JP2020082164A - Ultrasonic machining device - Google Patents

Ultrasonic machining device Download PDF

Info

Publication number
JP2020082164A
JP2020082164A JP2018223385A JP2018223385A JP2020082164A JP 2020082164 A JP2020082164 A JP 2020082164A JP 2018223385 A JP2018223385 A JP 2018223385A JP 2018223385 A JP2018223385 A JP 2018223385A JP 2020082164 A JP2020082164 A JP 2020082164A
Authority
JP
Japan
Prior art keywords
horn
workpiece
ultrasonic
inclination
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018223385A
Other languages
Japanese (ja)
Other versions
JP7126055B2 (en
Inventor
中居 誠也
Seiya Nakai
誠也 中居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adwelds Corp
Original Assignee
Adwelds Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adwelds Corp filed Critical Adwelds Corp
Priority to JP2018223385A priority Critical patent/JP7126055B2/en
Publication of JP2020082164A publication Critical patent/JP2020082164A/en
Application granted granted Critical
Publication of JP7126055B2 publication Critical patent/JP7126055B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

To provide an ultrasonic machining device, which detects an inclination of a surface of a work-piece at real time and subjects the work-piece to ultrasonic machining while adjusting a lower surface of a horn of ultrasonic vibration means at real time so that the surface matches the detected inclination of the surface of the work-piece.SOLUTION: A lower surface of a horn 73 is initially set to be parallel to a horizontal reference surface; positions corresponding to both ends respectively in a width direction of a work-piece which is arranged between a stage 8 and the horn 73 and is moved (conveyed) relatively in a machining direction are detected by first and second detection means 9a and 9b, in a state where the horn 73 is initially set; an inclination in the width direction of an upper surface of the work-piece relative to the lower surface of the horn 73 adjusted horizontally by control means 10 is detected; and rotation driving means 6 is controlled by the control means 10 and second moving means 5 is rotated, so that the work-piece P is subjected to ultrasonic welding, while adjusting the inclination of the horn 73 so that the inclination matches the detected inclination in the width direction of the upper surface of the work-piece.SELECTED DRAWING: Figure 2

Description

本発明は、被加工物を超音波により溶着、切断等の加工を行う超音波加工装置に関する。 TECHNICAL FIELD The present invention relates to an ultrasonic processing apparatus that performs processing such as welding and cutting of a workpiece by ultrasonic waves.

従来、被加工物を溶着したり、切断したりするのに超音波振動が使用されており、超音波振動するホーン、或いは、ホーンの下端に取り付けられた切断刃と、被加工物を支持する支持体との間に被加工物を配置し、ホーンの超音波振動を被加工物に与えることにより、被加工物の溶着或いは切断を行っている。このとき、ホーンの下面、或いは、ホーンに取り付けられた切断刃の刃面と、被加工物の上面とが平行に保持されていない場合、被加工物を全面にわたって均一に溶着できずに溶着むらが生じ、切断では切り残しが発生するなどの問題が生じるおそれがある。 BACKGROUND ART Conventionally, ultrasonic vibration has been used to weld or cut a work piece, and a horn that vibrates ultrasonically or a cutting blade attached to the lower end of the horn and a work piece are supported. The workpiece is placed between the support and the ultrasonic vibration of the horn is applied to the workpiece to weld or cut the workpiece. At this time, if the lower surface of the horn or the blade surface of the cutting blade attached to the horn and the upper surface of the work piece are not held parallel to each other, the work piece cannot be evenly welded over the entire surface and uneven welding occurs. May occur, and problems such as uncut parts may occur during cutting.

そこで、特許文献1に記載のような倣い機構を、被加工物を搭載する搭載部に設け、この倣い機構により搭載部の搭載面を水平な倣い基準面に倣い調整し、倣い調整後の水平な搭載部に被加工物を搭載し、既に水平に保持されたホーンの下面、或いは、既に水平に保持された切断刃の刃面と、被加工物とを平行に保持した状態で、ホーン或いは切断刃により、被加工物を超音波により溶着あるいは切断することが行われている。 Therefore, a copying mechanism as described in Patent Document 1 is provided in a mounting portion on which a workpiece is mounted, and the copying mechanism adjusts the mounting surface of the mounting portion to a horizontal copying reference surface, and after the copying adjustment is performed horizontally. The work piece is mounted on the mounting portion, and the horn or the lower surface of the horn that is already held horizontally, or the blade surface of the cutting blade that is already held horizontally and the work piece are held in parallel with each other. Ultrasonic waves are used to weld or cut the work piece with a cutting blade.

特開2009−212214号公報(段落0050〜0059および図1〜図4参照)JP 2009-212214 A (see paragraphs 0050 to 0059 and FIGS. 1 to 4)

しかし、被加工物を搭載する搭載部は水平に調整されるものの、被加工物の厚みが一定でその上面が水平であるとは限らず、このように上面が水平ではない被加工物を溶着したり切断したりするには、被加工物の上面が常に水平に保持されるように倣い調整するか、ホーンの下面或いは切断刃の刃面を被加工物の上面に対して平行になるように倣い調整する必要が生じる。 However, although the mounting part on which the work piece is mounted is adjusted horizontally, it is not always the case that the work piece has a constant thickness and its upper surface is horizontal. To cut or cut, make a copy adjustment so that the upper surface of the work piece is always held horizontally, or make the lower surface of the horn or the blade surface of the cutting blade parallel to the upper surface of the work piece. It will be necessary to adjust in accordance with.

特に、所定の加工方向に移動される被加工物を例えば全面にわたって連続的に溶着する場合に、上記した特許文献1に記載のような倣い機構では、移動される被加工物の上面をリアルタイムで水平に倣い調整してホーンの下面に対して平行に常に保持することができないことから、移動される被加工物を全面にわたり連続的に溶着することができないという不都合が生じる。また、被加工物を移動しつつ一定間隔ごとに切断する場合も同様に、被加工物の上面全面をリアルタイムでホーンに取り付けた切断刃の刃面に対して平行に保持することができないため、移動される被加工物を切り残しなく切断することが困難である。 In particular, when a workpiece to be moved in a predetermined processing direction is continuously welded over the entire surface, for example, in the copying mechanism as described in Patent Document 1 above, the upper surface of the workpiece to be moved is moved in real time. Since it is not possible to adjust the profile horizontally and always hold it parallel to the lower surface of the horn, there arises a disadvantage that the workpiece to be moved cannot be continuously welded over the entire surface. Also, when cutting the workpiece at regular intervals while moving, similarly, since the entire upper surface of the workpiece cannot be held in parallel with the blade surface of the cutting blade attached to the horn in real time, It is difficult to cut the workpiece to be moved without cutting.

本発明は、上記した課題に鑑みてなされたものであり、被加工物の表面の傾きをリアルタイムで検出し、超音波振動手段のホーン下面が、検出した被加工物表面の傾きに一致するようにリアルタイムで調整しつつ、被加工物を超音波加工することを目的とする。 The present invention has been made in view of the above problems, and detects the inclination of the surface of the workpiece in real time so that the lower surface of the horn of the ultrasonic vibrating means matches the detected inclination of the surface of the workpiece. The objective is to ultrasonically process the workpiece while adjusting in real time.

上記した課題を解決するために、本発明に係る超音波加工装置は、被加工物をその加工方向に相対的に移動させつつ超音波により加工する超音波加工装置において、上下方向に移動可能で、かつ、回転可能に設けられた移動手段と、前記移動手段に取り付けられ、振動子および該振動子により発生する超音波振動に共振するホーンを有する超音波振動手段と、前記ホーンの下方に配設され前記ホーンとの間で前記被加工物を挟持するステージと、前記移動手段に取り付けられて前記ホーンの下面付近に配設されて、前記移動手段の上下動および回転により前記ホーンとともに上下移動および回転移動し、前記被加工物の幅方向の両端それぞれに対する位置を検出する第1、第2検出手段と、前記第1、第2検出手段による検出データを取り込み、前記移動手段の上下の移動および回転を制御する制御手段とを備え、前記制御手段は、水平な基準面に対する前記第1、第2検出手段それぞれの相対位置の検出データに基づき、前記回転駆動手段を制御して前記ホーンの下面が水平になるように調整する初期設定を行い、前記ステージと前記ホーンとの間に配置されて前記加工方向に移動される前記被加工物に対し、前記第1、第2検出手段により前記被加工物の上面の前記両端それぞれに対する位置を検出して、初期設定により水平に調整された前記ホーンの下面に対する前記被加工物の上面の傾きを導出し、前記移動手段を回転させることにより、前記ホーンの下面の傾きが、導出した前記被加工物の上面の傾きに一致するように調整しながら前記超音波振動手段を制御して前記被加工物を超音波加工することを特徴としている。 In order to solve the above-mentioned problems, the ultrasonic processing apparatus according to the present invention is an ultrasonic processing apparatus that processes ultrasonically while moving a workpiece relatively in the processing direction, and is movable in the vertical direction. And a rotatably provided moving means, an ultrasonic vibrating means attached to the moving means and having a vibrator and a horn that resonates with ultrasonic vibration generated by the vibrator, and an ultrasonic vibrating means disposed below the horn. A stage that is provided and holds the workpiece between the horn and a stage that is attached to the moving means and disposed near the lower surface of the horn, and moves up and down together with the horn by the vertical movement and rotation of the moving means. And the first and second detection means that rotate and move to detect the positions of the workpiece with respect to both ends in the width direction, and the detection data from the first and second detection means are fetched to move the movement means up and down. And control means for controlling rotation, the control means controls the rotation drive means on the basis of detection data of relative positions of the first and second detection means with respect to a horizontal reference plane to control the rotation of the horn. Initial setting is performed to adjust the lower surface to be horizontal, and the first and second detection means are used to move the workpiece that is disposed between the stage and the horn and is moved in the processing direction. By detecting the positions of the upper surface of the workpiece with respect to each of both ends, by deriving the inclination of the upper surface of the workpiece with respect to the lower surface of the horn horizontally adjusted by initial setting, by rotating the moving means, It is characterized in that the ultrasonic vibration means is controlled to ultrasonically machine the workpiece while adjusting the inclination of the lower surface of the horn to match the derived inclination of the upper surface of the workpiece.

