JP2020091584A - Automatic inspection system for machined products - Google Patents

Automatic inspection system for machined products Download PDF

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JP2020091584A
JP2020091584A JP2018227339A JP2018227339A JP2020091584A JP 2020091584 A JP2020091584 A JP 2020091584A JP 2018227339 A JP2018227339 A JP 2018227339A JP 2018227339 A JP2018227339 A JP 2018227339A JP 2020091584 A JP2020091584 A JP 2020091584A
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inspection
automatic
dimensional measurement
automatic warehouse
processed product
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JP7260293B2 (en
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優弥 宮原
Yuya Miyahara
優弥 宮原
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Fanuc Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

To provide an automatic inspection system for machined products capable of automating various types of inspections, such as appearance inspection and three-dimensional measuring inspection of machined products, as one process on a production process line and of improving the efficiency of inspection processes of machined products.SOLUTION: An automatic inspection system for machined products comprises an automatic warehouse 1 for appearance inspection, etc. that stores a machined product W that is an object of measuring inspection for conducting at least cleaning and appearance inspection, an automatic warehouse 3 for three-dimensional measurement that stores a machined product W that is an object of measuring inspection by a three-dimensional measuring machine 2, an automatic carrier unit 4 that automatically transports the machined product W between the automatic warehouse 1 for appearance inspection, etc. and the automatic warehouse 3 for three-dimensional measurement, an area R1 for appearance inspection, etc. that the machined product W is automatically transported to/from the automatic warehouse 1 for appearance inspection, etc., and a three-dimensional measuring area R2 that has a robot for three-dimensional measurement transporting the machined product W to/from the automatic warehouse 3 for three-dimensional measurement and is provided adjacent to the automatic warehouse 3 for three-dimensional measurement.SELECTED DRAWING: Figure 1

Description

本発明は、加工品の自動検査システムに関する。 The present invention relates to an automatic inspection system for processed products.

従来、工作機械で加工した加工品は、バリ取り作業、洗浄作業を行った後、外観検査、ネジ検査、三次元測定検査などの各種検査を実施する。これにより、不良品を排除し、信頼性の高い加工品を製品として出荷できるようにしている。 Conventionally, a machined product processed by a machine tool is subjected to various inspections such as visual inspection, screw inspection, and three-dimensional measurement inspection after deburring work and cleaning work. As a result, defective products are eliminated, and processed products with high reliability can be shipped as products.

ここで、特許文献1には、ある定められた運転を行なう組立製品の寸法ならびに形状精度検査を行なう寸法、形状精度測定装置と運転状態を模擬して組立製品のある定められた種々の性能検査を、各検査項目毎にユニット構成された装置を単独又は複数ユニットで適宜組み合わせて検査を行なう運転検査装置で構成される装置で、自動的に検査を行ない、検査成績データの出力、合格又は不合格の判定ならびに不合格原因の診断機能を有する製品検査装置が開示されている。 Here, in Patent Document 1, the dimensions of an assembled product that performs a predetermined operation and the dimensions that perform a shape accuracy inspection, a shape accuracy measuring device, and an operating state are simulated, and various predetermined performance tests of an assembly product are performed. Is a device composed of an operation inspection device that performs an inspection by combining a device configured for each inspection item alone or in a plurality of units as appropriate, and automatically inspects, outputs inspection result data, passes or fails. There is disclosed a product inspection device having a function of judging pass and a cause of failure.

特許文献2には、検査対象物体を載置して少なくとも一方向に連続的に移動させながら検査対象物体を撮像して検査対象物体の表面のテクスチャ情報を含む検査対象物体の画像を取得しながら検査対象物体の表面凹凸情報を取得し、この取得した検査対象物体の表面凹凸情報から検査対象物体の立体形状を復元し、取得した画像と復元した検査対象物体の立体形状とから表面テクスチャを持った物体の外観情報を得、この得られた外観情報から複数の特徴を抽出し、この抽出した複数の特徴のうち少なくとも1つの特徴を予め設定した参照データの前記少なくとも1つの特徴に対応する特徴と比較して検査対象となる物体の外観を評価するようにした外観検査装置が開示されている。 In Patent Document 2, while the inspection target object is placed and continuously moved in at least one direction, the inspection target object is imaged to acquire an image of the inspection target object including texture information of the surface of the inspection target object. Acquires the surface unevenness information of the inspection target object, restores the three-dimensional shape of the inspection target object from the acquired surface unevenness information of the inspection target object, and has the surface texture from the acquired image and the restored three-dimensional shape of the inspection target object. The appearance information of the object is obtained, a plurality of features is extracted from the obtained appearance information, and at least one of the extracted features corresponds to the at least one feature of the reference data set in advance. There is disclosed an appearance inspection device configured to evaluate the appearance of an object to be inspected in comparison with.

特許文献3には、エンジンシリンダなどの被検査円筒物体の内面に加工油や洗浄液が付着していたりしても、高速で、鋳巣、傷、汚れ等の欠陥を検査できるようにした欠陥検査装置であって、被検査円筒物体の内面に残っている残留液を洗浄する洗浄部と、洗浄部で洗浄した被検査円筒物体の内面の2次元画像を検出する光学系と、光学系で検出された2次元画像を基づいて鋳巣欠陥、加工穴の輪郭近傍欠陥、加工傷欠陥、汚れ欠陥等の情報を取得する画像処理部と、画像処理部で取得された欠陥の情報を出力する出力部とを備えた検査装置が開示されている。 In Patent Document 3, even if working oil or cleaning liquid adheres to the inner surface of an inspected cylindrical object such as an engine cylinder, a defect inspection capable of inspecting defects such as porosity, scratches, dirt, etc. at high speed. The device is a device for cleaning the residual liquid remaining on the inner surface of the inspected cylindrical object, an optical system for detecting a two-dimensional image of the inner surface of the inspected cylindrical object cleaned by the cleaning unit, and an optical system for detection. An image processing unit that acquires information such as a blowhole defect, a defect near the contour of a machined hole, a machining defect defect, and a stain defect based on the obtained two-dimensional image, and an output that outputs information of the defect acquired by the image processing unit And an inspection apparatus including a unit.

特開昭58−97614号公報JP-A-58-97614 特開2013−29350号公報JP, 2013-29350, A 特開2005−121450号公報JP, 2005-121450, A

一方、特許文献1、特許文献2、特許文献3においては、単に加工品の外観検査や三次元測定検査を行う装置が示されているだけであり、基本的に、検査者が一つずつ加工品をテーブルに載せるなどして各検査を行ってゆく作業を繰り返して対応しなければならない。このため、特許文献1、特許文献2、特許文献3では、各種検査を生産工程のライン上の一工程として自動化することができず、加工品の検査をシステマチックにして十分に効率化することができない。 On the other hand, in Patent Document 1, Patent Document 2 and Patent Document 3, only an apparatus for performing visual inspection and three-dimensional measurement inspection of the processed product is shown, and basically, the inspector processes each one. It is necessary to repeat the work of carrying out each inspection such as placing the item on the table. Therefore, in Patent Document 1, Patent Document 2, and Patent Document 3, various inspections cannot be automated as one process on the production line, and the inspection of the processed product should be systematic and sufficiently efficient. I can't.

