JP2020183563A - Winding type film deposition apparatus and winding type film deposition method - Google Patents

Abstract

To improve the reliability of a winding type film deposition.SOLUTION: A winding type film deposition apparatus of the embodiment forms a film on a film deposition surface of a base film which is wound off from a wind-off roller and wound up by a wind-up roller. The winding type film deposition apparatus includes: a main roller having an outer circumferential surface which comes into contact with a non-film deposition surface of the base film opposite to the film deposition surface, and configured such that an arithmetic average roughness Ra of the outer circumferential surface is 10 μm or more and 300 μm or less; and a film deposition source opposing to the outer circumferential surface of the main roller which comes into contact with the non-film deposition surface.SELECTED DRAWING: Figure 1

Description

The present invention relates to a retractable film forming apparatus and a retractable film forming method.

In a retractable film forming apparatus, a strip-shaped film is wound by a roller at a predetermined winding angle in a vacuum vessel, and the roller is made to face the film forming source through the film to form a thin film on the film forming surface of the film. There is something that forms. In such a retractable film forming apparatus, the outer peripheral surface of the roller may be mirror-finished in order to receive a heat load from the film forming source (see, for example, Patent Document 1).

By performing such processing, a sufficient area for the film to be in close contact with the outer peripheral surface is secured, so that the film is efficiently cooled by the rollers even if the film receives a heat load from the film forming source.

JP-A-2010-242217

However, if the outer peripheral surface is processed to be a mirror surface, the adhesive force between the outer peripheral surface and the film becomes excessive, and the frictional force acting between the outer peripheral surface and the film may increase. Further, when the amount of heat of the material released from the film forming source is large, the film tends to stretch on the outer peripheral surface due to the influence of the heat received from the material. However, if the frictional force between the outer peripheral surface and the film is large, this elongation is suppressed and the film is wrinkled on the outer peripheral surface. As a result, the reliability of the retractable film formation is lowered.

In view of the above circumstances, an object of the present invention is to provide a take-up type film forming apparatus and a take-up type film forming method in which the reliability of the take-up type film forming is improved.

In order to achieve the above object, the take-up film forming apparatus according to one embodiment of the present invention is a take-up film forming device that forms a film on the film forming surface of a film that is unwound from a take-up roller and taken up by the take-up roller. It is a device.
The main roller has an outer peripheral surface that abuts on the non-deposited surface of the film on the side opposite to the film-forming surface, and the arithmetic average roughness Ra of the outer peripheral surface is configured to be 10 μm or more and 300 μm or less.
The film forming source faces the outer peripheral surface of the main roller in contact with the non-deposited surface.

According to such a retractable film forming apparatus, the film is surely supported by the main roller, and even if the film is affected by the heat from the film forming source, a film having a uniform thickness is formed on the film. Will be done. That is, the reliability of the retractable film formation is improved.

In the winding type film forming apparatus, the outer peripheral surface of the main roller may have a blasted surface.

According to such a retractable film forming apparatus, since the outer peripheral surface of the main roller has a blasted surface, the film is reliably supported by the main roller, and the film is affected by heat from the film forming source. However, a film having a uniform thickness is formed on the film. That is, the reliability of the retractable film formation is improved.

In the winding type film forming apparatus, a layer in which powder particles having an average particle size of 0.1 μm or more and 10 μm or less are dispersed in a resin layer having a thickness of 1 μm or more and 200 μm or less is formed on the outer peripheral surface of the main roller. It may be provided.

According to such a retractable film forming apparatus, since the outer peripheral surface of the main roller is formed by the above layer, the film is surely supported by the main roller, and the film is affected by the heat from the film forming source. Even so, a film having a uniform thickness is formed on the film. That is, the reliability of the retractable film formation is improved.

In the winding type film forming apparatus, the main roller may wind the film at a winding angle of 180 ° or more and 330 ° or less.

