JP2020065324A - Vibration power generation element - Google Patents

Vibration power generation element Download PDF

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JP2020065324A
JP2020065324A JP2018194437A JP2018194437A JP2020065324A JP 2020065324 A JP2020065324 A JP 2020065324A JP 2018194437 A JP2018194437 A JP 2018194437A JP 2018194437 A JP2018194437 A JP 2018194437A JP 2020065324 A JP2020065324 A JP 2020065324A
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movable electrode
electrode portion
weight
vibration power
power generation
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JP6934850B2 (en
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大輔 穴井
Daisuke Anai
大輔 穴井
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Saginomiya Seisakusho Inc
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Saginomiya Seisakusho Inc
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Priority to CN201910962520.3A priority patent/CN111049416B/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/08—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for recovering energy derived from swinging, rolling, pitching or like movements, e.g. from the vibrations of a machine

Abstract

To provide a mounting structure for a weight fixed to a movable electrode portion.SOLUTION: A vibration power generation element 1 includes a fixed electrode portion 111 having a plurality of comb-teeth electrodes 110, a movable electrode portion 12 having a plurality of comb-teeth electrodes 120, weights 10a and 10b fixed to the movable electrode portion 12, and a resin reservoir 103 that is disposed in the weights 10a and 10b, and accommodates a resin 105 that fixes the weights 10a and 10b to the movable electrode portion 12.SELECTED DRAWING: Figure 6

Description

本発明は、振動発電素子に関する。   The present invention relates to a vibration power generation element.

近年、ＭＥＭＳ技術を利用した非常に小型の振動発電素子が開発されている。例えば、特許文献１では、櫛歯電極が形成された固定部に対して櫛歯電極が形成された可動部を振動させることで発電を行うようにしている。このような振動発電素子においては、小さな環境振動でも効率良く発電するために可動部の質量をより大きくすることが重要であり、特許文献１に記載の振動発電素子では可動部上に別途形成された錘を装着する構造としている。   In recent years, a very small vibration power generation element using the MEMS technology has been developed. For example, in Patent Document 1, power is generated by vibrating a movable portion having the comb-teeth electrode formed thereon with respect to a fixed portion having the comb-teeth electrode formed thereon. In such a vibration power generation element, it is important to make the mass of the movable portion larger in order to efficiently generate power even with a small environmental vibration. In the vibration power generation element described in Patent Document 1, it is separately formed on the movable portion. It has a structure to attach a weight.

特許６３３８０７１号公報Japanese Patent No. 6338071

上記特許文献１には、錘が可動部に装着される（明細書段落［００５９］参照）ことが記載されているだけであり、錘を可動部に装着する手段については記載されていない。そこで、可動部に固定される錘の実装構造を提供する。   The above Patent Document 1 only describes that the weight is attached to the movable portion (see paragraph [0059] in the specification), and does not describe means for attaching the weight to the movable portion. Then, the mounting structure of the weight fixed to a movable part is provided.

本発明の一態様による振動発電素子は、複数の櫛歯電極を有する固定電極部と、複数の櫛歯電極を有する可動電極部と、前記可動電極部に固定される錘と、前記錘または前記可動電極部に設けられ、前記錘を前記可動電極部に固定する樹脂を収容する樹脂溜め部とを備える。   The vibration power generation element according to one aspect of the present invention includes a fixed electrode portion having a plurality of comb-teeth electrodes, a movable electrode portion having a plurality of comb-teeth electrodes, a weight fixed to the movable electrode portion, the weight or the weight. And a resin reservoir portion that is provided in the movable electrode portion and accommodates a resin that fixes the weight to the movable electrode portion.

本発明によれば、錘と可動電極部とを接合する樹脂のはみ出しを抑制することができる。   According to the present invention, the protrusion of the resin that joins the weight and the movable electrode portion can be suppressed.

図１は、真空パッケージに封入された振動発電素子を示す図である。FIG. 1 is a diagram showing a vibration power generation element enclosed in a vacuum package. 図２は、振動発電素子の各部の構成を示す図である。FIG. 2 is a diagram showing a configuration of each part of the vibration power generation element. 図３は、振動平面内における重心位置のずれを説明する図である。FIG. 3 is a diagram for explaining the displacement of the center of gravity in the vibration plane. 図４は、振動平面に垂直な方向の位置ずれを説明する図である。FIG. 4 is a diagram for explaining the positional deviation in the direction perpendicular to the vibration plane. 図５は、図１に示された錘を可動電極部側からみた斜視図である。FIG. 5 is a perspective view of the weight shown in FIG. 1 viewed from the movable electrode portion side. 図６は、可動電極部と錘との接合構造の第１の実施形態を示し、図１（ｂ）における可動電極部と錘との接合構造を示す拡大図である。FIG. 6 shows a first embodiment of the joint structure between the movable electrode portion and the weight, and is an enlarged view showing the joint structure between the movable electrode portion and the weight in FIG. 1B. 図７（ａ）〜（ｃ）は、図６に示す可動電極部と錘との接合構造を形成する各工程の図である。FIGS. 7A to 7C are diagrams of each step of forming the joint structure of the movable electrode portion and the weight shown in FIG. 図８（ａ）〜（ｄ）は、振動発電素子のＭＥＭＳ加工体の形成手順の一例を示す図である。8A to 8D are diagrams showing an example of a procedure for forming the MEMS processed body of the vibration power generation element. 図９は、ＭＥＭＳ加工体の形成手順の図８に続く工程を示す図である。FIG. 9 is a diagram showing a step following the step of FIG. 8 of the procedure for forming the MEMS processed body. 図１０は、可動電極部と錘との接合構造の第２の実施形態を示す断面図である。FIG. 10 is a sectional view showing a second embodiment of the joint structure of the movable electrode portion and the weight. 図１１は、可動電極部と錘との接合構造の第３の実施形態を示し、可動電極部に錘を接合する前の状態を示す図である。FIG. 11 shows a third embodiment of the joint structure of the movable electrode portion and the weight, and shows a state before the weight is joined to the movable electrode portion. 図１２は、第３の実施形態における可動電極部と錘との接合構造を示す断面図である。FIG. 12 is a cross-sectional view showing the joint structure of the movable electrode portion and the weight in the third embodiment. 図１３は、錘の変形例１を示し、図１３（ａ）は錘の平面図、図１３（ｂ）は図１３（ａ）の中心線Ｌ５−Ｌ５に沿う断面図、図１３（ｃ）は図１３（ａ）の中心線Ｌ４−Ｌ４に沿う断面図である。13 shows a modified example 1 of the weight, FIG. 13 (a) is a plan view of the weight, FIG. 13 (b) is a sectional view taken along the center line L5-L5 of FIG. 13 (a), and FIG. 13 (c). FIG. 14 is a sectional view taken along the center line L4-L4 of FIG. 図１４は、錘の変形例２を示し、図１４（ａ）は錘の平面図、図１４（ｂ）は図１４（ａ）の中心線Ｌ５−Ｌ５に沿う断面図、図１４（ｃ）は図１４（ａ）の中心線Ｌ４−Ｌ４に沿う断面図である。FIG. 14 shows a modified example 2 of the weight, FIG. 14 (a) is a plan view of the weight, FIG. 14 (b) is a sectional view taken along the center line L5-L5 of FIG. 14 (a), and FIG. FIG. 14 is a cross-sectional view taken along the center line L4-L4 of FIG. 図１５は、錘の変形例３を示し、図１５（ａ）は錘の平面図、図１５（ｂ）は図１５（ａ）の中心線Ｌ５−Ｌ５に沿う断面図、図１５（ｃ）は図１５（ａ）の中心線Ｌ４−Ｌ４に沿う断面図である。15 shows a third modification of the weight, FIG. 15 (a) is a plan view of the weight, FIG. 15 (b) is a sectional view taken along the center line L5-L5 of FIG. 15 (a), and FIG. 15 (c). FIG. 16 is a sectional view taken along the center line L4-L4 of FIG. 図１６（ａ）、（ｂ）は、比較例の構造を示し、図１６（ａ）は錘を可動電極部に接着する前の図であり、図１６（ｂ）は錘を可動電極部に接着した状態の図である。16 (a) and 16 (b) show a structure of a comparative example, FIG. 16 (a) is a diagram before adhering the weight to the movable electrode portion, and FIG. 16 (b) shows the weight in the movable electrode portion. It is a figure of the state where it adhered.

−第１の実施形態−
以下、図を参照して本発明を実施するための形態について説明する。図１は真空状態のパッケージ２内に封入された振動発電素子１を示す図であり、図１（ａ）は平面図、図１（ｂ）はＡ−Ａ断面図である。なお、図１（ａ）の平面図ではパッケージ２の内部構造が分かるように、パッケージ２の上面側（ｚ軸正方向側）に設けられた上蓋３の図示を省略した。 -First Embodiment-
Embodiments for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a vibration power generation element 1 enclosed in a package 2 in a vacuum state, FIG. 1 (a) is a plan view, and FIG. 1 (b) is an AA cross-sectional view. In the plan view of FIG. 1A, the upper lid 3 provided on the upper surface side (the positive side of the z-axis) of the package 2 is omitted so that the internal structure of the package 2 can be seen.

振動発電素子１は、固定部１１と、可動電極部１２と、可動電極部１２を弾性支持する弾性支持部１３と、可動電極部１２の表裏両面に固着された一対の錘１０ａ、１０ｂとを備えている。振動発電素子１の固定部１１は、ダイボンドによりパッケージ２に固定される。パッケージ２は、例えば、電気絶縁性の材料（例えば、セラミックス）で形成されている。パッケージ２の上端には、パッケージ２内を真空封入するための上蓋３がシーム溶接される。   The vibration power generating element 1 includes a fixed portion 11, a movable electrode portion 12, an elastic support portion 13 that elastically supports the movable electrode portion 12, and a pair of weights 10a and 10b fixed to both front and back surfaces of the movable electrode portion 12. I have it. The fixed portion 11 of the vibration power generation element 1 is fixed to the package 2 by die bonding. The package 2 is made of, for example, an electrically insulating material (for example, ceramics). An upper lid 3 for vacuum-sealing the inside of the package 2 is seam welded to the upper end of the package 2.

固定部１１上には固定電極部１１１が形成され、その固定電極部１１１には、ｘ軸方向に延びる櫛歯電極１１０がｙ軸方向に複数形成されている。可動電極部１２には、ｘ軸方向に延びる櫛歯電極１２０がｙ軸方向に複数形成されている。詳細には、可動電極部１２は、ｘ軸方向に延在する中央帯部１２１（図１（ｂ）参照）と、中央帯部１２１のｘ軸方向の中心から、それぞれ、ｙ軸正方向、およびｙ軸負方向に延在する枝部１２２を有する。可動電極部１２の各枝部１２２には、ｙ軸方向に所定の間隔をおいて複数の櫛歯電極１２０が配列されている。ｘ軸方向に延在する複数の櫛歯電極１１０と各枝部１２２から延在される櫛歯電極１２０とは、ｙ軸方向に隙間を介して互いに噛合するように配置されている。固定電極部１１１には電極パッド１１２が形成されている。   A fixed electrode portion 111 is formed on the fixed portion 11, and a plurality of comb-teeth electrodes 110 extending in the x-axis direction are formed in the fixed electrode portion 111 in the y-axis direction. A plurality of comb-teeth electrodes 120 extending in the x-axis direction are formed in the movable electrode portion 12 in the y-axis direction. Specifically, the movable electrode portion 12 includes a central strip 121 (see FIG. 1B) extending in the x-axis direction and a center of the central strip 121 in the x-axis direction, respectively, in the positive y-axis direction, And a branch portion 122 extending in the y-axis negative direction. A plurality of comb-teeth electrodes 120 are arranged on each branch 122 of the movable electrode unit 12 at predetermined intervals in the y-axis direction. The plurality of comb-teeth electrodes 110 extending in the x-axis direction and the comb-teeth electrodes 120 extending from each branch 122 are arranged so as to mesh with each other with a gap in the y-axis direction. An electrode pad 112 is formed on the fixed electrode portion 111.

