JP2021032580A - Measuring device and measuring method - Google Patents

Abstract

To provide a measuring device and a measuring method which require less image processing information in a process of determining a representative value of a value indicating height information (distance) from an upper surface of a transparent table.SOLUTION: In an XY plane of first surface shape data DT, a region including each protrusion is specified, a first representative value v1 is determined in a specified region, and second reflected light of a reflecting member is processed and a value of a second reference plane DG which has the same distance value from the first reference plane DT is set, and a second representative value v2 is determined by performing an operation of subtracting the value of the second reference plane DG from the value of the first representative value v1.SELECTED DRAWING: Figure 3

Description

The present invention relates mainly to a measuring device and a measuring method suitable for measuring the position of a protrusion of an electronic component having a protrusion.

Conventionally
A transparent table on which a measurement object (inspection object) having a plurality of protrusions arranged in at least one direction is placed.
A light irradiation unit that irradiates the measurement object placed on the upper surface of the transparent table with irradiation light having a light pattern in which the intensity of light changes periodically from the lower surface of the transparent table.
An optical detection unit (imaging unit) including a CCD camera that photographs the measurement object irradiated with the light pattern from the lower surface of the transparent table.
Data representing the three-dimensional shape of the lower surface (surface) of the measurement object by processing the image of the measurement object detected (photographed) by the light detection unit, and each pixel position (each) in the XY plane. A table surface that generates surface shape data (hereinafter referred to as "table surface shape data") indicating a distance (height information, floating distance from the table top surface) from the upper surface of the transparent table at a position (x, y)). Shape data generation unit (image processing unit) and
In the XY plane represented by the table surface shape data generated by the table surface shape data generation unit, a region including each of the plurality of protrusions in the measurement object is specified, and in each of the specified regions, a region including each of the plurality of protrusions is specified. A representative value determining unit that determines a representative value of a value indicating a distance from the upper surface of the transparent table, and a representative value determining unit.
A measuring device (inspection device) including a determination unit for determining whether or not the distribution of the representative values in each of the plurality of protrusions satisfies a preset standard is known. (For example, Patent Document 1)

Japanese Patent No. 5385703

<Definition>
The position (x, y) of each position (x, y) is the smallest element constituting the digital image and is called a pixel. This pixel has pixels and dots.
Each position (x, y) is the position of each pixel (which means a pixel or a dot).
Each position (x, y) is each pixel position.
The number of pixels (including the "resolution" defined by the number of dots in the scanning distance range) is, for example, the number of pixels of the light detection unit (imaging unit) composed of a CCD camera of 2048 pixels × 2048 pixels is about 4.19 million pixels. When the processing area is not specified (designated), for example, in the detection field area (shooting field area), the process of acquiring the height information of all the positions of 4.19 million pixels is performed. The process of acquiring the height information (distance) of all pixel positions in the detection field of view is also referred to as "all pixel position height acquisition process" below.

The prior art described above (see FIG. 6)
(A) A second reference plane, which is the height information (distance) of the upper surface of the transparent table, is generated from the datum plane (first reference plane DT) set in advance in the program by the all pixel position height acquisition process. The table surface shape data (A) on the upper surface of the table, which is composed of height information of all pixel positions, is stored in advance in the storage unit (see FIG. 6A).
(A) The first surface shape data (B), which is the height information (distance) of the object to be measured, is generated from the datum plane (first reference plane) by the all-pixel position height acquisition process ((Fig. 6). b) See),
(C) The height of all pixel positions of the object to be measured from the upper surface of the transparent table by performing an operation of subtracting the value of the table surface shape data (A) from the value of the first surface shape data (B) of all pixel positions. The table surface shape data (C), which is information (distance), is generated by the all-pixel position height acquisition process (see (c) in FIG. 6).
(D) In the XY plane represented by the table surface shape data (C) which is the height information (distance) of all pixel positions, the protrusion region (D) is a region including each protrusion in the measurement object. (See (d) in FIG. 6),
(E) In each of the identified protrusion regions, a representative value (E) of a value indicating height information (distance) from the upper surface of the transparent table is determined (see (e) in FIG. 6).
That is.

The prior art has the following problems.
(1) In order to determine the representative value, it is indispensable to generate table surface shape data including height information of all pixel positions (for example, 4,194,000 pixels).
The generation of the table surface shape data is as follows: [a] acquisition of the first surface shape data (B) consisting of height information of all pixel positions (for example, 4,194,000 pixels), and [b] height of all pixel positions. Acquisition of table surface shape data consisting of information, [c] All pixel position height acquisition process of subtracting the distance value of each pixel of table surface shape data from the distance value of each pixel of the first surface shape data (B) This is due to image processing (for example, 4,194,000 pixels).
That is, since the three processes (the [a], [b], and [c]) are all pixel position height acquisition processes, there is a drawback that the amount of image processing information is enormous.

(2) In the above-mentioned prior art, the physical upper surface of the transparent table is directly measured to measure the position of the upper surface of the transparent table, so that the resolution of the light detection unit (imaging unit) is the flatness (“warp”) of the transparent table. If the maximum height position and the minimum height position of the table top surface due to the tilt of the table are larger than the resolution of the imaging unit, the measured pixel values of the table surface shape data are different. The table surface shape data is generated by subtracting the value of all pixel positions of the table surface shape data from the value of all pixel positions of the first surface shape data, which is a huge amount of information. It had the problem of becoming.

In view of the above-mentioned drawbacks of the prior art, the present invention provides a measuring device and a measuring method that require a small amount of processing information for determining or determining a representative value of a value indicating height information (distance). The purpose is to do.

In order to achieve the above object, the present invention has the following configuration.
[First invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
The second reflected light, which is the reflected light from the reflecting member provided on the upper surface, the lower surface, the upper side or the lower side of the transparent table detected by the light detection unit, is processed to be processed from the first reference surface. A second reference surface setting unit that acquires a reflection member surface indicated by a distance and sets a second reference surface in which the reflection member surface is located at the upper surface position of the transparent table or near the upper surface position.
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. Distance values are equivalent,
It is a measuring device characterized by having the above-mentioned configuration.

[Second invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
Reflective members provided on the upper surface, lower surface, upper surface or lower side of the transparent table,
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value, and
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. A second reference for acquiring the reflective member surface indicated by the distance from the reference surface of 1 and setting a second reference surface in which the reflective member surface is located at the upper surface position of the transparent table or near the upper surface position. Surface setting part and
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane (second reference plane data) is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all pixel positions thereof. The distance values from the first reference plane are the same.
It is a measuring device characterized by having the above-mentioned configuration.

[Third invention]
In the measuring device according to the [first invention] or [second invention], the three-dimensional shape of the surface of the measurement object is represented by the distance of each pixel of the measurement object from the second reference plane. A second surface shape data generation unit may be provided to generate the surface shape data of 2 by performing an operation of subtracting the value of the second reference surface from the value of the first surface shape data. ..

[Fourth Invention]
A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and a reference position on the light detection unit side. A measuring method using a measuring device including a first reference surface preset or defined as, and a reflecting member provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value of
The second reflected light, which is the reflected light from the reflecting member detected by the light detection unit, is processed to acquire the reflecting member surface indicated by the distance from the first reference surface, and the reflecting member is obtained. A second reference surface having a surface set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. This is a measurement method characterized in that the distance values are the same.

[Fifth Invention]
A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and upper and lower surfaces of the transparent table. A measurement method using a measuring device including a reflection member provided on the upper side or the lower side and a first reference surface preset or determined as a reference position on the light detection unit side.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value,
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. The reflection member surface indicated by the distance from the reference surface of 1 is acquired, and a second reference surface in which the reflection member surface is set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. This is a measurement method characterized in that the distance values are the same.

[Sixth Invention]
In the measuring device according to the above [first invention], [second invention] or [third invention].
It is a configuration without the reflective member.
The measuring device is characterized in that the second reference surface is generated by processing the table top surface reflected light which is the reflected light from the top surface of the transparent table.

[Seventh Invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
A horizontal plane having a flatness and a horizontality of 0 degrees is set at the upper surface position of the transparent table generated on the program or near the upper surface position, and the distance values of all the pixel positions from the first reference surface are the same. The second reference plane setting unit that sets the second reference plane, which is
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
It is a measuring device characterized by having the above-mentioned configuration.

The present invention has the following effects.
Effect of [1st Invention] (1) A protrusion that is a region including each of the protrusions of the measurement object in the XY plane of the first surface shape data which is the distance (height information) of all pixel positions. A region is specified, and a first representative value, which is a representative distance value in the protrusion region, is determined.
The flatness and horizontality are horizontal planes of 0 degrees, or the flatness and horizontality are horizontal planes of 0 degrees by correction or the like, and the distance values of all the pixel positions from the first reference plane are the same. Set the value of the second reference plane,
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
Therefore, only the first surface shape data is the distance (height information) of all pixel positions.
The second representative value is obtained by subtracting the value of the second reference plane from the first representative value. For example, there are 100 protrusions, and all of the 100 protrusions are projected. When the area is specified, the first representative value is 100 points (100 pixel positions), and the value of the second reference plane (all values are the same value) is different from the first representative value of these 100 points. Since the second representative value is obtained by subtracting it, the amount of processed information is extremely small.
That is, the present invention has the effect of determining the second representative value with less information processing than in the prior art.
(2) Since it is possible to make a judgment based on the first representative value, if the judgment is made only by the first representative value, the first surface shape data is generated and the first surface shape is used. Processing with a small amount of information is sufficient to specify the protrusion region in the data and determine the first representative value in the protrusion region.
(3) Since the first surface shape data is data representing the three-dimensional shape of the lower surface (surface) of the measurement object, the three-dimensional shape image of the measurement object may be displayed on the screen for visual confirmation. For example, the second surface shape data may not be used or generated.
In the present invention, since both the first reference plane and the second reference plane are horizontal planes having a flatness and a horizontality of 0 degrees (the values at each pixel position are the same), the first one displayed on the display. The three-dimensional image of the surface shape data and the three-dimensional image of the second surface shape data are the same three-dimensional image.

In the present invention, the second reference plane, which is a horizontal plane having a flatness and a horizontality of 0 degrees, is set based on the measurement data of the lower surface (surface) of the reflective member. Therefore, the upper surface of the transparent table and the transparent table are set in the first place. Is not measured (detected), is not subject to measurement (detection), or is excluded from the subject of measurement (detection). That is, there is no table surface shape data obtained by measuring the table top surface of the invention of Patent Document 1.

Since the present invention does not use the table surface shape data, which is the data of all pixel positions, which is an indispensable configuration in the invention of Patent Document 1, the area identification and the representative value determination are reduced in the amount of information processing. It's all done.
The present invention, which does not use the table surface shape data which is the data of all pixel positions, which is an essential configuration in the invention of Patent Document 1, is the core configuration of the table surface shape data which achieves the object of the invention of Patent Document 1. Since the use is denied, the invention of Patent Document 1 has an inhibitory factor that hinders the idea of the present invention.

Effect of [Second Invention] The difference from the above [First Invention] is that the reflection member region or the reflection member region including the reflection member is specified and detected by the light detection unit. The point is that the second reflected light, which is the reflected light of the reflecting member region, is processed to generate the second reference plane indicated by the distance from the first reference plane.
Therefore, the same effect as that of the above [first invention] is obtained, and the measurement area of the reflective member is limited to a narrow range of the specified reflective member region. Therefore, the information in the narrow range is a small amount of pixel position information. It has the effect of reducing the amount of processing information, and it is the "table surface shape data" which is the surface shape data of the table top surface consisting of the height information of all the pixel positions of the prior art in the processing of determining the representative value. It means not to use the huge amount of information.

Effect of [Third Invention] A second surface shape representing the three-dimensional shape of the surface of the object to be measured while having the same effect as the measuring device described in the above [first invention] or [second invention]. The data makes it possible to display the three-dimensional shape of the surface (lower surface or upper surface) of the object to be measured on the display.

Effect of [Fourth Invention] An effect similar to that of the above-mentioned [First Invention] is obtained.

Effect of [Fifth Invention] An effect similar to that of the above-mentioned [Second Invention] is obtained.

Effect of [Sixth Invention] The second reference surface is generated by processing the table top surface reflected light which is the reflected light from the upper surface of the transparent table, and the second reference surface is used to generate the above [first invention]. It has the same effect as the measuring device described in the [second invention] or the [third invention].

