a sol-gel method, or the like. In the sol-gel method, after the piezoelectric precursor solution is applied onto the substrate 81, the substrate and the piezoelectric precursor solution are heated at the above film formation temperature.

FIG. 2C is a diagram for explaining a nozzle hole forming step, and in the nozzle hole forming step, a nozzle hole 4 penetrating the substrate 81 and the piezoelectric body 82 is formed. The method for forming the nozzle hole 4 can be appropriately changed, and for example, dry etching can be used.

According to the method for manufacturing a liquid discharge head of the present embodiment, it is possible to prevent the substrate from warping when forming the piezoelectric body. As a result, it is possible to prevent the shape of the nozzle from fluctuating in the liquid discharge head. For example, it is possible to prevent the shape of the nozzle hole near the center of the nozzle plate 1 from being different from that of the nozzle hole on the end side. In addition to this, for example, it is possible to prevent the shape of the nozzle hole on one end side of the nozzle plate 1 from being different from that on the nozzle hole on the other end side.

As a result, it is possible to prevent the discharge characteristics such as the amount of liquid droplets ejected from each nozzle, the droplet velocity (droplet velocity), and the accuracy of the landing position from fluctuating in the liquid ejection head. Therefore, the quality of the image can be further improved.

FIG. 3 shows a schematic cross-sectional view of the nozzle plate 1 according to the present embodiment.
FIG. 3A is a schematic view showing a state in which the nozzle hole 4 is formed in the nozzle plate 1.
Since it is possible to prevent the substrate 81 from warping, the heights of the nozzle holes 4 on the left and right can be made uniform. For example, as shown in the figure, the heights of the nozzle surface 1b and the nozzle surface 1c in the vicinity of the nozzle hole 4 can be made uniform. Further, as a result, the shapes of the nozzle holes in the liquid discharge head can be made uniform.

FIG. 3B is a diagram schematically showing an example of a case where the liquid 88 flows through the nozzle hole 4 or a case where the liquid 88 is accumulated in the nozzle hole 4. Since the positions of the nozzle surface 1b and the nozzle surface 1c are aligned in the vicinity of the nozzle hole 4, the shape of the meniscus can be the same on the left and right sides of the central axis of the nozzle hole 4. Further, the shape of the meniscus can be made uniform between the nozzle holes in the liquid discharge head.

FIG. 3C is a diagram schematically showing an example in which the liquid 88 is discharged from the nozzle hole 4, and the arrow schematically shows the direction in which the liquid 88 is discharged. The liquid 88 can be discharged straight from the nozzle hole 4. Further, it is possible to suppress the variation in the discharge direction between the nozzle holes 4 in the liquid discharge head.

Here, the liquid discharge head in the comparative example described later will be described. FIG. 5 is a schematic cross-sectional view of the liquid discharge head in the comparative example. In the comparative example, since the piezoelectric body 82a is formed at a temperature higher than the film formation temperature in the present embodiment, for example, a temperature of 800 ° C. or lower and higher than 600 ° C., the substrate 81a has a warped shape, and the nozzle plate 1a has a curved shape. It will have a warped shape.

If the nozzle hole 4a is formed in such a state, the heights of the left and right nozzle holes will be different. In addition, the shape of the nozzle, the volume inside the nozzle, and the like are different for each nozzle. Therefore, the discharge characteristics vary in the liquid discharge head.

In order to explain the above details, FIG. 6 shows a schematic enlarged cross-sectional view in the broken line portion of FIG.
As shown in FIG. 6A, since the nozzle hole 4a is formed in the curved nozzle plate 1a, the heights of the left and right nozzle holes are different. For example, in the figure, it is schematically shown that the heights of the nozzle surface 1b and the nozzle surface 1c are different.

When the liquid is supplied to the nozzle hole 4a in such a state, the left and right heights of the meniscus are different as shown in FIG. 6B. In addition, the shape of the nozzle, the volume inside the nozzle, and the like are different for each nozzle.

