JP2020169737A - Gas-phase type heating apparatus - Google Patents

Abstract

To provide a gas-phase type heating apparatus that supplies vapor instantaneously into a vapor heating furnace utilizing pressure reduction in the vapor heating furnace, the pressure reduction being caused by heating a to-be-heated article.SOLUTION: A gas-phase type heating apparatus of this invention is provided with a space in a side part of the vapor heating furnace 101 where vapor is stored and a mechanism that varies a volume of the space where the vapor is stored so as to maintain a pressure in the furnace constant by making up for a pressure change due to vapor reduction when a vapor amount is reduced by heating a to-be-heated article 102, thereby vapor is instantaneously supplied to the vicinity of the to-be-heated article from the space where the vapor is stored, the space being provided in the side part of the vapor heating furnace.SELECTED DRAWING: Figure 2

Description

The present invention relates to a vapor phase heating device that heats an object to be heated by utilizing the latent heat of condensation of the vapor of the thermal transfer liquid.

In recent years, in various heat treatment devices in the assembly manufacturing process of various industrial products or home appliances, or in the device manufacturing process of various electronic parts, various batteries, or substrates on which electronic parts are mounted, which are constituent parts of those products. The shape of the object to be treated is complicated. For example, even in a substrate on which electronic components are mounted, not only a flat substrate but also an electronic component in which solder paste is applied to a portion of a three-dimensional substrate other than the horizontal plane and the electronic components are arranged on the solder paste. A heat treatment is performed to melt and join the solder paste in a state where the holding power is weak. In addition, the heat capacity of the object to be heated tends to increase due to the three-dimensional shape. Here, the various heat treatment devices are, for example, a drying furnace, a curing furnace, a reflowing furnace used for soldering in a mounting process of electronic components, and the like.

In these heating steps of the object to be heated, if there are variations in temperature rise at each location of the object to be heated due to non-uniform heating capacity, all parts are desired in order to obtain the desired time required for the heating step. It is necessary to keep the desired time from the state where the temperature has been raised to the above temperature. Further, in order to hold the portion where the temperature rise is slow for a desired time, the portion where the temperature rises quickly is exposed to more heat than necessary. Further, when the object to be heated has a particularly large thermal effect, there is a concern that the quality may be affected. Further, in the case of a heating process using heat transfer due to collision of hot air, when the heat capacity of the object to be heated is large, the collision rate of hot air with the object to be heated is increased in order to obtain a desired rate of temperature rise. The heat transfer coefficient can be increased. However, for example, when it is necessary to apply a solder paste to a portion of a three-dimensional substrate other than the horizontal plane and heat-treat the electronic components in a state where the holding force is weak, the solder is melted and then cooled. By colliding hot air at high speed before the solidification of the solder is completed, there is a high possibility that the components will peel off from the substrate.

Therefore, as a method of efficiently heating the object to be heated by avoiding peeling of parts due to collision of hot air even for a substrate having a large heat capacity and utilizing a high heat transfer coefficient, the latent heat of condensation contained in the vapor of the heat transfer liquid is used. A vapor phase heating device is known for heating (see, for example, Patent Document 1).

