JP2020128934A - Inspection device - Google Patents

Abstract

To provide an inspection device with which it is possible to generate highly accurate height data without requiring a complex computation process, even when the temperature of a light generating element and its support member rises.SOLUTION: A measurement object is irradiated with structured light generated by a light generating element 118 through a light projection lens 119. The structured light reflected from the measurement object in the direction of an optical axis ax0 of an imaging unit is received by an imaging element, and height data indicating the height image of the measurement object is generated. The light generating element 118 and the light projection lens 119 are supported by a light projection base 110b composed of metal having larger linear expansion coefficient than the light generating element 118. The light projection base 110b has a contact surface 15a facing the optical axis ax0 of the imaging unit. The light generating element 118 is urged in a direction heading toward the contact surface 15a by a fixed member while being supported by the light projection base 110b so as to move away from the optical axis ax0 of the imaging unit.SELECTED DRAWING: Figure 8

Description

The present invention relates to an inspection device that inspects the height of an object to be measured.

In the triangulation type inspection apparatus, the light projecting unit irradiates the surface of the object to be measured with light, and the reflected light is received by the light receiving unit having pixels arranged one-dimensionally or two-dimensionally. Height data indicating a height image of the measurement target is generated based on the data of the received light amount distribution obtained by the light receiving unit. Such height data may be used in a production site such as a factory for inspecting the height of an object to be measured (in-line inspection).

For example, in the three-dimensional image processing apparatus of Patent Document 1, the measurement target is conveyed by a belt conveyor, and the measurement target is irradiated with structured light a large number of times at a predetermined position by a light projecting unit. Further, the structured light reflected from the measurement target object is received by the imaging unit each time the structured light is irradiated, and the measurement target object is imaged. Height data (height image) of the measurement target is generated based on the plurality of image data of the measurement target. A predetermined inspection is performed based on the generated height image.

JP, 2015-45587, A JP, 2016-194607, A

The structured light is generated by a light generation element such as DMD (Digital Micromirror Device). It is desirable that such a light generation element be accurately arranged at a predetermined position together with other optical members in order to accurately calculate height data. In order to accurately position the light generating element, a support member that supports the light generating element at a predetermined position in the inspection device is used.

By the way, in the inspection apparatus, the temperature of the support member may rise due to heat generated by the drive parts of the light generation element and the various light sources. There is a possibility that the position of the light generating element will deviate from a predetermined position as the temperature rises. Such positional deviation of the light generating element reduces the accuracy of the generated height data.

On the other hand, Patent Document 2 describes a holding device that reduces loss and distortion of the pattern light (structured light) generated by the pattern light generation unit (light generation element). In the holding device, the fixing portion is fixed to the support portion for positioning the pattern light generation portion. The fixed portion includes a contact portion and an elastic portion. The contact portion is provided so as to hit the outer periphery of the pattern light generation portion. The elastic body presses the portion of the pattern light generation portion that abuts the abutting portion against the abutting portion.

According to the holding device of Patent Document 2, since the pattern light generation unit is not fixed to the support member by the plurality of pins for positioning, deformation of the pattern light generation unit is reduced. Further, it becomes easy to predict the positional deviation between the support member and the pattern light generation unit. If the prediction can be made, the measurement error can be corrected. However, in order to correct the measurement error for each temperature, complicated calculation processing is required.

An object of the present invention is to provide an inspection apparatus capable of generating highly accurate height data without requiring complicated calculation processing even when the temperature of the light generating element and its supporting member rises. ..

(1) The inspection apparatus according to the present invention includes a light source, a light generating element that receives light emitted from the light source to generate structured light, and a light projecting lens having a first optical axis. A projection optical system for irradiating the object to be measured with structured light generated by the projection lens, and a metal having a linear expansion coefficient larger than that of the light generating element and supporting the light generating element and the light projecting lens. A light receiving optical system including a light projecting base and a light receiving lens having a second optical axis intersecting the first optical axis and connected to the light projecting base; and reflection from a measurement target in the direction of the second optical axis. The structured light is received through the light receiving optical system to generate pattern image data showing an image of the object to be measured, and a fixing member for fixing the light generating element to the light emitting base. Has an abutting portion that is separated from the second optical axis and faces the second optical axis, and the fixing member is caused by expansion of the light projecting base due to temperature rise and the projecting optical system and the second optical axis. When the distance between the optical axis and the axis increases, the amount of change in the optical path length of the structured light from the light generating element to the imaging element via the preset reference surface approaches 0 and Contact the light generation element away from the second optical axis so that the incident position on the image sensor of the light entering the image sensor from the arbitrary part via the reference surface approaches the incident position before the temperature rise. Energize in the direction toward the section.

In the inspection apparatus, structured light is generated by the light emitted from the light source entering the light generating element. The structured light thus generated is applied to the object to be measured by the projection optical system. The structured light reflected from the measuring object in the direction of the second optical axis is received by the image pickup device through the light receiving optical system, and pattern image data is generated. In this case, the height data indicating the height image of the measuring object can be generated based on the pattern image data generated by the triangulation method. Further, it is possible to inspect the measurement object based on the generated height data. In the height measurement of the measuring object by the triangulation method, the reference plane is set at a predetermined position with respect to the image sensor.

When the temperature of the light projecting base rises, the light projecting base expands according to the linear expansion coefficient of the metal material forming the light projecting base. At this time, since the light projecting base and the light receiving optical system are connected to each other, the contact portion and the light projecting lens move away from the second optical axis as the light projecting base expands. Therefore, the crossing position of the first optical axis of the light projecting lens on the reference plane is displaced from the position before the temperature rise of the light projecting base.

Here, since the linear expansion coefficient of the light generating element is smaller than that of the light projecting base, the degree of expansion of the light generating element is smaller than that of the light projecting base. Therefore, the light generating element is biased by the fixing member in the direction toward the contact portion so as to move away from the second optical axis, and thus the second optical axis with respect to the first optical axis of the light projecting lens. Move relatively away from.

In this case, the light emitted from the light generation element to the measurement object travels while being inverted by the light projecting lens with the first optical axis as a reference. Therefore, the irradiation position of the light on the reference surface hardly changes before and after the temperature change. Therefore, the amount of change in the optical path length of the structured light from the light generation element to the imaging element via the preset reference surface approaches zero. Further, the incident position on the image sensor of the light incident on the image sensor from any part of the light generating element via the reference surface approaches the incident position before the temperature rise. Thereby, the influence of the temperature rise of the light projecting base on the height measurement of the measuring object is canceled by the relative movement of the light generating element with respect to the light projecting base.

As a result, even when the temperature of the light generating element and the light emitting base rises, it is possible to generate highly accurate height data without requiring complicated calculation processing.

(2) The light generating element may be a digital micromirror device.

