JP2021034147A - Electric charge particle beam device and piping for vacuum - Google Patents

Abstract

To provide an electric charge particle beam device capable of maintaining an irradiation accuracy of an electric charge particle beam, and easily piping and connecting between a vacuum pump and a lens tube, and provide a piping for a vacuum.SOLUTION: An electric charge particle beam device comprises: a chamber that irradiates a processing object with an electric charge particle; a piping for a vacuum, connected to the chamber; and a decompression device that is connected to the piping for the vacuum, and decompresses inside of the chamber via the piping for the vacuum. The chamber includes an exhaust part connected to the piping for the vacuum, and the decompression device includes a suction part connected to the piping for the vacuum. The piping for the vacuum, contains: a first piping and a second piping, which are connected to the exhaust part and are extendable/retractable in a prescribed direction; a third piping which is connected to the first piping, and in which a central axis is vertical to the prescribed direction; a fourth piping which is connected to the second piping, and in which the central axis is parallel to the third piping and is vertical to the prescribed direction; and a fifth piping and a sixth piping which are connected to the third piping and the fourth piping, respectively, and are connected to the suction part, and are extendable/retractable in the prescribed direction.SELECTED DRAWING: Figure 2

Description

The present embodiment relates to a charged particle beam device and vacuum piping.

A charged particle beam device such as a mask drawing device or a mask inspection device evacuates the inside of a lens barrel provided as an irradiation space for the charged particle beam, and irradiates the mask with the charged particle beam in a reduced pressure atmosphere inside the lens barrel. To do. At this time, a vacuum pump is connected to the lens barrel in order to evacuate the inside of the lens barrel.

JP-A-2007-165232

However, the vacuum pump is connected to the lens barrel via a vacuum pipe. Therefore, the vibration of the vacuum pump may be transmitted to the lens barrel through the vacuum pipe, which may deteriorate the irradiation accuracy of the charged particle beam. Further, when connecting the vacuum pump and the lens barrel with a vacuum pipe, there is a problem that it is difficult to align the vacuum pump and the lens barrel, and it takes time to assemble the vacuum pump and the lens barrel.

Therefore, an object of the present embodiment is to provide a charged particle beam device and a vacuum pipe capable of maintaining the irradiation accuracy of the charged particle beam and easily connecting the vacuum pump and the lens barrel to the pipe. ..

The charged particle beam device according to the present embodiment has a chamber that irradiates a charged particle to a processing target, a vacuum pipe connected to the chamber, and a vacuum pipe connected to the vacuum pipe to reduce the pressure in the chamber via the vacuum pipe. It is equipped with a device. The chamber has an exhaust section connected to the vacuum piping, and the decompression device has an intake section connected to the vacuum piping. The vacuum pipe is connected to the exhaust portion, and is connected to the first pipe and the second pipe that can expand and contract in a predetermined direction, and the third pipe and the second pipe whose central axis is perpendicular to the predetermined direction. The fourth pipe, which is connected and whose central axis is parallel to the third pipe and perpendicular to the predetermined direction, is connected to the third pipe and the fourth pipe, respectively, and is connected to the intake part, and the fifth pipe which can expand and contract in the predetermined direction respectively. And the sixth pipe.

The vacuum pipe according to the present embodiment is a vacuum pipe that connects the decompression device and the exhaust part with a pipe, and is connected to the exhaust part connected to the chamber and the exhaust part and can be expanded and contracted in a predetermined direction. The first pipe, the second pipe, the third pipe connected to the first pipe and the central axis perpendicular to the predetermined direction, the fourth pipe connected to the second pipe and the central axis perpendicular to the predetermined direction, and the third pipe. A fifth pipe that is connected to a pipe and can be expanded and contracted in a predetermined direction, a sixth pipe that is connected to a fourth pipe and can be expanded and contracted in a predetermined direction, a fifth pipe and a sixth pipe, and a decompression device Includes an intake unit to be connected.

The figure which shows the structure of the electron beam drawing apparatus of 1st Embodiment. The plan view which shows the structure of an electronic lens barrel, a vacuum pump and a vacuum pipe. The cross-sectional view which shows the structural example of the drawing apparatus by 2nd Embodiment. The cross-sectional view which shows the structural example of the drawing apparatus according to 3rd Embodiment. The figure which shows the structural example of the drawing apparatus according to 4th Embodiment.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings. The present embodiment is not limited to the present invention. The drawings are schematic or conceptual, and the ratio of each part is not always the same as the actual one. In the specification and the drawings, the same elements as those described above with respect to the existing drawings are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate.