In this case, as shown in FIG. 6C, in addition to the discharge bending, the amount of the discharge bending varies from nozzle to nozzle. In addition to this, the amount of liquid discharged from each nozzle, the speed of the liquid (the speed of the droplet), the accuracy of the landing position, and the like also vary from nozzle to nozzle, and the discharge characteristics vary within the liquid discharge head. For this reason, problems such as not being able to obtain an image of good quality occur.

Next, in the method for manufacturing the liquid discharge head of the present embodiment, the joining process and the like will be described. FIG. 4 is an exploded perspective schematic view for explaining the present embodiment.

FIG. 4A is a schematic perspective view of the ceiling plate 86. A supply path 87 is formed with respect to the ceiling plate 86. FIG. 4B is a schematic perspective view of the common liquid chamber plate 83 (common liquid chamber substrate). A common liquid chamber 84 is formed with respect to the common liquid chamber plate 83. FIG. 4C is a schematic perspective view of the nozzle plate 1, which is the nozzle plate 1 obtained in FIG.

By joining the members shown in FIG. 4, the liquid discharge head of the present embodiment shown in FIG. 1 can be obtained. In the joining step of the present embodiment, the ceiling plate 86 is joined to the substrate 81 side of the nozzle plate 1 after the nozzle hole forming step.

Further, according to the present embodiment, a method for manufacturing a liquid discharge head is provided. The method for manufacturing the liquid discharge device of the present embodiment is to manufacture the liquid discharge device by using the method for manufacturing the liquid discharge head of the present embodiment.

(Example 1 and Comparative Example 1)
In the first embodiment, as shown in FIGS. 2 to 4, the liquid discharge head shown in FIG. 1 is manufactured. _{First, SiO 2} having a thickness of 10 μm was formed on the Si substrate, and this was used as the substrate 81.
_{Next, a PZT having a thickness of 10 μm was formed on the SiO 2} film on the substrate 81 by a sputtering method under the condition of a film formation temperature of 550 ° C. to form the piezoelectric body 82. As a result, the nozzle plate 1 was formed.
Next, dry etching was performed on the nozzle plate 1 to form a nozzle hole 4 having a diameter of 25 μm.

Next, each member is joined as shown in FIG. The common liquid chamber plate 83 was made of Si, and a common liquid chamber 84 and a partition wall 85 having a shape as shown in FIGS. 1 and 4 were formed. The ceiling plate 86 uses a metal member to form a supply path 87. Next, each member was joined to produce the liquid discharge head of Example 1 shown in FIG. Further, the electrodes had a thickness of 0.1 μm formed at the upper part and the lower part of the piezoelectric body 82, respectively.
When the displacement amount of the nozzle plate 1 in the vicinity of the nozzle hole 4 was examined for the obtained liquid discharge head, the nozzle displacement amount was 600 nm.

Next, as Comparative Example 1, the liquid discharge heads shown in FIGS. 5 and 6 were produced in the same manner as in Example 1 except that the film formation temperature in Example 1 was set to 800 ° C.

Next, the ejection characteristics of the obtained liquid ejection head were evaluated by ejecting ink to the media. The measurement conditions were as follows.

[Measurement condition]
Number of nozzles: 1024 nozzles Reference droplet amount: 5pl
Drop rate: 7 m / sec
Distance between head and media: 1 mm
Ink type: Water-based pigment ink Ink viscosity: 5 cp

The results are shown in Table 1. In this embodiment, it can be seen that the variation in discharge characteristics can be suppressed.
In the table, the drop amount (max-min) means the drop amount [pl] at which the amount of one drop is the maximum and the amount of the drop is the minimum among the plurality of nozzle holes in the liquid discharge head. It represents the difference from the amount of drops [pl]. Further, in the table, the drop speed (max-min) refers to the drop speed [m / sec] at which the discharge speed is maximum and the drop at which the discharge speed is minimum among a plurality of nozzle holes in the liquid discharge head. Represents the difference from the speed [m / sec]. Further, the bending amount 3σ represents an average value in the liquid discharge head. For these, the smaller the value, the smaller the variation.

