JP2020162298A - Stator, motor, magnetic bearing unit, and vacuum pump - Google Patents

Abstract

To provide a stator that can ensure the degree of freedom of arrangement of two components arranged on both sides of the stator in the axial direction, and can locate these two components.SOLUTION: An insulator 34 of a stator 9 includes a first core covering part 41 stacked in a first direction X1 of an annular part 31 outside a cylindrical part 37 in a radial direction Y, and a second core covering part 42 stacked in a second direction X2. The first core covering part 41 and the second core covering part 42 respectively include a first to-be-abutted-part 43 and a second to-be-abutted-part 44 to which components can abut in an axial direction X. A first distance D1 between a center H of a stator core 33 in the axial direction X and the first to-be-abutted-part 43 is shorter than a second distance D2 between the center H of the stator core 33 in the axial direction X and the second to-be-abutted-part 44.SELECTED DRAWING: Figure 2

Description

The present invention relates to a stator. The present invention also relates to a motor and a vacuum pump in which a rotary blade is rotated by the motor. Further, the present invention relates to a magnetic bearing unit that supports a rotor.

A vacuum pump that rotates a rotary blade by a motor is described in Patent Document 1. The motors of the same document are arranged on the rotor to which the rotor blades are connected, the stator for rotating the rotor, the first magnetic bearing unit arranged on one side of the stator in the axial direction of the rotor, and the other side. A second magnetic bearing unit is provided. The first magnetic bearing unit includes a first electromagnet that supports the rotor in the radial direction in a non-contact manner by magnetic force, and a first sensor that is stacked in the axial direction of the first electromagnet and detects a radial displacement of the rotor. The second magnetic bearing unit includes a second electromagnet that supports the rotor in the radial direction in a non-contact manner by magnetic force, and a second sensor that is stacked in the axial direction of the second electromagnet and detects a radial displacement of the rotor. In the first magnetic bearing unit, the first sensor is stacked on one side of the first electromagnet in the axial direction. In the second magnetic bearing unit, the second sensor is superposed on the other side of the second electromagnet in the axial direction.

Japanese Unexamined Patent Publication No. 2018-145803

When assembling the motor, the first member (first magnetic bearing unit) located on one side of the stator and the stator are brought into contact with each other in the axial direction, and the second member (second magnetic bearing unit) located on the other side of the stator is brought into contact with each other. If the bearing unit) and the stator are brought into contact with each other in the axial direction, the position of the first member and the position of the second member in the axial direction can be defined with reference to the stator. However, in general, the stator of the motor has a shape symmetrical with respect to the virtual plane orthogonal to the axis. Therefore, when the first member and the stator are brought into contact with each other in the axial direction and the second member and the stator are brought into contact with each other in the axial direction, the distance from the center of the stator to the first member in the axial direction is obtained. The distance from the center of the stator to the second member is defined as a single distance, and there is a problem that the degree of freedom in arranging the first member and the second member is impaired.

In view of the above problems, an object of the present invention is to provide a stator capable of positioning members while ensuring a degree of freedom in arranging members arranged next to the stator in the axial direction. Another object of the present invention is to provide a motor and a vacuum pump including such a stator. Another object of the present invention is to provide a magnetic bearing unit that non-contactly supports a rotor of a motor.

In order to solve the above problems, the present invention comprises a stator core having an annular portion and a salient pole portion protruding inward from the annular portion, an insulator having a tubular portion through which the salient pole portion penetrates, and the tubular portion. In a stator having a coil wound around a portion, the direction along the axis of the annular portion is the axial direction, the direction orthogonal to the axial direction is the radial direction, one side of the axial direction is the first direction, and the other. When the side is the second direction, the insulator includes a core covering portion on the outside of the tubular portion in the radial direction, and the core covering portion is a first hit to which a member can abut from the axial direction. A contact portion and a second contacted portion are provided, and the first distance between the center of the stator core and the first contacted portion in the axial direction is the center of the stator core and the second contacted portion in the axial direction. It is characterized in that it is shorter than the second distance from the contact portion.

In the stator of the present invention, the insulator is provided with a first contacted portion and a second contacted portion having different distances from the center of the stator core. Therefore, if the member arranged next to the stator in the axial direction is brought into contact with the first contacted portion, the member can be positioned with the distance from the center of the stator to the member as the first distance. Further, if the member arranged next to the stator in the axial direction is brought into contact with the second contacted portion, the member can be positioned with the distance from the center of the stator to the member as the second distance. Therefore, according to the present invention, this member can be positioned while ensuring the degree of freedom in arranging the member arranged next to the stator in the axial direction.

In the present invention, the insulator is composed of a resin-made first insulator member and a second insulator member which are divided into two in the axial direction, and the first insulator member and the second insulator member are the same member. Can be assumed to be. If the insulator is divided into two insulator members, each insulator member can be easily molded by injection molding even if the shape of the insulator becomes complicated. Further, in this way, the number of parts does not increase even when the insulator is composed of two insulator members.

Next, the motor of the present invention includes the stator, a rotor arranged on the inner peripheral side of the stator, a first electromagnet that magnetically supports the rotor in the radial direction in a non-contact manner, and the first electromagnet. A first magnetic bearing unit including a first sensor that is stacked in the axial direction and detects a radial displacement of the rotor, a second electromagnet that magnetically supports the rotor in the radial direction in a non-contact manner, and It has a second magnetic bearing unit including a second sensor which is overlapped in the axial direction of the second electromagnet and detects the radial displacement of the rotor, and the first magnetic bearing unit is of the stator. An external member that is overlapped in the first direction and abuts on the first contacted portion or the second contacted portion of the core covering portion and is located in the second direction of the stator is the first contacted portion. It is a magnetic bearing unit, and the second magnetic bearing unit is overlapped in the second direction of the stator and abuts on the first contacted portion or the second contacted portion of the core covering portion. It is a feature.

In the motor of the present invention, the stator includes a first contacted portion and a second contacted portion having different distances from the center of the stator core. Therefore, if the first magnetic bearing unit is brought into contact with the first contacted portion and the second magnetic bearing unit is brought into contact with the second contacted portion, the distance from the center of the stator to the first magnetic bearing unit is first. One distance can be set, and the second distance can be set from the center of the stator to the second magnetic bearing unit. Further, if the first magnetic bearing unit is brought into contact with the second contacted portion and the second magnetic bearing unit is brought into contact with the first contacted portion, the distance from the center of the stator to the first magnetic bearing unit is first. Two distances can be set, and the first distance can be set from the center of the stator to the second magnetic bearing unit. Therefore, the first magnetic bearing unit and the second magnetic bearing unit can be positioned while ensuring the degree of freedom in the arrangement of the first magnetic bearing unit and the second magnetic bearing unit arranged on both sides of the stator in the axial direction.

Next, the vacuum pump of the present invention includes a motor including the above-mentioned stator and a rotor arranged on the inner peripheral side of the stator, a pump case, and fixed wings fixed inside the pump case. It is characterized by having a rotary blade attached to the rotor and rotating inside the pump case.

According to the vacuum pump of the present invention, in the motor, the degree of freedom in arranging the stator, the first magnetic bearing unit, and the second magnetic bearing unit stacked in the axial direction is ensured. Therefore, the degree of freedom in designing the vacuum pump is improved.

Further, the vacuum pump of the present invention includes the above motor, a pump case, fixed blades fixed inside the pump case, and rotary blades attached to the rotor of the motor and rotating inside the pump case. It is characterized by having.

According to the vacuum pump of the present invention, in the motor, the degree of freedom in arranging the stator, the first magnetic bearing unit, and the second magnetic bearing unit stacked in the axial direction is ensured. Therefore, the degree of freedom in designing the vacuum pump is improved.

Next, another embodiment of the present invention includes a stator core having an annular portion and a salient pole portion protruding inward from the annular portion, an insulator having a tubular portion through which the salient pole portion penetrates, and the tubular portion. In a stator having a wound coil, the direction along the axis of the annular portion is the axial direction, the direction orthogonal to the axial direction is the radial direction, one side of the axial direction is the first direction, and the other side is In the second direction, the insulator is a first core covering portion of the annular portion stacked in the first direction and a second core overlapped in the second direction on the outside of the tubular portion in the radial direction. A core covering portion is provided, and each of the first core covering portion and the second core covering portion includes the first contacted portion and the second contacted portion, and the center of the stator core in the axial direction. The first distance between the first contacted portion is shorter than the second distance between the center of the stator core and the second contacted portion in the axial direction, and the first contacted portion is shorter than the second distance. The second contacted portion is arranged side by side in the radial direction.

The stator of the present invention includes an insulator with a first core covering portion stacked in the first direction and a second core covering portion stacked in the second direction of the annular portion of the stator core. Further, each of the first core covering portion and the second core covering portion includes a first contacted portion and the second contacted portion having different distances from the center of the stator core. Therefore, for example, the first member arranged in the first direction of the stator is brought into contact with the first contacted portion of the first core covering portion, and the second member arranged in the second direction of the stator is brought into contact with the second core. When the cover portion is brought into contact with the second contacted portion, the distance from the center of the stator to the first member (first distance) and the distance from the center of the stator to the second member (second distance) can be determined. Can be different. Further, the first member arranged in the first direction of the stator is brought into contact with the first contacted portion of the first core covering portion, and the second member arranged in the second direction of the stator is brought into contact with the first contacted portion of the first core covering portion. The distance from the center of the stator to the first member and the distance from the center of the stator to the second member can be set to the same first distance by abutting the first contacted portion of the above. Further, the first member arranged in the first direction of the stator is brought into contact with the second contacted portion of the first core covering portion, and the second member arranged in the second direction of the stator is brought into contact with the second core covering portion. By contacting the second contacted portion of the above, the distance from the center of the stator to the first member and the distance from the center of the stator to the second member can be set to be the same second distance. Therefore, according to the present invention, these two members can be positioned while ensuring the degree of freedom in arranging the two members arranged on both sides of the stator in the axial direction.