In this case, at least a part of the light emitted from the light source is reflected by the digital micromirror device to generate structured light. In addition, the structured light pattern can be easily and freely set.

(3) The inspection apparatus further includes a holder formed to hold the light generating element, the light projecting base has a supporting surface capable of supporting the holder, and the holder is a supporting surface of the light projecting base. The fixed member has an abutted portion formed so as to be able to abut the abutting portion while being supported above, and the fixing member is held by the holder in a state where the abutted portion abuts the abutting portion. The light generating element may be provided on the light projecting base so as to urge the light generating element in a direction toward the contact portion.

In this case, the light generation element is provided on the support surface of the light projecting base while being held by the holder. This facilitates handling of the light generating element when it is attached to the light emitting base.

(4) The light projecting base further has a guide surface that intersects the support surface and extends from the contact portion in a direction toward the second optical axis, and the holder is supported on the support surface of the light projecting base. The fixed member has a guided portion formed so as to be able to come into contact with the guide surface in a state where the abutted portion abuts against the abutting portion, and the fixed member has the abutted portion abutting against the abutting portion and May be provided on the light projecting base so as to further urge the holder in a direction toward the guide surface in a state where the holder contacts the guide surface.

In this case, the holder is biased toward the guide surface of the light projecting base while the guided portion of the holder is in contact with the guide surface of the light projecting base, so that the holder moves relative to the light projecting base. The contact portion is regulated in the direction toward the second optical axis. Therefore, when the temperature of the light projecting base rises, the light generating element can be accurately moved in the direction away from the second optical axis when the light projecting base expands.

(5) The inspection device includes a light receiving base that supports the image pickup element and a light receiving lens so that the second optical axis extends in the vertical direction, and a light source that allows the light emitted from the light source to travel from the upper side to the lower side. Further comprising a light source base for supporting the light source, and a reflecting member for reflecting the light emitted from the light source and traveling downward from the upper side obliquely upward away from the second optical axis, and the light generating element is reflected by the reflecting member. Configured to generate structured light by reflecting at least a portion of the reflected light, the floodlighting base supports the reflective member and the structured light generated by the light generating element is coupled to the light receiving lens. The light generating element may be supported so as to face the optical axis 2 and travel obliquely downward.

According to the above configuration, the optical path of the light emitted from the light source is folded back. As a result, the structure for irradiating the measurement object with the structured light is prevented from increasing in size in the irradiation direction.

Further, according to the above configuration, in the direction orthogonal to the second optical axis of the light receiving optical system, the light source, the light source base, and the reflecting member include the light generation element and the second optical axis of the light receiving optical system. Located in between. Thereby, the space between the light generating element and the second optical axis of the light receiving optical system in the direction orthogonal to the second optical axis of the light receiving optical system can be effectively used.

Therefore, it is possible to make the configuration of the plurality of light emitting/receiving systems including the light source, the reflecting member, the light generating element, the light receiving optical system, and the image pickup element more compact.

(6) The inspection device may further include a casing that houses the light projecting base, the light receiving base, and the light source base, and the light projecting base, the light receiving base, and the light source base may be fixed inside the casing.

In this case, the light projecting base, the light receiving base, and the light source base can be compactly housed in the casing. Therefore, the casing can be downsized, and the installation space of the casing can be reduced. Furthermore, the handling of the inspection device during installation becomes easy.

According to the present invention, height data can be generated with high accuracy without requiring complicated calculation processing even when the temperature of the light generation element and its supporting member rises.

It is a block diagram which shows the structure of the inspection apparatus which concerns on one embodiment of this invention. FIG. 2 is a schematic diagram for explaining a basic configuration inside the head unit of FIG. 1. It is a figure for explaining the principle of the triangulation method. 6 is a flowchart showing an example of an inspection process executed by the inspection device of FIG. 1. It is an exploded perspective view for explaining a support state of a light generating element in a light projecting base. FIG. 6 is an external perspective view for explaining a supported state of a light generation element in a light projecting base. FIG. 7 is an enlarged view of the element support portion as viewed in the direction of the outlined arrow Q in FIG. 6. It is a figure for demonstrating the change of the support state of the light generation element accompanying a temperature change. It is a figure for explaining a change of the optical path of structured light with temperature change of a head part. It is a block diagram which shows the structure of the inspection apparatus which concerns on a modification.

Hereinafter, an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.

(1) Configuration of Inspection Device FIG. 1 is a block diagram showing the configuration of the inspection device according to the embodiment of the present invention. As shown in FIG. 1, the inspection device 300 includes a head unit 100, a controller unit 200, an operation unit 310, and a display unit 320. The controller unit 200 is connected to an external device 400 such as a programmable logic controller.

As indicated by thick arrows in FIG. 1, a plurality of measurement objects S are sequentially conveyed by the belt conveyor 301 so as to pass through the space below the head unit 100. When each measurement object S passes through the space below the head unit 100, the belt conveyor 301 is kept for a certain time so that the measurement object S temporarily stops at a predetermined position below the head unit 100. Stop.

The head unit 100 is, for example, an image pickup device integrated with light projection and reception, and has a configuration in which an illumination unit 110, an image pickup unit 120, and a calculation unit 130 are housed in a head casing 100c. The illuminating unit 110 selectively irradiates the measurement target S with red, blue, green, or white light, and light having an arbitrary pattern and uniform light having no pattern, obliquely from above. Configured to be possible. Hereinafter, light having an arbitrary pattern is referred to as structured light, and uniform light is referred to as uniform light. The configuration of the illumination unit 110 will be described later.

The image capturing unit 120 includes an image capturing element 121 and light receiving lenses 122 and 123. At least the light receiving lens 122 of the light receiving lenses 122 and 123 is a telecentric lens. The structured light or uniform light reflected upward by the measurement object S is condensed and image-formed by the light receiving lenses 122 and 123 of the image pickup unit 120, and then received by the image pickup element 121. The image sensor 121 is, for example, a monochrome CCD (charge coupled device), and generates image data by outputting an analog electric signal corresponding to the amount of light received from each pixel. The image pickup device 121 may be another image pickup device such as a CMOS (complementary metal oxide semiconductor) image sensor.

In the present embodiment, image data indicating an image of the measurement target S when the measurement target S is irradiated with the structured light is referred to as pattern image data. On the other hand, image data showing an image of the measurement target S when the measurement target S is irradiated with uniform light having any one of red, blue, and green wavelengths is referred to as texture image data.

The arithmetic unit 130 is realized by, for example, an FPGA (Field Programmable Gate Array), and includes an imaging processing unit 131, an arithmetic processing unit 132, a storage unit 133, and an output processing unit 134. In the present embodiment, arithmetic unit 130 is realized by an FPGA, but the present invention is not limited to this. The arithmetic unit 130 may be realized by a CPU (central processing unit) and RAM (random access memory), or may be realized by a microcomputer.