可動電極部１２は、固定部１１上に形成された接続部１１４に弾性支持部１３を介して機械的および電気的に接続されている。接続部１１４には電極パッド１１３が形成されている。電極パッド１１２、１１３は、ワイヤー２２によってパッケージ２に設けられた電極２１ａ、２１ｂに接続されている。本実施の形態では可動電極部１２はｘ軸方向に振動するように構成されており、可動電極部１２がｘ軸方向に振動すると、固定電極部１１１の櫛歯電極１１０に対する櫛歯電極１２０の挿入量が変化して発電が行われる。錘１０ａ、１０ｂは、接着用の樹脂１０５により可動電極部１２に接合されている。錘１０ａ、１０ｂと可動電極部１２との接合構造については後述する。   The movable electrode portion 12 is mechanically and electrically connected to the connection portion 114 formed on the fixed portion 11 via the elastic support portion 13. An electrode pad 113 is formed on the connection portion 114. The electrode pads 112 and 113 are connected to the electrodes 21 a and 21 b provided on the package 2 by the wires 22. In the present embodiment, the movable electrode portion 12 is configured to vibrate in the x-axis direction. When the movable electrode portion 12 vibrates in the x-axis direction, the comb-teeth electrode 120 with respect to the comb-teeth electrode 110 of the fixed electrode portion 111 moves. The amount of insertion changes and power is generated. The weights 10a and 10b are joined to the movable electrode portion 12 by an adhesive resin 105. The joint structure between the weights 10a and 10b and the movable electrode portion 12 will be described later.

図２は振動発電素子１の各部の構成を示す図である。後述するように、振動発電素子１は、ＳＯＩ（Silicon On Insulator）基板を用いて一般的なＭＥＭＳ加工技術により形成される。ＳＯＩ基板はＳｉの支持層とＳｉＯ２のボックス層とＳｉの活性層とから成る３層構造の基板であり、固定部１１は支持層により形成され、固定電極部１１１、可動電極部１２、弾性支持部１３および接続部１１４は活性層により形成される。 FIG. 2 is a diagram showing a configuration of each part of the vibration power generation element 1. As will be described later, the vibration power generation element 1 is formed by a general MEMS processing technique using an SOI (Silicon On Insulator) substrate. The SOI substrate is a substrate having a three-layer structure including a Si support layer, a SiO 2 box layer, and a Si active layer. The fixed portion 11 is formed by the support layer, and the fixed electrode portion 111, the movable electrode portion 12, and the elastic portion are formed. The supporting portion 13 and the connecting portion 114 are formed by an active layer.

図２（ａ）は、振動発電素子１のＭＥＭＳ加工体、すなわち錘１０ａ、１０ｂを固着する前の振動発電素子１を示す図である。図２（ａ）では、固定部１１上の固定電極部１１１と、可動電極部１２、弾性支持部１３および接続部１１４とをハッチングを施して示した。可動電極部１２は４組の弾性支持部１３によって弾性支持されている。各弾性支持部１３は、弾性変形可能な３本のビーム１３ａ〜１３ｃを備えている。   FIG. 2A is a diagram showing the MEMS processed body of the vibration power generation element 1, that is, the vibration power generation element 1 before the weights 10a and 10b are fixed. In FIG. 2A, the fixed electrode portion 111 on the fixed portion 11, the movable electrode portion 12, the elastic support portion 13, and the connection portion 114 are shown by hatching. The movable electrode portion 12 is elastically supported by four sets of elastic support portions 13. Each elastic support portion 13 is provided with three elastically deformable beams 13a to 13c.

接続部１１４は、可動電極部１２のｘ軸方向振動の範囲を制限する制限部としても機能する。接続部１１４の可動電極部１２に対向する面には、突起１１４ａが形成されている。可動電極部１２のｘ軸方向端面が接続部１１４の突起１１４ａに衝突することによって、可動電極部１２の振動の振幅が制限される。なお、図２（ａ）では突起を接続部１１４に形成したが、可動電極部１２側に形成しても良い。   The connecting portion 114 also functions as a limiting portion that limits the range of vibration of the movable electrode portion 12 in the x-axis direction. A protrusion 114 a is formed on the surface of the connecting portion 114 facing the movable electrode portion 12. The x-axis direction end surface of the movable electrode portion 12 collides with the protrusion 114a of the connection portion 114, whereby the vibration amplitude of the movable electrode portion 12 is limited. Although the protrusion is formed on the connecting portion 114 in FIG. 2A, it may be formed on the movable electrode portion 12 side.

図２（ｂ）は、振動発電素子１の固定部１１のみを示す図である。図２（ｂ）の固定部１１上に示したハッチング領域１１Ｃは、固定電極部１１１が固定されている領域を示す。ビーム１３ａの端部は固定部１１上に固定される。図２（ｂ）の固定部１１上に示したハッチング領域１１Ａは、ビーム１３ａの端部が固定されている領域を示す。ビーム１３ｃの端部は、固定部１１上に形成された接続部１１４に接続されている。図２（ｂ）の固定部１１上に示したハッチング領域１１Ｂは、接続部１１４が固定されている領域を示す。   FIG. 2B is a diagram showing only the fixed portion 11 of the vibration power generation element 1. The hatched area 11C shown on the fixed portion 11 in FIG. 2B shows an area where the fixed electrode portion 111 is fixed. The end portion of the beam 13a is fixed on the fixed portion 11. The hatched area 11A shown on the fixed portion 11 in FIG. 2B shows an area where the end portion of the beam 13a is fixed. The end portion of the beam 13c is connected to the connection portion 114 formed on the fixed portion 11. A hatching area 11B shown on the fixing portion 11 in FIG. 2B shows an area where the connecting portion 114 is fixed.

本実施の形態の振動発電素子１では、可動電極部１２の質量を増やして発電効率をより向上させるために別体の錘１０ａ、１０ｂを可動電極部１２に装着するようにしている。錘１０ａ、１０ｂの材料には、小さな体積でも大きな質量が得らえるようにＳＯＩ基板よりも比重の大きな材料が使用される。例えば、タングステン（比重19.25）、快削銅（比重8.94）、ステンレス鋼（比重7.93）や、メタルインジェクション法により形成されるタングステン部材（比重13〜17）等の金属や、タングステン樹脂（比重11〜13）のように樹脂に金属材を混入したものなどが用いられる。   In the vibration power generation element 1 of the present embodiment, separate weights 10a and 10b are attached to the movable electrode portion 12 in order to increase the mass of the movable electrode portion 12 and further improve power generation efficiency. As the material of the weights 10a and 10b, a material having a larger specific gravity than that of the SOI substrate is used so that a large mass can be obtained even in a small volume. For example, metals such as tungsten (specific gravity 19.25), free-cutting copper (specific gravity 8.94), stainless steel (specific gravity 7.93), tungsten members (specific gravity 13 to 17) formed by the metal injection method, and tungsten resin (specific gravity 11 to 11). As in 13), a resin mixed with a metal material is used.

このように、別に形成された錘１０ａ、１０ｂを可動電極部１２に装着する構成の場合、可動電極部１２に装着した際の錘１０ａ、１０ｂの重心位置のずれが弾性支持部１３の寿命に大きな影響を与えることが判った。図３および図４は、錘１０ａ、１０ｂの重心位置のずれの影響を説明する図である。図３は振動平面内（図１のｘｙ平面内）での位置ずれを説明する図で、図４は振動平面に垂直な方向（図１のｚ軸方向）の位置ずれを説明する図である。   As described above, in the case where the separately formed weights 10a and 10b are attached to the movable electrode portion 12, the displacement of the center of gravity of the weights 10a and 10b when the weights 10a and 10b are attached to the movable electrode portion 12 will affect the life of the elastic support portion 13. It turned out to have a big influence. 3 and 4 are views for explaining the influence of the shift of the center of gravity of the weights 10a and 10b. FIG. 3 is a diagram for explaining the positional deviation in the vibration plane (in the xy plane of FIG. 1), and FIG. 4 is a diagram for explaining the positional deviation in the direction perpendicular to the vibration plane (z-axis direction in FIG. 1). .

図３において、（ａ）は位置決めが適切に行われている場合を示し、（ｂ）は位置決めが不適切な場合を示す。図３では錘１０ａ、１０ｂの図示を省略し、錘１０ａ、１０ｂの重心位置のみを符号Ｇで示した。図３（ａ）、（ｂ）において、ラインＬ１は接続部１１４の突起１１４ａの先端を通り振動方向（ｘ軸方向）に平行な直線である。図３（ａ）に示す例では、ｘｙ平面上における錘１０ａ、１０ｂの重心位置ＧはラインＬ１上に位置している。そのため、振動により錘１０ａ、１０ｂの重心に働く力Ｆ１の方向は、ラインＬ１に沿った方向となっている。可動電極部１２が接続部１１４の突起１１４ａに衝突すると突起１１４ａから可動電極部１２に対して反作用の力Ｆ２が働くが、Ｆ１とＦ２は向きは逆であるが方向はラインＬ１に沿った方向である。そのため、可動電極部１２をｘｙ面内で傾けるようなモーメントは発生しない。   In FIG. 3, (a) shows a case where the positioning is properly performed, and (b) shows a case where the positioning is inappropriate. In FIG. 3, illustration of the weights 10a and 10b is omitted, and only the position of the center of gravity of the weights 10a and 10b is indicated by a symbol G. In FIGS. 3A and 3B, the line L1 is a straight line that passes through the tips of the protrusions 114a of the connection portion 114 and is parallel to the vibration direction (x-axis direction). In the example shown in FIG. 3A, the center of gravity position G of the weights 10a and 10b on the xy plane is located on the line L1. Therefore, the direction of the force F1 that acts on the center of gravity of the weights 10a and 10b due to the vibration is the direction along the line L1. When the movable electrode portion 12 collides with the protrusion 114a of the connecting portion 114, a reaction force F2 acts on the movable electrode portion 12 from the protrusion 114a, but the directions of F1 and F2 are opposite but the direction is along the line L1. Is. Therefore, no moment that tilts the movable electrode portion 12 in the xy plane is generated.

なお、可動電極部１２はラインＬ１に対して線対称にｙプラス方向とｙマイナス方向に可動櫛歯群が設けられており、質量に関してもラインＬ１に対して線対称となっている。したがって、ラインＬ１は可動電極部１２の可動電極群が線対称となる基準線と定義することもできる。   The movable electrode portion 12 is provided with movable comb teeth groups in the y plus direction and the y minus direction in line symmetry with respect to the line L1, and the mass is also line symmetric with respect to the line L1. Therefore, the line L1 can also be defined as a reference line with which the movable electrode group of the movable electrode unit 12 is line symmetrical.