本発明は、上記事情に鑑み、加工品の外観検査や三次元測定検査などの各種検査を生産工程のライン上の一工程として自動化することができ、加工品の検査工程を効率化することを可能にする加工品の自動検査システムを提供することを目的とする。 In view of the above circumstances, the present invention can automate various inspections such as appearance inspection and three-dimensional measurement inspection of a processed product as one process on the line of the production process, and improve the efficiency of the processed product inspection process. It is an object to provide an automatic inspection system for processed products that enables it.

本発明者は、加工品の外観検査や三次元測定検査などの各種検査を自動的に行い、加工品の検査を十分に効率化する手段を見出し、本発明を完成するに至った。 The inventor of the present invention has completed the present invention by finding means for automatically performing various inspections such as a visual inspection and a three-dimensional measurement inspection of a processed product and sufficiently improving the inspection of the processed product.

(1)本発明は、少なくとも洗浄と外観検査を行う測定検査対象の加工品(例えば、後述の加工品W)を格納する外観検査等用自動倉庫(例えば、後述の外観検査等用自動倉庫
)と、三次元測定機(例えば、後述の三次元測定機2)による測定検査対象の前記加工品を格納する三次元測定用自動倉庫(例えば、後述の三次元測定用自動倉庫3)と、前記外観検査等用自動倉庫と前記三次元測定用自動倉庫の間で前記加工品を自動的に搬送する自動搬送部(例えば、後述の自動搬送部4)と、少なくとも洗浄装置(例えば、後述の洗浄装置10)と外観検査装置(例えば、後述の外観検査用ロボット16、撮像装置18)を有し、前記外観検査等用自動倉庫に隣接して設けられ、前記外観検査等用自動倉庫との間で自動的に前記加工品が搬送される外観検査等領域(例えば、後述の外観検査等領域R1)と、前記三次元測定機と前記三次元測定用自動倉庫との間で前記加工品を搬送する三次元測定用ロボット(例えば、後述の三次元測定用ロボット36)を有し、前記三次元測定用自動倉庫に隣接して設けられた三次元測定領域(例えば、後述の三次元測定領域R2)とを備えることを特徴とする。
(1) The present invention relates to an automatic warehouse for a visual inspection or the like (for example, an automatic warehouse for a visual inspection or the like described later) that stores a processed product (for example, a processed product W to be described later) that is subjected to at least cleaning and visual inspection. And an automatic warehouse for three-dimensional measurement (for example, an automatic warehouse 3 for three-dimensional measurement described later) that stores the workpiece to be measured and inspected by a three-dimensional measuring machine (for example, three-dimensional measurement instrument 2 described below), An automatic transfer unit (for example, an automatic transfer unit 4 described later) that automatically transfers the processed product between an automatic warehouse for appearance inspection and the like and the automatic warehouse for three-dimensional measurement, and at least a cleaning device (for example, a cleaning unit described later). A device 10) and a visual inspection device (for example, a visual inspection robot 16 and an image pickup device 18 described later) are provided adjacent to the visual inspection automatic warehouse, and between the visual inspection automatic warehouse. And the area where the processed product is automatically conveyed (for example, an appearance inspection area R1 described later), and the processed product is conveyed between the coordinate measuring machine and the automatic warehouse for three-dimensional measurement. A three-dimensional measurement robot (for example, a three-dimensional measurement robot 36 described later) that is provided, and a three-dimensional measurement region (for example, a three-dimensional measurement region R2 described later) provided adjacent to the automatic warehouse for three-dimensional measurement. ) And are provided.

本発明によれば、加工品の外観検査や三次元測定検査などの各種検査を自動的に行うことができ、加工品の検査工程を効率化することが可能になる。 According to the present invention, various inspections such as a visual inspection and a three-dimensional measurement inspection of a processed product can be automatically performed, and the processed product inspection process can be made efficient.

本発明の一実施形態に係る加工品の自動検査システムを示す図である。It is a figure which shows the automatic inspection system of the processed product which concerns on one Embodiment of this invention. 本発明の一実施形態に係る加工品の自動検査システムの外観検査等領域を示す斜視図である。It is a perspective view showing a visual inspection etc. field of an automatic inspection system of a processed product concerning one embodiment of the present invention. ネジ自動検査システムのネジ検査装置を示す斜視図である。It is a perspective view showing a screw inspection device of an automatic screw inspection system. 通りゲージを用いたネジ孔検査を示す図である。It is a figure which shows the screw hole inspection using a passing gauge. 止まりゲージを用いたネジ孔検査を示す図である。It is a figure which shows the screw hole inspection using a dead end gauge. ネジ自動検査システムの制御装置を示すブロック図である。It is a block diagram showing a control device of a screw automatic inspection system. 本発明の一実施形態に係る加工品の自動検査システムの制御システムの一部を示すブロック図である。It is a block diagram which shows a part of control system of the automatic inspection system of the processed product which concerns on one Embodiment of this invention. 本発明の一実施形態に係るネジ自動検査システムを示す図である。It is a figure which shows the screw automatic inspection system which concerns on one Embodiment of this invention. 検査対象の加工品の一例を示す図である。It is a figure which shows an example of the processed product of an inspection target. 検査対象の加工品の一例を示す図である。It is a figure which shows an example of the processed product of an inspection target. 本発明の一実施形態に係るネジ自動検査システムを用いて行ったネジ検査結果ファイルの一例を示す図である。It is a figure which shows an example of the screw inspection result file performed using the screw automatic inspection system which concerns on one Embodiment of this invention. 自動三次元測定検査システムを示す斜視図である。It is a perspective view showing an automatic three-dimensional measurement and inspection system. 自動三次元測定検査システムの三次元測定用設備を示す斜視図である。It is a perspective view showing equipment for three-dimensional measurement of an automatic three-dimensional measurement inspection system. 検査治具で加工品を支持した状態を示す斜視図である。It is a perspective view showing the state where the processed product was supported by the inspection jig. 検査治具で加工品を支持した状態を示す斜視図である。It is a perspective view showing the state where the processed product was supported by the inspection jig.

以下、図1から図15を参照し、本発明の一実施形態に係る加工品の自動検査システムについて説明する。 Hereinafter, an automatic inspection system for a processed product according to an embodiment of the present invention will be described with reference to FIGS. 1 to 15.

