JP2020200198A - Setter for firing electronic component - Google Patents

Abstract

To provide a firing setter excellent in durability of repeated use, in which the influence thereof on a composition of an electronic component to be fabricated is inhibited.SOLUTION: A setter includes: a substrate comprising an aluminosilicate-based ceramic having a content ratio (weight ratio) of Al2O3 and SiO2 of 65:35 to 93:7; and a ceria layer containing 65 wt.% or more of CeO2, the ceria layer being integrally laminated on one surface of the substrate and forming a mounting surface of an object to be fired.SELECTED DRAWING: Figure 1

Description

The present invention relates to a firing setter used for manufacturing an electronic component such as an air electrode of a solid oxide fuel cell (SOFC), and a method for manufacturing an air electrode of SOFC using the setter for firing.

As a jig for firing electronic parts (setter for firing), from the viewpoint of heat resistance, chemical stability, etc.
Generally, an alumina (Al ₂ O ₃ ) -based or mullite (Al ₂ O _3- SiO ₂ ) -based ceramic plate is used.
However, these firing setters may react with the material of the premolded body such as the green sheet to be fired, and the composition of the obtained ceramic electronic component may change (contaminate).

Contamination of the electronic component to be produced causes deterioration of the characteristics of the electronic component, so it is necessary to suppress the reaction with the firing setter.
For example, in Japanese Patent Application Laid-Open No. 11-240769 (Patent Document 1), for firing electronic components, which can efficiently fire the green sheet without reacting with the green sheet to be fired and the conductor paste on the surface thereof. As a setter, a setter for firing electronic components having an alumina content of 75% by weight or more, a silica content of less than 25% by weight, and an air permeability of 5 × ^10-2 cm ² or more has been proposed.

Further, in Japanese Patent Application Laid-Open No. 2002-104891 (Patent Document 2), Al is used as a firing setter capable of producing a high-quality electronic component exhibiting stable characteristics by suppressing the reaction between the firing setter and the raw material to be fired. ₂ O ₃ series, Al ₂ O ₃ -SiO ₂ series, Al ₂ O _3- MgO series, SiC-SiO ₂ series, SiC-SiN ₃ series The surface layer of ceramic plates is zirconia, stabilized zirconia, and partially stable. It has been proposed that the surface layer contains 99.5% by weight or more of at least one zirconia selected from the group consisting of zirconia silicate.

By the way, in recent years, a solid oxide fuel cell (SOFC: Solid Oxide Fuel Cell) using an oxide ion conductor as an electrolyte has been attracting increasing interest because it has high energy conversion efficiency. The SOFC air electrode (the electrode in which oxygen molecules in the air receive electrons from an external circuit and become oxygen ions) is generally a slurry containing a metal oxide powder having a perovskite structure as a raw material, which is premolded into a predetermined shape. By firing the obtained premolded product at a high temperature of 800 to 1500 ° C., or by applying the slurry for an air electrode raw material and firing it on a SOFC member containing a fuel electrode and an electrolyte layer prepared in advance. Manufactured.

According to Japanese Patent Application Laid-Open No. 2015-2035 (Patent Document 3), when firing using a setter made of Al ₂ O _{3 in} firing for producing an air electrode for SOFC, Al ₂ O ₃ is a metal on the surface of the air electrode. It has been pointed out that the cell performance deteriorates due to the reaction with the oxide and the change in the composition of the obtained air electrode.
In Patent Document 3, in order to solve such a problem, CeO ₂ or CeO ₂ to which a different element is added is used as a setter material (claim 2), or CeO ₂ is formed on the surface of a plate made of alumina or zirconia. It has been proposed to use a setter coated with a film or a CeO ₂ film to which a foreign element is added and sintered (claim 3).

JP-A-11-240769 JP-A-2002-104891 Japanese Unexamined Patent Publication No. 2015-2035

In order to meet the strict demands of electronic components in recent years, it is important that the setter for firing and the material to be fired do not react.
Further, since the firing setter is repeatedly used at the manufacturing site, the state and composition change of the surface layer portion of the firing setter is small even in a heat cycle in which heating and cooling to the firing temperature are repeated. Is required. When the firing setter is a coated ceramic plate in which the surface of the ceramic substrate is coated with a coating having low reactivity with the material to be fired, the durability of the coating is required.

The present invention has been made in view of such a requirement, and an object of the present invention is to suppress the influence on the composition of the electronic component (particularly the air electrode for SOFC) to be produced and to use the electronic component repeatedly. It is an object of the present invention to provide a firing setter having excellent durability.