In the present invention, the first contacted portion may be located inside the second contacted portion in the radial direction. In this way, when an external member arranged on one side or the other side in the axial direction of the stator is brought into contact with the second contacted portion, the external member interferes with the first contacted portion. It's easy to avoid that.

In the present invention, each of the first core covering portion and the second core covering portion extends in the axial direction outside the first wall portion extending in the axial direction and the first wall portion extending in the radial direction. With two wall portions, the thickness of the first wall portion in the radial direction is thicker than the thickness of the second wall portion in the radial direction, and the thickness of the first wall portion is higher than that of the annular portion. The end portion on the opposite side may be the first contacted portion, and the end portion of the second wall portion opposite to the annular portion may be the second contacted portion. .. By doing so, the width of the first contacted portion in the radial direction can be widened. Therefore, even if the first contacted portion is located on the inner peripheral side of the stator, it is easy to bring an external member into contact with the first contacted portion.

In the present invention, when the axial direction is the circumferential direction, the first dimension of the first wall portion in the circumferential direction is longer than the length dimension of the coil in the circumferential direction, and the first wall portion is , The end portion on the opposite side of the annular portion may be provided with a groove penetrating from the inner peripheral side to the outer peripheral side. If the first dimension of the first wall portion is longer than the length dimension of the coil in the circumferential direction, the coil can be protected from the outer peripheral side by the first wall portion. Further, if the first wall portion is provided with a groove, the coil wire of the coil wound around the cylinder portion can be pulled out to the outer peripheral side via the groove portion.

In the present invention, each of the first core covering portion and the second core covering portion extends in the radial direction along the annular portion to connect the first wall portion and the second wall portion. The coil wire drawn out from the coil is routed through the groove through the second groove defined by the first wall portion, the second wall portion, and the connecting portion. Can be. In this way, when the coil wire drawn from the coil is routed in the circumferential direction, it is not necessary to route the outside of the insulator. Therefore, disconnection of the coil wire can be prevented or suppressed. Further, when the coil wire drawn from the coil is routed in the circumferential direction, it is not necessary to route the outside of the insulator, so that it is possible to prevent the stator from becoming large in the radial direction.

In the present invention, the second wall portion includes a reinforcing portion at an end portion on the side of the connecting portion, which increases toward the side of the first wall portion as the thickness in the radial direction approaches the connecting portion. Can be. If such a reinforcing portion is provided, the second wall portion can be provided even when a load is applied to bend the tip portion of the second wall portion toward the outer peripheral side when the coil wire is routed in the second groove. It is possible to prevent or suppress breakage from a portion close to the connection portion.

In the present invention, the second dimension of the second wall portion in the circumferential direction can be shorter than the first dimension. A gap is provided between two insulators adjacent to each other in the circumferential direction between the second wall portion of one insulator and the second wall portion of the other insulator. Therefore, the coil wire or the like around the second groove can be pulled out from the lateral gap of the second wall portion to the outside of the stator.

In the present invention, the second wall portion may be provided with a notch portion penetrating in the radial direction. In this way, the coil wire or the like around which the second groove is routed can be pulled out from the notch portion provided in the second wall portion to the outside of the stator.

In the present invention, the insulator is composed of a resin-made first insulator member and a second insulator member which are divided into two in the axial direction, and the first insulator member and the second insulator member are the same member. Can be assumed to be. If the insulator is divided into two insulator members, each insulator member can be easily molded by injection molding even if the shape of the insulator becomes complicated. Further, in this way, the number of parts does not increase even when the insulator is composed of two insulator members.

Another form of the motor of the present invention includes the stator, a rotor arranged on the inner peripheral side of the stator, a first electromagnet that magnetically supports the rotor in the radial direction without contact, and the first electromagnet. A first magnetic bearing unit including a first sensor that is stacked in the axial direction of the electromagnet and detects the radial displacement of the rotor, and a second electromagnet that non-contactly supports the rotor in the radial direction by magnetic force. And a second magnetic bearing unit including a second sensor which is overlapped in the axial direction of the second electromagnet and detects the radial displacement of the rotor, and the first magnetic bearing unit is the stator. An external member that is overlapped in the first direction and abuts on the first contacted portion or the second contacted portion of the first core covering portion and is located in the second direction of the stator. The first magnetic bearing unit, and the second magnetic bearing unit is overlapped in the second direction of the stator and is the first contacted portion or the second contacted portion of the second core covering portion. Contact.

In the motor of the present invention, the stator includes a first contacted portion and a second contacted portion having different distances from the center of the stator core. Therefore, for example, the first magnetic bearing unit located in the first direction of the stator is brought into contact with the first contacted portion of the first core covering portion, and the second magnetic bearing unit located in the second direction of the stator is second. If the two core covering portions are brought into contact with the second contacted portion, the distance from the center of the stator to the first magnetic bearing unit and the distance from the center of the stator to the second magnetic bearing unit will be different. be able to. Further, if the first magnetic bearing unit is brought into contact with the second contacted portion of the first core covering portion and the second magnetic bearing unit is brought into contact with the first contacted portion of the second core covering portion, The distance from the center of the stator to the first magnetic bearing unit and the distance from the center of the stator to the second magnetic bearing unit can be different. Further, if the first magnetic bearing unit is brought into contact with the first contacted portion of the first core covering portion and the second magnetic bearing unit is brought into contact with the first contacted portion of the second core covering portion, The distance from the center of the stator to the first magnetic bearing unit and the distance from the center of the stator to the second magnetic bearing unit can be the same first distance. Further, if the first magnetic bearing unit is brought into contact with the second contacted portion of the first core covering portion and the second magnetic bearing unit is brought into contact with the second contacted portion of the second core covering portion, The distance from the center of the stator to the first magnetic bearing unit and the distance from the center of the stator to the second magnetic bearing unit can be the same second distance. Therefore, the first magnetic bearing unit and the second magnetic bearing unit can be positioned while ensuring the degree of freedom in the arrangement of the first magnetic bearing unit and the second magnetic bearing unit arranged on both sides of the stator in the axial direction.

In the present invention, the first sensor is stacked in the first direction of the first electromagnet, and the first electromagnet abuts on the first contacted portion of the first core covering portion of the stator. Can be.

In the present invention, the first electromagnet includes an electromagnet core having a core annular portion arranged so as to surround the axis and a core salient pole portion protruding inward from the core annular portion, an electromagnet insulator, and the electromagnet insulator. The electromagnet coil includes an electromagnet coil wound around the core salient pole portion via the above, and the electromagnet insulator includes an insulator cylinder portion through which the core salient pole portion penetrates and an inner end of the insulator cylinder portion in the radial direction. The electromagnet coil includes an inner flange portion protruding from the inner flange portion and an outer flange portion projecting from the outer end of the insulator cylinder portion in the radial direction, and the electromagnet coil is formed between the inner flange portion and the outer flange portion. The end portion of the outer flange portion in the second direction, which is wound around the insulator cylinder portion, can be brought into contact with the first contacted portion from the axial direction. That is, the outer flange portion of the electromagnet insulator of the first electromagnet can be brought into contact with the first contacted portion provided on the insulator of the stator.

In the present invention, the stator, the first magnetic bearing unit, and the resin sealing member for sealing the second magnetic bearing unit are provided on the outer peripheral side of the rotor when the axial direction is the circumferential direction. The first wall portion has an arc shape when viewed from the axial direction, and the outer flange portion extends linearly in the circumferential direction when viewed from the axial direction, and the outer flange portion extends linearly in the circumferential direction. It can be assumed that the thickness in the radial direction is thinner than the thickness of the first wall portion, and a part of the circumferential direction protrudes from the first wall portion toward the outer peripheral side. In this way, a gap is likely to be formed between the stator and the first electromagnet. Therefore, it is easy to infiltrate the resin into these gaps to provide the resin sealing member.

In the present invention, the first sensor is attached to a sensor core having a sensor core annular portion arranged so as to surround the axis, a sensor core salient portion protruding inward from the sensor core annular portion, and the sensor core salient pole portion. The electromagnet insulator has a coil bobbin and a sensor coil wound around the sensor core salient pole portion via the coil bobbin, and the electromagnet insulator is located on the outer peripheral side of the insulator cylinder portion on the outer peripheral side of the sensor core annular portion in the second direction. It is desirable to provide an abutting portion that abuts from In this way, the first center can be positioned in the axial direction with respect to the first electromagnet by the contact between the contact portion of the electromagnet insulator and the sensor core. Here, the electromagnet insulator is in contact with the first contacted portion of the stator. Therefore, if the electromagnet insulator and the sensor core are brought into contact with each other, the distance from the center of the stator to the first sensor can be accurately defined.

In the present invention, the sensor core is provided with a sensor core notch on the outer peripheral edge of the sensor core annular portion, and the contact portion is a contact surface that abuts on the sensor core annular portion and the first direction from the contact surface. It may be provided with a protruding portion protruding into the sensor core notch and inserted into the sensor core notch. In this way, the position of the sensor around the axis can be defined by inserting the protruding portion into the notch.

In the present invention, the second sensor is superposed in the first direction of the second electromagnet, and the second sensor abuts on the second contacted portion of the second core covering portion of the stator. Can be.

