JP2020094620A - Vibration elimination structure - Google Patents

Abstract

To provide a vibration elimination structure capable of damping vibration on early stage and surely in simple structure.SOLUTION: A vibration elimination structure 1 is constituted of a mount part 5, a device 9 that is a vibration elimination object, etc. The mount part 5 is disposed on both sides in a view from a front side of the device 9 and supports the device 9 via a loading board 7. A spring part 10 of the mount part 5 is constituted of a round wire coil spring 11 which performs vibration elimination in a vertical direction, a deformed wire coil spring 13 which performs vibration elimination in a horizontal direction, etc. A spring receiver 19 covers an upper portion of the round wire coil spring 11, and the deformed wire coil spring 13 is disposed in a recess 27 which is provided in a center of the spring receiver 19. Namely, the deformed wire coil spring 13 is disposed at an upper side of the round wire coil spring 11 and at an internal side of the round wire coil spring 11. A damper 21 is attached between a lower pedestal 15 and the spring receiver 19 and damps vibration. The damper 21 is disposed only outside of a portion which does not face a spring part 10 of the other mount part 5, in the spring part 10.SELECTED DRAWING: Figure 1

Description

The present invention relates to a vibration isolation structure.

Conventionally, when it is not desired to transmit the vibration from the floor or the table to the mechanical device that is the vibration isolation target, a vibration isolation structure for isolating the vibration is used.

As such an anti-vibration structure, for example, an anti-vibration mount that suppresses vertical vibration and horizontal vibration has been proposed (for example, see Patent Document 1).

JP, 2002-174295, A

When the object of vibration isolation is a precision device such as an electron microscope, the performance and function of the device cannot be fully exhibited when affected by vibration transmitted from the floor or the like. Therefore, it is necessary to reduce the vibration at a low frequency by the coil spring and to surely activate the damper mechanism of the vibration damping structure to damp the vibration early. Therefore, a conventional vibration isolation structure is generally one in which a coil spring and a damper mechanism for suppressing and damping free vibration of the coil spring are provided in parallel.

However, the inventor of the present invention exhibits the performance against the displacement of the coil spring. Therefore, when the coil spring is inclined and the displacement is biased, the damping effect may not be sufficiently utilized depending on the position of the damper mechanism. I found that.

The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a vibration isolation structure capable of quickly and reliably damping vibration with a simple structure.

In order to achieve the above-mentioned object, the present invention comprises a vibration isolation target, and mount parts that are disposed on both sides of the vibration isolation target when viewed from the front, and that support the vibration isolation target. The mount portion includes a spring portion that performs horizontal and vertical vibration isolation, and a damper portion that damps vibrations, and the damper portion is one of the spring portions when viewed from above the vibration isolation target. The vibration isolation structure is characterized in that it is arranged only outside a portion of the mount portion that does not face the spring portion.

The mounts that support the object to be isolated are arranged on both sides when viewed from the front of the object to be isolated, and the damper part of the mount is the spring of the other mount of the springs when viewed from above the object to be isolated. By arranging only on the outside of the portion that does not face the portion, the damping effect of the damper mechanism can be sufficiently utilized even when the coil spring is inclined and the degree of contraction is biased. Further, the vibration can be damped quickly and surely with a simple structure.

The spring portion is a round wire coil spring or a modified wire coil spring, and a plurality of spring parts are arranged above the round wire coil spring or the modified wire coil spring and inside the round wire coil spring or the modified wire coil spring. It is desirable to use a modified wire coil spring.
As a result, the round wire coil spring or the deformed wire coil spring and the damper portion can suppress the vertical shaking, and the deformed wire coil spring can suppress the horizontal shaking.

The round wire coil spring or the modified wire coil spring of the spring portion may be an air spring.
As a result, the amount of air can be adjusted to level the mount.

According to the present invention, it is possible to provide a vibration isolation structure capable of quickly and reliably damping vibration with a simple structure.