The imaging processing unit 131 controls the operations of the illumination unit 110 and the imaging unit 120. The arithmetic processing unit 132 generates height data indicating a height image of the measuring object S based on the plurality of pattern image data. Further, the arithmetic processing unit 132 synthesizes the red, blue, and green texture image data generated by the uniform light of red, blue, and green to obtain color texture image data indicating the color image of the measuring object S. To generate. The storage unit 133 temporarily stores the plurality of pattern image data and texture image data generated by the imaging unit 120. The storage unit 133 also temporarily stores the height data and the color texture image data generated by the arithmetic processing unit 132. The output processing unit 134 outputs the height data or the color texture image data stored in the storage unit 133. Details of the calculation unit 130 will be described later.

The controller unit 200 includes a head control unit 210, an image memory 220, and an inspection unit 230. The head control unit 210 controls the operation of the head unit 100 based on a command given by the external device 400. The image memory 220 stores the height data or the color texture image data output by the calculation unit 130.

The inspection unit 230 performs processing such as edge detection or dimension measurement on the height data or the color texture image data stored in the image memory 220 based on the inspection content designated by the user. In addition, the inspection unit 230 determines the quality of the measurement target S by comparing the measured value with a predetermined threshold value, and gives the determination result to the external device 400.

An operation unit 310 and a display unit 320 are connected to the controller unit 200. The operation unit 310 includes a keyboard, a pointing device, or a dedicated console. A mouse, a joystick, or the like is used as the pointing device. By operating the operation unit 310, the user can specify desired inspection contents in the controller unit 200.

The display unit 320 is composed of, for example, an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel. The display unit 320 displays a height image based on the height data stored in the image memory 220. The display unit 320 also displays a color image of the measuring object S based on the color texture image data stored in the image memory 220. Further, the display unit 320 displays the determination result of the measurement target S by the inspection unit 230.

(2) Basic Internal Configuration of Head Unit 100 FIG. 2 is a schematic diagram for explaining the basic internal configuration of the head unit 100 of FIG. As shown in FIG. 2, the imaging unit 120 includes a light receiving base 120a in addition to the components shown in FIG. The light receiving base 120a includes, for example, a lens barrel, and supports the light receiving lenses 122 and 123 and the image sensor 121 inside the head casing 100c. Inside the head casing 100c, the light receiving lenses 122 and 123 are fixed such that a common optical axis ax0 extends in the vertical direction. The image pickup device 121 is fixed above the light receiving lenses 122 and 123 so as to receive the light traveling upward from below on the optical axis ax0 common to the light receiving lenses 122 and 123. Further, in this example, the arithmetic unit 130 is fixed in the head casing 100c so as to be located above the imaging unit 120 in a state where it is mounted on the board.

In the head casing 100c, the illumination unit 110 is provided so as to be adjacent to the imaging unit 120 in the horizontal direction. The illumination unit 110 includes light sources 111, 112 and 113, dichroic mirrors 114 and 115, an illumination lens 116, a mirror 117, a light generation element 118, a light projecting lens 119, a light source base 110a and a light projecting base 110b.

The light source base 110a supports the light sources 111, 112, 113, the dichroic mirrors 114, 115, and the illumination lens 116. The light projecting base 110b supports the mirror 117, the light generating element 118, and the light projecting lens 119. The light source base 110a is connected to the light projecting base 110b so as to be located above the light projecting base 110b. The light source base 110a and the light projecting base 110b connected to each other are connected to the light receiving base 120a of the imaging unit 120 via the connecting member JT. The light source base 110a, the light projecting base 110b, the light receiving base 120a, and the connecting member JT are made of a common metal material (aluminum (Al) in this example). At a predetermined reference temperature (for example, 25° C.), the plurality of constituent elements of the illumination unit 110 and the imaging unit 120 are held in a predetermined positional relationship.

The light sources 111, 112, and 113 are, for example, LEDs (light emitting diodes), and emit green light, blue light, and red light, respectively. Each of the light sources 111 to 113 may be a light source other than the LED.

The dichroic mirror 114 is supported by the light source base 110a so that the green light emitted by the light source 111 and the blue light emitted by the light source 112 can be superposed on each other. The dichroic mirror 115 is supported by the light source base 110a so that the light superposed by the dichroic mirror 114 and the red light emitted by the light source 113 can be superposed. Thereby, when the green light, the blue light, and the red light are simultaneously emitted from the light sources 111 to 113, these lights are superposed on a common optical path to generate white light.

Further, in the present embodiment, the light sources 111 to 113 and the dichroic mirrors 114 and 115 have the light source base 110a so that a plurality of lights respectively emitted by the light sources 111 to 113 travel on a common optical path from the upper side to the lower side. Supported by.

The illumination lens 116 is supported by the light source base 110a at a position below the dichroic mirror 115 so as to collect the light passing through or reflected by the dichroic mirror 115. In the head casing 100c, the light condensed by the illumination lens 116 further proceeds from the upper side to the lower side.

The mirror 117 is supported by the light projecting base 110b so as to reflect the light that has passed through the illumination lens 116 in a direction away from the optical axis ax0 of the imaging unit 120 and obliquely upward. The light generating element 118 is supported by the light projecting base 110b so as to receive the light reflected by the mirror 117. In the present embodiment, the light generation element 118 is a DMD (digital micromirror device). The light generation element 118 has a light generation surface that selectively generates structured light and uniform light by reflecting at least a part of the received light obliquely downward so as to approach the optical axis ax0 of the imaging unit 120. .. The light generation element 118 may be an LCD or an LCOS (reflection type liquid crystal element). Details of the support state of the light generating element 118 on the light projecting base 110b will be described later.

The light projecting lens 119 is supported by the light projecting base 110b such that the optical axis ax1 of the light projecting lens 119 extends obliquely downward from the light projecting lens 119 toward the optical axis ax0 of the imaging unit 120. In the present embodiment, the light projecting lens 119 irradiates the measurement target S of FIG. 1 with expanding the light from the light generating element 118. The light projecting lens 119 may be composed of a plurality of lenses. In this case, the light projecting lens 119 may include a telecentric optical system, and may be provided so that the structured light or uniform light from the light generating element 118 is expanded and collimated to irradiate the measurement target S. ..

According to the above configuration, the optical path common to the plurality of lights emitted from the light sources 111, 112, 113 is folded back and is irradiated onto the measurement target S. As a result, the optical systems supported by the light source base 110a are not aligned on the optical axis ax1 of the light projecting lens 119. Therefore, the structure for irradiating the measurement object S with the structured light and the uniform light is suppressed from being enlarged in the irradiation direction.