Effect of [7th Invention] The setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member, but the transparent table 2 generated on the program. A second reference plane is set at or near the top surface position, which is a horizontal plane having a flatness and horizontality of 0 degrees and whose distance values from the first reference plane DT are the same for all pixel positions. Is.
For example, the upper surface position of the transparent table or the vicinity of the upper surface position, which is measured and stored in advance, is stored in advance as the second reference surface. For example, a copy of the first reference plane DT, which is a horizontal plane having a flatness and a flatness of 0 degrees, is placed at or near the upper surface position of the transparent table that has been measured and stored in advance and is generated on the program. It is offset and used as the second reference plane. For example, the reference plane is set secondly by processing the pixel position values of the three shortest distance values or the shortest distance values of the first surface shape data.
It has the same effect as the effect of the above [first invention].

The conceptual diagram of Example 1 of this invention. The chart figure which shows the process of Example 1 of this invention. The schematic diagram which showed the process of Example 1 of this invention as an image. The screen view of the area identification part of Example 1 of this invention. The conceptual diagram of Example 3 of this invention. The schematic diagram which showed the processing of the prior art as an image.

Hereinafter, examples which are the best mode for carrying out the present invention will be described. However, the present invention is not intended to be limited to these examples. Further, in the description of the embodiment described later, the same components of the above-described embodiment are designated by the same reference numerals, and duplicate description will be omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 4, the measuring device 1 has the following configuration.
A transparent table 2 made of transparent quartz glass and
A light detection unit 6 provided below the transparent table 2 and having a light irradiation unit 4 for irradiating the irradiation light 3 upward and a light detection unit 5 for detecting the reflected light of the irradiation light 3.
A first reference plane DT preset or defined as a reference position on the photodetector 5 side, and
A positioning frame 19 in the form of an enclosure made of transparent glass that transmits the irradiation light 3 that regulates the setting position of the measurement object W having the protrusion pw provided on the upper part of the transparent table 2 in the frame.
A plurality of reflecting members 7 for diffuse-reflecting the irradiation light 3 provided on the upper surface of the transparent table 2 in the positioning frame 19 outside the arrangement area of the measurement object W in a coating form.
Each pixel position (each) from the first reference surface DT to the measurement object W by processing the first reflected light 8 which is the reflected light from the measurement object W placed on the upper surface of the transparent table 2. The first surface shape data generation unit 10 that generates the first surface shape data HD1 representing the surface shape (three-dimensional shape) of the measurement object W at the distance of the position (x, y)), and
Area identification unit 21 and
In the XY plane of the first surface shape data HD1 displayed on the screen of the region specifying unit 21, the protrusion region pa, which is the region including the protrusion pw of the measurement object W, is specified, and the specified protrusion region is specified. A first representative value determining unit 11 for determining a first representative value v1 (highest pixel position, lowest pixel position, average value of all pixel positions, etc.), which is a representative distance value in pa,
The second reflected light 12 which is the reflected light detected by the photodetector 5 is processed to acquire the reflecting member surface ms indicated by the distance from the first reference surface DT, and the reflecting member surface ms is transparent. A second reference surface setting unit 13 for setting a second reference surface DG located at the upper surface position of the table 2 or near the upper surface position, and
A second representative value determination unit 14 that determines the second representative value v2 by performing an operation of subtracting the value of the second reference plane DG from the first representative value v1.
The second surface shape data HD2 representing the three-dimensional shape of the surface (lower surface) of the measurement object W according to the distance of each pixel of the measurement object W from the second reference surface DG is the second surface shape data HD1 of the first surface shape data HD1. A second surface shape data generation unit 16 generated by performing an operation of subtracting the value of the second reference plane DG from the value, and
A determination unit 17 for determining whether or not the second representative value v2 is within a predetermined height position range, and
A determination unit 18 for determining whether or not the first representative value v1 is within a predetermined height position range, and
It consists of a control unit 20
The second reference plane DG is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane DT are the same.

The setting of the second reference plane DG by the second reference plane setting unit 13 is performed as follows.
The second reflected light 12 which is the reflected light from the reflecting member region ra which is the region of the reflecting member 7 at three places of the reflecting member 7 detected by the light detection unit 5 or the region including the reflecting member 7. To determine the representative values of the reflective members (positional values of the highest pixel, the position value of the lowest pixel, the average value of all the pixel position values, etc.) of the three reflective member 7s, and the representative value of the reflective member. A first triangular plane is created, and the plane is corrected to a horizontal plane having a flatness and flatness of 0 degrees (0 value) (the distance values of all pixel positions from the first reference plane DT are the same). The reflection member surface ms indicated by the distance from the reference surface DT of the above is acquired, and the second reference surface DG in which the reflection member surface ms is located at the upper surface position of the transparent table 2 or near the upper surface position is set.

The control unit 20 includes a first surface shape data generation unit 10, a first representative value determination unit 11, a second reference surface setting unit 13, a second representative value determination unit 14, and a second surface shape data generation unit. It has 16, a determination unit 17, a determination unit 18, a region identification unit 21, and the like.

The first reference plane DT is a reference position or a reference value arbitrarily determined on the program by the control unit 20 that controls the photodetection unit 6, and is a horizontal plane having a flatness and a flatness of 0 degrees (0 values). The height position value is set to 0 value. The sensor reference plane DT is a "geometric tolerance reference" datum "".
Therefore, the "reference position on the photodetector 5 side" in the claims does not mean a physical position.

FIG. 3 is a schematic view showing each pixel position. The vertical arrow indicates the distance value of each pixel position.
The left figure of FIG. 3A shows a row having the shortest distance value pixel position of the reflective member surface shape data RD at one place.
The right figure of FIG. 3A shows a row of the first surface shape data DH1 having the shortest distance value pixel position.
The left figure of FIG. 3B shows a row having a pixel position having the shortest distance value in the reflective member region ra. Here, the reflective member region ra is a region including the entire reflective member 7 (see FIG. 4).
The right figure of FIG. 3B shows a row having the shortest distance value pixel position of one protrusion region pa.
A pixel having a viewing area (photographing area) of 30 mm × 30 mm = 900 square millimeters of the light detection unit is 4.19 million pixels. The number of pixels in the area pa is 4655 pixels.

The resolution of the photodetector of the present invention is higher than the flatness of the upper surface of the transparent table.
In Example 1, the flatness of the upper surface of the transparent table 2 is between 0.6 μm and 3 μm, but the resolution of the photodetector is 0.5 μm or 0.25 μm.

The transparent table 2 through which the irradiation light 3 is transmitted and the upper surface thereof cannot be detected by the light detection unit 5 (diffuse reflected light that can be detected cannot be obtained), and the reflected light from the transparent table 2 is removed as noise. It has become.
The positioning frame 19 through which the irradiation light 3 passes cannot be detected by the light detection unit 5, and the reflected light from the positioning frame 19 is removed as noise.
The irradiated irradiation light hits the measurement object W and the reflecting member 7, and the reflected light is simultaneously detected and processed by the photodetector 5 (see (a) of FIG. 3). Therefore, the second reference plane DG is set for each measurement.
Therefore, the diffuse reflection light that can be detected by the light detection unit 5 cannot be obtained for the irradiation light of the portion other than the measurement object W and the reflection member 7 which are the diffuse reflection materials, and the data on the program does not measure as the unmeasurable pixel position. The pixel position of the measurement object W processed as the measurement pixel position and the diffuse reflected light is obtained forms the first surface shape data HD1, and the pixel position of the reflection member 7 forms the reflection member surface shape data RD ( (See (a) in FIG. 3).

On the screen (display screen) of the region specifying unit 21, an image of the first surface shape data HD1 (viewed from the XY plane) in the XY plane and an image of the reflective member surface shape data 22 of the reflective member in the XY plane are displayed. (See FIG. 4).
On the screen of the area identification unit 21,
The three reflective member regions ra of the reflective member surface shape data 22 are specified (see FIG. 3B and FIG. 4).
The protrusion region pa (here, all protrusions are specified) of the first surface shape data HD1 is specified (see FIG. 3 (b) and FIG. 4).
When "processing" is instructed, the first representative value v1 is determined ((c) in FIG. 3), the reflection member surface ms is acquired, the second reference surface DG is set ((c) in FIG. 3), and the second. The determination of the representative value v2 ((d) in FIG. 3) is automatically performed.
The setting of the second reference surface DG is a non-setting mode that is automatically set at the same position as the reflective member surface ms, an automatic setting mode that is automatically set at a preset movement distance position, and an operator measures. The optional setting mode that can be set arbitrarily can be selected for each.
The screen of the area specifying unit 21 can enlarge and display an image, and for example, a region can be specified (designated) by enlarging and displaying one protrusion pw portion over the entire screen.

The protrusion region pa can be specified from the method of directly specifying the image of the first surface shape data HD1 (viewed from the XY plane) on the XY plane displayed on the display by drawing a frame with a mouse or the like, CAD data, or the like. There is a method of creating a specific location frame in advance and specifying the specific location frame by covering the image of the first surface shape data HD1 (viewed from the XY plane) on the XY plane displayed on the display.

The second surface shape data HD2 may be automatically generated after the determination of the second representative value v2, but a second surface shape data creation unit is provided and the operator's display is provided when necessary. It is generated by subtracting the second reference surface DG value from the stored first surface shape data HD1 value by a creation instruction operation such as clicking the second surface shape data creation button on the screen. Is good.

The three-dimensional shape image of the first surface shape data HD1 and the three-dimensional shape image of the second surface shape data HD2 can be displayed on the display.
The display line is color-coded according to the height distance of each pixel position, and the height can be visually recognized by the difference in color.
Since both the first reference surface DT and the second reference surface DG are horizontal planes with 0 degree flatness and horizontality (the values at each pixel position are the same), the first surface shape displayed on the display. The three-dimensional image of the data HD1 and the three-dimensional shape image of the second surface shape data HD2 are visually the same.
If the purpose is to visually recognize the shape of the lower surface (surface) of the object W to be measured, only the three-dimensional shape image of the first surface shape data HD1 is sufficient. In that case, the second surface shape data HD2 It is not necessary to generate the second surface shape data generation unit 16.

(1) In the XY plane of the first surface shape data DT, which is the distance (height information) of all pixel positions, the protrusion region pa, which is a region including each protrusion pw of the measurement object W, is specified. , The first representative value v1, which is a representative distance value in the protrusion region pa, is determined.
Set the value of the second reference plane DG that is a horizontal plane with a flatness of 0 or is made a horizontal plane with a flatness of 0 by correction or the like (that is, the distance values of all the pixel positions from the first reference plane DT are the same). ,
The second representative value v2 is determined by performing an operation of subtracting the value of the second reference plane DG from the value of the first representative value v1.
Therefore, only the first surface shape data is the distance (height information) of all pixel positions.
The second representative value is obtained by subtracting the value of the second reference plane DG (one value (all pixel values are the same value)) from the first representative value v1 for v2, for example, a protrusion. When there are 100 parts pw and the protrusion region pa is specified for all of the 100 protrusions pw, the first representative value v1 is 100, and from the first representative value v1 of these 100 places. Since the second representative value v2 is obtained by subtracting the value (one value) of the first reference plane DG, the processing information amount is extremely small.
That is, the second representative value v2 is determined by less information processing than in the prior art.
(2) Since the determination based on the first representative value v1 is possible, if the determination using only the first representative value v1 is sufficient, the first surface shape data HD1 is generated and the first surface shape data HD1 is generated. The protrusion region pa may be specified in the surface shape data HD1, and processing with a small amount of information may be sufficient to determine the first representative value v1 in the protrusion region pa.
(3) Since the first surface shape data HD1 is data representing the three-dimensional shape of the lower surface (surface) of the measurement object W, the three-dimensional shape image of the measurement object W is displayed on the screen for visual confirmation. If this is done, the second surface shape data HD2 (corresponding to the "table surface shape data" of the prior art) may or may not be used.
In the present invention, since both the first reference plane DT and the second reference plane DG are horizontal planes with flatness and horizontality of 0 degrees (values at each pixel position are the same), the first reference plane DT and the second reference plane DG are displayed on the display. The three-dimensional image of the surface shape data HD1 of 1 and the three-dimensional image of the second surface shape data HD2 are the same three-dimensional image.
(4) Since the present invention does not use the table surface shape data, which is the data of all pixel positions, which is an essential configuration in the invention of Patent Document 1, the region is specified and the representative value is determined. The amount is small.

