JP2021032822A - Inspection device irregularity part evaluation system and inspection device irregularity part evaluation method - Google Patents

Abstract

To provide an inspection device irregularity part evaluation system and inspection device irregularity part evaluation method that can make an estimation of an irregularity part of an inspection device easy.SOLUTION: An irregularity part evaluation system 1 of an inspection device T comprises: a sensor unit 2 that has a first displacement sensor 2a, a load cell 2b, a second displacement sensor 2c and a third displacement sensor 2d as three or more sensor parts detecting an action of the inspection device T and an action of an analyte the inspection device T inspects as information, in which the pieces of information are respectively different; and a processing device 3 that processes information SD, d1, d2 and F the sensor device 2 detects. The processing device 3 includes: a correlation coefficient calculation unit 3a1 that obtains a correlation coefficient of the pieces of information themselves the two sensor parts detect about all the combinations of two sensor parts among the sensor parts; an index calculation unit 3a2 that obtains a difference between a correlation coefficient and a corresponding normal value for each of obtained all correlation coefficients as an index; and a rank calculation unit 3a3 that ranks the index.SELECTED DRAWING: Figure 1

Description

The present invention relates to an abnormality location evaluation system for an inspection device and an abnormality location evaluation method for an inspection device.

The inspection device includes a controller and an output unit that outputs an output to the sample in response to an input from the controller, and inspects the performance and durability of the sample. The controller feeds back the output of the output unit, controls the inspection device according to the inspection conditions predetermined for the sample, and gives the output to the sample.

As such an inspection device, for example, there is a vibration inspection device, and the vibration inspection device includes a vibrating device as an output unit, and vibrates a sample such as a mechanical part or a damper with the vibrating device. In this case, the output of the vibration inspection device is a physical quantity such as a load, speed or displacement given to the sample, and when an input instructing the operation amount is given from the controller, the vibration inspection device gives the sample a load, speed or the load according to the inspection conditions. Displacement is given (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2019-032261

If an abnormality occurs in such an inspection device, a normal sample cannot be inspected. Therefore, it is necessary to identify the abnormal part and then repair the inspection device or replace parts. In order to repair the inspection device or replace parts in this way, it is necessary to identify the abnormal part of the inspection device.

Since many parts are used in the inspection device, it takes a lot of time to identify the abnormal part unless the work of hitting the abnormal part in advance and confirming the presence or absence of the abnormality of the part is performed.

In order to estimate the abnormal part, it is not impossible to analyze the test result data of the sample, but the estimation of the abnormal part by the data analysis requires the advanced knowledge of a skilled operator, and everyone can do it. It is not possible to estimate the abnormal part.

Therefore, an object of the present invention is to provide an abnormality part evaluation system of an inspection device and an abnormality part evaluation method of the inspection device, which can easily estimate an abnormality part of the inspection device.

In order to achieve the above object, the abnormality location evaluation system of the inspection device of the present invention has three or more sensor units having different information for detecting the operation of the inspection device and the operation of the sample to be inspected by the inspection device as information. A sensor device and a processing device that processes information detected by the sensor device are provided, and the processing device obtains a correlation coefficient between the information detected by the two sensor units for all combinations of the two sensor units. It is provided with a correlation coefficient calculation unit, an index calculation unit that obtains the difference between the correlation coefficient and the corresponding normal value as an index for each of the obtained correlation coefficients, and a ranking calculation unit that ranks the indexes.

Further, the method for evaluating an abnormal part of the inspection device according to the present embodiment includes a sensing process for detecting three or more different pieces of information using the operation of the inspection device and the operation of the sample to be inspected by the inspection device as information, and a sensing process for detecting the abnormality. The difference between the correlation coefficient calculation process for obtaining the correlation coefficient between information for all combinations of two pieces of information and the corresponding normal value for each obtained correlation coefficient is obtained as an index. It has an index calculation process and a ranking calculation process for ranking each index.

In the abnormality part evaluation system and the abnormality part evaluation method of the inspection device configured as described above, the index that takes a larger value as the correlation coefficient deviates from the normal value is ranked, so that the operator of the inspection device can use it. You can rank and recognize the indicators that you should pay attention to. Further, by using the index obtained by the abnormality part evaluation system and the abnormality part evaluation method of the inspection device configured in this way, the operator of the inspection device can easily operate the inspection device from the relationship between the high-ranking index and the installation position of the sensor unit. You can hit the abnormal part.

Further, the abnormality location evaluation system of the inspection device may include an abnormality location estimation unit in which the processing apparatus estimates the abnormality location of the inspection device based on the index. According to the abnormal part evaluation system of the inspection device configured in this way, the abnormal part is automatically estimated, so that the operator of the inspection device can recognize the estimated abnormal part, so that the operator can identify the abnormal part. It will be even easier.

Further, in the abnormality location evaluation system of the inspection device, the correlation coefficient calculation unit may obtain the frequency distribution of the information between the two sensor units, and may obtain the correlation coefficient based on the obtained frequency distribution. According to the abnormality location evaluation system of the inspection device configured in this way, the correlation coefficient indicating the degree of matching of the information waveforms can be obtained by eliminating the influence of the phase shift, so that a stable index can always be obtained. , A good index can be obtained for identifying the abnormal part.

In addition, the abnormality location evaluation system of the inspection device may set the average value of a plurality of correlation coefficients obtained when a normal sample is inspected by the normal inspection device obtained in the past as a normal value. According to the abnormal part evaluation system of the inspection device configured in this way, the index obtained when the sample is inspected by the abnormal inspection device becomes a larger value as it deviates from the average value, so that the index is an abnormal value. It becomes easier for the operator of the inspection device to judge whether or not it is.

Then, the inspection device may be a vibration inspection device, and the sensor device may detect the displacement of the inspection device, the total displacement of the sample, the partial displacement of the sample, and the load acting on the sample as information. According to the abnormality location evaluation system of the inspection device configured in this way, the operator of the inspection device determines where the abnormality is in the inspection device, which is a vibration inspection device, based on the positional relationship of the sensor unit and the obtained index. Can be estimated concretely.