一方、図３（ｂ）に示す位置決めが不適切な場合、錘１０ａ、１０ｂの重心位置ＧはラインＬ１に対してｙ軸負方向に位置ずれしている。そのため、可動電極部１２が接続部１１４の突起１１４ａに衝突すると、力Ｆ１および力Ｆ２を表すベクトルが同一ラインに沿った力ではないため可動電極部１２を矢印のように傾けるようなにモーメントが作用し、可動電極部１２がｘｙ面内で傾くことになる。その結果、ビーム１３ｂに意図しない変形が生じビーム破損の原因となる。   On the other hand, when the positioning shown in FIG. 3 (b) is inappropriate, the center of gravity position G of the weights 10a and 10b is displaced in the y-axis negative direction with respect to the line L1. Therefore, when the movable electrode portion 12 collides with the protrusion 114a of the connection portion 114, a moment indicating that the movable electrode portion 12 is tilted as indicated by an arrow is generated because the vectors representing the forces F1 and F2 are not forces along the same line. This causes the movable electrode portion 12 to tilt in the xy plane. As a result, the beam 13b is unintentionally deformed, which causes beam damage.

振動平面に垂直な方向の位置ずれを説明する図４は、図３（ａ）のラインＬ１に沿ったｘｚ断面を示したものである。図４は衝突時の状態を示す図であって、図４（ａ）は錘１０ａ、１０ｂの合計質量の重心位置ＧがラインＬ１上にある場合を示し、図４（ｂ）は重心位置ＧがラインＬ１よりも図示下側（ｚ軸負方向側）にある場合を示す。   FIG. 4 for explaining the positional deviation in the direction perpendicular to the vibration plane shows an xz cross section taken along the line L1 of FIG. FIG. 4 is a diagram showing a state at the time of collision, FIG. 4 (a) shows a case where the center of gravity position G of the total mass of the weights 10a and 10b is on the line L1, and FIG. 4 (b) shows the center of gravity position G. Is below the line L1 in the drawing (on the negative side of the z-axis).

錘１０ａ、１０ｂが同一材料かつ同一形状である場合には、それぞれの重心位置Ｇ１、Ｇ２の可動電極部１２からの高さ寸法は同一となる。そのため、ｘｙ平面上における重心位置Ｇ１、Ｇ２の位置ずれがあった場合でも、錘１０ａ、１０ｂの合計質量の重心位置ＧはラインＬ１を含むｘｙ平面上に位置することになり、可動電極部１２が接続部１１４の突起１１４ａに衝突した際にモーメントは発生しない。   When the weights 10a and 10b are made of the same material and have the same shape, the heights from the movable electrode portion 12 at the center of gravity positions G1 and G2 are the same. Therefore, even if the gravity center positions G1 and G2 are displaced on the xy plane, the gravity center position G of the total mass of the weights 10a and 10b is located on the xy plane including the line L1, and the movable electrode portion 12 A moment does not occur when collides with the protrusion 114a of the connecting portion 114.

ただし、錘１０ａ、１０ｂの形状が互いに異なる等の理由で、図４（ｂ）に示すように合計質量の重心位置ＧがラインＬ１に対してｚ軸方向に位置ずれしていた場合、可動電極部１２に対する錘１０ａ、１０ｂのｘｙ方向の位置決めが適正であっても、可動電極部１２が接続部１１４の突起１１４ａに衝突した際に可動電極部１２を矢印のように傾けるようなモーメントが発生して、ビーム１３ｂに意図しない変形が生じることになる。   However, when the center of gravity position G of the total mass is displaced in the z-axis direction with respect to the line L1 as shown in FIG. 4B because the shapes of the weights 10a and 10b are different from each other, the movable electrode Even if the weights 10a and 10b are properly positioned in the xy directions with respect to the portion 12, when the movable electrode portion 12 collides with the protrusion 114a of the connection portion 114, a moment is generated that tilts the movable electrode portion 12 as shown by an arrow. Then, the beam 13b is unintentionally deformed.

図５は、図１に示された錘を可動電極部側からみた斜視図であり、図６は、可動電極部と錘との接合構造の第１の実施形態を示し、図１（ｂ）における可動電極部と錘との接合構造を示す拡大図である。なお、図６は、図示の都合上、Ｚ方向（厚さ方向）の長さを拡大して図示している。
錘１０ａと錘１０ｂとは同一の形状をしており、以下では、代表として、錘１０ａについて説明する。
錘１０ａは、可動電極部１２の中央帯部１２１に沿ってｘ軸方向に延在される帯状形状を有する。錘１０ａの可動電極部１２の中央帯部１２１側には、ｙ軸方向の長さ（幅）の小さい幅狭部１１５が形成されている。幅狭部１１５の可動電極部１２に対面する一面１１５ａには、一対の位置決め突起１０２と樹脂溜め部１０３が形成されている。図５では、位置決め突起１０２は、円筒形状として例示するが、角筒形状としてもよい。あるいは、円錐形状や角錐形状とすることもできる。 5 is a perspective view of the weight shown in FIG. 1 as seen from the movable electrode portion side, and FIG. 6 shows a first embodiment of a joint structure of the movable electrode portion and the weight, and FIG. FIG. 6 is an enlarged view showing a joint structure of a movable electrode portion and a weight in FIG. For convenience of illustration, FIG. 6 illustrates the length in the Z direction (thickness direction) in an enlarged manner.
The weight 10a and the weight 10b have the same shape, and the weight 10a will be described below as a representative.
The weight 10a has a strip shape extending in the x-axis direction along the central strip 121 of the movable electrode portion 12. A narrow portion 115 having a small length (width) in the y-axis direction is formed on the side of the center band portion 121 of the movable electrode portion 12 of the weight 10a. A pair of positioning protrusions 102 and a resin reservoir 103 are formed on one surface 115a of the narrow portion 115 that faces the movable electrode portion 12. In FIG. 5, the positioning protrusion 102 is illustrated as a cylindrical shape, but it may be a rectangular tube shape. Alternatively, the shape may be a cone or a pyramid.

錘１０ａのｘ軸方向の中心線Ｌ２は、ｘｙ面において可動電極部１２のｘ軸方向の中心線と同一位置に配置されている。錘１０ａのｙ軸方向の中心線Ｌ３は、ｘｙ面において接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行な直線であるラインＬ１と同一位置に配置されている。一対の位置決め突起１０２は、同一形状を有し、各位置決め突起１０２の中心は、中心線Ｌ３上における中心線Ｌ２と対称な位置に配置されている。
従って、ｘｙ面上における錘１０ａの重心の位置と可動電極部１２の重心位置とは一致する。
このことは、錘１０ｂに関しても同様である。このため、ｘｙ面上における錘１０ａ、１０ｂの重心の位置と可動電極部１２の重心位置とは一致する。 The center line L2 of the weight 10a in the x-axis direction is arranged at the same position as the center line of the movable electrode portion 12 in the x-axis direction on the xy plane. The center line L3 of the weight 10a in the y-axis direction is arranged at the same position as the line L1 which is a straight line passing through the protrusion 114a of the connecting portion 114 and parallel to the vibration direction (x-axis direction) on the xy plane. The pair of positioning protrusions 102 have the same shape, and the centers of the respective positioning protrusions 102 are arranged at positions symmetrical with respect to the center line L2 on the center line L3.
Therefore, the position of the center of gravity of the weight 10a on the xy plane and the position of the center of gravity of the movable electrode portion 12 coincide with each other.
This also applies to the weight 10b. Therefore, the position of the center of gravity of the weights 10a and 10b on the xy plane and the position of the center of gravity of the movable electrode portion 12 coincide with each other.

可動電極部１２の中央帯部１２１の上面（Ｚ軸正方向側の一面）１２１ａ（図６ａ参照）および下面（Ｚ軸正方向側の一面）１２１ｂ（図６参照）には、それぞれ、位置決め突起１０２が嵌合する位置決め用貫通孔１２３（図７参照）が形成されている。
図６に示されるように、錘１０ａは、一対の位置決め突起１０２を可動電極部１２の中央帯部１２１の位置決め用貫通孔１２３に嵌合した状態で、樹脂溜め部１０３に収容された接着用の樹脂１０５により可動電極部１２の中央帯部１２１に接着される。同様に、錘１０ｂは、一対の位置決め突起１０２を可動電極部１２の中央帯部１２１の位置決め用貫通孔１２３に嵌合した状態で、樹脂溜め部１０３に収容された接着用の樹脂１０５により可動電極部１２の中央帯部１２１に接着される。 Positioning protrusions are provided on the upper surface (one surface on the Z axis positive direction side) 121a (see FIG. 6a) and the lower surface (one surface on the Z axis positive direction side) 121b (see FIG. 6) of the central band portion 121 of the movable electrode portion 12, respectively. A positioning through hole 123 (see FIG. 7) into which the 102 is fitted is formed.
As shown in FIG. 6, the weight 10 a has a pair of positioning protrusions 102, which are fitted in the positioning through holes 123 of the central band 121 of the movable electrode portion 12 and are accommodated in the resin reservoir 103. The resin 105 adheres to the central band portion 121 of the movable electrode portion 12. Similarly, the weight 10 b is moved by the adhesive resin 105 housed in the resin reservoir 103, with the pair of positioning protrusions 102 fitted in the positioning through holes 123 of the central band 121 of the movable electrode portion 12. It is adhered to the central band portion 121 of the electrode portion 12.

図７（ａ）〜（ｃ）は、図６に示す可動電極部と錘との接合構造を形成する各工程の図である。
図７（ａ）に示すように、錘１０ｂの樹脂溜め部１０３および一対の位置決め突起１０２が形成された面を上方に向けて、樹脂溜め部１０３内に液状の樹脂１０５ａを充填する。樹脂溜め部１０３内に充填する液状の樹脂１０５ａの量は、表面張力により中央部が錘１０ｂの上面から少し隆起する程度とする。可動電極部１２の中央帯部１２１の下面１２１ｂ側を錘１０ｂに対面させて、錘１０ｂの一対の位置決め突起１０２に可動電極部１２の中央帯部１２１の位置決め用貫通孔１２３に嵌合する。これにより、可動電極部１２の中央帯部１２１の下面１２１ｂが錘１０ｂに接着される。この状態を図７（ｂ）に示す。 FIGS. 7A to 7C are diagrams of each step of forming the joint structure of the movable electrode portion and the weight shown in FIG.
As shown in FIG. 7A, the resin reservoir 103 is filled with a liquid resin 105a with the surface of the weight 10b on which the resin reservoir 103 and the pair of positioning protrusions 102 are formed facing upward. The amount of the liquid resin 105a filled in the resin reservoir 103 is such that the central portion is slightly raised from the upper surface of the weight 10b due to surface tension. The lower surface 121b side of the central band portion 121 of the movable electrode portion 12 faces the weight 10b, and the pair of positioning protrusions 102 of the weight 10b are fitted into the positioning through holes 123 of the central band portion 121 of the movable electrode portion 12. As a result, the lower surface 121b of the central band 121 of the movable electrode portion 12 is bonded to the weight 10b. This state is shown in FIG.