FIG. 7 is a schematic configuration diagram of Patent Document 1. The configuration disclosed in Patent Document 1 is as follows. The heating device 10 includes a carry-in inlet 8, a carry-out port 9, a conveyor 3, a heater 4, a temperature sensor 6, and a steam tank 1 provided with a power controller 11. The object to be heated 2 introduced from the carry-in inlet 8 is conveyed to the steam tank 1 by the conveyor 3, heated in the steam tank 1, then conveyed to the carry-out port 9 by the conveyor 3, and carried out of the heating device 10. Ru. A heat transfer liquid 5 having a large specific gravity to air is held at the bottom of the steam tank 1, and a heater 4 installed at the bottom of the steam tank 1 heats the heat transfer liquid 5 to generate steam 7. ing. A temperature sensor 6 is installed in the upper part of the steam tank 1, the steam 7 generated at the bottom of the steam tank 1 is pushed up, and the steam surface which is the interface between the steam 7 and the air is the tip 6a of the temperature sensor 6. When the height is reached, the tip 6a of the temperature sensor 6 detects the temperature of the steam 7, so that the output of the heater 4 is controlled by the power regulator 11 to raise the steam surface to the height of the tip 6a of the temperature sensor 6. It can be adjusted to maintain. The tip 6a of the temperature sensor 6 can move up and down in the height direction, and when the object to be heated 2 is not on the conveyor 3, the height of the tip 6a of the temperature sensor 6 is set low and the steam 7 Suppress the amount of When the object 2 to be heated is on the conveyor 3, the height of the tip 6a of the temperature sensor 6 is set high, the amount of steam in the steam tank 1 is increased, and the latent heat of condensation of the steam 7 causes the object 2 to be heated 2 to be heated. To heat.

Japanese Patent Application Laid-Open No. 5-111755

However, in the configuration of Patent Document 1, when the amount of steam in the steam tank decreases due to the heating of the object to be heated, the temperature sensor detects the decrease in the steam level and then the output of the heater is increased to generate the heat transfer liquid. It is configured to heat. Therefore, in order to supply steam to the vicinity of the object to be heated, it takes time for the steam of the thermal transfer liquid to rise from the bottom of the steam tank to the height at which the object to be heated is located, and the steam generated by heating the object to be heated. There is a problem that the process time becomes long because there is a time lag between the decrease in the amount of steam and the supply of steam to the vicinity of the object to be heated.

In view of these points, an object of the present invention is to provide a vapor-phase heating device that immediately supplies steam to the vicinity of the object to be heated when the amount of steam decreases due to heating of the object to be heated. ..

In order to achieve the above object, the gas phase heating device according to one aspect of the present invention is
It is a vapor phase heating device that heats the object to be heated by utilizing the latent heat of condensation of the vapor of the thermal transfer liquid.
A steam heating furnace that cuts off the internal space from the external space,
A steam supply unit that supplies the steam to the steam heating furnace,
A transport unit that transports the object to be heated between the heating position and the transport position in the steam heating furnace, and
In the steam heating furnace, a cooling unit provided above the upper end of the object to be heated at the heating position and
It has a steam heating furnace provided on a side portion of the steam heating furnace and a steam holding portion for storing the steam so as to be able to communicate with each other through a connection port.
The steam holding part is
The first space communicating with the steam heating furnace and
A second space that changes the volume of the first space by changing the volume of the internal space, and
It has a partition portion that separates the first space from the second space.
The height of the lower end of the connection port connecting the steam holding portion and the steam heating furnace is arranged above the lower end of the heated object at the heating position of the heated object, and is located at the upper end of the connecting port. The height is arranged below the cooling unit and above the upper end of the heated object at the heating position of the heated object.
When the space below the cooling portion in the steam heating furnace is filled with the steam, the volume of the second space is reduced by the movement of the partition portion, and the steam is filled in the first space. When the steam is taken in and the steam in the steam heating furnace is reduced, the volume of the second space is increased by the movement of the partition portion based on the pressure difference between the first space and the second space. Increases, and the steam taken into the first space is supplied into the steam heating furnace.

As described above, according to the vapor phase heating apparatus of the above aspect of the present invention, when the amount of steam in the steam heating furnace is reduced due to the heating of the object to be heated, the steam is immediately supplied to the vicinity of the object to be heated. It is possible to shorten the process time.