Next, the vacuum pump of the present invention includes a motor including the above-mentioned stator and a rotor arranged on the inner peripheral side of the stator, a pump case, and fixed wings fixed inside the pump case. It is characterized by having a rotary blade attached to the rotor and rotating inside the pump case.

According to the vacuum pump of the present invention, in the motor, the degree of freedom in arranging the stator, the first magnetic bearing unit, and the second magnetic bearing unit stacked in the axial direction is ensured. Therefore, the degree of freedom in designing the vacuum pump is improved.

Further, the vacuum pump of the present invention includes the above motor, a pump case, fixed blades fixed inside the pump case, and rotary blades attached to the rotor of the motor and rotating inside the pump case. It is characterized by having.

According to the vacuum pump of the present invention, in the motor, the degree of freedom in arranging the stator, the first magnetic bearing unit, and the second magnetic bearing unit stacked in the axial direction is ensured. Therefore, the degree of freedom in designing the vacuum pump is improved.

Next, in the magnetic bearing unit that rotatably supports the rotor, the present invention has an axial direction along the rotation center axis of the rotor, a radial direction along the rotation center axis, and one side of the axis direction. Is the first direction, and the other side is the second direction. An electromagnet that non-contactly supports the rotor in the radial direction by magnetic force and an electromagnet that is overlapped in the first direction of the electromagnet and the radial direction of the rotor The electromagnet has a core annular portion arranged around the rotation center axis and a core salient pole portion protruding inward from the core annular portion. The sensor includes an electromagnet insulator and an electromagnet coil wound around the core salient pole via the electromagnet insulator, and the sensor is a sensor core annular portion and a sensor core annular portion arranged so as to surround the rotation center axis. It has a sensor core having a sensor core salient pole projecting from the inner peripheral side, a coil bobbin attached to the sensor core salient pole portion, and a sensor coil wound around the sensor core salient pole portion via the coil bobbin. The electromagnet insulator has an insulator cylinder portion through which the core salient pole portion penetrates, an inner flange portion protruding from the inner end of the insulator cylinder portion in the radial direction, and an outer side of the insulator cylinder portion in the radial direction. It is characterized by having an outer flange portion protruding from an end and a contact portion that abuts on the sensor core annular portion on the outer peripheral side of the insulator cylinder portion from the second direction.

According to the magnetic bearing unit of the present invention, the electromagnet insulator of the electromagnet is provided with a contact portion that abuts on the sensor core of the sensor from the axial direction. Therefore, by stacking the sensors in the axial direction of the electromagnet, the position of the sensor in the axial direction can be defined with reference to the electromagnet.

In the present invention, the sensor core is provided with a sensor core notch on the outer peripheral edge of the sensor core annular portion, and the contact portion is a contact surface that abuts on the sensor core annular portion and the first direction from the contact surface. It may be provided with a protruding portion protruding into the sensor core notch and inserted into the sensor core notch. In this way, the position of the sensor around the axis can be defined by inserting the protruding portion into the notch on the core side.

Next, the vacuum pump of the present invention has the above-mentioned magnetic bearing unit and a rotor to which a rotary blade is attached, and the rotor is rotatably supported by the magnetic bearing unit. To do.

According to the present invention, this member can be positioned while ensuring the degree of freedom in arranging the member arranged next to the stator in the axial direction.

According to the magnetic bearing unit of the present invention, the positioning of the sensor with respect to the electromagnet is easy.

It is sectional drawing of the vacuum pump to which this invention was applied. It is a side view of the stator unit. It is a perspective view of a stator. It is a top view of the stator. It is a perspective view of an insulator. It is a top view of an insulator. It is a partially enlarged view of an insulator. It is a perspective view of the 1st magnetic bearing unit. It is a perspective view of the 1st sensor. It is a perspective view of the 1st electromagnet. It is a perspective view of the electromagnet insulator. It is a perspective view of the 2nd magnetic bearing unit. It is explanatory drawing of the contact state between a stator and a 1st magnetic bearing unit. It is a side view of the stator unit of the modification 1. It is a side view of the stator unit of the modification 2. It is explanatory drawing of the stator unit of the modification 3.

Hereinafter, embodiments of a stator, a magnetic bearing unit, a motor, and a vacuum pump to which the present invention is applied will be described with reference to the drawings. FIG. 1 is a cross-sectional view of a vacuum pump to which the present invention is applied. FIG. 2 is a side view of the stator unit. In the following description, the direction along the axis L of the stator and the motor is the axial direction X, one side of the axial direction X is the first direction X1, and the other side is the second direction X2. Further, the direction orthogonal to the axis LX is the radial direction Y, and the direction around the axis L is the circumferential direction. The axis L is the rotation center axis of the rotor. Further, the first direction X1 is the output side of the motor, and the second direction X2 is the opposite output side of the motor.

(Vacuum pump)
As shown in FIG. 1, the vacuum pump 1 includes a pump case 2, a fixed blade 3 and a rotary blade 4 arranged in the pump case 2, and a motor 7 for rotating the rotary blade 4.

The motor 7 includes an annular stator 9 and a rotor 10 arranged at the center of the stator 9 in the radial direction Y. Further, the motor 7 includes a first magnetic bearing unit 11 and a second magnetic bearing unit 12 that non-contactly support the rotor 10 in the radial direction Y, and a third magnetic bearing unit that non-contactly supports the rotor 10 in the axial direction X. 13 and.

The stator 9, the first magnetic bearing unit 11, and the second magnetic bearing unit 12 constitute the stator unit 8. As shown in FIG. 2, the stator unit 8 has a tubular shape as a whole, and surrounds the rotor 10 from the outer peripheral side. In the stator unit 8, the first magnetic bearing unit 11, the stator 9, and the second magnetic bearing unit 12 are arranged in this order in the axial direction X. Therefore, the stator 9 surrounds the central portion of the rotor 10 in the axial direction X from the outer peripheral side. The first magnetic bearing unit 11 surrounds the rotor 10 from the outer peripheral side in the first direction X1 of the stator 9. The second magnetic bearing unit 12 surrounds the rotor 10 from the outer peripheral side in the second direction X2 of the stator 9.

As shown in FIG. 1, the third magnetic bearing unit 13 is located on the side of the rotor 10 in the second direction X2. The third magnetic bearing unit 13 includes an axial sensor 15 that detects the position of the rotor 10 in the axial direction X, and two sets of electromagnets 16 that support the rotor 10 in a floating state in the axial direction X. The two sets of electromagnets 16 are arranged with a metal plate 17 fixed to the end of the rotor 10 in the second direction X2 sandwiched in the axial direction X. The two sets of electromagnets 16 are excited based on the output of the axial sensor 15 and attract the metal plate 17 to the first direction X1 and the second direction X2. That is, the output of the axial sensor 15 is transmitted to a control device (not shown). The control device energizes the two sets of electromagnets 16 based on the position of the rotor 10 in the axial direction X. As a result, the third magnetic bearing unit 13 adjusts the position of the rotor 10 in the axial direction X.

Further, the motor 7 includes a stator column 19 for accommodating the stator unit 8 and a resin sealing member 20 for sealing the stator unit 8 in the stator column 19. The stator column 19 has a tubular shape, and the stator unit 8 is fixed to the inner peripheral surface of the stator column 19. The resin sealing member 20 is located on the outer peripheral side of the rotor 10. When sealing with the resin sealing member 20, after arranging a tubular member having a shape corresponding to the arrangement space of the rotor 10 in the stator column 19, between the stator unit 8 and the stator column 19. Is filled with resin.

The rotor 10 extends in the axial direction X. The rotor 10 includes an output shaft 23 projecting from the stator column 19 in the first direction X1. The rotary blade 4 is fixed to the output shaft 23 (rotor 10) via the rotor flange 24.

The pump case 2 includes an annular base 26 fixed to the stator column 19 from the second direction X2. The third magnetic bearing unit 13 is located inside the center hole 26a of the base 26. Further, the pump case 2 includes a tubular case 27 fixed to the base 26. The tubular case 27 extends in the first direction X1 from the outer peripheral edge portion of the base 26. The tubular case 27 surrounds the stator column 19 from the outer peripheral side. A fixed wing 3 is fixed to the inner peripheral surface of the tubular case 27. The rotary blade 4 and the fixed blade 3 are alternately arranged along the axial direction X.

An intake port 28 is formed at the end of the tubular case 27 in the first direction X1. An exhaust port forming portion 29 is attached between the tubular case 27 and the base 26. The pump case 2 communicates with an auxiliary pump (not shown) via an exhaust port 30 penetrating the exhaust port forming portion 29.

The vacuum pump 1 rotates the rotary blade 4 by the motor 7, transfers the gas sucked from the intake port 28 in the second direction X2, and discharges the gas from the exhaust port 30.

(Stator)
FIG. 3 is a perspective view of the stator 9 when viewed from the first direction X1. FIG. 4 is a plan view of the stator 9 when viewed from the first direction X1. FIG. 5 is a perspective view of the insulator. FIG. 5A is a case where the insulator is viewed from the inner peripheral side, FIG. 5B is a case where the insulator is viewed from the circumferential direction, and FIG. 5C is a case where the insulator is viewed from the outer peripheral side. If. FIG. 6 is a plan view of the insulator as viewed from the first direction X1. FIG. 7 is a partially enlarged view of the insulator.