Elevation of vibration isolation structure 1 Top view of vibration isolation structure 1 Elevation view of mount 5 (5a) Elevation view of mount 5 (5a) Diagram showing the mount 5 when external force is applied The figure which shows the mount part 5'when an external force is applied.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is an elevational view of a vibration isolation structure 1. FIG. 2 is a plan view of the vibration isolation structure 1. FIG. 1 is a view of the vibration isolation structure 1 viewed from the direction of arrow A shown in FIG. 2, that is, a view of the apparatus 9 viewed from the front. FIG. 2 is a view of the vibration isolation structure 1 viewed from above. As shown in FIGS. 1 and 2, the vibration isolation structure 1 includes a mount portion 5, a mounting board 7, a device 9 that is an object of vibration isolation, and the like. The vibration isolation structure 1 is installed on the workbench 3, for example.

As shown in FIG. 1, the mount portions 5 are arranged on both sides of the device 9 when viewed from the front side. That is, the mount portions 5 are arranged on the left and right sides of the device 9. As shown in FIG. 2, the mount portion 5 is composed of two mount portions 5a arranged on the left side and two mount portions 5b arranged on the right side when viewed from the front side of the device 9. The mount portion 5 is arranged so as not to protrude from the depth 8 of the device 9 when viewed from above. The mounting board 7 is installed on the four mount parts 5. The device 9 is mounted on the mounting board 7 and supported by the mount section 5.

3 and 4 are elevation views of the mount portion 5 (5a). However, in FIG. 4, the spring portion 10 is shown as a vertical cross section. As shown in FIGS. 3 and 4, the mount portion 5 includes a spring portion 10, a lower pedestal 15, an upper pedestal 17, a damper 21, a mounting portion 23 and the like.

The spring portion 10 is arranged so as to be sandwiched between a lower pedestal 15 and an upper pedestal 17 which are installed on the workbench 3. The spring portion 10 includes a round wire coil spring 11, a deformed wire coil spring 13, and a spring bearing 19.

The round wire coil spring 11 performs vibration isolation in the vertical direction. One round wire coil spring 11 is provided for one mount unit 5. The round wire coil spring 11 is arranged on the lower pedestal 15, and the lower end portion is fixed to the lower pedestal 15. A spring receiver 19 is placed on the upper part of the round wire coil spring 11. The upper end of the round wire coil spring 11 is fixed to the spring bearing 19.

The deformed wire coil spring 13 is a strong spring having a diameter smaller than that of the round wire coil spring 11 and performs vibration isolation in the horizontal direction. For example, two deformed wire coil springs 13 are provided for one mount portion 5. The deformed wire coil spring 13 is arranged in a recess 27 provided in the center of the spring receiver 19. That is, it is arranged above the round wire coil spring 11 and inside the round wire coil spring 11. The lower end of the deformed wire coil spring 13 is fixed to the bottom surface of the recess 27. The deformed wire coil spring 13 has a height larger than the depth of the recess 27, and an upper end thereof is fixed to the upper pedestal 17.

The damper 21 is a damper unit that damps vibration. One damper 21 is provided for each mount 5. The lower end of the damper 21 is fixed to the lower pedestal 15, and the upper end of the damper 21 is attached to the spring bearing 19 via the attaching portion 23. The damper 21 is, for example, an oil damper, a friction damper, a viscoelastic body, or the like.

As shown in FIGS. 1 and 2, the damper 21 includes another mount portion 5 of the spring portion 10 (the other mount portion 5a and the two mount portions 5b of the mount portion 5a are viewed from above the device 9). The mounting portion 5b is arranged only outside the portions of the two mounting portions 5a and the other mounting portion 5b) which do not face the spring portion 10. The portion of the spring portion 10 that does not face the spring portion 10 of the other mount portion 5 is the spring portion 10 of the two mount portions 5 that are adjacent to each other in the direction of the depth 8 when the spring portion 10 viewed from above the device 9 is used. Of the vibration isolation structure 1 of the four parts divided by the line passing through the center of the spring portion 10 of the two mount portions 5 that are adjacent to each other in the direction orthogonal to the depth 8 with the device 9 interposed therebetween. The damper 21 is located on the corner side and has a range of 90 degrees, and the damper 21 is arranged only outside this part of the spring portion 10. In particular, the damper 21 is preferably arranged outside the center of the 90° range portion (on the opposite side of the mounting portion on the diagonal line of the device 9). That is, it is desirable that the damper 21 be arranged near a corner portion of a quadrangle surrounding the spring portions 10 of the four mount portions 5.