このような構成によれば、ステージとホーンとの間に配置されて加工方向に相対的に移動される被加工物の幅方向の両端それぞれに対する位置が第1、第2検出手段により検出され、第1、第2検出手段による検出データに基づき、制御手段により初期設定されて水平に調整されたホーンの下面に対する被加工物の上面の幅方向における傾きが導出され、移動手段が制御手段により制御されて回転され、ホーンの下面の傾きが、導出された被加工物の上面の幅方向における傾きに一致するように調整される。そのため、被加工物の上面の幅方向における傾きをリアルタイムで検出しながら、ホーンの下面を被加工物の上面の傾きに合わせつつ、加工方向に移動される長尺の被加工物を超音波加工することができる。 With such a configuration, the positions of the workpiece, which are arranged between the stage and the horn and are relatively moved in the machining direction, with respect to both ends in the width direction, are detected by the first and second detecting means, respectively. Based on the detection data by the first and second detection means, the inclination in the width direction of the upper surface of the workpiece with respect to the lower surface of the horn which is initialized and horizontally adjusted by the control means is derived, and the moving means is controlled by the control means. The horn is rotated so that the inclination of the lower surface of the horn is adjusted to match the derived inclination of the upper surface of the workpiece in the width direction. Therefore, while detecting the inclination of the upper surface of the workpiece in the width direction in real time, ultrasonic processing of a long workpiece that is moved in the processing direction while adjusting the lower surface of the horn to the inclination of the upper surface of the workpiece is performed. can do.

また、前記第1、第2検出手段は、前記ホーンに対し、前記加工方向に移動される前記被加工物の前記加工方向の上流側に配置されているとよい。こうすると、被加工物の加工方向の上流側で被加工物の上面の傾きをリアルタイムで検知し、検知した傾きをフィードバックすることにより、加工前にホーンの下面の傾きを調整して被加工物を超音波加工することができ、リアルタイムでホーンの下面を被加工物の上面の傾きに合わせることができる。 Further, the first and second detection means may be arranged upstream of the horn in the processing direction of the workpiece to be moved in the processing direction with respect to the horn. In this way, the inclination of the upper surface of the workpiece is detected in real time on the upstream side of the processing direction of the workpiece, and the detected inclination is fed back to adjust the inclination of the lower surface of the horn before machining. Can be ultrasonically processed, and the lower surface of the horn can be matched with the inclination of the upper surface of the workpiece in real time.

また、前記被加工物表面のほぼ中央に対する位置を検出する第3検出手段をさらに備え、前記第1、第2検出手段と前記第3検出手段は、前記ホーンを挟むように上流側と下流側に分かれて配置されているとよい。こうすると、第1、第2検出手段に加えて第3検出手段を設けることで、3点で被加工物の表面の3次元的な傾きを検知することができ、被加工物の表面の加工方向への傾きに追従してホーンの加工方向への傾きも調整することができ、ホーンの上下の中心軸が被加工物の表面に対して常に垂直に接するように、リアルタイムでホーンの3次元的な傾きを調整しつつ被加工物の超音波加工を行うことが可能になる。 Further, a third detecting means for detecting a position of the surface of the workpiece with respect to substantially the center is further provided, and the first and second detecting means and the third detecting means are located on the upstream side and the downstream side so as to sandwich the horn. It is good to be divided into two parts. In this case, by providing the third detecting means in addition to the first and second detecting means, the three-dimensional inclination of the surface of the work piece can be detected at three points, and the surface of the work piece is processed. The inclination of the horn in the machining direction can be adjusted by following the inclination in the direction, and the three-dimensional horn can be adjusted in real time so that the upper and lower central axes of the horn are always in contact with the surface of the workpiece. It becomes possible to perform ultrasonic machining of the workpiece while adjusting the mechanical inclination.

また、前記移動手段は、前記ステージと前記ホーンとの間に配置された前記被加工物の表面の上下位置の変化を検知して超音波振動手段の上下位置を調整する調整手段を備えるとよい。 Further, the moving unit may include an adjusting unit that detects a change in the vertical position of the surface of the workpiece disposed between the stage and the horn and adjusts the vertical position of the ultrasonic vibration unit. ..

こうすると、被加工物の厚みを含む表面の上下位置が一定ではなくばらついていても、調整手段によって、被加工物の厚みを含む表面の上下位置の変動にリアルタイムで追従して超音波振動手段の上下位置が調整されるため、厚みを含む表面の上下位置にばらつきを有する被加工物を均質に超音波加工することができる。 By doing so, even if the vertical position of the surface including the thickness of the work piece is not constant but varies, the ultrasonic vibration means can follow the fluctuation of the vertical position of the surface including the thickness of the work piece in real time by the adjusting means. Since the vertical position of the is adjusted, it is possible to uniformly ultrasonically process a workpiece having variations in the vertical position of the surface including the thickness.

また、前記第1、第2検出手段の下端が、前記ホーンの下面と同一水平面内に配置され、前記制御手段は、前記移動手段を前記基準面に向かって移動させることにより、前記超音波振動手段を前記第1、第2検出手段とともに上下に移動させ、前記第1検出手段または前記第2検出手段のいずれかの下端が前記基準面に当接した状態から、前記第1、第2検出手段の下端がともに前記基準面に当接するように、前記移動手段を回転させることにより、前記超音波振動手段および前記第1、第2検出手段を回転させて、前記初期設定を行うようにするとよい。こうすると、ホーンの下面が水平になるように調整する初期設定を、精度よく行うことができる。 Further, the lower ends of the first and second detection means are arranged in the same horizontal plane as the lower surface of the horn, and the control means moves the moving means toward the reference surface to cause the ultrasonic vibration. Means for moving up and down together with the first and second detecting means, and from the state where the lower end of either the first detecting means or the second detecting means contacts the reference surface, the first and second detecting means When the moving means is rotated so that both lower ends of the means come into contact with the reference surface, the ultrasonic vibrating means and the first and second detecting means are rotated to perform the initial setting. Good. This makes it possible to accurately perform the initial setting for adjusting the lower surface of the horn to be horizontal.

また、前記被加工物は少なくとも2つの被溶着物が重ね合されてなり、前記2つの被溶着物が、前記超音波振動手段による連続的な超音波の印加により連続溶着されるのが望ましい。このような構成によれば、長尺の被加工物を成す2つの被溶着物を全面にわたって連続的に均質に超音波溶着することができる。 Further, it is preferable that at least two objects to be welded are superposed on each other, and the two objects to be welded are continuously welded by continuous application of ultrasonic waves by the ultrasonic vibrating means. With such a configuration, it is possible to continuously and uniformly ultrasonically weld two objects to be welded, which form a long object to be processed, over the entire surface.

また、前記ホーンの下端に取り付けられ前記ホーンの下面に平行に刃面が設定された切断刃を備え、前記被加工物は、前記搬送手段による搬送が所定時間ごとに停止され、停止中に前記超音波振動手段による超音波の印加によって切断加工されるものであってもよい。このような構成によれば、長尺の被加工物の上面の傾きに切断刃の刃面を合わせつつ、長尺の被加工物を例えば一定間隔ごとに切り残しなく超音波切断することができる。 Further, a cutting blade that is attached to the lower end of the horn and has a blade surface set parallel to the lower surface of the horn is provided, and the workpiece is conveyed at a predetermined time by the conveying means, and the workpiece is stopped during the stop. It may be cut by applying ultrasonic waves by ultrasonic vibrating means. According to such a configuration, it is possible to ultrasonically cut a long work piece without leaving an uncut portion, for example, at regular intervals while adjusting the blade surface of the cutting blade to the inclination of the upper surface of the long work piece. ..

また、前記移動手段は、上下方向を含む他の方向にも移動可能で3次元的に移動するものであってもよい。こうすると、超音波振動手段のホーンの下面の傾きを3次元的に調整することができ、ホーンの縦方向の中心軸を常に被加工物の表面に対して垂直に保持して加工することができる。 Further, the moving means may be movable in other directions including a vertical direction and may be moved three-dimensionally. By doing so, the inclination of the lower surface of the horn of the ultrasonic vibrating means can be adjusted three-dimensionally, and the vertical central axis of the horn can always be held perpendicular to the surface of the workpiece for processing. it can.

本発明によれば、ホーンの下面の傾きを、被加工物の上面の幅方向における傾きに一致するように調整されるため、ホーンの下面を、被加工物の上面の幅方向における傾きにリアルタイムで合わせながら、所定の加工方向に移動される被加工物を均質に超音波加工することができる。 According to the present invention, since the inclination of the lower surface of the horn is adjusted to match the inclination of the upper surface of the workpiece in the width direction, the lower surface of the horn is adjusted in real time to the inclination of the upper surface of the workpiece in the width direction. It is possible to uniformly ultrasonically machine a workpiece to be moved in a predetermined machining direction while adjusting the above.

本発明の第1実施形態に係る超音波溶着装置の左側面図である。It is a left side view of the ultrasonic welding device concerning a 1st embodiment of the present invention. 図1の正面図である。It is a front view of FIG. 図2一部の正面図である。2 is a front view of a portion. 第1実施形態の動作説明図である。It is operation|movement explanatory drawing of 1st Embodiment. 第1実施形態2の動作説明用フローチャートである。7 is a flowchart for explaining the operation of the first embodiment 2. 本発明の第2実施形態に係る超音波切断装置の一部の正面図である。It is a front view of a part of ultrasonic cutting device concerning a 2nd embodiment of the present invention. 第2実施形態の動作説明図である。It is operation|movement explanatory drawing of 2nd Embodiment. 第3実施形態の左側面図である。It is a left side view of 3rd Embodiment. 第3実施形態の一部の平面図である。It is a one part top view of 3rd Embodiment.