ここで、本実施形態は、工作機械で加工した加工品を順次搬送しながら外観検査、ネジ検査、三次元測定検査等を自動的に行うための加工品の自動検査システムに関するものである。 Here, the present embodiment relates to an automatic inspection system for a processed product for automatically performing a visual inspection, a screw inspection, a three-dimensional measurement inspection, and the like while sequentially conveying the processed product processed by a machine tool.

具体的に、本実施形態の加工品の自動検査システムAは、図1に示すように、外観検査等用自動倉庫1となる未検査品用分散倉庫と、三次元測定機2による測定検査対象の加工品Wを格納する三次元測定用自動倉庫3と、外観検査等用自動倉庫1に隣接して設けられ、加工品Wの外観検査、ネジ検査を行うための外観検査等検査領域R1と、三次元測定用自動倉庫3に隣接して設けられ、加工品Wの三次元測定検査を行うための三次元測定領域R2と、外観検査等用自動倉庫1と三次元測定用自動倉庫3の間で加工品Wを自動的に搬送する自動搬送部(搬送装置)4とを備えて構成されている。 Specifically, as shown in FIG. 1, an automatic inspection system A for processed products according to the present embodiment includes a distributed warehouse for uninspected products which is an automatic warehouse 1 for appearance inspection and the like, and a measurement inspection target by a coordinate measuring machine 2. And the automatic warehouse 3 for three-dimensional measurement in which the processed product W is stored and the automatic warehouse 1 for appearance inspection and the like, and an inspection area R1 for appearance inspection and screw inspection for the processed product W and , A three-dimensional measurement region R2 provided adjacent to the three-dimensional measurement automatic warehouse 3 for performing three-dimensional measurement inspection of the processed product W, and an automatic warehouse 1 for external appearance inspection and the like, and an automatic warehouse 3 for three-dimensional measurement. And an automatic transport unit (transport device) 4 for automatically transporting the processed product W between them.

外観検査等用自動倉庫1と三次元測定用自動倉庫3は、それぞれ、測定対象格納庫5と検査測定用格納庫6とがそれぞれ、上下方向に複数段、幅方向に複数列で並ぶ複数のスタッカラック(荷棚)7を備えて形成され、これら測定対象格納庫5と検査測定用格納庫6とが奥行方向に所定の間隔をあけて平行に設置されている。また、測定対象格納庫5と検査測定用格納庫6の間に、自動的に測定対象格納庫5と検査測定用格納庫6のスタッカラック7間で加工品W等の荷を搬送し出し入れするスタッカクレーン8が配設されている。 The automatic warehouse 1 for visual inspection and the automatic warehouse 3 for three-dimensional measurement each have a plurality of stacker racks in which a measurement target hangar 5 and an inspection/measurement hangar 6 are arranged in a plurality of rows in the vertical direction and a plurality of rows in the width direction. It is formed with a (packaging rack) 7, and the storage box 5 for measurement and the storage box 6 for inspection and measurement are installed in parallel in the depth direction at a predetermined interval. In addition, between the measurement object storage 5 and the inspection measurement storage 6, a stacker crane 8 that automatically conveys a load of processed products W or the like between the measurement target storage 5 and the inspection measurement storage 6 and the stacker rack 7 is provided. It is arranged.

本実施形態では、外観検査等用自動倉庫1と三次元測定用自動倉庫3が所定の間隔をあけて平行に設定されている。このとき、外観検査等用自動倉庫1の測定対象格納庫5と、三次元測定用自動倉庫3の測定対象格納庫5とが対向するように、外観検査等用自動倉庫1と三次元測定用自動倉庫3が設置されている。 In this embodiment, the automatic warehouse 1 for visual inspection and the automatic warehouse 3D for three-dimensional measurement are set in parallel at a predetermined interval. At this time, the appearance inspection automatic warehouse 1 and the three-dimensional measurement automatic warehouse 1 are arranged so that the measurement object storage 5 of the visual inspection automatic warehouse 1 and the measurement object storage 5 of the three-dimensional measurement automatic warehouse 3 face each other. 3 are installed.

自動搬送部4は、ベルトコンベアなどであり、外観検査等用自動倉庫1の測定対象格納庫5と、三次元測定用自動倉庫3の測定対象格納庫5との間で架設され、外観検査等用自動倉庫1の測定対象格納庫5の所定のスタッカラック7から三次元測定用自動倉庫3の測定対象格納庫5の所定のスタッカラック7に加工品W等を搬送する。 The automatic conveyance unit 4 is a belt conveyor or the like, and is installed between the measurement target hangar 5 of the automatic warehouse 1 for appearance inspection and the like and the measurement target hangar 5 of the automatic warehouse 3D for three-dimensional measurement, and is used for automatic appearance inspection and the like. The processed product W or the like is transported from the predetermined stacker rack 7 of the measurement object storage 5 of the warehouse 1 to the predetermined stacker rack 7 of the measurement object storage 5 of the three-dimensional measurement automatic warehouse 3.

本実施形態では、パレットに載せられた加工品Wがパレットとともにスタッカクレーン8で所定のスタッカラック7に格納されるように構成されている。 In the present embodiment, the processed product W placed on the pallet is stored together with the pallet in the predetermined stacker rack 7 by the stacker crane 8.

例えば、工作機械で加工した後、パレットに載せられ、AGV (無人搬送車)などで外観検査等用自動倉庫1の測定対象格納庫5まで運搬して搬入され、外観検査等用自動倉庫1のスタッカクレーン8によって自動的に、搬入した加工品Wが所定のスタッカラック7に格納される。 For example, after processing with a machine tool, it is placed on a pallet, transported by AGV (automated guided vehicle) or the like to the storage object 5 of the automatic warehouse 1 for appearance inspection, etc., and loaded into the stacker of the automatic warehouse 1 for appearance inspection. The processed product W carried in is automatically stored in the predetermined stacker rack 7 by the crane 8.

外観検査等用自動倉庫1の所定のスタッカラック7に格納された加工品Wを検査する際には、スタッカクレーン8によって自動的に、外観検査等用自動倉庫1の検査測定用格納庫6の所定のスタッカラック7に加工品Wが格納され、隣接する外観検査等検査領域R1でこの加工品Wの外観検査、ネジ検査が行われる。 When inspecting the processed product W stored in the predetermined stacker rack 7 of the appearance inspection automatic warehouse 1, the stacker crane 8 automatically determines the inspection measurement hangar 6 of the appearance inspection automatic warehouse 1. The processed product W is stored in the stacker rack 7 and the appearance inspection and screw inspection of the processed product W are performed in the adjacent inspection region R1 such as the appearance inspection.

