JP2020087634A - Scanning electron microscope device - Google Patents

Abstract

To make it possible to visually clearly as well as easily confirm a difference between a plurality of signal images at a target position of an observer.SOLUTION: A scanning electron microscope device according to one aspect of the present invention comprises: a plurality of signal detectors that detect a plurality of kinds of signals emitted from a specimen through irradiation with an electron beam; a display device having an image display unit that displays each signal image generated on the basis of detection signals of the plurality of signal detectors; a boundary line generation unit for generating a horizontal screen division boundary line and a vertical screen division boundary line; and an area variable unit for changing a size of each of four divided screen areas obtained through division by the horizontal screen division boundary line and the vertical screen division boundary line on the basis of an operation by an observer for moving the horizontal screen division boundary line and/or the vertical screen division boundary line.SELECTED DRAWING: Figure 2

Description

The present invention relates to a scanning electron microscope device.

Conventionally, a function of including a plurality of signal detectors that detect different kinds of signals, and displaying each of the signal images corresponding to the detection signals detected by the plurality of signal detectors in different areas on the screen of the display device. There is known a scanning electron microscope apparatus having For example, in Patent Document 1, the sample is virtually divided into lattices with an area for capturing an image in the scanning area of the electron beam as a unit, and the sample is moved so that the electron beam is scanned for each division. A scanning electron microscope is disclosed. Further, in Patent Document 1, composite image data is created by storing image data obtained by scanning each section in an image memory in association with the position of each section, and designated in the composite image. It is disclosed that the image data corresponding to the area is read from the image memory and displayed as a partial image on the display means.

JP 2001-250500 A

According to the technique described in Patent Document 1, it is possible to compare the signal images corresponding to the plurality of types of detection signals obtained by the plurality of signal detectors on one screen of the display device. However, in the technique described in Patent Document 1, when it is desired to confirm how a recognizable portion in one image is observed in another image, a line of sight is provided between respective regions in which different signal images are displayed. While moving, it is necessary to compare the images of the part that seems to be the point of interest.

The present invention has been made to solve the above problems. It is an object of the present invention to make it possible to visually and easily confirm differences between a plurality of types of signal images at a position of interest of an observer.

In order to solve the above problems and achieve the object of the present invention, a scanning electron microscope apparatus that reflects one aspect of the present invention includes an electron beam irradiation unit, a scanning control unit, a plurality of signal detectors, and a display device. And an operation input unit, a boundary line generation unit, and a region variable unit. The electron beam irradiation unit irradiates the sample with an electron beam. The scan controller causes the electron beam to scan the sample two-dimensionally. The plurality of signal detectors detect a plurality of types of signals emitted from the sample by irradiating with an electron beam. The display device includes an image display unit that displays each signal image generated based on the detection signals of the plurality of signal detectors. The operation input section is operated by an observer. The boundary line generation unit generates a horizontal screen division boundary line that divides the image display unit into two in the horizontal direction and a vertical screen division boundary line that divides the image display unit into two in the vertical direction. The area variable unit is divided by the horizontal screen division boundary line and the vertical screen division boundary line based on the operation of moving the horizontal screen division boundary line and/or the vertical screen division boundary line, which is input to the operation input unit. Change the size of each of the three split screen areas.

According to the scanning electron microscope apparatus of the present invention, the observer inputs an operation of moving the horizontal screen division boundary line and/or the vertical screen division boundary line into the operation input unit to thereby obtain a plurality of types of signals at the position of interest. Differences between images can be visually confirmed easily and easily. The problems, configurations, and effects other than those described above will be clarified by the following description of the embodiments.

It is a schematic block diagram which shows the structural example of the scanning electron microscope apparatus which concerns on one Embodiment of this invention. It is a block diagram showing an example of composition of a control system of a scanning electron microscope device concerning one embodiment of the present invention. It is explanatory drawing which shows the structural example of the 4-split screen display part which concerns on one Embodiment of this invention. FIG. 6 is an explanatory diagram showing an example of area changing processing by an area changing unit according to an embodiment of the present invention. It is explanatory drawing which shows the example 1 of a display of the signal image in the 4-division screen display part of one Embodiment of this invention. FIG. 9 is an explanatory diagram showing a display example of a signal image on a 4-split screen display unit when a horizontal division boundary line or an intersection is moved downward in the vertical direction in Display Example 1 of an embodiment of the present invention. It is explanatory drawing which shows the example 2 of a display of the signal image in the 4-division screen display part of one Embodiment of this invention.

