JP2020057914A - Pedestal for vibration element, vibration element, and vibrator - Google Patents

Pedestal for vibration element, vibration element, and vibrator Download PDF

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JP2020057914A
JP2020057914A JP2018186754A JP2018186754A JP2020057914A JP 2020057914 A JP2020057914 A JP 2020057914A JP 2018186754 A JP2018186754 A JP 2018186754A JP 2018186754 A JP2018186754 A JP 2018186754A JP 2020057914 A JP2020057914 A JP 2020057914A
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pedestal
thickness
connecting portion
mounting portion
package
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俊一 若松
Shunichi Wakamatsu
俊一 若松
石川　貴之
Takayuki Ishikawa
貴之 石川
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Abstract

To provide a pedestal for a vibrating element, the vibrating element, a vibrator, capable of improving vibration resistance while suppressing an influence of external vibration to improve the vibration resistance and improve phase noise characteristics.SOLUTION: A pedestal includes: a mounting unit 11 for mounting a crystal piece 2; two connection units 14, being provided in parallel with each of two long sides of the mounting unit 11 facing each other, connected to electrodes formed in a package 3; and a coupling unit 13 for connecting the mounting unit 11 and the connection units 14. The pedestal has the coupling unit 13 and the connection units 14 having a thickness thinner than a thickness of the mounting unit 11. The vibrating element and the vibrator use the pedestal.SELECTED DRAWING: Figure 4

Description

本発明は、振動素子を搭載する台座に係り、特に、外部からの振動への耐性を向上させ、位相雑音特性を良好にできる振動素子用の台座、振動子及び発振器に関する。   The present invention relates to a pedestal on which a vibrating element is mounted, and more particularly, to a pedestal, a vibrator, and an oscillator for a vibrating element capable of improving resistance to external vibration and improving phase noise characteristics.

［従来の技術］
従来の水晶振動子では、パッケージ及びパッケージ外部からの水晶片に与える影響を抑制する構成として、主に水晶から成る台座（水晶台座）を用いる構成が知られている。
また、パッケージを表裏に凹部が形成されたＨ構造とし、表側に水晶片と水晶台座を搭載し、裏面に発振回路のＩＣ（Integrated Circuit）を搭載した水晶発振器がある。
パッケージの表面又は裏面に温度補償回路を設けた温度補償型水晶発振器（ＴＣＸＯ：Temperature Compensated Crystal Oscillator）がある。 [Conventional technology]
2. Description of the Related Art In a conventional crystal resonator, a configuration using a pedestal (quartz pedestal) mainly made of crystal is known as a configuration for suppressing the influence on a package and a crystal piece from outside the package.
There is also a crystal oscillator in which a package has an H structure in which a concave portion is formed on the front and back sides, a crystal piece and a crystal pedestal are mounted on the front side, and an IC (Integrated Circuit) of an oscillation circuit is mounted on the back side.
There is a temperature compensated crystal oscillator (TCXO: Temperature Compensated Crystal Oscillator) provided with a temperature compensation circuit on the front surface or the back surface of the package.

［関連技術］
尚、関連する先行技術として、特許第３０１７７５０号公報「水晶振動子」（特許文献１）、特許第４７１５２５２号公報「圧電振動子」（特許文献２）、特開２０１３−０９８６７８号公報「水晶振動子」（特許文献３）がある。 [Related technology]
As related prior arts, Japanese Patent No. 3017750, “Crystal Resonator” (Patent Document 1), Japanese Patent No. 4,715,252, “Piezoelectric Vibrator” (Patent Document 2), and Japanese Patent Application Laid-Open No. 2013-098678 “Quartz Crystal Vibration” (Patent Document 3).

特許文献１には、保持用水晶板に振動用水晶片を搭載する位置に凹部を形成し、その凹部によって形成される隙間で振動用水晶片を確実に励振させ、励振用水晶片の長手方向での熱によるストレスを発生させない水晶振動子が示されている。   In Patent Document 1, a concave portion is formed at a position where a vibrating crystal blank is mounted on a holding quartz plate, and the vibrating crystal blank is reliably excited in a gap formed by the concave portion, and heat generated in the longitudinal direction of the excitation quartz blank. 1 shows a crystal resonator that does not generate stress due to the above.