In the present embodiment shown below, a configuration of an electron beam drawing apparatus including an electron gun that emits an electron beam will be described. However, the beam is not limited to the electron beam, and a beam using other charged particles such as an ion beam may be used. Moreover, this embodiment may be applied not only to a drawing apparatus but also to an inspection apparatus or the like.

(First Embodiment)
FIG. 1 is a diagram showing a configuration of an electron beam drawing apparatus of the first embodiment. In FIG. 1, the electron beam drawing device (hereinafter referred to as drawing device) 100 is an example of a variable molding type electron beam drawing device, and includes a drawing unit 150 and a control calculation unit 160.

The drawing unit 150 includes a drawing chamber 101 and an electronic lens barrel 102.

The electron barrel 102 as a chamber includes an electron gun 201, an illumination lens 202, a blanking deflector 212, a blanking aperture 214, a molded aperture 203, 206, a projection lens 204, a molded deflector 205, an objective lens 207, and a deflector 208. , 209, equipped with an electron gun chamber 217. The electronic lens barrel 102 is connected to the vacuum pump 117, and is evacuated and depressurized by the vacuum pump 117. The electron gun 201 is housed in the electron gun chamber 217 and generates an electron beam as charged particles.

The illumination lens 202, the projection lens 204, and the objective lens 207 are all electromagnetic lenses that change the excitation to converge the electron beam and adjust the imaging position (irradiation position). These lenses are arranged along the axial direction of the electron beam 200 from one end on the upstream side where the electron gun 201 is arranged toward the downstream side where the stage 105 is arranged.

The illumination lens 202 illuminates the molded aperture 203 with the electron beam 200 emitted from the electron gun 201. The electron beam 200 formed by the forming aperture 203 is projected onto the forming aperture 206 by the projection lens 204. The position of the molded aperture image on the molded aperture 206 is controlled by the molding deflector 205. This changes the shape and dimensions of the electron beam. The electron beam 200 that has passed through the molded aperture 206 is deflected by the deflectors 208 and 209 after the irradiation alignment is performed by the objective lens 207. Then, the deflectors 208 and 209 correct the irradiation position of the electron beam 200, and irradiate the mask 216 placed in the drawing chamber 101 with the electron beam 200.

A stage 105 is arranged inside the drawing chamber 101. The stage 105 is driven in the X, Y, and Z directions by the control unit 110. The mask 216 to be processed is placed on the stage 105. The mask 216 may be, for example, one in which a light-shielding film such as a chromium (Cr) film or a molybdenum silicon (MoSi) film is formed on a mask substrate such as quartz, and a resist film is further formed on the light-shielding film. A predetermined pattern is drawn on the resist film by the electron beam 200. The mask 216 may be, for example, mask blanks that do not yet have a pattern.

The control calculation unit 160 includes a control unit 110.

The control unit 110 includes a drawing data storage unit 110a for storing drawing data, a shot data generation unit 110b for processing drawing data to generate shot data, and a drawing control unit 110c for controlling the electronic lens barrel 102. There is. The drawing data storage unit 110a is a storage unit that stores drawing data for drawing a pattern on the mask 216. The shot data generation unit 110b divides the drawing pattern defined by the drawing data and generates shot data. The drawing control unit 110c controls to draw a drawing pattern based on the shot data generated at a predetermined position while moving the stage 105 in the longitudinal direction of the stripe region.

The vacuum pump 117 as a depressurizing device is connected to the electronic lens barrel 102 by a pipe, and decompresses the inside of the electronic lens barrel 102. The vacuum pump 117 may be, for example, a rotary pump, an ion pump, or the like. The electronic lens barrel 102 is depressurized to a high degree of vacuum by the vacuum pump 117.

The drawing apparatus 100 having such a configuration irradiates the mask 216 with an electron beam to form a desired drawing pattern on the mask 216.

FIG. 2 is a plan view showing the configurations of the electronic lens barrel 102, the vacuum pump 117, and the vacuum pipe 10. The electronic lens barrel 102 has an exhaust pipe 103 as an exhaust unit for evacuating the inside thereof. One end of the exhaust pipe 103 is connected so as to communicate with the exhaust port OP1 of the electronic lens barrel 102. The exhaust pipe 103 extends in the exhaust direction D1 of the electronic lens barrel 102, and has two exhaust ports OP2 and OP3 on both side walls thereof. The exhaust ports OP2 and OP3 are open in the D2 direction and the D3 direction in a direction substantially perpendicular to the D1 direction, respectively. The other end of the exhaust pipe 103 is closed so that the gas from the exhaust port OP1 is not discharged from other than the exhaust ports OP2 and OP3.

