JP2021081204A - Three-dimensional measuring device and three-dimensional measuring method - Google Patents

Abstract

To provide a three-dimensional measuring device and a three-dimensional measuring method capable of improving credibility of a measurement result by improvement of the number of data while shortening a measurement time.SOLUTION: A three-dimensional measuring device (1), which measures a three-dimensional shape of an object to be measured using a phase shift method, comprises: a first projection device (11) capable of projecting a first light pattern including striped light intensity distribution from a first position to the object to be measured; a second projection device (12) capable of projecting a second light pattern, including striped light intensity distribution and different from the first light pattern, from a second position different from the first position to the object to be measured; an imaging device (20) which generates a plurality of images for generating three-dimensional information by imaging the object to be measured on which the first light pattern and the second light pattern are simultaneously projected while displacing each phase of the first light pattern and the second light pattern; and an image processing device (120) which generates three-dimensional information indicating a three-dimensional shape of the object to be measured based on the plurality of images for generating three-dimensional information generated by the imaging device.SELECTED DRAWING: Figure 1

Description

The present invention relates to a three-dimensional measuring device and a three-dimensional measuring method.

For example, in a defect inspection on the surface of a measurement object such as a semiconductor part or a precision part, an inspection method performed by applying two-dimensional image processing or three-dimensional image processing in order to find the defect is known. As an example of the inspection method, an inspection using a phase shift method is known.

Here, in the phase shift method, the striped light output from the projection device is projected onto the measurement object from an oblique direction of the measurement object, and the phase of the striped light is further shifted. This is a measurement method for acquiring three-dimensional data of a measurement object by capturing the measurement object with an imaging device and acquiring a plurality of images. In the inspection using the phase shift method, due to the characteristics of the phase shift method, the striped light is projected from an oblique direction of the object to be measured, and a shadowed portion is generated only by imaging in one direction. As a result, there is a problem that the height data of the object to be measured cannot be acquired.

In order to solve the above problem, for example, a three-dimensional measurement method that enhances the credibility of data by projecting striped light from multiple directions on the object to be measured and complementing the part without data. Is disclosed (see Patent Document 1 below).

Japanese Unexamined Patent Publication No. 2013-124937 Japanese Unexamined Patent Publication No. 2017-020959 Japanese Unexamined Patent Publication No. 2012-053015

However, in the case of Patent Document 1, since light is projected from a plurality of directions on the measurement target object, it is necessary to acquire "number of projected light x number of stripe movements", and the image is captured. It takes time. Therefore, the inspection accuracy may be lowered due to the influence of optical fluctuations such as fluctuations in the refractive index of air with the passage of time or mechanical vibrations.

On the other hand, in order to perform defect inspection in a short time, a three-dimensional measuring device (see Patent Document 2 above) and an average brightness that enable the other imaging process to be executed without waiting for the completion of one imaging process. The minimum number of images taken is performed by using two types of striped light with the same intensity and the brightness changes at different cycles, and the number of images taken is estimated by estimating the image of the unimaged part from the acquired image. An inspection device (see Patent Document 3 above) is also disclosed. However, the inspection means described in Patent Documents 2 and 3 has a problem that the measurement time is long because the inspection means is imaged while alternately projecting light by a plurality of projection devices.

The present invention has been made in view of such a problem, and an object of the present invention is a three-dimensional measuring device capable of improving the credibility of a measurement result by improving the number of data while shortening the measurement time. And to provide a three-dimensional measurement method.

The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following aspects.

The three-dimensional measuring device according to this aspect is a three-dimensional measuring device that measures the three-dimensional shape of a measurement object by using a phase shift method, and obtains a first light pattern having a striped light intensity distribution from a first position. A first projection device capable of projecting onto an object to be measured and a second light pattern having a striped light intensity distribution and different from the first light pattern from a second position different from the first position. The first light pattern and the second light pattern were simultaneously projected while shifting the phases of the second light projection device capable of projecting onto the measurement object and the first light pattern and the second light pattern. The measurement target is based on an imaging device that generates a plurality of images for generating three-dimensional information by imaging the measurement object and a plurality of images for generating three-dimensional information generated by the imaging device. The image processing device includes an image processing device that generates three-dimensional information indicating a three-dimensional shape of an object, and the image pickup device includes a plurality of filters corresponding to the first light pattern and the second light pattern, and the plurality of filters. It has a plurality of imaging elements corresponding to each of the filters.

