JP2021014849A - Vacuum system - Google Patents

Abstract

To provide a particularly high exhaust speed in a vacuum chamber while limiting a structural space of, in particular, a vacuum pump.SOLUTION: In a vacuum system 10 including a vacuum pump 12 and at least one vacuum chamber 14, a first pump stage 28 and a second pump stage 30 respectively have at least one rotor element 36, the rotor elements are located on a common rotor 38, a first inlet 20 is connected to an upstream end of the first pump stage 28, and a second inlet 22 is connected to an upstream end of the second pump stage 30, a downstream end of the first pump stage bypasses the second inlet and is connected to the upstream end of the second pump stage, and the first inlet and the second inlet are connected to the same vacuum chamber.SELECTED DRAWING: Figure 6

Description

The present invention is a vacuum system comprising a vacuum pump, particularly a turbo molecular pump, and at least one vacuum chamber, wherein the vacuum pump has at least a first inlet and a second inlet, a common outlet, and at least. It has a first pump stage and a second pump stage, the first pump stage and the second pump stage each have at least one rotor element, and the rotor elements are arranged on a common rotor. The first inlet is connected to the upstream end of the first pump stage and the second inlet is connected to the upstream end of the second pump stage. It relates to a vacuum system in which the downstream end of the first pump stage bypasses the second inlet and is connected to the upstream end of the second pump stage.

In an exemplary vacuum application, the vacuum chamber is exhausted at a particularly high exhaust rate. The available assembly space in vacuum pumps used for this purpose, especially turbo molecular pumps, is severely limited. In particular, the assembly space in the radial direction with respect to the rotor axis is limited. In principle, the assembly dimensions of the pump should be as compact as possible, in which case the axial length relative to the rotor diameter can be particularly large, rather than very limited. This is because the assembly member also has some assembly length in certain applications, such as mass spectrometers.

Therefore, an object of the present invention is to provide a particularly high exhaust rate, especially in a vacuum chamber, while limiting the structural space of the vacuum pump.

This problem is solved by the vacuum system according to claim 1, and in particular, the first inlet and the second inlet are connected to the same vacuum chamber.

This significantly increases the exhaust rate and thus creates a particularly low pressure in the chamber. Moreover, this increase in exhaust speed can be achieved substantially without the need for an increase in rotor diameter and an increase in rotor speed. An exemplary calculation estimates an increase in exhaust speed up to 80% rather than up to 50% at a constant rotor diameter and constant rotor speed.

Increasing the rotor length compared to known structures, for example to provide inductive elements, additional pump stages and / or additional inlets, may be advantageous in this context. Or it is necessary in a specific structure. However, axial length structural space is less of an issue than pump diameter or rotor diameter in some applications. Furthermore, the effect of changes in rotor length, especially on the dynamic behavior of the rotor due to the increase, is less than the effect of changes in diameter, mainly due to the high speed of vacuum pumps, especially turbomolecular pumps. Moreover, in the increase of the exhaust speed according to the present invention, in particular, the rotor diameter and the rotor speed can be sufficiently maintained, so that the dynamic characteristics of the rotor also change only in a small range, and as a result, in the best case, Support concepts and components of known structures can also be used, or generally relatively few or well-realizable requirements are placed on the support. Therefore, the cost can be kept within the range.

Therefore, the present invention provides a particularly good vacuum chamber exhaust rate by generally simple means, yet without or substantially with the drawbacks that occur with the usual approach, especially for increasing the exhaust rate. Absent.

The aforementioned advantage is that, in particular, the volume flow from the first pump stage and the volume flow from the second inlet are substantially together for the first time in the region of the second pump stage, especially in the region of the rotor element on the upstream side. Obtained by becoming. In particular, the gas arriving from the first pump stage bypasses the second inlet and is directly guided to the second pump stage.

According to the present invention, both the first inlet and the second inlet are connected to the same chamber, that is, between the first inlet and the second inlet, on the chamber side, respectively. There shall be no structure in which the area connected to the inlet of the is considered as a separate chamber. In particular, the inlet should not be partitioned on the chamber side by a low conductance structure such as a wall, even if it has a small opening or throttle.

A suitable application of the present invention is a mass spectrometry system. The mass spectrometric system typically has a plurality of vacuum chambers, in which case the first vacuum chamber has a small fluid communication section leading to an adjacent second chamber via a throttle. However, the absolute pressure in the chamber is different, especially on the basis of small apertures in principle. The throttle makes it possible to maintain the pressure difference formed by one or more vacuum pumps and / or pump stages.

Thus, there are separate chambers, especially when there is a fluid communication, but it has low conductance, or the exhaust rate is low relative to the conductance. In contrast, a single chamber is superior in the scope of the invention, especially in substantially uniform pressure between the first inlet and the second inlet and / or high conductance on the chamber side. ..

Preferably, a conductance L is defined between the first inlet and the second inlet in the chamber, in which case the exhaust velocities at both inlets together form an overall exhaust velocity S, which In the case, the ratio S / L is <300, especially <100, especially <50, especially <10. These values are based on gaseous nitrogen, especially at room temperature.

According to one embodiment of the present invention, an inductive element or a guide element for blocking the flow of gas from the downstream end of the first pump stage to the second inlet can be provided, in which case the induction. The element or guide element is hereinafter simply referred to as a guide element for brevity, but may be intended as a guide element. Such guiding elements can be formed, for example, as walls or plates, between the downstream end of the first pump stage and the second inlet. Preferably, the guiding element extends perpendicular to the rotor axis. However, the inductive element does not always provide a perfect sealing effect. Rather, the inductive element must at least substantially impede or block the flow of gas from the downstream end of the first pump stage to the second inlet. The inducing element can be configured, for example, as a deflection element, but in principle it does not necessarily have to give the gas any other direction. Rather, it is important that the flow of gas towards the second inlet is avoided, or at least obstructed. In certain embodiments, the walls of the channel may form or connect to the guiding element.