The firing setter of the present invention is a setter for firing electronic components, and is a substrate made of aluminosilicate ceramics having a content ratio (weight ratio) of Al ₂ O ₃ and SiO ₂ of 65: 35 to 93: 7. It contains a ceria layer containing 65% by weight or more of CeO ₂ which is laminated and integrated on at least one surface of the substrate and forms a mounting surface for an object to be fired.

The total porosity of the substrate is preferably 5 to 50%. The thickness of the ceria layer is preferably 30 to 200 μm.
The ceria layer may contain 0 to 35% by weight of at least one selected from the group consisting of Gd, Sm, Y, and La.

The electronic component firing setter of the present invention is suitable as a firing setter for the air electrode of a solid oxide fuel cell.
The method for producing an air electrode of a solid oxide fuel cell of the present invention is a method including a step of calcining a raw material for an air electrode using the firing setter of the present invention, and the air on the ceria layer. It is characterized in that the polar raw material is fired.

The electronic component firing setter of the present invention is excellent because the mounting surface of the object to be fired is composed of a ceria layer having low reactivity with the object to be fired, and the ceria layer is laminated and integrated with the substrate. It has good adhesion and excellent durability. Therefore, it can be repeatedly used as a firing setter used in the manufacture of electronic components with strict quality requirements.

It is a schematic diagram which shows the structure of the electronic component firing setter of this invention. It is a figure for demonstrating the peeling test method. It is a chart which shows the result of X-ray diffraction, and FIG. 3A is a firing setter No. 1. FIG. 3 (B) shows the firing setter No. It is the analysis result of 7. It is a photograph which imaged the mounting surface of the firing setter after firing the air electrode at 1100 ° C. It is a photograph which imaged the mounting surface of the firing setter after firing the air electrode at 1150 ° C. It is the photograph which imaged the mounting surface of the firing setter after firing the air electrode at 1200 degreeC. It is a photograph which imaged the mounting surface of the firing setter after firing the air electrode at 1250 ° C. It is a graph which shows the measurement result of the conductivity of an air electrode.

FIG. 1 is a schematic view showing the configuration of an embodiment of the electronic component firing setter of the present invention.
The firing setter 1 shown in FIG. 1 has a laminated structure in which a ceria layer 3 constituting a mounting surface 3a of an object to be fired is laminated on one surface of an Al ₂ O _3- SiO ₂ system ceramic substrate 2. There is. In other words, the surface of the Al ₂ O ₃ -SiO ₂ -based ceramic substrate 2, a firing setter is coated with ceria film 3.

〔substrate〕
The content ratio (weight ratio) of Al ₂ O ₃ and SiO _{2 in} the Al ₂ O ₃ −SiO ₂ ceramics constituting the substrate 1 is 65: 35 to 93: 7, preferably 70:30 to 90:10. It is more preferably 75:25 to 85:15.

Al ₂ O ₃ has excellent heat resistance. However, if the alumina content of the substrate is too high, it tends to be difficult to form a ceria film having excellent adhesion. A coating having low adhesion makes it difficult to repeatedly use the firing setter, which causes the durability and life of the firing setter to deteriorate.
On the other hand, SiO ₂ has high reactivity and easily reacts with CeO ₂ when the ceria film is formed (calcined). If the transfer of the SiO ₂ component to the ceria layer and the reaction between CeO ₂ and SiO ₂ proceed too much, the surface of the formed ceria film may become rough, which may affect the quality of the object to be fired.

The total porosity of the ceramic substrate 2 is preferably 5 to 50%, more preferably 20 to 40%. Here, the total porosity refers to the ratio of the total amount of closed pores and open pores of the ceramic substrate. The pores on the surface layer of the substrate 2 are preferably high because they can contribute to the improvement of the adhesion to the coating film, but if the porosity is too high, the strength of the substrate is lowered. The suitable porosity depends on the ceramic material of the ceramic substrate, and the higher the alumina content in the ceramic substrate, the higher the porosity tends to be from the viewpoint of film adhesion.

The method for manufacturing an Al ₂ O _3- SiO ₂ ceramic substrate having the above configuration is not particularly limited. Al ₂ O ₃ powder and SiO ₂ powder as raw materials are mixed at a ratio corresponding to the content ratio of the aluminosilicate ceramics to be produced to prepare a raw material mixed powder. A wet method in which the obtained raw material mixed powder is added and mixed in water or an organic solvent to prepare a raw material slurry liquid, which is poured into a mold and fired; the raw material mixed powder is directly filled in the mold. Any method of the dry method of pressing and then firing can be adopted.

