JP2020169972A - Manual stage with anti-rattling mechanism - Google Patents

Abstract

To provide a manual stage with an anti-rattling mechanism that prevents so-called "rattling" of sliding parts with respect to fixed parts, which occurs in position adjustment with a manual stage.SOLUTION: A manual stage with an anti-rattling mechanism includes: a convex portion 21 in which a female screw cylinder 6 is housed in a concave portion 20 provided in a sliding part 2; a cylinder body 22 that is penetrated by a male screw rod 5; a slit portion 11 provided in the cylinder body 22; and an anti-rattling bolt 10 that adjusts a width (d) of the slit portion 11. So-called "rattling" of the manual stage is prevented by rotating the anti-rattling bolt 10 to change the slit width (d) of the slit portion 11 to introduce axial pressure to a female screw.SELECTED DRAWING: Figure 6

Description

The present invention relates to a manual stage with a rattling suppression mechanism, and more particularly to a feed screw type manual stage provided with a rattling suppression mechanism.

In a manual stage used for adjusting the position of precision equipment such as optical equipment, it is common to rotate a handle to transmit power in order to slide a sliding part with respect to a fixed part. That is, it is a method in which a male screw and a female screw are engaged with each other to rotate and move a sliding part with respect to a fixed part. In this case, unless a gap is intentionally provided between the male screw and the female screw, the male screw and the female screw interfere with each other and cannot rotate. However, if a gap is intentionally provided in this way, a so-called "rattling" phenomenon may occur in which the mechanical element returns in the opposite direction due to the gap when rotated in a predetermined direction. This "rattling" is mainly caused by "rattling", which is the gap between the male and female threads, and may cause the measurement accuracy to be incorrect when adjusting the position of precision equipment such as optical equipment. is there.

In the lead screw type manual stage, the female screw and the male screw are engaged, the position of a precision instrument such as an optical instrument is moved, and the stage is not "focused" unless it is accurately aligned to the optimum position. Therefore, it is necessary to handle the precision equipment that has been aligned once so that it does not change slightly due to rattling.

As a means for preventing "rattling" of the manual stage, a method of solidifying using a resin such as an adhesive is adopted. Further, in automobiles and the like, methods for reducing rattling such as friction gears have been proposed and put into practical use. Further, a technique of attaching a loosening prevention mechanism called a friction ring to the nut body to exert a "locking prevention effect" is also disclosed.

Patent Document 1 discloses a backlash when fixing a movable stage and a stage mechanism with less movement after fixing. Here, it is described that one or more backlash absorbing members into which a cushion resin member is inserted are provided, and a connecting member for sliding the movable stage in synchronization with the feed of the feed screw is provided. There is.

Patent Document 2 discloses a stage mechanism that easily and stably slides a movable stage when the feed screw is rotated and suppresses backlash of the movable stage when the rotation of the feed screw is stopped. There is. Here, a nut member that rotates and moves along the thread groove of the lead screw is provided, and a double nut structure formed on both sides of the insertion hole in the screw hole direction of the nut member is provided, and a backlash absorbing member is provided with respect to the insertion hole. Is described to be inserted.

Patent Document 3 discloses a method and mechanism for removing backlash of a screw. Here, in the male screw having a thread groove cut on the outer peripheral surface of the rod, a mounting groove which is a wide valley bottom which is one step lower than the screw groove on the outer peripheral surface of the rod and is screwed with the female screw is provided for mounting. It is described that an elastic body that comes into contact with the screw thread of the screwing partner and elastically deforms is attached to the groove.

Patent Document 4 discloses a stopper mechanism using a sliding fixing screw. Here, inverted triangular protrusions and grooves are provided on the walls on both sides of the fixing part, and the sliding fixing screw is pushed through the hole for the sliding fixing screw and abutted against the protruding part to hold down the sliding part. , It is described that the position of the sliding component with respect to the fixed component is fixed and the degree of sliding between the fixed component and the sliding component is finely adjusted.

Here, the back rush prevention mechanism by the "double nut" used in Patent Documents 1 to 3 will be described with reference to FIG. This double nut backlash prevention mechanism is used to prevent the nut from loosening due to vibration or the like. FIG. 16A shows a state in which the lower nut 142 is attached to the bolt 146 and tightened, and FIG. 16A is a partial detailed view regarding the engagement of the lower nut 142. FIG. 16B shows a state in which the upper nut 144 is attached and tightened above the lower nut 142, and FIG. 16B is a partial detailed view of the meshing portion of the lower nut 142. FIG. 16 (c) shows a state in which the upper nut 144 is fixed and the lower nut 142 is rotated in the opposite direction, and FIG. 16 (c') is a partial detailed view of the meshing portion of the lower nut 142.