According to the above configuration, the three-dimensional measuring device according to the present embodiment uses the plurality of filters even when the measurement object is imaged in a state where the first light pattern and the second light pattern are simultaneously projected. Each of the first light pattern and the second light pattern can be separated, and each of the first light pattern and the second light pattern can be separated and received light by each of the plurality of image pickup devices. That is, the three-dimensional measuring device according to this aspect does not need to capture an image while alternately projecting light with a plurality of projection devices. Therefore, the three-dimensional measuring device according to this aspect can shorten the measuring time. Further, since the three-dimensional measuring device according to this aspect can shorten the measuring time, it is not easily affected by optical fluctuations such as fluctuation of the refractive index of air with the passage of time or mechanical vibration. ..

Further, in the three-dimensional measuring device according to the present aspect, the imaging device includes an image for generating the three-dimensional information corresponding to the first light pattern and the three-dimensional information corresponding to the second light pattern in one imaging. Each image for generation is separated and generated.

According to the above configuration, the three-dimensional measuring device according to the present embodiment is required to acquire each of the image for generating three-dimensional information corresponding to the first light pattern and the image for generating three-dimensional information corresponding to the second light pattern. You can save time. That is, the three-dimensional measuring device according to this aspect can shorten the measuring time. Further, the three-dimensional measuring device according to this aspect separates each of the image for generating three-dimensional information corresponding to the first light pattern and the image for generating three-dimensional information corresponding to the second light pattern in one imaging. Therefore, under the same conditions, it is possible to generate an image for generating three-dimensional information corresponding to the first light pattern and an image for generating three-dimensional information corresponding to the second light pattern. That is, the three-dimensional measuring device according to this aspect generates an image for generating three-dimensional information corresponding to the first optical pattern and an image for generating three-dimensional information corresponding to the second optical pattern under the same conditions. Therefore, it is not affected by optical fluctuations such as fluctuations in the refractive index of air over time, or mechanical vibrations.

Further, in the three-dimensional measuring device according to the present aspect, the second projection device projects the second light pattern in which at least one of the polarization component or the wavelength is different from the first light pattern. According to the above configuration, the three-dimensional measuring device according to this aspect can increase the amount of information regarding the three-dimensional shape of the measurement object that can be acquired from one image. In addition, the three-dimensional measuring device according to this aspect can reduce the occurrence of the shadowed portion and complement the portion without data. That is, the three-dimensional measuring device according to this aspect can improve the credibility of the measurement result.

Further, in the three-dimensional measuring device according to the present aspect, the imaging device acquires a plurality of images for generating the three-dimensional information and an image for generating two-dimensional information of the measurement target, and the image processing device is used. , The two-dimensional information indicating the two-dimensional shape of the measurement object is generated based on the image for generating the two-dimensional information acquired by the image pickup apparatus, and the three-dimensional information is generated with the two-dimensional information as a reference. Perform image alignment for each of the plurality of images for.

According to the above configuration, since the three-dimensional measuring device according to this embodiment preliminarily aligns each of the plurality of images for the three-dimensional information, it is possible to generate accurate three-dimensional information. That is, the three-dimensional measuring device according to this aspect can realize highly accurate three-dimensional shape measurement.

The three-dimensional measurement method according to this aspect is a three-dimensional measurement method for measuring the three-dimensional shape of an object to be measured by using a phase shift method, wherein a first light pattern having a striped light intensity distribution is formed from a first position. A second light pattern that is projected onto the object to be measured, has a striped light intensity distribution, and is different from the first light pattern is applied to the object to be measured from a second position different from the first position. By imaging the measurement object on which the first light pattern and the second light pattern are simultaneously projected while shifting the phases of the first light pattern and the second light pattern, the light pattern is three-dimensional. A plurality of images for generating information are generated, and a plurality of images for generating three-dimensional information corresponding to the first light pattern generated by separating each of the first light pattern and the second light pattern by the imaging. Based on the image and a plurality of images for generating the three-dimensional information corresponding to the second light pattern, three-dimensional information indicating the three-dimensional shape of the measurement object is generated.

