JP2021018064A - Visual appearance inspection method and visual appearance inspection device - Google Patents

Visual appearance inspection method and visual appearance inspection device Download PDF

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JP2021018064A
JP2021018064A JP2019131750A JP2019131750A JP2021018064A JP 2021018064 A JP2021018064 A JP 2021018064A JP 2019131750 A JP2019131750 A JP 2019131750A JP 2019131750 A JP2019131750 A JP 2019131750A JP 2021018064 A JP2021018064 A JP 2021018064A
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inspected
visual appearance
shape
feature amount
luminance abnormality
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真志 園田
Shinji Sonoda
真志 園田
孝博 染次
Takahiro Sometsugu
孝博 染次
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Proterial Ltd
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Hitachi Metals Ltd
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Abstract

To provide a visual appearance inspection method for detecting a defect generated in the visual appearance of an inspection object, the visual appearance inspection method which can stably perform highly accurate defect detection in a visual appearance inspection device, and the visual appearance inspection device.SOLUTION: A visual appearance inspection method for inspecting a defect on the visual appearance of an inspection object by using a luminance abnormal part extraction model generated by deep learning comprises: a first step of acquiring a plurality of images by imaging the inspection object while changing a lighting condition; a second step of extracting a luminance abnormal part generated in the visual appearance of the inspection object by inputting the plurality of images to the luminance abnormal part extraction model; a third step of acquiring a shape feature amount by measuring the shape of the luminance abnormal part; and a fourth step of determining whether or not the luminance abnormal part is defective by evaluating the shape feature amount.SELECTED DRAWING: Figure 2

Description

本発明は、外観検査方法及び外観検査装置に関する。 The present invention relates to a visual inspection method and a visual inspection apparatus.

従来から、製品や製品部品等の検査物を撮像した画像を用いて、被検査物の外観を検査する技術が知られている。
特に、最近は、良品及び不良品を含む複数枚の学習用画像から、機械学習によって抽出された特徴量を分類して、被検査物を撮像した画像に含まれる被検査物の特徴量と比較評価することによって、人を介さずに自動で被検査物の良否を判定する技術が注目されて、開発が進んでいる(例えば、特許文献1参照)。
この際、通常、良品や不良品の分類する際に分類モデル(分類器)を用いるが、分類モデルの分類精度を向上するために、欠陥の画像を含む複数の学習用画像を基にした深層学習による分類モデルの生成が行われている(例えば、特許文献2参照)。
Conventionally, there has been known a technique for inspecting the appearance of an inspected object by using an image of an inspected object such as a product or a product part.
In particular, recently, the feature quantities extracted by machine learning from a plurality of learning images including non-defective products and defective products are classified and compared with the feature quantities of the inspected object included in the image of the inspected object. A technique for automatically determining the quality of an inspected object by evaluation without human intervention has attracted attention and is being developed (see, for example, Patent Document 1).
At this time, a classification model (classifier) is usually used when classifying non-defective products and defective products, but in order to improve the classification accuracy of the classification model, a deep layer based on a plurality of learning images including a defect image is used. A classification model is generated by learning (see, for example, Patent Document 2).

特開2017−211259号公報Japanese Unexamined Patent Publication No. 2017-21159 特開2018−005640号公報JP-A-2018-005640

しかし、通常、1台のカメラと複数の照明を用いて定められた方向から撮影した2次元画像を、学習用画像として使用することが一般的であるため、死角が生じたり、欠陥部分の顕在化がされないといった状況が起きていた。そのため、学習用画像における情報量が足りず、深層学習を用いても十分な特徴量を抽出して分類することができなかった。
その結果、被検査物の外観に生じた欠陥の検出において、過検出や見逃しが多くなり、外観検査における被検査物の良否判定精度が低下するという問題があった。
However, since it is common to use a two-dimensional image taken from a predetermined direction using one camera and a plurality of lights as a learning image, a blind spot may occur or a defective part may appear. There was a situation where it was not converted. Therefore, the amount of information in the learning image was insufficient, and it was not possible to extract and classify a sufficient amount of features even by using deep learning.
As a result, in the detection of defects generated in the appearance of the object to be inspected, there are many over-detections and oversights, and there is a problem that the quality determination accuracy of the inspected object in the appearance inspection is lowered.

