JP2021034365A - Low pressure mercury lamp unit - Google Patents

Low pressure mercury lamp unit Download PDF

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JP2021034365A
JP2021034365A JP2019157492A JP2019157492A JP2021034365A JP 2021034365 A JP2021034365 A JP 2021034365A JP 2019157492 A JP2019157492 A JP 2019157492A JP 2019157492 A JP2019157492 A JP 2019157492A JP 2021034365 A JP2021034365 A JP 2021034365A
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pressure mercury
mercury lamp
low
lamp unit
arc tube
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JP7248954B2 (en
JP2021034365A5 (en
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憲紀 鹿又
Toshinori Shikamata
憲紀 鹿又
定治 西田
Sadaji Nishida
定治 西田
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Iwasaki Denki KK
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Iwasaki Denki KK
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Abstract

To realize a low pressure mercury lamp unit having a long life.SOLUTION: A low pressure mercury lamp unit according to the present invention includes a surface-irradiating low-pressure mercury lamp in which an electrode is arranged on one side, and an arc tube repeatedly bends in a U-shape a predetermined number of times in the length in the axial direction of the lamp, and a reflector that reflects and directs the light emitted from the arc tube toward an object to be irradiated, and the coldest portion is formed in the vicinity of an electrode portion of the arc tube.SELECTED DRAWING: Figure 1

Description

本発明は、低圧水銀ランプユニットに関する。 The present invention relates to a low pressure mercury lamp unit.

低圧水銀ランプは、点灯中の水銀蒸気圧が100Pa以下の水銀蒸気中のアーク放電の発光を利用する放電ランプである。発光管には、主に棒状のガラス管が用いられ、Ar(アルゴン)などの希ガスと、水銀又はそのアマルガム(水銀と他の金属との合金)が封入されている。低圧水銀ランプは、主として、流水殺菌装置、紫外線酸化水処理装置等に利用される。更に、紫外線消去型EPROM(Ultra-Violet Erasable Programmable ROM)と称されるICメモリのデータ消去用光源としても利用されている。 The low-pressure mercury lamp is a discharge lamp that utilizes the light emission of an arc discharge in mercury vapor having a mercury vapor pressure of 100 Pa or less during lighting. A rod-shaped glass tube is mainly used for the arc tube, and a rare gas such as Ar (argon) and mercury or its amalgam (alloy of mercury and another metal) are sealed therein. The low-pressure mercury lamp is mainly used in a running water sterilizer, an ultraviolet oxidized water treatment device, and the like. Further, it is also used as a data erasing light source of an IC memory called an ultraviolet erasing EPROM (Ultra-Violet Erasable Programmable ROM).

特許第2820623号「照明器具」(公報発行日:1998.11.05)出願人:鹿島建設株式会社Patent No. 2820623 "Lighting Equipment" (Publication date: 1998.11.05) Applicant: Kajima Corporation 特開平7-240173号「放電ランプおよびランプ装置」(公開日:1995.09.12)出願人:東芝ライラック株式会社Japanese Patent Application Laid-Open No. 7-240173 "Discharge Lamp and Lamp Device" (Publication Date: September 12, 1995) Applicant: Toshiba Lilac Co., Ltd. 特開平10-208698号「水銀蒸気放電灯」(公開日:1998.08.07)出願人:岩崎電気株式会社Japanese Patent Application Laid-Open No. 10-208698 "Mercury steam discharge lamp" (Publication date: 1998.08.07) Applicant: Iwasaki Electric Co., Ltd.

現在、流水殺菌、紫外線酸化水処理、ICメモリのデータ消去等に使用されている低圧水銀ランプユニットでは、発光管の形状が面照射可能なように形成されている。従来、このような面照射用の低圧水銀ランプユニットに関しては、極端にランプ寿命が短いという問題点を有していた。 Currently, in the low-pressure mercury lamp unit used for running water sterilization, ultraviolet oxide water treatment, data erasure of IC memory, etc., the shape of the arc tube is formed so that surface irradiation is possible. Conventionally, such a low-pressure mercury lamp unit for surface irradiation has a problem that the lamp life is extremely short.

そこで、本発明は、長寿命の低圧水銀ランプユニットを実現することを目的とする。 Therefore, an object of the present invention is to realize a low-pressure mercury lamp unit having a long life.

本発明の目的に鑑みて、本発明に係る低圧水銀ランプユニットは、一面において、一方の側に電極が配置され、発光管が所定のランプ軸線方向長さに所定回数U字形状に屈曲を繰り返す面照射可能な低圧水銀ランプと該発光管の発光を被照射物の方向へ反射して向ける反射板とを備えた低圧水銀ランプユニットであって、前記発光管の電極部近傍の箇所に、最冷部を形成している。 In view of the object of the present invention, in the low pressure mercury lamp unit according to the present invention, an electrode is arranged on one side on one surface, and the arc tube repeats bending in a U shape a predetermined number of times to a predetermined lamp axial length. A low-pressure mercury lamp unit provided with a low-pressure mercury lamp capable of surface irradiation and a reflecting plate that reflects and directs the light emitted from the arc tube toward the object to be irradiated. It forms a cold part.

更に、上記低圧水銀ランプユニットでは、前記反射板には、冷却空気が通過する複数個の開口が形成され、該反射板の電極部近傍の開口率を局部的に高くして冷却空気量を多くし、冷却効果を高くしてもよい。 Further, in the low-pressure mercury lamp unit, the reflector is formed with a plurality of openings through which cooling air passes, and the aperture ratio in the vicinity of the electrode portion of the reflector is locally increased to increase the amount of cooling air. However, the cooling effect may be enhanced.

更に、上記低圧水銀ランプユニットでは、前記反射板の電極部近傍の開口は長円形であり、それ以外の開口は円形であってよい。 Further, in the low-pressure mercury lamp unit, the opening near the electrode portion of the reflector may be oval, and the other openings may be circular.

更に、上記低圧水銀ランプユニットでは、前記反射板の電極部近傍の開口は、それ以外の開口より大きいサイズであってよい。 Further, in the low-pressure mercury lamp unit, the opening near the electrode portion of the reflector may be larger in size than the other openings.

更に、上記低圧水銀ランプユニットでは、前記発光管の電極部近傍の管径を相対的に太く形成してもよい。 Further, in the low-pressure mercury lamp unit, the tube diameter in the vicinity of the electrode portion of the arc tube may be formed to be relatively large.

更に、上記低圧水銀ランプユニットでは、前記反射板は、U字部近傍の開口率を部分的に低くし、又は開口を設けず、相対的に発光管U字部の冷却を防いでいてもよい。 Further, in the low-pressure mercury lamp unit, the reflector may partially reduce the aperture ratio in the vicinity of the U-shaped portion or may not provide an opening to relatively prevent the U-shaped portion of the arc tube from being cooled. ..

本発明によれば、長寿命の低圧水銀ランプユニットを実現することができる。 According to the present invention, a long-life low-pressure mercury lamp unit can be realized.

図1は、本実施形態に係る低圧水銀ランプユニットを示す図であり、上段の図は平面図、下段の図は正面図である。FIG. 1 is a diagram showing a low-pressure mercury lamp unit according to the present embodiment, the upper diagram is a plan view, and the lower diagram is a front view. 図2Aは、図1の低圧水銀ランプユニットの正面図に示された発光管に関して、発光管の電極部近傍の管径を相対的に太くしたことを説明する図である。FIG. 2A is a diagram illustrating that the diameter of the arc tube in the vicinity of the electrode portion of the arc tube is relatively large with respect to the arc tube shown in the front view of the low-pressure mercury lamp unit of FIG. 図2Bは、図1の低圧水銀ランプユニットの正面図に示された反射板に関して、反射板の電極部近傍部分の開口率を相対的に高くしたことを説明する図である。FIG. 2B is a diagram for explaining that the aperture ratio of the portion near the electrode portion of the reflector is relatively high with respect to the reflector shown in the front view of the low-pressure mercury lamp unit of FIG. 図3は、本実施形態に係る低圧水銀ランプユニットの長手方向の複数の位置で測定した表面温度のグラフであり、比較例として従来の低圧水銀ランプユニットのデータもプロットされている。FIG. 3 is a graph of surface temperatures measured at a plurality of positions in the longitudinal direction of the low-pressure mercury lamp unit according to the present embodiment, and data of a conventional low-pressure mercury lamp unit is also plotted as a comparative example. 図4Aは、従来の低圧水銀ランプユニットの最冷部の位置を示す図である。FIG. 4A is a diagram showing the position of the coldest portion of the conventional low-pressure mercury lamp unit. 図4Bは、本実施形態に係る低圧水銀ランプユニットの最冷部の位置を示す図である。FIG. 4B is a diagram showing the position of the coldest portion of the low-pressure mercury lamp unit according to the present embodiment. 図5Aは、本実施形態に係る低圧水銀ランプユニットを使用して、紫外線消去型ICメモリのデータ消去を行っている際の、冷却空気の流れを説明する図である。FIG. 5A is a diagram illustrating a flow of cooling air when erasing data in an ultraviolet erasing IC memory using the low-pressure mercury lamp unit according to the present embodiment. 図5Bは、本実施形態に係る他の低圧水銀ランプユニットの利用例を説明する図である。FIG. 5B is a diagram illustrating a usage example of another low-pressure mercury lamp unit according to the present embodiment. 図6は、本実施形態に係る低圧水銀ランプユニットの点灯時間(ランプ寿命)のデータである。FIG. 6 is data on the lighting time (lamp life) of the low-pressure mercury lamp unit according to the present embodiment. 図7は、本実施形態に係る低圧水銀ランプユニットの寿命末期までの照度の推移を示すデータである。FIG. 7 is data showing the transition of the illuminance until the end of the life of the low-pressure mercury lamp unit according to the present embodiment. 図8は、本実施形態に係る低圧水銀ランプユニットの寿命末期までの照度の推移を示すデータである。FIG. 8 is data showing the transition of the illuminance until the end of the life of the low-pressure mercury lamp unit according to the present embodiment. 図9は、本実施形態に係る低圧水銀ランプユニットの寿命末期までの照度の推移を示すデータである。FIG. 9 is data showing the transition of the illuminance until the end of the life of the low-pressure mercury lamp unit according to the present embodiment.