The inductive element can be configured, for example, as a static element and / or attached to the housing of the vacuum pump. In such cases, for example, a gap can be provided between the deflecting means and the rotor, especially to take into account the displacement of the rotor during operation. With such a gap, a small leak can naturally occur. Nevertheless, the deflecting means substantially maintains its function. This is because the gap can be kept particularly small compared to the exhaust rate.

The downstream end of the first pump stage can be connected to the upstream end of the second pump stage, for example, by a channel. That is, the channel defines the gas flow path towards the upstream end of the second pump stage, not specifically towards the inlet. The channel may be, for example, part of an inductive element, or may be specifically connected integrally with it. In particular, the outlet end of the channel is directed, especially axially and / or directly, to the upstream end of the second pump stage, especially to the turbo rotor disk of the second pump stage. In general, the downstream end of the first pump stage bypasses the second inlet and is preferably directly connected directly to the upstream end of the second pump stage.

According to one embodiment, it is assumed that the channels are arranged eccentrically with respect to the rotor. As a result, the gas is advantageously sucked out of the channel. This approach is particularly advantageous when the second pump stage has at least one turbo rotor disk. This is because each rotor blade has a higher velocity than the inside, eccentrically or radially outside, and thus the gas is sucked out particularly well, especially outside or eccentric. The channel can be arranged such that the rotor is located outside the channel. Moreover, the eccentric arrangement of the channels does not preclude that the rotor extends through the channels, but the rotation axis of the rotor does not coincide with the vertical or central axis of the channel.

Channels may, in an alternative or additional manner, be placed concentrically with respect to the rotor and / or surround the rotor. This gives a particularly simple structure.

In principle, a plurality of channels may be provided, for example, one concentric channel and one eccentric channel.

In another embodiment, the channel is located on the opposite side of the rotor from the second inlet. This achieves a large spacing between the channel, especially the channel outlet and the second inlet, which easily reduces the probability of gas molecules escaping from the channel through the second inlet, ie pumping. The action is improved.

In another embodiment, the pump has a housing, the housing defining the pump chamber, within the pump chamber the rotor elements of the pump stage are located and the channels are located within the pump chamber. This makes it possible to achieve a structure that is particularly space-saving, particularly small in the radial direction. The pump chamber is preferably cylindrical. In particular, the channels can be placed within the envelope of the pump stage.

Alternatively or additionally, the channel can be located, for example, at least partially outside the pump chamber. Thus, channels can be formed, for example, at least partially within the housing, within separate rigid blocks and / or within tubes or pipes. In principle, a plurality of channels and / or guide elements may be provided, and these channels and / or guide elements may be configured differently, for example. This can be advantageous based on the manufacturing process or the placement of the inlets.

In one embodiment, the second pump stage has a turbo rotor disk at its upstream end, the turbo rotor disk having a first axial portion located upstream and a second. Having a second axial portion located downstream of the first axial portion, the rotor disk pumps less in the first axial portion than in the second axial portion. The downstream end of the first pump stage has a playing cross-sectional area and is connected to the second axial portion, at least partially bypassing the first axial portion, especially by channels. .. This particularly effectively prevents particles from reaching the second inlet from the downstream end of the first pump stage and / or from the channel outlet. In this case, the particles coming from the first pump stage, especially from the channel, flowing out in the radial direction or recirculating in the second pump stage, most of which can be subjected to the moving impact in the pumping direction again. Therefore, it can be sucked out with a relatively high probability. That is, the pumping action is further improved.

For example, the second pump stage has at least two turbo rotor disks, and the first rotor disk arranged on the upstream side is more than the second rotor disk arranged on the downstream side of the first rotor disk. It also has a small, pumping diameter, and the downstream end of the first pump stage may be connected to a second rotor disk, at least partially bypassing the first rotor disk. Can be assumed. This also particularly effectively prevents particles from reaching the second inlet from the downstream end of the first pump stage and / or from the first channel outlet, thereby causing pumping action. Further improved.

The second pump stage can have, for example, a larger rotor diameter than the first pump stage, and vice versa, and the first pump stage is a rotor smaller than the second pump stage. Can have a diameter. As a result, the exhaust speed of the second pump stage can be advantageously adjusted to the gas coming from the second inlet on the one hand and the gas coming from the first pump stage on the other hand, which is generally advantageous. High exhaust speed can be achieved. For example, when yet another pump stage is provided, for example, the first pump stage can have a rotor diameter smaller than all other pump stages and / or the second pump stage. It can have a larger rotor diameter than all other pump stages.

When the first inlet and the second inlet are arranged axially with respect to the rotor axis, a second pump stage with a larger rotor diameter has been found to be particularly advantageous. Thereby, a further increase in exhaust speed can be achieved. Moreover, even when there are two radial inlets, the larger second pump stage can further improve the exhaust rate at the second inlet.

All inlets, in particular the first and / or second inlets, can in principle be configured, for example, as radial inlets and / or axial inlets. For example, it may be advantageous for the first inlet and the second inlet to be configured as radial inlets. Alternatively, at least one of both can be configured as an axial inlet. Better conductance or improved exhaust speed can be achieved, especially in the axial arrangement.

The arrangement of the second inlet, which particularly completely surrounds the first inlet, is particularly advantageous. However, even with two radial inlets, a favorable increase in exhaust speed can already be achieved. In general, the second inlet may be, for example, an axial inlet, and may be arranged on the side beyond the first pump stage in the radial direction, that is, on the radial side of the first pump stage. Can be done. As a result, particularly good conductance can be obtained.

In principle, one inlet can also have multiple inlet openings. Especially in the axial arrangement, this can achieve better conductance and better exhaust speed.

In another advantageous embodiment, the first pump stage and / or the second pump stage has a first rotor element and an adjacent second rotor element located downstream of the first rotor element. The second rotor element has a lower pumping rate than the first rotor element and / or the second rotor element has a higher degree of compression than the first rotor element. As a result, the overall exhaust speed can be further improved.

