JP2021089371A5

JP2021089371A5 -

Info

Publication number: JP2021089371A5
Application number: JP2019219854A
Authority: JP
Filing date: 2019-12-04
Publication date: 2022-12-06
Anticipated expiration: 2039-12-04

Description

本発明の一側面によれば、光源からの光を用いて被照明面を照明する照明光学系であって、前記光源を収容する第１構造体と、入射端面から入射した前記光源からの光を内面で複数回反射させるオプティカルインテグレータと、前記被照明面に前記オプティカルインテグレータの射出端面の像を形成する結像光学系と、前記結像光学系を収容する、前記第１構造体とは異なる第２構造体と、前記オプティカルインテグレータの前記入射端面における位置を回転中心として前記オプティカルインテグレータを傾ける第１チルト機構と、前記オプティカルインテグレータの射出端面における位置を回転中心として前記オプティカルインテグレータを傾ける第２チルト機構と、を有し、前記第１チルト機構は前記第１構造体に結合され、前記第２チルト機構は前記第２構造体に結合される、ことを特徴とする照明光学系が提供される。 According to one aspect of the present invention, there is provided an illumination optical system for illuminating a surface to be illuminated using light from a light source , comprising: a first structure housing the light source; an optical integrator that reflects multiple times on the inner surface, an imaging optical system that forms an image of the exit end face of the optical integrator on the illuminated surface , and a first structure that houses the imaging optical system. a second structure, a first tilt mechanism that tilts the optical integrator about a position on the incident end surface of the optical integrator as a center of rotation, and a second tilt mechanism that tilts the optical integrator about a position on the exit end surface of the optical integrator as a center of rotation. and wherein said first tilting mechanism is coupled to said first structure and said second tilting mechanism is coupled to said second structure. .

図４は、固定機構４２の構成を示す図である。図４は、固定機構４２を、結像光学系１０８側から光軸方向に見た図であり、ハッチングされた部分は断面図を表している。ここで、オプティカルインテグレータ１０４の射出端面１０４ｂ付近の側面は、第２保持部材５１３によって保持されている。なお、第２保持部材５１３は、図３で示した保持部材４１３と同一の部材であってもよいし、別の部材であってもよい。固定機構４２は、第２保持部材５１３を支持し、第２保持部材５１３（すなわちオプティカルインテグレータ１０４の射出端面１０４ｂ）のＹ方向（第１軸方向）の位置を調整するＹ調整ベース５０２（第１調整ベース）を含みうる。また、固定機構４２は、第２保持部材５１３（すなわちオプティカルインテグレータ１０４の射出端面１０４ｂ）のＺ方向（第２軸方向）の位置を調整するＺ調整ベース５０１（第２調整ベース）を含みうる。Ｚ調整ベース５０１は、構造体２０１に結合されている。Ｙ調整ベース５０２は、Ｘ－Ｚ面においてボルト５０３で固定されることにより、Ｚ調整ベース５０１によって支持されている。第２保持部材５１３は、Ｘ－Ｙ面においてボルト５０４で固定されることによりＹ調整ベース５０２によって支持されている。 FIG. 4 is a diagram showing the configuration of the fixing mechanism 42. As shown in FIG. FIG. 4 is a view of the fixing mechanism 42 viewed in the optical axis direction from the imaging optical system 108 side, and hatched portions represent cross-sectional views. Here, the side surface of the optical integrator 104 near the exit end surface 104 b is held by the second holding member 513 . The second holding member 513 may be the same member as the holding member 413 shown in FIG. 3, or may be a different member. The fixing mechanism 42 supports the second holding member 513 and includes a Y adjustment base 502 (first axis direction) for adjusting the position of the second holding member 513 (that is, the exit end surface 104b of the optical integrator 104) in the Y direction (first axis direction). adjustment basis). The fixing mechanism 42 can also include a Z adjustment base 501 (second adjustment base) that adjusts the position of the second holding member 513 (that is, the exit end surface 104b of the optical integrator 104) in the Z direction (second axial direction). Z-adjust base 501 is coupled to structure 201 . The Y adjustment base 502 is supported by the Z adjustment base 501 by being fixed with bolts 503 on the XZ plane. The second holding member 513 is supported by the Y adjustment base 502 by being fixed with bolts 504 in the XY plane.