According to the abnormality location evaluation system of the inspection device and the abnormality location evaluation method of the inspection device of the present invention, it is possible to easily estimate the abnormality location of the inspection device.

It is a block diagram of the evaluation system of the inspection apparatus in one Embodiment. It is a side view of an inspection apparatus. It is a block diagram of a processing apparatus. It is a figure which showed the waveform of the displacement of an inspection apparatus. It is the figure which showed the displacement of the normalized inspection apparatus, and the waveform of the load of a damper. It is a figure which showed the histogram of the displacement of the normalized inspection apparatus and the load of a damper. It is a table showing the relationship between the magnitude of the index and the abnormal part. It is a flowchart which showed an example of the processing procedure in a processing apparatus.

Hereinafter, the present invention will be described based on the embodiments shown in the figure. As shown in FIG. 1, the abnormality location evaluation system 1 of the inspection device T according to the embodiment is a sensor device 2 that detects the operation of the inspection device T and the operation of the damper D as a sample to be inspected by the inspection device T as information. And a processing device 3 that processes the information detected by the sensor device 2, and obtains an index used for estimating an abnormal portion of the inspection device T.

Hereinafter, each part of the abnormality location evaluation system 1 will be described in detail. The damper D as a sample is a damper that serves as a reference for inspection of the inspection device T when an index is obtained by the abnormality location evaluation system 1. Then, when an abnormality is found in the inspection device T, the abnormality location evaluation system 1 of the inspection device T applies a predetermined vibration to the damper D to obtain an index useful for identifying the abnormality location of the inspection device T.

The damper D, which is a sample in the present embodiment, is a telescopic type damper including a cylinder 5 and a rod 6 that goes in and out of the cylinder 5, and the rod 6 is displaced in the axial direction with respect to the cylinder 5. Demonstrates damping force when expanding and contracting.

On the other hand, as shown in FIG. 2, the inspection device T is a vibration inspection device that vibrates the damper D, which is a sample, and includes a controller C and a vibration exciter E. The exciter E is provided on the gantry 10, a holding portion 11 provided on the gantry 10 and movable in the left-right direction in FIG. 2 to hold one end of the damper D, and the other end of the damper D provided on the gantry 10. It is provided with an actuator 13 which is connected to and gives vibration to the damper D.

The actuator 13 is movably inserted into the cylinder 13a, a piston (not shown) that is movably inserted into the cylinder 13a to partition the inside of the cylinder 13a into an extension side chamber and a compression side chamber, and the actuator 13 is movably inserted into the cylinder 13a. It includes a rod 13b connected to a piston and a servo valve 13c that selectively feeds pressure oil supplied from a pump (not shown) to the extension side chamber and the compression side chamber.

Although not shown in detail, the servo valve 13c has a hollow housing, a spool that is movably inserted into the housing, a solenoid that drives the spool, a spring that positions the spool in a neutral position, and an external device. It is equipped with a drive circuit that receives input and drives the solenoid. The solenoid can change the thrust applied to the spool according to the amount of current supplied from the drive circuit, and can adjust the position of the spool. The servo valve 13c has a position of supplying pressure oil to the extension side chamber, a position of supplying pressure oil to the compression side chamber, and a position of shutting off the supply of pressure oil to both of them, depending on the position of the spool. At the position where the pressure oil is supplied to the extension side chamber or the compression side chamber, the flow rate is adjusted according to the amount of current supplied to the solenoid.

In the present embodiment, when the servo valve 13c receives the current command I as an input, the thrust of the solenoid is adjusted to adjust the position of the spool with respect to the housing, and the input of the extension side chamber and the compression side chamber is instructed. The pressure oil of the flow rate indicated by the input is supplied to the chamber. The actuator 13 expands and contracts by expanding the chamber in which the pressure oil is supplied from the servo valve 13c among the extension side chamber and the compression side chamber and reducing the chamber in which the pressure oil is not supplied. In this way, when the vibrator E receives the input from the controller C, the actuator 13 is expanded and contracted to vibrate one end of the damper D, and the damper D is vibrated. The drive circuit includes a current sensor that detects the current flowing through the solenoid, feeds back the current detected by the current sensor, and applies the current to the solenoid according to the current command I input from the controller C. The drive circuit may be included in the controller C instead of the servo valve 13c side.

The controller C gives the actuator 13 a current command I that expands and contracts the actuator 13 in the exciter E with a sine wave of a predetermined cycle as an input when evaluating an abnormal portion of the inspection device T. In this way, the inspection device T drives the actuator 13 to repeatedly apply a sinusoidal vibration to the damper D, which is a sample.

The current command I that changes the output of the inspection device T with such a sine wave having a predetermined cycle may be stored in the controller C in advance, or may be stored in the controller C at the time of inspection. The predetermined cycle can be set arbitrarily.

As described above, in the present embodiment, since the inspection device T is a vibration inspection device, the operation of the inspection device T is the load, speed, and displacement exerted by the actuator 13 in the exciter E. Further, the damper D is subjected to vibration by the operation of the inspection device T, and the damper D expands and contracts. Therefore, the operation of the damper D is the load exerted by the expansion and contraction of the damper D, the speed of expansion and contraction, and the displacement.