錘１０ｂの樹脂溜め部１０３内に収容された液状の樹脂１０５ａが硬化したら、図７（ｃ）に示すように、可動電極部１２の中央帯部１２１の上面１２１ａのｘ軸方向およびｙ軸方向の中心に、液状の樹脂１０５ａを滴下する。液状の樹脂１０５ａは、表面張力により球状に盛り上がった状態になる。この後、錘１０ａを、樹脂溜め部１０３が形成されている一面１１５ａを可動電極部１２の中央帯部１２１の上面１２１ａに対面させ、錘１０ａの一対の位置決め突起１０２を可動電極部１２の中央帯部１２１の位置決め用貫通孔１２３に嵌合する。これにより、可動電極部１２の中央帯部１２１の上面１２１ａに付着している液状の樹脂１０５ａが錘１０ａの樹脂溜め部１０３内に収容され、図６に示す錘１０ａ、１０ｂが可動電極部１２に接合された接合構造が得られる。   When the liquid resin 105a housed in the resin reservoir 103 of the weight 10b is cured, as shown in FIG. 7C, the upper surface 121a of the central band 121 of the movable electrode portion 12 has x-axis direction and y-axis direction. Liquid resin 105a is dripped at the center of. The liquid resin 105a is in a spherically raised state due to surface tension. Thereafter, the weight 10a is made to face the one surface 115a on which the resin reservoir 103 is formed with the upper surface 121a of the central band portion 121 of the movable electrode portion 12, and the pair of positioning projections 102 of the weight 10a are placed at the center of the movable electrode portion 12. It fits into the positioning through hole 123 of the band portion 121. As a result, the liquid resin 105a attached to the upper surface 121a of the central band 121 of the movable electrode portion 12 is stored in the resin reservoir portion 103 of the weight 10a, and the weights 10a and 10b shown in FIG. A joined structure joined to is obtained.

図１６（ａ）、（ｂ）は、比較例の可動電極部と錘との接合構造を示し、図１６（ａ）は錘を可動電極部に接着する前の図であり、図１６（ｂ）は錘を可動電極部に接着した状態の図である。図１６（ａ）、（ｂ）は、図１におけるｙ軸方向に沿う断面図である。
比較例では、可動電極部４０１は、ｙ軸方向に所定間隔で配列された櫛歯電極４０１ａを有する。固定電極の櫛歯電極４１１ａは、隙間を介して可動電極部４０１の櫛歯電極４０１ａと互いに噛合している。但し、図１６（ａ）、（ｂ）では、可動電極部４０１の櫛歯電極４０１ａとの間の隙間は図示されていない。比較例の可動電極部４０１と錘４２０との接合構造では、可動電極部４０１と錘４２０とのいずれにも樹脂溜め部は形成されていない。このため、可動電極部４０１上に樹脂４０５を滴下し、錘４２０を可動電極部４０１に接合しようとすると、樹脂４０５は、広がって可動電極部４０１の外側にはみ出る。このため、可動電極部４０１からはみ出た樹脂４０５により、可動電極部４０１の櫛歯電極４０１ａと固定電極部の櫛歯電極４１１ａが接着される虞がある。 16A and 16B show a joint structure of the movable electrode portion and the weight of the comparative example, and FIG. 16A is a diagram before the weight is bonded to the movable electrode portion. 8] is a diagram showing a state in which a weight is bonded to a movable electrode portion. 16A and 16B are sectional views taken along the y-axis direction in FIG.
In the comparative example, the movable electrode portion 401 has comb-teeth electrodes 401a arranged at predetermined intervals in the y-axis direction. The comb-teeth electrode 411a of the fixed electrode meshes with the comb-teeth electrode 401a of the movable electrode portion 401 via a gap. However, in FIGS. 16A and 16B, the gap between the movable electrode portion 401 and the comb-teeth electrode 401a is not shown. In the joint structure of the movable electrode portion 401 and the weight 420 of the comparative example, the resin reservoir portion is not formed in either the movable electrode portion 401 or the weight 420. Therefore, when the resin 405 is dropped on the movable electrode portion 401 and the weight 420 is attempted to be joined to the movable electrode portion 401, the resin 405 spreads and protrudes to the outside of the movable electrode portion 401. Therefore, the resin 405 protruding from the movable electrode portion 401 may adhere the comb-teeth electrode 401a of the movable electrode portion 401 and the comb-teeth electrode 411a of the fixed electrode portion to each other.

これに対し、本実施形態では、錘１０ａ、１０ｂには、樹脂溜め部１０３が形成されているため、液状の樹脂１０５ａは、樹脂溜め部１０３内に収容される。このため、液状の樹脂１０５ａは、可動電極部１２の中央帯部１２１の上面１２１ａおよび下面１２１ｂの外側にはみ出るのを抑制され、可動電極部１２の櫛歯電極１２０と固定電極部１１１の櫛歯電極１１０が接着されるのを防止することができる。   On the other hand, in this embodiment, since the weights 10 a and 10 b are provided with the resin reservoir 103, the liquid resin 105 a is contained in the resin reservoir 103. Therefore, the liquid resin 105a is suppressed from protruding outside the upper surface 121a and the lower surface 121b of the central band portion 121 of the movable electrode portion 12, and the comb-teeth electrode 120 of the movable electrode portion 12 and the comb-teeth of the fixed electrode portion 111 are suppressed. It is possible to prevent the electrode 110 from being bonded.

図８および図９は、振動発電素子１のＭＥＭＳ加工体の形成手順の一例を示す図である。ＭＥＭＳ加工技術によりＳＯＩ基板から振動発電素子を形成する方法は周知の技術であり（例えば、特開２０１７−０７０１６３号公報等参照）、ここでは形成手順の概略を説明する。なお、図８および図９では、図２（ａ）の一点鎖線Ｌ２に沿った断面を模式的に示した。   8 and 9 are diagrams showing an example of a procedure for forming the MEMS processed body of the vibration power generation element 1. The method of forming the vibration power generation element from the SOI substrate by the MEMS processing technology is a well-known technology (see, for example, Japanese Unexamined Patent Application Publication No. 2017-070163), and the outline of the forming procedure will be described here. In addition, in FIG. 8 and FIG. 9, the cross section along the dashed-dotted line L2 of FIG.

図８（ａ）は、ＭＥＭＳ加工が行われる基板であるＳＯＩ基板の断面を示す図である。前述したように、ＳＯＩ基板は、Ｓｉの支持層３０１とＳｉＯ２のボックス層３０２とＳｉの活性層３０３とから成る。図８（ｂ）に示す第１のステップでは、活性層３０３の表面に窒化膜（ＳｉＮ膜）３０４を成膜する。図８（ｃ）に示す第２のステップでは、窒化膜３０４をパターニングして、電極パッド１１２、１１３を形成する箇所を保護するための窒化膜パターン３０４ａを形成する。 FIG. 8A is a view showing a cross section of an SOI substrate which is a substrate on which MEMS processing is performed. As described above, the SOI substrate includes the Si support layer 301, the SiO 2 box layer 302, and the Si active layer 303. In the first step shown in FIG. 8B, a nitride film (SiN film) 304 is formed on the surface of the active layer 303. In the second step shown in FIG. 8C, the nitride film 304 is patterned to form a nitride film pattern 304a for protecting the places where the electrode pads 112 and 113 are formed.

図８（ｄ）に示す第３のステップでは、可動電極部１２、固定電極部１１１、弾性支持部１３および接続部１１４を形成するためのマスクパターンを形成し、活性層３０３をエッチングする。エッチング加工は、ＤＲＩＥ（Deep Reactive Ion Etching）等によりボックス層３０２に達するまで行われる。図８（ｄ）において、符号Ｂ１で示す部分は固定電極部１１１に対応する部分で、符号Ｂ２で示す部分は可動電極部１２に対応する部分で、符号Ｂ３で示す部分は接続部１１４に対応する部分である。   In the third step shown in FIG. 8D, a mask pattern for forming the movable electrode portion 12, the fixed electrode portion 111, the elastic supporting portion 13 and the connecting portion 114 is formed, and the active layer 303 is etched. The etching process is performed by DRIE (Deep Reactive Ion Etching) or the like until the box layer 302 is reached. In FIG. 8D, a portion indicated by reference numeral B1 corresponds to the fixed electrode portion 111, a portion indicated by reference numeral B2 corresponds to the movable electrode portion 12, and a portion indicated by reference numeral B3 corresponds to the connection portion 114. It is the part to do.

図９（ａ）に示す第４のステップでは、固定部１１を形成するためのマスクパターンを支持層３０１の表面に形成し、支持層３０１をＤＲＩＥ加工する。図９（ｂ）に示す第５のステップでは、支持層３０１の側および活性層３０３の側に露出するＳｉＯ２のＢＯＸ層を強フッ酸により除去する。図９（ｃ）に示す第６のステップでは、熱酸化法によりＳｉ層の表面にシリコン酸化膜３０５を形成する。図９（ｄ）に示す第６のステップでは、窒化膜パターン３０４ａを除去し、除去した領域にアルミ電極を成膜して電極パッド１１２、１１３を形成する。なお、電極パッド１１３については図９（ｄ）の範囲外に形成されるので、図９（ｄ）には表示されていない。 In the fourth step shown in FIG. 9A, a mask pattern for forming the fixed portion 11 is formed on the surface of the support layer 301, and the support layer 301 is DRIE processed. In the fifth step shown in FIG. 9B, the BOX layer of SiO 2 exposed on the support layer 301 side and the active layer 303 side is removed by strong hydrofluoric acid. In the sixth step shown in FIG. 9C, the silicon oxide film 305 is formed on the surface of the Si layer by the thermal oxidation method. In the sixth step shown in FIG. 9D, the nitride film pattern 304a is removed and an aluminum electrode is formed in the removed region to form the electrode pads 112 and 113. Since the electrode pad 113 is formed outside the range shown in FIG. 9D, it is not shown in FIG. 9D.

上述の加工手順により、エレクトレット未形成の振動発電素子１のＭＥＭＳ加工体が形成される。その後、周知のエレクトレット形成方法（例えば、特許５６２７１３０号公報等参照）により、櫛歯電極１１０、１２０の少なくとも一方にエレクトレットを形成する。   By the above-described processing procedure, the MEMS processed body of the vibration power generation element 1 on which the electret is not formed is formed. After that, an electret is formed on at least one of the comb-teeth electrodes 110 and 120 by a known electret forming method (see, for example, Japanese Patent No. 5627130).

振動発電素子１はＭＥＭＳ技術により加工され非常に微小な構造体であり、図１に示したパッケージ２の縦横寸法は数ｃｍで高さ寸法は数ｍｍ程度である。   The vibration power generation element 1 is a very small structure processed by the MEMS technique, and the package 2 shown in FIG. 1 has a vertical and horizontal dimension of several cm and a height dimension of about several mm.

上記実施形態によれば、下記の効果を奏する。
（１）振動発電素子１は、複数の櫛歯電極１１０を有する固定電極部１１１と、複数の櫛歯電極１２０を有する可動電極部１２と、可動電極部１２に固定される錘１０ａ、１０ｂと、錘１０ａ、１０ｂに設けられ、錘１０ａ、１０ｂを可動電極部１２に固定する樹脂１０５を収容する樹脂溜め部１０３とを備える。このため、錘１０ａ、１０ｂと可動電極部とを接合する樹脂のはみ出しを抑制することができる。 According to the above-mentioned embodiment, the following effects are produced.
(1) The vibration power generation element 1 includes a fixed electrode portion 111 having a plurality of comb-teeth electrodes 110, a movable electrode portion 12 having a plurality of comb-teeth electrodes 120, and weights 10 a and 10 b fixed to the movable electrode portion 12. , A resin reservoir 103 provided on the weights 10a and 10b and containing a resin 105 for fixing the weights 10a and 10b to the movable electrode portion 12. Therefore, it is possible to suppress the protrusion of the resin that joins the weights 10a and 10b to the movable electrode portion.