On the other hand, the vacuum pump 117 has an intake pipe 104 as an intake unit for sucking the gas inside the electron barrel 102. One end of the intake pipe 104 is connected so as to communicate with the opening OP4 of the vacuum pump 117. The intake pipe 104 extends in the direction opposite to the intake direction D4 of the vacuum pump 117, and has two openings OP5 and OP6 on both side walls thereof. The openings OP5 and OP6 are opened in the directions opposite to the D5 direction and the D6 direction, which are substantially perpendicular to the D4 direction, respectively. The other end of the intake pipe 104 is closed so that gas is not sucked from other than the openings OP5 and OP6.

A vacuum pipe 10 is connected between the exhaust pipe 103 of the electronic lens barrel 102 and the intake pipe 104 of the vacuum pump 117. The vacuum pipe 10 includes bellows pipes 11 to 14, rigid pipes 15 and 16, and plates PL1 and PL2.

The bellows pipe 11 as the first pipe is connected by a pipe between the exhaust port OP2 of the exhaust pipe 103 and the rigid pipe 15, and the gas exhausted from the electron barrel 102 in the D1 direction is led out in the D2 direction. The bellows tube 11 has, for example, a hollow cylindrical shape, and its side wall is formed in a bellows shape. As a result, the bellows pipe 11 can be expanded and contracted in the D2 direction, and the vibration from the vacuum pump 117 can be suppressed from being transmitted to the exhaust pipe 103.

The bellows pipe 12 as the second pipe is connected by a pipe between the exhaust port OP3 of the exhaust pipe 103 and the rigid pipe 16, and the gas exhausted from the electron barrel 102 in the D1 direction is led out in the D3 direction. The bellows tube 12 also has the same configuration as the bellows tube 11. For example, the bellows tube 12 has a hollow cylindrical shape, and its side wall is formed in a bellows shape. As a result, the bellows pipe 12 can be expanded and contracted in the D3 direction, and the vibration from the vacuum pump 117 can be suppressed from being transmitted to the exhaust pipe 103.

The bellows pipe 13 as the fifth pipe is connected by a pipe between the opening OP5 of the intake pipe 104 and the rigid pipe 15, and allows gas flowing from the electron barrel 102 through the bellows pipe 11 and the rigid pipe 15. Derived in the D5 direction. The bellows tube 13 also has the same configuration as the bellows tubes 11 and 12. For example, the bellows tube 13 has a hollow cylindrical shape, and its side wall is formed in a bellows shape. As a result, the bellows pipe 13 can be expanded and contracted in the D5 direction, and the vibration from the vacuum pump 117 can be suppressed from being transmitted to the exhaust pipe 103. Can be done.

The bellows pipe 14 as the sixth pipe is connected by a pipe between the opening OP6 of the intake pipe 104 and the rigid pipe 16, and allows gas flowing from the electron barrel 102 via the bellows pipe 12 and the rigid pipe 16. Derived in the D6 direction. The bellows tube 14 also has the same configuration as the bellows tubes 11 to 13. For example, the bellows tube 14 has a hollow cylindrical shape, and its side wall is formed in a bellows shape. As a result, the bellows pipe 14 can be expanded and contracted in the D6 direction, and the vibration from the vacuum pump 117 can be suppressed from being transmitted to the exhaust pipe 103.
These bellows tubes 11 to 14 are made of a material having high resistance to differential pressure inside and outside and excellent corrosion resistance to chemicals. For example, it is made of a metal material such as stainless steel. As a result, the bellows tubes 11 to 14 expand and contract in their respective expansion and contraction directions when the inside of the electronic lens barrel 102 is evacuated, but the exhaust path can be secured without collapsing in the radial direction.

The rigid pipe 15 as the third pipe is connected by a pipe between the bellows pipe 11 and the bellows pipe 13, and the gas from the bellows pipe 11 flows toward the bellows pipe 13. The rigid pipe 15 has, for example, a hollow cylindrical shape in which both ends thereof are closed, and has exhaust ports OP7 and OP8 on the side walls in the vicinity of both ends thereof, respectively. The central axis of the rigid tube 15 is substantially perpendicular to the expansion / contraction direction (predetermined direction) of the bellows tubes 11 to 14.

