JP2021021932A5

JP2021021932A5 -

Info

Publication number: JP2021021932A5
Application number: JP2020070010A
Authority: JP
Filing date: 2020-04-08
Publication date: 2023-04-03
Anticipated expiration: 2040-04-08

Claims

a lens barrel formed with an opening for passing light;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
a blowing unit disposed so as to surround the opening and blowing a gas having a higher cleanliness than the gas outside the lens barrel onto the surface;
An optical device comprising:

2. The optical device according to claim 1, wherein the spray part is arranged away from the edge of the opening in the direction along the surface.

3. The optical device according to claim 1, further comprising an enclosing member extending from the end of the aperture toward the outside of the lens barrel opposite to the optical component and surrounding the aperture. .

4. The apparatus further comprises a control section for controlling the flow rate of the gas that is blown onto the surface by the blowing section based on the flow rate of the gas outside the lens barrel on the opening. 2. The optical device according to item 1.

5. The optical system according to claim 4, wherein the control section changes the flow rate of the gas that the spray section blows onto the surface according to a change in the flow rate of the gas outside the lens barrel on the opening. Device.

The control unit
when the flow rate of the gas outside the lens barrel on the opening increases, increasing the flow rate of the gas that the spray unit blows onto the surface;
6. The optical device according to claim 5, wherein when the flow rate of the gas outside the lens barrel on the opening decreases, the flow rate of the gas that is blown onto the surface by the blowing section is reduced.

7. The optical device according to any one of claims 1 to 6, further comprising a first moving part that moves the spray part in a direction along the surface.

8. The optical device according to claim 7, wherein the first moving section moves the blowing section in a direction along the surface based on a flow rate of gas outside the lens barrel above the opening. .

The first moving part moves the blowing part so as to change the distance between the end of the opening and the blowing part according to a change in the flow rate of the gas outside the lens barrel on the opening. 9. The optical device according to claim 8, wherein the optical device is moved in a direction along the surface.

The first moving part is
When the flow rate of the gas outside the lens barrel on the opening increases, the blowing portion is moved along the surface so that the distance between the end of the opening and the blowing portion increases. to the
When the flow rate of the gas outside the lens barrel on the opening decreases, the blowing portion is moved along the surface so that the distance between the end of the opening and the blowing portion is shortened. 10. The optical device according to claim 9, wherein the optical device is moved to .

11. The optical device according to any one of claims 1 to 10, further comprising a second moving part that moves the spray part in a direction orthogonal to the direction along the surface.

The second moving part moves the spray part so that the distance between the surface and the spray part is constant according to the movement of the optical component in a direction perpendicular to the direction along the surface. 12. The optical device according to claim 11, wherein the movement is in a direction perpendicular to the direction along the surface.

13. The optical device according to any one of claims 1 to 12, wherein the aperture has a U-shaped aperture shape.

14. The optical device according to any one of claims 1 to 13, wherein the gas that the blowing unit blows onto the surface includes at least one of filtered air and an inert gas.

15. The optical device according to any one of claims 1 to 14, wherein the spraying portion is held by the lens barrel.

further comprising a holding member provided on the lens barrel and holding the optical component;
15. The optical device according to any one of claims 1 to 14, wherein the spraying portion is held by the holding member.

16. The optical device according to any one of claims 1 to 15, wherein the optical component is attached to the lens barrel so as to form a sealed space on the side opposite to the aperture.

a lens barrel formed with an opening for passing light;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
An optical device comprising a shielding portion provided in the lens barrel,
The shielding part is provided so that the gas having a higher cleanliness level than the gas outside the lens barrel flows toward the opening through the space between the shielding part and the optical component. An optical device characterized by comprising:

When the distance between the optical component and the shielding portion is X, and the distance between the optical component and the opening is Y,
1/100<X/Y<1/5
19. The optical device according to claim 18, wherein:

An exposure apparatus that exposes a substrate through a mask,
a stage that holds and moves the mask;
a projection optical system for projecting the pattern of the mask onto the substrate;
The projection optical system is
a lens barrel having an aperture through which light emitted from the mask and incident on the projection optical system passes;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
a blowing unit disposed so as to surround the opening and blowing a gas having a higher cleanliness than the gas outside the lens barrel onto the surface;
An exposure apparatus comprising:

An exposure apparatus that exposes a substrate through a mask,
a stage that holds and moves the mask;
a projection optical system for projecting the pattern of the mask onto the substrate;
The projection optical system is
a lens barrel having an aperture through which light emitted from the mask and incident on the projection optical system passes;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
and a shielding portion provided on the lens barrel,
The shielding part is provided so that the gas having a higher cleanliness level than the gas outside the lens barrel flows toward the opening through the space between the shielding part and the optical component. An exposure apparatus characterized by comprising:

exposing a substrate using the exposure apparatus according to claim 20 or 21;
developing the exposed substrate;
producing an article from the developed substrate;
A method for manufacturing an article, comprising: