JP2020077755A - Processing cup unit and substrate processing apparatus - Google Patents

Abstract

To provide a processing cup unit and a substrate processing apparatus with reduced maintenance frequency.SOLUTION: A lower cup 11 and an upper cup 12 are provided when a process using a processing liquid is performed on a substrate W held in a horizontal posture. The upper cup 12 is arranged above the lower cup 11 so as to surround the periphery of the substrate W. The processing liquid scattered from the substrate W is stored in a groove 11g formed in the lower cup 11, vibrated by a vibrating member 14, and then discharged from a discharge space V4.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a processing cup unit and a substrate processing apparatus including the processing cup unit.

  Substrate processing apparatus for processing a substrate such as a semiconductor wafer, a glass substrate for a liquid crystal display device, a glass substrate for a photomask or a glass substrate for an optical disk with a treatment liquid such as a developing liquid, a cleaning liquid, a rinse liquid or a photoresist liquid Is used. For example, in the substrate processing apparatus described in Patent Document 1, the processing liquid is discharged to the central portion of the surface to be processed of the substrate while the substrate is rotated while being horizontally supported by the rotation holding unit. The processing liquid in the central portion of the surface to be processed is spread over the entire surface to be processed by the centrifugal force accompanying the rotation of the substrate. As a result, the processing liquid is supplied to the entire surface of the substrate to be processed.

JP, 2014-49679, A

  In the rotary substrate processing apparatus as disclosed in Patent Document 1, a part of the processing liquid on the surface to be processed is scattered by the centrifugal force. In order to prevent the substrate processing apparatus from being contaminated by the scattering of the processing liquid, a processing cup is provided so as to surround the rotation holding unit. However, since the processing liquid adheres to and remains on the wall surface of the processing cup, the processing cup is contaminated. Therefore, it is necessary to maintain the processing cup frequently. In particular, when the viscosity of the treatment liquid is high, the amount of the treatment liquid adhering to the treatment cup increases, so that the degree of contamination increases. In this case, the maintenance frequency of the processing cup becomes higher.

  An object of the present invention is to provide a processing cup unit and a substrate processing apparatus with reduced maintenance frequency.

  (1) A processing cup unit according to a first aspect of the present invention is a processing cup unit that is provided so as to surround a periphery of a substrate when performing processing using a processing liquid on a substrate held in a horizontal position. And an upper cup arranged above the lower cup so as to surround the periphery of the substrate, a first groove portion formed in the lower cup for storing the processing liquid scattered from the substrate, and a first groove portion. A vibrating member that vibrates the processing liquid, and a discharge unit that discharges the processing liquid stored in the first groove portion are provided.

  In this processing cup unit, a lower cup and an upper cup are provided when processing a substrate held in a horizontal position with a processing liquid. The upper cup is arranged above the lower cup so as to surround the periphery of the substrate. The treatment liquid scattered from the substrate is stored in the first groove portion formed in the lower cup, vibrated by the vibrating member, and then discharged by the discharge portion.

  According to this configuration, the processing liquid is vibrated by the vibrating member in the first groove portion, so that the viscosity of the processing liquid is increased. Therefore, the processing liquid can be easily discharged to the outside of the processing cup unit. In this case, the amount of the processing liquid adhering to and remaining on the wall surface of the lower cup or the upper cup is reduced. As a result, the frequency of maintenance of the processing cup unit can be reduced.

  (2) The first groove may further store a solution for dissolving the processing solution scattered from the substrate. According to this configuration, when the dissolution liquid that dissolves the processing liquid is further used in the substrate processing, the dissolution liquid is further stored in the first groove portion in addition to the processing liquid, and the processing liquid is dissolved. Therefore, even if the viscosity of the processing liquid used for the substrate processing is high, the processing liquid is vibrated by the vibrating member, so that the viscosity is lowered. As a result, the processing liquid is more easily discharged outside the processing cup unit. As a result, the frequency of maintenance of the processing cup unit can be further reduced.