In the state of FIG. 16A, the bolt surface and the nut surface are in close contact with each other on the nut screw upper surface 148 to generate a tightening force (f). On the other hand, on the lower surface 150 of the nut screw, a gap is generated between the bolt surface and the nut surface. In the state of FIG. 16 (b), the engagement between the bolt 146 and the upper nut 144 is such that the bolt surface and the nut surface are in close contact with each other on the nut screw upper surface 148 as shown in FIG. 16 (a). Occurs. On the other hand, the bolt 146 and the lower nut 142 are separated from each other and the tightening amount (f) becomes zero. In the state of FIG. 16C, regarding the engagement between the bolt 146 and the lower nut 142, the bolt surface and the nut surface are in close contact with each other on the nut screw lower surface 150, and a tightening force (f) is generated. On the other hand, on the upper surface of the nut screw 148, a gap is generated between the bolt surface and the nut surface. That is, as shown in FIG. 16C, a tightening force is generated in the direction opposite to the meshing of the bolt 146 and the upper nut 144. The tightening forces in these opposite directions prevent the nut from loosening.

Patent No. 4838402 Patent No. 5346069 JP-A-9-177924 JP-A-2010-223611

The technique of using a cushion resin member containing a thermoplastic resin to prevent backlash, as shown in Patent Document 1, is when the surface of the resin nut in contact with the lead screw is liquefied by heat generation and the screw is fastened. This is a mechanism that locks the backlash of the feed screw by solidifying the surface in contact with the feed screw as the resin nut cools. In this mechanism, it takes time for the resin to exert its effect, and there is a problem that the performance deteriorates due to the deterioration of the resin.

The technique of using a double nut to prevent backlash, which is shown in Patent Document 2, has a problem that the operation method is difficult in a feed screw type manual stage.

Further, there is a method of preventing "rattling" of the dovetail groove type manual stage by using the sliding fixing screw of the dovetail groove type manual stage shown in Patent Document 4. According to this method, rattling can be prevented without adding anything to a normal dovetail type manual stage. However, the manual stage must be aligned with the sliding fixing screw of the dovetail manual stage tightened. Therefore, there is a problem that it takes time and effort to move the sliding parts due to the frictional force generated by tightening the sliding fixing screws.

An object of the present application is to provide a manual stage with a rattling suppression mechanism that solves such a problem and suppresses so-called "rattling" of sliding parts with respect to fixed parts by a simple configuration and operation, which occurs when the position is adjusted by the manual stage. Is.

In order to achieve the above object, the manual stage with a rattling suppression mechanism according to the present invention is provided on a sliding part, and is connected to a female screw cylinder having a female screw inside and a fixing part, and has a male screw on the outside. In the feed screw type manual stage in which the cut male screw rod is engaged and the sliding component is slid by the rotation operation of the male screw rod, the female screw cylinder is housed in the recess provided in the sliding component. It is characterized by including a convex portion, a tubular portion main body through which a male screw rod penetrates, a slit portion provided in the tubular portion main body, and a rattling suppression bolt for adjusting the width of the slit portion.

With the above configuration, in a dovetail type manual stage composed of a fixed part and a sliding part, the female screw cylinder has a convex portion in which the female screw cylinder is engaged with the recess of the sliding part, and the female screw cylinder is a male screw. It is composed of a tubular part body through which a rod penetrates and a female thread is cut inside, and a slit portion provided in the tubular part body. The inside of the female screw is adjusted by adjusting the distance between the slit portions with a rattling suppression bolt. Axial pressure can be generated in the feed screw type manual stage, and a rattling suppression mechanism can be easily added.

Further, in the manual stage with a rattling suppression mechanism, the tubular portion main body is engaged with the concave portion provided in the sliding component at the convex portion, the slit portion is provided in the direction intersecting the male screw rod, and one end portion is a slit. It is preferable that the open end of the portion, the other end is the slit end of the slit portion, and the rattling suppression bolt is provided close to the open end side of the slit portion in the tubular portion main body.

That is, since the tubular portion main body is engaged with the concave portion of the sliding component at the convex portion, it is possible to suppress the movement of the tubular portion main body by operating the rattling suppression bolt. Further, the slit portion is provided in a direction intersecting the male screw rod, one end portion is an open end of the slit portion, the other end portion is a slit end of the slit portion, and a rattling suppression bolt is provided in the cylinder portion main body. It is provided close to the open end side of the slit portion. With this configuration, it becomes possible to change the shape of the female screw by rotating the rattling suppression bolt. That is, when the rattling suppression bolt is rotated, the width of the opening of the slit portion changes, and the cylinder portion main body is deformed with the slit end as a fixed point. Then, the shape of the female screw changes due to the deformation of the main body of the cylinder, producing an effect as if the pitch of the female screw was changed. As a result, the manual stage can be easily provided with a rattling suppression mechanism.

Here, "one end of the slit portion is an open end and the other end is a slit end" means that the main body of the female screw cylinder is provided with a U-shaped slit. The part that hits the tip of the character is called the open end, and the part that hits the bottom of the U-shape is called the slit end.

Further, in the manual stage with a rattling suppressing mechanism, it is preferable to introduce axial pressure into the female screw cylinder by rotating the rattling suppressing bolt and changing the shape of the female screw. In this way, the rattling suppression mechanism can be provided on the manual stage by a simple method of changing the shape of the female screw.