Schematic configuration diagram seen from the side of the gas phase heating device according to the embodiment of the present invention. Schematic configuration diagram seen from the front of the vapor phase heating apparatus according to the embodiment of the present invention. Schematic configuration diagram seen from the front of the vapor phase heating apparatus according to the embodiment of the present invention. Explanatory drawing of vapor-phase heating apparatus in embodiment of this invention Explanatory drawing of vapor-phase heating apparatus in embodiment of this invention Explanatory drawing of vapor-phase heating apparatus in embodiment of this invention Schematic configuration of a conventional gas phase heating device

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic configuration diagram viewed from the side of the gas phase heating device 100 according to the embodiment of the present invention.

The vapor phase heating device 100 is a device that heats the object to be heated 102 by utilizing the latent heat of condensation of the steam of the heat transfer liquid 106, and at least the steam heating furnace 101, the steam supply unit 107, and the transport unit 103B. , A cooling unit 110 and a steam holding unit 111.

In the steam heating furnace 101, the internal space 101a is cut off from the external space 90, the heat transfer liquid 106 is held at the bottom, and the object to be heated 102 is heated internally during the heat treatment.

The steam supply unit 107 is arranged at the bottom of the steam heating furnace 101 to heat the heat transfer liquid 106 and supply the steam 108 of the heat transfer liquid 106 into the steam heating furnace 101.

The transport unit 103B transports the object to be heated 102 between the transport position and the heating position in the steam heating furnace 101.

The cooling unit 110 is provided in the steam heating furnace 101, in other words, above the upper end of the object to be heated 102 at the heating position.

The steam holding portion 111 is provided on the side portion of the steam heating furnace 101, and stores the steam of the heat transfer liquid 106 so as to be able to communicate with the steam heating furnace 101 via the connection port 92.

More specifically, in the vapor phase heating device 100, the heating preparation chamber 104 and the upper part of the steam heating furnace 101 are connected to each other. The external space 90 and the heating preparation chamber 104 are separated by a first shutter 105A that can be opened and closed. Further, the heating preparation chamber 104 and the steam heating furnace 101 are separated by a second shutter 105B that can be opened and closed.

The first and second shutters 105A and 105B are in the closed state except when the object to be heated 102 is put into the vapor phase heating device 100. A pressure adjusting unit 117 composed of a pump, an release valve, etc. is connected to the heating preparation chamber 104, and the pressure in the heating preparation chamber 104 can be adjusted to an arbitrary value by the pressure adjusting unit 117. There is.

Pressure gauges 119A and 119B are installed in the heating preparation chamber 104 and the steam heating furnace 101, respectively, to measure the pressure in the heating preparation chamber 104 and the pressure in the steam heating furnace 101, respectively. A pressure control unit 118 that controls the pressure adjustment unit 117 is installed based on the measured values of the two pressure gauges 119A and 119B.

When the object to be heated 102 is put into the steam heating furnace 101, first, the first shutter 105A is opened, and the object to be heated 102 is carried onto the first transfer stage 103A in the heating preparation chamber 104. Next, after closing the first shutter 105A, the pressure in the heating preparation chamber 104 is adjusted to the same pressure as in the steam heating furnace 101 by the pressure adjusting unit 117. After that, the second shutter 105B is opened, the object to be heated 102 is conveyed onto the second transfer stage 103B at the transfer position in the steam heating furnace 101, and the second shutter 105B is closed. The second transfer stage 103B functions as an example of the transfer unit. The second transfer stage 103B can move up and down in the steam heating furnace 101 between the upper transfer position and the lower heating position in a state where the object to be heated 102 is placed. That is, the second transport stage 103B is in a space in which the object to be heated 102 is placed, below the cooling portion 110 in the steam heating furnace 101 and filled with steam 108, as will be described later. The object to be heated 102 can be lowered to the heating position of.