In principle, the second pump stage may have a different configuration than the first pump stage.

According to one evolution, the second pump stage has at least two, in particular the first rotor elements, having substantially the same exhaust rate on the upstream side. In this case, an adjacent second rotor element is provided, particularly downstream of the first rotor element, in which case the second rotor element has a lower exhaust rate than the first rotor element. And / or the second rotor element has a greater degree of compression than the first rotor element.

In principle, the first pump stage and / or the second pump stage or another pump stage is preferably configured as a molecular pump stage, particularly a turbo molecular pump stage, a Holbeck pump stage or a Siegburn pump stage. be able to. In particular, all or individual rotor elements can be configured as turbo rotor elements or turbo rotor disks. The pump can, in principle, have a separate pump stage, in particular a pump stage connected to a common outlet and / or a pump stage having a rotor element located on a common rotor. The pump may be assigned to a different pump stage and preferably have a first inlet and another inlet connected to a chamber separate from the second inlet.

The subject of the present invention is further solved by the use of a vacuum pump, particularly a turbo molecular pump, for exhausting at least one vacuum chamber according to claim 15. In this case, the vacuum pump has at least a first inlet and a second inlet, a common outlet, and at least a first pump stage and a second pump stage, and the first pump stage and the second pump stage. Each pump stage has at least one rotor element, the rotor elements are located on a common rotor, and the first inlet is connected to the upstream end of the first pump stage. The second inlet is connected to the upstream end of the second pump stage, with the downstream end of the first pump stage bypassing the second inlet and the second. It is connected to the upstream end of the pump stage. In this case, the first inlet and the second inlet are connected to the same vacuum chamber.

The subject of the present invention is, according to an independent second aspect, in vacuum pumps, especially turbomolecular pumps, the vacuum pump has at least a first inlet and a second inlet, a common outlet, and at least the first. It has a pump stage and a second pump stage, the first pump stage and the second pump stage each have at least one rotor element, and the rotor elements are arranged on a common rotor. , The first inlet is connected to the upstream end of the first pump stage, the second inlet is connected to the upstream end of the second pump stage, and the first Deflection means for blocking the flow of gas from the downstream end of the pump stage to the second inlet and the downstream end of the first pump stage at least in the flow direction of the first rotor element. It also has a channel that connects to a location located downstream of the second pump stage as seen, and the channel is also solved by a vacuum pump, which is at least partially formed in the rotor shaft.

Particularly advantageous, the vacuum system has such a vacuum pump and at least one vacuum chamber, in which case the first inlet and the second inlet are connected to the same vacuum chamber. The use of corresponding such vacuum pumps is also advantageous.

According to one evolution, the first rotor element of the second pump stage, especially the first rotor disc, especially the disc set, does not allow the inflow of gas, but especially after the second pump stage. It is particularly advantageous to allow the flow of gas through a suitable open cross section in the shaft at higher compression points towards the third inlet, especially towards the high vacuum port. ..

The gas can be guided, in particular, to at least the rear of the first rotor element, particularly the first rotor disk, preferably the rear of the first rotor disk and the first stator disk.

In particular, when good conductance can be achieved within the channels formed in the rotor shaft, the gas advantageously flows behind the second, third or last rotor disk and / or stator disk. Can be made to.

The channels in the rotor shaft can be configured specifically as grooves. In particular, a plurality of channels or grooves can be provided. The one or more grooves extend, especially axially, by at least the first rotor disk of the second pump stage, preferably all rotor disks.

Channels can also be formed, for example, by holes in the shaft, especially hollow holes. However, in particular the channel as a recess provided on the surface of the shaft is technically advantageous and / or can be realized with less effort, especially in this case the recess extends axially along the shaft. To do.

Of course, the developmental forms and individual features of the various perspectives described herein are advantageously used to develop and produce different perspectives, if technically significant. Can be done.

Hereinafter, the present invention will be described based on advantageous embodiments with reference to, for example, the accompanying drawings.

A perspective view of a turbo molecular pump is shown. The bottom view of the turbo molecular pump of FIG. 1 is illustrated. A cross-sectional view of the turbo molecular pump along the cutting line AA shown in FIG. 2 is shown. A cross-sectional view of the turbo molecular pump along the cutting line BB shown in FIG. 2 is shown. A cross-sectional view of the turbo molecular pump along the cutting line CC shown in FIG. 2 is shown. The vacuum system according to the present invention will be illustrated. Another vacuum system according to the present invention is illustrated. The inductive elements used in the vacuum system are outlined. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump used in the vacuum system according to the present invention will be illustrated. An embodiment of a vacuum pump based on the second aspect of the present invention will be illustrated. An embodiment of a vacuum pump based on the second aspect of the present invention will be illustrated.

The turbo molecular pump 111 shown in FIG. 1 has a pump inlet 115 surrounded by an inlet flange 113. A vacuum vessel (not shown) can be connected to the pump inlet 115 by means known per se. The gas arriving from the vacuum vessel can be sucked from the vacuum vessel through the pump inlet 115 and pumped through the pump to the pump outlet 117. A pre-vacuum pump such as a rotary vane pump can be connected to the pump outlet 117.

The inlet flange 113 forms the upper end of the housing 119 of the vacuum pump 111 in the direction of the vacuum pump of FIG. Housing 119 has a lower portion 121. An electronics housing 123 is arranged on the side of the lower portion 121. The electrical and / or electronic components of the vacuum pump 111 are housed within the electronics housing 123. These components are, for example, for operating an electric motor 125 arranged in a vacuum pump. The electronics housing 123 is provided with a plurality of connections 127 to the accessories. Further, a data interface 129 (for example, one conforming to the RS485 standard) and a current supply connection 131 are arranged in the electronics housing 123.