The average particle size of the Al ₂ O ₃ powder used is 0.5 to 10 μm, preferably 0.5 to 3 μm. The average particle size of the SiO ₂ powder used is 0.5 to 10 μm, preferably 0.5 to 3 μm. If these particles are too large, the porosity of the produced substrate tends to be too large, and if these particles are too small, the porosity of the substrate tends to be too small.

The firing is generally carried out by holding at 1500 to 1700 ° C. for about 1 to 3 hours.
In the substrate manufacturing method as described above, the porosity of the substrate is adjusted by adjusting the average particle size, particle size distribution, firing temperature, and firing time of the raw material powders (Al ₂ O ₃ powder and SiO ₂ powder) used. can do.

As for the component of the base material, 95% by weight or more of Al ₂ O _3- SiO ₂ may be contained as the main component. The components other than Al ₂ O ₃ and SiO ₂ are not particularly limited, and examples thereof include Mg, Y, Na, Ti, Fe, and Co.

[Ceria layer]
In the ceria layer 3 laminated on the surface of the substrate 2, the surface of the ceria layer 3 serves as a mounting surface 3a for the object to be fired.

The composition of the ceria layer 3 has a CeO ₂ content of 65% by weight or more, preferably 80% by weight or more, more preferably 90% by weight or more, still more preferably 95% by weight or more.
The ceria layer may contain at least one selected from the group consisting of Gd, Sm, Y, and La, in addition to CeO ₂ , as long as it is less than 35% by weight. That is, gadolinium-doped ceria _{((Gd 1-x Ce x} ) O 2), samarium-doped ceria _{((Sm 1-x Ce x} ) O 2), yttria-doped ceria _{((Y 1-x Ce x} ) O 2), lanthanum-doped ceria _{((La 1-x Ce x} ) O 2) ( wherein, x is 0.05-0.4) may be used.

The thickness of the ceria layer is preferably 30 to 200 μm, more preferably 50 to 150 μm.
If the ceria layer is too thin, the ceria layer is easily damaged by wear and may be affected by SiO ₂ of the substrate. Further, by repeated firing, all or a part of the ceria layer is peeled off, and the life as a firing setter is shortened. On the other hand, if it becomes too thick, the durability of the coating film is saturated, but the adhesion to the substrate tends to decrease.

An embodiment of a method for forming a ceria layer will be described below.
First, a raw material slurry liquid as a raw material for the ceria layer is prepared.
The raw material slurry liquid of the ceria layer is prepared by adding and mixing the CEO ₂ powder as a raw material with a binder in water or an organic solvent. In addition to CeO ₂ , when at least one selected from the group consisting of Gd, Sm, Y, and La is contained, gadolinium-doped ceria ((Gd _1-x Ce _x ) O) is used instead of CeO ₂ powder. _2), samarium-doped ceria _{((Sm 1-x Ce x} ) O 2), yttria-doped ceria _{((Y 1-x Ce x} ) O 2), lanthanum-doped ceria _{((La 1-x Ce x} ) O 2) Powder may be used.

The particle shape of the CeO ₂ powder used as a raw material may be any of an amorphous shape, a spherical shape, a wedge shape and the like. The size of the CeO ₂ powder is preferably an average particle size of 1 to 10 μm, more preferably 4 to 8 μm, and even more preferably 5 to 7 μm. The sinterability exceeding 10 μm is low, and the adhesion of the coating film tends to decrease. If it is less than 1 μm, oversintering is likely to occur, so that the formed ceria layer becomes too dense and tends to cause cracks.

As the dispersion medium of the raw material powder, in addition to water, for example, alkyl alcohols having 2 to 4 carbon atoms such as ethanol, isopropanol and n-butanol; alcohols such as 1-hexanol; and ketones such as acetone and 2-butanone. Aggregate hydrocarbons such as pentane, hexane and heptane; Aromatic hydrocarbons such as benzene, toluene, xylene and ethylbenzene; Acetate esters such as methyl acetate, ethyl acetate and butyl acetate, etc. Organic solvents can also be used. These solvents may be used alone or in admixture of two or more.