Further, in the manual stage with a rattling suppression mechanism, it is preferable that when the cylinder portion main body rotates the rattling suppression bolt, the slit spacing at the open end of the slit portion is changed while including the rotation operation centered on the slit end. In this way, it is possible to change the shape of the female screw and introduce axial pressure inside the female screw cylinder to introduce a rattling suppression mechanism into the manual stage.

In addition, in the manual stage with a rattling suppression mechanism, due to the rotation of the rattling suppression bolt, the meshing of the male screw rod and the female screw cylinder screw in the cylinder body is reversed on the left and right with the slit position as the boundary, and each is reversed. It is preferable that a tightening force in the direction is generated. In this way, applying the same principle as the loosening prevention of the double nut, a slit is provided in the main body of the cylinder, the slit width is adjusted by the rattling suppression bolt, and the tightening force is introduced into the female screw cylinder. A rattling suppression mechanism can be introduced.

In addition, the manual stage with a rattling suppression mechanism is a male screw by fixing the rattling suppression screw that suppresses lateral rattling of the dovetail groove of the dovetail groove stage in a tightening area that exceeds the smoothly sliding area. It is preferable to suppress rattling with the female screw in advance. Thereby, a simple means alternative to the above-mentioned rattling suppression mechanism can be applied, or it can be applied in addition to the above-mentioned rattling suppression mechanism.

Further, in the manual stage with a rattling suppression mechanism, the sliding fixing screw is provided around the hole of the sliding fixing screw, and the protrusion of the dovetail groove stage sandwiches the axial pressure distribution plate made of a hard material such as stainless steel. It is preferable to introduce axial pressure into the stainless steel. As a result, the axial pressure can be appropriately dispersed, and sliding unevenness caused by the concentration of the axial pressure can be prevented.

As described above, according to the manual stage with a rattling suppression mechanism according to the present invention, rattling suppression that suppresses so-called "rattling" of sliding parts with respect to fixed parts, which occurs when the position is adjusted by the manual stage, is suppressed by a simple configuration and operation. A manual stage with a mechanism can be provided.

It is a perspective view which shows the schematic structure of one Embodiment of the manual stage with the rattling suppression mechanism which concerns on this invention. FIG. 5 is a perspective view taken along the line AA showing a manual stage with a rattling suppression mechanism inside the embodiment of FIG. It is a BB side view of the embodiment of FIG. It is a perspective plan view which shows the rattling suppression mechanism inside the embodiment of FIG. 1 from the upper surface. It is sectional drawing and CC sectional drawing which shows the drive mechanism which fixes the female screw cylinder to a sliding part in a feed screw type manual stage, and rotates a rotation operation part, and moves a sliding part with respect to a fixed part. It is a detailed cross-sectional view which shows the structure of the rattling suppression mechanism in an enlarged manner. It is explanatory drawing which shows the rattling suppression mechanism which introduces an axial pressure by changing the shape of a female screw by the rattling suppression bolt. It is a perspective view which shows the other drive mechanism of the manual stage with the rattling suppression mechanism. It is A'-A' perspective view which shows the other drive mechanism shown in FIG. It is a perspective plan view which shows the other drive mechanism shown in FIG. 8 from the upper surface. FIG. 8 is a cross-sectional view showing another driving mechanism shown in FIG. 8 and a cross-sectional view taken along the line C'-C'. FIG. 5 is a detailed cross-sectional view showing an enlarged configuration of another drive mechanism shown in FIG. It is explanatory drawing which shows the rattling suppression mechanism by another drive mechanism shown in FIG. It is a reference figure which shows the outline of the conventional feed screw type manual stage. It is a reference figure which shows the sliding fixing method and the sliding adjustment method by the sliding fixing screw and the sliding adjusting screw in the conventional rack and pinion type manual stage. It is sectional drawing and partial sectional drawing which shows the principle of the backlash prevention mechanism by a conventional double nut.

Hereinafter, the manual stage 1 with a rattling suppression mechanism according to the present invention will be described in detail with reference to the drawings. FIG. 1 shows a schematic configuration of one embodiment of the manual stage 1 with a rattling suppression mechanism. Further, FIG. 2 shows the manual stage 1 with the rattling suppression mechanism of FIG. 1 in a perspective view taken along the line AA. Further, FIG. 3 shows a side view of BB of the manual stage 1 with a rattling suppression mechanism of FIG. Further, FIG. 4 shows a perspective plan view of the manual stage 1 with a rattling suppression mechanism of FIG. 1 as viewed from above.