Hereinafter, an embodiment of the liquid discharge head and the liquid discharge device obtained by the present invention will be described. FIG. 7 is a cross-sectional explanatory view along a direction (longitudinal direction of the pressure chamber) orthogonal to the nozzle arrangement direction of the liquid discharge head according to the same embodiment, and FIG. 8 is a cross-sectional explanatory view also along the nozzle arrangement direction.

In the liquid discharge head 100 of the present embodiment, a nozzle plate 1 provided with a piezoelectric body, a flow path plate 2 as an individual flow path member, and a diaphragm member 3 as a wall surface member are laminated and joined. A common flow path member 20 that also serves as a frame member for the head is provided. Further, the piezoelectric actuator 11 that displaces the vibration region (vibration plate) 30 of the diaphragm member 3 may be further provided.

The nozzle plate 1 has a plurality of nozzles 4 for discharging a liquid.

The flow path plate 2 includes a plurality of pressure chambers 6 communicating with the plurality of nozzles 4, an individual supply flow path 7 which is an individual flow path communicating with each pressure chamber 6, and one or more (one in the present embodiment). An intermediate supply flow path 8 is formed as a liquid introduction portion leading to the individual supply flow path 7.

The diaphragm member 3 has a plurality of displaceable diaphragms (vibration regions) 30 that form the wall surface of the pressure chamber 6 of the flow path plate 2. Here, the diaphragm member 3 has a two-layer structure (not limited), and is composed of a first layer 3A that forms a thin-walled portion from the flow path plate 2 side and a second layer 3B that forms a thick-walled portion.

Then, a deformable vibration region 30 is formed in a portion corresponding to the pressure chamber 6 in the first layer 3A which is a thin-walled portion. In the vibration region 30, a convex portion 30a, which is a thick portion to be joined to the piezoelectric actuator 11 in the second layer 3B, is formed.

Then, on the side of the diaphragm member 3 opposite to the pressure chamber 6, a piezoelectric actuator 11 including an electromechanical conversion element as a driving means (actuator means, pressure generating means) for deforming the vibration region 30 of the diaphragm member 3 is arranged. is doing.

In this piezoelectric actuator 11, the piezoelectric member joined on the base member 13 is grooved by half-cut dicing, and a required number of columnar piezoelectric elements 12 are formed in a comb-teeth shape at predetermined intervals in the nozzle arrangement direction. ing. Then, the piezoelectric element 12 is joined to a convex portion 30a which is a thick portion formed in the vibration region 30 of the diaphragm member 3.

The piezoelectric element 12 is formed by alternately stacking piezoelectric layers and internal electrodes. The internal electrodes are pulled out to their end faces and connected to external electrodes (end face electrodes), and the flexible wiring member 15 is connected to the external electrodes. ing.

The common flow path member 20 forms a common supply flow path 10 leading to a plurality of pressure chambers 6. The common supply flow path 10 communicates with the intermediate supply flow path 8 serving as the liquid introduction portion through the opening 9 provided in the diaphragm member 3, and communicates with the individual supply flow path 7 via the intermediate supply flow path 8. There is.

In the liquid discharge head 100, for example, by lowering the voltage applied to the piezoelectric element 12 from the reference potential (intermediate potential), the piezoelectric element 12 contracts, the vibration region 30 of the vibrating plate member 3 is pulled, and the volume of the pressure chamber 6 is reduced. As the pressure chamber 6 expands, the liquid flows into the pressure chamber 6.