On the other hand, when the object to be heated 102 is taken out from the steam heating furnace 101, the pressure in the heating preparation chamber 104 is adjusted to the same pressure as in the steam heating furnace 101 by the pressure adjusting unit 117, and then the second shutter 105B is opened. The object to be heated 102 is transported from the second transport stage 103B at the transport position to the first transport stage 103A, and the second shutter 105B is closed. After that, the pressure adjusting unit 117 adjusts the pressure inside the heating preparation chamber 104 to a pressure equivalent to the atmospheric pressure of the external space 90, opens the first shutter 105A, and moves the object to be heated 102 to the external space outside the gas phase heating device. Take out to 90.

Further, as will be described in detail later, the steam heating furnace 101 includes a heater 107 and a cooling coil 110, and the heater 107 heats the heat transfer liquid 106 to generate steam 108. The cooling coil 110 functions as an example of the cooling unit. The heater 107 functions as an example of a steam supply unit.

2 and 3 are schematic configuration views of the gas phase heating device 100 according to the first embodiment of the present invention as viewed from the front. As shown in FIG. 2, a predetermined amount of the heat transfer liquid 106 is held at the bottom of the steam heating furnace 101 of the vapor phase heating device 100, and the heater 107 that heats the heat transfer liquid 106 to make steam 108. Is equipped. On the wall surface above the steam heating furnace 101, a cooling coil 110 for circulating cooling water in the piping is provided. When the steam 108 that evaporates at the bottom of the steam heating furnace 101 and rises in the internal space 101a of the steam heating furnace 101 reaches the height of the cooling coil 110, the steam 108 is cooled by the cooling coil 110, condensed, and heat-transferred. It returns to the liquid 106, travels along the wall surface in the steam heating furnace 101, and is supplied again to the heat transfer liquid 106 at the bottom. The cooling coil 110 sets the height of the steam surface 109, which is the interface between the steam 108 of the heat transfer liquid 106 and the air, to the height of the cooling coil 110 in the internal space 101a.

Further, on the side portion of the steam heating furnace 101, a steam holding portion 111 that communicates with the internal space 101a via the connection port 92 is installed at a position lower than the height of the cooling coil 110. The steam holding portion 111 is partitioned by a slidable partition portion 112 in the steam holding portion 111 so as to divide the internal space into upper and lower parts, and the first space (for example, the upper space in FIG. 2) 113 And a second space (for example, the lower space in FIG. 2) 114 are formed. The first space 113 in the steam holding portion 111 partitioned by the partition portion 112 is connected so as to communicate with the internal space 101a of the steam heating furnace 101. On the other hand, the second space 114 in the steam holding portion 111 partitioned by the partition portion 112 has a closed structure shielded from the external space 90, and the pressure in the second space 114 can be adjusted. It has an adjustment connection 116. The pressure adjusting connection portion 116 has a valve, and when adjusting the pressure in the second space 114, the valve is opened to allow the second space 114 and the external space 90 to communicate with each other, and the pressure of a pump or the like is adjusted. A regulator is connected to the pressure control connection 116 to adjust the second space 114 to the desired pressure. At other times, the valve of the pressure adjusting connection 116 is closed to shut off the second space 114 from the external space 90. The partition portion 112 can freely move up and down according to the pressure difference between the first space 113 and the second space 114. Therefore, the volume of the first space 113 is changed by changing the volume of the internal space of the second space 114. Further, the steam holding portion 111 has a fixing portion 115 that holds the partition portion 112 so as not to exceed a certain height.

In the initial state before the start of operation of the gas phase heating device 100, the pressure in the second space 114 slightly exceeds the downward force due to the gravity applied to the partition portion 112, and the partition portion 112 is the height of the fixed portion 115. The pressure is set to positive with respect to the atmospheric pressure to the extent that it is pushed up to the extent that it comes into contact with the fixed portion 115.

When the operation of the vapor phase heating device 100 is started, first, the heat transfer liquid 106 is heated by the heater 107 in the steam heating furnace 101, and the heat transfer liquid 106 evaporates to steam 108, and the steam heating furnace The space below the cooling coil 110 in 101 is filled. After a certain period of time, the space below the cooling coil 110 in the steam heating furnace 101 is filled with steam 108 having a boiling point temperature of the heat transfer liquid 106, and as described above, the steam surface 109 is cooled. It is maintained at the height of the coil 110.