<第1実施形態>
本発明を超音波溶着装置に適用した第1実施形態について図1ないし図5を参照して説明する。
<First Embodiment>
A first embodiment in which the present invention is applied to an ultrasonic welding device will be described with reference to FIGS. 1 to 5.

(装置構成)
図1、図2に示すように、超音波溶着装置1は、右側面視がコ字状をなす固定の取付部材2と、この取付部材2に対し上下方向に移動自在に設けられた第1の移動手段3と、第1の移動手段3をZ軸の双方向に上下駆動する上下駆動手段4と、第1の移動手段3に対し回転自在に設けられた第2の移動手段5と、所定の回転軸周りに第2の移動手段5を回転駆動する回転駆動手段6と、振動子71、ブースタ72およびホーン73を有し、第2の移動手段5に取り付けられた超音波振動手段7と、ホーン73の下方に配設され、2つの重畳された被溶着物から成る被加工物Pをホーン73との間で挟持するステージ8と、被加工物Pを水平方向の加工方向であるY軸方向に搬送する搬送手段(図示省略)と、被加工物Pの幅方向の両端それぞれに対する位置を検出する第1、第2検出手段9a,9bと、第1、第2検出手段9a,9bによる検出データを取り込み、超音波振動手段7、上下駆動手段4、回転駆動手段6および搬送手段を制御するマイクロコンピュータ構成の制御手段10とを備えている。ここで、第1の移動手段3および第2の移動手段5が、本発明における移動手段に相当する。
(Device configuration)
As shown in FIGS. 1 and 2, the ultrasonic welding device 1 includes a fixed mounting member 2 having a U-shape when viewed from the right side, and a first mounting member 2 which is vertically movable with respect to the mounting member 2. Moving means 3, a vertical moving means 4 for vertically moving the first moving means 3 in both directions of the Z-axis, a second moving means 5 rotatably provided with respect to the first moving means 3, An ultrasonic vibrating means 7 attached to the second moving means 5 has a rotation driving means 6 for rotationally driving the second moving means 5 around a predetermined rotation axis, a vibrator 71, a booster 72 and a horn 73. And a stage 8 disposed below the horn 73 for sandwiching a work piece P composed of two overlapped welded objects with the horn 73, and the work piece P in a horizontal processing direction. Conveying means (not shown) for conveying in the Y-axis direction, first and second detecting means 9a, 9b for detecting the positions of the workpiece P with respect to both ends in the width direction, and first and second detecting means 9a, 9a, 9b. It is provided with a control means 10 of a microcomputer configuration for taking in the detection data by 9b and controlling the ultrasonic vibration means 7, the vertical drive means 4, the rotation drive means 6 and the conveying means. Here, the first moving means 3 and the second moving means 5 correspond to the moving means in the present invention.

上下駆動手段4は、取付部材2の前方に延出した上端部2aに配置されたモータ41と、取付部材2の上端部2a、および、該上端部2aと同じく前方に延出した下端部2bに上下端が回転自在に保持されモータ41の回転により回転する雄ねじから成るボールねじ42と、取付部材2の前面の左、右端部にそれぞれ設けられた上下方向(Z軸方向)の左、右ガイドレール43a,43bとを備えている。 The vertical drive means 4 includes a motor 41 arranged at an upper end portion 2a extending forward of the mounting member 2, an upper end portion 2a of the mounting member 2, and a lower end portion 2b extending forward of the upper end portion 2a. And a ball screw 42, which is a male screw whose upper and lower ends are rotatably held by the motor 41 and is rotated by the rotation of the motor 41, and left and right in the vertical direction (Z-axis direction) provided at the left and right ends of the front surface of the mounting member 2, respectively. It is provided with guide rails 43a and 43b.

第1の移動手段3は、前面上部に前方に延出して上延出部31aが一体形成されたベース部材31と、ベース部材31の前方に配設され後面下部に後方に延出して下延出部32aが一体形成された支持部材32と、上延出部31aの下面にシリンダチューブ33aが取り付けられた流体シリンダ33と、下延出部32aの上面に設けられた荷重検出用のロードセル34とを備えている。 The first moving means 3 is disposed at the front of the base member 31 and has a base member 31 integrally formed with an upper extending portion 31a that extends forward at the front upper portion, and extends rearward at the lower rear portion to extend downward. A support member 32 integrally formed with the projecting portion 32a, a fluid cylinder 33 having a cylinder tube 33a attached to the lower surface of the upper extending portion 31a, and a load detection load cell 34 provided on the upper surface of the lower extending portion 32a. It has and.

そして、流体シリンダ33のシリンダチューブ33a内を上下動するピストンのロッド33bの下端部が、シリンダチューブ33aから下方に突出し、このロッド33bの下端に下延出部32aが連結されて、支持部材32が流体シリンダ33により上方に牽引されるようにしてベース部材31に連結されている。このとき、図示省略されているが、ベース部材31に対し支持部材32がガイドを介して取り付けられている。また、ロードセル34により検出される流体シリンダ33の荷重データが制御手段10により取り込まれ、ロードセル34の検出荷重が常に予め規定された所定値になるように制御手段10により流体シリンダ33が制御されてベース部材31に対する支持部材32の上下方向(Z軸方向)の位置が調整され、これにより第2の移動手段5さらにはホーン73の下面の上下位置が、後述するように被加工物Pの厚みを含む表面の上下位置の変化に追従して調整されるようになっている。ここで、流体シリンダ33およびロードセル34が、本発明における調整手段に相当する。 Then, the lower end portion of the rod 33b of the piston that moves up and down in the cylinder tube 33a of the fluid cylinder 33 projects downward from the cylinder tube 33a, and the lower extension portion 32a is connected to the lower end of this rod 33b, and the support member 32 is formed. Is connected to the base member 31 so as to be pulled upward by the fluid cylinder 33. At this time, although not shown, the support member 32 is attached to the base member 31 via a guide. Further, the load data of the fluid cylinder 33 detected by the load cell 34 is fetched by the control means 10, and the control means 10 controls the fluid cylinder 33 so that the load detected by the load cell 34 always becomes a predetermined value. The position of the support member 32 in the vertical direction (Z-axis direction) with respect to the base member 31 is adjusted, so that the vertical position of the second moving means 5 and further the lower surface of the horn 73 causes the thickness of the work piece P to be described later. It is designed to be adjusted according to the change in the vertical position of the surface including. Here, the fluid cylinder 33 and the load cell 34 correspond to the adjusting means in the present invention.

ところで、第1の移動手段3のベース部材31の後端部には上下方向の貫通孔(図示省略)が透設され、この貫通孔の内面に雌ねじが形成されており、この貫通孔に上下駆動手段4のボールねじ42が螺通されるとともに、ベース部材31の後面の左右端部に形成された上下方向のガイド溝(図示省略)に、上下駆動手段4の、左、右ガイドレール43a,43bそれぞれが嵌まり込んだ状態でベース部材31が上下駆動手段4に取り付けられており、モータ41が回転してボールねじ42が回転することにより、ベース部材31が両ガイドレール43a,43bに沿ってZ軸の双方向である上方または下方に移動する。このようにして、第1の移動手段3が取付部材2に上下動自在に取り付けられて上下駆動手段4により上下に移動する。 By the way, a vertical through hole (not shown) is provided at the rear end of the base member 31 of the first moving means 3, and a female screw is formed on the inner surface of the through hole. The ball screw 42 of the drive means 4 is threaded, and the left and right guide rails 43a of the vertical drive means 4 are inserted in vertical guide grooves (not shown) formed in the left and right end portions of the rear surface of the base member 31. , 43b are fitted in the vertical driving means 4, and the motor 41 rotates to rotate the ball screw 42, so that the base member 31 is attached to both guide rails 43a and 43b. Along the Z axis, either upward or downward. In this way, the first moving means 3 is vertically movably attached to the attachment member 2 and is moved up and down by the vertical drive means 4.

第2の移動手段5は筒状の基部51を有し、基部51の内側に超音波振動手段7を保持し、基部51の後面中央に後方へ膨出して一体に設けられた回転軸52を中心に回転自在に、第1の移動手段3の支持部材32の前面側に第2の移動手段5が支持されている。このとき、図1に示すように、第1の移動手段3の支持部材32の前面中央に形成された凹部にはボールベアリング35が埋設されており、このボールベアリング35に回転軸52が内嵌され、第2の移動手段5の基部51が回転軸52の周りに回転するようになっている。 The second moving means 5 has a cylindrical base portion 51, holds the ultrasonic vibrating means 7 inside the base portion 51, and has a rotating shaft 52 integrally bulged backward at the center of the rear surface of the base portion 51. The second moving means 5 is supported on the front side of the support member 32 of the first moving means 3 so as to be rotatable around the center. At this time, as shown in FIG. 1, a ball bearing 35 is embedded in a recess formed in the center of the front surface of the support member 32 of the first moving means 3, and the rotary shaft 52 is fitted in the ball bearing 35. Thus, the base portion 51 of the second moving means 5 is adapted to rotate around the rotation shaft 52.