そこで本発明では、被検査物の外観に生じた欠陥を検出するための外観検査方法、及び外観検査装置において、安定して、高精度な欠陥検出をすることが可能な外観検査方法、及び外観検査装置を提供することを目的とする。 Therefore, in the present invention, the visual inspection method for detecting defects generated in the appearance of the object to be inspected, the visual inspection method capable of stably and highly accurate defect detection in the visual inspection apparatus, and the appearance. The purpose is to provide an inspection device.

前述した目的を達成するために、第1の発明は、深層学習によって生成された輝度異常部抽出モデルを用いて、被検査物の外観上の欠陥を検査する外観検査方法であって、照明条件を変えながら前記被検査物を撮像して、複数の画像を取得する第1工程と、前記複数の画像を前記輝度異常部抽出モデルに入力することにより、前記被検査物の外観に生じた輝度異常部を抽出する第2工程と、前記輝度異常部の形状を測定することにより、形状特徴量を取得する第3工程と、前記形状特徴量を評価することにより、前記形状特徴量が欠陥か否かを判定する第4工程を有することを特徴とする外観検査方法である。 In order to achieve the above-mentioned object, the first invention is an appearance inspection method for inspecting an appearance defect of an object to be inspected by using a luminance abnormality part extraction model generated by deep learning, and lighting conditions. The brightness generated in the appearance of the object to be inspected by the first step of acquiring a plurality of images by imaging the object to be inspected while changing the above and by inputting the plurality of images into the luminance abnormality portion extraction model. The second step of extracting the abnormal portion, the third step of acquiring the shape feature amount by measuring the shape of the brightness abnormality portion, and the evaluation of the shape feature amount indicate whether the shape feature amount is defective. It is a visual inspection method characterized by having a fourth step of determining whether or not it is present.

また、第2の発明は、深層学習によって生成された輝度異常部抽出モデルを用いて、被検査物の外観上の欠陥を検査する外観検査装置であって、照明装置と、撮像装置と、前記被検査物を把持する把持装置と、前記把持装置により把持された被検査物を搬送する搬送装置と、形状計測装置と、前記照明装置、前記撮像装置、前記把持装置、前記搬送装置、及び前記形状計測装置を制御する制御装置と、演算装置とを具備し、前記制御装置によって、前記照明装置、前記撮像装置、前記把持装置及び前記搬送装置を動作させて、照明条件を変えながら前記被検査物を撮像する画像取得手段と、前記複数の画像を基に、前記輝度異常部抽出モデルを用いて、前記被検査物の外観に生じた輝度異常部を抽出する輝度異常部抽出手段と、前記制御装置によって前記形状計測装置を動作させて、前記輝度異常部の形状を測定し、形状特徴量を取得する特徴量取得手段と、前記形状特徴量を評価して、前記形状特徴量が欠陥か否かを判定する第2欠陥判定手段を備えることを特徴とする外観検査装置である。 The second invention is an appearance inspection device for inspecting an appearance defect of an object to be inspected by using a luminance abnormality part extraction model generated by deep learning, and includes a lighting device, an imaging device, and the above. A gripping device for gripping an object to be inspected, a transporting device for transporting the object to be inspected gripped by the gripping device, a shape measuring device, the lighting device, the imaging device, the gripping device, the transporting device, and the above. The control device for controlling the shape measuring device and the arithmetic device are provided, and the lighting device, the imaging device, the gripping device, and the transport device are operated by the control device, and the inspection is performed while changing the lighting conditions. An image acquisition means for capturing an object, a brightness abnormality extraction means for extracting a brightness abnormality generated in the appearance of the object to be inspected by using the brightness abnormality extraction model based on the plurality of images, and the brightness abnormality extraction means. The shape measuring device is operated by the control device, the shape of the luminance abnormality portion is measured, the feature amount acquisition means for acquiring the shape feature amount, and the shape feature amount is evaluated, and the shape feature amount is defective. The visual inspection apparatus is provided with a second defect determining means for determining whether or not the defect is present.

本発明によれば、外観検査方法及び外観検査装置において、不十分な深層学習に起因する曖昧な判断を排除することになるため、被検査物の欠陥検出において、過検出や見逃しが極端に少なくなり、外観検査における良否判定精度の低下を抑えることができる。
従って、本発明は、様々な製品や製品部品の外観を、安定して、精度よく検査する上で極めて有用である。
According to the present invention, in the visual inspection method and the visual inspection apparatus, ambiguous judgments due to insufficient deep learning are eliminated, so that there are extremely few over-detections and oversights in the defect detection of the inspected object. Therefore, it is possible to suppress a decrease in the quality judgment accuracy in the visual inspection.
Therefore, the present invention is extremely useful for stably and accurately inspecting the appearance of various products and product parts.