Hereinafter, examples of modes (hereinafter, referred to as “embodiments”) for carrying out the present invention will be described with reference to the accompanying drawings. In addition, in each of the drawings, constituent elements having substantially the same function or configuration are designated by the same reference numerals, and duplicate description will be omitted.

<Structure of scanning electron microscope>
First, a scanning electron microscope (SEM) device according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic configuration diagram showing an example of the configuration of a scanning electron microscope apparatus 1 of the present invention. It should be noted that FIG. 1 shows elements considered necessary for explaining the present invention or related elements thereof, and the electron microscope apparatus of the present invention is not limited to the example shown in FIG.

As shown in FIG. 1, the scanning electron microscope apparatus 1 includes at least an electron beam irradiation unit 2, an electron detection device 3, a display device 4, and an operation input unit 5. The electron beam irradiation section 2 irradiates the sample 7 provided in the sample chamber 6 with an electron beam (primary electron beam) EB. When the sample 7 is irradiated with the electron beam EB, various kinds of electrons such as secondary electrons, reflected electrons, light, and X-rays are emitted from the sample 7. The secondary electrons are electrons emitted by exciting atoms on the sample surface of the sample 7. The reflected electrons are the electrons emitted by the electrons irradiating the sample 7 bouncing off on the sample surface.

The electron beam irradiation unit 2 includes an electron gun 21, a focusing lens 22, an X-direction scanning deflector 23 (an example of a scanning control unit), a Y-direction scanning deflector 24 (an example of a scanning control unit), an objective lens 25, and the like. Composed. The electron gun 21 generates an electron beam EB toward the sample. The focusing lens 22 is for focusing the electron beam EB generated from the electron gun 21, and is composed of, for example, a magnetic field type lens.

The X-direction scanning deflector 23 is for scanning the electron beam EB irradiating the sample 7 in the X direction, which is the left-right direction in the drawing. The Y-direction scanning deflector 24 is for scanning the electron beam EB irradiating the sample 7 in the Y direction, which is the vertical direction in the drawing. The electron beam EB generated from the electron gun 21 is two-dimensionally scanned by the X-direction scanning deflector 23 and the Y-direction scanning deflector 24. The objective lens 25 is for focusing to determine the final diameter of the electron beam EB with which the sample 7 is irradiated, and is composed of, for example, a magnetic field lens like the focusing lens 22.

The electron detection device 3 has a signal detector 31 for detecting electrons emitted from the sample 7 when the sample 7 is irradiated with the electron beam EB, and displays based on the electronic information detected by the signal detector 31. Processing for generating a signal image to be displayed on the device 4 is performed. Although only one signal detector 31 is illustrated in FIG. 1, the scanning electron microscope apparatus 1 according to the present embodiment has a plurality of signal detectors 31 that detect a plurality of types of signals. And

Specifically, as the signal detector 31 according to the present embodiment, a signal detector that detects secondary electrons, a signal detector that detects backscattered electrons, and a signal detector that detects an EDS (Energy Dispersive X-ray Spectrometry) signal. Device, a signal detector for detecting a three-dimensional image, or the like can be provided. Further, a signal detector that detects an EBSD (Electron Backscatter Diffration) signal, a signal detector that detects a WDS (Wavelength-Dispersive X-ray Spectrometry) signal, and the like can be provided. The signal detected by the signal detector 31 according to the present embodiment may be any signal as long as it is a signal detected by scanning the electron beam EB. As the signal detector of the present invention, A signal detector that detects signals other than the above may be provided.

The electronic detection device 3 includes an amplification unit 32 and a signal processing unit 33 in addition to the plurality of signal detectors 31. The amplification unit 32 amplifies the detection signal detected by the signal detector 31 and supplies it to the signal processing unit 33. The signal processing unit 33 performs various digital signal processing on the detection signal amplified by the amplification unit 32, and generates a signal image based on the detection signal subjected to the digital signal processing.

The display device 4 is composed of a liquid crystal display device or the like, and displays the signal image generated by the signal detector 31. The display device 4 according to the present embodiment is characterized by including a 4-split screen display section 41 (an example of an image display section: see FIG. 2) having four image display areas.

The operation input unit 5 is composed of a keyboard, a mouse, and the like, generates an operation signal according to the content of the operation input by the observer, and outputs the operation signal to the display control unit 42 in the display device 4 (see FIG. 2). Supply to.