The rigid pipe 16 as the fourth pipe is connected by a pipe between the bellows pipe 12 and the bellows pipe 14, and the gas from the bellows pipe 12 flows toward the bellows pipe 14. The rigid tube 16 has the same configuration as the rigid tube 15. For example, the rigid pipe 16 has a hollow cylindrical shape in which both ends thereof are closed, and has exhaust ports OP9 and OP10 on the side walls in the vicinity of both ends thereof, respectively. The central axis of the rigid tube 16 is substantially parallel to the central axis of the rigid tube 15 and substantially perpendicular to the expansion and contraction directions of the bellows tubes 11 to 14.
These rigid pipes 15 and 16 are made of a material having high resistance to differential pressure inside and outside the rigid pipes and having excellent corrosion resistance to chemicals. For example, the rigid pipes 15 and 16 are columnar steel pipes made of a metal material such as stainless steel and having no bellows shape on the side wall. As a result, the rigid tubes 15 and 16 can secure an exhaust path with almost no deformation when the inside of the electron barrel 102 is evacuated. Further, the rigid tubes 15 and 16 can be moved in these expansion / contraction directions by the expansion / contraction of the bellows tubes 11 and 13 and the bellows tubes 12 and 14, respectively.

The plates PL1 and PL2 are provided between the rigid pipe 15 and the rigid pipe 16 and are connected to the upper surfaces of the rigid pipes 15 and 16. Here, the plates PL1 and PL2 may be connected to the lower surfaces of the rigid tubes 15 and 16, and two plates may be connected one above the other. The plates PL1 and PL2 are made of a material having rigidity that hardly expands and contracts, and fixes the distance between the rigid tube 15 and the rigid tube 16. The plates PL1 and PL2 are connected to the rigid pipe 15 and the rigid pipe 16, but are not connected to the bellows pipes 11 to 14, the exhaust pipe 103, and the intake pipe 104. Therefore, the plates PL1 and PL2 can move the rigid tubes 15 and 16 substantially in parallel in the D2 or D3 direction (D5 or D6 direction) while maintaining the distance between the rigid tube 15 and the rigid tube 16. ..

For example, when the plates PL1 and PL2 are not provided, the bellows portions of the bellows tubes 11 to 14 are contracted and hardened by evacuation. In this case, the vibration of the vacuum pump 117 is transmitted through the bellows tubes 11 to 14 and conducted to the electron barrel 102. On the other hand, by providing the plates PL1 and PL2, the contraction of the bellows portion of the bellows tubes 11 to 14 is suppressed to maintain the bellows state, and the transmission of vibration from the vacuum pump 117 to the electron barrel 102 is suppressed. Can be done.

Further, for example, the bellows tubes 11 to 14 have substantially the same configuration, but may have some variations such as manufacturing errors. In this case, when the inside of the electron barrel 102 is evacuated, the pressure due to the differential pressure inside and outside the pipe is applied to the bellows tubes 11 to 14 substantially evenly. However, if the bellows tubes 11 to 14 are uneven, the lengths of the bellows tubes 11 to 14 are different from each other when the pressure is evenly applied to the bellows tubes 11 to 14. By making the lengths of the bellows tubes 11 to 14 different in this way, the balance of the pressure applied to the bellows tubes 11 to 14 can be maintained. At this time, since the plates PL1 and PL2 fix the distance between the rigid tube 15 and the rigid tube 16, for example, when the bellows tube 11 is extended, the bellows tube 12 contracts by that amount and the bellows is expanded. When the tube 12 is extended, the bellows tube 11 is contracted by that amount. Similarly, for example, when the bellows tube 13 is extended, the bellows tube 14 is contracted by that amount, and when the bellows tube 13 is extended, the bellows tube 14 is contracted by that amount. In this way, the bellows tubes 11 to 14 maintain the balance (balance) of the applied pressure while maintaining the distance between the rigid tube 15 and the rigid tube 16.

The plates PL1 and PL2 may be provided inside the bellows tubes 11 to 14 and the rigid tubes 15 and 16. In this case, the plates PL1 and PL2 may affect the conductance of the bellows tubes 11 to 14, the rigid tubes 15 and 16, and the openings OP2, OP3, OP7 and OP9.

In the present embodiment, by attaching the plates PL1 and PL2 to the outer surfaces of the rigid tubes 15 and 16, the bellows tubes 11 to 14, the rigid tubes 15 and 16 and the openings OP2, OP3, OP5, OP6, OP7, OP8, OP9 , The distance between the rigid tube 15 and the rigid tube 16 can be maintained without affecting the conductance of the OP10.

The central axis of the exhaust pipe 103 and the central axis of the intake pipe 104 are arranged so as to substantially coincide with the axis A1. Further, the central axes of the openings OP2 and OP3 of the exhaust pipe 103, the central axes of the bellows pipes 11 and 12, and the central axes of the openings OP7 and OP9 of the rigid pipes 15 and 16 are arranged so as to substantially coincide with the axis A2. To. The bellows pipe 11 and the bellows pipe 12 have substantially the same configuration, and are arranged at positions symmetrical with respect to the axis A1 which is the central axis of the exhaust pipe 103 and the intake pipe 104.