外観検査装置1の全体概略図。The whole schematic view of the visual inspection apparatus 1. 外観検査装置1による外観検査のフローチャート。The flowchart of the appearance inspection by the appearance inspection apparatus 1.

以下、本発明の実施形態について、図面を参照しながら詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図1は、外観検査装置1の全体概略図である。外観検査装置1は、撮像装置2、照明装置3、形状測定装置4、搬送装置5、把持装置6、台座7、支柱8、及びこれらを制御する制御装置9を備えている。なお、配線等については図示を省略する。 FIG. 1 is an overall schematic view of the visual inspection device 1. The visual inspection device 1 includes an imaging device 2, a lighting device 3, a shape measuring device 4, a transport device 5, a gripping device 6, a pedestal 7, a support column 8, and a control device 9 for controlling these. The wiring and the like are not shown.

ここで、外観検査装置1では、台座7上に支柱8が設置され、支柱8の最上部に撮像装置2を取り付けて、撮像装置2の下に照明装置3を配置することにより、被検査物10を上からの光で照らして撮像することができ、更に、支柱8には、形状測定装置4と、把持装置6を備えた搬送装置5が設置されている。 Here, in the visual inspection device 1, the support column 8 is installed on the pedestal 7, the image pickup device 2 is attached to the uppermost portion of the support column 8, and the lighting device 3 is arranged under the image pickup device 2. An image can be taken by illuminating 10 with light from above, and a shape measuring device 4 and a transport device 5 provided with a gripping device 6 are installed on the support column 8.

外観検査装置1は、被検査物10として、例えば、鋳物継手等の複雑形状の表面の欠陥を検出する装置である。 The visual inspection device 1 is a device that detects defects on the surface of a complicated shape such as a cast joint as the object 10 to be inspected.

撮像装置2は、例えばデジタルカメラであり、図示を省略したレンズを介して、被検査物10を撮像できるようにしている。 The image pickup device 2 is, for example, a digital camera, and is capable of taking an image of the object 10 to be inspected through a lens (not shown).

照明装置3は、例えば白色LEDである。複数の照明装置3は、互いに位置及び照射方向が異なり、それぞれ、被検査物10に向けて光を照射できるようにしている。すなわち、被検査物10にあらゆる方向から光を照射できるようにしている。なお、照明装置3は、図示の例では4台の照明装置3を用いて、被検査物10を撮像している。 The lighting device 3 is, for example, a white LED. The plurality of lighting devices 3 have different positions and irradiation directions from each other so that light can be irradiated toward the object 10 to be inspected. That is, the object 10 to be inspected can be irradiated with light from all directions. In the illustrated example, the lighting device 3 uses four lighting devices 3 to image the object 10 to be inspected.

形状測定装置4は、例えば光切断式の三次元測定器である。被検査物10を走査することで、被検査物10の表面形状を測定できるようにしている。 The shape measuring device 4 is, for example, an optical cutting type three-dimensional measuring device. By scanning the object to be inspected 10, the surface shape of the object to be inspected 10 can be measured.

搬送装置5は、例えば多関節ロボットである。搬送装置5の先端に取り付けた把持装置6で被検査物10を把持し、被検査物7の表面全体について撮像や形状測定ができるような姿勢で、撮像位置や形状測定位置に搬送できるようにしている。 The transport device 5 is, for example, an articulated robot. The object 10 to be inspected is gripped by the gripping device 6 attached to the tip of the transfer device 5, so that the object 10 can be conveyed to the imaging position or the shape measurement position in a posture capable of imaging and measuring the shape of the entire surface of the object 7 to be inspected. ing.

把持装置6は、例えば二爪ハンドである。被検査物10の表面の任意の場所を把持し、被検査物10の表面全体について撮像や形状測定ができるような姿勢にできるようにしている。 The gripping device 6 is, for example, a two-claw hand. The surface of the object to be inspected 10 is gripped at an arbitrary position so that the entire surface of the object to be inspected 10 can be in a posture capable of imaging and shape measurement.