After that, the voltage applied to the piezoelectric element 12 is increased to extend the piezoelectric element 12 in the stacking direction, and the vibration region 30 of the vibrating plate member 3 is deformed in the direction toward the nozzle 4 to contract the volume of the pressure chamber 6. , The liquid in the pressure chamber 6 is pressurized, and the liquid is discharged from the nozzle 4.

FIG. 9 is a cross-sectional explanatory view along a direction (longitudinal direction of the pressure chamber) orthogonal to the nozzle arrangement direction of the liquid discharge head in still another embodiment. FIG. 10 is a schematic perspective view of the liquid discharge head of the present embodiment.

The liquid discharge head 100 of the present embodiment is a circulation type liquid discharge head, in which a nozzle plate 1, a flow path plate 2, and a diaphragm member 3 as a wall surface member are laminated and joined. A piezoelectric actuator 11 that displaces the vibration region (vibration plate) 30 of the diaphragm member 3 and a common flow path member 20 that also serves as a frame member of the head are provided.

The flow path plate 2 includes a plurality of pressure chambers 6 that communicate with the plurality of nozzles 4 via the nozzle communication passages 5, and an individual supply flow path 7 that also serves as a plurality of fluid resistance portions that communicate with the plurality of pressure chambers 6. 2. An intermediate supply flow path 8 or the like serving as one or a plurality of liquid introduction portions leading to two or more individual supply flow paths 7 is formed.

As for the individual supply flow path 7, the individual supply flow path 7 has two first flow path portions 7A and a second flow path portion 7B having a higher fluid resistance than the pressure chamber 6, and a first flow. A third flow path portion 7C, which is arranged between the road portion 7A and the second flow path portion 7B and has a lower fluid resistance than the first flow path portion 7A and the second flow path portion 7B, is included.

The flow path plate 2 is configured by laminating a plurality of plate-shaped members 2A to 2E, but is not limited to this.

Further, the flow path plates 2 are formed into a plurality of individual recovery flow paths 57 and two or more individual recovery flow paths 57 along the surface direction of the flow path plates 2 that communicate with the plurality of pressure chambers 6 via the nozzle communication passages 5. It forms an intermediate recovery flow path 58 that serves as one or a plurality of liquid outlets that communicate with each other.

The individual recovery flow path 57 is located between two first flow path portions 57A and second flow path portion 57B having higher fluid resistance than the pressure chamber 6 and between the first flow path portion 57A and the second flow path portion 57B. It includes a first flow path portion 57A and a third flow path portion 57C which is arranged and has a lower fluid resistance than the second flow path portion 57B. In the individual collection flow path 57, the flow path portion 57D, which is downstream of the second flow path portion 57B in the circulation direction, has the same flow path width as the third flow path portion 57C.

The common flow path member 20 forms a common supply flow path 10 and a common recovery flow path 50. In the present embodiment, the common supply flow path 10 is composed of a flow path portion 10A that is aligned with the common recovery flow path 50 in the nozzle arrangement direction and a flow path portion 10B that is not lined up with the common recovery flow path 50. ..

The common supply flow path 10 communicates with the intermediate supply flow path 8 serving as the liquid introduction portion through the opening 9 provided in the diaphragm member 3, and communicates with the individual supply flow path 7 via the intermediate supply flow path 8. There is. The common recovery flow path 50 communicates with the intermediate recovery flow path 58 that serves as a liquid lead-out portion through the opening 59 provided in the diaphragm member 3, and communicates with the individual recovery flow path 57 via the intermediate recovery flow path 58. There is.

Further, the common supply flow path 10 leads to the supply port 71, and the common recovery flow path 50 leads to the recovery port 72.

The other layer structure of the diaphragm member 3, the structure of the piezoelectric actuator 11, and the like are the same as those in the above embodiment.

In the liquid discharge head 100 as well, the piezoelectric element 12 is extended in the stacking direction and the vibration region 30 of the vibrating plate member 3 is deformed in the direction toward the nozzle 4 to increase the volume of the pressure chamber 6 in the same manner as in the above embodiment. By contracting, the liquid in the pressure chamber 6 is pressurized, and the liquid is discharged from the nozzle 4.