As shown in FIGS. 3 and 4, the stator 9 includes a stator core 33 having a salient pole portion 31 and a salient pole portion 32 projecting from the annular portion 31 to the inner peripheral side, and an insulator 34 attached to each salient pole portion 32. , A coil 35 wound around each salient pole 32 via an insulator 34. The stator core 33 is a laminated core in which a plate-shaped base material is laminated in the axial direction X. In this example, the number of salient poles 32 is 6. Therefore, six insulators 34 are attached to the stator core 33. Further, six coils 35 are wound around the stator core 33 via six insulators 34. Here, the number of magnetic poles of a magnet (not shown) provided on the outer peripheral surface of the rotor 10 is 4. The number of coils 35 and the number of magnetic poles of magnets provided in the rotor 10 are not limited to the above numbers, and may be other numbers.

Each insulator 34 is made of resin. As shown in FIG. 5, each insulator 34 includes a tubular portion 37 through which the salient pole portion 32 penetrates. Further, each insulator 34 includes an inner flange portion 38 projecting from the inner end of the tubular portion 37 in the radial direction Y. The inner flange portion 38 extends in the axial direction X and the circumferential direction. As shown in FIGS. 4 and 6, the shape of the inner flange portion 38 when viewed from the axis direction X is an arc shape centered on the axis L. Further, each insulator 34 includes an outer flange portion 39 projecting from the outer end of the tubular portion 37 in the radial direction Y. As shown in FIG. 5, the outer flange portion 39 extends in the axial direction X and the circumferential direction. The shape of the outer flange portion 39 when viewed from the axial direction X is an arc shape centered on the axis L. As shown in FIGS. 3 and 4, the six insulators 34 are arranged in an annular shape with the salient pole portion 32 inserted into the tubular portion 37. Insulators 34 adjacent to each other in the circumferential direction come into contact with each other in the circumferential direction.

As shown in FIG. 3, the outer flange portion 39 includes a first core covering portion 41 and an annular portion 31 which are overlapped with the first direction X1 of the annular portion 31 of the stator core 33 on the outer side in the radial direction Y of the tubular portion 37. A second core covering portion 42 is provided which is overlapped with the second direction X2 of the above. Each of the first core covering portion 41 and the second core covering portion 42 includes a first contacted portion 43 and a second contacted portion 44 to which members can abut from the axial direction X. The first contacted portion 43 is located inside the second contacted portion 44 in the radial direction Y. As shown in FIG. 2, the first distance D1 between the center H of the stator core 33 and the first contacted portion 43 in the axial direction X is the center H of the stator core 33 and the second contacted portion 43 in the axial direction X. It is shorter than the second distance D2 between 44. The center H of the stator core 33 is the center of the stator 9 in the axial direction X.

More specifically, as shown in FIG. 5, each of the first core covering portion 41 and the second core covering portion 42 has a first wall portion 47 extending in the axial direction X and a radial direction of the first wall portion 47, respectively. A second wall portion 48 extending in the axial direction X outside Y, and a connecting portion 49 extending radially Y along the annular portion 31 of the stator core 33 to connect the first wall portion 47 and the second wall portion 48. , Equipped with.

As shown in FIG. 6, the shape of the first wall portion 47 when viewed from the axial direction X is an arc shape curved in the circumferential direction along the annular portion 31. The first dimension E1 of the first wall portion 47 in the circumferential direction is longer than the length dimension C1 (see FIG. 4) of the coil 35 in the circumferential direction. The first thickness F1 of the first wall portion 47 in the radial direction Y is thicker than the second thickness F2 of the second wall portion 48 in the radial direction Y. The height of the first wall portion 47 in the axial direction X is shorter than the height of the second wall portion 48 in the axial direction X. The first wall portions 47 of the insulators 34 adjacent to each other in the circumferential direction are in contact with each other.

The first end surface 47a (the end of the first wall portion 47 opposite to the annular portion 31) in the axial direction X of the first wall portion 47 is the first contacted portion 43. The first end surface 47a is provided with two grooves 51 penetrating from the inner peripheral side to the outer peripheral side. Each groove 51 extends linearly. One of the two grooves 51 is deeper in the axial direction X than the other groove 51. Each groove 51 is located outside the radial direction Y of the winding start position and the winding end position of the coil 35 wire wound around the body.

The shape of the second wall portion 48 when viewed from the axial direction X is an arc shape. The second wall portion 48 extends on the outer peripheral side of the first wall portion 47 in the circumferential direction along the annular portion 31. As shown in FIG. 6, the second dimension E2 of the second wall portion 48 in the circumferential direction is shorter than the first dimension E1 of the first wall portion 47 in the circumferential direction. Therefore, as shown in FIGS. 3 and 4, the second wall portions 48 of the two insulators 34 adjacent to each other in the circumferential direction are not in contact with each other, and one second wall portion 48 and the other second wall portion 48 are not in contact with each other. A gap 50 is formed between the two.

The second end surface (the end opposite to the annular portion 31) of the second wall portion 48 in the axial direction X is the second contacted portion 44. The second wall portion 48 is provided with two grooves 52 penetrating from the inner peripheral side to the outer peripheral side on the second end surface. Each groove 52 extends linearly. Each groove 52 is located on an extension line of each groove 51 of the first wall portion 47. One of the two grooves 52 is deeper in the axial direction X than the other groove 52. Here, as shown in FIGS. 5B, 6 and 7, the second wall portion 48 has a thickness close to the connecting portion 49 in the radial direction Y at the end portion on the side of the connecting portion 49. A reinforcing portion 53 that increases along with the first wall portion 47 is provided. Further, as shown in FIG. 5C, the second wall portion 48 is provided with a notch portion 54 penetrating in the radial direction Y at an intermediate position in the circumferential direction.

The connecting portion 49 connects the central portion of the first wall portion 47 in the circumferential direction and the central portion of the second wall portion 48 in the circumferential direction. Therefore, between the first wall portion 47 and the second wall portion 48, openings penetrating in the axial direction X are provided on both sides of the connecting portion 49 in the circumferential direction.

Here, as shown in FIGS. 5A and 5B, the first core covering portion 41 and the second core covering portion 42 are connected to the first wall portion 47 and the second wall portion 48, respectively. The wiring routing groove 55 (second groove) is partitioned by the portion 49. As shown in FIG. 6, the planar shape of the wiring routing groove 55 when viewed from the axial direction X is an arc shape that curves along the annular portion 31. As illustrated in FIG. 4, the coil wire 35a drawn from the coil 35 to the outer peripheral side through the groove 51 of the first wall portion 47 is routed in the wiring routing groove 55 in the circumferential direction.

As shown in FIG. 5, the insulator 34 includes a first insulator member 57 and a second insulator member 58 which are divided into two in the axial direction X. The first insulator member 57 and the second insulator member 58 are the same member. That is, if the first insulator member 57 is inverted in the axial direction X, it can be used as the second insulator member 58. Further, if the second insulator member 58 is inverted in the axial direction X, it can be used as the first insulator member 57.

Here, as shown in FIG. 4, the coil wire 35a around the wiring routing groove 55 is drawn out of the stator 9 from the lateral gap 50 of the second wall portion 48 in the circumferential direction. Alternatively, the coil wire 35a is drawn out of the stator 9 from the notch portion 54 provided in the second wall portion 48. Alternatively, the coil wire 35a is drawn out of the stator 9 from the groove 52 provided in the second wall portion 48. The coil wire 35a is connected to the control device via a lead wire. The coil wire 35a may be connected to a lead wire in the wiring routing groove 55 and may be pulled out to the outside of the stator 9.

The control device rotates the rotor 10 around the axis L by supplying power to each coil 35 via the lead wire.

(1st magnetic bearing unit and 2nd magnetic bearing unit)
FIG. 8 is a perspective view of the first magnetic bearing unit 11 as viewed from the first direction X1. FIG. 9 is a perspective view of the first sensor constituting the first magnetic bearing unit 11 when viewed from the first direction X1. FIG. 10 is a perspective view of the first electromagnet constituting the first magnetic bearing unit 11. FIG. 10A shows a case where the first electromagnet is viewed from the first direction X1, and FIG. 10B shows a case where the first electromagnet is viewed from the second direction X2. FIG. 11 is a perspective view of the electromagnet insulator. FIG. 12 is a perspective view of the second magnetic bearing unit 12 when viewed from the first direction X1.

As shown in FIG. 8, the first magnetic bearing unit 11 includes a first sensor 61 that detects a radial displacement of the rotor 10 and a first electromagnet 62 that non-contactly supports the rotor 10 in the radial direction Y by magnetic force. And. The first sensor 61 is superposed on the first direction X1 of the first electromagnet 62. The first electromagnet 62 is excited based on the output from the first sensor 61.

As shown in FIG. 9, the first sensor 61 includes a sensor core 66 having a sensor core annular portion 64 and a sensor core salient pole portion 65 projecting inward from the sensor core annular portion 64, and a sensor substrate 67. The sensor core salient poles 65 are provided at angular positions separated from each other by 90 ° in the circumferential direction. Therefore, there are four sensor core salient poles 65.

The sensor core annular portion 64 includes eight core-side notches 68 (sensor core notches) on the outer peripheral edge. The eight core-side notches 68 include four sets of two core-side notches 68 that sandwich each sensor core salient pole 65 from both sides in the circumferential direction. Each core-side notch 68 penetrates in the axial direction X.

Each sensor core salient pole portion 65 includes a pair of bifurcated portions 70 branched in the circumferential direction at an end portion on the inner peripheral side. A coil bobbin 71 is attached to each branch portion 70. Further, a sensor coil 72 is wound around each branch portion 70 via a coil bobbin 71. Therefore, the first sensor 61 includes eight sensor coils 72.