  (3) The processing cup unit may further include a cleaning liquid ejecting unit that ejects a cleaning liquid that dissolves the processing liquid so as to guide the processing liquid scattered from the substrate to the first groove. In this case, the cleaning liquid is further stored in the first groove portion in addition to the processing liquid, and the processing liquid is dissolved. Therefore, even if the viscosity of the processing liquid used for the substrate processing is high, the processing liquid is vibrated by the vibrating member, so that the viscosity is lowered. As a result, the processing liquid is more easily discharged outside the processing cup unit. As a result, the frequency of maintenance of the processing cup unit can be further reduced.

  (4) A through hole may be formed in the upper cup portion above the first groove portion, and the cleaning liquid ejecting section may eject the cleaning liquid into the first groove portion through the through hole. In this case, the processing liquid scattered from the substrate can be easily introduced into the first groove portion by the cleaning liquid while the processing liquid can be dissolved.

  (5) The first groove portion may be formed along the outer peripheral portion of the lower cup. In this case, the distance between the first groove and the substrate is sufficiently large. Accordingly, it is possible to easily prevent the processing liquid stored in the first groove from adhering to the substrate again.

  (6) The processing cup unit further includes a second groove portion formed in the upper cup so as to face the first groove portion, and scatters the processing liquid between the first groove portion and the second groove portion. An allowable scattering space may be formed, and the first groove may store the processing liquid scattered in the scattering space. In this case, the treatment liquid scattered in the scattering space loses kinetic energy and is guided by gravity and falls. Thereby, the processing liquid scattered from the substrate can be easily stored in the first groove.

  (7) The inner edge of the lower cup may be located inward of the inner edge of the upper cup. In this case, the inner edge of the lower cup is sufficiently close to the substrate. Therefore, even if the scattering distance of the treatment liquid is short, the treatment liquid can be collected by the lower cup. Further, the treatment liquid collected by the lower cup can be stored by the first groove portion formed in the lower cup.

  (8) The inner edge of the lower cup may be located below the outer edge of the substrate. In this case, the inner edge of the lower cup is sufficiently close to the substrate. Therefore, even if the scattering distance of the treatment liquid is short, the treatment liquid can be collected by the lower cup. Further, the treatment liquid collected by the lower cup can be stored by the first groove portion formed in the lower cup.

  (9) The viscosity of the treatment liquid used for the substrate treatment may be 100 cP or more and 300 cP or less. According to this configuration, the vibrating member relieves the increase in the viscosity of the processing liquid. The amount of remaining processing liquid is reduced. As a result, the frequency of maintenance of the processing cup unit can be reduced.

  (10) A substrate processing apparatus according to a second aspect of the present invention includes a rotation holding device that holds and rotates a substrate in a horizontal posture, and a processing liquid discharge that discharges a processing liquid onto a surface to be processed of the substrate held by the rotation holding device. And a processing cup unit according to the first invention, which is provided so as to surround the periphery of the substrate held by the rotation holding device.

  In this substrate processing apparatus, the substrate is horizontally held and rotated by the rotation holding device. In this state, the substrate is processed by discharging the processing liquid onto the surface to be processed of the substrate by the processing liquid discharger. Since the processing cup unit is provided so as to surround the periphery of the substrate, contamination of the substrate processing apparatus due to the scattering of the processing liquid is prevented. Further, in the processing cup unit, the amount of the processing liquid that adheres and remains on the wall surface of the lower cup or the upper cup is reduced, so that the frequency of maintenance of the processing cup unit can be reduced.

  According to the present invention, the frequency of maintenance of the processing cup unit can be reduced.

It is a schematic sectional drawing along one direction of a substrate processing device concerning one embodiment of the present invention. It is a partial expanded sectional view of the processing cup unit of FIG. It is a partial expanded sectional view of the processing cup unit which concerns on a modification.

(1) Configuration of Substrate Processing Apparatus Hereinafter, a processing cup unit and a substrate processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic sectional view along one direction of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a partially enlarged sectional view of the processing cup unit 10 of FIG. As shown in FIG. 1, the substrate processing apparatus 100 includes a processing cup unit 10, a rotation holding device 20, and a processing nozzle 30. The processing cup unit 10 is a non-rotating cup that prevents the processing liquid from scattering from the substrate W, and is provided so as to surround the periphery of the substrate W.