Subsequently, the sensor device 2 detects the operation of the inspection device T and the operation of the sample damper D when inspecting the damper D by the current command I as an input from the controller C as information. In the present embodiment, the sensor device 2 is installed between the first displacement sensor 2a for detecting the displacement of the actuator 13 in the expansion / contraction direction and the damper D, and is a load which is a damping force exerted by the damper D. A load cell 2b for detecting the above, a second displacement sensor 2c for detecting the total displacement of the damper D in the expansion / contraction direction, and a third displacement sensor 2d for detecting the displacement of the rod 6 with respect to the cylinder 5 of the damper D in the expansion / contraction direction are provided. ing. As described above, the sensor device 2 of the present embodiment detects the displacement of the load, speed and displacement of the exciter E as the operation of the inspection device T as information, and also detects the load, speed and the operation of the damper D. Among the displacements, the total expansion / contraction displacement of the damper D, the displacement of the expansion / contraction stroke due to the relative movement of the rod 6 and the cylinder 5, and the load exerted by the damper D are detected. Therefore, the first displacement sensor 2a functions as a sensor unit that detects displacement, which is one of the operations of the inspection device T, as information. The load cell 2b functions as a sensor unit that detects a load, which is one of the operations of the damper D, as information. Further, the second displacement sensor 2c and the third displacement sensor 2d function as a sensor unit that detects displacement, which is one of the operations of the damper D, as information. The first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d detect different information from each other. The second displacement sensor 2c and the third displacement sensor 2d detect displacement, which is one of the operations of the damper D, but the second displacement sensor 2c detects that the damper D expands and contracts due to the load received from the inspection device T. The relative displacement of the rod 6 and the cylinder 5 and the total displacement of the damper D including the amount of compression deformation of the rod 6 and the cylinder 5 are detected by the third displacement sensor 2d. It is a partial displacement of D. Therefore, the information detected by the second displacement sensor 2c and the third displacement sensor 2d is the same as the category in terms of type, but the detection target is also different, so that the information is different from each other.

As described above, in the present embodiment, the sensor device 2 includes four sensor units that detect information different from each other, and detects the operation of the inspection device T and the operation of the damper D as information. The sensor device 2 detects one or more of the load, speed, and displacement as the operation of the inspection device T as information, and outputs information of one or more categories of the load, speed, and displacement as the operation of the damper D. Two or more may be detected.

Then, the sensor device 2 determines the detected displacement SD of the inspection device T, the detected load F of the damper D, the detected total displacement d1 of the damper D, and the detected relative displacement d2 between the rod 6 and the cylinder 5. The information is input to the processing device 3. The inspection device T may make a CSV file or the like that collects the information detected by the sensor device 2 and input the information to the processing device 3.

As shown in FIG. 3, the processing unit 3 is a computer system, and stores the arithmetic processing unit 3a and the program required for control and processing of the processing unit 3, and the arithmetic processing unit 3a is required to execute the program. A storage device 3b that provides a storage area, an interface 3c that receives signals from a first displacement sensor 2a, a load cell 2b, a second displacement sensor 2c, and a third displacement sensor 2d, and an input device 3d such as a keyboard or a mouse are displayed. It includes a device 3e, an auxiliary storage device 3f, a printer 3g as a printing device, and a bus 3h that connects these devices so as to be able to communicate with each other.

The arithmetic processing unit 3a is a CPU or the like that performs arithmetic processing, controls each part of the processing apparatus 3 by executing an operating system and other programs, and outputs an index based on displacement SD, d1, d2, and load F. Perform the required processing. The storage device 3b includes a ROM and a RAM, and also includes a hard disk. The interface 3c converts analog signals input from the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d into digital signals that can be read by the arithmetic processing device 3a. The display device 3e is provided with a screen for displaying data or the like processed by the arithmetic processing unit 3a, and is, for example, a liquid crystal display or the like. The auxiliary storage device 3f is composed of a computer-readable recording medium and a drive device for the storage medium, and the storage medium is a magnetic disk, a magneto-optical disk, an optical disk, a semiconductor memory, or the like. Further, the processing device 3 includes the displacement SD, d1, d2 and the load F values, the displacement SD, d1, d2 and the load detected by the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c and the third displacement sensor 2d. The correlation coefficient and index obtained based on F are displayed on the screen of the display device 3e so that they can be viewed, and the application program for obtaining the correlation coefficient and index is stored in the storage device 3b. When the processing device 3 receives the information from the inspection device T, the processing device 3 may be able to communicate with the inspection device T, or the processing device 3 may receive the information using the auxiliary storage device 3f.

Then, in the present embodiment, the arithmetic processing device 3a of the processing device 3 executes and executes a program for processing the displacement SD, d1, d2 and the load F as information to obtain the correlation coefficient and the index. The correlation coefficient calculation unit 3a1 for obtaining the correlation coefficient, the index calculation unit 3a2 for obtaining the index from the obtained correlation coefficient, the ranking calculation unit 3a3 for ranking the obtained indexes, and the inspection device T based on the ranking of the indexes. The abnormal part estimation unit 3a4 for estimating the abnormal part of the above is realized. The processing device 3 has two sensor units that are combined for all combinations of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d, which are the sensor units of the sensor device 2. Obtain the correlation coefficient between the detected information.

Hereinafter, the processing of the processing apparatus 3 will be described in detail. In the present embodiment, the sensor device 2 includes four sensor units, a first displacement sensor 2a, a load cell 2b, a second displacement sensor 2c, and a third displacement sensor 2d. When selecting a combination of two sensor units from four sensor units, there are six ways to combine the two sensor units. Therefore, the processing device 3 may obtain six correlation coefficients, but in the present embodiment, the sample is a single-rod type damper D and has different characteristics at the time of extension and at the time of contraction. Regarding the displacement SD of the actuator 13, the extension direction is positive, the contraction direction of the damper D is positive, the load generated when the damper D is contracted is positive, and among the displacements SD, d1, d2 and the load F having positive values. The correlation coefficient between the two pieces of information is obtained for all 6 combinations, and the correlation coefficient between the two pieces of displacement SD, d1, d2 and the load F having positive values is obtained for all 6 combinations. I am doing it. Therefore, in the present embodiment, the correlation coefficient calculation unit 3a1 obtains the correlation coefficient between the information for 12 combinations.

The correlation coefficient calculation unit 3a1 will be described in detail. The information detected by two of the four sensor units of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d is determined by the inspection device T on the damper D in advance. If the inspection device T is normal and the damper D is not abnormal, it should show a certain correlation.

On the other hand, when there is an abnormality in the inspection device T, the correlation between the information detected by two of the four sensor units of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c and the third displacement sensor 2d is Sensors that are different from the normal correlation can be found. It is considered that there is an abnormal part between the sensor units showing a different correlation from the usual one because of the relationship between the inspection device T and the damper D which is the sample, which show a different correlation from the usual one. Regarding the combination of all the sensor units when the two sensor units are extracted from the four sensor units of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d and combined in this way, the sensor unit If the correlation coefficient according to the information detected by is obtained and the difference between the obtained 12 kinds of correlation coefficients and the normal correlation coefficient is obtained as an index, it is very difficult to estimate the abnormal part of the inspection device T. Useful indicators are obtained.