As shown in FIG. 1, for example, a precision instrument such as a camera is attached to a precision instrument mounting hole 15 provided in the sliding component 2. Further, as shown in FIG. 2, the fixing component 3 is fixed to a base fixing hole 16 provided in, for example, a base. The sliding component 2 and the fixing component 3 are both installed so that their back surfaces face each other. Then, a female screw cylinder 6 provided on the sliding component 2 and having a female screw 25 (see FIG. 5 (a)) cut inside and a male screw 24 (FIG. 5 (a)) connected to the fixing component 3 on the outside. ) Is engaged with the cut male screw rod 5 to connect the sliding component 2 and the fixing component 3. Further, a rotation operation unit 4 is connected to the end of the male screw rod 5 via a bearing plate 7. In the rotation operation unit 4, the male screw rod 5 can be rotated by a hexagon wrench 9 or the like. Further, the bearing plate 7 is fixed to the fixing component 3 by the bearing plate fixing bolt 17a as shown in FIG. Then, the bearing plate 7 supports and fixes the male screw rod 5 with the nut 13 and the washer 14. Further, an end plate 29 is provided in the direction opposite to the bearing plate 7, and is fixed to the fixing component 3 by the end plate fixing bolt 35. Further, a part of the sliding component 2 is provided with a notch 12 in order to facilitate tightening of the male screw rod 5. Preload is applied to the front and rear of the bearing plate 7 by a male screw rod 5 and a nut 13 via a washer 14. This preload is for preventing the rattling of the male screw rod 5 and the rotation operation unit 4 in the axial direction and the rattling of the bearing plate 7 in the surface direction.

(Lead screw type manual stage)
FIG. 14 shows an outline of the conventional feed screw type manual stage 100. FIG. 14A is a perspective view of the feed screw type manual stage 100, and FIG. 14B is a cross-sectional view showing the inside of the feed screw type manual stage 100. The manual stage 1 with a rattling suppressing mechanism according to the present invention shown in FIGS. 1 to 4 described above is a manual stage to which a rattling suppressing mechanism 120 is added based on the feed screw type manual stage 100 shown in FIG. Therefore, the outline of the lead screw type manual stage 100 will be described with reference to FIG.

As shown in FIG. 14, the feed screw type manual stage 100 includes a sliding component 2, a fixing component 3, and a rotation operation unit 4. The feed screw type manual stage 100 is provided on the sliding component 2, and is connected to the female screw cylinder 6 having the female screw 25 cut inside and the fixing part 3, and the male screw 24 cut outside. The screw rod 5 is engaged with the engaging portion 8 shown in FIG. The feed screw type manual stage 100 includes a drive mechanism 110 (see FIG. 5) that slides the sliding component 2 by rotating the male screw rod 5 in the rotation operation unit 4. In this way, the feed screw type manual stage 100 adjusts the position by sliding a precision instrument such as a camera attached to the sliding component 2 with respect to the fixing component 3 fixed to the base or the like. It is a manual stage, and the position can be fixed by functioning the sliding fixing screw 132 (see FIG. 15), which is a stopper mounted for setting the sliding component 2 at a desired position.

(Drive mechanism in feed screw type manual stage)
FIG. 5 shows a drive mechanism 110 in the feed screw type manual stage 100. 5a is a cross-sectional view taken from the side surface of the drive mechanism 110, and FIG. 5b is a cross-sectional view taken along the line CC of FIG. 5A. The male screw rod 5 is connected to the rotation operation unit 4 via a washer 14 and a bearing plate 7 (see FIG. 2). Then, as shown in FIG. 5, the female screw cylinder 6 has a convex portion 21 protruding from the tubular portion main body 22 toward the sliding component 2, and the convex portion 21 is provided on the back surface of the sliding component 2. It is engaged with the recess 20. Therefore, when the rotation operation unit 4 is rotated, the male screw 24 rotates with respect to the female screw 25 inside the female screw cylinder 6, and the female screw cylinder 6 moves back and forth. This movement of the female screw cylinder 6 drives the sliding component 2 with respect to the fixed component 3 via the convex portion 21 of the female screw cylinder 6 and the concave portion 20 provided on the back surface of the sliding component 2. Then, a precision instrument such as a camera attached to the sliding component 2 is set at a desired position.

The so-called "rattling" in the drive mechanism 110 of the feed screw type manual stage 100 is a gap intentionally provided in the drive mechanism 110 in which the male screw 24 and the female screw 25 are engaged with each other. Without this gap, the male screw rod 5 and the female screw cylinder 6 interfere with each other and the rotation operation cannot be performed. Therefore, in the feed screw type manual stage 100, so-called "rattling" due to this gap is an unavoidable technical element. However, when adjusting the position of precision equipment such as optical equipment using the feed screw type manual stage 100, it is a factor that the accuracy is lost because the position once set is slightly moved due to this "rattling". It may be necessary to avoid it.

(Manual stage with rattling suppression mechanism)
The rattling suppression mechanism 120 in the manual stage 1 with the rattling suppression mechanism will be described with reference to FIGS. 6 and 7. FIG. 6 shows the components of the rattling suppression mechanism 120. 6 (a) is a cross-sectional view of a component related to the rattling suppression mechanism 120, and FIG. 6 (b) is a cross-sectional view of FIG. 6 (a) as viewed from the EE direction, FIG. 6 (c). Is a cross-sectional view of FIG. 6A as viewed from the DD direction.