特許文献２には、基板における熱膨張の影響を小さくするために、隙間を有するスプリング部を備える圧電振動子が示されている。
特許文献３には、温度変化に伴う水晶片の変形を防ぎ、良好な周波数温度特性が得られる構成の水晶振動子が示されている。 Patent Literature 2 discloses a piezoelectric vibrator including a spring portion having a gap in order to reduce the influence of thermal expansion on a substrate.
Patent Literature 3 discloses a crystal resonator configured to prevent deformation of a crystal piece due to a temperature change and obtain good frequency-temperature characteristics.

特許第３０１７７５０号公報Japanese Patent No. 3017750 特許第４７１５２５２号公報Japanese Patent No. 4715252 特開２０１３−０９８６７８号公報JP 2013-098678 A

しかしながら、従来の水晶振動子又は水晶発振器における水晶台座では、外部からの振動が水晶片に影響してしまい、その振動によって位相雑音特性が劣化するという問題点があった。   However, in the case of a conventional quartz crystal oscillator or crystal pedestal in a crystal oscillator, there is a problem that external vibrations affect the crystal blank, and the vibrations deteriorate the phase noise characteristic.

尚、特許文献１〜３には、セラミック等の基板と接触する電極部分の厚みを厚くし、水晶片を搭載する搭載部を薄くして基板から浮かせ、電極部分と搭載部を接続する部分を更に薄くして、外部からの振動への耐振動特性を向上させる構成の記載がない。   In addition, in Patent Documents 1 to 3, the thickness of an electrode portion that comes into contact with a substrate such as a ceramic is increased, the mounting portion for mounting a crystal blank is thinned, and the portion for connecting the electrode portion and the mounting portion is lifted off the substrate. There is no description of a configuration for further reducing the thickness and improving the vibration resistance to external vibrations.

本発明は上記実情に鑑みて為されたもので、外部からの振動の影響を抑えて耐振動特性を向上させ、位相雑音特性を良好にできると共に、衝撃への耐性を向上させることができる振動素子用の台座、振動子及び発振器を提供することを目的とする。   SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and improves vibration resistance characteristics by suppressing the influence of external vibrations, improves phase noise characteristics, and improves vibration resistance. It is an object to provide a pedestal, a vibrator, and an oscillator for an element.

上記従来例の問題点を解決するための本発明は、振動素子を搭載する振動素子用の台座であって、振動素子が搭載される搭載部と、搭載部において対向する二辺の各々に平行に設けられ、パッケージ内に形成された電極に接続する２つの接続部と、搭載部と接続部とを連結する連結部とを備え、当該連結部が、複数の部材により構成され、当該部材の厚みは、搭載部の厚みより薄くしたことを特徴とする。   The present invention for solving the problems of the conventional example is a pedestal for a vibration element on which a vibration element is mounted, and a mounting portion on which the vibration element is mounted, and a mounting portion parallel to each of two opposite sides in the mounting portion. And two connecting portions for connecting to the electrodes formed in the package, and a connecting portion for connecting the mounting portion and the connecting portion. The connecting portion is constituted by a plurality of members, and The thickness is thinner than the thickness of the mounting portion.

本発明は、上記台座において、接続部の厚みを、連結部の厚みと同じにしたことを特徴とする。   The present invention is characterized in that, in the pedestal, the thickness of the connecting portion is the same as the thickness of the connecting portion.

本発明は、上記台座において、接続部の厚みを、搭載部の厚みより厚くしたことを特徴とする。   The present invention is characterized in that, in the pedestal, the thickness of the connecting portion is larger than the thickness of the mounting portion.

本発明は、上記台座において、連結部が、搭載部の長辺に直交して接続することを特徴とする。   The present invention is characterized in that, in the pedestal, the connecting portion is connected orthogonally to a long side of the mounting portion.

