JP2021107715A - Fluid control device - Google Patents

Abstract

To provide a fluid control device capable of controlling each gas line to a desired temperature.SOLUTION: A fluid control device 1 includes a plurality of gas lines 3 having a plurality of fluid control devices 8-19 provided so that the respective fluid control devices are arranged in a row, and a plurality of sheet heaters 4A extending along a longitudinal direction of each gas line 3 and provided on a lateral surface along the longitudinal direction of each gas line 3. Each of the plurality of gas lines 3 includes a first gas line 3A which is heated to a first temperature by the sheet heater 4A, and a second gas line 3B which is heated to a second temperature lower than the first temperature by the sheet heater 4B. Each sheet heater 4A is provided on both surfaces along the longitudinal direction with respect to the first gas line 3A, and is provided on one lateral surface along the longitudinal direction with respect to the second gas line 3B.SELECTED DRAWING: Figure 2

Description

The present disclosure relates to a fluid control device.

An integrated fluid control device including a plurality of distribution line units composed of a plurality of fluid control devices has been proposed (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 11-351500

In a fluid control device as in Patent Document 1, when a gas that liquefies at room temperature is used, sheet heaters may be attached to both sides of the distribution line unit to control the temperature.

However, when the distribution line units having a temperature difference are adjacent to each other, the temperature of the distribution line unit on the low temperature side may not be controlled due to the heat of the distribution line unit on the high temperature side.

Therefore, an object of the present disclosure is a fluid control device capable of controlling each gas line to a desired temperature.

In order to solve the above object, the fluid control device according to one aspect of the present disclosure includes a plurality of gas lines each having a plurality of fluid control devices provided so as to be arranged in a row, and a plurality of gas lines in the longitudinal direction of each gas line. A first gas that extends along and is provided on the side surface along the longitudinal direction of each gas line, and the plurality of gas lines are heated to a first temperature by the seat heater. It has a line and a second gas line that is heated by the seat heater to a second temperature lower than the first temperature, and each seat heater is longitudinal with respect to the first gas line. It is provided on both sides along the direction, and is provided on one side surface along the longitudinal direction of the second gas line.

When the second gas line and the first gas line are adjacent to each other, the seat heater provided in the second gas line is on a side surface opposite to the first gas line side. It may be provided.

A heat insulating material may be provided on the side surface of the second gas line on the side of the first gas line.

The plurality of fluid control devices include a mass flow controller or a block valve, and the heat insulating material is provided on the side surface of a portion of the remaining fluid control device other than the mass flow controller or the block valve in the second gas line. May be done.

When a plurality of the second gas lines are lined up from the end of the plurality of gas lines and the first gas line is arranged next to the plurality of second gas lines, the plurality of second gases In the line, the output of the seat heater provided in the second gas line located next to the first gas line is made lower than the output of the seat heater provided in the first gas line. The output of the seat heater provided in the remaining second gas line is obtained from the output value of the seat heater provided in the second gas line located next to the first gas line. It may be increased at a constant rate depending on the distance from the first gas line located next to the plurality of second gas lines.

According to the present disclosure, it is possible to provide a fluid control device capable of controlling each gas line to a desired temperature.

It is a perspective view of the fluid control device which concerns on this embodiment. It is the figure which looked at the fluid control device from the inflow side of a gas. It is a figure which looked at the fluid control device which concerns on a modification from the inflow side of a gas. It is a top view of the fluid control device which concerns on a modification. It is a perspective view of two 2nd gas lines which concerns on a modification. It is a top view of the fluid control device which concerns on a modification. It is a perspective view of two 2nd gas lines which concerns on a modification. It is a figure which looked at the fluid control device which concerns on a modification from the inflow side of a gas. It is a figure which looked at the fluid control device which concerns on a modification from the inflow side of a gas. It is a figure which looked at the fluid control device which concerns on a modification from the inflow side of a gas. It is a figure which looked at the fluid control device which concerns on a modification from the inflow side of a gas.

The heater fixture and the fluid control device according to the embodiment of the present disclosure will be described with reference to the drawings. The top and bottom in the following description are the top and bottom of FIG. 1, the extending direction of the gas line 3 is the first direction D1, and the vertical direction and the direction orthogonal to the first direction D1 are the second direction D2.