Similarly, the central axes of the openings OP5 and OP6 of the intake pipe 104, the central axes of the bellows pipes 13 and 14, and the central axes of the openings OP8 and OP10 of the rigid pipes 15 and 16 also substantially coincide with the axes A3. Is placed in. The bellows pipe 13 and the bellows pipe 14 have substantially the same configuration, and are arranged at positions symmetrical with respect to the axis A1 which is the central axis of the exhaust pipe 103 and the intake pipe 104. Further, the central axis A4 of the rigid tube 15 and the central axis A5 of the rigid tube 16 are arranged at positions symmetrical with respect to the axis A1 and are substantially parallel to the axis A1. When the electron barrel 102 has not yet been evacuated, the distance between the rigid tube 15 and the axis A1 is approximately equal to the distance between the rigid tube 16 and the axis A1. As a result, the vacuum pipe 10 has a symmetrical configuration with respect to the axis A1.

Next, the operation of evacuation will be briefly described.

First, the vacuum pump 117 is driven to start evacuation. The gas in the electron barrel 102 is exhausted to the exhaust pipe 103 in the D1 direction through the opening OP1. The gas in the exhaust pipe 103 flows to the bellows pipes 11 and 12 through the openings OP2 and OP3 in the D2 or D3 direction, and flows to the rigid pipes 15 and 16 through the openings OP7 and OP9.

Next, the gas in the rigid pipes 15 and 16 flows to the bellows pipes 13 and 14 through the openings OP8 and OP10 in the D5 or D6 direction, and flows to the intake pipe 104 through the openings OP5 and OP6. The gas in the intake pipe 104 is sucked into the vacuum pump 117 in the D4 direction through the opening OP4 and exhausted to the outside. In this way, the gas in the electron barrel 102 is sucked by the vacuum pump 117 via the vacuum pipe 10 and exhausted to the outside of the electron barrel 102. As a result, the inside of the electron barrel 102 is evacuated to a reduced pressure state.
(Relationship between the amount of expansion and contraction of bellows tubes 11 to 14 and the expansion and contraction force)
Let F1 be the stretching force in the D2 or D3 direction applied to the bellows tube 11, and let F2 be the stretching force in the D2 or D3 direction applied to the bellows tube 12. At this time, F1 and F2 are represented by the formulas 1 and 2, respectively.

F1 = p × a1-k1 × | Δx | (Equation 1)
F2 = p × a2-k2 × | Δx | (Equation 2)

k1 and k2 indicate the spring constants of the bellows structures of the bellows tubes 11 and 12, respectively.
Δx indicates the amount of expansion and contraction (length) of the bellows tubes 11 and 12. Note that x in FIG. 2 indicates the original length when there is no differential pressure between the inside and outside of the bellows tubes 11 and 12 before evacuation. That is, Δx indicates the amount of expansion and contraction (length) from x. Since the plates PL1 and PL2 fix the distance between the rigid tube 15 and the rigid tube 16, the absolute value | Δx | of the expansion / contraction amount of the bellows tube 11 is the same as that of the bellows tube 12. In FIG. 2, the amount of contraction of the bellows tubes 11 and 12 is indicated by −Δx, and the amount of extension is indicated by + Δx.
p indicates the pressure per unit area applied to the bellows tubes 11 and 12. The pressure p indicates the differential pressure between the inside and the outside (atmospheric pressure) of the bellows tubes 11 and 12.
a1 and a2 indicate the opening areas of the bellows tubes 11 and 12, respectively. The opening area of the bellows tube 11 is the opening area of the bellows tube 11 in a cross section substantially perpendicular to the D2 or D3 direction, and may be substantially equal to, for example, the area of the opening OP2 or OP7. The opening area of the bellows tube 12 is the opening area of the bellows tube 12 in a cross section substantially perpendicular to the D2 or D3 direction, and may be substantially equal to, for example, the area of the opening OP3 or OP9.
Here, when the insides of the bellows tubes 11 and 12 are depressurized, the bellows tubes 11 and 12 contract / expand by Δx so that F1 and F2 become equal to each other. For example, when the bellows tube 11 contracts by Δx, the bellows tube 12 expands by Δx. On the contrary, when the bellows tube 11 extends by Δx, the bellows tube 12 contracts by Δx. If the bellows tubes 11 and 12 have the same configuration, Δx becomes zero when F1 = F2, but the configurations of the bellows tubes 11 and 12 usually vary, so Δx has some value. By contracting / expanding the bellows tubes 11 and 12 by Δx, the balance of the pressures F1 and F2 of the bellows tubes 11 and 12 is maintained (F1 = F2).