以下、本発明に係る低圧水銀ランプユニットの実施形態に関し、添付の図面を参照しながら、詳細に説明する。なお、同じ要素に対しては、同じ参照符号を付して、重複した説明を省略する。 Hereinafter, embodiments of the low-pressure mercury lamp unit according to the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals are given to the same elements, and duplicate explanations will be omitted.

[低圧水銀ランプユニット]
(全体構成)
図1は、本実施形態に係る低圧水銀ランプユニットを示す図であり、上段の図は平面図、下段の図は正面図である。正面図に示すように、低圧水銀ランプユニット10では、発光管4が、反射板6の上に設置されている。
発光管4は、典型的には石英ガラスによって形成され、封入物として、水銀と、希ガスとして代表的にはアルゴンが封入されている。
[Low pressure mercury lamp unit]
(overall structure)
FIG. 1 is a diagram showing a low-pressure mercury lamp unit according to the present embodiment, the upper diagram is a plan view, and the lower diagram is a front view. As shown in the front view, in the low-pressure mercury lamp unit 10, the arc tube 4 is installed on the reflector 6.
The arc tube 4 is typically formed of quartz glass, and is encapsulated with mercury as an inclusion and typically argon as a rare gas.

図2Aは、図1の正面図に示す発光管の拡大図であり、発光管の電極部近傍の太い管径4aと、U字部側部分の相対的に細い管径4bとを示した説明図である。理解を容易にするため、管径の差は誇張して図示している。発光管4の左端は、電極2a,2bを内蔵した電極部4aであり、右端は屈曲部(U字形状部)4bである。図1の平面図に示すように、発光管4は、一方の電極2aを内蔵した部分から長手方向に延在し(1段目)、最初のU字部4b1で屈曲して電極2a方向に折り返して長手方向に延在し(2段目)、電極2a近傍に達したら再びU字形状に折り返して長手方向に延在し(3段目)、第2のU字部4b2で屈曲して電極2a方向に折り返して長手方向に延在し(4段目)、これを所定の回数繰り返して電極2a側に戻って他方の電極2bを内蔵した端部で終端する形状である。
この発光管4の形状により、被照射物(「ワーク」ともいう。)に対して面照射が可能となる。
FIG. 2A is an enlarged view of the arc tube shown in the front view of FIG. 1, and explains that a thick tube diameter 4a near the electrode portion of the arc tube and a relatively thin tube diameter 4b on the U-shaped portion side portion are shown. It is a figure. The difference in pipe diameter is exaggerated for ease of understanding. The left end of the arc tube 4 is an electrode portion 4a containing the electrodes 2a and 2b, and the right end is a bent portion (U-shaped portion) 4b. As shown in the plan view of FIG. 1, the arc tube 4 extends in the longitudinal direction from the portion containing one electrode 2a (first stage), is bent at the first U-shaped portion 4b1, and is bent in the direction of the electrode 2a. It is folded back and extends in the longitudinal direction (second step), and when it reaches the vicinity of the electrode 2a, it is folded back into a U shape again and extends in the longitudinal direction (third step), and is bent at the second U-shaped portion 4b2. The shape is such that it is folded back in the electrode 2a direction and extends in the longitudinal direction (fourth step), and this is repeated a predetermined number of times to return to the electrode 2a side and terminate at the end portion containing the other electrode 2b.
The shape of the arc tube 4 enables surface irradiation of an object to be irradiated (also referred to as a "work").

発光管4の各部分は、隣接する部分と近接し、相互のランプ軸線方向は平行となっている。発光管の各部分は、長手方向長さの中心線CLを基準に、電極部側の発光管部分を参照符号「Te」、U字部側の発光管部分を参照符号「Tu」を付して説明する。 Each part of the arc tube 4 is close to the adjacent part, and the lamp axis directions are parallel to each other. Each part of the arc tube is designated by the reference code "Te" for the arc tube portion on the electrode portion side and the reference symbol "Tu" for the arc tube portion on the U-shaped portion side with reference to the center line CL of the longitudinal length. I will explain.

反射板6は、典型的にはアルミニウムによって形成されているが、これに限定されない。この反射板6には、冷却空気が通過する複数個の開口(孔)9が形成されている。開口9の配置は、典型的には正格子状である。しかし、開口の配置はこれに限定されない。隣接する開口の列が隣接する開口の列と半格子分だけズレたモザイク状等任意のものであってよい。 The reflector 6 is typically made of, but is not limited to, aluminum. The reflector 6 is formed with a plurality of openings (holes) 9 through which cooling air passes. The arrangement of the openings 9 is typically in a regular grid pattern. However, the arrangement of openings is not limited to this. The rows of adjacent openings may be arbitrary, such as a mosaic shape in which the rows of adjacent openings are offset by a half grid.

図1の正面図で見て、発光管4の発光は、上方に向かう発光と、反射板6で反射して上方に向かう発光とにより、被照射物(図示せず。)を照射する。 As seen from the front view of FIG. 1, the light emitted from the arc tube 4 irradiates the object to be irradiated (not shown) by the light emitted upward and the light emitted reflected by the reflector 6 and directed upward.