Therefore, in the present embodiment, the correlation coefficient calculation unit 3a1 selects two sensor units from the four sensor units of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d. The correlation coefficient is obtained for all of the six combinations of. Further, when the correlation coefficient calculation unit 3a1 obtains the correlation coefficient between the information detected by the two combined sensor units, the actuator 13 of the inspection device T of the present embodiment differs between when it is extended and when it is contracted. Since it has characteristics, the correlation coefficients are obtained for both the positive value information and the negative value information as described above, so a total of 12 correlation coefficients are obtained.

The correlation coefficient is a value that serves as a measure of whether the information detected by the two sensor units correlates with each other, and the closer the value is to 1, the higher the correlation between the information. In the present embodiment, the correlation coefficient calculation unit 3a1 has the displacement SD, displacement d1, and displacement detected by the four sensor units of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d, respectively. Two pieces of information are extracted from the four pieces of information d2 and the load F, and the correlation coefficient is obtained for each of the positive value and the negative value for each of the six combinations of information.

Specifically, for example, the correlation coefficient calculation unit 3a1 determines the correlation coefficient between the displacement SD of the actuator 13 and the load F of the damper D detected by the combination of the first displacement sensor 2a and the load cell 2b. Find both positive and negative values, respectively. When the inspection device T applies a sine wave for three cycles to the damper D in estimating the abnormal portion of the inspection device T, the displacement SD detected by the first displacement sensor 2a draws a waveform as shown in FIG. Since the actuator 13 is expanded and contracted in the first cycle and the last cycle of this waveform for the purpose of avoiding the sudden start and stop of the actuator 13, the correlation coefficient calculation unit 3a1 performs this extra first and last cycle. The data corresponding to the wave for one cycle is cut off, and the correlation coefficient is obtained using only the data in the waveform for three stable cycles. Similarly, for the load F of the damper D, the load F exerted by the damper D vibrated by the actuator 13 is detected by the load cell 2b, and the waveform of the obtained load F corresponds to the wave of the first and last cycles. The data is cut off and only the data included in the waveform for the middle three cycles is used to calculate the correlation coefficient.

Then, the correlation coefficient calculation unit 3a1 extracts and extracts only the data having a positive value in the waveform for three cycles of displacement SD and the data having a positive value in the waveform for three cycles of load F. The correlation coefficient of both the displacement SD and the load F data is obtained, and the data having a negative value in the waveform for three cycles of the displacement SD and the data having a negative value in the waveform for the three cycles of the load F are obtained. Only is extracted, and the correlation coefficient of both the extracted displacement SD and load F data is obtained. When the correlation coefficient calculation unit 3a1 obtains the correlation coefficient between the displacement SD and the load F, the displacement SD and the load F are normalized and converted into data having a value from the maximum value 1 to the minimum value -1.

When the displacement SD and the load F are normalized, for example, as shown in FIG. 5, the waveform Wsd of the displacement SD and the waveform Wf of the load F are obtained. The correlation coefficient Rpsd_f is obtained by dividing the covariance of the waveform Wsd and the data group on the positive side of the waveform Wf by the product of each standard deviation of the data group on the positive side of the waveform Wsd and the waveform Wf, and the correlation coefficient Rpsd_f is obtained. The correlation coefficient Rmsd_f may be obtained by dividing the covariance between the waveform Wsd and the data group on the positive side of the waveform Wf by the product of the standard deviations of the data groups on the negative side of the waveform Wf. The correlation coefficient Rpsd_f thus obtained is a value that serves as a measure of the correlation between the positive side of the waveform Wsd of the displacement SD and the positive side of the waveform Wf of the load F, and the correlation coefficient Rmsd_f is the displacement. It is a value that serves as a measure showing the correlation between the negative side of the SD waveform Wsd and the negative side of the load F waveform Wf.

As described above, the correlation coefficients Rpsd_f and Rmsd_f can be obtained, but since the damper D exerts a damping force depending on the expansion / contraction speed with respect to the speed and has a hysteresis, the waveform Wsd of the displacement SD of the actuator 13 On the other hand, there is a phase shift from the waveform Wf of the load F exerted by the damper D. If there is a phase shift, the correlation between the displacement SD and the load F becomes low even if the shapes of the waveform Wsd and the waveform Wf match well.

Therefore, the correlation coefficient calculation unit 3a1 of the present embodiment sets a plurality of sections by dividing the range from -1 to 1 by a bin having a predetermined width, and sets a positive value of the displacement SD and the load F for each section. Find the frequency distribution of positive values of. When the frequency distribution is graphed with the frequency on the vertical axis and the value on the horizontal axis, a histogram Hsd of the displacement SD and a histogram Hf of the load F can be obtained as shown in FIG.

Then, the correlation coefficient calculation unit 3a1 sets the standard deviation of the frequency of the histogram Hsd from 0 to 1 of the displacement SD in the graph shown in FIG. 6 as σpsd, and sets the standard deviation of the frequency of the load F in the graph shown in FIG. 6 as σpsd. Let σpf be the standard deviation of the frequencies of the histogram Hf from 0 to 1, and Spsd_f be the covariance between the frequencies of the histogram Hsd from 0 to 1 of the displacement SD and the frequencies of the histogram Hf from 0 to 1 of the load F. The correlation coefficient Rpsd_f = Spsd_f / (σpsd × σpf) is calculated and obtained.