According to such a retractable film forming apparatus, the main roller winds the film at a winding angle of 180 ° or more and 330 ° or less, so that the film is surely supported by the main roller. That is, the reliability of the retractable film formation is improved.

In order to achieve the above object, the take-up film formation method according to one embodiment of the present invention is a take-up film formation method in which a film is formed on the film formation surface of a film unwound from a take-up roller and taken up by the take-up roller. The method.
A main roller having an outer peripheral surface that is in contact with the non-deposited surface of the film on the side opposite to the film-forming surface and having an arithmetic mean roughness Ra of the outer peripheral surface of 10 μm or more and 300 μm or less is used. The film is formed on the film-forming surface with the film-forming source facing the outer peripheral surface of the main roller in contact with the non-film-forming surface.

According to such a retractable film forming method, the film is surely supported by the main roller, and even if the film is affected by the heat from the film forming source, a film having a uniform thickness is formed on the film. Will be done. That is, the reliability of the retractable film formation is improved.

As described above, according to the present invention, there is provided a retractable film forming apparatus and a retractable film forming method in which the reliability of the retractable film forming is improved.

FIG. (A) is a schematic cross-sectional view of the retractable film forming apparatus according to the present embodiment. FIG. (B) is a schematic view illustrating the state around the outer peripheral surface of the main roller in the retractable film forming apparatus. FIG. 1A is a schematic cross-sectional view showing the configuration of the portion surrounded by the broken line P1 in FIG. 1B. FIG. (B) is a schematic cross-sectional view showing another configuration of the portion surrounded by the broken line P1. It is a schematic cross-sectional view explaining an example of the operation of the winding type film forming apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. XYZ axis coordinates may be introduced in each drawing. Further, the same member or a member having the same function may be designated by the same reference numeral, and the description may be omitted as appropriate after the description of the member.

[Rewind-type film forming apparatus]

FIG. 1A is a schematic cross-sectional view of the retractable film forming apparatus according to the present embodiment. FIG. 1B is a schematic view illustrating a state around the outer peripheral surface of the main roller in the retractable film forming apparatus.

The take-up film forming apparatus 1 is a film forming apparatus in which a metal film (for example, a lithium film) is formed on the film forming surface 60d of the film 60 while the film 60 runs in the vacuum vessel 70. The take-up type film forming apparatus 1 includes, for example, a main roller 10, a film forming source 20, a film traveling mechanism 30, a partition plate 40, and a vacuum vessel 70.

The main roller 10 is a tubular roller made of a metal such as iron, stainless steel, or aluminum. The main roller 10 rotates about the central axis C1. The main roller 10 is arranged between the film 60 and the film forming source 20.

A rotary drive mechanism for rotationally driving the main roller 10 is provided outside the take-up film forming apparatus 1. Alternatively, the main roller 10 may have a rotation drive mechanism. Alternatively, the main roller 10 may be a roller that is not rotated by the rotation drive mechanism and freely rotates about the central axis 10c. In the main roller 10, the outer peripheral surface 10s becomes a roller surface, and the outer peripheral surface 10s comes into contact with the non-deposited surface 60r of the film 60 on the side opposite to the film-forming surface 60d of the film 60.

The diameter of the main roller 10 is not particularly limited, and is, for example, 10 mm or more and 1500 mm or less. The length of the main roller 10 in the X-axis direction is configured to be equal to or less than the width of the film 60. For example, the length of the main roller 10 is not particularly limited, and is, for example, 50 mm or more and 2000 mm or less.

When the film 60 is traveling in the direction of arrow A, for example, the main roller 10 in contact with the film 60 rotates clockwise. At this time, the speed at which the outer peripheral surface 10s moves about the central axis 10c (tangential velocity) is set to, for example, the same speed as the traveling speed of the film 60. As a result, while the film 60 is running, the outer peripheral surface 10s and the film 60 are less likely to be displaced, and a film can be stably formed on the film-forming surface 60d.