FIG. 1 is a perspective view of the fluid control device 1 according to the present embodiment.
FIG. 2 is a view of the fluid control device as viewed from the gas inflow side.

As shown in FIG. 1, the fluid control device 1 includes a base plate 2, a plurality of gas lines 3, a plurality of heater units 4, a plurality of heater clips 5, and a plurality of thermocouples 6. In the present embodiment, the gas line 3 is provided with 5 lines, but the number of lines is not limited to this.

As shown in FIG. 2, the base plate 2 is made of a metal material such as stainless steel, and has a flat plate portion (not shown) and a pair of support portions 2A (only one is shown in FIG. 1). The flat plate portion (not shown) has a rectangular shape in a plan view. Each support portion 2A is provided at an end portion of a flat plate portion (not shown) in the second direction D2. By fixing each support portion 2A to a housing (not shown) for accommodating the fluid control device 1, the fluid control device 1 is fixed to the housing (not shown).

Each gas line 3 includes an inlet pipe 7, an outlet pipe (not shown), a plurality of joints (not shown), and a plurality of fluid control devices 8 to 19. In FIG. 1, reference numbers are assigned only to the inlet pipe 7 of one gas line 3 and the plurality of fluid control devices 8 to 19. Similarly, the heater unit 4, the heater clip 5, and the thermocouple 6 are also given reference numbers only to those provided in one gas line 3.

The inlet pipe 7 serves as an inlet for the fluid in the gas line 3. The outlet pipe (not shown) serves as an outlet for the fluid in the gas line 3. The plurality of joints (not shown) have a block shape and are located between the inlet pipe 7 and the outlet pipe (not shown), and the base 1 is placed on the flat plate portion (not shown) of the base plate 2.
It is provided so as to be lined up in a line along the direction D1. A gas flow path is formed in each joint. Further, each joint is fixed to the base plate 2 by a bolt (not shown).

The plurality of fluid control devices 8 to 19 include an automatic valve (for example, a fluid-driven automatic valve) 8 to 14, a manual regulator (pressure reducing valve) 15, a pressure gauge 16, a pipe heat retaining block 17, and a flow rate. It is composed of control devices (for example, Mass Flow Controller (MFC)) 18 and 19. Each fluid control device 8 to 19 is fixed to a joint (not shown) by a bolt (not shown).

The plurality of gas lines 3 are heated to a first gas line 3A which is heated to a first temperature (for example, 60 ° C.) and a second temperature (for example, 45 ° C.) which is lower than the first temperature. It has a second gas line 3B. In the present embodiment, the front three lines in FIG. 1 are the first gas line 3A, and the two lines on the back side are the second gas line 3B. Further, in the present embodiment, the intervals between the adjacent gas lines 3 are evenly spaced.

As shown in FIGS. 1 and 2, each heater portion 4 has a long shape and is provided on both sides of the first gas line 3A along the longitudinal direction thereof, with respect to the second gas line 3B. , Provided on one side along its longitudinal direction. As shown in FIG. 2, in the first gas line 3A and the second gas line 3B adjacent to each other, the heater portion 4 provided in the second gas line 3B is opposite to the first gas line 3A side. It is provided on the side surface.

Each heater portion 4 is composed of a heater support plate, a seat heater 4A, and a heat insulating cover. The heater support plate, the seat heater 4A, and the heat insulating cover extend along the first direction D1 and have a substantially rectangular shape and substantially the same shape. The heater support plate is in contact with the side surface of the joint (not shown), the side surface of the portion of the fluid control devices 8 to 19 fixed to the joint (not shown), and the side surfaces of the MFCs 18 and 19. The heater support plate is made of a thin sheet metal such as stainless steel. The seat heater 4A is, for example, a rubber heater. The heat insulating cover is made of a heat insulating material such as a silicone sponge. The seat heater 4A is located outside the heater support plate, and the heat insulating cover is located outside the seat heater 4A.