ここで、本出願書類に使用する用語を定義する。このような形状の低圧水銀ランプを、単に「一方の側に電極が配置され、発光管が所定のランプ軸線方向長さに所定回数U字形状に屈曲を繰り返す面照射可能な低圧水銀ランプ」と称する。
「低圧水銀ランプ」は、発光管及びその封入物をいい、「低圧水銀ランプユニット」は低圧水銀ランプ及び反射板等の関連部品をいう。
電極2a,2bサイドでも発光管のU字形状部(2段目と3段目,4段目と5段目,…を接続する部分)が有るが、説明を簡単にするため、図1で見て中心線CLを基準に右半分Tuを「U字部側」と称し、左半分Teを「電極部側」と称する。
更に、発光管4において、一番上側(図の例では1段目)と一番下側(8段目)の電極に近い発光管部分を「発光管の電極部近傍」と称する。
更に、反射板6の反射部6a内において、発光管の電極部近傍に対応する反射板のエリアを「反射板の電極部近傍部分」と称する。
Here, the terms used in the application documents are defined. A low-pressure mercury lamp having such a shape is simply referred to as "a low-pressure mercury lamp capable of surface irradiation in which an electrode is arranged on one side and the arc tube is repeatedly bent into a U-shape a predetermined number of times in the length in the axial direction of the lamp". Refer to.
The "low-pressure mercury lamp" refers to an arc tube and its inclusions, and the "low-pressure mercury lamp unit" refers to related parts such as a low-pressure mercury lamp and a reflector.
There is also a U-shaped part of the arc tube (the part that connects the 2nd and 3rd stages, the 4th and 5th stages, ...) On the electrodes 2a and 2b side, but for the sake of simplicity, FIG. Looking at the center line CL, the right half Tu is referred to as the "U-shaped portion side", and the left half Te is referred to as the "electrode portion side".
Further, in the arc tube 4, the arc tube portion close to the electrodes on the uppermost side (first stage in the example of the figure) and the lowermost side (eighth stage) is referred to as "near the electrode portion of the arc tube".
Further, in the reflecting portion 6a of the reflecting plate 6, the area of the reflecting plate corresponding to the vicinity of the electrode portion of the arc tube is referred to as "a portion near the electrode portion of the reflecting plate".

(最冷部位置転換の手段)
一般に、低圧水銀ランプのような金属放電ランプは、ランプの最冷部の温度に応じて封入された金属蒸気圧が変化する。低圧水銀ランプの紫外線出力は、ランプ点灯時の発光管内の水銀蒸気圧によって左右される。従来の低圧水銀ランプの最冷部は、U字部側の右端エリア(図4A参照)に位置していた。水銀等の封入物は、この最冷部に留まる傾向がある。
(Means for changing the position of the coldest part)
In general, in a metal discharge lamp such as a low-pressure mercury lamp, the enclosed metal vapor pressure changes according to the temperature of the coldest part of the lamp. The ultraviolet output of a low-pressure mercury lamp depends on the mercury vapor pressure in the arc tube when the lamp is lit. The coldest portion of the conventional low-pressure mercury lamp was located in the rightmost area (see FIG. 4A) on the U-shaped portion side. Encapsulations such as mercury tend to stay in this coldest part.

ランプ点灯時に、本来、発光に寄与するはずの封入物がU字部側の右端エリアに移動して溜まり、局部的な希ガス発光現象(アルゴンが充填されている場合はアルゴン発光現象)が発生することがある。希ガス発光が発生すると、十分な照度(紫外線出力)が得られず、ランプ照度にムラが生じて均斉度が劣化する。局部的な発光は、電極の劣化が促進され、電極物質がスパッタして電極付近の発光管内壁に付着し、全体的な照度が低下する。更に、ランプ寿命が極端に短くなる。初期点灯特性が悪い分、ランプ寿命を迎えるのも早くなる。 When the lamp is lit, the inclusions that should originally contribute to light emission move to the right end area on the U-shaped part side and accumulate, causing a local rare gas light emission phenomenon (argon light emission phenomenon when argon is filled). I have something to do. When rare gas emission occurs, sufficient illuminance (ultraviolet output) cannot be obtained, and the lamp illuminance becomes uneven and the uniformity deteriorates. In the local light emission, the deterioration of the electrode is promoted, the electrode material is sputtered and adheres to the inner wall of the arc tube near the electrode, and the overall illuminance is lowered. In addition, the lamp life is extremely short. Due to the poor initial lighting characteristics, the lamp life will be reached sooner.

この対策として、本発明者等は、最冷部の位置をU字部側の右端エリアから電極部近傍に転換することにより、ランプ寿命の改善を図ることにした。最冷部には封入物が溜まる特性がある。ランプ点灯時には、電極付近から徐々にランプ温度が上昇するが、最冷部が電極から離れたU字側にあると、本来発光に寄与する封入物が蒸発しきれず、ランプ電圧が低下してランプ照度が低下する。最冷部を電極付近に設けることにより、発光に寄与する封入物を蒸発させることで、ランプ電圧、ランプ照度の低下を抑え、ランプ寿命の長期化が期待できる。 As a countermeasure, the present inventors have decided to improve the lamp life by changing the position of the coldest portion from the right end area on the U-shaped portion side to the vicinity of the electrode portion. The coldest part has the property of accumulating inclusions. When the lamp is lit, the lamp temperature gradually rises from the vicinity of the electrodes, but if the coldest part is on the U-shaped side away from the electrodes, the inclusions that originally contribute to light emission cannot be completely evaporated, and the lamp voltage drops and the lamp drops. The illuminance decreases. By providing the coldest part near the electrode, the inclusions that contribute to light emission are evaporated, so that the decrease in lamp voltage and lamp illuminance is suppressed, and the lamp life can be expected to be extended.

