JP2020059590A - Metal foil heating method - Google Patents

Metal foil heating method Download PDF

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JP2020059590A
JP2020059590A JP2018193146A JP2018193146A JP2020059590A JP 2020059590 A JP2020059590 A JP 2020059590A JP 2018193146 A JP2018193146 A JP 2018193146A JP 2018193146 A JP2018193146 A JP 2018193146A JP 2020059590 A JP2020059590 A JP 2020059590A
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metal foil
tension
roll
width direction
heating
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JP7059886B2 (en
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和孝 橘
Kazutaka Tachibana
和孝 橘
将典 相武
Masanori Aitake
将典 相武
耕太郎 池田
Kotaro Ikeda
耕太郎 池田
勇輔 淺
Yusuke Asa
勇輔 淺
利規 瀬川
Toshinori Segawa
利規 瀬川
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Kobe Steel Ltd
Toyota Motor Corp
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Kobe Steel Ltd
Toyota Motor Corp
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Abstract

To provide a metal foil heating method capable of conveying a metal foil while heating it while suppressing a looseness of the metal foil on one side in a width direction.SOLUTION: There is provide a metal foil heating method for measuring a tension of both ends of a metal foil M in a width direction and adjusting a position of the metal foil in the width direction, while annealing a metal of the metal foil M conveyed between a first roll 12 and a second roll 13, the method including adjusting a widthwise position of the metal foil M, so that the widthwise position of the metal foil M is moved by ΔL to a side where a high tension T1 is measured out of the tensions at both ends ma and mb, based on Equation 1 as follows: ΔL=|T1-T2|/(T1+T2)×L ... (Equation 1), in which a tension at one end ma of the metal foil M for which the tension is measured is T1, a tension at the other end mb is T2, and a width of the metal foil M is L.SELECTED DRAWING: Figure 3

Description

本発明は、複数のロールで帯状の金属箔を搬送しながら、加熱する金属加熱の加熱方法に関する。   TECHNICAL FIELD The present invention relates to a heating method for metal heating, in which a belt-shaped metal foil is heated while being conveyed by a plurality of rolls.

従来から、帯状の金属箔をロールツーロール機構によって搬送しながら、加熱されることがある。この種の加熱方法として、例えば、特許文献１には、ロールツーロール機構において、一対のロール間において、帯状の金属箔を搬送し、一対のロール間において、金属箔を通電することにより、金属箔を抵抗加熱する加熱方法が開示されている。この加熱方法では、弛み検出センサでロール間における弛み量を検出し、弛み量に基づいて、金属箔に印加する張力を調整している。   Conventionally, a belt-shaped metal foil may be heated while being conveyed by a roll-to-roll mechanism. As a heating method of this kind, for example, in Patent Document 1, in a roll-to-roll mechanism, a belt-shaped metal foil is conveyed between a pair of rolls, and a metal foil is energized between the pair of rolls, thereby forming a metal. A heating method for resistance heating a foil is disclosed. In this heating method, the slack detecting sensor detects the amount of slack between the rolls, and the tension applied to the metal foil is adjusted based on the amount of slack.

特開２０１６−１８３４２１号公報JP, 2016-183421, A

しかしながら、金属箔の弛み量は、金属箔の幅方向において、その両端が必ずしも同じではなく、金属箔の幅方向において、一方側のみが弛んでしまった場合には、一方側の弛みのみを修正することは難しい。   However, the slack amount of the metal foil is not necessarily the same at both ends in the width direction of the metal foil, and when only one side is slack in the width direction of the metal foil, only the slack on one side is corrected. Difficult to do.

本発明は、このような点に鑑みてなされたものであり、金属箔の幅方向の一方側の弛みを抑えつつ、金属箔を加熱しながら搬送することができる金属箔の加熱方法を提供することにある。   The present invention has been made in view of the above circumstances, and provides a method for heating a metal foil that can be conveyed while heating the metal foil while suppressing the loosening of the metal foil on one side in the width direction. Especially.