As described above, the vacuum pipe 10 according to the present embodiment includes the bellows pipe 11 and the bellows pipe 12 at positions that face each other substantially symmetrically with respect to the axis A1 along the direction of exhaust or intake. The bellows tube 11 and the bellows tube 12 are arranged so that the central axis substantially coincides with the axis A2. Further, the vacuum pipe 10 includes a bellows pipe 13 and a bellows pipe 14 at positions that face each other substantially symmetrically with respect to the axis A1. The bellows tube 13 and the bellows tube 14 are arranged so that the central axis substantially coincides with the axis A3. Further, the vacuum pipe 10 includes a rigid pipe 15 and a rigid pipe 16 at positions that face each other substantially symmetrically with respect to the axis A1. The bellows tubes 11 to 14 have substantially the same structure. The rigid tubes 15 and 16 also have substantially the same configuration. Therefore, the vacuum pipe 10 has a structure substantially symmetrical with respect to the axis A1 as a whole.

As a result, the expansion and contraction directions of the bellows tubes 11 to 14 are relative to the directions of the exhaust pipe 103 and the intake pipe 104 between the electron barrel 102 and the vacuum pump 117 (the direction of the axis A1 along the exhaust or intake direction). It is almost vertical. When the inside of the electron barrel 102 is evacuated, the expansion and contraction force of the bellows tubes 11 to 14 is hardly applied in the direction of the axis A1, and the tension between the electron barrel 102 and the vacuum pump 117 is pulled or reversed. Do not press on. Further, since the bellows tube 11 and the bellows tube 12 are arranged at positions that face each other substantially symmetrically with respect to the axis A1, their expansion and contraction forces are substantially offset. Since the bellows tube 13 and the bellows tube 14 are also arranged at positions that face each other substantially symmetrically with respect to the axis A1, their expansion and contraction forces are also substantially offset. As a result, the stretching force of the bellows tubes 11 to 14 is substantially not applied in the direction substantially perpendicular to the axis A1.

If the expansion / contraction direction of the bellows tube is along the direction of the axis A1 or the expansion / contraction force of the bellows tube is not symmetrical with respect to the axis A1, tension or pressure is applied between the electron barrel 102 and the vacuum pump 117. To do. In this case, the electronic lens barrel 102 may be tilted, which may adversely affect the drawing accuracy.

On the other hand, the vacuum pipe 10 according to the present embodiment does not transmit the expansion / contraction force of the bellows tubes 11 to 14 to the electronic lens barrel 102 and the vacuum pump 117, and does not tilt the electronic lens barrel 102. Therefore, it does not affect the drawing accuracy of the electronic lens barrel 102. Further, since the bellows tubes 11 to 14 have a bellows structure, it is possible to suppress the vibration of the vacuum pump 117 from being transmitted to the electron barrel 102. As a result, the drawing accuracy of the electronic lens barrel 102 can be improved.

Further, as described above, since the vacuum pipe 10 has a structure substantially symmetrical with respect to the axis A1, when the inside of the electron barrel 102 is evacuated, the pressure due to the differential pressure inside and outside the pipe is substantially applied to the bellows pipes 11 to 14. It is applied evenly. The bellows tubes 11 to 14 have substantially the same configuration, but may have some variations such as manufacturing errors. In this case, when the bellows tubes 11 to 14 are evacuated, the expansion and contraction lengths of the bellows tubes 11 to 14 are slightly different from each other, so that the pressure applied to the bellows tubes 11 to 14 becomes almost equal and balanced. it can. At this time, the pressure applied to the bellows tubes 11 to 14 is applied substantially evenly while the distance between the rigid tubes 15 and the rigid tubes 16 is maintained by the plates PL1 and PL2. Further, the plates PL1 and PL2 also serve to maintain the bellows state of the bellows portions of the bellows tubes 11 to 14 and to ensure the effect of suppressing vibration transmission from the vacuum pump 117 to the electron barrel 102.

Further, by using the bellows pipes 11 to 14 for the vacuum pipe 10, the vacuum pipe 10 and the exhaust pipe 103 or the intake pipe 104 are aligned by aligning the bellows pipes 11 to 14 with the openings OP2, OP3, OP5, OP6. Piping connection becomes easy. As a result, the time required for assembling the electronic lens barrel 102, the vacuum pump 117, and the vacuum pipe 10 can be shortened.

(Second Embodiment)
3 (A) and 3 (B) are cross-sectional views showing a configuration example of the drawing apparatus according to the second embodiment. A cross section along the line BB of FIG. 3 (A) is shown in FIG. 3 (B), and a cross section along the line CC of FIG. 3 (B) is shown in FIG. 3 (A). In the second embodiment, the vacuum pipes 10 are horizontally arranged so that the directions D1 to D6 in FIG. 2 are in substantially the same horizontal plane.