The photodetection unit 6 projects irradiation light which is a striped pattern (sine wave pattern / sine wave pattern) onto the object W to be measured, and positions the reflected light 3 at each pixel position of the photodetector 5 composed of an image sensor ( A phase shift method is adopted in which detection and processing are performed at each position (x, y)).
In the present invention, the measuring method is not limited to the phase shift method.
In three-dimensional measurement, for example, there are monocular vision method, binocular vision method, multi-eye vision method, optical radar method, optical projection method, moire method, illuminance difference stereo method, and focus displacement sensor, line sensor, one-dimensional method. There are also measurements by a laser displacement meter, a two-dimensional laser displacement meter, an optical cutting method, and the like, and those by these measurement methods are also included in the technical category of the present invention.
The photodetector 9 includes various photodetectors such as a CMOS camera, a CCD camera, a line sensor camera (for example, "TDI camera"), and a TOF camera in the technical category.
Further, in the present invention, the reflective member is not limited to that of diffuse reflection. Specular reflection and the like (normal reflection and the like) are also included in the technical category of the present invention.
For example, a laser displacement meter is suitable for measuring a mirror surface with high accuracy. In this case, the reflective member does not have to be provided, and the upper surface of the transparent table itself can be detected and measured.

The setting position of the measurement object W is not only placed on the upper surface of the transparent table but also above the transparent table (upper side), for example, by an arm that attracts and holds the upper surface of the measurement object W. Some are.
The measurement object W is set on the upper surface or the upper surface of the transparent table 2 with the protrusion pw facing down for measurement.

The position where the reflective member is provided is provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table. The form provided on the upper surface of the transparent table includes application, placement, and adhesion. A form provided on the upper side of the transparent table includes, for example, a form in which a reflective member is provided on a transparent table separate from the transparent table, and the separate transparent table is arranged on the lower side or the upper side of the transparent table.

A transparent table 2 made of transparent quartz glass, a light irradiation unit 4 for irradiating the irradiation light 3 upward, and a light detection unit 5 for detecting the reflected light of the irradiation light 3 provided below the transparent table 2. Measurement having a light detection unit 6 having a light detection unit 6, a first reference surface DT preset or defined as a reference position on the light detection unit 5 side, and a protrusion pw provided in a fixed form on the upper part of the transparent table 2. A coating form is applied to the upper surface of a positioning frame 19 made of transparent glass through which irradiation light 3 transmits, which regulates the setting position of the object W in the frame, and a transparent table 2 in the positioning frame 19 outside the arrangement range of the measurement object W. The measuring device 1 provided with the plurality of reflecting members 7 for diffusing and reflecting the irradiation light 3 and the region specifying portion 21 realizes the following measurement method.
Each pixel position (each) from the first reference surface DT to the measurement object W by processing the first reflected light 8 which is the reflected light from the measurement object W placed on the upper surface of the transparent table 2. The first surface shape data HD1 representing the surface shape of the measurement object W at the distance of the position (x, y)) is generated (see (a) of FIG. 3).
In the XY plane of the first surface shape data HD1 displayed on the screen of the region specifying unit 21, the protrusion region pa, which is the region including the protrusion pw of the measurement object W, is specified (FIGS. 4 and 3). (B)), a first representative value v1 (highest pixel position, lowest pixel position, average value of all pixel positions, etc.), which is a representative distance value in the specified protrusion region pa, is determined. (Fig. 4, Fig. 3 (c)),
The second reflected light 12 which is the reflected light from the reflecting member region ra which is the region of the reflecting member 7 at three places of the reflecting member 7 detected by the light detection unit 5 or the region including the reflecting member 7. (See FIG. 4) to determine the representative values of the reflecting members of the three reflecting members 7 (positional values of the highest pixel, position values of the lowest pixels, average values of all pixel position values, etc.). A triangular plane connecting the representative values of the reflective members is created, and the plane is set to a horizontal plane having a flatness and a flatness of 0 degrees (0 value) (the distance values of all pixel positions from the first reference plane DT are the same value). The reflection member surface ms (reflection member surface data) indicated by the corrected distance from the first reference surface DT is acquired, and the reflection member surface ms is positioned at the upper surface position of the transparent table 2 or near the upper surface position. Set the reference plane DG (second reference plane data) of 2 (see (c) in FIG. 3), and set it.
The second representative value v2 is determined by subtracting the value of the second reference plane DG from the first representative value v1 (see (d) in FIG. 3).
It is determined whether or not the second representative value v2 is within the predetermined height position range, and the second representative value v2 is determined.
This is a measurement method configured as described above.

The second surface shape data HD2 representing the three-dimensional shape of the surface (lower surface) of the measurement target W according to the distance of each pixel of the measurement target W from the second reference surface DG is the second surface shape data HD1 of the first surface shape data HD1. It may be fixed that it is generated by performing an operation of subtracting the value of the second reference plane DG from the value.

In the second embodiment of the present invention shown in FIG. 5, the main difference from the first embodiment is that the positioning frame 19 is not provided, and the light detection unit irradiates the irradiation unit with the irradiation light 26 composed of a white laser beam. The light detection unit 28 is an irradiation unit and the light detection unit is a light detection unit 27 composed of a CMOS sensor. The point is that the measuring device 29 is formed so as to detect and process the reflected light 30 (second reflected light) on the upper surface of the table, which is the reflected light, acquire the reflecting member surface ms, and set the second reference surface DG. ..
The reflected light reflected by the measurement object W of the irradiation light 26 forms the first reflected light 31.
A transmissive film is applied so that the reflectance of the white laser beam on the upper surface of the transparent table 2 is larger than the reflectance of the lower surface of the transparent table 2. That is, the transmittance of the lower surface of the white laser beam is high and the transmittance of the upper surface is set lower than that.
The photodetector unit 28 performs measurement while moving (scanning).

In the fourth embodiment of the present invention, the main difference from the first embodiment is that the setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member. Then, in the upper surface position of the transparent table 2 generated on the program or in the vicinity of the upper surface position, a horizontal plane having a flatness and a horizontality of 0 degrees is set, and the distance values of all the pixel positions from the first reference surface DT. The point is that a second reference plane having the same value is set.

The setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member, but is located at the upper surface position of the transparent table 2 generated on the program or in the vicinity of the upper surface position. The second reference plane is set so that the flatness and the horizontality are horizontal planes of 0 degrees and the distance values of all the pixel positions from the first reference plane DT are the same.
For example, the upper surface position of the transparent table that has been measured and stored in advance or the vicinity of the upper surface position is stored or set in advance as the second reference surface. For example, a copy of the first reference plane DT, which is a horizontal plane having a flatness and a flatness of 0 degrees, is placed at or near the upper surface position of the transparent table that has been measured and stored in advance and is generated on the program. It is offset and used as the second reference plane. For example, the second reference plane may be set by processing the three pixel position values of the shortest distance value or the shortest distance value of the first surface shape data.

The present invention is mainly used in an industry for measuring the flatness of an electronic component having protrusions such as terminals.

DT: First reference plane,
pw: protrusion,
W: Object to be measured,
pa: protrusion area,
v1: First representative value,
ra: Reflective member area,
ms: Reflective member surface,
DG: Second reference plane,
v2: Second representative value,
HD1: First surface shape data,
HD2: Second surface shape data,
RD: Reflective member surface shape data,
1: Measuring device,
2: Transparent table,
3: Irradiation light,
4: Light irradiation part,
5: Photodetector,
6: Light detection unit,
7: Reflective member,
8: First reflected light,
10: First surface shape data generator,
11: First representative value determination unit,
12: Second reflected light,
13: Second reference plane setting unit,
14: Second representative value determination unit,
16: Second surface shape data generator,
17: Judgment unit,
18: Judgment unit,
19: Positioning frame,
20: Control unit,
21: Area identification part,
25: Irradiation part,
26: Irradiation light,
27: Photodetector,
28: Light detection unit,
29: Measuring device,
30: Table top reflected light,
31: First reflected light.

The present invention relates mainly to a measuring device and a measuring method suitable for measuring the position of a protrusion of an electronic component having a protrusion.

Conventionally
A transparent table on which a measurement object (inspection object) having a plurality of protrusions arranged in at least one direction is placed.
A light irradiation unit that irradiates the measurement object placed on the upper surface of the transparent table with irradiation light having a light pattern in which the intensity of light changes periodically from the lower surface of the transparent table.
An optical detection unit (imaging unit) including a CCD camera that photographs the measurement object irradiated with the light pattern from the lower surface of the transparent table.
Data representing the three-dimensional shape of the lower surface (surface) of the measurement object by processing the image of the measurement object detected (photographed) by the light detection unit, and each pixel position (each) in the XY plane. A table surface that generates surface shape data (hereinafter referred to as "table surface shape data") indicating a distance (height information, floating distance from the table top surface) from the upper surface of the transparent table at a position (x, y)). Shape data generation unit (image processing unit) and
In the XY plane represented by the table surface shape data generated by the table surface shape data generation unit, a region including each of the plurality of protrusions in the measurement object is specified, and in each of the specified regions, a region including each of the plurality of protrusions is specified. A representative value determining unit that determines a representative value of a value indicating a distance from the upper surface of the transparent table, and a representative value determining unit.
A measuring device (inspection device) including a determination unit for determining whether or not the distribution of the representative values in each of the plurality of protrusions satisfies a preset standard is known. (For example, Patent Document 1)

Japanese Patent No. 5385703

<Definition>
The position (x, y) of each position (x, y) is the smallest element constituting the digital image and is called a pixel. This pixel has pixels and dots.
Each position (x, y) is the position of each pixel (which means a pixel or a dot).
Each position (x, y) is each pixel position.
The number of pixels (including the "resolution" defined by the number of dots in the scanning distance range) is, for example, the number of pixels of the light detection unit (imaging unit) composed of a CCD camera of 2048 pixels × 2048 pixels is about 4.19 million pixels. When the processing area is not specified (designated), for example, in the detection field area (shooting field area), the process of acquiring the height information of all the positions of 4.19 million pixels is performed. The process of acquiring the height information (distance) of all pixel positions in the detection field of view is also referred to as "all pixel position height acquisition process" below.

The prior art described above (see FIG. 6)
(A) A second reference plane, which is the height information (distance) of the upper surface of the transparent table, is generated from the datum plane (first reference plane DT) set in advance in the program by the all pixel position height acquisition process. The table surface shape data (A) on the upper surface of the table, which is composed of height information of all pixel positions, is stored in advance in the storage unit (see FIG. 6A).
(A) The first surface shape data (B), which is the height information (distance) of the object to be measured, is generated from the datum plane (first reference plane) by the all-pixel position height acquisition process ((Fig. 6). b) See),
(C) The height of all pixel positions of the object to be measured from the upper surface of the transparent table by performing an operation of subtracting the value of the table surface shape data (A) from the value of the first surface shape data (B) of all pixel positions. The table surface shape data (C), which is information (distance), is generated by the all-pixel position height acquisition process (see (c) in FIG. 6).
(D) In the XY plane represented by the table surface shape data (C) which is the height information (distance) of all pixel positions, the protrusion region (D) is a region including each protrusion in the measurement object. (See (d) in FIG. 6),
(E) In each of the identified protrusion regions, a representative value (E) of a value indicating height information (distance) from the upper surface of the transparent table is determined (see (e) in FIG. 6).
That is.

The prior art has the following problems.
(1) In order to determine the representative value, it is indispensable to generate table surface shape data including height information of all pixel positions (for example, 4,194,000 pixels).
The generation of the table surface shape data is as follows: [a] acquisition of the first surface shape data (B) consisting of height information of all pixel positions (for example, 4,194,000 pixels), and [b] height of all pixel positions. Acquisition of table surface shape data consisting of information, [c] All pixel position height acquisition process of subtracting the distance value of each pixel of table surface shape data from the distance value of each pixel of the first surface shape data (B) This is due to image processing (for example, 4,194,000 pixels).
That is, since the three processes (the [a], [b], and [c]) are all pixel position height acquisition processes, there is a drawback that the amount of image processing information is enormous.

(2) In the above-mentioned prior art, the physical upper surface of the transparent table is directly measured to measure the position of the upper surface of the transparent table, so that the resolution of the light detection unit (imaging unit) is the flatness (“warp”) of the transparent table. If the maximum height position and the minimum height position of the table top surface due to the tilt of the table are larger than the resolution of the imaging unit, the value of each measured pixel value is different in the table surface shape data. The table surface shape data is generated by subtracting the value of all pixel positions of the table surface shape data from the value of all pixel positions of the first surface shape data, which is a process of processing a huge amount of information. It had the problem of becoming.

In view of the above-mentioned drawbacks of the prior art, the present invention provides a measuring device and a measuring method that require a small amount of processing information for determining or determining a representative value of a value indicating height information (distance). The purpose is to do.

In order to achieve the above object, the present invention has the following configuration.
[First invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
The second reflected light, which is the reflected light from the reflecting member provided on the upper surface, the lower surface, the upper side or the lower side of the transparent table detected by the light detection unit, is processed to be processed from the first reference surface. A second reference surface setting unit that acquires a reflection member surface indicated by a distance and sets a second reference surface in which the reflection member surface is located at the upper surface position of the transparent table or near the upper surface position.
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. Distance values are equivalent,
It is a measuring device characterized by having the above-mentioned configuration.