As shown in FIG. 6, the components of the rattling suppression mechanism 120 are provided on the sliding component 2, and are connected to a female screw cylinder 6 having a female screw 25 cut inside and a fixing component 3 and a male screw on the outside. The male screw rod 5 from which the 24 is cut is engaged. Then, in the feed screw type manual stage in which the sliding component 2 is slid by the rotation operation of the male screw rod 5, the convex portion 21 in which the female screw cylinder 6 is housed in the recess 20 provided in the sliding component 2 It is composed of a tubular portion main body 22 through which the male screw rod 5 penetrates, a slit portion 11 provided in the tubular portion main body 22, and a rattling suppression bolt 10 for adjusting the width of the slit portion 11. With this configuration, the rattling suppression bolt 10 penetrating the slit portion 11 can be rotated to change the shape of the female screw 25 to generate an axial pressure inside the female screw 25. Note that FIG. 6A shows the width of the slit portion 11 before tightening the rattling suppression bolt 10.

FIG. 7 shows a mechanism for suppressing rattling by the rattling suppressing mechanism 120. In the manual stage 1 with a rattling suppression mechanism, rattling suppression is performed by the rattling suppression bolt 10. FIG. 7A shows a state in which the rotation operation unit 4 is rotated in the rotation direction R1 by using a hexagon wrench 9 or the like, and the male screw rod 5 is rotated accordingly to move the sliding component 2 to a desired position. Shown. At this time, for example, a precision instrument (not shown) connected to the sliding component 2 is also moved in the M1 direction (sliding direction of the sliding component) in the drawing in the same manner as the sliding component 2 to a desired position. Is set to. An insertion hole for a hexagon wrench 9, for example, is provided at the end of the rotation operation unit 4. However, the means for moving the sliding component 2 and setting it at a desired position is not limited to this method, and other methods may be used.

As shown in FIG. 7A, the slit portion 11 of the female screw cylinder 6 is provided with a predetermined slit width (d). In the present embodiment, the slit width (d) of the slit portion 11 is in a constant state. However, the shape of the slit portion 11 is not limited to this, and the slit width (d) may be an inverted V shape, or the slit portion 11 may be an inverted U shape.

Next, the function of the component for suppressing rattling by the rattling suppressing mechanism 120 will be described in detail. The tubular portion main body 22 is engaged with a concave portion 21 provided in the sliding component 2 at the convex portion 21. As a result, the movement of the tubular portion main body 22 can be suppressed by operating the rattling suppression bolt 10. Further, the slit portion 11 is provided in a direction intersecting with the male screw rod 5. Further, the slit portion 11 has an open end 31 at one end and a slit end 32 at the other end. Here, with respect to the open end 31 and the slit end 32, a slit is provided in the tubular portion main body 22 of the female screw cylinder 6, but the open side of the slit is referred to as an open end 31, and the one connected to the tubular portion main body 22 is referred to. It is called the slit end 32. When the rattling suppression bolt 10 is rotated in the direction of R2 (clockwise) from a state where the slit width is constant, as shown in FIG. 7B, the slit width (d) on the open end 31 side of the slit portion 11 Decreases.

FIG. 7B shows a state in which the rattling suppression bolt 10 is rotated to change the shape of the female screw 25. Axial pressure is introduced into the female screw cylinder 6 by rotating the rattling suppression bolt 10 and changing the shape of the female screw 25. The rattling suppression bolt 10 is provided in the tubular portion main body 22 in the vicinity of the open end 31 side of the slit portion 11. When the rattling suppression bolt 10 is rotated, the tubular portion main body 22 changes the slit width (d) of the open end 31 of the slit portion 11 while including a rotation operation centered on the slit end 32. In this way, by rotating the rattling suppression bolt 10 and shrinking the slit spacing of the open end 31 of the slit portion 11, the shape of the female screw 25 provided on the tubular portion main body 22 can be changed. Note that, in FIG. 7B, the state in which the rattling suppression bolt 10 is rotated to change the shape of the female screw 25 is a delicate curve, so the description is omitted and represented by a straight line.

FIG. 7 (c) shows the meshing state of the male screw 24 of the male screw rod 5 and the female screw 25 of the female screw cylinder 6 in the state of FIG. 7 (b). Due to the rotation of the rattling suppression bolt 10, the meshing state of the male screw 24 and the female screw 25 changes with the position of the slit portion 11 as a boundary. That is, in one meshing portion 26a, one side of the screw thread is in close contact and the other side is separated. In the other meshing portion 26b, one side of the screw thread is separated and the other side is in close contact with each other. By changing the shape of the female screw 25 in this way, axial pressure is introduced inside the female screw cylinder 6, and rattling when sliding the sliding component 2 with respect to the fixed component 3 is suppressed.

In the present invention, the rattling suppression bolt 10 is rotated clockwise to contract the slit width (d) of the slit portion 11 so that the shape of the female screw 25 is changed to that of FIG. 7C to generate axial pressure. Can be done. On the other hand, by rotating the rattling suppression bolt 10 counterclockwise, the contracted slit width (d) of the slit portion 11 can be restored and the "rattling amount" can be controlled. With this configuration, it is possible to suppress "rattling" that occurs in the drive mechanism 110 in which the male screw 24 and the female screw 25 are engaged with each other. Further, this "rattling amount" can be controlled by the rotation amount of the rattling suppression bolt 10.