Further, the liquid that is not discharged from the nozzle 4 passes through the nozzle 4 and is collected from the individual collection flow path 57 to the common recovery flow path 50, and is again supplied from the common recovery flow path 50 to the common supply flow path 10 through the external circulation path. NS. Further, even when the liquid is not discharged from the nozzle 4, the liquid circulates from the common supply flow path 10 through the pressure chamber 6 to the common recovery flow path 50, and is supplied again to the common supply flow path 10 through the external circulation path. NS.

Also in the present embodiment, with a simple configuration, it is possible to attenuate the pressure fluctuation accompanying the liquid discharge and suppress the propagation to the common supply flow path 10 and the common recovery flow path 50.

Next, an example of the liquid discharge device obtained by the present invention will be described with reference to FIGS. 11 and 12. FIG. 11 is a schematic explanatory view of the device, and FIG. 12 is a plan explanatory view of an example of the head unit of the device.

The printing device 500, which is a liquid ejection device, guides and conveys the carry-in means 501 for carrying in the continuous body 510 and the continuous body 510 such as continuous paper and sheet material carried in from the carry-in means 501 to the printing means 505. The means 503, the printing means 505 for printing to form an image by ejecting a liquid to the continuum 510, the drying means 507 for drying the continuum 510, the carrying-out means 509 for carrying out the continuum 510, and the like are provided. ing.

The continuum 510 is sent out from the original winding roller 511 of the carrying-in means 501, guided and conveyed by the rollers of the carrying-in means 501, the guiding and conveying means 503, the drying means 507, and the carrying-out means 509, and is guided and conveyed by the winding roller 591 of the carrying-out means 509. It is wound up at.

The continuum 510 is conveyed on the transfer guide member 559 by the printing means 505 facing the head unit 550 and the head unit 555, an image is formed by the liquid discharged from the head unit 550, and the continuous body 510 is discharged from the head unit 555. Post-treatment is performed with the treatment liquid to be treated.

Here, the head unit 550 is provided with, for example, full-line head arrays 551A, 551B, 551C, and 551D for four colors from the upstream side in the transport direction (hereinafter, referred to as "head array 551" when the colors are not distinguished). Is placed.

Each head array 551 is a liquid discharging means, and discharges black K, cyan C, magenta M, and yellow Y liquids to the conveyed continuum 510, respectively. The types and numbers of colors are not limited to this.

The head array 551 is, for example, in which the liquid discharge heads (which are also simply referred to as “heads”) 100 according to the present invention are arranged in a staggered pattern on the base member 552, but the head array 551 is not limited to this.

The liquid discharge head and the liquid discharge device obtained by the present invention may be configured to circulate the liquid, or may be, for example, a liquid circulation device using the liquid discharge head. An example of the liquid circulation device will be described with reference to FIG. FIG. 13 is a block explanatory view of the circulation device. Although only one head is shown here, when a plurality of heads are arranged, the supply side liquid path and the recovery side liquid path are provided on the supply side and the recovery side of the plurality of heads via a manifold or the like, respectively. Will be connected.

The liquid circulation device 600 includes a supply tank 601, a recovery tank 602, a main tank 603, a first liquid feed pump 604, a second liquid feed pump 605, a compressor 611, a regulator 612, a vacuum pump 621, a regulator 622, and a supply side pressure sensor 631. , The recovery side pressure sensor 632 and the like.

Here, the compressor 611 and the vacuum pump 621 constitute means for generating a differential pressure between the pressure in the supply tank 601 and the pressure in the recovery tank 602.

The supply-side pressure sensor 631 is connected to the supply-side liquid path between the supply tank 601 and the head 100 and connected to the supply port 71 of the head 100. The recovery side pressure sensor 632 is connected between the head 1 and the recovery tank 602 to a recovery side liquid path connected to the recovery port 72 of the head 100.