In the present embodiment, the heater support plate, the seat heater 4A, and the heat insulating cover are each divided into three in the first direction D1. That is, the heater support plate, the seat heater 4A, and the heat insulating cover are the parts that come into contact with the fluid control devices 8 and 15, the parts that come into contact with the fluid control devices 9 to 11 and 16 to 18, and the fluid control devices 12 to 14. It is divided into a portion that comes into contact with 19. The heater support plate, the seat heater 4A, and the heat insulating cover are attached to the gas line 3 by a plurality of heater clips 5. Three thermocouples 6 are provided for each gas line 3 so as to correspond to the divided seat heaters 4A.

The heat from the seat heater 4A heats the gas (for example, hydrogen fluoride) that flows in through the inlet pipe 7 and passes through the joint and the fluid control devices 8 to 19, preventing the liquefaction of the gas that liquefies at room temperature. Will be done. A thermostat is provided in each gas line 3 to prevent the temperature of the gas line 3 from exceeding a predetermined temperature.

According to the fluid control device 1 as described above, the seat heaters 4A of the heater unit 4 are provided on both sides of the first gas line 3A along the longitudinal direction thereof, respectively, with respect to the second gas line 3B. , Provided on one side along its longitudinal direction. According to this configuration, the first gas line 3A is heated on both sides along the longitudinal direction thereof, and the second gas line 3B is heated on only one side surface along the longitudinal direction thereof. Therefore, the first gas line 3A can be controlled to the first temperature, and the second gas line 3B can be controlled to the second temperature lower than the first temperature. That is, each gas line 3 can be controlled to a desired temperature.

In the first gas line 3A and the second gas line 3B adjacent to each other, the heater portion 4 provided in the second gas line 3B is provided on the side surface opposite to the first gas line 3A side. There is. According to this configuration, the first gas line 3A can be easily controlled to the first temperature, and the second gas line 3B can be easily controlled to the second temperature lower than the first temperature.

The present disclosure is not limited to the above-described embodiment. A person skilled in the art can make various additions and changes within the scope of the present disclosure.

FIG. 3 is a view of the fluid control device 1 according to the modified example as viewed from the gas inflow side.
FIG. 4 is a plan view of the fluid control device 1 according to the modified example.
FIG. 5 is a perspective view of two second gas lines 3B according to a modified example.

As shown in FIGS. 3 to 5, in the fluid control device 1, the heat insulating material 4B may be provided on the side surface of the second gas line 3B on the first gas line 3A side. As shown in FIGS. 4 and 5, the heat insulating material 4B is provided on the entire surface of the side surface of the second gas line 3B on the first gas line 3A side. Thereby, the second gas line 3B can be easily controlled to the second temperature lower than the first temperature. The heat insulating material 4B is, for example, a silicone sponge or the like, and extends along the first direction D1 and has a substantially rectangular shape.

FIG. 6 is a plan view of the fluid control device 1 according to the modified example.
FIG. 7 is a perspective view of the two second gas lines 3B according to the modified example.

As shown in FIGS. 6 and 7, in the second gas line 3B, the heat insulating material 4B is provided on the side surface of the remaining fluid control devices 8 to 17 other than the MFCs 18 and 19. That is, the heat insulating material 4B is provided on the side surface of the second gas line 3B on the first gas line 3A side so as to cut out only the portions of the MFCs 18 and 19. This makes it possible to prevent the MFCs 18 and 19, which have a larger heat capacity than the other fluid control devices 8 to 17, from rising to the second temperature due to the heat insulating material 4B. The fluid control device not provided with the heat insulating material 4B is not limited to the MFCs 18 and 19, and when the second gas line 3B has, for example, a block valve, the block valve does not need to be provided with the heat insulating material 4B. good. Here, the block valve is a valve composed of a body having a flow path formed therein and a plurality of valves provided on the body.

As shown in the fluid control device 1 of FIG. 8, the second gas line 3B may be configured to be sandwiched between the two first gas lines 3A. Also in this configuration, since the seat heater 4A of the heater unit 4 is provided on one side surface of the second gas line 3B along the longitudinal direction thereof, the second gas line 3B is set to the first temperature. It can be controlled to a lower second temperature.

As shown in the fluid control device 1 of FIG. 9, in the first gas line 3A and the second gas line 3B adjacent to each other, the heater unit 4 is placed on the first gas line 3A side of the second gas line 3B. It may be provided on the side surface. With this configuration, the first gas line 3A can be controlled to the first temperature, and the second gas line 3B can be controlled to the second temperature lower than the first temperature.