上記課題を解決すべく、本発明に係る金属箔の加熱装置は、第１ロールと第２ロールとを少なくとも含む複数のロールで帯状の金属箔を搬送しながら前記金属箔を加熱する金属箔の加熱方法であって、前記加熱方法は、前記第１ロールと前記第２ロールとの間で搬送される前記金属箔の金属を焼鈍しつつ、前記金属箔の幅方向の両端の張力の計測と、前記金属箔の幅方向の位置の調整と、を行うものであり、前記張力の計測を行った前記金属箔の一端の張力をＴ１、他端の張力をＴ２、前記金属箔の幅をＬとしたときに、以下の式１に基づいて、前記両端の張力のうち、高い張力が計測された側に前記金属箔の幅方向の位置がΔＬ分移動するように、前記金属箔の幅方向の前記位置の調整を行うことを特徴とする。
ΔＬ＝｜Ｔ１−Ｔ２｜／（Ｔ１＋Ｔ２）×Ｌ…（式１） MEANS TO SOLVE THE PROBLEM In order to solve the said subject, the heating apparatus of the metal foil which concerns on this invention is a metal foil which heats the said metal foil, conveying a strip | belt-shaped metal foil with several rolls containing at least a 1st roll and a 2nd roll. A heating method, wherein the heating method anneals the metal of the metal foil conveyed between the first roll and the second roll, and measures the tension at both ends in the width direction of the metal foil. The position of the metal foil in the width direction is adjusted, and the tension at one end of the metal foil whose tension is measured is T1, the tension at the other end is T2, and the width of the metal foil is L. Then, based on Equation 1 below, in the width direction of the metal foil, the width direction position of the metal foil is moved by ΔL to the side where the high tension is measured among the tensions at both ends. Is adjusted.
ΔL = | T1-T2 | / (T1 + T2) × L ... (Equation 1)

本発明によれば、第１ロールと第２ロールとの間で搬送される金属箔を焼鈍する。ここで、搬送中の加熱された金属箔の幅方向の温度分布が均一でない場合、金属箔の幅方向において、温度が高い側の金属箔の部分が、温度が低い側の金属箔の部分よりも伸びて弛むことがある。この結果、金属箔の端部が弛んだ側の張力は、その反対側（これよりも弛んでいない側）の張力よりも低くなる。   According to the present invention, the metal foil conveyed between the first roll and the second roll is annealed. Here, when the temperature distribution in the width direction of the heated metal foil during conveyance is not uniform, in the width direction of the metal foil, the portion of the metal foil on the higher temperature side is more than the portion of the metal foil on the lower temperature side. May stretch and loosen. As a result, the tension on the side where the end of the metal foil is slackened is lower than the tension on the opposite side (the side that is not looser than this).

そこで、本発明では、張力計測を行った金属箔の両端の張力のうち、高い張力が計測された側に、金属箔の幅方向の位置が移動するように、金属箔の幅方向の位置の調整を行う。具体的には、上述した式１に示すように、両端の張力差に応じて、高い張力が計測された側に金属箔の幅方向の位置がΔＬ分移動するように、金属箔の幅方向の位置の調整を行う。   Therefore, in the present invention, of the tensions at both ends of the metal foil subjected to the tension measurement, on the side where the high tension is measured, the widthwise position of the metal foil is moved so that the position in the widthwise direction of the metal foil moves. Make adjustments. Specifically, as shown in Equation 1 above, the width direction of the metal foil is changed by ΔL so that the position in the width direction of the metal foil is moved to the side where the high tension is measured according to the tension difference between both ends. Adjust the position of.

これにより、金属箔の幅方向において、温度が高い側の金属箔の部分を、温度が低い側に移動させることができるので、金属箔の温度分布に起因した伸び差を低減することができる。この結果、金属箔の両端の弛み差を抑えつつ、幅方向の張力をより均一にすることができるため、搬送される金属箔の蛇行を抑えることができる。   Thereby, in the width direction of the metal foil, the portion of the metal foil on the higher temperature side can be moved to the lower temperature side, so that the difference in elongation due to the temperature distribution of the metal foil can be reduced. As a result, the tension in the width direction can be made more uniform while suppressing the difference in slack between the both ends of the metal foil, so that the meandering of the conveyed metal foil can be suppressed.

本実施形態に係る金属箔の加熱装置の模式的断面図である。It is a typical sectional view of the heating device of the metal foil concerning this embodiment. 図１に示す加熱装置による金属箔の加熱方法を説明するためのフロー図である。It is a flowchart for demonstrating the heating method of the metal foil by the heating device shown in FIG. （ａ）〜（ｃ）は、加熱装置における金属箔の挙動を説明するための模式的斜視図である。(A)-(c) is a schematic perspective view for demonstrating the behavior of the metal foil in a heating device.

以下、本実施形態を図１〜図３を参照しながら説明する。   Hereinafter, the present embodiment will be described with reference to FIGS.