When a horizontal external force is applied to the vibration isolation structure 1, the mount parts 5a and 5b are displaced. FIG. 5 is a diagram showing the mount portion 5 when an external force is applied. 5(a) and 5(b) respectively correspond to the mount portion 5a and the mount portion 5b arranged diagonally of the device 9 shown in FIG. When an external force is applied in the direction of arrow B shown in FIG. 5, the mount portion 5b moves in the lifting direction and the mount portion 5a moves in the crushed direction around the device 9.

At this time, the damper 21a contracts in the mount portion 5a and the damper 21b extends in the mount portion 5b, so that a damping force that suppresses the vibration of the round wire coil spring 11 is exerted according to the displacement amount.

On the other hand, the inventor has found that the tilting of the mount portions 5a and 5b itself occurs along with the movement of the entire mount portions 5a and 5b to expand or contract, which affects the damping force. More specifically, as shown in FIG. 5, when a horizontal external force is applied to the vibration isolation structure 1, both the mount parts 5a and 5b rotate leftward.

That is, if only the rotation operation of each mount itself is taken into consideration, the left side (outside of the device 9) of the mount 5a contracts, but the right side of the mount 5a (device 9 side) displaces in the extending direction. Similarly, if only the rotating operation is taken into consideration, the right side of the mount 5b (outside when viewed from the device 9) extends, but the left side of the mount 5a (device 9 side) displaces in the contracting direction.

Here, FIG. 6 is a diagram showing the mount portion 5 ′ when an external force is applied. The mount portion 5a' shown in FIG. 6(a) is obtained by adding a damper 21a' to the mount portion 5a shown in FIG. 5(a). The mount portion 5b' shown in FIG. 6B is obtained by adding a damper 21b' to the mount portion 5b shown in FIG. 5B. The dampers 21a' and 21b' are arranged so as to face the dampers 21a and 21b with the spring portion 10 interposed therebetween. The dampers 21a' and 21b' are arranged on the device 9 side when the vibration isolation structure 1 is viewed from above as shown in FIG.

When an external force is applied from the right side of FIG. 6 to the vibration isolation structure having the mount section 5′ shown in FIG. 6 instead of the mount section 5, an unbalanced load is applied in the left direction of FIG. The coil spring 11 tilts. As a result, both the mount parts 5a′ and 5b′ rotate to the left as shown in FIG. 6, the mount part 5a′ moves as a whole in the crushing direction, the mount part 5b′ moves in the lifting direction, and the mount parts 5a′, With 5b', they themselves rotate to the left.

When the mount portion 5a' operates in this manner, the damper 21a on the left side (outside when viewed from the device 9) of the mount portion 5a' has a contraction amount in relation to the mount portion 5b' and the rotation of the mount portion 5a' itself. The amount of contraction in the operation is superimposed, resulting in a larger amount of displacement.

On the other hand, in the damper 21a′ on the right side (on the device 9 side) of the mount portion 5a′, the amount of contraction in relation to the mount portion 5b′ is offset by the amount of extension in the rotational movement of the mount portion 5a′ itself, and the displacement amount. Becomes smaller. That is, the difference in the length 25a of the damper 21a on the left side (outside when viewed from the device 9) of the mount portion 5a' with respect to the length of the damper in the equilibrium state is the damper 21a on the right side (on the device 9 side) of the mount portion 5a'. It becomes larger than the difference of'length 25a'.

Similarly, in the damper 21b on the right side of the mount portion 5b' (outside when viewed from the device 9), the extension amount in relation to the mount portion 5a' and the extension amount in the rotation operation of the mount portion 5b' are superimposed. , And a larger displacement amount.