[Second invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
Reflective members provided on the upper surface, lower surface, upper surface or lower side of the transparent table,
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value, and
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. A second reference for acquiring the reflective member surface indicated by the distance from the reference surface of 1 and setting a second reference surface in which the reflective member surface is located at the upper surface position of the transparent table or near the upper surface position. Surface setting part and
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane (second reference plane data) is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all pixel positions thereof. The distance values from the first reference plane are the same.
It is a measuring device characterized by having the above-mentioned configuration.

[Third invention]
In the measuring device according to the [first invention] or [second invention], the three-dimensional shape of the surface of the measurement object is represented by the distance of each pixel of the measurement object from the second reference plane. A second surface shape data generation unit may be provided to generate the surface shape data of 2 by performing an operation of subtracting the value of the second reference surface from the value of the first surface shape data. ..

[Fourth Invention]
A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and a reference position on the light detection unit side. A measuring method using a measuring device including a first reference surface preset or defined as, and a reflecting member provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value of
The second reflected light, which is the reflected light from the reflecting member detected by the light detection unit, is processed to acquire the reflecting member surface indicated by the distance from the first reference surface, and the reflecting member is obtained. A second reference surface having a surface set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. This is a measurement method characterized in that the distance values are the same.

[Fifth Invention]
A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and upper and lower surfaces of the transparent table. A measurement method using a measuring device including a reflection member provided on the upper side or the lower side and a first reference surface preset or determined as a reference position on the light detection unit side.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value,
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. The reflection member surface indicated by the distance from the reference surface of 1 is acquired, and a second reference surface in which the reflection member surface is set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. This is a measurement method characterized in that the distance values are the same.

[Sixth Invention]
In the measuring device according to the above [first invention], [second invention] or [third invention].
It is a configuration without the reflective member.
The measuring device is characterized in that the second reference surface is generated by processing the table top surface reflected light which is the reflected light from the top surface of the transparent table.

[Seventh Invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
A horizontal plane having a flatness and a horizontality of 0 degrees is set at the upper surface position of the transparent table generated on the program or near the upper surface position, and the distance values of all the pixel positions from the first reference surface are the same. The second reference plane setting unit that sets the second reference plane, which is
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
It is a measuring device characterized by having the above-mentioned configuration.

The present invention has the following effects.
Effect of [1st Invention] (1) A protrusion that is a region including each of the protrusions of the measurement object in the XY plane of the first surface shape data which is the distance (height information) of all pixel positions. A region is specified, and a first representative value, which is a representative distance value in the protrusion region, is determined.
The flatness and horizontality are horizontal planes of 0 degrees, or the flatness and horizontality are horizontal planes of 0 degrees by correction or the like, and the distance values of all the pixel positions from the first reference plane are the same. Set the value of the second reference plane,
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
Therefore, only the first surface shape data is the distance (height information) of all pixel positions.
The second representative value is obtained by subtracting the value of the second reference plane from the first representative value. For example, there are 100 protrusions, and all of the 100 protrusions are projected. When the area is specified, the first representative value is 100 points (100 pixel positions), and the value of the second reference plane (all values are the same value) is different from the first representative value of these 100 points. Since the second representative value is obtained by subtracting it, the amount of processed information is extremely small.
That is, the present invention has the effect of determining the second representative value with less information processing than in the prior art.
(2) Since it is possible to make a judgment based on the first representative value, if the judgment is made only by the first representative value, the first surface shape data is generated and the first surface shape is used. Processing with a small amount of information is sufficient to specify the protrusion region in the data and determine the first representative value in the protrusion region.
(3) Since the first surface shape data is data representing the three-dimensional shape of the lower surface (surface) of the measurement object, the three-dimensional shape image of the measurement object may be displayed on the screen for visual confirmation. For example, the second surface shape data may not be used or generated.
In the present invention, since both the first reference plane and the second reference plane are horizontal planes having a flatness and a horizontality of 0 degrees (the values at each pixel position are the same), the first one displayed on the display. The three-dimensional image of the surface shape data and the three-dimensional image of the second surface shape data are the same three-dimensional image.

In the present invention, the second reference plane, which is a horizontal plane having a flatness and a horizontality of 0 degrees, is set based on the measurement data of the lower surface (surface) of the reflective member. Therefore, the upper surface of the transparent table and the transparent table are set in the first place. Is not measured (detected), is not the target of measurement (detection), and is excluded from the target of measurement (detection). That is, there is no table surface shape data obtained by measuring the table top surface of the invention of Patent Document 1.

Since the present invention does not use the table surface shape data, which is the data of all pixel positions, which is an indispensable configuration in the invention of Patent Document 1, the area identification and the representative value determination are reduced in the amount of information processing. It's all done.
The present invention, which does not use the table surface shape data which is the data of all pixel positions, which is an essential configuration in the invention of Patent Document 1, is the core configuration of the table surface shape data which achieves the object of the invention of Patent Document 1. Since the use is denied, the invention of Patent Document 1 has an inhibitory factor that hinders the idea of the present invention.

Effect of [Second Invention] The difference from the above [First Invention] is that the reflection member region or the reflection member region including the reflection member is specified and detected by the light detection unit. The point is that the second reflected light, which is the reflected light of the reflecting member region, is processed to generate the second reference plane indicated by the distance from the first reference plane.
Therefore, the same effect as that of the above [first invention] is obtained, and the measurement area of the reflective member is limited to a narrow range of the specified reflective member region. Therefore, the information in the narrow range is a small amount of pixel position information. It has the effect of reducing the amount of processing information, and it is the "table surface shape data" which is the surface shape data of the table top surface consisting of the height information of all the pixel positions of the prior art in the processing of determining the representative value. It means not to use the huge amount of information.

Effect of [Third Invention] A second surface shape representing the three-dimensional shape of the surface of the object to be measured while having the same effect as the measuring device described in the above [first invention] or [second invention]. The data makes it possible to display the three-dimensional shape of the surface (lower surface or upper surface) of the object to be measured on the display.

Effect of [Fourth Invention] An effect similar to that of the above-mentioned [First Invention] is obtained.

Effect of [Fifth Invention] An effect similar to that of the above-mentioned [Second Invention] is obtained.

Effect of [Sixth Invention] The second reference surface is generated by processing the table top surface reflected light which is the reflected light from the upper surface of the transparent table, and the second reference surface is used to generate the above [first invention]. It has the same effect as the measuring device described in the [second invention] or the [third invention].

Effect of [7th Invention] The setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member, but the transparent table 2 generated on the program. A second reference plane is set at or near the top surface position, which is a horizontal plane having a flatness and horizontality of 0 degrees and whose distance values from the first reference plane DT are the same for all pixel positions. Is.
For example, the upper surface position of the transparent table or the vicinity of the upper surface position, which is measured and stored in advance, is stored in advance as the second reference surface. For example, a copy of the first reference plane DT, which is a horizontal plane having a flatness and a flatness of 0 degrees, is placed at or near the upper surface position of the transparent table that has been measured and stored in advance and is generated on the program. It is offset and used as the second reference plane. For example, the reference plane is set secondly by processing the pixel position values of the three shortest distance values or the shortest distance values of the first surface shape data.
It has the same effect as the effect of the above [first invention].

The conceptual diagram of Example 1 of this invention. The chart figure which shows the process of Example 1 of this invention. The schematic diagram which showed the process of Example 1 of this invention as an image. The screen view of the area specifying part of Example 1 of this invention. The conceptual diagram of Example 3 of this invention. The schematic diagram which showed the processing of the prior art as an image.

Hereinafter, examples which are the best mode for carrying out the present invention will be described. However, the present invention is not intended to be limited to these examples. Further, in the description of the embodiment described later, the same components of the above-described embodiment are designated by the same reference numerals, and duplicate description will be omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 4, the measuring device 1 has the following configuration.
A transparent table 2 made of transparent quartz glass and
A light detection unit 6 provided below the transparent table 2 and having a light irradiation unit 4 for irradiating the irradiation light 3 upward and a light detection unit 5 for detecting the reflected light of the irradiation light 3.
A first reference plane DT preset or defined as a reference position on the photodetector 5 side, and
A positioning frame 19 in the form of an enclosure made of transparent glass that transmits the irradiation light 3 that regulates the setting position of the measurement object W having the protrusion pw provided on the upper part of the transparent table 2 in the frame.
A plurality of reflecting members 7 for diffuse-reflecting the irradiation light 3 provided on the upper surface of the transparent table 2 in the positioning frame 19 outside the arrangement area of the measurement object W in a coating form.
Each pixel position (each) from the first reference surface DT to the measurement object W by processing the first reflected light 8 which is the reflected light from the measurement object W placed on the upper surface of the transparent table 2. The first surface shape data generation unit 10 that generates the first surface shape data HD1 representing the surface shape (three-dimensional shape) of the measurement object W at the distance of the position (x, y)), and
Area identification unit 21 and
In the XY plane of the first surface shape data HD1 displayed on the screen (display screen) of the region specifying unit 21, the protrusion region pa, which is the region including the protrusion pw of the measurement object W, is specified and specified. First representative value determination for determining a first representative value v1 (highest pixel position, lowest pixel position, average value of all pixel positions, etc.) which is a representative distance value in the projected protrusion region pa. Part 11 and
The second reflected light 12 which is the reflected light detected by the photodetector 5 is processed to acquire the reflecting member surface ms indicated by the distance from the first reference surface DT, and the reflecting member surface ms is transparent. A second reference surface setting unit 13 for setting a second reference surface DG located at the upper surface position of the table 2 or near the upper surface position, and
A second representative value determination unit 14 that determines the second representative value v2 by performing an operation of subtracting the value of the second reference plane DG from the first representative value v1.
The second surface shape data HD2 representing the three-dimensional shape of the surface (lower surface) of the measurement object W according to the distance of each pixel of the measurement object W from the second reference surface DG is the second surface shape data HD1 of the first surface shape data HD1. A second surface shape data generation unit 16 generated by performing an operation of subtracting the value of the second reference plane DG from the value, and
A determination unit 17 for determining whether or not the second representative value v2 is within a predetermined height position range, and
A determination unit 18 for determining whether or not the first representative value v1 is within a predetermined height position range, and
It consists of a control unit 20
The second reference plane DG is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane DT are the same.

The setting of the second reference plane DG by the second reference plane setting unit 13 is performed as follows.
The second reflected light 12 which is the reflected light from the reflecting member region ra which is the region of the reflecting member 7 at three places of the reflecting member 7 detected by the light detection unit 5 or the region including the reflecting member 7. To determine the representative values of the reflective members (positional values of the highest pixel, the position value of the lowest pixel, the average value of all the pixel position values, etc.) of the three reflective member 7s, and the representative value of the reflective member. A first triangular plane is created, and the plane is corrected to a horizontal plane having a flatness and flatness of 0 degrees (0 value) (the distance values of all pixel positions from the first reference plane DT are the same). The reflection member surface ms indicated by the distance from the reference surface DT of the above is acquired, and the second reference surface DG in which the reflection member surface ms is located at the upper surface position of the transparent table 2 or near the upper surface position is set (FIG. 1. See Fig. 2) .

The control unit 20 includes a first surface shape data generation unit 10, a first representative value determination unit 11, a second reference surface setting unit 13, a second representative value determination unit 14, and a second surface shape data generation unit. It has 16, a determination unit 17, a determination unit 18, an area identification unit 21, and the like.

The first reference plane DT is a reference position or a reference value arbitrarily determined on the program by the control unit 20 that controls the light detection unit 6, and is a horizontal plane having a flatness and a flatness of 0 degrees (0 values). The height position value is set to 0 value. The sensor reference plane DT is a "geometric tolerance reference" datum "".

FIG. 3 is a schematic view showing each pixel position. The vertical arrow indicates the distance value of each pixel position.
The left figure of FIG. 3A shows a row having the shortest distance value pixel position of the reflective member surface shape data RD at one place.
The right figure of FIG. 3A shows a row of the first surface shape data DH1 having the shortest distance value pixel position.
The left figure of FIG. 3B shows a row having a pixel position having the shortest distance value in the reflective member region ra. Here, the reflective member region ra is a region including the entire reflective member 7 (see FIG. 4).
The right figure of FIG. 3B shows a row having the shortest distance value pixel position of one protrusion region pa.