オプティカルインテグレータ１０４のＺ方向の位置を調整する場合、ボルト５０３を緩め、所望の位置にＺ調整ベース５０１を移動させ、ボルト５０３を固定する。オプティカルインテグレータ１０４のＹ方向の位置を調整する場合、ボルト５０４を緩め、所望の位置に第２保持部材５１３を移動させ、ボルト５０４を固定する。このような固定機構４２によって、チルト機構４１によって調整されたオプティカルインテグレータ１０４の傾き状態が維持される。 When adjusting the position of the optical integrator 104 in the Z direction, the bolt 503 is loosened, the Z adjustment base 501 is moved to a desired position, and the bolt 503 is fixed. When adjusting the position of the optical integrator 104 in the Y direction, the bolt 504 is loosened, the second holding member 513 is moved to a desired position, and the bolt 504 is fixed. Such a fixing mechanism 42 maintains the tilted state of the optical integrator 104 adjusted by the tilting mechanism 41 .

Claims

An illumination optical system that illuminates a surface to be illuminated using light from a light source,
a first structure housing the light source;
an optical integrator that reflects the light from the light source incident from the incident end surface multiple times on the inner surface;
an imaging optical system that forms an image of the exit end face of the optical integrator on the illuminated surface;
a second structure that houses the imaging optical system and is different from the first structure;
a first tilt mechanism that tilts the optical integrator about a position of the incident end surface of the optical integrator as a center of rotation;
a second tilt mechanism that tilts the optical integrator about a position on the exit end face of the optical integrator as a center of rotation;
has
said first tilting mechanism is coupled to said first structure and said second tilting mechanism is coupled to said second structure;
An illumination optical system characterized by:

a positional deviation amount between the optical axis of the light from the light source and the optical axis of the imaging optical system; m, the imaging magnification of the imaging optical system; When T, the length L of the optical integrator is
L > a m/T
2. The illumination optical system according to claim 1, wherein the length satisfies the condition of .

The first tilt mechanism or the second tilt mechanism ,
an outer frame member;
an intermediate frame member disposed within the outer frame member;
a holding member arranged in the intermediate frame member and holding a side surface of the optical integrator;
a first bearing that supports the intermediate frame member rotatably about a first axis with respect to the outer frame member;
a second bearing that supports the holding member rotatably about a second axis orthogonal to the first axis with respect to the intermediate frame member;
3. The illumination optical system according to claim 1, comprising:

The first tilt mechanism or the second tilt mechanism ,
an outer frame member;
an intermediate frame member disposed within the outer frame member;
a holding member arranged in the intermediate frame member and holding a side surface of the optical integrator;
a first leaf spring supporting the intermediate frame member rotatably about a first axis with respect to the outer frame member;
a second leaf spring that supports the holding member to be rotatable about a second axis perpendicular to the first axis with respect to the intermediate frame member;
3. The illumination optical system according to claim 1, comprising:

5. The illumination optical system according to any one of claims 1 to 4, further comprising a fixing mechanism for fixing an inclination state of said optical integrator.

The fixing mechanism is
a second holding member that holds a side surface of the optical integrator near the exit end surface;
a first adjustment base for adjusting the position of the second holding member in the first axial direction;
a second adjustment base for adjusting the position of the second holding member in a second axial direction orthogonal to the first axial direction;
6. The illumination optical system according to claim 5 , comprising:

a drive unit that drives the first tilt mechanism or the second tilt mechanism ;
a control unit that controls the driving unit;
further having
1. The control unit controls the driving unit based on a previously obtained correspondence relationship between the position of the exit end face of the optical integrator and the illuminance distribution on the surface to be illuminated. 7. The illumination optical system according to any one of 6 .

8. The illumination optical system according to any one of claims 1 to 7, wherein the first tilt mechanism or the second tilt mechanism includes a translation mechanism movable in the optical axis direction of the optical integrator. .

9. The illumination optical system according to claim 1 , wherein said optical integrator is arranged between said first structure and said second structure.

The first tilt mechanism is coupled to the first structure via a heat insulating member and/or the second tilt mechanism is coupled to the second structure via a heat insulating member. Item 10. The illumination optical system according to any one of Items 1 to 9 .

The first tilt mechanism is coupled to the first structure via a vibration absorbing member, and/or the second tilt mechanism is coupled to the second structure via a vibration absorbing member. 11. The illumination optical system according to any one of Items 1 to 10 .

The illumination optical system according to any one of claims 1 to 11 , which illuminates the original;
a projection optical system that projects an image of the illuminated pattern of the original onto a substrate;
An exposure apparatus comprising:

exposing a substrate using the exposure apparatus according to claim 12 ;
a step of developing the substrate exposed in the step;
and manufacturing an article from the developed substrate.