Further, the correlation coefficient calculation unit 3a1 sets the standard deviation of the frequency of the histogram Hsd from -1 to 0 of the displacement SD in the graph shown in FIG. 6 as σmsd, and sets the standard deviation of the frequency in the graph shown in FIG. Let σmf be the standard deviation of the frequency of the histogram Hf from -1 to 0, and the covariance between the frequency of the histogram Hsd from -1 to 0 of the displacement SD and the frequency of the histogram Hf from -1 to 0 of the load F. Assuming that it is Smsd_f, the correlation coefficient Rmsd_f = Smsd_f / (σmsd × σmf) is calculated and obtained. In order to obtain the covariance, it is necessary that the number of data of the frequency of the histogram Hsd from 0 to 1 of the displacement SD and the number of data of the frequency of the histogram Hf from 0 to 1 of the load F are the same. , The number of data used to obtain the correlation coefficient Rpsd_f may be determined.

Since the values of the normalized displacement SD and the load F take values from -1 to 1, if the division is set from -1 to 1 and the frequency distribution of the displacement SD and the load F is obtained, the phase is reflected. Although it is not done, a frequency distribution that directly reflects the appearance degree of the values of the displacement SD and the load F can be obtained. Therefore, when the correlation coefficient calculation unit 3a1 obtains the correlation coefficients Rpsd_f and Rmsd_f between the frequency distributions of the displacement SD and the load F as described above, the waveforms Wsd and the waveform are also obtained from the displacement SD and the load F having a phase shift. A correlation coefficient indicating the degree of coincidence of the shapes of Wf is obtained.

If the phase shift does not have a significant effect on the index for estimating the abnormal part of the inspection device T, the normalized displacement SD and the load F are used as they are without obtaining the frequency distribution as described above. It is also possible to obtain the correlation coefficients Rpsd_f and Rmsd_f of the displacement SD and the load F by using it.

Further, in the present embodiment, the correlation coefficient calculation unit 3a1 describes the phase of the correlation coefficient Rpsd_f between the positive value of the displacement SD and the positive value of the load F, the negative value of the displacement SD, and the negative value of the load F. The relation number Rmsd_f is calculated, but if there is no direction in the movement of the sample, or if there is no actual benefit in obtaining the correlation coefficient on both the positive and negative sides even if there is direction, the displacement SD is not divided into positive and negative. Only one correlation coefficient may be obtained in combination with the load F.

Then, the correlation coefficient calculation unit 3a1 is used for all the combinations of the remaining five sensor units, that is, the combination of the first displacement sensor 2a and the second displacement sensor 2c, the first displacement sensor 2a and the third displacement sensor. The combination with 2d, the combination of the second displacement sensor 2c and the third displacement sensor 2d, the combination of the load cell 2b and the second displacement sensor 2c, and the combination of the load cell 2b and the third displacement sensor 2d are also described above. The same process as the process of obtaining the correlation coefficients Rpsd_f and Rmsd_f of both the positive and negative values of the displacement SD and the load F in the combination of the first displacement sensor 2a and the load cell 2b is performed.

Therefore, the correlation coefficient calculation unit 3a1 sets the positive value correlation coefficient Rpsd_d1 of the displacement SD and the displacement d1 and the negative value correlation coefficient Rmsd_d1 as the positive value correlation coefficient Rpsd_d2 of the displacement SD and the displacement d2. Negative value correlation coefficient Rmsd_d2, positive value correlation coefficient Rpd1_d2 of displacement d1 and displacement d2 and negative value correlation coefficient Rmd1_d2, and positive value correlation coefficient Rpd1_f of displacement d1 and load F. Negative value correlation coefficient Rmd1_f, further, positive value correlation coefficient Rpd2_f of displacement d2 and load F and negative value correlation coefficient Rmd2_f are the same as the process of obtaining the correlation coefficients Rpsd_f and Rmsd_f, respectively. Obtained by the processing of.

Subsequently, the index calculation unit 3a2 obtains the difference between the correlation coefficient and the corresponding normal value for each total correlation coefficient obtained by the correlation coefficient calculation unit 3a1 as an index. That is, for example, the index calculation unit 3a2 obtains the difference between the correlation coefficient Rpsd_f of the positive value of the displacement SD and the load F by subtracting the normal value Npsd_f corresponding to the correlation coefficient Rpsd_f from the correlation coefficient Rpsd_f. Let the absolute value of the difference be the index Ipsd_f. The normal value Npsd_f is obtained by the above-described processing for the positive values of the displacement SD and the load F obtained by the first displacement sensor 2a and the load cell 2b when the normal inspection device T inspects the same damper D in the past. It is the average value of a large number of correlation coefficients Rpsd_f. That is, the normal value Npsd_f is an average value of a large number of correlation coefficients Rpsd_f obtained by the normal inspection device T in the past, and is stored in advance in the storage device 3b or the auxiliary storage device 3f of the processing device 3 and is an index. It is used for the calculation of the index Ipsd_f of the calculation unit 3a2.

The index calculation unit 3a2 also performs the same processing for the other correlation coefficients Rmsd_f, Rpsd_d1, Rmsd_d1, Rpsd_d2, Rmsd_d2, Rpd1_d2, Rmd1_d2, Rpd1_f, Rmd1_f, Rpd2_f, Rmd2_f, respectively. Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, Imd2_f are obtained.

Correlation coefficients Rmsd_f, Rpsd_d1, Rmsd_d1, Rpsd_d2, Rmsd_d2, Rpd1_d2, Rmd1_d2, Rpd1_f, Rmd1_f, Rpd2_f, Rmd2_f Normal values Nmsd_f, Npsd_d1, Nps1 Similarly, Nmd2_f is taken as the average value of the correlation coefficients obtained from the information obtained when the damper D is inspected by the corresponding normal inspection device T.

The indexes Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, and Imd2_f obtained in this way were damped when an abnormality was found. Since it is the difference between the correlation coefficient obtained in the above and the average value of many correlation coefficients obtained when the normal inspection device T vibrates the damper D, the larger the value, the more normal the correlation coefficient is. It shows that it deviates from the value.

Subsequently, the ranking calculation unit 3a3 compares the 12 indexes obtained, Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Imd1_f, Imd2_f, and Imd2_f. To do.