本発明は、振動子において、上記台座に振動素子を搭載し、パッケージ表面凹部に設置したことを特徴とする。   According to the present invention, in the vibrator, a vibrating element is mounted on the pedestal and installed in a concave portion on a package surface.

本発明は、発振器において、上記台座に振動素子を搭載し、パッケージ表面凹部に設置し、前記パッケージの裏面凹部に発振回路を搭載したことを特徴とする。   The present invention is characterized in that, in the oscillator, a vibration element is mounted on the pedestal, installed in a concave portion on the surface of the package, and an oscillation circuit is mounted on a concave portion on the back surface of the package.

本発明によれば、振動素子が搭載される搭載部と、搭載部において対向する二辺の各々に平行に設けられ、パッケージ内に形成された電極に接続する２つの接続部と、搭載部と接続部とを連結する連結部とを備え、当該連結部が、複数の部材により構成され、当該部材の厚みは、搭載部の厚みより薄くした振動素子用の台座としているので、外部からの振動が接続部に伝達されたとしても、連結部で吸収して搭載部への影響を小さくできる効果がある。   According to the present invention, a mounting portion on which a vibration element is mounted, two connection portions provided in parallel with each of two opposing sides in the mounting portion, and connected to electrodes formed in the package; A connecting portion for connecting the connecting portion and the connecting portion, wherein the connecting portion is constituted by a plurality of members, and the thickness of the member is a pedestal for the vibration element which is thinner than the thickness of the mounting portion. Even if is transmitted to the connection part, there is an effect that the influence on the mounting part can be reduced by being absorbed by the connection part.

第１の台座の平面図である。It is a top view of a 1st pedestal. 第１の台座の側面図である。It is a side view of a 1st pedestal. 第１の台座の底面図である。It is a bottom view of a 1st pedestal. 第１の台座と水晶片の概略図である。It is the schematic of a 1st pedestal and a crystal piece. 第２の台座の側面図である。It is a side view of a 2nd pedestal. 第２の台座と水晶片の概略図である。It is the schematic of a 2nd pedestal and a crystal piece.

本発明の実施の形態について図面を参照しながら説明する。
［実施の形態の概要］
本発明の実施の形態に係る台座（本台座）は、水晶片等の振動素子を搭載する搭載部と、搭載部の対向する二辺の各々に平行に設けられ、パッケージ内に形成された電極に接続する２つの接続部と、搭載部と接続部とを連結する連結部とを備え、当該連結部が、複数の部材により構成され、当該部材の厚みは、搭載部の厚みより薄くしたものであり、これにより、外部からの振動が接続部に伝達されたとしても、連結部で吸収して搭載部への影響を小さくし、位相雑音特性を良好にできるものである。 An embodiment of the present invention will be described with reference to the drawings.
[Summary of Embodiment]
A pedestal (main pedestal) according to an embodiment of the present invention is provided with a mounting portion for mounting a vibrating element such as a crystal blank and an electrode provided in a package parallel to each of two opposite sides of the mounting portion. And a connecting portion for connecting the mounting portion and the connecting portion, wherein the connecting portion is composed of a plurality of members, and the thickness of the member is smaller than the thickness of the mounting portion. Accordingly, even if vibrations from the outside are transmitted to the connecting portion, the vibration is absorbed by the connecting portion and the influence on the mounting portion is reduced, so that the phase noise characteristic can be improved.

また、本発明の実施の形態に係る振動子は（本振動子）は、本台座に振動素子を搭載し、凹部を有するパッケージに台座を設置したものである。
また、本発明の実施の形態に係る発振器（本発振器）は、本振動子のパッケージの裏面凹部に発振回路を搭載したものである。 A vibrator according to an embodiment of the present invention (a main vibrator) is one in which a vibrating element is mounted on a main pedestal and the pedestal is installed in a package having a concave portion.
An oscillator according to an embodiment of the present invention (present oscillator) has an oscillator circuit mounted on a concave portion on the back surface of a package of the present oscillator.