１．金属箔Ｍの加熱装置１について
図１に示すように、本実施形態に係る加熱装置１は、第１ロール１２と第２ロール１３とを少なくとも含む複数のロールで帯状の金属箔Ｍを搬送しながら金属箔Ｍを加熱する金属箔の加熱装置である。 1. Heating Device 1 for Metal Foil M As shown in FIG. 1, the heating device 1 according to the present embodiment conveys the strip-shaped metal foil M by a plurality of rolls including at least a first roll 12 and a second roll 13. While it is a metal foil heating device for heating the metal foil M.

金属箔Ｍは、ロールツーロール方式で搬送され、ロール状に巻かれた金属箔Ｍを巻出して、加熱装置１を通過後、ロール状に巻き取ることにより、搬送される。金属箔Ｍは、たとえば、金属製の箔であり、可撓性を有するものであれば特に限定されず、チタン箔等を挙げることができ、その厚みは、１０μｍ〜１０００μｍの範囲にあることが好ましく、より好ましくは、１０μｍ〜２００μｍの範囲にある。なお、加熱装置１を通過する金属箔Ｍの張力は、たとえば、巻き取り時の巻き取り速度等を変更することにより、付与されてもよく、通板技術で一般的に知られた張力調整機構により付与されてもよく、金属箔Ｍへの張力の付与方法は特に限定されるものではない。   The metal foil M is conveyed by a roll-to-roll method, and the metal foil M rolled into a roll is unwound, passed through the heating device 1, and then wound into a roll to be conveyed. The metal foil M is, for example, a metal foil, and is not particularly limited as long as it has flexibility, and examples thereof include a titanium foil, and the thickness thereof is in the range of 10 μm to 1000 μm. Preferably, it is in the range of 10 μm to 200 μm. The tension of the metal foil M passing through the heating device 1 may be applied, for example, by changing the winding speed at the time of winding, and the tension adjusting mechanism generally known in the threading technique. The method of applying tension to the metal foil M is not particularly limited.

加熱装置１は、第１ロール１２と第２ロール１３との間で搬送される金属箔Ｍの金属を焼鈍する焼鈍炉１１を備えている。焼鈍炉１１では、内部に配置された電気ヒータなどの加熱装置（図示せず）により金属箔Ｍが加熱される。   The heating device 1 includes an annealing furnace 11 for annealing the metal of the metal foil M conveyed between the first roll 12 and the second roll 13. In the annealing furnace 11, the metal foil M is heated by a heating device (not shown) such as an electric heater arranged inside.

ここで、たとえば、金属箔Ｍがチタンまたはチタン合金である場合には、焼鈍炉１１で、７００℃以上で加熱される。これにより、金属箔Ｍのチタンまたはチタン合金が焼鈍される。   Here, for example, when the metal foil M is titanium or a titanium alloy, it is heated in the annealing furnace 11 at 700 ° C. or higher. Thereby, the titanium or titanium alloy of the metal foil M is annealed.

加熱装置１は、金属箔Ｍの幅方向の両端の張力の計測を行う張力計測部１４を備えている。具体的には、張力計測部１４は、第１ロール１２の両端に取付けられた一対のロードセルである。ロードセルは、金属箔Ｍの張力により、第１ロール１２に作用する荷重を測定する。したがって、ロードセルの荷重から、金属箔Ｍの幅方向の両端の張力が算出される。   The heating device 1 includes a tension measuring unit 14 that measures the tension at both ends of the metal foil M in the width direction. Specifically, the tension measuring unit 14 is a pair of load cells attached to both ends of the first roll 12. The load cell measures the load acting on the first roll 12 by the tension of the metal foil M. Therefore, the tension on both ends of the metal foil M in the width direction is calculated from the load of the load cell.

また、その他にも、張力計測部１４が、第１ロール１２の表面に配置された圧電素子を備えた圧力計測装置であってもよい。この場合には、第１ロール１２に金属箔Ｍが巻き付いた部分において、圧電素子で金属箔Ｍから作用する面圧を測定し、測定した面圧から金属箔Ｍの幅方向の両端の張力が算出される。   In addition, the tension measuring unit 14 may be a pressure measuring device including a piezoelectric element arranged on the surface of the first roll 12. In this case, at the portion where the metal foil M is wound around the first roll 12, the surface pressure acting from the metal foil M is measured by the piezoelectric element, and the tension at both ends of the metal foil M in the width direction is measured from the measured surface pressure. It is calculated.