  The rotation holding device 20 is, for example, a spin chuck, and includes a drive device 21 and a rotation holding portion 23. The drive device 21 is, for example, an electric motor and has a rotating shaft 22. The rotation holding unit 23 is attached to the tip of the rotation shaft 22 of the drive unit 21, and is rotationally driven around the vertical axis while holding the substrate W in a horizontal posture. In the following description, as indicated by the thick arrow in FIG. 1, in the horizontal plane, the direction toward the center of the substrate W held by the rotation holding unit 23 is defined as the inner side, and the opposite direction is defined as the outer side. To do.

  The processing nozzle 30 is connected to the processing liquid supply system A and moves between a processing position above the center of the substrate W and a standby position outside the processing cup unit 10 as shown by a dotted arrow in FIG. It is possible. During the substrate processing, the processing nozzle 30 moves from the standby position to the processing position and discharges the processing liquid stored in the processing liquid supply system A near the center of the surface to be processed of the rotating substrate W. The treatment liquid stored in the treatment liquid supply system A is a coating liquid such as a resist liquid and has a relatively high viscosity. In this example, the viscosity of the treatment liquid is 100 cP or more and 300 cP or less.

  As shown in FIG. 2, the processing cup unit 10 is provided so as to surround the periphery of the substrate W held by the rotation holding portion 23, and includes a lower cup 11, an upper cup 12, and a side wall portion 13. The lower cup 11 is arranged so as to surround the space below the substrate W. In the present example, the inner edge of the lower cup 11 is located inward of the inner edge of the upper cup 12 and below the outer edge of the substrate W. Further, in order to prevent the lower cup 11 from interfering with a mist adhesion preventing member 17 described below which is arranged below the substrate W, a notch 11n is formed in an upper portion of an inner edge portion of the lower cup 11.

  The upper surface 11a of the lower cup 11 is slightly inclined obliquely downward from the inside toward the outside. On the upper surface 11a of the lower cup 11, a groove portion 11g is formed that is recessed downward along the outer peripheral portion of the lower cup 11 and extends annularly in the horizontal plane. The vibrating member 14 is provided in the groove 11g. Here, one vibrating member 14 that extends annularly in the horizontal plane may be provided, or a plurality of vibrating members 14 may be arranged at substantially equal angular intervals. The vibrating member 14 is, for example, an ultrasonic transducer.

  The upper cup 12 is arranged above the lower cup 11 so as to protrude inward from an upper portion of a thick-walled portion 13a of the side wall portion 13 which will be described later and to surround a space above the substrate W. The lower surface 12a of the upper cup 12 includes portions p1, p2 and p3. The portion p1 of the lower surface 12a is sharply inclined obliquely downward from the inside toward the outside. The part p2 of the lower surface 12a is gently inclined obliquely downward from the outer peripheral portion of the part p1 toward the outside. The part p3 of the lower surface 12a extends substantially horizontally outward from the outer peripheral part of the part p2.

  As a result, the distance between the upper surface 11a of the lower cup 11 and the lower surface 12a of the upper cup 12 gradually decreases from the inside toward the outside. Hereinafter, the space between the upper surface 11a of the lower cup 11 and the portion p2 of the lower surface 12a of the upper cup 12 will be referred to as a collection space V1. The space between the upper surface 11a of the lower cup 11 and the portion p3 of the lower surface 12a of the upper cup 12 is referred to as a gathering space V2. The maximum length in the vertical direction of the collection space V1 is, for example, 20 mm or more and 50 mm or less. The maximum radial length of the collection space V1 is, for example, 20 mm or more and 40 mm or less.