回転駆動手段6は、第2の移動手段5の基部51の右側面に取り付けられた収容部61と、該収容部61内に収容されたアクチュエータ部(図示省略)と、該アクチュエータ部の上下方向(Z軸の双方向への)への移動に連動して回転する回転軸62と、第2の移動手段5の基部51の右側面に左端が固着され、右端部に回転軸62が前後方向(Y軸方向)に貫設されて回転軸62に連動して回転する連結部63とを備える。 The rotation driving means 6 includes a housing portion 61 attached to the right side surface of the base portion 51 of the second moving means 5, an actuator portion (not shown) housed in the housing portion 61, and a vertical direction of the actuator portion. The rotary shaft 62 that rotates in conjunction with the movement (in both directions of the Z-axis), the left end is fixed to the right side surface of the base 51 of the second moving means 5, and the rotary shaft 62 is in the front-back direction at the right end. And a connecting portion 63 that penetrates in the (Y-axis direction) and that rotates in conjunction with the rotation shaft 62.

なお、上記したアクチュエータ部はX軸の双方向に移動可能に収容部61に収容されている。このとき、アクチュエータ部の上下動により回転軸62が回転し、連結部63が回転軸62に連動して回転したときに、第2の移動手段5の基部51が連結部63の回転に連動して回転しようとするが、基部51は、回転軸52を中心にして回転自在に第1の移動手段3の支持部材32に支持されているため、基部51は回転軸52を中心に回転することになる。そして、基部51が回転軸52周りに自在に回転する場合、回転駆動手段6側の回転軸62は回転軸52を中心とする円弧を描いて移動するため、回転軸62のこのような回転軸52を中心とする円弧移動を可能にするには、回転軸62を水平方向であるX軸の双方向にフリーに移動可能に支持する必要がある。 The actuator section described above is housed in the housing section 61 so as to be movable in both directions of the X axis. At this time, when the rotating shaft 62 rotates due to the vertical movement of the actuator portion and the connecting portion 63 rotates in conjunction with the rotating shaft 62, the base portion 51 of the second moving means 5 interlocks with the rotation of the connecting portion 63. However, since the base portion 51 is rotatably supported by the support member 32 of the first moving means 3 about the rotation shaft 52, the base portion 51 should rotate about the rotation shaft 52. become. When the base portion 51 freely rotates around the rotation shaft 52, the rotation shaft 62 on the rotation driving means 6 side moves in an arc centered on the rotation shaft 52. In order to enable circular arc movement around 52, it is necessary to support the rotary shaft 62 so as to be freely movable in both directions of the X axis, which is the horizontal direction.

そこで、上記したように、回転駆動手段6のアクチュエータ部を、X軸の双方向にフリーに移動可能に収容部61に収容している。なお、アクチュエータ部は、モータおよびボールねじ、ベアリングやスライドガイド等の組み合わせから成る周知の構成を有し、アクチュエータ部の上下方向(Z軸の双方向)への移動が回転軸62の回転に変換されるようになっている。 Therefore, as described above, the actuator part of the rotation driving means 6 is housed in the housing part 61 so as to be freely movable in both directions of the X axis. The actuator section has a well-known configuration including a combination of a motor, a ball screw, a bearing, a slide guide, and the like, and the movement of the actuator section in the vertical direction (bidirectional to the Z axis) is converted into rotation of the rotary shaft 62. It is supposed to be done.

ところで、回転駆動手段6には、回転軸62の回転を所定範囲に規制するためのリミッタ64が設けられている。このリミッタ64は、連結部63の右側面に設けられた取付部64aと、取付部64aの上下に配設された上、下リミットセンサ64b,64cと、収容部61の右側面であって上リミットセンサ64bの上方位置および下リミットセンサ64cの下方位置それぞれに設けられた上、下規制部64d,64eとを備えている。 By the way, the rotation driving means 6 is provided with a limiter 64 for restricting the rotation of the rotary shaft 62 within a predetermined range. The limiter 64 includes a mounting portion 64a provided on the right side surface of the connecting portion 63, upper and lower portions of the mounting portion 64a, lower limit sensors 64b and 64c, and a right side surface of the accommodating portion 61. It is provided with upper and lower restricting portions 64d and 64e which are provided above the limit sensor 64b and below the lower limit sensor 64c, respectively.

そして、連結部63のX軸方向の中心軸が水平状態つまりX軸に平行な状態において、上、下リミットセンサ64b,64cそれぞれから、上、下規制部64d,64eまでの距離が同じ距離になるように、上、下リミットセンサ64b,64cおよび上、下規制部64d,64eの設置位置が初期状態として設定されている。そのため、連結部63のX軸方向の中心軸が水平な状態から、回転軸62の回転によって第2の移動手段5の基部51が回転軸52を中心に回転する際に、上リミットセンサ64bまたは下リミットセンサ64cが上規制部64dまたは下規制部64eに接触するまでの規制範囲内で、基部51の回転が許容されるようになっている。 Then, in a state where the central axis of the connecting portion 63 in the X-axis direction is horizontal, that is, in a state parallel to the X-axis, the distances from the upper and lower limit sensors 64b and 64c to the upper and lower regulating portions 64d and 64e are the same. As described above, the installation positions of the upper and lower limit sensors 64b and 64c and the upper and lower restricting portions 64d and 64e are set as the initial state. Therefore, when the base 51 of the second moving means 5 rotates about the rotation shaft 52 due to the rotation of the rotation shaft 62 from the state where the central axis of the connecting portion 63 in the X-axis direction is horizontal, the upper limit sensor 64b or The rotation of the base portion 51 is allowed within the regulation range until the lower limit sensor 64c contacts the upper regulation portion 64d or the lower regulation portion 64e.

超音波振動手段7は、上記したように振動子71、ブースタ72、ホーン73を有し、ブースタ72の下端とホーン73の上端とが、互いの中心軸が同軸になるように無頭ねじにより連結され、ブースタ72のほぼ中央の位置と両端位置とが、超音波振動の最大振幅点となるように、ブースタ72は共振周波数の一波長の長さに形成されている。このとき、最大振幅点から1/4波長離れた位置は、それぞれ第1および第2最小振幅点に相当する。また、ブースタ72は、上端部側から見た断面が例えば円柱状に形成され、ブースタ72の上端に、ブースタ72の中心軸と同軸になるように振動子71が無頭ねじにより接続されている。 The ultrasonic vibrating means 7 has the vibrator 71, the booster 72, and the horn 73 as described above, and uses a headless screw so that the lower end of the booster 72 and the upper end of the horn 73 are coaxial with each other. The booster 72 is formed to have a length of one wavelength of the resonance frequency so that the booster 72 is connected and the substantially central position and both end positions of the booster 72 become the maximum amplitude point of the ultrasonic vibration. At this time, the positions ¼ wavelength apart from the maximum amplitude point correspond to the first and second minimum amplitude points, respectively. The booster 72 has a columnar cross section viewed from the upper end side, for example, and the vibrator 71 is connected to the upper end of the booster 72 by a headless screw so as to be coaxial with the center axis of the booster 72. ..

そして、ブースタ72の第1最小振幅点および第2最小振幅点において、ブースタ72が第2の移動手段5の基部51に支持され、基部51の内側に把持されるようにして超音波振動手段7が第2の移動手段5に取り付けられている。また、ホーン73は、その両端位置が最大振幅点となるように、超音波振動における共振周波数の半波長の長さに形成され、正面視で矩形状であって側面視で先端に向ってやや先細りする形状に形成されている。 Then, at the first minimum amplitude point and the second minimum amplitude point of the booster 72, the booster 72 is supported by the base portion 51 of the second moving means 5 and is held inside the base portion 51 so that the ultrasonic vibrating means 7 can be held. Are attached to the second moving means 5. Further, the horn 73 is formed to have a half-wave length of the resonance frequency in ultrasonic vibration so that the both end positions become the maximum amplitude point, and it is rectangular in a front view and slightly toward the tip in a side view. It is formed in a tapered shape.

第1、第2検出手段9a,9bは、例えば被加工物Pの上面との間の距離を計測する距離センサにより構成され、被加工物Pの表面における幅方向の両端それぞれからの距離から相対的な位置を検出するものであり、ホーン73に対し、搬送手段による被加工物Pの図1中の矢印に示す搬送方向(Y軸方向)の上流側に配置されている。ここで、第1、第2検出手段9a,9bを構成する距離センサは、接触式或いは非接触式のいずれであってもよいが、1μm単位で計測できるものを使用するのが望ましい。 The first and second detecting means 9a and 9b are configured by, for example, distance sensors that measure the distance between the upper surface of the workpiece P and the relative distances from both ends of the surface of the workpiece P in the width direction. The position is detected upstream of the horn 73 in the carrying direction (Y-axis direction) of the workpiece P by the carrying means indicated by the arrow in FIG. Here, the distance sensor forming the first and second detecting means 9a and 9b may be of a contact type or a non-contact type, but it is preferable to use a distance sensor that can measure in units of 1 μm.

具体的には、図2、図3に示すように、左右の取付部15a,15bが第2の移動手段5の基部51の例えば下面の左右の前端に垂下して設けられ、両取付部15a,15bの下端部に第1、第2検出手段9a,9bが取り付けられ、第1、第2検出手段9a,9bの下端を含む面が、ホーン73の下面付近であって該下面と同一水平面内に配置され、上下駆動手段4および回転駆動手段6の動作によりホーン73とともに上下移動し、回転するようになっている。このとき、第1、第2検出手段9a,9b間の距離が、被加工物Pの幅とほぼ同じか、或いは若干狭くなるように第1、第2検出手段9a,9bが取り付けられる。 Specifically, as shown in FIGS. 2 and 3, the left and right mounting portions 15a and 15b are provided so as to hang down, for example, on the left and right front ends of the bottom surface of the base portion 51 of the second moving means 5, and the both mounting portions 15a. , 15b are attached to the lower ends of the first and second detecting means 9a and 9b, and the surface including the lower ends of the first and second detecting means 9a and 9b is near the lower surface of the horn 73 and is flush with the lower surface. The horn 73 is arranged inside and is vertically moved and rotated together with the horn 73 by the operations of the vertical drive means 4 and the rotary drive means 6. At this time, the first and second detecting means 9a and 9b are attached such that the distance between the first and second detecting means 9a and 9b is substantially the same as or slightly narrower than the width of the workpiece P.