撮像装置2、照明装置3、形状測定装置4、搬送装置5、把持装置6は、図示を省略した配線により、制御装置9と接続している。制御装置9は、例えばコンピュータであり、各種条件の設定や処理の開始等の指示を入力するキーボードやタッチパネル等の入力部と、事前に各部の動作や合否判定基準が記憶されたメモリ、HDD、SSD等の記憶部と、あらかじめ入力されたプログラムに基づいて各種の演算や処理を行うCPU等の演算・処理部等を有している。また、制御装置9は、通信制御部により撮像装置2から画像を取得できるとともに、取得した画像や検査結果を記憶部に記憶することもできる。また、制御装置9は、検査結果等をディスプレイやプリンタ等の出力部に出力することができる。 The image pickup device 2, the lighting device 3, the shape measuring device 4, the transport device 5, and the gripping device 6 are connected to the control device 9 by wiring (not shown). The control device 9 is, for example, a computer, and includes input units such as a keyboard and a touch panel for inputting instructions such as setting various conditions and starting processing, and a memory, HDD, and HDD in which the operations and pass / fail judgment criteria of each unit are stored in advance. It has a storage unit such as an SSD, and a calculation / processing unit such as a CPU that performs various calculations and processes based on a program input in advance. In addition, the control device 9 can acquire an image from the image pickup device 2 by the communication control unit, and can also store the acquired image and the inspection result in the storage unit. Further, the control device 9 can output the inspection result or the like to an output unit such as a display or a printer.

より具体的には、制御装置9の演算・処理部は、把持装置6で被検査物10の表面の所定の位置を把持し、搬送装置5で被検査物10を所定の姿勢で搬送して停止し、照明装置3を順次個別に発光させる。そして、制御装置9の演算・処理部は、それぞれの照明装置3の発光と同期して、被検査物10を撮像装置2により撮像する。更に、制御装置9は、照明装置3の発光と撮像装置2の撮像が終了すると、搬送装置5で被検査物10を所定の姿勢に搬送することができる。これを被検査物10の全面について繰り返し行うことにより、各種撮像条件による複数の画像を撮像することができる。 More specifically, the calculation / processing unit of the control device 9 grips a predetermined position on the surface of the object to be inspected 10 by the gripping device 6, and conveys the object 10 to be inspected in a predetermined posture by the conveying device 5. The lighting device 3 is stopped and the lighting devices 3 are sequentially and individually emitted. Then, the calculation / processing unit of the control device 9 images the object 10 to be inspected by the image pickup device 2 in synchronization with the light emission of each lighting device 3. Further, the control device 9 can transport the object 10 to be inspected to a predetermined posture by the transport device 5 when the light emission of the lighting device 3 and the imaging of the image pickup device 2 are completed. By repeating this on the entire surface of the object 10 to be inspected, it is possible to capture a plurality of images under various imaging conditions.

次に、被検査物の外観検査方法について説明する。
図2が、外観検査装置1を用いて被検査物の外観に生じた欠陥の良否を判定する、外観検査方法のフローチャートである。
まず、被検査物10を把持装置6で把持し、搬送装置5及び把持装置6で被検査物10を所定の姿勢で搬送する。
Next, a method of visual inspection of the object to be inspected will be described.
FIG. 2 is a flowchart of a visual inspection method for determining the quality of defects generated in the appearance of an object to be inspected by using the visual inspection device 1.
First, the object to be inspected 10 is gripped by the gripping device 6, and the object to be inspected 10 is transported in a predetermined posture by the transfer device 5 and the gripping device 6.

その後、ステップS01において、照明方向と姿勢を組み合わせた複数の撮像条件により、被検査物10の表面を複数の方向から撮像し、複数の画像を取得する。 After that, in step S01, the surface of the object to be inspected 10 is imaged from a plurality of directions under a plurality of imaging conditions combining the illumination direction and the posture, and a plurality of images are acquired.

特に、制御装置9により、照明装置3を順次個別に発光させて、被検査物10に対して各方面から光を照射する。また、同時に制御装置9により、撮像装置2で被検査物10を撮像する。例えば、4台の照明装置3を用いることにより、一つの姿勢において、撮像条件の異なる4枚の画像を取得することができる。 In particular, the control device 9 sequentially causes the lighting devices 3 to emit light individually, and irradiates the object 10 to be inspected with light from each direction. At the same time, the control device 9 images the object 10 to be inspected by the image pickup device 2. For example, by using four lighting devices 3, it is possible to acquire four images having different imaging conditions in one posture.