  On the lower surface 12a of the upper cup 12, there is formed a groove 12g which is recessed upward along the outer peripheral portion of the upper cup 12 and extends annularly in the horizontal plane. As a result, a scattering space V3 larger than the gathering space V2 is formed between the groove 11g of the lower cup 11 and the groove 12g of the upper cup 12. A plurality of through holes 12h extending substantially vertically and continuing to the scattering space V3 are formed at the bottom of the groove 12g at substantially equal angular intervals. In FIG. 2, only one through hole 12h is shown.

  The side wall portion 13 includes a thick wall portion 13a and a thin wall portion 13b. In this example, the upper cup 12, the thick portion 13a, and the thin portion 13b are integrally formed. In FIG. 2, the boundaries between the upper cup 12, the thick portion 13a, and the thin portion 13b are shown by dotted lines. The thick portion 13a is arranged outside the lower cup 11 and the upper cup 12. The inner edge of the thick wall portion 13 a is located above the outer edge of the lower cup 11. A groove portion 13g, which is recessed upward and extends annularly in a horizontal plane, is formed in the lower outer periphery of the side wall portion 13.

  The thin portion 13b has a smaller thickness than the thick portion 13a, and extends from below the outer edge portion of the thick portion 13a to the outside of the lower cup 11 and below the lower cup 11. As a result, the discharge space V4 is formed between the thin portion 13b and the lower cup 11. A minute gap S that connects the scattering space V3 and the discharge space V4 is provided between the inner edge of the thick portion 13a and the outer edge of the lower cup 11.

  Below the lower cup 11, an exhaust flow passage F1 and a waste liquid flow passage F2 which are continuous with the discharge space V4 are provided. The exhaust passage F1 is connected to the exhaust system B of FIG. The exhaust system B guides the gas discharged from the exhaust passage F1 to the exhaust equipment in the factory. The waste liquid flow passage F2 is located outside the exhaust flow passage F1 and is connected to the waste liquid system C of FIG. The waste liquid system C guides the liquid discharged from the waste liquid flow path F2 to the waste liquid facility in the factory.

  A plurality of cleaning nozzles 15 corresponding to the plurality of through holes 12h are attached to the upper cup 12. The plurality of cleaning nozzles 15 are connected to the cleaning liquid supply system D of FIG. The pipe P is annularly routed in the horizontal plane above the upper cup 12. Each cleaning nozzle 15 discharges the cleaning liquid stored in the cleaning liquid supply system D from above into the scattering space V3 and the groove portion 11g through the pipe P and the corresponding through hole 12h. As a result, the lower cup 11, the upper cup 12, and the side wall portion 13 are cleaned, and the cleaning liquid is stored in the groove 11g.

  The cleaning liquid stored in the cleaning liquid supply system D is a liquid such as a rinse liquid that dissolves the processing liquid. Specifically, the cleaning liquid may be, for example, PGME (propyleneglycol monomethyl ether), PGMEA (propyleneglycol monomethyl ether acetate), or cyclohexanone. May be. Alternatively, the cleaning liquid may be, for example, a mixed liquid of PGME and PGMEA, and the mixing ratio thereof may be 7: 3, for example.

  The processing cup unit 10 further includes a vat 16, a mist adhesion preventing member 17, and a plurality of gas nozzles 18. The bat 16 is a member used to collect the processing liquid discharged onto the substrate W, and has, for example, a disc shape. The bat 16 is arranged below the substrate W so as to surround the rotary shaft 22 of the drive device 21 of FIG. 1.

  The mist adhesion preventing member 17 is a member that prevents a mist of the processing liquid described later from adhering to the lower surface of the substrate W, and has, for example, a substantially disc shape. The mist adhesion preventing member 17 is arranged between the substrate W and the bat 16 so as to surround the rotation holding portion 23 of FIG. 1, and is supported by the bat 16 by a supporting member (not shown).

  The upper surface of the mist adhesion preventing member 17 extends from the inner side to the outer side along the lower surface of the substrate W while being close to the lower surface of the substrate W opposite to the surface to be processed. As a result, the space V5 between the upper surface of the mist adhesion preventing member 17 and the lower surface of the substrate W is formed and maintained narrow. The distance between the upper surface of the mist adhesion preventing member 17 and the lower surface of the substrate W is, for example, 2 mm or more and 3 mm or less, and is 5 mm at the maximum.