Here, the eight sensor coils 72 include four coil sets 73 (1) to (4) of a pair of sensor coils 72 wound around each branch portion 70 of one sensor core salient pole portion 65. The four coil sets 73 (1) to (4) are arranged around the axis L at an angular interval of 90 °. Of the four coil sets 73 (1) to (4), one of the two coil sets 73 (1) and 73 (3) arranged at an angular interval of 180 ° faces each other, and the other two coils. The pair 73 (2) and 73 (4) are orthogonal to each other in the opposite direction. Here, the first sensor 61 detects the position of the rotor 10 based on the current flowing through the sensor coil 72. The first sensor 61 is a displacement sensor that detects the displacement of the rotor 10 in the radial direction Y.

The sensor substrate 67 is annular. The sensor board is arranged on the side where the first electromagnet 62 is located with respect to the sensor core 66 and the sensor coil 72, and is fixed to the coil bobbin 71. The sensor substrate 67 is provided with eight substrate-side notches 75 on the outer peripheral edge. The eight substrate-side notches 75 overlap each of the core-side notches 68 when viewed from the axial direction X. Therefore, the eight substrate-side notches 75 include four sets of two substrate-side notches 75 that sandwich each sensor core salient pole 65 from both sides in the circumferential direction when viewed from the axial direction X. The reason will be described later, but the width of the substrate-side notch 75 in the circumferential direction is wider than the width of the core-side notch 68 in the circumferential direction.

As shown in FIG. 10, the first electromagnet 62 includes an electromagnet core 83 having a core annular portion 81 and a core salient pole 82 protruding inward from the core annular portion 81, and an electromagnet attached to the core salient pole 82. An insulator 84 and an electromagnet coil 85 wound around a core salient pole 82 via an electromagnet insulator 84 are provided. In this example, the electromagnet core 83 includes eight core salient poles 82 arranged at equal intervals. Therefore, the first electromagnet 62 includes eight electromagnet insulators 84 and eight electromagnet coils 85.

As shown in FIG. 11, each electromagnet insulator 84 includes an insulator cylinder portion 87 through which the core salient pole portion 82 penetrates. Further, each electromagnet insulator 84 includes an insulator inner flange portion 88 projecting from the inner end of the insulator cylinder portion 87 in the radial direction Y. The insulator inner flange portion 88 extends in the axial direction X and the circumferential direction. The shape of the insulator inner flange portion 88 when viewed from the axial direction X is linear. Further, each electromagnet insulator 84 includes an insulator outer flange portion 89 projecting from the outer end of the insulator cylinder portion 87 in the radial direction Y. The insulator outer flange portion 89 extends in the axial direction X and the circumferential direction. The shape of the insulator outer flange portion 89 when viewed from the axial direction X is linear. The thickness of the insulator outer flange portion 89 in the radial direction Y is thinner than that of the first wall portion 47 of the insulator 34 of the stator 9.

The electromagnet insulator 84 includes a sensor support portion 91 that overlaps the first direction X1 of the core annular portion 81 of the electromagnet core 83 outside the radial direction Y of the insulator cylinder portion 87. The sensor support portion 91 has an extension portion 92 extending from the insulator outer flange portion 89 along the end surface of the core annular portion 81 in the first direction X1 and a first direction from the outer end portion in the radial direction Y of the extension portion 92. A wall portion 93 (contact portion) extending to X1 is provided. The wall portion 93 includes a thick portion 94 from the extending portion 92 toward the first direction X1, and a thin portion 95 having a thickness in the radial direction Y thinner than that of the thick portion 94. The outer surface of the wall portion 93 in the radial direction Y is a flat surface, and the thick portion 94 projects from the thin portion 95 toward the inner peripheral side. A step portion 96 having an end face 96a facing the first direction X1 is provided between the thick portion 94 and the thin portion 95. Further, the thin-walled portion 95 includes a first width portion 97 and a second width portion 98 from the thick-walled portion 94 toward the first direction X1. The width of the first width portion 97 in the circumferential direction is the same as the width of the thick portion 94 in the circumferential direction. The width of the second width portion 98 in the circumferential direction is narrower than that of the first width portion 97 and the thick portion 94. The second width portion 98 extends in the first direction X1 from one end portion in the circumferential direction of the first width portion 97.

The thin-walled portion 95 includes a substrate support groove 99 and a core support groove 100 at one end edge in the circumferential direction. The substrate support groove 99 is provided in the first width portion 97. The substrate support groove 99 extends to the other side in the circumferential direction along the end surface 96a of the step portion 96. The substrate support groove 99 includes a pair of facing inner wall surfaces 99a and 99b facing each other in the axial direction X, and a connecting inner wall surface 99c connecting the other ends of the pair of facing inner wall surfaces 99a and 99b in the circumferential direction. The width dimension of the substrate support groove 99 in the axial direction X, that is, the distance between the pair of opposing inner wall surfaces 99a and 99b corresponds to the thickness dimension of the sensor substrate 67 of the first sensor 61. The connection inner wall surface 99c extends in the axial direction X. The connection inner wall surface 99c faces one side in the circumferential direction.

The core support groove 100 is located in the first direction X1 of the substrate support groove 99. The core support groove 100 is provided in the second width portion 98 (protruding portion). The core support groove 100 includes a pair of facing inner wall surfaces 100a and 100b facing each other in the axial direction X, and a connecting inner wall surface 100c connecting the other ends of the pair of facing inner wall surfaces 100a and 100b in the circumferential direction. The width dimension of the core support groove 100 in the axial direction X, that is, the distance between the pair of facing inner wall surfaces 100a and 100b corresponds to the thickness dimension of the sensor core 66 of the first sensor 61. The connection inner wall surface 100c extends in the axial direction X. The connection inner wall surface 100c faces one side in the circumferential direction.

As shown in FIG. 10, each electromagnet coil 85 is wound around the outer peripheral side of the insulator cylinder portion 87 between the insulator inner flange portion 88 and the insulator outer flange portion 89. The eight electromagnet coils 85 wound around the core salient pole 82 via the electromagnet insulator 84 include four coil sets 86 (1) to (4) of two electromagnet coils 85 adjacent to each other in the circumferential direction. In the coil sets 86 (1) to (4), the two electromagnet coils 85 adjacent to each other in the circumferential direction have winding winding directions opposite to each other, and magnetic poles having different polarities are paired. The four coil sets 86 (1) to (4) are arranged around the axis L at an angular interval of 90 °. Of the four coil sets 86 (1) to (4), one of the two coil sets 86 (1) and 86 (3) arranged at an angular interval of 180 ° faces each other, and the other two. The coil sets 86 (2) and 86 (4) are orthogonal to each other in the opposite direction.

Next, the first sensor 61 is supported by the electromagnet insulator 84 of the first electromagnet 62.

More specifically, as shown in FIG. 8, the wall portion 93 of each sensor support portion 91 of the electromagnet insulator 84 has notches 75 on each substrate side of the sensor substrate 67 from the second direction X2 and each core of the sensor core 66. It is inserted into the side notch portion 68. Then, by rotating the sensor substrate 67 and the first electromagnet 62 in opposite directions around the axis L, the opening edge portion of each substrate side notch portion 75 in the sensor substrate 67 supports each sensor from one side in the circumferential direction. It is inserted into the substrate support groove 99 of the portion 91, and the sensor substrate 67 is supported at predetermined positions in the axial direction X and the circumferential direction. Further, by rotating the sensor core 66 and the first electromagnet 62 in opposite directions around the axis L, the opening edge portion of each core side notch portion 68 in the sensor core 66 is formed from one side in the circumferential direction to each sensor support portion 91. The sensor core 66 is inserted into the core support groove 100 of the above, and is supported at predetermined positions in the axial direction X and the circumferential direction. The reason why the width of the notch portion 75 on the substrate side in the circumferential direction is wider than the width of the notch portion 68 on the core side in the circumferential direction is that it is necessary as a niger when inserting the sensor support portion 91. This is because the circumferential dimensions are different.

As a result, the sensor substrate 67 faces the first direction X1 on the side of the second direction X2 of the pair of opposing inner wall surfaces 99a and 99b of the end surface 96a of the step portion 96 of the sensor support portion 91 and the substrate support groove 99. It is supported by the inner wall surface 99b. That is, the facing inner wall surface 99b of the substrate support groove 99 facing the first direction X1 serves as a substrate contact portion that abuts on the sensor substrate 67 from the second direction X2 to support the sensor substrate 67. Further, the sensor core 66 is supported by the facing inner wall surface 99b facing the first direction X1 on the side of the second direction X2 of the pair of facing inner wall surfaces 99a and 99b of the core support groove 100. That is, the facing inner wall surface 100b of the core support groove 100 facing the first direction X1 serves as a contact portion (contact surface) that contacts the sensor core 66 from the second direction X2 and supports the sensor core 66. Therefore, the first sensor 61 is supported by the first electromagnet 62 in a state of being positioned in the axial direction X by the electromagnet insulator 84.

Further, when the opening edge portion of each substrate side notch portion 75 in the sensor substrate 67 is inserted into the substrate support groove 99, it is located on the other side of the two substrate side notch portions 75 constituting the set in the circumferential direction. In the substrate-side notch portion 75, the opening edge portion of the substrate-side notch portion 75 comes into contact with the connection inner wall surface 99c of the substrate support groove 99. Further, when the opening edge portion of each core side notch portion 68 in the core annular portion 81 is inserted into the core support groove 100, in each core side notch portion 68, the opening edge portion of the core side notch portion 68 is inserted. Abuts on the connection inner wall surface 100c of the core support groove 100. As a result, the first sensor 61 is supported by the first electromagnet 62 in a state of being positioned in the circumferential direction by the electromagnet insulator 84. When the state in which the first sensor 61 is positioned in the circumferential direction is viewed from the axial direction X, each of the four coil sets 73 (1) to (4) of the first sensor 61 is the first electromagnet. It overlaps with each of the four coil sets 86 (1) to (4) of 62.