Examples of the binder include ethylene-based copolymers, styrene-based copolymers, acrylate-based and methacrylate-based copolymers, vinyl acetate-based copolymers, maleic acid-based copolymers, vinyl acetal resins, vinyl formal resins, and polyvinyl butyral. Resins, vinyl alcohol-based resins, celluloses such as ethyl cellulose, waxes and the like can be used.

If necessary, known additives such as a plasticizer, a lubricant, and an antifoaming agent may be added to the raw material slurry solution.

The prepared raw material slurry liquid is applied to the surface of the substrate 2 and fired at 1300 to 1400 ° C.
The raw material slurry liquid can be applied by a curtain flow, a method using a roller coater or the like, a spray method, dipping or the like. From the viewpoint of productivity and production cost, the spray method is preferably used.

The firing temperature is appropriately selected depending on the size of the CeO ₂ powder used as a raw material, the type of substrate used, and the porosity, but it is generally preferable to fire at 1300 to 1400 ° C., preferably about 1330 to 1380 ° C.
If the firing temperature is too low, the adhesion of the ceria layer tends to be insufficient, and if the firing temperature is too high, it easily reacts with the substrate, and as a result, the composition of the ceria layer is affected. ..

As described above, the ceria layer 3 laminated and integrated on the surface of the substrate 2 can be formed. The formed ceria layer 3 can be laminated and integrated at the interface of the substrate 2 by a reaction or migration of SiO ₂ . Therefore, even if the firing setter is repeatedly heated at 1300 ° C. for 30 minutes 30 times or more, the ceria layer does not peel off. In addition, no problematic surface modification is observed, and a highly stable mounting surface can be provided.
Since the ceria layer (CeO ₂ content of 65% by weight or more) constituting the placing surface of the object to be fired has low reactivity with the raw material of the electronic component, the composition can be obtained by using the firing setter of the present invention. Can produce stable ceramic electronic components. This means that the composition of the ceria layer itself is also stable.

In the firing setter shown in FIG. 1, a ceria layer is formed only on one side of the substrate, but the electronic component firing setter of the present invention is not limited to this. It is sufficient that at least one surface to be the mounting surface of the object to be fired is coated with a ceria film, and a firing setter in which similar ceria layers are formed on both sides of the substrate, and firing in which the entire substrate is coated with the ceria film. The setter for use is also included in the present invention.

The firing setter for electronic components of the present invention having the above configuration is excellent as a firing setter for electronic components because it is stable with respect to the object to be fired. In particular, the ceria film is suitable as a setter for firing the air electrode because it tends to be difficult to react with La of LaSrMnO ₃ which is a raw material of the air electrode of the solid oxide fuel cell.

[Manufacturing method of air electrode of solid oxide fuel cell]
The method for producing an air electrode of a solid oxide fuel cell according to the present invention is a method including a step of firing an air electrode raw material using the firing setter of the present invention.
That is, in a method for manufacturing an air electrode of a solid oxide fuel cell, which comprises a step of firing a raw material for an air electrode placed on the surface of a calcining setter.
As the firing setter, CeO ₂ is contained in 65% by weight or more on at least one surface of a substrate made of aluminosilicate ceramics having a content ratio (weight ratio) of Al ₂ O ₃ and SiO ₂ of 65: 35 to 93: 7. Using a setter for firing electronic components in which the ceria layer is laminated and integrated,
The air electrode raw material is fired on the ceria layer.

The target air electrode is a perovskite oxide of LaSrMnO ₃ , an air electrode generally used as an air electrode of a fuel cell.
In addition, LaNi _1-x Fe _x O ₃ (X = 0.3 to 0.9) or La _1-x Sr _x Fe _1-y N _y O ₃ (X = 0.1 to 0.3, Y = 0.1~0.6, X + Y < 0.7), or _{La 1-x Sr x Fe 1} -y Co y O 3 (X = 0.1~0.3, Y = 0.1~0 .6, X + Y <0.7) , or _{La 1-x Sr x Fe 1} -y Co y O 3 (X = 0.1~0.5) can also be used as an air electrode material.

A zirconia-made substrate or a zirconia-coated substrate is generally known as a material that does not easily react with the object to be fired during firing. The firing setter of the present invention tends to have lower reactivity than the zirconia substrate or the zirconia coating, and particularly tends to have low reactivity with the air electrode raw material. Therefore, by using the firing setter of the present invention, it is possible to manufacture a high-quality air electrode with less contamination.