  In this example, the distance between the upper surface of the mist adhesion preventing member 17 and the lower surface of the substrate W gradually decreases from the inner side to the outer side. In this case, the space V5 can be formed narrower. Further, the outer edge portion of the mist adhesion preventing member 17 is located inward of the outer edge portion of the substrate W. Also in this case, the space V5 can be formed narrow.

  The plurality of gas nozzles 18 are connected to the gas supply unit E and are provided at substantially equal angular intervals so as to penetrate the mist adhesion preventing member 17 obliquely upward below the substrate W. Each gas nozzle 18 supplies the gas enclosed in the gas supply unit E to the lower surface of the rotating substrate W. The gas supplied to the lower surface of the substrate W is guided from the inner side to the outer side along the lower surface of the substrate W. The gas enclosed in the gas supply unit E is, for example, nitrogen. The gas sealed in the gas supply unit E may be another gas such as clean air.

(2) Operation of Substrate Processing Apparatus The operation of the substrate processing apparatus 100 will be described with reference to FIGS. 1 and 2. The substrate W is horizontally held by the rotation holding unit 23 with the surface to be processed facing upward. In this state, the substrate W is rotated by the rotation holding unit 23, and the processing liquid is ejected from the processing nozzle 30 to the vicinity of the center of the surface to be processed of the substrate W. As a result, the processing liquid discharged near the center of the surface to be processed of the substrate W is spread over the entire surface to be processed of the substrate W by the centrifugal force caused by the rotation of the substrate W, and the processing liquid is applied to the surface to be processed of the substrate W. Film is formed.

  Here, when the substrate W is rotated at a rotation speed higher than a predetermined rotation speed, the processing liquid having high kinetic energy supplied to the surface to be processed of the substrate W is shaken off from the surface to be processed of the substrate W. And has a width in the vertical direction, and scatters outward from the peripheral portion of the substrate W. The processing liquid scattered from the substrate W is collected in the collection space V1 by the upper surface 11a of the lower cup 11 and the lower surface 12a of the upper cup 12.

  The treatment liquid collected in the collection space V1 is guided outward along the upper surface 11a of the lower cup 11 and the lower surface 12a of the upper cup 12, passes through the collection space V2 while collecting in the collection space V2. The treatment liquid that has passed through the gathering space V2 reaches the scattering space V3, collides with the thick wall portion 13a of the side wall portion 13, and is scattered vertically and radially in the scattering space V3. A part of the treated liquid after scattering loses kinetic energy and falls by gravity and is stored in the groove 11g. On the other hand, the other part of the treatment liquid after scattering may become mist.

  Even in such a case, the interval of the gathering space V2 gradually decreases from the inside toward the outside. Further, the processing liquid scattered from the substrate W continuously passes through the collecting space V2 from the inside to the outside. Therefore, the mist of the treatment liquid is pushed outward by the flow of the treatment liquid passing through the collection space V2, and the mist of the treatment liquid does not pass through the collection space V2 again and return to the collection space V1. This prevents the mist of the processing liquid from flowing back and adhering to the surface to be processed and the lower surface of the substrate W, and prevents the mist of the processing liquid from scattering outside the processing cup unit 10.

  Further, the mist adhesion preventing member 17 forms a narrow space V5 between the upper surface of the mist adhesion preventing member 17 and the lower surface of the substrate W. Further, gas is supplied from the inside to the outside along the lower surface of the substrate W by the plurality of gas nozzles 18. Therefore, the space V5 is maintained at a positive pressure. Further, the atmosphere in the scattering space V3 is guided to the discharge space V4 through the gap S and then discharged from the exhaust flow path F1. The gas discharged from the exhaust flow path F1 is guided to the exhaust equipment in the factory by the exhaust system B.