尚、本台座には、第１の台座と第２の台座があり、接続部の厚さが薄いもの（第１の台座）と厚いもの（第２の台座）とがある。以下、それぞれについて説明する。   The pedestal includes a first pedestal and a second pedestal, and there are a pedestal having a thin connection portion (a first pedestal) and a thick connection portion (a second pedestal). Hereinafter, each will be described.

［第１の台座：図１］
次に、本発明の実施の形態に係る第１の台座（第１の台座）について図１〜４を参照しながら説明する。図１は、第１の台座の平面図であり、図２は、第１の台座の側面図であり、図３は、第１の台座の底面図であり、図４は、第１の台座と水晶片の概略図である。
第１の台座の本体１は、図１に示すように、搭載部１１と、連結部１３と、接続部１４とから基本的に構成され、搭載部１１と接続部１４とを連結部１３で連結している。 [First pedestal: Fig. 1]
Next, a first pedestal (first pedestal) according to the embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a plan view of the first pedestal, FIG. 2 is a side view of the first pedestal, FIG. 3 is a bottom view of the first pedestal, and FIG. FIG.
As shown in FIG. 1, the main body 1 of the first pedestal is basically composed of a mounting part 11, a connecting part 13, and a connecting part 14, and the mounting part 11 and the connecting part 14 are connected by the connecting part 13. Connected.

第１の台座は、例えば、耐熱プラスチック等の樹脂、ガラス、絶縁膜が表面にコーティングされた金属等の絶縁材料で形成される。
また、台座１は、水晶片２と同様の水晶（水晶片２と同じＡＴカットやＺ板）により形成してもよい。その場合、台座１と水晶片２の熱膨張係数は略等しく、温度変化に伴う応力は発生しないものである。
後述する第２の台座でも同様の材料を用いるものとする。 The first pedestal is formed of, for example, an insulating material such as a resin such as a heat-resistant plastic, glass, or a metal whose surface is coated with an insulating film.
The pedestal 1 may be formed of the same crystal as the crystal blank 2 (the same AT cut or Z plate as the crystal blank 2). In this case, the thermal expansion coefficients of the pedestal 1 and the crystal blank 2 are substantially equal, and no stress occurs due to a temperature change.
The same material is used for a second pedestal to be described later.

搭載部１１は、長方形の形状で、水晶片２の振動素子が四隅の４箇所で導電性接着剤４にて搭載されている。
搭載部１１の２つの長辺に平行に２つの接続部１４が左右に形成され、それぞれの接続部１４と搭載部１１とを２本の連結部１３で連結している。 The mounting portion 11 has a rectangular shape, and the vibrating elements of the crystal blank 2 are mounted on the four corners at four locations with the conductive adhesive 4.
Two connecting portions 14 are formed on the left and right parallel to the two long sides of the mounting portion 11, and each connecting portion 14 and the mounting portion 11 are connected by two connecting portions 13.

つまり、搭載部１１の長辺と接続部１４の長辺が、それらの長辺に直交する方向に２つの連結部１３によって接続され、それにより、方形の隙間部１０ｃ，１０ｄが形成される。隙間部１０ｃ，１０ｄは、台座本体の表裏を貫通している。
尚、第１の台座では、搭載部１１の長辺に連結部１３と接続部１４を形成する構成としたが、搭載部１１の短辺に連結部１３と接続部１４を形成した構成としてもよい。 That is, the long side of the mounting portion 11 and the long side of the connection portion 14 are connected by the two connecting portions 13 in a direction orthogonal to the long sides, thereby forming rectangular gaps 10c and 10d. The gaps 10c, 10d penetrate the front and back of the base body.
In the first pedestal, the connecting portion 13 and the connecting portion 14 are formed on the long side of the mounting portion 11, but the connecting portion 13 and the connecting portion 14 may be formed on the short side of the mounting portion 11. Good.