The housing 119 of the turbo molecular pump 111 is provided with a ventilation inlet 133, particularly in the form of a ventilation valve. The vacuum pump 111 can be ventilated via the vent inlet 133. In the region of the lower portion 121, a seal gas connection portion 135, which is also referred to as a purge gas connection portion, is further arranged. Through the seal gas connection 135, purge gas can be pumped into the motor chamber 137 to protect the electric motor 125 (see, eg, FIG. 3) against the gas pumped. In the motor chamber 137, the electric motor 125 is housed in the vacuum pump 111. Two more cooling medium connection portions 139 are arranged on the lower portion 121 of the pump. In this case, one cooling medium connection is provided as an inlet for the cooling medium, and the other cooling medium connection is provided as an outlet. The cooling medium can be introduced into the vacuum pump for cooling purposes.

Since the lower surface 141 of the vacuum pump can be used as a base, the vacuum pump 111 can be operated vertically on the lower surface 141. Moreover, the vacuum pump 111 can be fixed to the vacuum container via the inlet flange 113, and can be operated in a suspended state, so to speak. Further, the vacuum pump 111 may be configured to be able to operate even when oriented in a manner different from the orientation shown in FIG. An embodiment of a vacuum pump in which the lower surface 141 can be arranged sideways or upwards instead of downwards is also feasible.

Various screws 143 are further arranged on the lower surface 141 shown in FIG. These screws 143 secure the components of the vacuum pump, which are not specified here in detail, to each other. For example, the bearing cover 145 is fixed to the lower surface 141.

A fixing hole 147 is further arranged on the lower surface 141. The pump 111 can be fixed, for example, to the installation surface through the fixing holes 147.

2 to 5 show the cooling medium pipe 148. In the cooling medium pipe 148, the cooling medium introduced or derived via the cooling medium connection portion 139 can be circulated.

As shown in the cross-sectional views of FIGS. 3-5, the vacuum pump has a plurality of process gas pump stages. These process gas pump stages are for pumping the process gas acting on the pump inlet 115 to the pump outlet 117.

A rotor 149 is arranged in the pump housing 119. The rotor 149 has a rotor shaft 153 that can rotate about the rotation axis 151.

The turbo molecular pump 111 has a plurality of turbo molecular pump stages connected in series with each other so as to exert a pumping action. These turbo molecular pump stages have a plurality of radial rotor disks 155 fixed to the rotor shaft 153 and a stator disk 157 arranged between the rotor disks 155 and fixed within the housing 119. In this case, one rotor disk 155 and one stator disk 157 adjacent to the rotor disk 155 each form one turbo molecular pump stage. The stator discs 157 are held by spacer rings 159 at desired axial spacing from each other.

The vacuum pumps also have Holbeck pump stages that are radially located inside and outside of each other and connected in series with each other to exert a pumping action. The rotor of the Holbeck pump stage has a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical side surface Holbeck rotor sleeves 163,165 fixed to the rotor hub 161 and supported by the rotor hub 161. These Holbeck rotor sleeves 163 and 165 are coaxially oriented with respect to the axis of rotation 151 and are assembled in and out of each other in the radial direction. Further, two Holbeck stator sleeves 167 and 169 having a cylindrical side surface are provided. These Holbeck stator sleeves 167,169 are also coaxially oriented with respect to the axis of rotation 151 and are assembled in and out of each other when viewed in the radial direction.

The pumping surface of the Holbeck pump stage is formed by the sides, i.e., the radial inner and / or outer surfaces of the Holbeck rotor sleeves 163,165 and the Holbeck stator sleeves 167,169. The radial inner surface of the outer Holbeck stator sleeve 167 faces the radial outer surface of the outer Holbeck rotor sleeve 163 while forming a radial Holbeck gap 171 and the outer Holbeck rotor sleeve 163. Form a first Holbeck pump stage following the turbomolecular pump, along with the radial outer surface of the. The radial inner surface of the outer Holbæk rotor sleeve 163 faces the radial outer surface of the inner Holbæk stator sleeve 169, forming a radial Holbæk gap 173, and the inner Holbæk stator sleeve 169. A second Holbæk pump stage is formed with the radial outer surface of the. The radial inner surface of the inner Holbæk stator sleeve 169 faces the radial outer surface of the inner Holbæk rotor sleeve 165, forming a radial Holbæk gap 175, and the inner Holbæk rotor sleeve 165. A third Holbæk pump stage is formed with the radial outer surface of the.

At the lower end of the Holbeck rotor sleeve 163, a channel extending in the radial direction can be provided. Through this channel, the Holbæk gap 171 located on the outer side in the radial direction is connected to the central Holbæk gap 173. Further, a channel extending in the radial direction can be provided at the upper end of the inner Holbeck stator sleeve 169. Through this channel, the central Holbæk gap 173 is connected to the Holbæk gap 175 located inward in the radial direction. As a result, a plurality of Holbeck pump stages incorporated inside and outside each other are connected in series with each other. A connection channel 179 leading to the outlet 117 may be further provided at the lower end of the Holbeck rotor sleeve 165 located inward in the radial direction.

The surfaces of the Holbaek stator sleeves 163 and 165, each of which exerts the pumping action described above, have a plurality of Holbaek grooves extending in the axial direction while spirally orbiting around the rotation axis 151. On the other hand, the side surfaces of the Holbæk rotor sleeves 163 and 165 facing the same are smoothly formed, and the gas for operating the vacuum pump 111 is sent forward in the Holbæk groove.

In order to rotatably support the rotor shaft 153, a rolling bearing 181 is provided in the region of the pump outlet 117, and a permanent magnet type magnetic bearing 183 is provided in the region of the pump inlet 115.

In the area of the rolling bearing 181 the rotor shaft 153 is provided with a conical splash nut 185. It has an outer diameter that increases towards rolling bearing 181. The splash nut 185 is in sliding contact with at least one scraping member of the working medium reservoir. The working medium reservoir has a plurality of absorbent discs 187 stacked one above the other. These discs 187 are immersed in a working medium for rolling bearings 181 such as a lubricant.