  According to the above configuration, the mist adhesion preventing member 17 prevents the formation of an air flow from the outside of the substrate W toward the lower surface of the substrate W. Therefore, the mist of the processing liquid rebounded by the processing cup unit 10 does not adhere to the lower surface of the substrate W, and the processing liquid on the surface to be processed of the substrate W does not flow around to the lower surface. Accordingly, even if the lower surface of the substrate W is not cleaned with the cleaning liquid, it is possible to prevent the lower surface of the substrate from being contaminated by the processing liquid. Further, since the processing liquid splashed by the processing cup unit 10 does not adhere to the surface to be processed of the substrate W, it is possible to prevent the film formed on the surface to be processed from being contaminated.

  A part of the processing liquid that has reached the scattering space V3 adheres to the wall surface inside the processing cup unit 10 that is in contact with the scattering space V3. Here, the cleaning liquid is discharged from the plurality of cleaning nozzles 15 through the plurality of through holes 12h into the scattering space V3 and the groove portion 11g. The cleaning liquid discharged to the scattering space V3 is guided downward along the wall surface inside the processing cup unit 10 in contact with the scattering space V3. As a result, the cleaning liquid adhering to the wall surface is dissolved and stored in the groove portion 11g of the lower cup 11 together with the cleaning liquid as indicated by the arrow X in FIG.

  Here, the processing liquid that has been dissolved and stored in the groove 11g is vibrated by the vibrating member 14 provided in the groove 11g, so that the viscosity is reduced. The low-viscosity treatment liquid is guided to the discharge space V4 through the gap S by the air flow. Here, since the groove portion 11g is formed along the outer peripheral portion of the lower cup 11, the distance between the groove portion 11g and the substrate W is sufficiently separated. Therefore, it is possible to easily prevent the processing liquid having the reduced viscosity from flowing back and adhering to the substrate W again.

  Further, even when the processing liquid guided from the groove portion 11g to the discharge space V4 collides with the thin portion 13b of the side wall portion 13 and spreads upward or floats, the processing liquid is trapped in the groove portion 13g and downward due to gravity. Is returned to the discharge space V4. After that, the processing liquid in the discharge space V4 is discharged from the waste liquid flow path F2 and guided to the waste liquid equipment in the factory by the waste liquid system C.

  According to the above configuration, even if the viscosity of the treatment liquid is high, the treatment liquid does not remain attached to the wall surface of the treatment cup unit 10. Therefore, it is possible to prevent the passage for exhaust and waste liquid in the processing cup unit 10 from being clogged with the processing liquid. Further, since the treatment liquid has a low viscosity, it is easily discharged to the outside of the treatment cup unit 10. As a result, the processing cup unit 10 is prevented from being contaminated and the processing liquid is prevented from being generated as particles in the processing cup unit 10. Therefore, the frequency of removing and cleaning the processing cup unit 10 or the frequency of exchanging the processing cup unit 10 is reduced. As a result, the frequency of maintenance of the processing cup unit 10 can be reduced.

(3) Modification In the present embodiment, the upper surface 11a of the lower cup 11 is slightly inclined obliquely downward from the inner side to the outer side, but the shape of the lower cup 11 is not limited to this. FIG. 3 is a partially enlarged cross-sectional view of the processing cup unit 10 according to the modification. As shown in FIG. 3, the upper surface 11a of the lower cup 11 may be inclined obliquely upward from the inside toward the outside. In this configuration, if the lower cup 11 does not interfere with the mist adhesion preventing member 17, the notch 11n may not be formed in the lower cup 11. Alternatively, the upper surface 11a of the lower cup 11 may be substantially horizontal with almost no inclination.

(4) Effects In the substrate processing apparatus 100 according to the present embodiment, the rotation holding device 20 holds and rotates the substrate W in a horizontal posture. In this state, the processing liquid is discharged from the processing nozzle 30 onto the surface to be processed of the substrate W, whereby the substrate W is processed. Since the processing cup unit 10 is provided so as to surround the substrate W, the substrate processing apparatus 100 is prevented from being contaminated due to the scattering of the processing liquid.