The resolution of the photodetector of the present invention is higher than the flatness of the upper surface of the transparent table.
In Example 1, the flatness of the upper surface of the transparent table 2 is between 0.6 μm and 3 μm, but the resolution of the photodetector is 0.5 μm or 0.25 μm.

The transparent table 2 through which the irradiation light 3 is transmitted and the upper surface thereof cannot be detected by the light detection unit 5 (diffuse reflected light that can be detected cannot be obtained), and the reflected light from the transparent table 2 is removed as noise. It has become.
The positioning frame 19 through which the irradiation light 3 passes cannot be detected by the light detection unit 5, and the reflected light from the positioning frame 19 is removed as noise.
The irradiated irradiation light hits the measurement object W and the reflecting member 7, and the reflected light is simultaneously detected and processed by the photodetector 5 (see (a) of FIG. 3). Therefore, the second reference plane DG is set for each measurement.
Therefore, the diffuse reflection light that can be detected by the light detection unit 5 cannot be obtained for the irradiation light of the portion other than the measurement object W and the reflection member 7 which are the diffuse reflection materials, and the data on the program does not measure as the unmeasurable pixel position. The pixel position of the measurement object W processed as the measurement pixel position and the diffuse reflected light is obtained forms the first surface shape data HD1, and the pixel position of the reflection member 7 forms the reflection member surface shape data RD ( (See (a) in FIG. 3).

On the screen (display screen) of the region specifying unit 21, an image of the first surface shape data HD1 (viewed from the XY plane) in the XY plane and an image of the reflective member surface shape data 22 of the reflective member in the XY plane are displayed. (See FIG. 4).
On the screen of the area identification unit 21 (display screen) ,
The three reflective member regions ra of the reflective member surface shape data 22 are specified (see FIG. 3B and FIG. 4).
The protrusion region pa (here, all protrusions are specified) of the first surface shape data HD1 is specified (see FIG. 3 (b) and FIG. 4).
When "processing" is instructed, the first representative value v1 is determined ((c) in FIG. 3), the reflection member surface ms is acquired, the second reference surface DG is set ((c) in FIG. 3), and the second. The determination of the representative value v2 ((d) in FIG. 3) is automatically performed.
The setting of the second reference surface DG is a non-setting mode that is automatically set at the same position as the reflective member surface ms, an automatic setting mode that is automatically set at a preset movement distance position, and an operator measures. The optional setting mode that can be set arbitrarily can be selected for each.
The screen of the area specifying unit 21 can enlarge and display an image, and for example, a region can be specified (designated) by enlarging and displaying one protrusion pw portion over the entire screen.

The protrusion region pa can be specified from the method of directly specifying the image of the first surface shape data HD1 (viewed from the XY plane) on the XY plane displayed on the display by drawing a frame with a mouse or the like, CAD data, or the like. There is a method of creating a specific location frame in advance and specifying the specific location frame by covering the image of the first surface shape data HD1 (viewed from the XY plane) on the XY plane displayed on the display.

The second surface shape data HD2 may be automatically generated after the determination of the second representative value v2, but a second surface shape data creation unit is provided and the operator's display is provided when necessary. It is generated by subtracting the second reference surface DG value from the stored first surface shape data HD1 value by a creation instruction operation such as clicking the second surface shape data creation button on the screen. Is good.

The three-dimensional shape image of the first surface shape data HD1 and the three-dimensional shape image of the second surface shape data HD2 can be displayed on the display.
The display line is color-coded according to the height distance of each pixel position, and the height can be visually recognized by the difference in color.
Since both the first reference surface DT and the second reference surface DG are horizontal planes with 0 degree flatness and horizontality (the values at each pixel position are the same), the first surface shape displayed on the display. The three-dimensional image of the data HD1 and the three-dimensional shape image of the second surface shape data HD2 are visually the same.
If the purpose is to visually recognize the shape of the lower surface (surface) of the object W to be measured, only the three-dimensional shape image of the first surface shape data HD1 is sufficient. In that case, the second surface shape data HD2 It is not necessary to generate the second surface shape data generation unit 16.

(1) In the first surface shape data DT, which is the distance (height information) of all pixel positions, the protrusion region pa, which is a region including each of the protrusions pw of the measurement object W, is specified, and the protrusions The first representative value v1, which is a representative distance value in the region pa, is determined, and the distance value is determined.
Set the value of the second reference plane DG that is a horizontal plane with a flatness of 0 or is made a horizontal plane with a flatness of 0 by correction or the like (that is, the distance values of all the pixel positions from the first reference plane DT are the same). ,
The second representative value v2 is determined by performing an operation of subtracting the value of the second reference plane DG from the value of the first representative value v1.
Therefore, only the first surface shape data is the distance (height information) of all pixel positions.
The second representative value is obtained by subtracting the value of the second reference plane DG (one value (all pixel values are the same value)) from the first representative value v1 for v2, for example, a protrusion. When there are 100 parts pw and the protrusion region pa is specified for all of the 100 protrusions pw, the first representative value v1 is 100, and from the first representative value v1 of these 100 places. Since the second representative value v2 is obtained by subtracting the value (one value) of the first reference plane DG, the processing information amount is extremely small.
That is, the second representative value v2 is determined by less information processing than in the prior art.
(2) Since the determination based on the first representative value v1 is possible, if the determination using only the first representative value v1 is sufficient, the first surface shape data HD1 is generated and the first surface shape data HD1 is generated. The protrusion region pa may be specified in the surface shape data HD1, and processing with a small amount of information may be sufficient to determine the first representative value v1 in the protrusion region pa.
(3) Since the first surface shape data HD1 is data representing the three-dimensional shape of the lower surface (surface) of the measurement object W, the three-dimensional shape image of the measurement object W is displayed on the screen for visual confirmation. If this is done, the second surface shape data HD2 (corresponding to the "table surface shape data" of the prior art) may or may not be used.
In the present invention, since both the first reference plane DT and the second reference plane DG are horizontal planes with flatness and horizontality of 0 degrees (values at each pixel position are the same), the first reference plane DT and the second reference plane DG are displayed on the display. The three-dimensional image of the surface shape data HD1 of 1 and the three-dimensional image of the second surface shape data HD2 are the same three-dimensional image.
(4) Since the present invention does not use the table surface shape data, which is the data of all pixel positions, which is an essential configuration in the invention of Patent Document 1, the region is specified and the representative value is determined. The amount is small.

The photodetection unit 6 projects irradiation light which is a striped pattern (sine wave pattern / sine wave pattern) onto the object W to be measured, and positions the reflected light 3 at each pixel position of the photodetector 5 composed of an image sensor ( A phase shift method is adopted in which detection and processing are performed at each position (x, y)).
In the present invention, the measuring method is not limited to the phase shift method.
In three-dimensional measurement, for example, there are monocular vision method, binocular vision method, multi-eye vision method, optical radar method, optical projection method, moire method, illuminance difference stereo method, and focus displacement sensor, line sensor, one-dimensional method. There are also measurements by a laser displacement meter, a two-dimensional laser displacement meter, an optical cutting method, and the like, and those by these measurement methods are also included in the technical category of the present invention.
The photodetector 9 includes various photodetectors such as a CMOS camera, a CCD camera, a line sensor camera (for example, "TDI camera"), and a TOF camera in the technical category.
Further, in the present invention, the reflective member is not limited to that of diffuse reflection. Specular reflection and the like (normal reflection and the like) are also included in the technical category of the present invention.
For example, a laser displacement meter is suitable for measuring a mirror surface with high accuracy. In this case, the reflective member does not have to be provided, and the upper surface of the transparent table itself can be detected and measured.

The setting position of the measurement object W is not only placed on the upper surface of the transparent table but also above the transparent table (upper side), for example, by an arm that attracts and holds the upper surface of the measurement object W. Some are.
The measurement object W is set on the upper surface or the upper surface of the transparent table 2 with the protrusion pw facing down for measurement.

The position where the reflective member is provided is provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table. The form provided on the upper surface of the transparent table includes application, placement, and adhesion. A form provided on the upper side of the transparent table includes, for example, a form in which a reflective member is provided on a transparent table separate from the transparent table, and the separate transparent table is arranged on the lower side or the upper side of the transparent table.

A transparent table 2 made of transparent quartz glass, a light irradiation unit 4 for irradiating the irradiation light 3 upward, and a light detection unit 5 for detecting the reflected light of the irradiation light 3 provided below the transparent table 2. Measurement having a light detection unit 6 having a light detection unit 6, a first reference surface DT preset or defined as a reference position on the light detection unit 5 side, and a protrusion pw provided in a fixed form on the upper part of the transparent table 2. A coating form is applied to the upper surface of a positioning frame 19 made of transparent glass through which irradiation light 3 transmits, which regulates the setting position of the object W in the frame, and a transparent table 2 in the positioning frame 19 outside the arrangement range of the measurement object W. The measuring device 1 provided with the plurality of reflecting members 7 for diffusing and reflecting the irradiation light 3 and the region specifying portion 21 realizes the following measurement method.
Each pixel position (each) from the first reference surface DT to the measurement object W by processing the first reflected light 8 which is the reflected light from the measurement object W placed on the upper surface of the transparent table 2. The first surface shape data HD1 representing the surface shape of the measurement object W at the distance of the position (x, y)) is generated (see (a) of FIGS . 2 and 3).
In the XY plane of the first surface shape data HD1 displayed on the screen (display screen) of the region specifying unit 21, the protrusion region pa, which is the region including the protrusion pw of the measurement object W, is specified (FIG. 4, FIG. 2 and FIG. 3 (b)), the first representative value v1 (highest pixel position, lowest pixel position or all pixel position) which is a representative distance value in the specified protrusion region pa. (E.g., etc.) is determined ((c) in FIGS . 4, 2, and 3),
The second reflected light 12 which is the reflected light from the reflecting member region ra which is the region of the reflecting member 7 at three places of the reflecting member 7 detected by the light detection unit 5 or the region including the reflecting member 7. (See FIG. 4) to determine the representative values of the reflecting members of the three reflecting members 7 (positional values of the highest pixel, position values of the lowest pixels, average values of all pixel position values, etc.). A triangular plane connecting the representative values of the reflecting member is created, and the plane is set to a horizontal plane having a flatness and a flatness of 0 degrees (0 value) (the distance values of all pixel positions from the first reference plane DT are the same value). The reflection member surface ms (reflection member surface data) indicated by the corrected distance from the first reference surface DT is acquired, and the reflection member surface ms is positioned at the upper surface position of the transparent table 2 or near the upper surface position. Set the reference plane DG (second reference plane data) of 2 (see (c) of FIGS . 2 and 3), and set it.
The second representative value v2 is determined by subtracting the value of the second reference plane DG from the first representative value v1 (see (d) of FIGS . 2 and 3).
It is determined whether or not the second representative value v2 is within the predetermined height position range, and the second representative value v2 is determined.
This is a measurement method configured as described above.

The second surface shape data HD2 representing the three-dimensional shape of the surface (lower surface) of the measurement target W according to the distance of each pixel of the measurement target W from the second reference surface DG is the second surface shape data HD1 of the first surface shape data HD1. It may be fixed that it is generated by performing an operation of subtracting the value of the second reference plane DG from the value.

In the second embodiment of the present invention shown in FIG. 5, the main difference from the first embodiment is that the positioning frame 19 is not provided, and the light detection unit irradiates the irradiation unit with the irradiation light 26 composed of a white laser beam. The light detection unit 28 is an irradiation unit and the light detection unit is a light detection unit 27 composed of a CMOS sensor. The point is that the measuring device 29 is formed so as to detect and process the reflected light 30 (second reflected light) on the upper surface of the table, which is the reflected light, acquire the reflecting member surface ms, and set the second reference surface DG. ..
The reflected light reflected by the measurement object W of the irradiation light 26 forms the first reflected light 31.
A transmissive film is applied so that the reflectance of the white laser beam on the upper surface of the transparent table 2 is larger than the reflectance of the lower surface of the transparent table 2. That is, the transmittance of the lower surface of the white laser beam is high and the transmittance of the upper surface is set lower than that.
The photodetector unit 28 performs measurement while moving (scanning).

In the fourth embodiment of the present invention, the main difference from the first embodiment is that the setting of the second reference plane by the second reference plane setting unit is not limited to the second reflected light of the reflecting member. Then, in the upper surface position of the transparent table 2 generated on the program or in the vicinity of the upper surface position, a horizontal plane having a flatness and a horizontality of 0 degrees is set, and the distance values of all the pixel positions from the first reference surface DT. The point is that the second reference plane having the same value is set.

The setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member, but is located at the upper surface position of the transparent table 2 generated on the program or in the vicinity of the upper surface position. The second reference plane is set so that the flatness and the horizontality are horizontal planes of 0 degrees and the distance values of all the pixel positions from the first reference plane DT are the same.
For example, the upper surface position of the transparent table that has been measured and stored in advance or the vicinity of the upper surface position is stored or set in advance as the second reference surface. For example, a copy of the first reference plane DT, which is a horizontal plane having a flatness and a flatness of 0 degrees, is placed at or near the upper surface position of the transparent table that has been measured and stored in advance and is generated on the program. It is offset and used as the second reference plane. For example, the second reference plane may be set by processing the three pixel position values of the shortest distance value or the shortest distance value of the first surface shape data.

The present invention is mainly used in an industry for measuring the flatness of an electronic component having protrusions such as terminals.

DT: First reference plane,
pw: protrusion,
W: Object to be measured,
pa: protrusion area,
v1: First representative value,
ra: Reflective member area,
ms: Reflective member surface,
DG: Second reference plane,
v2: Second representative value,
HD1: First surface shape data,
HD2: Second surface shape data,
RD: Reflective member surface shape data,
1: Measuring device,
2: Transparent table,
3: Irradiation light,
4: Light irradiation part,
5: Photodetector,
6: Light detection unit,
7: Reflective member,
8: First reflected light,
10: First surface shape data generator,
11: First representative value determination unit,
12: Second reflected light,
13: Second reference plane setting unit,
14: Second representative value determination unit,
16: Second surface shape data generator,
17: Judgment unit,
18: Judgment unit,
19: Positioning frame,
20: Control unit,
21: Area identification part,
25: Irradiation part,
26: Irradiation light,
27: Photodetector,
28: Light detection unit,
29: Measuring device,
30: Table top reflected light,
31: First reflected light.

The present invention relates mainly to a measuring device and a measuring method suitable for measuring the position of a protrusion of an electronic component having a protrusion.

Conventionally
A transparent table on which a measurement object (inspection object) having a plurality of protrusions arranged in at least one direction is placed.
A light irradiation unit that irradiates the measurement object placed on the upper surface of the transparent table with irradiation light having a light pattern in which the intensity of light changes periodically from the lower surface of the transparent table.
An optical detection unit (imaging unit) including a CCD camera that photographs the measurement object irradiated with the light pattern from the lower surface of the transparent table.
Data representing the three-dimensional shape of the lower surface (surface) of the measurement object by processing the image of the measurement object detected (photographed) by the light detection unit, and each pixel position (each) in the XY plane. A table surface that generates surface shape data (hereinafter referred to as "table surface shape data") indicating a distance (height information, floating distance from the table top surface) from the upper surface of the transparent table at a position (x, y)). Shape data generation unit (image processing unit) and
In the XY plane represented by the table surface shape data generated by the table surface shape data generation unit, a region including each of the plurality of protrusions in the measurement object is specified, and in each of the specified regions, a region including each of the plurality of protrusions is specified. A representative value determining unit that determines a representative value of a value indicating a distance from the upper surface of the transparent table, and a representative value determining unit.
A measuring device (inspection device) including a determination unit for determining whether or not the distribution of the representative values in each of the plurality of protrusions satisfies a preset standard is known. (For example, Patent Document 1)

Japanese Patent No. 5385703

<Definition>
The position (x, y) of each position (x, y) is the smallest element constituting the digital image and is called a pixel. This pixel has pixels and dots.
Each position (x, y) is the position of each pixel (which means a pixel or a dot).
Each position (x, y) is each pixel position.
The number of pixels (including the "resolution" defined by the number of dots in the scanning distance range) is, for example, the number of pixels of the light detection unit (imaging unit) composed of a CCD camera of 2048 pixels × 2048 pixels is about 4.19 million pixels. When the processing area is not specified (designated), for example, in the detection field area (shooting field area), the process of acquiring the height information of all the positions of 4.19 million pixels is performed. The process of acquiring the height information (distance) of all pixel positions in the detection field of view is also referred to as "all pixel position height acquisition process" below.

The prior art described above (see FIG. 6)
(A) A second reference plane, which is the height information (distance) of the upper surface of the transparent table, is generated from the datum plane (first reference plane DT) set in advance in the program by the all pixel position height acquisition process. The table surface shape data (A) on the upper surface of the table, which is composed of height information of all pixel positions, is stored in advance in the storage unit (see FIG. 6A).
(A) The first surface shape data (B), which is the height information (distance) of the object to be measured, is generated from the datum plane (first reference plane) by the all-pixel position height acquisition process ((Fig. 6). b) See),
(C) The height of all pixel positions of the object to be measured from the upper surface of the transparent table by performing an operation of subtracting the value of the table surface shape data (A) from the value of the first surface shape data (B) of all pixel positions. The table surface shape data (C), which is information (distance), is generated by the all-pixel position height acquisition process (see (c) in FIG. 6).
(D) In the XY plane represented by the table surface shape data (C) which is the height information (distance) of all pixel positions, the protrusion region (D) is a region including each protrusion in the measurement object. (See (d) in FIG. 6),
(E) In each of the identified protrusion regions, a representative value (E) of a value indicating height information (distance) from the upper surface of the transparent table is determined (see (e) in FIG. 6).
That is.

The prior art has the following problems.
(1) In order to determine the representative value, it is indispensable to generate table surface shape data including height information of all pixel positions (for example, 4,194,000 pixels).
The generation of the table surface shape data is as follows: [a] acquisition of the first surface shape data (B) consisting of height information of all pixel positions (for example, 4,194,000 pixels), and [b] height of all pixel positions. Acquisition of table surface shape data consisting of information, [c] All pixel position height acquisition process of subtracting the distance value of each pixel of table surface shape data from the distance value of each pixel of the first surface shape data (B) This is due to image processing (for example, 4,194,000 pixels).
That is, since the three processes (the [a], [b], and [c]) are all pixel position height acquisition processes, there is a drawback that the amount of image processing information is enormous.

(2) In the above-mentioned prior art, the physical upper surface of the transparent table is directly measured to measure the position of the upper surface of the transparent table, so that the resolution of the light detection unit (imaging unit) is the flatness (“warp”) of the transparent table. If the maximum height position and the minimum height position of the table top surface due to the tilt of the table are larger than the resolution of the imaging unit, the measured pixel values of the table surface shape data are different. The table surface shape data is generated by subtracting the value of all pixel positions of the table surface shape data from the value of all pixel positions of the first surface shape data, which is a huge amount of information. It had the problem of becoming.

In view of the above-mentioned drawbacks of the prior art, the present invention provides a measuring device and a measuring method that require a small amount of processing information for determining or determining a representative value of a value indicating height information (distance). The purpose is to do.

In order to achieve the above object, the present invention has the following configuration.
[First invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
The second reflected light, which is the reflected light from the reflecting member provided on the upper surface, the lower surface, the upper side or the lower side of the transparent table detected by the light detection unit, is processed to be processed from the first reference surface. A second reference surface setting unit that acquires a reflection member surface indicated by a distance and sets a second reference surface in which the reflection member surface is located at the upper surface position of the transparent table or near the upper surface position.
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. Distance values are equivalent,
It is a measuring device characterized by having the above-mentioned configuration.

[Second invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
Reflective members provided on the upper surface, lower surface, upper surface or lower side of the transparent table,
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value, and
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. A second reference for acquiring the reflective member surface indicated by the distance from the reference surface of 1 and setting a second reference surface in which the reflective member surface is located at the upper surface position of the transparent table or near the upper surface position. Surface setting part and
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane (second reference plane data) is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all pixel positions thereof. The distance values from the first reference plane are the same.
It is a measuring device characterized by having the above-mentioned configuration.

[Third invention]
In the measuring device according to the [first invention] or [second invention], the three-dimensional shape of the surface of the measurement object is represented by the distance of each pixel of the measurement object from the second reference plane. A second surface shape data generation unit may be provided to generate the surface shape data of 2 by performing an operation of subtracting the value of the second reference surface from the value of the first surface shape data. ..

[Fourth Invention]
A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and a reference position on the light detection unit side. A measuring method using a measuring device including a first reference surface preset or defined as, and a reflecting member provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value of
The second reflected light, which is the reflected light from the reflecting member detected by the light detection unit, is processed to acquire the reflecting member surface indicated by the distance from the first reference surface, and the reflecting member is obtained. A second reference surface having a surface set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. This is a measurement method characterized in that the distance values are the same.

[Fifth Invention]
A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and upper and lower surfaces of the transparent table. A measurement method using a measuring device including a reflection member provided on the upper side or the lower side and a first reference surface preset or determined as a reference position on the light detection unit side.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value,
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. The reflection member surface indicated by the distance from the reference surface of 1 is acquired, and a second reference surface in which the reflection member surface is set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, or is made a horizontal plane having a flatness and a horizontality of 0 degrees by correction or the like, and all the pixel positions thereof are from the first reference plane. This is a measurement method characterized in that the distance values are the same.

[Sixth Invention]
In the measuring device according to the above [first invention], [second invention] or [third invention].
It is a configuration without the reflective member.
The measuring device is characterized in that the second reference surface is generated by processing the table top surface reflected light which is the reflected light from the top surface of the transparent table.

[Seventh Invention]
With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
A horizontal plane having a flatness and a horizontality of 0 degrees is set at the upper surface position of the transparent table generated on the program or near the upper surface position, and the distance values of all the pixel positions from the first reference surface are the same. The second reference plane setting unit that sets the second reference plane, which is
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
It is a measuring device characterized by having the above-mentioned configuration.

The present invention has the following effects.
Effect of [1st Invention] (1) A protrusion that is a region including each of the protrusions of the measurement object in the XY plane of the first surface shape data which is the distance (height information) of all pixel positions. A region is specified, and a first representative value, which is a representative distance value in the protrusion region, is determined.
The flatness and horizontality are horizontal planes of 0 degrees, or the flatness and horizontality are horizontal planes of 0 degrees by correction or the like, and the distance values of all the pixel positions from the first reference plane are the same. Set the value of the second reference plane,
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
Therefore, only the first surface shape data is the distance (height information) of all pixel positions.
The second representative value is obtained by subtracting the value of the second reference plane from the first representative value. For example, there are 100 protrusions, and all of the 100 protrusions are projected. When the area is specified, the first representative value is 100 points (100 pixel positions), and the value of the second reference plane (all values are the same value) is different from the first representative value of these 100 points. Since the second representative value is obtained by subtracting it, the amount of processed information is extremely small.
That is, the present invention has the effect of determining the second representative value with less information processing than in the prior art.
(2) Since it is possible to make a judgment based on the first representative value, if the judgment is made only by the first representative value, the first surface shape data is generated and the first surface shape is used. Processing with a small amount of information is sufficient to specify the protrusion region in the data and determine the first representative value in the protrusion region.
(3) Since the first surface shape data is data representing the three-dimensional shape of the lower surface (surface) of the measurement object, the three-dimensional shape image of the measurement object may be displayed on the screen for visual confirmation. For example, the second surface shape data may not be used or generated.
In the present invention, since both the first reference plane and the second reference plane are horizontal planes having a flatness and a horizontality of 0 degrees (the values at each pixel position are the same), the first one displayed on the display. The three-dimensional image of the surface shape data and the three-dimensional image of the second surface shape data are the same three-dimensional image.

In the present invention, the second reference plane, which is a horizontal plane having a flatness and a horizontality of 0 degrees, is set based on the measurement data of the lower surface (surface) of the reflective member. Therefore, the upper surface of the transparent table and the transparent table are set in the first place. Is not measured (detected), is not the target of measurement (detection), and is excluded from the target of measurement (detection). That is, there is no table surface shape data obtained by measuring the table top surface of the invention of Patent Document 1.

Since the present invention does not use the table surface shape data, which is the data of all pixel positions, which is an indispensable configuration in the invention of Patent Document 1, the area identification and the representative value determination are reduced in the amount of information processing. It's all done.
The present invention, which does not use the table surface shape data which is the data of all pixel positions, which is an essential configuration in the invention of Patent Document 1, is the core configuration of the table surface shape data which achieves the object of the invention of Patent Document 1. Since the use is denied, the invention of Patent Document 1 has an inhibitory factor that hinders the idea of the present invention.

Effect of [Second Invention] The difference from the above [First Invention] is that the reflection member region or the reflection member region including the reflection member is specified and detected by the light detection unit. The point is that the second reflected light, which is the reflected light of the reflecting member region, is processed to generate the second reference plane indicated by the distance from the first reference plane.
Therefore, the same effect as that of the above [first invention] is obtained, and the measurement area of the reflective member is limited to a narrow range of the specified reflective member region. Therefore, the information in the narrow range is a small amount of pixel position information. It has the effect of reducing the amount of processing information, and it is the "table surface shape data" which is the surface shape data of the table top surface consisting of the height information of all the pixel positions of the prior art in the processing of determining the representative value. It means not to use the huge amount of information.