そして、搬送装置5及び把持装置6を所定の姿勢で搬送させるたびに、同一の撮像動作を繰り返す。例えば、姿勢を8回変えることにより、8姿勢×4枚で32枚の画像を取得する。 Then, the same imaging operation is repeated each time the transport device 5 and the gripping device 6 are transported in a predetermined posture. For example, by changing the posture eight times, 32 images are acquired with 8 postures x 4 images.

次のステップS02では、あらかじめ深層学習によって生成されて、制御装置9の記憶部に記憶された輝度異常部抽出モデルに、ステップS01で取得した複数の画像を入力して、被検査物10の輝度異常部を抽出する。 In the next step S02, a plurality of images acquired in step S01 are input to the luminance abnormality part extraction model generated in advance by deep learning and stored in the storage unit of the control device 9, and the luminance of the object 10 to be inspected 10 is input. Extract the abnormal part.

次のステップS03では、ステップS02の検出結果に基づき、被検査物10の全画像について輝度異常部が検出されたか否かを判定する。被検査物10の全画像について輝度異常部が抽出されなかった場合には、ステップS07に進み、欠陥なしと判断して被検査物10を合格とする。 In the next step S03, based on the detection result of step S02, it is determined whether or not the luminance abnormality portion is detected in all the images of the object 10 to be inspected. If the luminance abnormality part is not extracted from all the images of the object 10 to be inspected, the process proceeds to step S07, and it is determined that there is no defect, and the object 10 to be inspected is passed.

一方、被検査物10のある画像から輝度異常部を検出した場合には、制御装置9の記憶部に画像内での輝度異常部の位置情報を記憶し、ステップS04に進む。 On the other hand, when a brightness abnormality portion is detected from an image of the object 10 to be inspected, the position information of the brightness abnormality portion in the image is stored in the storage unit of the control device 9, and the process proceeds to step S04.

ステップS04では、形状測定装置4を用いて輝度異常部の形状特徴量を測定する。なお、形状特徴量とは、例えば、直径、深さ、高さ等である。 In step S04, the shape feature amount of the luminance abnormality portion is measured by using the shape measuring device 4. The shape feature amount is, for example, a diameter, a depth, a height, or the like.

この際、制御装置9の記憶部に記憶した輝度異常部の位置情報を基に、搬送装置5及び把持装置6を用いて、形状測定装置4まで輝度異常部が測定できる姿勢で搬送する。 At this time, based on the position information of the brightness abnormality portion stored in the storage unit of the control device 9, the transfer device 5 and the gripping device 6 are used to convey the brightness abnormality portion to the shape measuring device 4 in a posture in which the brightness abnormality portion can be measured.

次のステップS05では、形状特徴量に関する測定値と、制御装置9の記憶部にあらかじめ記憶されている形状特徴量の基準値と比較し、形状特徴量における要素の少なくとも一つが、基準値を超過していた場合には、ステップS06に進み、輝度異常部を欠陥と判断し、欠陥ありとして被検査物10を不合格とする。 In the next step S05, the measured value related to the shape feature amount is compared with the reference value of the shape feature amount stored in advance in the storage unit of the control device 9, and at least one of the elements in the shape feature amount exceeds the reference value. If this is the case, the process proceeds to step S06, the abnormal brightness portion is determined to be defective, and the object to be inspected 10 is rejected as having a defect.

一方、形状特徴量における要素の全てにおいて、測定値が基準値未満である場合には、ステップS07に進み、欠陥なしと判断して被検査物10を合格とする。 On the other hand, if the measured value is less than the reference value in all the elements in the shape feature amount, the process proceeds to step S07, and it is determined that there is no defect and the inspected object 10 is passed.

ここまで、発明の実施形態について説明してきたが、本発明は、上記実施形態に限定されるものではない。
例えば、本実施形態の外観検査装置1では、形状測定装置4と搬送装置5が、支柱8に設置されているが、支柱8とは別に、それぞれ台座7上に設置されていても良い。
また例えば、本実施形態の外観検査装置1では、一組の搬送装置5と把持装置6を備えているが、複数組の搬送装置5と把持装置6を設置して、被検査物7を複数組の搬送装置5と把持装置6で受け渡して把持と搬送を行っても構わない。
Although the embodiments of the invention have been described so far, the present invention is not limited to the above embodiments.
For example, in the visual inspection device 1 of the present embodiment, the shape measuring device 4 and the transport device 5 are installed on the support column 8, but they may be installed on the pedestal 7 separately from the support column 8.
Further, for example, although the visual inspection device 1 of the present embodiment includes a set of transport devices 5 and a gripping device 6, a plurality of sets of transport devices 5 and gripping devices 6 are installed to provide a plurality of objects 7 to be inspected. It may be handed over by a set of transporting device 5 and gripping device 6 to grip and transport.