According to the above configuration, in the three-dimensional measurement method according to this aspect, even when the measurement object is imaged in a state where the first light pattern and the second light pattern are simultaneously projected, the above-mentioned plurality of filters can be used. Each of the first light pattern and the second light pattern can be separated, and each of the first light pattern and the second light pattern can be separated and received light by each of the plurality of image pickup devices. That is, the three-dimensional measurement method according to this aspect eliminates the need to capture an image while alternately projecting light with a plurality of projection devices. Therefore, the three-dimensional measurement method according to this aspect can shorten the measurement time. Further, since the three-dimensional measurement method according to this aspect can shorten the measurement time, it is not easily affected by optical fluctuations such as fluctuation of the refractive index of air with the passage of time or mechanical vibration. ..

The three-dimensional measuring device and the three-dimensional measuring method according to this aspect can improve the credibility of the measurement result by improving the number of data while shortening the measurement time.

It is a block diagram which shows the structure of the 3D measuring apparatus which concerns on this embodiment. It is a schematic block diagram of the projection apparatus and the image pickup apparatus shown in FIG. It is a flowchart which shows the 3D measurement method using the 3D measuring apparatus which concerns on this Embodiment.

Hereinafter, the three-dimensional measuring device and the three-dimensional measuring method according to the embodiment of the present invention will be described with reference to the drawings. It should be noted that this embodiment is not limited to the contents described below, and can be arbitrarily modified and implemented without changing the gist thereof. In addition, the drawings used for explaining the embodiments are all schematically showing the constituent members, and are partially emphasized, enlarged, reduced, or omitted in order to deepen the understanding, and the scale of the constituent members is scaled. It may not accurately represent the shape or shape.

FIG. 1 is a block diagram showing a configuration of a three-dimensional measuring device 1 according to the present embodiment. FIG. 2 is a schematic configuration diagram of the projection device 10 and the image pickup device 20 shown in FIG. The three-dimensional measuring device 1 according to the present embodiment is a device that measures the three-dimensional shape of the measurement object P transported to the stage by the transport device 50. Examples of the measurement object P for measuring the three-dimensional shape by the three-dimensional measuring device 1 according to the present embodiment include an IC package in which an IC is surface-mounted on a semiconductor wafer as a substrate. Hereinafter, the IC package will be described as "measurement object P". Further, the transport device 50 is provided on an IC package manufacturing line that continuously manufactures a large number of measurement objects P having the same shape. FIG. 1 shows a state in which the stage for measuring the three-dimensional shape after surface mounting is temporarily stationary for the measurement of the three-dimensional shape.

As shown in FIG. 1, the three-dimensional measuring device 1 according to the present embodiment includes a projection device 10, an imaging device 20, a lighting device 30, and a control device 40. The projection device 10 is configured as a so-called projector, and is used for image acquisition for creating three-dimensional information by the phase shift method adopted in the present embodiment. Specifically, the projection device 10 in this embodiment is composed of a first projection device 11 and a second projection device 12.

As shown in FIG. 2, the first projection device 11 can project the first light pattern PT1 having a striped light intensity distribution onto the measurement object P from the first position. As shown in FIG. 2, the second projection device 12 has a second light pattern PT2 having a striped light intensity distribution and different from the first light pattern PT1 at a second position different from the first position. Can be projected onto the object P to be measured. The first projection device 11 and the second projection device 12 shift the phases of the first light pattern PT1 and the second light pattern PT2, and shift the phases of the first light pattern PT1 and the second light pattern PT2 from the upper surface of the measurement object P and diagonally. And the second light pattern PT2 is simultaneously projected onto the measurement object P.

Further, the second projection device 12 projects the second light pattern PT2 having a different polarization component or wavelength from the first light pattern PT1 onto the measurement object P. For example, when the first light pattern PT1 projected from the first projection device 11 contains only a polarization component of 0 °, the second light pattern PT2 projected from the second projection device 12 is 90 °, 45 °, or 135 °. The second projection device 12 can be set so as to include only the polarization component at an arbitrary angle different from that of the first light pattern PT1 such as the above. Note that FIG. 2 shows, as an example, a case where the first light pattern PT1 contains only a polarization component of 0 ° and the second light pattern PT2 contains only a polarization component of 90 °.