Further, according to the above configuration, at least a part of the plurality of optical systems supported by the light source base 110a in the direction orthogonal to the optical axis ax0 of the imaging unit 120 includes the light generation element 118 and the optical axis of the imaging unit 120. It is located between ax0. Thereby, the space between the light generation element 118 and the optical axis ax0 of the imaging unit 120 in the direction orthogonal to the optical axis ax0 of the imaging unit 120 can be effectively used.

As a result, since the illumination unit 110 and the imaging unit 120 are compactly arranged in the head casing 100c, downsizing of the head unit 100 is realized and the flexibility of layout of the head unit 100 is improved. Further, the installation space of the head unit 100 is reduced, and the head unit 100 is easily handled during installation.

The imaging processing unit 131 of the calculation unit 130 in FIG. 1 individually controls the emission of light by the light sources 111 to 113 according to the flow of the inspection process described below. In addition, the light generation element 118 is controlled so that the light emitted from the illumination unit 110 is given a desired pattern. Accordingly, the illumination unit 110 selectively emits white structured light having a predetermined pattern and uniform green, blue, or red light. Further, the image capturing processing unit 131 controls the image capturing unit 120 so as to capture an image of the measurement target S in synchronization with the emission of structured light or uniform light in the illumination unit 110 according to the flow of the inspection process described below.

(3) Generation of Height Data In the inspection device 300, a three-dimensional coordinate system unique to the head unit 100 (hereinafter, referred to as a device coordinate system) is defined. The apparatus coordinate system of this example includes an X axis, a Y axis, and a Z axis that are orthogonal to the origin. In the following description, the direction parallel to the X axis of the device coordinate system is called the X direction, the direction parallel to the Y axis is called the Y direction, and the direction parallel to the Z axis is called the Z direction. The X direction and the Y direction are orthogonal to each other in a plane parallel to the upper surface of the belt conveyor 301. The Z direction is orthogonal to the upper surface of the belt conveyor 301.

In the head unit 100, height data indicating a height image of the measuring object S is generated by the triangulation method. In the height measurement of the measuring object by the triangulation method, the reference plane is set at a predetermined position with respect to the image sensor 121. In this example, the upper surface of the belt conveyor 301 is set as the reference surface.

FIG. 3 is a diagram for explaining the principle of the triangulation method. In FIG. 3, the X direction, the Y direction, and the Z direction are indicated by arrows. Here, it is assumed that the temperature inside the head unit 100 of the inspection device 300 is a reference temperature.

As shown in FIG. 3, between the optical axis ax1 of the optical system of the illumination unit 110 (projecting lens 119 of FIG. 2) and the optical axis ax0 of the optical system of the imaging unit 120 (receiving lenses 122 and 123 of FIG. 2). Angle α is set in advance. The angle α is larger than 0 degrees and smaller than 90 degrees.

When the measurement target S does not exist below the head unit 100, the light emitted from the illumination unit 110 is reflected by the point O on the reference plane R and enters the imaging unit 120. On the other hand, when the measurement target S is present below the head unit 100, the light emitted from the illumination unit 110 is reflected by the point A on the surface of the measurement target S and enters the imaging unit 120. As a result, the measurement target S is imaged, and image data indicating an image of the measurement target S is generated.

When the distance between the point O and the point A in the X direction is d, the height h of the point A of the measuring object S with respect to the reference plane R is given by h=d÷tan(α). The calculation unit 130 calculates the distance d based on the image data generated by the imaging unit 120. In addition, the calculation unit 130 calculates the height h of the point A on the surface of the measuring object S based on the calculated distance d. By calculating the heights of all the points on the surface of the measuring object S, the coordinates represented by the device coordinate system can be specified for all the points irradiated with light. Thereby, height data of the measuring object S is generated.

In order to irradiate all points on the surface of the measuring object S with light, various illumination lights are emitted from the illumination unit 110. In the present embodiment, the striped structured light (hereinafter referred to as striped light) having a linear cross section that is parallel to the Y direction and aligned in the X direction has its spatial phase changed. The light is emitted from the illumination unit 110 multiple times. Further, the coded structured light (hereinafter, referred to as coded light) having a linear cross section parallel to the Y direction and having the bright portion and the dark portion aligned in the X direction is the bright portion and the dark portion. Is emitted multiple times from the illumination unit 110 while being changed into a gray code.

(4) Inspection Process FIG. 4 is a flowchart showing an example of the inspection process executed by the inspection device 300 of FIG. The inspection process will be described below with reference to the components of the inspection apparatus 300 shown in FIG. 1 and the flowchart of FIG. First, in the head unit 100, the imaging processing unit 131 controls the illumination unit 110 to emit white structured light having a predetermined pattern (step S1). Further, the imaging processing unit 131 controls the imaging unit 120 so as to image the measurement target S in synchronization with the emission of the structured light in step S1 (step S2). As a result, the pattern image data of the measuring object S is generated by the image capturing unit 120.

Next, the imaging processing unit 131 causes the storage unit 133 to store the pattern image data generated in the immediately preceding step S2 (step S3). The image capturing processing unit 131 also determines whether the image capturing has been performed a predetermined number of times (step S4). When the imaging has not been performed a predetermined number of times, the imaging processing unit 131 controls the light generation element 118 of FIG. 2 so as to change the pattern of structured light (step S5), and returns to step S1. Here, changing the pattern of structured light includes shifting the phase of the pattern of structured light. Steps S1 to S5 are repeated until imaging is performed a predetermined number of times. As a result, a plurality of pattern image data when the striped light and the coded light are sequentially irradiated to the measurement object S while the pattern is changed are stored in the storage unit 133. Either the striped light or the coded light may be emitted first.

When the imaging is performed a predetermined number of times in step S4, the arithmetic processing unit 132 generates height data by performing an arithmetic operation on the plurality of pattern image data stored in the storage unit 133 (step S6). After that, the output processing unit 134 outputs the height data generated in step S6 to the controller unit 200 (step S7). As a result, the height data is stored in the image memory 220 of the controller unit 200.

Next, the imaging processing unit 131 selects one light source from the plurality of light sources 111, 112, 113 in FIG. 2 and emits uniform light of a color corresponding to the selected one light source. 110 is controlled (step S8). In addition, the image capturing processing unit 131 controls the image capturing unit 120 to capture an image of the measuring object S in synchronization with the emission of uniform light in step S8 (step S9). As a result, the image capturing unit 120 generates texture image data of a color corresponding to one light source.

Then, the imaging processing unit 131 stores the texture image data generated in the immediately preceding step S9 in the storage unit 133 (step S10). The imaging processing unit 131 also determines whether imaging using all the light sources 111 to 113 has been performed (step S11). When imaging using all the light sources 111 to 113 is not executed, the imaging processing unit 131 determines a light source that emits light from one or a plurality of light sources that have not emitted light after the process of the immediately preceding step S7. (Step S12), the process returns to step S8. Steps S8 to S12 are repeated until imaging using all the light sources 111 to 113 is executed. As a result, the storage unit 133 stores a plurality of texture image data when the uniform light is sequentially applied to the measurement target S while the color of the light applied to the measurement target S is changed.