The drawing device 100 further includes a base 210, a damper 220, and a support base 230. The electronic lens barrel 102 and the damper 220 are fixed on the base 210. A support base 230 is placed on the damper 220, and the damper 220 blocks vibration from the base 210. A vacuum pipe 10 is fixed on the support base 230.

The vacuum pipe 10 is arranged sideways on the support base 230 so that the bellows pipes 11 to 14 and the rigid pipes 15 and 16 are arranged in substantially the same horizontal plane. In this case, the plates PL1a, PL1b, PL2a, PL2b are also arranged so as to extend in the substantially horizontal direction. As shown in FIG. 2, the plates PL1 and L2 may be provided only on one side surface of the rigid tubes 15 and 16, respectively, but as shown in FIGS. 3 (A) and 3 (B). , Each may be provided on both one side of the rigid tubes 15 and 16 and the opposite side. Hereinafter, the plates PL1 and PL2 provided on one side surface of the rigid tubes 15 and 16 are referred to as PL1a and PL2a, and the plates PL1 and PL2 provided on the opposite surfaces of the rigid tubes 15 and 16 are referred to as PL1b and PL2b. Call.

In the second embodiment, the vacuum pipe 10 is arranged so that the plates PL1b and PL2b are in contact with the support base 230. A smooth layer 240 having a low friction coefficient is provided between the plates PL1b and PL2b and the surface of the support base 230. The smooth layer 240 reduces the friction between the plates PL1b and PL2b and the support 230, and the rigid tubes 15 and 16 and the plates PL1a, PL2a, PL1b and PL2b in the expansion and contraction directions (D2 and D3) of the bellows tubes 11 to 14 Allows smooth movement on the support 230. The smooth layer 240 is made of a material having a low coefficient of friction, such as Teflon. As a result, when the electron barrel 102 is evacuated, the bellows tubes 11 and 12 can be contracted / expanded, and the balance of the pressures F1 and F2 of the bellows tubes 11 and 12 can be maintained.

Other configurations of the second embodiment may be the same as the corresponding configurations of the first embodiment. The configurations of the vacuum pipe 10, the electronic lens barrel 102, and the vacuum pump 117 may be the same as those of the first embodiment. The operation of the second embodiment may be the same as that of the first embodiment except that the plates PL1a, PL2a, PL1b, and PL2b move on the indicator table 230. Thereby, the second embodiment can obtain the same effect as the first embodiment.

(Third Embodiment)
4 (A) and 4 (B) are cross-sectional views showing a configuration example of the drawing apparatus according to the third embodiment. A cross section along the line BB of FIG. 4 (A) is shown in FIG. 4 (B), and a cross section of FIG. 4 (B) along the line CC is shown in FIG. 4 (A). The third embodiment includes rigid tubes 15 and 16 and guides 250 that allow the plates PL1a, PL1b, PL2a, and PL2b to move in the expansion and contraction directions of the bellows tubes 11 to 14. Other configurations of the third embodiment may be the same as the corresponding configurations of the second embodiment.

The guide 250 includes, for example, a guide rail 251 fixed on the support base 230 and a roller 252 fixed to the plates PL1b and PL2b. The guide rail 251 is provided so as to extend in the expansion / contraction direction (D2, D3) of the bellows pipes 11 to 14. The roller 252 can move along the guide rail 251 in the expansion / contraction direction of the bellows tubes 11-14.

In the third embodiment, the bellows tubes 11 and 12 can be contracted / expanded by the roller 252 moving on the guide rail 251 to maintain the balance of the pressures F1 and F2 of the bellows tubes 11 and 12. it can.

Other configurations of the third embodiment may be the same as the corresponding configurations of the second embodiment. The configurations of the vacuum pipe 10, the electronic lens barrel 102, and the vacuum pump 117 may be the same as those of the first embodiment. Further, the operation of the third embodiment may be the same as the operation of the second embodiment except that the roller 252 fixed to the plates PL1b and PL2b moves on the guide rail 251. Thereby, the third embodiment can obtain the same effect as the first or second embodiment.