During operation of the vacuum pump 111, the working medium is transmitted from the working medium storage to the rotating splash nut 185 via a scraping member by capillarity and along the splash nut 185 based on centrifugal force. , Splash nut 185 is fed towards the rolling bearing 181 towards the increasing outer diameter. There, for example, a lubrication function is exhibited. The rolling bearing 181 and the working medium storage portion are surrounded by a tank-shaped insert 189 and a bearing cover 145 in a vacuum pump.

The permanent magnet type magnetic bearing 183 has a bearing half portion 191 on the rotor side and a bearing half portion 193 on the stator side. Each of these has one ring stack. The ring stack consists of a plurality of rings 195,197 of permanent magnets stacked vertically in the vertical direction. The ring magnets 195 and 197 face each other while forming a radial bearing gap 199, in which case the ring magnet 195 on the rotor side is radially outward and the ring magnet 197 on the stator side is radial. It is located inside. The magnetic field present in the bearing gap 199 causes a magnetic repulsive force between the ring magnets 195 and 197. The repulsive force provides radial support for the rotor shaft 153. The ring magnet 195 on the rotor side is supported by the support portion 201 of the rotor shaft 153. The support portion 201 surrounds the ring magnet 195 on the outer side in the radial direction. The ring magnet 197 on the stator side is supported by the support portion 203 on the stator side. The support portion 203 extends through the ring magnet 197 and is suspended on the radial support 205 of the housing 119. The ring magnet 195 on the rotor side is fixed by the cover element 207 connected to the support portion 203 in parallel with the rotation axis 151. The ring magnet 197 on the stator side is fixed by a fixing ring 209 coupled to the support portion 203 and a fixing ring 211 coupled to the support portion 203 in one direction parallel to the rotation axis 151. Further, a disc spring 213 can be provided between the fixing ring 211 and the ring magnet 197.

An emergency bearing or a safety bearing 215 is provided in the magnetic bearing. The emergency bearing or safety bearing 215 slips in a non-contact manner during normal operation of the vacuum pump and only acts when the rotor 149 is excessively displaced in the radial direction relative to the stator, thereby causing the rotor side. Since the collision between the structure and the structure on the stator side is prevented, a radial stopper with respect to the rotor 149 is formed. The safety bearing 215 is configured as a non-lubricated rolling bearing and forms a radial gap with the rotor 149 and / or the stator. Due to this gap, the safety bearing 215 does not operate during normal pump operation. The radial displacement on which the safety bearing 215 will act is sized sufficiently large that the safety bearing 215 does not act during normal operation of the vacuum pump and at the same time is sized sufficiently small. Therefore, the collision between the structure on the rotor side and the structure on the stator side is prevented in all situations.

The vacuum pump 111 includes an electric motor 125 that rotationally drives the rotor 149. The armature of the electric motor 125 is formed by a rotor 149. The rotor shaft 153 of the rotor 149 extends through the motor stator 217. Permanent magnet assemblies can be placed radially outward or embedded in the portion of the rotor shaft 153 that extends through the motor stator 217. An intermediate chamber 219 is arranged between the motor stator 217 and the portion of the rotor 149 extending through the motor stator 217. The hollow chamber 219 has a motor gap in the radial direction. The motor stator 217 and the permanent magnet assembly transmit the driving torque through the motor gap, so that they can magnetically influence each other.

The motor stator 217 is fixed in the housing and in the motor chamber 137 provided for the electric motor 125. Through the seal gas connection 135, seal gas, also referred to as purge gas, which may be air or nitrogen, for example, can reach the inside of the motor chamber 137. The electric motor 125 can be protected against the process gas, for example, the corrosive portion of the process gas, via the seal gas. The motor chamber 137 can also be exhausted via the pump outlet 117. That is, the vacuum pressure realized by the pre-vacuum pump connected to the pump outlet 117 acts at least approximately approximately in the motor chamber 137.

A so-called labyrinth seal 223 known per se can be further provided between the rotor hub 161 and the wall portion 221 that defines the motor chamber 137. This achieves better sealing of the motor chamber 217, especially for the Holbeck pump stage located radially outward.

1 to 5 show a so-called single-flow pump, that is, a pump having a single inlet. In short, the vacuum pump described above is not itself constructed according to the present invention, but can be advantageously developed in the intent of the present invention. Conversely, all embodiments of the invention described herein can be developed by the individual or plurality of features of the vacuum pumps of FIGS. 1-5, where technically significant. ..

FIG. 6 shows an exemplary vacuum system 10 according to the present invention. The vacuum system 10 has a plurality of vacuum chambers, and the vacuum chambers are exhausted by the vacuum pump 12. Specifically, a first vacuum chamber 14, a second vacuum chamber 16 and a third vacuum chamber 18 are provided, and each of these vacuum chambers is connected to at least one inlet of the vacuum pump 12. ing. The first inlet 20 and the second inlet 22 of the vacuum pump 12 are connected to the first chamber 14. The third inlet 24 and the fourth inlet 26 are connected to the second vacuum chamber 16 or the third vacuum chamber 18.

That is, the vacuum pump 12 has four inlets in this embodiment. The gas sucked out of the chambers 14, 16 and 18 through the inlets 20, 22, 24 and 26 is pumped through the vacuum pump 12 to a common outlet (not shown).

The vacuum pump 12 has a plurality of pump stages, that is, a first pump stage 28, a second pump stage 30, a third pump stage 32, and a fourth pump stage 34. In this example, the first, second and third pump stages 28, 30, 32 are configured as turbo molecular pump stages. In this case, the turbo rotor disk 36 is suggested by a vertical line. In particular, each turbo rotor disc 36 is followed by a turbo stator disc (not shown). In this example, the pump stages 28, 30, 32 each have a set of three turbo rotor discs and a turbo stator disc. In general, the turbo rotor disk and the turbo stator disk can be configured corresponding to, for example, the turbo rotor disk and the turbo stator disk by the vacuum pump shown in FIGS. 1 to 5. All of the turbo rotor disks 36 are arranged on a common rotor 38 and rotate synchronously during operation.