When the imaging using all the light sources 111 to 113 is executed in step S11, the arithmetic processing unit 132 generates color texture image data by synthesizing the plurality of texture image data stored in the storage unit 133. (Step S13). After that, the output processing unit 134 outputs the color texture image data generated in step S13 to the controller unit 200 (step S14). As a result, the color texture image data is stored in the image memory 220 of the controller unit 200.

Next, in the controller unit 200, the inspection unit 230 performs image processing on the height data and the color texture image data stored in the image memory 220 in steps S7 and S14 (step S15). As a result, the measurement of a predetermined portion in the height data or the color texture image data is executed based on the inspection content designated in advance by the user. Specifically, measurement in the height direction (Z direction) is performed using height data, and measurement in the X direction or Y direction is performed using color texture image data.

Subsequently, the inspection unit 230 determines the quality of the measurement target S by comparing the measurement value obtained in step S15 with a predetermined threshold value (step S16), and ends the measurement process.

Here, the inspection unit 230 may display the determination result in step S16 on the display unit 320 or may give the determination result to the external device 400. Further, the inspection unit 230 can cause the display unit 320 to display a height image based on the height data generated in the process of step S6. Furthermore, the display unit 320 can display a color image of the measuring object S based on the color texture image data generated in step S13 on the display unit 320.

In the inspection process described above, steps S8 to S14 are executed after steps S1 to S7 are executed, but the present invention is not limited to this. Steps S1 to S7 may be executed after steps S8 to S14 are executed. Further, steps S7 and S14 may be executed at any time before the measurement is executed, and may be executed in parallel with other processing.

(5) Supporting State of Light Generation Element 118 in Head Unit 100 FIG. 5 is an exploded perspective view for explaining a supported state of the light generation element 118 in the light projecting base 110b. The light projecting base 110b is fixed in the head casing 100c (FIG. 2) so that a predetermined posture (hereinafter, referred to as a reference posture) with respect to the imaging unit 120 (FIG. 2) is maintained.

As shown in FIG. 5, the light projecting base 110b has an outermost portion 11, an upper surface portion 12 and an element supporting portion 13. The outermost portion 11 is a portion that faces the opposite direction of the imaging unit 120 (the direction away from the imaging unit 120) in a state where the projection base 110b is in the reference posture, and is located at the farthest position from the imaging unit 120 in the projection base 110b. This is the part to be placed. The upper surface portion 12 is a surface that faces upward when the light projecting base 110b is in the reference posture. The upper end portion of the outermost portion 11 and the upper surface portion 12 are separated from each other.

Inside the light projecting base 110b, a mirror 117 and a light projecting lens 119 are provided below the upper surface portion 12. The mirror 117 and the light projecting lens 119 are fixed to a predetermined portion of the light projecting base 110b. In addition, inside the light projecting base 110b, a space is formed for traveling of the light emitted from the light sources 111, 112, 113 and the structured light or uniform light generated by the light generating element 118. The upper surface portion 12 is formed with an opening 12o for guiding light traveling downward through the illumination lens 116 (FIG. 2) to the mirror 117.

The element supporting portion 13 is located between the upper end portion of the outermost portion 11 and the upper surface portion 12, and has a supporting surface 14 and a supporting wall 15. The support surface 14 is formed flat so as to face the opposite direction of the imaging unit 120 (the direction away from the imaging unit 120) and obliquely upward with the light projection base 110b in the reference posture. An opening 14o for guiding the light reflected by the mirror 117 in the light projecting base 110b to the light generating element 118 is formed in the center of the support surface 14.

The support wall 15 has a substantially U shape and is formed so as to surround the support surface 14 and project obliquely upward and orthogonal to the support surface 14. The support wall 15 has three inner side surfaces facing the center of the element support portion 13. One of the three inner side surfaces is orthogonal to the support surface 14 and faces the direction of the image capturing unit 120 (direction toward the image capturing unit 120) and diagonally upward. The other two inner side surfaces are orthogonal to the support surface 14 and the contact surface 15a and face each other. In the following description, at least one inner surface of the support wall 15 that faces the imaging unit 120 is referred to as a contact surface 15a. Further, the other two inner side surfaces of the support wall 15 are referred to as inner side surfaces 15b and 15c, respectively. The support wall 15 is further provided with a long leaf spring 16. The leaf spring 16 is provided so as to extend from one end of the support wall 15 in a predetermined direction by a certain distance.

The light generating element 118 includes a plurality of electric components for generating structured light, a substrate on which the plurality of electric components are mounted, and a package that houses at least a part of the plurality of electric components and the substrate. The package of the light generating element 118 is formed of a material having a smaller linear expansion coefficient than the light projecting base 110b. As described above, when the light projecting base 110b is made of aluminum, the package is made of aluminum oxide (Al ₂ O ₃ ), for example. The linear expansion coefficient of aluminum is about 23 (×10 ⁻⁶ /° C.), and the linear expansion coefficient of aluminum oxide is about 7 (×10 ⁻⁶ /° C.). The package of this example has a flat rectangular parallelepiped shape.

The light generating element 118 is attached to the element supporting portion 13 of the light projecting base 110b using the two holders 20 and 30. The holders 20 and 30 are made of the same metal material as the light emitting base 110b. The holders 20 and 30 may be formed of the same material as the package of the light generating element 118.

The one holder 20 is a substantially rectangular plate-shaped member, and is formed so as to be placed on the support surface 14 and slidable. Specifically, the holder 20 has an upper surface 28 and a lower surface 29 facing in opposite directions. A holding wall 21 having an L shape is formed on the upper surface 28. The holding wall 21 is formed so as to extend along one short side from one long side of the holder 20. The holding wall 21 has two inner side surfaces facing the center of the holder 20 and orthogonal to each other.

The light generation element 118 is placed on the upper surface 28 of the holder 20. In this state, the light generating element 118 is brought into contact with the two inner surfaces of the holding wall 21. Thereby, the light generating element 118 can be positioned with respect to the holder 20 in a predetermined posture. An opening for exposing the light generation surface of the light generation element 118 below the holder 20 is formed in the center of the holder 20.

The other holder 30 is a substantially rectangular plate-shaped member, and is formed so as to be mountable and slidable on the holder 20 holding the light generation element 118. Specifically, the holder 30 has an upper surface 38 and a lower surface 39 facing in opposite directions. A holding wall 31 having an L shape is formed on the lower surface 39. The holding wall 31 has two inner side surfaces facing the center of the holder 30 and orthogonal to each other.