そして、第1、第2検出手段9a,9bの検出データに基づき、制御手段10により、ホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線が水平になるように初期設定され、初期設定により水平に調整されたホーン73に対して被加工物P(ここでは、2つの被溶着物)の上面がどれくらい傾いているかが検出され、被加工物Pの上面の傾きにホーン73の下面の傾きが一致するように回転駆動手段6によりホーン73が回転され、被加工物Pの上面とホーン73の下面とが同じ傾きに調整された状態で、ホーン73とステージ8との間に挟持された状態の被加工物Pに超音波振動が与えられ、被加工物Pが溶着される。このとき、図4に示すように、被加工物Pの上面の幅方向における傾きがリアルタイムで検出されてホーン73の下面が被加工物Pの上面の傾きに調整されつつ、搬送手段により図4中の矢印方向に搬送される長尺の被加工物Pを超音波振動による熱によって連続的に溶着される。 Then, based on the detection data of the first and second detecting means 9a and 9b, the control means 10 initializes the line connecting the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b to be horizontal. It is detected how much the upper surface of the workpiece P (here, the two objects to be welded) is inclined with respect to the horn 73 that is set and horizontally adjusted by the initial setting, and the inclination of the upper surface of the workpiece P is detected. The horn 73 is rotated by the rotation driving means 6 so that the lower surface of the horn 73 has the same inclination, and the upper surface of the workpiece P and the lower surface of the horn 73 are adjusted to have the same inclination. Ultrasonic vibration is applied to the workpiece P sandwiched between the workpieces, and the workpiece P is welded. At this time, as shown in FIG. 4, the inclination of the upper surface of the work piece P in the width direction is detected in real time and the lower surface of the horn 73 is adjusted to the inclination of the upper surface of the work piece P, while the conveyance means of FIG. The long workpiece P conveyed in the direction of the arrow inside is continuously welded by heat generated by ultrasonic vibration.

(初期設定動作)
次に、ホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線を水平に調整する初期設定の手順について、図5のフローチャートを参照して詳述する。
(Initial setting operation)
Next, the procedure of the initial setting for horizontally adjusting the line connecting the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b will be described in detail with reference to the flowchart of FIG.

図5に示すように、ほぼ水平に設定されたホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線を水平に調整する初期設定動作がスタートし、予め水平な基準面が準備されてホーン73の下方に配置され、制御手段10により上下駆動手段4が制御されて第1の移動手段3が下動され、ホーン73が下方の基準面に向かって図1、図2中のZ軸方向に下動される(ステップS1)。このとき、例えば1〜5mm/sの速度で下動させる。 As shown in FIG. 5, an initial setting operation for horizontally adjusting a line connecting the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b set to be substantially horizontal is started, and a horizontal reference plane is preliminarily set. 2 is prepared and placed below the horn 73, the control means 10 controls the vertical drive means 4 to move the first moving means 3 downward, and the horn 73 moves toward the lower reference plane. It is moved downward in the Z-axis direction (step S1). At this time, it is moved downward at a speed of 1 to 5 mm/s, for example.

次に、第1、第2検出手段9a,9bの検出データに基づき、第1、第2検出手段9a,9bの下端を結ぶ線がホーン73の下面と同一面内に位置するように配置された第1検出手段9aまたは第2検出手段9bのいずれかの下端が基準面に当接したかどうかの判定がなされ(ステップS2)、この判定結果がNOであればステップS1に戻り、判定結果がYESであれば、上下駆動手段4による第1の移動手段3の下動が停止される(ステップS3)。 Next, based on the detection data of the first and second detecting means 9a and 9b, the line connecting the lower ends of the first and second detecting means 9a and 9b is arranged in the same plane as the lower surface of the horn 73. It is determined whether the lower end of either the first detecting means 9a or the second detecting means 9b has come into contact with the reference surface (step S2). If the determination result is NO, the process returns to step S1 and the determination result If YES, the downward movement of the first moving means 3 by the vertical driving means 4 is stopped (step S3).

その後、制御手段10により上下駆動手段4が制御されて、第1の移動手段3が上動(Z軸方向)されてホーン73の下面および第1、第2検出手段9a,9bの下端が上方に例えば0.1mm上昇され(ステップS4)、制御手段10により回転駆動手段6が制御され、ステップS2において第1検出手段9aのみが当接と判定されていれば回転軸62が図2中のA矢印方向(時計方向)に、第2検出手段9bのみが当接と判定されていれば回転軸62が図2中のB矢印方向(反時計方向)に、所定角度(例えば0.5°)回転されてホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線の傾きが調整される(ステップS5)。 Thereafter, the control means 10 controls the vertical drive means 4 to move the first moving means 3 upward (in the Z-axis direction) so that the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b are moved upward. 2 is increased by 0.1 mm (step S4), the rotation driving means 6 is controlled by the control means 10, and if only the first detection means 9a is determined to be in contact in step S2, the rotation shaft 62 in FIG. If it is determined that only the second detecting means 9b is in contact with the direction of the arrow A (clockwise), the rotation shaft 62 moves in the direction of the arrow B (counterclockwise) in FIG. 2 by a predetermined angle (for example, 0.5°). ) It is rotated to adjust the inclination of the line connecting the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b (step S5).

そして、再び制御手段10により上下駆動手段4が制御されて第1の移動手段3が下動され、ホーン73が図1、図2中のZ軸方向に1〜2mm/sの速度で最初よりゆっくりと下動され(ステップS6)、第1検出手段9aおよび第2検出手段9bの両方の下端が基準面に当接したかどうかの判定がなされ(ステップS7)、この判定結果がNOであれば、ホーン73の下面は未だ水平に調整されていないことから、上記したステップS3に戻り、回転軸62の回転により回転されてホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線の傾き調整が繰り返される。 Then, the control means 10 controls the vertical drive means 4 again to move the first moving means 3 downward, so that the horn 73 moves from the beginning at a speed of 1 to 2 mm/s in the Z-axis direction in FIGS. It is slowly moved down (step S6), and it is determined whether or not the lower ends of both the first detection means 9a and the second detection means 9b have come into contact with the reference surface (step S7), and if this determination result is NO. For example, since the lower surface of the horn 73 is not yet adjusted horizontally, the process returns to step S3 described above, and the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b are rotated by the rotation of the rotating shaft 62. The inclination adjustment of the line connecting the lines is repeated.

一方、ステップS7の判定結果がYES、つまり第1、第2検出手段9a,9bの両方の下端が基準面に当接していれば、ホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線が、水平な基準面に一致したとして、上下駆動手段4による第1の移動手段3の下動が停止され(ステップS8)、ホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線が水平に調整され、そのときの第1、第2検出手段9a,9bの検出データ(検出距離)とともに、回転駆動手段6による回転軸62の回転角度が初期値として制御手段10の内蔵メモリに記憶され、初期設定が完了し(ステップS9)、その後動作は終了する。 On the other hand, if the decision result in the step S7 is YES, that is, if the lower ends of both the first and second detecting means 9a and 9b are in contact with the reference surface, the lower surface of the horn 73 and the first and second detecting means 9a and 9b. Assuming that the line connecting the lower ends of the first and second moving means 3 is coincident with the horizontal reference plane (step S8), the downward movement of the first moving means 3 is stopped, and the lower surface of the horn 73 and the first and second detecting means are detected. The line connecting the lower ends of 9a and 9b is adjusted horizontally, and the rotation angle of the rotation shaft 62 by the rotation drive means 6 is set to an initial value together with the detection data (detection distance) of the first and second detection means 9a and 9b at that time. Is stored in the built-in memory of the control means 10, the initial setting is completed (step S9), and then the operation ends.

(溶着動作)
ホーン73の下面および第1、第2検出手段9a,9bの下端を結ぶ線が水平な状態に初期設定された後、図1に示すように、ステージ8とホーン73との間に配置されて図外の搬送手段により図1、図4中の矢印方向(Y軸方向)に搬送される被加工物Pに対し、第1、第2検出手段9a,9bにより被加工物Pの上面の両端それぞれに対する位置がリアルタイムで検出される。そして、第1、第2検出手段9a,9bの検出データが制御手段10に取り込まれ、制御手段10により、初期設定によって水平に設定された状態のホーン73の下面に対する被加工物Pの上面の傾きが導出され、被加工物Pの上面が水平から傾いていれば、その傾きに応じてホーン73の下面を傾けるべく、制御手段10により回転駆動手段6が制御されて第2の移動手段5がメモリに記憶された初期値の回転角度から必要な角度だけ回転される。
(Welding operation)
After the line connecting the lower surface of the horn 73 and the lower ends of the first and second detecting means 9a and 9b is initially set in a horizontal state, it is placed between the stage 8 and the horn 73 as shown in FIG. Both ends of the upper surface of the workpiece P by the first and second detecting means 9a and 9b with respect to the workpiece P transported in the arrow direction (Y-axis direction) in FIGS. The position for each is detected in real time. Then, the detection data of the first and second detecting means 9a, 9b are fetched by the control means 10, and the control means 10 detects the upper surface of the workpiece P with respect to the lower surface of the horn 73 which is horizontally set by the initial setting. If the tilt is derived and the upper surface of the workpiece P is tilted from the horizontal, the control means 10 controls the rotation driving means 6 to tilt the lower surface of the horn 73 according to the tilt, and the second moving means 5 is controlled. Is rotated by a necessary angle from the initial rotation angle stored in the memory.