In the present embodiment, a temperature control mechanism such as a temperature control medium circulation system for adjusting the temperature of the outer peripheral surface 10s may be provided inside the main roller 10. The temperature control mechanism is, for example, a temperature control mechanism such as a temperature control medium circulation system. Even if the main roller 10 receives heat from the film forming source 20, the temperature of the outer peripheral surface 10s of the main roller 10 becomes a uniform temperature because the main roller 10 rotates about the central axis 10c. It is kept.

The film forming source 20 has a melting container 21 (crucible). The film forming source 20 faces the outer peripheral surface 10s of the main roller 10. A vapor deposition material 25 such as lithium (Li) is housed in the melting container 21. The thin-film deposition material 25 is melted in the melting vessel 21 by a method such as resistance heating, induction heating, or electron beam heating.

The film traveling mechanism 30 includes a winding roller 31, a winding roller 32, and guide rollers 33a, 33b, 33c, and 33d. A rotation drive mechanism for rotationally driving the take-up roller 31 and the take-up roller 32 is provided outside the take-up type film forming apparatus 1. Alternatively, each of the unwinding roller 31 and the winding roller 32 may have a rotation drive mechanism.

The film 60 is previously wound on the unwinding roller 31 and unwound from the unwinding roller 31. After that, the film 60 is subjected to a film forming process, and the film 60 is wound by the winding roller 32.

For example, the film 60 continuously unwound from the unwinding roller 31 is supported by the guide rollers 33a and 33b during traveling, and the traveling direction is changed by each of the guide rollers 33a and 33b, and the film 60 is wound around the main roller 10. Will be done. The winding angle θ1 of the main roller 10 around which the film 60 is wound is not particularly limited, and is, for example, 180 ° or more and 330 ° or less.

The film 60 wound around the main roller 10 is supported by the main roller 10 and guided to the guide roller 33c while being in contact with the outer peripheral surface 10s of the main roller 10.

The film 60 separated from the outer peripheral surface 10s of the main roller 10 is supported by the guide rollers 33c and 33d during traveling, and the traveling direction is changed by each of the guide rollers 33c and 33d, and the film 60 is continuously wound around the winding roller 32. Taken. Here, the tension of the film 60 supported by the outer peripheral surface 10s of the main roller 10 has a tension (N) / film width (mm) value of 0.1 (N / mm) or more and 1.0 (N / mm). It is set as follows.

The partition plate 40 is arranged between the film forming source 20 and the main roller 10. The partition plate 40 is provided with an opening 41 that opens the film forming source 20 toward the outer peripheral surface 10s of the main roller 10. Assuming a triangle whose base is the width W1 of the opening 41 in the rotation direction R of the main roller 10 and whose apex is the center of the main roller 10 (center axis 10c), the apex angle θ2 of the triangle is not particularly limited. For example, it is configured to be larger than 0 ° and 180 ° or less.

Here, the angle (θ1-θ2) obtained by subtracting the angle θ2 from the angle θ1 is larger than the angle θ2 ((θ1-θ2)> θ2).

The film 60 is a so-called web, which is a long film cut to a predetermined width. The film 60 includes at least one of a copper foil, an aluminum foil, a nickel foil, a stainless foil, and a resin film. The thickness of the film 60 is not particularly limited, and is, for example, 1 μm or more and 500 μm or less.

The vacuum vessel 70 houses the main roller 10, the film forming source 20, the film traveling mechanism 30, the partition plate 40, the film 60, and the like. The vacuum vessel 70 can maintain a reduced pressure state, and the inside thereof is maintained at a predetermined degree of vacuum through, for example, an exhaust pipe 71 connected to a vacuum exhaust system (not shown) such as a vacuum pump.

Alternatively, at least one gas such as dry air, an inert gas (Ar, He, etc.), carbon dioxide (CO ₂ ), nitrogen, or the like may be supplied into the vacuum vessel 70 by the gas supply mechanism 72.