The thickness of the holding wall 31 of the holder 30 (the amount of protrusion from the lower surface 39) is equal to the thickness of the holding wall 21 of the holder 20 (the amount of protrusion from the upper surface 28). With the light generation element 118 positioned on the holder 20, the holder 30 is arranged so that the lower surface 39 faces the holder 20. Further, the holder 30 is placed on the holder 20 so that the holding wall 31 of the holder 30 overlaps the region of the upper surface 28 of the holder 20 where the light generation element 118 does not exist. Further, the light generating element 118 is brought into contact with the two inner surfaces of the holding wall 31.

Thereby, the light generating element 118 can be positioned with respect to the holder 30 in a predetermined posture. An opening for heat dissipation of the light generating element 118 is formed in the center of the holder 30. An inclined surface 32 that is inclined with respect to two adjacent sides is formed at a corner of the four corners of the holder 30 where the corner of the holding wall 31 is located.

6 is an external perspective view for explaining the supporting state of the light generating element 118 on the light projecting base 110b, and FIG. 7 is an enlarged view of the element supporting portion 13 as seen in the direction of the outlined arrow Q in FIG. is there. In FIG. 7, the holder 30 of FIG. 5 is shown by a thick dotted line in order to facilitate understanding of the support state of the light generating element 118. Further, the support wall 15, the holder 20 and the light generating element 118 in FIG. 5 are provided with different hatching or dot patterns.

With the light generating element 118 sandwiched between the two holders 20 and 30, the holder 20 is placed on the support surface 14 so that the inclined surface 32 of the holder 30 is located near the upper surface portion 12. .. In this state, the leaf spring 16 is provided so that its tip end contacts the inclined surface 32 and biases the inclined surface 32 toward the contact surface 15a and the inner side surface 15b of the support wall 15. There is. In FIG. 7, the direction in which the inclined surface 32 is biased by the leaf spring 16 is shown by a white arrow.

As a result, the light generating element 118 is supported by the element supporting portion 13, and the holding walls 21 and 31 of the holders 20 and 30 are sandwiched by the elastic force of the leaf spring 16 so as to sandwich the contact surface 15a of the supporting wall 15 and the contact surface 15a. It is biased and fixed in the direction toward the inner surface 15b.

Light emitted from any one of the plurality of light sources 111, 112, and 113 enters the opening 12o with the light generation element 118 supported by the light projecting base 110b. In this case, the light that has entered the opening 12o is reflected by the mirror 117 and guided to the light generation surface of the light generation element 118 as described above. Further, at least a part of the light guided to the light generation surface is reflected as structured light or uniform light, and is irradiated onto the measuring object S through the light projecting lens 119. In FIG. 6, the optical path of the light traveling in the light projecting base 110b is indicated by a two-dot chain line arrow.

(6) Change in Supporting State of Light Generation Element 118 Due to Temperature Change In the following description, at an arbitrary position away from the optical axis ax0 of the imaging unit 120, a direction facing the optical axis ax0 (direction approaching the optical axis ax0). Is called inward, and the opposite direction (direction away from the optical axis ax0) is called outward.

FIG. 8 is a diagram for explaining changes in the support state of the light generation element 118 due to temperature changes. In FIG. 8A, the supporting state of the light generating element 118 at the reference temperature is shown in a schematic side view together with the optical axis ax0 of the imaging unit 120. As shown in FIG. 8A, the light generating element 118 is supported on the supporting surface 14 of the element supporting portion 13 while being held by the holders 20 and 30 at the reference temperature. At this time, as shown by the white arrow in FIG. 8A, the inclined surface 32 of the holder 30 is biased at least in the direction toward the contact surface 15a. Thereby, the light generating element 118 is positioned so that the center of the light generating element 118 (the center of the light generating surface) is located on the optical axis ax1 of the light projecting lens 119.

When the temperature of the head unit 100 rises from the reference temperature, the light projecting base 110b expands according to the linear expansion coefficient of the light projecting base 110b. Further, the light generating element 118 expands according to the linear expansion coefficient of the light generating element 118. FIG. 8B is a schematic side view showing the support state of the light generating element 118 when the temperature rises, together with the optical axis ax0 of the imaging unit 120. The light projecting base 110b is connected to the imaging unit 120. Therefore, when the temperature of the head portion 100 rises from the reference temperature, the contact surface 15a of the element support portion 13 and the light projecting lens 119 move outward as compared with the case where the temperature is at the reference temperature. That is, the contact surface 15a of the element supporting portion 13 and the light projecting lens 119 move away from the optical axis ax0 as the light projecting base 110b expands.

On the other hand, since the linear expansion coefficient of the light generating element 118 is smaller than the linear expansion coefficient of the light projecting base 110b, the expansion degree of the light generating element 118 is smaller than the expansion degree of the light projecting base 110b. Therefore, as shown in FIG. 8B, the light generating element 118 is positioned relative to the light projecting base 110b so that the center of the light generating element 118 is located outside the optical axis ax1 of the light projecting lens 119. Move. The relative movement of the light generation element 118 with respect to the light projecting base 110b suppresses the accuracy deterioration of the height data due to the temperature increase. The reason for this will be described.

FIG. 9 is a diagram for explaining the change in the optical path of the structured light due to the temperature change of the head unit 100. FIG. 9A shows the positional relationship among the light generating element 118, the light projecting lens 119, and the image capturing section 120 at the reference temperature. FIG. 9B shows the positional relationship among the light generating element 118, the light projecting lens 119, and the imaging unit 120 at a temperature higher than the reference temperature.

As described above, the center of the light generating element 118 is located on the optical axis ax1 of the light projecting lens 119 when the head unit 100 is at the reference temperature. Therefore, as shown by the thick solid line arrow in FIG. 9A, the light emitted from the center of the light generation element 118 travels on the optical axis ax1 of the imaging unit 120 and is divided into two optical axes ax0 and ax1. The intersection point cp0 is reached. In this case, the reference plane R for calculating the height of the measuring object S is set so as to include the intersection point cp0 in FIG. 9A, for example.

When the temperature of the head unit 100 rises above the reference temperature, the light projecting lens 119 moves away from the optical axis ax0 of the imaging unit 120 as the light projecting base 110b expands. As a result, the position of the intersection point cp0 of the two optical axes ax0 and ax1 changes in the direction away from the imaging unit 120 (downward in this example), and the distance between the intersection point cp0 and the imaging unit 120 increases. As a result, as shown in FIG. 9B, the position of the intersection point cp0 moves below the reference plane R. Therefore, if the light emitted from the center of the light generation element 118 travels on the optical axis ax1, the light is irradiated on the reference plane R at a position deviated from the optical axis ax0. Therefore, accurate height data cannot be obtained by the same calculation method as at the reference temperature.