(Rattling suppression mechanism by sliding adjustment screw)
FIG. 15 shows a means for fixing the sliding component 2 by using the sliding fixing screw 132 in the conventional rack and pinion type manual stage 130. Further, a means for adjusting the sliding of the sliding component 2 by using the sliding adjusting screw 118 is shown. FIG. 15A is a plan view of the sliding fixing screw 132 as viewed from above. 15 (b) is a cross-sectional view taken along the line FF of FIG. 15 (a), showing a cross section of the sliding fixing screw 132. 15 (c) is a cross-sectional view taken along the line GG of FIG. 15 (a), showing a cross section of the sliding adjusting screw 118. Here, an inverted triangular protrusion 138 and a groove 134 are provided on both sides or one side of the wall portion 136 of the fixing component 3, and the sliding fixing screw 132 is passed through the sliding fixing screw hole 131 to form the protruding portion 138. The sliding component 2 is pressed against the sliding component 2 to fix the position of the sliding component 2 with respect to the fixed component 3. Further, a plurality of sliding adjusting screw 118s are passed through the sliding adjusting screw holes 119, and the tip portion 133 thereof is abutted against the protruding portion 138 to press the sliding component 2. As described above, the sliding fixing screw 132 has a role of fixing the sliding component 2 to the fixing component 3, whereas the sliding adjusting screw 118 rattles and slides to the fixing component 3 of the sliding component 2. It plays a role in adjusting the smoothness of movement.

The sliding adjustment screw 118 in the conventional rack and pinion type manual stage 130 is applied as the rattling suppression screw 27 via the axial pressure distribution plate 28 in the manual stage 1 with the rattling suppression mechanism shown in FIG. That is, as shown in FIG. 3, an inverted triangular protruding portion 38 and a groove portion 34 are provided on the wall portions 36 on both sides of the fixed component 3, and the rattling suppressing screw 27 is penetrated and abutted against the protruding portion 38 to be a sliding component. 2 is pressed down to adjust the degree of sliding of the sliding component 2 with respect to the fixed component 3. The plurality of rattling suppression screws 27 suppress "rattling" between the fixing component 3 and the sliding component 2.

In this way, the rattling suppression screw 27, which conventionally suppresses the lateral rattling of the dovetail groove of the dovetail groove stage, is fixed in a tightening region beyond the smoothly sliding region, thereby causing the male screw 24 and the female screw. The rattling with 25 is suppressed in advance.

As shown in FIG. 4, the axial pressure distribution plate 28 made of a hard material such as stainless steel provided around the hole of the rattling suppression screw hole 30 is sandwiched and abutted against the protrusion 38 of the manual stage 1 with the rattling suppression mechanism. The sliding component 2 is pushed to suppress "rattling" between the fixed component 3 and the sliding component 2.

Further, when the sliding component 2 is moved and aligned, the axial pressure is introduced into the protruding portion 38 of the manual stage 1 with the rattling suppressing mechanism by sandwiching the axial pressure distribution plate 28 made of a hard material such as stainless steel. As a result, the axial pressure can be appropriately dispersed, and the labor of moving the sliding component 2 is reduced, so that the sliding component 2 can be slid smoothly.

8 to 13 show an embodiment of another drive mechanism 200 for fixing the female screw cylinder 6 to the sliding component 2 in the manual stage 1 with a rattling suppression mechanism. This is an embodiment in which improvements have been made to the drive mechanisms shown in FIGS. 1, 2, 4, 5, 5, 6 and 7. In the embodiment shown in FIGS. 1, 2, 4, 5, 6, and 7, one protruding portion 23 provided on the female screw cylinder 6 is provided with a convex portion 21 provided on the sliding component 2. It is inserted into and locked to the sliding component 2. According to this detail, the female screw cylinder 6 behaves as if it is floating (floating) without being fixed to the sliding part 2, so that there is a “pry” between the female screw cylinder 6 and the sliding part 2. It has the characteristic that it does not occur. On the other hand, since the female screw cylinder 6 is locked to the sliding component 2 at one place, there is a problem that the female screw cylinder 6 rotates. In addition, there is a problem that backlash causes backlash when adjusting the position by the manual stage. In the other drive mechanism 200, this point is improved, the rotation of the female screw cylinder 6 is suppressed by the two fixing screws 210, and the female screw cylinder 6 is slid by the fixing screw 210 inserted in the fixing screw hole 220. It was screwed into 2 to completely stop the backlash.

FIG. 8 is a perspective view showing a schematic configuration of another drive mechanism 200 of the manual stage 1 with a rattling suppression mechanism. Further, FIG. 9 shows another drive mechanism 200 shown in FIG. 8 in an A'-A' perspective view. Further, FIG. 10 shows the other drive mechanism 200 shown in FIG. 8 in a perspective plan view from the upper surface. FIG. 11 shows a cross-sectional view and a cross-sectional view of another drive mechanism 200 for fixing the female screw cylinder 6 to the sliding component 2 in the feed screw type manual stage. Further, FIG. 12 shows an enlarged configuration of another drive mechanism 200 in a detailed cross-sectional view. Further, FIG. 13 shows an explanatory diagram of a rattling suppression mechanism by another drive mechanism 200.