外観検査、ネジ検査を終えた加工品Wは、外観検査等用自動倉庫1の検査測定用格納庫6の所定のスタッカラック7に戻され、スタッカクレーン8によって外観検査等用自動倉庫1の測定対象格納庫5の所定のスタッカラック7に格納されるとともに、自動搬送部4及び三次元測定用自動倉庫3のスタッカクレーン8によって外観検査等用自動倉庫1の測定対象格納庫5から三次元測定用自動倉庫3の測定対象格納庫5の所定のスタッカラック7に格納される。 The processed product W that has undergone the appearance inspection and the screw inspection is returned to the predetermined stacker rack 7 of the inspection measurement hangar 6 of the appearance inspection automatic warehouse 1 and is measured by the stacker crane 8 in the appearance inspection automatic warehouse 1. It is stored in a predetermined stacker rack 7 of the hangar 5, and the automatic transfer section 4 and the stacker crane 8 of the automatic warehouse 3D for three-dimensional measurement are used to measure from the hangar 5 to be measured in the automatic warehouse 1 for visual inspection to the automatic warehouse for three-dimensional measurement. 3 is stored in a predetermined stacker rack 7 of the measurement object storage 5.

三次元測定用自動倉庫3の測定対象格納庫5の所定のスタッカラック7に格納された加工品Wを三次元検査する際には、スタッカクレーン8によって自動的に、三次元測定用自動倉庫3の検査測定用格納庫6の所定のスタッカラック7に加工品Wが格納され、隣接する三次元測定領域R2でこの加工品Wの三次元測定検査が行われる。 When three-dimensionally inspecting the processed product W stored in the predetermined stacker rack 7 of the measurement target storage 5 of the three-dimensional measurement automatic warehouse 3, the stacker crane 8 automatically operates the three-dimensional measurement automatic warehouse 3 The processed product W is stored in the predetermined stacker rack 7 of the inspection/measurement storage 6, and the three-dimensional measurement inspection of the processed product W is performed in the adjacent three-dimensional measurement region R2.

三次元測定検査を終えた加工品Wは、三次元測定用自動倉庫3の検査測定用格納庫6の所定のスタッカラック7に戻され、例えば、塗装工程などの次工程に自動的に搬出される。 The processed product W that has undergone the three-dimensional measurement inspection is returned to the predetermined stacker rack 7 of the inspection measurement storage 6 of the three-dimensional measurement automatic warehouse 3 and is automatically carried out to the next process such as the painting process. ..

ここで、外観検査等領域R1で行う外観検査とネジ検査について説明する。 Here, the visual inspection and the screw inspection performed in the visual inspection area R1 will be described.

外観検査等領域R1で検査を行う際には、はじめに、図2に示すように、洗浄装置10で加工品Wを洗浄し、洗浄した加工品Wから洗浄液をエアブロー装置11で除去する。外観検査等領域R1内には、洗浄装置10とエアブロー装置11とともにハンドリングロボット12が設けられ、例えば、ハンドリングロボット12が、順次、外観検査等用自動倉庫1の所定のスタッカラック7に格納された加工品Wを、外観検査等領域R1の所定位置に設けられた仮置きテーブル13、14と、洗浄装置10、エアブロー装置11、洗浄処理後の加工品Wを載置する検査用テーブル15との間で運搬する。 When the inspection is performed in the area R1 for appearance inspection or the like, first, as shown in FIG. 2, the processed product W is cleaned by the cleaning device 10, and the cleaning liquid is removed from the cleaned processed product W by the air blow device 11. In the visual inspection area R1, a handling robot 12 is provided together with the cleaning device 10 and the air blower 11. For example, the handling robot 12 is sequentially stored in a predetermined stacker rack 7 of the automatic visual inspection warehouse 1. The processed product W includes a temporary storage table 13 and 14 provided at predetermined positions in the area R1 for visual inspection, a cleaning device 10, an air blower 11, and an inspection table 15 on which the processed product W after cleaning processing is placed. Transport between.

外観検査等領域R1には、画像検査などによって加工品Wの傷、巣等の有無などの外観検査を行うための外観検査用ロボット(外観検査装置)16と、加工品Wの雌ネジ孔(やピン孔)の検査を行うためのネジ検査ロボット17とが並設されている。そして、検査用テーブル15に送られた加工品Wに対し、ネジ検査ロボット17と外観検査用ロボット16がそれぞれ検査を行うように構成されている。 In the visual inspection area R1, a visual inspection robot (visual inspection device) 16 for performing visual inspection such as presence or absence of scratches or cavities on the processed product W by image inspection, and a female screw hole of the processed product W ( And a screw inspection robot 17 for inspecting a pin hole). Then, the screw inspection robot 17 and the appearance inspection robot 16 are configured to inspect each of the processed products W sent to the inspection table 15.

外観検査用ロボット16、ネジ検査ロボット17は、多関節状のアーム部を備え、全方位の所定の領域内で自在に先端部を移動できるように構成されている。 The appearance inspection robot 16 and the screw inspection robot 17 are provided with an articulated arm portion, and are configured so that their tip portions can be freely moved within a predetermined area in all directions.

外観検査用ロボット16は、先端部に加工品Wを撮像するための撮像装置(外観検査装置)18が取り付けられている。外観検査では、この撮像装置18で取得した画像を処理、解析して加工品Wの表面の傷、巣の有無、その程度等を調べ、加工品Wの良否を判定する。 The appearance inspection robot 16 has an image pickup device (appearance inspection device) 18 for picking up an image of the processed product W at the tip thereof. In the visual inspection, the image acquired by the imaging device 18 is processed and analyzed to check the surface of the workpiece W for scratches, presence or absence of cavities, the degree thereof, and the like to determine the quality of the workpiece W.

ネジ検査ロボット17は、先端部にネジ検査装置19が取り付けられている。 The screw inspection robot 17 has a screw inspection device 19 attached to its tip.

ネジ検査装置19は、図2、図3に示すように、検査対象の加工品Wに穿設された雌ネジ孔を検査するための検査ゲージ20を保持するホルダ部21を着脱可能に備えている。また、複数規格の雌ネジ孔を検査するための複数の検査ゲージ規格が異なる検査ゲージ20をそれぞれ保持した状態の複数のホルダ部21が、ゲージストッカ22に格納されており、ネジ検査ロボット19は、ゲージストッカ22との間でホルダ部21を選択、交換、収納可能に駆動する。ゲージストッカ22は、例えば、ゲージサイズ:M3〜M16(通り検査用/止まり検査用:各1本)の検査ゲージ20をそれぞれ保持した計16本のホルダ部21が格納されている。 As shown in FIGS. 2 and 3, the screw inspection device 19 is detachably provided with a holder portion 21 that holds an inspection gauge 20 for inspecting a female screw hole formed in a workpiece W to be inspected. There is. Further, a plurality of holder parts 21 in a state of respectively holding a plurality of inspection gauges 20 having different inspection gauge standards for inspecting female screw holes of a plurality of standards are stored in the gauge stocker 22, and the screw inspection robot 19 is , The gauge stocker 22 and the holder portion 21 are driven so that they can be selected, exchanged, and stored. The gauge stocker 22 stores, for example, a total of 16 holder portions 21 that respectively hold the inspection gauges 20 of gauge sizes: M3 to M16 (for street inspection/stop inspection: one each).