Effect of [Third Invention] A second surface shape representing the three-dimensional shape of the surface of the object to be measured while having the same effect as the measuring device described in the above [first invention] or [second invention]. The data makes it possible to display the three-dimensional shape of the surface (lower surface or upper surface) of the object to be measured on the display.

Effect of [Fourth Invention] An effect similar to that of the above-mentioned [First Invention] is obtained.

Effect of [Fifth Invention] An effect similar to that of the above-mentioned [Second Invention] is obtained.

Effect of [Sixth Invention] The second reference surface is generated by processing the table top surface reflected light which is the reflected light from the upper surface of the transparent table, and the second reference surface is used to generate the above [first invention]. It has the same effect as the measuring device described in the [second invention] or the [third invention].

Effect of [7th Invention] The setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member, but the transparent table 2 generated on the program. A second reference plane is set at or near the top surface position, which is a horizontal plane having a flatness and horizontality of 0 degrees and whose distance values from the first reference plane DT are the same for all pixel positions. Is.
For example, the upper surface position of the transparent table or the vicinity of the upper surface position, which is measured and stored in advance, is stored in advance as the second reference surface. For example, a copy of the first reference plane DT, which is a horizontal plane having a flatness and a flatness of 0 degrees, is placed at or near the upper surface position of the transparent table that has been measured and stored in advance and is generated on the program. It is offset and used as the second reference plane. For example, the reference plane is set secondly by processing the pixel position values of the three shortest distance values or the shortest distance values of the first surface shape data.
It has the same effect as the effect of the above [first invention].

The conceptual diagram of Example 1 of this invention. The chart figure which shows the process of Example 1 of this invention. The schematic diagram which showed the process of Example 1 of this invention as an image. The screen view of the area specifying part of Example 1 of this invention. The conceptual diagram of Example 3 of this invention. The schematic diagram which showed the processing of the prior art as an image.

Hereinafter, examples which are the best mode for carrying out the present invention will be described. However, the present invention is not intended to be limited to these examples. Further, in the description of the embodiment described later, the same components of the above-described embodiment are designated by the same reference numerals, and duplicate description will be omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 4, the measuring device 1 has the following configuration.
A transparent table 2 made of transparent quartz glass and
A light detection unit 6 provided below the transparent table 2 and having a light irradiation unit 4 for irradiating the irradiation light 3 upward and a light detection unit 5 for detecting the reflected light of the irradiation light 3.
A first reference plane DT preset or defined as a reference position on the photodetector 5 side, and
A positioning frame 19 in the form of an enclosure made of transparent glass that transmits the irradiation light 3 that regulates the setting position of the measurement object W having the protrusion pw provided on the upper part of the transparent table 2 in the frame.
A plurality of reflecting members 7 for diffuse-reflecting the irradiation light 3 provided on the upper surface of the transparent table 2 in the positioning frame 19 outside the arrangement area of the measurement object W in a coating form.
Each pixel position (each) from the first reference surface DT to the measurement object W by processing the first reflected light 8 which is the reflected light from the measurement object W placed on the upper surface of the transparent table 2. The first surface shape data generation unit 10 that generates the first surface shape data HD1 representing the surface shape (three-dimensional shape) of the measurement object W at the distance of the position (x, y)), and
Area identification unit 21 and
In the XY plane of the first surface shape data HD1 displayed on the screen (display screen) of the region specifying unit 21, the protrusion region pa, which is the region including the protrusion pw of the measurement object W, is specified and specified. First representative value determination for determining a first representative value v1 (highest pixel position, lowest pixel position, average value of all pixel positions, etc.) which is a representative distance value in the projected protrusion region pa. Part 11 and
The second reflected light 12 which is the reflected light detected by the photodetector 5 is processed to acquire the reflecting member surface ms indicated by the distance from the first reference surface DT, and the reflecting member surface ms is transparent. A second reference surface setting unit 13 for setting a second reference surface DG located at the upper surface position of the table 2 or near the upper surface position, and
A second representative value determination unit 14 that determines the second representative value v2 by performing an operation of subtracting the value of the second reference plane DG from the first representative value v1.
The second surface shape data HD2 representing the three-dimensional shape of the surface (lower surface) of the measurement object W according to the distance of each pixel of the measurement object W from the second reference surface DG is the second surface shape data HD1 of the first surface shape data HD1. A second surface shape data generation unit 16 generated by performing an operation of subtracting the value of the second reference plane DG from the value, and
A determination unit 17 for determining whether or not the second representative value v2 is within a predetermined height position range, and
A determination unit 18 for determining whether or not the first representative value v1 is within a predetermined height position range, and
It consists of a control unit 20
The second reference plane DG is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane DT are the same.

The setting of the second reference plane DG by the second reference plane setting unit 13 is performed as follows.
The second reflected light 12 which is the reflected light from the reflecting member region ra which is the region of the reflecting member 7 at three places of the reflecting member 7 detected by the light detection unit 5 or the region including the reflecting member 7. To determine the representative values of the reflective members (positional values of the highest pixel, the position value of the lowest pixel, the average value of all the pixel position values, etc.) of the three reflective member 7s, and the representative value of the reflective member. A first triangular plane is created, and the plane is corrected to a horizontal plane having a flatness and flatness of 0 degrees (0 value) (the distance values of all pixel positions from the first reference plane DT are the same). The reflection member surface ms indicated by the distance from the reference surface DT of the above is acquired, and the second reference surface DG in which the reflection member surface ms is located at the upper surface position of the transparent table 2 or near the upper surface position is set (FIG. 1. See Fig. 2) .

The control unit 20 includes a first surface shape data generation unit 10, a first representative value determination unit 11, a second reference surface setting unit 13, a second representative value determination unit 14, and a second surface shape data generation unit. It has 16, a determination unit 17, a determination unit 18, a region identification unit 21, and the like.

The first reference plane DT is a reference position or a reference value arbitrarily determined on the program by the control unit 20 that controls the photodetection unit 6, and is a horizontal plane having a flatness and a flatness of 0 degrees (0 values). The height position value is set to 0 value. The sensor reference plane DT is a "geometric tolerance reference" datum "".

FIG. 3 is a schematic view showing each pixel position. The vertical arrow indicates the distance value of each pixel position.
The left figure of FIG. 3A shows a row having the shortest distance value pixel position of the reflective member surface shape data RD at one place.
The right figure of FIG. 3A shows a row of the first surface shape data DH1 having the shortest distance value pixel position.
The left figure of FIG. 3B shows a row having a pixel position having the shortest distance value in the reflective member region ra. Here, the reflective member region ra is a region including the entire reflective member 7 (see FIG. 4).
The right figure of FIG. 3B shows a row having the shortest distance value pixel position of one protrusion region pa.

The resolution of the photodetector of the present invention is higher than the flatness of the upper surface of the transparent table.
In Example 1, the flatness of the upper surface of the transparent table 2 is between 0.6 μm and 3 μm, but the resolution of the photodetector is 0.5 μm or 0.25 μm.

The transparent table 2 through which the irradiation light 3 is transmitted and the upper surface thereof cannot be detected by the light detection unit 5 (diffuse reflected light that can be detected cannot be obtained), and the reflected light from the transparent table 2 is removed as noise. It has become.
The positioning frame 19 through which the irradiation light 3 passes cannot be detected by the light detection unit 5, and the reflected light from the positioning frame 19 is removed as noise.
The irradiated irradiation light hits the measurement object W and the reflecting member 7, and the reflected light is simultaneously detected and processed by the photodetector 5 (see (a) of FIG. 3). Therefore, the second reference plane DG is set for each measurement.
Therefore, the diffuse reflection light that can be detected by the light detection unit 5 cannot be obtained for the irradiation light of the portion other than the measurement object W and the reflection member 7 which are the diffuse reflection materials, and the data on the program does not measure as the unmeasurable pixel position. The pixel position of the measurement object W processed as the measurement pixel position and the diffuse reflected light is obtained forms the first surface shape data HD1, and the pixel position of the reflection member 7 forms the reflection member surface shape data RD ( (See (a) in FIG. 3).

On the screen (display screen) of the region specifying unit 21, an image of the first surface shape data HD1 in the XY plane and an image of the reflective member surface shape data 22 of the reflective member in the XY plane are displayed (see FIG. 4). ).
On the screen of the area identification unit 21,
The three reflective member regions ra of the reflective member surface shape data 22 are specified (see FIG. 3B and FIG. 4).
The protrusion region pa (here, all protrusions are specified) of the first surface shape data HD1 is specified (see FIG. 3 (b) and FIG. 4).
When "processing" is instructed, the first representative value v1 is determined ((c) in FIG. 3), the reflection member surface ms is acquired, the second reference surface DG is set ((c) in FIG. 3), and the second. The determination of the representative value v2 ((d) in FIG. 3) is automatically performed.
The setting of the second reference surface DG is a non-setting mode that is automatically set at the same position as the reflective member surface ms, an automatic setting mode that is automatically set at a preset movement distance position, and an operator measures. The optional setting mode that can be set arbitrarily can be selected for each.
The screen of the area specifying unit 21 can enlarge and display an image, and for example, a region can be specified (designated) by enlarging and displaying one protrusion pw portion over the entire screen.

To specify the protrusion area pa, a method of directly specifying the image on the XY plane of the first surface shape data HD1 displayed on the display by drawing a frame with a mouse or the like, or creating a specific place frame in advance from CAD data or the like. Then, there is a method of specifying the specific location frame by an operation of covering the image on the XY plane of the first surface shape data HD1 displayed on the display.

The second surface shape data HD2 may be automatically generated after the determination of the second representative value v2, but a second surface shape data creation unit is provided and the operator's display is provided when necessary. It is generated by subtracting the second reference surface DG value from the stored first surface shape data HD1 value by a creation instruction operation such as clicking the second surface shape data creation button on the screen. Is good.

The three-dimensional shape image of the first surface shape data HD1 and the three-dimensional shape image of the second surface shape data HD2 can be displayed on the display.
The display line is color-coded according to the height distance of each pixel position, and the height can be visually recognized by the difference in color.
Since both the first reference surface DT and the second reference surface DG are horizontal planes with 0 degree flatness and horizontality (the values at each pixel position are the same), the first surface shape displayed on the display. The three-dimensional image of the data HD1 and the three-dimensional shape image of the second surface shape data HD2 are visually the same.
If the purpose is to visually recognize the shape of the lower surface (surface) of the object W to be measured, only the three-dimensional shape image of the first surface shape data HD1 is sufficient. In that case, the second surface shape data HD2 It is not necessary to generate the second surface shape data generation unit 16.

(1) In the XY plane of the first surface shape data HD1 which is the distance (height information) of all the pixel positions, the protrusion region pa, which is the region including each of the protrusions pw of the measurement object W, is specified. , The first representative value v1, which is a representative distance value in the protrusion region pa, is determined.
Set the value of the second reference plane DG that is a horizontal plane with a flatness of 0 or is made a horizontal plane with a flatness of 0 by correction or the like (that is, the distance values of all the pixel positions from the first reference plane DT are the same). ,
The second representative value v2 is determined by performing an operation of subtracting the value of the second reference plane DG from the value of the first representative value v1.
Therefore, only the first surface shape data is the distance (height information) of all pixel positions.
The second representative value is obtained by subtracting the value of the second reference plane DG (one value (all pixel values are the same value)) from the first representative value v1 for v2, for example, a protrusion. When there are 100 parts pw and the protrusion region pa is specified for all of the 100 protrusions pw, the first representative value v1 is 100, and from the first representative value v1 of these 100 places. Since the second representative value v2 is obtained by subtracting the value (one value) of the first reference plane DG, the processing information amount is extremely small.
That is, the second representative value v2 is determined by less information processing than in the prior art.
(2) Since the determination based on the first representative value v1 is possible, if the determination using only the first representative value v1 is sufficient, the first surface shape data HD1 is generated and the first surface shape data HD1 is generated. The protrusion region pa may be specified in the surface shape data HD1, and processing with a small amount of information may be sufficient to determine the first representative value v1 in the protrusion region pa.
(3) Since the first surface shape data HD1 is data representing the three-dimensional shape of the lower surface (surface) of the measurement object W, the three-dimensional shape image of the measurement object W is displayed on the screen for visual confirmation. If this is done, the second surface shape data HD2 (corresponding to the "table surface shape data" of the prior art) may or may not be used.
In the present invention, since both the first reference plane DT and the second reference plane DG are horizontal planes with flatness and horizontality of 0 degrees (values at each pixel position are the same), the first reference plane DT and the second reference plane DG are displayed on the display. The three-dimensional image of the surface shape data HD1 of 1 and the three-dimensional image of the second surface shape data HD2 are the same three-dimensional image.
(4) Since the present invention does not use the table surface shape data, which is the data of all pixel positions, which is an essential configuration in the invention of Patent Document 1, the region is specified and the representative value is determined. The amount is small.