[Preparation and evaluation of firing setter]
(1) Substrate As the substrate of the setter for firing, a ceramic substrate having the composition and total porosity shown in Table 1 was used.

(2) Baking setter No. Preparation of 1-10 As a coating film raw material, CeO ₂ powder having the average particle size shown in Table 2 is mixed with Bind Serum WA310 (manufactured by Mitsui Chemicals, Inc.) as an aqueous medium, and a ceria film raw material having a CeO ₂ concentration of 60% by weight is mixed. The liquid was prepared. This raw material solution was spray-coated on the substrate shown in Table 2, held at 1350 ° C. for 120 minutes, and fired to prepare a firing setter having a coating thickness shown in Table 2.

The appearance and adhesion of the film were evaluated for the prepared setter for firing by the following evaluation method. The results are also shown in Table 2.

(2) Baking setter No. 11 as prepared coating material for the ZrO ₂ powder (average particle size 6 [mu] m) containing 8% by weight of _Y 2 _{O 3,} mixed with binding an aqueous medium Serum WA310 (manufactured by Mitsui Chemicals, Inc.), ZrO ₂ A zirconia film raw material solution having a concentration of 80% by weight was prepared.
No. In the same manner as in No. 1, the prepared zirconia film raw material solution was spray-coated on the surface of the substrate (C-1) shown in Table 2 and held at 1500 ° C. for 120 minutes to form a zirconia layer having a film thickness of 150 μm. ..
The appearance and adhesion of the film were evaluated for the prepared setter for firing by the following evaluation method. The results are also shown in Table 2.

(3) Evaluation method of firing setter (3-1) Appearance of coating The appearance of the ceria layer or zirconia layer formed on the substrate surface (presence or absence of cracks, discoloration, roughness of the coating surface) was visually observed.
If no cracks, discoloration, or roughness that can be visually identified was observed, it was evaluated as "good".

(3-2) Film adhesion The film adhesion was evaluated using the peeling test jig shown in FIG.
That is, it was attached to the upper tension jig via an attachment on the coating side of the created firing setter, and pulled in the direction of the arrow. After pulling until the film was peeled off, the peeled film surface was observed and evaluated according to the following criteria.
Poor adhesion (NG): Peeling at the interface between the coating and the substrate,
Good adhesion (OK): The substrate was broken, and the fracture surface was a state in which a part of the substrate was attached to the fracture surface or the coating film of the substrate.

Alumina: Silica = 70:30 to 90:10 Aluminosilicate-based ceramic substrate for firing setter No. In each of 1 to 6, a smooth ceria layer was formed, and the adhesion of the ceria layer to the substrate was excellent. Therefore, these calcined setters can provide a stable mounting surface. No. The result of analysis of the ceria layer of No. 1 by X-ray diffraction is shown in FIG. 3 (A). In FIG. 3, the horizontal axis represents the diffraction angle (° 2θ) and the vertical axis represents the intensity. No peaks other than CeO ₂ were observed, and it was confirmed that there was no reaction between the ceria film and the substrate.

On the other hand, when the substrates E and F having a high alumina content were used, the ceria layer after firing was peeled off from the substrate, and the ceria layer could not be stably formed (No. 9, 10). Further, using the substrates E and F, the firing temperature was raised to 1600 ° C. to try to form a ceria film, but a ceria film having high adhesion could not be obtained.

In the case of the substrate D having alumina: silica = 90:10, the ceria layer can be formed in D-1 having a high porosity, and the formed ceria layer can secure the adhesion to the substrate. (No. 6). However, when the porosity was 20% (D-2), the ceria layer could be formed, but the adhesion was insufficient (No. 8).

In the case of the substrate A having alumina: silica = 60:40, a ceria layer having excellent adhesion could be formed, but roughness was observed on the surface of the ceria layer. It is insufficient as a mounting surface for firing electronic components that require a smooth surface (No. 7).
When the ceria layer was subjected to X-ray diffraction analysis, the results shown in FIG. 3B were obtained. That is, the peak intensity of ceria decreased, and a plurality of peaks other than ceria appeared. It can be seen that the reactant with the substrate is formed in the ceria layer. Therefore, the reaction product or SiO ₂ may affect the physical properties of the object to be fired.

No. Reference numeral 11 denotes a case where a zirconia layer is formed on the substrate C-1. It had a good smooth surface as a mounting surface and also had excellent adhesion to a substrate.