ネジ検査装置19は、検査時に近接センサによって検査ゲージ20の前進量を捉え、これにより、雌ネジ孔23の良否を検査できるように構成されている。あるいは、ネジ検査装置19は、図4、図5に示すように、検査ゲージ20である通りゲージ20aを用い、無理なく手でねじ込む力に対応した所定の力(トルク)が設定され、この力で雌ネジ孔23に指定深さまで通りゲージ20aが到達するか否かを確認したり、検査ゲージ20の止まりゲージ20bを用い、無理なく手でねじ込む力に対応した所定の力(トルク)で雌ネジ孔23に止まりゲージ20bをねじ込み、止まりゲージ20bが2回転未満の螺入量で止まるか否かを確認する検査が行えるように構成されている。このような場合には、ネジサイズごとのパラメータ(前進量、トルク、回転数等)が予め設定されている。 The screw inspection device 19 is configured to detect the amount of advancement of the inspection gauge 20 with a proximity sensor at the time of inspection and thereby to inspect the quality of the female screw hole 23. Alternatively, as shown in FIGS. 4 and 5, the screw inspection device 19 uses a gauge 20a, which is an inspection gauge 20, and sets a predetermined force (torque) corresponding to the force of screwing by hand without difficulty. Check whether or not the gauge 20a reaches the female screw hole 23 up to the specified depth, and use the stop gauge 20b of the inspection gauge 20 to force the female thread with a predetermined force (torque) corresponding to the force of screwing by hand. The blind gauge 20b is screwed into the screw hole 23, and an inspection for confirming whether or not the blind gauge 20b is stopped with a screw-in amount of less than two rotations can be performed. In such a case, parameters (amount of advance, torque, rotation speed, etc.) for each screw size are set in advance.

ここで、図2に示すように、本実施形態のネジ自動検査システムBは、ハンドリングロボット12、ネジ検査ロボット17、外観検査用ロボット16、ネジ検査装置19等の駆動を制御する制御装置25を備えている。 Here, as shown in FIG. 2, the automatic screw inspection system B of the present embodiment includes a controller 25 for controlling the driving of the handling robot 12, the screw inspection robot 17, the appearance inspection robot 16, the screw inspection device 19, and the like. I have it.

また、制御装置25は、図2、図6に示すように、検査対象に穿設されて検査を行う雌ネジ孔23の規格に相当するホルダ部21をゲージストッカ22から選択してネジ検査装置19に自動的に装着するように、及び/又はネジ検査装置19に装着されたホルダ部21をゲージストッカ22の所定位置に格納するように、ロボット12、16、17及びネジ検査装置19の駆動を制御するホルダ部装着/格納制御部26と、テーブル13、14、15上の検査対象、又はテーブル13、14、15からロボット16、17が取って保持した検査対象の検査を行うようにロボット16、17及びネジ検査装置19等の駆動を制御する検査実行制御部27と、検査実行制御部27で駆動制御して得られたネジ検査結果から雌ネジ孔23の良否を判定するネジ孔判定部28とを備えている。 Further, as shown in FIGS. 2 and 6, the control device 25 selects from the gauge stocker 22 the holder portion 21 corresponding to the standard of the female screw hole 23 to be inspected and inspected, and the screw inspection device. Drive the robots 12, 16, 17 and the screw inspection device 19 so as to be automatically attached to the screw inspection device 19 and/or to store the holder portion 21 attached to the screw inspection device 19 in a predetermined position of the gauge stocker 22. The holder mounting/storing control unit 26 for controlling the robot and the inspection target on the tables 13, 14, 15 or the inspection target held by the robots 16, 17 from the tables 13, 14, 15 are inspected. 16, 17 and an inspection execution control unit 27 that controls the drive of the screw inspection device 19, and a screw hole determination that determines the quality of the female screw hole 23 based on the screw inspection result obtained by controlling the drive by the inspection execution control unit 27. And part 28.

本実施形態のネジ自動検査システムBにおいては、制御装置25によって以下のように自動制御を行う。 In the screw automatic inspection system B of the present embodiment, the control device 25 performs automatic control as follows.

図2、図6、図7、図8に示すように、まず、システム側のPLC29から外観検査等用自動倉庫1側の上位PC30に検査可能な加工品Wが格納されているかを問い合わせ、該当する加工品Wがある場合には、上位PC30から同加工品用のロボットプログラム番号を取得する。加工品Wをシステム内の搬送装置(台車、荷受台)に出庫し、外観検査等領域R1に搬入する。なお、ロボットプログラム番号や加工品情報等は、倉庫データベース31に保管、記憶され、Webサーバなどを通じて取得できるようになっている。 As shown in FIG. 2, FIG. 6, FIG. 7, and FIG. 8, first, the PLC 29 on the system side inquires whether a processed product W that can be inspected is stored in the host PC 30 on the automatic warehouse 1 for visual inspection and the like. If there is a processed product W to be processed, the robot program number for the processed product is acquired from the host PC 30. The processed product W is unloaded to a transfer device (a dolly, a receiving tray) in the system and carried into the area R1 for visual inspection and the like. The robot program number, processed product information, etc. are stored and stored in the warehouse database 31, and can be acquired through a Web server or the like.

ホルダ部装着/格納制御部26によって、ネジ検査ロボット17を駆動制御し、検査対象に穿設されて検査を行う雌ネジ孔23の規格に相当するホルダ部21をゲージストッカ22から選択してネジ検査装置19に自動的に装着する。検査実行制御部27によって、ハンドリングロボット12で検査用テーブル15に搬送された加工品Wの雌ネジ孔23をネジ検査装置19で検査し、この検査時のデータが記憶部32に記憶され、ネジ孔判定部28が検査時のデータ(ネジ検査結果)から雌ネジ孔23の良否を判定する。 The holder mounting/storing control unit 26 drives and controls the screw inspection robot 17, selects the holder unit 21 corresponding to the standard of the female screw hole 23 to be inspected and inspected from the gauge stocker 22, and screw. The inspection device 19 is automatically attached. The inspection execution control unit 27 inspects the female screw hole 23 of the processed product W conveyed to the inspection table 15 by the handling robot 12 by the screw inspection device 19, and the data at this inspection is stored in the storage unit 32. The hole determination unit 28 determines the quality of the female screw hole 23 based on the data at the time of inspection (screw inspection result).