Further, in the present embodiment, in addition to lithium, at least at least indium (In), zinc (Zn), tin (Sn), gallium (Ga), bismuth (Bi), sodium (Na), potassium (K) and the like are used. Either may be housed in the melting container 21.

FIG. 2A is a schematic cross-sectional view showing the configuration of the portion surrounded by the broken line P1 in FIG. 1B. FIG. 2B is a schematic cross-sectional view showing another configuration of the portion surrounded by the broken line P1. The configurations of FIGS. 2 (a) and 2 (b) are not limited to independent configurations, and may be combined with each other.

As shown in FIG. 2A, a layer 101 in which powder particles 103 are dispersed in a resin layer 102 is provided on the outer peripheral surface 10s of the main roller 10. The thickness of the layer 101 is not particularly limited, and is, for example, 1 μm or more and 200 μm or less. The average particle size of the powder particles 103 is not particularly limited, and is, for example, 0.1 μm or more and 10 μm or less. The average particle size of the powder particles 103 is measured by, for example, a laser diffraction / scattering method or the like. For example, the peak value of the measurement distribution is taken as the average particle size.

The powder particles 103 are not particularly limited, and are contained in the resin layer 102 in an amount of, for example, 0.1 wt% or more and 50 wt% or less. In the present embodiment, the layer 101 may be included in the main roller 10 and the outer peripheral surface 101s of the layer 101 may be the outer peripheral surface of the main roller 10.

The resin layer 102 contains at least one of a silicon-based resin, a fluororesin, a carbon-based resin, an acrylic resin, an epoxy-based resin, and the like. The powder particles 103 contain at least one of silica, magnesia, titania, alumina and the like.

Alternatively, as shown in FIG. 2B, the outer peripheral surface 10s may have an uneven structure without the layer 101 being provided on the outer peripheral surface 10s of the main roller 10. For example, the outer peripheral surface 10s is provided with a blasted surface that has been blasted with alumina particles, glass particles, or the like.

The arithmetic mean roughness Ra of the outer peripheral surface 101s and the outer peripheral surface 10s is not particularly limited, and is configured to be, for example, 10 μm or more and 300 μm or less.

In the present embodiment, a take-up type film forming method for forming a film on the film forming surface 60d of the film 60 by using such a main roller 10 is also provided.

[Action]

FIG. 3 is a schematic cross-sectional view illustrating an example of the operation of the retractable film forming apparatus.

In FIG. 3, the outer peripheral surface 10s of the main roller 10 is divided into a region 110 in which the film 60 is in contact with the main roller 10 in the range of the angle θ2 and a region 120 in which the film 60 is in contact with the main roller 10 in the range of the angle θ1 excluding the angle θ2. The divided state is shown. Even if the main roller 10 rotates, the positions of the regions 110 and 120 are fixed.

When the outer peripheral surface 10s is processed to be a mirror surface, the frictional force acting between the outer peripheral surface 10s and the film 60 becomes large, and the elongation of the film 60 receiving the vapor-deposited material 25 is suppressed during the film formation. As a result, wrinkles may occur on the film 60 on the outer peripheral surface 10s.

As a result, for example, in the region 110 of the outer peripheral surface 10s, a part of the film 60 floats from the outer peripheral surface 10s, and the floating portion is not sufficiently cooled by the main roller 10, or the film 60 is deposited. The incident angle of the material 25 changes depending on the location of the film 60. As a result, a film having a uniform thickness may not be formed on the film 60.

On the other hand, in the present embodiment, the arithmetic average roughness Ra of the outer peripheral surface 10s (or the outer peripheral surface 101s) is configured to be 10 μm or more and 300 μm or less.