こうして、ホーン73の下面の傾きが、導出された被加工物Pの上面の傾きに一致するようにリアルタイムで調整されるとともに、流体シリンダ33によりホーン73に所定の加圧力が加えられてステージ8上の被加工物Pが加圧されつつ、制御手段10による超音波振動手段7の制御により、被加工物Pに超音波振動が与えられて溶着され、このようなリアルタイムでのホーン73の下面の傾き調整と超音波による溶着がリアタイムで繰り返され、被加工物Pの連続溶着が行われる。なお、溶着時のホーン73の加圧力はロードセル34の検出荷重に基づいて調整される。 In this way, the inclination of the lower surface of the horn 73 is adjusted in real time so as to match the derived inclination of the upper surface of the workpiece P, and a predetermined pressing force is applied to the horn 73 by the fluid cylinder 33 to cause the stage 8 to move. While the upper workpiece P is being pressed, the ultrasonic vibration means 7 is controlled by the control means 10 to apply ultrasonic vibration to the workpiece P to be welded, and the lower surface of the horn 73 in real time as described above. The inclination adjustment and ultrasonic welding are repeated in rear time, and the workpiece P is continuously welded. The pressure applied to the horn 73 during welding is adjusted based on the detected load of the load cell 34.

ところで、2枚の長尺の被溶着物を重ね合せて成る被加工物Pの厚みは一定ではなく変動するため、流体シリンダ33およびロードセル34の作用によって、被加工物Pの厚みを含む表面の上下位置の変動に応じてホーン73のZ軸方向の高さ位置がリアルタイムで調整される。 By the way, the thickness of the work piece P formed by stacking two long work pieces on top of each other is not constant but varies, so that the action of the fluid cylinder 33 and the load cell 34 causes the surface of the work piece P including the thickness of the work piece P to be changed. The height position of the horn 73 in the Z-axis direction is adjusted in real time according to the change in the vertical position.

すなわち、図1に示すように、例えば搬送中の被加工物Pの厚みが溶着工程の途中で厚くなると、ロードセル34により検出される流体シリンダ33の荷重が予め規定された所定値の状態から増加し、搬送中の被加工物Pの厚みが溶着工程の途中で薄くなると、ロードセル34により検出される流体シリンダ33の荷重が上記所定値の状態から減少する。そのため、溶着時にロードセル34の検出データを制御手段10に取り込み、制御手段10により、ロードセル34の検出荷重が常に上記所定値になるように流体シリンダ33が制御されてベース部材31に対する支持部材32の上下方向(Z軸方向)の位置が調整され、被加工物Pの厚みを含む表面の上下位置の変動に応じてホーン73のZ軸方向の高さ位置がリアルタイムで調整される。なお、このようなホーン73の下面の高さ位置の調整は、ホーン73の下面の傾き調整と並行して行うことが可能である。 That is, as shown in FIG. 1, for example, when the thickness of the workpiece P being conveyed becomes thick during the welding process, the load of the fluid cylinder 33 detected by the load cell 34 increases from the state of a predetermined value defined in advance. However, when the thickness of the workpiece P being conveyed becomes thin during the welding process, the load of the fluid cylinder 33 detected by the load cell 34 decreases from the state of the predetermined value. Therefore, the detection data of the load cell 34 is taken into the control means 10 at the time of welding, and the control means 10 controls the fluid cylinder 33 so that the detection load of the load cell 34 always becomes the above-mentioned predetermined value and the support member 32 for the base member 31. The position in the up-down direction (Z-axis direction) is adjusted, and the height position of the horn 73 in the Z-axis direction is adjusted in real time according to fluctuations in the vertical position of the surface including the thickness of the workpiece P. The adjustment of the height position of the lower surface of the horn 73 can be performed in parallel with the inclination adjustment of the lower surface of the horn 73.

なお、溶着される被加工物Pを構成する2つの被溶着物は、樹脂と樹脂、樹脂と金属、金属と金属の組み合わせからであるのが望ましく、その他の素材であってもよい。 The two objects to be welded that constitute the object P to be welded are preferably made of a combination of resin and resin, resin and metal, or metal and metal, and may be other materials.

したがって、第1実施形態によれば、ステージ8とホーン73との間に配置されて搬送される被加工物Pの幅方向の両端それぞれに対する位置が第1、第2検出手段9a,9bにより検出され、第1、第2検出手段9a,9bによる検出データに基づき、制御手段10により初期設定されて水平に調整されたホーン73の下面に対する被加工物Pの上面の幅方向における傾きが検出され、回転駆動手段6が制御手段10により制御されて第2の移動手段5が回転され、ホーン73の下面の傾きが、検出された被加工物Pの上面の幅方向における傾きに一致するように調整されるため、被加工物Pの上面の幅方向における傾きをリアルタイムで検出しながら、ホーン73の下面を被加工物Pの上面の傾きに合わせつつ、搬送される長尺の被加工物Pを全面にわたり均質にむらなく超音波溶着することができる。 Therefore, according to the first embodiment, the positions with respect to both ends in the width direction of the workpiece P that is arranged and conveyed between the stage 8 and the horn 73 are detected by the first and second detecting means 9a and 9b. Then, based on the detection data by the first and second detecting means 9a and 9b, the inclination in the width direction of the upper surface of the workpiece P with respect to the lower surface of the horn 73 which is initially set and horizontally adjusted by the control means 10 is detected. The rotation driving means 6 is controlled by the control means 10 to rotate the second moving means 5, so that the inclination of the lower surface of the horn 73 matches the detected inclination of the upper surface of the workpiece P in the width direction. Therefore, the long workpiece P to be conveyed is adjusted while the lower surface of the horn 73 is adjusted to the upper surface of the workpiece P while the inclination of the upper surface of the workpiece P in the width direction is detected in real time. Can be ultrasonically welded uniformly over the entire surface.

また、被加工物Pの厚みを含む表面の上下位置が一定ではなくばらついていても、流体シリンダ33およびロードセル34を備える調整手段の動作により、搬送手段により搬送される被加工物Pの厚みを含む表面の上下位置の変動にリアルタイムで追従してホーン73の下面の高さ位置が調整されるため、表面の上下位置にばらつきを有する被加工物Pであっても均質に超音波加工することができる。 Even if the vertical position of the surface including the thickness of the work piece P is not constant and varies, the thickness of the work piece P conveyed by the conveying means is changed by the operation of the adjusting means including the fluid cylinder 33 and the load cell 34. Since the height position of the lower surface of the horn 73 is adjusted in real time according to the fluctuation of the vertical position of the surface including the surface of the horn 73, even the workpiece P having the vertical position of the surface is uniformly ultrasonically processed. You can

<第2実施形態>
次に、本発明を超音波切断装置に適用した第2実施形態について図6、図7を参照して説明する。
<Second Embodiment>
Next, a second embodiment in which the present invention is applied to an ultrasonic cutting device will be described with reference to FIGS. 6 and 7.

本実施形態における超音波切断装置1aの構成は、上記した超音波溶着装置1とほぼ同じであり、超音波振動手段7のホーン73の下端部に切断刃75が取り付けられ、微調整手段を構成する流体シリンダ33およびロードセル34が不要であって、切断時等の切断刃75の荷重を検出するための他のロードセル(図示省略)を設けた点が上記した第1実施形態と異なる。 The configuration of the ultrasonic cutting device 1a in this embodiment is almost the same as that of the ultrasonic welding device 1 described above, and the cutting blade 75 is attached to the lower end of the horn 73 of the ultrasonic vibrating means 7 to form a fine adjustment means. Unlike the first embodiment described above, the fluid cylinder 33 and the load cell 34 are not required, and another load cell (not shown) for detecting the load of the cutting blade 75 at the time of cutting is provided.

このとき、第1、第2検出手段9a,9bの下端を結ぶ線は、切断刃75の下端の刃面と同一面内か或いは当該刃面よりも所定量だけ上方に位置するように設定しておくとよい。 At this time, the line connecting the lower ends of the first and second detecting means 9a and 9b is set so as to be located in the same plane as the blade surface of the lower end of the cutting blade 75 or above the blade surface by a predetermined amount. You should keep it.

そして、第1実施形態と同様の初期設定処理により、切断刃75の刃面および第1、第2検出手段9a,9bの下端の検出面が水平に調整された後、リアルタイムで切断対象となる被加工物Pの表面の傾きに応じて切断刃75の刃面の傾きが調整され、搬送手段による搬送が所定位置ごとに停止されて当該停止中に超音波振動手段7による超音波がホーン73を介し切断刃75に与えられて被加工物Pが切断され、搬送手段による被加工物Pの搬送が再開され、その後、搬送停止と切断、および搬送再開が繰り返されて長尺の被加工物Pが切断される。 Then, by the same initial setting process as in the first embodiment, the blade surface of the cutting blade 75 and the detection surfaces at the lower ends of the first and second detection means 9a and 9b are horizontally adjusted, and then are cut in real time. The inclination of the blade surface of the cutting blade 75 is adjusted according to the inclination of the surface of the workpiece P, the conveyance by the conveying means is stopped at predetermined positions, and the ultrasonic waves by the ultrasonic vibrating means 7 generate horns 73 during the stop. The workpiece P is given to the cutting blade 75 via the, and the conveyance of the workpiece P by the conveying means is restarted. Then, the conveyance is stopped and cut, and the conveyance is restarted, so that the long workpiece is cut. P is cut.