On the other hand, in the damper 21b′ on the left side (device 9 side) of the mount portion 5b′, the amount of expansion in relation to the mount portion 5a′ is offset by the amount of contraction in the rotational movement of the mount portion 5b′ itself, and the displacement amount. Becomes smaller. That is, the difference between the length of the damper in the equilibrium state and the length 25b of the damper 21b on the right side (outside when viewed from the device 9) of the mount portion 5b' is the damper 21b on the left side (on the device 9 side) of the mount portion 5b'. It becomes larger than the difference of'length 25b'.

Here, in general, the damping force of the damper can be obtained by the displacement amount thereof. That is, a larger damping force can be exerted for a larger displacement amount.

Considering this point, the damper 21a' arranged inside the mount portion 5a' cannot exhibit a large damping force, and similarly, the damper 21b' arranged inside the mount portion 5b' does not exhibit a large damping force. Can't exert. On the other hand, the damper 21a arranged outside the mount portion 5a' can exhibit a large damping force, and similarly, the damper 21b arranged outside the mount portion 5b' can exhibit a large damping force. In this way, the effect differs depending on the damper position.

Therefore, in the present embodiment, the mounts 5 are arranged on both sides when viewed from the front of the device 9, and the dampers 21 of the mounts 5 are mounted on the springs of the other mounts 5 of the springs 10 when viewed from above the device 9. It is arranged only outside the portion that does not face the portion 10. That is, the dampers 21 are arranged near the corners of a quadrangle surrounding the spring portions 10 of the four mount portions 5. As a result, even if the round wire coil spring 11 is tilted due to a horizontal force applied to the device 9, the damping effect of the damper 21 can be fully utilized and the vibration can be damped quickly and reliably. In FIG. 5, as an example, the case where the horizontal force is applied to the device 9 in the substantially diagonal direction of FIG. 2 is shown. However, when the horizontal force is applied in any of the front, rear, left, and right directions of FIG. A damping effect can be obtained.

As described above, according to the present embodiment, the damper 21 is disposed only on the outside of the portion of the spring portion 10 that does not face the spring portion 10 of the other mount portion 5 when viewed from above the apparatus 9, and the damper 9 is provided with the simple structure. It is possible to obtain the same damping effect as that of the mount portion 5'where the damper 21' is arranged on the side. Further, since the dampers 21a' and 21b' are not necessary, it is possible to obtain a small-sized and low-cost vibration isolator with a small number of parts.

In the present embodiment, the spring portion 10 is formed by combining the one round wire coil spring 11 and the two deformed wire coil springs 13, but the number of the deformed wire coil springs 13 is not particularly limited, and for example, It may be three or more.

An air spring may be used for the spring portion of the mount portion 5. By using the air spring, it is possible to damp fine vibrations that cannot be absorbed by the metal spring. Further, the mount portion 5 can be leveled by adjusting the amount of air.

The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to these examples. It is obvious to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and it is obvious that they also belong to the technical scope of the present invention. Understood.

1…………Vibration isolation structure 3…………Workbench 5, 5a, 5b, 5′, 5a′, 5b′…………Mounting unit 7…………Mounting board 8…………Depth 9…………Device 10… ……Spring part 11 ……Round wire coil spring 13 ……Deformed wire coil spring 15 ……Lower pedestal 17 …………Upper pedestal 19 …………Spring bearing 21, 21a, 21b, 21a', 21b'… ......Damper 23 ............Mounting part 25a, 25b, 25a', 25b' ...... Length 27 ...... Recess

Claims (3)

With the vibration isolation target,
Mounted parts arranged on both sides when viewed from the front of the vibration isolation target, and supporting the vibration isolation target,
Equipped with,
The mount portion has a spring portion for performing horizontal and vertical vibration isolation, and a damper portion for damping the vibration,
The vibration isolation structure, wherein the damper portion is arranged only outside a portion of the spring portion that does not face a spring portion of another mount portion when viewed from above the vibration isolation target. The spring portion is a round wire coil spring or a modified wire coil spring, and a plurality of spring parts are arranged above the round wire coil spring or the modified wire coil spring and inside the round wire coil spring or the modified wire coil spring. 2. The vibration isolating structure according to claim 1, wherein the vibration isolating coil spring comprises The vibration isolation structure according to claim 1, wherein the round wire coil spring or the deformed wire coil spring of the spring portion is an air spring.

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