(Fourth Embodiment)
5 (A) and 5 (B) are diagrams showing a configuration example of the drawing apparatus according to the fourth embodiment. 5 (A) shows a side surface of the drawing apparatus, and FIG. 5 (B) shows a cross section along the line BB of FIG. 5 (A). The vacuum pipe 10 according to the fourth embodiment is arranged vertically so that the expansion and contraction directions of the bellows pipes 11 to 14 are substantially vertical. Guides 330a, 330b, 340a, 340b correspond along the plates PL1a, PL1b, PL2a, PL2b, respectively, to allow the rigid tubes 15, 16 and the plates PL1a, PL1b, PL2a, PL2b to move substantially vertically. It is provided as follows. The guides 330a, 330b, 340a, and 340b each have a support column 331 fixed to the support base 230 and a ring 332 fixed to the plates PL1a to PL2b into which the support column 331 is inserted. The guides 330a, 330b, 340a, and 340b can move the plates PL1a, PL1b, PL2a, and PL2b by the ring 332 sliding the support column 331 in the substantially vertical direction.

However, when the vacuum pipe 10 is arranged in the vertical direction, even if the inside of the electron barrel 102 is not decompressed, the bellows are due to the weight of the rigid tubes 15 and 16 and the plates PL1a, PL1b, PL2a and PL2b. The tubes 11 and 13 contract and the bellows tubes 12 and 14 expand. That is, the rigid tubes 15 and 16 and the plates PL1a, PL1b, PL2a, PL2b move vertically downward due to their own weight, and an offset occurs.

Therefore, in the fourth embodiment, the spring structures 310 and 320 as elastic members are provided between the vacuum pipe 10 and the support base 230. The spring structures 310 and 320 support the rigid tubes 15 and 16 so that the lengths of the bellows tubes 11 to 14 in the expansion and contraction direction are substantially equal to each other when the inside of the electron barrel 102 is not depressurized. Thereby, the offsets of the rigid tubes 15 and 16 and the plates PL1a, PL1b, PL2a and PL2b can be canceled. Other configurations of the fourth embodiment are similar to the corresponding configurations of the second or third embodiment. The elastic member may be a member that can elastically support the vacuum pipe 10 such as rubber or a damper.

Even if the vacuum pipe 10 is arranged vertically as in the fourth embodiment, the effect of the present embodiment is not lost. Further, by arranging the vacuum pipe 10 vertically, the installation area of the drawing device can be reduced.

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, as well as in the scope of the invention described in the claims and the equivalent scope thereof.

100 Drawing device, 150 Drawing unit, 101 Drawing room, 102 Electron beam, 103 Exhaust pipe, 117 Vacuum pump, 10 Vacuum pipe, 11-14 Bellows tube, 15,16 Rigid tube, PL1, PL2 plate, 240 Smooth layer , 250, 330a, 330b, 340a, 340b guide, 310, 320 spring structure

Claims (5)

A chamber that irradiates the object to be processed with charged particles,
The vacuum pipe connected to the chamber and
A decompression device which is connected to the vacuum pipe and decompresses the inside of the chamber through the vacuum pipe is provided.
The chamber has an exhaust section connected to the vacuum pipe.
The decompression device has an intake unit connected to the vacuum pipe.
The vacuum pipe is
A first pipe and a second pipe that are connected to the exhaust unit and can expand and contract in a predetermined direction,
A third pipe that is connected to the first pipe and whose central axis is perpendicular to the predetermined direction,
A fourth pipe that is connected to the second pipe and whose central axis is parallel to the third pipe and perpendicular to the predetermined direction.
A charged particle beam device including a fifth pipe and a sixth pipe which are connected to the third pipe and the fourth pipe and are connected to the intake unit and can be expanded and contracted in a predetermined direction, respectively. The central axis of the first pipe and the central axis of the second pipe are substantially the same.
The central axis of the fifth pipe and the central axis of the sixth pipe are substantially the same.
The first pipe and the second pipe have substantially the same configuration and are arranged symmetrically with respect to a predetermined axis.
The charged particle beam device according to claim 1, wherein the fifth pipe and the sixth pipe have substantially the same configuration and are arranged at symmetrical positions with respect to the predetermined axis. The charged particle beam according to claim 1 or 2, further provided with a plate provided between the third pipe and the fourth pipe and fixing the distance between the third pipe and the fourth pipe. apparatus. The charged particle beam device according to claim 3, wherein the plate is movable in the predetermined direction. A vacuum pipe that connects the decompression device and the exhaust unit.
The exhaust unit connected to the chamber and
A first pipe and a second pipe that are connected to the exhaust unit and can expand and contract in a predetermined direction,
A third pipe connected to the first pipe and whose central axis is perpendicular to the predetermined direction,
A fourth pipe connected to the second pipe and whose central axis is perpendicular to the predetermined direction,
A fifth pipe that is connected to the third pipe and can expand and contract in the predetermined direction,
A sixth pipe that is connected to the fourth pipe and can expand and contract in the predetermined direction,
A vacuum pipe including an intake unit connected to the fifth pipe and the sixth pipe and connected to the decompression device.