Further, the ranking calculation unit 3a3 arranges the 12 ranked indexes Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, and Imd2_f in order from the left. It is displayed on the screen of the device 3e. In addition, the rank calculation unit 3a3 is changed so that the 12 indexes Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, Imd2_f are arranged together with the rank. May be good. Further, the rank calculation unit 3a3 may print the index and the rank on a paper medium by the printer 3g and output the index and the rank.

As shown in FIG. 2, the first displacement sensor 2a, the second displacement sensor 2c, the third displacement sensor 2d, and the load cell 2b are provided in order from the right in the figure with respect to the inspection device T and the damper D as a sample. Depending on the installation positions of the first displacement sensor 2a, the second displacement sensor 2c, the third displacement sensor 2d, and the load cell 2b, each index tends to be large or small as follows depending on the abnormal location of the inspection device T.

For example, when the bracket 15 for attaching the damper D between the load cell 2b and the second displacement sensor 2c to the inspection device T has an abnormality, the indexes Ipd1_f obtained from the correlation coefficients Rpd1_f and Rmd1_f of the displacement d1 and the load F, Imd1_f tends to be a large value. Further, when there is an abnormality in the bracket 15, since the bracket 15 is located between the first displacement sensor 2a and the load cell 2b, the indexes Ipsd_f and Imsd_f obtained from the displacement DS and the load F tend to be large values. At the same time, since the bracket 15 is located between the second displacement sensor 2c and the load cell 2b, the indexes Ipd1_f and Imd1_f obtained from the displacement d1 and the load F tend to be large values.

Further, even if there is an abnormality in the bracket 15, the relationship between the displacement SD detected by the first displacement sensor 2a and the displacement d1 detected by the second displacement sensor 2c, and the displacement SD and the third displacement SD detected by the first displacement sensor 2a. It is considered that the relationship between the displacement d2 detected by the displacement sensor 2d and the relationship between the displacement d1 detected by the second displacement sensor 2c and the displacement d2 detected by the third displacement sensor 2d are unlikely to be affected. Therefore, the indexes Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2 related to these tend to take small values.

When the bracket 16 connecting the damper D and the actuator 13 is an abnormal portion, the indexes Ipsd_d1 and Imsd_d1 obtained from the displacement SD detected by the first displacement sensor 2a and the displacement d1 detected by the second displacement sensor 2c are large. Shows a tendency to be a value. Since the bracket 16 is located between the first displacement sensor 2a and the second displacement sensor 2c, the indexes Ipsd_d1 and Imsd_d1 obtained from the displacement DS and the displacement d1 tend to be large values, and the bracket 15 is the first. Since it is located between the displacement sensor 2a and the load cell 2b, the indexes Ipsd_f and Imsd_f obtained from the displacement SD and the load F tend to be large values.

Further, even if there is an abnormality in the bracket 16, the relationship between the displacement d1 detected by the second displacement sensor 2c and the displacement d2 detected by the third displacement sensor 2d, the displacement d1 detected by the second displacement sensor 2c and the load cell 2b Since it is considered that the relationship with the load F detected by the third displacement sensor 2d and the relationship between the displacement d2 detected by the third displacement sensor 2d and the load F detected by the load cell 2b are unlikely to be affected, they are related to these. The indexes Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, and Imd2_f tend to take small values.

Further, when only the indexes Ipsd_f and Imsd_f obtained from the displacement SD detected by the first displacement sensor 2a and the load F detected by the load cell 2b take high values among the indexes, the exciter E or the holding unit 11 or There is a high possibility that the gantry 10 has an abnormal portion.

Further, in the case of improper installation of the second displacement sensor 2c, only the indexes Ipsd_d1, Imsd_d1, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f related to the second displacement sensor 2c take high values, so that the improper installation can be determined. Similarly, in the case of improper installation of the third displacement sensor 2d, only the indexes Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd2_f, Imd2_f related to the third displacement sensor 2d take high values. It can be discriminated. Although the sensor device 2 is an element constituting the abnormality location evaluation system 1, since it is provided in the inspection device T, the indicators Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Imd1_f, Imd1_f , Ipd2_f, Imd2_f can also be used to grasp the improper mounting of the sensor unit.

The above is summarized and listed as shown in the table shown in FIG. For example, referring to the first row in the table of FIG. 7, the indexes Ipsd_f, Imsd_f, Ipsd_d1, Imds_d1, Ipsd_d2, Imsd_d2 are large values, and the other indexes are small values. In such a case, the correlation between the first displacement sensor 2a and the other sensor units, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d, is nothing but an abnormality. It can be seen that there is a high possibility that the bracket 16 is an abnormal portion. Therefore, in this case, when the indexes are ranked, if the six indexes Ipsd_f, Imsd_f, Ipsd_d1, Imds_d1, Ipsd_d2, and Imsd_d2 are tightened from the first to the sixth, there is a possibility that the bracket 16 has an abnormality. I can judge. Further, in the present embodiment, since the indexes are also obtained for the positive and negative values of the displacement SD, d1, d2 and the load F (information), the actuator 13 is extended and contracted according to the ranking of the indexes. You can also grasp which index is larger, time or time. For example, when the brackets 15 and 16 have cracks and the rigidity is low with respect to tension but the rigidity does not change so much with respect to compression, an abnormality is observed in the index on the contraction side of the actuator 13. It will be. Therefore, in the present embodiment, it is possible to grasp not only the abnormal portion but also the state of the abnormal portion to some extent.

In this way, it is possible to estimate the abnormal part of the inspection device T by comparing the index having a large value and the index having a small value, and the processing device 3 obtains the index and ranks these indexes. Then, when presented to the operator of the inspection device T, the operator can easily hit the abnormal portion of the inspection device T from the ranked index. Therefore, the ranked index obtained by the abnormal portion evaluation system 1 in this way is very useful for the operator of the inspection device T in identifying the abnormal portion.

In addition, the abnormality location evaluation system 1 includes an abnormality location estimation unit 3a4 that estimates an abnormality location of the inspection device T based on the index, in addition to ranking the indexes. The abnormality location estimation unit 3a4 discriminates the magnitudes of 12 indexes Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, Imd2_f, and Imd2_f, respectively. , Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, Imd2_f. Judge as. The abnormality location estimation unit 3a4 has twelve indexes Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, Imd1_f, Ipd2_f, Imd2_f It is determined which of the rows of FIG. 7 the combination pattern of "" matches, and the location of the inspection device T associated with each of the matching patterns is estimated to be an abnormal location.