On the other hand, in the inspection device 300 according to the present embodiment, when the temperature of the head unit 100 rises, the center of the light generation element 118 is located outside the image pickup unit 120 with respect to the optical axis ax1 of the light projecting lens 119 (image pickup). Moving away from the part 120). In this case, as shown by the thick solid line arrow in FIG. 9B, the light emitted from the center of the light generating element 118 advances while being inverted by the light projecting lens 119 with the optical axis ax1 as a reference. Thereby, the light emitted from the center of the light generation element 118 reaches the point cp1 on the optical axis ax0, which is closer to the imaging unit 120 than the intersection point cp0.

In this case, the point cp1 is located on the reference plane R or at a position closer to the reference plane R than the intersection point cp0. In this example, the point cp1 exists on the reference plane R. Therefore, before and after the temperature change, the change amount of the optical path length of the light incident on the image sensor 121 from the center of the light generation element 118 via the reference plane R approaches 0. Further, the incident position on the image sensor 121 of the light incident on the image sensor 121 from the center of the light generating element 118 via the reference plane R approaches the incident position at the reference temperature. Other light that enters the imaging element 121 from the center other than the center of the light generation element 118 via the reference plane R also enters the imaging element 121 from the center of the light generation element 118 via the reference plane R. The same can be said of the light of. As a result, when the temperature of the head unit 100 rises, even if the same calculation method as that at the time of the reference temperature is used, the accuracy deterioration of the height data due to the temperature rise is suppressed.

(7) Effects of the Embodiment (a) As described above, in the head unit 100, the light generation element 118 is brought into contact with the light projecting base 110b so as to be separated from the optical axis ax0 of the imaging unit 120 by the leaf spring 16. It is biased in the direction toward the surface 15a.

As a result, when the temperature of the head portion 100 rises, the light generating element 118 having a small linear expansion coefficient is relatively outward with respect to the optical axis ax1 of the projection lens 119 supported by the projection base 110b having a large linear expansion coefficient. Moving. In this case, the amount of change in the optical path length of the structured light from the light generating element 118 to the imaging element 121 via the reference plane R approaches 0. Further, the incident position on the image sensor 121 of the light incident on the image sensor 121 via the reference plane R from any part of the light generation element 118 approaches the incident position before the temperature rise.

Therefore, the influence of the temperature rise of the head unit 100 on the height measurement of the measurement target S is offset by the relative movement of the light generating element 118 with respect to the light projecting base 110b. As a result, even when the temperature of the head unit 100 rises, it is possible to generate highly accurate height data without requiring complicated calculation processing.

(B) In the above head unit 100, the light generation element 118 is a DMD in the present embodiment. In this case, structured light is generated by reflecting at least part of the light emitted from the light sources 111, 112, 113 by the DMD. In addition, the structured light pattern can be easily and freely set.

(C) The element supporting portion 13 of the light projecting base 110b has a supporting surface 14 capable of supporting the holders 20 and 30. The holder 20 has a holding wall 21 formed so as to be capable of contacting the contact surface 15 a while being supported on the element supporting portion 13. The leaf spring 16 biases the light generating element 118 held by the holder 20 in the direction toward the contact surface 15a in a state where a part of the holding wall 21 contacts the contact surface 15a. In this way, the light generating element 118 is provided on the element supporting portion 13 of the light projecting base 110b while being held by the holders 20 and 30. This facilitates handling of the light generating element 118 when it is attached to the light projecting base 110b.

(D) The element support portion 13 has an inner side surface 15b that intersects the support surface 14 and extends at least from the contact surface 15a in the direction toward the image capturing section 120. The leaf spring 16 holds the holders 20 and 30 inside the inner surface 15b with a part of the holding wall 21 of the holder 20 abutting on the contact surface 15a and the other part of the holding wall 21 abutting on the inner surface 15b. Further urge towards. In this case, the relative movement of the holders 20 and 30 with respect to the light projecting base 110b is restricted in the direction in which the inner surface 15b extends, that is, in the direction from the contact surface 15a to the image capturing unit 120. Therefore, when the temperature of the head unit 100 rises and the light projecting base 110b expands, the light generating element 118 can be accurately moved in the direction away from the imaging unit 120.

(E) In the head unit 100, a plurality of light emitting/receiving systems for generating height data and color texture image data are compactly housed in the head casing 100c. Therefore, the head unit 100 can be downsized, and the installation space for the head unit 100 can be reduced. Further, handling such as installation of the head unit 100 becomes easy.

(8) Modified Example The head unit 100 includes one illumination unit 110 and one imaging unit 120, but the present invention is not limited to this. FIG. 10 is a block diagram showing the configuration of the inspection device 300 according to the modification. As shown in FIG. 10, the head unit 100 in the modified example includes four illumination units 110. In addition, in FIG. 10, the illustration of the calculation unit 130 is omitted.

In the following description, when distinguishing the four illumination units 110, the four illumination units 110 are referred to as illumination units 110A to 110D, respectively. The illumination units 110A to 110D have the same structure and are provided so as to surround the imaging unit 120 at 90-degree intervals. Specifically, the illuminating section 110A and the illuminating section 110B are arranged so as to face each other with the imaging section 120 interposed therebetween. Further, the illumination unit 110C and the illumination unit 110D are arranged so as to face each other with the imaging unit 120 interposed therebetween. Further, the four illumination units 110A to 110D and the image capturing unit 120 are housed in the head casing 100c together with the calculation unit 130.

In this configuration, the four illumination units 110A to 110D can emit light to the measurement target S from four different directions. Therefore, even if there is a portion that cannot be measured by the light emitted from any one of the illumination units 110, the shape of the portion that cannot be measured is measured using the light emitted from another illumination unit 110. You can Therefore, by combining the height data generated corresponding to each of the four illumination units 110A to 110D, it is possible to generate combined height data in which unmeasurable portions are further reduced. Further, by combining the color texture image data generated corresponding to the four illumination units 110A to 110D, it is possible to generate color texture image data in which the unmeasurable portion is further reduced.

(9) Other Embodiments (a) In the above embodiment, the light projecting base 110b is made of aluminum and the package of the light generating element 118 is made of aluminum oxide, but the present invention is not limited to this. ..

The metal material forming the light emitting base 110b has a linear expansion coefficient larger than that of the material forming the package of the light generating element 118, and is a metal material other than aluminum (for example, copper, iron, stainless steel, or the like). ). Further, the material forming the package of the light generating element 118 has a linear expansion coefficient smaller than that of the metal material forming the light projecting base 110b, and a material other than aluminum oxide (for example, aluminum nitride or the like). May be

(B) In the above embodiment, the light generating element 118 is attached to the light projecting base 110b while being held by the holders 20 and 30, but the present invention is not limited to this. The light generating element 118 may be directly attached to the element supporting portion 13 of the light projecting base 110b without using the holders 20 and 30. In this case, the leaf spring 16 directly urges the light generating element 118 in the direction toward the contact surface 15a.