ここで、上記した超音波切断装置1aは、シリコーンや軟質樹脂、その他の可撓性を有する樹脂、エラストマー,軟質ゴムなどの被加工物Pを切断することができる。また、切断刃75は、高炭素鋼、炭素工具鋼、合金工具鋼、高速度鋼、焼結高速度鋼、超硬合金、セラミックス、サーメット、工業用ダイヤモンド、電鋳ダイヤモンドなどの種々の材質により形成することができ、熱硬化性や熱可塑性の性質を有する樹脂接着剤や、Ni、Cu、Agなどの金属ろう、はんだなどの接着材によって接着されることによりホーン73に取り付け、或いはねじによりホーン73に直接取り付けるとよい。さらに、切断刃75の刃先を、化学気相成長(CVD)や物理気相成長(PVD)により、窒化チタン、炭窒化チタン、チタンアルミナイトライド、アルミクロムナイトライド、ダイヤモンドライクカーボン(DLC:Diamond−like Carbon)などの硬質物質によりコーティングするとよい。 Here, the ultrasonic cutting device 1a described above can cut a workpiece P such as silicone, soft resin, other flexible resin, elastomer, or soft rubber. The cutting blade 75 is made of various materials such as high carbon steel, carbon tool steel, alloy tool steel, high speed steel, sintered high speed steel, cemented carbide, ceramics, cermet, industrial diamond, and electroformed diamond. Can be formed and is attached to the horn 73 by being adhered with a resin adhesive having thermosetting or thermoplastic properties, a metal brazing material such as Ni, Cu, Ag, or an adhesive material such as solder, or by a screw. It is recommended to attach it directly to the horn 73. Furthermore, the cutting edge of the cutting blade 75 is titanium nitride, titanium carbonitride, titanium aluminide, aluminum chrome nitride, diamond-like carbon (DLC: Diamond) by chemical vapor deposition (CVD) or physical vapor deposition (PVD). Coating with a hard material such as (like carbon).

したがって、第2実施形態によれば、搬送手段により搬送される長尺の被加工物Pの上面の傾きに切断刃75の刃面をリアルタイムで合わせることができるため、長尺の被加工物Pを従来のように切り残しが生じることなく超音波切断することができる。 Therefore, according to the second embodiment, the blade surface of the cutting blade 75 can be adjusted in real time to the inclination of the upper surface of the long work piece P conveyed by the conveying means. Can be ultrasonically cut without leaving uncut as in the conventional case.

なお、本発明は上記した実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて上述したもの以外に種々の変更を行うことが可能である。例えば、被加工物Pは必ずしも長尺である必要はなく、所定の加工方向に相対的に移動されるものであってもよい。 The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, the workpiece P does not necessarily have to be long and may be relatively moved in a predetermined processing direction.

また、上記した実施形態において、上下動駆動手段4や回転駆動手段6をなくして第1の移動手段3を多関節ロボットに接続し、第1の移動手段3を、上下左右前後方向の移動および回転を含む3次元的に移動可能に支持して、超音波振動手段7を上下左右前後に移動可能でかつ回転可能に支持し、搬送手段によらずして装置1,1a全体を加工方向に移動させて被加工物Pを相対的に加工方向に移動させるようにしてもよい。 Further, in the above-described embodiment, the first moving means 3 is connected to the articulated robot without the vertical movement driving means 4 and the rotation driving means 6, and the first moving means 3 is moved in the vertical and horizontal directions. The ultrasonic vibrating means 7 is movably supported in a three-dimensional manner including rotation, movably and vertically and horizontally and rotatably supported, and the entire apparatus 1, 1a is moved in the processing direction regardless of the conveying means. Alternatively, the workpiece P may be moved so as to be relatively moved in the processing direction.

また、上記した第1実施形態の溶着に代えて、搬送方向(加工方向)に移動(搬送)される長尺の基材の表面に、例えば一定間隔で基材よりも小さい複数の接合物を超音波により連続して接合する場合にも、本発明を適用することが可能である。この場合にも、ホーン73の下面を、例えば長尺の基材表面の傾き、或いは、各接合物の表面の傾きに合わせるようにリアルタイムで調整しつつ接合することができる。この場合にも、多関節ロボットを使用してもよいのは勿論である。 Further, instead of the welding of the above-described first embodiment, a plurality of bonded articles smaller than the base material at regular intervals, for example, are provided on the surface of a long base material that is moved (conveyed) in the transfer direction (processing direction). The present invention can also be applied to the case of continuously joining by ultrasonic waves. Also in this case, the lower surface of the horn 73 can be joined while adjusting in real time so as to match the inclination of the surface of the long base material or the inclination of the surface of each joined object. Also in this case, of course, an articulated robot may be used.

また、上記した第1、第2検出手段9a,9bは、ホーン73に対し、被加工物Pの図1中の矢印に示す搬送方向(加工方向)の下流側に配置されていてもよい。こうすると、ホーン73による被加工物Pの加工の仕上がりを検知することができ、例えば溶着の場合、第1検出手段9a側と第2検出手段9b側との被加工物Pの溶着の仕上がりの差を把握することができ、仕上がりの差がなくなるようにホーン73の傾きを調整することで、このような差をなくすことが可能になる。 Further, the above-mentioned first and second detecting means 9a, 9b may be arranged on the downstream side of the horn 73 in the carrying direction (processing direction) of the workpiece P indicated by the arrow in FIG. This makes it possible to detect the finish of the processing of the workpiece P by the horn 73. For example, in the case of welding, the finish of the welding of the workpiece P on the first detection means 9a side and the second detection means 9b side can be detected. The difference can be grasped, and it is possible to eliminate such a difference by adjusting the inclination of the horn 73 so as to eliminate the difference in finish.

また、第3実施形態として、図8に示すように、第1の移動手段3を3次元的に移動可能に多関節ロボット100に取り付けてもよく、こうすると、第1の移動手段3、上下駆動手段4、第2の移動手段5、回転駆動手段6および超音波振動手段7を、上下左右前後方向の移動および回転を含む3次元的に移動させることが可能になり、ホーン73の下面の傾きも3次元的に調整することができる。 In addition, as a third embodiment, as shown in FIG. 8, the first moving means 3 may be attached to the articulated robot 100 so as to be movable three-dimensionally. The driving unit 4, the second moving unit 5, the rotation driving unit 6, and the ultrasonic vibrating unit 7 can be moved three-dimensionally including the movement and rotation in the up, down, left, right, front, and rear directions. The inclination can also be adjusted three-dimensionally.

そこで、例えば図9に示すように、ホーン73を挟むように上流側に第1、第2検出手段9a,9bを配置し、同様に被加工物Pの表面に対する位置を検出する第3検知手段9cを下流側に配置することにより、第1、第2検出手段9a,9bおよび第3検出手段9cにより被加工物Pの表面に対する3点の位置を検出でき、被加工物Pの表面の3次元的な傾きに追従してホーン73の下面の傾きも3次元的に調整することができ、ホーン73の上下の中心軸が被加工物Pの表面に対して常に垂直に接するように調整して溶着等の加工を行うことができる。 Therefore, for example, as shown in FIG. 9, first and second detecting means 9a and 9b are arranged on the upstream side so as to sandwich the horn 73, and similarly, third detecting means for detecting the position of the workpiece P with respect to the surface. By arranging 9c on the downstream side, it is possible to detect the positions of three points with respect to the surface of the work piece P by the first and second detection means 9a and 9b and the third detection means 9c, and it is possible to detect three positions on the surface of the work piece P. The inclination of the lower surface of the horn 73 can be adjusted three-dimensionally by following the dimensional inclination, and the upper and lower central axes of the horn 73 are adjusted so as to be always perpendicular to the surface of the workpiece P. Processing such as welding can be performed.

なお、図9に示す第1、第2検出手段9a,9bを下流側、第3検出手段9cを上流側に配置してもよい。 The first and second detecting means 9a and 9b shown in FIG. 9 may be arranged on the downstream side, and the third detecting means 9c may be arranged on the upstream side.

そして、本発明は、長尺の被加工物を超音波振動により加工する装置すべてに適用することができる。 The present invention can be applied to all apparatuses that process a long work piece by ultrasonic vibration.

1 …超音波溶着装置(超音波加工装置)
1a …超音波切断装置(超音波加工装置)
3 …第1の移動手段
4 …上下駆動手段
5 …第2の移動手段
6 …回転駆動手段
7 …超音波振動手段
8 …ステージ
9a,9b …第1、第2検出手段
P …被加工物
73 …ホーン
75 …切断刃
1... Ultrasonic welding device (ultrasonic processing device)
1a... Ultrasonic cutting device (ultrasonic processing device)
3... First moving means 4... Vertical driving means 5... Second moving means 6... Rotation driving means 7... Ultrasonic vibrating means 8... Stages 9a, 9b... First and second detecting means P... Workpiece 73 … Horn 75… Cutting blade

Claims (8)