Further, when the first light pattern PT1 projected from the first projection device 11 is visible light, the second light pattern PT2 projected from the second projection device 12 is visible light having a wavelength different from that of the first light pattern PT1. The second projection device 12 can be set so as to be.

Here, FIG. 2 shows a case where the first light pattern PT1 contains only a polarization component of 0 ° and the second light pattern PT2 contains only a polarization component of 90 °. The wavelength of the pattern PT2 may be changed to a wavelength different from that of the first light pattern PT1. Further, only the wavelength of the second light pattern PT2 is referred to as the first light pattern PT1 without changing the polarization component (that is, the first light pattern PT1 and the second light pattern PT2 include the same polarization component). It may be changed to a different wavelength.

The image pickup apparatus 20 is composed of one CCD camera, and for each measurement object P, an image for creating two-dimensional information and a plurality of images for creating three-dimensional information are continuously shortened during a predetermined imaging time. Images are taken at intervals. The image pickup apparatus 20 in the present embodiment captures the measurement object P from the upper surface of the measurement object P (in FIGS. 1 and 2, directly above the measurement object P), thereby creating one two-dimensional information. Generate an image for. Further, the image pickup apparatus 20 images the measurement object P on which the first light pattern PT1 and the second light pattern PT2 are simultaneously projected from the upper surface of the measurement object P, thereby corresponding to each of the light patterns. Generate an image for generating original information.

Here, as shown in FIG. 2, the image pickup device 20 has a filter group FL including a plurality of filters F1 to F4 and an image pickup device group IM including a plurality of image pickup elements I corresponding to each of the plurality of filters F1 to F4. .. The image pickup device 20 generates an image by receiving light having a predetermined property transmitted through each of the plurality of filters F1 to F4 by each of the plurality of image pickup elements I. The plurality of filters F1 to F4 correspond to each of the first light pattern PT1 and the second light pattern PT2, and are a filter capable of transmitting light having a predetermined polarization component or a filter capable of transmitting light having a predetermined wavelength component. At least one of them. That is, the image pickup apparatus 20 separates and generates an image for generating three-dimensional information corresponding to the first light pattern PT1 and an image for generating three-dimensional information corresponding to the second light pattern PT2 in one imaging. Can be done.

Here, in the image pickup apparatus 20 in the present embodiment, for example, the measurement object P on which the first light pattern PT1 and the second light pattern PT2 are simultaneously projected is subjected to the phases of the first light pattern PT1 and the second light pattern PT2, respectively. By imaging 6 degrees from the upper surface of the measurement object P while shifting the image, 6 images for generating 3D information corresponding to the 1st light pattern PT1 and 6 3D images corresponding to the 2nd light pattern PT2. An image for information generation (that is, a total of 12 images for generating three-dimensional information) is generated.

In order to improve the inspection accuracy, the three-dimensional measuring device 1 according to the present embodiment captures a total of 12 images for creating three-dimensional information, but in the phase shift method, one optical pattern is captured. By capturing "at least three" images, it is possible to generate three-dimensional information. The "at least 3 images" here is the theoretical minimum number of images in the sense that three-dimensional information can be generated. In the three-dimensional measuring device 1 according to the present embodiment, four or more images are actually selected from the viewpoint of ease of generating three-dimensional information. Further, in the three-dimensional measuring device 1 according to the present embodiment, one image for creating two-dimensional information is captured, but optical fluctuations such as fluctuations in the refractive index of air or mechanical vibrations are observed. Two or more images may be captured in consideration of the influence.

The lighting device 30 irradiates the measurement object P with light. The lighting device 30 is used when the image pickup device 20 acquires an image for creating two-dimensional information of the measurement object P, and when the projection device 10 and the image pickup device 20 acquire the image for creating the three-dimensional information. Also used for. It is preferable that the light emitted from the lighting device 30 has a small influence on the first light pattern PT1 and the second light pattern PT2 projected from the projection device 10.

The control device 40 includes a predetermined processor 100 and a memory 130 for sequentially storing necessary information as hardware resources. The processor 100 of the control device 40 in the present embodiment functions as the integrated control device 110 and the image processing device 120.