(C) In the above-described embodiment, the element supporting portion 13 is provided with the contact surface 15a so as to receive the light generating element 118 and the holders 20 and 30 that are biased in the direction away from the image capturing section 120. The invention is not limited to this. The element supporting portion 13 may be formed with one or a plurality of protrusions that receive the light generating element 118 and the holders 20 and 30 instead of the contact surface 15a.

(D) In the above embodiment, the leaf spring 16 is used as a structure for urging the light generating element 118 toward the contact surface 15a and fixing the light generating element 118 to the light projecting base 110b. However, the present invention is not limited to this. Instead of the leaf spring 16, a coil spring or another elastic body such as rubber may be used as a structure for urging the light generating element 118 in the direction toward the contact surface 15a.

(E) In the above embodiment, the light source base 110a, the light projecting base 110b, and the light receiving base 120a are connected via the connecting member JT, but the light source base 110a, the light projecting base 110b, and the light receiving base 120a are mutually connected. It may be directly connected.

(F) The element supporting portion 13 of the light projecting base 110b may be provided with a heat radiating plate that radiates heat from the light generating element 118.

(10) Correspondence between each component of the claims and each part of the embodiment An example of the correspondence between each component of the claim and each part of the embodiment will be described below. In the above embodiment, the measuring object S is an example of the measuring object, the light sources 111, 112, 113 are examples of the light source, the light generating element 118 is an example of the light generating element, and the optical axis ax1 is This is an example of the first optical axis, the light projecting lens 119 is an example of a light projecting lens and a light projecting optical system, and the light projecting base 110b is an example of a light projecting base.

Further, the optical axis ax0 is an example of a second optical axis, the light receiving lenses 122 and 123 are examples of a light receiving lens and a light receiving optical system, the image pickup device 121 is an example of an image pickup device, and the leaf spring 16 is a fixing member. The contact surface 15a of the element support portion 13 is an example of the contact portion, and the inspection device 300 is an example of the inspection device.

The holders 20 and 30 are examples of holders, the support surface 14 is an example of a support surface, and the portion of the holding wall 21 along the short side of the holder 20 is an example of an abutted portion. The inner side surface 15b of the support portion 13 is an example of a guide surface, the other portion of the holding wall 21 along the long side of the holder 20 is an example of a guided portion, and the light receiving base 120a is an example of a light receiving base. The light source base 110a is an example of a light source base, the mirror 117 is an example of a reflecting member, and the head casing 100c is an example of a casing.

As each constituent element of the claims, various other elements having the configurations or functions described in the claims can be used.

11... Outermost part, 12... Top surface part, 12o, 14o... Opening, 13... Element support part, 14... Support surface, 15... Support wall, 15a... Abutment surface, 15b, 15c... Inner side surface, 16... Leaf spring, 20, 30... Retaining tool, 21, 31... Retaining wall, 28, 38... Upper surface, 29, 39... Lower surface, 32... Inclined surface, 100... Head section, 100c... Head casing, 110, 110A to 110D... Illuminating section, 110a... Light source base, 110b... Projection base, 111, 112, 113... Light source, 114, 115... Dichroic mirror, 116... Illumination lens, 117... Mirror, 118... Light generation element, 119... Projection lens, 120... Imaging Part, 120a... Receiving base, 121... Imaging element, 122, 123... Receiving lens, 130... Arithmetic unit, 131... Imaging processing unit, 132... Arithmetic processing unit, 133... Storage unit, 134... Output processing unit, 200... Controller Reference numeral 210... Head control unit, 220... Image memory, 230... Inspection unit, 300... Inspection device, 301... Belt conveyor, 310... Operation unit, 320... Display unit, 400... External device, R... Reference plane, S... Measurement object, ax0, ax1... Optical axis

Claims (6)

A light source,
A light generating element that receives the light emitted from the light source and generates structured light;
A light projecting optical system including a light projecting lens having a first optical axis, and irradiating the object to be measured with the structured light generated by the light generating element through the light projecting lens.
A light projecting base which is made of a metal having a linear expansion coefficient larger than that of the light generating element and which supports the light generating element and the light projecting lens;
A light receiving optical system including a light receiving lens having a second optical axis that intersects the first optical axis and connected to the light projecting base;
An imaging device that generates pattern image data indicating an image of the measurement target by receiving structured light reflected from the measurement target in the direction of the second optical axis through the light receiving optical system,
A fixing member for fixing the light generating element to the light projecting base,
The light projecting base has an abutting portion which is separated from the second optical axis and faces the second optical axis,
The fixing member is preset from the light generating element when the distance between the light projecting optical system and the second optical axis increases due to expansion of the light projecting base due to temperature rise. Light incident on the image pickup element from any portion of the light generation element via the reference plane such that the amount of change in the optical path length of the structured light reaching the image pickup element via the reference plane approaches 0. 2. The inspection device for urging the light generating element in a direction toward the contact portion so as to move away from the second optical axis so that the incident position on the image pickup element approaches the incident position before the temperature rise. The inspection apparatus according to claim 1, wherein the light generation element is a digital micromirror device. Further comprising a holder formed to be able to hold the light generating element,
The light emitting base has a support surface capable of supporting the holder,
The holder has a contacted portion formed so as to be capable of contacting the contact portion in a state of being supported on the support surface of the light emitting base,
The fixing member is configured to project the light generating element held by the holder in a direction toward the contact portion in a state where the contacted portion is in contact with the contact portion. The inspection apparatus according to claim 1, which is provided on the base. The light projecting base further has a guide surface that intersects with the support surface and extends from the contact portion in a direction toward the second optical axis.
The holder has a guided portion which is supported on the supporting surface of the light projecting base and is formed so as to be able to come into contact with the guide surface in a state where the abutted portion is in contact with the abutting portion. ,
The fixing member further urges the holder in a direction toward the guide surface with the contacted portion in contact with the contact portion and the guided portion in contact with the guide surface. The inspection device according to claim 3, wherein the inspection device is provided on the light projecting base. A light receiving base that supports the image pickup element and supports the light receiving lens so that the second optical axis extends in the vertical direction;
A light source base that supports the light source so that the light emitted from the light source travels downward from above;
And a reflecting member for reflecting light emitted from the light source and traveling downward from above to obliquely upward so as to move away from the second optical axis,
The light generating element is configured to generate structured light by reflecting at least a portion of the light reflected by the reflective member,
The light projecting base supports the reflecting member, and the light generating element is configured so that the structured light generated by the light generating element travels obliquely downward toward the second optical axis of the light receiving lens. The inspection device according to any one of claims 1 to 4, which supports the inspection device. Further comprising a casing that houses the light emitting base, the light receiving base, and the light source base,
The inspection device according to claim 5, wherein the light emitting base, the light receiving base, and the light source base are fixed inside the casing.

Images