被加工物をその加工方向に相対的に移動させつつ超音波により加工する超音波加工装置において、
上下方向に移動可能で、かつ、回転可能に設けられた移動手段と、
前記移動手段に取り付けられ、振動子および該振動子により発生する超音波振動に共振するホーンを有する超音波振動手段と、
前記ホーンの下方に配設され前記ホーンとの間で前記被加工物を挟持するステージと、
前記移動手段に取り付けられて前記ホーンの下面付近に配設されて、前記移動手段の上下動および回転により前記ホーンとともに上下移動および回転移動し、少なくとも前記被加工物の幅方向の両端それぞれに対する位置を検出する第1、第2検出手段と、
前記第1、第2検出手段による検出データを取り込み、前記移動手段の上下の移動および回転を制御する制御手段と
を備え、
前記制御手段は、
水平な基準面に対する前記第1、第2検出手段それぞれの相対位置の検出データに基づき、前記回転駆動手段を制御して前記ホーンの下面が水平になるように調整する初期設定を行い、
前記ステージと前記ホーンとの間に配置されて前記加工方向に移動される前記被加工物に対し、前記第1、第2検出手段により前記被加工物の上面の前記両端それぞれに対する位置を検出して、初期設定により水平に調整された前記ホーンの下面に対する前記被加工物の上面の傾きを導出し、前記移動手段を回転させることにより、前記ホーンの下面の傾きが、導出した前記被加工物の上面の傾きに一致するように調整しながら前記超音波振動手段を制御して前記被加工物を超音波加工する
ことを特徴とする超音波加工装置。
In an ultrasonic processing device that processes an object by ultrasonic waves while relatively moving the workpiece in the processing direction,
A moving means that is movable in the vertical direction and is rotatably provided;
Ultrasonic vibrating means attached to the moving means, having an oscillator and a horn that resonates with ultrasonic vibration generated by the oscillator;
A stage disposed below the horn to hold the workpiece between the horn and the stage,
It is attached to the moving means and is disposed near the lower surface of the horn, and vertically moves and rotates together with the horn by the vertical movement and rotation of the moving means, and at least positions with respect to both ends in the width direction of the workpiece. First and second detecting means for detecting
Control means for fetching detection data from the first and second detection means and controlling vertical movement and rotation of the moving means,
The control means is
Based on the detection data of the relative position of each of the first and second detection means with respect to a horizontal reference plane, the rotation drive means is controlled to perform an initial setting for adjusting the lower surface of the horn to be horizontal,
With respect to the workpiece that is arranged between the stage and the horn and is moved in the processing direction, the positions of the upper surface of the workpiece with respect to both ends of the workpiece are detected by the first and second detecting means. Then, the inclination of the upper surface of the workpiece with respect to the lower surface of the horn, which is horizontally adjusted by initialization, is derived, and the inclination of the lower surface of the horn is derived by rotating the moving means. The ultrasonic machining apparatus, wherein the ultrasonic vibrating means is controlled to adjust the inclination of the upper surface of the workpiece so that the workpiece is ultrasonically machined.
前記第1、第2検出手段は、前記ホーンに対し、前記加工方向に移動される前記被加工物の前記加工方向の上流側に配置されていることを特徴とする請求項1に記載の超音波加工装置。 The said 1st, 2nd detection means is arrange|positioned with respect to the said horn on the upstream side of the said processing direction of the said workpiece|work which is moved to the said processing direction, The super according to claim 1 characterized by the above-mentioned. Sonic processing device. 前記被加工物表面のほぼ中央に対する位置を検出する第3検出手段をさらに備え、
前記第1、第2検出手段と前記第3検出手段は、前記ホーンを挟むように上流側と下流側に分かれて配置されていることを特徴とする請求項1に記載の超音波加工装置。
Further comprising third detecting means for detecting the position of the surface of the workpiece with respect to substantially the center,
The ultrasonic processing apparatus according to claim 1, wherein the first and second detection means and the third detection means are separately arranged on the upstream side and the downstream side so as to sandwich the horn.
前記移動手段は、前記ステージと前記ホーンとの間に配置された前記被加工物の表面の上下位置の変化を検知して超音波振動手段の上下位置を調整する調整手段を備えることを特徴とする請求項1ないし3のいずれか1項に記載の超音波加工装置。 The moving means includes an adjusting means for detecting a change in the vertical position of the surface of the workpiece arranged between the stage and the horn and adjusting the vertical position of the ultrasonic vibrating means. The ultrasonic processing apparatus according to any one of claims 1 to 3, wherein: 前記第1、第2検出手段の下端が、前記ホーンの下面と同一水平面内に配置され、
前記制御手段は、
前記移動手段を前記基準面に向かって移動させることにより、前記超音波振動手段を前記第1、第2検出手段とともに上下に移動させ、前記第1検出手段または前記第2検出手段のいずれかの下端が前記基準面に当接した状態から、前記第1、第2検出手段の下端がともに前記基準面に当接するように、前記移動手段を回転させることにより、前記超音波振動手段および前記第1、第2検出手段を回転させて、前記初期設定を行うことを特徴とする請求項1ないし4のいずれか1項に記載の超音波加工装置。
The lower ends of the first and second detecting means are arranged in the same horizontal plane as the lower surface of the horn,
The control means is
By moving the moving means toward the reference plane, the ultrasonic vibrating means is moved up and down together with the first and second detecting means, and either the first detecting means or the second detecting means is moved. By rotating the moving means so that the lower ends of the first and second detecting means both come into contact with the reference surface from the state where the lower ends contact the reference surface, the ultrasonic vibrating means and the first and second detecting means are rotated. The ultrasonic processing apparatus according to any one of claims 1 to 4, wherein the first and second detecting means are rotated to perform the initial setting.
前記被加工物は少なくとも2つの被溶着物が重ね合されてなり、
前記2つの被溶着物が、前記超音波振動手段による連続的な超音波の印加により連続溶着されることを特徴とする請求項1ないし5のいずれか1項に記載の超音波加工装置。
The work piece is formed by stacking at least two pieces to be welded,
The ultrasonic processing apparatus according to any one of claims 1 to 5, wherein the two objects to be welded are continuously welded by continuous application of ultrasonic waves by the ultrasonic vibration means.
前記ホーンの下端に取り付けられ前記ホーンの下面に平行に刃面が設定された切断刃を備え、
前記被加工物は、前記搬送手段による搬送が所定位置ごとに停止され、停止中に前記超音波振動手段による超音波の印加によって切断加工されるものであることを特徴とする請求項1ないし3のいずれか1項に記載の超音波加工装置。
A cutting blade having a blade surface set parallel to the lower surface of the horn, which is attached to the lower end of the horn,
4. The object to be processed is one in which the conveyance by the conveying means is stopped at every predetermined position, and the workpiece is cut and processed by the application of ultrasonic waves by the ultrasonic vibrating means. The ultrasonic processing device according to any one of 1.
前記移動手段は、上下方向を含む他の方向にも移動可能で3次元的に移動するものであることを特徴する請求項1ないし7のいずれか1項に記載の超音波加工装置。 8. The ultrasonic processing apparatus according to claim 1, wherein the moving means is movable in other directions including a vertical direction and moves three-dimensionally.
JP2018223385A 2018-11-29 2018-11-29 Ultrasonic processing equipment Active JP7126055B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018223385A JP7126055B2 (en) 2018-11-29 2018-11-29 Ultrasonic processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018223385A JP7126055B2 (en) 2018-11-29 2018-11-29 Ultrasonic processing equipment

Publications (2)

Publication Number Publication Date
JP2020082164A true JP2020082164A (en) 2020-06-04
JP7126055B2 JP7126055B2 (en) 2022-08-26

Family

ID=70905437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018223385A Active JP7126055B2 (en) 2018-11-29 2018-11-29 Ultrasonic processing equipment

Country Status (1)

Country Link
JP (1) JP7126055B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4183511A4 (en) * 2020-07-17 2024-01-17 Lg Energy Solution Ltd Secondary battery, and ultrasonic welding device and welding method for secondary battery
CN117549565A (en) * 2024-01-11 2024-02-13 西南石油大学 Basalt fiber reinforced thermoplastic composite welding device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014057961A1 (en) * 2012-10-10 2014-04-17 三菱重工業株式会社 Peening device and peening method
WO2015097727A1 (en) * 2013-12-27 2015-07-02 川崎重工業株式会社 Friction stir spot welding apparatus, friction stir spot welding method, and device for detecting perpendicularity to surface for friction stir spot welding

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014057961A1 (en) * 2012-10-10 2014-04-17 三菱重工業株式会社 Peening device and peening method
WO2015097727A1 (en) * 2013-12-27 2015-07-02 川崎重工業株式会社 Friction stir spot welding apparatus, friction stir spot welding method, and device for detecting perpendicularity to surface for friction stir spot welding

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4183511A4 (en) * 2020-07-17 2024-01-17 Lg Energy Solution Ltd Secondary battery, and ultrasonic welding device and welding method for secondary battery
CN117549565A (en) * 2024-01-11 2024-02-13 西南石油大学 Basalt fiber reinforced thermoplastic composite welding device

Also Published As

Publication number Publication date
JP7126055B2 (en) 2022-08-26

Similar Documents

Publication Publication Date Title
CN111032258B (en) Vibration cutting device and contact detection program
JP4998928B2 (en) Cutting method and cutting apparatus
JP2020082164A (en) Ultrasonic machining device
JP5156742B2 (en) Equipment for machining of weakened cuts into sheets or skins
JP2004136331A (en) Equipment and method for friction stir welding
JP6519029B2 (en) Cutting device
US9346120B1 (en) Sonotrode apparatus for use in ultrasonic additive manufacturing
JP7441172B2 (en) Workpiece processing device with servoelastic actuator system having a compliant elastic member and a weight-compensating elastic member
US20070228879A1 (en) Cutting device, processing apparatus, molding die, optical element and cutting method
JP2020506065A (en) Method of machining a cutting insert and corresponding device for machining a cutting insert
JP4512737B2 (en) Ultrasonic vibration processing equipment
JP2007307680A (en) Cutting method, optical element and die
JP2729412B2 (en) Cutting equipment for forming a cylindrical surface on a work
JP6576758B2 (en) Cutting apparatus and control method thereof
JP3854010B2 (en) Curvature adjusting device for variable curvature mirror
JP2007167960A (en) Outer periphery grinding method and outer periphery grinder of insert
JP7215845B2 (en) measuring device
JP4777736B2 (en) Cutting tool
JP2012240176A (en) Grinding apparatus, and grinding method
CA3080906A1 (en) Method and apparatus for water jet cutting standoff height
JP6141157B2 (en) High frequency vibration assisted processing apparatus and processing method thereof
JP2001260020A (en) Pressurizing force variable polishing device
JP6544397B2 (en) Cutting device
JP2019162681A (en) Processing device and processing method
JP2013034963A5 (en)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210805

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220427

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220510

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220602

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220621

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220705

R150 Certificate of patent or registration of utility model

Ref document number: 7126055

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150