<Control system configuration of the scanning electron microscope device>
Next, the configuration of the control system of the scanning electron microscope apparatus 1 will be described with reference to FIG. FIG. 2 is a block diagram showing a configuration example of a control system of the scanning electron microscope apparatus 1.

As shown in FIG. 2, the scanning electron microscope apparatus 1 includes a plurality of signal detectors 31, a display device 4, and an operation input unit 5.

The display device 4 includes a 4-split screen display unit 41 and a display control unit 42. The 4-split screen display unit 41 is a screen on which the signal images generated by the plurality of signal detectors 31 are displayed, and the screen is virtually 4 by the horizontal screen split boundary line BLh and the vertical screen split boundary line BLv. Divided into two. The horizontal screen division boundary line BLh is a border line that divides the four-division screen display unit 41 into two in the horizontal direction, and the vertical screen division border line BLv divides the four-division screen display unit 41 into two in the vertical direction. It is the boundary line to do. Further, a cross-shaped marker Mk is displayed on the 4-division screen display portion 41. In the example shown in FIG. 2, the marker Mk has a cross shape, but the present invention is not limited to this. The shape of the marker Mk may be any shape as long as it is easy for an observer to gaze.

The display control unit 42 includes a boundary line generation unit 421, a region variable unit 422, a marker display unit 423, a signal image selection unit 424, a signal image allocation unit 425, and a timing control unit 426.

The boundary line generation unit 421 generates a horizontal screen division boundary line BLh and a vertical screen division boundary line BLv and draws them on the four-division screen display unit 41. The boundary line generation unit 421 also positions the horizontal screen division boundary line BLh in the horizontal direction and/or the vertical screen division boundary line BLv in the vertical direction based on the operation input to the operation input unit 5 by the observer. Change the position in.

The area changing unit 422 determines the size of the four divided screen areas based on the operation of moving the position of the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv, which is input to the operation input unit 5 by the observer. Change the height.

The marker display unit 423 displays the marker Mk at a predetermined position on the four-division screen display unit 41 designated by the observer via the operation input unit 5.

The signal image selection unit 424 selects each of the four divided screen display units 41 from among the plurality of signal images generated by the plurality of signal detectors 31 based on the operation input to the operation input unit 5 by the observer. Select the signal image to be displayed in the screen area. The signal images selected by the signal image selection unit 424 may be four signal images of different types, or may include a plurality of the same signal images.

The signal image allocation unit 425 allocates the four signal images selected by the signal image selection unit 424 to each of the four divided screen areas.

The timing control unit 426 controls the timing of drawing the signal image on the four-division screen display unit 41. Specifically, when the signal image selected by the signal image selection unit 424 includes a signal image corresponding to the EDS signal (hereinafter also referred to as “EDS image”), the scanning electron microscope 1 other than the EDS image Control is performed to integrate and output a signal image corresponding to the obtained detection signal (hereinafter, also referred to as “SEM image”) for a predetermined number of pixels. By performing such control by the timing control unit 426, the EDS image that takes a long time to acquire and the SEM image generated based on the detection signal of other electrons are simultaneously displayed on the four-division screen display unit 41. It can be displayed (at the same timing).

Note that each functional unit of the display control unit 42 described above can be realized by a computer that interprets a program that realizes each function by a processor and executes the program by software. Further, some or all of these functional units can be realized by hardware by designing with an integrated circuit, for example.

<Structure example of 4-split screen display>
Next, the configuration of the 4-split screen display unit 41 will be described with reference to FIG. FIG. 3 is an explanatory diagram showing a configuration example of the 4-split screen display unit 41.

As described above, the 4-split screen display unit 41 displays the horizontal screen split boundary line BLh and the vertical screen split boundary line BLv. FIG. 3 shows an example in which the 4-split screen display unit 41 is divided into 4 split screen areas Ara to Ard by the horizontal screen split boundary line BLh and the vertical screen split boundary line BLv. In the example shown in FIG. 3, the signal image Sga is displayed in the split screen area Ara located in the upper left of the figure, and the signal image Sgb is displayed in the split screen area Arb located in the upper right. Further, the signal image Sgc is displayed in the split screen area Arc located at the lower left, and the signal image Sgd is displayed in the split screen area Ard located at the lower right.

The position of the horizontal screen division boundary line BLh in the horizontal direction of the screen and the position of the vertical screen division boundary line BLv in the vertical direction of the screen are based on the operation input to the operation input unit 5 by the observer. It is changed by the unit 421 (see FIG. 2).