加熱装置１は、金属箔Ｍの幅方向の位置の検出を行う位置検出部１５と、金属箔Ｍの幅方向の位置の調整を行う位置調整部１６と、を備えている。位置検出部１５は、一対の電極１５ａ、１５ｂを備えており、この一対の電極１５ａ、１５ｂの間に電位差を付与し、これらの間に電気力線を形成するものであり、一対の電極１５ａ、１５ｂの間に、金属箔Ｍを搬送することにより、電気力線の変化量から、金属箔Ｍの幅方向の両端を検出する。これにより、金属箔Ｍが、幅方向にどの程度ずれているかを算出することができる。   The heating device 1 includes a position detection unit 15 that detects the position of the metal foil M in the width direction, and a position adjustment unit 16 that adjusts the position of the metal foil M in the width direction. The position detection unit 15 is provided with a pair of electrodes 15a and 15b, applies a potential difference between the pair of electrodes 15a and 15b, and forms an electric force line between them. , 15b, the metal foil M is conveyed to detect both ends of the metal foil M in the width direction from the change amount of the lines of electric force. Thus, it is possible to calculate how much the metal foil M is displaced in the width direction.

さらに、位置調整部１６は、ロール本体１６ａと、金属箔Ｍの搬送方向に対して、ロール本体１６ａの回転軸を枢動させる枢動部１６ｂと、を備えている。枢動部１６ｂは、位置検出部１５で検出された金属箔Ｍの幅方向の位置が、目標の位置となるように、ロール本体１６ａを枢動させる。なお、本実施形態では、枢動部１６ｂにより、ロール本体１６ａを枢動させたが、例えば、枢動部１６ｂの代わりに、ロール本体１６ａを回転軸に沿って移動する移動部を設けてもよい。   Further, the position adjusting unit 16 includes a roll main body 16a and a pivoting unit 16b that pivots the rotating shaft of the roll main body 16a in the transport direction of the metal foil M. The pivot part 16b pivots the roll body 16a so that the position in the width direction of the metal foil M detected by the position detection part 15 becomes a target position. In the present embodiment, the roll body 16a is pivoted by the pivot portion 16b, but, for example, a moving portion that moves the roll body 16a along the rotation axis may be provided instead of the pivot portion 16b. Good.

本実施形態では、位置調整部１６は、張力計測部１４で計測した金属箔Ｍの一端ｍａの張力をＴ１、金属箔Ｍの他端ｍｂの張力をＴ２、金属箔Ｍの幅をＬとしたときに、式１に基づいて、金属箔の幅方向の位置を調整する。   In the present embodiment, the position adjusting unit 16 sets the tension of one end ma of the metal foil M measured by the tension measuring unit 14 to T1, the tension of the other end mb of the metal foil M to T2, and the width of the metal foil M to L. At times, the position of the metal foil in the width direction is adjusted based on Expression 1.

ΔＬ＝｜Ｔ１−Ｔ２｜／（Ｔ１＋Ｔ２）×Ｌ…（式１）   ΔL = | T1-T2 | / (T1 + T2) × L ... (Equation 1)

具体的には、位置調整部１６は、両端の張力のうち、高い張力が計測された側に対して、金属箔Ｍの幅方向の位置がΔＬ分移動するように、金属箔Ｍの幅方向の位置の調整を行う。位置調整部１６による位置の調整は、たとえば、張力Ｔ１、Ｔ２の値が異なる場合に行ってもよく、たとえば、｜Ｔ１−Ｔ２｜の値が所定の大きさ以上になった際に行ってもよい。   Specifically, the position adjustment unit 16 moves the width direction of the metal foil M by ΔL so that the position in the width direction of the metal foil M is moved by ΔL with respect to the side where the high tension is measured among the tensions at both ends. Adjust the position of. The position adjustment by the position adjusting unit 16 may be performed, for example, when the values of the tensions T1 and T2 are different, for example, when the value of | T1−T2 | becomes a predetermined value or more. Good.

２．金属箔Ｍの加熱方法について
以下に、図１に示す加熱装置１を用いた金属箔Ｍの加熱方法を説明する。まず、図２に示すように、巻出し工程Ｓ２１では、ロール状に巻かれた金属箔Ｍから、金属箔Ｍが巻出される。 2. Heating Method of Metal Foil M A heating method of the metal foil M using the heating device 1 shown in FIG. 1 will be described below. First, as shown in FIG. 2, in the unwinding step S21, the metal foil M is unwound from the metal foil M wound in a roll.