Therefore, even if the film 60 is stretched in the region 110, the stretch is not suppressed, and the film 60 freely expands along the outer peripheral surface 10s in the region 110. As a result, wrinkles are less likely to occur in the film 60 in the region 110. As a result, a film having a uniform thickness is formed on the film 60. Here, if the arithmetic mean roughness Ra of the outer peripheral surface 10s (or the outer peripheral surface 101s) is smaller than 10 μm, the elongation of the film 60 is suppressed in the region 110, which is not preferable.

On the other hand, in the main roller 10, the angle (θ1-θ2) is configured to be larger than the angle θ2. Therefore, the area of the region 120 is overwhelmingly larger than the area of the region 110, and the film 60 has a large contact area with the main roller 10 in the region 120. Here, if the winding angle θ1 is smaller than 180 °, a sufficient contact area between the film 60 and the main roller 10 cannot be obtained, which is not preferable.

As a result, in the region 120, the film 60 and the outer peripheral surface 10s are less likely to be displaced, and the film 60 is conveyed from the guide roller 33b to the guide roller 33c while being supported by the main roller 10. Here, if the arithmetic mean roughness Ra of the outer peripheral surface 10s (or the outer peripheral surface 101s) is larger than 300 μm, the film 60 and the outer peripheral surface 10s are likely to be displaced even in the region 120, which is not preferable.

As described above, according to the present embodiment, even if the film 60 is reliably supported by the main roller 10 and the film 60 is affected by the heat from the film forming source 20, the film 60 has a uniform thickness. A film is formed. That is, the reliability of the retractable film formation is improved.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and it goes without saying that various modifications can be made. Each embodiment is not limited to an independent form and can be combined as technically possible as possible.

1 ... Winding type film forming apparatus 10 ... Main roller 10c ... Central axis 10s, 101s ... Outer peripheral surface 20 ... Film forming source 21 ... Melting container 25 ... Vapor deposition material 30 ... Film traveling mechanism 31 ... Unwinding roller 32 ... Winding roller 33a, 33b, 33c, 33d ... Guide roller 40 ... Partition plate 41 ... Opening 60 ... Film 60d ... Film-formed surface 60r ... Non-deposited surface 70 ... Vacuum container 71 ... Exhaust pipe 72 ... Gas supply mechanism 101 ... Layer 102 ... Resin Layer 103 ... Powder particles 110, 120 ... Region

Claims (5)

A take-up type film forming apparatus that forms a film on the film-forming surface of a film that is unwound from a unwinding roller and wound up by the winding roller.
A main roller having an outer peripheral surface that is in contact with the non-deposited surface of the film on the side opposite to the film-forming surface, and having an arithmetic average roughness Ra of 10 μm or more and 300 μm or less on the outer peripheral surface.
A retractable film forming apparatus including a film forming source facing the outer peripheral surface of the main roller in contact with the non-deposited surface. The retractable film forming apparatus according to claim 1.
A take-up type film forming apparatus having a blasted surface on the outer peripheral surface of the main roller. The retractable film forming apparatus according to claim 1 or 2.
A retractable film forming apparatus provided with a resin layer having a thickness of 1 μm or more and 200 μm or less and a layer in which powder particles having an average particle size of 0.1 μm or more and 10 μm or less are dispersed on the outer peripheral surface of the main roller. The retractable film forming apparatus according to any one of claims 1 to 3.
The main roller is a take-up film forming apparatus that winds the film at a winding angle of 180 ° or more and 330 ° or less. This is a take-up type film formation method in which a film is formed on the film formation surface of a film unwound from a take-up roller and taken up by a take-up roller.
Using a main roller having an outer peripheral surface that is in contact with the non-deposited surface of the film on the side opposite to the film-forming surface and having an arithmetic average roughness Ra of the outer peripheral surface of 10 μm or more and 300 μm or less.
A winding-type film forming method in which a film forming source is opposed to the outer peripheral surface of the main roller in contact with the non-deposited surface to form the film on the film forming surface.

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