One of the recovery tanks 602 is connected to the supply tank 601 via the first liquid feed pump 604, and the other of the recovery tank 602 is connected to the main tank 603 via the second liquid feed pump 605.

As a result, the liquid flows from the supply tank 601 through the supply port 71 into the head 100, is collected from the collection port 72 to the collection tank 602, and the liquid is collected from the collection tank 602 to the supply tank 601 by the first liquid feeding pump 604. By being sent, a circulation path through which the liquid circulates is constructed.

Here, a compressor 611 is connected to the supply tank 601 and is controlled so that a predetermined positive pressure is detected by the supply side pressure sensor 631. On the other hand, a vacuum pump 621 is connected to the recovery tank 602, and the recovery side pressure sensor 632 controls so that a predetermined negative pressure is detected.

As a result, the negative pressure of the meniscus can be kept constant while circulating the liquid through the head 100.

Further, when the liquid is discharged from the nozzle 4 of the head 100, the amount of liquid in the supply tank 601 and the recovery tank 602 decreases. Therefore, the liquid is replenished from the main tank 603 to the recovery tank 602 by using the second liquid feeding pump 605 as appropriate.

The timing of replenishing the liquid from the main tank 603 to the recovery tank 602 is provided in the recovery tank 602, such as replenishing the liquid when the liquid level height of the liquid in the recovery tank 602 falls below a predetermined height. It can be controlled by the detection result of the liquid level sensor or the like.

Next, another example of the printing device as the liquid ejection device obtained by the present invention will be described with reference to FIGS. 14 and 15. FIG. 14 is an explanatory plan view of a main part of the device, and FIG. 15 is an explanatory side view of the main part of the device.

The printing device 500 is a serial type device, and the carriage 403 is reciprocated in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 is bridged over the left and right side plates 491A and 491B to movably hold the carriage 403. Then, the carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 bridged between the drive pulley 406 and the driven pulley 407.

The carriage 403 is equipped with a liquid discharge unit 440 in which a liquid discharge head 100 and a head tank 441 are integrated. The liquid discharge head 100 of the liquid discharge unit 440 discharges liquids of, for example, yellow (Y), cyan (C), magenta (M), and black (K). Further, the liquid discharge head 100 is mounted by arranging a nozzle array composed of a plurality of nozzles in the sub-scanning direction orthogonal to the main scanning direction and directing the discharge direction downward.

The liquid discharge head 100 is connected to the liquid circulation device 600 described above, and a liquid of a required color is circulated and supplied.

The printing device 500 includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

The transport belt 412 attracts the paper 410 and transports it at a position facing the liquid discharge head 100. The transport belt 412 is an endless belt, and is hung between the transport roller 413 and the tension roller 414. Adsorption can be performed by electrostatic adsorption, air suction, or the like.

Then, the transport belt 412 orbits in the sub-scanning direction by rotationally driving the transport roller 413 via the timing belt 417 and the timing pulley 418 by the sub-scanning motor 416.

Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 for maintaining / recovering the liquid discharge head 100 is arranged on the side of the transport belt 412.

The maintenance / recovery mechanism 420 is composed of, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzle is formed) of the liquid discharge head 100, a wiper member 422 that wipes the nozzle surface, and the like.

The main scanning movement mechanism 493, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

In the printing apparatus 500 configured in this way, the paper 410 is fed onto the transport belt 412 and sucked, and the paper 410 is conveyed in the sub-scanning direction by the orbital movement of the transport belt 412.

Therefore, by driving the liquid discharge head 100 in response to the image signal while moving the carriage 403 in the main scanning direction, the liquid is discharged to the stopped paper 410 to form an image.

Next, an example of a liquid discharge unit using the liquid discharge head obtained by the present invention will be described with reference to FIG. FIG. 16 is an explanatory plan view of a main part of the unit.