The integrated control device 110 controls the projection device 10, the image pickup device 20, and the lighting device 30 that form a part of the three-dimensional measurement device 1, and also controls the transfer device 50 that conveys the measurement object P. The overall control device 110 appropriately operates and stops each of the above devices in executing the three-dimensional measurement method based on the flowchart described later. For example, the integrated control device 110 controls the lighting device 30 so that the lighting method differs between the case of capturing an image for creating two-dimensional information and the case of capturing an image for creating three-dimensional information.

The image processing device 120 sequentially accumulates necessary information in the memory 130 in the control device 40, and sequentially takes out the information from the memory 130 to measure the accurate three-dimensional shape of the measurement object P. For example, the image processing device 120 generates three-dimensional information indicating the three-dimensional shape of the measurement object P based on a plurality of images for generating three-dimensional information generated by the image pickup device 20. The image processing device 120 in the present embodiment includes, for example, an image acquisition unit 121, a two-dimensional information generation unit 122, an image alignment unit 123, and a three-dimensional information generation unit 124.

The image acquisition unit 121 acquires an image for creating two-dimensional information generated by the image pickup apparatus 20. In addition, the image acquisition unit 121 acquires a plurality of images for creating three-dimensional information generated by the image pickup apparatus 20.

The two-dimensional information generation unit 122 indicates the two-dimensional shape of the measurement object P based on the image for creating the two-dimensional information acquired by the image acquisition unit 121, and generates two-dimensional information as a reference for image alignment. To do. The image alignment unit 123 executes image alignment of each of the plurality of images for generating three-dimensional information with reference to the two-dimensional information.

The three-dimensional information generation unit 124 generates the above-mentioned three-dimensional information based on an image for creating three-dimensional information acquired by the image acquisition unit 121 and executed by the image alignment unit 123 for image alignment. The memory 130 stores in advance the data of each pixel of the image for creating the two-dimensional information and the image for creating the three-dimensional information, the three-dimensional information generated by the three-dimensional information generation unit 124, and the like. It is memorized each time and the memorized contents are erased.

Here, a specific procedure of the three-dimensional measurement method using the three-dimensional measurement device 1 according to the present embodiment will be described with reference to FIG. FIG. 3 is a flowchart showing a three-dimensional measurement method using the three-dimensional measurement device 1 according to the present embodiment.

First, the integrated control device 110 conveys the measurement object P to the stage via the transfer device 50, and makes the measurement object P stationary at the stage for a predetermined short time for imaging (step S1). After the end of step S1, the general control device 110 irradiates the measurement object P with light by the lighting device 30 so that the image pickup device 20 can capture an image for creating two-dimensional information. Further, the integrated control device 110 causes the image pickup device 20 to take an image of the measurement object P. As a result, the image pickup apparatus 20 generates an image for creating two-dimensional information (step S2). When the image pickup device 20 generates an image for creating two-dimensional information, the projection device 10 does not project the first light pattern PT1 and the second light pattern PT2 onto the measurement object P.

After the end of step S2, the image acquisition unit 121 of the image processing device 120 acquires the image for creating two-dimensional information generated in step S2 as data. Further, the two-dimensional information generation unit 122 of the image processing device 120 generates the two-dimensional information based on the image for creating the two-dimensional information acquired by the image acquisition unit 121 (step S3).

After the end of step S3, the integrated control device 110 causes the lighting device 30 to irradiate the measurement object P with light as in step S2, and allows the image pickup device 20 to capture an image for creating three-dimensional information. Make it in a good state. Further, the integrated control device 110 causes the projection device 10 to simultaneously project the first light pattern PT1 and the second light pattern PT2 onto the measurement object P, and causes the image pickup device 20 to simultaneously project the first light pattern PT1 and the second light pattern PT1 and the second light pattern. The measurement object P on which the PT2 is projected at the same time is imaged. In the present embodiment, the integrated control device 110 controls the image pickup device 20 to image the measurement object P on which the first light pattern PT1 and the second light pattern PT2 are simultaneously projected. 2 The optical pattern PT2 is repeated 6 times while shifting the phase of each. As a result, the image pickup apparatus 20 generates six images for creating three-dimensional information corresponding to the first optical pattern PT1 and six images for creating three-dimensional information corresponding to the second optical pattern PT2 (step). S4). Since there is no change in the positional relationship between the image pickup device 20 and the measurement object P in steps S2 and S4, the areas of the image for creating two-dimensional information and the image for creating three-dimensional information captured in both steps are completely large. It will be the same.

Since the above steps S1 to S4 are performed instantaneously, after these steps are completed, the overall control device 110 carries out the measurement object P via the transfer device 50 without any gap (step S5). ).

After the end of step S5, the image alignment unit 123 of the image processing device 120 executes image alignment of each of the plurality of images for generating three-dimensional information with reference to the two-dimensional information (step S6).

After the end of step S6, the three-dimensional information generation unit 124 of the image processing device 120 is based on a plurality of images for creating three-dimensional information acquired by the image acquisition unit 121 and subjected to image alignment by the image alignment unit 123. Then, the above three-dimensional information is generated (step S7). After the end of step S7, a series of processes is completed.

As described above, the three-dimensional measuring device 1 according to the present embodiment is the first three-dimensional measuring device 1 that measures the three-dimensional shape of the object P to be measured by using the phase shift method, and has a striped light intensity distribution. A first projection device 11 capable of projecting the light pattern PT1 from the first position onto the object P to be measured, and a second light pattern PT2 having a striped light intensity distribution and different from the first light pattern PT1. The first light while shifting the phases of the second projection device 12, the first light pattern PT1 and the second light pattern PT2, which can project light onto the measurement object P from a second position different from the first position. An imaging device 20 that generates a plurality of images for generating three-dimensional information by imaging the measurement object P on which the pattern PT1 and the second light pattern PT2 are simultaneously projected, and the three-dimensional information generated by the imaging device 20. An image processing device 120 that generates three-dimensional information indicating the three-dimensional shape of the measurement object P based on a plurality of images for generation is provided. The image pickup device 20 has a plurality of filters F1 to F4 corresponding to each of the first light pattern PT1 and the second light pattern PT2, and a plurality of image pickup elements I corresponding to each of the plurality of filters F1 to F4.

According to the above configuration, the three-dimensional measuring device 1 according to the present embodiment takes an image of the measurement object P in a state where the first light pattern PT1 and the second light pattern PT2 are simultaneously projected. The first light pattern PT1 and the second light pattern PT2 are separated by a plurality of filters F1 to F4, and the first light pattern PT1 and the second light pattern PT2 are separated and received by each of the plurality of image pickup devices I. Can be done.

Here, in order to measure a three-dimensional shape in a short time in a general three-dimensional measuring device, a three-dimensional measurement method or brightness that enables the other imaging process to be executed without waiting for the completion of one imaging process. By performing the minimum necessary imaging using two types of striped light whose average intensity is the same and whose brightness changes at different cycles, and estimating the image of the unimaged part from the acquired image. A three-dimensional measurement method for reducing the number of imagings is disclosed. However, the above-mentioned three-dimensional measurement method has a problem that the measurement time is long because the image is captured while alternately projecting light by a plurality of projection devices (see the description of the above background technology).

On the other hand, the three-dimensional measuring device 1 according to the present embodiment has the plurality of filters F1 even when the measurement object P is imaged in a state where the first light pattern PT1 and the second light pattern PT2 are simultaneously projected. Since each of the first light pattern PT1 and the second light pattern PT2 can be separated by F4, and the first light pattern PT1 and the second light pattern PT2 can be separated and received by each of the plurality of image pickup elements I. It is no longer necessary to capture an image while alternately projecting light with a plurality of projection devices. Therefore, the three-dimensional measuring device 1 according to the present embodiment can shorten the measuring time. Further, since the three-dimensional measuring device 1 according to the present embodiment can shorten the measurement time, it is affected by optical fluctuations such as fluctuations in the refractive index of air with the passage of time, or mechanical vibrations. Hard to receive.