最冷部の位置転換の手段として、発光管の電極部近傍に、従来のU字部側に位置する最冷部より低温の箇所を形成するため、次の構成を採用した。
構成1:反射板に関し、電極部近傍を一層冷やすため、発光管の開口率(=全開口の合計面積/反射板の面積)を部分的に高くする。例えば、反射板の電極部近傍部分の開口率を局部的に高くし冷却空気量を多くして、冷却効果を高める。
構成2:発光管に関し、他の部分に比較して、発光管の電極部近傍の管径を太くして、冷却空気に曝される表面積を広くして、冷却効果を高める。
構成3:反射板に関し、電極から遠いU字部側の開口率を部分的に低くし、又は開口を設けず、相対的に発光管U字部の冷却を防ぐ。
As a means for changing the position of the coldest portion, the following configuration was adopted in order to form a portion having a temperature lower than that of the coldest portion located on the conventional U-shaped portion in the vicinity of the electrode portion of the arc tube.
Configuration 1: With respect to the reflector, the aperture ratio of the arc tube (= total area of all openings / area of the reflector) is partially increased in order to further cool the vicinity of the electrode portion. For example, the aperture ratio in the vicinity of the electrode portion of the reflector is locally increased to increase the amount of cooling air to enhance the cooling effect.
Configuration 2: Regarding the arc tube, the tube diameter in the vicinity of the electrode portion of the arc tube is increased as compared with other parts, the surface area exposed to the cooling air is increased, and the cooling effect is enhanced.
Configuration 3: With respect to the reflector, the aperture ratio on the U-shaped portion far from the electrode is partially lowered, or no opening is provided, and the U-shaped portion of the arc tube is relatively prevented from cooling.

構成1に関して、反射板の電極部近傍の開口率を局部的に高くするには、種々の構成が採用できる。例えば、図2B(A)に示すように、反射板の電極部近傍部分に位置する開口を相互に繋げて一つの長円形開口にしてもよい。図2B(B)に示すように、反射板の電極部近傍部分に位置する開口を一層大きなサイズにしてもよい。図2Bでは、見易くするため、変形した開口は太線で描かれている。その他、反射板の電極部近傍部分に位置する開口の個数を多くしてもよい。 With respect to the configuration 1, various configurations can be adopted in order to locally increase the aperture ratio in the vicinity of the electrode portion of the reflector. For example, as shown in FIG. 2B (A), openings located near the electrode portion of the reflector may be connected to each other to form one oval opening. As shown in FIG. 2B (B), the opening located in the vicinity of the electrode portion of the reflector may be made larger in size. In FIG. 2B, the deformed opening is drawn with a thick line for easy viewing. In addition, the number of openings located near the electrode portion of the reflector may be increased.

先ず、本実施例の利点・効果を確認するための実験を行った。この実験では、発光管は、いずれの場合も、構成2の発光管の電極部近傍の管径を太くした自社製の発光管を使用した。反射板は、構成1の電極部近傍部分の開口率を局部的に高くし、構成3のU字部側に開口を設けない自社製反射板を使用したランプユニットを「実施例」とし、他社製反射板を使用したランプユニットを「従来例」として、比較実験を行った。予備実験を通して、最冷部の位置転換の手段に関し、構成2に比較して、構成1,3の反射板の開口率の相違の効果が相対的に大きいことが判明しており、反射板の相違のデータを必要としたからである。 First, an experiment was conducted to confirm the advantages and effects of this example. In this experiment, in each case, an in-house manufactured arc tube having a large diameter in the vicinity of the electrode portion of the arc tube of the configuration 2 was used as the arc tube. As for the reflector, a lamp unit using an in-house reflector that locally increases the aperture ratio in the vicinity of the electrode portion of configuration 1 and does not provide an opening on the U-shaped portion side of configuration 3 is defined as an "example", and other companies A comparative experiment was conducted using a lamp unit using a reflector made of steel as a "conventional example". Through preliminary experiments, it has been found that the effect of the difference in the aperture ratio of the reflectors of configurations 1 and 3 is relatively large as compared with the configuration 2 with respect to the means for changing the position of the coldest portion. This is because we needed the difference data.

実験に使用したランプユニット(実施例)と、比較のため使用したユニット(従来品)とのスペックは、次の通りである。 The specifications of the lamp unit (example) used in the experiment and the unit (conventional product) used for comparison are as follows.