The photodetection unit 6 projects irradiation light which is a striped pattern (sine wave pattern / sine wave pattern) onto the object W to be measured, and positions the reflected light 3 at each pixel position of the photodetector 5 composed of an image sensor ( A phase shift method is adopted in which detection and processing are performed at each position (x, y)).
In the present invention, the measuring method is not limited to the phase shift method.
In three-dimensional measurement, for example, there are monocular vision method, binocular vision method, multi-eye vision method, optical radar method, optical projection method, moire method, illuminance difference stereo method, and focus displacement sensor, line sensor, one-dimensional method. There are also measurements by a laser displacement meter, a two-dimensional laser displacement meter, an optical cutting method, and the like, and those by these measurement methods are also included in the technical category of the present invention.
The photodetector 9 includes various photodetectors such as a CMOS camera, a CCD camera, a line sensor camera (for example, "TDI camera"), and a TOF camera in the technical category.
Further, in the present invention, the reflective member is not limited to that of diffuse reflection. Specular reflection and the like (normal reflection and the like) are also included in the technical category of the present invention.
For example, a laser displacement meter is suitable for measuring a mirror surface with high accuracy. In this case, the reflective member does not have to be provided, and the upper surface of the transparent table itself can be detected and measured.

The setting position of the measurement object W is not only placed on the upper surface of the transparent table but also above the transparent table (upper side), for example, by an arm that attracts and holds the upper surface of the measurement object W. Some are.
The measurement object W is set on the upper surface or the upper surface of the transparent table 2 with the protrusion pw facing down for measurement.

The position where the reflective member is provided is provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table. The form provided on the upper surface of the transparent table includes application, placement, and adhesion. A form provided on the upper side of the transparent table includes, for example, a form in which a reflective member is provided on a transparent table separate from the transparent table, and the separate transparent table is arranged on the lower side or the upper side of the transparent table.

A transparent table 2 made of transparent quartz glass, a light irradiation unit 4 for irradiating the irradiation light 3 upward, and a light detection unit 5 for detecting the reflected light of the irradiation light 3 provided below the transparent table 2. Measurement having a light detection unit 6 having a light detection unit 6, a first reference surface DT preset or defined as a reference position on the light detection unit 5 side, and a protrusion pw provided in a fixed form on the upper part of the transparent table 2. A coating form is applied to the upper surface of a positioning frame 19 made of transparent glass through which irradiation light 3 transmits, which regulates the setting position of the object W in the frame, and a transparent table 2 in the positioning frame 19 outside the arrangement range of the measurement object W. The measuring device 1 provided with the plurality of reflecting members 7 for diffusing and reflecting the irradiation light 3 and the region specifying portion 21 realizes the following measurement method.
Each pixel position (each) from the first reference surface DT to the measurement object W by processing the first reflected light 8 which is the reflected light from the measurement object W placed on the upper surface of the transparent table 2. The first surface shape data HD1 representing the surface shape of the measurement object W at the distance of the position (x, y)) is generated (see (a) of FIGS . 2 and 3).
In the XY plane of the first surface shape data HD1 displayed on the screen (display screen) of the region specifying unit 21, the protrusion region pa, which is the region including the protrusion pw of the measurement object W, is specified (FIG. 4, FIG. 2 and FIG. 3 (b)), the first representative value v1 (highest pixel position, lowest pixel position or all pixel position) which is a representative distance value in the specified protrusion region pa. (E.g., etc.) is determined ((c) in FIGS . 4, 2, and 3),
The second reflected light 12 which is the reflected light from the reflecting member region ra which is the region of the reflecting member 7 at three places of the reflecting member 7 detected by the light detection unit 5 or the region including the reflecting member 7. (See FIG. 4) to determine the representative values of the reflecting members of the three reflecting members 7 (positional values of the highest pixel, position values of the lowest pixels, average values of all pixel position values, etc.). A triangular plane connecting the representative values of the reflecting member is created, and the plane is set to a horizontal plane having a flatness and a flatness of 0 degrees (0 value) (the distance values of all pixel positions from the first reference plane DT are the same value). The reflection member surface ms (reflection member surface data) indicated by the corrected distance from the first reference surface DT is acquired, and the reflection member surface ms is positioned at the upper surface position of the transparent table 2 or near the upper surface position. Set the reference plane DG (second reference plane data) of 2 (see (c) of FIGS . 2 and 3), and set it.
The second representative value v2 is determined by subtracting the value of the second reference plane DG from the first representative value v1 (see (d) of FIGS . 2 and 3).
It is determined whether or not the second representative value v2 is within the predetermined height position range, and the second representative value v2 is determined.
This is a measurement method configured as described above.

The second surface shape data HD2 representing the three-dimensional shape of the surface (lower surface) of the measurement object W according to the distance of each pixel of the measurement object W from the second reference surface DG is the second surface shape data HD1 of the first surface shape data HD1. It may be fixed that it is generated by performing an operation of subtracting the value of the second reference plane DG from the value.

In the second embodiment of the present invention shown in FIG. 5, the main difference from the first embodiment is that the positioning frame 19 is not provided, and the light detection unit irradiates the irradiation unit with the irradiation light 26 composed of a white laser beam. The light detection unit 28 is an irradiation unit and the light detection unit is a light detection unit 27 composed of a CMOS sensor. The point is that the measuring device 29 is formed so as to detect and process the reflected light 30 (second reflected light) on the upper surface of the table, which is the reflected light, acquire the reflecting member surface ms, and set the second reference surface DG. ..
The reflected light reflected by the measurement object W of the irradiation light 26 forms the first reflected light 31.
A transmissive film is applied so that the reflectance of the white laser beam on the upper surface of the transparent table 2 is larger than the reflectance of the lower surface of the transparent table 2. That is, the transmittance of the lower surface of the white laser beam is high and the transmittance of the upper surface is set lower than that.
The photodetector unit 28 performs measurement while moving (scanning).

In the fourth embodiment of the present invention, the main difference from the first embodiment is that the setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member. Then, in the upper surface position of the transparent table 2 generated on the program or in the vicinity of the upper surface position, a horizontal plane having a flatness and a horizontality of 0 degrees is set, and the distance values of all the pixel positions from the first reference surface DT. The point is that a second reference plane having the same value is set.

The setting of the second reference plane by the second reference plane setting unit is not limited to only the second reflected light of the reflecting member, but is located at the upper surface position of the transparent table 2 generated on the program or in the vicinity of the upper surface position. The second reference plane is set so that the flatness and the horizontality are horizontal planes of 0 degrees and the distance values of all the pixel positions from the first reference plane DT are the same.
For example, the upper surface position of the transparent table that has been measured and stored in advance or the vicinity of the upper surface position is stored or set in advance as the second reference surface. For example, a copy of the first reference plane DT, which is a horizontal plane having a flatness and a flatness of 0 degrees, is placed at or near the upper surface position of the transparent table that has been measured and stored in advance and is generated on the program. It is offset and used as the second reference plane. For example, the second reference plane may be set by processing the three pixel position values of the shortest distance value or the shortest distance value of the first surface shape data.

The present invention is mainly used in an industry for measuring the flatness of an electronic component having protrusions such as terminals.

DT: First reference plane,
pw: protrusion,
W: Object to be measured,
pa: protrusion area,
v1: First representative value,
ra: Reflective member area,
ms: Reflective member surface,
DG: Second reference plane,
v2: Second representative value,
HD1: First surface shape data,
HD2: Second surface shape data,
RD: Reflective member surface shape data,
1: Measuring device,
2: Transparent table,
3: Irradiation light,
4: Light irradiation part,
5: Photodetector,
6: Light detection unit,
7: Reflective member,
8: First reflected light,
10: First surface shape data generator,
11: First representative value determination unit,
12: Second reflected light,
13: Second reference plane setting unit,
14: Second representative value determination unit,
16: Second surface shape data generator,
17: Judgment unit,
18: Judgment unit,
19: Positioning frame,
20: Control unit,
21: Area identification part,
25: Irradiation part,
26: Irradiation light,
27: Photodetector,
28: Light detection unit,
29: Measuring device,
30: Table top reflected light,
31: First reflected light.

Claims (7)

With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Reflective members provided on the upper surface, lower surface, upper surface or lower side of the transparent table,
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
The second reflected light, which is the reflected light from the reflecting member detected by the light detection unit, is processed to acquire the reflecting member surface indicated by the distance from the first reference surface, and the reflecting member is obtained. A second reference surface setting unit for setting a second reference surface whose surface is located at the upper surface position of the transparent table or near the upper surface position, and a second reference surface setting unit.
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane are the same.
A measuring device having the above configuration. With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
Reflective members provided on the upper surface, lower surface, upper surface or lower side of the transparent table,
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value, and
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. A second reference for acquiring the reflective member surface indicated by the distance from the reference surface of 1 and setting a second reference surface in which the reflective member surface is located at the upper surface position of the transparent table or near the upper surface position. Surface setting part and
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
The second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane are the same.
A measuring device having the above configuration. The second surface shape data representing the three-dimensional shape of the surface of the measurement object according to the distance of each pixel of the measurement object from the second reference plane is obtained from the value of the first surface shape data. The measuring apparatus according to claim 1 or 2, wherein a second surface shape data generation unit is provided, which is generated by performing an operation of subtracting the value of the reference plane of the above. A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and a reference position on the light detection unit side. A measuring method using a measuring device including a first reference surface preset or defined as, and a reflecting member provided on the upper surface, the lower surface, the upper surface or the lower side of the transparent table.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value of
The second reflected light, which is the reflected light from the reflecting member detected by the light detection unit, is processed to acquire the reflecting member surface indicated by the distance from the first reference surface, and the reflecting member is obtained. A second reference surface having a surface set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
A measuring method characterized in that the second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane are the same. A transparent table, a light irradiation unit provided below the transparent table for irradiating irradiation light upward, a light detection unit provided below the transparent table, and upper and lower surfaces of the transparent table. A measurement method using a measuring device including a reflection member provided on the upper side or the lower side and a first reference surface preset or determined as a reference position on the light detection unit side.
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data representing the surface shape of the object to be measured by the distance of the position is generated, and the surface shape data is generated.
In the XY plane of the first surface shape data, a protrusion region which is a region including the protrusion of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. Determine the representative value,
The region of the reflective member or the reflective member region which is a region including the reflective member is specified, and the second reflected light which is the reflected light of the reflective member region detected by the light detection unit is processed to perform the second reflected light. The reflection member surface indicated by the distance from the reference surface of 1 is acquired, and a second reference surface in which the reflection member surface is set at the upper surface position of the transparent table or near the upper surface position is generated.
The second representative value is determined by performing an operation of subtracting the value of the second reference plane from the first representative value.
A measuring method characterized in that the second reference plane is a horizontal plane having a flatness and a horizontality of 0 degrees, and the distance values of all the pixel positions from the first reference plane are the same. It is a configuration without the reflective member.
The measuring apparatus according to claim 1, 2 or 3, wherein the second reference surface is generated by processing the table upper surface reflected light which is the reflected light from the upper surface of the transparent table. With a transparent table
A light irradiation unit that irradiates the irradiation light upward, which is provided below the transparent table,
A photodetector provided below the transparent table and
A first reference plane set or defined in advance as a reference position on the photodetector side, and
Each pixel from the first reference plane to the measurement object is processed by processing the first reflected light which is the reflected light from the measurement object having the protrusion located on the upper surface or the upper surface of the transparent table. A first surface shape data generation unit that generates first surface shape data representing the surface shape of the object to be measured by the distance of the position, and a first surface shape data generation unit.
In the XY plane of the first surface shape data, a protrusion region which is a region including each of the protrusions of the measurement object is specified, and a first distance value which is a representative distance value in the specified protrusion region. The first representative value determination unit that determines the representative value of
A horizontal plane having a flatness and a horizontality of 0 degrees is set at the upper surface position of the transparent table generated on the program or near the upper surface position, and the distance values of all the pixel positions from the first reference surface are the same. The second reference plane setting unit that sets the second reference plane, which is
It is provided with a second representative value determining unit that determines a second representative value by performing an operation of subtracting the value of the second reference plane from the first representative value.
A measuring device having the above configuration.

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