At the same time, the steam 108 diffuses into the first space 113 in the steam holding portion 111 through the connection port 92, so that the first space 113 is also filled with the steam 108. In that state, the pressure between the steam heating furnace 101 and the inside of the first space 113 increases by the vapor pressure at the boiling point of the heat transfer liquid 106, so that the partition portion 112 in the steam holding portion 111 is the first. Pushed by the pressure of space 113, it moves downward. Since the volume of the second space 114 decreases due to the downward movement of the partition portion 112, the pressure of the second space 114 increases in inverse proportion to the decrease in the volume. As shown in FIG. 3, when the pressure in the second space 114 is balanced with the pressure in the steam heating furnace 101, the partition portion 112 is stopped, and the volume of the second space 114 in the first space 113 is reduced. The volume is increased by that amount, and the steam 108 for that volume is stored in the first space 113.

Next, FIGS. 4 and 5 are explanatory views when the object to be heated 102 introduced into the steam heating furnace 101 is heated by the steam 108. When the second transfer stage 103B on which the object to be heated 102 is placed is lowered to a space in the steam heating furnace 101 and below the cooling coil 110 and filled with steam 108, the steam 108 around the object to be heated 102 is generated. It condenses on the surface of the object to be heated 102, and the latent heat of condensation heats the object to be heated 102. Further, as the amount of steam decreases due to the condensation of the steam 108, the pressure around the object to be heated 102 decreases, so that a pressure distribution occurs in the steam heating furnace 101. Then, due to the pressure difference, the steam 108 existing above the object to be heated 102 is attracted in the direction approaching the object to be heated 102, and the height of the steam surface 109 is lowered. Further, as the condensation of the steam 108 in the steam heating furnace 101 progresses, the pressure in the entire steam heating furnace 101 decreases, so that the partition portion 112 in the steam holding portion 111 is pushed by the pressure in the second space 114. The partition 112 moves upward.

By moving the partition portion 112 upward, the steam 108 filling the first space 113 is supplied into the steam heating furnace 101 via the connection port 92. As for the movement of the partition portion 112, the temperature of the object to be heated 102 reaches the temperature of the steam 108, the condensation of the steam 108 is completed, the pressure in the steam heating furnace 101 becomes constant, or the partition portion 112 is moved to the fixed portion 115. Continue until you reach it. Then, while the partition portion 112 is moving upward, the supply of steam 108 from the first space 113 into the steam heating furnace 101 continues.

In this way, the steam stored in the first space 113 without requiring extra time by utilizing the pressure decrease in the steam heating furnace 101 due to the condensation of the steam 108 when the object to be heated 102 is heated. The 108 can be supplied into the steam heating furnace 101 by the amount of the decrease of the steam 108.

After the heating of the object to be heated 102 is completed, the second transfer stage 103B on which the object to be heated 102 is placed is raised to the height of the transfer position, and as described above, the gas phase type is passed through the heating preparation chamber 104. The object to be heated 102 is carried out of the heating device.

The lower end of the connection port 92 between the steam holding portion 111 and the steam heating furnace 101 is above the lower end of the heated object 102 at the heating position when the heated object 102 is heated, for example, the lower end of the heated object 102 during heating. It is placed at a height equal to or higher than the height of. Further, the upper end of the connection port 92 is below the cooling coil 110, for example, at a height equal to or lower than the height of the cooling coil 110 and above the upper end of the heated object 102 at the heating position when the heated object 102 is heated. Is placed in.