Further, the three-dimensional measuring device 1 according to the present embodiment has an image for generating three-dimensional information corresponding to the first light pattern PT1 and an image for generating three-dimensional information corresponding to the second light pattern PT2 in one imaging. Can be generated separately. Therefore, the three-dimensional measuring device 1 according to the present embodiment can acquire an image for generating three-dimensional information corresponding to the first optical pattern PT1 and an image for generating three-dimensional information corresponding to the second optical pattern PT2. The time it takes can be shortened. That is, the three-dimensional measuring device 1 according to the present embodiment can shorten the measuring time. Further, the three-dimensional measuring device 1 according to the present embodiment has an image for generating three-dimensional information corresponding to the first light pattern PT1 and an image for generating three-dimensional information corresponding to the second light pattern PT2 in one imaging. Under the same conditions, it is possible to generate an image for generating three-dimensional information corresponding to the first light pattern PT1 and an image for generating three-dimensional information corresponding to the second light pattern PT2. it can. That is, the three-dimensional measuring device according to this aspect generates an image for generating three-dimensional information corresponding to the first optical pattern and an image for generating three-dimensional information corresponding to the second optical pattern under the same conditions. Therefore, it is not affected by optical fluctuations such as fluctuations in the refractive index of air over time, or mechanical vibrations.

Further, the three-dimensional measuring device 1 according to the present embodiment projects a plurality of light patterns having different polarization components or at least one wavelength from a plurality of positions. For example, the three-dimensional measuring device 1 according to the present embodiment projects a plurality of light patterns having different polarization components from a plurality of positions. Further, the three-dimensional measuring device 1 according to the present embodiment projects a plurality of light patterns having different wavelengths from a plurality of positions. As a result, the three-dimensional measuring device 1 according to the present embodiment can increase the amount of information regarding the three-dimensional shape of the measurement object P that can be acquired from one image. Further, the three-dimensional measuring device 1 according to the present embodiment can reduce the occurrence of the shadowed portion and supplement the portion without data. That is, the three-dimensional measuring device 1 according to the present embodiment can improve the credibility of the measurement result.

Further, the three-dimensional measuring device 1 according to the present embodiment projects a plurality of light patterns having different polarization components and wavelengths from a plurality of positions. As a result, the three-dimensional measuring device 1 according to the present embodiment can increase the amount of information regarding the three-dimensional shape of the measurement object P that can be acquired from one image. That is, the three-dimensional measuring device 1 according to the present embodiment can improve the credibility of the measurement result.

Further, the image pickup apparatus 20 generates an image for generating two-dimensional information of the measurement object P together with a plurality of images for generating three-dimensional information. Further, the image processing device 120 generates two-dimensional information indicating the two-dimensional shape of the measurement object P based on the two-dimensional information generation image generated by the image pickup device 20, and uses the two-dimensional information as a reference. , Performs image alignment of each of a plurality of images for generating three-dimensional information. As a result, the three-dimensional measuring device 1 according to the present embodiment aligns each of the plurality of images for the three-dimensional information in advance, so that it is possible to generate accurate three-dimensional information. That is, the three-dimensional measuring device 1 according to the present embodiment can realize highly accurate three-dimensional shape measurement.

That is, the three-dimensional measuring device 1 according to the present embodiment can perform stable and accurate three-dimensional measurement at high speed. Further, the three-dimensional measuring device 1 according to the present embodiment can be easily introduced into the defect inspection process of the production line, and 100% inspection of the inspection target can be performed in-line. On the other hand, in the continuous inspection on the production line, the surface of the object P to be measured and the z-axis in the three-dimensional measurement are not always perpendicular to each other. Therefore, according to the present embodiment, the inspection accuracy can be improved.

Thus, the three-dimensional measuring device 1 according to the present embodiment can improve the credibility of the measurement result by improving the number of data while shortening the measurement time.

The three-dimensional measuring device 1 according to the above embodiment is merely an example, and each of these components and the number thereof can be arbitrarily selected as long as they do not deviate from the scope of the present embodiment. is there. For example, the number of image pickup devices 20 is not limited to one, and may be two or more, and the type thereof is not limited to the CCD camera, and a CMOS camera or a line sensor camera may be used. Further, the number of the lighting devices 30 may be one or three or more. Further, the three-dimensional measurement method according to the present embodiment is not limited to the order of the flowcharts shown in FIG. 3 (routine procedure), and the flowcharts can be appropriately changed within the scope of the present embodiment. For example, when the optical cutting method is adopted as the three-dimensional shape measurement method, or when the line sensor camera is adopted as the image pickup device, the measurement object may be imaged while being conveyed without being stationary at the time of image acquisition. Good.