Figure 2021034365
Figure 2021034365

表1に示すとおり、構成1の反射板の開口に関しては、実施例では、図2B(A)に示す形状を採用し、反射板の円形開口9をφ6.5 mmとし、電極部近傍部分に位置する開口9を相互に繋げて長円形開口(短軸6.5mmと長軸φ82.5mm)とした。従来品では、開口9はφ6.5 mmである。構成2の発光管に関しては、実施例と従来品共に、電極部近傍の太い管径4aはφ10mmであり、U字部側部分の相対的に細い管径4bはφ9mmである。構成3の反射板の開口に関しては、実施例では、図2Bに示すように反射板の電極から遠いU字部側(6a、6b)には開口9を設けず、U字部側に供給される冷却空気を少なくし、従来品では、φ6.5の開口を設けている。 As shown in Table 1, with respect to the opening of the reflector of the configuration 1, in the embodiment, the shape shown in FIG. 2B (A) is adopted, the circular opening 9 of the reflector is set to φ6.5 mm, and the portion near the electrode portion is formed. The located openings 9 were connected to each other to form an oval opening (short axis 6.5 mm and long axis φ82.5 mm). In the conventional product, the opening 9 is φ6.5 mm. Regarding the arc tube of the configuration 2, in both the embodiment and the conventional product, the thick tube diameter 4a near the electrode portion is φ10 mm, and the relatively thin tube diameter 4b on the U-shaped portion side portion is φ9 mm. Regarding the opening of the reflector of the configuration 3, in the embodiment, as shown in FIG. 2B, the opening 9 is not provided on the U-shaped portion side (6a, 6b) far from the electrode of the reflector, and is supplied to the U-shaped portion side. The amount of cooling air is reduced, and the conventional product has an opening of φ6.5.

(最冷部位置の転換)
図3は、本実施形態に係る低圧水銀ランプユニットの実施例の点灯中のランプ軸線方向に沿って複数の位置で測定した表面温度のデータ(〇)であり、比較例として従来品のデータ(●)も表示している。
グラフ横軸の測定位置は、下段に示すランプに示すように、電極付近を「位置1」とし、中心部を「位置3」とし、U字部付近を「位置5」とし、1と3の中間を「位置2」、3と5の中間を「位置4」としている。
(Change of coldest part position)
FIG. 3 shows surface temperature data (◯) measured at a plurality of positions along the lighting lamp axis direction of the example of the low-pressure mercury lamp unit according to the present embodiment, and is data (◯) of a conventional product as a comparative example. ●) is also displayed.
As shown in the lamp shown at the bottom, the measurement positions on the horizontal axis of the graph are 1 and 3 with the vicinity of the electrodes as "position 1", the central part as "position 3", and the vicinity of the U-shaped part as "position 5". The middle is "position 2" and the middle between 3 and 5 is "position 4".

グラフを全体的に見ると、従来品の最冷部は位置5のU字部にある。これに対して、実施例では、最冷部は位置1の電極部近傍に転換されている。更に、従来品の最冷部位置5の表面温度41℃は、実施例では開口の無い反射板を使うことにより表面温度54℃に上昇し、最冷部にならないことを確実なものとしている。また、従来品の表面温度に比較して実施例の表面温度は、相対的に低い傾向にある。両者の表面温度を平均的に見ると、15℃程度低くなっている。 Looking at the graph as a whole, the coldest part of the conventional product is in the U-shaped part at position 5. On the other hand, in the embodiment, the coldest portion is converted to the vicinity of the electrode portion at position 1. Further, the surface temperature of 41 ° C. at the coldest portion position 5 of the conventional product is raised to 54 ° C. by using a reflector having no opening in the embodiment, and it is ensured that the surface temperature does not become the coldest portion. Further, the surface temperature of the examples tends to be relatively low as compared with the surface temperature of the conventional product. The average surface temperature of both is about 15 ° C lower.

図4A及び図4Bは、最冷部の箇所を概略的に示す図である。図4Aに破線の枠で示すように、従来品の最冷部11aはU字部にあった。しかし、最冷部の位置転換後は、図4Bに破線の枠で示すように、実施例の最冷部11bは電極部近傍に変更されている。 4A and 4B are diagrams schematically showing the coldest portion. As shown by the broken line frame in FIG. 4A, the coldest portion 11a of the conventional product was in the U-shaped portion. However, after the position of the coldest portion is changed, as shown by the broken line frame in FIG. 4B, the coldest portion 11b of the embodiment is changed to the vicinity of the electrode portion.

(低圧水銀ランプユニットの応用例)
図5Aは、本実施形態に係る低圧水銀ランプユニット10aを使用して、紫外線消去型EPROM のデータ消去を行っている際の、冷却空気の流れを説明する図である。EPROM22aが収納されたトレイ22aの上方に、低圧水銀ランプユニット10aが発光面下向きで配置されている。装置全体が、フード24で覆われてる。ファン23aが稼働すると、吸気流Finと排気流Foutが発生し、低圧水銀ランプユニット10aを冷却している。
(Application example of low-pressure mercury lamp unit)
FIG. 5A is a diagram illustrating a flow of cooling air when data erasure of an ultraviolet erasing EPROM is performed using the low-pressure mercury lamp unit 10a according to the present embodiment. A low-pressure mercury lamp unit 10a is arranged above the tray 22a in which the EPROM 22a is housed so that the light emitting surface faces downward. The entire device is covered with a hood 24. When the fan 23a operates, an intake flow Fin and an exhaust flow Fout are generated to cool the low-pressure mercury lamp unit 10a.