As shown in the fluid control device 1 of FIG. 10, in two sets of the first gas line 3A and the second gas line 3B adjacent to each other, the heater portions 4 provided in the second gas lines 3B are adjacent to each other. It is provided on the side surface opposite to the side of the first gas line 3A. According to this configuration, the first gas line 3A can be easily controlled to the first temperature, and the second gas line 3B can be easily controlled to the second temperature lower than the first temperature.

When a plurality of second gas lines 3B are lined up from the end of the plurality of gas lines 3 and a first gas line 3A is arranged next to the plurality of second gas lines 3B, the plurality of second gas lines are arranged. In 3B, the output of the seat heater 4A provided in the second gas line 3B located next to the first gas line 3A is made lower than the output of the seat heater 4A provided in the first gas line 3A. , The output of the seat heater 4A provided in the remaining second gas line 3B is a plurality of outputs from the output values of the seat heater 4A provided in the second gas line 3B located next to the first gas line 3A. It may be increased at a constant rate according to the distance from the first gas line 3A located next to the second gas line 3B.

That is, as shown in FIG. 11, when four second gas lines 3B are lined up from the ends of the plurality of gas lines 3 and the first gas line 3A is arranged next to them, the first gas line 4A The output of the seat heater 4A provided in the adjacent second gas line 3B is made lower than the output of the seat heater 4A provided in the first gas line 3A. For example, when the output of the seat heater 4A provided in the first gas line 3A is 80 W, the output of the seat heater 4A provided in the second gas line 3B next to the first gas line 4A is set to 10 W. do.

Then, the output of the seat heater 4A provided in the remaining three second gas lines 3B is the output value of the seat heater 4A provided in the second gas line 3B located next to the first gas line 3A. Therefore, it is increased at a constant rate according to the distance from the first gas line 3A. For example, the outputs of the seat heaters 4A of the remaining three second gas lines 3B are set to 30W, 50W, and 70W from the side closer to the first gas line 3A.

As a result, the output of the second gas line 3B, which is easily affected by heat from the first gas line 3A, is reduced, so that the second gas line 3B is brought to a second temperature lower than the first temperature. It can be easily controlled. In addition, when adding a line, the output design of the heater becomes easy.

In the above embodiment, the fluid control device 1 includes an automatic valve, a pressure gauge, a regulator, and a mass flow controller as the fluid control device, but may also include a filter and the like in addition to these.

1: Fluid control device 3: Gas line 3A: First gas line 3B: Second gas line 4A: Seat heater 4B: Insulation material 8 to 19: Fluid control device

Claims (5)

Multiple gas lines with multiple fluid control devices, each arranged in a row,
A plurality of seat heaters extending along the longitudinal direction of each gas line and provided on the side surface along the longitudinal direction of each gas line are provided.
The plurality of gas lines are heated by the seat heater to a first temperature and a second gas line heated to a second temperature lower than the first temperature by the seat heater. Has a gas line and
Each seat heater is provided on both sides of the first gas line along the longitudinal direction thereof, and is provided on one side surface of the second gas line along the longitudinal direction thereof. Fluid control device. When the second gas line and the first gas line are adjacent to each other, the seat heater provided in the second gas line is on a side surface opposite to the first gas line side. The fluid control device according to claim 1, which is provided. The fluid control device according to claim 2, wherein a heat insulating material is provided on the side surface of the second gas line on the side of the first gas line. The plurality of fluid control devices include a mass flow controller or a block valve.
The fluid control device according to claim 3, wherein the heat insulating material is provided on the side surface of a portion of the remaining fluid control device other than the mass flow controller or the block valve in the second gas line. When a plurality of the second gas lines are lined up from the end of the plurality of gas lines and the first gas line is arranged next to the plurality of second gas lines, the plurality of second gases In the line, the output of the seat heater provided in the second gas line located next to the first gas line is made lower than the output of the seat heater provided in the first gas line. The output of the seat heater provided in the remaining second gas line is obtained from the output value of the seat heater provided in the second gas line located next to the first gas line. The fluid control device according to any one of claims 1 to 4, wherein the fluid control device is increased at a constant rate according to the distance from the first gas line located next to the plurality of second gas lines.

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