（２）樹脂溜め部１０３の中心は、錘１０ａの重心と可動電極部１２の重心とを通る直線上に設定されている。一般に、ｘｙ平面に平行な異なる面上にある錘１０ａの重心と可動電極部１２の重心とは、ｚ方向に関して同軸になるように構成されるので、樹脂溜め部１０３の中心、錘１０ａの重心および可動電極部１２の重心はｚ方向に関して同軸になっている。このため、樹脂溜め部１０３内に収容される樹脂１０５の影響で可動電極部１２全体の重心位置がｘｙ平面内でずれるのを、防止することができる。 (2) The center of the resin reservoir 103 is set on a straight line passing through the center of gravity of the weight 10a and the center of gravity of the movable electrode portion 12. In general, the center of gravity of the weight 10a and the center of gravity of the movable electrode portion 12 on different planes parallel to the xy plane are configured to be coaxial with each other in the z direction. Therefore, the center of the resin reservoir 103 and the center of gravity of the weight 10a are arranged. The center of gravity of the movable electrode portion 12 is coaxial with respect to the z direction. Therefore, it is possible to prevent the center of gravity of the entire movable electrode portion 12 from being displaced in the xy plane due to the influence of the resin 105 housed in the resin reservoir 103.

（３）可動電極部１２は、可動電極部１２の櫛歯電極１２０の配列方向の中心部に、櫛歯電極１２０の配列方向と直交する方向に延在された中央帯部１２１を有し、錘１０ａ、１０ｂは、中央帯部１２１に沿って延在された帯状部を有し、樹脂溜め部１０３は、錘１０ａ、１０ｂの櫛歯電極１２０の配列方向と直交する方向の中心に対し対称に設けられている。このため、樹脂溜め部１０３内に収容される樹脂１０５により櫛歯電極１２０の配列方向と直交する方向の重心位置がずれることがない。 (3) The movable electrode portion 12 has a central band portion 121 extending in a direction orthogonal to the arrangement direction of the comb-teeth electrodes 120 at the center portion of the movable electrode portion 12 in the arrangement direction of the comb-teeth electrodes 120, The weights 10a and 10b have strip-shaped portions extending along the central strip portion 121, and the resin reservoir portion 103 is symmetrical with respect to the center of the weights 10a and 10b in the direction orthogonal to the arrangement direction of the comb-teeth electrodes 120. It is provided in. Therefore, the center of gravity in the direction orthogonal to the arrangement direction of the comb-teeth electrodes 120 does not shift due to the resin 105 contained in the resin reservoir 103.

（４）錘１０ａ、１０ｂは、可動電極部１２を構成する材料より大きい比重の材料により形成されている。このため、錘１０ａ、１０ｂをより小さくすることができ、振動発電素子１の小型化を図ることができる。 (4) The weights 10a and 10b are made of a material having a specific gravity larger than that of the material forming the movable electrode portion 12. Therefore, the weights 10a and 10b can be made smaller, and the vibration power generation element 1 can be made smaller.

−第２の実施形態−
図１０は、可動電極部と錘との接合構造の第２の実施形態を示す断面図である。
第２の実施形態では、錘１０ａ、１０ｂに形成される樹脂溜め部１０３ａは、錘１０ａまたは錘１０ｂを、厚さ方向（Ｚ軸方向）に貫通する貫通孔として形成されている。
第２の実施形態において、錘１０ａと可動電極部１２とを接合するには、錘１０ａの位置決め突起１０２を可動電極部１２の位置決め用貫通孔１２３に嵌合して、液状の樹脂１０５ａを樹脂溜め部１０３ａ内に注入し、その後、硬化して樹脂１０５にすればよい。また、錘１０ｂと可動電極部１２とを接合するには、錘１０ｂの下面に樹脂漏れシートをあてがい、液状の樹脂１０５ａを樹脂溜め部１０３ａ内に注入し、液状の樹脂１０５ａを半硬化させた後、樹脂漏れシートを剥離して、可動電極部１２に接着し、硬化して樹脂１０５にすればよい。 -Second Embodiment-
FIG. 10 is a sectional view showing a second embodiment of the joint structure of the movable electrode portion and the weight.
In the second embodiment, the resin reservoir 103a formed on the weights 10a and 10b is formed as a through hole that penetrates the weight 10a or the weight 10b in the thickness direction (Z-axis direction).
In the second embodiment, in order to join the weight 10 a and the movable electrode portion 12, the positioning protrusion 102 of the weight 10 a is fitted into the positioning through hole 123 of the movable electrode portion 12, and the liquid resin 105 a is applied to the resin. It may be injected into the reservoir 103a and then cured to form the resin 105. Further, in order to join the weight 10b and the movable electrode portion 12, a resin leak sheet is applied to the lower surface of the weight 10b, the liquid resin 105a is injected into the resin reservoir 103a, and the liquid resin 105a is semi-cured. After that, the resin leakage sheet may be peeled off, adhered to the movable electrode portion 12, and cured to form the resin 105.

なお、上記では、錘１０ｂと可動電極部１２とを接合する場合、錘１０ｂの下面に樹脂漏れシートをあてがう方法で例示したが、ＭＥＭＳ加工体を上下反転して、可動電極部１２に固定された錘１０ｂの樹脂溜め部１０３ａ内に液状の樹脂１０５ａを注入するようにしてもよい。   In the above description, when the weight 10b and the movable electrode portion 12 are joined, the resin leak sheet is applied to the lower surface of the weight 10b, but the MEMS processed body is turned upside down and fixed to the movable electrode portion 12. The liquid resin 105a may be injected into the resin reservoir 103a of the weight 10b.

第２の実施形態においても、樹脂溜め部１０３の形状は、中心線Ｌ２および中心線Ｌ３（図５参照）に対して線対称に形成されており、ｘｙ面に平行な面内における錘１０ａ、１０ｂおよび可動電極部１２ａの重心の位置は、ｚ方向に関して同軸である。
第２の実施形態における他の構成は、第１の実施形態と同様である。
従って、第２の実施形態においても、第１の実施形態の効果（１）〜（４）を奏する。 Also in the second embodiment, the shape of the resin reservoir portion 103 is formed line-symmetrically with respect to the center line L2 and the center line L3 (see FIG. 5), and the weight 10a in the plane parallel to the xy plane, The positions of the centers of gravity of 10b and the movable electrode portion 12a are coaxial with respect to the z direction.
Other configurations in the second embodiment are similar to those in the first embodiment.
Therefore, the effects (1) to (4) of the first embodiment are also achieved in the second embodiment.

−第３の実施形態−
図１１は、可動電極部と錘との接合構造の第３の実施形態を示し、可動電極部に錘を接合する前の状態を示す図であり、図１２は、第３の実施形態における可動電極部と錘との接合構造を示す断面図である。
第３の実施形態では、樹脂溜め部１０３ｂを錘１０ａ、１０ｂに設けずに、可動電極部１２ａに設けた構造とされている。
樹脂溜め部１０３ｂは、可動電極部１２ａの中央帯部１２１の上面１２１ａおよび下面１２１ｂに設けられている。
第１の実施形態と同様、一対の位置決め突起１０２は、同一形状を有し、各位置決め突起１０２の中心は、中心線Ｌ３上における中心線Ｌ２と対称な位置に配置されている。錘１０ａのｘ軸方向の中心線Ｌ２は、ｘｙ面において可動電極部１２ａのｘ軸方向の中心線と同一位置に配置されている。錘１０ａのｙ軸方向の中心線Ｌ３は、ｘｙ面において接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行な直線であるラインＬ１と同一位置に配置されている。樹脂溜め部１０３ｂのｙ軸方向の中心は、位置決め用貫通孔１２３と同様、接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行な直線であるラインＬ１上に配置されている。また、樹脂溜め部１０３ｂのｘ軸方向の中心は、可動電極部１２ａの中央帯部１２１のｘ軸方向の中心に配置されている。樹脂溜め部１０３ｂは、ｘ軸方向の中心線およびｙ軸方向の中心線に対して線対称に形成されている。従って、錘１０ａのｘｙ面に垂直な方向における重心の位置は、ｚ方向に関して可動電極部１２の重心位置と同軸である。 -Third Embodiment-
FIG. 11 is a diagram showing a third embodiment of the joint structure of the movable electrode portion and the weight, showing a state before the weight is joined to the movable electrode portion, and FIG. 12 is a diagram showing the movable structure in the third embodiment. It is sectional drawing which shows the joining structure of an electrode part and a weight.
The third embodiment has a structure in which the resin reservoir 103b is not provided on the weights 10a and 10b but is provided on the movable electrode portion 12a.
The resin reservoir portion 103b is provided on the upper surface 121a and the lower surface 121b of the central band portion 121 of the movable electrode portion 12a.
Similar to the first embodiment, the pair of positioning protrusions 102 have the same shape, and the centers of the respective positioning protrusions 102 are arranged at positions symmetrical with respect to the center line L2 on the center line L3. The center line L2 of the weight 10a in the x-axis direction is arranged at the same position as the center line of the movable electrode portion 12a in the x-axis direction on the xy plane. The center line L3 of the weight 10a in the y-axis direction is arranged at the same position as the line L1 which is a straight line passing through the protrusion 114a of the connecting portion 114 and parallel to the vibration direction (x-axis direction) on the xy plane. The center of the resin reservoir portion 103b in the y-axis direction is arranged on a line L1 which is a straight line that passes through the protrusion 114a of the connection portion 114 and is parallel to the vibration direction (x-axis direction), similarly to the positioning through hole 123. Further, the center of the resin reservoir portion 103b in the x-axis direction is arranged at the center of the central band portion 121 of the movable electrode portion 12a in the x-axis direction. The resin reservoir 103b is formed line-symmetrically with respect to the center line in the x-axis direction and the center line in the y-axis direction. Therefore, the position of the center of gravity of the weight 10a in the direction perpendicular to the xy plane is coaxial with the position of the center of gravity of the movable electrode portion 12 in the z direction.