焼鈍工程Ｓ２２において、巻出された金属箔Ｍを加熱装置１に通過させ、金属箔Ｍを焼鈍する。焼鈍した金属箔Ｍは、図２に示す巻取り工程Ｓ２３で、最終的には、ロール状に巻き取られる。   In the annealing step S22, the unwound metal foil M is passed through the heating device 1 to anneal the metal foil M. The annealed metal foil M is finally wound into a roll in a winding step S23 shown in FIG.

ここで、焼鈍工程Ｓ２２において、第１ロール１２と第２ロール１３との間で搬送される金属箔Ｍの焼鈍炉１１への搬送開始時での金属箔Ｍの両端ｍａ、ｍｂの張力Ｔ１、Ｔ２は、図３(ａ)に示すように略同じである。   Here, in the annealing step S22, the tension T1 of both ends ma and mb of the metal foil M at the time of starting the conveyance of the metal foil M conveyed between the first roll 12 and the second roll 13 to the annealing furnace 11, T2 is substantially the same as shown in FIG.

しかしながら、焼鈍炉１１内の加熱による温度分布のばらつきから、金属箔Ｍの幅方向において、金属箔Ｍの一端ｍａ側の温度に比べて、他端ｍｂ側の温度が高くなることがある。これにより、温度が高い金属箔Ｍの他端ｍｂ側が、温度が低い側の金属箔Ｍの一端ｍａ側よりも伸びて弛むことがある（例えば図３（ｂ）参照）。   However, due to variations in temperature distribution due to heating in the annealing furnace 11, the temperature on the other end mb side may become higher than the temperature on the one end ma side of the metal foil M in the width direction of the metal foil M. As a result, the other end mb side of the metal foil M having a higher temperature may be stretched and loosened than the one end ma side of the metal foil M having a lower temperature (see, for example, FIG. 3B).

この弛みにより、金属箔Ｍの弛んだ他端ｍｂの張力Ｔ２は、一端ｍａの張力Ｔ１よりも低くなり、この状態を継続して金属箔Ｍを搬送すると、金属箔Ｍは、焼鈍炉１１内で蛇行するおそれがある。このような金属箔Ｍの蛇行が発生すると、金属箔Ｍの搬送速度を下げなければならないことがある。   Due to this slack, the tension T2 of the loosened other end mb of the metal foil M becomes lower than the tension T1 of the one end ma, and when the metal foil M is continuously conveyed in this state, the metal foil M is kept inside the annealing furnace 11. There is a risk of meandering. When such a meandering of the metal foil M occurs, it may be necessary to reduce the transport speed of the metal foil M.

そこで、本実施形態では、張力計測部１４で計測した金属箔Ｍの両端ｍａ、ｍｂの張力のうち、高い張力が計測された側に金属箔Ｍの幅方向の位置が移動するように、位置調整部１６で、金属箔Ｍの幅方向の位置の調整を行う。   Therefore, in the present embodiment, of the tensions of the both ends ma and mb of the metal foil M measured by the tension measuring unit 14, the position in the width direction of the metal foil M is moved to the side where the higher tension is measured. The adjusting unit 16 adjusts the position of the metal foil M in the width direction.

たとえば、図３（ｂ）に示す状態の場合には、上述の式１の如く、両端ｍａ、ｍｂの張力差｜Ｔ１−Ｔ２｜に応じて、金属箔Ｍの幅方向の位置が、高い張力Ｔ１が計測された一端ｍａ側に、ΔＬ分移動するように金属箔Ｍの幅方向の位置を調整する（図３（ｃ）参照）。   For example, in the case of the state shown in FIG. 3B, the position of the metal foil M in the width direction has a high tension in accordance with the tension difference | T1-T2 | The position in the width direction of the metal foil M is adjusted so as to move by ΔL toward the end ma side where T1 is measured (see FIG. 3C).

これにより、金属箔Ｍの幅方向において、温度が低い金属箔Ｍの一端ｍａ側に金属箔Ｍが寄せられるため、金属箔Ｍの温度分布に起因した伸び差を低減することができる。この結果、金属箔Ｍの幅方向の張力Ｔ１、Ｔ２をより均一にすることができ、搬送される金属箔Ｍの蛇行を抑えることができ、金属箔Ｍの搬送速度を上げることができる。   Thereby, in the width direction of the metal foil M, the metal foil M is brought close to the one end ma side of the metal foil M having a low temperature, so that the difference in elongation due to the temperature distribution of the metal foil M can be reduced. As a result, the tensions T1 and T2 in the width direction of the metal foil M can be made more uniform, the meandering of the metal foil M to be conveyed can be suppressed, and the conveyance speed of the metal foil M can be increased.