The liquid discharge unit 440, a housing portion composed of side plates 491A, 491B and a back plate 491C among the members constituting the liquid discharge device, a main scanning movement mechanism 493, a carriage 403, and a liquid discharge head. It is composed of 100.

It is also possible to form a liquid discharge unit in which the above-mentioned maintenance / recovery mechanism 420 is further attached to, for example, the side plate 491B of the liquid discharge unit 440.

Next, still another example of the liquid discharge unit will be described with reference to FIG. FIG. 17 is a front explanatory view of the unit.

The liquid discharge unit 440 is composed of a liquid discharge head 100 to which the flow path component 444 is attached and a tube 456 connected to the flow path component 444.

The flow path component 444 is arranged inside the cover 442. A head tank 441 may be included instead of the flow path component 444. Further, a connector 443 that electrically connects to the liquid discharge head 100 is provided above the flow path component 444.

In the present application, the liquid to be discharged may have a viscosity and surface tension that can be discharged from the head, and is not particularly limited, but the viscosity becomes 30 mPa · s or less at room temperature, under normal pressure, or by heating or cooling. It is preferable that it is a thing. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, polymerizable compounds, resins, functionalizing materials such as surfactants, biocompatible materials such as DNA, amino acids and proteins, and calcium. , Solvents, suspensions, emulsions, etc. containing edible materials such as natural pigments, etc., for example, inks for inkjets, surface treatment liquids, constituents of electronic elements and light emitting elements, and formation of electronic circuit resist patterns. It can be used for applications such as a liquid for use and a material liquid for three-dimensional modeling.

Piezoelectric actuators (laminated piezoelectric elements and thin-film piezoelectric elements), thermal actuators that use electrothermal conversion elements such as heat-generating resistors, and electrostatic actuators that consist of a vibrating plate and counter electrodes are used as energy sources for discharging liquid. Includes what to do.

The "liquid discharge unit" is a liquid discharge head integrated with functional parts and a mechanism, and includes an aggregate of parts related to liquid discharge. For example, the "liquid discharge unit" includes a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, a main scanning movement mechanism, a liquid circulation device in which at least one of the configurations is combined with a liquid discharge head, and the like.

Here, "integration" means, for example, a liquid discharge head and a functional component, a mechanism in which the mechanism is fixed to each other by fastening, adhesion, engagement, etc., or one in which one is movably held with respect to the other. include. Further, the liquid discharge head, the functional parts, and the mechanism may be detachably attached to each other.

For example, as a liquid discharge unit, there is one in which a liquid discharge head and a head tank are integrated. In addition, there are cases in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter can be added between the head tank of these liquid discharge units and the liquid discharge head.

Further, as a liquid discharge unit, there is a liquid discharge head and a carriage integrated.

Further, as a liquid discharge unit, there is a liquid discharge head in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably by a guide member forming a part of the scanning movement mechanism. In some cases, the liquid discharge head, the carriage, and the main scanning movement mechanism are integrated.

Further, as a liquid discharge unit, there is a carriage to which a liquid discharge head is attached, in which a cap member which is a part of the maintenance / recovery mechanism is fixed, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. ..

Further, as a liquid discharge unit, there is a liquid discharge unit in which a tube is connected to a head tank or a liquid discharge head to which a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. Through this tube, the liquid of the liquid storage source is supplied to the liquid discharge head.

The main scanning movement mechanism shall also include a single guide member. Further, the supply mechanism includes a single tube and a single loading unit.

The "device for discharging a liquid" includes a device provided with a liquid discharge head or a liquid discharge unit and driving the liquid discharge head to discharge the liquid. The device for discharging the liquid includes not only a device capable of discharging the liquid to a device to which the liquid can adhere, but also a device for discharging the liquid into the air or the liquid.

The "device for discharging the liquid" may include means for feeding, transporting, and discharging paper to which the liquid can be attached, as well as a pretreatment device, a posttreatment device, and the like.