  In the processing cup unit 10, the mist adhesion preventing member 17 is arranged below the substrate W. According to this configuration, even when the processing liquid scattered from the substrate W collides with the lower cup 11 or the upper cup 12 to generate a mist of the processing liquid, the mist adhesion preventing member 17 causes the mist of the processing liquid on the lower surface of the substrate W. Are prevented from adhering. As a result, it is possible to prevent the lower surface of the substrate W from being contaminated by the processing liquid. Further, since the processing liquid does not adhere to the lower surface of the substrate W, it is not necessary to supply the cleaning liquid for cleaning the lower surface of the substrate W to the lower surface of the substrate W. Therefore, the amount of cleaning liquid used in substrate processing can be reduced.

  In the processing cup unit 10, the processing liquid scattered from the substrate W is stored while being dissolved in the groove portion 11g formed in the lower cup 11, vibrated by the vibrating member 14, and then discharged from the discharge space V4. .. According to this configuration, the treatment liquid is vibrated by the vibrating member 14 in the groove portion 11g, so that the viscosity is reduced. Therefore, the processing liquid is easily discharged to the outside of the processing cup unit 10. In this case, the amount of the processing liquid adhering to and remaining on the wall surface of the lower cup 11, the upper cup 12, or the side wall portion 13 is reduced. As a result, the frequency of maintenance of the processing cup unit 10 can be reduced.

  Further, in the present embodiment, the inner edge portion of lower cup 11 is sufficiently close to substrate W. Specifically, the inner edge of the lower cup 11 is located inward of the inner edge of the upper cup 12. Alternatively, the inner edge of the lower cup 11 is located below the outer edge of the substrate W or the outer edge of the mist adhesion preventing member 17. Therefore, the processing liquid can be collected by the lower cup 11 even when the scattering distance of the processing liquid is short due to the low rotation speed of the substrate W or the high viscosity of the processing liquid.

  The treatment liquid collected by the lower cup 11 is guided to the groove 11g formed in the lower cup 11. As a result, the processing liquid can be discharged to the outside of the processing cup unit 10. Further, even when the processing liquid collides with the lower cup 11 in the vicinity of the substrate W and a part of the processing liquid becomes mist, the mist adhesion preventing member 17 may cause the processing liquid mist to adhere to the lower surface of the substrate W. To be prevented. Therefore, it is possible to prevent the lower surface of the substrate W from being contaminated by the processing liquid.

(5) Other Embodiments (a) In the above embodiment, the processing cup unit 10 includes the gas nozzle 18, but the present invention is not limited to this. When the space V5 between the upper surface of the mist adhesion preventing member 17 and the lower surface of the substrate W is formed sufficiently narrow, the processing cup unit 10 may not include the gas nozzle 18.

  (B) In the above embodiment, the processing cup unit 10 includes the cleaning nozzle 15, but the present invention is not limited to this. The treatment cup unit 10 may not include the cleaning nozzle 15 if it is possible to mitigate the increase in the viscosity of the treatment liquid. Further, in the substrate processing, a solution such as an organic solvent that dissolves the processing solution may be used (for example, pre-wet processing). In this case, the dissolution liquid is further stored in the groove 11g in addition to the processing liquid, and the processing liquid is dissolved. Therefore, even in such a case, the processing cup unit 10 may not include the cleaning nozzle 15.

  (C) In the above embodiment, the processing cup unit 10 includes the mist adhesion preventing member 17, but the present invention is not limited to this. When it is possible to prevent the lower surface of the substrate W from being contaminated by the processing liquid, the processing cup unit 10 may not include the mist adhesion preventing member 17. For example, when the cleaning nozzle that supplies the cleaning liquid to the lower surface of the substrate W is provided in the substrate processing apparatus 100 and the processing liquid attached to the lower surface of the substrate W is removed, the processing cup unit 10 includes the mist adhesion preventing member 17. It may not be included.

(6) Correspondence between each component of the claims and each part of the embodiment Hereinafter, an example of the correspondence between each component of the claims and each part of the embodiment will be described, but the present invention is not limited to the following examples. Not limited. As each constituent element of the claims, various other elements having the configurations or functions described in the claims may be used.