The fourth pump stage 34 is configured as a Holbeck pump stage. Further, the fourth pump stage 34 has a rotor element arranged on a common rotor 38, that is, a Holbeck rotor sleeve as shown in FIGS. 3 to 5, for example.

The inlets 20, 22, 24, 26 are connected to the upstream ends of the associated pump stages, respectively, in which case all pump stages 28, 30, 32, 34 are common from the inlet. Pump to an outlet not shown. The first inlet 20 is connected to the upstream end of the first pump stage 28, while the second inlet 22 is connected to the upstream end of the second pump stage 30. .. Both inlets 20 and 22 are connected to the same vacuum chamber, that is, the vacuum chamber 14. Unlike between the inlet 22 and the inlet 24 or between the inlet 24 and the inlet 26, there is no wall or the like provided between the inlet 20 and the inlet 22.

The vacuum chambers 14, 16 and 18 are separated from each other by a wall 40, and in this case, the wall 40 is provided with a small diaphragm 42. Through the small throttle 42, each significantly limited amount of gas can flow from the higher pressure chamber to the adjacent lower pressure chamber. In this case, the pressure in the third vacuum chamber 18 is the highest, the pressure in the second vacuum chamber 16 is somewhat lower, and the pressure in the first vacuum chamber 14 is the lowest. As a result, the gas flows through the throttle 42 from the third vacuum chamber 18 into the second vacuum chamber 16 and from the second vacuum chamber 16 into the first vacuum chamber 14. In the first chamber 14, a substantially uniform pressure acts.

The first pump stage 28 and the second pump stage 30 are arranged adjacent to each other in the axial direction and are arranged one after the other in the pumping direction. An induction element 44 is provided between the downstream end of the first pump stage 28 and the second inlet 22. The inductive element 44 is configured here as a substantially radially oriented plate, which is connected to the pump housing 46. The inductive element 44 substantially forms a seal on the downstream end of the first pump stage 28 with respect to the second inlet 22 and vice versa.

The guiding element 44 has an opening 48 through which a common rotor 38 extends. There must be a radial gap between the rotor 38 and the guiding element 44. This is because the rotor 38 rotates at high speed and some displacement of the rotor is unavoidable. Nevertheless, the radial clearance is constructed small to ensure a good seal. A structure that acts as a pump can be provided in the radial gap, for example, so that a leak from the downstream end of the first pump stage 28 through the opening 48 toward the second inlet 22 can be provided. Even better avoided or reduced.

Further, a channel 50 is provided. The channel 50 connects to the induction element 44 and connects the downstream end of the first pump stage 28 to the upstream end of the second pump stage 30, in which case the inlet 22 is substantially. Is detoured to. To that end, the channel 50 leads directly to the first turbo rotor disk 36 of the second pump stage 30. Thus, volumetric flows arriving from the inlet 22 and from the channel 50 or from the first pump stage 28 are substantially combined for the first time in the second pump stage 30.

Another vacuum system 10 is shown in FIG. The vacuum system 10 has a single, first chamber 14, the first chamber 14 being connected to a first inlet 20 and a second inlet 22 of the vacuum pump 12. The vacuum pump 12 has a first pump stage 28, the upstream end of the first pump stage 28 is connected to a first inlet 20, and further has a second pump stage 30. , The upstream end of the second pump stage 30 is connected to the second inlet 22. Another pump stage may be provided downstream of the second pump stage 30, for example, as is the case with the embodiment of FIG.

Similar to the embodiment of FIG. 7, an induction element 44 and a channel 50 are provided so that the gas bypasses the first inlet 20 and the first pump stage 28 to the second inlet 22. It is guided to the pump stage 30 of. The channel 50 is connected to the induction element 44 and is particularly integrally molded with the induction element 44. The induction element 44 and the channel 50 are arranged in a pump chamber 51 defined by a housing.

FIG. 8 shows the guide element 44, along with the channel 50, as viewed in cross section with respect to the rotor axis 32. The guide element 44 has a substantially circular outer circumference corresponding to the cylindrical pump chamber 51 defined by the housing 46.

A portion of the circular surface of the guide element 44 is occupied by a channel 50 extending axially in a substantially cylindrical shape. In this example, the channel 50 occupies an angular range of circular guiding elements of about 120 degrees, in which case the angular range is located on the opposite side of the rotor axis 32 from the second inlet 22. Has been done. In principle, the channel can be formed in its cross section, for example as a partial circle, as illustrated.

FIG. 9 shows a vacuum pump 12 having a first inlet 20 and a second inlet 22 for connecting to a common vacuum chamber (not shown here). Here, and below, only the vacuum pump 12 according to some embodiments will be described, in which case the structure on the upstream side of the second pump stage and the second pump stage will be described, respectively. In principle, different pump stages, different inlets and / or various numbers of vacuum chambers may be provided, for example as described in FIG.

The vacuum pump 12 of FIG. 9 has a first pump stage 28, the first pump stage 28 is connected to a first inlet 20, further has a second pump stage 30, and a second. Pump stage 30 is connected to a second inlet 22. 6 to 8 show only pump stages having kinematic pairs of three turbo rotor discs and turbo stator discs, respectively, whereas here the first pump stage 28 is two turbo rotors. There is only a kinematic pair between the disc and the turbostator disc, of which only the turborotor disc 36 is suggested. The second pump stage 30 has a kinematic pair of three turbo rotor discs and a turbo stator disc. In this case, the turbo rotor disc 52 on the upstream side is configured as a stepped rotor disc. In short, the turbo rotor disk 52 has a first axial portion 54 on the upstream side and a second axial portion 56 on the downstream side when viewed in the axial direction, in which case these portions pump. Each has a different cross-sectional area. Specifically, here, in the first axial portion 54, the diameter of the turbo rotor disk 52 is smaller than the diameter in the second axial portion 56.