For example, as a "device that ejects a liquid", an image forming apparatus that ejects ink to form an image on paper, and a three-dimensional object (three-dimensional object) are formed in layers in order to form a three-dimensional object. There is a three-dimensional modeling device (three-dimensional modeling device) that discharges the modeling liquid into the powder layer.

Further, the "device for discharging a liquid" is not limited to a device in which a significant image such as characters and figures is visualized by the discharged liquid. For example, those that form patterns that have no meaning in themselves and those that form a three-dimensional image are also included.

The above-mentioned "material to which a liquid can adhere" means a material to which a liquid can adhere at least temporarily, such as one that adheres and adheres, and one that adheres and permeates. Specific examples include paper, recording paper, recording paper, film, recording media such as cloth, electronic substrates, electronic components such as piezoelectric elements, powder layers (powder layers), organ models, and media such as inspection cells. Yes, including anything to which the liquid adheres, unless otherwise specified.

The material of the above-mentioned "material to which liquid can be attached" may be paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics or the like as long as the liquid can be attached even temporarily.

Further, the "device for discharging the liquid" includes, but is not limited to, a device in which the liquid discharge head and the device to which the liquid can adhere move relatively. Specific examples include a serial type device that moves the liquid discharge head, a line type device that does not move the liquid discharge head, and the like.

In addition, as a "device for ejecting a liquid", a treatment liquid coating device for ejecting a treatment liquid to the paper in order to apply the treatment liquid to the surface of the paper for the purpose of modifying the surface of the paper, etc. There is an injection granulation device that granulates fine particles of the raw material by injecting a composition liquid in which the raw material is dispersed in a solution through a nozzle.

In addition, image formation, recording, printing, printing, printing, modeling, etc. in the terms of the present application are all synonymous.

1 Nozzle plate 1b, 1c Nozzle surface 4 Nozzle hole 81 Board 82 Piezoelectric body 83 Common liquid chamber plate 84 Common liquid chamber 85 Partition wall 86 Ceiling plate 87 Supply path 88 Ink

Japanese Unexamined Patent Publication No. 3-65350 Japanese Patent No. 3427608

Claims (8)

A method for manufacturing a liquid discharge head that discharges a liquid by vibrating a nozzle plate having a substrate and a piezoelectric body.
A piezoelectric body forming step of forming the piezoelectric body on the substrate at 450 ° C. to 600 ° C.
A method for manufacturing a liquid discharge head, which comprises a nozzle hole forming step of forming a nozzle hole penetrating the substrate and the piezoelectric body. The method for manufacturing a liquid discharge head according to claim 1, wherein the piezoelectric body is PZT (lead zirconate titanate). The method for manufacturing a liquid discharge head according to claim 1 or 2, wherein the piezoelectric body forming step forms the piezoelectric body at 450 ° C. to 550 ° C. The method for manufacturing a liquid discharge head according to any one of claims 1 to 3, wherein the piezoelectric body forming step forms the piezoelectric body by a sputtering method or a CVD (Chemical Vapor Deposition) method. The piezoelectric body forming step is for forming the piezoelectric body by a sol-gel method, and is characterized in that a precursor solution of the piezoelectric body is applied onto the substrate and then heated at the above temperature. The method for manufacturing a liquid discharge head according to any one of 3 to 3. The method for manufacturing a liquid discharge head according to any one of claims 1 to 5, wherein the nozzle hole forming step forms the nozzle hole by dry etching. The method for manufacturing a liquid discharge head according to any one of claims 1 to 6, further comprising a joining step of joining a common liquid chamber substrate to the substrate side of the nozzle plate after the nozzle hole forming step. A method for manufacturing a liquid discharge device, which comprises manufacturing a liquid discharge device by using the method for manufacturing a liquid discharge head according to any one of claims 1 to 7.

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