錘１０ａ、１０ｂを可動電極部１２ａに接合する手順を以下に示す。
（１）錘１０ｂの一対の位置決め突起１０２が形成された一面１１５ａを上方に向け、ディスペンサー等により、該一面１１５ａ上に液状の樹脂１０５ａを滴下する。液状の樹脂１０５ａは、表面張力により球状に盛り上がった状態になる。
（２）可動電極部１２の中央帯部１２１の下面１２１ｂを、錘１０ｂの一面１１５ａに対面させ、可動電極部１２の位置決め用貫通孔１２３を錘１０ｂの各位置決め突起１０２に嵌合する。これにより、錘１０ｂの一面１１５ａに付着している液状の樹脂１０５ａが可動電極部１２の樹脂溜め部１０３ｂ内に収容され、錘１０ｂが可動電極部１２に接合される。
（３）錘１０ａの一対の位置決め突起１０２が形成された一面１１５ａを上方に向け、ディスペンサー等により、該一面１１５ａ上に液状の樹脂１０５ａを滴下する。液状の樹脂１０５ａは、表面張力により球状に盛り上がった状態になる。
（４）ＭＥＭＳ加工体を上下反転し、可動電極部１２の中央帯部１２１の上面１２１ａを、錘１０ａの一面１１５ａに対面させ、可動電極部１２の位置決め用貫通孔１２３を錘１０ｂの各位置決め突起１０２に嵌合する。これにより、錘１０ａの一面１１５ａに付着している液状の樹脂１０５ａが可動電極部１２の樹脂溜め部１０３ｂ内に収容され、錘１０ａが可動電極部１２に接合される。
（５）ＭＥＭＳ加工体を上下反転すれば、図１２に図示された錘１０ａ、１０ｂと可動電極部１２の接合構造が得られる。 The procedure for joining the weights 10a and 10b to the movable electrode portion 12a will be described below.
(1) One surface 115a of the weight 10b on which the pair of positioning protrusions 102 is formed is directed upward, and a liquid resin 105a is dropped on the one surface 115a by a dispenser or the like. The liquid resin 105a is in a spherically raised state due to surface tension.
(2) The lower surface 121b of the central band portion 121 of the movable electrode portion 12 faces the one surface 115a of the weight 10b, and the positioning through holes 123 of the movable electrode portion 12 are fitted into the respective positioning protrusions 102 of the weight 10b. As a result, the liquid resin 105a attached to the one surface 115a of the weight 10b is housed in the resin reservoir 103b of the movable electrode portion 12, and the weight 10b is joined to the movable electrode portion 12.
(3) One surface 115a of the weight 10a on which the pair of positioning protrusions 102 is formed faces upward, and a liquid resin 105a is dropped on the one surface 115a by a dispenser or the like. The liquid resin 105a is in a spherically raised state due to surface tension.
(4) The MEMS processed body is turned upside down, the upper surface 121a of the central band portion 121 of the movable electrode portion 12 faces the one surface 115a of the weight 10a, and the positioning through hole 123 of the movable electrode portion 12 is positioned in each of the weights 10b. Fits on the protrusion 102. As a result, the liquid resin 105a attached to the one surface 115a of the weight 10a is accommodated in the resin reservoir 103b of the movable electrode portion 12, and the weight 10a is bonded to the movable electrode portion 12.
(5) When the MEMS processed body is turned upside down, the joint structure of the weights 10a and 10b and the movable electrode portion 12 shown in FIG. 12 is obtained.

上記（１）〜（５）の手順によれば、錘１０ａ、１０ｂに液状の樹脂１０５ａを滴下し、表面張力により液状の樹脂１０５ａが球状に盛り上がった状態にして、錘１０ａ、１０ｂに付着している液状の樹脂１０５ａを可動電極部１２ａの樹脂溜め部１０３ｂ内に収容して接合する。可動電極部１２ａの樹脂溜め部１０３ｂに液状の樹脂１０５ａを収容してから、錘１０ａ、１０ｂを可動電極部１２に接着する方法もある。しかし、この方法の場合、液状の樹脂１０５ａの量や、液状の樹脂１０５ａ内に発生するボイド等により、液状の樹脂１０５ａと可動電極部１２との接着面に空隙が生じ、十分な接着強度が得られない可能性がある。本実施形態では、錘１０ａ、１０ｂに、液状の樹脂１０５ａを滴下し、表面張力により液状の樹脂１０５ａが球状に盛り上がった状態にし、可動電極部１２の樹脂溜め部１０３内に付着している液状の樹脂１０５ａを収容して接合するようにした。つまり、液状の樹脂１０５ａは、可動電極部１２の接着面に密着した状態で樹脂溜め部１０３内に収容される。このため、可動電極部１２の接着面との間に空隙が生じるのを防止することができる。   According to the above procedures (1) to (5), the liquid resin 105a is dropped onto the weights 10a and 10b, and the liquid resin 105a is spherically swelled by the surface tension and adheres to the weights 10a and 10b. The liquid resin 105a that has been stored is housed in the resin reservoir portion 103b of the movable electrode portion 12a and joined. There is also a method in which the liquid resin 105a is housed in the resin reservoir 103b of the movable electrode portion 12a and then the weights 10a and 10b are bonded to the movable electrode portion 12. However, in the case of this method, due to the amount of the liquid resin 105a, voids generated in the liquid resin 105a, and the like, a gap is generated in the bonding surface between the liquid resin 105a and the movable electrode portion 12, and sufficient bonding strength is obtained. May not be obtained. In the present embodiment, the liquid resin 105a is dropped onto the weights 10a and 10b, and the liquid resin 105a is spherically swelled by the surface tension, and the liquid deposited on the resin reservoir portion 103 of the movable electrode portion 12 is adhered. The resin 105a was stored and joined. That is, the liquid resin 105 a is housed in the resin reservoir 103 while being in close contact with the adhesive surface of the movable electrode portion 12. Therefore, it is possible to prevent a gap from being formed between the movable electrode portion 12 and the adhesive surface.

なお、図１２では、可動電極部１２ａの中央帯部１２１の上下両面に設けた樹脂溜め部１０３ｂをｘｙ面において相対向する位置に配置した構造として例示した。しかし、可動電極部１２ａの中央帯部１２１の上下両面に設ける樹脂溜め部１０３ｂを、ｘｙ面において重ならないように異なる領域に配置してもよい。この場合、可動電極部１２ａ一方の面に設ける樹脂溜め部１０３ｂをｘ軸方向の中心に配置し、可動電極部１２ａの他方の面に設ける樹脂溜め部１０３ｂを、一方の面に設ける樹脂溜め部１０３ｂのｘ軸正方向側およびｘ軸負方向側に、ｘ軸方向の中心を対照軸とする対称位置に配置するとよい。このようにすると、可動電極部１２ａの厚さ（ｚ軸方向の長さ）が小さい場合でも、樹脂溜め部１０３ｂを深くして十分な量の液状樹脂を充填することが可能となり、かつ、ＭＥＭＳ加工品のｘｙ面における重心位置をずらさないようにすることができる。   Note that, in FIG. 12, the resin reservoir portions 103b provided on the upper and lower surfaces of the central band portion 121 of the movable electrode portion 12a are illustrated as the structure in which the resin reservoir portions 103b are arranged at positions facing each other in the xy plane. However, the resin reservoirs 103b provided on the upper and lower surfaces of the central strip 121 of the movable electrode portion 12a may be arranged in different regions so as not to overlap in the xy plane. In this case, the resin reservoir 103b provided on one surface of the movable electrode portion 12a is arranged at the center in the x-axis direction, and the resin reservoir 103b provided on the other surface of the movable electrode portion 12a is provided on one surface. It is advisable to arrange them on the x-axis positive direction side and the x-axis negative direction side of 103b at symmetrical positions with the center in the x-axis direction as the control axis. By doing so, even when the thickness (length in the z-axis direction) of the movable electrode portion 12a is small, it is possible to deepen the resin reservoir portion 103b and fill a sufficient amount of liquid resin, and the MEMS is also possible. It is possible not to shift the position of the center of gravity on the xy plane of the processed product.

第３の実施形態のその他の構成は、第１の実施形態と同様である。
従って、第３の実施形態においても、第１の実施形態の効果（１）〜（４）を奏する。
また、第３の実施形態では、樹脂溜め部１０３は、錘１０ａ、１０ｂの可動電極部１２に固定される面側に設けられた凹部であり、樹脂溜め部１０３に収容される樹脂１０５は、可動電極部１２の上面に表面張力により盛り上がった状態で樹脂溜め部１０３に収容されて接合される。つまり、液状の樹脂１０５ａは、可動電極部１２の接着面に密着した状態で樹脂溜め部１０３内に収容される。このため、錘１０ａ、１０ｂと可動電極部１２の接着面に空隙が生じるのを防止することができ、以って、錘１０ａ、１０ｂと可動電極部１２との接合強度を高めることができるという効果を奏する。 The other configurations of the third embodiment are similar to those of the first embodiment.
Therefore, the effects (1) to (4) of the first embodiment are also achieved in the third embodiment.
Further, in the third embodiment, the resin reservoir 103 is a recess provided on the surface side of the weights 10 a and 10 b fixed to the movable electrode portion 12, and the resin 105 accommodated in the resin reservoir 103 is The upper surface of the movable electrode portion 12 is housed and joined to the resin reservoir 103 in a state of being raised by surface tension. That is, the liquid resin 105 a is housed in the resin reservoir 103 while being in close contact with the adhesive surface of the movable electrode portion 12. Therefore, it is possible to prevent the formation of voids on the bonding surfaces of the weights 10a and 10b and the movable electrode portion 12, and thus to increase the bonding strength between the weights 10a and 10b and the movable electrode portion 12. Produce an effect.

上記第１〜第３の実施形態では、錘１０ａ、１０ｂを、可動電極部１２ａの中央帯部１２１の形状に対応した帯状形状として例示した。しかし、錘１０ａ、１０ｂは、以下に示すような態様とすることができる。   In the said 1st-3rd embodiment, the weight 10a, 10b was illustrated as the strip | belt-shaped shape corresponding to the shape of the center strip | belt part 121 of the movable electrode part 12a. However, the weights 10a and 10b can be configured as shown below.

［錘の変形例１］
図１３は、錘の変形例１を示し、図１３（ａ）は錘の平面図、図１３（ｂ）は図１３（ａ）の中心線Ｌ５−Ｌ５に沿う断面図、図１３（ｃ）は図１３（ａ）の中心線Ｌ４−Ｌ４に沿う断面図である。
図１３に示す錘１０ｃは、帯状部１６１と平板状部１６２とが一体成型された構造を有する。帯状部１６１は、第１〜第３の実施形態における錘１０ａ、１０ｂに相当する形状を有し、可動電極部１２の中央帯部１２１に接合される。平板状部１６２は、平面視で矩形形状を有し、帯状部１６１より大きい面積を有する。平板状部１６２は、固定電極部１１１の櫛歯電極１１０および可動電極部１２の櫛歯電極１２０の全体もしくは一部を覆う大きさを有する。 [Modification 1 of weight]
13 shows a modified example 1 of the weight, FIG. 13 (a) is a plan view of the weight, FIG. 13 (b) is a sectional view taken along the center line L5-L5 of FIG. 13 (a), and FIG. 13 (c). FIG. 14 is a sectional view taken along the center line L4-L4 of FIG.
A weight 10c shown in FIG. 13 has a structure in which a strip portion 161 and a flat plate portion 162 are integrally molded. The strip portion 161 has a shape corresponding to the weights 10a and 10b in the first to third embodiments, and is joined to the central strip portion 121 of the movable electrode portion 12. The flat plate portion 162 has a rectangular shape in plan view and has an area larger than that of the strip portion 161. The flat plate portion 162 has a size that covers all or part of the comb-teeth electrode 110 of the fixed electrode portion 111 and the comb-teeth electrode 120 of the movable electrode portion 12.

平板状部１６２のｘ軸方向の中心線は、ｘｙ面において帯状部１６１のｘ軸方向の中心線と一致している。つまり、帯状部１６１および平板状部１６２のｘ軸方向の中心線は、錘１０ｃのｘ軸方向の中心線Ｌ４となっている。また、平板状部１６２のｙ軸方向の中心線は、ｘｙ面において帯状部１６１のｙ軸方向の中心線と一致している。つまり、帯状部１６１および平板状部１６２のｘ軸方向の中心線は、錘１０ｃのｙ軸方向の軸方向の中心線Ｌ５となっている。錘１０ｃのｙ軸方向の中心線Ｌ５は、接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行な直線であるラインＬ１と、ｘｙ面において同一位置となっている。   The center line of the flat plate portion 162 in the x-axis direction coincides with the center line of the strip portion 161 in the x-axis direction on the xy plane. That is, the center line of the strip-shaped portion 161 and the flat plate portion 162 in the x-axis direction is the center line L4 of the weight 10c in the x-axis direction. Further, the center line of the flat plate portion 162 in the y-axis direction coincides with the center line of the strip portion 161 in the y-axis direction on the xy plane. That is, the center line in the x-axis direction of the strip portion 161 and the flat plate portion 162 is the center line L5 in the y-axis direction of the weight 10c. The center line L5 of the weight 10c in the y-axis direction is at the same position in the xy plane as the line L1 that is a straight line that passes through the protrusion 114a of the connecting portion 114 and is parallel to the vibration direction (x-axis direction).