Further, in the three-dimensional measuring device 1 according to the above embodiment, the light pattern projected from the projection device 10 is visible light, but the three-dimensional measuring device 1 according to the present embodiment is not limited to this. For example, the three-dimensional measuring device 1 according to the present embodiment may use the light pattern projected from the projecting device 10 as invisible light. When the light pattern projected from the projection device 10 is invisible light, the image pickup device 20 preferably includes filters F1 to F4 capable of transmitting the invisible light and an image sensor I capable of receiving the invisible light.

Further, the term "predetermined processor" used in the above description means, for example, a dedicated or general-purpose processor such as a CPU (Central Processing Unit), an MPU (Micro Processing Unit), or a GPU (Graphics Processing Unit). Further, each component (each processing unit) of the present embodiment is not limited to a single processor, and may be realized by a plurality of processors. Further, a plurality of components (a plurality of processing units) may be realized by a single processor.

Although the embodiment of the present invention has been described above, this embodiment is presented as an example and is not intended to limit the scope of the invention. This novel embodiment can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. This embodiment and its modifications are included in the scope and gist of the invention, and are included in the scope of the invention described in the claims and the equivalent scope thereof.

1 3D measuring device 10 Projecting device 20 Imaging device 30 Lighting device 40 Control device 50 Transport device 100 Processor 110 General control device 120 Image processing device 121 Image acquisition unit 122 Two-dimensional information generation unit 123 Image alignment unit 124 Three-dimensional information generation Part 130 Memory P Measurement target F1 to F4 filter FL filter group I Imaging element IM Imaging element group

Claims (5)

In a three-dimensional measuring device that measures the three-dimensional shape of an object to be measured using the phase shift method,
A first projection device capable of projecting a first light pattern having a striped light intensity distribution onto the measurement object from a first position, and a first projection device.
A second projection device having a striped light intensity distribution and capable of projecting a second light pattern different from the first light pattern onto the measurement object from a second position different from the first position. ,
By imaging the measurement object on which the first light pattern and the second light pattern are simultaneously projected while shifting the phases of the first light pattern and the second light pattern, it is possible to generate three-dimensional information. An imaging device that generates multiple images and
An image processing device that generates three-dimensional information indicating the three-dimensional shape of the measurement object based on the plurality of images for generating the three-dimensional information generated by the image pickup device is provided.
The image pickup device
A plurality of filters corresponding to the first light pattern and the second light pattern,
It has a plurality of image pickup elements corresponding to each of the plurality of filters.
Three-dimensional measuring device. The claim that the image pickup apparatus separates and generates an image for generating three-dimensional information corresponding to the first light pattern and an image for generating three-dimensional information corresponding to the second light pattern in one imaging. The three-dimensional measuring device according to 1. The three-dimensional measuring device according to claim 1 or 2, wherein the second projection device projects the second light pattern in which at least one of a polarization component or a wavelength is different from that of the first light pattern. The image pickup apparatus acquires an image for generating two-dimensional information of the measurement object together with a plurality of images for generating the three-dimensional information.
The image processing device is
Based on the image for generating the two-dimensional information acquired by the imaging device, two-dimensional information indicating the two-dimensional shape of the object to be measured is generated.
Using the two-dimensional information as a reference, image alignment of each of the plurality of images for generating the three-dimensional information is executed.
The three-dimensional measuring device according to any one of claims 1 to 3. In a three-dimensional measurement method that measures the three-dimensional shape of an object to be measured using the phase shift method,
A first light pattern having a striped light intensity distribution is projected from the first position onto the measurement object.
A second light pattern having a striped light intensity distribution and different from the first light pattern is projected onto the measurement object from a second position different from the first position.
By imaging the measurement object on which the first light pattern and the second light pattern are simultaneously projected while shifting the phases of the first light pattern and the second light pattern, it is possible to generate three-dimensional information. Generate multiple images and
A plurality of images for generating three-dimensional information corresponding to the first light pattern generated by separating each of the first light pattern and the second light pattern by the imaging, and the second light pattern corresponding to the plurality of images. Based on a plurality of images for generating three-dimensional information, three-dimensional information indicating the three-dimensional shape of the measurement object is generated.
Three-dimensional measurement method.

Images