そして、図２に示すように、搭載部１１の厚みに対して、連結部１３と接続部１４の厚みが薄く、連結部１３と接続部１４は同じ厚みとなっている。
連結部１３の厚みが、搭載部１１の厚みより薄くなっていることで、外部からの振動を連結部１３が吸収するものとなっている。特に、図１の上下方向の振動を吸収し易い。
第１の台座の本体１は、一つの素材をエッチング等で削って一体に形成している。 Then, as shown in FIG. 2, the thickness of the connecting portion 13 and the connecting portion 14 is smaller than the thickness of the mounting portion 11, and the connecting portion 13 and the connecting portion 14 have the same thickness.
Since the thickness of the connecting portion 13 is smaller than the thickness of the mounting portion 11, the connecting portion 13 absorbs external vibration. In particular, it is easy to absorb the vertical vibration in FIG.
The main body 1 of the first pedestal is formed integrally by shaving one material by etching or the like.

また、搭載部１１には対角に水晶片２の励振電極に接続する電極パターン１０ａ，１０ｂが形成されている。電極パターン１０ａ，１０ｂは、金等の薄膜で形成される。
電極パターン１０ａは、図１の左下側から左の連結部１３を介して左の接続部１４まで形成され、連結部１３の側面及び底面、接続部１４の側面及び底面の一部にも電極パターンが形成されている。
図２では、連結部１３の側面に金属パターンが形成され、図３では、連結部１３の底面と接続部１４の底面に電極パターンが形成されていることが示されている。 Further, electrode patterns 10a and 10b connected diagonally to the excitation electrodes of the crystal blank 2 are formed on the mounting portion 11. The electrode patterns 10a and 10b are formed of a thin film such as gold.
The electrode pattern 10a is formed from the lower left side of FIG. 1 to the left connecting portion 14 via the left connecting portion 13, and the side and bottom surfaces of the connecting portion 13 and part of the side and bottom surfaces of the connecting portion 14 are also provided with the electrode patterns 10a. Are formed.
FIG. 2 shows that a metal pattern is formed on the side surface of the connection portion 13, and FIG. 3 shows that an electrode pattern is formed on the bottom surface of the connection portion 13 and the bottom surface of the connection portion 14.

電極パターン１０ｂは、図１の右上側から右の連結部１３を介して右の接続部１４まで形成され、図２、図３に示すように、連結部１３の側面及び底面、接続部１４の側面及び底面の一部にも電極パターンが形成されている。
接続部１４の底面の電極パターン１０ａ，１０ｂがパッケージ３に形成された電極に接続するようになっている。 The electrode pattern 10b is formed from the upper right side of FIG. 1 to the right connecting portion 14 via the right connecting portion 13, and as shown in FIGS. An electrode pattern is also formed on a part of the side surface and the bottom surface.
The electrode patterns 10 a and 10 b on the bottom surface of the connection portion 14 are connected to the electrodes formed on the package 3.

水晶片２の表面及び裏面には、励振電極が形成され、台座１の表面に形成された電極パターンに導電性接着剤で接続される。
尚、ここでは、台座に搭載される振動素子として、ＡＴカットの水晶片２からなる水晶共振子を用いたが、例えば、表面弾性波（ＳＡＷ：Surface Acoustic Wave）共振子、その他の圧電振動子等の発振素子（振動素子）を用いてもよい。 Excitation electrodes are formed on the front and back surfaces of the crystal blank 2, and are connected to an electrode pattern formed on the surface of the pedestal 1 with a conductive adhesive.
Here, a quartz resonator composed of an AT-cut quartz piece 2 is used as the vibrating element mounted on the pedestal. For example, a surface acoustic wave (SAW: Surface Acoustic Wave) resonator and other piezoelectric vibrators are used. Oscillation elements (oscillation elements) such as these may be used.

パッケージ３は、図２に示すように、内側の凹部が２段階となっており、パッケージ３の内側に底面より高い中間の段が形成されており、その中間の段に、第１の台座の接続部１４が搭載される。中間の段には電極パターンが形成され、パッケージ３の底辺又は裏面に設置される基板の回路に接続している。
ここで、中間の段の高さは、搭載部１１の厚みより大きくして、搭載部１１がパッケージ３の底面に接触しないようにする。
また、中間の段は、接続部１４の底面が接触する部分に少なくとも形成されていれば足りる。 As shown in FIG. 2, the package 3 has an inner concave portion having two stages, and an intermediate step higher than the bottom surface is formed inside the package 3. The connection unit 14 is mounted. An electrode pattern is formed in the middle stage, and is connected to a circuit on a substrate provided on the bottom or back surface of the package 3.
Here, the height of the middle step is larger than the thickness of the mounting portion 11 so that the mounting portion 11 does not contact the bottom surface of the package 3.
Further, it is sufficient that the intermediate step is formed at least in a portion where the bottom surface of the connection portion 14 contacts.