The configuration, shape, size, and arrangement of the manual stage 1 with the rattling suppression mechanism described in the above embodiments are only schematically shown to the extent that the present invention can be understood and implemented. Therefore, the present invention is not limited to the described embodiments, and can be changed to various forms as long as it does not deviate from the scope of the technical idea shown in the claims.

1 Manual stage with rattling suppression mechanism, 2 Sliding parts, 3 Fixing parts, 4 Rotating operation part, 5 Male screw rod, 6 Female screw cylinder, 7 Bearing plate, 8 Engagement part, 9 Hexagon wrench, 10 Rattling suppression bolt, 11 Slit, 12 Notch, 13 Nut, 14 Washer, 15 Precision Equipment Mounting Hole, 16 Base Fixing Hole, 17 Bearing Plate Fixing Bolt, 20 Concave, 21 Convex, 22 Cylindrical Body, 23 Protrusion, 24 (Male) Male screw (of screw rod), 25 female screw (of female screw cylinder), 26a, 26b (male screw and female screw) meshing part, 27 rattling suppression screw, 28 axial pressure distribution plate, 29 end plate, 30 rattling Suppressing screw holes, 31 open ends, 32 slit ends, 33,133 tips, 34,134 grooves, 35 end plate fixing bolts, 36,136 walls, 38,138 protrusions, 100 (conventional) feed screw type Manual stage, 110 drive mechanism, 118 sliding adjustment screw, 119 sliding adjustment screw hole, 120 rattling suppression mechanism, 130 (conventional) rack and pinion type manual stage, 131 sliding fixing screw hole, 132 sliding fixing screw, 138, 140 double nut, 142 lower nut, 144 upper nut, 146 bolt, 148 nut screw upper surface, 150 nut screw lower surface, 200 other drive mechanism, 210 fixing screw, 220 fixing screw hole, F axial pressure, f tightening force, d slit Width, M (for sliding parts) sliding direction, R1 (with hexagon wrench) rotation direction, R2 (for rattling suppression screw) rotation direction.

In the state of FIG. 16A, the bolt surface and the nut surface are in close contact with each other on the nut screw upper surface 148 to generate a tightening force (f). On the other hand, on the lower surface 150 of the nut screw, a gap is generated between the bolt surface and the nut surface. In the state of FIG. 16 (b), the engagement between the bolt 146 and the upper nut 144 is such that the bolt surface and the nut surface are in close contact with each other on the nut screw upper surface 148 as shown in FIG. 16 (a). Occurs. On the other hand, the bolt 146 and the lower nut 142 are separated from each other and the tightening force (f) becomes zero. In the state of FIG. 16C, regarding the engagement between the bolt 146 and the lower nut 142, the bolt surface and the nut surface are in close contact with each other on the nut screw lower surface 150, and a tightening force (f) is generated. On the other hand, on the upper surface of the nut screw 148, a gap is generated between the bolt surface and the nut surface. That is, as shown in FIG. 16C, a tightening force is generated in the direction opposite to the meshing of the bolt 146 and the upper nut 144. The tightening forces in these opposite directions prevent the nut from loosening.

In order to achieve the above object, the manual stage with a rattling suppression mechanism according to the present invention is provided on a sliding part, and is connected to a female screw cylinder with a female screw on the inside and a fixing part, and a male screw on the outside. In a feed screw type manual stage in which a cut male screw rod is engaged and a sliding component is slid by a rotation operation of the male screw rod, the female screw cylinder is housed in a recess provided in the sliding component. From the convex portion, the tubular portion main body through which the male screw rod penetrates, the slit portion provided in the tubular portion main body having an open end and the slit end, and the rattling suppression bolt for adjusting the width of the open end of the slit portion. Do Ri, rotating the looseness suppression bolt, the cylindrical body, the width of the open end of the slit portion is changed while containing a rotation operation with the rotation center of the slit end, engagement between the male screw and the female screw, The feature is that the left and right sides of the male screw rod are opposite to each other with the position of the slit as a boundary .