With such a configuration, when the space below the cooling coil 110 in the steam heating furnace 101 is filled with steam 108, the partition portion 112 based on the pressure difference between the first space 113 and the second space 114 Due to the movement of the second space 114, the volume of the second space 114 is reduced, and steam is taken into the first space 113. On the other hand, when the steam in the steam heating furnace 101 decreases, the volume of the second space 114 increases due to the movement of the partition portion 112 based on the pressure difference between the first space 113 and the second space 114. Then, the steam taken in and held in the first space 113 can be supplied into the steam heating furnace 101.

In order to carry out the desired heating of the object to be heated 102, the initial volume of the second space 114 is the type of the heat transfer liquid 106, the amount of steam required to heat the object to be heated 102, and the steam heating furnace 101. It is set from the volume inside.

As an example, a case where a fluorine-based thermal transfer liquid having a latent heat of vaporization of 62.7 J / g and a boiling point of 270 ° C. is used to heat an object to be heated 102 having a heat capacity of 30 J / K from 20 ° C. to 270 ° C. will be described below. .. Since the amount of heat required for the above heating is 7500 J, the required amount of steam is 120 g. Assuming that the vapor density of the fluorine-based thermal transfer liquid at 270 ° C. is 22 kg / m ³ , the volume of steam 108 required to heat the object to be heated 102 to 270 ° C. is 5.5 L. Here, 3.3 L, which is 60% of the volume of steam 108 required for desired heating, is covered by the initial steam 108 located above the height of the upper end of the object to be heated 102 at the heating position in the steam heating furnace 101. As a result, the remaining 40% of 2.2 L is stored in the first space 113. That is, when the volume of the second space 114 when the partition portion 112 is located at the height of the fixed portion 115 and the amount of steam required for desired heating of the steam 108 are stored in the first space 113. The difference from the volume of the second space 114 is 2.2 L. The initial volume of the second space 114 is V ₀ , the pressure is P ₀ , and the volume of the second space 114 when the steam 108 required for the desired heating is stored in the first space 113 is V ₁ , the pressure. When is P ₁ , P ₀ × (V ₀ / V ₁ ) = P ₁ and V ₀ −V ₁ = 2.2 L are established in order to satisfy the steam. Assuming that the initial pressure P ₀ of the second space 114 is set to a positive pressure of about several Pa with respect to the atmospheric pressure as described above, and is set to a positive pressure of 10 Pa, the atmospheric pressure in the standard state is set. When calculated as 1.013 × 10 ^ 5 Pa, the initial pressure P ₀ of the second space 114 is 1.014 × 10 ^ 5 Pa. Further, the pressure P ₁ of the second space 114 when the steam 108 required for desired heating is stored in the first space 113 is in equilibrium with the pressure in the steam heating furnace 101 at that time, and is steam. The pressure in the heating furnace 101 is about 2.026 × 10 ^ 5 Pa because the temperature in the steam heating furnace 101 has reached the boiling point temperature of the thermal transfer liquid 106 and the vapor pressure at the boiling point has increased. ing.

From the above, when the initial volume V ₀ of the second space 114 and the volume V ₁ of the second space 114 when the steam 108 required for desired heating is stored in the first space 113 are calculated, V _0. It may be set to about 4.4L and V ₁ = 2.2L.

According to the above embodiment, the steam holding portion 111 is provided as a space for storing steam on the side portion of the steam heating furnace 101, and when the steam amount is reduced by heating the object to be heated 102, the inside of the furnace is accompanied by the decrease in the steam amount. The steam holding unit 111 is provided as a mechanism for changing the volume of the steam holding unit 111, which is a space for storing steam, so as to keep the pressure change of the above constant. Therefore, when the amount of steam in the steam heating furnace 101 decreases due to the heating of the object to be heated 102, the steam 108 is transferred from the steam holding portion 111, which is a space for storing steam, installed on the side of the steam heating furnace 101. It can be immediately supplied to the vicinity of the object to be heated, and the process time can be shortened.