ここで、図6、図9、図10、図11に示すように、本実施形態では、例えば、予め取得した加工情報データに基づき、加工品Wに同じ工具を用いて複数の雌ネジ孔23が穿設されているか否かを確認する(図11の(1)参照)。同じ工具を用いて複数の雌ネジ孔23が穿設されている場合には、検査実行制御部27が、同じ工具を用いて形成した複数の雌ネジ孔23のうち、最後に形成した雌ネジ孔23に対してのみ検査を行うように制御し(図11の(2)、(3)参照)、この検査結果によって、同じ工具を用いて穿設された複数の雌ネジ孔23の良否をネジ孔判定部28が判定する。 Here, as shown in FIG. 6, FIG. 9, FIG. 10, and FIG. 11, in the present embodiment, for example, a plurality of female screw holes 23 are formed on the workpiece W using the same tool based on the machining information data acquired in advance. It is confirmed whether or not is formed (see (1) in FIG. 11). In the case where a plurality of female screw holes 23 are formed using the same tool, the inspection execution control unit 27 determines that the female screw hole formed last using the same tool among the plurality of female screw holes 23 formed using the same tool. Control is performed so that only the hole 23 is inspected (see (2) and (3) in FIG. 11), and the quality of the plurality of female screw holes 23 formed by using the same tool is determined based on the inspection result. The screw hole determination unit 28 makes the determination.

なお、本実施形態の加工品の自動検査システムAにおいては、図1に示すように、例えば大型の加工品Wなど、ネジ自動検査システムBで自動的に検査を行えない加工品Wを検査するための外観検査等領域R1’を設け、ここで作業者などによって外観検査やネジ検査を行うことができるようになっている。 Note that, in the automatic inspection system A for processed products of the present embodiment, as shown in FIG. 1, for example, a processed product W such as a large processed product W that cannot be automatically inspected by the automatic screw inspection system B is inspected. A visual inspection area R1' is provided to allow the visual inspection and the screw inspection by an operator or the like.

次に、本実施形態の自動三次元測定検査システムCでは、図1、図12に示すように、三次元測定領域R2が複数に分割されるとともに各分割領域にそれぞれ三次元測定用設備35を設けて構成されている。複数の三次元測定用設備35は、検査測定用格納庫6に隣接し、検査測定用格納庫6の幅方向に沿って並設されている。 Next, in the automatic three-dimensional measurement/inspection system C of this embodiment, as shown in FIGS. 1 and 12, the three-dimensional measurement region R2 is divided into a plurality of regions and the three-dimensional measurement equipment 35 is provided in each divided region. It is provided and configured. The plurality of three-dimensional measurement equipments 35 are adjacent to the inspection/measurement storage 6 and are arranged in parallel along the width direction of the inspection/measurement storage 6.

各三次元測定用設備9には、三次元測定機2と三次元測定用ロボット36とが具備されている。 Each of the three-dimensional measuring equipment 9 is equipped with a three-dimensional measuring machine 2 and a three-dimensional measuring robot 36.

図13に示すように、三次元測定機2は、加工品Wの形状をデータ上で立体的にとらえて様々な測定を行うことを可能にする装置であり、例えば、互いに直行するガイド部と、ガイド部の移動量を求めるスケール及びプローブとを備え、加工品Wの形状に応じたそれぞれの移動量からプローブの三次元座標値を求めることができ、これにより、加工品Wの寸法や公差などを測定することができる。
なお、本実施形態では、図12や図13に門型の三次元測定機2を図示したが、これに限定する必要はなく、多関節アーム型など他の型式の三次元測定機を適用しても勿論構わない。
As shown in FIG. 13, the coordinate measuring machine 2 is a device that makes it possible to three-dimensionally capture the shape of the workpiece W on the data and perform various measurements. , A scale for determining the amount of movement of the guide portion and a probe, and the three-dimensional coordinate values of the probe can be obtained from the respective amounts of movement according to the shape of the workpiece W, whereby the dimensions and tolerances of the workpiece W can be obtained. Etc. can be measured.
Note that, in the present embodiment, the gate-type three-dimensional measuring machine 2 is illustrated in FIGS. 12 and 13, but the present invention is not limited to this, and another type of three-dimensional measuring machine such as an articulated arm type is applied. But of course it doesn't matter.

また、三次元測定機2は、加工品Wを設置する設置台部37を備えている。設置台部37には多数の治具挿入孔38が設けられている。図13、図14、図15に示すように、三次元測定機2は、治具挿入孔38に位置決め用プランジャ39aを嵌合させて検査治具39を設置し、例えば、加工品Wの形状に合わせて設置された複数の検査治具39に載置して加工品Wを支持させ、この状態で加工品Wを三次元計測するように構成されている。 Further, the coordinate measuring machine 2 is provided with an installation base portion 37 on which the processed product W is installed. The installation base 37 is provided with a large number of jig insertion holes 38. As shown in FIGS. 13, 14, and 15, the coordinate measuring machine 2 installs the inspection jig 39 by fitting the positioning plunger 39 a into the jig insertion hole 38, and, for example, the shape of the processed product W. The workpiece W is supported by being placed on a plurality of inspection jigs 39 installed in accordance with the above, and the workpiece W is three-dimensionally measured in this state.

検査治具39は、その部品(検査治具部品)として、三次元測定用ロボット39が検査治具部品を把持・接続するためのインターフェース40を有する略平盤状の基盤部39bと、基盤部39bの下面から下方に突出する複数の位置決め用プランジャ39aと、基盤部39bの上面に、上方に突出するようにして着脱可能に取り付けられる支持部39cとを備え、モジュール化して構成されている。 The inspection jig 39 has, as its components (inspection jig components), a substantially flat plate-shaped base portion 39b having an interface 40 for the three-dimensional measurement robot 39 to grip and connect the inspection jig components, and the base portion. A plurality of positioning plungers 39a projecting downward from the lower surface of 39b and a support section 39c detachably attached to the upper surface of the base section 39b so as to project upward are configured as a module.