[Manufacturing and evaluation of air poles]
(1) Manufacture of air electrode The firing setter No. manufactured above. 1 and No. 11 was used to make an air electrode.
The air electrode was manufactured according to the following. Polyvinyl alcohol (final concentration 1% by weight) was mixed with commercially available perovskite oxide LSCF-6428F (first rare element chemical industry) for fuel cells to prepare a raw material for an air electrode.

This air electrode raw material was extruded with an extruder to obtain a cylindrical molded body having a diameter of 5 mm. This cylindrical molded body was placed on the mounting surface of a firing setter and fired for 60 minutes at each firing temperature of 1000 ° C., 1100 ° C., 1150 ° C., 1200 ° C., and 1250 ° C. to prepare an air electrode. ..
The composition of the prepared air electrode was La _0.6 Sr _0.4 Co _0.2 Fe _0.8 Ox ( _{x in the} formula is 2.0 to 3.0).

Photographs of the mounting surface of the firing setter after firing taken with a camera are taken in the cases of firing at 1100 ° C., 1150 ° C., 1200 ° C., and 1250 ° C. in each order. ).
The right side of each photograph is the firing setter No. 1, and the left side is the firing setter No. 1. It is 11.
In each photograph, the black streaks are the parts where the air poles were placed. It is inconspicuous at a firing temperature of 1100 ° C., but at a firing temperature of 1150 ° C. or higher, the firing setter No. No. 11 had a greater degree of color change in the placed portion. The discolored part was blue to black-blue. Considering the composition of the air electrode, it is considered that a part of Co and Fe has moved to the firing setter side.

(2) Conductivity of the manufactured air electrode The conductivity of the manufactured air electrode was measured by the DC four-terminal method. The measurement results are shown in FIG. In FIG. 8, the horizontal axis represents the firing temperature (° C.) and the vertical axis represents the conductivity (s / cm) of the created air electrode.
The conductivity of the air electrode created at a temperature other than 1200 ° C. is the firing setter No. It was higher to use 1. The firing setter in which the ceria layer is laminated has little influence on the composition of the air electrode, and can produce an air electrode having desired characteristics.

[Durability of firing setter]
No. The following heat cycle test was performed on the firing setter of 1. Such heat cycle conditions are tests corresponding to the manufacture of general electronic components.
(A) Temperature rise from 100 ° C to 1300 ° C over 240 minutes (b) Hold 1300 ° C for 30 minutes (c) Rapid cooling from 1300 ° C to 100 ° C for one cycle (d) (a)-(c) As a result, 30 cycles were repeated.
When the above-mentioned peeling test was performed on the firing setter after 30 cycles, it was confirmed that the film adhesion was maintained.

In the electronic component firing setter of the present invention, the mounting surface is composed of a ceria layer having low reactivity with the object to be fired, and the ceria layer has excellent durability, so that the air of the solid oxide fuel cell It can be used repeatedly as a setter for firing electronic parts such as poles, and is useful.

1 Baking setter 2 Substrate 3 Ceria layer (ceria film)
3a mounting surface

Claims (6)

A substrate made of aluminosilicate ceramics having a content ratio (weight ratio) of Al ₂ O ₃ and SiO ₂ of 65: 35 to 93: 7; and a substrate to be fired, which is laminated and integrated on at least one surface of the substrate. A setter for firing electronic components containing a ceria layer containing 65% by weight or more of CeO ₂ that forms a mounting surface. The setter for firing electronic components according to claim 1, wherein the total porosity of the substrate is 5 to 50%. The setter for firing electronic components according to claim 1 or 2, wherein the thickness of the ceria layer is 30 to 200 μm. The electronic component according to any one of claims 1 to 3, wherein the ceria layer contains at least one selected from the group consisting of Gd, Sm, Y, and La in an amount of 0 to 35% by weight. Setter for firing. The setter for firing electronic components according to any one of claims 1 to 4, which is used for firing the air electrode of a solid oxide fuel cell. In a method for manufacturing an air electrode of a solid oxide fuel cell, which comprises a step of firing a raw material for an air electrode placed on the surface of a calcining setter.
As the firing setter, CeO ₂ is contained in at least 65% by weight on at least one surface of a substrate made of aluminosilicate ceramics having a content ratio (weight ratio) of Al ₂ O ₃ and SiO ₂ of 65: 35 to 93: 7. Using a setter for firing electronic components in which the ceria layer is laminated and integrated,
A method for producing an air electrode of a solid oxide fuel cell, wherein the air electrode raw material is fired on the ceria layer.