錘１０ｃの帯状部１６１には、一対の位置決め突起１０２と３つの樹脂溜め部１０３が形成されている。つまり、変形例１では、各樹脂溜め部１０３は複数の分割樹脂溜め部の１つとして構成されている。一対の位置決め突起１０２の中心および各樹脂溜め部１０３の中心は、中心線Ｌ５上に配置されている。一対の位置決め突起１０２の中心は、錘１０ｃのｘ軸方向の中心線Ｌ４に対して対称位置に配置されている。各樹脂溜め部１０３の形状は、錘１０ｃのｘ軸方向の中心線Ｌ４および錘１０ｃのｘ軸方向の中心線Ｌ５に対して線対称に形成されている。   A pair of positioning protrusions 102 and three resin reservoirs 103 are formed on the strip portion 161 of the weight 10c. That is, in the modified example 1, each resin reservoir 103 is configured as one of a plurality of divided resin reservoirs. The center of the pair of positioning protrusions 102 and the center of each resin reservoir 103 are arranged on the center line L5. The centers of the pair of positioning protrusions 102 are arranged at symmetrical positions with respect to the center line L4 of the weight 10c in the x-axis direction. The shape of each resin reservoir 103 is formed line-symmetrically with respect to the center line L4 of the weight 10c in the x-axis direction and the center line L5 of the weight 10c in the x-axis direction.

樹脂溜め部１０３は、図１３では凹部として例示されている。しかし、樹脂溜め部１０３は、錘１０ｃを厚さ方向に貫通する貫通孔としてもよい。また、樹脂溜め部１０３は、錘１０ｃに設けず、可動電極部１２に設ける態様とすることもできる。錘１０ｃの平板状部１６２は、平面視で矩形形状として例示したが、錘１０ｃのｘ軸方向の中心線Ｌ４およびｙ軸方向の中心線Ｌ５に対し対称形状であれば、他の多角形状としてもよい。   The resin reservoir 103 is illustrated as a recess in FIG. However, the resin reservoir 103 may be a through hole that penetrates the weight 10c in the thickness direction. Further, the resin reservoir 103 may be provided in the movable electrode portion 12 instead of being provided in the weight 10c. Although the flat plate-shaped portion 162 of the weight 10c is illustrated as a rectangular shape in a plan view, if it has a symmetrical shape with respect to the center line L4 in the x-axis direction and the center line L5 in the y-axis direction of the weight 10c, it may be another polygonal shape. Good.

［錘の変形例２］
図１４は、錘の変形例２を示し、図１４（ａ）は錘の平面図、図１４（ｂ）は図１４（ａ）の中心線Ｌ５−Ｌ５に沿う断面図、図１４（ｃ）は図１４（ａ）の中心線Ｌ４−Ｌ４に沿う断面図である。
図１４に示す錘１０ｄは、帯状部１６１ａと平板状部１６２ａとが一体成型された構造を有する。帯状部１６１ａは、第１〜第３の実施形態における錘１０ａ、１０ｂに相当する形状を有し、可動電極部１２の中央帯部１２１に接合される。平板状部１６２ａは、平面視で円形状を有し、帯状部１６１ａより大きい面積を有する。平板状部１６２ａは、固定電極部１１１の櫛歯電極１１０および可動電極部１２の櫛歯電極１２０の全体もしくは一部を覆う大きさを有する。 [Modification 2 of weight]
FIG. 14 shows a modified example 2 of the weight, FIG. 14 (a) is a plan view of the weight, FIG. 14 (b) is a sectional view taken along the center line L5-L5 of FIG. 14 (a), and FIG. FIG. 14 is a cross-sectional view taken along the center line L4-L4 of FIG.
A weight 10d shown in FIG. 14 has a structure in which a strip portion 161a and a flat plate portion 162a are integrally molded. The strip portion 161a has a shape corresponding to the weights 10a and 10b in the first to third embodiments, and is joined to the central strip portion 121 of the movable electrode portion 12. The flat plate portion 162a has a circular shape in a plan view and has an area larger than that of the strip portion 161a. The flat plate portion 162a has a size that covers all or part of the comb-teeth electrode 110 of the fixed electrode portion 111 and the comb-teeth electrode 120 of the movable electrode portion 12.

平板状部１６２ａのｘ軸方向の中心線は、ｘｙ面において帯状部１６１ａのｘ軸方向の中心線と一致している。つまり、帯状部１６１ａおよび平板状部１６２ａのｘ軸方向の中心線は、錘１０ｄのｘ軸方向の中心線Ｌ４となっている。また、平板状部１６２ａのｙ軸方向の中心線は、ｘｙ面において帯状部１６１ａのｙ軸方向の中心線と一致している。つまり、帯状部１６１ａおよび平板状部１６２ａのｘ軸方向の中心線は、錘１０ｄのｙ軸方向の軸方向の中心線Ｌ５となっている。錘１０ｄのｙ軸方向の中心線Ｌ５は、接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行な直線であるラインＬ１と、ｘｙ面において同一位置となっている。   The center line of the flat plate portion 162a in the x-axis direction matches the center line of the strip portion 161a in the x-axis direction on the xy plane. That is, the center line in the x-axis direction of the strip portion 161a and the flat plate portion 162a is the center line L4 in the x-axis direction of the weight 10d. Further, the center line of the flat plate portion 162a in the y-axis direction matches the center line of the strip portion 161a in the y-axis direction on the xy plane. That is, the center line in the x-axis direction of the strip-shaped portion 161a and the flat-plate portion 162a is the center line L5 in the y-axis direction of the weight 10d. The center line L5 of the weight 10d in the y-axis direction is at the same position in the xy plane as the line L1 that is a straight line that passes through the protrusion 114a of the connection portion 114 and is parallel to the vibration direction (x-axis direction).

錘１０ｄの帯状部１６１ａには、一対の位置決め突起１０２と１つの樹脂溜め部１０３が形成されている。一対の位置決め突起１０２の中心および各樹脂溜め部１０３の中心は、中心線Ｌ５上に配置されている。一対の位置決め突起１０２の中心は、錘１０ｄのｘ軸方向の中心線Ｌ４に対して対称位置に配置されている。また、樹脂溜め部１０３の形状は、錘１０ｃのｘ軸方向の中心線Ｌ４およびｙ軸方向の中心線Ｌ５に対して線対称に設けられている。   A pair of positioning protrusions 102 and one resin reservoir 103 are formed on the strip portion 161a of the weight 10d. The center of the pair of positioning protrusions 102 and the center of each resin reservoir 103 are arranged on the center line L5. The centers of the pair of positioning protrusions 102 are arranged symmetrically with respect to the center line L4 of the weight 10d in the x-axis direction. In addition, the shape of the resin reservoir portion 103 is provided in line symmetry with respect to the center line L4 in the x-axis direction and the center line L5 in the y-axis direction of the weight 10c.

樹脂溜め部１０３は、図１４では凹部として例示されている。しかし、樹脂溜め部１０３は、錘１０ｄを厚さ方向に貫通する貫通孔としてもよい。また、樹脂溜め部１０３は、錘１０ｄに設けず、可動電極部１２に設ける態様とすることもできる。   The resin reservoir 103 is illustrated as a recess in FIG. However, the resin reservoir 103 may be a through hole that penetrates the weight 10d in the thickness direction. Further, the resin reservoir 103 may be provided on the movable electrode portion 12 instead of being provided on the weight 10d.

［錘の変形例３］
図１５は、錘の変形例３を示し、図１５（ａ）は錘の平面図、図１５（ｂ）は図１５（ａ）の中心線Ｌ５−Ｌ５に沿う断面図、図１５（ｃ）は図１５（ａ）の中心線Ｌ４−Ｌ４に沿う断面図である。
図１５に示す錘１０ｅは、帯状部１６１ｂと平板状部１６２ｂとが一体成型された構造を有する。帯状部１６１ｂは、第１〜第３の実施形態における錘１０ａ、１０ｂに相当する形状を有し、可動電極部１２の中央帯部１２１に接合される。平板状部１６２ｂは、平面視で矩形の枠形状を有し、帯状部１６１ｂより大きい面積を有する。平板状部１６２ｂは、固定電極部１１１の櫛歯電極１１０および可動電極部１２の櫛歯電極１２０の一部を覆う大きさを有する。 [Modification 3 of weight]
15 shows a third modification of the weight, FIG. 15 (a) is a plan view of the weight, FIG. 15 (b) is a sectional view taken along the center line L5-L5 of FIG. 15 (a), and FIG. 15 (c). FIG. 16 is a sectional view taken along the center line L4-L4 of FIG.
The weight 10e shown in FIG. 15 has a structure in which a strip portion 161b and a flat plate portion 162b are integrally molded. The strip portion 161b has a shape corresponding to the weights 10a and 10b in the first to third embodiments, and is joined to the central strip portion 121 of the movable electrode portion 12. The flat plate portion 162b has a rectangular frame shape in plan view and has an area larger than that of the strip portion 161b. The flat plate portion 162b has a size that covers a part of the comb-teeth electrode 110 of the fixed electrode portion 111 and the comb-teeth electrode 120 of the movable electrode portion 12.

平板状部１６２ｂのｘ軸方向の中心線は、ｘｙ面において帯状部１６１ｂのｘ軸方向の中心線と一致している。つまり、帯状部１６１ｂおよび平板状部１６２ｂのｘ軸方向の中心線は、錘１０ｅのｘ軸方向の中心線Ｌ４となっている。また、平板状部１６２ｂのｙ軸方向の中心線は、ｘｙ面において帯状部１６１ｂのｙ軸方向の中心線と一致している。つまり、帯状部１６１ｂおよび平板状部１６２ｂのｘ軸方向の中心線は、錘１０ｅのｙ軸方向の軸方向の中心線Ｌ５となっている。錘１０ｅのｙ軸方向の中心線Ｌ５は、接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行な直線であるラインＬ１と、ｘｙ面において同一位置となっている。   The center line of the flat plate portion 162b in the x-axis direction coincides with the center line of the strip portion 161b in the x-axis direction on the xy plane. That is, the center line in the x-axis direction of the strip portion 161b and the flat plate portion 162b is the center line L4 in the x-axis direction of the weight 10e. Further, the center line of the flat plate portion 162b in the y-axis direction matches the center line of the strip portion 161b in the y-axis direction on the xy plane. That is, the center line in the x-axis direction of the strip portion 161b and the flat plate portion 162b is the center line L5 in the y-axis direction of the weight 10e. The center line L5 of the weight 10e in the y-axis direction is at the same position in the xy plane as the line L1 that is a straight line that passes through the protrusion 114a of the connecting portion 114 and is parallel to the vibration direction (x-axis direction).