すなわち、検査治具39は、加工品Wの形状、三次元側的の設置台部37への設置位置などに応じて基盤部39bの上面の任意の位置に、また、基盤部39bの上面に任意の数の支持部39cを取り付け、各部品39a、39b、39cを組み立てることによって形成される。そして、位置決め用プランジャ39aを治具挿入孔38に挿入するとともに基盤部39bが設置台部37上の所定位置に位置決めして載置され、例えば、複数の検査治具39の各支持部39cの上端が当接するように載置することで、加工品Wを静置した状態で保持することができる。 That is, the inspection jig 39 is provided at an arbitrary position on the upper surface of the base portion 39b according to the shape of the processed product W, the installation position on the three-dimensional side installation base portion 37, and the like. It is formed by attaching an arbitrary number of supporting parts 39c and assembling the respective parts 39a, 39b, 39c. Then, the positioning plunger 39a is inserted into the jig insertion hole 38, and the base portion 39b is positioned and placed at a predetermined position on the installation base portion 37. For example, the support portions 39c of the plurality of inspection jigs 39 are supported. By placing the workpiece W so that the upper ends thereof come into contact with each other, the processed product W can be held in a stationary state.

上記のような複数の検査治具39の部品(複数の基盤部39b及び位置決めプランジャ39a、複数の支持部39c)が検査治具ストッカ41に収納されている。この検査治具ストッカ41は、例えば、検査測定用格納庫6の所定のスタッカラック7に格納したり、三次元測定領域R2に三次元測定用設備35として配置するなどして設けられている。 The components of the plurality of inspection jigs 39 (the plurality of base portions 39b, the positioning plungers 39a, the plurality of support portions 39c) as described above are stored in the inspection jig stocker 41. The inspection jig stocker 41 is provided, for example, by being stored in a predetermined stacker rack 7 of the inspection/measurement storage 6 or arranged as the three-dimensional measurement equipment 35 in the three-dimensional measurement region R2.

三次元測定用ロボット36は、図12、図13に示すように、多関節状のアームを備えて形成されて全方位の所定の範囲内で自在に先端部側を移動できるように構成されている。 As shown in FIGS. 12 and 13, the three-dimensional measurement robot 36 is formed with an articulated arm, and is configured to be able to freely move its tip side within a predetermined range in all directions. There is.

三次元測定用ロボット36は、検査治具39を設置する際に用いる治具設置用装置42と、加工品Wを把持する際に用いる加工品把持装置43とを自動的に選択して先端部側に装着し、検査治具部品39a、39b、39cひいては検査治具39の組み立て作業、検査測定用格納庫6と三次元測定機2との間で加工品Wを搬送して三次元測定機2で検査を行う搬送/検査作業とを自動的に行うように構成されている。 The three-dimensional measurement robot 36 automatically selects the jig installation device 42 used when installing the inspection jig 39 and the workpiece gripping device 43 used when gripping the workpiece W, and selects the tip portion. Mounted on the side, the inspection jig parts 39a, 39b, 39c and by extension the assembly work of the inspection jig 39, the workpiece W is conveyed between the inspection measurement hangar 6 and the coordinate measuring machine 2, and the coordinate measuring machine 2 It is configured to automatically carry out the transportation/inspection work in which the inspection is performed.

三次元測定用ロボット36は、検査治具ストッカ41から検査治具部品39a、39b、39cを選択して検査治具39を組み立て、自動的に三次元測定機2の設置台部37の所定位置に設置するように構成されている。このとき、三次元測定用ロボット36は、加工品Wの形状に合うように自動的に複数の検査治具部品39a、39b、39cを配置し、加工品Wを支持する検査治具39を組み立てるように構成されている。 The three-dimensional measurement robot 36 assembles the inspection jig 39 by selecting the inspection jig parts 39a, 39b, 39c from the inspection jig stocker 41, and automatically places the installation base portion 37 of the three-dimensional measuring machine 2 at a predetermined position. Is configured to be installed. At this time, the three-dimensional measurement robot 36 automatically arranges a plurality of inspection jig parts 39a, 39b, 39c so as to match the shape of the processed product W, and assembles the inspection jig 39 that supports the processed product W. Is configured.

また、自動倉庫3での加工品Wの搬送作業の制御、三次元測定用ロボット36の駆動制御、三次元測定機2の稼働制御は、それぞれの制御を連関させて行う制御システム(制御装置)44によって自動制御されている。 Further, the control system (control device) that controls the transfer operation of the processed product W in the automated warehouse 3, the drive control of the three-dimensional measuring robot 36, and the operation control of the three-dimensional measuring machine 2 by linking the respective controls. It is automatically controlled by 44.

すなわち、自動倉庫3のスタッカクレーン8の駆動制御によって、検査を行う加工品W(や検査治具ストッカ41)が検査測定用格納庫6の所定のスタッカラック7に格納される。 That is, the processed product W (and the inspection jig stocker 41) to be inspected is stored in the predetermined stacker rack 7 of the inspection and measurement storage 6 by the drive control of the stacker crane 8 of the automatic warehouse 3.

三次元測定用ロボット36の駆動制御によって、検査する加工品Wに合うように検査治具39が組み立てられるとともに三次元測定機2の設置台部37に設置される。また、三次元測定用ロボット36の駆動制御によって、検査測定用格納庫6の所定のスタッカラック7から複数の検査治具39に支持させて、検査対象の加工品Wが三次元測定機2の設置台部37に設置される。 By the drive control of the three-dimensional measuring robot 36, the inspection jig 39 is assembled so as to match the workpiece W to be inspected, and the inspection jig 39 is installed on the installation base 37 of the three-dimensional measuring machine 2. Further, by controlling the driving of the three-dimensional measurement robot 36, the workpiece W to be inspected is installed on the three-dimensional measuring machine 2 while being supported by a plurality of inspection jigs 39 from a predetermined stacker rack 7 of the inspection and measurement hangar 6. It is installed on the base 37.

三次元測定機2の稼働制御によって、設置台部37に設置された加工品Wが検知され、三次元測定機2が自動的に加工品Wの三次元計測を行う。 By the operation control of the coordinate measuring machine 2, the workpiece W installed on the installation table 37 is detected, and the coordinate measuring machine 2 automatically performs the three-dimensional measurement of the workpiece W.

三次元計測が完了した後、三次元測定用ロボット36と自動倉庫3の駆動制御によって、検査を終えた加工品Wは自動倉庫3の所定のスタッカラック7に戻される。 After the three-dimensional measurement is completed, the workpiece W that has been inspected is returned to the predetermined stacker rack 7 of the automatic warehouse 3 by the drive control of the three-dimensional measurement robot 36 and the automatic warehouse 3.

また、同規格の加工品Wの検査が引き続き行われる場合には、次の加工品Wが上記と同様に、三次元測定機2の設置台部37に複数の検査治具39に支持させて設置され、三次元測定機2が自動的に加工品Wの三次元計測を行ってゆく。 Further, when the inspection of the processed product W of the same standard is continuously performed, the next processed product W is supported by the plurality of inspection jigs 39 on the installation table 37 of the coordinate measuring machine 2 in the same manner as above. Once installed, the coordinate measuring machine 2 automatically measures the workpiece W in three dimensions.