The present invention is not limited to the above embodiment, and can be implemented in various other aspects. For example, by installing two or more steam holding portions 111 as shown in FIG. 6, the volume per steam holding portion 111 may be divided by the number of steam holding portions 111 to be reduced.

In addition, by appropriately combining any embodiment or modification of the various embodiments or modifications, the effects of each can be achieved. Further, it is possible to combine the embodiments or the embodiments, or the embodiments and the embodiments, and also to combine the features in the different embodiments or the embodiments.

This is because the vapor phase heating device according to the above aspect of the present invention can immediately supply the steam in the steam holding portion to the vicinity of the object to be heated by using the pressure decrease in the vicinity of the object to be heated due to the decrease in the steam of the heat transfer liquid as a driving force. , The object to be heated can be heated to a desired temperature in a short time. Therefore, in the above aspect of the present invention, as a highly efficient heating device, various heat treatments such as a drying furnace, a firing furnace, a curing furnace, or a reflowing furnace are performed in the manufacturing process of industrial products or home appliances or the manufacturing process of various electronic parts. Applicable to heat treatment equipment.

1 Steam tank 2 Heated object 3 Conveyor 4 Heater 5 Heat transfer liquid 6 Temperature sensor 6a Tip of temperature sensor 7 Steam 8 Carry-in port 9 Carry-out port 10 Heating device 11 Power controller 90 External space 92 Connection port 100 Gas-phase heating device 101 Steam heating furnace 101a Internal space 102 Heated object 103A First transfer stage 103B Second transfer stage 104 Heating preparation chamber 105A First shutter 105B Second shutter 106 Heat transfer liquid 107 Heater 108 Steam 109 Steam surface 110 Cooling coil 111 Steam retention Part 112 Partition part 113 First space 114 Second space 115 Fixed part 116 Pressure adjustment connection part 117 Pressure adjustment part 118 Pressure control part 119A Pressure gauge 119B Pressure gauge

Claims (3)

It is a vapor phase heating device that heats the object to be heated by utilizing the latent heat of condensation of the vapor of the thermal transfer liquid.
A steam heating furnace that cuts off the internal space from the external space,
A steam supply unit that supplies the steam to the steam heating furnace,
A transport unit that transports the object to be heated between the heating position and the transport position in the steam heating furnace, and
In the steam heating furnace, a cooling unit provided above the upper end of the object to be heated at the heating position and
It has a steam heating furnace provided on a side portion of the steam heating furnace and a steam holding portion for storing the steam so as to be able to communicate with each other through a connection port.
The steam holding part is
The first space communicating with the steam heating furnace and
A second space that changes the volume of the first space by changing the volume of the internal space, and
It has a partition portion that separates the first space from the second space.
The height of the lower end of the connection port connecting the steam holding portion and the steam heating furnace is arranged above the lower end of the heated object at the heating position of the heated object, and is located at the upper end of the connection port. The height is arranged below the cooling unit and above the upper end of the heated object at the heating position of the heated object.
When the space below the cooling portion in the steam heating furnace is filled with the steam, the volume of the second space is reduced by the movement of the partition portion, and the steam is filled in the first space. When the steam is taken in and the steam in the steam heating furnace is reduced, the volume of the second space is increased by the movement of the partition portion based on the pressure difference between the first space and the second space. Is increased, and the steam taken into the first space is supplied to the steam heating furnace. The vapor phase heating device according to claim 1, further comprising two or more steam holding portions. The outside of the steam heating furnace is further provided with a heating preparation chamber which is arranged so as to be communicable with the steam heating furnace and can adjust the internal pressure between the pressure inside the steam heating furnace and the pressure outside the steam heating furnace. The object to be heated can be moved between the outside of the steam heating furnace and the heating preparation chamber through the heating preparation chamber at pressure, and through the heating preparation chamber at pressure inside the steam heating furnace. The vapor-phase heating device according to claim 1 or 2, wherein the object to be heated can be moved between the steam heating furnace and the heating preparation chamber.

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