1:外観検査装置
2:撮像装置
3:照明装置
4:形状測定装置
5:搬送装置
6:把持装置
7:台座
8:支柱
9:制御装置
10:被検査物
1: Visual inspection device 2: Imaging device 3: Lighting device 4: Shape measuring device 5: Conveyor device 6: Gripping device 7: Pedestal 8: Support 9: Control device 10: Object to be inspected

Claims (2)

深層学習によって生成された輝度異常部抽出モデルを用いて、被検査物の外観上の欠陥を検査する外観検査方法であって、
照明条件を変えながら前記被検査物を撮像して、複数の画像を取得する第1工程と、
前記複数の画像を前記輝度異常部抽出モデルに入力することにより、前記被検査物の外観に生じた輝度異常部を抽出する第2工程と、
前記輝度異常部の形状を測定することにより、形状特徴量を取得する第3工程と、
前記形状特徴量を評価することにより、前記輝度異常部が欠陥か否かを判定する第4工程と、を有することを特徴とする外観検査方法。
It is a visual inspection method that inspects the appearance defects of the object to be inspected by using the luminance abnormality extraction model generated by deep learning.
The first step of capturing an image of the object to be inspected while changing the lighting conditions to acquire a plurality of images, and
A second step of extracting the luminance abnormality portion generated in the appearance of the object to be inspected by inputting the plurality of images into the luminance abnormality portion extraction model, and
The third step of acquiring the shape feature amount by measuring the shape of the luminance abnormality portion, and
A visual inspection method comprising a fourth step of determining whether or not the luminance abnormality portion is a defect by evaluating the shape feature amount.
深層学習によって生成された輝度異常部抽出モデルを用いて、被検査物の外観上の欠陥を検査する外観検査装置であって、
照明装置と、撮像装置と、前記被検査物を把持する把持装置と、前記把持装置により把持された被検査物を搬送する搬送装置と、形状計測装置と、前記照明装置、前記撮像装置、前記把持装置、前記搬送装置、及び前記形状計測装置を制御する制御装置と、演算装置と
を具備し、
前記制御装置によって、前記照明装置、前記撮像装置、前記把持装置及び前記搬送装置を動作させて、照明条件を変えながら前記被検査物を撮像する画像取得手段と、
前記複数の画像を基に、前記輝度異常部抽出モデルを用いて、前記被検査物の外観に生じた輝度異常部を抽出する輝度異常部抽出手段と、
前記制御装置によって前記形状計測装置を動作させて、前記輝度異常部の形状を測定し、形状特徴量を取得する特徴量取得手段と、
前記形状特徴量を評価して、前記輝度異常部が欠陥か否かを判定する第2欠陥判定手段とを備えることを特徴とする外観検査装置。

It is a visual inspection device that inspects defects in the appearance of the object to be inspected using the luminance abnormality extraction model generated by deep learning.
The lighting device, the image pickup device, the gripping device for gripping the object to be inspected, the transport device for transporting the object to be inspected gripped by the gripping device, the shape measuring device, the lighting device, the imaging device, and the above. A control device for controlling the gripping device, the transport device, and the shape measuring device, and a calculation device are provided.
An image acquisition means for imaging the object to be inspected while changing the lighting conditions by operating the lighting device, the imaging device, the gripping device, and the transporting device by the control device.
Based on the plurality of images, the luminance abnormality extraction model is used to extract the luminance abnormality portion generated in the appearance of the object to be inspected, and the luminance abnormality extraction means.
A feature amount acquisition means for operating the shape measuring device by the control device, measuring the shape of the luminance abnormality portion, and acquiring the shape feature amount.
An visual inspection apparatus comprising a second defect determining means for evaluating the shape feature amount and determining whether or not the luminance abnormality portion is a defect.

JP2019131750A 2019-07-17 2019-07-17 Visual appearance inspection method and visual appearance inspection device Pending JP2021018064A (en)

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