図5Bは、本実施形態に係る他の低圧水銀ランプユニット10bの利用例を説明する図であり、(A)は装置の概略平面図であり、(B)は概略正面である。被照射品(ワーク)が収納されたトレイ22bの上方に、低圧水銀ランプユニット10bが発光面下向きで配置され、安定器32により点灯される。この応用例では、上下二段の複数個の軸流ファン23b、23cが稼働して、低圧水銀ランプユニット10bを冷却している。 5B is a diagram illustrating a usage example of another low-pressure mercury lamp unit 10b according to the present embodiment, FIG. 5B is a schematic plan view of the apparatus, and FIG. 5B is a schematic front view. A low-pressure mercury lamp unit 10b is arranged above the tray 22b in which the irradiated product (work) is housed, with the light emitting surface facing downward, and is lit by the ballast 32. In this application example, a plurality of upper and lower two-stage axial fan fans 23b and 23c are operated to cool the low-pressure mercury lamp unit 10b.

(低圧水銀ランプユニットの寿命)
表1の実施例の仕様を満たしたランプから選択した2本のサンプルを用いて、第1実施例及び第2実施例のランプユニットの寿命データを表示した。従来品も同様に表1の従来品の仕様を満たしたランプから選択した2本のサンプルの寿命データである。
(Life of low-pressure mercury lamp unit)
The life data of the lamp units of the first embodiment and the second embodiment were displayed using two samples selected from the lamps satisfying the specifications of the examples in Table 1. Similarly, the conventional product is the life data of two samples selected from the lamps satisfying the specifications of the conventional product in Table 1.

図6は、実施例の点灯時間(ランプ寿命)のデータであり、比較例として従来品のデータも表示している。ランプ寿命は、初期照度の80%を下回る時点までとした。
実施例の2本のランプは、点灯時間が6,000時間を超えても、初期照度の略80%を維持していた。これに対し、従来品は、点灯時間が200時間程度で寿命が尽きている。本実施形態に係るランプでは、従来品の30倍に近い長寿命化が実現できたことを確認した。
FIG. 6 shows the data of the lighting time (lamp life) of the embodiment, and also displays the data of the conventional product as a comparative example. The lamp life was set to a point below 80% of the initial illuminance.
The two lamps of the example maintained approximately 80% of the initial illuminance even when the lighting time exceeded 6,000 hours. On the other hand, the conventional product has reached the end of its life with a lighting time of about 200 hours. It was confirmed that the lamp according to this embodiment was able to achieve a life extension of nearly 30 times that of the conventional product.

図7は、実施例の寿命末期の照度の推移を示すデータである。比較例として従来品のデータも破線により表示している。従来品は、図6に示すように点灯時間200時間程度で寿命が尽きるが、図7に破線で示すように寿命末期の照度は6.8 mW/cm2程度であった。これに対し、実施例の2本のランプは、寿命末期においても、略8.0 mW/cm2(初期照度の80%)を維持していた。従って、実施例は、長寿命化ランプであり、且つ寿命末期においても所望の照度を維持できることが確認された。 FIG. 7 is data showing the transition of the illuminance at the end of the life of the example. As a comparative example, the data of the conventional product is also displayed by a broken line. As shown in Fig. 6, the life of the conventional product expires after a lighting time of about 200 hours, but as shown by the broken line in Fig. 7, the illuminance at the end of the life was about 6.8 mW / cm 2. On the other hand, the two lamps of the example maintained approximately 8.0 mW / cm 2 (80% of the initial illuminance) even at the end of the service life. Therefore, it was confirmed that the example was a long-life lamp and that the desired illuminance could be maintained even at the end of the life.

図8及び図9は、更に、別のランプを使って実験した、本実施形態に係る低圧水銀ランプユニットの寿命末期の照度の推移を示すデータである。比較例として従来品のデータも破線により表示している。2本のランプは、寿命末期においても、初期照度の略80%を維持していた。従って、実施例は、長寿命化ランプであり、且つ寿命末期においても所望の照度を維持できることが確認された。 8 and 9 are data showing the transition of the illuminance at the end of the life of the low-pressure mercury lamp unit according to the present embodiment, which was further tested using another lamp. As a comparative example, the data of the conventional product is also displayed by a broken line. The two lamps maintained approximately 80% of the initial illuminance even at the end of their lifespan. Therefore, it was confirmed that the example was a long-life lamp and that the desired illuminance could be maintained even at the end of the life.