また、第１の台座を用いた本発振器は、発振回路（ＩＣ）がパッケージ３の裏面凹部に収納され、その凹部の底面（基板）に搭載される。
尚、当該ＩＣ以外の温度補償回路をパッケージ３の表面基板又は裏面基板に設けてもよい。温度補償回路を備えると、温度補償型水晶発振器（ＴＣＸＯ）となる。
また、発振回路と温度補償回路を一つのＩＣに収容してもよい。 In the present oscillator using the first pedestal, the oscillation circuit (IC) is housed in the concave portion on the back surface of the package 3 and mounted on the bottom surface (substrate) of the concave portion.
Note that a temperature compensation circuit other than the IC may be provided on the front substrate or the rear substrate of the package 3. When a temperature compensation circuit is provided, a temperature compensated crystal oscillator (TCXO) is obtained.
Further, the oscillation circuit and the temperature compensation circuit may be housed in one IC.

［第２の台座：図５，６］
次に、本発明の実施の形態に係る第２の台座（第２の台座）について図５，６を参照しながら説明する。図５は、第２の台座の側面図であり、図６は、第２の台座と水晶片の概略図である。
第２の台座は、図５，６に示すように、接続部１４´の縦方向の厚みが、搭載部１１の厚みより大きくなるよう形成されている。その他の構成は、第１の台座と同様である。 [Second pedestal: Figs. 5 and 6]
Next, a second pedestal (second pedestal) according to the embodiment of the present invention will be described with reference to FIGS. FIG. 5 is a side view of the second pedestal, and FIG. 6 is a schematic view of the second pedestal and the crystal piece.
As shown in FIGS. 5 and 6, the second pedestal is formed such that the thickness of the connecting portion 14 ′ in the vertical direction is larger than the thickness of the mounting portion 11. Other configurations are the same as those of the first pedestal.

第２の台座であれば、パッケージ３´は、２段形状とする必要はなく、１つの凹形状の凹部の底面に水晶片２を搭載した第２の台座を配置することになる。
厚くなった接続部１４´の底面にも金属パターンが形成され、凹部底面に設けた基板の電極と接続する。 In the case of the second pedestal, the package 3 'does not need to have a two-stage shape, and the second pedestal on which the crystal blank 2 is mounted is disposed on the bottom surface of one concave recess.
A metal pattern is also formed on the bottom surface of the thickened connection portion 14 ', and is connected to an electrode of a substrate provided on the bottom surface of the concave portion.

第２の台座によれば、外部からの振動が接続部１４´から伝わっても、厚みが薄くて細い連結部１３が振動を吸収して厚みがある搭載部１１に伝達しないものである。この効果は、第１の台座と同様である。   According to the second pedestal, even when external vibrations are transmitted from the connecting portion 14 ', the thin and thin connecting portion 13 absorbs the vibration and does not transmit it to the thick mounting portion 11. This effect is similar to that of the first pedestal.