以上、本発明の実施形態について詳述したが、本発明は、前記の実施形態に限定されるものではなく、特許請求の範囲に記載された本発明の精神を逸脱しない範囲で、種々の設計変更を行うことができるものである。   Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various designs can be made without departing from the spirit of the present invention described in the claims. You can make changes.

１：加熱装置、１１：焼鈍炉、１２：第１ロール、１３：第２ロール、１４：張力計測部、１５：位置検出部、１６：位置調整部、Ｍ：金属箔、ｍａ：一端、ｍｂ：他端 1: heating device, 11: annealing furnace, 12: first roll, 13: second roll, 14: tension measuring unit, 15: position detecting unit, 16: position adjusting unit, M: metal foil, ma: one end, mb : The other end

Claims (1)

第１ロールと第２ロールとを少なくとも含む複数のロールで帯状の金属箔を搬送しながら前記金属箔を加熱する金属箔の加熱方法であって、
前記加熱方法は、
前記第１ロールと前記第２ロールとの間で搬送される前記金属箔の金属を焼鈍しつつ、前記金属箔の幅方向の両端の張力の計測と、前記金属箔の幅方向の位置の調整と、を行うものであり、
前記張力の計測を行った前記金属箔の一端の張力をＴ１、他端の張力をＴ２、前記金属箔の幅をＬとしたときに、以下の式１に基づいて、前記両端の張力のうち、高い張力が計測された側に前記金属箔の幅方向の位置がΔＬ分移動するように、前記金属箔の幅方向の前記位置の調整を行うことを特徴とする金属箔の加熱方法。
ΔＬ＝｜Ｔ１−Ｔ２｜／（Ｔ１＋Ｔ２）×Ｌ…（式１） A heating method of a metal foil, comprising heating a metal foil while transporting a strip-shaped metal foil with a plurality of rolls including at least a first roll and a second roll,
The heating method is
While annealing the metal of the metal foil conveyed between the first roll and the second roll, measuring the tension at both ends in the width direction of the metal foil and adjusting the position in the width direction of the metal foil. And,
When the tension at one end of the metal foil on which the tension is measured is T1, the tension at the other end is T2, and the width of the metal foil is L, based on the following formula 1, A method for heating a metal foil, wherein the position in the width direction of the metal foil is adjusted so that the position in the width direction of the metal foil moves by ΔL to the side where high tension is measured.
ΔL = | T1-T2 | / (T1 + T2) × L ... (Equation 1)
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Citations (7)

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JPS6311624A (en) * 1986-07-02 1988-01-19 Kawasaki Steel Corp Horizontal type atmosphere annealing furnace
JPH0361248A (en) * 1989-07-31 1991-03-18 Toshiba Chem Corp Left and right tension compensating apparatus for long-length film
JP2003100286A (en) * 2001-09-19 2003-04-04 Toyota Motor Corp Method and apparatus for manufacturing strip electrode
JP2005206262A (en) * 2004-01-20 2005-08-04 Sumitomo Bakelite Co Ltd Tension controlling method and carrying device for sheet-shaped article
JP2011020145A (en) * 2009-07-15 2011-02-03 Kobe Steel Ltd Device and method for controlling metal strip passing position
JP2017056421A (en) * 2015-09-18 2017-03-23 株式会社Ｓｃｒｅｅｎホールディングス Coating apparatus and coating method
JP2018023954A (en) * 2016-08-12 2018-02-15 株式会社テクノスマート Coating device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311624A (en) * 1986-07-02 1988-01-19 Kawasaki Steel Corp Horizontal type atmosphere annealing furnace
JPH0361248A (en) * 1989-07-31 1991-03-18 Toshiba Chem Corp Left and right tension compensating apparatus for long-length film
JP2003100286A (en) * 2001-09-19 2003-04-04 Toyota Motor Corp Method and apparatus for manufacturing strip electrode
JP2005206262A (en) * 2004-01-20 2005-08-04 Sumitomo Bakelite Co Ltd Tension controlling method and carrying device for sheet-shaped article
JP2011020145A (en) * 2009-07-15 2011-02-03 Kobe Steel Ltd Device and method for controlling metal strip passing position
JP2017056421A (en) * 2015-09-18 2017-03-23 株式会社Ｓｃｒｅｅｎホールディングス Coating apparatus and coating method
JP2018023954A (en) * 2016-08-12 2018-02-15 株式会社テクノスマート Coating device

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