The observer can move the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv respectively, but can also move the position of the intersection P of the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv. You can also When the operation to move the position of the intersection P is input by the observer, the boundary line generation unit 421 also determines the positions of the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv according to the movement of the position of the intersection P. change. Then, in accordance with the change of each position of the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv, the area changing unit 422 divides the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv into four divisions. The sizes of the screen areas Ara to Ard are changed. Therefore, the observer can change the sizes of the four divided screen areas Ara to Ard of the four divided screen display unit 41 at the same time (by one operation) by performing the operation of moving the position of the intersection P. ..

The marker Mk is a mark displayed on the four-division screen display unit 41 by the marker display unit 423, and its display position is designated by an operation input to the operation input unit 5 by the observer. FIG. 3 shows an example in which the marker Mk is arranged on the divided screen area Scc. The display position of the marker Mk is changed based on the operation input to the operation input unit 5 by the observer, but does not follow the movement of the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv. That is, even when the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv moves, the marker Mk is fixedly displayed at the position designated by the observer.

<Region variable processing by the region variable unit>
Next, with reference to FIG. 4, the area changing process by the area changing unit 422 will be described. FIG. 4 is an explanatory diagram showing an example of the area changing process by the area changing unit 422. As shown in FIG. 4, the four-division screen display unit 41 has four virtual layers Ly1 to Ly4. The four signal images selected by the signal image allocation unit 425 (see FIG. 2) are allocated to each of the layers Ly1 to Ly4.

In FIG. 4, an example in which the signal image Sga is assigned to the layer Ly1, the signal image Sgb is assigned to the layer Ly2, the signal image Sgc is assigned to the layer Ly3, and the signal image Sgd is assigned to the layer Ly4. Is shown. Each screen area of the layers Ly1 to Ly4 corresponds to the scanning area by the electron beam, and the entire image of the signal image obtained by scanning is assigned to each screen area of the layers Ly1 to Ly4.

In the layer Ly1, the area changing unit 422 has a rectangular divided screen area whose diagonal line is a line connecting the intersection point P of the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv and the position Pa at the upper left end of the screen area. Ara is set in the transparent area. As a result, in the layer Ly1, only the image of the area corresponding to the rectangular divided screen area Ara in the signal image Sga is displayed. In the layer Ly2, a rectangular divided screen area Arb whose diagonal is a line connecting the intersection P and the position Pb at the upper right end of the screen area is set as the transparent area. As a result, in the layer Ly2, only the image of the area corresponding to the rectangular divided screen area Arb of the signal image Sgb is displayed.

In the layer Ly3, a rectangular divided screen area Arc whose diagonal is a line connecting the intersection P and the position Pc at the lower left corner of the screen area is set as a transparent area. As a result, in the layer Ly3, only the image of the area corresponding to the rectangular divided screen area Arc of the signal image Sgc is displayed. In the layer Ly4, a rectangular divided screen area Ard whose diagonal is a line connecting the intersection P and the position Pd at the lower right end of the screen area is set as the transparent area. As a result, in the layer Ly4, only the image of the area corresponding to the rectangular divided screen area Ard of the signal image Sgd is displayed.

Further, when the operation input unit 5 inputs an operation of moving either the position of the horizontal screen division boundary line BLh or the vertical screen division boundary line BLv or the position of the intersection point P, the area variable unit 422 displays the intersection point P of the intersection point P. The size of the transparent area is changed based on the position information.

<Display example of signal image on 4-split screen display section>
[Display example 1]
Next, with reference to FIG. 5, a display example 1 of a signal image on the 4-split screen display unit 41 will be described. FIG. 5 is an explanatory diagram showing a display example 1 of a signal image on the 4-split screen display unit 41. In the display example 1 shown in FIG. 5, the secondary electron image SEI is displayed in the upper left split screen area Ara of the 4-split screen display unit 41, the backscattered electron image BEI_TOPO is displayed in the upper right split screen area Arb, and the lower left split. The three-dimensional image 3D is displayed in the screen area Arc, and the composition image BEI_COMP is displayed in the lower right divided screen area Ard. Further, a marker Mk is displayed at a predetermined position on the lower left split screen area Arc.