The distance between the pair of facing inner wall surfaces 99a and 99b corresponds to the thickness dimension of the sensor substrate 67 of the first sensor 61, but it is larger than the thickness of the sensor substrate 67 in consideration of variations in component dimensions and the like. It may be set to be large, or a stepped structure having only the facing inner wall surface 99b instead of the groove shape may be used. Further, an adhesive may be used for fixing.

Further, the distance between the pair of facing inner wall surfaces 100a and 100b is assumed to correspond to the thickness dimension of the sensor core 66 of the first sensor 61, but is set larger than the thickness of the sensor core 66 in consideration of variations in component dimensions and the like. It may be left as it is, or a stepped structure having only the facing inner wall surface 100b instead of the groove shape may be used. Further, an adhesive may be used for fixing.

The output of the first sensor 61 is transmitted to a control device (not shown) in the same manner as the output of the axial sensor 15. The control device energizes each electromagnet coil 85 based on the output of the first sensor 61, and adjusts the position of the rotor 10 in the radial direction Y at the position of the first electromagnet 62. That is, of the four coil sets 86 (1) to (4) of the first electromagnet 62, one of the two coil sets 86 (1) and 86 (3) arranged at an angle interval of 180 ° is each electromagnet coil. By controlling the energization of the 85, the position of the rotor 10 in the opposite direction of the two coil sets 86 (1) and 86 (3) is adjusted. Further, by controlling the energization of the other two coil sets 86 (2) and 86 (4) to the electromagnet coils 85, the rotor in the opposite direction of the two coil sets 86 (2) and 86 (4). Adjust the position of 10.

As shown in FIG. 12, the second magnetic bearing unit 12 includes a second sensor 101 that detects a radial displacement of the rotor 10 and a second electromagnet 102 that non-contactly supports the rotor 10 in the radial direction Y by magnetic force. And. The second sensor 101 is superposed on the first direction X1 of the first electromagnet 62. The second electromagnet 102 is excited based on the output from the second sensor 101. Here, the second magnetic bearing unit 12 has the same configuration as the first magnetic bearing unit 11 except that the size of the second electromagnet 102 in the axial direction X is shorter than that of the first electromagnet 62. Therefore, the description of the second magnetic bearing unit 12 will be omitted.

Here, the rotor 10 is supported in the radial direction Y by the first magnetic bearing unit 11 and the second magnetic bearing unit 12 in the first direction X1 and the second direction X2 of the stator 9 in a non-contact manner. The control device drives the first electromagnet 62 by the output from the first sensor 61. Similarly, the output from the second sensor 101 drives the second electromagnet 102. As a result, the control device controls the position of the rotor 10 in the direction orthogonal to the axial direction X to adjust the inclination of the rotor 10.

(Stator unit)
As shown in FIG. 2, the first magnetic bearing unit 11 is superposed on the first direction X1 of the stator 9 and abuts on the first contacted portion 43 of the stator 9. More specifically, in the first magnetic bearing unit 11, the insulator outer flange portion 89 of the electromagnet insulator 84 of the first electromagnet 62 is axially directed to the first wall portion 47 of the first core covering portion 41 of the insulator 34 of the stator 9. Contact from X. Therefore, the distance from the center H of the stator 9 (center H of the stator core 33) to the first magnetic bearing unit 11 in the axial direction X is the first distance D1.

On the other hand, as shown in FIG. 2, the second magnetic bearing unit 12 is overlapped with the second direction X2 of the stator 9 and comes into contact with the second contacted portion 44 of the stator 9. That is, as shown in FIG. 12, in the second magnetic bearing unit 12, the outer peripheral edge portion of the sensor core 66 of the second sensor 101 is in the axial direction with respect to the second wall portion 48 of the second core covering portion 42 of the insulator 34 of the stator 9. Contact from X. Therefore, the distance from the center H of the stator 9 (center H of the stator core 33) to the second magnetic bearing unit 12 in the axial direction X is the second distance D2.

FIG. 13 is an explanatory view of a contact state between the stator 9 and the first magnetic bearing unit 11. As shown in FIG. 13, the first wall portion 47 of the insulator 34 of the stator 9 has an arc shape when viewed from the axial direction X. On the other hand, the insulator outer flange portion 89 of the first electromagnet 62 that abuts on the first end surface 47a (first contacted portion 43) of the first wall portion 47 extends linearly when viewed from the axial direction X. Further, the insulator outer flange portion 89 is thinner than the first wall portion 47 and comes into contact with the outer peripheral end portion of the first end surface 47a of the first wall portion 47. Further, a part of the insulator outer flange portion 89 in the circumferential direction projects from the first wall portion 47 toward the outer peripheral side.

Here, the insulator outer flange portion 89 comes into contact with the outer peripheral end portion of the first end surface 47a of the first wall portion 47. Therefore, due to the load from the first electromagnet 62, a moment in the direction of bending the first wall portion 47 toward the outer peripheral side is generated in the first wall portion 47. With respect to such a moment, the first wall portion 47 is provided thicker in the radial direction Y than the second wall portion 48. Therefore, even when such a moment is generated, the first wall portion 47 is not distorted and the insulator 34 is not damaged.

Further, the insulator outer flange portion 89 of the first electromagnet 62 and the first wall portion 47 of the stator 9 that abut in the axial direction X are different in shape and thickness when viewed from the axial direction X, and the insulator outer flange portion is different. A part of the portion 89 in the circumferential direction protrudes from the first wall portion 47 toward the outer periphery. As a result, a gap is formed between the stator 9 and the first electromagnet 62. Therefore, it is possible to infiltrate the resin between the first magnetic bearing unit 11 and the stator 9 to provide the resin sealing member 20. It's easy.

(Action effect)
The stator 9 of this example includes an insulator 34 with a first contacted portion 43 and a second contacted portion 44 having different distances from the center H of the stator core 33. Therefore, the first magnetic bearing unit 11 arranged in the first direction X1 of the stator 9 is brought into contact with the first contacted portion 43, and the second magnetic bearing unit 12 arranged in the second direction X2 of the stator 9 is brought into contact with the first contacted portion 43. The distance from the center H of the stator 9 to the first magnetic bearing unit 11 (first distance D1) and the distance from the center H of the stator 9 to the second magnetic bearing unit 12 by abutting against the second contacted portion 44. Distance (second distance D2) can be different.

Further, in this example, the first contacted portion 43 having a short distance from the center H of the stator core 33 to the first contacted portion 43 is located inside the second contacted portion 44 in the radial direction Y. Therefore, when the second magnetic bearing unit 12 is brought into contact with the second contacted portion 44 from the axial direction X, the second magnetic bearing unit 12 and the first contacted portion 43 do not interfere with each other.

Further, in this example, the first thickness F1 of the first wall portion 47 in the radial direction Y is thicker than the second thickness F2 of the second wall portion 48 in the radial direction Y. Therefore, the width of the first contacted portion 43 (the first end surface 47a of the first wall portion 47) can be widened in the radial direction Y. Therefore, even if the first contacted portion 43 is located on the inner peripheral side of the stator 9, it is easy to bring an external member into contact with the first contacted portion 43.

Further, the first dimension E1 of the first wall portion 47 in the circumferential direction is longer than the length dimension C1 of the coil 35 in the circumferential direction. Therefore, the coil 35 can be protected from the outer peripheral side by the first wall portion 47. Further, the first wall portion 47 is provided with a groove 51 penetrating from the inner peripheral side to the outer peripheral side at the end portion on the side opposite to the annular portion 31. Therefore, the coil wire 35a of the coil 35 wound around the tubular portion 37 of the insulator 34 can be pulled out to the outer peripheral side through the groove 51 portion.

Further, in this example, each of the first core covering portion 41 and the second core covering portion 42 includes a wiring routing groove 55 partitioned by the first wall portion 47, the second wall portion 48, and the connecting portion 49. Further, the coil wire 35a drawn from the coil 35 is routed around the wiring routing groove 55 via the groove 51 of the first wall portion 47. Therefore, when the coil wire 35a drawn from the coil 35 is routed in the circumferential direction, it is not necessary to route the outside of the insulator 34. Therefore, the disconnection of the coil wire 35a can be prevented or suppressed. Further, when the coil wire 35a drawn from the coil 35 is routed in the circumferential direction, it is not necessary to route the outside of the insulator 34, so that the stator 9 can be prevented from becoming large in the radial direction Y.

Further, in this example, the second wall portion 48 is provided with a reinforcing portion 53 at the end portion on the side of the connecting portion 49, which increases as the thickness in the radial direction approaches the connecting portion 49. Therefore, even when a load is applied to bend the second width portion 98 minutes of the second wall portion 48 toward the outer peripheral side when the coil wire 35a is routed in the wiring routing groove 55, the second wall portion 48 is connected. It is possible to prevent or suppress the breakage from the base end portion close to 49.

Further, in this example, the second dimension E2 of the second wall portion 48 in the circumferential direction is shorter than the first dimension E1. As a result, a lateral gap 50 of the second wall portion 48 is formed between the adjacent insulators 34. Therefore, the coil wire 35a or the like around which the wiring routing groove 55 is routed can be pulled out from the gap 50 on the side of the second wall portion 48 to the outside of the stator 9.