The vacuum pump 12 of FIG. 9 has a channel 50 in which the downstream end of the first pump stage 28 is connected to the second axial portion 56 by the channel 50, in which case the channel 50 , Extends axially by the side of the first axial portion 54. When the pumped gas particles appear to escape radially between the channel 50 and the second axial portion 56, some of these particles are removed by the first axial portion 54 of the turbo rotor disk 52. Once captured, these particles are given a new impact towards the pump outlet. That is, the illustrated arrangement improves the seal between the downstream end of the first pump stage 28 and the inlet 22, further increasing the exhaust speed.

A similar effect is achieved by the second pump stage 30 of the vacuum pump 12 shown in FIG. However, here, this effect is not obtained via the stepped turbo rotor disk 52, instead a separate turbo rotor disk 58 with a relatively small diameter is located upstream of the turbo rotor disk 36 through which the channel 50 communicates. It is located in.

Another feature of the embodiment of FIG. 10 is a first inlet 20 arranged in the axial direction. On the other hand, the second inlet 22 is arranged in the radial direction so as to apply to all the inlets shown in FIGS. 6 to 9. The axial inlet 20 provides particularly good conductance between the chamber and the first pump stage 28.

FIG. 11 specifically shows an embodiment in which the first pump stage 28 has a rotor diameter smaller than that of the second pump stage 30. In this case, as suggested, the first inlet 20 and the second inlet 22 can be arranged axially. In this embodiment, the second inlet 22 surrounds the first inlet 20 and / or the second pump stage 28. Axial inlets 20, 22 provide particularly good conductance for each pump stage 28 or pump stage 30.

Another optional feature of the embodiment of FIG. 11 is that the channels 50 are arranged concentrically with respect to the rotor 38. Specifically, the channel 50 surrounds the rotor 38, or the rotor 38 extends axially through the channel 50. In this case, the channel 50 is formed by substantially tubular elements. In this case, the channel 50 leads from the central region of the downstream end of the first pump stage 28 to the central region of the upstream end of the second pump stage 30.

FIG. 12 shows another embodiment having pump stages 28, 30 of different sizes, respectively. Further, again, the inlets 20 and 22 are arranged in the axial direction. In the present embodiment, the downstream end of the first pump stage 28 is in direct contact with the upstream end of the second pump stage 30 and is separated from the second inlet 22 here. Contact in the area realized by the housing 46. Therefore, the illustrated embodiment is configured without the additional guide element 44 and the additional channel 50. Moreover, this embodiment has a small axial structural length.

FIG. 13 shows another embodiment having pump stages 28, 30 of different sizes, in which case both inlets 20, 22 are similarly configured in the axial direction.

The second pump stage 30 has a stepped turbo rotor disk 52 on the upstream side. However, in this case, unlike the embodiment of FIG. 9, the first axial portion 54 in the flow direction is formed so as to extend in the circumferential direction instead of the center. In short, this In the case, the turbo rotor disk 52 has a substantially central recess. The first pump stage 28, with the housing 46, at least partially extends by the side of the first axial portion 54, or extends into the central recess of the turbo rotor disk 52 and corresponds. In the radial region, it extends towards the upstream end of the turbo rotor disk 52. Similar to the embodiment of FIG. 9, by the arrangement shown, the particles flowing out from the first pump stage 28 radially between the housing 46 and the second axial portion 56 or the turbo rotor disk 52 are turbocharged. It is captured by the first axial portion 54 of the rotor disk 52. This also further improves the exhaust speed.

The embodiments of FIGS. 14 and 15 are characterized by, among other things, that the inlets 20, 22 are arranged concentrically and / or at the same axial height. In FIG. 15, the rotor diameters of the steps 28 and 30 are substantially the same size, and in particular, in this case, the inlet 22 is formed by a stepped housing portion.

16 and 17 show an embodiment similar to that of FIG. 6, but in more detail. In particular, it is depicted that the guide element 44 can extend within the recess of the shaft in order to achieve a particularly large seal length in the gap 48. The channels 50 may be of different sizes, as shown. Here, each channel 50 is statically configured. In principle, the channel may be configured to rotate with the rotor.

A second aspect is described in more detail in FIGS. 18 and 19. The pump has a plurality of channels 60, 62 here, and the channels 60 and 62 are combined to form one channel, which is the downstream end of the first pump stage 28. Is connected to a portion of the second pump stage located downstream of at least one first rotor element in the flow direction. In FIG. 18, channels 60, 62 lead to the downstream end of the second pump stage 30. In FIG. 19, the channels 60, 62 are axially connected to or behind the first kinematic pair of the rotor disc and the stator disc.

The channels 62 are here configured as a plurality of axial grooves distributed and arranged over the circumference of the rotor shaft. The channel 60 is formed concentrically with respect to the rotor shaft as an annular channel. The guiding element has a plurality of through openings 64 inside the channel 60 in the radial direction.

In addition, FIGS. 16-19 are described in more detail in connection with FIGS. 1-5 and show features that are advantageous when used alone or in combination.