FIG. 6 is an explanatory diagram showing a display example of a signal image on the four-division screen display unit 41 when the vertical division boundary line BLv or the intersection P is moved downward in the vertical direction in the display example 1 shown in FIG. It is a figure. When an operation to move the vertical division boundary line BLv or the intersection P downward in the vertical direction is input to the operation input unit 5 (see FIG. 2) by the observer, the divided screen area of the secondary electron image SEI is displayed. The length in the vertical direction of Ara becomes longer, and the length in the vertical direction of the divided screen area Arc arranged under the divided screen area Ara becomes shorter.

At this time, the marker Mk whose position is designated by the observer does not follow the movement of the vertical division boundary line BLv and is fixedly displayed at the position designated by the observer. That is, in the example shown in FIGS. 4 and 5, the observer performs an operation of moving the vertical screen division boundary line BLv or the intersection point P downward, whereby the secondary electron image at the position of interest indicated by the marker Mk. The difference between the SEI and the three-dimensional image 3D can be visually confirmed easily and easily. Further, the intersection point P can be moved not only in the vertical and horizontal directions within the four-division screen display unit 41 but also in the diagonal direction. Therefore, the observer can easily confirm the difference between the various signal images at the position where the marker Mk is shown by moving the position of the intersection P.

[Display example 2]
Next, with reference to FIG. 7, a display example 2 of the signal image on the 4-split screen display unit 41 will be described. FIG. 7 is an explanatory diagram showing a second display example of a signal image on the 4-split screen display unit 41. In the display example 2 shown in FIG. 7, the secondary electron image SEI is displayed in both the upper left split screen area Ara and the upper right split screen area Arb of the four-split screen display unit 41. In this way, it is also possible to display the same type of signal image on two or more divided screen areas of the four divided screen areas forming the four-divided screen display unit 41.

<Various effects>
In the embodiment described above, the scanning electron microscope apparatus 1 includes the electron beam irradiation unit 2 that irradiates the sample 7 with the electron beam EB and the X-direction scanning deflector that two-dimensionally scans the electron beam EB on the sample 7. 23 and a Y-direction scanning deflector 24, and a plurality of signal detectors 31 for detecting the state of electrons emitted from the sample 7 by irradiating the electron beam EB. Further, the scanning electron microscope apparatus 1 according to the present embodiment includes the four-division screen display unit 41 that displays each signal image generated based on the detection signals of the plurality of signal detectors 31 that detect a plurality of types of signals. The display device 4 is provided, and the operation input unit 5 for inputting an operation from an observer. Further, the scanning electron microscope apparatus 1 according to the present embodiment has a horizontal screen division boundary line BLh that divides the four-division screen display unit 41 into two in the horizontal direction, and the four-division screen display unit 41 in the vertical direction. Based on an operation of moving the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv input to the operation input unit 5, a boundary line generation unit 421 that generates a vertical screen division boundary line BLv that is divided into two. In addition, the area changing unit 422 is provided to change the size of each of the four divided screen areas Ara to Ard divided by the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv. Further, the scanning electron microscope apparatus 1 according to the present embodiment specifies, via the operation input unit 5, a marker Mk that does not move following the movement of the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv. The marker display unit 423 is provided for displaying at a predetermined position on the 4-division screen display unit 41. Therefore, according to the present embodiment, the observer inputs an operation of moving the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv into the operation input unit 5, whereby the position of interest indicated by the marker Mk. The difference between the plurality of signal images can be visually clearly and easily confirmed.

Further, in the above-described embodiment, the area variable unit 422 is configured to move each of the four, based on the operation of moving the intersection P of the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv input from the operation input unit 5. The sizes of the divided screen areas Ara to Ard are changed. Therefore, according to the above-described embodiment, the observer can change the size of each of the four divided screen areas Ara to Ard at once by performing the operation of moving the position of the intersection P.

Further, in the above-described embodiment, the 4-split screen display unit 41 has four layers Ly1 to Ly4. Further, the scanning electron microscope apparatus 1 according to the present embodiment includes a signal image assigning unit 425 that assigns a signal image to each of the four layers Ly1 to Ly4. Further, the area changing unit 422, based on the operation of inputting the operation input unit 5 to move the horizontal screen division boundary line BLh and/or the vertical screen division boundary line BLv, each image in each of the four layers Ly1 to Ly4. The sizes of the display areas Ara to Ard are changed. Therefore, according to the present embodiment, a plurality of types of signal images corresponding to different types of detection signals obtained by the same scanning can be displayed in the four divided screen areas Ara to Ard of the four-divided screen display unit 41. it can.