The abnormality location estimation unit 3a4 causes the display device 3e to display the estimated abnormality location. If the pattern in the table of FIG. 7 does not correspond to the pattern in the table of FIG. 7, the abnormality location estimation unit 3a4 ends the process without estimating the abnormality location. The threshold value set for each of the above-mentioned indexes may be arbitrarily set, but may be set as follows, for example. Since each index is obtained by subtracting the average value of the past normal correlation coefficient from the correlation coefficient, the standard deviation of the past normal correlation coefficient is obtained, and a value three times this standard deviation is used as the threshold value. And it is sufficient. In this way, if the threshold value is set to 3 times the standard deviation, it will be judged as "large" if the index deviates from the value that can be taken by 99.7% of the past normal correlation coefficient, so that it is accurate. It is possible to judge whether or not the index is an abnormal value.

The processing of the abnormality portion evaluation system 1 of the inspection device T up to the above will be described with reference to the flowchart shown in FIG. A damper D, which is a sample, is attached to the inspection device T in which an abnormality is found, a current command I is input from the controller C to drive the actuator 13, and a sinusoidal vibration is applied to the damper D (step ST1). Displacement SD, d1, d2 and load F are detected by the first displacement sensor 2a, load cell 2b, second displacement sensor 2c and third displacement sensor 2d, respectively, as information on the operation of the damper D and the operation of the damper D (step ST2, sensing process). ), And input to the arithmetic processing device 3a of the processing device 3.

From the detected displacements SD, d1, d2 and the load F, the processing device 3 has 12 types of two sensor units out of the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c and the third displacement sensor 2d. The correlation coefficient between the detected information is obtained for the combination of (step ST3, correlation coefficient calculation process). Further, the processing device 3 obtains the difference between the 12 correlation coefficients and the normal value of each correlation coefficient to obtain 12 indexes (step ST4, index calculation process). Further, the processing device 3 ranks each index (step ST5, ranking calculation process). Further, the processing device 3 compares each index with the corresponding threshold value, determines whether each index corresponds to "large" or "small", and estimates the abnormal portion from the large / small pattern of each index ( Step ST6). The processing device 3 displays each index together with the estimated abnormal portion on the screen of the display device 3e according to the order in which they are ranked (step ST7).

The abnormality location evaluation system 1 of the inspection device T operates as described above, and the indexes Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f Ipsd_f, Imsd_f, Ipsd_d1, Imsd_d1, Ipsd_d2, Imsd_d2, Ipd1_d2, Imd1_d2, Ipd1_f, Imd1_f, Ipd2_f, Imd2_f Is also displayed, or is printed on a paper medium with a printer of 3 g so that these indexes and the like can be visually recognized by the operator.

As described above, the abnormality location evaluation system 1 of the inspection device T of the present embodiment has three or more different information for detecting the operation of the inspection device T and the operation of the damper (specimen) D inspected by the inspection device T as information. Sensor device 2 having a first displacement sensor 2a, a load cell 2b, a second displacement sensor 2c and a third displacement sensor 2d as a sensor unit of the above, and displacement (information) SD, d1, d2 and a load (information) detected by the sensor device 2 ( Information) A correlation coefficient calculation unit that includes a processing device 3 that processes F, and the processing device 3 obtains the correlation coefficient between the information detected by the two sensor units for all combinations of the two sensor units. It is provided with an index calculation unit 3a2 for obtaining the difference between 3a1 and the corresponding normal value for each of the obtained correlation coefficients as an index, and a ranking calculation unit 3a3 for ranking the indexes.

Further, in the method for evaluating an abnormal portion of the inspection device T according to the present embodiment, the displacement SD as three or more different information based on the operation of the inspection device T and the operation of the damper (specimen) D inspected by the inspection device T. , D1, d2 and the load F, and the displacement SD, d1, d2 and the load F as the information detected in the sensing process. It includes an index calculation process for calculating the number of relations, an index calculation process for obtaining the difference between the correlation coefficient and the corresponding normal value for each obtained correlation coefficient as an index, and a ranking calculation process for ranking each index.

In the abnormal part evaluation system 1 and the abnormal part evaluation method of the inspection device T configured as described above, the index that takes a larger value as the correlation coefficient deviates from the normal value is ranked. Can be used to rank and recognize the indicators that should be paid attention to by the operator. Further, by using the index obtained by the abnormality part evaluation system 1 and the abnormality part evaluation method of the inspection device T configured in this way, the operator of the inspection device T can determine the index having a high rank and the installation position of the sensor unit. From the relationship, it is possible to easily hit the abnormal part. From the above, according to the abnormality portion evaluation system 1 of the inspection device T and the abnormality portion evaluation method, it is possible to easily estimate the abnormality portion of the inspection device T.

Further, in the abnormality location evaluation system 1 of the inspection device T of the present embodiment, since the processing device 3 includes the abnormality location estimation unit 3a4 that estimates the abnormality location of the inspection device T based on the index, the abnormality is automatically performed. Since the location is estimated, the operator of the inspection device T can recognize the estimated abnormality portion, so that the operation of identifying the abnormality portion of the operator becomes easier.

Further, in the abnormality location evaluation system 1 of the inspection device T of the present embodiment, the correlation coefficient calculation unit 3a1 obtains the frequency distribution of the information between the two sensor units, and obtains the correlation coefficient based on the obtained frequency distribution. .. If D is dynamically vibrated, the waveforms of displacement (information) SD, d1, d2 and load (information) F may be disturbed due to the influence of noise, etc., and if the correlation coefficient is calculated as it is, the phase shift will occur. The value of the correlation coefficient may change due to the influence, and a good index may not be obtained for the estimation of the abnormal part. On the other hand, according to the abnormality location evaluation system 1 of the inspection device T of the present embodiment, if the correlation coefficient is obtained based on the frequency distribution, the influence of the phase shift is eliminated and the displacement (information) SD, d1 , D2 and the correlation coefficient indicating the degree of coincidence of the load (information) F waveforms can be obtained, so that a stable index can always be obtained, and a good index for identifying an abnormal portion can be obtained.