一方、異なる規格の加工品Wの検査を行う際には、検査治具39が適宜分解されて検査治具ストッカ41に戻され、新たな加工品Wに合わせた検査治具39の組み立て、設置台部37への設置、加工品Wの設置、三次元計測が順次行われる。 On the other hand, when inspecting the processed product W having different specifications, the inspection jig 39 is appropriately disassembled and returned to the inspection jig stocker 41, and the inspection jig 39 is assembled and installed according to the new processed product W. The installation on the table 37, the processed product W, and the three-dimensional measurement are sequentially performed.

なお、本実施形態の加工品の自動検査システムAにおいては、図1に示すように、例えば大型の加工品Wなど、自動三次元測定検査システムCで自動的に検査を行えない加工品Wを検査するための三次元測定領域R2’を設け、ここで作業者などによって三次元測定検査を行うことができるようになっている。 In the automatic inspection system A for processed products of the present embodiment, as shown in FIG. 1, a processed product W, such as a large processed product W, which cannot be automatically inspected by the automatic three-dimensional measurement inspection system C, is used. A three-dimensional measurement region R2' for inspection is provided, and an operator or the like can perform three-dimensional measurement inspection here.

したがって、本実施形態の加工品の自動検査システムAにおいては、加工品Wの外観検査や三次元測定検査などの各種検査を自動的に行うことができ、加工品Wの検査工程を効率化することが可能になる。 Therefore, in the automatic inspection system A of the processed product of the present embodiment, various inspections such as the appearance inspection and the three-dimensional measurement inspection of the processed product W can be automatically performed, and the inspection process of the processed product W is made efficient. It will be possible.

以上、本発明に係る加工品の自動検査システムの一実施形態について説明したが、本発明は上記の一実施形態に限定されるものではなく、その趣旨を逸脱しない範囲で適宜変更可能である。 Although one embodiment of the automatic inspection system for processed products according to the present invention has been described above, the present invention is not limited to the above-mentioned one embodiment and can be appropriately modified without departing from the spirit thereof.

1 外観検査等用自動倉庫(未検査品用分散倉庫)
2 三次元測定機
3 三次元測定用自動倉庫
4 自動搬送部
5 測定対象格納庫
6 検査測定用格納庫
7 スタッカラック(荷棚)
8 スタッカクレーン
10 洗浄装置
11 エアブロー装置
12 ハンドリングロボット
16 外観検査用ロボット(外観検査装置)
17 ネジ検査ロボット
18 撮像装置(外観検査装置)
35 三次元測定用設備
36 三次元測定用ロボット
A 加工品の自動検査システム
B ネジ自動検査システム
C 自動三次元測定検査システム
R1 外観検査等検査領域
R2 三次元測定領域
W 加工品
1 Automated warehouse for visual inspection (distributed warehouse for uninspected products)
2 Three-dimensional measuring machine 3 Automatic warehouse for three-dimensional measurement 4 Automatic transfer section 5 Storage hang for measurement 6 Storage hang for inspection and measurement 7 Stacker rack (packing rack)
8 Stacker Crane 10 Cleaning Device 11 Air Blow Device 12 Handling Robot 16 Appearance Inspection Robot (Appearance Inspection Device)
17 Screw inspection robot 18 Imaging device (visual inspection device)
35 Equipment for three-dimensional measurement 36 Robot for three-dimensional measurement A Automatic inspection system for workpieces B Automatic screw inspection system C Automatic three-dimensional measurement inspection system R1 Inspection area for visual inspection R2 Three-dimensional measurement area W

Claims (1)

少なくとも洗浄と外観検査を行うための測定検査対象の加工品を格納する外観検査等用自動倉庫と、
三次元測定機による測定検査対象の前記加工品を格納する三次元測定用自動倉庫と、
前記外観検査等用自動倉庫と前記三次元測定用自動倉庫の間で前記加工品を自動的に搬送する自動搬送部と、
少なくとも洗浄装置と外観検査装置を有し、前記外観検査等用自動倉庫に隣接して設けられ、前記外観検査等用自動倉庫との間で自動的に前記加工品が搬送される外観検査等領域と、
前記三次元測定機と前記三次元測定用自動倉庫との間で前記加工品を搬送する三次元測定用ロボットを有し、前記三次元測定用自動倉庫に隣接して設けられた三次元測定領域とを備える、加工品の自動検査システム。
At least an automated warehouse for visual inspection, which stores processed products to be measured and inspected for cleaning and visual inspection,
An automatic warehouse for three-dimensional measurement that stores the processed product to be measured and inspected by the three-dimensional measuring machine,
An automatic transfer unit that automatically transfers the processed product between the automatic warehouse for visual inspection and the automatic warehouse for three-dimensional measurement,
Appearance inspection area where at least the cleaning device and the appearance inspection device are provided adjacent to the appearance inspection automatic warehouse, and the processed product is automatically conveyed to and from the appearance inspection automatic warehouse. When,
A three-dimensional measurement area provided adjacent to the three-dimensional measurement automatic warehouse, which has a three-dimensional measurement robot that conveys the processed product between the three-dimensional measurement machine and the three-dimensional measurement automatic warehouse. An automatic inspection system for processed products that includes and.
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Citations (8)

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JP2005121450A (en) * 2003-10-16 2005-05-12 Hitachi Ltd Device for inspecting defect, and method therefor, and method of working inner face of cylindrical object
WO2008075404A1 (en) * 2006-12-19 2008-06-26 Systemv Management Inc., Semiconductor manufacturing system
JP2013029350A (en) * 2011-07-27 2013-02-07 Hitachi Ltd Appearance inspection method and device for the same
JP2014187211A (en) * 2013-03-22 2014-10-02 Toshiba Corp Electronic device manufacturing assisting system, manufacturing assisting method and manufacturing assisting program

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897614A (en) * 1981-12-08 1983-06-10 Agency Of Ind Science & Technol Product inspecting device
JPS6357158A (en) * 1986-08-29 1988-03-11 Hitachi Ltd Flexible transporting system
JPH06227624A (en) * 1993-01-29 1994-08-16 Fujitsu Ltd Line control method and transfer unit
JP2001267383A (en) * 2000-03-14 2001-09-28 Hitachi Ltd Manufacturing line and manufacturing method of semiconductor device
JP2005121450A (en) * 2003-10-16 2005-05-12 Hitachi Ltd Device for inspecting defect, and method therefor, and method of working inner face of cylindrical object
WO2008075404A1 (en) * 2006-12-19 2008-06-26 Systemv Management Inc., Semiconductor manufacturing system
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