［実施の形態の効果］
第１の台座及び第２の台座によれば、水晶片２を搭載する搭載部１１と、搭載部１１の対向する２つの長辺の各々に平行に設けられ、パッケージ３，３´内に形成された電極に接続する２つの接続部１４，１４´と、搭載部１１と接続部１４，１４´とを連結する連結部１３とを備え、その連結部１３の厚みは、搭載部１１の厚みより薄くしたものとしているので、これにより、外部からの振動が接続部１４，１４´に伝達されたとしても、連結部１３で吸収して搭載部への影響を小さくし、位相雑音特性を良好にできる効果がある。 [Effects of Embodiment]
According to the first pedestal and the second pedestal, the mounting portion 11 on which the crystal blank 2 is mounted and the two long sides of the mounting portion 11 facing each other are provided in parallel with each other and formed in the packages 3 and 3 ′. And two connecting portions 14 and 14 ′ for connecting the connected electrodes, and a connecting portion 13 for connecting the mounting portion 11 and the connecting portions 14 and 14 ′. The thickness of the connecting portion 13 is the thickness of the mounting portion 11. As a result, even if external vibrations are transmitted to the connection portions 14 and 14 ', the vibrations are absorbed by the connection portion 13 and the influence on the mounting portion is reduced, thereby improving the phase noise characteristics. There is an effect that can be.

本発明は、外部からの振動の影響を抑えて耐振性を向上させ、位相雑音特性を良好にできると共に、衝撃への耐性を向上させることができる振動素子用の台座、振動子及び発振器に好適である。   INDUSTRIAL APPLICABILITY The present invention is suitable for a pedestal, a vibrator, and an oscillator for a vibrating element capable of improving the vibration resistance by suppressing the influence of external vibration, improving the phase noise characteristic, and improving the resistance to impact. It is.

１…台座の本体、 ２…水晶片、 ３，３´…パッケージ、 ４…導電性接着剤、 １０ａ，１０ｂ…電極パターン、 １０ｃ．１０ｄ…隙間部、 １１…搭載部、 １３…連結部、 １４，１４´…接続部   1 ... Main body of pedestal, 2 ... crystal piece, 3,3 '... package, 4 ... conductive adhesive, 10a, 10b ... electrode pattern, 10c. 10d: gap portion, 11: mounting portion, 13: connecting portion, 14, 14 ': connecting portion

Claims (6)

振動素子を搭載する振動素子用の台座であって、
振動素子が搭載される搭載部と、
前記搭載部において対向する二辺の各々に平行に設けられ、パッケージ内に形成された電極に接続する２つの接続部と、
前記搭載部と前記接続部とを連結する連結部とを備え、
当該連結部は、複数の部材により構成され、当該部材の厚みは、前記搭載部の厚みより薄くしたことを特徴とする台座。 A pedestal for a vibration element on which the vibration element is mounted,
A mounting section on which the vibration element is mounted,
Two connection portions provided in parallel to each of two opposing sides in the mounting portion and connected to electrodes formed in the package;
A connection unit that connects the mounting unit and the connection unit,
The pedestal, wherein the connecting portion is constituted by a plurality of members, and a thickness of the member is smaller than a thickness of the mounting portion. 接続部の厚みを、連結部の厚みと同じにしたことを特徴とする請求項１記載の台座。   2. The pedestal according to claim 1, wherein the thickness of the connecting portion is the same as the thickness of the connecting portion. 接続部の厚みを、搭載部の厚みより厚くしたことを特徴とする請求項１記載の台座。   2. The pedestal according to claim 1, wherein the thickness of the connecting portion is greater than the thickness of the mounting portion. 連結部は、搭載部の長辺に直交して接続することを特徴とする請求項１乃至３のいずれか記載の台座。   The pedestal according to any one of claims 1 to 3, wherein the connecting portion is connected orthogonally to a long side of the mounting portion. 請求項１乃至４のいずれか記載の台座に振動素子を搭載し、パッケージ表面凹部に設置したことを特徴とする振動子。   A vibrator comprising: a vibrating element mounted on the pedestal according to claim 1; 請求項１乃至４のいずれか記載の台座に振動素子を搭載し、パッケージ表面凹部に設置し、前記パッケージの裏面凹部に発振回路を搭載したことを特徴とする発振器。   An oscillator, comprising: a vibration element mounted on the pedestal according to any one of claims 1 to 4; a vibration element mounted on a concave part on the surface of the package; and an oscillation circuit mounted on a concave part on the back surface of the package.
JP2018186754A 2018-10-01 2018-10-01 Pedestal for vibration element, vibration element, and vibrator Pending JP2020057914A (en)

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