Further, in the abnormal part evaluation system 1 of the inspection device T of the present embodiment, the average of a plurality of correlation coefficients obtained when the normal damper (sample) D is inspected by the normal inspection device T obtained in the past. Since the value is set to the normal value, the larger the index obtained when the damper (sample) D is inspected by the abnormal inspection device T deviates from the average value, the larger the value is taken. It becomes easier for the operator of the inspection device T to determine whether or not.

Then, in the abnormality location evaluation system 1 of the inspection device T of the present embodiment, the inspection device T is a vibration inspection device, and the sensor device 2 is the displacement SD of the inspection device T and the total displacement d1 of the damper (specimen) D. The partial displacement d2 of the damper (specimen) d2 and the load F acting on the damper (specimen) D are detected as information. According to the abnormality location evaluation system 1 of the inspection device T configured in this way, the operator of the inspection device T is the sensor unit, the first displacement sensor 2a, the load cell 2b, the second displacement sensor 2c, and the third displacement sensor 2d. From the positional relationship of the above and the obtained index, it is possible to specifically estimate the location of the abnormality in the inspection device T, which is the vibration inspection device.

In the above-described embodiment, the information detected by the sensor device 2 is the displacement SD, d1, d2 and the load F, but the operation of the inspection device T also includes the speed or load of the actuator 13 in addition to the displacement SD. Therefore, the sensor device 2 may detect these as information, and the sensor device 2 detects the speed because the operation of the damper (specimen) D also has a speed in addition to the displacements d1 and d2 and the load F. You may. The sensor unit may detect two or more of displacement, velocity, and acceleration in parallel for the entire or part of the sample. In this case, if one of the parallel sensor units has an abnormality, the sensor unit may detect the displacement, velocity, and acceleration in parallel. Since the index related to the sensor unit takes a large value, it is possible to find an abnormality in a part of the sensor unit in the sensor device 2.

Further, the inspection device T may be an inspection device other than the vibration inspection device, and may be, for example, a pressure inspection device that applies pressure to the inside of the sample or a temperature test device that applies temperature to the sample. In the case of a pressure inspection device, the pressure of the pressure source of the pressure inspection device is used as information as the operation of the pressure inspection device, the pressure in the sample, the strain or stress of the entire length or part of the sample is used as information, and the index is used as described above. Just ask. As described above, even if the inspection device T is a pressure inspection device, the abnormality location evaluation system 1 and the abnormality location evaluation method can help the operator of the inspection device T to identify the abnormality portion of the pressure inspection device. Even if the inspection device T is a temperature inspection device, the abnormality location evaluation system 1 and the abnormality location evaluation method detect the operation on the temperature inspection device side and the operation on the sample side as information and use an index as in the pressure inspection device. If required, it is possible to similarly assist the operator of the inspection device T in identifying an abnormal portion. As for the sample, the damper D is used as the sample in the present embodiment, but the sample may be a mechanical part other than the damper D, and when the test device T is other than the vibration test device, the sample is suitable for the test. Should be used.

Although the preferred embodiments of the present invention have been described in detail above, they can be modified, modified, and modified as long as they do not deviate from the claims.

1 ... Abnormal part evaluation system, 2 ... Sensor device, 2a ... First displacement sensor (sensor unit), 2b ... Load cell (sensor unit), 2c ... Second displacement sensor (sensor unit) ), 2d ... Third displacement sensor (sensor unit), 3 ... Processing device, 3a1 ... Correlation coefficient calculation unit, 3a2 ... Index calculation unit, 3a3 ... Rank calculation unit, 3a4.・ ・ Abnormal part estimation unit

Claims (6)

It is an abnormality part evaluation system of the inspection device that obtains the index used for estimating the abnormality part of the inspection device.
A sensor device having three or more sensor units having different detection information, using the operation of the inspection device and the operation of the sample to be inspected by the inspection device as information.
A processing device for processing information detected by the sensor device is provided.
The processing device is
A correlation coefficient calculation unit that obtains a correlation coefficient between the information detected by the two sensor units for all combinations of two sensor units among the sensor units, and a correlation coefficient calculation unit.
An index calculation unit that obtains the difference between the correlation coefficient and the corresponding normal value as the index for each of the obtained total correlation coefficients.
An abnormality location evaluation system for an inspection device, which comprises a ranking calculation unit for ranking the indicators. The processing device is
The abnormality location evaluation system for an inspection device according to claim 1, further comprising an abnormality location estimation unit that estimates an abnormality location of the inspection device based on the index. The first or second claim, wherein the correlation coefficient calculation unit obtains the frequency distribution of the information between the two sensor units, and obtains the correlation coefficient based on the obtained frequency distribution. An abnormality evaluation system for inspection equipment. Claims 1 to 3 are characterized in that the normal value is the average value of a plurality of correlation coefficients obtained when the normal sample is inspected by the normal inspection device in the past as the normal value. The abnormal part evaluation system according to any one of the items. The inspection device is a vibration inspection device.
The sensor device according to claims 1 to 4, wherein the sensor device detects the displacement of the inspection device, the total displacement of the sample, the partial displacement of the sample, and the load acting on the sample as information. The abnormality location evaluation system for the inspection device according to any one of the items. It is a method for evaluating abnormal parts of inspection equipment that obtains an index used for estimating abnormal parts of inspection equipment.
A sensing process that detects three or more different pieces of information by using the operation of the inspection device and the operation of the sample to be inspected by the inspection device as information.
A correlation coefficient calculation process for obtaining the correlation coefficient between the information for all combinations of two pieces of the information detected in the sensing process, and a correlation coefficient calculation process.
An index calculation process in which the difference between the correlation coefficient and the corresponding normal value is used as the index for each of the obtained correlation coefficients.
A method for evaluating an abnormal part of an inspection device, which comprises a ranking calculation process for ranking the indicators.