As shown in FIG. 1, for example, a precision instrument such as a camera is attached to a precision instrument mounting hole 15 provided in the sliding component 2. Further, as shown in FIG. 2, the fixing component 3 is fixed to a base fixing hole 16 provided in, for example, a base. The sliding component 2 and the fixing component 3 are both installed so that their back surfaces face each other. Then, a female screw cylinder 6 provided on the sliding component 2 and having a female screw 25 (see FIG. 5 (a)) cut inside and a male screw 24 (FIG. 5 (a)) connected to the fixing component 3 on the outside. ) Is engaged with the cut male screw rod 5 to connect the sliding component 2 and the fixing component 3. Further, a rotation operation unit 4 is connected to the end of the male screw rod 5 via a bearing plate 7. In the rotation operation unit 4, the male screw rod 5 can be rotated by a hexagon wrench 9 or the like. The bearing plate 7 is fixed more to the fixed part 3 to the bearing plate fixing bolt 1 7 as shown in FIG. Then, the bearing plate 7 supports and fixes the male screw rod 5 with the nut 13 and the washer 14. Further, an end plate 29 is provided in the direction opposite to the bearing plate 7, and is fixed to the fixing component 3 by the end plate fixing bolt 35. Further, a part of the sliding component 2 is provided with a notch 12 in order to facilitate tightening of the male screw rod 5. Preload is applied to the front and rear of the bearing plate 7 by a male screw rod 5 and a nut 13 via a washer 14. This preload is for preventing the rattling of the male screw rod 5 and the rotation operation unit 4 in the axial direction and the rattling of the bearing plate 7 in the surface direction.

1 Manual stage with rattling suppression mechanism, 2 Sliding parts, 3 Fixing parts, 4 Rotating operation part, 5 Male screw rod, 6 Female screw cylinder, 7 Bearing plate, 8 Engagement part, 9 Hexagon wrench, 10 Rattling suppression bolt, 11 Slit, 12 Notch, 13 Nut, 14 Washer, 15 Precision Equipment Mounting Hole, 16 Base Fixing Hole, 17 Bearing Plate Fixing Bolt, 20 Concave, 21 Convex, 22 Cylindrical Body, 23 Protrusion, 24 (Male) Male screw (of screw rod), 25 female screw (of female screw cylinder), 26a, 26b (male screw and female screw) meshing part, 27 rattling suppression screw, 28 axial pressure distribution plate, 29 end plate, 30 rattling Suppressing screw holes, 31 open ends, 32 slit ends, 33,133 tips, 34,134 grooves, 35 end plate fixing bolts, 36,136 walls, 38,138 protrusions, 100 (conventional) feed screw type Manual stage, 110 drive mechanism, 118 sliding adjustment screw, 119 sliding adjustment screw hole, 120 rattling suppression mechanism, 130 (conventional) rack and pinion type manual stage, 131 sliding fixing screw hole, 132 sliding fixing screw , 1 40 double nut, 142 lower nut, 144 upper nut, 146 bolt, 148 nut screw upper surface, 150 nut screw lower surface, 200 other drive mechanism, 210 fixing screw, 220 fixing screw hole, F axial pressure, f tightening force, d slit width , M 1 (sliding parts) sliding direction, R1 (with hexagon wrench) rotation direction, R2 (rattling suppression screw) rotation direction.

Claims (7)

A female screw cylinder provided on a sliding part and having a female screw on the inside and a male screw rod connected to a fixing part and having a male screw on the outside are engaged to rotate the male screw rod. In a feed screw type manual stage that slides the sliding parts
The female screw cylinder has a convex portion housed in a concave portion provided in the sliding component and a convex portion.
The main body of the cylinder through which the male screw rod penetrates,
The slit portion provided in the tubular portion main body and
A rattling suppression bolt that adjusts the width of the slit portion,
A manual stage with a rattling suppression mechanism that is characterized by consisting of. The manual stage with a rattling suppression mechanism according to claim 1, wherein the tubular portion main body is engaged with the concave portion provided in the sliding component at the convex portion, and the slit portion is the male screw rod. One end is the open end of the slit portion, the other end is the slit end of the slit portion, and the rattling suppression bolt is the slit in the tubular portion main body. A manual stage with a rattling suppression mechanism, which is provided close to the open end side of the portion. The manual stage with a rattling suppression mechanism according to claim 1 or 2, wherein the axial pressure is introduced into the female screw cylinder by rotating the rattling suppression bolt and changing the shape of the female screw. Manual stage with rattling suppression mechanism. The manual stage with a rattling suppression mechanism according to any one of claims 1 to 3, wherein when the rattling suppression bolt is rotated, the tubular portion main body includes a rotation operation centered on the slit end. A manual stage with a rattling suppression mechanism that changes the slit spacing at the open end. The manual stage with a rattling suppression mechanism according to any one of claims 1 to 4, wherein the engagement of the male screw rod and the female screw cylinder screw in the cylinder body is the position of the slit due to the rotation of the rattling suppression bolt. A manual stage with a rattling suppression mechanism, which is characterized by the fact that the left and right sides are reversed at the boundary and tightening forces are generated in the opposite directions. The rattling suppression screw for suppressing lateral rattling of the dovetail groove of the dovetail groove stage, which is the manual stage with the rattling suppression mechanism according to any one of claims 1 to 5, exceeds the region where it slides smoothly. A manual stage with a rattling suppression mechanism, which is characterized by suppressing rattling between male and female screws in advance by fixing in the tightening area. The manual stage with a rattling suppression mechanism according to claim 6, wherein the sliding fixing screw is an axial pressure distribution plate made of a hard material such as stainless steel provided around a hole of the sliding fixing screw. A manual stage with a rattling suppression mechanism, characterized in that axial pressure is introduced into the protruding portion of the dovetail groove stage by sandwiching the stage.

Images