  In the above embodiment, the substrate W is an example of a substrate, the processing cup unit 10 is an example of a processing cup unit, the lower cup 11 is an example of a lower cup, and the upper cup 12 is an example of an upper cup. .. The grooves 11g and 12g are examples of the first and second grooves, respectively, the vibrating member 14 is an example of a vibrating member, the discharge space V4 is an example of a discharge part, and the cleaning nozzle 15 is an example of a cleaning liquid discharge part. Yes, the through hole 12h is an example of the through hole. The scattering space V3 is an example of a scattering space, the rotation holding device 20 is an example of a rotation holding device, the processing nozzle 30 is an example of a processing liquid ejecting unit, and the substrate processing apparatus 100 is an example of a substrate processing apparatus.

  10 ... Processing cup unit, 11 ... Lower cup, 11a ... Upper surface, 11g, 12g ... Groove part, 11n ... Notch, 12 ... Upper cup, 12a ... Lower surface, 12h ... Through hole, 13 ... Side wall part, 13a ... Thick part, Reference numeral 13b ... Thin portion, 14 ... Vibration member, 15 ... Cleaning nozzle, 16 ... Butt, 17 ... Mist adhesion preventing member, 18 ... Gas nozzle, 20 ... Rotation holding device, 21 ... Driving device, 22 ... Rotation shaft, 23 ... Rotation Holding unit, 30 ... Processing nozzle, 100 ... Substrate processing apparatus, A ... Processing liquid supply system, B ... Exhaust system, C ... Waste liquid system, D ... Cleaning liquid supply system, E ... Gas supply unit, F1 ... Exhaust flow path, F2 ... Waste liquid flow path, P ... Piping, p1-p3 ... Part, S ... Gap, V1 ... Collection space, V2 ... Collection space, V3 ... Scattering space, V4 ... Discharge space, V5 ... Space, W ... Substrate

Claims (10)

A processing cup unit provided so as to surround the periphery of a substrate when performing processing using a processing liquid on a substrate held in a horizontal posture,
Lower cup,
An upper cup arranged to surround the periphery of the substrate above the lower cup,
A first groove portion formed in the lower cup for storing the processing liquid scattered from the substrate;
A vibrating member for vibrating the treatment liquid stored in the first groove portion;
A processing cup unit, comprising: a discharge unit configured to discharge the processing liquid stored in the first groove. The processing cup unit according to claim 1, wherein the first groove portion further stores a solution for dissolving the processing solution scattered from the substrate. The processing cup unit according to claim 1 or 2, further comprising a cleaning liquid ejecting unit that ejects a cleaning liquid that dissolves the processing liquid so as to guide the processing liquid scattered from the substrate to the first groove. A through hole is formed in the upper cup portion above the first groove portion,
The processing cup unit according to claim 3, wherein the cleaning liquid discharger discharges the cleaning liquid into the first groove through the through hole. The processing cup unit according to claim 1, wherein the first groove portion is formed along an outer peripheral portion of the lower cup. Further comprising a second groove portion formed in the upper cup so as to face the first groove portion,
A scattering space that allows scattering of the treatment liquid is formed between the first groove portion and the second groove portion,
The processing cup unit according to claim 1, wherein the first groove portion stores the processing liquid scattered in the scattering space. The processing cup unit according to claim 1, wherein an inner edge portion of the lower cup is located more inward than an inner edge portion of the upper cup. The processing cup unit according to claim 1, wherein an inner edge portion of the lower cup is located below an outer edge portion of the substrate. The processing cup unit according to claim 1, wherein the processing liquid used for the substrate processing has a viscosity of 100 cP or more and 300 cP or less. A rotation holding device that holds and rotates the substrate in a horizontal posture,
A processing liquid ejecting section for ejecting a processing liquid onto the surface to be processed of the substrate held by the rotation holding device;
A substrate processing apparatus comprising: the processing cup unit according to claim 1, which is provided so as to surround a periphery of the substrate held by the rotation holding device.

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