Further, in this example, the second wall portion 48 includes a notch portion 54 penetrating in the radial direction Y. Therefore, the coil wire 35a around which the wiring routing groove 55 is routed can be pulled out from the notch 54 provided to the outside of the stator 9.

Further, in this example, the second wall portion 48 is provided with two grooves 52. Further, each groove 52 is located on an extension line of each groove 51 provided in the first wall portion 47. Therefore, the coil wire 35a drawn from the coil 35 to the outer peripheral side via each groove 51 can be further pulled out to the outer peripheral side of the stator 9 through each groove 52.

Further, the insulator 34 is composed of a first insulator member 57 and a second insulator member 58 divided into two in the axial direction X, and the first insulator member 57 and the second insulator member 58 are the same members. Here, if the insulator is divided into two insulator members 57 and 58, even if the shape of the insulator 34 becomes complicated, it is easy to mold each of the insulator members 57 and 58 by injection molding. Further, since the first insulator member 57 and the second insulator member 58 are the same member, the number of parts does not increase even when the insulator 34 is composed of the two insulator members 57 and 58.

Further, in this example, the first sensor 61 is in the axial direction with respect to the first electromagnet 62 due to the contact between the facing inner wall surface 100b (contact surface) of the core support groove 100 of the electromagnet insulator 84 and the sensor core 66. Positioned by X. Further, the electromagnet insulator 84 is in contact with the first contacted portion 43 of the stator 9. Therefore, by bringing the electromagnet insulator 84 into contact with the sensor core 66, the distance from the center H of the stator 9 to the first sensor 61 can be accurately defined.

Further, in this example, the sensor core 66 includes a core-side notch 68 on the outer peripheral edge of the sensor core annular portion 64, and the electromagnet insulator 84 includes a second width portion 98 inserted into the core-side notch 68. Further, the connection inner wall surface 100c of the core support groove 100 provided in the second width portion 98 abuts on the opening edge portion of the core side notch portion 68 in the sensor core 66 from the other side in the circumferential direction. Therefore, the position of the first sensor 61 can be defined around the axis L.

(Modification example)
FIG. 14 is a side view of the stator unit of the first modification. FIG. 15 is a side view of the stator unit of the modified example 2. FIG. 16 is an explanatory view of the stator unit of the modified example 3. In the above example, the first magnetic bearing unit 11 can be arranged upside down in the axial direction X. That is, the first magnetic bearing unit 11 can be in a state in which the first electromagnet 62 is superposed on the first direction X1 of the first sensor 61. Similarly, the second magnetic bearing unit 12 can be arranged upside down in the axial direction X. That is, the second magnetic bearing unit 12 can be in a state in which the second electromagnet 102 is superposed on the first direction X1 of the second sensor 101.

The stator unit 8A of the first modification shown in FIG. 14 is a case where only the second magnetic bearing unit 12 is inverted in the axial direction X in the stator unit 8. In the stator unit 8A, the insulator outer flange 89 of the electromagnet insulator 84 of the second electromagnet 102 located on the side of the stator 9 in the second magnetic bearing unit 12 and the first contacted portion 42 of the second core covering portion 42 of the stator 9 The second magnetic bearing unit 12 is positioned in the axial direction X by abutting on the portion 43. In this example, the distance from the center H of the stator 9 to the first magnetic bearing unit 11 and the distance from the center H of the stator 9 to the second magnetic bearing unit 12 may be the same first distance D1. it can.

The stator unit 8B of the second modification shown in FIG. 15 is a case where only the first magnetic bearing unit 11 is inverted in the axial direction X in the above-mentioned stator unit 8. In the stator unit 8B, the sensor core 66 of the first sensor 61 located on the side of the stator 9 in the first magnetic bearing unit 11 is brought into contact with the second contacted portion 44 of the first core covering portion 41 of the stator 9. The first magnetic bearing unit 11 is positioned in the axial direction X. In this example, the distance from the center H of the stator 9 to the first magnetic bearing unit 11 and the distance from the center H of the stator 9 to the second magnetic bearing unit 12 may be the same second distance D2. it can.

The stator unit 8C of the third modification shown in FIG. 16 is a case where both of the second magnetic bearing units 12 are inverted in the axial direction X in the above-mentioned stator unit 8. In the stator unit 8C, the sensor core 66 of the first sensor 61 located on the side of the stator 9 in the first magnetic bearing unit 11 is brought into contact with the second contacted portion 44 of the first core covering portion 41 of the stator 9. The first magnetic bearing unit 11 is positioned in the axial direction X. Further, the insulator outer flange portion 89 of the electromagnet insulator 84 of the second electromagnet 102 located on the side of the stator 9 in the second magnetic bearing unit 12 is attached to the first contacted portion 43 of the second core covering portion 42 of the stator 9. The second magnetic bearing unit 12 is positioned in the axial direction X by abutting. In this case, the distance from the center H of the stator 9 to the first magnetic bearing unit 11 is the second distance D2. On the other hand, the distance from the center H of the stator 9 to the second magnetic bearing unit 12 is the first distance D1.

Therefore, if the stator 9 of the present invention is provided, the first magnetic bearing unit 11 and the second magnetic bearing unit 12 arranged on both sides of the stator 9 in the axial direction X can be arranged freely. The magnetic bearing unit 11 and the second magnetic bearing unit 12 can be positioned in the axial direction X.

1 ... Vacuum pump, 2 ... Pump case, 3 ... Fixed wing, 4 ... Rotating wing, 7 ... Motor, 8 ... Stator unit, 9 ... Stator, 10 ... Rotor, 11 ... First magnetic bearing unit, 12 ... Second magnet Bearing unit, 13 ... 3rd magnetic bearing unit, 15 ... Axial sensor, 16 ... Electromagnet, 17 ... Metal plate, 19 ... Stator column, 20 ... Resin sealing member, 23 ... Output shaft, 24 ... Rotor flange, 26 ... Base, 26a ... Center hole of base, 27 ... Cylindrical case, 28 ... Intake port, 29 ... Exhaust port forming part, 30 ... Exhaust port, 31 ... Circular part, 32 ... Pole part, 33 ... Stator core, 34 ... Insulator , 35 ... Coil, 35a ... Coil wire, 37 ... Cylinder, 38 ... Inner collar, 39 ... Outer collar, 41 ... 1st core covering, 42 ... 2nd core covering, 43 ... 1st contact Part, 44 ... 2nd contacted part, 47 ... 1st wall part, 47a ... 1st end face, 48 ... 2nd wall part, 49 ... connecting part, 50 ... gap, 51 ... groove, 52 ... groove, 53 ... Reinforcing part, 54 ... Notch, 55 ... Wiring routing groove (second groove), 57 ... 1st insulator member, 58 ... 2nd insulator member, 61 ... 1st sensor, 62 ... 1st electromagnet, 64 ... Sensor core Annulus part, 65 ... Sensor core salient pole, 66 ... Sensor core, 67 ... Sensor board, 68 ... Core side notch (sensor core notch), 70 ... Branch part, 71 ... Coil bobbin, 72 ... Sensor coil, 73 (1) )-(4) ... Sensor coil coil assembly, 75 ... Board side notch, 81 ... Core annular part, 82 ... Core salient pole, 83 ... Electromagnet core, 84 ... Electromagnet insulator, 85 ... Electromagnet coil, 86 ( 1)-(4) ... Electromagnet coil coil assembly, 87 ... Insulator tube, 88 ... Insulator inner flange, 89 ... Insulator outer flange, 91 ... Sensor support, 92 ... Extension, 93 ... Wall ( Contact part), 94 ... Thick part, 95 ... Thin part, 96 ... Step part, 96a ... End face (contact surface), 97 ... First width part, 98 ... Second width part (protruding part), 99 ... Board support groove, 99a ... facing inner wall surface, 99b ... facing inner wall surface, 99c ... connecting inner wall surface, 100 ... core support groove, 100a ... facing inner wall surface, 100b ... facing inner wall surface, 100c ... connecting inner wall surface, 101 ... second Sensor, 102 ... 2nd electromagnet, C1 ... Circumferential length dimension of coil, D1 ... 1st distance from the center of the stator core, D2 ... 2nd distance from the center of the stator core, E1 ... Circumferential direction of the 1st wall 1st dimension, E2 ... 2nd dimension in the circumferential direction of the 2nd wall part, F1 ... 1st thickness in the radial direction of the 1st wall part, E2 ... 2nd Second thickness in the radial direction of the wall, X ... axial direction, Y ... radial direction

Claims (26)