111 Turbo molecular pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Housing 121 Lower 123 Electronics housing 125 Electric motor 127 Accessory connection 129 Data interface 131 Current supply connection 133 Ventilation inlet 135 Seal gas connection 137 Motor room 139 Coolant connection Part 141 Bottom surface 143 Screw 145 Bearing cover 147 Fixing hole 148 Cooling medium piping 149 Rotor 151 Rotating axis 153 Rotor shaft 155 Rotor disk 157 Stator disk 159 Spacer ring 161 Rotor hub 163 Holbeck rotor sleeve 165 Holbeck rotor sleeve 167 Holbeck stator sleeve 171 Holbeck gap 173 Holbeck gap 175 Holbeck gap 179 Connection channel 181 Rolling bearing 183 Permanent magnet type magnetic bearing 185 Splash nut 187 Disc 189 Insert 191 Rotor side bearing half 193 Steader side bearing half 195 Ring magnet 197 Ring magnet 199 Bearing gap 201 Support part 203 Support part 205 Radial support 207 Cover element 209 Support ring 211 Fixing ring 213 Counterbore spring 215 Emergency bearing or safety bearing 217 Motor stator 219 Intermediate chamber 221 Wall part 223 Labyrinth seal 10 Vacuum system 12 Vacuum pump 14 1st vacuum chamber 16 2nd vacuum chamber 18 3rd vacuum chamber 20 1st inlet 22 2nd inlet 24 3rd inlet 26 4th inlet 28 1st pump stage 30th 2 pump stage 32 3rd pump stage 34 4th pump stage 36 Turbo rotor disk 38 Rotor 40 Wall 42 Squeezing 44 Guide element 46 Housing 48 Opening 50 channel 51 Pump chamber 52 Stepped turbo rotor disk 54 1st axial direction Part 56 Second axial part 58 Small turbo rotor disk 60 channels 62 channels 64 through openings

Claims (15)

In a vacuum system (10) comprising a vacuum pump (12), particularly a turbo molecular pump and at least one vacuum chamber (14).
The vacuum pump (12)
At least the first inlet (20), the second inlet (22), the common outlet,
It has at least a first pump stage (28) and a second pump stage (30).
The first pump stage (28) and the second pump stage (30) each have at least one rotor element (36), and the rotor element (36) is arranged on a common rotor (38). The first inlet (20) is connected to the upstream end of the first pump stage (28), and the second inlet (22) is of the second pump stage (30). It is connected to the upstream end and
The downstream end of the first pump stage (28) bypasses the second inlet (22) and is connected to the upstream end of the second pump stage (30).
The first inlet (20) and the second inlet (22) are connected to the same vacuum chamber (14).
Vacuum system (10). The vacuum according to claim 1, wherein an inductive element (44) is provided to block the flow of gas from the downstream end of the first pump stage (28) to the second inlet (22). System (10). Claim 1 or 2, wherein the downstream end of the first pump stage (28) is connected to the upstream end of the second pump stage (30) through a channel (50). The vacuum system according to (10). The vacuum system (10) of claim 3, wherein the channel (50) is eccentrically arranged with respect to the rotor (38), in particular the rotor (38) is located outside the channel (50). .. The vacuum system (10) of claim 3, wherein the channel (50) is concentrically located with respect to the rotor (38) and / or surrounds the rotor (38). The vacuum system (10) according to any one of claims 3 to 5, wherein the channel (50) is arranged on the side opposite to the second inlet (22) with respect to the rotor (38). .. The pump (12) has a housing (46), the housing (46) defining a pump chamber (51), within the pump chamber (51) the rotor elements (36) of the pump stages (28, 30). ) Is arranged and the channel (50) is arranged in the pump chamber (51). The vacuum system (10) according to any one of claims 3 to 6. The second pump stage (30) has a turbo rotor disk (52) at its upstream end, and the turbo rotor disk (52) has a first axial portion (54) located upstream. ) And a second axial portion (56) arranged downstream of the second, first axial portion (54), the rotor disk (52) having a first axial portion. In (54), the downstream end of the first pump stage (28) has a smaller, pumping cross-sectional area than in the second axial portion (56) and is in the first axial direction. The vacuum system (10) according to any one of claims 1 to 7, which bypasses a portion (54) at least partially and is connected to a second axial portion (56). The second pump stage (30) has at least two turbo rotor disks (36,58), and the first rotor disk (58) located upstream is of the first rotor disk (58). It has a pumping diameter that is smaller than the second rotor disk (36) located downstream, and the downstream end of the first pump stage (28) is the first rotor disk (58). The vacuum system (10) according to any one of claims 1 to 8, which is connected to the second rotor disk (36) by bypassing at least partially. The vacuum system (10) according to any one of claims 1 to 9, wherein the second pump stage (30) has a rotor diameter larger than that of the first pump stage (28). The vacuum system according to any one of claims 1 to 10, wherein the first inlet (20) and / or the second inlet (22) is a radial inlet and / or an axial inlet. 10). The second aspect of any one of claims 1 to 11, wherein the second inlet (22) is an axial inlet and is arranged on the side beyond the first pump stage (28) in the radial direction. Vacuum system (10). Adjacent first rotor elements (36) and adjacent first rotor elements (36) located downstream of the first rotor element (36) in the first pump stage (28) and / or the second pump stage (30). The second rotor element (36) is provided with two rotor elements (36), which have a lower exhaust rate than the first rotor element (36) and / or the second rotor element (36). ) Is the vacuum system (10) according to any one of claims 1 to 12, which has a higher degree of compression than the first rotor element (36). The vacuum system according to any one of claims 1 to 13, wherein the second pump stage (28) has at least two rotor elements (36) having substantially the same exhaust rate on the upstream side. (10). In the use of a vacuum pump (12) to exhaust at least one vacuum chamber (14), especially a turbo molecular pump.
The vacuum pump (12)
At least the first inlet (20), the second inlet (22), the common outlet,
It has at least a first pump stage (28) and a second pump stage (30).
The first pump stage (28) and the second pump stage (30) each have at least one rotor element (36), and the rotor element (36) is arranged on a common rotor (38). The first inlet (20) is connected to the upstream end of the first pump stage (28), and the second inlet (22) is of the second pump stage (30). It is connected to the upstream end and
The downstream end of the first pump stage (28) bypasses the second inlet (22) and is connected to the upstream end of the second pump stage (30).
The first inlet (20) and the second inlet (22) are connected to the same vacuum chamber (14).
Use of vacuum pump (12).

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