錘１０ｅの帯状部１６１ｂには、一対の位置決め突起１０２と１つの樹脂溜め部１０３が形成されている。一対の位置決め突起１０２の中心および各樹脂溜め部１０３の中心は、中心線Ｌ５上に配置されている。一対の位置決め突起１０２の中心は、錘１０ｅのｘ軸方向の中心線Ｌ４に対して対称位置に配置されている。また、樹脂溜め部１０３の形状は、錘１０ｅのｘ軸方向の中心線Ｌ４およびｙ軸方向の中心線Ｌ５に対して線対称に設けられている。   A pair of positioning protrusions 102 and one resin reservoir 103 are formed on the strip portion 161b of the weight 10e. The center of the pair of positioning protrusions 102 and the center of each resin reservoir 103 are arranged on the center line L5. The centers of the pair of positioning protrusions 102 are arranged symmetrically with respect to the center line L4 of the weight 10e in the x-axis direction. The shape of the resin reservoir 103 is provided symmetrically with respect to the center line L4 in the x-axis direction and the center line L5 in the y-axis direction of the weight 10e.

樹脂溜め部１０３は、図１５では凹部として例示されている。しかし、樹脂溜め部１０３は、錘１０ｅを厚さ方向に貫通する貫通孔としてもよい。また、樹脂溜め部１０３は、錘１０ｄに設けず、可動電極部１２に設ける態様とすることもできる。
上記錘１０ａ、１０ｂの変形例１〜３として例示する錘１０ｃ〜１０ｅは、帯状部１６１、１６１ａ、１６１ｂに平板状部１６２、１６２ａ、１６２ｂを一体的に設けた構造とされている。このため、錘１０ｃ〜１０ｅの質量を錘１０ａ、１０ｂより大きくすることができ、振動発電素子１の発電効率を大きくすることができる。 The resin reservoir 103 is illustrated as a recess in FIG. However, the resin reservoir 103 may be a through hole that penetrates the weight 10e in the thickness direction. Further, the resin reservoir 103 may be provided on the movable electrode portion 12 instead of being provided on the weight 10d.
The weights 10c to 10e exemplified as the modified examples 1 to 3 of the weights 10a and 10b have a structure in which flat plate portions 162, 162a, 162b are integrally provided on the belt-shaped portions 161, 161a, 161b. Therefore, the mass of the weights 10c to 10e can be made larger than that of the weights 10a and 10b, and the power generation efficiency of the vibration power generation element 1 can be increased.

なお、上述した実施の形態では、ＳＯＩ基板により振動発電素子１を形成したが、シリコン基板を用いても良い。シリコン基板を用いる場合、例えば、導電率の小さな真性のシリコン基板の表面から所定厚さの領域にドーピングによりＰ型またはＮ型の導電層を形成し、導電層の下部の真性なシリコン層に固定部１１を形成し、導電層に固定電極部１１１、可動電極部１２、弾性支持部１３を形成すれば良い。   Although the vibration power generation element 1 is formed of the SOI substrate in the above-described embodiment, a silicon substrate may be used. When a silicon substrate is used, for example, a P-type or N-type conductive layer is formed by doping in a region having a predetermined thickness from the surface of an intrinsic silicon substrate having a low conductivity, and fixed to the intrinsic silicon layer below the conductive layer. The portion 11 may be formed, and the fixed electrode portion 111, the movable electrode portion 12, and the elastic support portion 13 may be formed on the conductive layer.

また、上述した振動発電素子１では、可動電極部１２が櫛歯電極１１０、１２０の伸延方向（図１のｘ軸方向）に振動するような構成であったが、例えば、特許６３３８０７１号公報に記載の振動発電素子のように複数の櫛歯電極１１０が並置されている方向（図１のｙ軸方向）に振動するような構成であっても本発明は適用が可能である。   Further, in the vibration power generation element 1 described above, the movable electrode portion 12 is configured to vibrate in the extending direction of the comb-teeth electrodes 110 and 120 (x-axis direction in FIG. 1), but, for example, in Japanese Patent No. 6338071. The present invention can be applied even to a configuration in which the plurality of comb-teeth electrodes 110 are vibrated in the direction in which they are arranged side by side (the y-axis direction in FIG. 1) like the vibration power generation element described.

上記では、種々の実施の形態および変形例を説明したが、本発明はこれらの内容に限定されるものではない。上述した種々の実施の形態および変形例を組み合わせたり、適宜、変更を加えたりしてもよく、本発明の技術的思想の範囲内で考えられるその他の態様も本発明の範囲内に含まれる。   Although various embodiments and modifications have been described above, the present invention is not limited to these contents. The various embodiments and modified examples described above may be combined or appropriately modified, and other modes conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention.

１ 振動発電素子
１０ａ〜１０ｅ 錘
１２、１２ａ 可動電極部
１２ａ 可動電極部
１０２ 位置決め突起
１０３、１０３ａ、１０３ｂ 樹脂溜め部
１０５ 樹脂
１０５ａ 液状の樹脂
１１０ 櫛歯電極
１１１ 固定電極部
１２０ 櫛歯電極
１２１ 中央帯部
１２３ 位置決め用貫通孔
１６１、１６１ａ、１６１ｂ 帯状部
１６２、１６２ａ、１６２ｂ 平板状部
Ｌ１ 接続部１１４の突起１１４ａを通り振動方向（ｘ軸方向）に平行なライン
Ｌ２〜Ｌ５ 中心線

DESCRIPTION OF SYMBOLS 1 Vibration power generation element 10a-10e Weight 12, 12a Movable electrode part 12a Movable electrode part 102 Positioning protrusions 103, 103a, 103b Resin reservoir part 105 Resin 105a Liquid resin 110 Comb-shaped electrode 111 Fixed electrode part 120 Comb-shaped electrode 121 Central band Part 123 Positioning through holes 161, 161a, 161b Strip-shaped parts 162, 162a, 162b Flat plate part L1 Line passing through the protrusion 114a of the connection part 114 and parallel to the vibration direction (x-axis direction) L2 to L5 center line

可動電極部１２の中央帯部１２１の上面（Ｚ軸正方向側の一面）１２１ａ（図６参照）および下面（Ｚ軸正方向側の一面）１２１ｂ（図６参照）には、それぞれ、位置決め突起１０２が嵌合する位置決め用貫通孔１２３（図７参照）が形成されている。
図６に示されるように、錘１０ａは、一対の位置決め突起１０２を可動電極部１２の中央帯部１２１の位置決め用貫通孔１２３に嵌合した状態で、樹脂溜め部１０３に収容された接着用の樹脂１０５により可動電極部１２の中央帯部１２１に接着される。同様に、錘１０ｂは、一対の位置決め突起１０２を可動電極部１２の中央帯部１２１の位置決め用貫通孔１２３に嵌合した状態で、樹脂溜め部１０３に収容された接着用の樹脂１０５により可動電極部１２の中央帯部１２１に接着される。 Positioning protrusions are provided on the upper surface (one surface on the Z axis positive direction side) 121a (see FIG. 6 ) and the lower surface (one surface on the Z axis positive direction side) 121b (see FIG. 6) of the central band portion 121 of the movable electrode portion 12, respectively. A positioning through hole 123 (see FIG. 7) into which the 102 is fitted is formed.
As shown in FIG. 6, the weight 10 a has a pair of positioning protrusions 102, which are fitted in the positioning through holes 123 of the central band 121 of the movable electrode portion 12 and are accommodated in the resin reservoir 103. The resin 105 adheres to the central band portion 121 of the movable electrode portion 12. Similarly, the weight 10 b is moved by the adhesive resin 105 housed in the resin reservoir 103, with the pair of positioning protrusions 102 fitted in the positioning through holes 123 of the central band 121 of the movable electrode portion 12. It is adhered to the central band portion 121 of the electrode portion 12.

Claims (9)

複数の櫛歯電極を有する固定電極部と、
複数の櫛歯電極を有する可動電極部と、
前記可動電極部に固定される錘と、
前記錘または前記可動電極部に設けられ、前記錘を前記可動電極部に固定する樹脂を収容する樹脂溜め部とを備える振動発電素子。 A fixed electrode portion having a plurality of comb electrodes,
A movable electrode portion having a plurality of comb-teeth electrodes,
A weight fixed to the movable electrode portion,
A vibration power generating element, comprising: a resin reservoir portion that is provided on the weight or the movable electrode portion and that accommodates a resin that fixes the weight to the movable electrode portion. 請求項１に記載の振動発電素子において、
前記樹脂溜め部の中心は、前記錘の重心と前記可動電極部の重心とを通る直線上に設定されている振動発電素子。 The vibration power generation element according to claim 1,
The vibration power generating element, wherein the center of the resin reservoir portion is set on a straight line passing through the center of gravity of the weight and the center of gravity of the movable electrode portion. 請求項１に記載された振動発電素子において、
前記樹脂溜め部に収容される前記樹脂は、前記錘または前記可動電極部の上面に表面張力により盛り上がった状態で前記樹脂溜め部に収容される振動発電素子。 The vibration power generation element according to claim 1,
The vibration power generation element, wherein the resin stored in the resin storage portion is stored in the resin storage portion in a state of being raised by surface tension on the upper surface of the weight or the movable electrode portion. 請求項３に記載の振動発電素子において、
前記樹脂溜め部は、前記錘の前記可動電極部に固定される面側に設けられた凹部である、振動発電素子。 The vibration power generation element according to claim 3,
The vibration power generating element, wherein the resin reservoir is a recess provided on the surface of the weight fixed to the movable electrode portion. 請求項３に記載の振動発電素子において、
前記樹脂溜め部は、前記可動電極部の前記錘が固定される面側に設けられた凹部である、振動発電素子。 The vibration power generation element according to claim 3,
The vibration power generating element is a resin storage part, which is a recess provided on a surface side of the movable electrode part on which the weight is fixed. 請求項１に記載の振動発電素子において、
前記樹脂溜め部は、前記錘を厚さ方向に貫通する貫通孔である、振動発電素子。 The vibration power generation element according to claim 1,
The vibration power generating element, wherein the resin reservoir is a through hole that penetrates the weight in the thickness direction. 請求項１から６までのいずれか一項に記載の振動発電素子において、
前記可動電極部は、前記可動電極部の前記櫛歯電極の配列方向の中心部に、前記櫛歯電極の配列方向と直交する方向に延在された中央帯部を有し、前記錘は、前記中央帯部に沿って延在された帯状部を有し、前記樹脂溜め部は、前記錘の前記櫛歯電極の配列方向と直交する方向の中心に対して対称に設けられている振動発電素子。 The vibration power generation element according to any one of claims 1 to 6,
The movable electrode portion has a central band portion extending in a direction orthogonal to the arrangement direction of the comb-teeth electrodes in the center portion of the movable electrode portion in the arrangement direction of the comb-teeth electrodes, and the weight is Vibration power generation having a strip-shaped portion extending along the central strip portion, and the resin reservoir portion being provided symmetrically with respect to the center of the weight in the direction orthogonal to the arrangement direction of the comb-teeth electrodes. element. 請求項７に記載の振動発電素子において、
前記錘は、前記帯状部に一体的に設けられ、少なくとも前記固定電極部の前記櫛歯電極および固定電極部の前記櫛歯電極の一部を覆う平板状部を有する振動発電素子。 The vibration power generation element according to claim 7,
The vibration power generating element, wherein the weight is integrally provided in the strip-shaped portion and has a flat plate-shaped portion that covers at least a part of the comb-teeth electrode of the fixed electrode portion and the comb-teeth electrode of the fixed electrode portion. 請求項１から８までのいずれか一項に記載の振動発電素子において、
前記錘は、前記可動電極部を構成する材料より大きい比重の材料により形成されている振動発電素子。
The vibration power generation element according to any one of claims 1 to 8,
The vibration power generation element, wherein the weight is made of a material having a specific gravity larger than that of the material forming the movable electrode portion.
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