In a stator having an annular portion and a stator core having a salient pole portion protruding inward from the annular portion, an insulator having a tubular portion through which the salient pole portion penetrates, and a coil wound around the tubular portion. ,
When the direction along the axis of the annular portion is the axial direction, the direction orthogonal to the axial direction is the radial direction, one side of the axial direction is the first direction, and the other side is the second direction.
The insulator is provided with a core covering portion on the outside of the tubular portion in the radial direction.
The core covering portion includes a first contacted portion and a second contacted portion capable of contacting members from the axial direction.
The first distance between the center of the stator core and the first contacted portion in the axial direction is larger than the second distance between the center of the stator core and the second contacted portion in the axial direction. A stator characterized by being short. The insulator includes a first insulator member and a second insulator member which are divided into two in the axial direction.
The stator according to claim 1, wherein the first insulator member and the second insulator member are the same member. The stator according to claim 1 or 2,
A rotor arranged on the inner peripheral side of the stator and
A first magnet having a first electromagnet that supports the rotor in the radial direction by magnetic force in a non-contact manner, and a first sensor that is superposed in the axial direction of the first electromagnet and detects the radial displacement of the rotor. With the bearing unit
A second magnet having a second electromagnet that supports the rotor in the radial direction by magnetic force in a non-contact manner, and a second sensor that is superposed in the axial direction of the second electromagnet and detects the radial displacement of the rotor. With a bearing unit,
The first magnetic bearing unit is overlapped in the first direction of the stator and abuts on the first contacted portion or the second contacted portion of the core covering portion.
The external member of the stator located in the second direction is the first magnetic bearing unit.
The second magnetic bearing unit is a motor that is stacked in the second direction of the stator and abuts on the first contacted portion or the second contacted portion of the core covering portion. A motor including the stator according to claim 1 or 2 and a rotor arranged on the inner peripheral side of the stator.
With the pump case
A fixed wing fixed inside the pump case,
A vacuum pump comprising: a rotary blade attached to the rotor and rotating inside the pump case. The motor according to claim 3 and
With the pump case
A fixed wing fixed inside the pump case,
A vacuum pump comprising: a rotary blade attached to the rotor of the motor and rotating inside the pump case. In a stator having an annular portion and a stator core having a salient pole portion protruding inward from the annular portion, an insulator having a tubular portion through which the salient pole portion penetrates, and a coil wound around the tubular portion. ,
When the direction along the axis of the annular portion is the axial direction, the direction orthogonal to the axial direction is the radial direction, one side of the axial direction is the first direction, and the other side is the second direction.
The insulator includes a first core covering portion of the annular portion stacked in the first direction and a second core covering portion stacked in the second direction on the outside of the tubular portion in the radial direction.
Each of the first core covering portion and the second core covering portion includes a first contacted portion and a second contacted portion capable of contacting members from the axial direction.
The first distance between the center of the stator core and the first contacted portion in the axial direction is larger than the second distance between the center of the stator core and the second contacted portion in the axial direction. Short,
A stator characterized in that the first contacted portion and the second contacted portion are arranged side by side in the radial direction. The stator according to claim 6, wherein the first contacted portion is located inside the second contacted portion in the radial direction. Each of the first core covering portion and the second core covering portion includes a first wall portion extending in the axial direction and a second wall portion extending in the axial direction outside the first wall portion in the radial direction. With,
The thickness of the first wall portion in the radial direction is thicker than the thickness of the second wall portion in the radial direction.
The end of the first wall portion opposite to the annular portion is the first contacted portion.
The stator according to claim 7, wherein the end portion of the second wall portion opposite to the annular portion is the second contacted portion. When the circumference of the axis is the circumferential direction,
The first dimension of the first wall portion in the circumferential direction is longer than the length dimension of the coil in the circumferential direction.
The stator according to claim 8, wherein the first wall portion is provided with a groove penetrating from the inner peripheral side to the outer peripheral side at the end portion on the side opposite to the annular portion. Each of the first core covering portion and the second core covering portion includes a connecting portion extending in the radial direction along the annular portion to connect the first wall portion and the second wall portion.
The coil wire drawn out from the coil is characterized in that it is routed through the groove and the second groove defined by the first wall portion, the second wall portion, and the connection portion. The stator according to claim 9. The second wall portion is characterized by including a reinforcing portion at an end portion on the side of the connecting portion, which increases toward the side of the first wall portion as the thickness in the radial direction approaches the connecting portion. 10. The stator according to claim 10. The stator according to claim 10 or 11, wherein the second dimension of the second wall portion in the circumferential direction is shorter than the first dimension. The stator according to any one of claims 9 to 12, wherein the second wall portion includes a notch portion penetrating in the radial direction. The insulator includes a first insulator member and a second insulator member which are divided into two in the axial direction.
The stator according to any one of claims 6 to 13, wherein the first insulator member and the second insulator member are the same member. The stator according to any one of claims 6 to 14,
A rotor arranged on the inner peripheral side of the stator and
A first magnet having a first electromagnet that supports the rotor in the radial direction by magnetic force in a non-contact manner, and a first sensor that is superposed in the axial direction of the first electromagnet and detects a radial displacement of the rotor. With the bearing unit
A second magnet having a second electromagnet that supports the rotor in the radial direction by magnetic force in a non-contact manner, and a second sensor that is superposed in the axial direction of the second electromagnet and detects the radial displacement of the rotor. With a bearing unit,
The first magnetic bearing unit is overlapped in the first direction of the stator and abuts on the first contacted portion or the second contacted portion of the first core covering portion.
The external member of the stator located in the second direction is the first magnetic bearing unit.
The motor characterized in that the second magnetic bearing unit is overlapped in the second direction of the stator and abuts on the first contacted portion or the second contacted portion of the second core covering portion. .. The first sensor is stacked in the first direction of the first electromagnet.
The motor according to claim 15, wherein the first electromagnet abuts on the first contacted portion of the first core covering portion of the stator. The first electromagnet includes an electromagnet core having a core annular portion arranged so as to surround the axis and a core salient pole portion protruding inward from the core annular portion, an electromagnet insulator, and the electromagnet insulator via the electromagnet insulator. Equipped with an electromagnet coil wound around the core salient pole,
The electromagnet insulator includes an insulator cylinder portion through which the core salient pole portion penetrates, an insulator inner flange portion protruding from the inner end of the insulator cylinder portion in the radial direction, and an outer side of the insulator cylinder portion in the radial direction. Equipped with an insulator outer collar protruding from the edge,
The electromagnet coil is wound around the insulator cylinder portion between the insulator inner flange portion and the insulator outer flange portion.
The motor according to claim 16, wherein the end portion of the insulator outer flange portion in the second direction comes into contact with the first contacted portion from the axial direction. Each of the first core covering portion and the second core covering portion includes a first wall portion extending in the axial direction and a second wall portion extending in the axial direction outside the first wall portion in the radial direction. With,
The end of the first wall portion opposite to the annular portion is the first contacted portion.
The end of the second wall portion opposite to the annular portion is the second contacted portion.
On the outer peripheral side of the rotor, the stator, the first magnetic bearing unit, and the resin sealing member for sealing the second magnetic bearing unit are provided.
The first wall portion has an arc shape when viewed from the axial direction.
When the circumference of the axis is the circumferential direction,
The outer flange portion extends linearly in the circumferential direction when viewed from the axial direction, and the thickness in the radial direction is thinner than the thickness of the first wall portion, and a part of the circumferential direction is said. The motor according to claim 17, wherein the motor projects from the first wall portion to the outer peripheral side. The first sensor includes a sensor core having a sensor core annular portion arranged so as to surround the axis, a sensor core salient portion protruding inward from the sensor core annular portion, and a coil bobbin attached to the sensor core salient pole portion. It has a sensor coil wound around the sensor core salient pole portion via the coil bobbin.
The motor according to claim 17 or 18, wherein the electromagnet insulator is provided with an abutting portion that abuts on the sensor core annular portion on the outer peripheral side of the insulator cylinder portion from the second direction. The sensor core is provided with a sensor core notch on the outer peripheral edge of the sensor core annular portion.
The contact portion includes a contact surface that contacts the sensor core annular portion, and a protrusion that protrudes from the contact surface in the first direction and is inserted into the sensor core notch. The motor according to claim 19. The second sensor is stacked in the first direction of the second electromagnet.
The motor according to any one of claims 15 to 20, wherein the second sensor abuts on the second contacted portion of the second core covering portion of the stator. A motor including the stator according to any one of claims 6 to 14 and a rotor arranged on the inner peripheral side of the stator.
With the pump case
A fixed wing fixed inside the pump case,
A vacuum pump comprising: a rotary blade attached to the rotor and rotating inside the pump case. The motor according to any one of claims 15 to 21 and
With the pump case
A fixed wing fixed inside the pump case,
A vacuum pump comprising: a rotary blade attached to the rotor of the motor and rotating inside the pump case. In a magnetic bearing unit that rotatably supports the rotor
When the direction along the rotation center axis of the rotor is the axial direction, the direction orthogonal to the rotation center axis is the radial direction, one side of the axis direction is the first direction, and the other side is the second direction.
An electromagnet that non-contactly supports the rotor in the radial direction by magnetic force,
It has a sensor that is stacked in the first direction of the electromagnet and detects the radial displacement of the rotor.
The electromagnet includes an electromagnet core having a core annular portion arranged so as to surround the rotation center axis and a core salient pole portion protruding inward from the core annular portion, an electromagnet insulator, and the electromagnet insulator via the electromagnet insulator. Equipped with an electromagnet coil wound around the core salient pole,
The sensor includes a sensor core having a sensor core annular portion arranged around the rotation center axis, a sensor core salient pole portion protruding inward from the sensor core annular portion, and a coil bobbin attached to the sensor core salient pole portion. It has a sensor coil wound around the sensor core salient pole portion via the coil bobbin.
The electromagnet insulator includes an insulator cylinder portion through which the core salient pole portion penetrates, an insulator inner flange portion protruding from the inner end of the insulator cylinder portion in the radial direction, and an outer side of the insulator cylinder portion in the radial direction. A magnetic bearing unit having an insulator outer flange portion protruding from an end and an abutting portion that abuts on the sensor core annular portion on the outer peripheral side of the insulator cylinder portion from the second direction. The sensor core is provided with a sensor core notch on the outer peripheral edge of the sensor core annular portion.
The contact portion includes a contact surface that contacts the sensor core annular portion, and a protrusion that protrudes from the contact surface in the first direction and is inserted into the sensor core notch. The magnetic bearing unit according to claim 24. The magnetic bearing unit according to claim 24 or 25,
Has a rotor with rotors and
A vacuum pump characterized in that the rotor is rotatably supported by the magnetic bearing unit.

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