Moreover, in the above-described embodiment, one of the plurality of signal detectors 31 is an EDS detector (not shown). Further, the scanning electron microscope apparatus 1 according to the present embodiment is a timing at which a signal image (SEM image) other than the signal image corresponding to the EDS signal detected by the EDS detector is integrated and output for a predetermined number of pixels. The controller 426 is provided. Therefore, according to the present embodiment, it is possible to simultaneously display the EDS image, which takes time to acquire, and the SEM image, which is generated based on the detection signals of the other electrons, on the 4-split screen display unit 41.

Further, in the above-described embodiment, the signal image assigning unit 425 applies the detection signal detected by the same signal detector 31 to two or more divided screen areas of the four divided screen areas Ara to Ard. The signal image generated based on the above is assigned. Therefore, according to the present embodiment, the observer can allocate and display an arbitrary signal image for which an image is desired to be confirmed, in an arbitrary plurality of regions of the four-division screen display unit 41.

It should be noted that the present invention is not limited to the above-described embodiments, and it is needless to say that other various application examples and modified examples can be taken without departing from the gist of the present invention described in the claims. ..

For example, in the above-described embodiment, the 4-split screen display unit 41 is divided into the four split screen areas Ara to Ard by the horizontal screen split boundary line BLh and the vertical screen split boundary line BLv. It is not limited to this. Each of the horizontal screen division boundary line BLh and the vertical screen division boundary line BLv may be two or more.

Further, the above-described embodiment is a detailed and specific description of the configuration of the apparatus (scanning electron microscope apparatus) in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to one having all the configurations described. It is not something that will be done.

DESCRIPTION OF SYMBOLS 1... Scanning electron microscope device, 2... Electron beam irradiation part, 3... Electron detection device, 4... Display device, 5... Operation input part, 6... Sample chamber, 7... Sample, 21... Electron gun, 22... Focusing lens , 23... X-direction scanning deflector, 24... Y-direction scanning deflector, 25... Objective lens, 31... Signal detector, 32... Amplifying section, 33... Signal processing section, 41... Quad-screen display section, 42 Display control unit, 421... Boundary line generation unit, 422... Region variable unit, 423... Marker display unit, 424... Signal image selection unit, 425... Signal image allocation unit, 426... Timing control unit

Claims (6)

An electron beam irradiation unit for irradiating the sample with an electron beam,
A scanning control unit for two-dimensionally scanning the electron beam on the sample;
A plurality of signal detectors for detecting a plurality of types of signals emitted from the sample by irradiating the electron beam,
A display device having an image display unit for displaying each signal image generated based on the detection signals of the plurality of signal detectors,
An operation input section for inputting operations from the observer,
A horizontal screen division boundary line that divides the image display unit into two in the horizontal direction; and a boundary line generation unit that generates a vertical screen division boundary line that divides the image display unit into two in the vertical direction.
Based on an operation of moving the horizontal screen division boundary line and/or the vertical screen division boundary line input to the operation input unit, four divisions are made by the horizontal screen division boundary line and the vertical screen division boundary line. A scanning electron microscope apparatus comprising: a region variable unit that changes the size of each of the divided screen regions. A marker that does not move following the movement of the horizontal screen division boundary line and/or the vertical screen division boundary line is displayed at a predetermined position on the image display unit designated through an operation on the operation input unit. The scanning electron microscope apparatus according to claim 1, further comprising: a marker display unit that allows the marker display unit to display. The area changing unit changes the size of each of the four divided screen areas based on an operation of moving an intersection of the horizontal screen division boundary line and the vertical screen division boundary line input from the operation input unit. The scanning electron microscope apparatus according to claim 1. The image display unit has four layers,
A signal image assigning unit that assigns the signal image to each of the four layers,
The area changing unit is configured to change the size of each image display area in each of the four layers based on an operation of moving the horizontal screen division boundary line and/or the vertical screen division boundary line input to the operation input unit. The scanning electron microscope apparatus according to claim 2 or 3, wherein One of the plurality of signal detectors is an EDS (Energy Dispersive X-ray Spectrometry) detector,
The timing control unit that further integrates and outputs a signal image other than a signal image generated based on the EDS signal detected by the EDS detector for a predetermined number of pixels. The scanning electron microscope apparatus according to. The signal image allocation unit allocates a signal image generated based on a detection signal detected by the same signal detector to two or more divided screen areas of the four divided screen areas. The scanning electron microscope apparatus according to any one of 2 to 5.

Images