[本実施形態の利点・効果]
(1)本実施形態で説明したように、反射板の電極部近傍の開口率を高くしたことにより、図3に示すように、最冷部の位置を、U字部近傍から電極部近傍へ転換することができた。
(2)発光管の電極部近傍の管径を、相対的に太く形成することにより、電極部近傍の冷却効率を高め、最冷部の位置を、U字部近傍から電極部近傍へ転換することを促進できる。
(3)図3に示すように、従来品に比較して、実施例のランプの表面温度を相対的に下げることができた。
(4)図6に示すように、最冷部の位置を転換することにより、従来品に比較して、実施例のランプ寿命を30倍近く長くすることができた。
(5)図7〜図9に示すように、最冷部の位置を転換することにより、実施例のランプは、寿命末期の照度の低下が少ないことが確認できた。
[Advantages / Effects of the present embodiment]
(1) As described in the present embodiment, by increasing the aperture ratio in the vicinity of the electrode portion of the reflector, the position of the coldest portion is moved from the vicinity of the U-shaped portion to the vicinity of the electrode portion as shown in FIG. I was able to convert.
(2) By forming the diameter of the arc tube near the electrode portion relatively large, the cooling efficiency near the electrode portion is improved, and the position of the coldest portion is changed from the vicinity of the U-shaped portion to the vicinity of the electrode portion. Can promote that.
(3) As shown in FIG. 3, the surface temperature of the lamp of the example could be relatively lowered as compared with the conventional product.
(4) As shown in FIG. 6, by changing the position of the coldest part, the lamp life of the examples could be extended by nearly 30 times as compared with the conventional product.
(5) As shown in FIGS. 7 to 9, it was confirmed that the lamp of the example had little decrease in illuminance at the end of the life by changing the position of the coldest part.

[まとめ]
以上、本発明に係る低圧水銀ランプユニットの実施形態について説明したが、本発明は、これに限定されない。本発明の技術的囲は、添付の特許請求の範囲の記載によって定められる。
[Summary]
Although the embodiment of the low-pressure mercury lamp unit according to the present invention has been described above, the present invention is not limited thereto. The technical scope of the present invention is defined by the description of the appended claims.

2a,2b:電極、 4:発光管、 6:反射板、 9:開口、 10:低圧水銀ランプユニット、 11a,11b:最冷部、 23a:ファン、 23b,23c:軸流ファン、 24:フード、 32:安定器、
2a, 2b: Electrode, 4: arc tube, 6: reflector, 9: opening, 10: low pressure mercury lamp unit, 11a, 11b: coldest part, 23a: fan, 23b, 23c: axial fan, 24: hood , 32: Stabilizer,

Claims (6)

一方の側に電極が配置され、発光管が所定のランプ軸線方向長さに所定回数U字形状に屈曲を繰り返す面照射可能な低圧水銀ランプと該発光管の発光を被照射物の方向へ反射して向ける反射板とを備えた低圧水銀ランプユニットにおいて、
前記発光管の電極部近傍の箇所に、最冷部を形成した低圧水銀ランプユニット。
A low-pressure mercury lamp capable of surface irradiation in which an electrode is arranged on one side and the arc tube repeatedly bends in a U shape a predetermined number of times in the length in the axial direction of the lamp, and the light emitted from the arc tube is reflected toward the object to be irradiated. In a low-pressure mercury lamp unit equipped with a reflector that points toward
A low-pressure mercury lamp unit having a coldest portion formed in the vicinity of the electrode portion of the arc tube.
請求項1に記載の低圧水銀ランプユニットにおいて、
前記反射板には、冷却空気が通過する複数個の開口が形成され、該反射板の電極部近傍の開口率を局部的に高くして冷却空気量を多くし、冷却効果を高ためたことを特徴とする、低圧水銀ランプユニット。
In the low-pressure mercury lamp unit according to claim 1,
A plurality of openings through which cooling air passes are formed in the reflector, and the aperture ratio in the vicinity of the electrode portion of the reflector is locally increased to increase the amount of cooling air and enhance the cooling effect. A low-pressure mercury lamp unit featuring.
請求項2に記載の低圧水銀ランプユニットにおいて、
前記反射板の電極部近傍の開口は長円形であり、それ以外の開口は円形である、低圧水銀ランプユニット。
In the low-pressure mercury lamp unit according to claim 2.
A low-pressure mercury lamp unit in which the opening near the electrode portion of the reflector is oval, and the other openings are circular.
請求項2又は3に記載の低圧水銀ランプユニットにおいて、
前記反射板の電極部近傍の開口は、それ以外の開口より大きいサイズである、低圧水銀ランプユニット。
In the low-pressure mercury lamp unit according to claim 2 or 3.
A low-pressure mercury lamp unit in which the opening near the electrode portion of the reflector is larger in size than the other openings.
請求項1〜4のいずれか一項に記載の低圧水銀ランプユニットにおいて、
前記発光管の電極部近傍の管径を相対的に太く形成したことを特徴とする、低圧水銀ランプユニット。
In the low-pressure mercury lamp unit according to any one of claims 1 to 4.
A low-pressure mercury lamp unit characterized in that the diameter of the tube in the vicinity of the electrode portion of the arc tube is formed to be relatively large.
請求項2〜5のいずれか一項に記載の低圧水銀ランプユニットにおいて、
前記反射板は、U字部近傍の開口率を部分的に低くし、又は開口を設けず、相対的に発光管U字部の冷却を防いでいる、低圧水銀ランプユニット。
In the low-pressure mercury lamp unit according to any one of claims 2 to 5.
The reflector is a low-pressure mercury lamp unit in which the aperture ratio in the vicinity of the U-shaped portion is partially lowered or no opening is provided to relatively prevent cooling of the U-shaped portion of the arc tube.
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